JP2009168216A - Microchip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchip having a fluid control valve excellent in pressure resistance. <P>SOLUTION: In the microchip including a chip main body forming a flow passage FA inside, and the fluid control valve 40 for opening and closing the flow passage FA, the fluid control valve 40 comprises a hole part 41 formed on the chip main body and communicating with the flow passage FA, a blocking member 42 inserted in the hole part 41, a filling member 43 filled between the hole part 41 and the blocking member 42 to support the blocking member 42 on the flow passage FA side so as to be deformable, and removal preventing means 44 for preventing the filling member 43 from being removed from the hole part 41. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a microchip having a fluid control valve. More specifically, the present invention relates to a microchip having a fluid control valve with improved pressure resistance.

Conventionally, a microchip (also referred to as a microreactor) is known as a reactor for generating a chemical reaction or the like in a minute space. The microchip is superior in energy efficiency, reaction rate, yield, safety, controllability of reaction, conditions and equipment installation location and response compared to ordinary reactors.
For example, FIG. 8 shows an exploded perspective view of the microchip 9 described in Patent Document 1. A plan view of the microchip 9 is shown in FIG.

  As shown in FIGS. 8 and 9, the microchip 9 includes a first substrate 910 having a flow path forming surface 910A in which a Y-shaped groove 911 is engraved, and a second substrate 920 stacked on the flow path forming surface 910A. . The Y-shaped groove 911 covered with the second substrate 920 forms a flow path FA9 of the sample RG9 which is a fluid.

Three holes 921 are formed in a portion of the second substrate 920 corresponding to the end of the Y-shaped groove 911. Two of the three holes 921 are used as the inlets 922 and 923 for the samples RG91 and RG92, and the other one is used as the outlet 924 for the sample RG93 which is a product.
The flow path FA9 has a planar Y shape and has three paths FA91, FA92, and FA93. A bifurcated portion of the Y-shaped flow path FA9 serves as a junction JCT9 of the samples RG91 and RG92 introduced from the two inlets 922 and 923.

  In the microchip 9, two types of samples RG91 and RG92 introduced from the two inlets 922 and 923 pass through the paths FA91 and FA92, respectively, and are mixed at the junction JCT9. The two mixed samples RG91 and RG92 pass through the path FA93 while causing a reaction, and flow out from the discharge port 924 as a product (sample RG93).

In such a microchip 9, a fluid control valve 940 is provided at a position corresponding to the path FA93 of the second substrate 920 as means for controlling the pressure in the flow path FA9, the flow rate of the sample RG9, and the like. .
FIG. 10 shows a cross-sectional view of the fluid control valve 940. 10A is a cross-sectional view in the width direction of the flow path FA9 (path FA93), and FIG. 10B is a cross-sectional view in the direction along the flow path FA9.

As shown in FIG. 10, the fluid control valve 940 is filled between the hole 941 formed in the second substrate 920, the closing member 942 inserted into the hole 941, and the hole 941 and the closing member 942. And a filling member 943 that supports the closing member 942 to be displaceable toward the flow path FA9.
The closing member 942 is a member having a hard member 942A formed of a hard material and an elastic member 942B superimposed on the hard member 942A. The closing member 942 is inserted into the hole 941 so that the elastic member 942B is positioned on the flow path FA9 side.
When the closing member 942 is pressed toward the flow path FA9, the elastic member 942B is elastically deformed following the inner peripheral surface of the Y-shaped groove 911, and the flow path FA9 is closed. Here, since the cross-sectional area of the flow path FA9 becomes narrow according to the protruding amount of the elastic member 942B, the flow of the sample RG9 can be adjusted by the strength of pressing.

JP 2006-283965 A

In the microchip 9 described in Patent Document 1, the pressure resistance of the fluid control valve 940 against the internal pressure of the flow path FA9 is improved by using the closing member 942 having the hard member 942A.
However, in the microchip 9 described in Patent Document 1, there is a possibility that sufficient pressure resistance may not be obtained due to the adhesive force between the filling member 943 and the second substrate 920.
For example, when the thickness of the microchip 9 needs to be reduced, the second substrate 920 is also reduced, and the bonding area between the filling member 943 and the second substrate 920 is reduced. If the adhesion area is small, sufficient adhesion force cannot be obtained, and the blocking member 942 may be detached from the microchip 9 when the internal pressure of the flow path FA9 rises.
Also, when PEEK (polyetheretherketone) or fluorine-based resin having low adhesiveness with a general filler is used as the second substrate 920, the adhesive force between the filling member 943 and the second substrate 920 is low. There may be a shortage.

  An object of the present invention is to solve the above-described problems and provide a microchip having a fluid control valve excellent in pressure resistance.

  A microchip of the present invention is a microchip comprising a chip body in which a flow path is formed by laminating a first substrate and a second substrate, and a fluid control valve that opens and closes the flow path. The fluid control valve is formed in the chip body and communicated with the flow path, a closing member inserted into the hole, and filled between the hole and the closing member. And a detachment preventing means for preventing the detachment of the filling member from the hole portion.

According to the present invention, the chip body is provided with the hole communicating with the flow path, and the filling member supports the closing member inserted into the hole so as to be displaceable toward the flow path. Here, if the closing member is displaced to the flow path side, the flow path is closed. That is, the flow path can be opened and closed by the displacement of the closing member, and the pressure in the flow path, the velocity of the fluid flowing in the flow path, and the like can be controlled.
And since the fluid control valve has a separation preventing means, even when the adhesive force between the filling member and the hole is insufficient or the internal pressure of the flow path is increased, the filling member is Can be prevented from leaving.
Therefore, according to the present invention, a microchip having a fluid control valve with excellent pressure resistance can be provided.

In the microchip of the present invention, it is preferable that the detachment preventing means is a protrusion formed on the inner peripheral surface of the hole.
According to such a configuration, even when a force for detaching the filling member from the hole is applied, the filling member can be locked to the hole by the protrusion formed on the inner peripheral surface of the hole. .
Further, if a large number of fine protrusions are formed, it is possible to increase the force for preventing the filling member from being detached from the hole due to the anchor effect. Further, even when peeling occurs at a part of the adhesive interface, the filling member can be prevented from being detached from the hole by the frictional force of the fine protrusions.
Thereby, the high pressure resistance of the fluid control valve can be ensured.

In the microchip of the present invention, it is preferable that the detachment preventing means is a female screw portion formed on an inner peripheral surface of the hole portion.
According to such a configuration, even when a force that separates the filling member from the hole is applied, the filling member can be locked to the hole by the female screw portion formed on the inner peripheral surface of the hole. it can.
Thereby, the high pressure resistance of the fluid control valve can be ensured.
Further, the female screw portion can be processed at low cost, and the manufacturing cost of the microchip can be reduced.

In the microchip of the present invention, it is preferable that the detachment preventing means is a tapered portion formed on the inner peripheral surface of the hole portion so that the opening becomes larger toward the flow path side.
According to such a configuration, even when the internal pressure of the flow path rises and a force that causes the filling member to detach from the hole is applied, the filling member is perforated by the tapered portion formed on the inner peripheral surface of the hole. It can be locked to the part.
Thereby, the high pressure resistance of the fluid control valve can be ensured.

In the microchip of the present invention, the hole portion includes a first hole portion and a second hole portion adjacent to the first substrate side of the first hole portion, and a direction in which the closing member is displaced; A cross-sectional area of the first hole in a vertical plane is smaller than a cross-sectional area of the second hole, and the separation preventing means is a step between the first hole and the second hole. Preferably there is.
According to such a configuration, even when a force that causes the internal pressure of the flow path to increase and the filling member to be detached from the hole portion is applied, the filling member is made to have a hole by the step portion formed on the inner peripheral surface of the hole portion. It can be locked to the part.
Thereby, the high pressure resistance of the fluid control valve can be ensured.

In the microchip of the present invention, the chip body includes the first substrate having a flow path forming surface in which grooves are engraved, and the second substrate stacked on the flow path forming surface. Preferably, the path is formed by the groove and the second substrate, and the fluid control valve is provided on the second substrate.
According to such a configuration, since the chip body having the flow path can be configured simply by stacking the first substrate having the flow path forming surface in which the grooves are engraved and the second substrate, the microchip Is easy to manufacture.
Further, since the fluid control valve is provided on the second substrate, the microchip of the present invention can be easily obtained by laminating the second substrate provided with the fluid control valve on the first substrate similar to the conventional microchip. be able to.

In the microchip of the present invention, the second substrate is preferably formed of polyetheretherketone or a fluororesin.
Polyetheretherketone (PEEK) and fluororesin are excellent in chemical resistance and are widely used for chemistry and analysis. However, since these materials are expensive, it is necessary to reduce the plate thickness in order to reduce the cost. If the plate thickness is thin, the pressure resistance of the fluid control valve may be reduced.
In addition, PEEK and fluororesin have low adhesiveness with general fillers (for example, silicone-based fillers, fluororubber, nitrile rubber, chloroprene rubber, urethane and other adhesives, sealants, etc.). When the substrate is formed of PEEK or fluororesin, the pressure resistance of the fluid control valve may be reduced.
On the other hand, in the present invention, since the fluid control valve has the separation preventing means, high pressure resistance of the fluid control valve can be ensured regardless of the material of the second substrate.

  According to the present invention, it is possible to provide a microchip having a fluid control valve with excellent pressure resistance by providing a separation preventing means.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
[Configuration of microchip]
FIG. 1 is an exploded perspective view of the microchip 1 according to the first embodiment of the present invention. A plan view of the microchip 1 is shown in FIG.
As shown in FIGS. 1 and 2, the microchip 1 includes a chip body 100 having a flow path FA formed therein, and a fluid control valve 40 that opens and closes the flow path FA.
The chip body 100 includes a first substrate 10 having a flow path forming surface 10A in which a Y-shaped groove 11 is engraved, and a second substrate 20 stacked on the flow path forming surface 10A. The Y-shaped groove 11 covered with the second substrate 20 forms a flow path FA of the sample RG that is a fluid.

The first substrate 10 and the second substrate 20 are substantially flat rectangular members.
The materials of the first substrate 10 and the second substrate 20 need to be selected in consideration of pressure resistance performance (strength), workability, chemical resistance to the sample RG circulated through the flow path FA, and the like.
Examples of the material of the first substrate 10 and the second substrate 20 include glass materials such as quartz or borosilicate glass, silicon rubber such as polydimethylsiloxane (PDMS), acrylic resin such as polymethyl methacrylate (PMMA), and PEEK. Special engineering plastics, fluorine resins such as polytetrafluoroethylene (PTFE), tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), sapphire, silicon (silicon), and aluminum oxide, aluminum nitride, silicon nitride, etc. Examples thereof include ceramics or metal materials such as stainless steel.

In applications that require light transmission, a material having high light transmittance such as a glass material is desirable. When selecting a relatively soft plastic material such as styrene, polyimide, polyethylene terephthalate (PET), etc., a certain degree of corrosion resistance and light transmittance are considered, but it is an inexpensive general-purpose material that can be used disposablely, And processability is also an important point.
Here, the material of the first substrate 10 and the second substrate 20 is not limited to the same material, and the first substrate 10 and the second substrate 20 may be formed of different materials.
In the present invention, the second substrate 20 is preferably formed of PEEK or fluorine resin.

The first substrate 10 and the second substrate 20 are overlapped with each other, and the flow path FA of the sample RG is formed on the surface where the first substrate 10 and the second substrate 20 are overlapped.
As shown in FIG. 2, the flow path FA has a Y-shape in plan view extending substantially along the longitudinal direction of the chip body 100, and a bifurcated portion in the Y-shape is a junction portion JCT.
That is, in the flow path FA, upstream of the junction portion JCT, there are paths FA1, FA2 that flow in a plurality of directions from the inlets 22 and 23 of the sample RG (RG1, RG2) to the junction portion JCT, and from the junction portion JCT. Also on the downstream side, there is one path FA3.
The path FA3 is a reaction field where the reaction of the samples RG1 and RG2 is performed. The route FA3 as a reaction field is used for various purposes such as synthesis, concentration, extraction, and analysis, depending on the purpose of the user.

As shown in FIGS. 1 and 3A, such a flow path FA is an inner peripheral surface of the Y-shaped groove 11 having a semicircular cross section formed so as to be recessed in the flow path forming surface 10A of the first substrate 10. And inside the plate surface of the second substrate 20 facing the Y-shaped groove 11.
In this embodiment, the Y-shaped groove 11 has the same diameter in the paths FA1, FA2, and FA3. For example, the diameter of the Y-shaped groove 11 in the path FA3 is the same as the diameter of the Y-shaped groove 11 in the paths FA1 and FA2. For example, the diameter of the Y-shaped groove 11 can be set as appropriate.

As shown in FIGS. 1 and 2, the second substrate 20 communicates with the Y-shaped groove 11 at the positions of the three end portions in the Y-shape of the flow path FA when overlapped with the first substrate 10. Has a hole 21 perforated.
Of the three holes 21, those formed at both ends of the Y-shaped groove 11 on the expansion side are the inlets 22 and 23 for the samples RG 1 and RG 2, respectively. And the hole 21 formed in the edge part on the opposite side to the expansion side of the Y-shaped groove | channel 11 is made into the discharge port 24 of sample RG3 which is a product.

The sample RG (RG1, RG2, RG3) may have any form such as gas, liquid, colloidal solution, and the like.
Here, as the RG of the present embodiment, for example, a sample RG1 and a sample RG2 in which components such as water and water and oil and oil are mixed are used. Then, the sample RG1 is introduced into one introduction port 22, and the sample RG2 is introduced into the other introduction port 23.

The fluid control valve 40 is provided at a position corresponding to the paths FA1 and FA2 of the second substrate 20.
FIG. 3 shows a cross-sectional view of the fluid control valve 40 of the present embodiment.
3A is a cross-sectional view in the width direction of the flow path FA (path FA1 or path FA2), and FIG. 3B is a cross-sectional view in the direction along the flow path FA.
The fluid control valve 40 is formed in the second substrate 20 and communicated with the flow path FA, a closing member 42 inserted into the hole 41, and the hole 41 and the closing member 42 are filled and closed. It has a filling member 43 that supports the member 42 so as to be displaceable to the flow path FA side, and a detachment preventing means 44 that prevents the filling member 43 from being detached from the hole 41.

As shown in FIG. 2, the hole 41 is a circular hole in a plan view, and is provided at a position overlapping the Y-shaped groove 11 of the first substrate 10. Here, as shown in FIG. 2 and FIG. 3 (A), since the diameter of the hole 41 is larger than the width of the Y-shaped groove 11, both ends in the width direction of the Y-shaped groove 11 are inside the hole 41. Exposed. As shown in FIG. 3A, the exposed portion is a placement surface 12 on which the closing member 42 is disposed when the closing member 42 is disposed.
Moreover, as shown in FIG. 3, the hole part 41 has the internal thread part 411 as a protrusion part in the internal peripheral surface. The female screw portion 411 functions as the separation preventing means 44 in the present embodiment.

The blocking member 42 is a substantially columnar member having a diameter of about 1 mm, and includes a hard member 421 formed of a hard material and an elastic member 422 stacked on the hard member 421. The closing member 42 is inserted into the hole 41 so that the elastic member 422 is positioned on the flow path FA side.
As a material of the hard member 421, a hard material such as a metal such as stainless steel, glass, plastic, sapphire, and ceramics such as aluminum oxide, aluminum nitride, or silicon nitride can be used.
On the other hand, as the material of the elastic member 422, in this embodiment, fluororubber having high corrosion resistance is used. In addition, materials that can be elastically deformed, such as silicone rubber, nitrile rubber, and ethylene propylene rubber, can be used.
The surface 422A on the flow path FA side of the elastic member 422 is flat and is disposed so as to be in close contact with the placement surface 12 of the first substrate 10.

The thickness of the elastic member 422 is preferably about 0.2 to 5 times the depth of the flow path FA.
If the elastic member 422 is thicker than five times the depth of the flow path FA, the amount of deformation of the elastic member 422 due to the fluid pressure becomes excessive when the fluid pressure of the sample RG becomes high. As a result, the flow of the sample RG is disturbed, causing an adverse effect on analysis and synthesis.
In addition, since the degree of elastic deformation is too large, the amount of pushing becomes difficult to be transmitted to the surface 422A of the elastic member 422 (the liquid contact surface with the sample RG), and it becomes difficult to adjust the flow rate of the sample RG.
On the other hand, if the elastic member 422 is thinner than about 0.2 times the depth of the flow path FA, the deformation amount of the elastic member 422 is too small, and it becomes difficult to close the flow path FA.

The filling member 43 is a filler that is filled between the hole 41 and the closing member 42 and supports the closing member 42 so as to be displaceable toward the flow path FA.
Since the filling member 43 supports the closing member 42 so as to be displaceable, the filling member 43 has ductility and elasticity.
As a material of the filling member 43, a general filler can be used. For example, the filling member 43 may be a silicone-based filler, an adhesive such as fluorine rubber, nitrile rubber, chloroprene rubber, urethane rubber, or a sealant.

[Microchip manufacturing method]
A specific method for manufacturing the microchip 1 according to the present embodiment will be described next.

[Chip body manufacturing procedure]
When the material of the first substrate 10 is other than plastic, the Y-shaped groove 11 is formed by sandblasting, etching, machining, or the like.
When the material of the first substrate 10 is plastic, the Y-shaped groove 11 is formed by machining, pressing, injection molding or the like.
Further, the introduction ports 22 and 23, the discharge port 24, and the hole 41 are also formed by appropriate means corresponding to the material of the second substrate 20, respectively.
Specifically, when the material of the second substrate 20 is other than plastic, it is processed by sand blasting, electric discharge machining, ultrasonic machining, drilling, laser machining, etching, or the like.
On the other hand, when the material of the second substrate 20 is plastic, it is formed by drilling, laser processing, pressing, injection molding or the like.

Then, the first substrate 10 and the second substrate 20 are overlapped so that the Y-shape of the Y-shaped groove 11 is aligned with the positions of the introduction ports 22 and 23 and the discharge port 24, and heat fusion is performed.
Note that the first substrate 10 and the second substrate 20 may be bonded using anodic bonding, laser bonding, brazing, surface activated direct bonding, or the like as a bonding method other than heat fusion. Further, the first substrate 10 and the second substrate 20 may be sandwiched and mechanically fixed without being joined.
Thereby, the chip body 100 is completed.

[Method for Manufacturing Closing Member 42]
The hard member 421 is cut out from a metal or ceramic or plastic wafer or plate material by dicing or slicing.
Further, the elastic member 422 is obtained by cutting from a wafer or sheet material such as fluorine rubber, silicone rubber, nitrile rubber, ethylene propylene rubber or the like by press working or by molding.
The closing member 42 is obtained by bonding the elastic member 422 to the hard member 421.
Regardless of this method, a hard member 421 that is in the state of a wafer or a plate is coated with a rubber material of the elastic member 422 by spin coating, dip coating, spray coating, or a rubber sheet having a predetermined thickness. The closing member 42 can also be manufactured by appropriately cutting from the pasted one.

[Manufacture of fluid control valve 40]
The closing member 42 is inserted into the hole 41 of the second substrate 20.
The gap between the hole 41 and the closing member 42 is filled with a filler that can be elastically deformed, such as silicone rubber, fluorine rubber, nitrile rubber, chloroprene rubber, and urethane rubber. The filler becomes the filling member 43.
By the above method, the microchip 1 having the fluid control valve 40 is completed.

In addition, by using a filler having an appropriate viscosity as the filler, the blocking member 42 is bonded to the inner peripheral surface of the hole 41 in an elastically deformable state without the filler flowing into the flow path FA. .
A curable filler by heat curing or ultraviolet curing can also be used.
When the blocking member 42 is disposed in the hole 41, it is preferable that the placement surface 12 and the surface 422A of the elastic member 422 are in close contact with each other. Accordingly, it is possible to prevent the sample RG from being accumulated at the portion where the closing member 42 is disposed, thereby preventing the flow from being hindered or causing an error in the liquid amount of the sample RG.

Further, the following manufacturing procedure can also be adopted.
Prior to joining the first substrate 10 and the second substrate 20, the closing member 42 is disposed in the hole 41.
When the closing member 42 is disposed, a peelable sheet member (not shown) such as a Teflon (registered trademark) sheet is pasted on one surface of the second substrate 20, and one end side of the hole 41 is attached to the sheet member. Covered.
In this state, the closing member 42 is inserted from the other end side of the hole 41, and the filler is filled between the inner peripheral surface of the hole 41 and the closing member 42.

Here, since the sheet member is in close contact with the peripheral edge of the hole 41, the filler does not go around the plate surface of the second substrate 20 from the inner peripheral surface of the hole 41, and the filler does not adhere to the plate surface of the second substrate 20. . For this reason, the plate surface of the second substrate 20 and the surface 422A of the elastic member 422 are flush.
And after filling with a filler, a sheet | seat member is peeled and the 1st board | substrate 10 and the 2nd board | substrate 20 are piled up and joined.

At the time of this bonding, the plate surface of the second substrate 20 and the surface 422A of the elastic member 422 are formed in the same plane, so that the placement surface 12 and the surface 422A of the elastic member 422 can be accurately brought into close contact with each other. it can.
When this method is used, there is an advantage that the fluid control valve 40 can be easily formed even when the second substrate 20 is thick.

[Operation of fluid control valve]
Next, fluid control when analyzing the sample RG in the microchip 1 will be described.
When analyzing the samples RG1 and RG2, as shown in FIG. 2, the sample RG1 is introduced from the inlet 22, and the sample RG2 is introduced from the inlet 23 at a predetermined pressure, flow rate or flow rate by a device (not shown). Introduce.
Then, the samples RG1 and RG2 flow through the paths FA1 and FA2, respectively, and travel toward the junction JCT. These samples RG1 and RG2 form a mixed flow when reaching the junction portion JCT, flow through the path FA3, and are discharged from the discharge port 24.

However, the pressure, flow rate, and flow velocity of the samples RG1 and RG2 depend on the pressure resistance at the inlets 22 and 23, the Y-shaped groove 11 that is the inner peripheral surface of the flow path FA, the pressure resistance on the plate surface of the second substrate 20, and the like. ,fluctuate.
According to the fluid control valve 40, such variation in conditions can be compensated, and the samples RG1 and RG2 can be reacted under conditions of a predetermined pressure, flow rate, and flow rate.

As shown in FIG. 3 (A), the closing member 42 is supported by the placement surface 12 inside the hole 41, and in this state, the flow path FA is not fully closed.
When the closing member 42 is appropriately pressed from the side opposite to the flow path FA by an arbitrary pressing means, the elastic member 422 is in close contact with the peripheral edge of the hole 41 and the end of the Y-shaped groove 11 without a gap. The flow path FA is closed by elastic deformation following the inner peripheral surface of the groove 11.
That is, the cross-sectional area of the flow path FA becomes narrow according to the amount of protrusion of the elastic member 422 from the placement surface 12, thereby narrowing the flow of the samples RG 1 and RG 2.

It is also possible to push the elastic member 422 to the bottom of the Y-shaped groove 11 to fully close the flow path FA.
In other words, the system is constructed by connecting the outlets 22 and 23 and the outlet 24 of the microchip 1 to the outlets and inlets of other microchips, or by connecting many channels FA of the microchip 1. Therefore, there may be a case where the flow of the samples RG1 and RG2 is stopped by setting the fluid control valve 40 to the fully closed state for reasons such as the reaction rate of the samples RG1 and RG2.
Thus, the fluid control valve 40 can be used as an open / close switching valve (ON / OFF valve) or as an open / close amount adjusting valve.

[Effects of First Embodiment]
According to this embodiment, there are the following effects.
(1) Since the fluid control valve 40 includes the separation preventing means 44, even when the adhesive force between the filling member 43 and the hole 41 is insufficient or the internal pressure of the flow path FA is increased. The filling member 43 can be prevented from being detached from the hole 41.
(2) Since the fluid control valve 40 has the separation preventing means 44, high pressure resistance of the fluid control valve 40 can be ensured regardless of the material of the second substrate 20 (hole portion 41).
In particular, the present invention has an advantage that the pressure resistance of the fluid control valve 40 can be ensured even when the second substrate 20 (hole portion 41) is formed of PEEK or fluorine resin having low adhesiveness.

(3) Even when a force for detaching the filling member 43 from the hole 41 is applied, the filling member 43 is locked to the hole 41 by the female screw portion 411 formed on the inner peripheral surface of the hole 41. Can do. Thereby, the high pressure resistance of the fluid control valve 40 can be ensured.
(4) Since the chip body 100 having the flow path FA can be configured simply by laminating the first substrate 10 having the flow path forming surface 10A in which the Y-shaped groove 11 is engraved and the second substrate 20. The microchip 1 can be easily manufactured.
(5) Since the fluid control valve 40 is provided on the second substrate 20, the second substrate 20 provided with the fluid control valve 40 is easily laminated on the first substrate 10 similar to the conventional microchip 1. The microchip 1 of the present invention can be obtained.

(6) Since the closing member 42 is configured by the two members, the hard member 421 and the elastic member 422, the displacement when being pushed into the hole 41 is accurately transmitted to the elastic member 422 via the hard member 421. Thereby, the control of the elastic deformation amount of the elastic member 422 is facilitated, and the opening / closing amount of the flow path FA can be easily adjusted.
(7) Since the elastic member 422 is provided with an appropriate thickness, when the elastic member 422 is pushed into the hole 41 or receives fluid pressure in the flow path FA, The surface 422A is prevented from being deformed. Thereby, operation of sample RG can be performed appropriately, without inhibiting the flow of sample RG.

(8) Since the surface 422A on the flow path FA side of the elastic member 422 is formed flat, the elastic member 422 is in close contact with the peripheral edge of the hole 41 via the filling member 43 without any gap, and the portion where the sample RG is accumulated Therefore, dead volume can be reduced. As a result, the sample RG does not accumulate in the portion where the closing member 42 is disposed, bubbles do not occur and the flow of the sample RG is not affected, and no error occurs in the liquid amount. Further, it is possible to avoid a problem that the cleanliness of the microchip 1 cannot be secured because the sample RG remains in the portion where the closing member 42 is disposed.
(9) Since the diameter dimension of the hole 41 is larger than the width of the flow path FA, the placement surface 12 that is the end in the width direction of the flow path FA on the inner side of the hole 41 hits the closing member 42 ( Since the wall surface of the flow path FA and the surface 422A of the elastic member 422 are substantially flush with each other, the blocking member 42 can be disposed on the microchip 1 without affecting the flow of the sample RG. .
(10) Since the elastic member 422 is formed of highly corrosion-resistant fluororubber, there is no problem even if the sample RG is corrosive, and the reliability and versatility of the microchip 1 can be further improved.

The microchip 1 of each of the following embodiments has the same configuration as that of the first embodiment described above except for the configuration of the fluid control valve 40.
Therefore, the same reference numerals are used for the common parts, and duplicate descriptions are omitted.

[Second Embodiment]
FIG. 4 shows a cross-sectional view of the fluid control valve 40 of the present embodiment.
In the present embodiment, as shown in FIG. 4, a tapered portion 412 is provided on the inner peripheral surface of the hole portion 41 so that the opening becomes larger toward the flow path FA side.
The tapered portion 412 acts as a detachment preventing unit 44.
According to this embodiment, it replaces with the effect (3) of above-mentioned 1st Embodiment, and there exists the following effect.
(11) Even when the internal pressure of the flow path FA rises and a force that causes the filling member 43 to separate from the hole 41 is applied, the taper 412 formed on the inner peripheral surface of the hole 41 causes the filling member 43 to be The hole 41 can be locked. Thereby, the high pressure resistance of the fluid control valve 40 can be ensured.

[Third Embodiment]
FIG. 5 shows a cross-sectional view of the fluid control valve 40 of the present embodiment.
In this embodiment, as shown in FIG. 5, the hole 41 has a first hole 41A and a second hole 41B adjacent to the first substrate 10 side of the first hole 41A.
Here, the cross-sectional area of the first hole 41A in a plane perpendicular to the direction in which the closing member 42 is displaced (the vertical direction in FIG. 5) is smaller than the cross-sectional area of the second hole 41B.
In the present embodiment, the step portion 413 between the first hole portion 41 </ b> A and the second hole portion 41 </ b> B acts as the separation preventing means 44.
According to this embodiment, it replaces with the effect (3) of above-mentioned 1st Embodiment, and there exists the following effect.
(12) Even when the internal pressure of the flow path FA rises and a force that causes the filling member 43 to be detached from the hole 41 is applied, the stepped portion 413 formed on the inner peripheral surface of the hole 41 causes the filling member 43 to be The hole 41 can be locked. Thereby, the high pressure resistance of the fluid control valve 40 can be ensured.

[Fourth Embodiment]
FIG. 6 shows a cross-sectional view of the fluid control valve 40 of the present embodiment.
In the present embodiment, as shown in FIG. 6, a ring-shaped stopper 414 is provided so as to cover the end surfaces of the filling member 43 and the hole 41 opposite to the flow path FA.
This stopper 414 acts as the detachment preventing means 44.
According to this embodiment, it replaces with the effect (3) of above-mentioned 1st Embodiment, and there exists the following effect.
(13) Even when a force for detaching the filling member 43 from the hole 41 is applied, the filling member 43 can be locked to the hole 41 by the stopper 414. Thereby, the high pressure resistance of the fluid control valve 40 can be ensured.

[Modification]
In addition, this invention is not limited to the above-mentioned embodiment, Other modifications etc. which can achieve the objective of this invention are included, The deformation | transformation etc. which are shown below are also contained in this invention.

The material and shape of each member constituting the microchip 1 are not limited to those exemplified in the above embodiments.
For example, in each of the above-described embodiments, the substantially cylindrical blocking member 42 is illustrated, but the hard member 421 of the blocking member 42 may have a truncated cone shape as shown in FIG.
In the fluid control valve 40 shown in FIG. 7, a tapered portion 412 is formed on the inner peripheral surface of the hole 41 in accordance with the frustoconical hard member 421. In the microchip 1 according to this modification, the tapered portion 412 functions as the separation preventing means 44.

In the first embodiment described above, the female screw portion 411 is exemplified as the protruding portion formed on the inner peripheral surface of the hole 41, but is not limited thereto.
For example, a number of fine protrusions may be formed on the inner peripheral surface of the hole 41 by appropriate means such as sandblasting.
In this case, the force that prevents the filling member 43 from being detached from the hole 41 can be increased by the anchor effect. Further, even when peeling occurs at a part of the adhesive interface, the filling member 43 can be prevented from being detached from the hole 41 by the frictional force of the fine protrusions.

  The present invention can be used as a microchip having a fluid control valve with improved pressure resistance.

1 is an exploded perspective view of a microchip according to a first embodiment of the present invention. 1 is a plan view of a microchip according to a first embodiment of the present invention. Sectional drawing of the fluid control valve of the microchip which concerns on 1st Embodiment of this invention. Sectional drawing of the fluid control valve of the microchip which concerns on 2nd Embodiment of this invention. Sectional drawing of the fluid control valve of the microchip which concerns on 3rd Embodiment of this invention. Sectional drawing of the fluid control valve of the microchip which concerns on 4th Embodiment of this invention. Sectional drawing of the fluid control valve of the modification which concerns on embodiment of this invention. The exploded perspective view of the conventional microchip. The top view of the conventional microchip. Sectional drawing of the fluid control valve of the conventional microchip.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microchip 40 Fluid control valve 41 Hole part 41A 1st hole part 41B 2nd hole part 42 Closure member 43 Filling member 44 Detachment prevention means 100 Chip body 411 Female thread part 412 Taper part 413 Step part FA Channel

Claims (7)

A microchip comprising a chip body in which a flow path is formed by laminating a first substrate and a second substrate, and a fluid control valve that opens and closes the flow path,
The fluid control valve is
A hole formed in the chip body and communicating with the flow path;
A blocking member inserted into the hole;
A filling member that is filled between the hole and the closing member and supports the closing member so as to be displaceable on the flow path side;
A detachment preventing means for preventing detachment of the filling member from the hole,
A microchip comprising: The microchip according to claim 1, wherein
The microchip according to claim 1, wherein the detachment preventing means is a protrusion formed on an inner peripheral surface of the hole. The microchip according to claim 1, wherein
The microchip according to claim 1, wherein the separation preventing means is a female screw portion formed on an inner peripheral surface of the hole portion. The microchip according to claim 1, wherein
The microchip according to claim 1, wherein the separation preventing means is a tapered portion formed on an inner peripheral surface of the hole portion so that an opening becomes larger toward the flow path side. The microchip according to claim 1, wherein
The hole has a first hole and a second hole adjacent to the first substrate side of the first hole,
The cross-sectional area of the first hole in a plane perpendicular to the direction in which the closing member is displaced is smaller than the cross-sectional area of the second hole,
The microchip according to claim 1, wherein the separation preventing means is a stepped portion between the first hole and the second hole. The microchip according to any one of claims 1 to 5,
The chip body is
The first substrate having a flow path forming surface in which grooves are engraved, and the second substrate laminated on the flow path forming surface,
The flow path is formed by the groove and the second substrate,
The microchip according to claim 1, wherein the fluid control valve is provided on the second substrate. The microchip according to claim 6, wherein
The microchip is characterized in that the second substrate is made of polyetheretherketone or fluororesin.

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