JP2009068898A - Three-dimensional shape measuring equipment and method therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide three-dimensional shape measuring equipment and a method therefor which enable improvement of a monitor display and an FOV display without depending on the light and darkness of an environment of measurement. <P>SOLUTION: The three-dimensional shape measuring equipment Di which measures a three-dimensional shape of a measuring object in a noncontact manner has a light projecting part 1 which projects light with a plurality of light projection patterns including a pattern for the monitor display, a light projection control part 51 which controls the light projection patterns of the light projecting part 1 so that the part projects the light with one of the light projection patterns, and a light receiving part 2 which picks up a light image formed on an image forming plane when the light projection control part 51 makes the light projecting part 1 project the light with the light projection pattern for the monitor display. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a three-dimensional shape measuring apparatus and a three-dimensional shape measuring method for measuring a three-dimensional shape of a measurement object in a non-contact manner, and in particular, a three-dimensional shape measurement capable of better displaying a visual field display and a monitor display. The present invention relates to an apparatus and a three-dimensional shape measuring method.

  A three-dimensional shape measuring apparatus that measures the three-dimensional shape of a measurement object in a non-contact manner is used for various applications such as industrial applications such as automobiles, computer graphics (CG), and design. In this three-dimensional shape measuring apparatus, for example, a light cutting method using slit light or the like, a pattern projection method using pattern light, or a stereo method based on images obtained by photographing the same object to be measured from a plurality of different gaze directions In addition, a three-dimensional shape measurement principle such as a moire method using moire is used, and three-dimensional data composed of polygons or the like is obtained based on measurement data obtained by these.

  In measuring the three-dimensional shape of the measurement object in a non-contact manner, the user needs to match the measurable area in the three-dimensional shape measurement apparatus with a desired area of the measurement object to be measured. For this purpose, there are a monitor display and a field of view (FOV) display. The monitor display is an image displayed on a monitor device such as a monitor device provided in the three-dimensional shape measurement device or a monitor device provided in an external device connected to the three-dimensional shape measurement device. It shows the current image captured by the light receiving unit for monitor display in the shape measuring apparatus. The FOV display indicates the measurement range of the three-dimensional shape measuring device displayed on the surface (object surface) of the measurement object. In the monitor display, generally, the light receiving unit for monitor display and the light receiving unit for measurement are used in common. In the FOV display, generally, the measurement range of the three-dimensional shape measuring apparatus is projected onto the surface of the measurement object by the light projecting means. By referring to the monitor display, the user can recognize where the light receiving unit of the three-dimensional shape measuring apparatus is currently looking (facing). In addition, the user can recognize the range (region) of the measurement object measured by the three-dimensional shape measuring apparatus by referring to the FOV display.

As a technique for indicating such a measurement range, for example, there is a three-dimensional shape measuring apparatus disclosed in Patent Document 1. In the three-dimensional shape measuring apparatus disclosed in Patent Document 1, the laser beam irradiator is controlled so that the visual observation state of the scanning trace by the laser beam is different between the measurement state and the standby state. For example, the visual scanning trace of the laser beam in the measurement state is made of a continuous line, whereas the visual scanning trace of the laser beam in the standby state is made up of a plurality of discrete irradiation spots. Thereby, it is possible to easily grasp whether the three-dimensional shape measuring apparatus is in a measurement state or in a standby state.
JP 2004-333367 A

  By the way, in the monitor display, since an optical image formed on the imaging surface is picked up by the image pickup device, it is desirable that the illumination for the monitor display is uniform and uniform.

  On the other hand, in the FOV display, when displayed by the light projecting means, the FOV display part and the non-FOV display part are clearly shown so that the user (measurer) can clearly grasp the measurement range. A high contrast pattern illumination is desirable.

  The technique described in Patent Document 1 can grasp the difference between the measurement state and the standby state, and does not relate to illumination of the measurement object before measurement.

  The present invention has been made in view of the above circumstances, and its object is to provide a three-dimensional shape measuring apparatus and a three-dimensional shape capable of performing monitor display and FOV display having such conflicting requirements almost simultaneously. It is to provide a measurement method.

  As a result of various studies, the present inventor has found that the above object is achieved by the present invention described below. That is, in one aspect according to the present invention, in a three-dimensional shape measuring apparatus that measures a three-dimensional shape of a measurement object in a non-contact manner, light is projected with a plurality of light projection patterns including a light projection pattern for monitor display. A light projecting unit, a light projecting control unit that controls a light projecting pattern of the light projecting unit so as to project light with one of the plurality of light projecting patterns, and the light projecting control unit In the case where light is projected on the light projecting pattern for the monitor display, the light projecting unit includes a light receiving unit that captures a light image formed on the imaging surface. In another aspect of the present invention, in a three-dimensional shape measurement method for measuring a three-dimensional shape of a measurement object in a non-contact manner, light is projected with a plurality of light projection patterns including a light projection pattern for monitor display. A step of projecting light from the plurality of projection patterns with the projection pattern for monitor display, and an image formed on the imaging surface while projecting the light in the step And a step of capturing the obtained optical image.

  In the three-dimensional shape measuring apparatus and the three-dimensional shape measuring method configured as described above, light can be projected with a plurality of projection patterns including a projection display projection pattern, and an optical image formed on an imaging surface Is imaged when light is projected with a light projection pattern for monitor display. By doing so, it becomes possible to separate the light projection pattern for monitor display from a plurality of light projection patterns including the light projection pattern for viewing field display. It is possible to configure with a pattern, and it is possible to configure a light projection pattern with a light projection pattern for displaying an appropriate visual field. Then, when light is projected with this appropriately configured projection pattern for monitor display, the light receiving unit captures a light image formed on the imaging surface, thereby forming a better image. Therefore, a better monitor display can be obtained. Therefore, in the three-dimensional shape measuring apparatus and the three-dimensional shape measuring method having such a configuration, the monitor display and the visual field display having the above conflicting requirements can be performed almost simultaneously. For this reason, the user can appropriately recognize the measurement range of the three-dimensional shape measuring apparatus when the angle of view is adjusted before the measurement to match the measurement range of the three-dimensional shape measuring apparatus with the desired range of the measurement object. The measurement range of the three-dimensional shape measuring apparatus can be adjusted to the desired range of the measurement object, and the desired range of the measurement object can be measured by the three-dimensional shape measurement apparatus. Further, in the three-dimensional shape measuring apparatus and the three-dimensional shape measuring method having such a configuration, better monitor display and field-of-view display can be performed. By comparing these displays, the user can, for example, monitor Even an area that appears to be a measurable area in the display can be recognized as a blind spot area that cannot be measured because it is a shadow in the visual field display.

  Here, the projection pattern for monitor display is preferably a projection pattern for uniformly projecting light without unevenness in luminance, but may be modified to such an extent that it does not interfere with monitor display. For example, there may be one or several dark lines in a uniform illumination. Such dark lines are used for focusing, for example. The light projection pattern for displaying the visual field is determined on the surface (object surface) of the measuring object by measuring the measuring range of the three-dimensional shape measuring device according to the difference in luminance between the measuring range of the three-dimensional shape measuring device and the range outside the measuring range. Any pattern can be used, for example, a pattern that brightly illuminates part or all of the frame of the measurement range, or one or more bright and dark lines (bands, continuous lines, or discontinuous lines) within the measurement range. For example, and a pattern for illuminating light so as to form one or more bright and dark gratings within the measurement range.

  In the above-described three-dimensional shape measuring apparatus, the light projection control unit projects light in a time-sharing manner between the monitor display light projection pattern and the other light projection patterns of the plurality of light projection patterns. As described above, the light projection pattern of the light projecting unit is controlled.

  According to this configuration, the light of the monitor display light projection pattern and the light of the other light projection patterns among the plurality of light projection patterns are projected in a time-sharing manner. For this reason, the light of the projection pattern for monitor display and the light of other projection patterns among the plurality of projection patterns, for example, the light of the projection pattern of the visual field display, do not interfere with each other. In addition, it is possible to display the visual field more favorably.

  In the above-described three-dimensional shape measuring apparatus, the plurality of projection patterns include a projection pattern for visual field display, and the light receiving unit includes an imaging surface in which a plurality of pixels are two-dimensionally arranged. An image pickup device that picks up an image formed by photoelectrically converting the light image formed on the plurality of pixels into an electric signal, and the light projecting control unit is configured to read the electric field from the image pickup device during a readout period. The light projecting pattern of the light projecting unit is controlled to project light with a light projecting pattern for area display.

  According to this configuration, since light is projected with the projection pattern for viewing area display during the readout period of the image sensor, the time zone where it is not necessary to project light with the projection pattern for monitor display is the viewing area. It is used during the time when light is projected with a light projection pattern for display. Therefore, it is possible to display the visual field without disturbing the monitor display operation.

  Further, in the above-described three-dimensional shape measuring apparatus, when the three-dimensional shape of the measurement object is measured, the light projecting unit projects slit light that scans a predetermined measurement range, and performs the light projection control. The unit causes the light projecting unit to scan the measurement range monotonously at a predetermined scanning speed when the light projecting unit projects light with the light projecting pattern for monitor display. And

  According to this configuration, when the three-dimensional shape measuring apparatus measures the three-dimensional shape of the measurement object in a non-contact manner by a so-called light cutting method, the three-dimensional shape measurement and the light projection in the projection pattern for monitor display are performed. One light projecting unit can also be used.

  Further, in the above-described three-dimensional shape measuring apparatus, the plurality of light projection patterns include a light projection pattern for visual field display, and the light projecting unit measures the three-dimensional shape of the measurement object. And projecting slit light that scans a predetermined measurement range, and when the light projecting control unit causes the light projecting unit to project light with the projection pattern for visual field display, The measurement range is scanned at a scanning speed for performing predetermined modulation of the slit light.

  According to this configuration, when the three-dimensional shape measuring apparatus measures the three-dimensional shape of the measurement object in a non-contact manner by a so-called light cutting method, the projection in the projection pattern for the three-dimensional shape measurement and the visual field display is performed. Can be shared by a single light projecting unit.

  Further, in the above-described three-dimensional shape measuring apparatus, the light projection control unit does not flicker the light projected by the light projection pattern when the light projection unit scans the slit light within the measurement range. The measurement range is reciprocally scanned at a scanning speed of about a degree.

  According to this configuration, since the slit light reciprocally scans the measurement range at a scanning speed that does not flicker the light projected by the light projection pattern, when the user looks at the measurement object or the like during the light projection, A user's uncomfortable feeling can be reduced.

  In the above-described three-dimensional shape measuring apparatus, the light projecting unit forms the plurality of light projecting patterns by projecting light through a light projecting mask.

  According to this configuration, it is possible to provide a three-dimensional shape measuring apparatus that measures the three-dimensional shape of the measurement object in a non-contact manner by a so-called pattern projection method.

  Further, the above-described three-dimensional shape measuring apparatus includes a monitor unit that displays an image captured by the light receiving unit.

  According to this configuration, it is possible to provide a three-dimensional shape measuring apparatus capable of monitor display.

  The above-described three-dimensional shape measuring apparatus includes an external output unit that performs data communication with an external device.

  According to this configuration, for example, it is possible to provide a three-dimensional shape measuring device that can be displayed on a monitor device such as a personal computer.

  The three-dimensional shape measuring apparatus and the three-dimensional shape measuring method according to the present invention can perform monitor display and field-of-view display having the conflicting requirements almost simultaneously.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted.
(Configuration of the embodiment)
FIG. 1 is a perspective view illustrating an external configuration of a three-dimensional shape measuring apparatus according to an embodiment. FIG. 2 is a schematic diagram illustrating a basic internal configuration of the three-dimensional shape measuring apparatus according to the embodiment. FIG. 3 is a block diagram illustrating an electrical configuration of the three-dimensional shape measuring apparatus according to the embodiment.

  In FIG. 1, this three-dimensional shape measuring device Di is a device that measures the three-dimensional shape of the measuring object Ob in a non-contact manner. The three-dimensional shape measuring apparatus Di includes a substantially rectangular parallelepiped housing (housing) in which an optical unit including predetermined light emitting means and light receiving means is incorporated, and a light projection window is provided on one main surface of the housing. A light projecting unit 1 and a light receiving unit 2 having a light receiving window are provided, and a monitor unit 6 is provided on the other main surface of the housing so that a display screen faces the operation unit 7 so that an operation switch can be operated. And are provided. The light projecting unit 1 and the light receiving unit 2 are provided at positions separated by a predetermined distance L set in advance according to the baseline length. From the light projecting unit 1, slit light S spreading in a fan shape is emitted. The slit light S is a planar laser light that spreads at a radiation angle φ in the horizontal direction and has a width W in the vertical direction, and is irradiated toward the measurement object Ob. The irradiated slit light S is reflected by the surface of the measurement object Ob, and a part of the reflected light R enters the light receiving unit 2.

  The three-dimensional shape measuring apparatus Di generally sweeps and irradiates the slit light S from the light projecting unit 1 to the measurement object Ob, and receives the reflected light R of the slit light S reflected by the measurement object Ob. The distance to the measurement object Ob is obtained by using the so-called triangulation principle for the measurement data obtained by photoelectric conversion with the image sensor 22 (FIGS. 2 and 3) such as an image area sensor. Is used to measure the three-dimensional shape of the measurement object Ob in the measurement range (scanning range). As described above, in the present embodiment, the three-dimensional shape measuring apparatus Di for obtaining the three-dimensional shape of the measurement object Ob in a non-contact manner using a so-called optical cutting method is illustrated, but the present invention is limited to the optical cutting method. As described above, the pattern projection method using pattern light, the stereo method based on the images of the same measurement object taken by a camera from a plurality of different gaze directions, the moire method using moire, etc. The non-contact three-dimensional shape measuring method may be used. Although FIG. 1 illustrates a cylindrical measurement object Ob, for example, an arbitrary object such as a press product, a plastic molded product, and a mold is used as the measurement object Ob.

  The optical system in this three-dimensional shape measuring apparatus Di will be described. In FIG. 2, the light projecting unit 1 scans a predetermined measurement range set in advance when measuring the three-dimensional shape of the measurement object Ob. The light source S emits light and projects light with a plurality of light projection patterns including a monitor display light projection pattern. For example, in this embodiment, a laser light source 11 that generates laser light serving as a light source. And a light projecting optical system 12 that guides the slit light S to the light projecting window, and a galvano mirror 13 that rotates about the rotation axis. In the present embodiment, as described above, the plurality of light projection patterns include a light projection pattern for monitor display and a light projection pattern for field of view (FOV) display. The light receiving unit 2 captures a light image formed on the imaging surface. For example, in the present embodiment, the light receiving unit 2 is disposed on the light path of the light receiving optical system 21 to which the reflected light R is incident and the light receiving optical system 21. For example, the image pickup device 22 includes a charge coupled device (CCD) image area sensor, a complementary metal-oxide semiconductor (CMOS) image area sensor, and the like. The light receiving unit 2 has a predetermined measurement depth before and after the in-focus position as a measurement range.

  In the light projecting unit 1, the slit light S (S1, S2, S3,...) Is projected toward the measurement object Ob while the galvano mirror 13 is rotated at a predetermined galvano rotation angle. Such light projection is performed so as to scan the entire area of the measurement object Ob in the measurement range. In this case, the reflected light R is received by the image sensor 22 via the light receiving optical system 21. The image 22D received by the imaging element 22 includes slit images OS1, OS2, OS3,... Corresponding to the three-dimensional shape of the measurement object Ob. Based on the projection angle of the slit light beams S1, S2, S3,..., The positions of the slit images OS1, OS2, OS3 in the light receiving area of the image sensor 22, and the baseline length L, this three-dimensional shape The distance from the three-dimensional shape measuring device Di to the measuring object Ob is calculated by a so-called triangulation principle by a data processing means described later built in the measuring device Di. Here, the light projection angle θ1 at the light projection point is obtained from the galvano rotation angle of the galvano mirror 13 that scans the slit light S within the measurement range, and the light reception angle θ2 at the light reception point is detected by the light receiving surface of the image sensor 22. It is obtained from the image position of the reflected light R1. And the distance to the surface of the measuring object Ob is calculated | required by the principle of triangulation from the base line length L between the light projection point and the light receiving point, the light projection angle θ1, and the light reception angle θ2.

  In FIG. 3, the three-dimensional shape measuring apparatus Di includes a laser driver (LD driver) 14 and a light projecting drive unit 15 attached to the light projecting unit 1 and an autofocus drive unit (AF) attached to the light receiving unit 2 described above. Drive unit) 23 and timing generator (TG) 24, output processing circuit 3, data memory 4, control unit 5, monitor unit 6, operation unit 7, and external output unit (I / F unit) 8. The

  As described above, the light projecting unit 1 can project light with a plurality of light projecting patterns, includes the laser light source (LD light source) 11, the light projecting optical system 12, and the galvano mirror 13, and spreads in a fan shape. A slit light S having a width W in the vertical direction is projected. For example, the LD driver 14 drives the laser light source 11 composed of a laser diode or the like to irradiate the slit light S by performing current control according to a control signal given from the control unit 5. The light projecting drive unit 15 performs focus driving and zoom driving of the lens constituting the light projecting optical system 12 according to the control signal given from the control unit 5 and sequentially sets the light projecting angle θ1 for scanning the slit light S. The galvano mirror 13 is rotationally driven while changing. Thus, the light projecting unit 1 can scan and project the slit light S onto the measurement object Ob under the control of the control unit 5.

  As described above, the light receiving unit 2 can capture a light image formed on the imaging surface thereof, and includes the light receiving optical system 21 and the image sensor 22, and the slit light S is the surface of the measurement object Ob. A part of the reflected light R reflected by is incident. The light receiving optical system 21 includes one or a plurality of photographing lenses, a diaphragm, a lens moving mechanism for focusing and zooming, and the like. The AF drive unit 23 includes a stepping motor and the like, and drives the lens of the light receiving optical system 21 for focusing and zooming under the control of the control unit 5. A measurement range in the depth direction, which is a range of a predetermined depth of field before and after the focus position, is adjusted by driving the light receiving optical system 21 by the AF driving unit 23.

  The image pickup device 22 picks up an image by photoelectrically converting an optical image of the measurement object Ob formed by the light receiving optical system 21 onto an image pickup surface in which a plurality of pixels are two-dimensionally arranged into an electric signal at each of the plurality of pixels. Then, two-dimensional image data for the measurement object Ob is generated. In the present embodiment, for example, a CCD type image area sensor in which a plurality of photoelectric conversion elements composed of photodiodes or the like are two-dimensionally arranged in a matrix is used as the imaging element 22. Reflected light R is received on the imaging surface of the imaging element 22 via, for example, R (red), G (green), and B (blue) color filters having different spectral characteristics. Alternatively, as the image pickup element 22, a CCD type color image area sensor in which each of these color filters is disposed on the light receiving surface of each photoelectric conversion element can be used. The timing generator (TG) 24 generates a timing pulse for controlling a photographing operation (charge accumulation based on exposure, reading of accumulated charge, etc.) by the image sensor 22, and is based on a control signal supplied from the control unit 5. For example, the image pickup device 22 is driven by generating a vertical transfer pulse, a horizontal transfer pulse, a charge sweeping pulse, or the like.

  The output processing circuit 3 performs predetermined signal processing on the electrical signal output from the image sensor 22 (in the above example, the analog signal group received by each pixel of the CCD image area sensor), and then converts it into a digital image signal. Convert and output. The output processing circuit 3 includes a CDS circuit (correlated double sampling circuit) for reducing reset noise included in the analog image signal, an AGC circuit for correcting the level of the analog image signal, and the analog image signal as a 14-bit digital image, for example. An A / D conversion circuit that converts the signal (image data) is provided.

  The data memory 4 includes a RAM (Random Access Memory) or the like, and temporarily stores various data. For example, in the data memory 4, the acquired 2D image data for AF (for autofocus), 2D image data for the main measurement, etc., about the measurement object Ob output from the output processing circuit 3 are temporarily stored. Stored.

  The control unit 5 includes, for example, a microprocessor, a storage element, and peripheral circuits thereof, and functionally includes a light projection control unit 51 and a measurement control unit 52, and controls the entire three-dimensional shape measurement apparatus Di. Therefore, the operation of each part of the three-dimensional shape measuring apparatus Di is controlled according to the function. The light projecting control unit 51 controls the light projecting operation of the light projecting unit 1. In the present embodiment, the light projecting control unit 51 further projects light so as to project light with one of the plurality of light projecting patterns. The projection pattern of the light unit 1 is controlled. More specifically, for example, when the light projecting control unit 51 causes the light projecting unit 1 to project light in a monitor display light projecting pattern, the light projecting unit 1 applies the slit light S to a predetermined scanning speed. Thus, the light projecting unit 1 is controlled via the LD driver 14 and the light projecting drive unit 15 so as to scan the measurement range monotonously. Further, for example, when the light projecting control unit 51 causes the light projecting unit 1 to project light with a light projection pattern for FOV display, the light projecting unit 1 measures the slit light S at a scanning speed for performing predetermined modulation. The light projecting unit 1 is controlled via the LD driver 14 and the light projecting drive unit 15 so as to scan the range. The measurement control unit 52 controls the operation of each unit of the three-dimensional shape measuring apparatus Di according to the function in order to measure the three-dimensional shape of the measurement object Ob. More specifically, the control unit 5, for example, projects the slit light S by the light projecting unit 1, drives the light receiving optical system 21 by the AF drive unit 23, generates a timing pulse by the timing generator 24, and outputs it. The signal processing operation by the processing circuit 3 and the data read / write operation with respect to the data memory 4 are controlled.

  The monitor unit 6 is a device that displays an image captured by the image sensor 22 of the light receiving unit 2, that is, an image that is signal-processed by the output processing circuit 3 and stored in the data memory 4. An image captured by the light receiving unit 2 of the three-dimensional shape measuring apparatus Di is displayed on the monitor unit 6. By referring to the displayed image, the user can receive the light receiving unit of the three-dimensional shape measuring apparatus Di. The direction (range, region) in which 2 is looking (facing) can be recognized. The monitor unit 6 includes, for example, a color liquid crystal display (LCD) and the like.

  The operation unit 7 is a device that gives an operation instruction (instruction input) by the user to the three-dimensional shape measuring apparatus Di. The operation unit 7 includes various operation switch groups (operation button groups) such as a power switch, a monitor switch, a cursor switch, and a measurement start switch, for example. For example, when the monitor switch is pressed (turned on), FOV display and monitor display are started, and when the measurement start switch is pressed (turned on), measurement is started and the three-dimensional shape of the measurement object Ob is changed. Measured.

  The I / F unit 8 is an interface circuit for performing data communication with an external device such as a personal computer. Two-dimensional image data and the like of the measurement object Ob temporarily stored in the data memory 4 can be communicated with data to an external device via the I / F unit 8.

  The light projecting unit 1 and the light receiving unit 2 are firmly fixed by a mechanical holder SU and have a structure in which no positional deviation occurs between them. This is because the distance between the light projecting unit 1 and the light receiving unit 2 becomes the baseline length L when performing triangulation.

  Next, the operation of the three-dimensional shape measuring apparatus Di will be described. FIG. 4 is a flowchart showing the operation of the three-dimensional shape measuring apparatus in the embodiment. FIG. 5 is a time chart showing a light projecting operation for monitor display and FOV display in the three-dimensional shape measuring apparatus of the embodiment. FIG. 6 is a partially enlarged view of FIG. 5 (A), 6 (A) and 6 (D) show the driving operation of the galvano mirror 13, the horizontal axis is time, and the vertical axis is the rotational position (light projection angle θ1). Show. FIG. 5B and FIG. 6B show the exposure operation of the image sensor 22, the horizontal axis indicates time, and the vertical axis indicates exposure on (ON) / off (OFF). FIG. 5C and FIG. 6C show the data transfer operation of the image sensor 22, the horizontal axis is time, and the vertical axis is on (ON) / off (OFF) of data transfer. Show. FIGS. 6A to 6C show the light projecting operation of the three-dimensional shape measuring apparatus Di when the light projecting unit 1 is projecting with a light projecting pattern for monitor display, and FIG. The light projecting operation of the three-dimensional shape measuring apparatus Di in the case where the light projecting unit 1 projects light with the light projection pattern for FOV display will be described. FIG. 7 is a diagram for explaining each state of light projection and display in the three-dimensional shape measurement apparatus of the embodiment. In FIG. 7, the measurement object Ob is a rectangular plate member, and a smile face is drawn at the approximate center of one surface thereof. FIG. 7A shows a state in which the measurement object Ob is projected with a projection pattern for monitor display, and FIG. 7B shows a state in which the measurement object Ob is projected with a projection pattern for monitor display. FIG. 7C shows a display image displayed on the monitor unit 6 when it is illuminated, and FIG. 7C shows the measurement object when the measurement object Ob is projected with a projection pattern for FOV display. The FOV display displayed on Ob is shown. In FIG. 7, a portion with high luminance (bright portion) is displayed with shading in FIG. 7A and a black vertical line in FIG. 7C for convenience of drawing. .

  For example, when the monitor switch of the operation unit 7 is turned on, the three-dimensional shape measuring apparatus Di starts the operation of each unit to measure the three-dimensional shape of the measurement object Ob. First, the monitor display and the FOV are displayed. Display starts. In this case, in the three-dimensional shape measuring apparatus Di, as shown in FIG. 4, first, the light projection control unit 51 of the control unit 5 includes the light projection pattern for FOV display and the light projection pattern for monitor display. It is determined which light projection pattern is used to project light (S11). In the present embodiment, as shown in FIG. 5 and described later, in the fifth readout period in which the electrical signal is read from the image sensor 22, one projection is executed with the projection pattern for FOV display. The light control unit 51 makes the above determination by, for example, counting the number of readout periods in which an electrical signal is read from the image sensor 22.

  As a result of the determination in step S11, when light is projected with a monitor display light projection pattern (monitor display light projection), the light projection control unit 51 projects light with a monitor display light projection pattern. 1 is made to project light (S12), and then processing S14 is executed. On the other hand, as a result of this determination, when light is projected with the FOV display projection pattern (FOV display projection), the projection control unit 51 projects the FOV display projection pattern with the projection unit 1. The light is projected (S13), and then the process S14 is executed.

  Here, if the FOV display is performed too frequently, the display flickers due to switching between the monitor display light projection pattern and the FOV display light projection pattern, while the FOV display display interval becomes too long. The user must wait until the FOV display is made. For this reason, the FOV display is displayed at an appropriate interval according to the physiology, psychology, etc. of the person. In this embodiment, as shown in FIG. 5, for example, on the measurement object Ob every 0.1 second for every second. Is displayed.

  In the light projection by the light projection pattern for monitor display in this process S12, the light projection control unit 51 passes through the LD driver 14 and the light projection drive unit 15 as shown in FIGS. 5 (A) and 6 (A). By controlling the light projecting unit 1, the galvano mirror 13 is driven to rotate monotonously at a predetermined scanning speed set in advance, and the galvano mirror 13 is scanned over a predetermined measurement range. Scan back and forth. As a result, the slit light S scans the measurement range monotonously at the scanning speed, and in this embodiment, repeatedly performs reciprocating scanning. In this embodiment, the slit light S is one-dimensional, and is projected so as to repeatedly reciprocate the measurement range at the scanning speed in a direction orthogonal to the one-dimensional direction. For example, as shown in FIG. 7A, the slit light S is illuminated in a rectangular shape substantially uniformly. As described above, the light projection pattern for monitor display is preferably a light projection pattern for uniformly projecting light without luminance unevenness, but may be modified to such an extent that it does not interfere with the monitor display. For example, there may be one or several dark lines in a uniform illumination. Such dark lines are formed, for example, by turning off the LD light source 11 during scanning, and are used for focusing, for example.

  Thus, while the light projection control part 51 controls the light projection part 1, and the light projection part 1 is projecting light on the measuring object Ob with the light projection pattern for monitor display, FIG. And as shown to FIG. 6 (B), the control part 5 exposes the image pick-up element 22 by controlling the light-receiving part 2 via AF drive part 23 and TG24. As a result, the light image formed by the light receiving optical system 21 on the imaging surface of the image sensor 22 is photoelectrically converted and captured. Since the measurement object Ob is illuminated substantially uniformly by the slit light S as described above, an appropriate subject luminance can be obtained, and thus more appropriate exposure can be performed. Then, when the exposure of the image sensor 22 is completed, as shown in FIGS. 5C and 6C, the control unit 5 controls the light receiving unit 2 via the TG 24, thereby causing photoelectric control from the image sensor 22. The electric signal obtained by the conversion is read out. Even during the period in which the electric signal is read from the image sensor 22, the light projection control unit 51 projects the monitor display light as shown in FIGS. 5 (A) to (C) and FIGS. 6 (A) to (C). The light projecting unit 1 is controlled to project light with a light pattern. For this reason, as a result of the measurement object Ob being continuously illuminated substantially uniformly by the slit light S by the light projecting unit 1, flicker is reduced. Then, the control unit 5 generates an image signal by performing predetermined signal processing on the read electrical signal in the output processing circuit 3, and displays an image based on the generated image signal on the monitor unit 6. The monitor image displayed on the monitor unit 6 is generated appropriately as shown in FIG. 7B, for example, because exposure is performed more appropriately as described above.

  Since it operates in this way, in the three-dimensional shape measuring apparatus Di of the present embodiment, when light is projected with a light projection pattern for monitor display, a light image formed on the imaging surface by the light receiving unit 2 is displayed. Since imaging is performed, a better monitor image can be formed, and a better monitor display can be obtained. For this reason, in the three-dimensional shape measuring apparatus Di of the present embodiment, monitor display can be performed better than the background art without depending on the brightness of the measurement environment.

  Here, when the light projecting control unit 51 causes the light projecting unit 1 to scan the slit light S within the measurement range, the light projecting control unit 51 measures the measurement range at a scanning speed that does not flicker the light projected by the light projection pattern for monitor display. Are preferably reciprocated. Since the slit light S reciprocally scans the measurement range at such a scanning speed that the light of such a light projection pattern does not flicker, it reduces the user's uncomfortable feeling when the user views the measurement object Ob or the like during the light projection. can do.

  On the other hand, in the light projection by the light projection pattern for FOV display in this processing S13, the light projection control unit 51 first projects through the LD driver 14 and the light projection drive unit 15 as shown in FIG. By controlling the light unit 1, the galvano mirror 13 is rotated monotonously at the scanning speed, and the galvano mirror 13 is repeatedly reciprocated in the measurement range. That is, the light projecting unit 1 is controlled by the light projection pattern for monitor display. During this time, as shown in FIG. 5B, the control unit 5 exposes the image sensor 22 by controlling the light receiving unit 2 via the AF driving unit 23 and the TG 24. As a result, the light image formed by the light receiving optical system 21 on the imaging surface of the image sensor 22 is photoelectrically converted and captured. When the exposure of the image sensor 22 is completed, as shown in FIG. 5C, the control unit 5 controls the light receiving unit 2 via the TG 24, thereby obtaining the electricity obtained from the image sensor 22 by photoelectric conversion. The signal is read out. Then, the control unit 5 generates an image signal by performing predetermined signal processing on the read electrical signal in the output processing circuit 3, and displays an image based on the generated image signal on the monitor unit 6. The monitor image displayed on the monitor unit 6 is generated appropriately as shown in FIG. 7B, for example, because exposure is performed more appropriately as described above.

  Then, during a period in which an electrical signal is read from the image sensor 22, the light projection control unit 51 controls the light projecting unit 1 via the LD driver 14 and the light projecting drive unit 15 to set the galvano mirror 13 in advance. The galvano mirror 13 is scanned in a predetermined measurement range set in advance, and in this embodiment, reciprocating scanning is repeated. Accordingly, the slit light S scans the measurement range at the modulated scanning speed, and in this embodiment, repeatedly performs reciprocating scanning. In this embodiment, the slit light S is one-dimensional, and is projected so as to repeatedly reciprocate the measurement range at the modulated scanning speed in a direction orthogonal to the one-dimensional direction. A bright and dark stripe pattern is formed by the slit light S on the surface (object surface) of the object Ob. This bright and dark stripe pattern is FOV display. More specifically, as shown in FIGS. 5A and 6D, the light projection control unit 51 controls the light projecting unit 1 via the LD driver 14 and the light projecting drive unit 15. While the galvano mirror 13 is driven to rotate at a constant speed, the terrace portion shown in FIG. 5A and FIG. In this way, the slit light S is slowed one or more times while scanning the measurement range at a constant speed. As a result of the increase in luminance at the low speed portion, as shown in FIG. 7C, a bright and dark bright and dark stripe pattern is formed on the surface (object surface) of the measurement object Ob. As described above, in the present embodiment, the projection pattern for FOV display is a measurement pair. The light is illuminated so that a bright and dark stripe pattern is formed within the measurement range on the object Ob. The light projection pattern for FOV display includes the measurement range of the three-dimensional shape measuring device Di and the outside of this measurement range. Any pattern may be used as long as it displays the measurement range of the three-dimensional shape measuring apparatus Di on the surface (object surface) of the measurement object Ob depending on the difference in luminance from the range. For example, a light projection pattern is a pattern that brightly illuminates part or all of the frame of the measurement range with spots and stripes such as circles, rectangles, and braids, and one or more bright and dark lines (bands or continuous lines) within the measurement range. A pattern that illuminates light to form a line or a discontinuous line), a pattern that illuminates light to form one or more bright and dark gratings within the measurement range, etc. where F Projection pattern for V display, in order to clearly distinguish the measurement range and the measurement range, it is preferable that the pattern of high contrast light and dark.

  Thus, the light projection control unit 51 projects the light projection pattern for monitor display and the other light projection patterns of the plurality of light projection patterns, in this embodiment, the light projection pattern for FOV display in a time-sharing manner. Thus, the light projection pattern of the light projecting unit 1 is controlled. For this reason, the light of the projection pattern for monitor display and the light of other projection patterns among the plurality of projection patterns, and the light of the projection pattern for FOV display in this embodiment do not interfere with each other. Further, the monitor display and the FOV display can be performed more favorably. In the present embodiment, the light projecting control unit 51 projects the light projecting pattern of the light projecting unit 1 so as to project light with the light projecting pattern for FOV display during the readout period in which the electrical signal is read from the image sensor 22. Is controlling. As described above, a time zone in which light is not required to be projected with the light projection pattern for monitor display is utilized as a time zone in which light is projected with the light projection pattern for FOV display. Therefore, FOV display can be performed without hindering the monitor display operation.

  Here, when the light projecting control unit 51 causes the light projecting unit 1 to scan the slit light S within the measurement range, the light projection control unit 51 measures the measurement range at a scanning speed that does not flicker the light projected by the light projection pattern for FOV display. Are preferably reciprocated. Since the slit light S reciprocally scans the measurement range at such a scanning speed that the light of such a light projection pattern does not flicker, it reduces the user's uncomfortable feeling when the user views the measurement object Ob or the like during the light projection. can do.

  Returning to FIG. 4, and in step S <b> 14, the control unit 5 determines whether or not measurement is started. This determination is performed, for example, by determining whether or not the measurement start switch of the operation unit 7 is turned on. If the result of determination in step S14 is not the start of measurement (No), the control unit 5 returns the process to step S11. On the other hand, if the result of this determination is that measurement is started (Yes), the control unit 5 Measures the three-dimensional shape of the measurement object Ob by the measurement control unit 52 (S15), and ends the process. In process S15, the measurement control part 52 scans and irradiates the slit light S from the light projection part 1 to the measurement object Ob by controlling the operation | movement of each part of the three-dimensional shape measuring apparatus Di according to the said function. Measured by using the principle of so-called triangulation on the image obtained by receiving the reflected light R reflected by the measuring object Ob of the slit light S by the light receiving unit 2 and photoelectrically converting it by the image sensor 22 of the light receiving unit 2. The distance to the object Ob is obtained, and thereby the three-dimensional shape of the measurement object Ob in the measurement range is measured.

  As described above, in the three-dimensional shape measuring apparatus Di of the present embodiment and the three-dimensional shape measuring method applied thereto, light can be projected with a plurality of projection patterns including a projection display projection pattern. Thus, when light is projected with the projection pattern for monitor display, a light image formed on the imaging surface is captured. For this reason, it becomes possible to separate the projection pattern for monitor display from a plurality of projection patterns including the projection pattern for FOV display, and to configure the projection pattern with an appropriate projection pattern for monitor display. In addition, it is possible to configure the light projection pattern with an appropriate light projection pattern for FOV display. Then, when light is projected with this appropriately configured projection pattern for monitor display, the light receiving unit 2 captures a light image formed on the imaging surface, thereby forming a better image. Therefore, a better monitor display can be obtained. Therefore, in the three-dimensional shape measuring apparatus Di of the present embodiment and the three-dimensional shape measuring method applied thereto, the monitor display and the FOV display having the above conflicting requirements can be performed almost simultaneously. For this reason, the user can appropriately recognize the measurement range of the three-dimensional shape measurement device Di when the angle of view of the three-dimensional shape measurement device Di is adjusted, and the three-dimensional shape is within the desired range of the measurement object Ob. The measurement range of the measurement device Di can be matched, and the desired range of the measurement object Ob can be measured by the three-dimensional shape measurement device Di. In addition, since the three-dimensional shape measuring apparatus Di of this embodiment and the three-dimensional shape measuring method applied thereto can perform better monitor display and FOV display, the user can compare these displays. For example, it can be recognized that even a region that is displayed on the monitor display and seems to be a measurable region is a blind spot region that is shadowed on the FOV display and cannot be measured.

  In the three-dimensional shape measuring apparatus Di of this embodiment and the three-dimensional shape measuring method applied thereto, the FOV display is executed during a readout period in which an electrical signal is read from the image sensor 22 and hinders the monitor display operation. As a result, the monitor display and the FOV display are executed almost simultaneously for the user. For this reason, the user can adjust the angle of view of the three-dimensional shape measuring apparatus Di without feeling uncomfortable.

  In the above-described embodiment, the case of the three-dimensional shape measuring device Di by the light cutting method has been described. However, as described above, the three-dimensional shape measuring device by other methods such as the pattern projection method, the stereo method, and the moire method. Di may also be used.

  For example, in a three-dimensional shape measuring apparatus Di using a pattern projection method in which pattern light is formed by a light projection mask and this pattern light is used for three-dimensional shape measurement, a light projection mask portion is used instead of the galvano mirror 13, and the light projection portion 1 Is a method of forming a plurality of projection patterns by projecting light through a projection mask. For example, the LD light source 11 that generates laser light and the laser light of the LD light source 11 are projected to a predetermined light A projection mask part that forms pattern light with a predetermined projection pattern by passing through the mask, and a projection optical system 12 that guides the pattern light of the predetermined projection pattern formed by the projection mask part to the projection window And is configured. The laser light source 11 is driven by an LD driver 14 that performs current control according to a control signal supplied from the control unit 5. The projection mask unit includes a plurality of projection masks including a projection mask for measuring a three-dimensional shape, a projection mask for monitor display, and a projection mask for FOV display, and one of the plurality of projection masks. A mask moving mechanism unit that selects one projection mask and arranges it between the LD light source 11 and the projection optical system 12, and selects one projection mask from a plurality of projection masks according to a control signal supplied from the control unit 5. It is controlled by a light projection drive unit 15 that selects a light projection mask and arranges it between the LD light source 11 and the light projection optical system 12.

  FIG. 8 is a time chart showing a light projecting operation for monitor display and FOV display in the three-dimensional shape measuring apparatus according to another embodiment. FIG. 9 is a plan view showing a configuration of a projection mask for monitor display and a projection mask for FOV display in a three-dimensional shape measuring apparatus according to another embodiment. FIG. 10 is a plan view showing another configuration of a projection mask for FOV display.

  The three-dimensional shape measuring apparatus Di using the pattern projection method also operates as shown in FIG. 4 described above, but operates as follows in the processing S12 and the processing S13.

  In the light projection by the monitor display light projection pattern in the process S12 in this case, the light projection control unit 51 is configured to project the light projection unit via the LD driver 14 and the light projection drive unit 15 as shown in FIG. By controlling 1, a monitor display projection mask (pattern A) is selected from a plurality of projection masks and placed between the LD light source 11 and the projection optical system 12. For example, as shown in FIG. 9A, the light projection mask for monitor display includes a frame plate body 31a in which a rectangular opening is formed at the center of a rectangular plate member. The laser light from the LD light source 11 passes through the light projection mask 31a for monitor display to become light having a substantially uniform brightness in a rectangular shape, and the measurement object Ob is, for example, shown in FIG. Thus, it is illuminated substantially uniformly by this rectangular light having substantially uniform brightness.

  Thus, while the light projection control part 51 controls the light projection part 1, and the light projection part 1 is projecting the measuring object Ob with the light of the light projection pattern for monitor displays, FIG. As shown, the control unit 5 exposes the image sensor 22 by controlling the light receiving unit 2 via the AF driving unit 23 and the TG 24. As a result, the light image formed by the light receiving optical system 21 on the imaging surface of the image sensor 22 is photoelectrically converted and captured. Since the measurement object Ob is illuminated substantially uniformly by the light having a substantially uniform brightness as described above, an appropriate subject brightness can be obtained, so that more appropriate exposure can be performed. When the exposure of the image sensor 22 is completed, as shown in FIG. 8C, the control unit 5 controls the light receiving unit 2 via the TG 24 to thereby obtain the electricity obtained from the image sensor 22 by photoelectric conversion. The signal is read out. Even during a period in which an electric signal is read out from the image sensor 22, the light projection control unit 51 controls the light projection unit 1 with a light projection pattern for monitor display, as shown in FIGS. ing. Then, the control unit 5 generates an image signal by performing predetermined signal processing on the read electrical signal in the output processing circuit 3, and displays an image based on the generated image signal on the monitor unit 6. The monitor image displayed on the monitor unit 6 is generated appropriately as shown in FIG. 7B, for example, because exposure is performed more appropriately as described above.

  Since it operates in this way, in the three-dimensional shape measuring apparatus Di of this other embodiment, when the light is projected with the projection pattern for monitor display, the light that the light receiving unit 2 forms on the imaging surface Since an image is picked up, a better monitor image can be formed and a better monitor display can be obtained. For this reason, also in the three-dimensional shape measuring apparatus Di of this other embodiment, the monitor display and the FOV display having the above-mentioned conflicting requests can be performed almost simultaneously.

  On the other hand, in the light projection by the light projection pattern for FOV display in the process S13 in this case, as shown in FIG. 8A, the light projection control unit 51 first passes through the LD driver 14 and the light projection drive unit 15. By controlling the light projecting unit 1, a light projecting mask for monitor display is selected from a plurality of light projecting masks and disposed between the LD light source 11 and the light projecting optical system 12. That is, the light projecting unit 1 is controlled by the light projection pattern for monitor display. During this time, as shown in FIG. 8B, the control unit 5 exposes the image sensor 22 by controlling the light receiving unit 2 via the AF driving unit 23 and the TG 24. As a result, the light image formed by the light receiving optical system 21 on the imaging surface of the image sensor 22 is photoelectrically converted and captured. When the exposure of the image sensor 22 is completed, as shown in FIG. 8C, the control unit 5 controls the light receiving unit 2 via the TG 24 to thereby obtain the electricity obtained from the image sensor 22 by photoelectric conversion. The signal is read out. Then, the control unit 5 generates an image signal by performing predetermined signal processing on the read electrical signal in the output processing circuit 3, and displays an image based on the generated image signal on the monitor unit 6. The monitor image displayed on the monitor unit 6 is generated appropriately as shown in FIG. 7B, for example, because exposure is performed more appropriately as described above.

  Then, during a period in which an electrical signal is read from the image sensor 22, the light projection control unit 51 controls the light projecting unit 1 via the LD driver 14 and the light projecting drive unit 15, so that a plurality of light projection masks are provided. A projection mask (pattern B) for FOV display is selected from among them, and is arranged between the LD light source 11 and the projection optical system 12. For example, as shown in FIG. 9B, the FOV display projection mask has one or more slit-shaped openings extending in one direction (three in the example shown in FIG. 9B). The rectangular plate 31b is formed so as to be arranged in parallel in another direction orthogonal to the one direction. The laser light from the LD light source 11 passes through the FOV display projection mask 31b to become bright and dark striped pattern light. On the surface (object surface) of the measurement object Ob, for example, FIG. As shown in (C), a bright and dark striped pattern is formed by the light and dark striped pattern light. This bright and dark stripe pattern is FOV display. As described above, in the present embodiment, the light projection pattern for FOV display is a pattern that illuminates light so that a bright and dark stripe pattern is formed in the measurement range on the measurement object Ob. As shown in FIG. 10A, by using a light projection mask 31c formed of a rectangular plate having a rectangular donut-shaped opening, a light projection pattern for FOV display has a measurement range. For example, as shown in FIG. 10B, a rectangular plate-like body formed such that one or a plurality of slit-shaped openings are orthogonal to each other. By using the projection mask 31d configured as described above, the projection pattern for FOV display may be a pattern that illuminates light so as to form one or more bright and dark gratings within the measurement range.

  In the above description, the light projection masks 31a to 31d are plate bodies, but may be liquid crystal masks.

  The three-dimensional shape measuring apparatus Di based on the pattern projection method is provided by the configuration and operation as described above, and the three-dimensional shape measuring apparatus Di based on the pattern projection method almost displays the monitor display and the FOV display having the above conflicting requirements. Can be done simultaneously.

  In order to express the present invention, the present invention has been properly and fully described through the embodiments with reference to the drawings. However, those skilled in the art can easily change and / or improve the above-described embodiments. It should be recognized that this is possible. Accordingly, unless the modifications or improvements implemented by those skilled in the art are at a level that departs from the scope of the claims recited in the claims, the modifications or improvements are not covered by the claims. It is interpreted that it is included in

It is a perspective view which shows the external appearance structure of the three-dimensional shape measuring apparatus in embodiment. It is a schematic diagram which shows the basic internal structure of the three-dimensional shape measuring apparatus in embodiment. It is a block diagram which shows the electrical structure of the three-dimensional shape measuring apparatus in embodiment. It is a flowchart which shows operation | movement of the three-dimensional shape measuring apparatus in embodiment. It is a time chart which shows the light projection operation | movement for the monitor display and FOV display in the three-dimensional shape measuring apparatus of embodiment. FIG. 6 is a partially enlarged view of FIG. 5. It is a figure for demonstrating each mode of light projection and a display in the three-dimensional shape measuring apparatus of embodiment. It is a time chart which shows the light projection operation | movement for the monitor display and FOV display in the three-dimensional shape measuring apparatus of other embodiment. It is a top view which shows the structure of the light projection mask for a monitor display, and the light projection mask for a FOV display in the three-dimensional shape measuring apparatus of other embodiment. It is a top view which shows the other structure of the light projection mask for FOV display.

Explanation of symbols

Di Three-dimensional shape measuring apparatus Ob Measurement object 1 Light projecting unit 2 Light receiving unit 3 Output processing circuit 4 Data memory 5 Control unit 6 Monitor unit 11 Laser light source 12 Light projecting optical system 13 Galvano mirror 14 LD driver 15 Light projecting drive unit 21 Light receiving Optical system 22 Image sensor 23 AF drive unit 24 Timing generator 31a, 31b, 31c, 31d Projection mask 51 Projection control unit 52 Measurement control unit

Claims (10)

In a three-dimensional shape measuring device that measures the three-dimensional shape of a measurement object in a non-contact manner,
A light projecting unit that projects light with a plurality of light projection patterns including a light projection pattern for monitor display;
A light projecting control unit that controls the light projecting pattern of the light projecting unit to project light with one light projecting pattern of the plurality of light projecting patterns;
When the light projecting control unit causes the light projecting unit to project light using the monitor display light projecting pattern, the light projecting control unit includes a light receiving unit that captures a light image formed on the imaging surface. Three-dimensional shape measuring device. The light projection control unit projects the light projection pattern of the light projection unit so as to project light in a time-sharing manner with respect to the light projection pattern for monitor display and the other light projection patterns of the plurality of light projection patterns. The three-dimensional shape measuring apparatus according to claim 1, wherein the three-dimensional shape measuring apparatus is controlled. The plurality of projection patterns include a projection pattern for visual field display,
The light receiving unit includes an image pickup device that picks up an image by photoelectrically converting a light image formed on an image pickup surface in which a plurality of pixels are two-dimensionally arranged into an electric signal by the plurality of pixels,
The light projecting control unit controls the light projecting pattern of the light projecting unit to project light with the light projecting pattern for visual field display during a readout period in which the electrical signal is read from the image sensor. The three-dimensional shape measuring apparatus according to claim 1 or 2, wherein The light projecting unit, when measuring the three-dimensional shape of the measurement object, projects slit light that scans a predetermined measurement range,
The light projection control unit scans the measurement range monotonously at a predetermined scanning speed with the slit light when the light projection unit projects light with the light projection pattern for monitor display. The three-dimensional shape measuring apparatus according to any one of claims 1 to 3, wherein: The plurality of projection patterns include a projection pattern for visual field display,
The light projecting unit, when measuring the three-dimensional shape of the measurement object, projects slit light that scans a predetermined measurement range,
The light projection control unit, when causing the light projection unit to project light with the light projection pattern for displaying the visual field, displays the measurement range at a scanning speed for performing predetermined modulation of the slit light on the light projection unit. The three-dimensional shape measuring apparatus according to any one of claims 1 to 4, wherein the three-dimensional shape measuring apparatus is scanned. The light projecting control unit causes the light projecting unit to reciprocate and scan the measurement range at a scanning speed that does not cause the light projected by the light projection pattern to flicker when the slit light is scanned in the measurement range. The three-dimensional shape measuring apparatus according to claim 4 or 5, characterized in that: The three-dimensional according to any one of claims 1 to 3, wherein the light projecting unit forms the plurality of light projecting patterns by projecting light through a light projecting mask. Shape measuring device. The three-dimensional shape measuring apparatus according to claim 1, further comprising a monitor unit that displays an image captured by the light receiving unit. The three-dimensional shape measuring apparatus according to claim 1, further comprising an external output unit that performs data communication with an external device. In the three-dimensional shape measurement method for measuring the three-dimensional shape of the measurement object in a non-contact manner,
It is possible to project light with a plurality of projection patterns including a projection pattern for monitor display,
Projecting light with the monitor display projection pattern from the plurality of projection patterns;
A method for measuring a three-dimensional shape, comprising: a step of imaging a light image formed on an imaging surface while projecting light in the step.