JP2009105018A - High temperature illumination system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high temperature illumination system which can illuminate whole of a high temperature room 12 uniformly and efficiently and make easy to see into the room 12 and minimize influence from heat to retain long-term reliability and is excellent in its design. <P>SOLUTION: A high temperature apparatus 1 in whose chamber 11 is formed a substantially airtight high temperature room 12 comprising: a light source section 21 as an interior illumination of the high temperature room 12; and a light guide light-emitting section 22 which guides light from the light source section 21 and emits light, wherein the light guide light-emitting section 22 is laid between partitions 11a and 11b which is opposed to define the high temperature room 12 of the chamber 11, wherein the light source section 21 is placed inside the partitions 11a and 11b opposed to each other and an end face in the laying direction of the light guide light-emitting section 22. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a high temperature apparatus illumination system for illuminating the inside of a high temperature chamber in a high temperature apparatus in which a substantially sealed high temperature chamber is formed in a chamber.

  In general, when conducting a characteristic survey on industrial products such as various materials and semiconductor devices, an acceleration test may be performed in order to confirm the effect of aging in a short time. When performing this accelerated test, a high-temperature apparatus in which a high-temperature chamber in a substantially sealed state is formed in the chamber is applied, and a test object is placed in the high-temperature chamber and various items are tested under a predetermined temperature cycle. The

  By the way, when performing an accelerated test using such a high temperature apparatus, in order to make it easy to visually observe the operating state of the DUT placed in the high temperature room, a lighting apparatus that illuminates the high temperature room together with the observation window Is required. In this case, if lighting fixtures such as a fluorescent lamp and an incandescent lamp are simply arranged in the high temperature chamber of the high temperature apparatus, such lighting fixtures are directly affected by heat and cause a problem such as failure within a short time.

  Therefore, in order to avoid such a thermal influence, conventionally, as shown in FIGS. 10 and 11, for example, the luminaire 2 is disposed in the vicinity of the observation window 14 provided in the chamber 11, and the high temperature chamber is passed through the observation window 14. 12 is illuminated. In the figure, reference numeral 13 denotes a storage arrangement part of the temperature control panel, 16 denotes an operation panel, and 17 denotes a door handle.

  However, when the lighting fixture 2 is arranged outside the chamber 11 as described above, the illumination light is reflected by a transparent partition plate such as a glass plate fitted in the observation window 14, so that the high temperature is obtained through the observation window 14. It is difficult to visually recognize the inside of the room 12, and the efficiency of illuminating the inside of the high temperature room is reduced. Moreover, if the luminaire 2 is arranged close to the observation window 14, the design is not good.

On the other hand, in another prior art, a through hole is provided through the partition wall of the chamber 11 inward and outward, a light guide is inserted into the through hole, and light from a light source provided outside the chamber 11 is introduced into the chamber 11 through the light guide. There has also been proposed an apparatus that can illuminate the inside of the high-temperature chamber 12 by being introduced (see, for example, Patent Document 1 below).
JP 2002-250825 A

  However, in the case of a configuration in which light from a light source provided outside the chamber is introduced into the chamber through a light guide as in the prior art described in Patent Document 1, illumination light is reflected by a transparent partition plate provided in the observation window. Although there is no fear, the illumination area in the high-temperature room is limited, so the entire high-temperature room cannot be illuminated uniformly, and it takes time to confirm the overall operating condition of the DUT placed in the high-temperature room. become.

  The present invention has been made to solve the above-described problems, and can uniformly and efficiently illuminate the entire high-temperature room, and can easily visually recognize the high-temperature room through the observation window. An object of the present invention is to provide a high-temperature device illumination system that can be minimized and can maintain long-term reliability, and that is also excellent in design.

  In order to achieve the above object, in the high-temperature apparatus illumination system according to claim 1 of the present invention, in the high-temperature apparatus in which a substantially sealed high-temperature chamber is formed in the chamber, the interior of the high-temperature chamber is illuminated. A light source unit and a light guide light emitting unit that guides light emitted from the light source unit and emits light, and the light guide light emitting unit is installed across the opposing partition walls forming the high temperature chamber of the chamber, The light source part is disposed inside a partition wall facing at least one end face in the erection direction of the light guide light emitting part.

  Moreover, in the high temperature apparatus illumination system according to claim 2, in the configuration of the invention according to claim 1, the light guide light emitting unit is arranged along the direction in which the light guide light emitting unit is installed. It has a shape that covers substantially the entire partition wall and is integrally joined to the partition wall.

  According to the high temperature apparatus illumination system of the first aspect of the present invention, the light guide light emitting unit is mounted across the partition walls facing each other in a state facing the high temperature chamber, so that the entire high temperature chamber is uniformly and efficiently disposed. It is possible to illuminate, and the operating state in the high temperature room can be easily visually confirmed through the observation window. In addition, since the light source unit is disposed inside the partition wall, the light source unit can be minimized from being affected by heat, and long-term reliability can be maintained. Moreover, since the light source part and the light guide light emitting part are exposed to the outside of the chamber, the appearance is clean and the design is improved.

  In the high temperature apparatus illumination system according to the second aspect of the present invention, since the light guide light emitting unit covers the substantially entire partition wall of the chamber and is integrally joined to the partition wall, the entire wall surface emits light. The high-temperature room can be illuminated more uniformly and efficiently, which makes it easier to visually recognize the operating state of the high-temperature room.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(Embodiment 1)
1 is a front sectional view showing a configuration of a high-temperature apparatus illumination system according to Embodiment 1 of the present invention, FIG. 2 is a side sectional view of the system, and FIG. 3 is a longitudinal sectional view showing a main part of a lighting fixture of the system, FIG. 4 is a cross-sectional view taken along the line AA in FIG. 3, and the same reference numerals are given to the components corresponding to those in the prior art shown in FIGS.

  The high temperature apparatus illumination system according to the first embodiment includes a high temperature apparatus 1 and a lighting fixture 2. Here, in the high temperature apparatus 1, a substantially sealed high temperature chamber 12 is formed in the chamber 11, and a temperature control panel (not shown) for controlling the temperature of the high temperature chamber 12 is disposed below the high temperature chamber 12. A storage arrangement portion 13 is provided, and an observation window 14 is provided in one partition wall of the chamber 11 constituting the high temperature chamber 12. Note that the inner surface of the chamber 11 facing the high temperature chamber 12 is formed by, for example, mirror-finishing stainless steel in order to increase the heat radiation efficiency.

  On the other hand, the luminaire 2 illuminates the inside of the high temperature chamber 12 and includes a pair of left and right light source units 21 and a light guide light emitting unit 22 that guides light from the light source units 21 to emit light. In this example, each light source unit 21 includes a light source composed of an LED and a concave reflecting mirror that reflects the light from each light source. It is embed | buried under the ceiling side upper part in the partition walls 11a and 11b on either side.

  The light guide light emitting unit 22 has a light guide tube 26 formed in a cylindrical shape, and a diffusion sheet 27 for light diffusion is attached to a part of the inner peripheral side of the light guide tube 26 in an arc shape. In addition, a reflection sheet 28 that reflects light leaking to the outside is affixed in a circular arc shape to a part of the outer periphery of the light guide tube 26, and is further concentric with the light guide tube 26 on the outer periphery thereof. A cylindrical outer member 29 is provided.

  And this light guide light emission part 22 opposes each other of the chamber 11 through the inside of the high temperature chamber 12 in the state arrange | positioned so that the inner peripheral surface side of the diffusion sheet 27 and the reflection sheet 28 may face the inner side of the high temperature chamber 12. It spans between partition 11a, 11b, and each end surface of the construction direction is facing each light source part 21 arrange | positioned in partition 11a, 11b.

  Therefore, in the lighting fixture 2, when light emitted from each light source unit 21 is introduced into the light guide tube 26 of the light guide light emitting unit 22, light having a small incident angle is reflected by the inner surface of the light guide tube 26. And propagating along the axial direction. Of the light diffusely reflected by the diffusion sheet 27, light having a small incident angle is propagated along the axial direction while being reflected by the inner surface of the light guide tube 26, but light having a large incident angle is transmitted to the outside. Light is emitted as leakage light, and a part of the leakage light is reflected by the reflection sheet 28, passes through the light guide tube 26 and the outer member 29, and is emitted toward the inner side of the high temperature chamber 12.

  As described above, according to the high temperature apparatus illumination system of the first embodiment, the light guide light emitting unit 22 is mounted across the partition walls 11 a and 11 b facing each other in the chamber 11 in a state of facing the high temperature chamber 12. The entire inside of the high temperature chamber 12 can be illuminated uniformly and efficiently, and the operating state in the high temperature chamber 12 can be easily visually confirmed through the observation window 14. Moreover, since the light source unit 21 is disposed inside the partition walls 11a and 11b, the light source unit 21 can be minimized from being affected by heat, and long-term reliability can be maintained. Further, since the light source unit 21 and the light guide light emitting unit 22 are exposed to the outside of the chamber 11, the appearance is clean and the design is improved.

(Embodiment 2)
5 is a front sectional view showing a configuration of a high temperature apparatus illumination system according to Embodiment 2 of the present invention, FIG. 6 is a side sectional view of the system, and FIG. 7 is a front sectional view showing an enlarged main part of the system. The components corresponding to those of the first embodiment shown in FIGS. 1 to 4 are denoted by the same reference numerals.

  In the high temperature apparatus illumination system of the second embodiment, the configuration of the lighting fixture 2 is different from that of the first embodiment. That is, the lighting fixture 2 of the second embodiment includes a light source unit 21 and a light guide light emitting unit 22 that guides light from the light source unit 21 to emit light.

  In this example, each light source unit 21 includes a plurality of light sources 23 made of LEDs and a concave reflecting mirror 24 that reflects light from these light sources 23, and each light source 23 constitutes the high temperature chamber 12 of the chamber 11. The left and right partition walls 11a and 11b facing each other are sequentially embedded in the upper part on the ceiling side along the depth direction.

  The light guide light emitting unit 22 is formed to have a size covering substantially the entire partition wall 11c on the ceiling side of the chamber 11, and includes a flat light guide plate 31 made of glass or acrylic resin, and the light guide plate. A diffusion film 32 covering 31 and a heat-resistant transparent panel 33 covering the diffusion film 32 are sequentially laminated. And this light guide light emitting part 22 is constructed over the partition 11a, 11b which mutually opposes the chamber 11 which comprises the high temperature chamber 12, in the state arrange | positioned so that the transparent panel 33 side may face the inner side of the high temperature chamber 12. Each end face in the installation direction faces each light source unit 21 in the partition wall. Further, the light guide plate 31 of the light guide light emitting unit 22 is integrally joined to the ceiling-side partition wall 11 c of the chamber 11.

  Therefore, in the lighting fixture 2, when the light emitted from the light source unit 21 is introduced into the light guide plate 31 of the light guide light emitting unit 22, the light having a small incident angle is reflected in the light guide plate 31 and the end thereof is reflected. Is propagated to the part. Of the light diffusely reflected by the diffusion film 32, light having a small incident angle is propagated to the end while being reflected in the light guide plate 31, but light having a large incident angle is emitted as leaked light to the outside. A part of the leaked light passes through the diffusion film 32 and the transparent panel 33 and is emitted toward the inner side of the high temperature chamber 12. Moreover, since each inner surface facing the high temperature chamber 12 of the chamber 11 is usually formed in a mirror surface shape in order to increase the heat radiation efficiency, a part of the leakage light is reflected by the inner surface of the partition wall 11c on the ceiling side. Similarly, it passes through the diffusion film 32 and the transparent panel 33 and is emitted toward the inner side of the high temperature chamber 12.

  Thus, according to the high temperature apparatus illumination system of the second embodiment, the light guide light emitting unit 22 is integrally joined so as to cover substantially the entire partition wall 11c on the ceiling side of the chamber 11, so The whole emits light, and the inside of the high temperature chamber 12 can be illuminated more uniformly and efficiently. For this reason, the operating state in the high temperature chamber 12 can be further easily visually confirmed.

  In the second embodiment, the lighting fixture 2 is arranged only on the ceiling side of the chamber 11. However, the present invention is not limited to this. For example, as shown in FIG. 8, the bottom portion facing the lighting fixture 2 on the ceiling side. The lighting fixture 2 can also be arranged on the side. Alternatively, as shown in FIG. 9, it is also possible to adopt a configuration in which the lighting fixtures 2 are arranged at locations facing each other on the left and right sides of the high temperature chamber 12 of the chamber 11. In the second embodiment, an LED is used as the light source 23. However, it is also possible to arrange a tubular fluorescent lamp along the width direction of the partition wall. Further, in the second embodiment, the light guide plate 31 of the light guide light emitting unit 22 is formed in a flat plate shape, but may have a shape raised in a bowl shape.

  In the first and second embodiments described above, the light source unit 21 is provided in each of the partition walls 11a and 11b facing each other. However, the partition wall 11a can be used as long as the inside of the high temperature chamber 12 can emit and retain light with sufficient brightness. , 11b can be provided only on one side.

It is front sectional drawing which shows the structure of the high temperature apparatus illumination system in Embodiment 1 of this invention. It is side surface sectional drawing of the system. It is a longitudinal cross-sectional view which shows the principal part of the lighting fixture of the system. It is sectional drawing which follows the AA line of FIG. It is front sectional drawing which shows the structure of the high temperature apparatus illumination system in Embodiment 2 of this invention. It is side surface sectional drawing of the system. It is front sectional drawing which expands and shows the principal part of the system. It is front sectional drawing which shows the modification of a structure of the high temperature apparatus illumination system in Embodiment 2 of this invention. It is front sectional drawing which shows the other modification of a structure of the high temperature apparatus illumination system in Embodiment 2 of this invention. It is a perspective view which shows the structure of the conventional high temperature apparatus illumination system. It is side surface sectional drawing which shows the structure of the system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 High temperature apparatus 11 Chamber 11a, 11b, 11c Bulkhead 14 Observation window 2 Lighting fixture 21 Light source part 22 Light guide light emission part 23 Light source

Claims (2)

  A high temperature apparatus illumination system for illuminating the inside of a high temperature chamber in a high temperature apparatus in which a substantially sealed high temperature chamber is formed in a chamber, wherein the light source section and a light guide for guiding light from the light source section to emit light A light emitting unit, wherein the light guide light emitting unit is installed across the opposing partition walls forming a high temperature chamber of the chamber, and the light source unit is disposed inside the partition wall facing at least one end surface in the installation direction of the light guide light emitting unit. A high temperature apparatus illumination system, characterized in that   The said light guide light emission part has the shape which covers the substantially whole partition along the construction direction of the said light guide light emission part, and is integrally joined with this partition. High temperature equipment lighting system.

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