JP2009115538A - Vibration monitor by wireless sensor - Google Patents

Vibration monitor by wireless sensor Download PDF

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JP2009115538A
JP2009115538A JP2007287233A JP2007287233A JP2009115538A JP 2009115538 A JP2009115538 A JP 2009115538A JP 2007287233 A JP2007287233 A JP 2007287233A JP 2007287233 A JP2007287233 A JP 2007287233A JP 2009115538 A JP2009115538 A JP 2009115538A
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vibration
unit
wireless sensor
amplification
digital signal
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Motoi Miyawaki
基 宮脇
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Fuji Electric Co Ltd
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Fuji Electric Systems Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration monitor by a wireless sensor, which performs high-precision vibration measurement without increasing transmission time for a digital signal of vibration acceleration by controlling a plurality of amplifiers. <P>SOLUTION: The amplification factor of an amplification section which amplifies an analog output signal from a vibration acceleration sensor is set in a switchable manner. The analog output signal from the amplification section is A/D converted to be wirelessly transmitted to a vibration monitoring section. The vibration monitoring section determines the value of the received digital signal, and when it has received the same value successively, the amplification factor of the amplification section is switched. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、各種の産業プラント等における電動機やブロアなどの回転機械の振動状態を無線通信により遠隔監視する振動監視装置に関するものである。   The present invention relates to a vibration monitoring device that remotely monitors the vibration state of a rotary machine such as an electric motor or blower in various industrial plants by wireless communication.

従来、電動機をはじめ、ブロアやファン装置など多数の回転機械が使われている産業プラントでは、設備の突発的な故障による操業停止を防止するため、主要な回転機械について振動監視が行われている。
その方法は、定期的に設備の保全マンが巡回し、振動計を持ち運び、振動レベルの傾向管理を行い異常が無いかどうかを判定している。また、大規模なプラントでは、振動の変化をオンラインで常時監視し、コンピュータ等を用い振動データを常時あるいは一定の間隔で収集し、振動レベルの時間的な変化(傾向管理)や周波数分析を行うことで振動の異常診断が行われている。近年、大規模な産業プラントにおいては長距離のケーブル布設を避けるため、無線タグを検出部に設置した異常監視システムなどもある(特許文献1、2参照)。
これらの振動監視に使用される振動センサにおいては、通常、加速度センサの信号を増幅器を用いて増幅し、計測する周波数範囲に応じ、フィルタを用いて必要な周波数領域の信号を選別し、積分回路を用いて振動速度や振動変位に変換している。また、無線タグによるものでは、加速度センサによる加速度信号を増幅したアナログ信号をA/D変換器によりデジタル信号に変換し、無線送受信機によりコンピュータを装備した受信装置に送信し、コンピュータによりそのデジタル信号で周波数分析を行い、振動速度や振動変位に変換し、振動レベルの傾向管理や振動の異常診断を行うことで、回転機の振動監視を行っている。
特開2005-24441号公報 特開平10-19655号公報
Conventionally, in industrial plants where a large number of rotating machines such as electric motors, blowers and fan devices are used, vibration monitoring is performed on major rotating machines in order to prevent shutdown due to sudden failure of equipment. .
According to the method, a maintenance man of the facility periodically visits, carries a vibration meter, manages the tendency of the vibration level, and determines whether there is any abnormality. Also, in large-scale plants, vibration changes are constantly monitored online, vibration data is collected constantly or at regular intervals using a computer, etc., and vibration level changes over time (trend management) and frequency analysis is performed. Therefore, vibration abnormality diagnosis is performed. In recent years, in large-scale industrial plants, there is an abnormality monitoring system in which a wireless tag is installed in a detection unit in order to avoid long-distance cable installation (see Patent Documents 1 and 2).
In the vibration sensor used for these vibration monitoring, the signal of the acceleration sensor is usually amplified using an amplifier, and a signal in a necessary frequency region is selected using a filter according to the frequency range to be measured, and an integration circuit Is used to convert to vibration speed and vibration displacement. In the case of the wireless tag, an analog signal obtained by amplifying the acceleration signal from the acceleration sensor is converted into a digital signal by an A / D converter, transmitted to a receiving device equipped with a computer by a wireless transceiver, and the digital signal is transmitted by a computer. The frequency analysis is carried out by the motor and converted into the vibration speed and vibration displacement, and the vibration level of the rotating machine is monitored by managing the tendency of vibration level and diagnosing vibration abnormality.
JP 2005-24441 Japanese Patent Laid-Open No. 10-19655

ところが、これらの振動監視装置では、加速度センサの信号を増幅するために増幅器を用いているが、振動の加速度は回転機械の回転周波数の2乗に比例するため、1つの増幅器では回転数が低い小さな加速度の領域では、増幅後の振動加速度のS/N比は悪くなる。このS/N比を改善する方法として、デジタル信号に変換するときに、A/D変換器のビット数を高くし分解能を上げることはできるが、この場合、データ数がビット数に応じて増大するため、無線で外部に送信する伝送時間が長くなる欠点があった。
また、回転数が高い時は、大きな加速度になり、増幅後の加速度のアナログ信号がA/D変換を行う時に入力電圧の制限を越え飽和するために正確な加速度の計測ができず、計測可能な加速度範囲が制限されるという欠点があった。これを解決する方法として可変ゲインアンプというものを用いて増幅の倍率を自動で制御しS/N比の改善を行っている。ところが、振動センサ部は電池駆動となる無線タグを利用した振動監視には、消費電力が大きくなることやコストが高くなり適用できなかった。
本発明は上記事情を鑑みてなされたもので、複数の増幅器を制御することで振動加速度のデジタル信号の伝送時間を増大させること無く、高精度な振動の計測を可能にする無線センサによる振動監視装置を提供することを目的とする。
However, in these vibration monitoring devices, an amplifier is used to amplify the signal of the acceleration sensor. However, since the acceleration of vibration is proportional to the square of the rotational frequency of the rotating machine, the rotational speed of one amplifier is low. In a small acceleration region, the S / N ratio of the vibration acceleration after amplification becomes worse. As a method for improving the S / N ratio, when converting to a digital signal, the number of bits of the A / D converter can be increased to increase the resolution, but in this case, the number of data increases according to the number of bits. For this reason, there is a drawback that the transmission time for wireless transmission to the outside becomes long.
In addition, when the number of rotations is high, the acceleration is large, and the analog signal of the amplified acceleration exceeds the limit of the input voltage when performing A / D conversion. There is a drawback that the acceleration range is limited. As a method for solving this problem, a variable gain amplifier is used to automatically control the amplification factor to improve the S / N ratio. However, the vibration sensor unit cannot be applied to vibration monitoring using a battery-powered wireless tag due to increased power consumption and cost.
The present invention has been made in view of the above circumstances, and vibration monitoring by a wireless sensor that enables highly accurate vibration measurement without increasing the transmission time of a vibration acceleration digital signal by controlling a plurality of amplifiers. An object is to provide an apparatus.

上記目的を達成するために、本発明の無線センサによる振動監視装置は、振動加速度センサ、該振動加速度センサからのアナログ出力信号を増幅する増幅部、増幅された信号をデジタル変換するA/D変換部、A/D変換されたデジタル信号を記憶する記憶部、該記憶部に記憶されたデジタル信号を無線送信する無線送受信部、前記各部への電源供給部を備えた無線センサと、該無線センサの出力信号を受信し振動監視する振動監視部とからなる無線センサによる振動監視装置において、前記増幅部を、増幅倍率が切り替え可能に構成すると共に、前記振動監視部に、前記無線送受信部から受信したデジタル信号の数値を判定し、数値が所定回数連続した場合に前記増幅部の増幅倍率を切り替える制御信号を前記無線センサに発信する判定部を設けることを特徴とする。
また、上記の構成において、前記振動監視部は、前記デジタル信号を用い監視対象周波数範囲における周波数分析や振動速度実効値および所定の周波数における振動変位を演算し、表示および状態判定することを特徴とする。
In order to achieve the above object, a vibration monitoring apparatus using a wireless sensor according to the present invention includes a vibration acceleration sensor, an amplifying unit for amplifying an analog output signal from the vibration acceleration sensor, and an A / D conversion for digitally converting the amplified signal. Unit, a storage unit for storing the A / D converted digital signal, a wireless transmission / reception unit for wireless transmission of the digital signal stored in the storage unit, a wireless sensor provided with a power supply unit for each unit, and the wireless sensor In the vibration monitoring device using a wireless sensor comprising the vibration monitoring unit that receives the output signal and monitors the vibration, the amplification unit is configured so that the amplification magnification can be switched, and the vibration monitoring unit receives from the wireless transmission / reception unit. A determination unit is provided for determining a numerical value of the digital signal and transmitting a control signal for switching the amplification factor of the amplification unit to the wireless sensor when the numerical value continues for a predetermined number of times. And wherein the door.
Further, in the above configuration, the vibration monitoring unit uses the digital signal to calculate a frequency analysis in a frequency range to be monitored, a vibration velocity effective value, and a vibration displacement at a predetermined frequency, and display and determine a state. To do.

この結果、本発明によれば、振動する部位に設置された無線センサに入力される振動加速度の大きさに応じ自動的に増幅器の倍率が切り替えられるため、小さな加速度レベルから大きな加速度レベルまでアナログ信号を飽和させることのない増幅率が得られ、さらに低いビット数のA/D変換器でも高い分解能が得られると共に、振動計測に必要なデジタル信号の伝送時間が低減できる。
また、データ伝送時間の短縮化が図れ、振動の周波数成分や振動レベルの表示や傾向管理・判定を行えるので、無線センサのコスト低減および回路の簡素化による小型化、また電池の長寿命化によるメンテナンス間隔の拡大に貢献することができる。
As a result, according to the present invention, since the magnification of the amplifier is automatically switched according to the magnitude of vibration acceleration input to a wireless sensor installed in a vibrating part, an analog signal from a small acceleration level to a large acceleration level is obtained. As a result, an A / D converter with a lower number of bits can obtain a higher resolution and a digital signal transmission time required for vibration measurement can be reduced.
In addition, data transmission time can be shortened, vibration frequency components and vibration levels can be displayed, trend management and judgment can be performed, so wireless sensor costs can be reduced, circuits can be downsized, and battery life can be extended. It can contribute to the expansion of the maintenance interval.

本発明の実施の形態を図面に基づいて説明する。
図1は本発明の無線センサの例としてのRFIDタグ1と振動監視部7の内部構成を示すブロック図である。図において、RFIDタグ1は、圧電素子を使用した振動加速度センサ2と、その振動加速度センサ2からのアナログ出力信号を増幅する増幅部3と、増幅部3からのアナログ信号をデジタル信号に変換するためのA/D変換部4と、変換されたデジタル信号を一旦記憶するデータ記憶部5と外部からの指令に基づいて記憶されたデジタル信号を無線伝送するための無線送受信部6とバッテリーによる電源供給部7とで構成されている。
増幅部3は、振動加速度センサ2の電荷出力を電圧に変換するチャージアンプ31と、チャージアンプ31の出力信号に振動監視周波数範囲の上限付近をカットオフ周波数としたローパスフィルタ32と、その出力電圧信号を増幅する電圧増幅器33、34を備えている。
電圧増幅器33はバイパス回路を有しており、増幅器3の増幅倍率を変更する場合にはバイパス回路が有効となる。
ここで、電圧増幅器34から出力されるアナログ信号は、A/D変換部4でデジタル変換され、データ記憶部5に記憶され、振動監視部8に併設された送受信部81からの送信指令信号に基づいて無線送受信部6から伝送され、振動監視部7に取り込まれる。
Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a block diagram showing an internal configuration of an RFID tag 1 and a vibration monitoring unit 7 as an example of a wireless sensor of the present invention. In the figure, an RFID tag 1 includes a vibration acceleration sensor 2 using a piezoelectric element, an amplification unit 3 that amplifies an analog output signal from the vibration acceleration sensor 2, and converts an analog signal from the amplification unit 3 into a digital signal. A / D conversion unit 4 for data storage, a data storage unit 5 for temporarily storing the converted digital signal, a wireless transmission / reception unit 6 for wireless transmission of the stored digital signal based on a command from the outside, and a power source by a battery It is comprised with the supply part 7. FIG.
The amplifying unit 3 includes a charge amplifier 31 that converts the charge output of the vibration acceleration sensor 2 into a voltage, a low-pass filter 32 that uses the output signal of the charge amplifier 31 as a cutoff frequency near the upper limit of the vibration monitoring frequency range, and its output voltage. Voltage amplifiers 33 and 34 for amplifying the signal are provided.
The voltage amplifier 33 has a bypass circuit, and the bypass circuit is effective when the amplification factor of the amplifier 3 is changed.
Here, the analog signal output from the voltage amplifier 34 is digitally converted by the A / D conversion unit 4, stored in the data storage unit 5, and used as a transmission command signal from the transmission / reception unit 81 provided along with the vibration monitoring unit 8. Is transmitted from the wireless transmission / reception unit 6 and taken into the vibration monitoring unit 7.

振動監視部8の判定部82は、送受信部81によって取り込んだ加速度のデジタル信号で同じ数値が2回連続している場合、増幅器が飽和していると判定し、増幅器の増幅倍率を変更させる切り替え制御信号をRFIDタグ1に発信する
この制御信号を受信したRFIDタグ1では、増幅倍率を下げるため、ローパスフィルタ32の出力信号を、電圧増幅器33をバイパスさせて電圧増幅器34に入力させる。これにより、増幅倍率が下げられるため、振動監視部8の判定部82では、送受信部81によって取り込んだ加速度のデジタル信号で同じ数値が2回連続していることがなくなる。
このように、RFIDタグ1に入力される振動加速度の大きさに応じ自動的に増幅部3の増幅倍率が切り替えられるため、小さな加速度レベルから大きな加速度レベルまでアナログ信号を飽和させることのない増幅率が得られ、さらに低いビット数のA/D変換器でも高い分解能が得られると共に、振動計測に必要なデジタル信号の伝送時間が低減できる。
また、振動解析部83では、周波数分析部81において取り込んだデジタル信号を、監視対象周波数の上限f0の4倍に設定したサンプリング周波数4foの1/2周波数までの周波数分析を行い、図2に示す分析フローのように、0〜f0Hzの振動速度の実効値を算出するとともに、その実効値の中で回転機の回転周波数成分f1の整数倍f1、2f1、3f1における振動変動を算出し、算出された実効値、振動変動を予めJIS規格などをもとに設定された判定基準値(閾値)と比較して状態判定を表示する。また、算出された実効値、振動変動をメモリに記憶し、図示しないトレンド画面にその数値グラフを表示する。
The determination unit 82 of the vibration monitoring unit 8 determines that the amplifier is saturated and changes the amplification factor of the amplifier when the same numerical value is continued twice in the acceleration digital signal captured by the transmission / reception unit 81. Transmitting a control signal to the RFID tag 1 In the RFID tag 1 that has received this control signal, the output signal of the low-pass filter 32 is input to the voltage amplifier 34 by bypassing the voltage amplifier 33 in order to lower the amplification factor. As a result, since the amplification factor is lowered, the determination unit 82 of the vibration monitoring unit 8 does not have the same numerical value twice in the acceleration digital signal captured by the transmission / reception unit 81.
As described above, since the amplification factor of the amplifying unit 3 is automatically switched according to the magnitude of the vibration acceleration input to the RFID tag 1, the amplification factor that does not saturate the analog signal from a small acceleration level to a large acceleration level. In addition, a high resolution can be obtained even with an A / D converter having a lower number of bits, and the transmission time of a digital signal necessary for vibration measurement can be reduced.
Further, the vibration analysis unit 83 performs frequency analysis of the digital signal taken in by the frequency analysis unit 81 up to a half frequency of the sampling frequency 4fo set to four times the upper limit f 0 of the monitoring target frequency, as shown in FIG. As shown in the analysis flow shown, the effective value of the vibration speed of 0 to f 0 Hz is calculated, and the vibration fluctuation in the integral multiples f1, 2f1, and 3f1 of the rotational frequency component f1 of the rotating machine is calculated in the effective value. The state determination is displayed by comparing the calculated effective value and vibration fluctuation with a reference value (threshold value) set in advance based on the JIS standard. Further, the calculated effective value and vibration fluctuation are stored in a memory, and the numerical graph is displayed on a trend screen (not shown).

本発明のRFIDタグと振動監視装置の内部機能を示すブロック図。The block diagram which shows the internal function of the RFID tag and vibration monitoring apparatus of this invention. 本発明の振動監視装置の主要機能を示す解析フロー図。The analysis flowchart which shows the main functions of the vibration monitoring apparatus of this invention.

符号の説明Explanation of symbols

1・・・RFIDタグ
2・・・振動加速度センサ
3・・・増幅部
4・・・A/D変換部
5・・・データ記憶部
6・・・無線送受信部
7・・電源供給部
31・・・チャージアンプ
32・・・ローパスフィルタ
33、34・・・電圧増幅器
8・・・振動監視部
81・・・送受信部
82・・・判定部
83・・・振動解析部
DESCRIPTION OF SYMBOLS 1 ... RFID tag 2 ... Vibration acceleration sensor 3 ... Amplification part 4 ... A / D conversion part 5 ... Data storage part 6 ... Wireless transmission / reception part 7 ... Power supply part 31- ..Charge amplifier 32 ... Low pass filter 33, 34 ... Voltage amplifier 8 ... Vibration monitoring unit 81 ... Transmission / reception unit 82 ... Determination unit 83 ... Vibration analysis unit

Claims (2)

振動加速度センサ、該振動加速度センサからのアナログ出力信号を増幅する増幅部、増幅された信号をデジタル変換するA/D変換部、A/D変換されたデジタル信号を記憶する記憶部、該記憶部に記憶されたデジタル信号を無線送信する無線送受信部、前記各部への電源供給部を備えた無線センサと、
該無線センサの出力信号を受信し振動監視する振動監視部と
からなる無線センサによる振動監視装置において、
前記増幅部を、増幅倍率が切り替え可能に構成すると共に、
前記振動監視部に、前記無線送受信部から受信したデジタル信号の数値を判定し、数値が所定回数連続した場合に前記増幅部の増幅倍率を切り替える制御信号を前記無線センサに発信する判定部を設けることを特徴とする無線センサによる振動監視装置。
Vibration acceleration sensor, amplification unit for amplifying an analog output signal from the vibration acceleration sensor, A / D conversion unit for digitally converting the amplified signal, storage unit for storing the A / D converted digital signal, the storage unit A wireless transmission / reception unit that wirelessly transmits a digital signal stored in the wireless sensor, a wireless sensor including a power supply unit to each unit, and
In the vibration monitoring device by the wireless sensor comprising the vibration monitoring unit that receives the output signal of the wireless sensor and monitors the vibration,
The amplification unit is configured so that the amplification magnification can be switched, and
The vibration monitoring unit is provided with a determination unit that determines a numerical value of the digital signal received from the wireless transmission / reception unit and transmits a control signal to the wireless sensor to switch the amplification factor of the amplification unit when the numerical value continues a predetermined number of times. A vibration monitoring apparatus using a wireless sensor.
請求項1に記載の振動監視装置において、前記振動監視部は、前記デジタル信号を用い監視対象周波数範囲における周波数分析や振動速度実効値および所定の周波数における振動変位を演算し、表示および状態判定することを特徴とする無線センサ振動監視装置。
2. The vibration monitoring device according to claim 1, wherein the vibration monitoring unit uses the digital signal to calculate a frequency analysis in a frequency range to be monitored, a vibration velocity effective value, and a vibration displacement at a predetermined frequency, and display and state determination. A wireless sensor vibration monitoring device.
JP2007287233A 2007-11-05 2007-11-05 Vibration monitor by wireless sensor Pending JP2009115538A (en)

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JP2017142124A (en) * 2016-02-09 2017-08-17 株式会社荏原製作所 Diagnosis assisting device, diagnosis assisting system, diagnosis assisting method, and diagnosis assisting program
CN107966207A (en) * 2017-12-30 2018-04-27 广州供电局有限公司 Load ratio bridging switch vibration signal acquisition device and analysis system
CN109100011A (en) * 2018-09-04 2018-12-28 山东朗进科技股份有限公司 A kind of railway air conditioner vibration monitoring and fault diagnosis system and diagnostic method
CN109443522A (en) * 2018-12-10 2019-03-08 江苏华创光电科技有限公司 A kind of conditioning of vibration signal and data converter
CN109975572A (en) * 2019-04-12 2019-07-05 中国大唐集团新能源科学技术研究院有限公司 A kind of detector wirelessly communicating vibration acceleration
US11340254B2 (en) 2019-09-30 2022-05-24 Seiko Epson Corporation Inertial measurement unit having a sensor unit that is detachable from a substrate
US11391570B2 (en) 2019-09-30 2022-07-19 Seiko Epson Corporation Inertial measurement unit

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