JP2009077545A - Driver - Google Patents

Driver Download PDF

Info

Publication number
JP2009077545A
JP2009077545A JP2007244414A JP2007244414A JP2009077545A JP 2009077545 A JP2009077545 A JP 2009077545A JP 2007244414 A JP2007244414 A JP 2007244414A JP 2007244414 A JP2007244414 A JP 2007244414A JP 2009077545 A JP2009077545 A JP 2009077545A
Authority
JP
Japan
Prior art keywords
plate
piezoelectric element
diaphragm
conductive
conductive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007244414A
Other languages
Japanese (ja)
Inventor
Kimio Handa
喜美夫 半田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Electronics Inc
Original Assignee
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Electronics Inc filed Critical Canon Electronics Inc
Priority to JP2007244414A priority Critical patent/JP2009077545A/en
Publication of JP2009077545A publication Critical patent/JP2009077545A/en
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reliable driver which facilitates connection of the electrode film of a piezoelectric element and a wiring member, and ensures stabilized conduction. <P>SOLUTION: The driver comprises: a plurality of planar piezoelectric elements 3 each having an electrode film formed on the opposite sides; conductive diaphragms sandwiched between the plurality of piezoelectric elements; a planar conductive member 5 for electrically conducting the piezoelectric element and the diaphragm; a rodlike drive member 1 connected with one of the plurality of piezoelectric elements; a driven member 8 friction engaging with the drive member movably; and supporting members 2 and 7 for supporting the drive member and holding electric conduction of the piezoelectric element and the planar conductive member by pressing the piezoelectric element, the diaphragm and the planar conductive member. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、圧電素子を用いた駆動装置の給電構造に関するものである。   The present invention relates to a power feeding structure of a driving device using a piezoelectric element.

従来の圧電素子を用いた駆動装置では、いろいろな形式の給電構造が提案されているが、一例として図6を参照しながら従来の駆動装置について説明する。   Various types of power feeding structures have been proposed for conventional driving devices using piezoelectric elements. As an example, a conventional driving device will be described with reference to FIG.

図6は従来の駆動装置の側面図である。   FIG. 6 is a side view of a conventional drive device.

振動発生部材100の一方の表面に円柱状の駆動部材140が結合され、駆動部材140には被駆動部材180が摩擦係合されている。駆動部材140は不図示の支持部材により保持されている。   A cylindrical driving member 140 is coupled to one surface of the vibration generating member 100, and a driven member 180 is frictionally engaged with the driving member 140. The drive member 140 is held by a support member (not shown).

振動発生部材100は、円板状の圧電素子110,120と、圧電素子110,120の内側の表面に貼り合わされた振動板130とを備えている。   The vibration generating member 100 includes disk-shaped piezoelectric elements 110 and 120 and a vibration plate 130 bonded to the inner surface of the piezoelectric elements 110 and 120.

圧電素子110,120の両面には電極膜が形成されている。   Electrode films are formed on both surfaces of the piezoelectric elements 110 and 120.

振動板130は圧電素子110,120よりやや径の大きい円板状の金属板からなる。この振動板130は、圧電素子110,120の電極膜と導通接続されている。   The diaphragm 130 is made of a disk-shaped metal plate having a slightly larger diameter than the piezoelectric elements 110 and 120. The diaphragm 130 is electrically connected to the electrode films of the piezoelectric elements 110 and 120.

この振動発生部材100には、リード線150及び151がハンダ付けにより接続されている。リード線150は、一方の圧電素子110の電極膜にハンダ付けされている。またリード線151は、振動板130に接続されている。さらに、一方の圧電素子110の電極膜と他方の圧電素子120の電極膜はリード線152により導通配線される。   Lead wires 150 and 151 are connected to the vibration generating member 100 by soldering. The lead wire 150 is soldered to the electrode film of one piezoelectric element 110. The lead wire 151 is connected to the diaphragm 130. Further, the electrode film of one piezoelectric element 110 and the electrode film of the other piezoelectric element 120 are electrically connected by a lead wire 152.

このような圧電素子を用いた駆動装置では、振動発生部材100のリード線150と151との間に適切な電圧を印加することにより圧電素子110,120が振動する。この振動は振動発生部材100の一方の表面に固定された駆動部材140を振動させ、駆動部材140に摩擦係合された被駆動部材180を駆動部材140に沿って移動させる。   In the driving apparatus using such a piezoelectric element, the piezoelectric elements 110 and 120 vibrate by applying an appropriate voltage between the lead wires 150 and 151 of the vibration generating member 100. This vibration causes the driving member 140 fixed to one surface of the vibration generating member 100 to vibrate, and the driven member 180 frictionally engaged with the driving member 140 is moved along the driving member 140.

図7は、他の従来例を示す図である。図7の構造では、圧電素子210と引出し電極250を接着剤260で貼り合わせ加圧し、圧電素子210の電極膜211の表面の凸凹を利用して、電極膜211の凸部212と引出し電極250を接触させて導電性を維持させている。   FIG. 7 is a diagram showing another conventional example. In the structure of FIG. 7, the piezoelectric element 210 and the extraction electrode 250 are bonded and pressurized with an adhesive 260, and the protrusions 212 of the electrode film 211 and the extraction electrode 250 are utilized using the unevenness of the surface of the electrode film 211 of the piezoelectric element 210. To maintain conductivity.

さらに図8は他の従来例を示す図である。図8の構造では、圧電素子310の表面に形成された電極膜311の上に接続電極313を形成し、その上にハンダ組成のバンプ360を形成している。そして、バンプ360の上に引出導電部材350をのせて、ヒーター370で加熱圧着して導電性を維持させている。なお、図8において、320は圧電素子、330は振動板である。   FIG. 8 is a diagram showing another conventional example. In the structure of FIG. 8, the connection electrode 313 is formed on the electrode film 311 formed on the surface of the piezoelectric element 310, and the bump 360 of solder composition is formed thereon. Then, the lead conductive member 350 is placed on the bump 360 and is heat-pressed by the heater 370 to maintain conductivity. In FIG. 8, 320 is a piezoelectric element, and 330 is a diaphragm.

これらは公知例として、例えば特許文献1に記載されている。
特開2003−125492号公報
These are described, for example, in Patent Document 1 as known examples.
JP 2003-125492 A

しかしながら、図6に示す駆動装置の給電方法では、リード線の取扱により、ハンダ付けの根元で屈曲が繰り返され断線が起きやすい。また、ハンダフィレットの厚みで薄型化に限界がある。   However, in the power feeding method of the drive device shown in FIG. 6, the lead wire is easily bent due to the handling of the lead wire and repeatedly bent at the base of soldering. In addition, there is a limit to reducing the thickness of the solder fillet.

図7に示す方法では、接着部分が緩み接着結合が剥がれる可能性がある。さらに接着剤硬化時間が必要であるために、製造作業に時間がかかる。   In the method shown in FIG. 7, there is a possibility that the bonded portion is loosened and the adhesive bond is peeled off. Furthermore, since the adhesive curing time is required, the manufacturing operation takes time.

図8に示す方法では、工程が複雑で生産性が低下する。   In the method shown in FIG. 8, the process is complicated and the productivity is lowered.

従って、本発明は上述した課題に鑑みてなされたものであり、その目的は、圧電素子の電極膜と配線部材の接続を容易にし、且つ安定した通電を確保した信頼性のある駆動装置を提供することである。   Accordingly, the present invention has been made in view of the above-described problems, and an object of the present invention is to provide a reliable driving device that facilitates the connection between the electrode film of the piezoelectric element and the wiring member and ensures stable energization. It is to be.

上述した課題を解決し、目的を達成するために、本発明に係わる駆動装置は、平板状に形成され、両面に電極膜が形成された複数の圧電素子と、前記複数の圧電素子の間に挟まれた導電性の振動板と、前記圧電素子と前記振動板とに通電する板状の導電部材と、前記複数の圧電素子の内の1つに接続された棒状の駆動部材と、前記駆動部材に対して移動可能に摩擦係合された被駆動部材と、前記駆動部材を支持すると共に、前記圧電素子と、前記振動板と、前記板状の導電部材とを加圧して挟むことにより、前記圧電素子と前記板状の導電部材との電気的な導通を保持する支持部材と、を備えることを特徴とする。   In order to solve the above-described problems and achieve the object, a driving apparatus according to the present invention includes a plurality of piezoelectric elements formed in a flat plate shape and having electrode films formed on both surfaces, and the plurality of piezoelectric elements. A sandwiched conductive diaphragm; a plate-like conductive member for energizing the piezoelectric element and the diaphragm; a rod-like drive member connected to one of the plurality of piezoelectric elements; and the drive A driven member frictionally engaged with the member, supporting the driving member, and pressing and sandwiching the piezoelectric element, the diaphragm, and the plate-like conductive member, And a support member that maintains electrical continuity between the piezoelectric element and the plate-like conductive member.

また、この発明に係わる駆動装置において、前記支持部材は、弾性力を有する弾性部材を用いて、前記圧電素子と、前記振動板と、前記板状の導電部材とを加圧して挟むことを特徴とする。   In the driving apparatus according to the present invention, the support member presses and sandwiches the piezoelectric element, the diaphragm, and the plate-like conductive member using an elastic member having an elastic force. And

また、この発明に係わる駆動装置において、前記弾性部材は、前記板状の導電部材に形成された板バネ形状部であることを特徴とする。   In the drive device according to the present invention, the elastic member is a leaf spring shape portion formed on the plate-like conductive member.

また、この発明に係わる駆動装置において、前記弾性部材は、合成高分子材料からなることを特徴とする。   In the driving apparatus according to the present invention, the elastic member is made of a synthetic polymer material.

また、この発明に係わる駆動装置において、前記板状の導電部材は、フレキシブルプリント基板であることを特徴とする。   In the driving device according to the present invention, the plate-like conductive member is a flexible printed board.

また、この発明に係わる駆動装置において、前記板状の導電部材は、リード線が圧着された圧着端子を有する薄板であることを特徴とする。   In the driving apparatus according to the present invention, the plate-like conductive member is a thin plate having a crimp terminal to which a lead wire is crimped.

本発明によれば、圧電素子の電極膜と配線部材の接続を容易にし、且つ安定した通電を確保した信頼性のある駆動装置を提供することが可能となる。   ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the reliable drive device which made the connection of the electrode film of a piezoelectric element, and a wiring member easy, and ensured the stable electricity supply.

以下、本発明の好適な実施形態について、添付図面を参照して詳細に説明する。   DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described in detail with reference to the accompanying drawings.

(第1の実施形態)
図1は、本発明の第1の実施形態の駆動装置の構成を示す分解斜視図である。図2は給電構造を示す図である。
(First embodiment)
FIG. 1 is an exploded perspective view showing the configuration of the driving apparatus according to the first embodiment of the present invention. FIG. 2 is a diagram showing a power feeding structure.

被駆動部材8に摩擦係合された円柱状(棒状)の駆動部材1は支持部材2の支持部2aの穴2b、支持部2cの穴2dに挿入されて、駆動部材1の長手方向に移動可能に保持されている。駆動部材1の1端面に複数の平板状の圧電素子を用いた振動発生部材3が結合されている。   The columnar (rod-like) driving member 1 frictionally engaged with the driven member 8 is inserted into the hole 2b of the supporting portion 2a of the supporting member 2 and the hole 2d of the supporting portion 2c, and moves in the longitudinal direction of the driving member 1. Held possible. A vibration generating member 3 using a plurality of plate-like piezoelectric elements is coupled to one end face of the driving member 1.

振動発生部材3は2つの円板状の圧電素子3b,3cと、この2つの圧電素子に挟まれて貼り合わされた振動板3aとを備えている。2つの圧電素子3b,3cの両面には電極膜3b−1,3c−1が形成されている。本実施形態では、圧電素子は2つであるが、3つ以上を積層した構造でも同様であり、形状も円板以外の形状でもかまわない。   The vibration generating member 3 includes two disk-shaped piezoelectric elements 3b and 3c, and a vibration plate 3a sandwiched and bonded between the two piezoelectric elements. Electrode films 3b-1 and 3c-1 are formed on both surfaces of the two piezoelectric elements 3b and 3c. In the present embodiment, there are two piezoelectric elements, but the same applies to a structure in which three or more are stacked, and the shape may be other than a circular plate.

振動板3aは、2つの圧電素子3b,3cよりやや径の大きい円板状の金属板からなる。この振動板3aは、2つの圧電素子3b,3cの振動板3aに接する電極膜と導電可能に接合されている。   The diaphragm 3a is made of a disk-shaped metal plate having a slightly larger diameter than the two piezoelectric elements 3b and 3c. The diaphragm 3a is joined to an electrode film in contact with the diaphragm 3a of the two piezoelectric elements 3b and 3c so as to be conductive.

振動発生部材3の振動板3aの端子部3a−1には、駆動部材1に挿通された略メガネ形状のフレキシブルプリント基板(以下FPCと略する)5の導電体部5aがハンダ付けされている。   A conductor portion 5a of a substantially glasses-like flexible printed circuit board (hereinafter abbreviated as FPC) 5 inserted through the drive member 1 is soldered to the terminal portion 3a-1 of the vibration plate 3a of the vibration generating member 3. .

FPC5は、略メガネ形状のレンズに相当する位置に、互いに導電体で繋がった導電体部5b,5cを備えている。一方の導電体部5bの中心に駆動部材1が貫通する穴が設けられていて、導電体部5bは駆動部材1を挿通して、振動発生部材3の外側面の電極膜3b−1(図2の紙面裏側の面)に接触される。   The FPC 5 includes conductor portions 5b and 5c connected to each other by a conductor at a position corresponding to a substantially glasses-shaped lens. A hole through which the drive member 1 passes is provided at the center of one conductor portion 5b, and the conductor portion 5b is inserted through the drive member 1 so that the electrode film 3b-1 (see FIG. 2 on the back side of the paper).

他方の導電体部5cはU字状に折り曲げられて振動発生部材3のもう一方の外側面の電極膜3c−1に接触するように配置されている。U字状に折り曲げられたFPC5と支持部2aの間にリング形状の弾性力を有する弾性部材4aが駆動部材1に挿通して備えられている。FPC5と保持部材7の間にリング形状(穴無の円板形状でもよい)の弾性力を有する弾性部材4bが備えられている。   The other conductor 5c is bent in a U shape and is disposed so as to contact the electrode film 3c-1 on the other outer surface of the vibration generating member 3. An elastic member 4a having a ring-shaped elastic force is inserted through the drive member 1 between the FPC 5 bent into a U-shape and the support portion 2a. Between the FPC 5 and the holding member 7, there is provided an elastic member 4b having a ring-shaped (or a disk shape without holes) elastic force.

保持部材7を止めネジ7sで支持部材2に取り付けることにより、振動発生部材3、FPC5、弾性部材4a,4bは支持部材2と保持部材7に挟まれて、弾性部材4a,4bが圧縮された状態で保持される。弾性部材4a,4bは合成高分子材料(ゴム)から形成されている。安定して電極膜3b−1,3c−1と導電体部5b,5cを加圧できればそれ以外の材料も使用可能であるが、硬度等により加圧状態を比較的自由に調整できるためゴムを選択している。ちなみに止めネジ7sの止め方を、締め付けトルクや、ワッシャを入れたりして調整することにより、加圧力を調整することもできる。この圧縮の反発力で振動発生部材3の電極膜3b−1,3c−1とFPC5の導電体部5b,5cが加圧密着されて安定した通電状態に保持される。   By attaching the holding member 7 to the support member 2 with a set screw 7s, the vibration generating member 3, the FPC 5, and the elastic members 4a and 4b are sandwiched between the support member 2 and the holding member 7, and the elastic members 4a and 4b are compressed. Held in a state. The elastic members 4a and 4b are made of a synthetic polymer material (rubber). Other materials can be used as long as the electrode films 3b-1, 3c-1 and the conductor portions 5b, 5c can be pressurized stably. Selected. Incidentally, the pressing force can also be adjusted by adjusting the method of stopping the set screw 7s by inserting a tightening torque or a washer. The electrode films 3b-1 and 3c-1 of the vibration generating member 3 and the conductor portions 5b and 5c of the FPC 5 are pressed and brought into close contact with each other by the repulsive force of the compression.

FPC5を通じて適切な電圧を振動発生部材3に印加して振動を起し、駆動部材1を長手方向に振動させる。駆動部材1に摩擦係合された被駆動部材8は駆動部材に沿って移動する。   An appropriate voltage is applied to the vibration generating member 3 through the FPC 5 to cause vibration, and the drive member 1 is vibrated in the longitudinal direction. The driven member 8 frictionally engaged with the driving member 1 moves along the driving member.

FPC5と電極膜の電気接続を安定させるため、FPCの導電体部のパターンを縞模様、多点等にして接触圧を集中させる構成にしてもよい。また、FPC5の形状は、電極膜との導電性を維持できれば任意に構成して差し支えない。   In order to stabilize the electrical connection between the FPC 5 and the electrode film, the contact pressure may be concentrated by making the pattern of the conductor portion of the FPC a striped pattern, multiple points, or the like. Further, the shape of the FPC 5 may be arbitrarily configured as long as the conductivity with the electrode film can be maintained.

図3は、第2の実施形態の駆動装置を示す分解斜視図であり、図4は、第2の実施形態の給電構造を示す図である。   FIG. 3 is an exploded perspective view showing the driving apparatus of the second embodiment, and FIG. 4 is a view showing a power feeding structure of the second embodiment.

第2の実施形態は第1の実施形態と概略同じ構成であるので相違点を主に説明する。   Since the second embodiment has substantially the same configuration as the first embodiment, the differences will be mainly described.

第2の実施形態は、第1の実施形態のFPCの代わりにリード線を使ったものである。   In the second embodiment, lead wires are used instead of the FPC of the first embodiment.

振動発生部材13の圧電素子13b,13cの内側面の電極に電圧を印加するためのリード線16aが振動板13aに形成された略U字形のリード線圧着部13uに圧着接合されている。   A lead wire 16a for applying a voltage to the electrodes on the inner side surfaces of the piezoelectric elements 13b and 13c of the vibration generating member 13 is crimped and joined to a substantially U-shaped lead wire crimping portion 13u formed on the diaphragm 13a.

振動発生部材13の一方の面と支持部材2aの間には、リード線16bが圧着された薄板状でリング形状の導電部材15aとリング形状の弾性部材4aがともに駆動部材1に挿し込まれている。振動発生部材13の他方の面と保持部材7の間には、リード線16cが圧着された薄板状でリング形状(穴なしの薄板形状でもよい)の導電部材15bとリング形状(穴なしの円板形状でもよい)の弾性部材4bがともに設けられている。   Between the one surface of the vibration generating member 13 and the support member 2a, a thin plate-like ring-shaped conductive member 15a and a ring-shaped elastic member 4a to which a lead wire 16b is crimped are both inserted into the drive member 1. Yes. Between the other surface of the vibration generating member 13 and the holding member 7, a thin plate-like, ring-shaped (a thin plate-like shape without holes) with a lead wire 16 c may be bonded to a ring-shaped (circle without a hole). A plate-like elastic member 4b may be provided.

保持部材7を止めネジ7sで支持部材2に取り付けることにより、振動発生部材13、導電部材15a,15b、弾性部材4a,4bは支持部材2aと保持部材7に挟まれて、弾性部材4a,4bが圧縮された状態で保持される。この圧縮の反発力で振動発生部材13の電極膜と導電部材15a,15bが加圧密着されて通電状態に保持される。   By attaching the holding member 7 to the support member 2 with a set screw 7s, the vibration generating member 13, the conductive members 15a and 15b, and the elastic members 4a and 4b are sandwiched between the support member 2a and the holding member 7, and the elastic members 4a and 4b. Is held in a compressed state. The electrode film of the vibration generating member 13 and the conductive members 15a and 15b are pressed and brought into close contact with each other by the repulsive force of the compression.

導電部材15a,15bは振動発生部材13の電極膜と導電性を維持できれば任意の形状で差し支えない。また、導電部材15a,15bに突起等を付けて接触圧を集中させる構成にすれば、さらに導電性を向上させることができる。   The conductive members 15a and 15b may have any shape as long as they can maintain conductivity with the electrode film of the vibration generating member 13. Further, if the conductive members 15a and 15b are provided with protrusions or the like to concentrate the contact pressure, the conductivity can be further improved.

図5は、第3の実施形態の駆動装置の構成を示す分解斜視図である。   FIG. 5 is an exploded perspective view showing the configuration of the driving apparatus of the third embodiment.

第3の実施形態は第2の実施形態と概略同じ構成であるので相違点を主に説明する。   Since the third embodiment has substantially the same configuration as the second embodiment, the differences will be mainly described.

第3の実施形態は第2の実施形態の導電部材15a,15bをバネ性を有する構成にしたものである。   In the third embodiment, the conductive members 15a and 15b of the second embodiment have a spring property.

振動発生部材13の圧電素子13b,13cの内側面の電極に電圧を印加するためのリード線16aが振動板13aに形成された略U字形のリード線圧着部13uに圧着接合されている。   A lead wire 16a for applying a voltage to the electrodes on the inner side surfaces of the piezoelectric elements 13b and 13c of the vibration generating member 13 is crimped and joined to a substantially U-shaped lead wire crimping portion 13u formed on the diaphragm 13a.

振動発生部材13の一方の面と支持部材2aの間には、リード線16bが圧着された薄板状で略リング形状の導電部材25aが駆動部材1に挿し込まれている。導電部材25aには、板バネ形状部25a−1が形成されており、導電部材25aの厚さ方向に弾性を持たせている。振動発生部材13の他方の面と保持部材7の間には、リード線16cが圧着された薄板状で略リング形状(穴なしの薄板形状でもよい)の導電部材25bが設けられている。導電部材25bには、板バネ形状部25b−1が形成されており、導電部材25bの厚さ方向に弾性を持たせている。   Between the one surface of the vibration generating member 13 and the support member 2a, a thin plate-like, substantially ring-shaped conductive member 25a to which a lead wire 16b is crimped is inserted into the drive member 1. A plate spring-shaped portion 25a-1 is formed on the conductive member 25a, and elasticity is imparted in the thickness direction of the conductive member 25a. Between the other surface of the vibration generating member 13 and the holding member 7, there is provided a conductive member 25b having a thin plate shape and a substantially ring shape (or a thin plate shape without a hole) to which a lead wire 16c is crimped. The conductive member 25b is formed with a leaf spring-shaped portion 25b-1, and has elasticity in the thickness direction of the conductive member 25b.

保持部材7を止めネジ7sで支持部材2に取り付けることにより、振動発生部材13、バネ性を有する導電部材25a,25bは支持部材2aと保持部材7に挟まれて、バネ性を有する導電部材25a,25bが圧縮された状態で保持される。この圧縮の反発力で振動発生部材13の電極膜と導電部材25a,25bが加圧密着されて通電状態に保持される。   By attaching the holding member 7 to the support member 2 with a set screw 7s, the vibration generating member 13 and the conductive members 25a and 25b having spring properties are sandwiched between the support member 2a and the holding member 7, and the conductive member 25a having spring properties. 25b are held in a compressed state. The electrode film of the vibration generating member 13 and the conductive members 25a and 25b are pressed and brought into close contact with each other by the repulsive force of the compression.

導電部材25a,25bはバネ性を有し、振動発生部材13の電極膜と導電性を維持できれば任意の形状で差し支えない。   The conductive members 25a and 25b have a spring property, and may have any shape as long as the conductivity and the electrode film of the vibration generating member 13 can be maintained.

以上説明したように、上記の実施形態によれば、各電極膜と導電部材の電気的接続が、電極膜と導電部材の加圧による圧着接続で行われるため、圧電素子自体の振動で接続部分が劣化し断線することが無い。   As described above, according to the above-described embodiment, the electrical connection between each electrode film and the conductive member is performed by the crimping connection by pressurization of the electrode film and the conductive member. Will deteriorate and will not break.

さらに接着剤や電極膜への半田付けが不要であるため、接続作業が容易であり、振動発生部材を支持する支持手段と圧着接続する押圧手段を共通とすることができ、部品点数と作業工数を減らすことができる。   Furthermore, since soldering to the adhesive or electrode film is not required, the connection work is easy, and the supporting means for supporting the vibration generating member and the pressing means for crimping connection can be made common. Can be reduced.

また各電極膜や振動板との電気的接続を一体のフレキシブルプリント基板で行った場合、柔軟性があるため、接合部に無理な力がかかることが無い。さらに圧着面はフレキシブルプリント基板の導電体部で形成できるため、他の部品を使用することなく広い面積の圧着面を容易に形成できる。   In addition, when electrical connection with each electrode film and the diaphragm is performed by an integrated flexible printed board, there is no need to apply excessive force to the joint because of the flexibility. Furthermore, since the crimping surface can be formed by the conductor portion of the flexible printed circuit board, a large-area crimping surface can be easily formed without using other components.

さらに、各電極膜や振動板との電気的接続をリード線が圧着された圧着端子を有する薄板で行った場合も、導電体部である薄板部とリード線の接合部は圧着端子となっているので、接合部に無理な力がかかることが無い。また薄板部にバネ性を持たせた部分を形成することにより、接合部を加圧する弾性部材を兼ねることができ、部品点数をさらに減らすことができる。   Furthermore, even when the electrical connection with each electrode film or diaphragm is made with a thin plate having a crimp terminal to which a lead wire is crimped, the junction between the thin plate portion, which is a conductor portion, and the lead wire becomes a crimp terminal. Therefore, excessive force is not applied to the joint. Further, by forming a portion having a spring property in the thin plate portion, it can also serve as an elastic member that pressurizes the joint portion, and the number of parts can be further reduced.

本発明の第1の実施形態の駆動装置の構成を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the drive device of the 1st Embodiment of this invention. 第1の実施形態の駆動装置における給電構造を示す図である。It is a figure which shows the electric power feeding structure in the drive device of 1st Embodiment. 本発明の第2の実施形態の駆動装置の構成を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the drive device of the 2nd Embodiment of this invention. 第2の実施形態の駆動装置における給電構造を示す図である。It is a figure which shows the electric power feeding structure in the drive device of 2nd Embodiment. 本発明の第3の実施形態の駆動装置の構成を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the drive device of the 3rd Embodiment of this invention. 従来の圧電素子を用いた駆動装置における給電構造を示す図である。It is a figure which shows the electric power feeding structure in the drive device using the conventional piezoelectric element. 従来の他の給電構造を示す図である。It is a figure which shows the other conventional electric power feeding structure. 従来のさらに他の給電構造を示す図である。It is a figure which shows other conventional electric power feeding structures.

符号の説明Explanation of symbols

1 駆動部材
2 支持部材
2a,2b 支持部
2b,2d 穴
3 振動発生部材
3a 振動板
3b,3c 圧電素子
4a,4b 弾性部材
5 フレキシブルプリント基板(FPC)
5a,5b,5c 導電体部
7 保持部材
7s 止めネジ
8 被駆動部材
13 振動発生部材
13a 振動板
13u リード線圧着部
15a,15b 導電部材
16a,16b,16c リード線
25a,25b バネ性を有する導電部材
100 振動発生部材
110,120 圧電素子
130 振動板
140 駆動部材
150,151,152 リード線
180 被駆動部材
210 圧電素子
211 電極膜
212 電極膜凸部
250 引出電極
260 接着剤
310 圧電素子
311 電極膜
313 接続電極
350 引出電極
360 バンプ
370 ヒーター
DESCRIPTION OF SYMBOLS 1 Drive member 2 Support member 2a, 2b Support part 2b, 2d Hole 3 Vibration generating member 3a Diaphragm 3b, 3c Piezoelectric element 4a, 4b Elastic member 5 Flexible printed circuit board (FPC)
5a, 5b, 5c Conductor part 7 Holding member 7s Set screw 8 Driven member 13 Vibration generating member 13a Diaphragm 13u Lead wire crimping part 15a, 15b Conductive member 16a, 16b, 16c Lead wire 25a, 25b Conductive having spring property Member 100 vibration generating member 110, 120 piezoelectric element 130 diaphragm 140 driving member 150, 151, 152 lead wire 180 driven member 210 piezoelectric element 211 electrode film 212 electrode film convex part 250 extraction electrode 260 adhesive 310 piezoelectric element 311 electrode film 313 Connection electrode 350 Extraction electrode 360 Bump 370 Heater

Claims (6)

平板状に形成され、両面に電極膜が形成された複数の圧電素子と、
前記複数の圧電素子の間に挟まれた導電性の振動板と、
前記圧電素子と前記振動板とに通電する板状の導電部材と、
前記複数の圧電素子の内の1つに接続された棒状の駆動部材と、
前記駆動部材に対して移動可能に摩擦係合された被駆動部材と、
前記駆動部材を支持すると共に、前記圧電素子と、前記振動板と、前記板状の導電部材とを加圧して挟むことにより、前記圧電素子と前記板状の導電部材との電気的な導通を保持する支持部材と、
を備えることを特徴とする駆動装置。
A plurality of piezoelectric elements formed in a flat plate shape and electrode films formed on both sides;
A conductive diaphragm sandwiched between the plurality of piezoelectric elements;
A plate-like conductive member for energizing the piezoelectric element and the diaphragm;
A rod-shaped drive member connected to one of the plurality of piezoelectric elements;
A driven member frictionally engaged with the driving member in a movable manner;
The piezoelectric element, the diaphragm, and the plate-like conductive member are pressed and sandwiched while supporting the driving member, thereby providing electrical continuity between the piezoelectric element and the plate-like conductive member. A supporting member to hold;
A drive device comprising:
前記支持部材は、弾性力を有する弾性部材を用いて、前記圧電素子と、前記振動板と、前記板状の導電部材とを加圧して挟むことを特徴とする請求項1に記載の駆動装置。   The driving device according to claim 1, wherein the support member presses and sandwiches the piezoelectric element, the diaphragm, and the plate-like conductive member using an elastic member having an elastic force. . 前記弾性部材は、前記板状の導電部材に形成された板バネ形状部であることを特徴とする請求項2に記載の駆動装置。   The drive device according to claim 2, wherein the elastic member is a leaf spring-shaped portion formed on the plate-like conductive member. 前記弾性部材は、合成高分子材料からなることを特徴とする請求項2に記載の駆動装置。   The drive device according to claim 2, wherein the elastic member is made of a synthetic polymer material. 前記板状の導電部材は、フレキシブルプリント基板であることを特徴とする請求項1に記載の駆動装置。   The drive device according to claim 1, wherein the plate-like conductive member is a flexible printed board. 前記板状の導電部材は、リード線が圧着された圧着端子を有する薄板であることを特徴とする請求項1に記載の駆動装置。   The drive device according to claim 1, wherein the plate-like conductive member is a thin plate having a crimp terminal to which a lead wire is crimped.
JP2007244414A 2007-09-20 2007-09-20 Driver Withdrawn JP2009077545A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007244414A JP2009077545A (en) 2007-09-20 2007-09-20 Driver

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007244414A JP2009077545A (en) 2007-09-20 2007-09-20 Driver

Publications (1)

Publication Number Publication Date
JP2009077545A true JP2009077545A (en) 2009-04-09

Family

ID=40611987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007244414A Withdrawn JP2009077545A (en) 2007-09-20 2007-09-20 Driver

Country Status (1)

Country Link
JP (1) JP2009077545A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016040989A (en) * 2014-08-13 2016-03-24 セイコーエプソン株式会社 Piezoelectric drive device and drive method of the same, robot and drive method of the robot
WO2021111668A1 (en) * 2019-12-06 2021-06-10 株式会社村田製作所 Vibratory device and image capture device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016040989A (en) * 2014-08-13 2016-03-24 セイコーエプソン株式会社 Piezoelectric drive device and drive method of the same, robot and drive method of the robot
WO2021111668A1 (en) * 2019-12-06 2021-06-10 株式会社村田製作所 Vibratory device and image capture device
US20210320241A1 (en) * 2019-12-06 2021-10-14 Murata Manufacturing Co., Ltd. Vibration device and imaging device
JPWO2021111668A1 (en) * 2019-12-06 2021-12-09 株式会社村田製作所 Vibration device and image pickup device
JP7115638B2 (en) 2019-12-06 2022-08-09 株式会社村田製作所 Vibration device and imaging device

Similar Documents

Publication Publication Date Title
US6437489B1 (en) Actuator utilizing piezoelectric transducer
CN103947225A (en) Piezoelectric vibration element, piezoelectric vibration apparatus, and mobile terminal
JP2009077545A (en) Driver
US8159113B2 (en) Ultrasonic actuator with power supply electrode arrangement
JPH0421371A (en) Oscillation wave motor
JP6437071B2 (en) Wristwatch with magnetic clamping device
JPH09201080A (en) Vibrating device
US20110110542A1 (en) Piezoelectric exciter and piezoelectric exciter unit
TWI268016B (en) Intermediate connector allowing easy retry
JP2011071488A (en) Piezoelectric actuator unit and method for manufacturing the same
JP4311054B2 (en) Piezoelectric actuator, device including the same, and method for manufacturing piezoelectric actuator
JP2007248994A (en) Flat panel display and flat panel display manufacturing system
JPH08251949A (en) Oscillation driver
JP2011054673A (en) Piezoelectric actuator unit, method for manufacturing the same, and supporting case
JP5318337B2 (en) Piezoelectric transformer and mounting method thereof
JP2003340371A (en) Piezoelectric actuator
JP2008084957A (en) Mounting structure and mounting method for actuator
JP2003304597A (en) Manufacturing method and manufacturing apparatus for piezoelectric diaphragm
US6856071B2 (en) Piezoelectric transducer module having interconnected transducer units
JPWO2008084618A1 (en) Drive device
JP5255194B2 (en) Piezoelectric transformer and mounting method thereof
JP2005123050A (en) Connection terminal for flat circuit body
JP2008016690A (en) Connection structure for connecting electrode of substrate and connection method
JP2009077544A (en) Driver
JP5545812B2 (en) Piezoelectric bimorph element

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20101207