JP2009055717A - Actuator device and actuator structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator device which is superior in motility, whose strength is high, which can be operated at a large stroke, can be made into a light and simple structure, can be operated at low voltage and can suppress energy consumption. <P>SOLUTION: In the actuator device, electrolytic film layers are arranged on both sides of a center electrode layer and external electrode layers are disposed on external sides of the electrolytic film layers. The device is divided into a plurality of bending parts arranged by standing in a row so that each other may be adjoined mutually. A plurality of the adjacent bending parts bend in opposite directions when voltage is applied to the center electrode layer and the external electrode layers. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an actuator device and an actuator structure.

  Certain ionic conductive polymers can be deformed by applying a voltage, with internal ions and solvents moving in response to the electric field, resulting in partial volume fluctuations, and contracting and expanding to a considerable extent. Are known. For example, as shown in FIG. 7, when the electrodes 72 and 73 are joined to the polymer electrolyte membrane 71 and a voltage is applied, the electrodes and the electrolyte are slightly contracted and expanded to form a concave shape and bend. Whether the electrode or the electrolyte fluctuates depends on the material selected. And it is proposed to make it an element which bends using the above-mentioned polymer film etc. (refer to patent documents 1-5, nonpatent literature 1).

  By the way, a high-performance soft actuator that is driven at a low voltage is desired. As a result, it is expected to be an artificial muscle of a personal robot including, for example, a surgical device and welfare equipment that directly touch the human body and each organ. In order to meet these demands, it is desired to bend a large amount while maintaining a sufficient strength, and preferably to operate in a biologically diverse manner.

Japanese Patent Laid-Open No. 11-233504 JP 2004-314219 A JP 2006-288040 A JP 2007-126624 A JP 2007-118159 A Boyko L. Stoimenov et al., Proceedings of SPIE, vol. 6524, EDPAD 2007, Joseph Bar-Cohen, Editor, 65240T, http://www.bmc.riken.jp/~stoimenov/research/papers/2007EAPAD‐web‐IPMCComplexCurves .pdf

  An object of the present invention is to provide an actuator device that is excellent in mobility, has high device strength, and can be moved with a large stroke. Another object of the present invention is to provide an actuator device that can have a light and simple structure in addition to the above functions, and that can operate at a low voltage and suppress energy consumption. Furthermore, the present invention is an actuator device that maintains the above-described excellent performance, can suppress a short circuit between the electrodes due to the generation of burr of the electrode, etc., and can suitably cope with mass production with high efficiency and high accuracy. The purpose is to provide. It is another object of the present invention to provide an actuator structure that can perform complicated and diverse motions or powerful motions by combining actuator devices having excellent performance as described above.

The above problems have been achieved by the following means.
(1) An actuator device in which an electrolyte membrane layer is provided on both sides of a center electrode layer, and an outer electrode layer is provided on the outside of the electrolyte membrane layer, and the devices are arranged in series so as to be adjacent to each other. The actuator device is characterized in that when the voltage is applied to the central electrode layer and the outer electrode layer, the bent portions are bent in opposite directions to each other.
(2) The bending action portions of the electrolyte membrane layer when the voltage is applied to the bending portions of the actuator devices arranged so as to be adjacent to each other are opposite to the central electrode layer at the bending portions adjacent to each other. The actuator device according to (1), wherein the actuator device is on the surface side of the actuator.
(3) The electrolyte membrane layer and the outer electrode layer are both laminated in the longitudinal direction of the device over the plurality of bent portions on both sides of the central electrode layer, and the outer electrode layer is adjacent to the bent portion. An outer side having a wide part and a narrow part alternately for each part, and the wide part or narrow part of the outer electrode layer is located on the opposite surface side of the central electrode with the central electrode layer in between The actuator device according to (1) or (2), wherein the actuator device does not substantially overlap each other.
(4) The electrolyte membrane layer and the outer electrode layer are both laminated in the longitudinal direction of the device across the plurality of bent portions on both sides of the central electrode layer, and the outer electrode layers are adjacent to each other. Each bent portion has a layer thickness portion and a layer thin portion alternately, and the layer thickness portion or the layer thin portion of the outer electrode layer is on the opposite surface side of the center electrode across the center electrode layer. The actuator device according to (1) or (2), wherein the outer electrode that is positioned does not substantially overlap each other.
(5) Any one of (1) to (4), wherein one of the outer electrodes located on the opposite side with the central electrode interposed therebetween is expanded and the other contracted. The actuator device according to claim 1.
(6) When the actuator device according to any one of (1) to (5) is bent and bent, the center electrode layer becomes a center line of a bent figure formed by bending. Actuator device characterized by.
(7) A cylindrical actuator structure or a disk-shaped actuator in which the actuator device according to any one of (1) to (6) is a planar actuator structure or is three-dimensionally combined An actuator structure characterized by being a structure.

  The actuator device of the present invention can be bent with a desired curvature at a plurality of bent portions, has excellent motility, and can be moved with a large stroke. It has an excellent effect that it is not easily damaged even during long-time operation. In addition, the actuator device of the present invention can have a light and simple structure while maintaining the above performance, and can be operated at a low voltage to suppress energy consumption. In addition, the actuator device of the present invention can maintain the above-described excellent functions, suppress short-circuiting between electrodes due to generation of burr of electrodes, etc., can be manufactured efficiently and accurately, and can correspond to mass production of devices. Furthermore, the actuator structure of the present invention formed by combining actuator devices having excellent performance as described above can perform complicated and diverse motions or powerful motions.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an exploded perspective view schematically showing a main part in an embodiment (first embodiment) of an actuator device of the present invention. In the actuator device 10 according to the first embodiment, the electrolyte membrane layer 2 (the upper electrolyte membrane layer 2a and the lower electrolyte membrane layer 2b) is disposed on both sides of the central electrode layer 3, and further on both sides thereof. An outer electrode layer 1 (upper electrode layer 1a, lower electrode layer 1b) is disposed. Here, another functional layer may be provided between the center electrode layer 3 and the electrolyte membrane layer 2, but a voltage is directly applied from the center electrode layer 3 to the electrolyte membrane layer 2. As in the first embodiment, it is preferable that the two are in contact with each other. The same applies to the electrolyte membrane layer 2 and the outer electrode layer 1, and another layer may be provided between the two, but it is preferable that the two layers be in contact with each other.

In the device 10 of Embodiment 1, the outer electrode layer 1 is formed so that the wide portions 1s and the narrow portions 1t are alternately arranged. At this time, the wide portion 1s has a width (Y direction) substantially equal to that of the electrolyte membrane layer 2 therebelow, and the narrow portion 1t is narrower than this. The wide portion 1s to the narrow portion 1t of the upper electrode layer 1a is not substantially overlapped with the wide portion 1s to the narrow portion 1t of the outer electrode layer 1b with the center electrode layer 3 interposed therebetween.
In the present invention, a specific portion of the outer electrode layer does not overlap with (via) the center electrode layer in the projected image when the outer electrode layers on both sides are projected and overlapped in a direction orthogonal to the center electrode layer. , That the specific part is in a non-overlapping relationship. When the outer electrode layer arranged so as to sandwich the center electrode layer does not substantially overlap, most of them do not overlap as long as the good bending mobility of the device is maintained. It means that there may be a part. If most of the opposing electrodes of the outer electrode layer arranged so as to sandwich the center electrode layer do not overlap, even if there is a part that overlaps one electrode of the outer electrode facing part, the part that overlaps both electrodes Even if there is, it is sufficient if the bending motion of the device is secured.

In the first embodiment, the bent portions u ₁ , u ₂ , u ₃ , u divided in the longitudinal direction in the device 10 for each of the wide portion 1s and the narrow portion 1t of the outer electrode layer 1 described above. ₄ . . . Is configured. Then, by applying voltages of opposite polarities to the center electrode layer 3 and the outer electrode layer 1, each of the bent portions bends in the opposite direction to the adjacent bent portions so that the device 10 as a whole undulates. To bend (Fig. 2). Here, the bending portions bending in directions opposite to each other means that the unevenness in the bent shape is inverted. In other words, it means that the curvature is inverted between adjacent bent portions, and the magnitude of the curvature may be the same or different for each bent portion. In the present invention, the bending motion means a continuous bending deformation in which a plurality of bending portions bend in opposite directions at adjacent bending portions, and is a simple bending having only one inflection point in the element. Distinguished from

  In the actuator device 10 according to the first embodiment, the width (Y direction) of the device is not particularly limited. However, in the case of a small device, it is practical to be about 1 to 10 mm. About 100 mm is practical. The ratio ([width of narrow portion 1t] / [width of wide portion 1s]) between the wide portion 1s and the narrow portion 1t (Y direction) of the outer electrode layer is not particularly limited. In consideration of good bending motion, this ratio is preferably about 1: 2 to 1: 100, more preferably about 1: 5 to 1:10.

  The bending motion in the first embodiment will be described in more detail. FIG. 2 is a perspective view schematically showing a form when the device 10 shown in FIG. 1 is bent. As described above, the device according to the first embodiment performs a bending motion so as to wave in the longitudinal direction (X direction) for each bent portion u by applying a voltage to the center electrode layer 3 and the outer electrode layer 1. Speaking of specific examples of the electrode layer and the electrolyte membrane layer, the electrode layers 1 and 3 as described later are plate electrode layers made of carbon nanofibers, and the electrolyte membrane layer 3 is a polymer electrolyte membrane (cation exchange resin). An embodiment of a film) is exemplified. In addition, although a figure is a straight plate shape, this invention is not restricted to a straight plate shape. For example, it may be deformed in advance into a convex shape, a concave shape, an uneven shape, or the like. The straight plate-like element bends in the opposite direction when a positive voltage is applied and when a negative voltage is applied. Therefore, when a sine wave voltage is applied, it moves like a pendulum. At this time, it is possible to change the movement arrival point of the pendulum by previously deforming the element. Even when a plurality of elements are connected, the total deformation amount can be adjusted by deforming each element in advance. Further, the drive element may be bonded to another base material. The other base material is preferably a soft material such as a gel material or a rubber material.

  In the configuration of this specific example, the acidic polymer electrolyte membrane 2 tends to bend so as to be concave on the positive electrode (+). Then, when a negative voltage (−) is applied to the center electrode layer 3 and a positive voltage (+) is applied to the outer electrode layers 1 on both sides, the electrolyte membrane 2 is uniformly concave toward both outer sides. The power to try is generated. However, in the device of the first embodiment, as described above, the wide portion 1s and the narrow portion 1t are alternately provided in the outer electrode layer. Therefore, a positive voltage is supplied over a wide area to the portion of the electrolyte membrane 2 corresponding to the wide width portion 1s of the outer electrode layer 1, that is, the bending action portion 2s. As a result, ions and a solvent that is compatible with the ions move, and a strong bending force is applied to the bending action portion. On the other hand, a voltage is applied only in a narrow range to the bending non-action portion 2t of the electrolyte membrane 2 corresponding to the narrow width portion 1t, and only a weak bending force is applied. As a result, the bending force on the side of the bending action part 2s overcomes the bending force of the bending non-action part 2t, and a force that preferentially deforms into a concave shape in the wide part 1s of the outer electrode layer is generated in the device. To do. In this way, the bending action portion 2s or the wide width portion 1s that bends in the opposite outer directions (Z direction) are arranged on the opposite side between the bending portions adjacent to each other with the center electrode layer interposed therebetween. Thereby, as described above, a good bending motion that undulates in the longitudinal direction is realized. In the drawing, the wide width portion 1s and the narrow width portion 1t have the same length, but the wide width portion 1s and the narrow width portion 1t need not have the same length. In addition, there is a difference in rigidity, and it is possible to define a position where buckling or bending occurs when an external force is applied. For example, in a state where no voltage is applied, stress is applied in advance to selectively buckle at a position where rigidity is weak, and a more complicated bending motion is realized by applying voltage and driving the whole. Will be.

  Here, in the actuator device 10 of the first embodiment, the bending deformation force of each bent portion is increased in the device, and can be bent strongly with a large stroke. Here, the stroke means both the magnitude of displacement in the amplitude direction (Z direction) due to bending and the magnitude of displacement in the expansion / contraction direction (X direction) in the longitudinal direction of the device due to bending motion. Which amount of deformation increases between the X-axis and the Z-axis varies depending on the curvature and the length of the deformed portion. Here, when actually using the element concerning this invention, it fixes with a holder etc. Further, when a clip-shaped holder having a simple mechanism is used, rotation of the entire element is hindered by the fixing portion, and the direction of the element is defined in one direction at the fixing portion. In such a case, the entire deformation amount may increase by changing the curvature of a part of the element. The rotation inhibition portion may occur not only by the holder but also at a site where a plurality of elements are connected. Even in such a case, the overall deformation amount may increase by changing the curvature of a part of the element.

  The actuator device 10 according to the first embodiment has the central electrode layer 3 serving as a core as described above. Therefore, when the actuator device is bent and bent, the center electrode layer becomes the center line of the bent figure formed by the bending movement. This is the opposite side of the bent electrode with the center electrode interposed therebetween. This is because one of the outer electrodes located at swells and the other contracts, while the center electrode is in the middle. For this reason, the center electrode layer 3 works like a spine even when a bending motion that undulates with a large stroke as described above, maintains high durability, and maintains a shape-stable operation. For example, as will be described later, even when actuator devices are connected to form a large actuator structure and various movements are made by various deformations, the central electrode layer that forms the core firmly supports the device and lasts for a long time. It exhibits sexuality, and can respond supple and agile like vertebrates and exhibit stable motor performance.

In addition, since the actuator device 10 according to the first embodiment is a device having a plurality of electrodes having different expansion coefficients in a very simple laminated structure, it is difficult to produce a large amount on an industrial scale or to be complicated as described later. Even when a device is integrated into an actuator structure, it can be produced efficiently and with high dimensional accuracy. For example, a fine lead wire connecting electrodes and a structure in which a hole is formed in an electrolyte membrane to make an electrical connection may become too complicated and the production efficiency may not be sufficient. Moreover, the device shape which can be shape | molded will also be very limited. Furthermore, the electrodes may be inadvertently short-circuited, making it impossible to continue exercise for a long time.
On the other hand, the actuator device 10 according to the first embodiment can realize good productivity without the above-described problems and has a high degree of design freedom by integration. Furthermore, it is not necessary to process the electrodes in an excessively complicated manner, and the problem of shorting between the electrodes due to generation of burrs or the like can be solved. Furthermore, a stable production mode using the center electrode layer 3 as a substrate is possible. That is, a manufacturing process is possible in which the shape-stable center electrode layer 3 is first prepared, and then a soft electrolyte layer is applied and dried and sandwiched between the outer electrode layers 1. As a result, a state in which the shape is stable is maintained throughout the process, and the handling of the intermediate product is extremely high, and a manufacturing process capable of improving the quality can be realized.

  In the device 10 of the first embodiment, the thicknesses of the electrode layers 1 and 3 are not particularly limited. However, when a plate-like electrode layer made of carbon fiber to be described later is used, the thickness is preferably 10 to 1000 μm, for example, 100 to 500 μm. More preferably. The thickness of the electrolyte membrane layer 2 is not particularly limited. For example, when an electrolyte membrane described later is used, the thickness is preferably 1 to 100 μm, and more preferably 10 to 50 μm. In the device 10 of Embodiment 1, the wide portions 1s and the narrow portions 1t of the outer electrode layer 1 are alternately arranged with the same length in the device longitudinal direction (X direction). However, the lengths of the wide width portion 1s and the narrow width portion 1t are not particularly limited, and different forms from the present embodiment, that is, the lengths of the wide width portion 1s and the narrow width portion 1t may be appropriately different. In other words, it is preferable to adjust the width and length of the wide width portion 1s and further the width and length of the narrow width portion 1t in accordance with the required movement form of the device. For example, when the bending movement is performed with a short wavelength, it is preferable to set the length of the wide portion 1s or the narrow portion 1t to 1 to 10 mm, for example. For example, when the large and long bending motion with a long wavelength is performed, the length of the wide portion 1s or the narrow portion 1t is preferably 10 to 100 mm.

  In the device 10 of the first embodiment, for example, when one end of an actuator having a length of 10 mm is fixed and the movement amount of the other end that swings like a pendulum is defined as a stroke, for example, a device with a large stroke is used. In such a case, it is desirable to swing 6 mm or more from side to side.

  FIG. 3 is an exploded perspective view schematically showing a main part in another embodiment (embodiment 2) of the actuator device of the present invention. In the second embodiment, the shape and arrangement of the center electrode layer 3 and the electrolyte membrane layer 2 are the same as those in the first embodiment. In the second embodiment, the shape of the outer electrode is different from that of the first embodiment. Specifically, as shown in FIG. 3, the outer electrode layer 1 is formed by alternately arranging a thick portion 1e having a thickened electrode layer and a thin portion 1g having a thinned thickness in the longitudinal direction (X direction). Has been established. Further, the thick portion 1e to thin portion 1g of the upper electrode layer 1a and the thick portion 1e to thin portion 1g of the lower electrode layer 1b are not substantially overlapped with each other with the center electrode layer 3 interposed therebetween. . In general, an element having a thick electrode layer has a higher generation force than an element having a thin electrode layer. Here, when voltages having different polarities are applied to the outer electrode layer and the center electrode layer, the deformation of the element corresponding to the thick portion 1e of the outer electrode layer 1 and the thin portion 1g of the electrode layer 2 is changed between the thick portion 1e and the center electrode. It deforms according to the difference between the generated force generated by the combination with the portion 3 and the generated force generated by the combination of the thin portion 1 g and the center electrode portion 3. In other words, since the thick portion has a greater generated force than the thin portion, the direction of deformation is, for example, when the thin portion is deformed into a concave shape, and the thick portion is deformed into a convex shape, thereby deforming so that the whole is wavy (thick portion and thin portion). The direction of the uneven deformation at the part can be reversed by the polarity of the voltage.)

  In the actuator device 20 of the second embodiment, the preferred ranges of the dimensions of the center electrode layer 3 and the electrolyte membrane layer 2 are the same as those in the first embodiment described above. The outer electrode layer 1 is not particularly limited, but it is preferable that the width thereof is equal to the width of the device as illustrated. Regarding the thickness of the outer electrode layer 1, the ratio of the thicknesses of the thick part 1e and the thin part 1g ([thin part thickness] / [thick part thickness]) is about 1/2 to 1/10. Preferably there is. The specific thickness is not particularly limited, but for example, it is practical that the thick part is about 100 μm to 400 μm, and the thin part is practically about 50 μm to 100 μm.

  FIG. 4 is an exploded perspective view schematically showing a main part in still another embodiment (Embodiment 3) of the actuator device of the present invention. In the third embodiment, the shape and arrangement of the center electrode layer 3 and the electrolyte membrane layer 2 are the same as those in the first embodiment. In the second embodiment, the outer electrode layer 1 is provided with a cut portion 1u, and the cut portion 1u and the non-cut portion 1w are disposed so as to intersect in the longitudinal direction (X direction). Then, with the center electrode layer 3 interposed, the cut portion 1u or non-cut portion 1w of the upper electrode layer 1a and the cut portion 1u or non-cut portion 1w of the lower electrode layer 1b substantially overlap each other. It is made not to become. Here, when voltages having different polarities are applied to the outer electrode and the center electrode layer, the action of the device bending with a large stroke is the same as in the first embodiment. That is, in the third embodiment, a large bending force is generated in the bending portion 2s of the electrolyte membrane layer 2 corresponding to the non-cut portion 1w of the outer electrode layer 1, while the bending inaction in the portion corresponding to the thin portion 1u. The bending force of the portion 2t is small. As a result, the bending direction in each bent portion is reversed, and the force generated between adjacent bent portions acts on each other as in the first embodiment to realize a bending motion with a large stroke as a whole device.

  In the actuator device 30 according to the third embodiment, preferred ranges of the dimensions of the center electrode layer 3 and the electrolyte membrane layer 2 are substantially the same as those in the first embodiment described above. Further, the preferable range of the thickness and width of the outer electrode layer 1 may be considered in the same manner as described in the first embodiment, because the purpose of forming the cut portion is insulated from the surroundings and functions as an electrode. Since it is to form a reduced site, the area of the notch does not necessarily increase, even if the electrode notch is very small, since the above effect should be large, the ratio between them is This can be considered in substantially the same manner as in the first embodiment. In the case where the cut portion is formed in the outer electrode layer 1, the number of cuts, the cut length, and the like are not particularly limited in the cut portion 1u. Here, the ratio of the area of the cut portion 1u to the non-cut portion 1w ([area of the cut portion]: [area of the non-cut portion]) is 1: 2 as in the first embodiment. It can be set to about ˜1: 100, and is preferably set within this range. In addition, about the said area, it respond | corresponds also in the wide part and this narrow part in this Embodiment 1, and the preferable range is also the same as that of the said non-cut part and cut part, respectively.

  The material used for the electrolyte membrane layer is not particularly limited, and may be, for example, an ion conductive polymer membrane. Among them, an ion conductive polymer membrane is preferable. Examples of the polymer electrolyte gel forming the ion conductive polymer membrane include a fluorine-based ion exchange resin. For example, a polymer obtained by introducing a hydrophilic functional group such as a sulfonic acid group or a carbosyl group into polyethylene or fluororesin is used. be able to. Examples of such resins include perfluorosulfonic acid resin (trade name “Nafion”, manufactured by DuPont), perfluorocarboxylic acid (trade name “Flemion”, manufactured by Asahi Glass Co., Ltd.), ACIPLEX (trade name: Asahi Kasei Kogyo Co., Ltd.). NEOSEPTA (trade name: manufactured by Tokuyama Co., Ltd.). From the viewpoint of easy availability, Nafion manufactured by DuPont is preferable.

  Moreover, both a cation exchange resin and an anion exchange resin can be used as an ion exchange resin, and they may be used in combination. Examples of the cation exchange resin include polystyrene sulfonic acid, a fluorine ion exchange resin having a sulfone group and a carboxyl group, and the like. Examples of the anion exchange resin include a fluorine ion exchange resin containing an ammonium group.

  The center electrode layer and the outer electrode layer are not particularly limited as long as they are conductive materials. For example, those using the following carbon nanofibers are preferable. Specifically, the carbon nanofiber (CNF) and the ionic liquid (IL) are mixed and kneaded using a mortar to be gelled. Next, the polymer (for example, polyvinylidene fluoride-hexafluoropropylene copolymer) is added only to the hydrophobic solvent when the IL is hydrophobic, or to the mixed solvent of the hydrophobic solvent and the hydrophilic solvent when the IL is hydrophilic. A dispersion liquid for electrode layer formation can be prepared by dispersing CNF gel together with a polymer (PVDF).

Specific examples of the ionic liquid (IL) include ethylmethylimidazolium tetrafluoroborate (EMIBF ₄ ), butylmethylimidazolium tetrafluoroborate (BM).
IBF ₄ ), quaternary ammonium cation / tetrafluoroborate salt (Guangei Chemical Co., A
-3 (trade name)), quaternary ammonium cation / (trifluoromethanesulfonyl) imide [(CF ₃ SO ₂ ) ₂ N ⁻ ] salt (A-4 (trade name) manufactured by Guangei Chemical Co., Ltd.). Here, the structure of the cation of A-3 and A-4 is [N (CH ₃ ) (CH ₃ ) (C ₂ H ₅ ) (C ₂ H ₄ OC ₂ H ₄ OCH ₃ )] ⁺ .

Specifically, as carbon nanofiber (CNF), “ACNF” manufactured by Gunei Chemical Co., Ltd.
25 (trade name) "(specific surface area 2500 m ² / g).

  Specifically, as a method for producing a device using the above materials, a dispersion composed of carbon nanofibers, an ionic liquid, a polymer and a solvent, and a solution composed of an ionic liquid, a polymer and a solvent are cast, applied, printed, The electrode layer and the ion conductive layer can be formed by extruding or injecting, drying and laminating. More specifically, for example, casting may be performed in the order of the electrode layer, the ion conductive layer, and the electrode layer, and the solvent may be dried overnight at room temperature, followed by vacuum drying to obtain an actuator element.

  FIG. 5 is a front view schematically showing an embodiment (planar actuator structure) of an actuator structure configured by combining the actuator devices shown in FIG. 1. In the actuator structure 51, the bent portions of the devices are two-dimensionally connected and arranged in a flat plate shape. In this way, the supports 55 a and 55 b not only move linearly in the direction of the movement direction 52 but also move linearly in the movement direction 53. Furthermore, a complicated motion combining the directions 52 and 53 can be performed. Further, due to the structure, the magnitude of the amplitude can be made larger with respect to the direction of the movement direction 52, and the pressing force can be made larger than the pulling force in the direction 52.

  Such a planar actuator structure can be manufactured as follows, for example. First, a polymer electrolyte layer is provided on both sides of a planar center electrode layer, and an outer electrode layer is provided on both sides thereof. The sheet actuator can be manufactured by making a cut at the portion corresponding to the opening 54 of the planar actuator material. Furthermore, if necessary, the sheet after the cut processing may be folded and alternately folded so that the cut portions become ridges and valleys. This crease makes it easy to bend the bent portion of the actuator in a desired direction, thereby realizing stable motion performance.

FIG. 6 is an enlarged front view showing a region VI in the planar actuator structure. As shown in the figure, the actuator structure includes an outer electrode layer 1 (upper electrode layer 1a, lower electrode layer 1b), an electrolyte membrane layer 2 (upper electrolyte membrane layer 2a, lower electrolyte membrane layer 2b), and A center electrode layer 3 is provided. Then, voltages having different polarities are applied to the outer electrode layer and the center electrode layer, and the bent portions u ₁ , u ₂ , u ₃ . . . Are bent in opposite directions. Here, looking at the center of the bent portion u _2, in (FIG bent portion u ₂ is bent in each column so that the concave shape in the direction of the upper electrode layer 1a, 1 column from the drawings above, The actuator devices in the second row, the third row, the fourth row, and the fourth row are shown). Here, adjacent bent portion rows (first row, second row, third row and fourth row) are bent in opposite directions (direction 52) via the fold p. The bent portions u ₁ and u ₃ adjacent to the bent portion u ₂ are bent in the opposite direction with the curvature reversed, and coupled with the inversion of the curvature for each device row, the two-dimensionally wide mesh shape. A planar actuator structure (FIG. 5) in which the opening 54 opens and closes is configured.

  In addition to the planar actuator structure described above, the actuator device of the present invention may be configured as a cylindrical actuator structure, a disk-shaped film laminated actuator structure, or the like. 2007-118159). In addition, the actuator device of the present invention can be used for various applications by utilizing its excellent motion performance and a large stroke, for example, a display device such as a general-purpose actuator, a tactile device, or an organic EL whose uneven shape changes. , Tube pumps, self-propelled devices and the like.

It is a disassembled perspective view which shows typically the principal part in one Embodiment of the actuator device of this invention. FIG. 2 is a perspective view schematically showing a form when the device shown in FIG. 1 is bent. It is a disassembled perspective view which shows typically the principal part in another embodiment of the actuator device of this invention. It is a disassembled perspective view which shows typically the principal part in another embodiment of the actuator device of this invention. It is a front view which shows typically the actuator structure of this invention. FIG. 6 is an enlarged front view showing a region VI shown in FIG. 5. It is a front view which shows typically the deformability which makes the voltage application of an electrolyte membrane.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 1a, 1b Outer electrode layer 2, 2a, 2b Electrolyte membrane layer 3 Center electrode layer 10, 20, 30 Actuator device 51 Actuator structure 52, 53 Movement direction 54, Opening 55a, 55b Support body 71 Electrolyte membrane 72 Electrode

Claims (7)

  An actuator device in which an electrolyte membrane layer is provided on both sides of a central electrode layer, and an outer electrode layer is further provided on the outside of the electrolyte membrane layer, wherein the device has a plurality of bent portions arranged adjacent to each other. The plurality of bent portions are bent in opposite directions to each other when the voltage is applied to the central electrode layer and the outer electrode layer.   The bending portions of the electrolyte membrane layer when the voltage is applied to the bending portions of the actuator devices arranged so as to be adjacent to each other, the bending action portions of the electrolyte membrane layers are adjacent to each other on the opposite side of the center electrode layer. The actuator device according to claim 1, wherein   The electrolyte membrane layer and the outer electrode layer are both laminated in the longitudinal direction of the device across the plurality of bent portions on both sides of the central electrode layer, and the outer electrode layer is provided for each adjacent bent portion. An outer electrode that alternately has a wide portion and a narrow portion, and the wide portion or the narrow portion of the outer electrode layer is located on the opposite surface side of the central electrode with the central electrode layer in between, The actuator device according to claim 1, wherein the actuator devices do not substantially overlap each other.   The electrolyte membrane layer and the outer electrode layer are both laminated in the longitudinal direction of the device across the plurality of bent portions on both sides of the central electrode layer, and the outer electrode layer is provided for each adjacent bent portion. And an outer side where the layer thickness part or the layer thin part of the outer electrode layer is located on the opposite surface side of the center electrode layer. The actuator device according to claim 1, wherein the electrode does not substantially overlap each other.   5. The outer electrode disposed on each of the bent portions and positioned on the opposite side with the central electrode interposed therebetween is expanded at one side and contracted at the other side. Actuator device.   6. The actuator according to claim 1, wherein when the actuator device according to claim 1 is bent and bent, the center electrode layer serves as a center line of a bent figure formed by bending. device.   The actuator device according to any one of claims 1 to 6 is a planar actuator structure, or a cylindrical actuator structure or a disk-shaped actuator structure combined three-dimensionally. An actuator structure characterized by the above.

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