JP2009167903A - Fluid supply device and fluid supplying method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent damage to a sealing part with particles and precisely supply a fixed quantity of high-pressure fluid even if the fluid to be supplied is a slurry in which particles are dispersed. <P>SOLUTION: A fluid housing chamber (3) and a driving liquid chamber (4) are provided in a housing (2). The fluid housing chamber (3) and the driving liquid chamber (4) are tightly blocked by a deformable partition wall (5) whose peripheral edge is fixed to the housing (2). A fluid opening (7) is opened at a lower portion of the fluid housing chamber (3). An outlet path (11) is connected to a fluid outlet (7), and an outlet opening/closing valve (13) is provided to the outlet path (11). A device (16) for agitating the inside of a supplying chamber is provided at a lower portion in the fluid housing chamber (3). A driving liquid inlet (18) is opened to the driving liquid chamber (4). The driving liquid inlet (18) is made to communicate with an oil tank (21) via the driving liquid supplying path (20). An oil pump (23) is provided to the driving liquid supplying path (20). A liquid surface detection means (27) is provided to the oil tank (21). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fluid supply device and a fluid supply method using the same, and more specifically, even if the supplied fluid is a slurry in which fine particles are dispersed in a liquid, there is a risk that a seal portion or the like may be damaged by the fine particles. The present invention relates to a fluid supply apparatus capable of preventing and supplying a high-pressure fluid precisely and quantitatively, and a fluid supply method using the same.

  In a so-called nanoparticle production apparatus called a nanoparticle, a subcritical or supercritical high-temperature high-pressure water and a raw material fluid such as a metal salt aqueous solution are reacted in a reactor. The above-mentioned raw material fluid is brought into a high pressure state such as 35 MPa and supplied into the reactor at a supply flow rate of about 40 mL per minute. In order to obtain uniform fine particles in the above reactor, pulsation is minimized as much as possible. It is necessary to control the supply flow rate with high accuracy.

Conventionally, as the fluid supply device, there is one using a syringe pump (for example, see Patent Document 1).
In this syringe pump, a fluid storage chamber is formed in a cylindrical cylinder, a fluid outlet is opened at one end of the fluid storage chamber, and a piston-like plunger is slidably slidable in the fluid storage chamber. Inserted. The plunger is configured to be movable forward and backward with respect to the fluid outlet by a feed screw mechanism or the like. By moving the plunger to the fluid outlet, the fluid stored in the cylinder pulsates from the fluid outlet. It is sent out without. The amount of fluid delivered is determined by the inner diameter of the cylinder and the moving speed of the plunger. By controlling the moving speed of the plunger, the fluid supply flow rate is precisely controlled.

Japanese Patent Laid-Open No. 49-12401

  The above syringe pump has the advantage that the fluid supply flow rate can be precisely controlled. However, the feeding mechanism for moving the plunger is complicated, the manufacturing cost is high, and the piston part of the plunger seals the cylinder inner surface. Therefore, if the fluid contained in the cylinder is a slurry in which fine particles are dispersed in a liquid, the fine particles enter between the inner surface of the cylinder and the outer peripheral surface of the piston, and the seal portion is damaged early and the fluid There is a risk of leakage, and there is a problem that the frequency of parts replacement is high and maintenance is complicated and cannot be carried out at low cost.

  The technical problem of the present invention is to solve the above problems, and even if the fluid to be supplied is a slurry in which fine particles are dispersed in the liquid, the risk of damaging the seal portion or the like with the fine particles can be prevented. It is to provide a fluid supply apparatus and a fluid supply method using the same.

In order to solve the above-described problems, the present invention is described as follows, for example, based on FIGS. 1 to 3 showing an embodiment of the present invention.
That is, the present invention relates to a fluid supply device, which is a fluid supply device capable of quantitatively supplying a high-pressure incompressible fluid (14), and includes a fluid storage chamber (3) and a drive fluid chamber (4) in a housing (2). The fluid storage chamber (3) and the driving liquid chamber (4) are partitioned in a tightly sealed manner by a deformable partition wall (5) having a peripheral edge fixed to the housing (2). A fluid outlet (7) is opened in the fluid storage chamber (3), an outlet passage (11) is connected to the fluid outlet (7), and an outlet on-off valve (13) is provided in the outlet passage (11). The driving liquid inlet (18) is opened in the driving liquid chamber (4), and the driving liquid inlet (18) is communicated with the driving liquid supply source (21) via the driving liquid supply path (20). A driving liquid supply means (23) is provided in the liquid supply path (20).

  The present invention 2 also relates to a fluid supply method, which is a fluid supply method capable of quantitatively supplying a high-pressure incompressible fluid (14), and using the fluid supply device (1) of the present invention 1 described above, By injecting the drive liquid (22) into (4), the fluid (14) in the fluid storage chamber (3) is sent out from the fluid outlet (7), and is supplied to the drive liquid chamber (4). The supply flow rate of the fluid (14) delivered from the fluid outlet (7) is controlled by adjusting the injection amount of the driving liquid (22).

  When the driving liquid is supplied from the driving liquid supply source to the driving liquid chamber by the driving liquid supply means, the intermediate portion of the partition wall is deformed to the fluid storage chamber side by the pressure of the driving liquid. Due to the deformation of the partition wall, only the same volume of the fluid stored in the fluid storage chamber as the driving liquid supplied to the driving liquid chamber is sent from the fluid outlet to the outlet path. At this time, since the peripheral edge of the partition wall is fixed to the housing and does not slide with the inner surface of the fluid storage chamber, early damage due to fine particles in the fluid is prevented.

  Here, the above-mentioned incompressible fluid means a fluid in which a volume change caused by a compressive stress can be ignored, and may be a slurry or a paste in which particles are dispersed in various liquids. Further, the driving fluid is not limited to a specific type, but it is preferable to use oil having an appropriate viscosity so that it can be easily quantitatively supplied by commonly used pumps.

  The partition wall is not limited as long as it can be deformed into the fluid storage chamber side and the driving liquid chamber side, and may be a bellows in addition to a film body having rubber elasticity or a diaphragm having spring elasticity. Further, the partition wall receives substantially the same pressure from both sides by the fluid in the fluid storage chamber and the driving liquid in the driving fluid chamber, so that the partition wall itself does not require high pressure resistance characteristics. A synthetic resin material such as a fluororesin may be used, and any deformable material can be used.

  In the fluid storage chamber, a fluid inlet is usually opened separately from the fluid outlet, the fluid inlet is communicated with a fluid supply source via an inlet passage, and an inlet opening / closing valve is provided in the inlet passage. is there. However, in the present invention, the fluid outlet is also used as a fluid inlet, the inlet passage is branched from the outlet passage on the upstream side of the outlet on-off valve, and the fluid storage chamber is formed via the inlet passage. In addition to communicating with the fluid supply source, an inlet opening / closing valve may be provided in the inlet passage.

  For example, a check valve or the like can be used as the inlet on-off valve and the outlet on-off valve. However, when the fluid is a slurry, if a simple on-off valve having a structure is used, particulate adhesion This is preferable because there is little risk of an opening / closing operation failure due to the above.

  When the fluid is a slurry, if the fluid outlet is opened to the lower part of the fluid storage chamber and the supply chamber agitation device is provided in the lower part of the fluid storage chamber, the fine particles in the liquid are fluidized. It is preferable that the slurry settles and stays below the storage chamber, and the slurry in which the fine particles are uniformly dispersed can be sent out to the outlet passage. In addition, it is more preferable that the bottom surface of the fluid storage chamber at this time is formed on an inclined surface that goes down to the fluid outlet side, because the retention of fine particles can be prevented more satisfactorily.

  The fluid storage chamber and the driving liquid chamber may be adjacent to each other via the partition wall, but a pressure transmission chamber filled with a pressure transmission liquid is provided between the fluid storage chamber and the driving liquid chamber, The pressure transmission chamber and the fluid storage chamber are partitioned in a tight manner by the deformable partition wall, and the pressure is increased by the deformable second partition wall whose peripheral portion is fixed to the housing. The transmission chamber and the driving fluid chamber may be partitioned in a tight manner. In this case, if the pressure transmission liquid is a liquid having the same or similar component as the fluid, for example, if the fluid is a slurry in which fine particles are dispersed in an aqueous solution or water, If water is filled, even if the above partition wall leaks, the pressure transmission fluid such as water is only mixed with the fluid, and the risk of the fluid being contaminated with the driving fluid can be prevented. preferable.

  The drive fluid supply means may be any supply means capable of supplying a fixed amount while suppressing pulsation. For example, a frequently used supply means such as a gear pump can be used, and the drive liquid supply means is not limited to a specific type. The drive liquid supply means and the drive liquid supply path can be provided with a flow rate adjusting means. By adjusting the flow rate with the flow rate adjusting means, the amount of the drive liquid injected into the drive liquid chamber can be controlled. Thus, the supply flow rate of the fluid delivered from the fluid outlet may be controlled. However, if the liquid level detecting means is provided in the driving liquid supply source and the amount of driving liquid injected into the driving liquid chamber is measured and adjusted based on the detection of the liquid level detecting means, Since the injection amount of the driving liquid into the driving liquid chamber can be accurately measured, it is preferable that the flow rate of the fluid delivered from the fluid outlet can be controlled more precisely.

  Since the present invention is configured and operates as described above, the following effects can be obtained.

  (1) Since the fluid stored in the fluid storage chamber is sent out from the fluid outlet only by the same volume as the driving liquid injected into the driving liquid chamber, this amount can be adjusted by adjusting the injection amount of the driving liquid. The supply flow rate of the fluid delivered from the fluid outlet can be precisely controlled.

  (2) Moreover, since the partition wall that divides the fluid storage chamber and the driving liquid chamber is fixed to the housing at the peripheral edge and only the intermediate portion is deformed, it does not slide on the inner surface of the liquid supply chamber. Even if fine particles are dispersed, the possibility of damaging the seal portion or the like with the fine particles can be prevented, and since the durability is excellent, the replacement and maintenance of parts can be simplified, and it can be carried out at low cost.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram of a fluid supply apparatus showing a first embodiment of the present invention.

  As shown in FIG. 1, in the fluid supply device (1), a fluid storage chamber (3) and a driving liquid chamber (4) are provided adjacent to each other in a housing (2). A deformable partition wall (5) made of, for example, a rubber material is disposed between the fluid storage chamber (3) and the driving liquid chamber (4), and a peripheral portion of the partition wall (5) is disposed on the housing. Fixed to (2), the fluid storage chamber (3) and the driving liquid chamber (4) are partitioned in a coherent manner.

The fluid storage chamber (3) has a fluid inlet (6) and a fluid outlet (7) open at the bottom. An inlet channel (8) is connected to the fluid inlet (6), and the fluid supply tank (9) communicates with the fluid storage chamber (3) via the inlet channel (8). This communication can be blocked by an inlet opening / closing valve (10) provided in the passage (8).
An outlet passage (11) is connected to the fluid outlet (7), and the fluid containing chamber (3) is connected to the fluid outlet chamber (3) through the outlet passage (11), such as a reactor of a fine particle production apparatus. While communicating with the consumer device (12), the communication can be blocked by an outlet on-off valve (13) provided in the outlet passage (11).

  In the fluid supply tank (9), for example, a slurry (14) in which fine particles are dispersed in an aqueous solution of a metal salt is accommodated, and the stirring device (15) prevents the fine particles from precipitating. The slurry (14) is stirred. In this embodiment, the slurry is used as the stored fluid in the fluid supply tank (9). However, in the present invention, for example, a liquid such as a metal salt aqueous solution may be used as the fluid. 15) may be omitted.

  A supply chamber agitator (16) is also provided in the lower part of the fluid storage chamber (3), just above the supply chamber agitator (16) and below the partition wall (5). The protection means (17) is provided so as to cross the inside of the fluid storage chamber (3). The protective means (17) prevents the partition wall (5) from interfering with the supply chamber stirring device (16) even if the partition wall (5) is largely deformed toward the fluid storage chamber (3). The protective means (17) may be any means as long as the slurry (14) can freely flow between the upper and lower sides of the protective means (17) and does not receive and pass the partition wall (5). An arbitrary shape such as a shape can be used.

On the other hand, a driving liquid inlet (18) and a driving liquid outlet (19) are opened above the driving liquid chamber (4). A driving liquid supply path (20) is connected to the driving liquid inlet (18), and oil as a driving liquid supply source is connected to the driving liquid chamber (4) via the driving liquid supply path (20). The tank (21) is in communication. The oil tank (21) contains oil (22) as a driving liquid. In the driving liquid supply path (20), an oil pump (23) and a flow rate regulator (24) as driving liquid supply means are provided in order from the upstream side.
A return path (25) is connected to the drive fluid outlet (19), and the drive fluid chamber (4) communicates with the oil tank (21) via the return path (25). In addition, a return path opening / closing valve (26) is provided in the return path (25).

  The oil tank (21) is provided with a liquid level detection means (27). Based on the detection of the liquid level detection means (27), the change in the amount of oil in the oil tank (21), that is, The injection amount of the oil (22) sent to the drive fluid chamber (4) is measured by the oil pump (23).

Next, a procedure for sending the slurry to the fluid consuming device using the fluid supply device (1) will be described.
The slurry (14) in the fluid supply tank (9) opens the fluid storage chamber (3) from the fluid inlet (6) through the inlet passage (8) due to a liquid head difference when the inlet on-off valve (10) is opened. ). At this time, the outlet on / off valve (13) is closed and the return path on / off valve (26) is opened. As a result, when the slurry (14) flows into the fluid storage chamber (3), the intermediate portion of the partition wall (5) extends and deforms toward the upper drive liquid chamber (4), and the drive liquid chamber (4). The oil (22) inside is returned from the driving fluid outlet (19) to the oil tank (21) through the return path (25). The liquid level position in the oil tank (21) is detected by the liquid level detecting means (27), and when the liquid level reaches a predetermined height, a predetermined amount of fluid is stored in the fluid storage chamber (3). It is confirmed that the slurry (14) is contained.

  Next, when the oil pump (23) is operated by closing the inlet on-off valve (10) and the return path on-off valve (26), the oil (22) in the oil tank (21) is supplied with the driving fluid. It flows into the driving liquid chamber (4) from the driving liquid inlet (18) through the passage (20). When the outlet opening / closing valve (13) is opened in this state, the intermediate portion of the partition wall (5) is deformed to the lower fluid storage chamber (3) side, and the slurry (in the fluid storage chamber (3) ( 14), only the same volume as the oil (22) supplied to the drive fluid chamber (4) is sent from the fluid outlet (7) to the fluid consumption device (12) via the outlet passage (11). . At this time, by adjusting the flow rate regulator (24), the oil (22) flowing into the driving fluid chamber (4) is set to a predetermined flow rate, and is sent out from the fluid outlet (7). The slurry (14) is controlled to a predetermined supply flow rate. The setting of the oil flow rate by the flow rate regulator (24) described above is that the change in the liquid level in the oil tank (21) is detected by the liquid level detection means (27) and sucked out from the oil tank (21). This is confirmed by calculating the amount of oil that is generated.

  The slurry (14) in the fluid storage chamber (3) is stirred by the supply chamber agitator (16), and the fine particles in the slurry (14) settle below the fluid storage chamber (3). And will not stay. Further, the bottom surface of the fluid storage chamber (3) is inclined downward toward the fluid outlet (7) side, and the fine particles near the bottom surface are smoothly guided to the fluid outlet (7) side without staying.

  When the slurry (14) in the fluid storage chamber (3) is sent out from the fluid outlet (7) and the partition wall (5) continues to be deformed downward, the partition wall (5) becomes the supply chamber stirring device (16 ) And is received by the protective means (17). Then, by detecting the liquid level in the oil tank (21), it is confirmed that a predetermined amount of the slurry (14) has been sent out from the fluid storage chamber (3), whereby the oil pump (23 ) And the outlet on / off valve (13) are closed, and the supply of the slurry (14) to the fluid consuming device (12) is stopped.

  The capacity of the slurry (14) accommodated in the fluid accommodation chamber (3) is the capacity required by the fluid consuming device (12), that is, the supply flow rate delivered from the fluid outlet (7), It is set from the operation time. For example, when the supply flow rate from the fluid outlet (7) is 40 mL per minute and the operation time is 10 hours, the capacity of the slurry (14) in the fluid storage chamber (3) is 600 of the supply flow rate per minute. It is set to 24L which is double. Thereby, the slurry (14) accommodated in the fluid accommodation chamber (3) is sent out from the fluid outlet (7) slowly and continuously over a predetermined operation time, for example, 10 hours. On the other hand, the oil pump (23) has a small pulsation and a discharge amount that is approximately the same as the supply flow rate of the slurry (14), for example, 40 mL / min. (14) is sent out from the fluid outlet (7) at a stable supply flow rate without pulsation.

  In the first embodiment, the capacity of the fluid storage chamber is set based on the supply flow rate of the slurry and the operation time. In the present invention, the capacity of the fluid storage chamber, the supply flow rate of the fluid, the operation time, etc. It is not limited to the form, and can be set to any value.

  In the first embodiment, the slurry in the fluid supply tank is guided to the fluid storage chamber by the liquid head difference. However, in the present invention, the means for guiding the fluid from the fluid supply tank to the fluid storage chamber is not limited to a specific one. For example, the driving fluid supply path and the return path are connected to an oil pump via a switching valve, and the switching valve is operated to suck out oil from the driving fluid chamber to the oil tank by the oil pump. The slurry may be sucked into the fluid storage chamber from the fluid supply tank with a negative pressure generated in the liquid chamber. Further, when a type capable of forward / reverse switching operation is adopted for the oil pump, a negative pressure can be similarly generated in the driving liquid chamber, and the slurry can be sucked into the fluid storage chamber from the fluid supply tank. When this oil pump capable of forward / reverse operation is used, the above-mentioned driving liquid outlet can also be used as the driving liquid inlet, and the above return path can be omitted.

  In the present invention, for example, as shown by the phantom line in FIG. 1, a pressurized gas supply source (31) such as a nitrogen cylinder or pressurized air is connected to the fluid supply tank (9), and the pressurized gas is supplied. Pressurized gas is supplied from the supply source (31) into the fluid supply tank (9), and fluid (14) such as slurry is supplied from the fluid supply tank (9) to the fluid storage chamber (3) by the gas pressure. It is also possible. Furthermore, in the present invention, the above-described various means can be arbitrarily combined and employed.

In the first embodiment, the fluid inlet is provided separately from the fluid outlet. However, in the present invention, the fluid inlet may also be used as the fluid outlet.
In the second embodiment shown in FIG. 2, the fluid inlet (6) that opens to the fluid storage chamber (3) is also used as the fluid outlet (7), and an oil pump that can rotate forward and backward as drive liquid supply means. (23), the driving liquid outlet (19) opened to the driving liquid chamber (4) is also used as the driving liquid inlet (18), and the return path used in the first embodiment is omitted.

  Further, in the second embodiment, the pressure transmission chamber (29) in which water (28) as a pressure transmission liquid is filled between the fluid storage chamber (3) and the driving liquid chamber (4). Is provided. The pressure transmission chamber (29) and the fluid storage chamber (3) are partitioned in a tightly-contained manner by a deformable partition wall (5) having rubber elasticity, similar to the first embodiment. is there. Further, the pressure transmission chamber (29) and the driving fluid chamber (4) are partitioned in a sealed manner by a second partition wall (30) made of a metal or synthetic resin bellows. Both the second partition wall (30) and the partition wall (5) have a peripheral edge fixed to the housing (2), and an intermediate portion is deformed so as to move up and down.

  When the oil pump (23) disposed in the driving liquid supply path (20) is reversed, the oil (22) in the driving liquid chamber (4) is transferred to the oil tank (21) via the driving liquid supply path (20). Returned in. As a result, the intermediate portion of the second partition wall (30) moves upward due to the negative pressure in the driving fluid chamber (4), and the pressure transmission chamber (29) becomes negative pressure. Therefore, the partition wall (5) The middle part of the also moves upward. As a result, the fluid storage chamber (3) also has a negative pressure, and by opening the inlet opening / closing valve (10) of the inlet passage (8), the slurry (14) in the fluid supply tank (9) is transferred to the inlet passage (8). Then, the fluid is guided from the fluid inlet (6) also serving as the fluid outlet (7) into the fluid storage chamber (3).

  When a predetermined amount of slurry (14) is stored in the fluid storage chamber (3), the inlet on-off valve (10) is closed, the oil pump (23) is rotated forward, and the oil pump (23) The oil (22) is injected into the drive fluid chamber (4) from the oil tank (21). As a result, the intermediate portion of the second partition wall (30) moves downward, the internal pressure is transmitted to the pressure transmission chamber (29), and the intermediate portion of the partition wall (5) moves downward. Then, by opening the outlet opening / closing valve (13), only the same volume as the oil (22) injected into the driving liquid chamber (4) of the slurry (14) in the fluid storage chamber (3) is obtained. The fluid is discharged from the fluid outlet (7) to the fluid consuming device (12) through the outlet passage (11). The other configuration is the same as that of the first embodiment described above, and functions in the same manner, so that the description is omitted.

FIG. 3 is a schematic configuration diagram of a fluid supply apparatus showing a third embodiment of the present invention.
In the third embodiment, two housings (2), a first housing (2a) and a second housing (2b), are provided, and fluid housing chambers (3 · 2b) formed in the respective housings (2a · 2b). 3) The fluid inlet (6) is connected to the fluid supply tank (9) via the inlet passage (8), and the fluid outlet (7) is connected to the fluid consumption device (12) via the outlet passage (11). Connected.

  A driving liquid inlet (18) that also serves as a driving liquid outlet (19) is opened in each of the driving liquid chambers (4, 4) formed in each housing (2a, 2b). Both drive liquid inlets (18, 18) communicate with each other via a drive liquid supply path (20), and an oil pump (23) capable of rotating forward and reverse is attached to the drive liquid supply path (20). .

  The outlet on / off valve (13) of the second housing (2b) and the inlet on / off valve (10) of the first housing (2a) are closed, and the outlet on / off valve (13) of the first housing (2a) and the second housing ( When the inlet on / off valve (10) of 2b) is opened and the oil pump (23) is rotated forward, the oil (22) sucked out from the drive fluid chamber (4) of the second housing (2b) It is injected into the drive liquid chamber (4) of one housing (2a). That is, in this case, the driving liquid chamber (4) of the second housing (2b) also serves as the oil supply source (21). The movement of the oil (22) moves the partition wall (5) upward in the second housing (2b), and the slurry (14) is supplied from the fluid supply tank (9) to the fluid storage chamber (3). On the other hand, in the first housing (2a), the partition wall (5) moves downward, and the slurry (14) is sent from the fluid storage chamber (3) to the fluid consuming device (12) at a predetermined flow rate.

  The fluid supply tank (9) is provided with a liquid level detection means (27), and the amount of slurry supplied to the fluid storage chamber (3) of the second housing (2b) is determined by the fluid supply tank (9). ) Measured by the change in the liquid level inside. When the slurry supply amount reaches a predetermined capacity, the outlet on / off valve (13) of the first housing (2a) and the inlet on / off valve (10) of the second housing (2b) are closed, and the second housing (2b) The outlet on / off valve (13) and the inlet on / off valve (10) of the first housing (2a) are opened to reverse the oil pump (23). In this case, the drive fluid chamber (4) of the first housing (2a) also serves as the oil supply source (21), and the oil (22) is fed from the drive fluid chamber (4) of the first housing (2a) to the second housing. It moves to the driving liquid chamber (4) of (2b). As a result, the partition walls (5) move in the direction opposite to the above, and in the first housing (2a), the partition walls (5) move upward, and the fluid supply tank (9) enters the fluid storage chamber (3). On the other hand, in the second housing (2b), the partition wall (5) moves downward so that the slurry (14) flows from the fluid storage chamber (3) at a predetermined flow rate to the fluid consuming device ( Sent to 12). Other configurations are the same as those in the first embodiment and the second embodiment described above, and operate in the same manner, so that the description thereof is omitted.

  The fluid supply apparatus and the fluid supply method described in each of the above-described embodiments are illustrated to embody the technical idea of the present invention, and the structure, material, arrangement, type of fluid, and the like of each of the above-described apparatuses. However, the present invention is not limited to this embodiment, and various modifications can be made within the scope of the claims of the present invention.

  For example, in the above embodiment, the case where the incompressible fluid is a slurry has been described, but the incompressible fluid in the present invention may be a liquid such as an aqueous solution, a paste, or the like. In each of the above embodiments, the supply chamber agitator is provided in the fluid storage chamber. However, when the fluid does not settle easily even when the fluid is left standing, such as a liquid or a paste, the supply chamber agitator is provided. Can be omitted. When the supply chamber agitation device is omitted, the protection means used in each of the above embodiments may be omitted, but the protection means is provided so that the partition wall is not sucked into the fluid outlet. May be.

In each of the above-described embodiments, the fluid storage chamber is partitioned from the driving liquid chamber and the pressure transmission chamber in a tightly-contained manner by partition walls having rubber elasticity. As long as it can move between the side and the drive fluid chamber side, a bellows or a diaphragm may be used. The second partition used in the second embodiment is not limited to the bellows, and may be a film body or a diaphragm having rubber elasticity.
In each of the above embodiments, oil is used as the driving liquid and an oil pump is used as the driving liquid supply means.However, the driving liquid supply means of the present invention only needs to be able to supply the driving liquid quantitatively without pulsation, Other types of driving liquid and driving liquid supply means may be used. The flow rate adjusting means used in the above embodiment can be of any structure such as a needle valve, and if the driving liquid supply means can supply a predetermined amount of driving liquid, this flow rate adjusting means is used. It can be omitted.
Furthermore, it is needless to say that the pressure transmission liquid is not limited to the water used in the second embodiment, and the fluid consuming device is not limited to the reactor of the fine particle production apparatus.

  The fluid supply device and the fluid supply method of the present invention can prevent the possibility of damaging the seal portion and the like even if the supplied fluid is a slurry in which the fine particles are dispersed in the liquid, and the high-pressure fluid is refined. Since it can be supplied in a fixed amount, it is particularly suitable for supplying the raw material fluid to the fine particle production apparatus, but is also suitable for supplying a high-pressure fluid quantitatively to other devices such as an analyzer.

It is a schematic block diagram of the fluid supply apparatus which shows 1st Embodiment of this invention. It is a schematic block diagram of the fluid supply apparatus which shows 2nd Embodiment of this invention. It is a schematic block diagram of the fluid supply apparatus which shows 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Fluid supply apparatus 2 ... Housing 3 ... Fluid storage chamber 4 ... Drive liquid chamber 5 ... Partition 7 ... Fluid outlet
11 ... Exit road
13… Outlet opening / closing valve
14… Incompressible fluid (slurry)
16… Agitator in the supply chamber
18 ... Drive fluid inlet
20 ... Drive fluid supply path
21 ... Drive fluid supply source (oil tank)
22 ... Drive fluid (oil)
23 ... Drive fluid supply means (oil pump)
27 ... Liquid level detection means
28… Pressure transfer fluid (water)
29… Pressure transmission chamber
30 ... Second wall

Claims (6)

A fluid supply device capable of quantitatively supplying a high-pressure incompressible fluid (14),
A fluid storage chamber (3) and a driving liquid chamber (4) are provided in the housing (2), and the fluid storage chamber is provided by a deformable partition wall (5) whose peripheral portion is fixed to the housing (2). (3) and the drive fluid chamber (4) are partitioned in a confined manner,
A fluid outlet (7) is opened in the fluid storage chamber (3), an outlet passage (11) is connected to the fluid outlet (7), and an outlet opening / closing valve (13) is provided in the outlet passage (11). ,
The driving liquid inlet (18) is opened in the driving liquid chamber (4), and the driving liquid inlet (18) is communicated with the driving liquid supply source (21) via the driving liquid supply path (20). A fluid supply apparatus comprising a drive liquid supply means (23) in the liquid supply path (20).   The fluid outlet (7) is opened at a lower portion of the fluid storage chamber (3), and a supply chamber stirring device (16) is provided at a lower portion of the fluid storage chamber (3). The fluid supply apparatus described.   A pressure transmission chamber (29) filled with a pressure transmission fluid (28) is provided between the fluid storage chamber (3) and the driving fluid chamber (4). A deformable second partition wall (30) having a space between the fluid storage chamber (3) and the deformable partition wall (5) in a tightly sealed manner and having a peripheral edge fixed to the housing (2). The fluid supply device according to claim 1 or 2, wherein the pressure transmission chamber (29) and the driving fluid chamber (4) are partitioned in a confined manner.   The driving liquid supply source (21) is provided with a liquid level detecting means (27), and based on the detection by the liquid level detecting means (27), the driving liquid (22) is injected into the driving liquid chamber (4). The fluid supply device according to any one of claims 1 to 3, wherein the fluid supply device is configured to be adjustable.   The fluid supply device according to any one of claims 1 to 4, wherein the fluid (14) is a slurry in which fine particles are dispersed in a liquid. A fluid supply method capable of quantitatively supplying a high-pressure incompressible fluid (14),
By using the fluid supply device (1) according to any one of claims 1 to 5 and injecting the driving liquid (22) into the driving liquid chamber (4), the fluid containing chamber ( 3) By feeding the fluid (14) in the fluid from the fluid outlet (7) and adjusting the injection amount of the driving liquid (22) into the driving liquid chamber (4), the fluid outlet (7) A fluid supply method, characterized in that the supply flow rate of the fluid (14) delivered from the fluid is controlled.

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