JP2009169184A - Revolver device and microscope having revolver device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a revolver device that prevents wear of a biasing means and less likely to cause deterioration in positioning precision of objective lenses, and to provide a microscope that has the revolver device. <P>SOLUTION: A revolver body 20 of the revolver device 10 includes: a steel ball 23 that engages with a click groove 36; and a leaf spring 21 that biases the steel ball 23 to the click groove 36. The click groove 36 is formed at the periphery part of a revolver rotation member 30 which is rotatable with respect to the revolver body 20 and to which a plurality of objective lenses are attachable. The material of the revolver rotation member 30 is aluminum or aluminum alloy, and a lubricative coating film is formed on the surface of the periphery part including the click groove 36. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a revolver device and a microscope including the revolver device.

  In general, a microscope includes a revolver device including a revolver body attached to an arm and a revolver rotation member rotatably attached to the revolver body. A plurality of objective lenses having different normal magnifications are mounted on the revolver rotating member.

  Some portions of the revolver rotating member located immediately above the objective lens are provided with a slot so that a Nomarski prism for differential interference observation can be mounted. However, if the slot is provided, the revolver rotating member becomes thicker. In order to become heavy, the revolver body is made lighter by using aluminum.

  The revolver device includes a click mechanism as a positioning mechanism for accurately positioning each objective lens on the optical axis of the observation optical system. The click mechanism is formed on a steel ball corresponding to the number of objective lenses mounted on the revolver rotating member and a leaf spring provided on the revolver body, and engages with the steel ball according to the rotation of the revolver rotating member. Click groove.

When the revolver rotating member is rotated, the steel ball engages with the click groove corresponding to each objective lens, so that the selected objective lens is accurately positioned on the optical axis of the observation optical system.
JP 2001-91835 A

  However, in the above click mechanism, the leaf spring must ensure springiness, and is formed of a material softer than the steel ball, so that the leaf spring is easily worn. Therefore, there has been a problem that the positioning accuracy of the objective lens tends to deteriorate.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a revolver device in which the positioning accuracy of the objective lens is hardly deteriorated and a microscope including the revolver device.

In order to solve the above-mentioned problems, the invention described in claim 1 includes a revolver body having a mounting portion for a microscope body, a revolver rotating member that is rotatable with respect to the revolver body and that can be mounted with a plurality of optical elements A positioning groove formed in a peripheral portion of the revolver rotating member, an engaging member provided in the revolver main body to be engaged with the positioning groove, and a biasing means for biasing the engaging member to the positioning groove. And
The revolver rotating member is a revolver device having a base material made of aluminum or an aluminum alloy and a lubricating metal formed on the surface of the base material.

  According to a second aspect of the present invention, in the revolver device according to the first aspect, the lubricating metal is silicon (Si), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt ( It is at least one selected from the group consisting of Co), nickel (Ni), copper (Cu), zinc (Zn), tin (Sn), molybdenum (Mo) tungsten (W).

  According to a third aspect of the present invention, in the revolver device according to the first or second aspect, the lubricating metal is bonded by forming an intermetallic compound with the base material.

  According to a fourth aspect of the present invention, there is provided a microscope including the revolver device according to any one of the first to third aspects.

  According to this invention, the positioning accuracy of the objective lens is unlikely to deteriorate.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a side view of a microscope provided with a revolver device according to an embodiment of the present invention.

  The microscope MS includes an arm 1, a lens barrel 3 having an eyepiece 2 attached to the upper part of the arm 1, a revolver device 10 attached to the lower surface of the arm 1 and having a plurality of objective lenses (optical elements) 4, A support portion 5 that supports the arm 1 and a stage 6 that moves up and down are provided.

  The revolver device 10 can be attached to and detached from the lower surface of the arm 1.

  2 is a cross-sectional view of a revolver device according to an embodiment of the present invention, and FIG. 3 is a view taken in the direction of arrow A in FIG.

  The revolver device 10 includes a revolver body 20 and a revolver rotating member 30.

  A base end portion of a substantially triangular leaf spring (biasing means) 21 constituting a part of the click mechanism is attached to the revolver body 20 with two screws 22 (see FIG. 3). A steel ball (engaging member) 23 is supported at the tip of the leaf spring 21. The objective lens 4 is positioned by dropping the steel ball 23 into one of the plurality of click grooves (positioning grooves) 36 by the urging force of the leaf spring 21.

  The revolver rotating member 30 has a base material made of aluminum or an aluminum alloy and a lubricating metal formed on the surface of the base material. The revolver rotating member 30 has a click on the upper surface of the peripheral portion 39. Grooves 36 are formed at equal intervals in the circumferential direction.

  The lubricating metal is silicon (Si), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn). And at least one selected from the group consisting of tin (Sn), molybdenum (Mo) and tungsten (W).

  Moreover, the said lubricous metal is couple | bonded by the intermetallic compound formation with the said base material.

  The number of click grooves 36 is the same as the number of objective lenses 4 that can be attached to the revolver rotating member 30 (5 in this embodiment).

  A cylindrical portion 24 that protrudes downward is formed at the center portion of the revolver body 20, and a rotation shaft 31 that is a rotation center of the revolver rotating member 30 is screwed into a screw hole 27 formed in the cylindrical portion 24. A taper surface 31 a is formed on the seating surface of the head of the rotating shaft 31.

  A central hole 32 that can accommodate the head of the rotary shaft 31 is formed at the center of the revolver rotating member 30, and a bearing ball 33 rolls between the tapered surface 31 a and the inner peripheral surface of the central hole 32. Arranged to be possible.

  In addition, a bearing ball 34 is rotatably disposed between the step portion 25 formed on the peripheral portion of the revolver body 20 and the inner peripheral surface 35 of the peripheral portion 39 of the revolver rotating member 30.

  With this configuration, the revolver rotating member 30 is rotatably supported with respect to the revolver body 20.

  A plurality of mounting holes 37 for mounting the plurality of objective lenses 4 are formed in the revolver rotating member 30 at equal intervals in the circumferential direction. The optical axis of the objective lens 4 coincides with the observation optical axis in the direction perpendicular to the stage of the microscope MS (see FIG. 2).

  The revolver rotating member 30 is provided with the same number of slots 38 as the objective lens 4 so that the Nomarski prism 50 for differential interference observation can be mounted. The Nomarski prism 50 is held by a holder 51. The holder 51 can be inserted into and removed from the slot 38. When the holder 51 is inserted into the slot 38, the Nomarski prism 50 is disposed immediately above the objective lens 4.

  In order to suppress an increase in the weight of the revolver rotating member 30, aluminum (including an aluminum alloy containing aluminum as a main component) is used as the material of the revolver rotating member 30. The revolver rotating member 30 is manufactured by die cutting from an aluminum die cast or aluminum block.

  The operation of the revolver apparatus when performing differential interference observation will be described with reference to FIGS.

  When the Nomarski prism 50 is inserted into the slot 38 and the revolver rotating member 30 is rotated about the rotation shaft 31, the steel ball 23 slides relatively while being urged by the leaf spring 21 on the upper surface of the annular member 40.

  When the rotating member 30 rotates by a predetermined angle, the steel ball 23 falls into the click groove 36. The steel ball 23 that has fallen into the click groove 36 is pressed against the click groove 36 by the urging force of the leaf spring 21.

  As a result, one of the objective lenses 4 is positioned on the observation optical axis.

  According to this embodiment, the revolver rotating member 30 has a base material made of aluminum or an aluminum alloy, and a lubricious metal formed on the surface of the base material. On the upper surface of 39, click grooves 36 are formed at equal intervals in the circumferential direction.

  Then, the steel ball 23 supported by the leaf spring 21 slides on the upper surface of the lubricious metal.

  Therefore, sliding of the steel ball 23 comes in contact with materials having high wear resistance, wear is suppressed, and the positioning accuracy of the objective lens 4 is hardly deteriorated. At the same time, the revolver rotating member 30 can be made of a light material with low hardness.

  In the above embodiment, the click groove 36 is provided on the revolver rotating member 30 side and the steel ball 23 is provided on the revolver main body 20 via the leaf spring 21. A click groove may be provided on the revolver body 20 side, and the steel ball may fall into the click groove.

  Further, the above-described embodiment can be applied to a manual type revolver apparatus and an electric type revolver apparatus. It is particularly effective from the viewpoint of durability to apply the above-described embodiment to an electric type revolver device used in a semiconductor inspection device or the like that repeats the switching operation of the objective lens at high speed.

FIG. 1 is a side view of a microscope including a revolver device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view of a revolver device according to an embodiment of the present invention. 3 is a view taken in the direction of arrow A in FIG.

Explanation of symbols

  2: objective lens (optical element), 10: revolver device, 20: revolver body, 21: leaf spring (biasing means), 23: steel ball (engaging member), 30: revolver rotating member, 36: click groove ( Positioning groove), 40: lubricating film, MS: microscope.

Claims (4)

A revolver body having a mounting portion for a microscope body, a revolver rotating member that can be rotated with respect to the revolver body and that can be mounted with a plurality of optical elements, and a positioning groove formed in a peripheral portion of the revolver rotating member And an engaging member that is provided in the revolver body and engages with the positioning groove, and an urging means that urges the engaging member into the positioning groove,
The revolver rotating member includes a base material made of aluminum or an aluminum alloy, and a lubricating metal formed on the surface of the base material.   The lubricating metal is silicon (Si), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mn), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn). The revolver device according to claim 1, wherein the revolver device is at least one selected from the group consisting of tin (Sn), molybdenum (Mo) and tungsten (W).   The revolver device according to claim 1 or 2, wherein the lubricating metal is bonded to the base material by forming an intermetallic compound.   A microscope comprising the revolver device according to claim 1.

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