JP2009103588A - Field equipment, abnormality diagnostic system, and abnormality diagnostic method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide field equipment provided with an abnormality diagnostic function capable of generating and setting automatically a determination value serving as a reference for diagnosing the abnormality of a process condition, without operating actually a plant. <P>SOLUTION: This field equipment having a determination value setting part set with the determination value for diagnosing the abnormality of the process condition, and a diagnostic variable computing part for obtaining the first abnormality diagnostic variable, based on a physical quantity, and for diagnosing the abnormality of the process condition, based on a comparison result of the first abnormality diagnostic variable with the determination value, is provided with a determination value generating part for generating a physical quantity data when the abnormality of the process condition occurs, based on a set physical quantity-related parameter, for obtaining the second abnormality diagnostic variable by computation-processing the physical quantity data by the manner same to that in the diagnostic variable computing part, and for setting a value related to the second abnormality diagnostic variable as the determination value to the determination value setting part. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a field device for diagnosing a process state abnormality, a system including the field device for diagnosing a process state abnormality, and a method for diagnosing a process state abnormality.

  In process control for controlling pressure, flow rate, and the like, field devices such as a differential pressure transmitter and a flow meter are used. Such a field device 30 will be described with reference to FIG.

  In FIG. 8, the field device 30 is abnormal based on a sensor 1 that detects a physical quantity such as pressure, an input processing unit 2 that processes a physical quantity detection signal, a physical quantity calculation unit 3 that calculates a physical quantity from the input processing signal, and a calculated physical quantity D1. An abnormality diagnosis unit 10 for diagnosis, and an output unit 20 for outputting a signal corresponding to the calculated physical quantity D1 and an abnormality diagnosis result D4 to the outside are provided.

  The abnormality diagnosis unit 10 includes a diagnosis variable calculation unit 11 that calculates the first abnormality diagnosis variable D2 from the calculated physical quantity D1, a determination value setting unit 13 that sets a determination value D3 that is compared with the first abnormality diagnosis variable D2, and a first abnormality A comparison unit 12 is provided that compares the diagnosis variable D2 and the determination value D3 and outputs an abnormality diagnosis result D4.

  Here, when the field device 30 is a pressure transmitter, the pressure transmitter is clogged with a pressure guiding pipe connecting the pipe through which the fluid flows and the differential pressure transmitter based on the calculated differential pressure value (calculated physical quantity D1). Diagnosis can be performed (see Patent Document 1).

JP 2006-329846 A

  FIG. 9 shows a connection configuration diagram of a differential pressure transmitter 64, which is one of field devices, and a pipe 60 through which the fluid Fd flows.

  In FIG. 9, an orifice (throttle) 61 is inserted into a pipe 60 through which the fluid Fd flows, and a high-pressure side pressure guiding pipe 62 and an orifice 61 that guide the pressure of the fluid Fd upstream of the orifice 61 to the differential pressure transmitter 64. On the other hand, a low pressure side pressure guiding pipe 63 that guides the pressure of the downstream fluid Fd to the differential pressure transmitter 64 is connected between the pipe 60 and the differential pressure transmitter 64.

  Returning to FIG. 8, the sensor 1 detects the pressure led from the high pressure side pressure guiding pipe 62 (hereinafter referred to as “high pressure side pressure”) and the pressure led from the low pressure side pressure guiding pipe 63 (hereinafter referred to as “low pressure side pressure”). After the input processing unit 2 processes this detection signal, the physical quantity calculation unit 3 calculates the high pressure side pressure value, the low pressure side pressure value, and the differential pressure value thereof as the calculation physical quantity D1 based on the input processing signal. .

  Based on the calculated physical quantity D1, the diagnostic variable calculation unit 11 calculates a ratio of the variance value of the high pressure side pressure value fluctuation and the variance value of the differential pressure value fluctuation as the first abnormality diagnosis variable D2. The comparison unit 12 compares the determination value D3 set in the determination value setting unit 13 with the first abnormality diagnosis variable D2, and determines whether or not the high pressure side pressure guiding pipe 62 and the low pressure side pressure guiding pipe 63 are clogged. Is output.

  In such clogging of the pressure guiding tube, the user needs to set a determination value D3 serving as a reference for determining whether or not the pressure guiding tube is clogged in the determination value setting unit 13.

  However, the user needs to observe the first abnormality diagnosis variable D2 while operating the plant that actually performs the process control, determine the determination value D3 based on the observation result, and set it in the determination value setting unit 13. In addition, there are many types of determination value D3 in Patent Document 1 as seven types (Z1 to Z7).

  For this reason, in order to determine the determination value D3 and set it to the determination value setting unit 13, the user needs a lot of man-hours and knowledge about the plant, and the load is large.

  An object of the present invention relates to a field device, and is an abnormality that can automatically generate and set a determination value as a determination criterion for diagnosing an abnormality in a process state without operating a plant that actually performs process control. It is to provide a field device having a diagnostic function.

In order to achieve such an object, the invention of claim 1
A determination value setting unit configured to set a determination value for diagnosing an abnormality in the process state; and a diagnosis variable calculation unit that obtains a first abnormality diagnosis variable based on a physical quantity. The first abnormality diagnosis variable and the determination value In the field device for diagnosing abnormalities in the process state based on the comparison result of
Based on the set physical quantity-related parameter, physical quantity data is generated when an abnormality in the process state occurs, and a second abnormality diagnostic variable is obtained by performing the same arithmetic processing on the physical quantity data as the diagnostic variable computing unit. A determination value generation unit that sets a value related to the second abnormality diagnosis variable as the determination value in the determination value setting unit,
It is provided with.

The invention of claim 2 is the invention of claim 1,
The determination value generation unit includes a bias unit that sets a value obtained by adding or subtracting a bias value to or from the second abnormality diagnosis variable as the determination value in the determination value setting unit.

The invention of claim 3 is the invention of claim 1 or 2,
The abnormality in the process state is a blockage of a pressure guiding pipe connected between a pipe through which a fluid flows and the field device.

The invention of claim 4
A determination value setting unit configured to set a determination value for diagnosing an abnormality in the process state; and a diagnosis variable calculation unit that obtains a first abnormality diagnosis variable based on a physical quantity. The first abnormality diagnosis variable and the determination value In the abnormality diagnosis system provided with a field device for diagnosing the abnormality of the process state based on the comparison result of
Based on the set physical quantity-related parameter, physical quantity data is generated when an abnormality in the process state occurs, and a second abnormality diagnostic variable is obtained by performing the same arithmetic processing on the physical quantity data as the diagnostic variable computing unit. A determination value generation device that sets a value related to the second abnormality diagnosis variable as the determination value in the determination value setting unit,
It is provided with.

The invention of claim 5
In an abnormality diagnosis method for diagnosing a process state abnormality by using a first abnormality diagnosis variable obtained based on a physical quantity,
Generating physical quantity data when an abnormality occurs in the process state based on a set physical quantity related parameter;
Obtaining the second abnormality diagnostic variable by performing the same arithmetic processing on the physical quantity data as the arithmetic processing for obtaining the first abnormality diagnostic variable;
Setting a value related to the second abnormality diagnostic variable as a determination value for diagnosing abnormality in the process state;
Diagnosing an abnormality in the process state based on a comparison result between the first abnormality diagnosis variable and the determination value;
It is characterized by having.

  According to the present invention, an abnormality diagnosis function for automatically generating and setting a determination value as a determination criterion for diagnosing an abnormality in the process state without operating a plant that actually performs the process control for the field device. The provided field devices can reduce the man-hours and burden on the user regarding generation and setting of determination values.

[First embodiment]
FIG. 1 is a block diagram of a field device 50 to which the present invention is applied, and the first embodiment will be described using this. The same parts as those in FIG.

  The field device 50 of this embodiment includes a determination value generation unit 40 in addition to the components of the field device 30 in FIG.

  In FIG. 1, a sensor 1 detects physical quantities such as pressure, flow rate, and temperature, and an input processing unit 2 performs input processing such as amplifying the physical quantity detection signal and converting an analog signal into a digital signal.

  Based on this input processing signal, the physical quantity calculation unit 3 calculates a high pressure side pressure value, a low pressure side pressure value, a differential pressure value, a flow rate value, a temperature value, and the like as a calculation physical quantity D1. The diagnostic variable calculation unit 11 calculates the ratio of the variance value of the high pressure side pressure value fluctuation and the variance value of the differential pressure value fluctuation as the first abnormality diagnosis variable D2 based on the calculated physical quantity D1. The comparison unit 12 compares the determination value D3 set in the determination value setting unit 13 with the first abnormality diagnosis variable D2, and outputs an abnormality diagnosis result D4.

  Here, the determination value D3 is a value that serves as a determination criterion for diagnosing abnormalities in the process state, for example, clogging abnormalities in the high-pressure side impulse line 62 and the low-pressure side impulse line 63 in FIG.

  Returning to FIG. 1, the output unit 20 receives the calculated physical quantity D1 and the abnormality diagnosis result D4 and outputs them to the outside. For example, the output unit 20 outputs a current signal (DC 4 to 20 mA) or a voltage signal (DC 1 to 5 V) corresponding to the calculated physical quantity D1, and superimposes and outputs the abnormality diagnosis result D4 as communication data on this signal. .

  Further, the determination value generation unit 40 built in the field device 50 uses the first physical quantity related parameter D30 set in the first parameter setting unit 44 as the first physical quantity data when the process state abnormality occurs. The physical quantity data when the abnormality of the process state occurs based on the second physical quantity related parameter D31 set in the second parameter setting section 45, including the first abnormal physical quantity data generation section 41 that is generated as the abnormal physical quantity data D11. Is generated as the second abnormal physical quantity data D13. Furthermore, a diagnostic determination value calculation unit 43 obtained by calculating a second abnormality diagnostic variable D14 based on the first abnormal physical quantity data D11 and the second abnormal physical quantity data D13 is provided.

  The diagnosis determination value calculation unit 43 performs the same calculation process as the diagnosis variable calculation unit 11. Then, the diagnosis determination value calculation unit 43 sets the second abnormality diagnosis variable D14 as the determination value D3 in the determination value setting unit 13.

  When the field device 50 is a differential pressure transmitter, the operation of the determination value generation unit 40 will be described using an example of clogging diagnosis of the high pressure side pressure guiding pipe 62 and the low pressure side pressure guiding pipe 63 shown in FIG.

  First, FIG. 2 showing the input / output relationship of the first abnormal physical quantity data generation unit 41 and the second abnormal physical quantity data generation unit 42 will be described. 2A, the first abnormal physical quantity data generation unit 41 includes a first input data generation unit 46 and a first abnormal data generation processing unit 47. In FIG. 2B, second abnormal physical quantity data The generation unit 42 includes a second input data generation unit 48 and a second abnormal data generation processing unit 49.

  Returning to FIG. 2A, time-series first input data D <b> 10 (for example, random numbers) generated by the first input data generation unit 46 is input to the first abnormal data generation processing unit 47. The first abnormality data generation processing unit 47 performs, for example, a built-in function calculation on the first physical quantity related parameter D30 set in the first parameter setting unit 44, thereby causing, for example, a clogging abnormality in the high pressure side pressure guiding tube 62. Is generated and output as first abnormal physical quantity data D11.

  In FIG. 2B, time-series second input data D12 (for example, random numbers) generated by the second input data generation unit 48 is input to the second abnormal data generation processing unit 49. The second abnormal data generation processing unit 49 performs a built-in function calculation on the second physical quantity related parameter D31 set in the second parameter setting unit 45, for example, a clogging abnormality of the low pressure side pressure guiding pipe 63 has occurred. Is generated and output as second abnormal physical quantity data D13.

  Note that the functions incorporated in the first abnormal data generation processing unit 47 and the second abnormal data generation processing unit 49 are different. Further, the first input data D10 and the second input data D12 may be the same time series data.

  In the case of diagnosing a pressure guiding tube clogging of the differential pressure transmitter, the first physical quantity related parameter D30 and the second physical quantity related parameter D31 are physical quantities such as flow rate and viscosity. The user sets the first physical quantity related parameter D30 and the second physical quantity related parameter D31 in the first parameter setting unit 44 and the second parameter setting unit 45, respectively, by external communication or an optical switch (not shown). Can do.

  Next, the determination value generation process of the determination value generation unit 40 will be described with reference to the flowchart of FIG.

  First, as described above, the first abnormal physical quantity data generation unit 41 generates first abnormal physical quantity data D11 (step S1).

  The diagnosis determination value calculation unit 43 that performs the same calculation processing as the diagnosis variable calculation unit 11 calculates the second abnormality diagnosis variable D14 based on the first abnormality physical quantity data D11 (step S2), and calculates the second abnormality diagnosis variable D14. A related value is set as a determination value X in the determination value setting unit 13 (step S3).

  Further, as described above, the second abnormal physical quantity data generation unit 42 generates the second abnormal physical quantity data D13 (step S4).

  The diagnosis determination value calculation unit 43 calculates a second abnormality diagnosis variable D14 based on the second abnormality physical quantity data D13 (step S5), and sets a value related to the second abnormality diagnosis variable D14 as a determination value Y. Set in section 13 (step S6). The determination values X and Y may be the values of the second abnormality diagnosis variable D14 itself obtained.

  Next, the operation of the comparison unit 12 will be described with reference to FIG. 4 is a correspondence table between the first abnormality diagnosis variable D2 and the abnormality diagnosis result D4.

  The determination values X and Y are values to be compared with the first abnormality diagnosis variable D2 (for example, the ratio of the variance value of the high pressure side pressure value fluctuation and the variance value of the differential pressure value fluctuation), for example, X = 0. 25, Y = 0.9.

  In FIG. 4, when the first abnormality diagnosis variable D2 is 0 to 0.25 (X or less), the comparison unit 12 outputs an abnormality diagnosis result D4 that the high-pressure side impulse line 62 is clogged.

  When the first abnormality diagnosis variable D2 is 0.25 to 0.9, the comparison unit 12 outputs an abnormality diagnosis result D4 indicating that there is no clogging and is normal.

  When the first abnormality diagnosis variable D2 is 0.9 to 1.1 (Y or more), the comparison unit 12 outputs an abnormality diagnosis result D4 that the low-pressure side impulse line 63 is clogged (see Patent Document 1 in FIG. 4). (See diagnostic variable Z1).

  Then, the output unit 20 outputs the abnormality diagnosis result D4 to the outside, so that the user can know the abnormality diagnosis result.

  Note that the abnormal data generation processing (steps S1 and S4 in FIG. 3) of the first abnormal physical quantity data generation unit 41 and the second abnormal physical quantity data generation unit 42 may be executed by the processor with the abnormal data generation processing program changed. it can.

  The first abnormal physical quantity data generation unit 41 and the second abnormal physical quantity data generation unit 42 have one of them, and process state abnormality diagnosis (first abnormality diagnosis variable) based on one of the determination values X and Y. (Comparison with D2) may be performed.

  The processes of the physical quantity calculation unit 3, the diagnostic variable calculation unit 11, the comparison unit 12, the determination value setting unit 13, the first abnormal physical quantity data generation unit 41, the second abnormal physical quantity data generation unit 42, and the diagnostic determination value calculation unit 43 are as follows. It may be performed by a processor.

  Up to this point, the field device 50 is a differential pressure transmitter, and the process state abnormality diagnosis has been described as an example of a pressure guiding tube clogging diagnosis. The adhesion diagnosis of the detection electrode disclosed in Japanese Patent Publication No. -97986 may be used. In this case, a resistance value between the detection electrode and the ground electrode is used as the first abnormality diagnosis variable D2.

  According to the present embodiment, a field having an abnormality diagnosis function for automatically generating and setting a reference value for determining whether or not there is an abnormality without operating a plant that actually performs process control for the field device. Depending on the device, it is possible to reduce the man-hours and burden on the user regarding generation and setting of determination values.

  In addition, until now, the user has to set a value peculiar to abnormality diagnosis such as the ratio of the variance value of the high pressure side pressure value fluctuation and the variance value of the differential pressure value fluctuation as the determination value D3. Since this is not a known value, it may be difficult for the user to determine and set this value.

  However, the user can easily generate and set the determination value D3 by setting generally known physical quantities such as flow rate and viscosity as the first physical quantity related parameter D30 and the second physical quantity related parameter D31. it can.

  Next, a case where a value obtained by adding or subtracting a bias value to the second abnormality diagnosis variable D14 is set will be described with reference to FIG.

  FIG. 5 is a block diagram of a field device 80 that further includes a bias unit 71 with respect to the determination value generation unit 40 of the field device 50 of FIG. 1. The following description will focus on differences from FIG. The same components as those in FIG.

  In FIG. 5, the bias unit 71 in the determination value generation unit 70 sets a value obtained by adding or subtracting the bias value to the second abnormality diagnosis variable D14 in the determination value setting unit 13 as a determination value D3. The addition or subtraction of the bias value is performed in steps S3 and S6 in FIG. 3, and the bias value may be the same value or a different value.

  The user can set the bias value in the bias unit 71 by communication from the outside or an optical switch (not shown).

  In addition to the embodiment described above, according to the embodiment shown in FIG. 5, the user sets the bias value, and the determination value D3 is generated and set so as to be a more suitable value for the process state abnormality diagnosis. The

[Second Embodiment]
FIG. 6 is a configuration diagram of an abnormality diagnosis system 200 to which the present invention is applied, and the second embodiment will be described using this. The same components as those in FIGS. 1 and 8 are denoted by the same reference numerals, and description thereof is omitted.

  The abnormality diagnosis system 200 of the present embodiment is a system including the field device 30 and the determination value generation device 110 in FIG.

  The field device 30 in FIG. 6 is the same as the configuration of the field device 50 in FIG. 1 except for the determination value generation unit 40, and the description of this configuration and operation is omitted in FIG. .

  The determination value generation device 110 is the same as the configuration of the determination value generation unit 40 in FIG. 1, and the description of this configuration and operation in FIG. 1 is omitted.

  The output of the diagnostic determination value calculator 43 of the determination value generator 110 and the output unit 20 of the field device 30 are connected to a common transmission line 300.

  The diagnosis determination value calculation unit 43 transmits the second abnormality diagnosis variable D14 obtained by the calculation to the transmission line 300. The determination value setting unit 13 of the field device 30 sets the transmitted second abnormality diagnosis variable D14 as the determination value D3 via the output unit 20.

  Further, the diagnosis determination value calculation unit 43 may directly set the second abnormality diagnosis variable D14 obtained by calculation in the determination value setting unit 13 without using the transmission line 300.

  The determination value generation device 110 may be incorporated in a host computer, a controller, a portable terminal device, or the like. Further, the field device 30 and the determination value generation device 110 have a wireless communication function, and the determination value generation device 110 may set the second abnormality diagnosis variable D14 in the determination value setting unit 13 of the field device 30 by wireless communication. Good.

  Note that the determination value generation device 110 may include a bias unit 71 as in FIG.

  In addition to the embodiment described above, the present embodiment allows a flexible configuration by providing the determination value generation device 110 outside the field device 30 to configure the system. Determination values can be generated and set even at a remote location of the device 30.

[Third embodiment]
An abnormality diagnosis method to which the present invention is applied will be described as a third embodiment. FIG. 7 is a flowchart of the abnormality diagnosis processing method to which the present invention is applied, and will be described with reference to FIG.

  As described with reference to FIG. 2A in the first embodiment, in step S10 of FIG. 7, the first abnormal physical quantity data D11 is generated based on the first physical quantity related parameter D30.

  The second abnormality diagnosis variable D14 is calculated by performing the same calculation process on the first abnormality physical quantity data D11 as the diagnosis variable calculation unit 11 that obtains the first abnormality diagnosis variable D2 (step S11). Then, a value related to the second abnormality diagnosis variable D14 is set in the determination value setting unit 13 as a determination value X serving as a determination reference for diagnosing abnormality in the process state (step S12).

  Further, as described with reference to FIG. 2B in the first embodiment, the second abnormal physical quantity data D13 is generated based on the second physical quantity related parameter D31 (step S13).

  The second abnormality diagnosis variable D14 is calculated by performing the same calculation process as the diagnosis variable calculation unit 11 for obtaining the first abnormality diagnosis variable D2 on the second abnormality physical quantity data D13 (step S14). Then, a value related to the second abnormality diagnosis variable D14 is set in the determination value setting unit 13 as a determination value Y serving as a determination reference for diagnosing a process state abnormality (step S15). The determination values X and Y may be the values of the second abnormality diagnosis variable D14 itself obtained.

  Next, the first abnormality diagnosis variable D2 is calculated based on the calculated physical quantity D1 detected by the sensor 1 and calculated by the physical quantity calculation unit 3 (step S16).

  Then, the first abnormality diagnosis variable D2 is compared with the determination values X and Y (step S17). Here, as described in FIG. 4, when the first abnormality diagnosis variable D2 is 0 to 0.25 (X or less) or 0.9 to 1.1 (Y or more), the process state is abnormal (high-pressure side). It is diagnosed that either the pressure guiding pipe 62 or the low pressure side pressure guiding pipe 63 is clogged) (step S18).

  Further, when the first abnormality diagnosis variable D2 is 0.25 to 0.9, it is diagnosed that the process state is normal (the high pressure side impulse line 62 and the low pressure side impulse line 63 are not clogged) (step S19).

  And after performing step S18 or step S19, it returns to step S16 and repeats the process of steps S16-S19.

  Note that the order of the series of processes in steps S10 to S12 and the series of processes in steps S13 to S15 may be reversed. In addition, any one of the series of processes in steps S10 to S12 and the series of processes in steps S13 to S15 may be performed. In this case, abnormality diagnosis of the process state is performed based on one of the determination values X and Y. Is done.

  Further, in steps S12 and S15 of FIG. 7, values obtained by adding or subtracting a bias value to the second abnormality diagnosis variable D14 may be set as determination values X and Y in the determination value setting unit 13, and the bias values are respectively The same value or different values may be used.

  This embodiment automatically generates and sets a reference value for determining whether or not the process state is abnormal and automatically sets and determines an abnormality diagnosis method. The burden can be reduced.

  Further, by setting physical quantities such as flow rate and viscosity as physical quantity related parameters, determination values can be easily generated and set.

  Further, when the user sets a bias value, the determination value is generated and set so as to be a value more suitable for abnormality diagnosis of the process state.

  Note that the present invention is not limited to the above-described embodiments, and includes many changes and modifications within a range not departing from the essence thereof, and can include combinations other than the combinations of the above-described parts.

It is a block diagram of a field device to which the present invention is applied. It is an input / output relationship diagram of each of the first abnormal physical quantity data generation unit 41 and the second abnormal physical quantity data generation unit. It is a flowchart figure of the judgment value generation process of a judgment value production | generation part. 6 is a correspondence table between a first abnormality diagnosis variable D2 and an abnormality diagnosis result D4 in the comparison unit 12. It is another example of the block diagram of the field device to which the present invention is applied. It is a block diagram of an abnormality diagnosis system to which the present invention is applied. It is a flowchart figure of the abnormality diagnosis processing method to which this invention is applied. It is a block diagram of the field device in background art. It is a connection block diagram of the differential pressure transmitter 64 and the piping 60 through which the fluid Fd flows.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Abnormality diagnosis part 11 Diagnostic variable calculation part 12 Comparison part 13 Determination value setting part 40, 70 Determination value generation part 41 1st abnormal physical quantity data generation part 42 2nd abnormal physical quantity data generation part 43 Diagnosis determination value calculation part 44 1st parameter Setting unit 45 Second parameter setting unit 50, 80 Field device 71 Bias unit 110 Determination value generation device 200 Abnormality diagnosis system

Claims (5)

A determination value setting unit for setting a determination value for diagnosing an abnormality in the process state; and a diagnosis variable calculation unit for obtaining a first abnormality diagnosis variable based on a physical quantity. The first abnormality diagnosis variable and the determination value In the field device for diagnosing abnormalities in the process state based on the comparison result of
Based on the set physical quantity-related parameter, physical quantity data is generated when an abnormality in the process state occurs, and a second abnormality diagnostic variable is obtained by performing the same arithmetic processing on the physical quantity data as the diagnostic variable computing unit. A determination value generation unit that sets a value related to the second abnormality diagnosis variable as the determination value in the determination value setting unit,
Field device characterized by comprising   The determination value generation unit includes a bias unit that sets a value obtained by adding or subtracting a bias value to or from the second abnormality diagnosis variable as the determination value in the determination value setting unit. Field equipment.   The field device according to claim 1, wherein the abnormality in the process state is a clogging of a pressure guiding pipe connected between a pipe through which a fluid flows and the field device. A determination value setting unit configured to set a determination value for diagnosing an abnormality in the process state; and a diagnosis variable calculation unit that obtains a first abnormality diagnosis variable based on a physical quantity. The first abnormality diagnosis variable and the determination value In an abnormality diagnosis system comprising a field device for diagnosing an abnormality in the process state based on the comparison result of
Based on the set physical quantity-related parameter, physical quantity data is generated when an abnormality in the process state occurs, and a second abnormality diagnostic variable is obtained by performing the same arithmetic processing on the physical quantity data as the diagnostic variable computing unit. A determination value generation device that sets a value related to the second abnormality diagnosis variable as the determination value in the determination value setting unit,
An abnormality diagnosis system characterized by comprising: In an abnormality diagnosis method for diagnosing a process state abnormality by using a first abnormality diagnosis variable obtained based on a physical quantity,
Generating physical quantity data when an abnormality occurs in the process state based on a set physical quantity related parameter;
Obtaining the second abnormality diagnostic variable by performing the same arithmetic processing on the physical quantity data as the arithmetic processing for obtaining the first abnormality diagnostic variable;
Setting a value related to the second abnormality diagnostic variable as a determination value for diagnosing the abnormality of the process state;
Diagnosing an abnormality in the process state based on a comparison result between the first abnormality diagnosis variable and the determination value;
An abnormality diagnosis method characterized by comprising:

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