JP2009083195A - Imprint method and data recording medium manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To positionally align a stamper and a base material with each other with high precision without performing troublesome positional aligning work. <P>SOLUTION: When an uneven pattern reverse to the uneven pattern on a stamper side in uneven positional relation is formed to an intermediate body 10 having a center hole 10h formed thereto using a stamper 30 having a center hole 30h and the uneven pattern on the stamper side formed thereto and an imprinting device 1 having a fixed base stand 2, to which a positional aligning shaft member 5 is provided in a protruded state, and a movable base stand 3, A-arranging processing for arranging the intermediate body 10 and the stamper 30 on the base stand 2 so as to insert the shaft member 5 through the center holes 10h and 30h, A-positional aligning processing for elastically deforming the shaft member 5 so as to press the outer peripheral part thereof to the inner surfaces of the center holes 10h and 30h and transfer processing for pressing the stamper 30 to the intermediate body 10 by allowing the base stand 3 to approach the base stand 2 to transfer the uneven pattern on the stamper side to the intermediate body 10 are executed in this order. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an imprint method for forming a concavo-convex pattern in which a concavo-convex positional relationship with a stamper-side concavo-convex pattern is reversed by pressing a stamper on one surface of a substrate, and manufacturing an information recording medium by forming the concavo-convex pattern according to the imprint method The present invention relates to an information recording medium manufacturing method.

  In the imprint process in which the stamper side uneven pattern is pressed against one surface of the substrate (for example, a resin layer formed on the substrate) and the stamper side uneven pattern is transferred to the substrate, in general, The stamper is fixed to one of the pair of bases in the press device for imprint processing with a bolt or the like, and the press process is performed in a state where the base material is aligned with the other of the pair of bases To do. In this case, for example, in the imprint process at the time of manufacturing an information recording medium such as a magnetic recording medium, the center of the base material (for example, the rotation center when used as the information recording medium) and the center of the stamper (concentric circular shape) Alternatively, it is necessary to transfer the stamper-side concavo-convex pattern in a state where the center of the spiral stamper-side concavo-convex pattern is accurately aligned. Therefore, when the stamper is fixed to the base, for example, an optical position measuring device is used to measure and align the stamper with respect to the base.

  Moreover, in the conventional general press apparatus, the structure which fixes a stamper with a volt | bolt etc. with respect to a base as mentioned above is employ | adopted. Therefore, when the stamper wears out and needs to be replaced with a new stamper, it is necessary to first loosen the fixing bolt to remove the worn stamper and tighten the bolt to fix the new stamper. Become. For this reason, in combination with the above-described alignment operation, the conventional general imprint method has a problem that it takes a very long time to replace the stamper. Therefore, various imprint methods (press devices) have been proposed to solve such problems.

  For example, in Japanese Translation of PCT International Publication No. 2005-529436, a layer formed on the first surface of a base material is used by using a press device having centering means (positioning shaft member: hereinafter also referred to as “shaft member”). A pattern transfer method (hereinafter also referred to as “transfer method”) for transferring the structure (uneven pattern) of the pressing means (hereinafter also referred to as “stamper”) is disclosed. In this case, the shaft member is processed so that the tip end becomes a conical shape by cutting using a lathe, and is arranged so that the tip end protrudes upward from the first holding means in a non-pressed state. ing. Further, the press device includes a first holding means in which the shaft member is inserted in the central portion, and a second holding means arranged to face the first holding means, and the shaft member and the second holding means are provided. The first holding means can be moved up and down with respect to the means. This press apparatus is configured to be able to transfer the concave / convex pattern of the stamper to the layer of the base material by pressing the base material and the stamper between the first holding means and the second holding means.

  In the transfer method using this press apparatus, first, the base member and the stamper are arranged in this order on the first holding means so that the shaft member penetrates the through hole (through hole). In this case, the through-hole (first through-hole) formed in the stamper is formed at the center of the stamper so that the hole diameter is approximately the same as the diameter on the tip end side of the shaft member. In addition, the through hole (second through hole) formed in the base material has a diameter larger than that of the through hole formed in the stamper, and slightly smaller than the diameter of the base end side of the shaft member. It is formed at the center of the substrate so that Therefore, when the base material and the stamper are arranged on the first holding means in this order, the base member is separated from the first holding means, and the shaft member is separated from the base material. Supports the substrate and the stamper. In addition, since the tip of the shaft member is processed into a conical shape, the center of the stamper and the center of the base material are aligned with the center of the shaft member. As a result, the center of the base material and the stamper (both through holes) (Center) matches.

Next, the first holding means is moved toward the second holding means. In this case, first, the first holding means comes into contact with the base material, and in this state, the first holding means is further moved toward the second holding means, so that the base material moves toward the stamper together with the first holding means. Move. Thereby, a base material (layer formed in the 1st surface) contacts the uneven | corrugated pattern of a stamper. When the first holding means is further moved in this state, the base material and the stamper move toward the second holding means together with the first holding means, and the stamper contacts the second holding means through the seal ring. . Subsequently, the stamper is pressed toward the substrate by filling the chamber (a space formed by the stamper, the seal ring and the second holding means) with a gas through the conduit. Thereby, the uneven | corrugated pattern of a stamper is transcribe | transferred to the layer of a base material.
Japanese translation of PCT publication No. 2005-529436 (page 8, FIG. 1)

  However, the conventional transfer method has the following problems. That is, in the conventional transfer method, the base material and the stamper center are aligned with the center of the shaft member by setting the base material and the stamper in this order on the shaft member whose tip is processed into a conical shape. The press device is configured to transfer the concave / convex pattern of the stamper to the base layer. However, in the transfer method using the conventional press apparatus, when the first holding means is moved toward the second holding means, the first holding means comes into contact with the base material and then the base material is formed on the uneven pattern of the stamper. Until the contact occurs, the base material is not fixed to any part (the base material is merely placed on the first holding means).

  Therefore, in the conventional transfer method, the first holding is performed after the base material comes into contact with the first holding means as the first holding means rises until the base material layer comes into contact with the uneven pattern of the stamper. The base material may be displaced with respect to the means. In this case, the center of the base material is misaligned with respect to the center of the shaft member (ie, the center of the stamper aligned with the center of the shaft member). Will be. For this reason, in the conventional transfer method, the center of the base and the center of the stamper are aligned with each other even though the center of the base and the center of the stamper are aligned by the shaft member prior to pressing the stamper against the base. There is a problem that the uneven pattern of the stamper may be transferred to the layer of the base material in a misaligned state, and the misregistration amount changes with each transfer process.

  The present invention has been made in view of such a problem, and provides an imprint method and an information recording medium manufacturing method capable of aligning a stamper and a substrate with high accuracy while eliminating a complicated alignment operation. The main purpose.

  In order to achieve the above object, an imprint method according to the present invention includes a stamper on which a stamper-side center hole is formed and a stamper-side uneven pattern is formed, and a first base on which an alignment shaft member protrudes. And an imprint apparatus having a second base disposed so as to be capable of relative contact and separation with respect to the first base, on one surface of the base material on which the base-side center hole is formed When the concave / convex pattern in which the stamper side concave / convex pattern is transferred and the concave / convex positional relationship with the stamper side concave / convex pattern is reversed is formed on the one surface of the base material, the alignment shaft member is inserted into the center holes. A placement processing for placing the base material and the stamper on the first base in such a manner that the outer peripheral portion of the positioning shaft member is pressed against the inner surfaces of the center holes. A positioning process for elastically deforming the positioning shaft member and the second base relative to the first base relative to the one surface of the base member The stamping process is performed in this order by pressing the stamper and transferring the stamper side uneven pattern onto the one surface.

  In the imprint method according to the present invention, the base material and the stamper are arranged on the first base in this order during the A placement process, and the stamper is placed after the transfer process is completed. In a state where the second base is held with respect to the first base, a peeling process for peeling the stamper from the base material is performed by separating the second base relative to the first base.

  Furthermore, the imprint method according to the present invention is a new method in which the alignment shaft member is inserted into the center hole in place of the base material on which the formation of the concavo-convex pattern is completed after the peeling process is completed. B placement processing for placing the base material on the first base, and elastically deforming the positioning shaft member so as to press the outer peripheral portion of the positioning shaft member against the inner surface of the center hole The B alignment process to be performed and the transfer process are executed in this order.

  The imprint method according to the present invention includes a stamper in which a stamper side center hole is formed and a stamper side uneven pattern is formed, a first base on which an alignment shaft member is protruded, and the first The stamper side unevenness is formed on one surface of the base material on which the base-side center hole is formed, using an imprint apparatus having a second base that is disposed so as to be capable of moving relative to and from the base. When the concave / convex pattern in which the concave / convex positional relationship with the stamper side concave / convex pattern is reversed is formed on the one surface of the base material, the alignment shaft member is inserted into the stamper side central hole. C placing process for placing the stamper on the first base, and pressing the outer peripheral portion of the positioning shaft member against the inner surface of the center hole on the stamper side The C alignment process for elastically deforming the alignment shaft member and the second base is brought into contact with the stamper by bringing the second base relatively close to the first base. A holding process for bringing the stamper into contact with the second base, and the positioning shaft member after the second base is relatively spaced from the first base. D placement processing for placing the base material on the first base so as to be inserted through the base-side center hole, and the outer peripheral portion to be pressed against the inner surface of the base-side center hole D alignment processing for elastically deforming the alignment shaft member, and the stamper is pressed against the one surface of the substrate by relatively approaching the second base to the first base. Transfer stamper side uneven pattern onto the surface A transfer process that is executed in this order.

  In the imprint method according to the present invention, the second base is relative to the first base in a state where the stamper is held on the second base after the transfer process is completed. A separation process is performed to separate the stamper from the base material.

  Furthermore, the imprint method according to the present invention is a new method in which the alignment shaft member is inserted into the center hole in place of the base material on which the formation of the concavo-convex pattern is completed after the peeling process is completed. The E placement processing for placing the base material on the first base, the D alignment processing, and the transfer processing are executed in this order.

  In the imprint method according to the present invention, the stamper is sucked and held on the second base.

  Furthermore, in the imprint method according to the present invention, the stamper is held on the second base by static electricity.

  Further, in the imprint method according to the present invention, the positioning shaft member has a larger diameter on the base end side in the protruding portion than the diameter on the tip end side in the protruding portion from the first base. And the base material and the stamper are arranged such that one of the center holes disposed on the first base side is larger in diameter than the other center hole disposed on the second base side. The imprint apparatus, the base material, and the stamper that are formed to include the alignment shaft member are used.

  Furthermore, in the imprint method according to the present invention, at least one of gas and liquid is supplied to the internal space formed in the alignment shaft member, and the alignment shaft member is expanded and elastically deformed.

  Moreover, the information recording medium manufacturing method according to the present invention forms the concavo-convex pattern on the one surface of the substrate, the concavo-convex pattern in which the concavo-convex positional relationship is reversed with the stamper-side concavo-convex pattern according to any of the imprint methods, An information recording medium is manufactured using the formed uneven pattern.

  In the imprint method according to the present invention, an A placement process in which the base member and the stamper are placed on the first base so that the shaft member for alignment is inserted into both center holes, and the shaft member for alignment A positioning processing for elastically deforming the positioning shaft member so that the outer peripheral portion is pressed against the inner surfaces of both center holes, and by bringing the second base relatively closer to the first base The stamper is pressed on one surface of the base material and a transfer process for transferring the stamper-side uneven pattern to the one surface is executed in this order to form an uneven pattern on the surface of the base material in which the uneven positional relationship is reversed with the stamper-side uneven pattern. . Further, in the information recording medium manufacturing method according to the present invention, a concavo-convex pattern whose concavo-convex positional relationship is reversed with the stamper-side concavo-convex pattern according to the imprint method is formed on one surface of the substrate, and the formed concavo-convex pattern is used. An information recording medium is manufactured.

  Therefore, according to the imprint method and the information recording medium manufacturing method, the center of the base material side central hole in the base material and the center of the stamper side central hole in the stamper are used for alignment by elastic deformation of the alignment shaft member. Since the stamper side uneven pattern of the stamper can be pressed and transferred to one surface of the substrate in a state where it matches the center of the shaft member (the substrate and stamper are aligned), the uneven pattern is formed on one surface of the substrate. It can be formed with high accuracy without decentering (a concavo-convex pattern in which the concavo-convex positional relationship is reversed with the stamper-side concavo-convex pattern). Further, according to the imprint method and the information recording medium manufacturing method, the alignment shaft member is expanded and elastically compared with the conventional imprint method in which the stamper is aligned using an optical position measuring device. Since the stamper can be aligned with respect to the substrate simply by being deformed, the time required for the alignment operation can be sufficiently shortened. As a result, the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  According to the imprint method of the present invention, the base material and the stamper are arranged in this order on the first base during the A placement process, and the stamper is used as the second base after the transfer process is completed. The base material is separated from the imprint apparatus by performing a peeling process for peeling the stamper from the base material by separating the second base relative to the first base in the held state. Since the stamper can be peeled off from the base material on which the stamper side uneven pattern has been transferred without using the equipment for peeling off the stamper, the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  Further, according to the imprint method of the present invention, after the peeling process is completed, the alignment shaft member is inserted into the central hole instead of the base material on which the formation of the uneven pattern is completed, and a new base material is formed. B arrangement processing arranged on the first base, B alignment processing for elastically deforming the alignment shaft member so as to press the outer peripheral portion of the alignment shaft member against the inner surface of the center hole, and transfer By performing the processes in this order, the stamper side uneven pattern transfer process can be performed without replacing the stamper by simply replacing the base material. For this reason, according to this imprint method, the time required for the imprint process on the second and subsequent substrates can be further shortened, and therefore the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  Further, in the imprint method according to the present invention, in the alignment shaft member, the C arrangement process of arranging the stamper on the first base so that the alignment shaft member is inserted into the stamper side center hole, and the alignment shaft member C alignment processing for elastically deforming the alignment shaft member so that the outer peripheral portion is pressed against the inner surface of the stamper side center hole, and the second base relative to the first base In the holding process of bringing the second base into contact with the stamper and holding the stamper on the second base, alignment is performed after the second base is relatively separated from the first base. D placement processing for placing the base material on the first base so that the shaft member for insertion is inserted into the base-side center hole, and the outer peripheral portion is pressed against the inner surface of the base-side center hole D position for elastically deforming the alignment shaft member And a transfer process in which the stamper is pressed on one surface of the base by moving the second base relatively close to the first base and the stamper side uneven pattern is transferred to the one surface in this order. This is executed to form a concavo-convex pattern in which the concavo-convex positional relationship is reversed with respect to the stamper-side concavo-convex pattern on one surface of the substrate. Further, in the information recording medium manufacturing method according to the present invention, a concavo-convex pattern whose concavo-convex positional relationship is reversed with the stamper-side concavo-convex pattern according to the imprint method is formed on one surface of the substrate, and the formed concavo-convex pattern is used. An information recording medium is manufactured.

  Therefore, according to the imprint method and the information recording medium manufacturing method according to the present invention, the center of the base material side center hole in the base material and the center of the stamper side center hole in the stamper are caused by elastic deformation of the alignment shaft member. Since the stamper side uneven pattern of the stamper can be pressed and transferred to one surface of the substrate in a state where it is aligned with the center of the alignment shaft member (the substrate and the stamper are aligned), one surface of the substrate In addition, the concave / convex pattern (the concave / convex pattern in which the concave / convex positional relationship is reversed with the stamper side concave / convex pattern) can be formed with high accuracy without decentering. Further, according to the imprint method and the information recording medium manufacturing method, the alignment shaft member is expanded and elastic compared with the conventional imprint method in which the stamper is aligned using the optical position measuring device. By aligning the stamper and base material with respect to the alignment shaft member simply by deforming, the base material and stamper can be aligned with each other, so the time required for alignment work can be sufficiently shortened. As a result, the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  Further, according to the imprint method of the present invention, the second base is relatively separated from the first base in a state where the stamper is held on the second base after the transfer process is completed. In this way, the stamper side uneven pattern transfer is completed without using a facility for peeling the stamper from the substrate separately from the imprint apparatus by performing a peeling process for peeling the stamper from the substrate. Since the stamper can be peeled off from the material, the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  Further, according to the imprint method of the present invention, after the peeling process is completed, the alignment shaft member is inserted into the center hole instead of the base material on which the formation of the concavo-convex pattern is completed. By performing the E placement process, the D alignment process, and the transfer process, which are arranged on the first base, in this order, the stamper can be replaced without replacing the stamper. The side uneven pattern transfer process can be executed. For this reason, according to this imprint method, the time required for the imprint process on the second and subsequent substrates can be further shortened, and therefore the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  Further, according to the imprint method according to the present invention, the stamper is replaced by sucking the stamper and holding it on the second base, for example, as compared with the conventional imprint method in which the stamper is fixed by a bolt. Since the time required for the work (exchange time) can be shortened, the manufacturing cost of the magnetic recording medium can be sufficiently reduced. Further, for example, when using a metal stamper that is difficult to fix due to static electricity or the like, the stamper can be securely fixed to the second base.

  Furthermore, according to the imprint method according to the present invention, the stamper is replaced by an operation of holding the stamper on the second base by static electricity, as compared with the conventional imprint method of fixing the stamper with a bolt, for example. Since the time required for replacement (replacement time) can be shortened, the manufacturing cost of the magnetic recording medium can be sufficiently reduced. Further, unlike the method of sucking and fixing the stamper, for example, there is no possibility that the stamper is deformed by the suction force, so that when the thin stamper is used, the stamper side uneven pattern can be transferred with high accuracy.

  Further, according to the imprint method of the present invention, the alignment shaft member having a larger diameter on the proximal end side in the protruding portion than in the distal end side in the protruding portion from the first base. And the center hole arranged on the first base side of the base material and the stamper is larger than the other center hole arranged on the second base side. By using a base material and a stamper formed so as to have a diameter, the stamper can be maintained in a non-contact state with respect to the base material when the A arrangement processing is completed. Prior to the start, it is possible to avoid a situation in which the stamper side uneven pattern of the stamper comes into contact with one surface of the substrate and the surface is damaged.

  Further, according to the imprint method of the present invention, by supplying at least one of gas and liquid to the internal space formed in the alignment shaft member, the alignment shaft member is expanded and elastically deformed. While the structure is relatively simple, the base material and the stamper can be aligned, and the time required for elastic deformation of the alignment shaft member can be sufficiently shortened. Therefore, according to this imprint method, the manufacturing cost of the magnetic recording medium can be sufficiently reduced.

  The best mode of an imprint method and an information recording medium manufacturing method according to the present invention will be described below with reference to the accompanying drawings.

  First, the configuration of an imprint apparatus 1 that executes imprint processing according to the imprint method according to the present invention will be described with reference to the drawings.

  An imprint apparatus 1 shown in FIG. 1 has a mask for etching treatment on one surface of a substrate according to an imprint method according to the present invention when a magnetic disk 100 (see FIG. 2) as an example of an information recording medium in the present invention is manufactured. (Not shown) can be formed. In this case, the magnetic disk 100 is a discrete track medium (an example of a patterned medium) that is housed in a housing together with a control device, a magnetic head, a motor, and the like (not shown) to form a hard disk drive, as shown in FIG. The soft magnetic layer 12, the intermediate layer 13, and the magnetic layer 14 are formed in this order on the first surface 11a of the glass substrate 11, and as an example, recording data can be recorded by the perpendicular recording method. In the figure, in order to facilitate understanding of the present invention, a state in which the magnetic layer 14 and the like are formed only on the first surface 11a side of the glass substrate 11 is illustrated. The magnetic layer 14 and the like are also formed on the second surface 11b of the substrate 11 in the same manner as the first surface 11a. Further, in FIG. 3 and FIG. 3 to be referred later, in order to facilitate understanding of the present invention, the ratio of the thickness of each layer is shown in a ratio different from the actual ratio.

Further, in this magnetic disk 100, as an example, a plurality of convex portions 21 formed with a magnetic material (magnetic layer 14) on the protruding end side (upper end side in the figure) and concave portions between adjacent convex portions 21 are provided. 22 are formed, and a concave / convex pattern 20 constituting a data track pattern or a servo pattern is formed. Further, nonmagnetic material 15 such as SiO ₂ , C (carbon), nonmagnetic metal material, and resin material is embedded in each concave portion 22 of the concavo-convex pattern 20, thereby flattening the surface of the magnetic disk 100. ing. Further, in this magnetic disk 100, the surface of the nonmagnetic material 15 embedded in each recess 22 (embedded between adjacent protrusions 21, 21) and the magnetic layer 14 (protrusion 21) is covered. Thus, the protective layer 16 (DLC film) is formed of diamond-like carbon (DLC) or the like. Further, a lubricant (for example, a fluorine-based lubricant) for avoiding damage to both the magnetic head and the magnetic disk 100 is applied to the surface of the protective layer 16.

  As will be described later, the magnetic disk 100 is manufactured using the intermediate body 10 shown in FIG. 3 and the stamper 30 shown in FIG. 4 according to the information recording medium manufacturing method of the present invention. The intermediate body 10 corresponds to a base material in the present invention. As shown in FIG. 3, the soft magnetic layer 12, the intermediate layer 13, the magnetic layer 14, the B mask layer 17, and the A mask layer 18 are the first of the glass substrate 11. They are formed on the surface 11a in this order. As described above, when the double-sided recording type discrete track medium is manufactured, the above layers are actually formed on the second surface 11b side of the glass substrate 11 in the same manner as the first surface 11a side. Intermediate 10 is used. The glass substrate 11 is formed into a disk shape having a thickness of about 0.6 mm by polishing the surface of a glass plate. In addition, the board | substrate used for intermediate body 10 and intermediate body 10A, 10B (magnetic disk 100) mentioned later is not limited to a glass substrate, The base material formed in disk shape with various nonmagnetic materials, such as aluminum and a ceramic, is used. Can be used. The soft magnetic layer 12 is formed into a thin film having a thickness of about 30 nm to 200 nm by sputtering a soft magnetic material such as a CoFeNb alloy. The intermediate layer 13 is a layer that functions as an underlayer for forming the magnetic layer 14, and has a thickness of about 20 to 40 nm by sputtering an intermediate layer forming material such as Ru, Cr, and CoCr nonmagnetic alloy. It is formed as a thin film.

  The magnetic layer 14 is a layer constituting the concavo-convex pattern 20 (the tip end side of the convex portion 21) described above. For example, the B mask layer 17 is formed on a layer having a thickness of about 10 to 30 nm formed by sputtering a CoCrPt alloy. Each recess 22 having a depth reaching the intermediate layer 13 is formed by performing an etching process using as a mask. The B mask layer 17 is a layer that functions as a mask for forming each of the recesses 22 in the magnetic layer 14 by an etching process. For example, the B mask layer 17 is made of a metal material such as Ni or Ta, or C (carbon). It is formed as a thin film having a thickness of about 10 to 30 nm. The A mask layer 18 is a mask layer for processing so that the B mask layer 17 functions as a mask by an etching process. As an example, the A mask layer 18 is made of an ultraviolet curable resin material (for example, an acrylic resin) and has a thickness of about 80 nm. It is formed in the form of a thin film. In this case, in the intermediate 10, the uneven pattern according to the present invention is formed on the A mask layer 18 by a transfer process described later.

  As an example, the stamper 30 is formed in a disk shape from a resin material having optical transparency by injection molding using a metal stamper manufactured according to a known manufacturing method. In addition, since the manufacturing method of said metal stamper and the manufacturing method of the resin stamper (stamper 30) by injection molding are well-known, the description is abbreviate | omitted. As shown in FIG. 4, the stamper 30 includes a plurality of convex portions 41 corresponding to the concave portions 22 of the concave / convex pattern 20 and a plurality of concave portions 42 corresponding to the convex portions 21 of the concave / convex pattern 20. Is formed, and a concavo-convex pattern 40 (an example of a “stamper-side concavo-convex pattern” in the present invention) is formed in which the concavo-convex positional relationship is reversed from the concavo-convex pattern 20. In this case, the stamper 30 is formed to be capable of imprint processing several tens of times as an example. Accordingly, when the magnetic disk 100 is manufactured, it is necessary to replace the stamper 30 every time imprint processing is performed on about several tens of intermediates 10.

  On the other hand, as shown in FIG. 1, the imprint apparatus 1 includes a fixed side base 2, a movable side base 3, air pumps 4 a and 4 b, an alignment shaft member 5, an air pump 6, a vertical movement mechanism 7, and a control unit 8. It has. The fixed-side base 2 corresponds to the first base in the present invention, and the upper surface thereof is flattened, and a plurality of suction holes 2a for sucking and fixing the intermediate body 10 as described later are provided. Is formed. In addition, an insertion hole 2 b (for projecting the alignment shaft member 5) through which the alignment shaft member 5 is inserted is formed at the center of the fixed side base 2. The movable side base 3 corresponds to the second base in the present invention, and the lower surface thereof is flattened, and a plurality of suction holes 3a for sucking and fixing the stamper 30 as described later are formed. Has been. In addition, a concave portion 3 b is formed in the central portion of the movable side base 3 to allow the front end portion 51 of the positioning shaft member 5 protruding from the fixed side base 2 to enter.

  The air pump 4 a sucks air between the fixed side base 2 and the intermediate body 10 from the suction hole 2 a of the fixed side base 2 under the control of the control unit 8, so that the intermediate body with respect to the fixed side base 2 Aspirate 10 and fix. The air pump 4 b sucks the air between the movable side base 3 and the stamper 30 from the suction hole 3 a of the movable side base 3 according to the control of the control unit 8, so that the stamper 30 is moved to the movable side base 3. Aspirate and fix. The imprint apparatus 1 employs a configuration in which the stamper 30 is sucked and fixed by sucking air with the air pump 4b. However, the imprint apparatus that performs the imprint method according to the present invention has the following structure. For example, a configuration in which the stamper 30 is fixed by static electricity can be employed by disposing a static electricity generator instead of the air pump 4b.

  The alignment shaft member 5 is an example of the alignment shaft member in the present invention, and as an example, the alignment shaft member 5 is formed in a hollow cylindrical shape using a material that can be elastically deformed, such as silicon rubber. As will be described later, the alignment shaft member 5 expands and elastically deforms when air is supplied to the internal space S, and returns to the shape shown in FIGS. 1 and 5 by stopping the supply of air. . In this case, in the imprint apparatus 1, the tip end 51 side of the alignment shaft member 5 is formed in a substantially conical shape, and this conical portion is protruded from the insertion hole 2 b of the fixed side base 2. . Specifically, as shown in FIG. 5, in the imprint apparatus 1, from the diameter La on the distal end portion 51 side in a protruding portion from the fixed side base 2 (in this example, a portion formed in a conical shape). In addition, the alignment shaft member 5 is formed so that the diameter Lb on the base end portion 52 side at the projecting portion from the fixed base 2 is larger.

  In this case, as shown in FIG. 5, the intermediate body 10 described above (“one of the base material and the stamper disposed on the first base side”) has its center hole 10 h (in the present invention). The hole diameter L1 of the “base-material-side center hole” is the diameter La of the tip 51 of the alignment shaft member 5 and the stamper 30 (the second base side of the “base-material and stamper” in the present invention). The diameter of the center end 30h of the other end)) is larger than the diameter L2 of the center hole 30h ("stamper side center hole" in the present invention) and slightly smaller than the diameter Lb of the base end portion 52 of the positioning shaft member 5. It is formed to become. Further, in the stamper 30 described above, the hole diameter L2 of the center hole 30h is larger than the diameter La of the distal end portion 51 of the alignment shaft member 5, and the proximal end portion 52 of the alignment shaft member 5 is formed. The diameter Lb is formed to be smaller than the hole diameter L1 of the center hole 10h in the intermediate body 10.

  Therefore, as shown in FIG. 5, in the imprint apparatus 1, as described later, the intermediate body 10 and the stamper 30 are fixed to the fixed base so that the alignment shaft member 5 is inserted into the center holes 10h and 30h. 2 in this order on the inner surface of the center hole 10h in the outer peripheral portion of the alignment shaft member 5 at a position slightly closer to the distal end portion 51 than the base end portion 52 of the alignment shaft member 5 In the example, the intermediate body 10 is held by the alignment shaft member 5 in a state in which the edge of the center hole 10h on the second surface 11b side is in contact, and the intermediate shaft 10 is closer to the distal end portion 51 of the alignment shaft member 5. The stamper is in a state where the inner surface of the center hole 30h (in this example, the edge of the center hole 30h on the surface on which the concave / convex pattern 40 is formed) is in contact with the outer periphery of the alignment shaft member 5 30 is held by the alignment shaft member 5.

  In the imprint apparatus 1, when the intermediate body 10 and the stamper 30 are arranged on the fixed side base 2 as described above, the upper surface of the fixed side base 2 and the intermediate body 10 (in this example, a glass substrate) 11 between the surface of the A mask layer 18 of the intermediate body 10 and the surface of the stamper 30 where the concave / convex pattern 40 is formed. The diameters La and Lb of the alignment shaft member 5, the hole diameter L1 of the center hole 10h, and the hole diameter L2 of the center hole 30h are respectively defined. Therefore, in a state where the intermediate body 10 and the stamper 30 are arranged on the fixed side base 2, the intermediate body 10 is in a non-contact state with respect to the fixed side base 2, and the intermediate body 10 and the stamper 30 are not in contact with each other. It becomes a contact state. 1 and 5 and the like, in a state in which the intermediate body 10 and the stamper 30 are arranged in this order on the fixed base 2, the tip 51 of the alignment shaft member 5 protrudes from the back surface of the stamper 30. However, the length of the alignment shaft member in the present invention (the height of the protruding portion from the fixed base 2) is not limited to this example, and the intermediate body 10 and the stamper 30 are disposed. In this state, the distal end portion 51 can have any length (height) that does not protrude from the stamper 30.

  The air pump 6 supplies air (an example of a configuration in which “at least one of gas and liquid” in the present invention is “air (gas)”) to the internal space S of the alignment shaft member 5 under the control of the control unit 8. Thus, the alignment shaft member 5 is expanded and elastically deformed. The vertical movement mechanism 7 moves the movable side base 3 closer to the fixed side base 2 according to the control of the control unit 8 (moves downward: “second base relative to the first base” in the present invention. An example of an operation of “relatively approaching” is performed), thereby performing a transfer process of pressing the stamper 30 against the intermediate body 10 disposed on the fixed-side base 2. Further, the vertical movement mechanism 7 separates (moves upward) the movable side base 3 with respect to the fixed side base 2 according to the control of the control unit 8 (the second side relative to the first base in the present invention). An example of an operation of “relatively separating the bases”) performs a peeling process for peeling the stamper 30 from the intermediate body 10 on the fixed-side base 2.

  The control unit 8 comprehensively controls the imprint apparatus 1. Specifically, the control unit 8 controls the air pump 4 a to suck and fix the intermediate body 10 to the fixed side base 2, and controls the air pump 4 b to set the stamper 30 to the movable side base 3. A process of sucking and fixing the intermediate member 10 and a process of causing the positioning shaft member 5 to expand (elastically deform) by controlling the air pump 6 and holding the intermediate body 10 and the stamper 30 while aligning them, and a vertical movement mechanism 7 is executed to perform a process (transfer process and peeling process) for moving the movable side base 3 to and from the fixed side base 2.

  Next, a method for manufacturing the magnetic disk 100 will be described mainly focusing on the imprint method using the imprint apparatus 1.

  When the magnetic disk 100 is manufactured, first, an etching mask is formed on the A mask layer 18 of the intermediate body 10 using the stamper 30 described above. Specifically, as shown in FIG. 6, first, in a state where the formation surface of the A mask layer 18 is facing upward, the intermediate body 10 is fixed to the fixed side so that the alignment shaft member 5 is inserted into the center hole 10h. It is arranged on the base 2. At this time, as described above, the intermediate body 10 is fixed to the fixed side base so that the outer peripheral portion of the positioning shaft member 5 is in contact with the inner surface of the center hole 10h (the edge portion on the second surface 11b side). It is supported by the alignment shaft member 5 in a non-contact state with respect to the table 2. Next, as shown in FIG. 7, in a state where the formation surface of the concave / convex pattern 40 faces downward, the stamper 30 is placed on the fixed base 2 (intermediate) so that the alignment shaft member 5 is inserted into the center hole 30h. Placed on the body 10). At this time, as described above, the stamper 30 is an intermediate body so that the outer peripheral portion of the alignment shaft member 5 is in contact with the inner surface of the center hole 30h (the rim portion on the formation surface side of the concave / convex pattern 40). 10 is supported by the alignment shaft member 5 in a non-contact state. Thereby, the “A arrangement process” in the present invention is completed.

  Subsequently, an operation unit (not shown) in the imprint apparatus 1 is operated to instruct the start of imprint processing. In response to this, the control unit 8 controls the air pump 6 to supply air to the internal space S of the alignment shaft member 5. At this time, as shown in FIG. 8, the alignment shaft member 5 is supplied with air into the internal space S, so that the inner surface of the center hole 10h in the intermediate body 10 and the center hole 30h in the stamper 30 are formed. It is expanded (elastically deformed) so as to press the outer peripheral portion against the inner surface. As a result, the center of the center hole 10h (ie, the center of the intermediate 10: as an example, the center of rotation when used as the magnetic disk 100) and the center of the center hole 30h (ie, the center of the stamper 30: as an example) The intermediate body 10 and the stamper 30 are positioned in a state in which the center of the concentric data track pattern formed by the concave / convex pattern 40 is aligned with the center of the alignment shaft member 5 (dashed line O shown in the figure). It is held by the alignment shaft member 5. Thereby, the “A alignment process” in the present invention is completed.

  Next, the controller 8 controls the vertical movement mechanism 7 to bring the movable base 3 closer to the fixed base 2 (moves the movable base 3 downward). At this time, as the movable side base 3 moves, first, it moves to the back surface of the stamper 30 held by the positioning shaft member 5 (a surface different from the surface on which the uneven pattern 40 is formed). The lower surface of the side base 3 contacts. Subsequently, as the movable base 3 is further moved, the stamper 30 moves toward the fixed base 2 together with the movable base 3. As a result, as shown in FIG. The second surface 11b of the intermediate body 10 contacts the upper surface of the fixed-side base 2. Next, when the movable side base 3 is further moved, the formation surface of the concave / convex pattern 40 in the stamper 30 is pressed against the A mask layer 18 in the intermediate body 10, so that each convex portion 41 of the concave / convex pattern 40 is in the intermediate body 10. The A mask layer 18 is pressed.

  At this time, the resin material (A mask layer 18) at the portion where each convex portion 41 is pushed moves toward each concave portion 42 in the concave / convex pattern 40. Thereby, each convex part 41 of the stamper 30 is pushed into the A mask layer 18 of the intermediate body 10 sufficiently deeply. Next, the A mask layer 18 is irradiated with ultraviolet rays and cured through the stamper 30 while maintaining the state in which the stamper 30 is pressed against the intermediate body 10. Thereby, the concavo-convex pattern 40 of the stamper 30 is transferred to the A mask layer 18, and the concavo-convex pattern (not shown) whose concavo-convex positional relationship is reversed from the concavo-convex pattern 40 is converted into the A mask layer 18 (in the present invention). Formed on one side). Thus, the “transfer process” in the present invention is completed. In the above description, in order to facilitate understanding of the present invention, an example in which the transfer process is performed immediately after the arrangement of the intermediate 10 and the stamper 30 is completed has been described. However, the present invention is not limited to this. For example, a thermoplastic resin material is used as a resin material for forming the A mask layer 18, and the intermediate body 10 and the stamper 30 on the fixed-side base 2 are set at a predetermined temperature (for example, the glass transition of the A mask layer 18. It is also possible to start the transfer process after heating to a temperature above the point). By adopting such a method, each convex portion 41 can be smoothly pushed into the A mask layer 18.

  Next, the control unit 8 controls the air pump 4a to suck and fix the intermediate body 10 with respect to the fixed side base 2, and also controls the air pump 4b to move the stamper 30 to the movable side base 3. Suck and fix. Subsequently, the control unit 8 controls the air pump 6 to stop the supply of air to the alignment shaft member 5. At this time, the alignment shaft member 5 is elastically returned to the shape before elastic deformation (the shape shown in FIGS. 1 and 5) as the supply of air is stopped. As a result, the pressing of the outer peripheral portion of the alignment shaft member 5 against the inner surface of the center hole 10h in the intermediate body 10 and the inner surface of the center hole 30h in the stamper 30 is released. As a result, the intermediate body 10 by the alignment shaft member 5 is released. The holding of the stamper 30 is released. At this time, since the intermediate body 10 is fixed to the fixed side base 2 and the stamper 30 is fixed to the movable side base 3, the center hole can be obtained even in the state where the holding by the positioning shaft member 5 is released. The state where both the centers of 10h and 30h coincide with the center of the alignment shaft member 5 (one-dot chain line O) is maintained.

  Next, the control unit 8 controls the vertical movement mechanism 7 to move the movable side base 3 away from the fixed side base 2 (moves it upward: the second base relative to the first base in the present invention). An example of relatively separating the bases). At this time, since the intermediate body 10 is fixed to the fixed side base 2 and the stamper 30 is fixed to the movable side base 3, the stamper 30 is attached to the movable side base 3 as shown in FIG. The intermediate body 10 is peeled off as it moves. Thereby, the “peeling process” in the present invention is completed, and the formation of the mask pattern on the A mask layer 18 of the intermediate 10 is completed. An example of executing the “peeling process” in a state in which the supply of air to the alignment shaft member 5 is stopped (the pressing of the outer peripheral portion of the alignment shaft member 5 against the inner surfaces of the center holes 10h and 30h is stopped). In the state in which the supply of air to the alignment shaft member 5 is maintained (the state in which the outer peripheral portion of the alignment shaft member 5 is pressed against the inner surfaces of the center holes 10h and 30h), the “peeling process” is performed. It can also be executed.

  The control unit 8 controls the air pump 4a to release the intermediate body 10 after the movement of the movable side base 3 by the vertical movement mechanism 7 is completed (after the separation process is completed). Thereby, the intermediate body 10 can be removed from the fixed side base 2. Thereafter, by performing, for example, oxygen plasma treatment on the intermediate body 10 removed from the fixed-side base 2, the resin material (residue) remaining on the bottom surface of each concave portion in the concave / convex pattern formed on the A mask layer 18. Is removed, and the B mask layer 17 is exposed from the A mask layer 18 on the bottom surface of the recess in the concavo-convex pattern formed on the A mask layer 18. Next, the B mask layer 17 is etched by an etching process using the concavo-convex pattern (mask) formed on the A mask layer 18, and the concavo-convex pattern (B mask: not shown) made of the B mask layer 17 is formed on the magnetic layer 14. Z). Subsequently, an etching process is performed on the intermediate body 10 (magnetic layer 14) using the concavo-convex pattern formed of the B mask layer 17 as a mask, so that the concavo-convex pattern 20 having a plurality of convex portions 21 and a plurality of concave portions 22 is formed into the magnetic layer. 14 to form. Thereby, a data track pattern and a servo pattern are formed on the intermediate layer 13 (not shown).

Next, the B mask layer 17 remaining on each convex portion 21 is selectively removed by an etching process to expose the protruding end surface of each convex portion 21. Subsequently, by sputtering SiO ₂ as the nonmagnetic material 15, the formation surface of the concave / convex pattern 20 is covered with the nonmagnetic material 15, respectively. Next, an ion beam etching process is performed on the layer of the nonmagnetic material 15 on the magnetic layer 14 (on each convex portion 21 and each concave portion 22). In this case, as an example, the ion beam etching process is continued until the protruding end surface of each convex portion 21 is exposed from the nonmagnetic material 15. Thereby, the surface of the intermediate body 10 is planarized. Subsequently, a protective layer 16 is formed by forming a diamond-like carbon (DLC) thin film by CVD so as to cover the surface of the intermediate 10. Thereafter, a fluorine-based lubricant is applied to the surface of the protective layer 16 so as to have an average thickness of, for example, about 2 nm, thereby completing the magnetic disk 100 as shown in FIG. Thus, the information recording medium manufacturing method according to the present invention is completed.

  On the other hand, in the imprinting method using the imprint apparatus 1 described above, after the formation of the mask on the first intermediate body 10 (formation of the uneven pattern on the A mask layer 18) is completed, the second and subsequent intermediate bodies 10 are formed. On the other hand, when forming a similar mask, the stamper 30 is used repeatedly without being replaced. Specifically, in the state where the intermediate body 10 (in this example, the first intermediate body 10) in which the mask has been formed in the state shown in FIG. 10 is removed from the fixed-side base 2 (the state where it is removed). The control unit 8 controls the air pump 4 b to maintain the fixed state of the stamper 30 with respect to the movable side base 3. As a result, a state is maintained in which the center of the center hole 30h in the stamper 30 coincides with the center of the alignment shaft member 5 (dashed line O shown in the figure). Next, as shown in FIG. 11, first, the second intermediate body 10 is fixed so that the alignment shaft member 5 is inserted into the center hole 10h with the formation surface of the A mask layer 18 facing upward. Arrange on the side base 2. At this time, as described above, the intermediate body 10 is fixed to the fixed side base so that the outer peripheral portion of the alignment shaft member 5 is in contact with the inner surface of the center hole 10h (the edge portion on the second surface 11b side). It is supported by the alignment shaft member 5 in a non-contact state with respect to the table 2. Thereby, the “B arrangement process” in the present invention is completed.

  Next, the control unit 8 controls the vertical movement mechanism 7 to bring the movable side base 3 closer (moves downward) to the fixed side base 2, and as shown in FIG. Is inserted into the center hole 30h of the stamper 30 (in this example, the alignment shaft member 5 passes through the center hole 30h of the stamper 30 and its tip 51 is inserted into the recess 3b of the movable base 3). In the state), the vertical movement mechanism 7 is stopped. Subsequently, the control unit 8 controls the air pump 6 to supply air to the internal space S of the alignment shaft member 5.

  At this time, as shown in FIG. 13, the alignment shaft member 5 is supplied to the inner surface of the center hole 10 h in the intermediate body 10 and the inner surface of the center hole 30 h in the stamper 30 by supplying air to the internal space S. On the other hand, it is expanded (elastically deformed) to press the outer peripheral portion. As a result, the center of the center hole 10h (that is, the center of the intermediate body 10) is located at the center of the alignment shaft member 5 (dashed line O shown in the figure) and the center of the center hole 30h (that is, the center of the stamper 30). The intermediate body 10 is held by the alignment shaft member 5 in the matched state. Thereby, the “B alignment process” in the present invention is completed. By adopting such a method, it is possible to avoid a situation in which the alignment shaft member 5 is elastically deformed (increased in diameter) before the alignment shaft member 5 is inserted into the center hole 30h of the stamper 30. Thus, the alignment shaft member 5 can be smoothly inserted into the center hole 30h.

  Next, the control unit 8 controls the vertical movement mechanism 7 to bring the movable base 3 closer to the fixed base 2 (moves the movable base 3 downward). At this time, as the movable base 3 moves, the stamper 30 moves toward the fixed base 2 together with the movable base 3, and as a result, as shown in FIG. The formation surface contacts the surface of the A mask layer 18 in the intermediate body 10, and the second surface 11 b of the intermediate body 10 contacts the upper surface of the fixed side base 2. Next, when the movable side base 3 is further moved, the formation surface of the concave / convex pattern 40 in the stamper 30 is pressed against the A mask layer 18 in the intermediate body 10, so that each convex portion 41 of the concave / convex pattern 40 is in the intermediate body 10. The A mask layer 18 is pressed. As a result, the concavo-convex pattern 40 of the stamper 30 is transferred to the A mask layer 18, and the concavo-convex pattern (not shown) whose concavo-convex positional relationship with the concavo-convex pattern 40 is reversed is the A mask layer 18 of the second intermediate 10. (The completion of the second “transfer process”).

  Thereafter, the control unit 8 controls the air pump 4a to suck and fix the intermediate body 10 with respect to the stationary base 2, and also controls the air pump 4b to maintain the fixed state of the stamper 30. . Next, the control unit 8 controls the air pump 6 to stop the supply of air to the alignment shaft member 5. As a result, the alignment shaft member 5 is elastically restored to the shape before elastic deformation, and as a result, the holding of the intermediate body 10 and the stamper 30 by the alignment shaft member 5 is released. Subsequently, the control unit 8 controls the vertical movement mechanism 7 to separate the movable side base 3 from the fixed side base 2 (to move it upward), and to peel the stamper 30 from the intermediate body 10 (second time). Completion of “peeling” As a result, a mask pattern is formed on the A mask layer 18 of the second intermediate 10 in which the concave / convex positional relationship with the concave / convex pattern 40 of the stamper 30 is reversed.

  Thereafter, for the third and subsequent intermediate bodies 10, a series of processes ("B placement process", "B alignment process", "transfer process" in the present invention) for the second intermediate body 10 described above. And a process similar to the “peeling process”). Further, when the imprint process for the dozens of intermediate bodies 10 is completed and the stamper 30 is depleted, the air pump 4b is controlled to release the fixation of the stamper 30 to the movable side base 3, and the movable side base 3 After the stamper 30 is removed from the above, the same process as the imprint process for the first intermediate 10 described above is executed. In this way, when the mask is formed on the second and subsequent intermediate bodies 10, the stamper 30 is repeatedly used without being replaced, so that the process of removing the stamper 30 and arranging a new stamper 30 is performed in several tens of sheets. The time required to form the mask on the plurality of intermediate bodies 10 can be further reduced by the amount that only needs to be performed once.

In this case, the intermediate 10 in which the concavo-convex pattern 40 is transferred to the A mask layer 18 by the imprint method using the imprint apparatus 1 and the intermediate in which the stamper side concavo-convex pattern is transferred to the A mask layer by various conventional imprint methods. And, the alignment accuracy of the centers of both center holes, the time required for imprint processing, and the like are different. Specifically, as shown in FIG. 14, the imprinting method of Examples 1 and 2 using the above-described imprinting apparatus 1 (both centers of the center holes 10h and 30h are caused by elastic deformation of the alignment shaft member 5). In the imprint method for alignment, the amount of positional deviation between the center of the center hole 10h in the intermediate body 10 and the center of the center hole 30h in the stamper 30 is very high as 20 μm or less. Na us, in actual Example 1 of the imprint method, by sucking the stamper 30 during the peeling process employs a method of fixing the movable base 3, in the imprint method of Example 2, the stamper 30 at the time of peeling treatment static by that adopts a method of fixing the movable base 3.

  Further, in the imprint methods of the first and second embodiments, the work time required to align the centers of the center holes 10h and 30h (in this example, the time required to elastically deform the alignment shaft member 5). Both the replacement time required to replace the intermediate 10 after the transfer of the concave / convex pattern 40 with the new intermediate 10 and the replacement time required to replace the depleted stamper 30 with the new stamper 30 are: It is very short time. In the figure, the alignment work time, the replacement time of the intermediate 10 and the replacement time of the stamper 30 are marked with “◎” for work completed in less than 10 seconds, and in 10 seconds or more and less than 30 seconds. “○” is given to those for which the work has been completed, “Δ” is given to those for which the work has been completed in 30 seconds or more and less than 100 seconds, and “X” is given to those that have taken 100 seconds or more.

  On the other hand, in the imprint method of Comparative Example 1 in which the stamper is fixed to the base with bolts without performing the alignment operation, the positional deviation amount between the center hole center of the intermediate body and the center hole center of the stamper is 100 μm. As described above, it is difficult to manufacture a magnetic recording medium that can execute normal tracking servo control. Further, in the imprint apparatus method of Comparative Example 1, due to fixing the stamper with bolts, the time required for exchanging the stamper becomes very long, resulting in a problem that the manufacturing cost of the magnetic recording medium increases. Yes.

  Further, in the imprint method of Comparative Example 2 similar to the imprint method disclosed in JP-T-2005-529436, the alignment work time, the intermediate (base material) replacement time, and the stamper replacement time Is a short time in the same manner as the imprinting methods of the first and second embodiments. However, in the imprint method of Comparative Example 2, as described above, the intermediate body (base material) is not fixed to any part when the first holding means is raised toward the second holding means. Due to the state, the intermediate body is displaced relative to the first holding means, and as a result, the intermediate body is displaced relative to the stamper. Therefore, in the imprint method of Comparative Example 2, the amount of misalignment between the center of the center hole in the intermediate body and the center of the center hole in the stamper is about 40 μm at the maximum. fluctuate. For this reason, in the imprint method of Comparative Example 2, the data track pattern and the servo pattern may be transferred in an eccentric state with respect to the center of the intermediate, and a magnetic recording medium capable of realizing high-speed rotation and high-density recording It has become difficult to manufacture.

  Furthermore, in the imprint method of Comparative Example 3 in which the position of the stamper is measured using an optical position measuring device and aligned with the reference position of the base, the imprint method of Comparative Example 3 uses the imprints of Examples 1 and 2. Similar to the printing method, the positional deviation amount between the center of the center hole in the intermediate body and the center of the center hole in the stamper is 20 μm or less, which is very high alignment accuracy. However, due to the fact that the measurement work by the optical position measurement device takes a long time, the alignment work time has become very long, and coupled with the fact that the fixing method using bolts is adopted. Stamper replacement time is also very long. In addition, in Comparative Example 3 in which positioning is performed using the optical position measurement device, the position where the optical position measurement device positioned above the intermediate body during the measurement process does not hinder the replacement work each time the intermediate body is replaced. Therefore, the exchange time for the intermediate is slightly longer. For this reason, in the imprint method of the comparative example 3, the problem that the manufacturing cost of a magnetic recording medium rises arises.

  In this case, in the imprint method of Comparative Example 1, for example, instead of fixing the stamper with a bolt, the stamper 30 is sucked and fixed in the same manner as the imprint method of Examples 1 and 2, or the stamper When the method of fixing 30 with static electricity is adopted, the replacement time of the stamper can be shortened, so that it is possible to avoid an increase in the manufacturing cost of the magnetic recording medium. However, even if such a method is adopted, the alignment accuracy cannot be improved, and it is still difficult to manufacture a magnetic recording medium that can realize high-speed rotation and high-density recording. Further, in the imprint method of Comparative Example 3, for example, instead of fixing the stamper with a bolt, the stamper 30 is sucked and fixed in the same manner as the imprint method of Examples 1 and 2, or the stamper 30 When using the method of fixing by static electricity, it is possible to shorten the replacement time of the stamper by the time required for fixing the stamper, but the measurement process using the optical position measuring device takes a long time. The alignment work time is still long. For this reason, it is difficult to avoid an increase in the manufacturing cost of the magnetic recording medium.

  As described above, in the imprint method using the imprint apparatus 1, the intermediate body 10 and the stamper 30 are disposed on the fixed-side base 2 so that the alignment shaft member 5 is inserted into the center holes 10 h and 30 h. And the outer peripheral portion of the alignment shaft member 5 are connected to the center holes 10h. A positioning process for elastically deforming the positioning shaft member 5 so as to press against the inner surface of 30h (the centers of the center holes 10h and 30h are aligned with the center of the positioning shaft member 5), and a fixed side base By moving the movable side base 3 closer to the base 2, the stamper 30 is pressed against one surface (A mask layer 18) of the intermediate body 10 and the uneven pattern 40 is transferred to the entire surface in this order. The concave / convex pattern 40 is formed on one surface (A mask layer 18) of the intermediate body 10 so that the concave / convex positional relationship is reversed. Further, in this method of manufacturing the magnetic disk 100, a concavo-convex pattern whose concavo-convex positional relationship is reversed with the concavo-convex pattern 40 according to the imprint method is formed on one surface of the intermediate body 10, and the magnetic disk 100 is manufactured.

  Therefore, according to the imprint method by the imprint apparatus 1 and the method of manufacturing the magnetic disk 100, the center of the center hole 10 h in the intermediate body 10 and the center hole 30 h in the stamper 30 by elastic deformation of the alignment shaft member 5. In the state where the center of the stamper 30 coincides with the center of the alignment shaft member 5 (the intermediate body 10 and the stamper 30 are aligned), the concave / convex pattern 40 of the stamper 30 is pressed against the A mask layer 18 of the intermediate body 10. Since it can be transferred, a concave / convex pattern (a concave / convex pattern in which the concave / convex positional relationship is reversed with the concave / convex pattern 40) can be formed on the A mask layer 18 of the intermediate 10 with high accuracy without decentering. Further, according to the imprint method by the imprint apparatus 1 and the method for manufacturing the magnetic disk 100, the position adjustment is performed as compared with the conventional imprint method in which the stamper is aligned using the optical position measurement device. Since the stamper 30 can be aligned with the intermediate body 10 simply by expanding and elastically deforming the shaft member 5, the time required for the alignment operation can be sufficiently shortened. As a result, the magnetic disk 100 is manufactured. Cost can be reduced sufficiently.

  Further, according to the imprint method by the imprint apparatus 1, the intermediate body 10 and the stamper 30 are arranged in this order on the fixed base 2 in the A arrangement process in the present invention, and the transfer process in the present invention is performed. By performing a peeling process for peeling the stamper 30 from the intermediate body 10 by separating the movable side base 3 from the fixed side base 2 while the stamper 30 is held on the movable side base 3 after completion. Since the stamper 30 can be peeled off from the intermediate body 10 after the transfer of the concavo-convex pattern 40 has been completed without using the equipment for peeling the stamper 30 from the intermediate body 10 separately from the imprint apparatus 1, the magnetic The manufacturing cost of the disk 100 can be sufficiently reduced.

  Furthermore, according to the imprint method by the imprint apparatus 1, the alignment shaft member 5 is inserted into the center hole 10h in place of the intermediate body 10 on which the formation of the concavo-convex pattern has been completed after the peeling process in the present invention is completed. Thus, the B arrangement process for arranging the new intermediate body 10 on the fixed base 2 and the alignment shaft member so as to press the outer peripheral portion of the alignment shaft member 5 against the inner surface of the center hole 10h. By performing the B alignment process for elastically deforming 5 and the transfer process in this order, the transfer process for the concave / convex pattern 40 is performed without replacing the stamper 30 only by replacing the intermediate body 10. be able to. For this reason, according to the imprint method by the imprint apparatus 1, the time required for the imprint process for the second and subsequent intermediate bodies 10 can be further shortened, and thus the manufacturing cost of the magnetic disk 100 can be sufficiently reduced. can do.

  In addition, according to the imprint method using the imprint apparatus 1, the stamper 30 is sucked and held (fixed) on the movable side base 3, whereby the stamper is fixed with a bolt, for example. In comparison, since the time (replacement time) required for the replacement work of the stamper 30 can be shortened, the manufacturing cost of the magnetic disk 100 can be sufficiently reduced. Further, for example, when using a metal stamper that is difficult to fix due to static electricity or the like, the stamper can be securely fixed to the movable side base 3.

  Further, according to the imprint method using the imprint apparatus 1 provided with a static electricity generating device instead of the air pump 4b, the stamper 30 is held on the movable side base 3 by static electricity, for example, a stamper by a bolt. Compared to the conventional imprint method for fixing the magnetic disk 100, the time required for replacing the stamper 30 (replacement time) can be shortened, so that the manufacturing cost of the magnetic disk 100 can be sufficiently reduced. In addition, unlike the method in which the stamper 30 is sucked and fixed, for example, the stamper 30 is not likely to be deformed by a suction force. Therefore, when the thin stamper 30 is used, the uneven pattern 40 can be transferred with high accuracy. .

  Further, according to the imprint method by the imprint apparatus 1, the diameter on the base end portion 52 side in the protruding portion from the fixed side base 2 is larger than the diameter La on the distal end portion 51 side in the protruding portion of the fixed side base 2. Lb uses the imprint apparatus 1 provided with the alignment shaft member 5 having a larger diameter, and is disposed on the fixed base 2 side of the intermediate body 10 and the stamper 30 (in this example, The intermediate body 10 and the stamper 30 are formed so that the center hole 10h of the intermediate body 10) has a larger diameter than the center hole 30h of the other (in this example, the stamper 30) disposed on the movable base 3 side. Since the stamper 30 can be kept in a non-contact state with respect to the intermediate body 10 when the A arrangement process is completed, the intermediate body 10 is started prior to the start of the transfer process. The A mask layer 18 in contact convex pattern 40 of the stamper 30 can be avoided a situation in which scratching occurs in the A mask layer 18.

  Further, according to the imprint method by the imprint apparatus 1, at least one of gas and liquid (in this example, air which is an example of gas) is supplied to the internal space S formed in the alignment shaft member 5. Then, by inflating and elastically deforming the alignment shaft member 5, the intermediate body 10 and the stamper 30 can be aligned while having a relatively simple configuration, and the alignment shaft member 5 The time required for elastic deformation can be sufficiently shortened. For this reason, according to the imprint method by the imprint apparatus 1, the manufacturing cost of the magnetic disk 100 can be sufficiently reduced.

  Next, another embodiment of the imprint method according to the present invention will be described with reference to the drawings. In addition, about the component same as said imprint apparatus 1, the intermediate body 10, and the stamper 30, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted.

  In the imprint method and the information recording medium manufacturing method described above, the centers of the center holes 10h and 30h are made to coincide with each other by the alignment shaft member 5 in a state where the intermediate body 10 and the stamper 30 are arranged on the fixed side base 2. Thereafter, the concave-convex pattern 40 of the stamper 30 is transferred to the A mask layer 18 of the intermediate body 10. However, prior to the transfer process, the movable side base 3 is positioned. For this, a method of aligning and fixing the stamper can be employed. Specifically, when this imprinting method is executed, instead of the intermediate body 10 and the stamper 30 described above, as shown in FIG. 15, the intermediate body 10A having the center holes 10ha and 30ha having the same hole diameter L3. In addition, the stamper 30A and the imprint apparatus 1 including the fixed-side base 2 having the alignment shaft member 5A are used.

  In this case, the alignment shaft member 5A is another example of the alignment shaft member in the present invention. Like the alignment shaft member 5 described above, as an example, elastic deformation of silicon rubber or the like is performed. It is formed into a hollow cylinder with possible materials. Further, the alignment shaft member 5A expands and elastically deforms when air is supplied to the internal space S as will be described later, and elastically returns to the shape shown in FIG. 15 when the supply of air is stopped. Further, the alignment shaft member 5 </ b> A has a substantially conical shape on the tip 51 a side, and this conical portion is projected from the insertion hole 2 b of the fixed side base 2. Specifically, the positioning shaft member 5A has a fixed side base that is larger than the diameter Lc on the distal end portion 51a side at a projecting portion from the fixed side base 2 (in this example, a conical portion). The diameter Lb on the base end portion 52a side at the projecting portion from the base 2 is formed to be larger.

  Further, the intermediate body 10A described above has a hole diameter L3 of the center hole 10ha (the “base-side-side center hole” in the present invention) larger than the diameter Lc of the front end portion 51a of the alignment shaft member 5A, and The diameter is slightly smaller than the diameter Lb of the base end portion 52a of the alignment shaft member 5A. Further, in the stamper 30A described above, the hole diameter L3 of the center hole 30ha (“stamper side center hole” in the present invention) is equal to the hole diameter L3 of 10ha in the intermediate body 10A, and the tip end portion of the alignment shaft member 5A It is formed so as to be larger than the diameter Lc of 51a and slightly smaller than the diameter Lb of the base end portion 52a of the positioning shaft member 5A.

  Therefore, as shown in FIGS. 16 and 20, when the intermediate body 10A and the stamper 30A are arranged on the fixed base 2 so that the alignment shaft member 5A is inserted into the center holes 10ha and 30ha, the alignment is performed. In the shaft member 5A, the inner surface of the center holes 10ha and 30ha (in this example, the second surface 11b side of the center hole 10ha) is formed on the outer peripheral portion of the positioning shaft member 5A at a position slightly closer to the distal end portion 51a than the base end portion 52a. The intermediate body 10A and the stamper 30A are held by the alignment shaft member 5A in a state in which the opening edge portion or the opening edge portion on the surface where the concave / convex pattern 40 is formed in the center hole 30ha is in contact.

  In imprint processing using the imprint apparatus 1 having the alignment shaft member 5A, as shown in FIG. 16, first, alignment is performed with the center hole 30ha with the formation surface of the concave / convex pattern 40 facing downward. The stamper 30A is arranged on the fixed base 2 so that the shaft member 5A is inserted. At this time, as described above, the stamper 30A is fixed on the fixed side so that the outer peripheral portion of the alignment shaft member 5A is in contact with the inner surface of the center hole 30ha (the edge portion on the surface on which the concave / convex pattern 40 is formed). It is supported by the positioning shaft member 5A in a non-contact state with respect to the upper surface of the base 2. Thereby, the “C arrangement processing” in the present invention is completed.

  Next, the control unit 8 controls the air pump 6 to supply air to the internal space S of the alignment shaft member 5A. At this time, as shown in FIG. 17, the alignment shaft member 5A is expanded so as to press the outer peripheral portion against the inner surface of the center hole 30ha in the stamper 30A when air is supplied to the inner space S. (Elastically deformed). At this time, the center of the center hole 30ha (that is, the center of the stamper 30A: as an example, the center of the concentric data track pattern formed by the concave / convex pattern 40) is the center of the alignment shaft member 5A (shown in the figure). The stamper 30A is held by the alignment shaft member 5A in a state where the stamper 30A is aligned with the dashed line O). Thereby, the “C alignment process” in the present invention is completed.

  Subsequently, the control unit 8 controls the vertical movement mechanism 7 to bring the movable side base 3 closer to the fixed side base 2 (moves the movable side base 3 downward), as shown in FIG. The lower surface of the movable side base 3 is brought into contact with the back surface of the stamper 30A (a surface different from the surface on which the uneven pattern 40 is formed). Next, the control unit 8 controls the air pump 4b to suck and fix the stamper 30A with respect to the movable side base 3. Thereby, the “holding process” in the present invention is completed. Subsequently, the control unit 8 controls the air pump 6 to stop the supply of air to the alignment shaft member 5A. At this time, the alignment shaft member 5A elastically returns to the shape before elastic deformation (the shape shown in FIGS. 15 and 16) as the supply of air is stopped. As a result, the pressing of the outer peripheral portion of the alignment shaft member 5A against the inner surface of the center hole 30ha in the stamper 30A is released. As a result, the holding of the stamper 30A by the alignment shaft member 5A is released.

  Next, the control unit 8 controls the vertical movement mechanism 7 so as to separate (move up) the movable side base 3 with respect to the fixed side base 2. At this time, since the stamper 30A is fixed to the movable base 3, the stamper 30A is separated from the fixed base 2 together with the movable base 3, as shown in FIG. An example in which the movable-side base 3 is moved up in a state in which the supply of air to the alignment shaft member 5A is stopped (the pressing of the outer peripheral portion of the alignment shaft member 5A against the inner surface of the center hole 30ha is stopped). However, the movable side base 3 is raised in a state in which the supply of air to the alignment shaft member 5A is maintained (the pressing of the outer peripheral portion of the alignment shaft member 5A against the inner surface of the center hole 30ha is maintained). It can also be moved.

  Next, as shown in FIG. 20, with the formation surface of the A mask layer 18 facing upward, the intermediate member 10A is placed on the fixed base 2 so that the alignment shaft member 5A is inserted into the center hole 10ha. To place. At this time, as described above, the intermediate body 10A is fixed on the fixed side base so that the outer peripheral portion of the positioning shaft member 5A is in contact with the inner surface of the center hole 10ha (the edge portion on the second surface 11b side). It is supported by the alignment shaft member 5A in a non-contact state with respect to the table 2. Thereby, the “D arrangement process” in the present invention is completed.

  Subsequently, the control unit 8 controls the air pump 6 to supply air to the internal space S of the alignment shaft member 5A. At this time, as shown in FIG. 21, the alignment shaft member 5A expands so as to press the outer peripheral portion against the inner surface of the center hole 10ha in the intermediate body 10A when air is supplied to the inner space S. (Elastically deformed). At this time, the center of the center hole 10ha (that is, the center of the intermediate 10A: as an example, the rotation center when used as the magnetic disk 100) is the center of the alignment shaft member 5A (the chain line shown in FIG. O) and the intermediate body 10A are held by the alignment shaft member 5A in a state of being aligned with the center of the center hole 30ha in the stamper 30A fixed to the movable side base 3. Thereby, the “D alignment process” in the present invention is completed.

  In this case, in the above example using the alignment shaft member 5A, the “D alignment process” in the present invention is immediately executed after the “D arrangement process” in the present invention is completed. It is not limited to. For example, when the above-described alignment shaft member 5 is used in place of the alignment shaft member 5A and the above-described intermediate body 10 and stamper 30 are used in place of the intermediate body 10A and the stamper 30A, first, the present invention. When the “D arrangement process” in FIG. 5 is completed, the control unit 8 controls the vertical movement mechanism 7 to move the movable side base 3 closer to the fixed side base 2 (downward movement) to adjust the position. After the vertical movement mechanism 7 is stopped in a state where the shaft member 5 is inserted into the center hole 30h of the stamper 30 (not shown), the “D alignment process” in the present invention is started. By adopting such a method, it is possible to avoid a situation in which the alignment shaft member 5 is elastically deformed (increased in diameter) before the alignment shaft member 5 is inserted into the center hole 30h of the stamper 30. Thus, the alignment shaft member 5 can be smoothly inserted into the center hole 30h.

  When performing the “D alignment process” in the present invention using the alignment shaft member 5, the intermediate body 10, and the stamper 30, the air is supplied to the internal space S of the alignment shaft member 5. Further, the alignment shaft member 5 expands (elastically deforms) so as to press the outer peripheral portion against the inner surface of the center hole 10 h in the intermediate body 10 and the inner surface of the center hole 30 h in the stamper 30. As a result, the intermediate body 10h in a state where the center of the center hole 10h (that is, the center of the intermediate body 10) is aligned with the center of the alignment shaft member 5 and the center of the center hole 30h (that is, the center of the stamper 30). Is held by the alignment shaft member 5.

  Next, the controller 8 controls the vertical movement mechanism 7 to bring the movable base 3 closer to the fixed base 2 (moves the movable base 3 downward). At this time, as the movable base 3 moves, the stamper 30A moves toward the intermediate body 10A on the fixed base 2, and as a result, as shown in FIG. The surface comes into contact with the surface of the A mask layer 18 in the intermediate body 10 </ b> A, and the second surface 11 b in the intermediate body 10 </ b> A comes into contact with the upper surface of the fixed side base 2. Subsequently, when the movable side base 3 is further moved, the formation surface of the concave / convex pattern 40 in the stamper 30A is pressed against the A mask layer 18 in the intermediate 10A, so that each convex portion 41 of the concave / convex pattern 40 is an intermediate. It is pushed into the A mask layer 18 of 10A.

  At this time, as a result of the resin material (A mask layer 18) of the portion into which each convex portion 41 is pushed in moving into each concave portion 42 in the concave / convex pattern 40, each convex portion 41 of the stamper 30A becomes the intermediate 10A. The A mask layer 18 is pushed deep enough. Next, the A mask layer 18 is irradiated with ultraviolet rays and cured through the stamper 30A while maintaining the state in which the stamper 30A is pressed against the intermediate 10A. Thereby, the concavo-convex pattern 40 of the stamper 30A is transferred to the A mask layer 18, and a concavo-convex pattern (not shown) whose concavo-convex positional relationship is reversed from the concavo-convex pattern 40 is formed in the A mask layer 18 of the intermediate 10A. . Thus, the “transfer process” in the present invention is completed. Thereafter, the control unit 8 controls the air pump 4a to suck and fix the intermediate body 10A with respect to the fixed side base 2, and also controls the air pump 4b to place the stamper 30A on the movable side base 3. On the other hand, it is sucked and fixed.

  Subsequently, the control unit 8 controls the air pump 6 to stop the supply of air to the alignment shaft member 5A. At this time, the alignment shaft member 5A elastically returns to the shape before elastic deformation (the shape shown in FIG. 15) as the supply of air is stopped. As a result, the pressing of the outer peripheral portion of the alignment shaft member 5A against the inner surface of the center hole 10ha in the intermediate body 10A and the inner surface of the center hole 30ha in the stamper 30A is released. As a result, the intermediate body 10A by the alignment shaft member 5A is released. The holding of the stamper 30A is released.

  Next, the control unit 8 controls the vertical movement mechanism 7 so as to separate (move up) the movable side base 3 with respect to the fixed side base 2. At this time, since the intermediate body 10A is fixed to the fixed side base 2, and the stamper 30A is fixed to the movable side base 3, the stamper 30A is moved to the movable side as shown in FIG. As the base 3 moves, the intermediate body 10A is peeled off. As a result, the peeling process is completed, and a mask pattern is formed on the A mask layer 18 of the intermediate 10A so that the concavo-convex positional relationship with the concavo-convex pattern 40 of the stamper 30A is reversed. An example in which the “peeling process” is performed in a state where the supply of air to the alignment shaft member 5A is stopped (a state where pressing of the outer peripheral portion of the alignment shaft member 5A against the inner surface of the center hole 10ha is stopped) will be described. However, the “peeling process” may be performed in a state where the supply of air to the alignment shaft member 5A is maintained (a state where the outer peripheral portion of the alignment shaft member 5A is pressed against the inner surface of the center hole 10ha). it can.

  After that, the magnetic disk 100 is manufactured as described above by performing an etching process on the intermediate 10A using the A mask layer 18 on which the concavo-convex pattern is formed as a mask. Further, in the above imprint method, after the formation of the mask for the first intermediate 10A (formation of the concavo-convex pattern for the A mask layer 18) is completed, the same mask is used for the second and subsequent intermediates 10A. When forming the stamper 30A, the stamper 30A is used without being replaced. Specifically, in the state where the intermediate body 10A (in this example, the first intermediate body 10A) in which the mask has been formed in the state shown in FIG. As shown in FIG. 20, a new intermediate 10A is arranged on the fixed base 2 (E arrangement processing in the present invention). Thereafter, the D alignment process, the transfer process, and the peeling process are performed in the same manner as the above-described series of steps, so that the stamper is applied to the A mask layer 18 in the second intermediate 10A as shown in FIG. A concavo-convex pattern in which the concavo-convex positional relationship is reversed from the concavo-convex pattern 40 of 30A is formed.

  In this case, in this imprint method, in the same manner as the imprint method of Example 1 described above, the positional deviation amount between the center of the center hole 10ha in the intermediate 10A and the center of the center hole 30ha in the stamper 30A is 20 μm or less. And the alignment accuracy is very high. Further, instead of the method of sucking and fixing the stamper 30A to the movable side base 3 in the imprint method described above, the method of fixing the stamper 30A to the movable side base 3 by static electricity may be the same as that of the second embodiment. Similar to the imprint method, the positional deviation amount between the center of the center hole 10ha in the intermediate body 10A and the center of the center hole 30ha in the stamper 30A is 20 μm or less, which is very high alignment accuracy. Furthermore, in any of the imprint method for fixing the stamper 30A by suction and the imprint method for fixing the stamper 30A by static electricity, as in the imprint method of the first and second embodiments, the alignment work time, The replacement time of the intermediate 10A and the replacement time of the stamper 30A can be shortened to less than 10 seconds.

  As described above, in the imprint method using the imprint apparatus 1, the C placement process of placing the stamper 30 </ b> A on the fixed base 2 so that the positioning shaft member 5 </ b> A is inserted into the center hole 30 ha, and the position The alignment shaft member 5A is elastically deformed so that the outer peripheral portion of the alignment shaft member 5A is pressed against the inner surface of the center hole 30ha (the center of the center hole 30ha is aligned with the center of the alignment shaft member 5A). An alignment process, and a holding process of bringing the movable side base 3 into contact with the stamper 30A by bringing the movable side base 3 closer to the fixed side base 2 and holding the stamper 30A on the movable side base 3; Then, after the movable side base 3 is separated from the fixed side base 2, the intermediate member 10A is fixed on the fixed side by inserting the positioning shaft member 5A through the center hole 10ha. The D arrangement process arranged on the table 2 and the alignment shaft member 5A are elastically deformed so that the outer peripheral portion is pressed against the inner surface of the center hole 10ha (the center of the alignment shaft member 5A is centered on 10ha). D positioning process and the movable side base 3 are brought close to the fixed side base 2 to press the stamper 30A against one side of the intermediate body 10A, so that the concave / convex pattern 40 is formed on one side of the intermediate body 10A (A mask). The transfer process for transferring to the layer 18) is executed in this order to form a concavo-convex pattern whose concavo-convex positional relationship with the concavo-convex pattern 40 is reversed on one surface (A mask layer 18) of the intermediate 10A. Further, in this method of manufacturing the magnetic disk 100, a concavo-convex pattern whose concavo-convex positional relationship is reversed with the concavo-convex pattern 40 according to the imprint method is formed on one surface of the intermediate 10A, and the magnetic disk is formed using the formed concavo-convex pattern. 100 is manufactured.

  Therefore, according to the imprint method using the imprint apparatus 1 and the method for manufacturing the magnetic disk 100, the center of the center hole 10ha in the intermediate body 10A and the center hole 30ha in the stamper 30A due to the elastic deformation of the alignment shaft member 5A. Is pressed against the A mask layer 18 of the intermediate body 10A by pressing the concave / convex pattern 40 of the stamper 30A against the A mask layer 18 of the intermediate body 10A. Since it can be transferred, the concave / convex pattern (the concave / convex pattern in which the concave / convex positional relationship is reversed with the concave / convex pattern 40) can be formed with high accuracy on the A mask layer 18 of the intermediate 10A. In addition, according to the imprint method by the imprint apparatus 1 and the method for manufacturing the magnetic disk 100, the position adjustment is performed as compared with the conventional imprint method in which the stamper is aligned using the optical position measurement device. The intermediate member 10A and the stamper 30A can be aligned with each other by aligning the stamper 30A and the intermediate member 10A with respect to the alignment shaft member 5A simply by expanding and elastically deforming the shaft member 5A. As a result of sufficiently shortening the time required for the alignment operation, the manufacturing cost of the magnetic disk 100 can be sufficiently reduced.

  Further, according to the imprint method by the imprint apparatus 1, the movable side base 3 with respect to the fixed side base 2 in a state where the stamper 30 </ b> A is held on the movable side base 3 after the transfer processing in the present invention is completed. By separating the stamper 30A from the intermediate body 10A by separating the stamper 30A, the uneven pattern can be obtained without using equipment for peeling the stamper 30A from the intermediate body 10A separately from the imprint apparatus 1. Since the stamper 30A can be peeled off from the intermediate 10A after the completion of the transfer of 40, the manufacturing cost of the magnetic disk 100 can be sufficiently reduced.

  Further, according to the imprint method by the imprint apparatus 1, after the peeling process in the present invention is completed, the alignment shaft member 5A is inserted into the center hole 10ha instead of the intermediate 10A in which the formation of the uneven pattern is completed. By simply executing the E placement process for placing the new intermediate body 10A on the fixed side base 2, the D positioning process and the transfer process in the present invention in this order, the intermediate body 10A is simply replaced. The transfer process of the concavo-convex pattern 40 can be performed without performing the placement work of the stamper 30A. For this reason, according to the imprint method by the imprint apparatus 1, the time required for the imprint process for the second and subsequent intermediates 10A can be further shortened, and thus the manufacturing cost of the magnetic disk 100 can be sufficiently reduced. can do.

  In addition, this invention is not limited to said structure and method. For example, the intermediate body 10 is disposed on the stationary base 2 side as “one disposed on the first base side” in the present invention, and “the other disposed on the second base side” in the present invention. The imprint method in which the stamper 30 is disposed on the movable base 3 side has been described, but the present invention is not limited to this, and the stamper is fixed as “one disposed on the first base side” in the present invention. While arrange | positioning at the side base 2 side, an intermediate body can also be arrange | positioned at the movable side base 3 side as "the other arrange | positioned at the 2nd base side" in this invention. In this case, when the imprint method is performed using the imprint apparatus 1 having the alignment shaft member 5, the center hole in the intermediate body 10 is formed in the stamper disposed on the fixed base 2 side. A center hole equal to the hole diameter L1 of 10h is formed, and a center hole equal to the hole diameter L2 of the center hole 30h in the stamper 30 is formed in the intermediate body arranged on the movable base 3 side. Further, in the A arrangement processing in the present invention, a stamper with the formation surface of the concave / convex pattern 40 facing upward and an intermediate body with the formation surface of the A mask layer 18 facing down are arranged on the fixed side base 2 in this order. To do.

  Thus, in the same manner as the imprint method described above, the center hole center in the intermediate body and the center hole center in the stamper are aligned with the center of the alignment shaft member 5 (the intermediate body and the stamper are positioned). Since the stamper concavo-convex pattern 40 can be pressed and transferred to the intermediate A mask layer 18 in the combined state), the concavo-convex pattern (the concavo-convex positional relationship with the concavo-convex pattern 40 is inverted) to the intermediate A mask layer 18. Can be formed with high accuracy without decentering. In addition, according to this imprint method, compared with the conventional imprint method in which the stamper is aligned using an optical position measuring device, the alignment shaft member 5 is simply expanded and elastically deformed. Since the stamper can be aligned with the body, the time required for the alignment operation can be sufficiently shortened. As a result, the manufacturing cost of the magnetic disk 100 can be sufficiently reduced.

  Further, the imprint apparatus 1 having a configuration in which the second surface 11b of the intermediate bodies 10 and 10A is brought into surface contact with the upper surface of the fixed side base 2 by forming the upper surface of the fixed side base 2 flat is used. Although the imprint method has been described, the present invention is not limited to this. For example, as shown in FIG. 24, the concavo-convex pattern 40 of the stampers 30 and 30A is transferred to the intermediate body 10B in which the A mask layer 18 is formed on both the first surface 11a and the second surface 11b of the glass substrate 11. Is formed on the upper surface of the fixed-side base 2 so as to form an annular recess 2c in a plan view, and only the inner peripheral area Ai and the outer peripheral area Ao are formed on the upper surface of the fixed-side base 2 with respect to the intermediate body 10B. The imprint apparatus 1 configured to abut is used. By using the imprint apparatus 1 having such a fixed-side base 2, an intermediate peripheral area (inner peripheral area) in the A mask layer 18 on the back surface side with respect to the formation surface of the A mask layer 18 to which the uneven pattern 40 is to be transferred. A region other than Ai and the outer peripheral region Ao) can be made in non-contact with the fixed side base 2, and therefore, in the transfer process, the intermediate side region in the A mask layer 18 on the back side is connected to the fixed side base 2. It is possible to avoid a situation in which damage due to contact occurs.

  Furthermore, although the imprint method using the imprint apparatus 1 configured to move the movable base 3 toward and away from the fixed base 2 by the vertical movement mechanism 7 has been described, the present invention is not limited thereto. An imprint apparatus (not shown) having a configuration in which the first base is moved toward and away from the second base and a structure in which the first base and the second base are moved toward and away from each other. It is possible to employ a method of performing transfer processing by using. Further, the method of aligning the intermediate bodies 10 and 10A and the stampers 30 and 30A using the imprint apparatus 1 having the alignment shaft members 5 and 5A in which the tip portions 51 and 51a are formed in a substantially conical shape has been described. The shape of the alignment shaft member in the present invention is not limited to a substantially conical shape. For example, the imprint apparatus includes an alignment shaft member having a polygonal pyramid-shaped tip portion having a triangular cross section or more. Can be used to perform the alignment process. In this case, the shape of the alignment shaft member is such that the inner surface of the base-side center hole and the stamper-side center hole in the present invention is in contact with a plurality of three or more points, or a line on a circle. It is preferable to adopt.

  Furthermore, although the structure which supplies and expands the internal space S of the shaft members 5 and 5A for alignment was demonstrated, it replaced with air, for example, various gases, such as industrial nitrogen, various liquids, such as oil, or It is possible to employ a configuration in which the alignment shaft members 5 and 5A are expanded and elastically deformed by supplying a mixture of gas and liquid. Further, instead of the configuration in which gas or liquid is supplied and elastically deformed, a shaft member main body 53a (for example, the alignment shaft member 5 described above and the alignment shaft member 5B shown in FIGS. The alignment shaft member of the present invention can also be configured by a pin 53b that is slidable in the vertical direction within the internal space S of the shaft member main body 53a. In this alignment shaft member 5B, as shown in FIG. 25, by sliding the pin 53b upward with respect to the shaft member main body 53a from the state where the pin 53b is moved downward, as shown in FIG. The shaft member main body 53a is elastically deformed so as to expand the shaft member main body 53a from the inside. As a result, the outer peripheral portion of the shaft member main body 53a in the alignment shaft member 5B is pressed against the inner surface of the center hole 10h in the intermediate body 10 and the inner surface of the center hole 30h in the stamper 30. Further, by sliding the pin 53b downward with respect to the shaft member main body 53a from the state in which the shaft member main body 53a is elastically deformed, the shaft member main body 53a is elastically returned to the state shown in FIG. The pressing of the outer peripheral portion of the shaft member main body 53a against the inner surface of the center hole 10h and the inner surface of the center hole 30h of the stamper 30 is released. Even when such a configuration is employed, the same effects as those of the imprint method using the alignment shaft members 5 and 5A described above can be obtained.

  Further, in the imprint method using the imprint apparatus 1, the intermediate body 10, and the stamper 30, the example in which the work of replacing the stamper 30 after the concavo-convex pattern 40 is transferred to the plurality of intermediate bodies 10 has been described. The present invention is not limited to this, and a method of replacing the stamper 30 every time the concavo-convex pattern 40 is transferred to the intermediate body 10 can be employed. Further, the intermediate bodies 10 and 10A are fixed to the fixed side base 2, and the movable side base 3 is separated from the fixed side base 2 in a state where the stampers 30 and 30A are fixed to the movable side base 3. The method of peeling the stampers 30 and 30A from the intermediate bodies 10 and 10A has been described, but the present invention is not limited to this, and the stamper 30 is separated from the intermediate bodies 10 and 10A by a dedicated peeling device different from the imprint apparatus 1. , 30A may be employed.

1 is a configuration diagram illustrating a configuration of an imprint apparatus 1. FIG. 2 is a cross-sectional view of a magnetic disk 100 manufactured using the imprint apparatus 1. FIG. 1 is a cross-sectional view of an intermediate body 10 for manufacturing a magnetic disk 100. FIG. 3 is a cross-sectional view of a stamper 30 for manufacturing the magnetic disk 100. FIG. 3 is a cross-sectional view showing the relationship between an alignment shaft member 5 in the imprint apparatus 1, a center hole 10h of an intermediate body 10, and a center hole 30h of a stamper 30. FIG. FIG. 4 is a cross-sectional view of a state in which an intermediate body 10 is arranged on the fixed side base 2. It is sectional drawing of the state which has arrange | positioned the stamper 30 on the intermediate body 10 of the state shown in FIG. FIG. 6 is a cross-sectional view of a state in which the alignment shaft member 5 is expanded and elastically deformed to hold the intermediate body 10 and the stamper 30 while positioning them. FIG. 4 is a cross-sectional view of a state in which the concave / convex pattern 40 of the stamper 30 is pressed against the A mask layer 18 of the intermediate body 10 by moving (moving downward) the movable side base 3 to the fixed side base 2. FIG. 4 is a cross-sectional view of a state in which the stamper 30 is peeled from the intermediate body 10 by separating the movable side base 3 from the fixed side base 2 after the transfer of the uneven pattern 40 is completed. FIG. 3 is a cross-sectional view of a state in which a second intermediate body 10 is arranged on a fixed side base 2. FIG. 4 is a cross-sectional view of a state in which the movable base 3 is brought close to the fixed base 2 and the tip 51 of the alignment shaft member 5 is inserted into the recess 3 b of the movable base 3. It is sectional drawing of the state which expanded and elastically deformed the shaft member 5 for alignment. It is explanatory drawing for demonstrating the imprint method of Examples 1, 2 and Comparative Examples 1-3. It is sectional drawing which shows the relationship between the shaft member 5A for alignment in the imprint apparatus 1, center hole 10ha of intermediate body 10A, and center hole 30ha of stamper 30A. FIG. 5 is a cross-sectional view of a state in which a stamper 30A is disposed on the fixed side base 2. FIG. 5 is a cross-sectional view of a state in which the alignment shaft member 5A is expanded and elastically deformed to hold the stamper 30A while positioning it. It is sectional drawing of the state which made the lower surface of the movable side base 3 contact | abut to the stamper 30A hold | maintained by the shaft member 5A for alignment. FIG. 3 is a cross-sectional view of a state in which the movable side base 3 is separated from the fixed side base 2 in a state where the stamper 30A is sucked and fixed to the movable side base 3. FIG. 6 is a cross-sectional view of a state where an intermediate body 10A is arranged on the fixed side base 2. FIG. 6 is a cross-sectional view of a state in which the positioning shaft member 5A is expanded and elastically deformed to hold the intermediate body 10A while positioning it. FIG. 6 is a cross-sectional view of a state in which the concave / convex pattern 40 of the stamper 30A is pressed against the A mask layer 18 of the intermediate 10A with the movable side base 3 approaching (moving down) with respect to the fixed side base 2; FIG. 6 is a cross-sectional view of a state where the stamper 30A is peeled off from the intermediate body 10A by separating the movable side base 3 from the fixed side base 2 after the transfer of the concavo-convex pattern 40 is completed. It is sectional drawing of the fixed side base 2 and intermediate body 10B which concern on other embodiment. 4 is a cross-sectional view showing the relationship between an alignment shaft member 5B before elastic deformation, a center hole 10h of an intermediate body 10, and a center hole 30h of a stamper 30. FIG. 4 is a cross-sectional view showing the relationship between an alignment shaft member 5B after elastic deformation, a center hole 10h of an intermediate body 10, and a center hole 30h of a stamper 30. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Imprint apparatus 2 Fixed side base 2a, 3a Suction hole 2b Insertion hole 3 Movable side base 4a, 4b, 6 Air pump 5, 5A, 5B Positioning shaft member 7 Vertical movement mechanism 8 Control part 10, 10A, 10B Intermediate body 10h, 10ha, 30h, 30ha Central hole 11 Glass substrate 18 A Mask layer 30, 30A Stamper 40 Concave / convex pattern 41 Convex part 42 Concave part 51, 51a Tip part 52, 52a Base end part 53a Shaft member body 53b Pin 100 Magnetic disk La to Lc Diameter L1 to L3 Hole diameter S Internal space

Claims (11)

The stamper on which the stamper side center hole is formed and the stamper side uneven pattern is formed, the first base on which the alignment shaft member protrudes, and the relative movement with respect to the first base. The stamper side uneven pattern is transferred to one surface of the base material on which the base-side center hole is formed by using an imprint apparatus having a second base that can be arranged, and the stamper-side uneven pattern When forming a concavo-convex pattern in which the concavo-convex positional relationship is reversed on the one surface of the substrate,
A arrangement process for arranging the base material and the stamper on the first base so that the alignment shaft member is inserted through the center holes;
A alignment process for elastically deforming the alignment shaft member so as to press the outer peripheral portion of the alignment shaft member against the inner surfaces of the center holes;
A transfer process in which the stamper is pressed against the one surface of the base material by moving the second base relatively relative to the first base, and the stamper side uneven pattern is transferred to the one surface. Imprint method to be executed in this order.   The substrate and the stamper are arranged on the first base in this order during the A placement process, and the stamper is held on the second base after the transfer process is completed. The imprint method according to claim 1, wherein a peeling process for peeling the stamper from the base material is performed by relatively separating the second base from the first base.   After the peeling process is completed, the new base material is inserted into the center hole so that the positioning shaft member is inserted into the center hole instead of the base material on which the formation of the uneven pattern is completed. B positioning processing disposed above, B positioning processing for elastically deforming the positioning shaft member so as to press the outer peripheral portion of the positioning shaft member against the inner surface of the center hole, and the transfer processing The imprint method according to claim 2, wherein the processes are executed in this order. The stamper on which the stamper side center hole is formed and the stamper side uneven pattern is formed, the first base on which the alignment shaft member protrudes, and the relative movement with respect to the first base. The stamper side uneven pattern is transferred to one surface of the base material on which the base-side center hole is formed by using an imprint apparatus having a second base that can be arranged, and the stamper-side uneven pattern When forming a concavo-convex pattern in which the concavo-convex positional relationship is reversed on the one surface of the substrate,
C placement processing for placing the stamper on the first base so that the alignment shaft member is inserted into the stamper side center hole;
C alignment processing for elastically deforming the alignment shaft member so as to press the outer peripheral portion of the alignment shaft member against the inner surface of the stamper side center hole;
The second base is brought into contact with the stamper by causing the second base to approach the first base relatively, and the stamper is held by the second base. Processing,
After the second base is relatively spaced from the first base, the positioning shaft member is inserted into the base-side center hole, and the base is moved to the first base. D placement processing to be placed on the base;
D alignment processing for elastically deforming the alignment shaft member so as to press the outer peripheral portion against the inner surface of the substrate-side center hole;
A transfer process in which the stamper is pressed against the one surface of the base material by moving the second base relatively relative to the first base, and the stamper side uneven pattern is transferred to the one surface. Imprint method to be executed in this order.   In a state where the stamper is held on the second base after completion of the transfer process, the stamper is separated from the base material by separating the second base relative to the first base. The imprint method of Claim 4 which performs the peeling process which peels.   After the peeling process is completed, the new base material is inserted into the center hole so that the positioning shaft member is inserted into the center hole instead of the base material on which the formation of the uneven pattern is completed. The imprint method according to claim 5, wherein the E arrangement process arranged above, the D alignment process, and the transfer process are executed in this order.   The imprint method according to claim 2, wherein the stamper is sucked and held on the second base.   The imprint method according to claim 2, wherein the stamper is held on the second base by static electricity.   The alignment shaft member is formed such that a diameter on a proximal end side in the protruding portion is larger than a diameter on a distal end portion in the protruding portion from the first base, and the base material and the stamper are The alignment shaft is formed such that one of the center holes arranged on the first base side has a larger diameter than the other center hole arranged on the second base side. The imprint method according to claim 1, wherein the imprint apparatus including a member, the base material, and the stamper are used.   The imprint according to claim 1, wherein at least one of gas and liquid is supplied to an internal space formed in the alignment shaft member to expand and elastically deform the alignment shaft member. Method.   The uneven pattern in which the uneven positional relationship is reversed with the stamper side uneven pattern according to the imprint method according to claim 1 is formed on the one surface of the base material, and the formed uneven pattern is used. An information recording medium manufacturing method for manufacturing an information recording medium.

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