JP2009097941A - Shape measuring device and surface state measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To measure accurately a surface shape, even in the case of a specimen having a mirror surface mixed with a diffusion surface. <P>SOLUTION: A floodlighting plate 2 diffuses each light from light sources 1-1 to 1-3 having each different light distribution characteristic by a large projection part 2a and a small projection part 2b, and floodlights it to a specimen 4. An angle measuring part 5b calculates a floodlighting angle θL based on the intensity ratio of each light reflected by the large projection part 2a of the floodlighting part 2, reflected on the specimen 4 imaged by an imaging part 3, relative to each light distribution characteristic. A trigonometry measuring part 5c measures the surface shape of the specimen 4 by trigonometry with a base line length Lb, an imaging angle θc and the floodlighting angle θL. An optical cutting method measuring part 5f controls a slit light emission part 7 for floodlighting to the specimen 4 so as to emit slit light, and measures by a shade on the specimen 4. A selection part 5e determines whether the surface is a diffusion surface or a mirror surface based on existence of recognition of the small projection part 2b reflected on the specimen 4, and selects an optical cutting method or trigonometry to measure the surface shape. This invention can be applied to a shape measuring device. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a shape measuring device and a surface state measuring device, and in particular, a shape measuring device that can measure the surface shape of a test object in which a mirror surface and a diffusion surface are mixed on the surface, and whether the surface is a mirror surface or a diffusion surface The present invention relates to a surface state measuring apparatus that can be used.

  A technique for measuring the surface shape of a test object is becoming widespread.

  As for the object surface of the test object, the measurement method is different between the diffusion surface and the mirror surface. On the diffusing surface, a method has been proposed in which the surface shape is measured from the shape of the slit light pattern that appears on the object surface by irradiating the object with slit light by a measurement method typified by the light cutting method.

  On the other hand, in the case of a mirror surface, by arranging a pattern plate at a position shifted by a predetermined angle with respect to the direction in which the test object is imaged with respect to the test object, by imaging the pattern reflected on the surface of the test object By measuring the reflection angle θ on the surface of the test object and measuring the angle θ / 2 as the normal angle of the surface of the test object, the surface shape is measured from the continuity by measuring the surface angle. Has been proposed (see Patent Documents 1 and 2 and Non-Patent Document 1).

Japanese Patent No. 3535352 JP 2006-214914 A Toyota Central R & D Review Vol.31, No.3

  However, since the surface of the test object may include a diffusing surface and a mirror surface, appropriate measurement may not be possible with only one of the methods.

  The above-described measurement of the surface shape on the mirror surface is a measurement method based on the premise that the change in the surface of the test object is sufficiently small, and therefore cannot be measured accurately if the change in the surface is large. There was a thing.

  The present invention has been made in view of such a situation. In particular, the present invention makes it possible to measure the surface shape with high accuracy even in a test object in which a mirror surface and a diffusion surface are mixed.

  The shape measuring apparatus according to the present invention generates a pattern having a plurality of different sizes, switched to a plurality of different light distribution characteristics, and having an inclination on the light distribution characteristics, and projecting the pattern onto a test object A plurality of patterns having different sizes based on image data captured by the imaging means, imaging means for imaging the test object on which the pattern from the pattern generation means is projected, and By determining whether or not a small pattern can be recognized, an estimation unit that estimates the surface state of the test object, and based on the estimation unit, either the first shape measurement unit or the second shape measurement unit And selecting means for selecting.

  According to one aspect of the present invention, it is possible to accurately measure the surface shape of a test object in which a mirror surface and a diffusion surface are mixed.

  FIG. 1 is a shape measuring apparatus showing a configuration example of an embodiment to which the present invention is applied.

  The shape measuring apparatus of FIG. 1 measures the surface shape of the test object 4 placed on the stage 6 in a non-contact manner.

  The light sources 1-1 to 1-3 are respectively provided with light emitting units 1a-1 to 1a-3, and emit light from different directions with respect to the light projecting plate 2 by the filters 1b-1 to 1b-3.

  The light projecting plate 2 is placed at a predetermined position on the upper surface of the stage 6 on which the test object 4 is placed. Further, the light projecting plate 2 is provided with large convex portions 2a-1 to 2a-n made of hemispherical diffusing surfaces on the surface facing the stage 6, and light emitted from the light sources 1-1 to 1-3, respectively. Fully diffuse reflection. The large convex portions 2a-1 to 2a-n can be individually identified by, for example, individually coloring the surface, and accordingly, the position on the light projecting plate 2 can be individually recognized by appearance. Can do. In addition, the light projecting plate 2 includes small convex portions 2b-1 to 2b-m made of a hemispherical complete diffusion surface at positions that become gaps between the large convex portions 2a-1 to 2a-n.

  In addition, about the large convex parts 2a-1 thru | or 2a-n, and the small convex parts 2b-1 thru | or 2b-m, when it is not necessary to explain each in particular, it is only the large convex part 2a and the small convex part 2b. Shall be referred to as Further, in FIG. 1, 16 large convex portions 2a and nine small convex portions 2b are shown in the drawing, but the diameter of the hemisphere constituting the large convex portion 2a is about several mm or less. As a matter of course, other numbers may be used. Further, the small convex portion 2b has a color scheme different from that of the large convex portion 2a. For example, when the large convex portion 2a is gray or black, the small convex portion 2b is colored red or the like.

  The imaging unit 3 includes an imaging element 3a such as a CCD (Charge Coupled Devices) or a CMOS (Complementary Metal Oxide Semiconductor), a lens 3b, and the like. Images are taken from a fixed angle, and the taken images are supplied to the shape measuring unit 5.

  The shape measurement unit 5 includes a light source control unit 5a, an angle measurement unit 5b, a triangulation measurement unit 5c, a surface determination unit 5d, a selection unit 5e, and a light cutting method measurement unit 5f. The shape measuring unit 5 manages the light emission timing of the light sources 1-1 to 1-3 and the information of the image captured by the imaging unit 3 in association with each other, and determines the surface shape of the test object 4 from the captured image. Each position is obtained by calculation. In addition, the shape measuring unit 5 operates the stage 6 in any combination of x, y direction, x, θ direction, or y, θ direction in the figure without changing the imaging direction of the camera 3. The entire test object 4 can be imaged. Needless to say, the stage 6 may be configured to operate in any of x, y, z, and θ so that the user can switch the operation direction. Further, in FIG. 1, only the shape measuring unit 5 is described as a functional block diagram, but the shape measuring unit 5 is configured by, for example, a so-called control board, and in FIG. The function of the shape measuring unit 5 realized by the control board is expressed as a functional block diagram.

  The light source control unit 5a controls the light emission timings of the light sources 1-1 to 1-3. The angle measuring unit 5b measures a projection angle θL described later. The trigonometric measurement unit 5c measures the distance from the surface of the test object 4 by trigonometry based on the image captured by the imaging unit 3, and generates information on the surface shape of the test object based on the information. To do.

  The surface determination unit 5d determines whether the surface of the test object 4 is a diffusion surface or a mirror surface based on the image captured by the imaging unit 3. The selection unit 5e causes the surface shape of the test object 4 to be measured by either the trigonometric measurement unit 5c or the light cutting method measurement unit 5f based on the determination result of the surface determination unit 5d. The light cutting method measuring unit 5f emits slit light (linear pattern light) or sine wave pattern light from the slit light emitting unit 7, and measures the surface shape of the test object 4 by the light cutting method.

  Since the light cutting method is a well-known technique, a description thereof will be omitted here. However, a mask using a laser light source, a directional light beam, and a predetermined transmittance distribution is mainly used. The test object 4 is irradiated with the light beam that has passed through. The image at that time is acquired by the imaging unit 3, and based on the image data obtained by the imaging unit 3, the position of the element of the imaging unit 3 where the image of the laser beam passing through the mask and illuminating the test object is obtained. Is calculated based on the image of the laser beam of the imaging unit 3, the position of the stage 6, and the irradiation direction of the laser beam. Details of the light cutting method are disclosed in, for example, P21 to P23 of “Latest optical three-dimensional measurement” (issued by Toru Yoshizawa, Asakura Shoten 2006/11/20).

  Further, the shape measuring apparatus of FIG. 1 is a dark box for shielding light emitted from the light sources 1-1 to 1-3 or outside light other than slit light or sine wave pattern light emitted from the slit light emitting unit 7. 11 is entirely covered.

  Next, the shape measurement process will be described with reference to the flowchart of FIG.

  In step S1, the light source control unit 5a of the shape measuring unit 5 controls the light source 1-1 to emit light. By this process, the light projecting plate 2 is illuminated from the slant by the light source 1-1. Therefore, depending on the difference between the illumination direction of the light source 1-1 and the normal direction of the surface at each position of each convex portion 2a, 2b, The brightness changes.

  For example, as shown in the uppermost part of FIG. 3, a pattern composed of a diffused light distribution in which the lower left part of each projection 2a, 2b in the figure is bright and the upper right part is darkly lit and the light distribution characteristics are inclined is obtained. Can do.

  The reason why such a light distribution pattern can be achieved is as follows. A cross section of one convex portion 2a is shown in FIG. When, for example, parallel light is incident on the convex portion 2a from the direction indicated by the solid line 101, a part of the parallel light is blocked by the slope of the convex portion 2a, so that the region A0 is illuminated. When the illuminated projection 2a is looked over from the direction opposite to the direction indicated by the dotted line 102, the range seen as the illuminated region is the range of the double arrow line A1, and the range seen as a shadow is the double arrow line B1. It becomes the range. In addition, when the viewing angle is changed and viewed from the direction opposite to the direction indicated by the one-point difference line 103, the range that can be seen as the illuminated area is the range of the double arrow line A2, and the range that appears as a shadow is the double arrow line B2. It becomes a range. When the angle to be looked at changes in this way, the ratio between the double arrow line A1 that is the area illuminated together and the double arrow line B1 that is the area that appears as a shadow, and the ratio between the double arrow line A2 and the double arrow line B2 change. Thus, it can be seen that the range that can be seen as the illuminated region changes when the angle over which the convex portion 2a looks is changed. On the other hand, the same change occurs even if the angle of view is constant and the irradiation angle changes. The state of the change is shown in FIG. Therefore, the light distribution characteristic of the light projecting plate 2 can be changed by changing the direction in which the light projecting plate 2 is illuminated.

  On the other hand, in the present shape measuring apparatus, an image of the light projection plate 2 having such a brightness distribution is reflected on a test object whose surface is a mirror surface. Accordingly, the light projecting plate 2 projects light by reflection in the example shown in FIG. 1, but it is sufficient that the same light can be projected. For example, a light source is provided at the upper part in the drawing to transmit light. Accordingly, diffused light having a similar distribution may be projected onto the test object 4.

  In step S <b> 2, the imaging unit 3 is a first image including each of the large convex portion 2 a and the small convex portion 2 b of the light projecting plate 2 reflected on the surface of the test object 4 in a state where the light source 1-1 emits light. Image. By adjusting the lens 3 b of the imaging unit 3, the in-focus position imaged by the imaging device 3 a is the surface of the light projecting plate 2. For this reason, the imaging unit 3 captures an image including the test object 4 and also images the light projection plate 2 reflected on the surface of the test object 4.

  In step S3, the light source control unit 5a of the shape measuring unit 5 controls the light source 1-2 to emit parallel light from a position different from the light source 1-1. By this processing, for example, as shown in the middle part of FIG. 3, the upper right portion in the drawing of each large convex portion 2a is reflected brightly and the lower left portion is reflected darkly. The light projecting plate 2 emits light as if tilted.

  In step S <b> 4, the imaging unit 3 is a second image including each of the large convex portion 2 a and the small convex portion 2 b of the light projecting plate 2 reflected on the surface of the test object 4 in a state where the light source 1-2 emits light. Image.

  In step S5, the light source control unit 5a of the shape measuring unit 5 controls the light source 1-3 to emit parallel light from a position different from the light sources 1-1 and 1-2. By this processing, for example, as shown in the lowermost stage of FIG. 3, the right lower portion in the figure of each large convex portion 2a is reflected brightly and the upper left portion is reflected darkly. The light projecting plate 2 emits light as if.

  In step S <b> 6, the imaging unit 3 is a third image including each of the large convex portion 2 a and the small convex portion 2 b of the light projecting plate 2 reflected on the surface of the test object 4 in a state where the light source 1-3 emits light. Image.

  In step S7, the surface determination unit 5d sets a region where the test object 4 is reflected in each of the three images acquired in the previous step, and further subdivides the region where the test object 4 is reflected, An area for measuring the position of the surface of the test object 4 is set. In the embodiment of the present invention, the imaging region of the test object 4 is determined as the measurement region sequentially from the end.

  In step S8, the surface determination unit 5d analyzes the first image to the third image for the image in which the region for measuring the position of the surface is reflected, and whether or not the small convex portion 2b in the vicinity of the processing target region can be recognized. Determine. The small convex part 2b should be reflected in the vicinity of the large convex part 2a reflected in the test object 4. Therefore, it is recognized by a well-known pattern matching technique whether or not the small convex portion 2b exists in the image data in the vicinity of the large convex portion 2a.

  By the way, when the minute range on the test object 4 in which the large convex part 2a is reflected is a mirror surface, the surface determination part 5d is the first even if the small convex part 2b is smaller than the large convex part 2a. In all of the images to the third images, it is possible to recognize that, for example, four adjacent small convex portions 2b are reflected in the same manner as the large convex portion 2a. On the other hand, for example, when the minute range on the test object 4 in which the large convex portion 2a is reflected is a diffusion surface, the small convex portion 2b is smaller than the large convex portion 2a, and based on the Lambert law, Since the diffuse reflection is reduced depending on the reflection angle, the surface determination unit 5d reflects the small convex portion 2b in the same manner as the large convex portion 2a in all or any of the first to third images. It becomes difficult to recognize that it is crowded. In addition, since the color scheme of the small convex portion 2b is provided for easy recognition, the color scheme is not necessarily different from that of the large convex portion 2a as long as it can be recognized by the contrast in the first to third images.

  Therefore, in step S8, in any of the first image to the third image, when the presence of the small convex portion 2b can be recognized, that is, it is determined that the surface of the test object 4 in the processing target region is a mirror surface. In this case, in step S9, the angle measurement unit 5b determines which convex portion 2a of the light projecting plate 2 is reflected in the measurement region based on the first image to the third image. Specifically, referring to the feature amount of each large convex portion 2a stored in advance in the storage unit (not shown) of the shape measuring unit 5 and the image information corresponding to the measurement region, which large convex portion Specify whether 2a is reflected. Next, the positional information of the specified large convex portion 2 a is acquired from the storage unit provided in the shape measuring unit 5. This position information is also stored in advance in the storage unit. Then, the length and direction of the base line length Lb shown in FIG. 1 are calculated based on the acquired position information. Further, θc is calculated based on the distance between the pixel in the target measurement region and the pixel on the optical axis and the focal length of the lens 3b. The angle θc is the same as the angle formed by a line ax connecting the pixel in the target measurement region and the target measurement region with a straight line ignoring refraction by the lens 3b and the base line length Lb. Further, the corresponding pixels of the target measurement region and the position information of the stage 6 are acquired, and the two-dimensional coordinate value of the measurement region on the plane with the optical axis of the lens 3b as the normal line is acquired.

  Further, the angle measuring unit 5b calculates the direction of the surface of the target measurement region. As a calculation method, calculation is performed based on the amount of received light of the corresponding pixels of the first image to the third image. For example, when the scattered light reflected from the light projecting plate 2 at the time of acquiring the first image is specularly reflected in the target measurement region and enters the lens 3b, the received light amount of the target pixel is the largest, and conversely from the specular reflection condition. As it moves away, the amount of light received decreases. Therefore, in the embodiment of the present invention, the three light sources 1-1, 1-2, and 1-3 that are not arranged on the same straight line are used to illuminate the light projecting plate 2 to reproduce different light distribution characteristics. The direction of the three-dimensional surface of the target measurement region is calculated by photographing the test object 4 in which the light distribution characteristic is reflected. Therefore, the received light amount of the pixel in the target measurement area in the three obtained images was acquired, and the surface direction of the target measurement area was specified.

For example, when the angle on the XY plane in the normal direction of the target measurement region is θx-y and the angle on the YZ plane is θy-z, the light distribution characteristic of the light projecting plate 2 is illuminated by the light source 1-1. In this case, the light distribution characteristic is assumed to be f1 (θx-y, θy-z). Similarly, the light distribution characteristic when illuminated with the light source 1-2 is f2 (θx-y, θy-z), and the light distribution characteristic when illuminated with the light source 1-3 is f3 (θx-y, θy-z). ). On the other hand, assuming that the amounts of light received by the imaging unit 3 when the light projecting plate 2 is illuminated by the three light sources 1-1 to 1-3 are Rp1 to Rp3, respectively, the following equations (1) to (3) Thus, three simultaneous equations with two unknowns are obtained.
Rp1 ＝ f1 (θx-y, θy-z)
... (1)
Rp2 = f2 (θx-y, θy-z)
... (2)
Rp3 = f3 (θx-y, θy-z)
... (3)

  Although there are only two unknowns, three simultaneous equations are required if there are only two light distribution characteristics. When the light projection plate 2 is illuminated with two light sources, Since the light distribution pattern is a rotation target around the axis in the same direction as the angle direction just between the specular reflection directions by the light plate 2, the sign of the angles θx-y and θy-z cannot be determined. It is.

  Further, if the light distribution characteristic of the light projecting plate 2 changes linearly with respect to the angle with respect to the light projecting axis, the angle of the surface of the target measurement region can be obtained as follows.

The relationship between the received light quantity obtained with one light source and the angle θ _{a in} the normal direction of the target measurement area on one plane including the projection axis is regarded as Rp1 = θ _a, and the received light quantity obtained with another light source And the angle θ _{b in} the normal direction of the target measurement region on the plane orthogonal to the projection axis is taken as Rp2 = θ _a · θ _b . Θ _a and θ _b are obtained from these two equations, and when the angles θ _a and θ _b both exceed 90 °, two or more solutions appear. For this reason, it is necessary to prepare another light distribution pattern in order to determine one of these.

  Actually, the light distribution characteristic is close to that of a spheroid, and can be derived by adding the following equation (4) and rotational transformation.

r ² = a ² sin ² θ _b・ cos ² θ _a + b ² sin ² θ _b・ sin ² θ _a + c ² cos ² θ _b
... (4)

  Instead of analytically obtaining the solution in this way, a lookup table prepared in advance may be prepared, and the direction of the surface of the target measurement region may be obtained from each received light amount.

Then, based on the surface direction of the target measurement region and the positional information of the projected portions 2a-x, the direction of the imaging unit 3 and the direction of the projected portions 2a-x with respect to the target measurement region Q Obtain the formed angle θ _O.

In step S10, at an angle θc and the angle theta _O obtained in step S9, obtaining the angle θL of the line and the base line length Lb connecting the Daitotsu portion 2a which is reflected on the object measuring region and the target measurement area To do.

  In step S11, the coordinate position in the direction parallel to the optical axis ax is acquired based on the trigonometry based on θL, θc and the baseline length Lb acquired in the previous step S9 and step S10, and the spatial area of the measurement target region is acquired. Coordinate values can be acquired.

  On the other hand, when the small convex portion 2b cannot be recognized in step S8, that is, when it is determined that the surface of the test object 4 in the processing target region is a diffusion surface, in step S13, the selection unit 5e For example, the height from the surface of the stage 6 at the position Q of the test object 4 is obtained as surface shape information by the light cutting method measurement unit 5f corresponding to the case where the surface of 4 is a diffusion surface.

  By this determination, the light cutting method measuring unit 5 f emits linear pattern light (slit light) from the slit light emitting unit 7 and operates the stage 6 while processing the test object 4 imaged by the imaging unit 3. The surface shape of the test object 4 is measured by the shadow of the surface of the target minute region.

  In step S <b> 12, the shape determination unit 5 determines whether or not an area that is not a processing target remains in the range in which the test object 4 in each image is captured. For example, when an area that is not a processing target remains, the process returns to step S7. That is, the processes in steps S7 to S13 are repeated until there are no unprocessed areas that are not to be processed. When there are no unprocessed areas that are not to be processed, the process ends.

  In the above description, an example in which measurement is performed by switching the trigonometric method or the light cutting method for each processing region has been described. However, whether the entire region is a diffusion surface or a mirror surface is previously measured for each region. Then, the entire area of the mirror surface may be measured all at once by the trigonometric method, and the entire area of the diffusion surface may be measured all at once by the light cutting method. In addition, for the diffusing surface, the example using the light cutting method has been described above. However, if the surface shape on the diffusing surface can be measured, the light cutting method is not necessarily used. Or a Fourier transform method.

  In addition, the light projecting plate 2 in the present embodiment forms a plurality of patterns having different light distribution characteristics by illuminating the large convex portions 2a having a symmetrical shape from different directions. In particular, if the large convex portion 2a is a rotationally symmetric shape that is axially symmetric, the position of the illuminating means that illuminates the light projecting plate 2 does not need to be strictly positioned. It is possible to calculate the inclination direction of the surface of the inspection object.

  Furthermore, as long as at least three types of patterns having different light distribution tendencies other than the light projecting plate 2 can be generated, it does not matter.

  For example, the shape measuring apparatus illustrated in FIG. 5 may be used. In this shape measuring apparatus, the light projecting plate 2 made of a transparent material may be used as the light projecting plate 2. Of course, the surface on which the large convex portions 2a of the light projecting plate 2 are formed is a diffusing surface, while the opposite surface is a smooth surface. And the light source 1 was installed so that the light of a light source may enter from the smooth surface of the light projection plate 2. FIG. The light source 1 is supported by the main body via a light source position moving mechanism 8. The light source position moving mechanism 8 can move the light source to at least three positions. In addition, the position where the light source can be moved is a position that does not line up on the same straight line. In the shape measuring apparatus having such a configuration, it is possible to change the light distribution characteristics of the light projecting plate 2 by appropriately changing the position of the light source 1. Further, the position of the light source may be changed by changing the amount of change in the position of the light source in accordance with the measurement accuracy regarding the tilt direction of the surface of the test object.

  Further, the large convex portion 2a of the light projecting plate 2 has been described with respect to the hemispherical example. However, as long as it can reflect light from the light source 1 symmetrically with respect to an axis perpendicular to the light projecting plate 2. Since it is good, you may make it comprise with another axially symmetrical convex part or a recessed part.

  By the above processing, when the surface of the test object 4 imaged by the imaging unit 3 is a mirror surface and the reflected small convex part 2b can be observed, the stage at the position Q of the test object 4 is obtained as a surface shape by triangulation. 6 is obtained as surface shape information, and the surface of the test object 4 imaged by the imaging unit 3 is a diffusing surface, and the reflected small convex portion 2b cannot be observed, and the sufficiently large convex portion. When 2a is not reflected, the height from the surface of the stage 6 at the position Q of the test object 4 is obtained as surface shape information as the surface shape by the light cutting method.

  As a result, the surface shape can be measured with high accuracy regardless of whether the test object has a mirror surface. In addition, even if a mirror surface and a diffusing surface are mixed on the surface of the test object, the surface shape is adaptively measured for the mirror surface and the diffusing surface according to the surface condition such as trigonometry and light cutting method, respectively. Therefore, it is possible to measure the surface shape with high accuracy.

  In the present specification, the steps for describing the processing are executed in parallel or individually even if processing that is performed in chronological order according to the described order is, of course, not necessarily processed in chronological order. It includes processing.

It is a block diagram which shows the structural example of one Embodiment of the shape measuring apparatus to which this invention is applied. It is a flowchart explaining a shape measurement process. It is a figure explaining the light projection plate which projects on the test object by reflecting the light light-emitted by the light source. It is a figure explaining a light distribution characteristic. It is a block diagram which shows the modification of the shape measuring apparatus to which this invention is applied.

Explanation of symbols

  1-1 to 1-3 light source, 2 projector plate, 2a, 2a-1 to 2a-n large convex part, 2b, 2b-1 to 2b-m small convex part, 3 imaging part, 4 test object, 5 shape Measurement unit, 5a Light source control unit, 5b Angle measurement unit, 5c Triangulation measurement unit, 5d Diffusion determination unit, 5e Selection unit, 5f Light cutting method measurement unit

Claims (7)

A pattern generating means for generating a pattern having a plurality of different sizes, being switched to a plurality of different light distribution characteristics, and having an inclination to the light distribution characteristics, and projecting the pattern onto a test object,
Imaging means for imaging the test object on which the pattern from the pattern generation means is projected;
Estimation that estimates the surface state of the test object by determining whether or not a small pattern can be recognized among the plurality of patterns having different sizes based on the image data captured by the imaging unit. Means,
A shape measuring apparatus comprising: a selecting unit that selects one of the first shape measuring unit and the second shape measuring unit based on the estimating unit. The first shape measurement unit specifies a position on the pattern generation unit corresponding to a pattern reflected on the surface of the test object based on the image data captured by the imaging unit, and the specified First calculation means for specifying the position of the surface of the test object according to the position on the pattern means and the position imaged by the imaging means;
In each of the plurality of different light distribution characteristics, based on a plurality of image data imaged by the imaging means, having a surface direction measuring means for measuring the tilt direction of the surface of the test object,
The second shape measuring unit is a directional light projecting unit that projects a light beam having directivity onto the test object based on a selection result of the selecting unit;
Second calculation means for measuring the surface shape of the test object based on image data obtained by imaging the test object projected by the directional light projection unit with the imaging means; The shape measuring apparatus according to claim 1. The shape measuring apparatus according to claim 2, wherein the second light projecting unit projects sinusoidal pattern light or linear pattern light. The shape measuring apparatus according to claim 1, wherein the pattern generation unit includes a light projecting plate having a plurality of concave or convex solid shapes on a diffusion surface, and an illumination unit that illuminates the light projecting plate. . The shape measuring apparatus according to claim 4, wherein the concave portion or the convex portion formed on the light projecting plate has an axisymmetric shape. The shape measuring apparatus according to claim 1, further comprising a light blocking unit that blocks external light. A pattern generating means for generating a pattern having a plurality of different sizes, being switched to a plurality of different light distribution characteristics, and having an inclination to the light distribution characteristics, and projecting the pattern onto a test object,
Imaging means for imaging the test object on which the pattern from the pattern generation means is projected;
A surface condition measuring device comprising: surface determining means for determining the surface condition of the test object based on the image data picked up by the image pickup means.

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