JP2009148703A - Pattern forming device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern forming device which can shorten a time from the beginning of an exchanging operation of a sub-carriage to the arrangement of each carriage at a drawing position, and efficiently control temperature in a chamber. <P>SOLUTION: A partition wall 3 is installed which divides a chamber 2 of a droplet discharge device 1 into a first chamber Z1 and a second chamber Z2. The partition wall 3 is installed at a position allowing each carriage to reciprocate between the first chamber Z1 and the second chamber Z2 and allowing a weight measuring unit 54 and a first capping unit CU1 to be arranged in the second chamber Z2. When a first door D1 is unlocked, the carriages located in the first chamber and second to sixth capping units CU2-CU6 are stopped. Therefore, preparation of drawing, such as the initial charge of a functional liquid in the second chamber Z2 and the exchanging operation of the sub-carriage by an operator in the first chamber Z1 can be carried out at the same time. A space requiring temperature control is only the second chamber Z2, thereby enabling efficient temperature control. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a pattern forming apparatus.

  In general, as an apparatus for forming a desired pattern on a substrate using a functional liquid, an ink jet apparatus that discharges the functional liquid as droplets, that is, a droplet discharge apparatus is known. In the droplet discharge device, a droplet discharge head for discharging a functional liquid into droplets is arranged in a drawing area, and the substrate placed on the stage and the droplet discharge head are relatively moved two-dimensionally, A desired pattern is formed by arranging droplets ejected from the droplet ejection head at arbitrary positions on the substrate.

  In recent years, a multi-carriage type droplet discharge device is known in which a sub-carriage having a plurality of droplet discharge heads is fixed to a carriage and a plurality of carriages are mounted. Such a droplet discharge device is used for manufacturing a large screen color filter, and improves the drawing speed by discharging droplets simultaneously from a plurality of carriages.

  Such a droplet discharge device is provided with a maintenance unit that performs maintenance of the droplet discharge head (for example, Patent Document 1). The maintenance unit is provided with a suction unit that sucks the functional liquid in the droplet discharge head from each nozzle, a wiping unit that wipes off the functional liquid attached to the nozzle plate of the droplet discharge head, and the like.

By the way, when a problem such as clogging or damage occurs in the droplet discharge head, replacement work of the sub-carriage provided with the droplet discharge head is performed. This sub-carriage replacement operation is performed by an operator by moving each carriage to a position directly above the suction unit. When the replacement work of all the sub-carriages is completed, the droplet discharge device performs the position adjustment of each sub-carriage and the initial filling of the functional liquid into the droplet discharge head provided in each carriage. Position the carriage to the drawing position.
JP 2006-76067 A

  However, in the above-described droplet discharge device, unless the sub-carriage replacement operation is completed in all carriages, the position adjustment of each sub-carriage, which is the next operation, and the functional liquid is applied to the droplet discharge head provided in each carriage. It was not possible to move on to the initial filling operation. That is, the carriage for which the sub-carriage replacement work has been completed has to wait as it is until the last sub-carriage replacement work is completed.

Therefore, it takes a long time to start the sub-carriage replacement operation and to arrange each carriage at the drawing position, which significantly reduces the productivity of the droplet discharge device.
Further, the droplet discharge head during drawing generates heat by a drive element that drives the droplet discharge head. For this reason, the droplet discharge device is placed in a chamber whose temperature is adjusted so that the temperature of the atmosphere becomes a predetermined temperature and drawing is performed. However, in the above-described droplet discharge device, the temperature adjustment is performed efficiently because the temperature of the entire chamber is adjusted even though the droplet discharge head serving as the heat source is biased to one side of the chamber. It was hard to say.

The present invention has been made to solve the above-mentioned problems, and its object is to reduce the time required from the start of sub-carriage replacement work to the placement of each carriage at the drawing position, and efficiently in the chamber. An object of the present invention is to provide a pattern forming apparatus capable of adjusting the temperature.

    The present invention includes a transfer table for transferring a substrate placed by reciprocating in the main scanning direction, and extending in a sub-scanning direction above the transfer path of the transfer table and perpendicular to the main scanning direction. A pair of guide rails, a plurality of carriages supported by the pair of guide rails and independently reciprocally movable in the sub-scanning direction along the pair of guide rails, and detachably attached to the carriage A pair of guides provided on a sub-carriage and spaced apart from a transport path of a transporting table, and a droplet discharge head that discharges functional liquid droplets onto the substrate and draws a pattern on the substrate; A cap that is juxtaposed along the rail in the sub-scanning direction, caps the droplet discharge head provided on the sub-carriage, and sucks the functional liquid from the droplet discharge head. A pattern forming apparatus comprising a drawing / drawing preparation area partitioned by a partition and a room having a replacement work area, and arranged in parallel in the sub-scanning direction with the transport table. At least one of the capping units located on the transport table side among the capping units is arranged in the drawing / drawing preparation area, and the replacement work is performed on the rest of the capping units arranged in parallel in the sub-scanning direction. Arranged in the area.

  According to the pattern forming apparatus of the present invention, for example, when the worker is in the replacement work area, the carriage and the capping unit placed in the replacement work area are stopped and placed in the drawing / drawing preparation area. The carriage and the capping unit can be driven.

  That is, even when the operator is replacing the sub-carriage in the replacement work area, the drawing preparation such as the initial filling of the functional liquid using the capping unit is performed on another carriage in the drawing / drawing preparation area. Can be done against. Accordingly, the operator can sequentially perform the carriage drawing preparation and the sub-carriage replacement work by sequentially moving the carriage for which the sub-carriage replacement work has been completed to the drawing / drawing preparation area. As a result, the time required from the start of subcarriage replacement work to the completion of drawing preparation for all carriages can be shortened, and the production efficiency of the pattern forming apparatus can be improved. In addition, since the droplet discharge head during drawing is arranged in the drawing / drawing preparation area and the temperature adjustment region can be reduced, the temperature can be adjusted efficiently.

  The pattern forming apparatus includes: a reference position detection sensor configured to detect whether the sub-carriage arranged in the drawing / drawing preparation area is arranged at a predetermined reference position in the drawing / drawing preparation area; It is preferable to provide reference position arranging means for arranging the sub-carriage at the reference position based on a detection signal from a reference position detection sensor.

  According to this pattern forming apparatus, for example, even when the origin position of each sub-carriage is provided in the exchange work area, the feed amount from each origin position to the reference position of the drawing / drawing preparation area is set in advance. By setting, a new origin position of each sub-carriage can be set in the drawing / drawing preparation area, and the origin can be returned to the new origin position.

  That is, the origin can be returned to the new origin position in the drawing / drawing preparation area without disposing each sub-carriage at the origin position in the original replacement work area. Accordingly, each carriage moved from the replacement work area to the drawing / drawing preparation area by the operator can be accurately arranged at each drawing position.

  The pattern forming apparatus stops the carriage positioned in the replacement work area based on a carriage detection sensor that detects the carriage positioned in the replacement work area and a detection signal from the carriage detection sensor. It is preferable to provide carriage stop control means for bringing the capping unit to a state and capping unit stop control means for bringing the capping unit disposed in the replacement work area to a stop state.

  According to the pattern forming apparatus of the present invention, for example, when the door that enters the replacement work area from the outside of the room is unlocked, that is, when it is assumed that the worker is working in the replacement work area, the replacement work is performed. The carriage and capping unit located in the area can be stopped. Therefore, even when the carriage drawing preparation is performed in the drawing / drawing preparation area, the sub-carriage replacement work can be safely performed in the replacement work area.

  In this pattern forming apparatus, the partition wall communicates the exchange work area with the drawing / drawing preparation area and allows the carriage to move between the exchange work area and the drawing / drawing preparation area. And a shutter portion that opens or closes the communication window.

  According to this pattern forming apparatus, since the replacement work area and the drawing / drawing preparation area can be partitioned by the partition wall, the replacement work of the sub-carriage by the worker can be performed more safely in the replacement work area. .

In the pattern forming apparatus, a weight measuring unit for measuring a discharge weight of a droplet discharged from the droplet discharge head may be provided in the drawing / drawing preparation area.
According to this pattern forming apparatus, in the drawing / drawing preparation area, the position of the sub-carriage is initialized and the functional liquid is initially filled in the liquid droplet ejection head, and then the liquid ejected from the liquid droplet ejection head The droplet discharge weight can be measured. Therefore, a high-definition pattern can be formed on the substrate by making the discharge weight of the droplets discharged from each droplet discharge head equal based on the result of the discharge weight measurement. In addition, weight measurement can be performed in parallel with the replacement work of the sub-carriage in the replacement work area.

In the pattern forming apparatus, the capping unit may be provided on both sides of the transport table along the sub-scanning direction.
According to this pattern forming apparatus, the capping unit is provided on both sides of the transport table. That is, the replacement work area is provided on both sides of the drawing / drawing preparation area. Therefore, the sub-carriage replacement work and the carriage drawing preparation can be performed simultaneously. As a result, it is possible to further reduce the time required from the start of subcarriage replacement work to the end of drawing preparation for all the carriages, thereby improving the production efficiency of the pattern forming apparatus.

Hereinafter, an embodiment of a pattern forming apparatus embodying the present invention will be described with reference to the drawings.
FIG. 1 shows a schematic configuration of a droplet discharge device 1 as a pattern forming device for forming red, green, and blue color filters on a glass substrate on which a black matrix is formed. As shown in FIGS. 1 and 2, the droplet discharge device 1 includes a chamber 2 having a substantially square frame shape. The room 2 is provided with a partition wall 3. The partition 3 is partitioned into a first chamber Z1 as an exchange work area and a second chamber Z2 as a drawing / drawing preparation area, which is temperature-controlled at a predetermined temperature by an air conditioner (not shown). The room 2 is provided with a first door D1 provided on the side wall of the room 2 and a second door D2 provided on the partition wall 3. When the first door D1 is in the unlocked state, it is possible to enter the first chamber Z1 from outside the room 2. Similarly, when the second door D2 is unlocked, it is possible to enter the second chamber Z2 from the first chamber Z1.

  In the droplet discharge device 1, a base 10 extending in the main scanning direction (X-axis direction) is installed on the floor surface of the second chamber Z2, and a pair of X-axis guide rails 11 are disposed on the upper surface 10a in the main scanning direction. An X-axis moving plate 12 constituting a transfer table is placed on the pair of X-axis guide rails 11 laid in the (X-axis direction). The X-axis moving plate 12 is mounted so as to be movable along the X-axis guide rail 11 in the main scanning direction. The pair of X-axis guide rails 11 are provided with an X-axis linear motor M1. The X-axis linear motor M1 moves an X-axis moving plate 12 mounted on the pair of X-axis guide rails 11 to an air slider (not shown). ) To reciprocate in the X-axis direction.

  1 and 2, the main scanning direction is the X-axis direction, the sub-scanning direction orthogonal to the main scanning direction (X-axis direction) is the Y-axis direction, the direction orthogonal to the X-axis direction and the Y-axis direction (vertical direction) ) Is expressed as the Z-axis direction, and the rotation direction around the Z-axis direction is expressed as the θ direction.

  On the upper surface of the X-axis moving plate 12, a substrate stage 14 constituting a transfer table is provided. The substrate stage 14 is a vacuum suction table, and a color filter substrate (referred to as a CF substrate) W made of a glass substrate is sucked and fixed on the upper surface thereof, and the CF substrate W is transported. The substrate stage 14 is supported and fixed so as to be rotatable in the θ direction with respect to the X-axis moving plate 12 by a stage rotating mechanism 16 indicated by a broken line provided between the X-axis moving plate 12 and the substrate stage 14. .

  Accordingly, the substrate stage 14 (CF substrate W) moves in the X-axis direction (main scanning direction) together with the X-axis moving plate 12. The substrate stage 14 (CF substrate W) rotates in the θ direction in parallel with the plane (XY plane (horizontal plane)) of the X-axis moving plate 12.

  A pair of Y-axis guide rails 18 formed along the Y-axis direction are disposed so as to straddle the upper direction of the X-axis guide rail 11. A column 19a at one end of the pair of Y-axis guide rails 18 is erected on one side of the upper surface 10a of the base 10, and a column 19b at the other end is installed in the first chamber Z1 and in the second chamber Z2. Standing on a floor separated from the base 10.

  That is, the pair of Y-axis guide rails 18 are formed to extend from the second chamber Z2 to the first chamber through the partition wall 3 (through a communication window (not shown) formed in the partition wall 3). The pair of Y-axis guide rails 18 are arranged in parallel at a predetermined interval in the X-axis direction. In this embodiment, in the pair of Y-axis guide rails 18 extending in parallel to the Y-axis direction, the upper position of the base 10 is defined as the drawing area A1, and the position away from the base 10 is defined as the standby area A2 (see FIG. 2).

  As shown in FIG. 2, a first base block 55 is provided in the second chamber Z <b> 2 and below the intermediate position between the pair of Y-axis guide rails 18. Further, a second base block 56 is provided in the second chamber Z2 and below the intermediate position between the pair of Y-axis guide rails 18.

The carriage plate P is disposed between the pair of Y-axis guide rails 18 so as to be passed. In the present embodiment, six carriage plates P are arranged, and the first, second, third, fourth, fifth and sixth carriage plates P1, P2, P3, P4 are sequentially arranged from the left side of FIG. P5 and P6. The first to sixth carriage plates P1 to P6 are placed so as to be movable along the Y-axis guide rail 18 in the sub-scanning direction (Y-axis direction). That is, the first to sixth carriage plates P1 to P6 are placed so as to be movable in the first chamber Z1 and the second chamber Z2.

  The pair of Y-axis guide rails 18 includes a Y-axis linear motor M2, and the Y-axis linear motor M2 includes first to sixth carriage plates P1 to P6 mounted on the pair of Y-axis guide rails 18 respectively. It is reciprocated in the Y-axis direction via an air slider (not shown). The first to sixth carriage plates P1 to P6 reciprocate in the drawing area A1 and the standby area A2 on the Y-axis guide rail 18.

  On the top surfaces of the first to sixth carriage plates P1 to P6, the functional liquid supply unit 22 and the head electrical unit 23 are mounted, respectively. The functional liquid supply unit 22 stores a predetermined amount of the functional liquid F (see FIG. 4B) and supplies the functional liquid F to each droplet discharge head 40 (see FIGS. 4A and 4B). Supply circuit device for The head electrical unit 23 is an electric circuit device for supplying an electric signal for driving each droplet discharge head 40.

  The functional liquid F referred to here is red, green, and blue filter inks arranged in a black matrix frame formed on the CF substrate W. When the functional liquid F is placed in the frame of the black matrix formed on the CF substrate W and then dried, it becomes red, green, and blue filters.

  As shown in FIG. 3, a suspension mechanism 25 is provided at the center position of each lower surface of the first to sixth carriage plates P1 to P6, and the carriage 30 is attached to the lower end portion of the suspension mechanism 25. Yes. In the present embodiment, when the carriages 30 attached to the suspension mechanisms 25 of the first to sixth carriage plates P1 to P6 are referred to separately, the first, second, third, fourth and fourth The fifth and sixth carriages 30a, 30b, 30c, 30d, 30e, and 30f are used.

  The suspension mechanism 25 includes a suspension substrate 26, a suspension rotation frame 27, and a suspension support frame 28. The suspended substrate 26 is connected and fixed to the center position of the lower surface of the first to sixth carriage plates P1 to P6, and the suspended rotation frame 27 is connected to the lower end portion thereof. The suspension rotation frame 27 is connected and supported at the lower end thereof so that the suspension support frame 28 is rotatable in the θ direction. The suspension rotation frame 27 has a θ-axis rotation motor (not shown). The θ-axis rotation motor attaches the suspension support frame 28 to the suspension substrate 26 (first to sixth carriage plates P1 to P6). Is rotated in the θ direction. A carriage 30 is supported and fixed on the suspension support frame 28, and the carriage 30 suspended from the suspension mechanism 25 is rotated in the θ direction.

The carriage 30 has a substantially rectangular parallelepiped carriage frame 31. The carriage frame 31 is provided with openings on both side surfaces in the X-axis direction and the Y-axis direction (the respective openings in the X-axis direction are not shown). Air can flow in and out. A sub-carriage 33 is attached to a lower end portion of a substantially rectangular parallelepiped carriage frame 31 of the carriage 30 with screws or the like (not shown). The droplet discharge head 40 is detachably attached to the unit plate 34 of the sub-carriage 33 and is positioned and fixed with high accuracy with respect to a reference member 35 provided on the unit plate 34. In this embodiment, three droplet discharge heads 40 arranged in parallel along the X-axis direction are attached in two rows in parallel to the Y-axis direction, that is, a total of six droplet discharge heads 40 are attached. Yes. That is, by disposing the reference member 35 at a predetermined position, each of the six droplet discharge heads 40 is disposed at a predetermined position. Moreover, although piping, wiring, etc. are arrange | positioned inside the carriage frame 31, since it becomes complicated if it displays, illustration is abbreviate | omitted.
(Droplet discharge head 40)
Next, the droplet discharge head 40 attached to the unit plate 34 will be described with reference to FIG. FIG. 4A is an external perspective view of the droplet discharge head as viewed from the substrate stage 14 side. The droplet discharge head 40 includes a liquid introduction part 41 having two connection needles 42, a head substrate 43 that is continuous to the side of the liquid introduction part 41, a pump part 44 that is continuous to the liquid introduction part 41, and a pump part 44. A nozzle plate 45 is provided.

  A pipe connection member (not shown) connected to the functional liquid supply unit 22 is connected to the connection needle 42 of the liquid introduction part 41. A pair of head connectors 43A is mounted on the head substrate 43, and a flexible flat cable (not shown) connected to the head electrical unit 23 is connected via the head connector 43A.

On the other hand, the pump portion 44 and the nozzle plate 45 constitute a square head main body 40A.
On the nozzle forming surface 45 a of the nozzle plate 45, two nozzle rows 47 including discharge nozzles 46 that discharge the droplets Fb are formed. The two nozzle rows 47 are arranged in parallel to each other, and each nozzle row 47 is configured by 180 (schematically illustrated) discharge nozzles 46 arranged in parallel at an equal pitch. Yes. That is, two nozzle rows 47 are symmetrically arranged on the nozzle forming surface 45a of the head main body 40A with the center line therebetween.

  FIG. 4B shows the inside of the pump unit 44 of the droplet discharge head 40, and has a cavity 52, a diaphragm 53, and a piezoelectric element PZ as a drive element above each discharge nozzle 46. Each cavity 52 is connected to the functional liquid supply unit 22 via a pipe connection member (not shown), stores the functional liquid F (filter ink) from the functional liquid supply unit 22, and discharges the filter ink. 46. The vibration plate 53 vibrates the meniscus of the discharge nozzle 46 by enlarging and reducing the volume of the cavity 52 by vibrating the area facing each cavity 52 in the Z direction. When each piezoelectric element PZ receives a predetermined drive waveform signal, each piezoelectric element PZ contracts and expands in the Z direction to vibrate each area of the diaphragm 53 in the Z direction. When each diaphragm 53 vibrates in the Z direction, each of the cavities 52 causes a part of the filter ink contained therein to be ejected from the ejection nozzle 46 as a droplet Fb having a predetermined weight.

  On the base side of the pump part 44, that is, the base side of the head main body 40A, a flange part 48 is formed in a square flange shape so as to receive the liquid introduction part 41. The flange portion 48 serves as a retaining portion and serves as a coupling portion that is coupled and fixed to the unit plate 34 with a head retaining screw (not shown). A pair of screw holes (female screws) 49 for small screws for fixing the droplet discharge head 40 to the unit plate 34 are formed in the flange portion 48. That is, in the droplet discharge head 40, the head body 40A is inserted into a through hole (not shown) formed at a predetermined position of the unit plate 34, the unit plate 34 is inserted, and the screw hole 49 and the screw hole 49 are screwed. It is fixed to the unit plate 34 by a head set screw (not shown).

The X-axis, Y-axis, and Z-axis shown in FIGS. 2, 3, and 4 are the same as the X-axis, Y-axis, and Z-axis shown in FIG. That is, in a state where the sub-carriage 33 is attached to the droplet discharge device 1, the nozzle row 47 (see FIG. 4A) formed in the droplet discharge head 40 is configured to extend in the Y-axis direction. ing.
(Weight measurement unit 54)
Next, the weight measurement unit 54 that measures the discharge weight of the droplets Fb discharged from each droplet discharge head 40 will be described. As shown in FIG. 2, the weight measurement unit 54 is provided on the most base 10 side of the first base block 55 provided in the second chamber Z2. A liquid receiving container (not shown) corresponding to each of the droplet discharge heads 40 provided on the sub-carriage 33 is provided on the upper surface of the weight measuring unit 54.

The droplet discharge heads 40 of the carriages 30 (30a to 30f) are arranged immediately above the liquid receiving containers (not shown) by appropriately moving the first to sixth carriage plates P1 to P6, respectively. Then, the droplets Fb are discharged from the droplet discharge heads 40 of the carriages 30 (30a to 30f), and the discharged droplets Fb land on a liquid receiving container (not shown), and the discharge weight is reduced. Each is designed to measure. The droplet discharge device 1 makes the discharge weight of the droplet Fb discharged from each droplet discharge head 40 equal based on the measured discharge weight of the droplet Fb.
(Capping unit CU)
Next, the capping unit CU that performs maintenance of the droplet discharge head 40 will be described. The capping unit CU is provided in a first base block 55 provided in the second chamber Z2 and a second base block 56 provided in the first chamber Z1.

  The capping unit CU includes six first to sixth capping units CU1 to CU6. A first capping unit CU1 is provided at a position adjacent to the weight measurement unit 54 in the first base block 55 provided in the second chamber Z2. Further, the second base block 56 provided in the first chamber Z1 includes second, third, fourth, fifth and sixth capping units CU2, CU3, CU4, CU5 and CU6 arranged along the Y-axis direction. It is installed.

That is, the first capping unit CU1 of the first to sixth capping units CU1 to CU6 is provided in the second chamber Z2 with the partition wall 3 therebetween.
The capping units CU (CU1 to CU6) are supplied from the discharge nozzles 46 of the respective droplet discharge heads 40 provided on the sub-carriages 33 of the corresponding carriages 30 (30a to 30f) to the functional liquid F (filter ink) in the pump unit 44. ) And the like, and the functional liquid F stored in the functional liquid supply unit 22 is introduced into the pump unit 44. Further, when the droplet discharge device 1 is in a resting state, the droplet discharge device 1 is in close contact with the nozzle plate 45 of each droplet discharge head 40 to suppress drying of the functional liquid F in the pump unit 44.

  As shown in FIG. 5, the capping units CU (CU1 to CU6) are provided with a number of sealing caps 64 (six in this embodiment) corresponding to the respective droplet discharge heads 40 provided on the unit plate 34. Yes. The capping unit CU (CU1 to CU6) is disposed on the upper side of the base 66 fixed to the first base block 55 or the second base block 56, and moves up and down with respect to the base 66 by a lifting device (not shown). Cap table 67 is provided.

  Each sealing cap 64 is provided with a seal member (not shown) so as to be in close contact with the nozzle forming surface 45a in a state where all the discharge nozzles 46 of the droplet discharge head 40 are included. Further, a discharge tube (not shown) is connected inside the sealing cap 64 and communicates with a waste liquid tank (not shown) through the discharge tube. The discharge tube is provided with a suction pump (not shown) capable of sucking from the sealing cap 64 side to the waste liquid tank side.

  Then, the cap table 67 is raised, and the respective seal members (not shown) of the respective sealing caps 64 are brought into close contact with the nozzle forming surface 45a in a state where all the discharge nozzles 46 of the corresponding droplet discharge heads 40 are included. As a result, the droplet discharge head 40 is sealed to prevent the functional liquid F (filter ink) in the pump unit 44 from drying.

In addition, by driving a suction pump (not shown) connected to each sealing cap 64 from a state in which the droplet discharge head 40 and the sealing cap 64 are in close contact with each other, the pump unit from the functional liquid supply unit 22 is driven. The functional liquid F (filter ink) is introduced into 44. That is, when the functional liquid F is stored in the pump unit 44, the functional liquid F thickened from the discharge nozzle 46 is removed by suction, and fresh functional liquid F is introduced into the pump unit 44 from the functional liquid supply unit 22. Then, the droplet discharge head 40 is cleaned. Further, when the functional liquid F is not accommodated in the pump unit 44, the functional liquid F is introduced into the pump unit 44 from the functional liquid supply unit 22, and the functional liquid F (
The filter is initially filled with ink.

  Here, the first capping unit CU1 provided in the second chamber Z2 corresponds to the first carriage 30a, and the second to sixth capping units CU2 to CU6 provided in the first chamber Z1 are the second to sixth carriages. It corresponds to 30b-30f, respectively. Each carriage 30 (30a-30f) has a home position directly above each corresponding capping unit CU (CU1-CU6). Then, when performing the maintenance of the droplet discharge head 40, the replacement work of the sub-carriage 33, and when stopping the droplet discharge device 1, the carriages 30 (30a to 30f) are arranged at their home positions. It has become.

  Each home position is a position (origin position) where the reference member 35 provided on the unit plate 34 of the sub-carriage 33 attached to each carriage 30 (30a to 30f) is disposed at a predetermined position. (30a to 30f) are provided in advance.

  Then, by arranging the carriages 30 (30a to 30f) at the respective origin positions (home positions), the liquid droplet ejection heads 40 to which the sealing caps 64 of the respective capping units CU (CU1 to CU6) correspond are surely secured. It comes to cap. Further, each carriage 30 (30a-30f) is moved from the respective origin position (home position) along the pair of Y-axis guide rails 18 by a predetermined feed amount, whereby each carriage 30 (30a-30f) is moved. 30f) droplet discharge heads 40 are accurately arranged at the respective drawing positions.

  The droplet discharge device 1 includes first, second, third, fourth, fifth and sixth origin detection sensors SE1, SE2, SE3 so as to correspond to the first to sixth carriages 30a to 30f, respectively. , SE4, SE5, and SE6 are provided in the capping unit CU (CU1 to CU6) as shown in FIG. The first to sixth origin detection sensors SE1 to SE6 detect whether or not the corresponding carriage 30 (30a to 30f) is accurately arranged at each origin position (home position). That is, the first to sixth origin detection sensors SE1 to SE6 detect whether or not the reference member 35 of the sub-carriage 33 provided on each carriage 30 (30a to 30f) is disposed at a predetermined position. It has become.

  Further, the first origin detection sensor SE1 as the reference position detection sensor is configured such that when each of the second to sixth carriages 30b to 30f is moved and arranged immediately above the first capping unit CU1, the carriage 30 (30b to 30b) 30f) is arranged to detect whether it is arranged at the origin position (home position) of the first carriage 30a as the reference position.

Further, the droplet discharge device 1 is provided with a carriage detection sensor CSE (see FIG. 6) on the Y-axis guide rail 18. The carriage detection sensor CSE detects the carriage 30 located in the first chamber Z1 when the first door D1 is unlocked.
(Electrical configuration)
Next, the electrical configuration of the droplet discharge device 1 will be described with reference to FIG. FIG. 6 is a block diagram showing an electrical configuration of the droplet discharge device 1.

6, the control device 100 includes a CPU 101, a ROM 102, a RAM 103, and the like. The control device 100 drives the X-axis moving plate 12, the carriage plate P, and the droplet discharge head 40 to drive the pattern on the CF substrate W according to the stored various data and various control programs. A drawing process to be formed is executed. Further, the control device 100 detects the droplets Fb ejected by each droplet ejection head 40 provided on each carriage 30.
An inspection process for inspecting the discharge weight of the liquid droplets, a discharge weight adjustment process for the droplets Fb of the respective droplet discharge heads 40 based on the inspection, an origin return process for the first to sixth carriages 30a to 30f, and the like are executed.

  An input / output device 104 having various operation switches and a display is connected to the control device 100. The input / output device 104 displays the processing status of various processes executed by the droplet discharge device 1. The input / output device 104 generates drawing data (bitmap data BD) for forming a color filter pattern with the droplets Fb on the CF substrate W, and inputs the bitmap data BD to the control device 100. In addition, the control device 100 stores the input bitmap data BD in the RAM 103 as drawing data storage means.

  The bitmap data BD is data that specifies whether each piezoelectric element PZ is turned on or off according to the value (0 or 1) of each bit. The bitmap data BD indicates whether or not the droplet Fb is ejected to each position specified in advance on the CF substrate W when the CF substrate W passes immediately below the droplet ejection head 40 (each ejection nozzle 46). The specified data.

  That is, the bitmap data BD reciprocates the CF substrate W many times under the droplet discharge head 40 (each discharge nozzle 46) in order to draw a color filter pattern with the droplets Fb on the CF substrate W. This is data specifying whether or not to discharge the droplet Fb to the arrangement position, which is prepared for drawing the color filter pattern each time the forward and backward movements are performed.

  More specifically, if the droplet Fb is ejected using the corresponding bitmap data BD prepared for each of the forward and backward movements immediately below the droplet ejection head 40 (each ejection nozzle 46), A color filter pattern is drawn on the CF substrate W.

In this embodiment, the color filter pattern drawn on the CF substrate W is obtained in advance by design or the like, and the bitmap data BD is created from the obtained pattern.
An X-axis linear motor drive circuit 105 is connected to the control device 100. The control device 100 outputs a drive control signal to the X-axis linear motor drive circuit 105. The X-axis linear motor drive circuit 105 drives the X-axis linear motor M1 for moving the X-axis moving plate 12 (CF substrate W) in response to a drive control signal from the control device 100.

  A Y-axis linear motor drive circuit 106 is connected to the control device 100. The control device 100 outputs a drive control signal to the Y-axis linear motor drive circuit 106. The Y-axis linear motor drive circuit 106 drives the Y-axis linear motor M2 in response to the drive control signal from the control device 100 to move the first to sixth carriage plates P1 to P6, respectively.

  A head driving circuit 108 is connected to the control device 100. The control device 100 outputs a discharge timing signal synchronized with a predetermined discharge frequency to the head drive circuit 108. The control device 100 outputs a drive voltage for driving each piezoelectric element PZ to the head drive circuit 108 in synchronization with the ejection frequency.

  The control device 100 generates a pattern formation control signal synchronized with a predetermined frequency using the bitmap data BD, and serially transfers the pattern formation control signal to the head drive circuit 108. The head drive circuit 108 serially / parallel converts the pattern formation control signal from the control device 100 in correspondence with each piezoelectric element PZ. Each time the head drive circuit 108 receives the ejection timing signal from the control device 100, the head drive circuit 108 latches the serial / parallel converted pattern formation control signal, and applies a drive voltage to each of the piezoelectric elements PZ selected by the pattern formation control signal. Supply.

  The control device 100 is electrically connected to the weight measurement unit 54. The control device 100 obtains the total discharge weight of the droplets Fb discharged from the respective droplet discharge heads 40 of the respective carriages 30 (30a to 30f) from the weight measurement unit 54, and for each droplet discharge head 40. The discharge weight of the droplet Fb is calculated. Based on the calculated discharge weight of the droplet Fb, the control device 100 supplies a drive voltage supplied (applied) to the piezoelectric element PZ of each droplet discharge head 40 so that the droplet Fb has a predetermined discharge weight. adjust.

  A capping unit drive circuit 110 is connected to the control device 100. The control device 100 outputs a drive control signal to the capping unit drive circuit 110. In response to a control drive signal from the control device 100, the capping unit drive circuit 110 drives an elevating device and a suction pump (both not shown) included in each capping unit CU (CU1 to CU6).

  Further, the control device 100 as the capping unit stop control means puts the second to sixth capping units CU2 to CU6 disposed in the first chamber Z1 into a stopped state when the first door D1 is in the unlocked state. The drive control signal is output to the capping unit drive circuit 110.

  The control device 100 is electrically connected with first to sixth origin detection sensors SE1 to SE6. The first to sixth origin detection sensors SE1 to SE6 output detection signals at that time to the control device 100, respectively. Based on the detection signals from the first to sixth origin detection sensors SE1 to SE6, the control device 100 returns the corresponding carriage 30 to the origin position (home position) (origin return).

  Further, the control device 100 as the reference position arrangement means arranges the second to sixth carriages 30b to 30f at the origin position (reference position) of the first carriage 30a based on the detection signal from the first origin detection sensor SE1. To do. And the control apparatus 100 arrange | positions the 2nd-6th carriage 30b-30f in the origin position (reference position) of the 1st carriage 30a, respectively, respectively, and makes each return to an origin.

  More specifically, for example, the control device 100 recognizes the carriage 30 (30b to 30f) moved from the first chamber Z1 to the second chamber Z2 by an operator, for example. That is, the carriage 30 newly moved to the second chamber Z2 recognizes which of the second to sixth carriages 30b to 30f.

  The ROM 102 of the control device 100 stores in advance correction data for setting the origin position of the first carriage 30a as the origin position (second origin position) of each of the second to sixth carriages 30b to 30f. Yes. The correction data is feed amount data from the respective origin positions (home positions) of the second to sixth carriages 30b to 30f to the origin position (second origin position) of the first carriage 30a. Therefore, the control device 100 can set the origin position of the first carriage 30a as the origin position (second origin position) of the second to sixth carriages 30b to 30f by referring to the correction data. ing. That is, the control device 100 places the second to sixth carriages 30b to 30f at the origin position of the first carriage 30a, thereby returning the second to sixth carriages 30b to 30f to the second origin position. Let

  A carriage detection sensor CSE is connected to the control device 100. The carriage detection sensor CSE detects each of the carriages 30 located in the first chamber Z1 and outputs a detection signal to the control device 100.

  When the first door D1 is unlocked, the control device 100 as the carriage stop control means is based on the detection signal from the carriage detection sensor CSE, and the carriage 30 (30a to 30a) positioned in the first chamber Z1. 30f) is brought into a stopped state.

  A shutter drive circuit 113 is connected to the control device 100. The control device 100 outputs a drive control signal to the shutter drive circuit 113. In response to a drive control signal from the control device 100, the shutter drive circuit 113 controls the locking and unlocking of the shutter unit 6 and also controls the opening / closing operation.

  The shutter unit 6 is provided in the communication window of the partition wall 3 through which the Y-axis guide rail 18 penetrates between the first chamber and the second chamber. When the shutter unit 6 is open, the path of the carriage 30 is opened so that the carriage 30 can reciprocate along the pair of Y-axis guide rails 18 between the first chamber Z1 and the second chamber Z2. It has become. On the contrary, when the shutter portion 6 is closed, the carriage 30 cannot reciprocate along the pair of Y-axis guide rails 18. The shutter unit 6 can be manually opened and closed by the operator when in the unlocked state.

  A door lock control unit 114 is connected to the control device 100. The control device 100 outputs a control signal to the door lock control unit 114. In response to the control signal from the control device 100, the door lock control unit 114 puts each of the first door D1 and the second door D2 into a locked state or an unlocked state. Further, the door lock control unit 114 detects that each of the first door D1 and the second door D2 is in the locked state or the unlocked state, and outputs a detection signal indicating the detection result to the control device 100. That is, the control device 100 determines whether or not the first door D1 is locked and determines whether or not the second door D2 is locked.

Next, the operation of replacing the sub-carriage 33 of the droplet discharge device 1 having the chamber 2 configured as described above will be described with reference to FIG.
When the sub-carriage 33 is replaced, the control device 100 opens the shutter unit 6 and moves the first to sixth carriages 30a to 30f located in the drawing area A1 to the standby area A2. The first to sixth capping units CU1 to CU6 are arranged at the home positions. When the first to sixth carriages 30a to 30f are arranged at the home positions in the corresponding capping units CU (CU1 to CU6), the control device 100 closes and locks the shutter unit 6.

  When each carriage 30 (30a to 30f) is placed at the home position, the control device 100 uses the corresponding capping unit CU (CU1 to CU6) from each droplet discharge head 40 or a pipe connection member (not shown). The functional liquid F is removed and the droplet discharge head 40 and the pipe connecting member (not shown) are cleaned.

When the cleaning is completed, the control device 100 unlocks the first door D1 and the second door D2, and allows the operator to enter the first chamber Z1 and the second chamber Z2.
When the first door D1 and the second door D2 are unlocked, the worker first enters the second chamber Z2, and in the second chamber Z2, the operator moves the first carriage 30a directly above the first capping unit CU1. The sub carriage 33 is replaced (step S21). Eventually, when the replacement work is completed, the worker leaves the second chamber Z2 and operates the input / output device 104 to lock the second door D2. Therefore, the operator cannot enter the second chamber Z2, that is, the first chamber Z1 cannot enter the second chamber Z2.

When the second door D2 is locked, the control device 100 prepares for drawing the first carriage 30a (step S22). Based on the detection signal from the first origin detection sensor SE1, the control device 100 places the reference member 35 of the sub-carriage 33 attached to the first carriage 30a at a predetermined position, and places the first carriage 30a at the origin position. Return to origin.

  Subsequently, the control device 100 performs the initial filling of the functional liquid F on the first carriage 30a using the first capping unit CU1, moves the first carriage 30a directly above the weight measurement unit 54, and performs the discharge weight measurement. . The control device 100 adjusts the driving voltage applied to the piezoelectric element PZ based on the measurement result of the discharge weight measurement, and moves and arranges the first carriage 30a to the drawing position (step S23). When the first carriage 30a is arranged at the drawing position, the control device 100 unlocks the shutter unit 6 so that the shutter unit 6 can be manually opened.

  When the drawing preparation of the first carriage 30a is being performed in the second chamber Z2, in the first chamber Z1, a replacement work for the sub-carriage 33 provided in the second carriage 30b is performed by the operator (step S11). At this time, since the control device 100 stops the carriages 30 (30b to 30f) and the second to sixth capping units CU2 to CU6 located in the first chamber Z1, the operator The replacement work can be performed safely in the first chamber Z1.

  When the drawing preparation of the first carriage 30a in the second chamber Z2 and the replacement work of the second carriage 30b in the first chamber Z1 are completed, the operator manually opens the shutter unit 6 and the second carriage 30b. Is manually moved to the second chamber Z2 (step S12). Then, the operator manually closes the shutter unit 6 and then operates the input / output device 104 to lock the shutter unit 6 via the control device 100.

  When the shutter unit 6 is locked, the control device 100 prepares for drawing the second carriage 30b (step S24). Based on the detection signal and correction data from the first origin detection sensor SE1, the control device 100 arranges the second carriage 30b at the origin position of the first carriage 30a, that is, the second carriage 30b is located at the second origin position. Return.

  Subsequently, the control device 100 performs the initial filling of the functional liquid F on the second carriage 30b using the first capping unit CU1, moves the second carriage 30b directly above the weight measurement unit 54, and measures the discharge weight. . The control device 100 adjusts the drive voltage applied to the piezoelectric element PZ based on the measurement result of the discharge weight measurement, and moves and arranges the second carriage 30b to the drawing position. When the second carriage 30b is moved to the drawing position (step S25), the control device 100 unlocks the shutter unit 6 so that the shutter unit 6 can be opened manually.

  On the other hand, similarly, when drawing preparation of the second carriage 30b is performed in the second chamber Z2, the replacement work of the sub-carriage 33 attached to the third carriage 30c is performed in the first chamber Z1 by the operator ( Step S13).

Thereafter, these steps are repeated, and the third to fifth carriages 30c to 30e are moved to the respective drawing positions (steps S26, 27, and 28).
Then, the operator performs the replacement work of the sixth carriage 30f, and when the sixth carriage 30f is manually moved to the second chamber Z2, the shutter portion 6 is manually closed, the shutter 6 is retreated from the first chamber Z1, and entered. The output device 104 is operated to lock the shutter unit 6 and the first door D1 via the control device 100.

The control device 100 performs the placement of the sixth carriage 30f at the second origin position, the initial filling of the functional liquid F, and the discharge weight measurement, and places the sixth carriage 30f at the drawing position (step S29). When the sixth carriage 30f is arranged at the drawing position, a completion lamp (not shown) is turned on, and the replacement work of the sub-carriage 33 is completed.

According to the above embodiment, the following effects can be obtained.
(1) According to the above embodiment, the partition wall 3 that partitions the room 2 into the first chamber Z1 and the temperature-controlled second chamber Z2 is provided. The partition wall 3 is provided with a communication window (not shown) so that each carriage 30 can reciprocate between the first chamber Z1 and the second chamber Z2, and the communication window has a first chamber Z1 and a second chamber Z2. Is provided with a shutter portion 6 for making the communication state and the non-communication state.

  Further, the partition wall 3 is provided so that the weight measuring unit 54 and the first capping unit CU1 are positioned in the second chamber Z2. Further, by using the first origin detection sensor SE1 for detecting the origin position of the first carriage 30a and the correction data stored in advance in the ROM 102, the second to sixth carriages 30b to 30f are moved to the origin position (first position of the first carriage 30a). 2), each was returned to the second origin position.

  Therefore, the second to sixth carriages 30b to 30f are arranged at the origin position (second origin position) of the first carriage 30a, so that the second carriage 6 is moved to the original origin position provided in the first chamber Z1. The origin can be returned in each of the chambers Z2. In addition, the initial filling of the functional liquid F into the droplet discharge head 40 and the measurement of the discharge weight of the droplet discharge head 40 can be performed in the second chamber Z2. That is, the drawing preparation of each carriage 30 can be performed in the second chamber Z2.

  Further, by partitioning the first chamber Z1 and the second chamber Z2 by the partition wall 3 and the shutter unit 6, when the drawing preparation of each carriage 30 is performed in the second chamber Z2, in the first chamber Z1, The replacement work of the sub-carriage 33 can be performed. That is, the drawing preparation of each carriage 30 and the replacement work of the sub-carriage 33 by the operator can be performed at the same time. As a result, the time required from the start of the replacement work of the sub-carriage 33 to the placement of each carriage 30 at the drawing position can be shortened, and the production efficiency of the droplet discharge device 1 can be improved. In addition, since the droplet discharge head 40 during drawing is disposed in the second chamber Z2, only the second chamber Z2 needs a space for temperature adjustment, so that the temperature adjustment can be performed efficiently.

  (2) According to the above embodiment, when the first door D1 is unlocked, the carriage detection sensor CSE that detects the carriage 30 located in the first chamber Z1 is provided, and is detected by the carriage detection sensor CSE. The carriage 30 was stopped. Moreover, when the 1st door D1 was an unlocked state, the 2nd-6th capping unit CU2-CU6 was made into the stop state.

  Therefore, when the operator performs the replacement work of the sub-carriage 33 in the first chamber Z1, malfunction of the carriage 30 and the second to sixth capping units CU2 to CU6 in the first chamber Z1 can be prevented. . As a result, the replacement work of the sub-carriage 33 in the first chamber Z1 can be performed more safely.

In addition, you may change the said embodiment as follows.
In the above embodiment, one capping unit CU is arranged in the second chamber Z2 as a drawing / drawing preparation area. Not limited to this, a plurality of units may be arranged.

In the above embodiment, one weight measuring unit 54 is provided in the second chamber Z2. Not limited to this, a plurality of units may be arranged.
In the above embodiment, the embodiment is embodied in the piezoelectric element driving type droplet discharge head 40. However, the invention is not limited to this, and may be embodied in a resistance heating type or electrostatic drive type droplet discharge head.

In the above embodiment, the origin position of the first carriage 30a is the reference position. Not limited to this, a reference position may be provided at another position of the second chamber Z2 as a drawing / drawing preparation area.
In the above-described embodiment, the present invention is embodied in the droplet discharge device 1 in which six carriages each including six droplet discharge heads 40 are mounted. The arrangement and number of droplet discharge heads mounted on the carriage and the number of carriages mounted on the droplet discharge device may be changed as appropriate.

  In the embodiment described above, the pattern forming device is embodied in the droplet discharge device 1 that forms a color filter on the CF substrate W by discharging the filter ink as droplets. Not limited to this, a droplet discharge device that forms a metal wiring, a droplet discharge device that forms an insulating layer, a droplet discharge device that forms a liquid crystal layer or an alignment film, a light emitting layer or a transport layer of an organic EL display device, etc. You may apply to the droplet discharge apparatus etc. which form.

  In the above embodiment, the droplet discharge device 1 is provided with the capping unit CU that performs the initial filling of the functional liquid F and the weight measurement unit 54 that measures the discharge weight of the droplet discharge head 40. For example, a wiping unit that wipes off the functional liquid F adhering to the nozzle forming surface 45a of the droplet discharge head 40 may be further provided.

  In the above embodiment, the standby area A2 is provided in one direction. However, the present invention is not limited thereto, and as shown in FIG. According to this, since the replacement work of the sub-carriage 33 and the drawing preparation of each carriage 30 can be performed at the same time, the time can be further reduced.

The perspective view which shows schematic structure of a droplet discharge apparatus. The top view which shows schematic structure of a droplet discharge apparatus. The top view showing the relationship between a carriage plate and a carriage. (A) The perspective view which looked at the droplet discharge head from the substrate stage side, (b) The pump section sectional view of the droplet discharge head. The perspective view of a capping unit. The electric block circuit diagram for demonstrating the electrical structure of a droplet discharge apparatus. The flowchart for demonstrating the effect | action of a droplet discharge apparatus. The top view which shows schematic structure of the droplet discharge apparatus in another example.

Explanation of symbols

A1 ... drawing area, A2 ... standby area, BD ... bitmap data, CSE ... carriage detection sensor, CU ... capping unit, CU1, CU2, CU3, CU4, CU5, CU6 ... first, second, third, fourth , Fifth and sixth capping units, D1 ... first door, D2 ... second door, F ... functional liquid, Fb ... droplet, M1 ... X-axis linear motor, M2 ... Y-axis linear motor, P1, P2, P3 , P4, P5, P6 ... 1st, 2nd, 3rd, 4th, 5th, 6th carriage plate, PZ ... Piezoelectric element, SE1, SE2, SE3, SE4, SE5, SE6 ... 1st, 2nd, Third, fourth, fifth and sixth origin detection sensors, W ... CF substrate, 1 ... droplet discharge device, 2 ... room, 3 ... partition, 6 ... shutter part, 10 ... base, 10a ... upper surface, 11 ... X-axis guide rail, 12 ... X-axis moving block 14 ... Substrate stage, 16 ... Stage rotation mechanism, 18 ... Y-axis guide rail, 19a ... Strut, 19b ... Strut, 21 ... Carriage plate, 22 ... Functional liquid supply unit, 23 ... Head electrical unit, 25 DESCRIPTION OF SYMBOLS ... Suspension mechanism, 26 ... Suspension board, 27 ... Suspension rotation frame, 28 ... Suspension support frame, 30 ... Carriage, 30a, 30b, 30c, 30d, 30e, 30f ... 1st, 2nd, 3rd , Fourth, fifth, and sixth carriages, 31 ... carriage frame, 33 ... sub-carriage, 34 ... unit plate, 40 ... droplet discharge head, 40A ... head body, 41 ... liquid introduction section, 42 ... connection needle, 43 ... Head substrate, 43A ... Head connector, 44 ... Pump part, 45 ... Nozzle plate, 45a ... Nozzle forming surface, 46 ... Discharge nozzle, 47 ... Nozzle row, 48 ... Flange part, 49 ... Ne Hole, 52 ... cavity, 5
DESCRIPTION OF SYMBOLS 3 ... Diaphragm 54 ... Weight measuring unit 55 ... 1st base block 56 ... 2nd base block 64 ... Sealing cap 66 ... Base 67 ... Cap table 100 ... Control apparatus 101 ... CPU 102 ... ROM, 103 ... RAM, 104 ... input / output device, 105 ... X-axis linear motor drive circuit, 106 ... Y-axis linear motor drive circuit, 107 ... drive waveform generation circuit, 108 ... head drive circuit, 110 ... capping unit drive circuit , 113 ... shutter driving circuit, 114 ... door lock control unit.

Claims (6)

A transport table for transporting a substrate placed by reciprocating in the main scanning direction;
A pair of guide rails formed above the movement path of the transport table and extending in a sub-scanning direction orthogonal to the main scanning direction;
A plurality of carriages supported by the pair of guide rails and independently reciprocating in the sub-scanning direction along the pair of guide rails;
A droplet discharge head that is provided on a sub-carriage that is detachably attached to the carriage, discharges droplets of functional liquid onto the substrate, and draws a pattern on the substrate;
A position spaced from the moving path of the transport table, which is juxtaposed in the sub-scanning direction along the pair of guide rails, caps the droplet discharge head provided on the sub-carriage and A capping unit for sucking the functional liquid from a discharge head, and a pattern forming apparatus comprising:
A room with a drawing / drawing preparation area and an exchange work area partitioned by a partition is provided.
While arranging at least one of the transport table and a capping unit located on the transport table side among the capping units arranged in parallel in the sub-scanning direction in the drawing / drawing preparation area,
The pattern forming apparatus, wherein the remaining capping units arranged in parallel in the sub-scanning direction are arranged in the replacement work area. The pattern forming apparatus according to claim 1,
A reference position detection sensor for detecting whether or not the sub-carriage arranged in the drawing / drawing preparation area is arranged at a predetermined reference position in the drawing / drawing preparation area;
Based on a detection signal from the reference position detection sensor, reference position arranging means for arranging the sub-carriage at the reference position;
A pattern forming apparatus comprising: In the pattern formation apparatus of Claim 1 or 2,
A carriage detection sensor for detecting the carriage located in the replacement work area;
Carriage stop control means for stopping the carriage located in the replacement work area based on a detection signal from the carriage detection sensor;
Capping unit stop control means for stopping the capping unit arranged in the replacement work area;
A pattern forming apparatus comprising: In the pattern formation apparatus in any one of Claims 1-3,
The partition is
A communication window that allows the exchange work area and the drawing / drawing preparation area to communicate with each other, and allows the carriage to move between the exchange work area and the drawing / drawing preparation area;
A shutter part that opens or closes the communication window;
A pattern forming apparatus comprising: In the pattern formation apparatus in any one of Claims 1-4,
In the drawing / drawing preparation area, a weight measuring unit for measuring a discharge weight of a droplet discharged from the droplet discharge head is provided. It is a pattern formation apparatus in any one of Claims 1-5,
The pattern forming apparatus, wherein the capping unit is provided on both sides of the transport table along the sub-scanning direction.

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