JP2009159574A - Planar vibrator - Google Patents

Planar vibrator Download PDF

Info

Publication number
JP2009159574A
JP2009159574A JP2007338934A JP2007338934A JP2009159574A JP 2009159574 A JP2009159574 A JP 2009159574A JP 2007338934 A JP2007338934 A JP 2007338934A JP 2007338934 A JP2007338934 A JP 2007338934A JP 2009159574 A JP2009159574 A JP 2009159574A
Authority
JP
Japan
Prior art keywords
planar
magnetostrictive
magnetostrictive member
yoke
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007338934A
Other languages
Japanese (ja)
Inventor
Toshiyuki Ueno
敏幸 上野
Chihiro Saito
千尋 斉藤
Toshiro Higuchi
俊郎 樋口
Nobuo Imaizumi
伸夫 今泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Namiki Precision Jewel Co Ltd
Original Assignee
Namiki Precision Jewel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Namiki Precision Jewel Co Ltd filed Critical Namiki Precision Jewel Co Ltd
Priority to JP2007338934A priority Critical patent/JP2009159574A/en
Publication of JP2009159574A publication Critical patent/JP2009159574A/en
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a planar vibrator which uses a high magnetostriction material, is capable of miniaturization and simplification, and is suitable for a speaker or an ultrasonic-wave generating source. <P>SOLUTION: The planar vibrator includes a planar magnetostriction member 2, a bias magnetic-field generating magnet 4 and a coil 6 respectively arranged at different positions in planar directions L of the magnetostriction member, and a yoke 8 arranged in a direction T perpendicular to the planar directions of the magnetostriction member from the periphery of the magnetostriction member and extending at least up to the height same as that of the bias magnetic-field generating magnet. The planar vibrator functions as a vibrator by making the magnetostriction member be expanded and contracted in the planar directions by a signal supplied to the coil 6. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、磁歪材料を用いた振動子に関し、例えばスピーカや超音波発生源に用いて好適な振動子に関する。   The present invention relates to a vibrator using a magnetostrictive material, for example, a vibrator suitable for use in a speaker or an ultrasonic wave generation source.

従来から、平板圧電素子を用いた面状スピーカが知られている(特許文献1参照)。又、圧電素子に代えて磁歪材料を用いたスピーカも知られている(特許文献2,3参照)。   Conventionally, a planar speaker using a plate piezoelectric element is known (see Patent Document 1). A speaker using a magnetostrictive material instead of a piezoelectric element is also known (see Patent Documents 2 and 3).

特開平10−117397号公報Japanese Patent Laid-Open No. 10-117397 特開平11−266496号公報Japanese Patent Laid-Open No. 11-266496 特許第3615883号公報Japanese Patent No. 3615883

しかしながら、上記した特許文献1記載の技術の場合、圧電素子の厚み方向の変位を利用しているため変位量が小さい。更に高電圧駆動でインピーダンス変換が必要であるため、電源の小型化に限界があるという問題がある。又、圧電素子自体の機械的強度が低く、曲げ応力や衝撃力に弱い。   However, in the case of the technique described in Patent Document 1, the displacement amount is small because the displacement in the thickness direction of the piezoelectric element is used. Furthermore, since impedance conversion is necessary for high voltage driving, there is a problem that there is a limit to downsizing of the power supply. Further, the mechanical strength of the piezoelectric element itself is low, and it is weak against bending stress and impact force.

一方、上記した特許文献2,3記載の技術の場合、磁歪材料がロッド形状であり、長さ方向の振動を利用しているので、大きなスピーカ音量を得るにはある程度のロッド長さが必要であるため、スピーカの厚みが厚くなり、薄型の面状スピーカを製造するのが難しいという問題がある。   On the other hand, in the case of the techniques described in Patent Documents 2 and 3, since the magnetostrictive material is rod-shaped and uses vibration in the length direction, a certain amount of rod length is required to obtain a large speaker volume. Therefore, there is a problem that it is difficult to manufacture a thin planar speaker because the thickness of the speaker is increased.

また、面状スピーカの磁歪材料として、従来の磁歪材料、例えば鉄やニッケルでは磁歪量が小さく、大きなスピーカ音量を得ることが困難である。さらに、超磁歪材料Terfenol-Dは脆いため円板状へ加工することが難しい。   Further, as a magnetostrictive material for a planar speaker, a conventional magnetostrictive material such as iron or nickel has a small magnetostriction amount, and it is difficult to obtain a large speaker volume. Furthermore, the giant magnetostrictive material Terfenol-D is brittle and difficult to process into a disk shape.

本発明は上記の課題を解決するためになされたものであり、平板状の磁歪材料を用い、小型化や簡素化が可能で平面方向に大きく変位させることができる面状振動子の提供を目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a planar vibrator that uses a plate-like magnetostrictive material and can be miniaturized and simplified and can be greatly displaced in a plane direction. And

上記の目的を達成するために、本発明の面状振動子は、優れた加工性を有する鉄系の合金から成る磁歪材料を使用する。   In order to achieve the above object, the planar vibrator of the present invention uses a magnetostrictive material made of an iron-based alloy having excellent workability.

これにより平板状に加工した磁歪部材と、前記磁歪部材の平面方向の異なる位置にそれぞれ配置されるバイアス磁界発生磁石及びコイルと、前記磁歪部材の周縁から前記磁歪部材の平面方向と垂直な方向に配置され、少なくとも前記バイアス磁界発生磁石と同じ高さまで延設されるヨークとを備え、前記コイルに供給される信号により、前記磁歪部材が前記平面方向に伸縮する。   Accordingly, the magnetostrictive member processed into a flat plate shape, the bias magnetic field generating magnet and the coil arranged at different positions in the plane direction of the magnetostrictive member, and the direction perpendicular to the plane direction of the magnetostrictive member from the periphery of the magnetostrictive member And a yoke extending at least as high as the bias magnetic field generating magnet, and the magnetostrictive member expands and contracts in the plane direction by a signal supplied to the coil.

このような構成とすると、磁歪部材が平面方向に伸縮するため、従来の圧電素子を用いた厚み方向に変位する面状振動子に比べて変位量を大きくすることができ、例えばスピーカの音量を大きくすることができる。   With such a configuration, since the magnetostrictive member expands and contracts in the plane direction, it is possible to increase the amount of displacement compared to a conventional planar vibrator that displaces in the thickness direction using a piezoelectric element. Can be bigger.

さらに圧電素子と比較して、磁歪材料の方が機械的強度が高いので、曲げ応力や衝撃力に耐性を持たせることができる。   Furthermore, since the magnetostrictive material has higher mechanical strength than the piezoelectric element, it can be resistant to bending stress and impact force.

又、従来のロッド状の磁歪部材を用いたスピーカに比べ、スピーカの厚みを薄くすることができ、面状振動子の形状の自由度が高くなる。さらに、磁歪部材そのものが振動板として作用する。   Further, the thickness of the speaker can be reduced as compared with a speaker using a conventional rod-shaped magnetostrictive member, and the degree of freedom of the shape of the planar vibrator is increased. Further, the magnetostrictive member itself acts as a diaphragm.

より大音量を得るためには振動板を別個に設ける必要があるが、スピーカ内に配置されたバイアス磁界発生用磁石の漏れ磁束を利用して、磁性体からなる振動板に吸引固定させることができ、小型化や簡素化が図られる。   In order to obtain a larger volume, it is necessary to provide a diaphragm separately. However, it is possible to attract and fix the diaphragm made of a magnetic material by using the leakage magnetic flux of the bias magnetic field generating magnet disposed in the speaker. Can be reduced in size and simplified.

前記ヨークに代えて、前記磁歪部材がその周縁から前記垂直な方向に延設されていてもよい。   Instead of the yoke, the magnetostrictive member may extend from the periphery in the perpendicular direction.

前記磁歪部材は平板状の正磁歪材料と平板状の負磁歪材料とを積層してなるバイモルフであり、前記正磁歪材料が表面側に位置し、前記コイルに供給される信号により磁束が印加されて、前記磁歪部材が前記表面側に隆起する変位が重畳されるようにしてもよい。   The magnetostrictive member is a bimorph formed by laminating a flat positive magnetostrictive material and a flat negative magnetostrictive material, the positive magnetostrictive material is located on the surface side, and a magnetic flux is applied by a signal supplied to the coil. Then, the displacement of the magnetostrictive member rising on the surface side may be superimposed.

このような構成とすると、コイルに供給される信号により、磁歪部材は平面方向への伸縮に加え、表面側(正磁歪材料側)に隆起する変位が重畳されるので、変位量がさらに大きくなり、例えばスピーカの音量をより一層大きくすることができる。   In such a configuration, the magnetostrictive member is expanded and contracted in the plane direction by the signal supplied to the coil, and the displacement rising on the surface side (positive magnetostrictive material side) is superimposed. For example, the volume of the speaker can be further increased.

前記磁歪部材及び/又は前記ヨークの少なくとも一部に、渦電流損を減少させるためのスリットが形成されていてもよい。   A slit for reducing eddy current loss may be formed in at least a part of the magnetostrictive member and / or the yoke.

本発明によれば、平板状の磁歪材料を用い、面状振動子の小型化や簡素化が可能で平面方向に大きく変位させることができる。   According to the present invention, a planar magnetostrictive material is used, and the planar vibrator can be miniaturized and simplified and can be greatly displaced in the plane direction.

以下、本発明の実施形態について、図面を参照して説明する。図1(a)は、本発明の第1の実施形態に係る面状振動子と振動の対象物との構成を示す斜視図であり、図1(b)は図1(a)のA−A’における断面の斜視図である。この図において、面状振動子20は、円板状の磁歪部材2と、バイアス磁界発生磁石4と、コイル6と、磁歪部材2の上面に配置されるヨーク8とを備え、対象物(鉄板)10に吸着している。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig.1 (a) is a perspective view which shows the structure of the planar vibrator | oscillator which concerns on the 1st Embodiment of this invention, and the target object of a vibration, FIG.1 (b) is A- of Fig.1 (a). It is a perspective view of the section in A '. In this figure, a planar vibrator 20 includes a disk-shaped magnetostrictive member 2, a bias magnetic field generating magnet 4, a coil 6, and a yoke 8 arranged on the upper surface of the magnetostrictive member 2. ) 10 is adsorbed.

バイアス磁界発生磁石4はリング状をなし、磁歪部材2の中心2cと同心にしてヨーク8の下面に配置されている。又、コイル6もリング状をなし、バイアス磁界発生磁石4より外側で、かつ磁歪部材2の中心2cと同心にしてヨーク8の下面に配置されている。このように、バイアス磁界発生磁石4及びコイル6は、磁歪部材2の平面方向Lの異なる位置にそれぞれ配置される。   The bias magnetic field generating magnet 4 has a ring shape and is disposed on the lower surface of the yoke 8 so as to be concentric with the center 2c of the magnetostrictive member 2. The coil 6 also has a ring shape, and is disposed on the lower surface of the yoke 8 outside the bias magnetic field generating magnet 4 and concentric with the center 2c of the magnetostrictive member 2. As described above, the bias magnetic field generating magnet 4 and the coil 6 are respectively arranged at different positions in the plane direction L of the magnetostrictive member 2.

ヨーク8は磁歪部材2と同寸の円板をなし、磁歪部材2の下面に同心に積層されている。又、ヨーク8は、その周縁から磁歪部材の平面方向Lと垂直な方向Tに配置され、少なくともバイアス磁界発生磁石4と同じ厚み(高さ)まで延設されている。そして、ヨーク8の延設部の内側にコイル6の外縁が位置している。   The yoke 8 is a disk having the same size as the magnetostrictive member 2 and is concentrically laminated on the lower surface of the magnetostrictive member 2. Further, the yoke 8 is disposed in the direction T perpendicular to the planar direction L of the magnetostrictive member from the periphery thereof and extends at least to the same thickness (height) as the bias magnetic field generating magnet 4. The outer edge of the coil 6 is located inside the extending portion of the yoke 8.

なお、この実施形態においては、バイアス磁界発生磁石4の中心部の空隙に第2のヨーク8bが配置されているが、第2のヨーク8bは必ずしも設けられなくてもよい。一方、磁歪部材2の平面方向に充分なバイアス磁界を印加するため、ヨーク8は第1の実施形態で必須の構成である。   In this embodiment, the second yoke 8b is disposed in the gap in the center of the bias magnetic field generating magnet 4, but the second yoke 8b is not necessarily provided. On the other hand, in order to apply a sufficient bias magnetic field in the plane direction of the magnetostrictive member 2, the yoke 8 is an essential configuration in the first embodiment.

磁歪部材2としては、薄肉の円板状に加工が可能で、さらに磁歪量が大きな高磁歪材料を用いることが好ましい。高磁歪材料としては、例えばFe-Ga合金、Fe-Co合金、Fe-Al合金が挙げられる。   As the magnetostrictive member 2, it is preferable to use a high magnetostrictive material which can be processed into a thin disk shape and has a large magnetostriction amount. Examples of the high magnetostrictive material include Fe—Ga alloy, Fe—Co alloy, and Fe—Al alloy.

次に、磁歪部材2が磁界によって変位する態様について図2を参照して説明する。バイアス磁界発生磁石4から、磁歪部材2の表面(平面方向L)では中心2c側から周縁側に向かうバイアス磁界Hmが印加される。   Next, a mode in which the magnetostrictive member 2 is displaced by a magnetic field will be described with reference to FIG. A bias magnetic field Hm from the center 2c side to the peripheral side is applied from the bias magnetic field generating magnet 4 on the surface (plane direction L) of the magnetostrictive member 2.

ここで、コイル6に電流を印加して、平面方向Lにおいて中心2c側から周縁側に向かう磁界Hcを発生させると、磁歪部材2の平面方向Lには全体として中心2c側から周縁側に向かうHm+Hcの磁界が印加される。従って、磁歪部材2は、中心2cから周縁に向かって平面方向Lに伸びるように変位する。   Here, when a current is applied to the coil 6 to generate a magnetic field Hc from the center 2c side to the peripheral side in the plane direction L, the entire plane direction L of the magnetostrictive member 2 is from the center 2c side to the peripheral side. A magnetic field of Hm + Hc is applied. Accordingly, the magnetostrictive member 2 is displaced so as to extend in the plane direction L from the center 2c toward the periphery.

一方、コイル6に逆位相の磁界−Hcを印加すれば、磁歪部材2の平面方向Lには全体として中心2c側から周縁側に向かうHm−Hcの磁界が印加される。従って、磁歪部材2は、(Hm+Hcの磁界が印加された時に比べて)平面方向Lに縮む。このようにして、磁歪部材2は、交流磁界の周波数で平面方向Lに周期的に収縮する。   On the other hand, if a magnetic field −Hc having an opposite phase is applied to the coil 6, a magnetic field of Hm−Hc from the center 2 c side to the peripheral side as a whole is applied in the plane direction L of the magnetostrictive member 2. Accordingly, the magnetostrictive member 2 contracts in the plane direction L (compared to when a magnetic field of Hm + Hc is applied). In this way, the magnetostrictive member 2 periodically contracts in the plane direction L at the frequency of the alternating magnetic field.

なお、コイル6に印加する交流磁界と磁歪部材2の変位との関係は、例えば特許第2652644号公報の明細書及び図2に記載されている。   The relationship between the AC magnetic field applied to the coil 6 and the displacement of the magnetostrictive member 2 is described, for example, in the specification of Japanese Patent No. 22652644 and FIG.

このように磁歪部材2が平面方向Lに伸縮するため、従来の圧電素子を用いた厚み方向に変位する面状振動子に比べて変位量を大きくすることができ、例えばスピーカの音量を大きくすることができる。   Since the magnetostrictive member 2 expands and contracts in the plane direction L in this way, the amount of displacement can be increased as compared with a planar vibrator that displaces in the thickness direction using a conventional piezoelectric element. For example, the volume of the speaker is increased. be able to.

又、磁歪材料は異方性が大きく、平板状とした場合に厚み方向の変位を一定にすることが困難であるが、本発明においては平板状の磁歪材料を平面方向に変位させるため、かかる問題を回避できる。   In addition, the magnetostrictive material has a large anisotropy, and it is difficult to make the displacement in the thickness direction constant when it is a flat plate. However, in the present invention, the plate-like magnetostrictive material is displaced in the plane direction. The problem can be avoided.

なお、磁歪部材2の変位は、面状振動子20を吸着した対象体10に伝達され、対象体10が振動することにより音波が発生することになる。   The displacement of the magnetostrictive member 2 is transmitted to the target body 10 that has attracted the planar vibrator 20, and a sound wave is generated when the target body 10 vibrates.

又、本発明においては従来のロッド状の磁歪部材を用いたスピーカに比べ、スピーカの厚みを薄くすることができ、面状振動子の形状の自由度が高くなる。   Further, in the present invention, the thickness of the speaker can be reduced compared to a conventional speaker using a rod-shaped magnetostrictive member, and the degree of freedom of the shape of the planar vibrator is increased.

さらに、磁歪部材そのものが振動板として作用するので、振動板を別個に設ける従来の磁歪部材を用いたスピーカに比べ、小型化や簡素化が図られる。   Furthermore, since the magnetostrictive member itself acts as a diaphragm, the size and simplification can be achieved as compared with a speaker using a conventional magnetostrictive member in which a diaphragm is provided separately.

これらに加え、ヨークがその周縁から磁歪部材の平面方向と垂直な方向に延び、少なくともバイアス磁界発生磁石と同じ厚み(位置)まで延設されているので、面状振動子の裏面に磁束が回り込み、面状振動子の裏面に置いた対象物(磁性体)10に面状振動子を磁力で吸着固定できる。   In addition to this, the yoke extends in the direction perpendicular to the plane direction of the magnetostrictive member from its periphery and extends at least to the same thickness (position) as the bias magnetic field generating magnet, so that the magnetic flux wraps around the back surface of the planar vibrator. The planar vibrator can be attracted and fixed by magnetic force to the object (magnetic body) 10 placed on the back surface of the planar vibrator.

又、面状振動子の裏面に置いた対象物10が非磁性体の場合は、その裏面に磁性体を設置すれば、面状振動子を対象物10に固定できる。   When the object 10 placed on the back surface of the planar vibrator is a non-magnetic material, the planar vibrator can be fixed to the object 10 by installing a magnetic material on the back surface.

本発明の第1の実施形態に係る面状振動子の大きさは特に制限されないが、例えば磁歪部材2の直径2〜10mm、面状振動子の厚み1〜5mm程度、とすることができる。   The size of the planar vibrator according to the first embodiment of the present invention is not particularly limited. For example, the diameter of the magnetostrictive member 2 may be 2 to 10 mm, and the thickness of the planar vibrator may be about 1 to 5 mm.

又、第1の実施形態において、磁歪部材2の周縁とヨーク8の側面の両方又は、どちらか一方にスリットも設けることにより、渦電流損を減少させる効果を得られる。   In the first embodiment, an effect of reducing eddy current loss can be obtained by providing slits in both or either of the peripheral edge of the magnetostrictive member 2 and the side surface of the yoke 8.

次に、本発明の第2の実施形態に係る面状振動子について、その構成を示す断面斜視図である図3を参照して説明する。この図において、面状振動子21は、円板状の磁歪部材3と、バイアス磁界発生磁石4bと、コイル6とを備えているが、ヨークを備えていない。   Next, a planar vibrator according to a second embodiment of the present invention will be described with reference to FIG. 3 which is a cross-sectional perspective view showing the configuration. In this figure, the planar vibrator 21 includes a disk-shaped magnetostrictive member 3, a bias magnetic field generating magnet 4b, and a coil 6, but does not include a yoke.

尚、第2の実施形態においては、磁歪部材3がバイモルフであること、バイアス磁界発生磁石4bがリング状でなく円板状(中実)であること、及びヨークを備えていないこと以外は第1の実施形態と変わるところがないので、第1の実施形態と同一の構成部分については同一の符号を付して説明を省略する。   In the second embodiment, the magnetostrictive member 3 is bimorph, the bias magnetic field generating magnet 4b is not in a ring shape but in a disk shape (solid), and no yoke is provided. Since there is no difference from the first embodiment, the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

磁歪部材3は円板状の正磁歪材料3xと、これと同寸の負磁歪材料3yとを同心に積層し、正磁歪材料3xが表面側に位置するバイモルフである。バイモルフに磁界を印加すると負磁歪材料3yが収縮し、正磁歪材料3xが伸長し、バイモルフの表面は正磁歪材料3x側(図4の上側)へ変位(隆起)する。   The magnetostrictive member 3 is a bimorph in which a disc-like positive magnetostrictive material 3x and a negative magnetostrictive material 3y having the same size are laminated concentrically, and the positive magnetostrictive material 3x is located on the surface side. When a magnetic field is applied to the bimorph, the negative magnetostrictive material 3y contracts, the positive magnetostrictive material 3x expands, and the surface of the bimorph is displaced (raised) toward the positive magnetostrictive material 3x (upper side in FIG. 4).

一方、磁歪部材3を構成する正磁歪材料3x自体は、第1の実施形態と同様にしてコイル6に供給される信号により、平面方向Lへ伸縮する。   On the other hand, the positive magnetostrictive material 3x itself constituting the magnetostrictive member 3 expands and contracts in the plane direction L by a signal supplied to the coil 6 in the same manner as in the first embodiment.

従ってコイル6に供給される信号により、磁歪部材3は平面方向Lへの伸縮に加え、表面側(正磁歪材料3x側)に隆起する変位が重畳されるので、変位量がさらに大きくなり、例えばスピーカの音量をより一層大きくすることができる。   Accordingly, the magnetostrictive member 3 is superposed on the surface side (positive magnetostrictive material 3x side) in addition to the expansion and contraction in the plane direction L by the signal supplied to the coil 6, so that the displacement amount is further increased. The volume of the speaker can be further increased.

負磁歪材料3yとしては、Ni系合金が挙げられる。又、負磁歪材料3xと正磁歪材料3yとを接着又は溶接(スポット溶接等)することにより、これらを積層することができる。   Examples of the negative magnetostrictive material 3y include Ni-based alloys. Moreover, these can be laminated | stacked by adhere | attaching or welding (spot welding etc.) the negative magnetostrictive material 3x and the positive magnetostrictive material 3y.

尚、負磁歪材料3y側が表面に位置する場合、コイル6への信号により磁歪部材3が表面側に隆起せず、変位量を大きくしないので不適である。   In addition, when the negative magnetostrictive material 3y side is located on the surface, the magnetostrictive member 3 does not rise to the surface side due to a signal to the coil 6 and is not suitable because the displacement amount is not increased.

又、第2の実施形態においては、ヨークの代わりに、磁歪部材3を構成する正磁歪材料3xがその周縁から垂直な方向Tに延設され、延設部の内側に負磁歪材料3yの外縁及びコイル6の外縁が位置している。   In the second embodiment, instead of the yoke, the positive magnetostrictive material 3x constituting the magnetostrictive member 3 is extended in the direction T perpendicular to the periphery thereof, and the outer edge of the negative magnetostrictive material 3y is provided inside the extended portion. And the outer edge of the coil 6 is located.

そして、正磁歪材料3xの延設部がヨークとして作用し、バイアス磁界発生磁石4bの磁束密度を高めて磁力を有効に利用することができる。   The extending portion of the positive magnetostrictive material 3x acts as a yoke, and the magnetic flux can be effectively utilized by increasing the magnetic flux density of the bias magnetic field generating magnet 4b.

本発明は上記実施形態に限定されない。例えば、磁歪部材の平面形状は制限されず、円板状の他、例えば矩形板状とすることができる。   The present invention is not limited to the above embodiment. For example, the planar shape of the magnetostrictive member is not limited and can be, for example, a rectangular plate shape in addition to a disk shape.

又、上記第1の実施形態においてヨークの形状は制限されず、磁歪部材の周縁からその垂直な方向に延びるものであればよく、例えばリング状のヨークや、中心部分がドーナツ状に開口したリングを用いることができる。   In the first embodiment, the shape of the yoke is not limited, and any shape may be used as long as it extends in the perpendicular direction from the periphery of the magnetostrictive member. For example, a ring-shaped yoke or a ring having a central portion opened in a donut shape. Can be used.

又、上記第1の実施形態においてヨークを磁歪部材の下面に配置し、ヨークの下面を対象物に吸着させてもよく、この場合も同様に振動子として機能させることができる。   In the first embodiment, the yoke may be disposed on the lower surface of the magnetostrictive member, and the lower surface of the yoke may be attracted to the object. In this case as well, it can function as a vibrator.

又、上記第1の実施形態において、磁歪部材とヨークの間に負磁歪部材を介装し、磁歪部材をバイモルフとして構成し、第2の実施形態と同様の作用を付加させてもよい。   Further, in the first embodiment, a negative magnetostrictive member may be interposed between the magnetostrictive member and the yoke, and the magnetostrictive member may be configured as a bimorph so that the same action as in the second embodiment is added.

又、上記第2の実施形態において、その周縁から垂直な方向Tに対象物10に向かって延設される正磁歪材料3xを、周縁から垂直な方向ではなく、対象物10に向かって末広がりとなるように角度をつけて延設させてもよい。   In the second embodiment, the positive magnetostrictive material 3x extending toward the object 10 in the direction T perpendicular to the periphery of the positive magnetostrictive material 3x extends toward the object 10 instead of the direction perpendicular to the periphery. You may make it extend at an angle so that it may become.

又、上記第2の実施形態において、負磁歪部材をなくしたもの、つまり第1の実施形態においてヨークの代わりに磁歪部材の周縁を対象物10に向かって垂直な方向あるいは、末広がりとなる方向に延設したものとすることができる。さらに、第2の実施形態において、正磁歪部材でなく負磁歪部材の周縁を対象物10に向かって延設させてもよい。   Further, in the second embodiment, the negative magnetostrictive member is eliminated, that is, in the first embodiment, the periphery of the magnetostrictive member instead of the yoke is in a direction perpendicular to the object 10 or in a direction of spreading toward the end. It can be extended. Furthermore, in the second embodiment, the periphery of the negative magnetostrictive member may be extended toward the object 10 instead of the positive magnetostrictive member.

本発明は、磁歪部材をその平面に伸縮させるあらゆる用途に適用することができ、特に厚みを薄くすることができる点で利点がある。特に、スピーカや超音波発信源として本発明は有効となる。   The present invention can be applied to all uses for expanding and contracting the magnetostrictive member in its plane, and is particularly advantageous in that the thickness can be reduced. In particular, the present invention is effective as a speaker or an ultrasonic wave transmission source.

本発明の第1の実施形態に係る面状振動子の構成を示す斜視図(a)及び断面斜視図(b)である。1A and 1B are a perspective view and a cross-sectional perspective view showing a configuration of a planar vibrator according to a first embodiment of the present invention. 磁歪部材が磁束によって変位する態様を示す断面図である。It is sectional drawing which shows the aspect which a magnetostriction member displaces with magnetic flux. 本発明の第2の実施形態に係る面状振動子の構成を示す断面斜視図である。It is a cross-sectional perspective view which shows the structure of the planar vibrator | oscillator based on the 2nd Embodiment of this invention.

符号の説明Explanation of symbols

2、3 磁歪部材
2c (磁歪部材2の)中心
3x 正磁歪材料
3y 負磁歪材料
4、4b バイアス磁界発生磁石
6 コイル
8、8b ヨーク
10 対象物(鉄板)
20、21 面状振動子
Hm、Hc 磁界
L 磁歪部材の平面方向
T 平面方向に垂直な方向
2, 3 magnetostrictive member 2c (magnetostrictive member 2) center 3x positive magnetostrictive material 3y negative magnetostrictive material 4, 4b bias magnetic field generating magnet 6 coil 8, 8b yoke 10 object (iron plate)
20, 21 Planar vibrator Hm, Hc Magnetic field L Planar direction of magnetostrictive member T Direction perpendicular to plane direction

Claims (3)

平板状の磁歪部材と、
前記磁歪部材の平面方向の異なる位置にそれぞれ配置されるバイアス磁界発生磁石及びコイルと、
前記磁歪部材の周縁から前記磁歪部材の平面方向と垂直な方向に延設され、少なくとも前記バイアス磁界発生磁石と同じ高さを有するヨークとを備え、
前記コイルに供給される信号により、前記磁歪部材が前記平面方向に伸縮する面状振動子。
A plate-like magnetostrictive member;
Bias magnetic field generating magnets and coils respectively disposed at different positions in the plane direction of the magnetostrictive member;
A yoke extending from a peripheral edge of the magnetostrictive member in a direction perpendicular to the planar direction of the magnetostrictive member, and having at least the same height as the bias magnetic field generating magnet,
A planar vibrator in which the magnetostrictive member expands and contracts in the planar direction by a signal supplied to the coil.
前記ヨークに代えて、前記磁歪部材がその周縁から前記垂直な方向に延設されている請求項1記載の面状振動子。   The planar vibrator according to claim 1, wherein the magnetostrictive member is extended from the peripheral edge in the perpendicular direction instead of the yoke. 前記磁歪部材が平板状の正磁歪材料と平板状の負磁歪材料とを積層してなるバイモルフである請求項1又は2記載の面状振動子。   3. The planar vibrator according to claim 1, wherein the magnetostrictive member is a bimorph formed by laminating a flat positive magnetostrictive material and a flat negative magnetostrictive material.
JP2007338934A 2007-12-28 2007-12-28 Planar vibrator Withdrawn JP2009159574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007338934A JP2009159574A (en) 2007-12-28 2007-12-28 Planar vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007338934A JP2009159574A (en) 2007-12-28 2007-12-28 Planar vibrator

Publications (1)

Publication Number Publication Date
JP2009159574A true JP2009159574A (en) 2009-07-16

Family

ID=40963019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007338934A Withdrawn JP2009159574A (en) 2007-12-28 2007-12-28 Planar vibrator

Country Status (1)

Country Link
JP (1) JP2009159574A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018230154A1 (en) * 2017-06-16 2018-12-20 国立大学法人東北大学 Energy conversion member, vibration power generation device, force sensor device, and actuator
CN111871747A (en) * 2020-07-31 2020-11-03 零声科技(苏州)有限公司 Capacitance-sensing type electromagnetic ultrasonic transducer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018230154A1 (en) * 2017-06-16 2018-12-20 国立大学法人東北大学 Energy conversion member, vibration power generation device, force sensor device, and actuator
JPWO2018230154A1 (en) * 2017-06-16 2019-11-07 国立大学法人東北大学 Energy conversion member, vibration power generation device, force sensor device, and actuator
CN110754035A (en) * 2017-06-16 2020-02-04 国立大学法人东北大学 Energy conversion member, vibration power generation device, force sensor device, and driver
US11131588B2 (en) 2017-06-16 2021-09-28 Tohoku University Energy converter, vibration power generator, force sensor device, and actuator
CN111871747A (en) * 2020-07-31 2020-11-03 零声科技(苏州)有限公司 Capacitance-sensing type electromagnetic ultrasonic transducer

Similar Documents

Publication Publication Date Title
US8995705B2 (en) Multi-layer armature for moving armature receiver
US9601980B2 (en) Electromechanical transducer and electroacoustic transducer
US11070119B2 (en) Manufacturing method of vibrating actuator
US9301054B2 (en) Electromechanical transducer and electrocoustic transducer
JP5802547B2 (en) Electromechanical transducer, electroacoustic transducer and hearing aid using the same
US20140153749A1 (en) Magnetic yoke used for a moving-iron microphone/transducer
TW201043050A (en) Planar acoustic transducer and its driving method
JP4845677B2 (en) Electroacoustic transducer
JP2008118217A (en) Electroacoustic transducer
JP2009159574A (en) Planar vibrator
JP2009267779A (en) Electromagnetic electro-acoustic transducer
JP5123247B2 (en) Thin acoustoelectric transducer
JP2006238575A (en) Actuator
JP2016502323A (en) Electromagnetic transducer and vibration control system
KR100986562B1 (en) Flat vibration speaker using magnetostrictive actuator
JP2010021785A (en) Electromagnetic transducer
JP4632898B2 (en) Electroacoustic transducer and vibrator thereof
JP2012217014A (en) Oscillation device and electronic apparatus
JP3024996B2 (en) Magnetostrictive element
JP2002055683A (en) Electromagnetic type acoustic transducer
JP5852406B2 (en) Diaphragm and electroacoustic transducer using the same
JP2008011340A (en) Acoustic speaker
JP2003274487A (en) Electroacoustic transducer
JPH0496600A (en) Underwater transmitter made of rare-earth alloy
JP5281427B2 (en) Oscillator

Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20110301