JP2009139234A - Roughness measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a roughness measuring device for measuring the roughness of a tooth flank while moving along the tooth flank of a gear. <P>SOLUTION: This roughness measuring device includes: a measuring optical system 12S for measuring the sum of the roughness of the tooth flank in the gear and variation in distance to the tooth flank; a variation detecting optical system 12D for detecting variation in distance between the tooth flank and the measuring optical system 12S; and a guide part 15 for guiding the measuring optical system 12S and the variation detecting optical system 12D along the tooth flank. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a roughness measuring device, and more particularly to a roughness measuring device suitable for use in measuring tooth surface roughness in a gear.

  Conventionally, gears used for transmission of driving force have been required to have good meshing between the gears in order to perform smooth power transmission. This meshing state has been determined based on information such as tooth surface roughness obtained by measuring the tooth contact.

As the above-mentioned tooth contact measurement method, the carbon applied to the tooth surface is transferred to paper, the tooth contact is estimated from the transferred carbon image, or the tooth surface roughness is directly measured using light, A method for determining based on the roughness of the obtained tooth surface is known (see, for example, Patent Documents 1 and 2).
JP 2002-107142 A JP-A-3-78609

  However, for example, since it is difficult to remove a gear used for a ship's screw drive system, it is necessary to measure the tooth contact with the gear incorporated in the drive system, that is, on the ship. In such a gear incorporated in the drive system, there is a problem that it is difficult to measure the tooth contact in the above-described measurement direction, or skill is required to determine the tooth contact.

  In other words, with the method of transferring the carbon applied to the tooth surface to paper, it is possible to measure the tooth contact on the ship, but it is not easy to judge the tooth contact because it requires skill in applying the carbon to the tooth surface. There was a problem. Furthermore, there is a problem that the tooth contact cannot be measured quantitatively.

  On the other hand, when measuring the tooth contact on a ship by directly measuring the tooth surface roughness using light, the tooth surface is moved by moving the measuring unit equipped with an optical system along the tooth surface of the gear. Will be measured. Then, the result of roughness measurement that requires accuracy in micrometer units includes fluctuations in the distance between the measurement part and the tooth surface due to movement of the measurement part (for example, fluctuations in millimeters). There was a problem that roughness could not be measured.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a roughness measuring apparatus capable of measuring tooth surface roughness while moving along the tooth surface of a gear. And

In order to achieve the above object, the present invention provides the following means.
The roughness measuring device of the present invention includes a measuring optical system that measures the sum of the roughness of the tooth surface in the gear and the variation in the distance between the tooth surface, and the distance between the tooth surface and the measuring optical system. And a guide portion for guiding the measurement optical system and the variation detection optical system along the tooth surface.

According to the present invention, the measuring optical system and the fluctuation detecting optical system are moved along the tooth surface of the gear by the guide portion. At this time, the sum of the roughness of the tooth surface and the variation in the distance to the tooth surface is measured by the measurement optical system, and the variation in the distance between the tooth surface and the measurement optical system is detected by the variation detection optical system. From the measured value of the sum of the roughness of the tooth surface measured by the measurement optical system and the distance variation to the tooth surface, the variation value of the distance between the tooth surface detected by the variation detection optical system and the measurement optical system is calculated. By subtracting, the roughness of the tooth surface from which the influence of the movement of the measuring optical system is removed can be obtained.
In particular, even if the gear is a helical gear that is difficult to move the measurement optical system and the fluctuation detection optical system along the tooth surface as compared with the spur gear, the guide portion is provided. The measurement optical system and the fluctuation detection optical system can be easily moved along the tooth surface.

  In the above invention, the tooth surface is reflected by reflecting light used in at least one of the measurement optical system and the variation detection optical system propagating toward the radial center side of the gear toward the circumferential direction of the gear. It is desirable to provide a reflecting portion that leads to

  According to the present invention, in at least one of the measurement optical system and the fluctuation detection optical system, light used for measurement and detection can be incident on the tooth surface that is the side surface of the gear tooth from the circumferential direction of the gear. For example, as compared with a method in which light is incident on the tooth surface from the radial direction of the gear, the illuminance of light irradiated per unit area can be increased, and more accurate measurement and detection can be performed.

  In the said invention, it is desirable that the said guide part is a slide part which has the unevenness | corrugation formed according to the shape of each tooth | gear in the said gearwheel.

  According to the present invention, the measurement optical system and the variation detection optical system can be smoothly moved along the tooth surface by using the guide portion as a slide portion formed in accordance with the shape of each tooth. For example, compared with the case where the guide portion is a wheel that travels between the teeth, the slide portion has a concave and convex shape that matches the shape of each tooth, and thus suppresses movement in the direction intersecting the tooth surface. Meanwhile, the measurement optical system and the fluctuation detection optical system can be moved along the tooth surface.

  In the above invention, the guide portion is preferably a plurality of wheels that travel between the teeth of the gear, and at least one of the plurality of wheels is preferably provided with a rotary encoder.

  According to the present invention, the measurement optical system and the fluctuation detection optical system can be moved along the tooth surface by arranging the wheel between the teeth and rotating the wheel. Furthermore, by measuring the rotational phase of the wheel with a rotary encoder, it is possible to grasp the movement distance of the measurement optical system and the fluctuation detection optical system with respect to the tooth surface.

  In the above invention, it is desirable that a data storage unit is provided for storing the measurement value measured by the measurement optical system and the detection value detected by the variation detection optical system.

  According to the present invention, since the measured measurement value and the detected detection value can be stored in the data storage unit, the calculation unit such as a personal computer that performs the calculation based on the measurement value and the detection value; The roughness measuring apparatus of the present invention can be configured separately. In other words, the roughness measuring device of the present invention can be made portable, for example, a gear attached to a ship, a gear that is being processed on a machine tool that processes the gear, or a gear that has been processed. The roughness of the tooth surface can be measured.

  According to the roughness measuring apparatus of the present invention, the tooth detected by the fluctuation detecting optical system from the measured value of the tooth surface roughness measured by the measuring optical system moved along the tooth surface of the gear by the guide unit. By subtracting the fluctuation value of the distance between the surface and the measurement optical system, the roughness of the tooth surface from which the influence of the movement of the measurement optical system is removed can be obtained. Therefore, the tooth surface roughness can be measured while moving along the tooth surface of the gear.

A tooth surface roughness measuring apparatus according to an embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a schematic diagram illustrating the configuration of a tooth surface roughness measuring apparatus according to the present embodiment.
A tooth surface roughness measuring device (roughness measuring device) 1 measures the roughness of a tooth surface that is a side surface of each tooth in a gear, that is, a surface that contacts a tooth.

  As shown in FIG. 1, the tooth surface roughness measuring apparatus 1 includes a sensor unit 2 that measures the roughness of the tooth surface, power supplied to the sensor unit 2, and data measured by the sensor unit 2. And a data storage unit 4 for storing data processed in the source box 3, and the tooth surface roughness is determined based on various data stored in the data storage unit 4. A calculation unit 5 such as a personal computer for calculation is further provided separately.

Thus, by providing the data storage unit 4 connected to the sensor unit 2 and the calculation unit 5 separately, the sensor unit 2 can be made portable, for example, a gear attached to a ship. It is possible to easily measure the tooth surface roughness of the gear on the ship and to measure the tooth surface roughness of the gear during or after processing on the machine tool for processing the gear.
As described above, the data storage unit 4 and the calculation unit 5 may be provided separately, or the data storage unit 4 and the calculation unit 5 may be provided integrally, and are not particularly limited.

FIG. 2 is a schematic diagram illustrating the configuration of the sensor unit in FIG. FIG. 3 is a perspective view illustrating the configuration of the sensor unit of FIG.
The sensor unit 2 is disposed on the gear, and measures the roughness of the tooth surface while moving along the tooth surface of the gear.
As shown in FIGS. 1 to 3, the sensor unit 2 includes a casing 11 that forms the outer frame of the sensor unit 2, and a stylus optical that measures the sum of the roughness of the tooth surface and the variation in the distance to the tooth surface. System (measuring optical system) 12S, a skid optical system (variation detecting optical system) 12D for detecting a variation in the distance between the tooth surface and the sensor unit 2, and laser light related to the stylus optical system 12S and the skid optical system 12D An objective optical system 13T that guides the sensor unit 2 to the tooth surface, a guide unit 15 that guides the sensor unit 2 along the tooth surface, and a rotary encoder 16 that detects the movement distance of the sensor unit 2 are provided.

  The housing 11 houses the stylus optical system 12S and the skid optical system 12D inside, and a guide portion 15 and a rotary encoder 16 are disposed around the housing 11.

FIG. 4 is a schematic diagram illustrating the configuration of the stylus optical system and the skid optical system in FIG.
The stylus optical system 12S is an optical measurement system that measures the sum of the roughness of the tooth surface and the distance to the tooth surface in a non-contact manner together with the objective optical system 13T.
2 and 4, the stylus optical system 12S includes a light source unit 21S that emits laser light, and a polarization beam splitter that transmits P-polarized light and reflects S-polarized light (hereinafter referred to as PBS). 22S), an objective lens system 23S focused on the tooth surface, a cubic beam splitter (hereinafter referred to as CBS) 24S that divides the laser beam reflected from the tooth surface into two parts, and a division The critical angle prisms 25SA and 25SB to which the laser beam is incident, the optical sensors 26SA and 26SB to which the laser beam emitted from the critical angle prism 25SA is incident, and the laser beam emitted from the critical angle prism 25SB are incident. The optical sensors 26SC and 26SD are provided.

The light source unit 21S emits a laser beam used for measuring the sum of the variation in the tooth surface roughness and the distance to the tooth surface, and uses, for example, a laser diode. The wavelength of the laser light emitted from the light source unit 21S can be determined based on the resolution required for the direction along the tooth surface, and is not particularly limited.
A wiring for supplying power from the source box 3 is connected to the light source unit 21S, and laser light is emitted by the supplied power. The light source unit 21S is arranged so that the emitted laser light is incident on the PBS 22S.

  The PBS 22S reflects S-polarized light of the laser light emitted from the light source unit 21S toward the objective lens system 23S and transmits P-polarized light, and reflects from the tooth surface and enters through the objective lens system 23S. The P-polarized laser beam is transmitted and guided to the CBS 24S.

  The objective lens system 23S is a lens group disposed at a position where the laser beam reflected by the PBS 22S is incident, and is an optical system focused on the tooth surface irradiated with the laser beam.

  The CBS 24S is used for correcting the influence of the inclination of the tooth surface irradiated with the laser light together with the optical sensors 26SA, 26SB, 26SC, and 26SD. The CBS 24S is disposed at a position where the laser light reflected from the tooth surface and transmitted through the PBS 22S is incident, transmits about 50% of the incident laser light, and reflects the remaining about 50%.

  The critical angle prisms 25SA and 25SB are used for measuring the roughness of the tooth surfaces irradiated with the laser light together with the optical sensors 26SA, 26SB, 26SC, and 26SD. The critical angle prism 25SA is disposed at a position where the laser light reflected by the CBS 24S is incident, and the critical angle prism 25SB is disposed at a position where the laser light transmitted through the CBS 24S is incident.

The optical sensors 26SA and 26SB and the optical sensors 26SC and 26SD measure the roughness of the tooth surfaces irradiated with the laser light together with the critical angle prisms 25SA and 25SB, and the tooth surfaces irradiated with the laser light together with the CBS 24S. This corrects the influence of tilt.
The optical sensors 26SA and 26SB are arranged at positions where the laser light reflected by the other reflecting surface 29SD of the critical angle prism 25SA is incident. Similarly, the optical sensors 26SC and 26SD are arranged at positions where the laser light reflected by the other reflecting surface 29SD of the critical angle prism 25SB is incident.
A signal line for outputting a detection signal of the laser beam detected by each sensor to the source box 3 is connected to the optical sensors 26SA and 26SB and the optical sensors 26SC and 26SD.

  The optical sensors 26SA and 26SB are arranged at positions adjacent to each other, and on the intermediate line of the optical sensors 26SA and 26SB, the center of the image of the laser light emitted from the critical angle prism 25SA is formed. Similarly, the optical sensors 26SC and 26SD are also arranged at positions adjacent to each other and at the position where the center of the image of the laser beam emitted from the critical angle prism 25SB is formed on the intermediate line of the optical sensors 26SC and 26SD. ing.

The skid optical system 12D is an optical measurement system that detects a variation in the distance between the gear and the sensor unit 2 together with the objective optical system 13T, in particular, a variation in the distance between the tooth surface and the stylus optical system 12S in a non-contact manner. is there.
As shown in FIGS. 2 and 4, the skid optical system 12D transmits a light source unit 21D that emits laser light, a divergent optical system 27D that diverges laser light incident from the light source unit 21D, and P-polarized light. At the same time, the PBS 22D that reflects S-polarized light, the objective lens system 23D focused at a position away from the tooth surface toward the sensor unit 2, and the CBS 24D that splits the laser light reflected from the tooth surface into two parts are divided. The critical angle prisms 25DA and 25DB to which the laser beam is incident, the optical sensors 26DA and 26DB to which the laser beam emitted from the critical angle prism 25DA is incident, and the laser beam emitted from the critical angle prism 25DB are incident. Optical sensors 26DC and 26DD are provided.

The light source unit 21 </ b> D emits a laser beam used to detect a change in distance between the gear and the sensor unit 2, and uses, for example, a laser diode.
Similarly to the light source unit 21S, a wiring for supplying power from the source box 3 is connected to the light source unit 21D, and the light source unit 21S is arranged so that emitted laser light is incident on the PBS 22S.

  The diverging optical system 27D converts the laser light emitted from the light source unit 21D into diverging light and makes it incident on the PBS 22D. The diverging optical system 27D may include a concave lens, but is not particularly limited to a concave lens.

  The PBS 22D reflects S-polarized light from the laser light emitted from the light source unit 21D toward the objective lens system 23D and transmits P-polarized light, and reflects from the tooth surface and enters through the objective lens system 23D. The P-polarized laser beam is transmitted and guided to the CBS 24D.

  The objective lens system 23D is a lens group arranged at a position where the S-polarized laser light reflected by the PBS 22D is incident, and the focal point is set on the objective lens system 23D side from the tooth surface irradiated with the laser light. Optical system.

  The CBS 24D is used to correct the influence of the inclination of the tooth surface irradiated with the laser light together with the optical sensors 26DA, 26DB, 26DC, and 26DD. The CBS 24D is disposed at a position where the laser beam reflected from the tooth surface and transmitted through the PBS 22D is incident, transmits about 50% of the incident laser beam, and reflects the remaining about 50%.

  The critical angle prisms 25DA and 25DB are used to detect a change in the distance between the tooth surface irradiated with the laser light and the sensor unit 2 together with the optical sensors 26DA, 26DB, 26DC, and 26DD. The critical angle prism 25DA is disposed at a position where the laser light reflected by the CBS 24D is incident, and the critical angle prism 25DB is disposed at a position where the laser light transmitted through the CBS 24D is incident.

  The critical angle prisms 25SA and 25SB and the critical angle prisms 25DA and 25DB described above are formed with a pair of reflecting surfaces 29SD that are boundary surfaces with air and totally reflect the incident laser light under a predetermined condition. . One reflection surface 29SD is arranged at a position where the laser light incident on the critical angle prisms 25SA and 25SB and the critical angle prisms 25DA and 25DB is incident, and the other reflection surface 29SD is a laser beam reflected by the one reflection surface 29SD. It is arranged at a position where light enters.

  Further, the reflecting surface 29SD is arranged so that the incident angle of the incident laser beam becomes a substantially critical angle. Here, the critical angle is an angle obtained by Snell's law, and is the minimum incident angle at which the laser light incident on the reflecting surface 29SD causes total reflection. Therefore, when the laser light is incident on the reflecting surface 29SD at an incident angle smaller than the critical angle, a part of the laser light is transmitted through the reflecting surface 29SD and the rest is reflected by the reflecting surface 29SD.

The optical sensors 26DA and 26DB and the optical sensors 26DC and 26DD detect a variation in the distance between the tooth surface irradiated with the laser light together with the critical angle prisms 25DA and 25DB and the laser together with the CBS 24D. This corrects the influence of the inclination of the tooth surface irradiated with light. The optical sensors 26DA and 26DB are arranged at positions where the laser light reflected by the other reflecting surface 29SD of the critical angle prism 25DA is incident. Similarly, the optical sensors 26DC and 26DD are arranged at positions where the laser light reflected by the other reflecting surface 29SD of the critical angle prism 25DB is incident.
The optical sensors 26DA and 26DB and the optical sensors 26DC and 26DD are connected to signal lines for outputting a laser beam detection signal detected by each sensor to the source box 3.

  Similarly to the optical sensors 26SA and 26SB, the optical sensors 26DA and 26DB are adjacent to each other, and the center of the image of the laser beam emitted from the critical angle prism 25DA is formed on the intermediate line of the optical sensors 26DA and 26DB. It is arranged at the position. Similarly, the optical sensors 26DC and 26DD are arranged at positions adjacent to each other, and on the intermediate line of the optical sensors 26DC and 26DD, at a position where the center of the image of the laser light emitted from the critical angle prism 25DB is formed. ing.

  The objective optical system 13T guides the laser light emitted from each of the stylus optical system 12S and the skid optical system 12D to the tooth surface of the gear, and also reflects each laser light reflected from the tooth surface to the stylus optical system 12S and the skid optical system, respectively. It leads to 12D.

  As shown in FIGS. 2 and 4, the objective optical system 13T includes a first λ / 4 wavelength plate 31TD and a second λ / 4 that rotate the polarization direction of the laser light related to the skid optical system 12D by about 90 °. The polarization direction of the laser light related to the wave plate 32TD, the first right-angle prism 33TD disposed between the first λ / 4 wavelength plate 31TD and the second λ / 4 wavelength plate 32TD, and the stylus optical system 12S is approximately Λ / 4 wavelength plate 34TS rotated by 90 °, CBS 35T for synthesizing or separating optical paths of laser light related to stylus optical system 12S and skid optical system 12D, and laser light related to stylus optical system 12S and skid optical system 12D as gears A second right-angle prism 36T and a glass stick 37T that lead to the tooth surface are provided.

The first λ / 4 wavelength plate 31TD rotates the polarization direction of the incident laser light by about 90 °, and a known one can be used and is not particularly limited.
The first λ / 4 wavelength plate 31TD is a position where the laser beam emitted from the objective lens system 23D is incident, and the laser beam emitted from the first λ / 4 wavelength plate 31TD is the first right-angle prism 33TD. It is arrange | positioned in the position which injects into.

The first right-angle prism 33TD reflects the laser light incident from the first λ / 4 wavelength plate 31TD toward the second λ / 4 wavelength plate 32TD.
As described above, the first optical prism 13TD may be provided in the objective optical system 13T, the stylus optical system 12S and the skid optical system 12D may be arranged in parallel, and the sensor unit 2 may be reduced in size. The objective optical system 13T may be configured without using the 1 right-angle prism 33TD, and is not particularly limited.

The second λ / 4 wavelength plate 32TD rotates the polarization direction of the incident laser light by about 90 °, and a known one can be used and is not particularly limited.
The second λ / 4 wavelength plate 32TD is a position where the laser beam reflected from the first right-angle prism 33TD is incident, and the laser beam emitted from the second λ / 4 wavelength plate 32TD is incident on the CBS 35T. Placed in position.

The λ / 4 wavelength plate 34TS rotates the polarization direction of the incident laser light by about 90 °, and a known one can be used and is not particularly limited.
The λ / 4 wavelength plate 34TS is disposed at a position where the laser light emitted from the objective lens system 23S is incident and the laser light emitted from the λ / 4 wavelength plate 34TS is incident on the CBS 35T.

The CBS 35T is a position where the laser light related to the skid optical system D emitted from the second λ / 4 wavelength plate 32TD and the laser light related to the stylus optical system 12S emitted from the λ / 4 wavelength plate 34TS are incident. Is arranged.
Specifically, the CBS 35T is a position where the laser light emitted from the second λ / 4 wavelength plate 32TD is incident, and the laser light transmitted through the CBS 35T among the incident laser light is the second right-angle prism 36T. It is arrange | positioned in the position which injects into. At the same time, the CBS 35T is a position where the laser beam emitted from the λ / 4 wavelength plate 34TS is incident, and of the incident laser beam, the laser beam reflected by the CBS 35T is incident on the second right-angle prism 36T. Is arranged.

  That is, the CBS 35T is a position where the laser light related to the skid optical system D that has passed through the CBS 35T and the laser light related to the stylus optical system 12S reflected by the CBS 35T are superimposed and emitted toward the second right-angle prism 36T. Is arranged.

  The second right-angle prism 36T reflects the laser light related to the skid optical system D and the laser light related to the stylus optical system 12S emitted from the CBS 35T in a superimposed manner toward the glass stick 37T.

FIG. 5 is a schematic diagram illustrating the configuration of the glass stick in the objective optical system of FIG.
As shown in FIGS. 4 and 5, the glass stick 37T is a substantially cylindrical member formed of glass extending from the sensor unit 2 toward the gear, and includes a laser beam and a stylus optical system related to the skid optical system D. The laser beam according to 12S is guided to the tooth surface of the gear.
The size of the glass stick 37T can be exemplified by a substantially cylindrical shape having a diameter of about 2 mm to about 3 mm and a length of about 10 mm to about 20 mm, but is selected according to the gear to be measured. However, it is not particularly limited to the above-mentioned size.

The glass stick 37T is provided with a reflecting surface (reflecting portion) 38T formed at an end portion on the gear side and an emitting portion 39T formed on a circumferential surface near the end portion on the gear side.
The reflective surface 38T is an inclined surface formed by obliquely cutting the end of a substantially cylindrical glass stick 37T, and is a mirror surface obtained by depositing silver (Ag) on the inclined surface. The material deposited on the reflective surface 38T may be the above-described silver, gold (Au), or aluminum (Al), and is not particularly limited.
The emitting portion 39T is a flat portion formed at a position facing the reflecting surface 38T on the circumferential surface of the glass stick 37T. The emission part 39T is formed by cutting the circumferential surface of the glass stick 37T, for example.

FIG. 6 is a perspective view illustrating the configuration of the guide portion in the sensor portion of FIG.
The guide part 15 moves the sensor part 2 along the tooth surface of a gearwheel.
As shown in FIG. 6, the guide portion 15 includes a frame portion 41 that holds the sensor portion 2, a relative position between the sensor portion 2 and the frame portion 41, and a radial direction in the gear (the upper and lower sides in FIG. 6 Direction), a second adjustment unit 43 that adjusts the relative position in the circumferential direction (left-right direction in FIG. 6), and a slide unit 44 that moves the sensor unit 2 along the tooth surface. And are provided.

  As shown in FIG. 6, the frame portion 41 is disposed around the housing 11 in the guide portion 15, and holds the guide portion 15 via the first adjustment portion 42 and the second adjustment portion 43.

The first adjustment part 42 is disposed between the frame part 41 and the second adjustment part 43, and is a relative position between the sensor part 2 and the frame part 41, and more specifically in the radial direction of the gear. The relative position of the gear in the height direction of the teeth is adjusted.
The first adjustment unit 42 has a column part 51 extending in the radial direction from the frame part 41, a first adjustment body 52 arranged to be movable in the radial direction along the column part 51, and the first adjustment body 52. And a first screw 53 screwed so as to be movable in the radial direction.
The first adjusting body 52 is provided with a through-hole through which the column portion 51 is inserted, and is movable along the radial direction.
The end portion of the first screw 53 on the frame portion 41 side contacts the frame portion 41, and the relative position between the frame portion 41 and the first adjustment body 52 is adjusted by rotating the first screw 53.

The second adjustment unit 43 is disposed between the first adjustment unit 42 and the sensor unit 2, and is a relative position between the sensor unit 2 and the frame unit 41, and more specifically in the circumferential direction of the gear. The relative position in the direction substantially perpendicular to the tooth surface is adjusted.
The second adjuster 43 includes a base 61 fixed to the first adjuster 52, a moving part 62 configured to be movable in a direction substantially perpendicular to the tooth surface, and the above-described base part 61. A second screw 63 screwed so as to be movable in a substantially vertical direction and a holding portion 64 that holds the sensor portion 2 are provided.
The end of the second screw 63 on the moving unit 62 side contacts the moving unit 62, and the relative position between the base unit 61 and the moving unit 62 is adjusted by rotating the second screw 63.

  As shown in FIG. 3, the slide portion 44 is disposed on the surface of the sensor portion 2 that faces the gear, and moves the sensor portion 2 along the tooth surface. The slide portion 44 is formed along the tooth shape of the gear.

  Examples of the slide portion 44 include those formed of resin using a gear to be measured as a mold. The gear to be used as a mold may be a gear to be measured itself or a gear of the same type as the gear, and is not particularly limited. Further, in addition to forming the slide portion 44 using a gear as a mold, the slide portion 44 may be formed based on a design drawing of the gear, and is not particularly limited.

  The rotary encoder 16 detects a relative movement distance between the sensor unit 2 and the tooth surface, and is connected to the source box 3 as shown in FIG. A known encoder can be used as the rotary encoder 16 and is not particularly limited.

Next, the measurement of the tooth surface roughness of the gear by the tooth surface roughness measuring apparatus 1 having the above-described configuration will be described.
First, the slide part 44 of the guide part 15 is arranged according to the teeth in the gear, and the relative position between the tooth surface of the gear and the sensor part 2 is adjusted.
Specifically, as shown in FIG. 6, by rotating the first screw 53 of the first adjustment unit 42, the sensor unit 2 is moved in the radial direction of the gear, that is, in the height direction of the teeth in the gear. Thereby, the reflective surface 38T in the glass stick 37T is moved to a position facing the measurement region on the tooth surface. Furthermore, the inclination of the sensor unit 2 is also adjusted by adjusting each of the pair of first adjustment units 42.

At the same time, by rotating the second screw 63 of the second adjustment unit 43, the sensor unit 2 is moved in the radial direction of the gear, that is, in a direction substantially perpendicular to the tooth surface of the gear. Thereby, the reflective surface 38T in the glass stick 37T is moved close to and away from the tooth surface.
In the present embodiment, the first screw 53 and the second screw 63 will be described as being applied to manual rotation.

FIG. 7 is a schematic diagram for explaining measured values by the stylus optical system of FIG. FIG. 8 is a schematic diagram for explaining detection values obtained by the skid optical system of FIG.
When the relative position between the tooth surface and the sensor unit 2 is adjusted, the tooth surface roughness is measured while moving the sensor unit 2 along the tooth surface.
Specifically, as shown in FIG. 7, the stylus optical system 12S causes a distance fluctuation value between the tooth surface and the stylus optical system 12S, that is, the tooth surface roughness value, the tooth surface, the sensor unit 2, and A value including a variation value of the distance between is measured. At the same time, as shown in FIG. 8, the skid optical system 12 </ b> D detects a variation value of the distance between the tooth surface and the sensor unit 2.
Details of the measurement method in the stylus optical system 12S and the detection method in the skid optical system 12D will be described later.

  A signal related to the measurement value by the stylus optical system 12S and a signal related to the detection value by the skid optical system 12D are output to the source box 3 as shown in FIG. Both signals input to the source box 3 are in a format that can be stored in the data storage unit 4 and converted into a data format that can be used for calculation in the calculation unit 5. The converted data is output to the data storage unit 4 and stored in the data storage unit 4.

Further, the moving distance of the sensor unit 2 relative to the tooth surface is detected by the rotary encoder 16.
Specifically, as shown in FIG. 1, power is supplied from the source box 3 to the rotary encoder 16, and a signal related to the movement distance detected by the rotary encoder 16 is output to the source box 3. The signal input to the source box 3 has a format that can be stored in the data storage unit 4, and is converted into a data format that can be used for calculation in the calculation unit 5. The converted data is output to the data storage unit 4 and stored in the data storage unit 4.

  The measurement of the roughness of the tooth surface as described above is performed on the tooth surface of each tooth, the measurement is performed while changing the relative position between the reflection surface 38T and the tooth surface of the glass stick 37T, and a predetermined region on the tooth surface Measure roughness.

FIG. 9 is a schematic diagram for explaining the tooth surface roughness obtained by the calculation.
When the measurement of the tooth surface roughness is completed, various data stored in the data storage unit 4 are input to the calculation unit 5 to calculate the tooth surface roughness.
Specifically, by subtracting the data related to the skid optical system 12D from the data related to the stylus optical system 12S, the change in the distance between the tooth surface included in the data related to the stylus optical system 12S and the sensor unit 2 is obtained. The value is removed and only the tooth surface roughness value is obtained.

Next, a measurement method using the stylus optical system 12S in the sensor unit 2 will be described.
When measurement is performed by the stylus optical system 12S, power is supplied from the source box 3 to the light source unit 21S as shown in FIGS.
When power is supplied, the light source unit 21S emits laser light toward the PBS 22S. The laser light emitted from the light source unit 21S is non-polarized laser light including various polarized light.

Of the laser light incident on the PBS 22S, S-polarized light is reflected toward the objective lens system 23S and is used for measuring the roughness of the tooth surface. On the other hand, P-polarized light is transmitted through the PBS 22S. The S-polarized laser light transmitted through the objective lens system 23S enters the λ / 4 wavelength plate 34TS, is converted into, for example, clockwise circularly-polarized laser light, and is emitted toward the CBS 35T.
About 50% of the laser light incident on the CBS 35T is reflected toward the second right-angle prism 36T, and is used for measuring the roughness of the tooth surface. On the other hand, the remaining approximately 50% of the laser light passes through the CBS 35T.

The laser light incident on the second right-angle prism 36T is reflected toward the glass stick 37T and propagates in the glass stick 37T toward the reflecting surface 38T. The laser light incident on the reflecting surface 38T is reflected toward the tooth surface, and is irradiated toward the tooth surface via the emitting portion 39T of the glass stick 37T.
The irradiated laser light is focused on the tooth surface by the objective lens system 23S.

The irradiated laser light is reflected from the tooth surface, and enters the inside of the glass stick 37T from the emitting portion 39T. The incident laser light is reflected by the reflecting surface 38T toward the second right-angle prism 36T and is incident on the second right-angle prism 36T.
The laser light incident on the second right-angle prism 36T is reflected toward the CBS 24S and enters the CBS 24S. About 50% of the laser light incident on the CBS 24S is reflected toward the λ / 4 wavelength plate 34TS and used for measuring the tooth surface roughness. On the other hand, the remaining approximately 50% of the laser light passes through the CBS 24S.

The laser light incident on the λ / 4 wavelength plate 34TS is converted into P-polarized light and emitted to the objective lens system 23S. The P-polarized laser light that has passed through the objective lens system 23S enters the PBS 22S and also passes through the PBS 22S.
The laser light transmitted through the PBS 22S is incident on the CBS 24S, and about 50% of the incident laser light is reflected and incident on the critical angle prism 25SA. The remaining approximately 50% of the laser light passes through the CBS 24S and enters the critical angle prism 25SB.

The laser light incident on the critical angle prism 25SA is incident on one reflecting surface 29SD and reflected toward the other reflecting surface 29SD, and the laser light incident on the other reflecting surface 29SD is directed toward the optical sensors 26SA and 26SB. Reflected. The optical sensors 26SA and 26SB detect the amount of incident laser light, and output a detection signal corresponding to the amount of light, that is, a distance fluctuation value between the tooth surface and the stylus optical system 12S.
Similarly, in the critical angle prism 25SB, the incident laser light is reflected and input to the optical sensors 26SC and 26SD. The optical sensors 26SC and 26SD output a distance variation value between the tooth surface and the stylus optical system 12S.

Here, measurement of distance variation between the tooth surface and the stylus optical system 12S will be described.
10 and 11 are diagrams for explaining the measurement of the distance variation between the tooth surface and the stylus optical system, and are schematic diagrams for explaining the case where the tooth surface is focused.
In FIGS. 10 and 11, only the critical angle prism 25SA and the optical sensors 26SA and 26SB are shown by simplifying the configuration of the stylus optical system 12S for easy explanation. Further, since the critical angle prism 25SB and the optical sensors 26SC and 26SD have the same functions as the critical angle prism 25SA and the optical sensors 26SA and 26SB, the description thereof is omitted.

  In the stylus optical system 12S, as shown in FIG. 10, substantially parallel laser light is emitted from the light source unit 21S, and S-polarized laser light reflected by the PBS 22S is also substantially parallel light. Here, when the objective lens system 23S is focused on the tooth surface, as shown in FIGS. 10 and 11, the laser light reflected from the tooth surface is transmitted through the objective lens system 23S. The laser beam thus obtained is also substantially parallel light.

When this parallel laser beam is incident on the critical angle prism 25SA, the laser beam is incident on the reflecting surface 29SD at a critical angle. The laser light incident at the critical angle is totally reflected toward the optical sensors 26SA and 26SB, for example.
10 and 11, the case where there is one reflecting surface 29SD is described for ease of explanation. However, in the stylus optical system 12S of the present embodiment, two reflecting surfaces 29SD are provided. Explains.

FIG. 12 is a schematic diagram for explaining the irradiation region of the laser light incident on the optical sensor of FIG.
As described above, the laser light totally reflected by the reflecting surface 29SD is irradiated to the optical sensors 26SA and 26SB as shown in FIG. At this time, the laser light irradiation areas in the optical sensors 26SA and 26SB are substantially equal, and the illuminance of the laser light is also substantially equal. Therefore, the detection signals output from the optical sensors 26SA and 26SB are also detection signals having substantially the same value.

Next, a case where the tooth surface is closer to the stylus optical system 12S than the focal point of the objective lens system 23S will be described.
FIG. 13 is a schematic diagram for explaining a case where the tooth surface approaches the stylus optical system rather than the focal point of the objective lens system in the stylus optical system of FIG.
As shown in FIG. 13, when the tooth surface approaches the stylus optical system 12S, the laser light reflected from the tooth surface is diverged light that diverges toward the critical angle prism 25SA when passing through the objective lens system 23S. Become.

Of the reflecting surface 29SD in the critical angle prism 25SA, the laser light incident on the region close to the objective lens system 23S (the upper half in FIG. 13) is incident on the reflecting surface 29SD at an incident angle larger than the critical angle. Therefore, the laser light incident on the reflection surface 29SD in the near region is divided into a transmitted laser beam and a reflected laser beam.
On the other hand, laser light that enters a region far from the objective lens system 23S (the lower half in FIG. 13) of the reflecting surface 29SD enters the reflecting surface 29SD at an incident angle smaller than the critical angle, and almost all of the laser light is incident. Reflected on the reflecting surface 29SD.

FIG. 14 is a schematic diagram for explaining the irradiation region of the laser light incident on the optical sensor of FIG.
The laser light reflected by the reflecting surface 29SD related to the region close to the objective lens system 23S enters the optical sensor 26SA, and the laser light reflected by the reflecting surface 29SD related to the far region enters the optical sensor 26SB.
At this time, the irradiation areas of the laser light in the optical sensors 26SA and 26SB are substantially equal, but the illuminance of the laser light in the optical sensor 26SA is lower than the illuminance of the laser light in the optical sensor 26SB. Therefore, the detection signal output from the optical sensor 26SA is a detection signal having a smaller value than the detection signal output from the optical sensor 26SB.

Next, a case where the tooth surface is further away from the stylus optical system 12S than the focal point of the objective lens system 23S will be described.
FIG. 15 is a schematic diagram for explaining a case where the tooth surface of the stylus optical system in FIG. 10 is closer to the stylus optical system than the focal point of the objective lens system.
As shown in FIG. 13, when the tooth surface is separated from the stylus optical system 12S, the laser light reflected from the tooth surface is converged light that converges toward the critical angle prism 25SA when passing through the objective lens system 23S. Become.

Of the reflecting surface 29SD of the critical angle prism 25SAB, laser light incident on a region close to the objective lens system 23S (upper half in FIG. 15) is incident on the reflecting surface 29SD at an incident angle smaller than the critical angle. All is reflected by the reflecting surface 29SD.
On the other hand, laser light that is incident on a region of the reflecting surface 29SD that is far from the objective lens system 23S (the lower half in FIG. 15) is incident on the reflecting surface 29SD at an incident angle that is greater than the critical angle. Therefore, the laser light incident on the reflection surface 29SD in the near region is divided into a transmitted laser beam and a reflected laser beam.

FIG. 16 is a schematic diagram for explaining the irradiation region of the laser light incident on the optical sensor of FIG.
The laser light reflected by the reflecting surface 29SD related to the region close to the objective lens system 23S enters the optical sensor 26SA, and the laser light reflected by the reflecting surface 29SD related to the far region enters the optical sensor 26SB.
At this time, the irradiation areas of the laser light in the optical sensors 26SA and 26SB are substantially equal, but the illuminance of the laser light in the optical sensor 26SA is higher than the illuminance of the laser light in the optical sensor 26SB. For this reason, the detection signal output from the optical sensor 26SA is a detection signal having a larger value than the detection signal output from the optical sensor 26SB.

  In this way, by measuring the magnitude relationship between the detection signals output from the optical sensors 26SA and 26SB, the variation in distance between the tooth surface and the stylus optical system 12S is measured.

Next, the measurement of the distance variation between the tooth surface and the skid optical system 12D will be described.
FIG. 17 is a diagram for explaining the measurement of the variation in distance between the tooth surface and the skid optical system.
In FIG. 17, for ease of explanation, the configuration of the skid optical system 12D is simplified, and only the critical angle prism 25DA and the optical sensors 26DA and 26DB are shown. Further, the critical angle prism 25DB and the optical sensors 26DC and 26DD have the same functions as those of the critical angle prism 25DA and the optical sensors 26DA and 26DB, and thus description thereof is omitted.

  In the skid optical system 12D, as shown in FIG. 17, the laser light emitted from the light source unit 21D is diverged light that diverges toward the PBS 22D by the diverging optical system 27D. Only the S-polarized light of the diverging laser light is reflected by the PBS 22D and enters the objective lens system 23S.

  The laser light incident on the objective lens system 23S is condensed toward the tooth surface of the gear and irradiated to a predetermined region. The laser light applied to the tooth surface is reflected toward the objective lens system 23D and enters the objective lens system 23D. Of these, the laser light that has passed through the focal point of the objective lens system 23D is converted into parallel light directed toward the critical angle prism 25DA by the objective lens system 23D.

Subsequent operations at the critical angle prism 25DA and operations at the optical sensors 26DA and 26DB are the same as the operations at the critical angle prism 25SA and the optical sensors 26SA and 26SB in the stylus optical system 12S, and thus description thereof is omitted.
Furthermore, since the operation when the tooth surface approaches the skid optical system 12D and when the tooth surface is separated is the same as the operation in the stylus optical system 12S, the description thereof is omitted.

  As described above, by using the diverging optical system 27D, it is possible to irradiate a laser beam to a predetermined area wider than that of the stylus optical system 12S, and therefore, between the tooth surface related to the predetermined area and the skid optical system 12D. Can be measured.

Next, a method of removing the influence of the tooth surface inclination in the stylus optical system 12S and the skid optical system 12D will be described.
FIG. 18 is a schematic diagram for explaining the removal of the influence of tooth surface inclination in the stylus optical system and the skid optical system.
In FIG. 18, the configuration of the stylus optical system 12S is shown in a simplified manner for easy explanation. Further, since the method for removing the influence of the tilt in the skid optical system 12D is the same as the method for removing the influence of the tilt in the stylus optical system 12S, the description thereof is omitted.

When the tooth surface of the gear is not inclined, the laser beam reflected by the tooth surface passes through the objective lens system 23S and is divided into two by the CBS 24S as shown by the dotted line in FIG. 26SB and light sensors 26SC and 26SD.
On the other hand, when the tooth surface of the gear has an inclination, the optical path of the reflected laser light moves in parallel due to the influence of the inclination, as shown by the solid line in FIG.

  Here, a case will be described in which the inclination of the tooth surface is small enough to handle the optical path of the laser light after passing through the objective lens system 23S as being translated.

When the optical path of the laser light moves in parallel, for example, the laser light irradiation area in the optical sensors 26SA and 26SD increases, and the laser light irradiation area in the optical sensors 26SB and 26SC decreases. Then, the value of the detection signal output from the optical sensors 26SA and 26SD increases, and the value of the detection signal output from the optical sensors 26SB and 26SC decreases.
Based on the change of these detection signals, the error due to the inclination of the tooth surface is corrected. In addition, a well-known method can be used as a correction method, and it does not specifically limit.

  According to the above configuration, the stylus optical system 12S and the skid optical system 12D are moved along the tooth surface of the gear by the guide unit 15, and at this time, the roughness of the tooth surface is measured by the stylus optical system 12S. At the same time, a variation in the distance between the tooth surface and the stylus optical system 12S is detected by the skid optical system 12D. In this manner, by subtracting the fluctuation value of the distance between the tooth surface detected by the skid optical system 12D and the stylus optical system 12S from the measured value of the tooth surface roughness measured by the stylus optical system 12S. Thus, the roughness of the tooth surface can be obtained without the influence of the movement of the stylus optical system 12S. That is, the tooth surface roughness can be measured while moving along the tooth surface of the gear.

  In particular, it is difficult for the gear to move the stylus optical system 12S and the skid optical system 12D along the tooth surface as compared with the spur gear, and the guide portion 15 is provided even in the case of a helical gear. Thus, the stylus optical system 12S and the skid optical system 12D can be easily moved along the tooth surface.

  By providing the reflecting surface 38T on the glass stick 37T, light used for measurement and detection is applied from at least one of the stylus optical system 12S and the skid optical system 12D to the tooth surface that is the side surface of the gear tooth from the circumferential direction of the gear. It can be made incident. For example, as compared with a method in which light is incident on the tooth surface from the radial direction of the gear, the illuminance of light irradiated per unit area can be increased, and more accurate measurement and detection can be performed.

  By providing the guide portion 15 with the slide portion 44 formed in accordance with the shape of each tooth, the stylus optical system 12S and the skid optical system 12D can be smoothly moved along the tooth surface. For example, compared with the case where the guide unit 15 has wheels that run between the teeth, the slide unit 44 has an uneven shape that matches the shape of each tooth, and thus moves in a direction intersecting the tooth surface. The stylus optical system 12S and the skid optical system 12D can be moved along the tooth surface while suppressing the above.

FIG. 19 is a schematic diagram for explaining another embodiment of the guide portion of FIG.
In addition, the structure which provided the slide part 44 in the guide part 15 like the above-mentioned embodiment may be sufficient, and the structure which provided multiple, for example, six wheels 144 in the guide part 15, as shown in FIG. There is no particular limitation.
In the configuration shown in FIG. 19, it is desirable that the rotary encoder 16 is provided on the wheel arranged in the middle.

  Thus, the stylus optical system 12S and the skid optical system 12D can be moved along the tooth surface by disposing the wheel 144 between the teeth and rotating the wheel 144. Further, by measuring the rotational phase of the wheel 144 by the rotary encoder 16, it is possible to grasp the moving distance of the stylus optical system 12S and the skid optical system 12D with respect to the tooth surface.

  Specifically, by arranging three wheels 144 on one side, the sensor unit 2 can be supported by at least four wheels 144 even when the sensor unit 2 is moved to the end of the tooth surface of the gear. Further, by providing the rotary encoder 16 on the central wheel 144 of the three wheels 144 arranged side by side, the teeth of the stylus optical system 12S and the skid optical system 12D can be obtained even if the sensor unit 2 is moved to the end of the tooth surface of the gear. The movement distance with respect to the surface can be grasped.

The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the above-described embodiment, the description is applied to the measurement of the tooth surface roughness of the gear used in the ship, but the invention is limited to the measurement of the tooth surface roughness of the gear used in the ship. However, the present invention can be applied to a device for measuring the tooth surface roughness of various other gears.

It is the schematic explaining the structure of the tooth surface roughness measuring apparatus which concerns on one Embodiment of this invention. It is a schematic diagram explaining the structure of the sensor part of FIG. It is a perspective view explaining the structure of the sensor part of FIG. It is a schematic diagram explaining the structure of the stylus optical system of FIG. 2, and a skid optical system. It is a schematic diagram explaining the structure of the glass stick in the objective optical system of FIG. It is a perspective view explaining the structure of the guide part in the sensor part of FIG. It is a schematic diagram explaining the measured value by the stylus optical system of FIG. It is a schematic diagram explaining the detection value by the skid optical system of FIG. It is a schematic diagram explaining the roughness of the tooth surface obtained by calculation. It is a figure explaining the measurement of the distance fluctuation | variation between a tooth surface and a stylus optical system, Comprising: It is a schematic diagram explaining the case where a tooth surface is focused. It is a figure explaining the measurement of the distance fluctuation | variation between a tooth surface and a stylus optical system, Comprising: It is a schematic diagram explaining the case where a tooth surface is focused. It is a schematic diagram explaining the irradiation area | region of the laser beam which injected into the optical sensor of FIG. FIG. 11 is a schematic diagram for explaining a case where the tooth surface of the stylus optical system in FIG. 10 is closer to the stylus optical system than the focal point of the objective lens system. It is a schematic diagram explaining the irradiation area | region of the laser beam which injected into the optical sensor of FIG. FIG. 11 is a schematic diagram for explaining a case where the tooth surface of the stylus optical system in FIG. 10 is closer to the stylus optical system than the focal point of the objective lens system. It is a schematic diagram explaining the irradiation area | region of the laser beam which injected into the optical sensor of FIG. It is a figure explaining the measurement of the distance fluctuation | variation between a tooth surface and a skid optical system. It is a schematic diagram explaining the influence removal of the inclination of a tooth surface in a stylus optical system and a skid optical system. It is a schematic diagram explaining another embodiment of the guide part of FIG.

Explanation of symbols

1 Tooth surface roughness measuring device (roughness measuring device)
12S stylus optical system (measuring optical system)
12D skid optical system (variation detection optical system)
15 Guide part 38T Reflective surface (reflective part)
144 wheels

Claims (5)

A measuring optical system that measures the sum of the roughness of the tooth surface in the gear and the variation in the distance to the tooth surface;
A variation detection optical system for detecting a variation in the distance between the tooth surface and the measurement optical system;
A guide portion for guiding the measurement optical system and the variation detection optical system along the tooth surface;
A roughness measuring device characterized in that is provided.   A reflecting portion that reflects light used in at least one of the measurement optical system and the variation detection optical system propagating toward a radial center side of the gear toward a circumferential direction of the gear and guides the light to the tooth surface; The roughness measuring device according to claim 1, wherein the roughness measuring device is provided.   The roughness measuring device according to claim 1, wherein the guide portion is a slide portion having irregularities formed in accordance with the shape of each tooth in the gear. The guide portion is a plurality of wheels that travel between the teeth of the gear,
The roughness measuring device according to claim 1, wherein a rotary encoder is provided on at least one of the plurality of wheels.   The data storage part which memorize | stores the measured value measured by the said measurement optical system and the detected value detected by the said fluctuation | variation detection optical system is provided. Roughness measuring device.

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