JP2009078239A - Low dew point air manufacturing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a low dew point air manufacturing apparatus which can cut considerably power consumption and further increase considerably a manufactured air volume, and manufacture the low dew point air in a large quantity effectively. <P>SOLUTION: A cooler carrying out an isothermal dehumidification is provided on a dehumidifying portion in a duct to which an adsorbent or an adsorbent holding member is supplied, and a conduction heating device is provided on a regenerating part regenerating a dehumidifying agent or a dehumidifying agent holding member after the dehumidification at the dehumidifying portion. In an example of Fig.1, a heat exchanger 14 for cooling the dehumidifying portion is provided on the dehumidifying portion 14 supplying an adsorbent particle 15 to the duct 11 to guide cooling water from a cooling tower 19 enabling the isothermal dehumidification. The dehumidifying agent particle 15 after moisture adsorption is sent to the regenerating part 17, regenerates using a part of exhaust air from an objective air conditioning space 21, and at the same time enables a regeneration by the conduction heating device 20. A heat exchanger 23 utilizing waste heat is also provided on the regenerating part to enable the use of various kinds of outside waste heat. An adiabatic humidifying is carried out to the exhaust air from the objective air conditioning space 21 by a cooling tower 25, and the cooling of air supply is carried out. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a dehumidification system using an adsorbent used for supplying low dew point air to a target space such as a drying apparatus or a room, and in particular, the adsorbent can be dehumidified at a dehumidifying part and conductively heated and dried at a regeneration part. The present invention relates to a low dew point air production apparatus that makes it possible to use a small amount of product air or return air from a target space, and to produce a large amount of ultra-low dew point air with low power consumption.

  Conventionally, low dew point air with low absolute humidity has been supplied to stabilize quality in semiconductor and Li battery manufacturing processes, and in particular, ultra low dew point air with low dew point air has been manufactured and supplied. ing. In the production of such low dew point air, an ultra low dew point air production apparatus using a honeycomb rotor or a pressure swing (PSA) type has been commercialized and used.

  The swing type low dew point air production apparatus is a method in which raw air is compressed by a compressor to temporarily remove drain in the air, and then passes through an adsorption tower containing an adsorbent. Requires a large amount of power to compress the air and uses a separate purified air supply to regenerate the adsorbent in the adsorption tower, which consumes a lot of energy, increases the equipment size, and increases the running cost. There's a problem.

  On the other hand, in a low dew point air production apparatus, adiabatic dehumidification close to isohumidity dehumidification is performed by precooling to, for example, 7 ° C. or less with a powerful refrigerator. At that time, if the outside air is cooled as it is, there is a problem that the latent heat removal load due to condensation increases and efficiency is lowered. Therefore, the absolute humidity is lowered by mixing the exhaust from the target space and the outside air, and only the sensible heat is removed.

  For example, in the example of the low dew point air production apparatus using the rotor shown in FIG. 11 (quoted from the Munters operation manual), when producing -60 ° C. dew point air, outside air 420 m 3 / h and indoor return air 540 m 3 / h are mixed. Of these, 160 m3 / h is used for purge regeneration to produce 800 m3 / h of product air. For this reason, about 14 kW of power is required in the production of low dew point air of 800 m 3 / h per hour, of which 5 kW or more is used as a precooling refrigerator as a precooler, and about 7 kW is used as a regenerative electric heater. In addition to this, the power consumption of the refrigerator for lowering the temperature is added separately, and the ultra-low dew point air production is a high power consumption type. Further, in the -100 ° C. low dew point air production apparatus, which will continue to increase in the future, a power consumption of 9 kW is required for producing a low dew point air of 180 m 3 / h.

In this method, air is heated to 200 ° C. by an electric heater for drying and adiabatic drying is performed. However, this results in a significant exergy loss and a longer drying time. Further, when the analysis in the rotor is performed, a laminar flow having a Re number of about 400 is obtained, and mass transfer and heat transfer speed are further reduced. Therefore, the exhaust humidity has increased only to about 57 g / kg. This is related to the fact that the relative humidity increases only to 0.5% due to the high temperature.
As shown in the temperature-humidity diagram of Fig. 8 with the vertical axis representing the logarithmic axis for low dew point air, the ambient humidity is mixed with the outside air and the relative humidity is increased by increasing the temperature to 200 ° C by 160 m3 / h. When the air for regeneration is about 0.5%, it becomes the dehumidifying limit of the dehumidifying agent particles. In addition, using the dehumidifying agent particles thus dried, the temperature is lowered to 7 ° C. so that the temperature of the air-fuel mixture is changed to 800 m 3 / h, which is close to isothermal dehumidification. If only the outside air is used, condensation will occur at 7 ° C. because it exceeds the saturation humidity, and more energy for removing latent heat will be required. Therefore, it is necessary to make a low-humidity raw material by mixing with indoor ventilation. After that, when the heat is dehumidified, low dew point air production at −60 ° C. can be produced. In the figure, humidity levels of −60 ° C., −80 ° C., −90 ° C., and −100 ° C. are indicated by thick broken lines.

In addition, after dehumidifying using a two-stage rotor and dehumidifying to an intermediate ultimate dew point temperature of about −70 to −75 ° C., using a non-regenerative dehumidifier, dehumidifying to a final ultimate dew point temperature of −90 ° C. or lower. The technique to do is disclosed by patent document 1. FIG. In addition, the technology in which dehumidification is performed sequentially using a three-stage rotor, the rotor is provided with a purge zone before moving to the regeneration zone and the dehumidification zone, and the dehumidified air from the rotor is introduced into the purge zone. It is disclosed in Patent Document 2. Furthermore, in a low-concentration gas sorption machine using a rotor, the rotor is divided into a plurality of parts in the circumferential direction, and the formed sector functions as a first stage sorption zone, a second stage sorption zone, a precooling zone, and a regeneration zone The technique made to do so is disclosed in Patent Document 3.
Japanese Patent Application Laid-Open No. 07-754 Japanese Patent No. 3483752 Japanese Patent No. 2673300

  As described above, the swing type low dew point air production apparatus is a power consuming type, and the equipment becomes large and expensive, and the low dew point air production apparatus using the rotor requires a large amount of power consumption. There's a problem.

  Therefore, according to the present invention, the power consumption can be greatly cut, the production air volume can be greatly increased, and various waste heats can be used to produce more efficient low dew point air. The main purpose is to provide a dew point air production apparatus.

  In the low dew point air production apparatus according to the present invention, firstly, in order to solve the above problems, conductive heating drying is performed during drying regeneration of the dehumidifying agent, thereby increasing the humidity to the saturated vapor pressure of the exhaust temperature. To. For example, as shown as a heat transfer body internal type in the drying of vinyl chloride in the table of FIG. 10 (cited from Table 1.8 of p190 in the Fluidized Bed Handbook Japan Powder Industrial Technology Association), conductive heating at an outlet air temperature of 49.5 ° C. When drying is performed, exhaust can be performed at a humidity of 91%. Here, the drying was performed at 60 ° C., but at this time, the drying could be performed at an exhaust temperature of about 40 ° C. and a relative humidity of 100%. If the exhaust temperature is 90 ° C and the relative humidity is 90%, the humidity (absolute) is about 1 kg / kg. The air volume for regeneration is about 1/20 of the conventional -60 ° C. dew point air production process example. In other words, it can be regenerated at a flow rate of about 8 m 3 / h, and it can be seen that there is almost no burden even if the exhaust in the product or the target space is used.

  Thus, the effect by using conductive heating was further confirmed by a fluidized bed (FB) drying test. FIG. 7 shows the operating state in the present invention at that time. In this test, the heater was turned on and off as indicated by H [ON / OFF] at the bottom of the figure to heat the electric heater, thereby obtaining 100% exhaust humidity as shown in φout in the figure. It can be seen that the humidity inside the fluidized bed (FB) indicated as φFB at that time rapidly decreases and the dehumidifying effect is high. In addition, the temperature and humidity change of the outside air during this test is as shown in the figure.

  In the present invention, in order to solve the above-mentioned problem, secondly, the dehumidification limit is achieved by performing isothermal dehumidification realized by cooling with tap water or cooling tower cooling water that is in equilibrium with the outside air temperature in a dehumidifying section that dehumidifies air with a dehumidifying agent. In addition, it is possible to perform dehumidification without problems, and to use less indoor return air or product air for regeneration of the dehumidifying agent so that dehumidification with high energy saving can be performed, and waste heat can be used.

  That is, as shown in the temperature-humidity diagram (for low dew point) in FIG. 9, the outside air 4.2 and the indoor ventilation 5.4 are mixed and dried to a relative humidity of about 0.5% by raising the temperature to 200 ° C. When regenerating the dehumidifying agent particles as air, it becomes the dehumidifying limit. Thereafter, when the outside air of 800 m 3 / h is dehumidified to the dehumidification limit, the low dew point air at a level of −60 ° C. can be produced by dehumidifying about 12 kg / h. In order to perform isothermal dehumidification at the same level as the outside air temperature, it is sufficient to cool with tap water or cooling tower cooling water, so only water circulation power is required, and significant energy saving is possible. In addition, the amount of mixed air necessary for regeneration of the dehumidifying agent is 12 m3 / h under the condition of 1 kg / kg. In the figure, the absolute humidity levels of −60 ° C., −80 ° C., −90 ° C., and −100 ° C. are indicated by thick broken lines.

In the system for performing isothermal dehumidification according to the present invention as described above, it is possible to reduce the humidity to the dehumidification limit without any problems even when starting from the outside air at 30 ° C. In addition, when indoor return air is used for regeneration, the dehumidification limit for producing -60 ° C. dew point air can be achieved by raising the temperature to about 80 ° C., thereby further saving energy. Furthermore, since it is not necessary to raise the temperature with a heater, it becomes easy to use waste heat. However, in this case, the required air volume at the time of regeneration is 50-100 m <3> / h because the absolute humidity decreases due to a decrease in exhaust temperature.
Moreover, once the low dew point air of −60 ° C. is made 800 m 3 / h and regenerated using a part of the air, the temperature is raised to 200 ° C., and the ultra low dew point air of −100 ° C. is about 800 m 3 / h from the outside air alone. It can be manufactured together with the above-mentioned -60 ° C. low dew point air of about 788 m 3 / h. Here, the amount of air that needs to be raised to 200 ° C. is about 12 m 3 / h because the dehumidification amount itself is the same as that in the above-mentioned −60 ° C. air production, and the heater power consumption can be reduced.
Here, if -60 ° C. low dew point air produced in the middle is used as the raw material air, the amount of dehumidification is further reduced, so that the amount of air and power consumption required for regeneration of the dehumidifying agent are reduced, and energy saving is further increased. Become.

  In the present invention as described above, the following configuration is adopted as a more specific configuration. That is, the low dew point air production apparatus according to the present invention is provided with a cooler that performs isothermal dehumidification in a dehumidifying part in a duct to which an adsorbent or an adsorbent holding member is supplied in order to solve the above-described problem. A regenerative unit that regenerates the dehumidifying agent or dehumidifying agent holding member after dehumidification is provided with a conductive heating device so that it can be regenerated with a small amount of product air or return air from the target space.

  In another low dew point air production apparatus according to the present invention, in the low dew point air production apparatus, the adsorbent particles or the adsorbent holding member moves in a direction opposite to the direction of the air flow in the duct in the dehumidifying unit, It is characterized by being in countercurrent contact with each other.

  Another low dew point air production apparatus according to the present invention is the low dew point air production apparatus, wherein the exhaust from the target space for supplying the dehumidified air is sent to the cooling tower to perform adiabatic humidification to generate cooling water, A cooling action is performed by supplying water into the duct or the target space with water.

In another low dew point air production apparatus according to the present invention, in the low dew point air production apparatus, a plurality of air permeable inclined plates are provided in a vertical direction in a zigzag shape in a vertical duct to which air is supplied from below.
The adsorbent is caused to flow from the uppermost inclined plate to the lower inclined plate sequentially to bring the air and the adsorbent into countercurrent contact.

Another low dew point air production apparatus according to the present invention is the low dew point air production apparatus, wherein a plurality of air permeable air dispersion plates are adsorbed in a vertical direction in a vertical duct to which air is supplied from below. The agent particles can be stored and the stored particles can flow down,
The particles on the air dispersion plate are fluidized by the air from below,
The adsorbent is caused to flow down onto the uppermost air dispersion plate from the upper part to bring the air and the adsorbent into countercurrent contact.

  Another low dew point air production apparatus according to the present invention is such that in the low dew point air production apparatus, the low dew point air production apparatus is processed vertically or on a plane, and the air treated by the first device is treated by another device. A part of the air processed in each device is used for adsorbent regeneration in each device.

  In another low dew point air production apparatus according to the present invention, in the low dew point air production apparatus, the regeneration unit is a horizontal fluidized bed in which a plurality of separate fluidized beds are arranged in the lateral direction, and the adsorbent holding member is The horizontal fluidized bed is passed through and regenerated in order, and the plurality of fluidized beds are set so as to change from a high temperature to a low temperature in the moving direction of the adsorbent holding member.

  Another low dew point air production apparatus according to the present invention is the low dew point air production apparatus, wherein the regeneration unit conducts conduction heating as a rotary kiln, a sloping gutter, or a moving layer, and the outlet side has an inlet at the highest temperature. The heat transfer tube is arranged so that the side has the lowest temperature.

  Since the present invention is configured as described above, the power consumption can be greatly cut, the production air volume can be greatly increased, and various types of waste heat can be used. Dew point air can be produced.

  An object of the present invention is to provide an isothermal solution for a dehumidifying part in a duct to which an adsorbent or an adsorbent holding member is supplied, while greatly increasing the production air volume with low power consumption and allowing more efficient low dew point air to be produced. This is realized by providing a cooler for performing dehumidification, and providing a conductive heating device in the regenerating unit for regenerating the dehumidifying agent or the dehumidifying agent holding member after dehumidifying in the dehumidifying unit.

  Examples of the present invention based on the above principle will be described in order when used in an actual apparatus. FIG. 1 shows an example in which a low dew point air production apparatus according to the present invention is used in a dehumidifying agent particle circulation type air conditioning system. In the illustrated example, outside air introduced by a blower 12 is stored in a duct 11 and dehumidifying agent particles are stored. The particle storage tank 13 is supplied to the dehumidifying section 14 in the duct. In the example shown in the figure, the dehumidifying agent particles 15 are caused to flow down from the dehumidifying agent particle storage tank, collected by the lower collecting unit 16, and conveyed down to the regeneration unit 17. The dehumidifying section 14 is provided with a heat exchanger 18 for cooling the dehumidifying section, which cools the particles themselves, adsorbs vapors with the dehumidifying agent particles, and cools the dehumidified air whose temperature rises. In the example of FIG. 1, cooling water cooled by a cooling tower 19 provided outside is circulated and supplied to the heat exchanger 18 for cooling the dehumidifying part.

  The regeneration unit 17 is provided with a conductive heating device 20 schematically shown in the drawing, and a part of the ventilation from the target air-conditioned space 21 is introduced as air for drying from the air introduction unit 22 and discharged to the outside. The example which provided the waste heat utilization heat exchanger 23 which introduce | transduces waste heat itself or the heat medium heat-exchanged with the waste heat is shown. Various devices can be used as the conductive heating device 20, and direct contact heating means with the dehumidifying agent particles, radiation heating means, or the like can be used. In addition, conductive heating is also possible by the waste heat utilization heat exchanger 23. The regeneration air introduced into the air introduction unit 22 performs the function described in detail in the principle of the present invention as described above by using the conductive heating device 20 in the present invention, and the air volume of indoor ventilation necessary for regeneration. Can be reduced to 1/20 or less. Thereby, the low-temperature and low-humidity heat that the indoor return air has can be used effectively for other purposes such as further cooling of the cooling water from the cooling tower 19.

  Further, in the example shown in FIG. 1, low-dew point air from the room is supplied to the cooling tower 25, adiabatic and humidified to generate cooling water, and cooling the air supplied to the room after dehumidifying the cooling water. An example of circulation with the container 26 is shown. As a result, the temperature of the produced low dew point air can be lowered, and the cooling power of the target space that was separately required can be reduced.

  As a dehumidification system for supplying low dew point air to the target space by means of the apparatus as described above, adsorption is performed by installing a heat exchanger 18 using cooling water from the cooling tower 19 or the like in the dehumidification section 14 in the duct 11. It is possible to perform dehumidification by performing an isothermal dehumidification operation with the agent particles 15. Thereafter, the dehumidifying agent particles 15 are transferred to the regeneration unit 17 and regenerated, and stored in the particle storage tank 13. At this time, since the particle regeneration is regeneration by the conduction heating device 20, the required air volume can be greatly reduced. . As a result, exhaust from the low dew point air supply space, which is the target air-conditioned space, or a part of the low dew point air of the product can be used as regeneration air, and a large amount of low dew point air can be produced.

  The present invention can also be implemented as a low dew point air production apparatus as shown in FIG. That is, in the example shown in FIG. 2, an example is shown in which the dehumidifying agent is attached to a sheet-like object or manufactured integrally with a sheet-like object to form a sheet-like adsorbent holding member 30. A plurality of such sheet-like adsorbent holding members 30 are stacked as shown in the figure, and the dehumidifying section duct 32, the regenerating section 33, the cooling section 34, and the adsorbent holding member storage section 35 are stacked by the transport roller 31. Circulation is possible in order. In the illustrated example, the adsorbent holding member storage unit 35 has a plurality of sheet-like adsorbent holding members 30 stacked horizontally, whereas the dehumidifying unit duct 32 separates them and transports them horizontally in the figure. In the reproducing unit 33, the sheet-like adsorbent holding member 30 conveyed from the conveying roller 31 is separated and conveyed in the vertical direction by the horizontal-vertical direction converting unit 42, and is stacked in the horizontal direction by the vertical-horizontal direction converting unit 43. Thereafter, the adsorbent holding member storage unit 35 is configured to be stacked and conveyed.

  In the example of FIG. 2, a mixture of outside air from the intake port 36 or exhaust gas from the target air-conditioning space 39 is introduced into the dehumidifying part duct 32, and dehumidified air enters the target air-conditioned space 39 from the exhaust port 37 through the air duct 38. To supply. In the dehumidifying part duct 32, the sheet-like adsorbent holding member 30 is set so as to be conveyed in the direction opposite to the air flow, so that the sheet-like adsorbent holding member is counter-contacted in the dehumidifying part duct 32. Therefore, efficient dehumidification can be performed. A large number of cooling pipes 40 serving as cooling heat exchangers are arranged in the dehumidifying section duct to enable isothermal dehumidification. In the illustrated embodiment, an example in which four sheet-like adsorbent holding members are used in an overlapping manner is shown, but a larger number of sheet-like adsorbent holding members can be used in an overlapping manner. Further, various heat exchangers such as a flat plate heat exchanger can be used as the cooling pipe as the cooling heat exchanger.

  In the regeneration unit 33, the interior of the room is divided into a plurality of fluidized beds 41 by the partition walls 34, and the separated sheet-like adsorbent holding members 30 can be conveyed through slits formed in the partition walls 44. In the plurality of separated fluidized beds 41, particles in the fluidized bed flow by air of a predetermined temperature introduced from below, and each sheet-like adsorbent holding member 30 passing therethrough is conductively heated by coming into contact therewith. To do. In the fluidized bed 41 arranged in the horizontal direction, the temperature of the hot air introduced in order of the moving direction of the sheet-like adsorbent holding member 30 is changed from a high temperature to a low temperature. Part of the dehumidified air supplied from the duct 32 to the target air-conditioned space 39 is introduced. Flowing air introduced into each fluidized bed is discharged from a discharge port 45 provided at the top of each fluidized bed. The cooling unit 34 includes a cooling heat exchanger, and cools the sheet-like adsorbent holding member 30 whose temperature has increased during regeneration of the adsorbent and sends it to the adsorbent holding member storage unit 35.

  Even in the apparatus as described above, it is possible to perform dehumidification by performing an isothermal dehumidification operation by installing the cooling pipe 40 that guides cooling water from a cooling tower or the like in the dehumidifying section duct 32, and in the regeneration section 33, the fluidized bed It can be regenerated by conducting conductive heating with 41. As a result, exhaust from the low dew point air supply space as the target air-conditioned space 34 or the low dew point air of the product can be used as regeneration air, and a large amount of low dew point air can be produced.

  In the embodiment shown in FIG. 3, a plurality of air-permeable inclined plates 46 are installed in a zigzag manner in a vertical duct 54, and adsorbent particles are sequentially layered on the inclined plate 46 from the upper portion of the lower inclined plate 46. The adsorbent 47 is brought into contact with the air supplied from the lower intake port 43 to improve the contact efficiency between the adsorbent 47 and the air, and the adsorbent 47 particles are brought into countercurrent contact with the air. Dehumidified air is supplied to the target conditioned space 57. At this time, the cooling pipe 48 is installed below the inclined plate 46, inside the inclined plate, or inside the adsorbent particle layer, so that isothermal dehumidification is possible.

  In this example as well, regeneration is performed by introducing a part of the indoor exhaust air from the air supply port 51 into the regenerative unit 50 arranged in an inclined manner in the drawing, and particles are also generated by the pressurized air introduced from the air supply port 51. To a fluidized state and air slide state. At that time, it is possible to conduct conduction heating by the conduction heating unit 53 provided inside. In addition, the regeneration unit 50 may be heated using external waste heat as necessary, and a heat exchanger for cooling the dehumidifier after regeneration may be provided. Furthermore, conductive heating can be performed by making the inclined regenerative part into a rotary kiln. In the example of FIG. 3, the dehumidifying agent particles regenerated by the regenerating unit 50 are conveyed to the upper dehumidifying agent storage tank 56 through the conveying pipe 55 by the pressurized air from the scavenging port 54.

  The method of bringing the dehumidifying agent particles descending from above and the air flow into counter-current contact using the vertical duct as described above can be implemented as shown in FIG. 4 in addition to the example shown in FIG. That is, in the example shown in FIG. 4, a plurality of porous air dispersion plates 60 are provided horizontally in a vertical duct 54, and the flow of the dehumidifying particles 47 is guided from the upper air dispersion plate to the lower air dispersion plate. A plurality of fluidized beds 62 are formed in the duct in the vertical direction by providing the guide plate 61 to be projected and projecting the upper end portion of the guide plate 61 upward from the air dispersion plate on the upper side. In the illustrated embodiment, four stages of fluidized beds 62 are formed in the vertical direction, and the air supplied from below in each fluidized bed 62 fluidizes the adsorbent particles 47 through the porous air dispersion plate 60, So that it can be dehumidified. Cooling water from an external cooling tower or the like is supplied to each fluidized bed 62 to enable isothermal dehumidification here. Other configurations of the reproduction unit and the like are the same as those in the example shown in FIG. 3, and a description thereof is omitted here.

  As described above, a plurality of fluidized beds 62 made of an adsorbent are formed in the vertical direction, the adsorbent is sequentially moved from the upper part to the fluidized bed 62 on the lower air dispersion plate 60, and air is supplied from the lower part, whereby the adsorbent is obtained. The contact efficiency between the particles and air can be improved, and the adsorbent particles and air can be brought into countercurrent contact.

  FIG. 5 shows still another embodiment. In the example shown in FIG. 5, low dew point air production apparatuses 68 to 70 are provided which are provided with a porous inclined plate 46 in the vertical ducts 65 to 67 as shown in FIG. 3 and flow down the dehumidifying agent particles 47 in order from above. Three of them are arranged in parallel in the same plane, and the air processed by the first low dew point air production device 68 is sequentially processed by the second low dew point air production device 69 and the third low dew point air production device 70. In order, air with a low dew point can be produced. As described above, in the low dew point air production apparatus, it is possible to further increase the dryness by using the processing air or a part of ventilation as the dry air supplied to the subsequent conduction heating drying apparatus. In addition, a part of the air processed in each device can be used for regeneration of the adsorbent in each system, so that the amount of air required for regeneration processing can be reduced as the dew point becomes lower, and is necessary in the subsequent stage. The high-temperature air production energy can be reduced, and the efficiency of the overall low dew point air production system can be increased.

  In such a system, -60 ° C. low dew point air production is performed with the former low dew point air production apparatus, and a part of the air is used for particle drying of the latter low dew point air production apparatus, thereby allowing the air to be used at a temperature exceeding -100 ° C. Manufacture is possible. At this time, if there are two stages, the particle drying temperature can be reduced to about 150 ° C. or less if the particle drying temperature is about 200 ° C. and three stages. At this time, if the processing air temperature is lowered to 10 ° C. instead of 30 ° C., the drying temperature is 150 ° C. in two stages, and if it is three stages, the drying temperature can be 100 ° C. or less.

In the example shown in FIG. 5, an example in which a plurality of independent low dew point air production apparatuses are arranged in the same plane is shown. However, as shown in FIG. 6, the independent low dew point air production apparatuses are arranged in one duct. A plurality of them may be arranged in the vertical direction. In the example shown in FIG. 6, the first low dew point air production device 71, the second low dew point air production device 72, and the third low low temperature are sequentially supplied from the lower side into the vertical duct 65 to which air to be dehumidified is supplied from the lower intake port 43. A dew point air production apparatus 73 is arranged, and a dehumidifying part of each apparatus is arranged in the same duct 74. In addition, since the structure of each low dew point air production apparatus is the same as that of the said FIG. 5, detailed description is abbreviate | omitted.
In the example shown in FIG. 6, a part of the air processed by each device with the above configuration is used for the regeneration of the adsorbent of each system, so that the amount of air required for the regeneration process is reduced as the dew point becomes lower. This makes it possible to reduce the high-temperature air production energy required in the subsequent stage and increase the efficiency of the overall low dew point air production system.

  The present invention as described above can be used in various fields such as a dehumidifier of a low-temperature refrigeration warehouse that requires a low dew point, in addition to being used as a low-humidity air production apparatus for semiconductor and Li battery production. it can.

It is explanatory drawing of Example 1 of this invention. It is explanatory drawing of Example 2 of this invention. It is explanatory drawing of Example 3 of this invention. It is explanatory drawing of Example 4 of this invention. It is explanatory drawing of Example 5 of this invention. It is explanatory drawing of Example 6 of this invention. It is a figure which shows the FB drying test result by this invention. It is a humidity diagram for low dew points which shows the operation | movement of the conventional rotor type | mold apparatus. It is a humidity diagram for low dew points showing the principle of the present invention. It is the table | surface which compared the hot air heat receiving type | mold in the S-PVC powder drying process, and the heat exchanger interior type. It is a conventional -60 degreeC dew point air manufacture flowchart.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Duct 12 Air blower 13 Particle storage tank 14 Dehumidification part 15 Dehumidifier particle | grains 16 Collection part 17 Reproduction | regeneration part 18 Dehumidification part cooling heat exchanger 19 Cooling tower 20 Conduction heating apparatus 21 Target air-conditioning space 22 Air introduction part 23 Waste heat utilization heat exchanger 25 Cooling tower 26 Supply air cooler

Claims (8)

A cooler that performs isothermal dehumidification is provided in the dehumidifying section in the duct to which the adsorbent or the adsorbent holding member is supplied,
A low dew point air production apparatus characterized in that a conduction heating device is provided in a regeneration unit for regenerating a dehumidifier or a dehumidifying agent holding member after dehumidification in the dehumidifying unit.   2. The low dew point air production apparatus according to claim 1, wherein the adsorbent particles or the adsorbent holding member are moved in a direction opposite to the direction of the air flow in the duct in the dehumidifying section and are in countercurrent contact with each other.   Claims characterized in that exhaust from a target space for supplying dehumidified air is sent to a cooling tower, adiabatic humidification is performed to generate cooling water, and the cooling water is supplied to the inside of the duct or the target space for cooling. Item 2. The low dew point air production apparatus according to Item 1. In a vertical duct to which air is supplied from below, a plurality of air permeable inclined plates are provided in a vertical direction in a zigzag shape,
2. The low dew point air production apparatus according to claim 1, wherein air and the adsorbent are brought into countercurrent contact by causing the adsorbent to flow downward from the uppermost inclined plate to the lower inclined plate from the upper part. A plurality of air-permeable air dispersion plates are provided in a vertical duct to which air is supplied from below, and a plurality of adsorbent particles can be stored in the vertical direction, and the stored particles can flow down,
The particles on the air dispersion plate are fluidized by the air from below,
The low dew point air production apparatus according to claim 1, wherein air and the adsorbent are brought into countercurrent contact by causing the adsorbent to flow down from the upper part onto the uppermost air dispersion plate.   The low dew point air production apparatus is arranged vertically or on a plane in series so that the air processed by the first apparatus is processed by another apparatus, and a part of the air processed by each apparatus is adsorbent in each apparatus. The low dew point air production apparatus according to claim 1, wherein the low dew point air production apparatus is used for regeneration. The regeneration unit is a horizontal fluidized bed in which a plurality of separate fluidized beds are arranged in the lateral direction,
The adsorbent holding member is sequentially moved through the horizontal fluidized bed to perform a regeneration process,
The low dew point air production apparatus according to claim 1, wherein the plurality of fluidized beds are set so as to change from a high temperature to a low temperature in the order of movement of the adsorbent holding member. The regeneration unit performs conduction heating as a rotary kiln, a sloping rod, or a moving layer,
2. The low dew point air production apparatus according to claim 1, wherein the heat transfer tubes for heating are arranged so that the outlet side has the highest temperature and the inlet side has the lowest temperature.

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