JP2009162604A - Carbon nanotube measurement apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately obtain a distribution of the chirality of SWNTs, and remove the undesired SWNTs in a sample in which the SWNTs are dispersed. <P>SOLUTION: As the sample is two-dimensionally moved, an excitation light wavelength, a photoluminescence (PL) wavelength and a photoluminescence (PL) intensity are measured in each minute region, and data having four dimensions such as a measurement position, the excitation light wavelength, the PL wavelength and the PL intensity is collected. A chiral index is obtained from a combination of the excitation light wavelength and the PL wavelength. A chirality distribution image is created and indicates a position of the PL intensity per chiral index (S4-S13). If a user designates the particular chirality (S15), the position in which the SWNT having the chirality exists is identified from the distribution image. The SWNT is burned by irradiating the position with a high-power laser light (S16, S17). The PL intensity is detected in the same position to enable the user to confirm whether burnout is completed (S18). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention uses a photoluminescence measuring device that measures photoluminescence emitted from a sample in response to excitation light irradiation, and evaluates the presence and distribution of carbon nanotubes (hereinafter abbreviated as CNT) in a sample. The present invention relates to a nanotube measuring apparatus.

  A single carbon nanotube (hereinafter abbreviated as SWNT) has a structure in which a single net-like sheet (graphene sheet) connected with a carbon six-membered ring structure is rolled into a cylindrical shape. ) Physical properties vary greatly. For example, when carbon six-membered rings are arranged along the axis of the tube, it shows the characteristics as a metal, and when carbon six-membered rings are arranged in a spiral around the axis, the characteristics as a semiconductor are shown. Show. Therefore, it is important to examine the chirality in evaluating CNT, and it is necessary to examine the chirality distribution in order to grasp the characteristics of the sample containing CNT. As one of the purposes for measuring such chirality distribution, a near-infrared photoluminescence measuring device using fluorescence spectroscopic measurement has been conventionally developed (for example, see Non-Patent Document 1).

  A conventional fluorescence spectroscopic measurement optical system used for such an apparatus is disclosed in, for example, Patent Document 1. That is, solid light in which white light emitted from a xenon lamp, which is a light source, is extracted by wavelength dispersion using an excitation-side spectroscope and held in a cuvette cell or sample holder containing a liquid sample set in a sample chamber. Irradiate the center of the sample. Photoluminescence by fluorescence, phosphorescence, etc. emitted from the sample by this excitation light irradiation is incident on a fluorescence side spectrograph disposed at a position of about 90 ° with respect to the incident optical axis of the excitation light, and is wavelength-dispersed. The intensity is detected for each wavelength.

  However, in such an optical system, only photoluminescence obtained by exciting only a part of the sample can be measured. In a device in the form of a thin film or the like that is formed by synthesizing or synthesizing CNTs in a carrier, CNTs with different structures may be distributed side by side. If the chirality is evaluated based on the measured result, accuracy is lost. Therefore, there is a strong demand for an apparatus that can evaluate and confirm the uneven distribution of CNTs dispersed on the device.

  In addition, in SWNT device research and development, as described above, not only the SWNT chirality distribution on a device is roughly examined, but also higher performance and functions are required.

  For example, when SWNT is used as a wiring of a semiconductor LSI device, there are at most several SWNTs that are cross-linked between electrode gates, and it is possible to measure the photoluminescence of several SWNTs in evaluating the performance of the device. A device having spatial resolution is desired. Further, as a method of distributing SWNTs on a device, there is a method of growing SWNTs in units of several directly on a substrate. Since SWNTs have different thicknesses and properties depending on the chirality, SWNTs having a specific chirality are formed on the substrate. There is something that I want to lay out. When SWNTs are distributed on a device by the method as described above, SWNTs having unintended or undesired chirality may be laid out on the device. The problem that the function cannot be obtained occurs. Therefore, in addition to being able to measure the photoluminescence of SWNTs laid out on the device in units of several units as described above, the apparatus has a function that can remove unwanted SWNTs if they exist. It is very useful for making evaluation devices.

JP 2001-83093 A Watanabe, Osumi, Ikeda, Sasayama, Nakagawa, “Development of Near-Infrared Photoluminescence Spectrometer”, Fullerene Nanotubes Study Group, 29th Fullerene Nanotubes General Symposium Lecture Proceedings, July 25, 2005

  The present invention has been made in view of the above problems, and its main object is to obtain a two-dimensional chirality distribution for a sample with high spatial resolution and to remove SWNTs having a specific chirality. It is to provide a measuring device.

The present invention made to solve the above problems is a carbon nanotube measuring apparatus capable of evaluating a sample in which carbon nanotubes are dispersed and performing an operation on the sample,
a) a measurement optical system including a light irradiation means for irradiating a sample with excitation light of a predetermined wavelength, and a detection means for detecting the intensity of photoluminescence emitted from the sample in response to the irradiation of the excitation light;
b) a moving means for moving two-dimensionally at least one of the sample and the measurement optical system in order to scan the irradiation position of the excitation light and the photoluminescence intensity detection position on the sample;
c) Based on the result of detecting the intensity of the photoluminescence while scanning the wavelength of the excitation light over a predetermined wavelength range, collect data consisting of the excitation light wavelength, the photoluminescence wavelength, and the photoluminescence intensity as a set, and the excitation wavelength. A chirality calculating means for calculating the chirality characterizing the carbon nanotube from the combination of the photoluminescence wavelength and the photoluminescence wavelength;
d) two-dimensional distribution information acquisition means for obtaining chirality at the position by the chirality calculating means for each scanning of the position by the moving means, and creating image information indicating the distribution of photoluminescence intensity on the sample for each chirality; ,
e) Based on the image information obtained by the two-dimensional distribution information acquisition means, the light irradiation means irradiates a position where a specific chirality exists or a specific position within a range where the specific chirality exists. And selectively removing means for burning specific carbon nanotubes by controlling the moving means and increasing the output of the irradiation light of the light irradiation means as compared with the time of excitation light irradiation and irradiating the sample with light. When,
It is characterized by having.

  As a first aspect of the carbon nanotube measurement apparatus according to the present invention, the selective removal means includes a designation means for the user to designate a specific chirality, and a position where the chirality designated by the designation means exists. And a position specifying means for specifying using the image information obtained by the two-dimensional distribution information acquiring means.

  As a second aspect of the carbon nanotube measurement apparatus according to the present invention, the selective removal means includes an image display means for displaying the image information created by the two-dimensional distribution information acquisition means on a screen, and the image display means. And specifying means for the user to specify a specific position in the image information for the specific chirality displayed on the screen.

  In the carbon nanotube measuring apparatus according to the present invention, the light irradiating means may include a laser light source such as a titanium-sapphire laser, which can raise its laser output to a certain extent at which carbon nanotubes can be burned. The light irradiating means preferably includes a lens optical system capable of reducing the spot diameter on the sample to a minute level of about several μm. According to this, the chirality of the CNT existing in the range can be obtained for every minute size of about several μm □ on the sample.

  The moving means may be a moving mechanism including a driving source such as a motor that moves the sample in two axial directions (X-axis direction and Y-axis direction) orthogonal to each other. When the spot length of the excitation light irradiated onto the sample by the light irradiating means is d, the moving means can move the sample in the X axis direction and the Y axis direction by d or slightly smaller step widths, respectively. If it makes it, it can measure the photoluminescence intensity about the whole two-dimensional surface (XY plane) of a sample almost without omission.

  SWNTs having different structures and characteristics are known to have a photoluminescence intensity peak in each combination of a unique excitation wavelength and a photoluminescence wavelength. Further, the structure and characteristics of the carbon nanotube can be specifically expressed by, for example, chirality expressed by a chiral index or the like. Therefore, the wavelength of the excitation light is scanned in a predetermined range (for example, in the range of 700 to 1000 nm), the combination of the excitation wavelength and the photoluminescence wavelength at which a photoluminescence intensity peak is generated is examined, and the combination is chirality (chiral index). Convert to As described above, the SWNT chirality existing at each position can be obtained by repeating the measurement at each position while moving the sample in the XY plane. Image information indicating the distribution of the photoluminescence intensity is created.

  In the carbon nanotube measuring apparatus of the first aspect, when the image information is presented to the user by displaying it on the screen of the display means, for example, the user confirms whether or not there is an undesired chirality by this display. If necessary, specify the chirality to be removed by specifying means. When chirality is designated, the position specifying means specifies the position where the chirality exists. Then, the selective removal means operates the moving means so that the light hits the position by the moving means, and then the light irradiating means emits light with a higher output than the previous measurement by the light irradiating means. Drive. As a result, only the SWNT present at that position is incinerated by heat and removed from the sample. When the same chirality exists at a plurality of positions, the SWNT having that chirality can be removed by repeating this process.

  In the carbon nanotube measuring apparatus according to the second aspect, a distribution image of an arbitrary chirality is displayed on the screen of the display unit, and then the user selects a specific position within a range where the specific chirality exists by the specifying unit. Is designated, the SWNT is incinerated in the same manner as described above.

  According to the carbon nanotube measuring apparatus according to the present invention, it is possible to confirm at a glance the distribution state for each type of SWNT, that is, for each chirality, and thus, for example, the manufactured device can be evaluated easily and efficiently. . Furthermore, when a SWNT of an unintended or undesired type for the user is laid out in a part on the device, only the SWNT can be selectively removed from the device. Therefore, for example, once an evaluation device manufactured by dispersing CNTs is evaluated, the layout of the SWNT on the evaluation device can be manipulated as needed to exert its performance as intended. . That is, it is possible to provide a highly functional apparatus capable of not only evaluating a device but also physically modifying the device.

  The present invention is not limited to single carbon nanotubes (SWNT), but includes nanotubes such as double carbon nanotubes (DWNT) and multi-walled nanotubes in addition to full photoluminescence wavelength region. The present invention can also be applied to peapods, etc., which are nanotubes.

Hereinafter, an embodiment of a CNT measuring apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram of the main part of the CNT measuring apparatus according to the present embodiment, and FIG. 2 is an optical path configuration diagram of the polychromator in FIG.

  The wavelength tunable laser light source 7 is driven by a laser driving unit 8 controlled by the control unit 20. The laser light emitted from the laser light source 7 is collected by a collimating lens included in the probe head 6 and guided to the epi-illumination microscope 5 through a single mode fiber. The laser beam is collimated inside the epi-illumination microscope 5 and is irradiated onto the sample 1 placed on the stage 2 as a spot having a diameter of about several μm by the near-infrared objective lens 4. As the wavelength tunable laser light source 7, for example, a titanium-sapphire laser having an output of about several W at the maximum is used, and the wavelength of the laser light can be varied in a predetermined wavelength range (about 700 to 1000 nm) by control by the wavelength driving unit 9. is there.

  A part of the laser light emitted from the wavelength tunable laser light source 7 is extracted by the half mirror 10 and introduced into the monitor detector 11. The detection signal of the monitor detector 11 is fed back to the control unit 20, and thereby, for example, the output of the emitted light from the laser light source 7 is controlled to a desired value.

  Sample 1 is, for example, a thin film device in which SWNTs are dispersed. The stage 2 on which the sample 1 is placed has a structure that can move in two directions, ie, an X axis and a Y axis that are orthogonal to each other, and a stage XY drive unit 3 (including a drive source such as a stepping motor). It is moved in accordance with a command from the control unit 20 by the movement means in the present invention. Since the irradiation position of the laser beam by the near-infrared objective lens 4 as described above is determined, the minute region where the laser beam strikes on the sample 1 by moving the stage 2 in the X-axis and Y-axis directions respectively. It will move in two dimensions.

  Photoluminescence by fluorescence or phosphorescence generated from the sample 1 in response to the irradiation of the excitation laser beam as described above follows the same path as the excitation laser beam as described above, and the probe head 6 passes through the emission-side single mode fiber. Then, the light is condensed by the collimating lens and introduced into the polychromator 12.

  As shown in FIG. 2, in the polychromator 12, light (photoluminescence) is collected by a toroidal mirror 121, passes through a slit 123 through a mirror 122, and is further introduced into a diffraction grating 125 through a mirror 124. The light wavelength-dispersed by the diffraction grating 125 passes through the concave mirror 126 and is condensed by the cylindrical lens 127 in a direction orthogonal to the paper surface, and a detector in which a large number of light receiving elements are arranged in an array while maintaining the wavelength dispersion state. 13 is incident. Therefore, the dispersed light in the predetermined wavelength range derived from the photoluminescence introduced into the polychromator 12 is detected all at once by the detector 13 and a detection signal corresponding to the intensity for each wavelength is output. As this detector 13, for example, an indium gallium arsenide (InGaAs) array detector can be used.

  A detection signal for each wavelength by the detector 13 is converted into digital data by the A / D converter 14 and input to the data processing unit 23. The data processing unit 23 includes a data collection unit 24, a chirality calculation unit 25, a distribution image creation unit 26, and the like as functions. Data and results obtained by these units are sent to the control unit 20 and connected to the control unit 20. Is displayed on the screen of the displayed display unit 22. Almost all or a part of the functions of the data processing unit 23 and the control unit 20 that controls the whole can be realized by a personal computer, and dedicated control / processing software installed in the computer is executed. The function can be realized.

  Next, an example of a characteristic operation in the CNT measuring apparatus of the present embodiment will be described with reference to FIGS. FIG. 3 is a control / processing flowchart for this operation.

  When the user places the sample (device to be measured) 1 on the stage 2 (step S1), an enlarged image on the sample 1 obtained by the episcopic microscope 5 is displayed on the screen of the display unit 22 (step S1). S2). The user uses the operation unit 21 to set a range to be measured on this screen and instruct measurement start (step S3). Upon receiving this instruction, the control unit 20 sends a control signal to the stage XY drive unit 3 so that the sample 1 is set at an initial position (measurement start position) within the set measurement range, and the sample is accordingly sent. The stage 2 is moved so that the excitation light strikes the section [0, 0] on 1 (step S4). If the measurement range is set to a rectangular shape as shown in FIG. 4, a section [0, 0] having a size of d × d at one corner of the measurement range is a measurement start position. Here, it is assumed that the spot diameter of the excitation laser beam is several μm, and d is also several μm.

  In this state, the control unit 20 sets the wavelength of the laser light source 7 to the start wavelength λ1 (for example, 700 nm) which is the lower limit of the excitation wavelength range λ1 to λ2, and emits the excitation laser light with a predetermined output (for example, about several mW). The sample 1 is irradiated (step S5). The excitation laser light hits the section [0, 0] on the sample 1, and photoluminescence is emitted from the range, and its intensity spectrum (photoluminescence wavelength (hereinafter referred to as PL wavelength) -photoluminescence intensity (hereinafter referred to as PL intensity)). It is detected by the detector 13. The data collection unit 24 captures and stores data having information of excitation wavelength-PL wavelength-PL intensity (step S6).

  When the measurement for one excitation wavelength is completed, it is determined whether or not the excitation wavelength is an end wavelength λ2 (for example, 1000 nm) that is the upper limit of the wavelength range (step S7). Is changed to the next wavelength by the wavelength step width Δλ (step S8), and the process returns to step S6. Then, as described above, the section [0, 0] on the sample 1 is irradiated with excitation light, and the PL intensity after changing the excitation wavelength is measured. Steps S6 → S7 → S8 are repeated, and when the excitation wavelength reaches the end wavelength λ2, the process proceeds from step S7 to S9, and the data at the measurement position [i, i] is determined. Here, as shown in FIG. 4, it is assumed that there are p + 1 sections in the X-axis and Y-axis directions, and i = 0 to p. That is, first, the data of the partition [0, 0] is determined.

  As shown by arrows in FIG. 4, the scan of the measurement position is [0, 0] →... [0, p] → [1, p] →... → [1, 0] → [2, 0] → The measurement end position is [p, p]. Therefore, next, the control unit 20 determines whether or not it is the measurement end position (step S10), and if it is not the measurement end position, the stage XY drive is performed to drive the stage 2 so as to move to the next measurement position. The unit 3 is controlled ((Step S11), and the process returns to Step S5. By repeating the processes of Steps S5 to S11, the photoluminescence as described above is performed in each minute region shown in a lattice shape in FIG. If measurement is performed and measurement of photoluminescence at the measurement end position [p, p] is completed, the process proceeds from step S10 to step S12.

  Note that the procedure for moving each section is not limited to that described above as long as the photoluminescence measurement is performed for all the sections shown in FIG. In FIG. 4, the spot diameter of the excitation light and the size of one side of each section are substantially the same, but the former or the latter may be set slightly larger.

  As described above, the data obtained in steps S4 to S11 described above is data having four dimensions obtained by adding the position information of the section to be measured to the three dimensions of the excitation wavelength, the PL wavelength, and the PL intensity. is there. That is, by the photoluminescence measurement as described above, data having four dimensions is collected and stored in the data collection unit 24 in the data processing unit 23 (step S12).

  There are several kinds of SWNTs included in the sample 1 having different chiralities, and a PL intensity peak is observed in each combination of a specific excitation wavelength and a PL wavelength. Therefore, for example, as shown in FIG. 5A, a three-dimensional graph is created for each section (measurement position) where the vertical axis indicates the excitation wavelength, the horizontal axis indicates the PL wavelength, and the axis perpendicular to the paper surface indicates the PL intensity. be able to. Further, paying attention to a specific excitation wavelength, as shown in FIG. 5B, a two-dimensional graph with the PL intensity on the vertical axis and the PL wavelength on the horizontal axis can be created.

  The difference in the structure and characteristics of SWNT is defined by the chiral index (n, m) which is an index of chirality. That is, the combination of the excitation wavelength and the PL wavelength and the chiral index have a one-to-one correspondence. For example, FIG. 6 is a three-dimensional graph as shown in FIG. 5A created based on the actual measurement results. When a specific SWNT exists in the figure, a PL intensity peak exists at the coordinates indicated by a circle. It shows that For this reason, the combination of the excitation wavelength and the PL wavelength can be replaced with a chiral index, and the chirality calculation unit 25 performs such a conversion to obtain data having dimensions such as the chiral index, measurement position information, and PL intensity. Ask. Then, the distribution image creation unit 26 organizes data having dimensions of measurement position information and PL intensity for each chiral index, takes the X axis direction position on the horizontal axis and the Y axis direction position on the vertical axis, and the PL intensity. A distribution image corresponding to the measurement range of the sample 1 is generated so as to display contour lines, shades, or different colors (step S13).

  That is, as many distribution images as the number of obtained chiral indices are created. According to this distribution image, it is possible to confirm at a glance how SWNTs having an arbitrary chiral index are distributed over the entire measurement range of the sample 1, and uneven distribution and uniform distribution of SWNTs having a specific structure. Can be easily evaluated. The chirality distribution image thus created is displayed on the screen of the display unit 22 when the user designates a chiral index from the operation unit 21 (step S14). Note that the display format can be changed as appropriate, for example, a plurality of chirality distribution images can be easily displayed in a tab format.

  When it is simply desired to investigate the distribution state of the SWNT chirality on the sample 1, the process ends up to step S14. However, the CNT measuring apparatus of this embodiment further has a function of removing SWNTs having a specific chirality. Yes. That is, when the user confirms the chirality distribution image for each chiral index as described above and finds that the SWNT having an unintended chirality is laid out on the sample 1, the chirality is designated from the operation unit 21. (Step S15).

  Then, the control unit 20 specifies the position where the SWNT having the chirality exists, that is, the section [x, y], from the distribution image of the designated chirality. For example, when a certain chirality distribution image is as shown in FIG. 7, two locations [x1, y1] and [x2, y2] are extracted as positions where the chirality exists, that is, incineration positions. Thereafter, the control unit 20 first controls the stage XY drive unit 3 to move the stage 2 so that the laser beam hits one of the incineration positions [x1, y1] (step S16).

  Thereby, after the sample 1 moves, the control unit 20 sets the output of the laser beam to be considerably larger than that at the time of the previous photoluminescence measurement, for example, about 10 W, and performs laser driving so that the laser beam irradiation is performed for a predetermined time. The unit 8 is controlled (step S17). Thus, when the laser light emitted from the laser light source 7 hits the incineration position, the temperature at that position rises rapidly and the SWNT is incinerated. Thereafter, the output of the laser beam is lowered to the above-described excitation light level at the same position, and photoluminescence measurement accompanying the wavelength scanning of the excitation light is performed. From the measurement result, it is determined whether or not there is a photoluminescence intensity peak. If the intensity peak disappears, it is determined that incineration has been completed (YES in step S18).

  On the other hand, if there is still a photoluminescence intensity peak, it is considered that the previous incineration is not sufficient, so the process returns to step S17, where the laser light output is slightly increased or the laser light irradiation time is lengthened compared to the previous incineration operation. Or try to incinerate again.

  If it is confirmed in step S18 that the incineration is being performed, the presence / absence of another incineration position is then determined (step 19), and if there is another incineration position, the process returns to step S16 and the same as described above. The SWNT is incinerated by irradiating a laser beam to another incineration position. Therefore, for example, in the case of the example in FIG. 7, first, incineration at the position [x1, y1] is performed, and then incineration at the position [x2, y2] is performed. If the incineration for all the incineration positions corresponding to the designated chirality is completed (YES in step S19), the process ends.

  As described above, according to the CNT measuring apparatus of the present embodiment, only SWNTs having a chirality that is not intended or desired by the user are selectively selected from among the SWNTs having various structures laid out on the sample 1. The sample 1 can be removed from above.

  In the above embodiment, all SWNTs having the specified chirality are removed. However, there are cases where it is desired to remove only SWNTs at a specific position among SWNTs having the same chirality. Therefore, for example, a specific chirality distribution image as shown in FIG. 7 is displayed on the screen of the display unit 22, and the user selects only a specific position, for example, [x1, y1] with the operation unit 21 such as a mouse. When specified, SWNT may be incinerated by irradiating only the specified position with high-power laser light for incineration.

  In practice, there may be a plurality of SWNTs having different chiralities at the same position. However, when such a portion is irradiated with a high-power laser beam as described above, it is necessary not only for the undesired SWNTs. SWNT may also be removed. In such a case, incineration can be performed by selectively aiming at a position where only an undesired SWNT exists without performing incineration for a position where necessary SWNTs overlap.

  It should be noted that the above embodiment is merely an example of the present invention, and it is obvious that modifications, modifications, and additions as appropriate within the scope of the present invention are included in the scope of the claims of the present application. For example, the apparatus according to the present invention can be applied not only to SWNTs but also to a wide range of nanotubes such as double carbon nanotubes (DWNT), multi-walled nanotubes, or peapods that are fullerene-containing nanotubes.

The schematic block diagram of the principal part of the CNT measuring apparatus by one Example of this invention. The optical path block diagram of the polychromator in FIG. 5 is a control / processing flowchart for characteristic operations in the CNT measuring apparatus according to the present embodiment. The top view which shows the whole measurement range of a sample. A three-dimensional graph (a) with dimensions of excitation wavelength, PL wavelength, and PL intensity, and a two-dimensional graph (b) with dimensions of PL wavelength and PL intensity at a specific excitation wavelength. The figure which shows an example of the three-dimensional graph of the excitation wavelength, PL wavelength, and PL intensity based on a measurement result. The figure which shows an example of the distribution image of a certain chirality.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Sample 2 ... Stage 3 ... Stage XY drive part 4 ... Near-infrared objective lens 5 ... Episcopic microscope 6 ... Probe head 7 ... Variable wavelength laser light source 8 ... Laser drive part 9 ... Wavelength drive part 10 ... Half mirror DESCRIPTION OF SYMBOLS 11 ... Monitor detector 12 ... Polychromator 121 ... Toroidal mirror 122, 124 ... Mirror 123 ... Slit 125 ... Diffraction grating 126 ... Concave mirror 127 ... Cylindrical lens 13 ... Detector 14 ... A / D converter 20 ... Control part 21 ... Operation unit 22 ... display unit 23 ... data processing unit 24 ... data collection unit 25 ... chirality calculation unit 26 ... distribution image creation unit

Claims (3)

A carbon nanotube measuring apparatus capable of evaluating a sample in which carbon nanotubes are dispersed and capable of operating the sample,
a) a measurement optical system including a light irradiation means for irradiating a sample with excitation light of a predetermined wavelength, and a detection means for detecting the intensity of photoluminescence emitted from the sample in response to the irradiation of the excitation light;
b) a moving means for moving two-dimensionally at least one of the sample and the measurement optical system in order to scan the irradiation position of the excitation light and the photoluminescence intensity detection position on the sample;
c) Based on the result of detecting the intensity of the photoluminescence while scanning the wavelength of the excitation light over a predetermined wavelength range, collect data consisting of the excitation light wavelength, the photoluminescence wavelength, and the photoluminescence intensity as a set, and the excitation wavelength. A chirality calculating means for calculating the chirality characterizing the carbon nanotube from the combination of the photoluminescence wavelength and the photoluminescence wavelength;
d) two-dimensional distribution information acquisition means for obtaining chirality at the position by the chirality calculating means for each scanning of the position by the moving means, and creating image information indicating the distribution of photoluminescence intensity on the sample for each chirality; ,
e) Based on the image information obtained by the two-dimensional distribution information acquisition means, the light irradiation means irradiates a position where a specific chirality exists or a specific position within a range where the specific chirality exists. And selectively removing means for burning specific carbon nanotubes by controlling the moving means and increasing the output of the irradiation light of the light irradiation means as compared with the time of excitation light irradiation and irradiating the sample with light. When,
A carbon nanotube measuring apparatus comprising:   2. The carbon nanotube measuring apparatus according to claim 1, wherein the selective removal means includes a designation means for a user to designate a specific chirality, and a position where the chirality designated by the designation means exists. A position specifying means for specifying using the image information obtained by the two-dimensional distribution information acquisition means.   2. The carbon nanotube measuring apparatus according to claim 1, wherein the selective removal means includes an image display means for displaying the image information created by the two-dimensional distribution information acquisition means on a screen, and the image display means. A carbon nanotube measuring apparatus comprising: a designating means for a user to designate a specific position in the displayed image information for the specific chirality.