JP2009058229A - Apparatus for inspecting vibration-type physical quantity sensor, and the same sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a vibration-type physical quantity sensor capable of performing inspection efficiently and accurately, and to provide the vibration-type physical quantity sensor. <P>SOLUTION: The apparatus for inspecting the vibration-type gyro sensor outputs a detection signal based on external force operating on a vibration section while vibrating the vibration section. The apparatus supplies power to a plurality of gyro sensors (sensors A-D) mounted on an inspection board 20, rotates and drives the inspection board 20 where the plurality of gyro sensors (sensors A-D) are mounted for giving external force to a vibrator 1 in the plurality of gyro sensors, is mounted on the inspection board 20 during operation, vibrates the vibrators 1 sequentially one by one for outputting a detection signal to the plurality of gyro sensors (sensors A-D) while power is being supplied, and performs inspection based on the detection signal. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a vibration type physical quantity sensor inspection apparatus and a vibration type physical quantity sensor.

Conventionally, as an example of a vibration-type physical quantity sensor, there has been a vibration-type angular velocity sensor as described in Patent Document 1.
JP 7-260495 A

  By the way, when inspecting the characteristics of a vibration type angular velocity sensor, a plurality of angular velocity sensors are arranged on a rotatable inspection substrate, and power is supplied to the angular velocity sensor to drive and vibrate, while rotating the inspection substrate. There is. Further, when inspecting in this way, in order to suppress interference between the angular velocity sensors, it is considered to inspect the plurality of angular velocity sensors arranged on the inspection substrate by sequentially supplying power and driving vibration. It is done.

  However, the angular velocity sensor self-heats when power is supplied. As shown in FIGS. 7 and 8, the angular velocity sensor before adjusting the characteristics varies in detection characteristics due to self-heating, and it takes time until the detection characteristics become stable. FIG. 7 is a graph showing an example of sensor output temperature characteristics before adjustment in the angular velocity sensor. FIG. 8 is a graph showing an example of sensor output characteristics after power supply in the angular velocity sensor.

  Therefore, the above-described method has a problem that each of the plurality of angular velocity sensors requires a waiting time from the start of power supply until the detection characteristics become stable, and thus cannot be efficiently inspected.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a vibration type physical quantity sensor inspection apparatus and a vibration type physical quantity sensor that can be efficiently and accurately inspected.

  In order to achieve the above object, an inspection apparatus for a vibration type physical quantity sensor according to claim 1 is a vibration type physical quantity sensor that outputs a detection signal based on an external force acting on the vibration part while driving the vibration part. An external force applying means for applying an external force to a vibration part in a plurality of physical quantity sensors by driving an inspection member on which a plurality of physical quantity sensors are mounted, and a plurality of physical quantity sensors mounted on the inspection member A power supply means for supplying power to the sensor and a plurality of physical quantity sensors mounted on an operating inspection member and supplied with power, drive the vibration part in turn and output detection signals. And an inspection means for inspecting based on the detection signal.

  As described above, the self-heating in the physical quantity sensor that does not vibrate the vibration part can be maintained by sequentially inspecting the plurality of physical quantity sensors that are supplied with power by vibrating the vibration part. it can. Therefore, when inspecting a plurality of physical quantity sensors, the waiting time until the detection characteristics due to self-heating are stabilized can be shortened, and the inspection can be performed efficiently. In addition, since the inspection is performed by sequentially vibrating the vibration units of the plurality of physical quantity sensors, the influence of vibration of other physical quantity sensors can be suppressed and the inspection can be performed accurately.

  According to a second aspect of the present invention, the external force adding means may include a rotation drive mechanism that applies a rotational force to the vibrating portions of the plurality of physical quantity sensors by rotationally driving the inspection member. By doing so, it is possible to inspect the vibration type gyro sensor.

  In addition, as the physical quantity sensor, as described in claim 3, as a vibration unit, a driving sensor element that is driven to vibrate with a constant amplitude based on a driving signal and outputs a driving vibration detection signal corresponding to the driving vibration is provided. , And a sensor element for yaw detection that outputs a yaw detection signal corresponding to the yaw applied when the drive sensor element is driven to vibrate, and processes the drive vibration detection signal to output a drive signal A drive unit that performs signal processing on the yaw detection signal and generates a detection signal corresponding to the yaw, and the drive unit includes a switching unit that switches between output and stop of the drive signal in an energized state. You may do it.

  According to another aspect of the present invention, the physical quantity sensor includes a storage unit that stores data used for signal processing in the drive unit and the yaw detection unit, and the drive unit outputs a drive signal to the storage unit. A control signal that keeps the switching state may be output to the switching unit by inputting a switching signal for switching between “stop” and “stop”.

  According to another aspect of the present invention, a switching pad electrically connected to the switching unit may be provided, and the switching unit may hold the switching state while applying a voltage from the pad. .

  According to a sixth aspect of the present invention, the physical quantity sensor may include an external input unit that can input a drive signal from the outside when the switching unit is in a stopped state. Even in this case, the inspection can be performed by driving and vibrating the vibration part.

  In addition, as shown in claim 7, each physical quantity sensor is connected to one signal wiring through a switch, and the inspection unit selects the switch to sequentially turn the vibration unit of the physical quantity sensor. May be driven to vibrate. This is preferable because it is not necessary to prepare one signal wiring for each physical quantity sensor.

  According to another aspect of the present invention, in the state where the power is supplied to the plurality of physical quantity sensors, the frequency measurement means for measuring the frequency of the driving signal of each physical quantity sensor and the driving vibration based on the frequency of the driving signal Selection means for selecting a physical quantity sensor may be provided. By doing in this way, since the influence by the vibration of another physical quantity sensor can be suppressed reliably and it can test | inspect correctly, it is preferable.

  According to a ninth aspect of the present invention, the inspection means may drive and vibrate a plurality of physical quantity sensors one by one in order. Even if it does in this way, since the influence by the vibration of another physical quantity sensor can be suppressed reliably and it can test | inspect correctly, it is preferable.

  In order to achieve the above object, the vibration-type physical quantity sensor according to claim 10 is a vibration-type physical quantity sensor that outputs a detection signal based on an external force acting on the vibration section while vibrating the vibration section. A circuit unit that operates in an energized state and includes a drive unit that outputs a drive signal that instructs the vibration unit to vibrate and an output unit that outputs a detection signal. And a switching unit that switches between output and stop of the drive signal in the state.

  Thus, by providing the switching unit that switches between output and stop of the drive signal in the energized state, it is possible to maintain a self-heating state by supplying power while stopping the vibration of the vibration unit. Therefore, the physical quantity sensor shown in claim 3 can reduce the waiting time until the detection characteristics due to self-heating are stabilized when a plurality of physical quantity sensors are inspected collectively, and the influence of vibration of other physical quantity sensors can be reduced. Since it can be suppressed, inspection can be performed efficiently and accurately.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a schematic configuration of a gyro sensor according to an embodiment of the present invention. FIG. 2 is a partial circuit diagram of the drive circuit according to the embodiment of the present invention. FIG. 3 is an image diagram showing a schematic configuration of an inspection board (inspection member) in the embodiment of the present invention. FIG. 4 is a circuit diagram showing a schematic configuration of the inspection member in the embodiment of the present invention. FIG. 5 is an image diagram showing a schematic configuration of the inspection apparatus according to the embodiment of the present invention. FIG. 6 is a flowchart showing the inspection process in the embodiment of the present invention. In the present embodiment, an example in which a vibration angular velocity sensor is applied as a vibration physical quantity sensor will be described.

  First, a vibration type gyro sensor will be described with reference to FIGS. The gyro sensor includes a vibrator 1 and a circuit unit 10. The circuit unit 10 includes a drive unit A including a CV conversion circuit 2, an amplification circuit 3, an adjustment circuit 4, and a drive circuit 5, and an output unit including a CV conversion circuit 6, an amplification circuit 7, a synchronous detection circuit 8, and an LPF adjustment circuit 9. B (yaw detection unit) and storage unit C are provided.

  The vibrator 1 includes a driving sensor element and a detecting sensor element (not shown). When an external force (yaw) is generated while the driving sensor element is performing driving vibration, a pair of Coriolis force causes The configured sensor element for detection vibrates. The vibrator 1 generates an output according to the vibration of each of the pair of detection sensor elements, and outputs according to the drive vibration in order to detect whether the drive sensor element is accurately driving vibration. Is supposed to be generated.

  The drive unit includes a sensor drive power supply, a booster circuit, a drive circuit 5 including an operational amplifier, a CV conversion circuit 2, an amplifier circuit 3, and an adjustment circuit 4. The drive unit is for oscillating the drive sensor element in the vibrator 1 and outputs a drive signal by processing a drive vibration detection signal from the drive sensor element. Note that power may be supplied from the outside instead of the sensor driving power.

  The drive circuit 5 applies a drive voltage (drive signal) to the drive sensor element in the vibrator 1. The drive circuit 5 forms a voltage for oscillating the driving sensor element in the vibrator 1 by boosting, for example, an externally supplied power supply voltage in the boost circuit. In order to drive the driving sensor element with a predetermined amplitude and a predetermined frequency, a voltage having a predetermined frequency is output as a driving signal to the driving sensor element.

  The CV conversion circuit 2 receives a detection signal (hereinafter referred to as a drive vibration detection signal) indicating a capacitance value corresponding to the drive vibration of the drive sensor element in the vibrator 1 from the vibrator 1 and converts the voltage into a detection signal. It is. A drive vibration detection signal after voltage conversion in the CV conversion circuit 2 is input to the amplifier circuit 3.

  The amplifying circuit 3 amplifies the drive vibration detection signal voltage-converted by the CV conversion circuit 2 to a predetermined voltage value. The adjustment circuit 4 adjusts the phase of the drive signal and adjusts the drive vibration of the vibrator 1 to have a constant amplitude.

  As described above, the drive signal is formed by the drive circuit 5 based on the drive vibration detection signal. Therefore, the phase of the drive vibration detection signal is shifted from the phase of the drive signal to be actually output to the drive sensor element. Yes. In order to repair this phase shift, the phase of the drive vibration detection signal must be adjusted to match the phase of the drive signal. For this reason, the phase of the drive vibration detection signal is corrected by the adjustment circuit 4, and as a result, the phase of the drive signal formed based on the phase is adjusted. Thereby, the frequency of the drive signal is set to a predetermined frequency.

  The adjustment circuit 4 detects the current amplitude of the sensor element for driving from the driving vibration detection signal, and corrects the driving signal so that the amplitude becomes constant. Based on the signal from the adjustment circuit 4, the drive signal output from the drive circuit 5 is adjusted. As a result, the drive sensor element in the vibrator 1 is driven to vibrate with a constant amplitude and a predetermined frequency. Become.

  The drive circuit 5 includes an amplifier operation stop switch (switching unit) 52 at the output stage of the operational amplifier 51 as shown in FIG. The amplifier operation stop switch 52 switches the output and stop of the drive signal by turning off or on based on a mode switching signal described later. When the amplifier operation stop switch 52 is off, the driving circuit 5 operates to output a driving signal (vibration mode), and when it is on, the operational amplifier 51 stops and stops outputting the driving signal. (Stop mode). That is, when power is supplied to the gyro sensor, when the amplifier operation stop switch 52 is turned off, the CV conversion circuit 2, the amplification circuit 3, the adjustment circuit 4, the drive circuit 5, the CV conversion circuit 6, the amplification circuit 7, and the synchronous detection. When the circuit 8 and the LPF adjustment circuit 9 are activated and the amplifier operation stop switch 52 is turned on, the CV conversion circuit 2, the amplification circuit 3, the adjustment circuit 4, the CV conversion circuit 6, the amplification circuit 7, the synchronous detection circuit 8, and the LPF adjustment The circuit 9 is in an operating state, and the driving circuit 5 is not operating.

  The drive circuit 5 may be provided with an external input switch 12. In this case, external input is permitted only when the external input switch 12 is on.

  The circuit unit 10 is provided with a switching pad 40, and a voltage may be applied from the switching pad 40 to output a switching signal to the amplifier operation stop switch (switching unit) 52. . The amplifier operation stop switch (switching unit) 52 maintains the switching state while the voltage is applied from the switching pad 40. In this way, the amplifier operation stop switch (switching unit) 52 can be forcibly operated using the switching pad 40.

  Further, the drive circuit 5 inputs a switching signal for switching between output and stop of the drive signal to the storage unit C, so that a control signal that keeps the switching state is output to the amplifier operation stop switch (switching unit) 52. May be. That is, as a switching method of the amplifier operation stop switch (switching unit) 52, a test mode is prepared in the storage unit C, and one of the test modes is set to be switched.

  In addition, when the amplifier operation stop switch (switching unit) 52 is in a stop state, an external input unit capable of inputting a drive signal from the outside may be provided. This is preferable because a drive signal can be freely input.

  The output unit obtains a sensor output by performing signal processing on a detection signal from a sensor element for detection in the vibrator 1. This output unit includes a CV conversion circuit 6, an amplifier circuit 7, a synchronous detection circuit 8, and an LPF adjustment circuit 9.

  The CV conversion circuit 6 performs voltage conversion on a detection signal (hereinafter referred to as a detection signal) indicated by a capacitance value corresponding to vibration generated when an external force (yaw) is applied to the sensor element for detection. . The CV conversion circuit 6 is configured by two charge amplifiers when the sensor elements for detection are provided as a pair of left and right symmetrical structures, and a voltage corresponding to the yaw detection signal is output by each charge amplifier. It is like that. The voltage output from the CV conversion circuit 6 is input to the amplifier circuit 7.

  The amplifying circuit 7 amplifies the voltage-converted yaw detection signal with a predetermined gain. When the CV conversion circuit 6 is composed of two charge amplifiers, the amplifier circuit 7 is configured as a differential amplifier circuit that amplifies the differential of their outputs. The output of the amplifier circuit 7 is input to the synchronous detection circuit 8.

  The synchronous detection circuit 8 removes noise components other than the drive frequency from the detection signal amplified by the amplifier circuit 7. For example, the synchronous detection circuit 8 is configured to pass a component synchronized with the frequency of the drive signal from the output of the amplifier circuit 7 based on the phase adjusted by the adjustment circuit 4. The output of the synchronous detection circuit 8 is output to the LPF adjustment circuit 9.

  The LPF adjustment circuit 9 extracts only a component having a frequency equal to or lower than a predetermined frequency from the signal that has passed through the synchronous detection circuit 8. The LPF adjustment circuit 9 is used as a sensor output. Since the signal (detection signal) after passing through the LPF adjustment circuit 9 also includes temperature characteristics of output offset and sensitivity, In order to adjust the value, a zero point / sensitivity temperature special adjustment circuit may be provided.

  The storage unit C includes an EEPROM or the like, and stores data used for signal processing in the drive unit A and the output unit B (yaw detection unit).

  Next, the inspection board 20 used when inspecting the gyro sensor as described above will be described with reference to FIGS. This inspection board 20 corresponds to the inspection member in the present invention, and includes a plurality of sockets 21 (four in this embodiment) on which gyro sensors are mounted, power supply to the gyro sensors and input of signals. A connector 22 for output, a power switch 23 for switching a power supply state to the gyro sensor, a signal switch 24 for switching a signal input to the gyro sensor and a signal output from the gyro sensor, and the like. That is, a plurality of gyro sensors can be mounted on the inspection board 20. When a gyro sensor is mounted on the plurality of sockets 21 of the inspection board 20, a circuit configuration as shown in FIG. 4 is obtained. That is, each gyro sensor is connected to the power supply and GND (ground) via the power switch 23. Further, each gyro sensor outputs a detection signal (sensor output) via the signal switch 24, or receives a mode switching signal via a single signal wiring. As shown in FIG. 4, the gyro sensors (sensors A to D) are connected to one signal wiring via a signal switch 24 (switch). Then, as will be described later, the control device 30 drives and vibrates the vibration parts of the gyro sensors (sensors A to D) in order by selecting the signal switch 24. This is preferable because it is not necessary to prepare one signal wiring for each gyro sensor (sensors A to D).

  Next, a gyro sensor inspection apparatus will be described with reference to FIG. As shown in FIG. 5, the inspection apparatus includes a rotary table 32 on which the inspection board 20 is disposed, a slip ring (not shown) disposed on the rotation center axis of the rotary table 32, a rotation device, and the like. A pedestal 31 and a control device 30 including a power supply unit, a control unit, an inspection unit, and the like are provided.

  On the rotary table 32, an inspection board 20 on which a plurality of gyro sensors to be inspected are mounted is disposed. The plurality of gyro sensors are connected to the control device 30 via the connector 22 of the inspection board 20, the wiring material, the slip ring, and the like.

  The power supply unit of the control device 30 is configured to supply power (drive voltage Vcc) to the circuit unit 10 of each gyro sensor. The control unit of the control device 30 switches the power switch 23 to switch the power state of each gyro sensor, switches the signal switch 24 to output a mode switching signal to the drive circuit 5 of each gyro sensor, The rotation table 32 is rotated by outputting an instruction signal for instructing rotation. The inspection unit of the control device 30 is configured to inspect the sensor output (detection signal) from the output unit (LPF adjustment circuit 9) of each gyro sensor.

  The rotary table 32 is rotated about a Z axis (a method perpendicular to the ground) as a central axis by a driving force from a rotary device. The slip ring prevents the wiring material and the like from being entangled when the turntable 32 is rotated by the driving force from the rotating device.

  When inspecting the gyro sensor with the above-described inspection apparatus, first, a plurality of gyro sensors are arranged in the socket 21 of the inspection board 20. Then, the inspection board 20 on which the plurality of gyro sensors are arranged is arranged on the rotary table 32, and the connector 22 of the inspection board 20 and the control device 30 are connected by a wiring material. In this way, the plurality of gyro sensors and the like and the control device 30 are electrically connected.

  Next, the control unit of the control device 30 turns on the power switch 23 and supplies power from the power supply unit to the circuit unit 10 of each gyro sensor arranged on the rotary table 32 via the inspection board 20. During the inspection, the power switch 23 is always turned on, and power is always supplied to the circuit unit 10 of the gyro sensor. And the control part of the control apparatus 30 rotates the turntable 32 by outputting the instruction | indication signal which instruct | indicates rotation to a rotation apparatus. As a result, the inspection board 20 disposed on the rotary table 32 is rotated (driven), and an external force is applied to the vibrator 1 in the plurality of gyro sensors (external force applying means).

  Then, the control unit of the control device 30 vibrates the vibrator 1 in turn with respect to the plurality of gyro sensors that are mounted on the operating inspection board 20 and are supplied with power. A detection signal based on the external force applied to the vibrator 1 by rotation is output (inspection means). And the test | inspection part of the control apparatus 30 test | inspects based on the detection signal (inspection means).

  That is, as shown in FIG. 6, when the inspection is performed by vibrating the vibrator 1 of the sensor A, the control device 30 supplies power to all the gyro sensors and other sensors (sensors B˜). The vibrator 1 of the sensor D) is stopped. Similarly, when the inspection is performed by vibrating the vibrator 1 of the sensor B, the vibrators 1 of the other sensors (sensor A, sensor C, sensor D) are supplied while supplying power to all the gyro sensors. Stop it. Similarly, when the inspection is performed by vibrating the vibrator 1 of the sensor C, the vibrators 1 of the other sensors (sensor A, sensor B, sensor D) are supplied while supplying power to all the gyro sensors. Stop it. Similarly, when the inspection is performed by vibrating the vibrator 1 of the sensor D, the vibrators 1 of the other sensors (sensor A, sensor B, sensor C) are supplied while supplying power to all the gyro sensors. Stop it.

  More specifically, the control unit of the control device 30 turns on only the signal switch 24 connected to one gyro sensor (for example, the sensor A, which is also referred to as a gyro sensor to be inspected) in the signal switch 24. Then, a control signal is output so that the amplifier operation stop switch 52 is turned off for the gyro sensor to be inspected. Thus, the gyro sensor (sensor A) to be inspected outputs a detection signal based on the external force applied to the vibrator 1 by the rotation of the rotary table 32 when the vibrator 1 is driven to vibrate. On the other hand, although the gyro sensor (sensor B to sensor D) that is not the inspection target is supplied with power from the power supply unit of the control device 30, the vibrator 1 is stopped and the signal switch 24 is also turned off. The detection signal is not output to the control device 30. Such processing is sequentially performed on a plurality of gyro sensors one by one.

  As described above, the plurality of gyro sensors in a state where power is supplied are inspected by vibrating the vibrator 1 in order one by one, so that the self-heating in the gyro sensor that does not vibrate the vibrator 1 is performed. Can be maintained. Therefore, when inspecting a plurality of gyro sensors, the waiting time until the detection characteristics due to self-heating are stabilized can be shortened, and the inspection can be performed efficiently. In addition, since the inspection is performed by sequentially vibrating the vibrators of the plurality of gyro sensors one by one, the influence due to the vibration of the other gyro sensors can be suppressed and the inspection can be performed accurately.

  In the above-described embodiment, an example in which a plurality of gyro sensors perform inspection one by one has been described, but the present invention is not limited to this. In the plurality of gyro sensors, a gyro sensor having the same driving vibration direction may be selected and stopped.

  Also, select the frequency measurement unit that measures the frequency of the drive signal of each gyro sensor and the gyro sensor that vibrates based on the frequency of the drive signal while power is supplied to multiple gyro sensors. And a selection unit to perform. By doing in this way, since the influence by the vibration of another physical quantity sensor can be suppressed reliably and it can test | inspect correctly, it is preferable.

  In the above embodiment, the gyro sensor has been described as an example of the vibration type physical quantity sensor, but the present invention is not limited to this. If the sensor has vibration as a detection principle, the object of the present invention can be achieved.

It is a block diagram which shows schematic structure of the gyro sensor in embodiment of this invention. It is a partial circuit diagram of the drive circuit in the embodiment of the present invention. It is an image figure showing a schematic structure of an inspection board (inspection member) in an embodiment of the invention. It is a circuit diagram which shows schematic structure of the member for a test | inspection in embodiment of this invention. It is an image figure showing a schematic structure of an inspection device in an embodiment of the invention. It is a flowchart which shows the test | inspection process in embodiment of this invention. It is a graph which shows the sensor output temperature characteristic example before adjustment in an angular velocity sensor. It is a graph which shows the sensor output characteristic example after the power supply in an angular velocity sensor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Oscillator (vibration part), 2 CV conversion circuit, 3 Amplification circuit, 4 Adjustment circuit, 5 Drive circuit, 51 Operational amplifier, 52 Amplifier operation stop switch (switching part), 6 CV conversion circuit, 7 Amplification circuit, 8 Synchronous detection Circuit, 9 LPF adjustment circuit, 10 Circuit section 12 External input switch, 20 Inspection board (inspection member), 21 Socket, 22 Connector, 23 Power switch, 24 Signal switch, 30 Control device, 31 Base, 32 Rotation Table, 40 switching pads

Claims (10)

An inspection device for a vibration type physical quantity sensor that outputs a detection signal based on an external force acting on the vibration unit while driving and vibrating the vibration unit,
An external force applying means for applying an external force to the vibration part in the plurality of physical quantity sensors by driving an inspection member on which the plurality of physical quantity sensors are mounted;
Power supply means for supplying power to the plurality of physical quantity sensors mounted on the inspection member;
Based on the detection signals, the plurality of physical quantity sensors mounted on the inspection member that is in operation and being supplied with power are sequentially driven to vibrate the vibration unit to output the detection signals. Inspection means for performing inspection,
An inspection apparatus for a vibration type physical quantity sensor, comprising:   2. The vibration-type vibration device according to claim 1, wherein the external force adding unit includes a rotation drive mechanism that applies a rotation force to the vibration units of the plurality of physical quantity sensors by rotating the inspection member. Inspection device for physical quantity sensor. The physical quantity sensor is
The vibration unit is driven and vibrated by a drive sensor element that outputs a drive vibration detection signal corresponding to the drive vibration and a drive sensor element that is driven and vibrated with a constant amplitude based on the drive signal. Including a sensor element for yaw detection that outputs a yaw detection signal according to the yaw applied when
A drive unit that processes the drive vibration detection signal and outputs the drive signal;
A yaw detection unit that processes the yaw detection signal and generates a detection signal corresponding to the yaw;
The vibration type physical quantity sensor inspection apparatus according to claim 1, wherein the drive unit includes a switching unit that switches between output and stop of the drive signal in an energized state.   The physical quantity sensor includes a storage unit that stores data used for signal processing in the drive unit and the yaw detection unit, and the drive unit is configured to switch the output and stop of the drive signal to the storage unit. 4. The vibration type physical quantity sensor inspection apparatus according to claim 3, wherein a control signal that keeps the switching state is output to the switching unit by inputting a signal.   The vibration according to claim 3, further comprising a switching pad electrically connected to the switching unit, wherein the switching unit maintains a switching state while applying a voltage from the pad. Inspection device for type physical quantity sensor.   6. The vibration type according to claim 3, wherein the physical quantity sensor includes an external input unit capable of inputting a drive signal from the outside when the switching unit is in a stopped state. Physical quantity sensor inspection device.   Each physical quantity sensor is connected to one signal wiring via a switch, and the inspection means drives and vibrates the vibration unit of the physical quantity sensor in order by selecting the switch. The vibration type physical quantity sensor inspection device according to claim 1, wherein the inspection device is a vibration type physical quantity sensor.   Frequency measurement means for measuring the frequency of the drive signal of each physical quantity sensor in a state where power is supplied to the plurality of physical quantity sensors, and selection means for selecting a physical quantity sensor to drive and vibrate based on the frequency of the drive signal. The vibration-type physical quantity sensor inspection apparatus according to claim 1, further comprising:   8. The vibration type physical quantity sensor inspection apparatus according to claim 1, wherein the inspection unit drives and vibrates the plurality of physical quantity sensors one by one in order. 9. A vibration-type physical quantity sensor that outputs a detection signal based on an external force acting on the vibration part while vibrating the vibration part,
It operates in an energized state, and includes a drive unit that outputs a drive signal that instructs the vibrating unit to vibrate, and an output unit that outputs the detection signal,
The vibration type physical quantity sensor, wherein the circuit unit includes a switching unit that switches between output and stop of the drive signal in an energized state.

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