JP2009147291A - Stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage device capable of accurately processing a substrate on a pedestal without reducing throughput by increasing stiffness in the pedestal. <P>SOLUTION: The stage device 101 has the pedestal 110, a gantry section 130 movably provided in a uniaxial direction on the pedestal 110, and a vibration isolation unit 150 supporting the pedestal 110. The pedestal 110 has an upper frame 112 built by connecting a can member in a frame shape, a lower frame 122 vertically separated from the upper frame 112 built by connecting the can member in a frame shape, and a connecting material 118 for connecting the upper frame 112 with the lower one 122. The stage device 101 further has a trestle 170 for supporting the upper frame 112 by a post 178 via the vibration isolation unit 150 from a lower part. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

The present invention relates to a stage apparatus having a gantry section that moves in a uniaxial direction on a base on which a substrate is mounted.

Conventionally, as a stage device used for manufacturing various substrates such as a liquid crystal panel and a semiconductor, for example, the one disclosed in Patent Document 1 is known. This stage apparatus includes a base having a can-making structure constructed by connecting can materials in a frame shape, a pair of guide rails provided on both sides of the base, and a pair of guides guided along the guide rails. A guide slider and a beam horizontally mounted between the pair of guide sliders are provided. The beam moves along the guide rail, and a defect of the substrate is detected and repaired by a camera or a repair device mounted on the beam. The base is supported on the gantry via the vibration isolation unit. Further, the base is reinforced by a reinforcing can laid in parallel in the frame.
JP 2006-269509 A

  However, in the above-mentioned conventional can structure base, even if a reinforcing can is provided, the rigidity is not sufficient. For example, the beam moves forward along the guide rail and the mounted object such as a camera is moved to the right. When moving to, the base is deformed on the order of several tens of microns so that the right corner on the near side of the base falls. Therefore, even if the mounted object such as a camera is moved by an accurate distance, an error occurs in the relative position between the mounted object and the base by the amount of deformation of the base, and the substrate can be processed accurately. There was a possibility that it could not be done. At this time, if the processing of the substrate is waited until the deformation of the base is restored, there is a possibility that the throughput is remarkably lowered.

  The present invention has been made in view of the above circumstances, and provides a stage apparatus that can accurately process a substrate on the base without increasing the throughput by increasing the rigidity of the base. The purpose is to do.

  A stage apparatus according to the present invention is a stage apparatus including a base, a gantry provided to be movable in a uniaxial direction on the base, and a vibration isolation unit that supports the base. An upper frame constructed by connecting can materials in a frame shape, a lower frame constructed by connecting can materials in a frame shape and spaced apart from the upper frame, the upper frame and the And a connecting member for connecting to the lower frame, and further comprising a pedestal that supports the upper frame from below with a support through the vibration isolation unit.

  In this stage apparatus, the base has an upper frame and a lower frame, which are connected by a connecting material to form a so-called box structure. Rigidity is increased. Therefore, even if a load is applied by the movement of the gantry and the vibration isolation unit sinks and the base tilts, the deformation of the base itself is suppressed, so that the relative position error between the gantry and the base is extremely small. Accurate processing of the substrate becomes possible. Further, there is no need to wait for the substrate processing until the deformation of the base is restored, so there is no risk of lowering the throughput.

  In addition, since the stage apparatus further includes a gantry that supports the upper frame from below with the support via the vibration isolation unit, the stage device can be supported on the gantry in a vibration-isolating state at a higher position near the center of gravity. it can.

  Since the base can be supported at a higher position near the center of gravity via the vibration isolation unit, the base shake caused by the movement of the gantry can be suppressed. In addition, since the lower frame functions as a weight, shaking of the base can be further suppressed.

  The base may include a dividing unit for dividing the base into a plurality of blocks in the horizontal direction. If it does in this way, even if a base becomes large with the enlargement of a board | substrate, it will become possible to divide and transport a base, without using a special large vehicle.

  The dividing unit may be configured by cutting the can material constituting the upper frame and the lower frame at positions corresponding to the upper and lower sides. Even if it does in this way, since the division part provided in an upper frame and a lower frame is spaced apart in the up-down direction, it is advantageous on rigidity.

  An outward flange may be provided on the cut surface of the can material. If it does in this way, the divided | segmented blocks can be easily connected via an outward flange.

  In at least one of the upper frame and the lower frame, a reinforcing material may be installed in an oblique direction. In this way, the rigidity of the base can be sufficiently increased as compared with the case where the reinforcing material is installed in parallel in the frame. That is, the torsional rigidity against the torsion of the base that may occur when the gantry and its mounting device are moved simultaneously can be increased.

  ADVANTAGE OF THE INVENTION According to this invention, the stage apparatus which makes it possible to process a board | substrate correctly on a base without reducing a throughput by raising the rigidity of a base can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  [Reference form]

  FIG. 1 is a perspective view showing a stage device 1 according to a reference embodiment, FIG. 2 is a perspective view of a base provided in the stage device 1 of FIG. 1, viewed from above, and FIG. 3 is a perspective view of the base viewed from below. 4 and 4 are perspective views showing a state in which the lower frame of the base to which the connecting material is connected is supported by the vibration isolation unit.

  As shown in FIG. 1, the stage apparatus 1 includes a base 10 on which a substrate is mounted, a gantry unit 30 that moves on the base 10, and a guide that is provided on the base 10 and guides the movement of the gantry unit 30. The rail 40 and the permanent magnet 42, and a guide slider 44 provided at the lower part of the gantry portion 30 and guided by the guide rail 40 and an electromagnet 46 facing the permanent magnet 42, are provided along the guide rail 40. To move. In FIG. 1, the longitudinal direction of the base 10 is defined as the Y-axis direction, the horizontal direction orthogonal thereto is defined as the X-axis direction, and the direction orthogonal thereto is defined as the Z-axis direction.

  The base 10 includes an upper frame 12, a lower frame 22 that is spaced apart from the upper frame 12, and a connecting member 18 that connects the upper frame 12 and the lower frame 22.

  The upper frame 12 has an inner side of a rectangular frame formed by connecting can materials 12a and 12b extending in the X-axis direction and can materials 12c and 12d extending in the Y-axis direction. A plurality of reinforcing members 14a, 14b, 14c, and 14d are used for reinforcement. Here, the cans 12a, 12b, 12c, and 12d are hollow rods, and in the present embodiment, a rod-shaped steel having a cross-sectional shape is used. In addition, the reinforcing members 14a, 14b, 14c, and 14d are bar members that are installed horizontally inside the frame body regardless of whether they are hollow or solid. Uses steel molds.

  Here, although the details will be described later, the base 10 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 12c and 12d extending in the Y-axis direction of the upper frame 12 Is cut in the middle, and a dividing portion 16 is provided. Then, for each of the front side and rear side blocks with the division part 16 in between, a reinforcing material 14a made of round steel is horizontally mounted so as to extend in the X-axis direction between the cans 12c and 12d of the cut portion. Has been.

  A reinforcing material 14b made of H-shaped steel is laid in parallel to the can materials 12c and 12d in a front frame formed by the can material 12a, the can materials 12c and 12d, and the reinforcing material 14a. 12a and the reinforcing member 14a are installed in parallel. Further, the reinforcing material 14c made of H-shaped steel is diagonally laid across the cans 12a, 12c, 12d and the reinforcing material 14a diagonally. Accordingly, the reinforcing members 14b and 14c intersect at a central point and extend radially from here.

  Further, in the rear frame formed by the cans 12c and 12d, the can 12b and the reinforcement 14a, the reinforcement 14d made of H-shaped steel is oblique to the cans 12b, 12c and 12d and the reinforcement 14a. It is laid horizontally.

  The lower frame 22 has an inner side of a rectangular frame formed by connecting can materials 22a and 22b extending in the X-axis direction and can materials 22c and 22d extending in the Y-axis direction. It is configured by reinforcing with a reinforcing material 24b. The diameters of the can materials 22a, 22b, 22c, and 22d are smaller than the can materials 12a, 12b, 12c, and 12d of the upper frame 12. The reinforcing material 24b made of B-shaped steel is horizontally mounted in the X-axis direction at the center in the longitudinal direction of the can materials 22c and 22d.

  Here, as described above, the base 10 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 22c and 22d extending in the Y-axis direction of the lower frame 22 are It is cut in the middle and a dividing portion 26 is provided.

  The connecting member 18 connects the upper frame 12 and the lower frame 22 while being separated in the Z-axis direction. In the present embodiment, the connecting member 18 is composed of a can material made of round steel, and connects the upper frame 12 and the lower frame 22 at four corners. Further, in order to increase the rigidity, a connecting member 18 made of rho steel is laid between the upper and lower can members 12c, 22c on the front side of the divided portions 16, 26 so as to extend in the Z-axis direction. . Further, between the upper and lower can members 22d, 22d, a connecting member 18 made of B-shaped steel is installed on the front side of the divided portions 16, 26 so as to extend in the Z-axis direction.

  The vibration isolation unit 50 is provided between the installation surface on which the stage device 1 is installed and the base 10. More specifically, the vibration isolation unit 50 supports the base 10 so as to be capable of vibration isolation at the four corners of the lower frame 22 and the lower part in the middle of the can members 22c and 22d. The vibration isolation unit 50 removes vibration transmitted from the installation surface to the base 10 and can be made of an elastic material such as an air spring or rubber.

  The guide rails 40 are provided on the upper surfaces of the can members 12c and 12d, respectively, and extend in the Y-axis direction. More specifically, a protruding piece 52 is provided on the upper surface of the can material 12c, 12d toward the outer side, and this protruding piece 52 extends continuously in the Y-axis direction. A guide rail 40 is provided on the upper surface of the protruding piece 52. The permanent magnet 42 is provided adjacent to a position outside the guide rail 40 on the upper surface of the overhanging piece 52 and extends in the Y-axis direction. The permanent magnet 42 has a predetermined pattern of S and N poles repeated in the Y-axis direction.

  Above the guide rail 40 and the permanent magnet 42, a connecting plate 46 connected to lower portions on both sides of the gantry portion 30 extending in the X-axis direction is disposed. Electromagnets 48 are provided adjacent to each other. The electromagnet 48 changes the magnetic pole in accordance with the patterns of the S pole and the N pole of the permanent magnet 42 and generates a repulsive force between the permanent magnet 42 and guides the gantry 30 with the guide rail 40 while moving the Y axis. Can be moved in the direction.

  A plurality of reinforcing ribs 54 are provided on the lower surface of the overhanging piece 52 between the outer surfaces of the can members 12c and 12d at predetermined intervals in the Y-axis direction.

  The gantry unit 30 includes a support unit 30a extending in the X-axis direction, a linear motor unit 30b, and a moving unit 30c. The moving unit 30c is movable in the X-axis direction along the linear motor unit 30b by the linear motor unit 30b. Then, by attaching a predetermined processing apparatus to the moving unit 30c, the processing apparatus moves in the X-axis direction, and a predetermined process is performed on the substrate mounted on the base 10. This processing apparatus may be a camera that inspects defects on the substrate, a repair apparatus that repairs the surface treatment state of the substrate such as color loss of a color filter, or a coating apparatus that performs pattern processing on the substrate. can do.

  As shown in FIG. 5, a work surface plate 11 for placing a substrate such as a liquid crystal panel is installed on the base 10 of the stage apparatus 1. When the stage apparatus 1 is transported by a transport vehicle, the work surface plate 11 is loaded on the transport vehicle.

  In the present embodiment, as shown in FIG. 5, the base 10, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the work surface plate 11 are divided by a dividing surface that is orthogonal to the Y-axis direction. Then, the divided base 10 is connected by bolts or the like at the dividing portions 16 and 26. That is, as shown in FIG. 6, the split portion 26 (16) is provided with an outward flange 26a (16a) so as to surround the cut surface of the cut can material 22c (12c). The blocks of the base 10 divided through the flange 26a (16a) are connected to each other. In addition, in the division part 16 of the upper frame 12, the reinforcing rib 54 serves as the outward flange 16a.

  Thus, since the base 10, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the work surface plate 11 are configured to be divisible in the Y-axis direction, the stage device 1 is configured to be divisible into two blocks. Will be. In addition, the division parts 16 and 26 are provided in the position which respond | corresponds about the up-and-down Z-axis direction, and is formed in the position where each block becomes a magnitude | size which can be loaded on a transport vehicle about the Y-axis direction.

  Further, as shown in FIGS. 1 and 7, a cable carrier 60 is provided on both sides of the base 10 and below the protruding piece 52. The gantry unit 30 transmits and receives various signals to and from a power cable (not shown) that supplies power for controlling the movement of the gantry unit 30 itself and the moving unit 30c, and a processing device attached to the moving unit 30c. A signal cable (not shown) is connected. These cables are wired via a cable carrier 60.

  The cable carrier 60 is formed by connecting a plurality of flat cylindrical members, and the cylindrical members are connected to each other so as to be rotatable within a limited angle. The collected cables are passed through the cable carrier 60. One end 60 a of the cable carrier 60 is fixed on a support base 62 provided on the side of the base 10. Further, the other end 60 b of the cable carrier 60 is fixed to the connecting member 64. The connecting member 64 is a cylindrical member and is connected to the gantry unit 30 and the cable carrier 60, and guides a cable from the cable carrier 60 to the gantry unit 30.

  Therefore, as shown in FIG. 8, the cable carrier 60 can be deformed like a caterpillar (registered trademark), and as the gantry unit 30 moves in the Y-axis direction, an arbitrary position in the longitudinal direction of the base 10. It can be bent in a U shape. Then, the cable passed through the cable carrier 60 is deformed following the deformation of the cable carrier 60.

  Thus, by providing the cable carrier 60 on both sides of the base 10 and below the projecting piece 52, unlike the case of being provided inside the base 10, the space between the cans 12c and 22c and the cans 12d, The degree of freedom of use of the space between 22d is increased, and the connecting member 18 and the vibration isolation unit 50 can be disposed here, so that the rigidity is improved and the vibration control is improved. Further, by providing the projecting piece 52 and arranging the guide rail 40 and the permanent magnet 42 thereon, the X of the base 10 can be compared with the case where these are arranged on the cans 12c and 12d of the upper frame 12. The size in the axial direction can be reduced, and the footprint is reduced.

  Thus, in the stage apparatus 1 according to the present embodiment, the base 10 has the upper frame 12 and the lower frame 22 and is connected by the connecting member 18 to form a so-called box structure. Despite being constructed and lighter in weight, the rigidity is enhanced. Therefore, even if a load is applied by the movement of the gantry unit 30 and the vibration isolation unit 50 sinks and the base 10 is inclined, the deformation of the base 10 itself is suppressed, so that the gantry unit 30 and the base 10 are not deformed. The relative position error is extremely small, and the substrate can be processed accurately. In addition, since there is no need to wait for the substrate processing until the deformation of the base 10 is restored, there is no possibility of lowering the throughput.

In addition, since the base 10 has the division parts 16 and 26 for dividing the base 10 into a plurality of blocks in the horizontal direction, even if the base 10 becomes larger due to the increase in size of the substrate, a special large vehicle can be used. The base 10 can be divided and transported without being used. Further, when the cans 12c, 12d, 22c, and 22d constituting the base 10 can be machined, the machining can be easily performed because it can be performed for each divided portion.
Further, when the base 10 is divided, if the base 10 is made of a can material, the rigidity of the joint surface is low, and there is a possibility of causing distortion when the gantry unit 30 is driven. The base 10 has a box structure, and when the upper and lower joint surfaces of the upper frame 12 and the lower frame 26 are combined, the joint surfaces increase, so that the possibility of causing distortion can be reduced. It has an advantageous structure.

  Moreover, since the dividing parts 16 and 26 are formed by cutting the cans constituting the upper frame 12 and the lower frame 26 at positions corresponding to the upper and lower sides, the dividing parts 16 provided on the upper frame 12 and the lower frame 22 are configured. 26 are separated from each other in the vertical direction, so that they are strengthened against a moment that the dividing surface tends to come off, which is advantageous in terms of rigidity.

Moreover, since the outward flanges 16a and 26a are provided on the cut surface of the can material, the divided blocks can be easily connected to each other by bolts or the like via the outward flanges 16a and 26a.
A plurality of reinforcing ribs 54 are provided on the lower surface of the overhanging piece 52 between the outer surfaces of the can members 12c and 12d, and the divided base 10 is interposed via the reinforcing ribs 54. Even connected. Here, in the case of the conventional stage structure, it is necessary to provide a flange for connection so that it protrudes to the side surface of the stage when trying to be divided, and there is a problem that the size in the lateral direction becomes large. In the embodiment, the reinforcing rib 54 and the divided portions 16 and 26 can be prevented from jumping out to the side of the projecting piece 52, so that an increase in size can be suppressed.

  Further, since the reinforcing members 14c and 14d are installed in the oblique direction in the frame of the upper frame 12, the rigidity of the base 10 can be sufficiently increased as compared with the case where the reinforcing members are installed in parallel in the frame. it can.

  Unlike the case where the cable carrier 60 is provided on both sides of the base 10 and below the protruding piece 52, the cable carrier 60 is provided between the cans 12c and 22c and between the cans 12d and 22d. The degree of freedom of use of the space is increased, and the connecting member 18 and the vibration isolation unit 50 can be disposed here, so that the rigidity can be improved and the vibration control can be improved. Moreover, since the length of the connecting member 64 in the Z-axis direction can be shortened, the vibration of the base 10 due to the influence of disturbance can be reduced. Further, by providing the projecting piece 52 and arranging the guide rail 40 and the permanent magnet 42 thereon, the X of the base 10 can be compared with the case where these are arranged on the cans 12c and 12d of the upper frame 12. The size in the axial direction can be reduced, and the footprint can be reduced.

  Here, the reinforcing material is provided in the oblique direction only in the frame of the upper frame 12, but the reinforcing material may be provided in the oblique direction also in the frame of the lower frame 22.

  In addition, the connecting member 18 is made of B-shaped steel, and the upper frame 12 and the lower frame 22 are connected to each other at four corners. However, the connecting member 18 is not limited to B-shaped steel. It is good also as a structure which connects so that it may surround.

  Further, as shown in FIG. 9, the outward flange 16 a of the split portion 16 of the upper frame 12 and the outward flange 26 a of the split portion 26 of the lower frame 22 may be integrated. If it does in this way, the rigidity of base 10 can be raised more.

  [First Embodiment]

  Next, a first embodiment of the present invention will be described. In addition, the same code | symbol is attached | subjected to the element same as the above-mentioned reference form, and the overlapping description is abbreviate | omitted.

  10 is a side view of the stage apparatus 101 according to the first embodiment of the present invention, FIG. 11 is a perspective view of the base 110 provided in the stage apparatus 101 of FIG. 10 as viewed from above, and FIG. 13 is a perspective view of the rear block obtained by dividing the base 110, and FIG. 14 is a perspective view of the lower frame 122 of the base 110 to which the connecting material 118 is connected. FIG. 15 is a perspective view showing the gantry 170 and the vibration isolation unit 150.

  The difference between the first embodiment and the reference embodiment is that the base 110 is supported by the gantry 170 and the configuration of the base 110 is changed accordingly.

  As shown in FIG. 10, the stage apparatus 101 includes a base 110 on which a substrate is mounted, a gantry unit 130 that moves on the base 110, and a guide that is provided on the base 110 and guides the movement of the gantry unit 130. A rail 140 and a permanent magnet 142, and a guide slider 144 provided at a lower portion of the gantry portion 130 and guided by the guide rail 140, and an electromagnet 146 facing the permanent magnet 142, are provided along the guide rail 140. To move. In FIG. 10, the longitudinal direction of the base 110 is defined as the Y-axis direction, the horizontal direction orthogonal thereto is defined as the X-axis direction, and the direction orthogonal thereto is defined as the Z-axis direction.

  The base 110 includes an upper frame 112, a lower frame 122 that is spaced apart from the upper frame 112, and a connecting member 118 that connects the upper frame 112 and the lower frame 122.

  The upper frame 112 has an inner side of a rectangular frame formed by connecting can materials 112a and 112b extending in the X-axis direction and can materials 112c and 112d extending in the Y-axis direction. A plurality of reinforcing members 114a, 114b, 114c, and 114d are used for reinforcement. Here, the cans 112a, 112b, 112c, and 112d are hollow rods, and in the present embodiment, a round steel having a cross-sectional shape is used. In addition, the reinforcing members 114a, 114b, 114c, and 114d are bar members that are installed horizontally inside the frame body regardless of whether they are hollow or solid. Uses steel molds.

  Here, although details will be described later, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and can materials 112c and 112d extending in the Y-axis direction of the upper frame 112. Is cut in the middle, and a dividing portion 116 is provided. Then, for each of the front side and rear side blocks with the division part 116 interposed therebetween, a reinforcing material 114a made of B-shaped steel is horizontally mounted so as to extend in the X-axis direction between the cans 112c and 112d of the cut portion. Has been.

  A reinforcing material 114b made of H-shaped steel is installed in parallel with the can materials 112c and 112d in a front frame formed by the can material 112a, the can materials 112c and 112d, and the reinforcing material 114a. 112a and the reinforcing material 114a are installed in parallel. Further, a reinforcing material 114c made of H-shaped steel is diagonally laid across the can materials 112a, 112c, 112d and the reinforcing material 114a diagonally. Accordingly, the reinforcing members 114b and 114c intersect at a central point and extend radially from here.

  Further, in the rear frame formed by the can materials 112c and 112d, the can material 112b and the reinforcing material 114a, the reinforcing material 114d made of H-shaped steel is inclined with respect to the can materials 112b, 112c and 112d and the reinforcing material 114a. It is laid horizontally.

  The lower frame 122 has an inner side of a rectangular frame formed by connecting can materials 122a and 122b extending in the X-axis direction and can materials 122c and 122d extending in the Y-axis direction. It is configured by reinforcing with a plurality of reinforcing members 124a, 124b, 124c. The diameters of the can materials 122a, 122b, 122c, 122d are smaller than the can materials 112a, 112b, 112c, 112d of the upper frame 12.

  Here, as described above, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 122c and 122d extending in the Y-axis direction of the lower frame 122 are It is cut in the middle and a dividing portion 126 is provided. And about the block before this division part 126, between the can materials 122c and 122d of a cutting part, the reinforcing material 124a which consists of a rho steel is extended horizontally so that it may extend in an X-axis direction.

  In addition, a reinforcing material 124b made of H-shaped steel is installed in parallel with the can materials 122c and 122d in a front frame formed by the can material 122a, the can materials 122c and 112d, and the reinforcing material 124a. 122a and the reinforcing member 124a are installed in parallel. Further, a reinforcing material 124c made of H-shaped steel is diagonally laid across the can materials 122a, 122c, 122d and the reinforcing material 124a diagonally. Therefore, the reinforcing members 124b and 124c intersect at a central point and extend radially from here.

  The lower frame 122 has a substantially rectangular shape with four corners recessed along the outer shape of the upper frame 112. Through these recesses 119, pillars 178 of a pedestal 170 described later support the four corners of the upper frame 112 from below.

  The connecting member 118 connects the upper frame 112 and the lower frame 122 while being separated in the Z-axis direction. In the present embodiment, the connecting material 118 is composed of a can material made of round steel, and connects the upper frame 112 and the lower frame 122 in the vicinity of the four corners.

  As shown in FIG. 15, the gantry 170 has a rectangular shape formed by connecting can materials 172 a and 172 b extending in the X-axis direction and can materials 172 c and 172 d extending in the Y-axis direction. It is configured by reinforcing the inside of the frame with a plurality of reinforcing members 174a and 174b. Here, the cans 172a, 172b, 172c, and 172d are hollow bars, and in the present embodiment, a round steel having a cross-sectional shape is used. In addition, the reinforcing members 174a and 174b are rod members that are laid horizontally inside the frame body regardless of whether they are hollow or solid, and in the present embodiment, a round steel having a cross-sectional shape is used.

  Here, as described above, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the gantry 170 can also be divided into a plurality of blocks. The cans 172c and 172d extending in the Y-axis direction of the gantry 170 are cut in the middle, and a dividing portion 176 is provided. Then, for each of the front and rear blocks across the dividing portion 176, a reinforcing material 174a made of B-shaped steel is horizontally mounted so as to extend in the X-axis direction between the cans 172c and 172d of the cut portion. Has been. In addition, a reinforcing material 174a made of B-shaped steel is horizontally installed so as to extend further in the X-axis direction in the front frame. Further, a reinforcing member 174b made of B-shaped steel is horizontally mounted in the frame of the pedestal 170 so as to extend in the Y-axis direction. This reinforcing material 174b is cut in the middle, and a dividing portion 176 is provided.

  Support columns 178 are provided at the four corners of the gantry 170 so as to extend in the Z-axis direction. The vibration isolation unit 150 is provided on the upper end of the column 178 of the gantry 170 and on the can materials 172a, 172b, 172c, and 172d. More specifically, the vibration isolation unit 150 includes the cans of the upper and lower frames 122 between the four corners of the upper frame 112 and the upper ends of the columns 178 of the gantry 170 and in the middle of each can material 172a, 172b, 172c, 172d. Between the materials 122a, 122b, 122c, and 122d, the base 110 is supported so as to be capable of vibration isolation. The vibration isolation unit 150 removes vibration transmitted from the installation surface to the base 110, and can be made of an elastic material such as an air spring or rubber, for example.

  The guide rails 140 are provided on the upper surfaces of the can materials 112c and 112d, respectively, and extend in the Y-axis direction. More specifically, a protruding piece 152 is provided on the upper surface of the can materials 112c and 112d toward the outer side, and the protruding piece 152 continuously extends in the Y-axis direction. A guide rail 140 is provided on the upper surface of the projecting piece 152. Further, the permanent magnet 142 is provided adjacent to a position outside the guide rail 140 on the upper surface of the projecting piece 152 and extends in the Y-axis direction. This permanent magnet 142 has a predetermined pattern of S and N poles repeated in the Y-axis direction.

  Above the guide rail 140 and the permanent magnet 142, a connecting plate 146 connected to the lower portions on both sides of the gantry portion 130 extending in the X-axis direction is disposed. On the lower surface of the connecting plate 146, a guide slider 144 and Electromagnets 148 are provided adjacent to each other. The electromagnet 148 changes the magnetic pole in accordance with the pattern of the S pole and the N pole of the permanent magnet 142 and generates a repulsive force between the permanent magnet 142 and guides the gantry portion 130 with the guide rail 140 while moving along the Y axis. Can be moved in the direction.

  Note that a plurality of reinforcing ribs 154 are provided on the lower surface of the overhanging piece 152 between the outer surfaces of the can members 112c and 112d at predetermined intervals in the Y-axis direction.

  The gantry unit 130 includes a support unit 130a extending in the X-axis direction, a linear motor unit 130b, and a moving unit 130c. The moving part 130c can be moved in the X-axis direction along the linear motor part 130b by the linear motor part 130b. Then, by attaching a predetermined processing apparatus to the moving unit 130c, the processing apparatus moves in the X-axis direction, and a predetermined process is performed on the substrate mounted on the base 110. This processing apparatus may be a camera that inspects defects on the substrate, a repair apparatus that repairs the surface treatment state of the substrate such as color loss of a color filter, or a coating apparatus that performs pattern processing on the substrate. can do.

  On the base 110 of the stage apparatus 101, a work surface plate (not shown) for placing a substrate such as a liquid crystal panel is installed as in the reference embodiment. In addition, when the stage apparatus 101 is transported by a transport vehicle, it is loaded on the transport vehicle in a state where the work surface plate is installed.

In the present embodiment, as shown in FIG. 10, the base 110, the guide rail 140, the permanent magnet 142, the overhanging piece 152, the pedestal 170, and the work surface plate are divided by a dividing plane orthogonal to the Y-axis direction. Then, the divided base 110 is connected to the divided portions 116 and 126 by bolts or the like.
A plurality of reinforcing ribs 154 are provided on the lower surface of the overhanging piece 152 between the outer surfaces of the can members 112c and 112d, and the divided base 110 is interposed via the reinforcing ribs 154. Even connected. Here, in the case of the conventional stage structure, it is necessary to provide a flange for connection so that it protrudes to the side surface of the stage when trying to be divided, and there is a problem that the size in the lateral direction becomes large. In the embodiment, since the reinforcing rib 154 and the divided portions 116 and 126 can be prevented from jumping out to the side of the projecting piece 152, an increase in size can be suppressed.

  Thus, since the base 110, the guide rail 140, the permanent magnet 142, the overhanging piece 152, the mount 170, and the work surface plate can be divided in the Y-axis direction, the stage device 101 can be divided into two blocks. Will be configured. In addition, the division parts 116, 126, and 176 are provided at positions corresponding to the upper and lower Z-axis directions, and are formed at positions such that each block can be loaded on the transport vehicle in the Y-axis direction.

  Further, as shown in FIGS. 10 and 16, a cable carrier 160 is provided on both sides of the base 110 and below the projecting piece 152. The gantry unit 130 transmits / receives various signals to / from a power cable (not shown) that supplies power for controlling the movement of the gantry unit 130 itself and the moving unit 130c and a processing device attached to the moving unit 130c. A signal cable (not shown) is connected. These cables are wired via a cable carrier 160.

  The cable carrier 160 is formed by connecting a plurality of flat cylindrical members, and the cylindrical members are connected so as to be rotatable within a limited angle. The collected cables are passed through the cable carrier 160. One end 160 a of the cable carrier 160 is fixed on a support base 162 provided on the side of the base 110. Further, the other end 160 b of the cable carrier 160 is fixed to the connecting member 164. The connecting member 164 is a cylindrical member and is connected to the gantry unit 130 and the cable carrier 160, and guides a cable from the cable carrier 160 to the gantry unit 130.

  Accordingly, as shown in FIG. 17, the cable carrier 160 can be deformed like a caterpillar (registered trademark), and as the gantry unit 130 moves in the Y-axis direction, an arbitrary position in the longitudinal direction of the base 110. It can be bent in a U shape. The cable passed through the cable carrier 160 is deformed following the deformation of the cable carrier 160.

  Thus, by providing the cable carrier 160 on both sides of the base 110 and below the projecting piece 152, unlike the case of being provided inside the base 110, between the can materials 112c and 122c and the can materials 112d, The degree of freedom of use of the space between 122d is increased, and the connecting member 118 and the vibration isolation unit 150 can be disposed here, so that the rigidity is improved and the vibration damping property is improved. Further, by providing the projecting piece 152 and disposing the guide rail 140 and the permanent magnet 142 thereon, the X of the base 110 can be compared with the case where these are disposed on the cans 112c and 112d of the upper frame 112. The size in the axial direction can be reduced, and the footprint is reduced.

  Thus, in the stage apparatus 101 according to the present embodiment, the base 110 has the upper frame 112 and the lower frame 122, which are connected by the connecting material 118 to form a so-called box structure. Despite being constructed and lighter in weight, the rigidity is enhanced. Therefore, even if a load is applied by the movement of the gantry part 130 and the vibration isolation unit 150 sinks and the base 110 is inclined, the deformation of the base 110 itself is suppressed, so that the gantry part 130 and the base 110 are not deformed. The relative position error is extremely small, and the substrate can be processed accurately. In addition, since there is no need to wait for the substrate processing until the deformation of the base 110 returns, there is no risk of lowering the throughput.

In addition, since the base 110 has the dividing portions 116 and 126 for dividing the base 110 into a plurality of blocks in the horizontal direction, even if the base 110 becomes larger due to the increase in size of the board, a special large vehicle can be used. The base 110 can be divided and transported without being used. Further, when the cans 112c, 112d, 122c, and 122d constituting the base 110 can be machined, the machining can be easily performed because the cans can be performed for each divided portion.
In addition, when the base 110 is divided, if the base 110 is made of a can material, the rigidity of the joint surface is low, and there is a possibility of causing distortion when the gantry unit 130 is driven. The base 110 has a box structure. When the upper and lower joint surfaces of the upper frame 112 and the lower frame 126 are combined, the joint surfaces increase, so that the possibility of causing distortion can be reduced. It has an advantageous structure.

  In addition, since the dividing parts 116 and 126 are configured by cutting the cans constituting the upper frame 112 and the lower frame 126 at positions corresponding to the upper and lower sides, the dividing parts 116 provided on the upper frame 112 and the lower frame 122. , 126 are separated in the vertical direction, so that they are strengthened against the moment that the dividing surface tends to come off, which is advantageous in terms of rigidity.

  Moreover, since the outward flanges 116a and 126a are provided on the cut surface of the can material, the divided blocks can be easily connected to each other by bolts or the like via the outward flanges 116a and 126a. Moreover, since the same outward flange is provided also in the cut surface of the can material of the mount 170, the divided | segmented blocks can be easily connected with a volt | bolt etc.

  In addition, reinforcing members 114c and 114d are installed in an oblique direction in the frame of the upper frame 112, and a reinforcing material 124c is installed in an oblique direction in the frame of the lower frame 122. The rigidity of the base 110 can be sufficiently increased as compared with the case where a reinforcing material is installed.

  Also, by providing the cable carrier 160 on both sides of the base 110 and below the projecting piece 152, unlike the case of being provided inside the base 110, between the cans 112c and 122c and between the cans 112d and 122d. The degree of freedom of use of the space is increased, and the connecting member 118 and the vibration isolation unit 150 can be disposed here, so that the rigidity can be improved and the vibration damping performance can be improved. Moreover, since the length of the connecting member 164 in the Z-axis direction can be shortened, the vibration of the base 110 due to the influence of disturbance can be reduced. Further, by providing the projecting piece 152 and disposing the guide rail 140 and the permanent magnet 142 thereon, the X of the base 110 can be compared with the case where these are disposed on the cans 112c and 112d of the upper frame 112. The size in the axial direction can be reduced, and the footprint can be reduced.

  Further, since the stage apparatus 101 includes the gantry 170 that supports the base 110 via the vibration isolation unit 150, the base 110 can be supported on the gantry 170 in a vibration-isolating state.

  In addition, since the four corners of the upper frame 112 are supported by the support columns 178 from below through the vibration isolation unit 150 through the depressions 119 at the four corners of the lower frame 122, the base 110 is closer to the center of gravity through the vibration isolation unit 150. It can be supported at a high position, and the shaking of the base 110 caused by the movement of the gantry unit 130 can be suppressed. Further, since the lower frame 122 functions as a weight, the shaking of the base 110 can be further suppressed.

  The connecting member 118 is made of round steel and the upper frame 112 and the lower frame 122 are connected at the four corners. However, the connecting member 118 is not limited to round steel, and the upper frame 112 and the lower frame 122 are made of, for example, a plate material. It is good also as a structure which connects so that it may surround.

  The present invention is not limited to the above-described embodiment, and various modifications can be made. For example, in the above-described embodiment, the application to the two-axis type stage apparatuses 1 and 101 in which the gantry units 30 and 130 move in the Y-axis direction and the moving units 30c and 130c move in the X-axis direction is described. The present invention is also applicable to a single-axis type in which only the gantry units 30 and 130 move.

  The movement of the gantry units 30 and 130 and the moving units 30c and 130c may be either a contact type or a non-contact type.

It is a perspective view which shows the stage apparatus which concerns on a reference form. It is the perspective view which looked at the base with which the stage apparatus of FIG. 1 is provided from upper direction. It is the perspective view which looked at the base from the lower part. It is a perspective view which shows the state in which the lower frame of the base with which the connection material was connected is supported by the vibration isolation unit. It is the perspective view which set the work surface plate to the stage apparatus shown in FIG. It is a front view which shows a division part. It is the elements on larger scale which show arrangement | positioning of a cable carrier. It is a side view of the stage apparatus shown in FIG. It is a figure which shows the modification of a division part. It is a perspective view which shows the stage apparatus which concerns on 1st Embodiment of this invention. It is the perspective view which looked at the base with which the stage apparatus of FIG. It is the perspective view which looked at the base from the lower part. It is the perspective view which looked at the back block which divided the base from the upper part. It is a perspective view which shows the lower frame of the base with which the connection material was connected. It is a perspective view which shows a mount frame and a vibration isolation unit. It is the elements on larger scale which show arrangement | positioning of a cable carrier. It is a side view of the stage apparatus shown in FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,101 ... Stage apparatus 10, 110 ... Base, 12, 112 ... Upper frame, 14c, 14d, 114c, 114d, 124c ... Reinforcement material, 16, 26, 116, 126, 176 ... Dividing part, 16a, 26a ... outward flange, 18, 118 ... coupling material, 22, 122 ... lower frame, 30, 130 ... gantry part, 50, 150 ... vibration isolation unit, 119 ... depression, 170 ... mount, 178 ... strut.

Claims (5)

A stage device including a base, a gantry provided to be movable in a uniaxial direction on the base, and a vibration isolation unit that supports the base;
The base is
An upper frame constructed by connecting cans in a frame shape;
A lower frame constructed by connecting cans in a frame shape and spaced apart from the upper frame;
A connecting member that connects the upper frame and the lower frame;
A stage apparatus further comprising a gantry for supporting the upper frame from below with a support through the vibration isolation unit.   The stage apparatus according to claim 1, wherein the base includes a division unit for dividing the base into a plurality of blocks in the horizontal direction.   The stage apparatus according to claim 2, wherein the division unit has a cut surface formed by cutting the can material constituting the upper frame and the lower frame at positions corresponding to the upper and lower sides.   The stage apparatus according to claim 3, wherein an outward flange is provided on the cut surface of the can material.   5. The reinforcing material is installed in at least one of the upper frame and the lower frame in an oblique direction with respect to a pipe connected in a frame shape. 6. The stage apparatus as described.

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