JP2009137022A - Inkjet recording head - Google Patents

Inkjet recording head Download PDF

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JP2009137022A
JP2009137022A JP2007312404A JP2007312404A JP2009137022A JP 2009137022 A JP2009137022 A JP 2009137022A JP 2007312404 A JP2007312404 A JP 2007312404A JP 2007312404 A JP2007312404 A JP 2007312404A JP 2009137022 A JP2009137022 A JP 2009137022A
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element substrate
recording element
support plate
ejection port
recording head
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JP5279243B2 (en
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Noriyuki Kayano
紀幸 茅野
Hiroyasu Nomura
宏康 野村
Makoto Yomo
誠 四方
Masaji Kanemura
正司 兼村
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Canon Inc
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Canon Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To suppress temperature rise of a head because of speed-up of recording and densification for reducing density irregularities of an image caused by a temperature difference in a delivering opening array. <P>SOLUTION: The inkjet recording head makes a thermal resistance in a direction to separate from a recording element substrate to a supporting part at the supporting part between the recording element substrate 21 and a supporting plate 10 different between a central region in the delivering opening arrays 51 and 52 direction and an end region. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、インクを吐出して記録動作を行うインクジェット記録ヘッドに関する。   The present invention relates to an ink jet recording head that performs a recording operation by discharging ink.

インクジェット記録装置は、インクジェット記録ヘッドの吐出口からインクを吐出し、記録媒体に付着させて画像記録を行うものであり、高精細な画像を高速で記録することができる。   The ink jet recording apparatus ejects ink from an ejection port of an ink jet recording head and deposits the ink on a recording medium to perform image recording, and can record a high-definition image at high speed.

近年、1つの記録素子基板に形成される吐出口列の長尺化、多列化によって、より低コストかつ省スペースでのカラー画像記録が可能になってきている。   In recent years, it has become possible to record color images at a lower cost and in a smaller space by increasing the length and the number of rows of ejection port arrays formed on one recording element substrate.

このようなインクジェット記録へッドを図4に示す。この記録ヘッドは、多数の吐出口列を備えた記録素子基板の複数を、1つの支持板に千鳥状に列状に配列し、さらにこの列を複数配列することで、記録媒体の全幅に相当する吐出口列を形成した、フルライン型インクジェット記録ヘッドである。   Such an ink jet recording head is shown in FIG. In this recording head, a plurality of recording element substrates having a large number of ejection port arrays are arranged in a staggered pattern on a single support plate, and a plurality of these arrays are arranged to correspond to the entire width of the recording medium. This is a full line type ink jet recording head in which a discharge port array is formed.

図5のインクジェット記録へッドは、2列の吐出口列5を備えた6枚の記録素子基板21〜26が支持板10の固定面11に千鳥配列で接着固定されている。記録の実行に伴って記録素子基板21〜26に発生する熱は、支持板10を介して外部へ放熱される。   In the ink jet recording head of FIG. 5, six recording element substrates 21 to 26 each having two ejection port arrays 5 are bonded and fixed to the fixing surface 11 of the support plate 10 in a staggered arrangement. The heat generated in the recording element substrates 21 to 26 as the recording is performed is radiated to the outside via the support plate 10.

記録媒体は、図5の左側から右に向かって不図示の搬送手段によって、固定面11に対して対面しつつ、記録素子基板21〜26の吐出口列5に対して直交する方向に搬送される。記録媒体が記録ヘッド直下を通過する際に、まず奇数列の記録素子基板21,23,25の各吐出口列からインク滴が吐出されて記録媒体上にドットを形成する。次いで、その隙間を補完するように偶数列の記録素子基板22,24,26の各吐出口列からインク滴が吐出されて記録媒体上にドットを形成する。このような同動作を繰り返すことにより、画記録が実行されていく。奇数列の記録素子基板と、偶数列の記録素子基板は互いにある一定量オーバーラップしており、そのオーバーラップ部分の画像は補完処理が行なわれ、画像品位を保つようになっている。   The recording medium is conveyed in a direction orthogonal to the ejection port array 5 of the recording element substrates 21 to 26 while facing the fixed surface 11 by a conveying unit (not shown) from the left side to the right side in FIG. The When the recording medium passes directly below the recording head, first, ink droplets are ejected from the ejection port arrays of the odd-numbered recording element substrates 21, 23, 25 to form dots on the recording medium. Next, ink droplets are ejected from the ejection port arrays of the even-numbered recording element substrates 22, 24, and 26 so as to complement the gaps, thereby forming dots on the recording medium. By repeating the same operation, image recording is executed. The odd-numbered recording element substrates and the even-numbered recording element substrates overlap each other by a certain amount, and the image of the overlapped portion is subjected to a complementary process to maintain image quality.

図6は、図5の支持板10を記録素子基板が配された面とは反対側の面から見た図である。インク供給路111、121、131、141、151、161を経て、それぞれ対応する記録素子基板21〜26へ、不図示のインクタンクからインクが供給される。2列の吐出口列は、1つのインク供給口の両側に1列ずつ配置され、1つの記録素子基板に1つのインク供給路が設けられている。   FIG. 6 is a view of the support plate 10 of FIG. 5 as seen from the surface opposite to the surface on which the recording element substrate is disposed. Ink is supplied from an ink tank (not shown) to the corresponding recording element substrates 21 to 26 through the ink supply paths 111, 121, 131, 141, 151, and 161, respectively. Two ejection port arrays are arranged on both sides of one ink supply port, and one ink supply path is provided on one printing element substrate.

図7は、記録素子基板21を説明する模式図である。図7(a)は吐出口列が配された側を見た平面図であり、図7(b)は図7(a)のA−A断面図であり、図7(c)は図7(a)のB−B断面図である。   FIG. 7 is a schematic diagram illustrating the recording element substrate 21. FIG. 7A is a plan view of the side on which the discharge port array is arranged, FIG. 7B is a cross-sectional view taken along the line AA in FIG. 7A, and FIG. It is BB sectional drawing of (a).

記録素子基板21には2列の吐出口列51、52が形成され、対を成してインク供給口41を共有し、支持板10に設けられたインク供給路111を通じてインクが供給される。吐出口列51、52に供給されたインクは、ヒータ61、62に印加されるパルス信号によって発する熱エネルギーを受けて、吐出口から吐出される。   Two rows of ejection port arrays 51 and 52 are formed on the recording element substrate 21, and the ink supply port 41 is shared as a pair. Ink is supplied through an ink supply path 111 provided in the support plate 10. The ink supplied to the ejection port arrays 51 and 52 receives thermal energy generated by a pulse signal applied to the heaters 61 and 62 and is ejected from the ejection ports.

不図示の記録媒体は吐出口列52側から搬送され、記録媒体上に吐出口列52、51の順にインク滴を重ね打ちして記録画像が形成される。
他の記録素子基板22〜26に関しても同様である。
特開2003−305853号公報
A recording medium (not shown) is conveyed from the ejection port array 52 side, and a recording image is formed by overlapping ink droplets in the order of the ejection port arrays 52 and 51 on the recording medium.
The same applies to the other recording element substrates 22 to 26.
JP 2003-305853 A

このような構造のインクジェット記録ヘッドの場合、吐出口列中央部には熱がこもり易く、記録素子基板内の均熱の妨げになる恐れがある。   In the case of an ink jet recording head having such a structure, heat is likely to be trapped in the central portion of the ejection port array, and there is a risk of preventing soaking in the recording element substrate.

ヒータ61、62によって発生した熱は、インク供給口41を避けて拡散して支持板10に伝わる。したがって、吐出口列51、52のヒータによって発生した熱は、記録素子基板の長辺側両端から支持板10に伝わる。   The heat generated by the heaters 61 and 62 is diffused avoiding the ink supply port 41 and transmitted to the support plate 10. Therefore, the heat generated by the heaters of the ejection port arrays 51 and 52 is transmitted to the support plate 10 from both ends of the long side of the recording element substrate.

一方、吐出口列51、52端部付近のヒータによって発生した熱は、記録素子基板の長辺側両端から支持板10に伝わるのに加えて、記録素子基板の短辺側端部からも支持板10に伝わる。そのため、吐出口列端部は中央に比べて昇温が抑えられ、吐出口列内において、その位置における温度格差が発生する。   On the other hand, in addition to the heat generated by the heaters near the ends of the ejection port arrays 51 and 52 being transmitted from both ends on the long side of the recording element substrate to the support plate 10, it is also supported from the ends on the short side of the recording element substrate. It is transmitted to the board 10. Therefore, the temperature rise at the end of the discharge port array is suppressed as compared with the center, and a temperature difference occurs at that position in the discharge port array.

一般に記録素子基板が高温になるほどインク吐出量は増大するため、吐出口のある位置間で温度格差が生じると、インク吐出量にも差が生じてしまう。従って、上述したような吐出口列内の温度格差が発生すると画像の濃度ムラの原因となり、画像品位に悪影響を及ぼしてしまうという問題があった。   In general, the higher the temperature of the recording element substrate, the greater the amount of ink discharged. Therefore, if there is a temperature difference between the positions of the discharge ports, there will also be a difference in the ink discharge amount. Therefore, when the temperature difference in the ejection port array as described above occurs, there is a problem that the density of the image is uneven and the image quality is adversely affected.

そこで本発明の目的は、記録素子基板の均熱特性を改善して、吐出口列内の温度格差に起因する画像の濃度ムラを低減するインクジェット記録ヘッドを提供することにある。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an ink jet recording head that improves the soaking characteristic of a recording element substrate and reduces the density unevenness of an image due to the temperature difference in the ejection port array.

上述の目的を達成する本発明は、インクを吐出するための吐出口列を有する記録素子基板と、前記記録素子基板を支持する支持板と、を備えたインクジェット記録ヘッドにおいて、前記記録素子基板を前記支持板へ固定する固定面の、前記吐出口列の配列方向中央部の熱伝導率を前記吐出口列の配列方向端部の熱伝導率よりも高くしたことを特徴とする。   The present invention that achieves the above-described object provides an inkjet recording head comprising: a recording element substrate having an ejection port array for ejecting ink; and a support plate that supports the recording element substrate. The thermal conductivity of the fixing surface fixed to the support plate at the center in the arrangement direction of the discharge port array is made higher than the thermal conductivity at the end in the arrangement direction of the discharge port array.

また、他の本発明は、インクを吐出するための吐出口列を有する記録素子基板と、前記記録素子基板を支持する支持板と、を備えたインクジェット記録ヘッドにおいて、前記記録素子基板は前記支持板の固定面に接着によって固定され、該固定面における、前記記録素子基板または前記支持板の少なくとも一方の側の、前記複数の吐出口列の配列方向中心部以外の部位に、前記固定面に対して前記記録素子基板から離間する方向に溝を形成し、前記記録素子基板を前記固定面へ固定する際に、該溝に接着剤を充填することを特徴とする。   According to another aspect of the present invention, there is provided an ink jet recording head comprising: a recording element substrate having an ejection port array for ejecting ink; and a support plate for supporting the recording element substrate. Fixed to the fixed surface of the plate by bonding, and on the fixed surface, at least one side of the recording element substrate or the support plate, other than the central portion in the arrangement direction of the plurality of ejection port arrays, On the other hand, a groove is formed in a direction away from the recording element substrate, and the groove is filled with an adhesive when the recording element substrate is fixed to the fixing surface.

本発明によれば、記録素子基板の均熱特性を改善して、吐出口列内の温度格差に起因する画像の濃度ムラを低減するインクジェット記録ヘッドを提供することができる。   According to the present invention, it is possible to provide an ink jet recording head that improves the soaking characteristic of the recording element substrate and reduces the density unevenness of the image due to the temperature difference in the ejection port array.

(第1の実施形態)
図1は、本発明の第1の実施形態に係るインクジェット記録ヘッドの支持板10に接着固定された記録素子基板21を説明する図である。図1(a)は吐出口列が配された側を見た平面図であり、図1(b)は図1(a)のA−A断面図であり、図1(c)は図1(a)のB−B断面図である。インクジェット記録ヘッドの基本的な外願構成は、図5及び図6に示したものと同様である。
(First embodiment)
FIG. 1 is a diagram illustrating a recording element substrate 21 that is bonded and fixed to a support plate 10 of an ink jet recording head according to a first embodiment of the present invention. 1A is a plan view of the side on which the ejection port array is arranged, FIG. 1B is a cross-sectional view taken along the line AA in FIG. 1A, and FIG. It is BB sectional drawing of (a). The basic external application configuration of the ink jet recording head is the same as that shown in FIGS.

図1において、記録素子基板21には吐出口列51、52がインク供給側と反対の面に形成されている。吐出口列51、52は対を成してインク供給口41を共有し、支持板10に設けられたインク供給路111を通じてインクが供給される。吐出口列51、52に供給されたインクはヒータ61、62に印加されるパルス信号によって発する熱エネルギーにより、吐出口から吐出される。   In FIG. 1, ejection port arrays 51 and 52 are formed on the recording element substrate 21 on the surface opposite to the ink supply side. The ejection port arrays 51 and 52 form a pair and share the ink supply port 41, and ink is supplied through an ink supply path 111 provided in the support plate 10. The ink supplied to the ejection port arrays 51 and 52 is ejected from the ejection ports by thermal energy generated by a pulse signal applied to the heaters 61 and 62.

支持板10のインク供給路41両側の部分101、102は、支持板10の他の部分よりも熱伝導率の高い材料で構成される。例えば、支持板10をアルミナ(Al、熱伝導率:32W/mK)で形成する。そして、支持板10のインク供給路41の両側の部分101、102を窒化アルミ(AlN、熱伝導率:170W/mK)やシリコンカーバイト(SiC、熱伝導率:220W/mK)などの高熱伝導性のセラミック材料で形成する。 The portions 101 and 102 on both sides of the ink supply path 41 of the support plate 10 are made of a material having a higher thermal conductivity than the other portions of the support plate 10. For example, the support plate 10 is formed of alumina (Al 2 O 3 , thermal conductivity: 32 W / mK). The portions 101 and 102 on both sides of the ink supply path 41 of the support plate 10 are made of high thermal conductivity such as aluminum nitride (AlN, thermal conductivity: 170 W / mK) or silicon carbide (SiC, thermal conductivity: 220 W / mK). Made of a ceramic material.

一方、記録素子基板21の支持板10との固定面(接着面)11において、吐出口列の配列方向両端部には、吐出口列の配列方向中央部を含む他の部分よりも熱伝導率の低い材料で高熱抵抗層81〜84が形成されている。この高熱抵抗層81〜84は、記録素子基板21と支持板10との接触する面(固定面)において、少なくとも記録素子基板21側か支持板10側かの一方に形成されていればよい。このようにして、固定面11における、記録素子基板21または支持板10の少なくとも一方側の、吐出口列の配列方向端部に、配列方向中央部から配列方向端部に向かって熱伝導率の低い材料を配している。同時に、吐出口列の配列方向中央部の熱伝導率を吐出口列の配列方向端部の熱伝導率よりも高くしている。高熱抵抗層81〜84の形成方法として、例えばシリコン(Si、熱伝導率:148W/mK)で形成された記録素子基板21の接着面に酸化シリコン層81(SiO、熱伝導率:3W/mK)を、酸素イオンの打ち込みによる表面改質処理により形成する。その他には、真空蒸着処理で形成することもできる。高熱抵抗層は、81〜84と段階的に熱伝導率を変化させてあり、高熱抵抗層81が一番熱伝導率が低い。高熱抵抗層81〜84はまた、吐出口列51、52の両端部を取り囲むように形成されている。 On the other hand, in the fixed surface (adhesive surface) 11 of the recording element substrate 21 to the support plate 10, the thermal conductivity is higher at both ends in the arrangement direction of the ejection port array than in other parts including the central portion in the arrangement direction of the ejection port array. The high thermal resistance layers 81 to 84 are formed of a low material. The high thermal resistance layers 81 to 84 may be formed on at least one of the recording element substrate 21 side and the support plate 10 side on the surface (fixed surface) where the recording element substrate 21 and the support plate 10 are in contact. In this way, the thermal conductivity of the fixed surface 11 from the center in the arrangement direction to the end in the arrangement direction is at the end in the arrangement direction of the ejection port array on at least one side of the recording element substrate 21 or the support plate 10. Low materials are arranged. At the same time, the thermal conductivity at the center in the arrangement direction of the discharge port array is made higher than the thermal conductivity at the end in the arrangement direction of the discharge port array. As a method of forming the high thermal resistance layers 81 to 84, for example, a silicon oxide layer 81 (SiO 2 , thermal conductivity: 3 W / second ) is formed on the bonding surface of the recording element substrate 21 formed of silicon (Si, thermal conductivity: 148 W / mK). mK) is formed by surface modification treatment by implanting oxygen ions. In addition, it can also form by a vacuum evaporation process. The thermal conductivity of the high thermal resistance layer is changed in steps from 81 to 84, and the high thermal resistance layer 81 has the lowest thermal conductivity. The high thermal resistance layers 81 to 84 are also formed so as to surround both ends of the discharge port arrays 51 and 52.

本実施形態の記録素子基板21を用いて記録を実行すると、ヒータ61、62によって発生した熱は記録素子基板長辺方向の接着部を介して支持板10の高熱伝導率部101及び102に伝わる。このように、中心部のヒータによって発生した熱は同じ経路を通して拡散するので、吐出口列方向の中心部における温度格差はほとんど発生しない。   When recording is performed using the recording element substrate 21 of the present embodiment, the heat generated by the heaters 61 and 62 is transferred to the high thermal conductivity portions 101 and 102 of the support plate 10 through the bonding portion in the long side direction of the recording element substrate. . Thus, since the heat generated by the central heater diffuses through the same path, there is almost no temperature difference at the central portion in the direction of the discharge port array.

一方、吐出口列両端部においては、記録素子基板長辺方向に中心部と同様に熱拡散が起こるのに加えて、記録素子基板短辺方向においても熱拡散が生じる。本実施形態においては、この短辺方向の熱拡散を、高熱抵抗層81によって抑制する。さらに、吐出口列最短部より少し内側のヒータから発生した熱においては、記録素子基板長辺部に拡散する拡散量を高熱抵抗層82〜84によって段階的に抑制する。   On the other hand, at both ends of the ejection port array, thermal diffusion occurs in the recording element substrate long side direction as well as in the central part, and thermal diffusion also occurs in the recording element substrate short side direction. In the present embodiment, the thermal diffusion in the short side direction is suppressed by the high thermal resistance layer 81. Further, in the heat generated from the heater slightly inside the shortest portion of the ejection port array, the diffusion amount diffusing to the long side portion of the recording element substrate is gradually suppressed by the high thermal resistance layers 82 to 84.

図2は、吐出口列方向の温度分布をグラフ化した図で、ライン91は従来例を示しており、ライン92は、本実施形態の実施後の状態を示している。2つを比べると明らかなように、両端部の温度低下が、改善されている。   FIG. 2 is a graph showing the temperature distribution in the discharge port array direction. A line 91 indicates a conventional example, and a line 92 indicates a state after the present embodiment is implemented. As is clear when the two are compared, the temperature drop at both ends is improved.

以上、本実施形態で示したような構成にすることで、吐出口列51、52の温度を吐出口列端部まで含めて均一にすることができ、記録素子基板における画像の濃度ムラを解消して画像品位を向上させることができる。   As described above, with the configuration shown in the present embodiment, the temperature of the ejection port arrays 51 and 52 can be made uniform including the end of the ejection port array, and the uneven density of the image on the recording element substrate can be eliminated. Thus, the image quality can be improved.

なお、支持板10の一部に高伝導率材料を用いて構成されているが、すべてに同一材料を用いてもかまわない。その場合においても、吐出口列の温度分布を均一にすることは、高抵抗層81〜84の熱伝導率を調整することで可能である。しかしながら、支持板10の熱伝導率が低いと、記録素子基板全体の排熱効率が低下して、記録素子基板の温度が上がってしまうことに注意する必要がある。   Although a part of the support plate 10 is made of a high conductivity material, the same material may be used for all. Even in that case, it is possible to make the temperature distribution of the discharge port array uniform by adjusting the thermal conductivity of the high resistance layers 81 to 84. However, it must be noted that if the thermal conductivity of the support plate 10 is low, the exhaust heat efficiency of the entire recording element substrate is lowered, and the temperature of the recording element substrate is increased.

また、記録素子基板21の長辺および短辺を短縮して高熱抵抗層81〜84の支持板10との接着部面積を減らすことによって接着部の熱抵抗を高めることも可能である。しかしながら、支持板10に対する記録素子基板21の位置決め誤差の許容限界と接着強度限界の関係上、接着部面積の縮小にはリスクが伴うため、接着部の熱抵抗を高めるには高熱抵抗層81の厚みを増すことで対処するのが望ましい。   It is also possible to increase the thermal resistance of the bonded portion by shortening the long side and the short side of the recording element substrate 21 to reduce the area of the bonded portion between the high thermal resistance layers 81 to 84 and the support plate 10. However, due to the relationship between the allowable limit of the positioning error of the recording element substrate 21 with respect to the support plate 10 and the adhesive strength limit, there is a risk in reducing the area of the adhesive portion. It is desirable to deal with by increasing the thickness.

(第2の実施形態)
図3は、本発明の第2の実施形態に係るインクジェット記録ヘッドの支持板10に接着固定された記録素子基板21を説明する図である。図3(a)は吐出口列が配された側を見た平面図であり、図3(b)は図3(a)のA−A断面図であり、図3(c)は図3(a)のB−B断面図である。インクジェット記録ヘッドの基本的な外願構成は、図5及び図6に示したものと同様である。
(Second Embodiment)
FIG. 3 is a diagram for explaining the recording element substrate 21 that is bonded and fixed to the support plate 10 of the ink jet recording head according to the second embodiment of the present invention. 3A is a plan view of the side on which the discharge port array is arranged, FIG. 3B is a cross-sectional view taken along the line AA in FIG. 3A, and FIG. It is BB sectional drawing of (a). The basic external application configuration of the ink jet recording head is the same as that shown in FIGS.

また本実施形態では、記録素子基板21の接着面(固定面)に高熱抵抗層の代わりに溝85〜88を設け、それ以外の構成は、支持板10一部を他の部分と同じ材料で構成したのを除いて第1の実施形態と同様である。   Further, in this embodiment, grooves 85 to 88 are provided on the bonding surface (fixed surface) of the recording element substrate 21 instead of the high thermal resistance layer, and in other configurations, a part of the support plate 10 is made of the same material as other portions. It is the same as that of 1st Embodiment except having comprised.

本実施形態の記録ヘッドは、固定面11における、記録素子基板21または支持板10の少なくとも一方の側の、複数の吐出口列の配列方向中心部以外の部位に、固定面に対して記録素子基板21から離間する方向に溝85〜88を形成している。そして、記録素子基板21を固定面11へ固定する際に、溝85〜88に接着剤を充填するものである。   The recording head of the present embodiment has a recording element with respect to the fixed surface at a portion other than the central portion in the arrangement direction of the plurality of ejection port arrays on at least one side of the recording element substrate 21 or the support plate 10 on the fixed surface 11. Grooves 85 to 88 are formed in a direction away from the substrate 21. When the recording element substrate 21 is fixed to the fixing surface 11, the grooves 85 to 88 are filled with an adhesive.

図3において、記録素子基板21の支持板10との固定面11における、両端部には、他の部分よりも一段下がった溝85〜88が段階的に形成されている。溝85〜88は、例えば、フォトリソグラフィによるマスキングを施したエッチング処理等によって形成される。   In FIG. 3, grooves 85 to 88 are formed stepwise at both ends of the fixing surface 11 of the recording element substrate 21 with the support plate 10, one step below the other portions. The grooves 85 to 88 are formed by, for example, an etching process that is masked by photolithography.

溝85〜88には、記録素子基板21を支持板10に接着固定する際に、接着剤が流れ込む。溝85〜88に流れ込んだ接着剤がインク供給路内部や記録素子基板周辺にはみ出さない様、溝85〜88の縁は全て記録素子基板の接着面と同一高さとなっている。硬化後の接着剤は、シリコン(Si、熱伝導率:148W/mK)等で形成された記録素子基板21に対して、熱伝導率が例えば1.0W/mKと極めて低い。そのため、溝85〜88に溜まった接着剤は、高熱抵抗層として機能する。   The adhesive flows into the grooves 85 to 88 when the recording element substrate 21 is bonded and fixed to the support plate 10. The edges of the grooves 85 to 88 are all flush with the bonding surface of the recording element substrate so that the adhesive flowing into the grooves 85 to 88 does not protrude into the ink supply path or around the recording element substrate. The cured adhesive has an extremely low thermal conductivity of, for example, 1.0 W / mK with respect to the recording element substrate 21 formed of silicon (Si, thermal conductivity: 148 W / mK) or the like. Therefore, the adhesive collected in the grooves 85 to 88 functions as a high heat resistance layer.

上述のように構成された記録素子基板21において記録を実行すると、ヒータ61,62によって発生した熱は記録素子基板21の長辺方向の接着部を介して支持板10に伝わる。   When recording is performed on the recording element substrate 21 configured as described above, the heat generated by the heaters 61 and 62 is transmitted to the support plate 10 through the adhesive portion in the long side direction of the recording element substrate 21.

これに対して、吐出口列両端部においては、記録素子基板21の長辺方向に中心部と同様に熱拡散が起こるのに加えて、記録素子基板21の短辺方向においても熱拡散が生じる。第2の実施形態においては、この短辺方向の熱拡散を、主に高熱抵抗層85によって抑制する。さらに、吐出口列最短部より少し内側のヒータから発生した熱においては、記録素子基板長辺部に拡散する拡散量を高熱抵抗層86〜88によって段階的に抑制する。   On the other hand, at both ends of the ejection port array, thermal diffusion occurs in the short side direction of the recording element substrate 21 in addition to thermal diffusion in the long side direction of the recording element substrate 21 as in the central portion. . In the second embodiment, the thermal diffusion in the short side direction is mainly suppressed by the high thermal resistance layer 85. Further, in the heat generated from the heater slightly inside the shortest portion of the ejection port array, the amount of diffusion that diffuses to the long side portion of the recording element substrate is gradually suppressed by the high thermal resistance layers 86 to 88.

以上、本実施形態で示したような構成にすることで、吐出口列51、52の温度を吐出口列端部まで含めて均一にすることができ、複数の吐出口列を備えた記録素子基板における画像の濃度ムラを解消して画像品位を向上させることができる。   As described above, with the configuration shown in the present embodiment, the temperature of the ejection port arrays 51 and 52 can be made uniform including the end of the ejection port array, and a recording element having a plurality of ejection port arrays. It is possible to eliminate image density unevenness on the substrate and improve image quality.

なお、本実施形態では溝85〜88は記録素子基板の接着面に設けたが、同等のものを支持板10の接着面に設けても構わない。この溝は、少なくとも、記録素子基板の接着面と支持板との一方に設けられていればよい。その場合に、この溝は、切削加工の他に、放電加工や型成型によっても形成することができる。   In this embodiment, the grooves 85 to 88 are provided on the adhesive surface of the recording element substrate, but equivalent ones may be provided on the adhesive surface of the support plate 10. This groove may be provided at least on one of the bonding surface of the recording element substrate and the support plate. In this case, the groove can be formed by electric discharge machining or die molding in addition to cutting.

(第3の実施形態)
本実施形態では、さらに、図4に示すように、記録素子基板21、23、25の配列方向の両側、及び記録素子基板22、24、26の配列方向の両側に沿ってヒートパイプが位置するように、支持板10の内部にヒートパイプ31、32、33が配されている。つまり、各記録素子基板のそれぞれの吐出口列配列方向に沿って、その列の側方の支持板にヒートパイプを配した構成である。
(Third embodiment)
In the present embodiment, as shown in FIG. 4, the heat pipes are located along both sides of the recording element substrates 21, 23, and 25 in the arrangement direction and both sides of the recording element substrates 22, 24, and 26 in the arrangement direction. As described above, the heat pipes 31, 32, 33 are arranged inside the support plate 10. In other words, the heat pipes are arranged on the support plates on the side of each row along the discharge port row arrangement direction of each printing element substrate.

本実施形態によると、吐出口列の配列方向に沿って側方にヒートパイプが延在しているので、吐出口列両端部と吐出口列中央部温度差を僅少化することができる。   According to the present embodiment, since the heat pipes extend laterally along the arrangement direction of the discharge port arrays, the temperature difference between both ends of the discharge port arrays and the central portion of the discharge port arrays can be reduced.

なお、上述の第1及び第2の実施形態のインクジェット記録ヘッドの支持板に、本実施形態のヒートパイプの配置構成を適用することで、さらに第1及び第2の実施形態の効果を大きくことができる。   The effects of the first and second embodiments can be further increased by applying the heat pipe arrangement configuration of the present embodiment to the support plate of the ink jet recording head of the first and second embodiments described above. Can do.

本発明の第1の実施形態に係るインクジェット記録ヘッドの記録素子基板を説明する図である。FIG. 3 is a diagram illustrating a recording element substrate of the ink jet recording head according to the first embodiment of the present invention. 図1の記録ヘッドと従来の記録ヘッドとの吐出口列方向の温度分布を示したグラフである。2 is a graph showing a temperature distribution in a discharge port array direction between the recording head of FIG. 1 and a conventional recording head. 本発明の第2の実施形態に係るインクジェット記録ヘッドの記録素子基板を説明する図である。It is a figure explaining the recording element board | substrate of the inkjet recording head which concerns on the 2nd Embodiment of this invention. 本発明の第3の実施形態に係るインクジェット記録ヘッドの記録素子基板を説明する図である。It is a figure explaining the recording element board | substrate of the inkjet recording head which concerns on the 3rd Embodiment of this invention. 従来例のインクジェット記録へッドを説明する斜視図である。It is a perspective view explaining the inkjet recording head of a prior art example. 図5の支持板をその反対側の面から見た図である。It is the figure which looked at the support plate of FIG. 5 from the surface on the opposite side. 図5の記録素子基板を説明する模式図である。FIG. 6 is a schematic diagram illustrating the recording element substrate in FIG. 5.

符号の説明Explanation of symbols

10 支持板
21〜26 記録素子基板
31〜33 ヒートパイプ
41 インク供給口
51、52 吐出口列
61、62 ヒータ
81〜84 高熱抵抗層
85〜88 溝
111 インク供給路
DESCRIPTION OF SYMBOLS 10 Support plate 21-26 Recording element board | substrate 31-33 Heat pipe 41 Ink supply port 51,52 Ejection port row | line | column 61,62 Heater 81-84 High thermal resistance layer 85-88 Groove | channel 111 Ink supply path

Claims (7)

インクを吐出するための吐出口列を有する記録素子基板と、前記記録素子基板を支持する支持板と、を備えたインクジェット記録ヘッドにおいて、
前記記録素子基板を前記支持板へ固定する固定面の、前記吐出口列の配列方向中央部の熱伝導率を前記吐出口列の配列方向端部の熱伝導率よりも高くしたことを特徴とするインクジェット記録ヘッド。
In an inkjet recording head comprising: a recording element substrate having an ejection port array for ejecting ink; and a support plate for supporting the recording element substrate.
The thermal conductivity at the center in the arrangement direction of the ejection port array of the fixing surface for fixing the recording element substrate to the support plate is made higher than the thermal conductivity at the end in the arrangement direction of the ejection port array. Inkjet recording head.
前記記録素子基板を前記支持板へ固定する固定面における、前記記録素子基板または前記支持板の少なくとも一方側の、前記吐出口列の配列方向端部に、前記配列方向中央部から前記配列方向端部に向かって熱伝導率の低い材料を配したことを特徴とする請求項1に記載のインクジェット記録ヘッド。   The arrangement direction end from the arrangement direction center to the arrangement direction end of the ejection port array on at least one side of the recording element substrate or the support plate on the fixing surface for fixing the recording element substrate to the support plate. The ink jet recording head according to claim 1, wherein a material having a low thermal conductivity is disposed toward the portion. 前記吐出口列の配列方向の温度差が僅少化されるように、熱伝導率を段階的に変化させて形成したことを特徴とする請求項1または2に記載のインクジェット記録ヘッド。   3. The ink jet recording head according to claim 1, wherein the thermal conductivity is changed stepwise so that a temperature difference in the arrangement direction of the ejection port arrays is minimized. 前記記録素子基板は前記支持板に複数の列状に配され、各列の両側に列方向に沿って、前記支持板の内部にヒートパイプが延在していることを特徴とする請求項1乃至3のいずれかに記載のインクジェット記録ヘッド。   2. The recording element substrate is arranged in a plurality of rows on the support plate, and heat pipes extend inside the support plate along the row direction on both sides of each row. 4. The ink jet recording head according to any one of items 1 to 3. インクを吐出するための吐出口列を有する記録素子基板と、前記記録素子基板を支持する支持板と、を備えたインクジェット記録ヘッドにおいて、
前記記録素子基板は前記支持板の固定面に接着によって固定され、該固定面における、前記記録素子基板または前記支持板の少なくとも一方の側の、前記複数の吐出口列の配列方向中心部以外の部位に、前記固定面に対して前記記録素子基板から離間する方向に溝を形成し、前記記録素子基板を前記固定面へ固定する際に、該溝に接着剤を充填することを特徴とするインクジェット記録ヘッド。
In an inkjet recording head comprising: a recording element substrate having an ejection port array for ejecting ink; and a support plate for supporting the recording element substrate.
The recording element substrate is fixed to the fixing surface of the support plate by bonding, and at least one side of the fixing element on the recording element substrate or the support plate is other than the central portion in the arrangement direction of the plurality of ejection port arrays. A groove is formed in a part in a direction away from the recording element substrate with respect to the fixed surface, and the groove is filled with an adhesive when the recording element substrate is fixed to the fixed surface. Inkjet recording head.
前記吐出口列の配列方向の温度差が僅少化されるように、熱伝導率を段階的に変化させて形成したことを特徴とする請求項5に記載のインクジェット記録ヘッド。   6. The ink jet recording head according to claim 5, wherein the thermal conductivity is changed stepwise so that the temperature difference in the arrangement direction of the ejection port arrays is minimized. 前記記録素子基板は前記支持板に複数の列状に配され、各列の両側に列方向に沿って、前記支持板の内部にヒートパイプが延在していることを特徴とする請求項6に記載のインクジェット記録ヘッド。   7. The recording element substrate is arranged in a plurality of rows on the support plate, and heat pipes extend inside the support plate along the row direction on both sides of each row. 2. An ink jet recording head according to 1.
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