JP2009053673A - Xy stage and photographing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an XY stage that includes a driving mechanism smaller in size than the former one, and a photographing apparatus including the XY stage. <P>SOLUTION: A first substrate fixing part 1130A which is spread in a Z direction and an X direction to creep to the outside of an outer wall of a base substance 111, on which a first coil substrate 1131A is fixed, and whose dimension in the Z direction is shorter than the dimension of the base substance 111 in the Z direction, is provided on an X stage 113A. As for an X stage driving mechanism, a third yoke Y12 is disposed at a position where it avoids interference with the first substrate fixing part 1130A in the Z direction between the outer wall of the base substance 111 and the first coil substrate 1131A. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an XY stage including a base, a movable stage that is moved relative to the base in an XY plane perpendicular to a central axis that penetrates the base in the Z direction, and an imaging apparatus including the XY stage. .

  Some imaging apparatuses have a built-in camera shake correction mechanism to suppress disturbance of a captured image due to a user's camera shake or the like. As this camera shake correction mechanism, an optical component such as a lens or an image sensor is movable within a plane orthogonal to the optical axis, and the camera shake is corrected by moving the lens or the image sensor in accordance with the camera shake. There are many things.

  In moving the optical component, an XY stage having an X stage and a Y stage as disclosed in Patent Document 1 is often used.

  In Patent Document 1, a highly responsive voice coil motor is used as a drive source in order to drive each stage with a drive force as small as possible and to move a moved member quickly according to hand movement. It has been. Furthermore, in this patent document 1, in order to be able to move a moving member quickly in synchronization with the movement of the voice coil motor, four guide shafts are arranged around the image pickup element and those members are moved. It has been proposed that the moved member can be moved quickly by independently driving the X stage and the Y stage along the guide axis. Further, in Patent Document 2, a U-shaped yoke is used to generate a sufficient driving force for a coil that constitutes a voice coil motor and generates a driving force by interaction with a magnet upon receiving a current. It has been.

However, when this U-shaped yoke is adopted, sufficient driving force can be obtained, but a space for arranging the U-shaped yoke is required, and the X stage driving mechanism and Y stage driving mechanism are more than necessary. There is a risk that the overall size of the XY stage becomes large due to an increase in size and cannot be mounted on a small device.
JP 2006-215095 A JP 2005-242325 A

  SUMMARY OF THE INVENTION In view of the above circumstances, an object of the present invention is to provide an XY stage having a smaller driving mechanism than before and a compact photographing apparatus having the XY stage.

In order to achieve the above object, an XY stage of the present invention includes an XY stage including a base body and a movable stage that is moved relative to the base body in an XY plane perpendicular to a central axis that penetrates the base body in the Z direction. On stage
The central axis is wrapped around a half circumference and supported by the base body so as to be slidable in the X direction. The movable stage is restrained in the X direction and slidably supported in the Y direction. An X stage for moving the moving stage in the X direction;
Surrounding the central axis over a half circumference, the central axis is wrapped around the entire circumference in cooperation with the X stage and supported by the base body slidably in the Y direction, and the stage to be moved is constrained in the Y direction. A Y stage that slidably supports in the direction and moves the movable stage in the Y direction by sliding in the Y direction;
An X stage drive mechanism for driving the X stage in the X direction;
A Y stage drive mechanism for driving the Y stage in the Y direction,
The X stage drive mechanism is
A first joint comprising a first magnet that extends in the XZ plane and faces the X stage, and a first yoke fixed to the back surface of the first magnet as viewed from the X stage. Body,
The X stage is fixed at a position facing the first magnet, receives a supply of current, and generates a force for driving the X stage in the X direction by interaction with the first magnet. And a first coil substrate on which the coil is formed,
The Y stage drive mechanism is
A second joint comprising a second magnet that spreads in the YZ plane and faces the Y stage, and a second yoke of the second magnet fixed to the back surface when viewed from the Y stage. Body,
A second stage of the Y stage that is fixed at a position facing the second magnet, receives a supply of electric current, and generates a force that drives the Y stage in the Y direction by interaction with the second magnet. And a second coil substrate on which the coil is formed,
The X stage extends to the outside of the outer wall of the base and extends in the Z direction and the X direction. The first coil substrate is fixed, and the first dimension is shorter than the first dimension of the base in the Z direction. Having a substrate fixing part,
The X stage driving mechanism includes a third yoke disposed between the outer wall of the base and the first coil substrate at a position where interference with the first substrate fixing part is avoided in the Z direction. ,
The Y stage wraps around the outside of the outer wall of the base and extends in the Z and Y directions. The second coil substrate is fixed, and the second dimension is shorter than the Z dimension of the base. Having a substrate fixing part,
The Y stage driving mechanism includes a fourth yoke disposed between the outer wall of the base body and the second coil substrate at a position where interference with the second substrate fixing portion is avoided in the Z direction. It is characterized by that.

  According to the XY stage of the present invention, instead of the conventional U-shaped yoke, the third yoke provided in the X stage drive mechanism is disposed at a position facing the first yoke, and Y A fourth yoke provided in the stage drive mechanism is disposed at a position facing the second yoke. Moreover, the third yoke is mounted at a high density at a position free from interference with the first substrate fixing because the dimension of the X stage in the Z direction is shorter than the dimension of the base in the Z direction. Since the dimension of the Y stage in the Z direction is shorter than the dimension of the base in the Z direction, the fourth yoke is mounted at a high density at a position where interference with the second substrate fixing is avoided.

  Then, an XY stage having a small-sized drive mechanism than before can be realized while the yoke is mounted at a high density in a narrow space like a dead space.

Here, the first yoke is a member wider in the X direction than the first magnet,
The first joined body is fixed to the back surface of the first yoke as viewed from the first magnet, at a position facing the first magnet, more than the first yoke. A first sub-yoke narrow in the direction,
The second yoke is a member wider in the X direction than the second magnet,
The second joined body is fixed to the second yoke on the back surface when viewed from the second magnet, at a position facing the second magnet, more than the second yoke. It is preferable that the second sub yoke is narrow in the direction.

  Although the thickness of the first and second yokes may be increased, this increases the size. However, if the structure is too thin, magnetic flux leakage will increase. Considering these, the first sub yoke is provided on the first yoke so as to face the first magnet, and the second sub yoke is provided on the second yoke so as to face the second magnet. It is preferable to provide a structure that prevents leakage of magnetic flux.

  In addition, an aspect may be provided that includes an imaging element that is fixed to the movable stage and receives an image of a subject and outputs an image signal representing the subject.

In addition, the imaging device of the present invention that achieves the above-described object provides:
The XY stage,
A photographic lens for imaging a subject on the image sensor;
And a driving unit that drives the XY stage so that blurring of an image represented by an image signal output from the imaging element is corrected.

  Then, when camera shake occurs, for example, the XY stage is driven with good response by the voice coil motor serving as a drive unit for the XY stage, and camera shake is accurately corrected.

  According to the present invention, an XY stage having a smaller driving mechanism than before and a compact photographing apparatus having the XY stage are realized.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a diagram showing an appearance of a photographing apparatus 1 having an XY stage according to the present invention.

  The imaging apparatus 1 in FIG. 1 includes the XY stage of the present invention. In this embodiment, an example in which the image sensor is held by the XY stage is shown, and the camera shake is corrected by driving the XY stage and moving the image sensor in accordance with camera shake at the time of shooting.

  In the photographing apparatus of FIG. 1, an XY stage that holds an image sensor is provided in the vicinity of a connection portion between the lens barrel 100 and the camera body 190. 2 to 10 are diagrams showing the configuration of the XY stage 110 according to an embodiment of the present invention. 2 to 4 show an X axis, a Y axis, and a Z axis in order to clarify the X direction and the Y direction of the XY stage 110. Although the directions of the three axes in FIGS. 2 and 4 are the same, FIG. 3 shows a view from different directions in order to make the configuration of the flexible substrate FPC easier to understand. The direction is different. In the following description, directions will be indicated using these axes.

  2 shows an exploded view of the XY stage 110, FIG. 3 shows an enlarged view of the flexible substrate FPC in FIG. 2, and FIG. 4 adds to the exploded view of FIG. A lens barrel 100 in which the XY stage 110 is incorporated is shown. 4 shows a zoom motor ZM, a focus motor FM, and a main FPC 118 and a dustproof tape for connecting components when these motors are incorporated into the lens barrel 100 and a control unit in the photographing apparatus 1 of FIG. 117 and the like are also illustrated. In the present embodiment, since the CCD solid-state image sensor 112A is used as the image sensor, the image sensor is referred to as the CCD 112A in the following description.

  Further, FIG. 5 shows the state after the XY stage 110 is assembled and the XY stage 110 is assembled in the lens barrel 100 as viewed along the Z direction from the lid member 114 side with the lid member 114 being transparent. FIGS. 6 to 10 are X sectional views showing a section cut along a line indicated by symbol P in FIG. 5, and cut along a line indicated by symbol Q in FIG. X cross-sectional view showing the cross section, right side view, Y cross-sectional view showing the cut surface cut along the line indicated by the symbol R in FIG. 5, and the bottom view of FIG. 5 are respectively shown.

  First, each member constituting the XY stage 110 will be described with reference to FIG.

  As shown in FIG. 2, the XY stage 110 includes a base 111 and a large number of members. On the base 111, each of the CCD holder 112, the X stage 113A, the Y stage 113B, and the like among the numerous members. When the members are assembled into an XY stage, and the assembled XY stage 110 is assembled into the lens barrel 100 shown in FIG. 4, the configuration shown in FIGS. 5 to 10 is obtained.

  First, the configuration of the XY stage 110 will be described with reference to FIG.

  In the center of FIG. 2, a CCD holder 112 which is a stage to be moved is shown. A flexible substrate 115 shown below is soldered to the CCD 112A in the CCD holder 112. The flexible substrate 115 is pressed against the CCD 112A side by the CCD plate 116. Fixed to. The flexible substrate 115 has a bonding hole, and an adhesive is poured into the hole so that the flexible substrate 115 is sandwiched between the CCD plate 116 and the CCD 112A. Further, the flexible substrate 115 drawn out from the CCD 112A is provided with a bending portion 115A, and the bending portion 115A is provided with a slit SL. For this reason, after the flexible substrate 115 is assembled, the stress in the X direction applied to the flexible substrate 115 while the CCD 112A is sliding is absorbed by the bent portion 115A, and the CCD 112A is slid by the slit SL. The stress in the Y direction applied to the flexible substrate 115 is absorbed.

  In other words, in this embodiment, the CCD 112A, the CCD holder 112 holding the CCD 112A, the flexible substrate 115 soldered to the CCD 112A, and the CCD plate 116 slide in accordance with the slides of the X stage 113A and the Y stage 113B. It will be.

  On the other hand, an X stage 113A and a Y stage 113B are shown in the center of FIG. The X stage 113A shown in FIG. 2 surrounds the central axis over a half circumference, is supported by the base 111 so as to be slidable in the X direction, and constrains the CCD holder 112 in the X direction and supports it slidable in the Y direction. 2 moves the CCD holder 112 in the X direction, and the Y stage 113B in FIG. 2 is supported by the base 111 so as to be slidable in the Y direction, surrounding the central axis over a half circumference. It is restrained in the Y direction and supported so as to be slidable in the X direction, and the CCD holder 112 is moved in the Y direction by sliding in the Y direction. The state after these stages 113A and 113B are incorporated into the base 111 will be described in detail with reference to FIG. Note that when the X stage 113A and the Y stage 113B are slid, the voice coil motor described in the conventional example is used.

  As is well known, this voice coil motor is composed of a magnet, a coil, and a yoke. In this embodiment, the X stage 113A and the Y stage 113B have a first substrate fixing portion 1130A and a second substrate fixing portion, respectively. The first and second coil substrates 1131A and 1131B, which are the moving elements of the voice coil motor, are fixed to the substrate fixing portions 1130A and 1130B, respectively. The voice coil motor is assembled by incorporating magnets MG1 and MG2 for driving 1131B, yokes Y11 to Y13, Y21 to Y23, X stage 113A and Y stage 113B into base 111. That is, in the present embodiment, the voice coil motor constitutes the X stage driving mechanism and the Y stage driving mechanism.

  On the left side of FIG. 2, the X stage driving mechanism and the Y stage driving mechanism are respectively arranged on the outside of the outer wall portion of the base 111 so as to correspond to the coil substrates 1131A and 1131B of the X stage 113A and the Y stage 113B, respectively. Magnets MG1 and MG2 and three types of yokes Y11 to Y13 and Y21 to Y23 are shown. Three types of yokes Y11 to Y13 and Y21 to Y23 are provided corresponding to the first coil substrate 1131A and the second coil substrate 1131B provided on the X stage 113A and the Y stage 113B, respectively. In the following description, the Y11 yoke on the X stage drive mechanism side is referred to as the first yoke, the Y21 yoke on the Y stage drive mechanism side is referred to as the second yoke, and the X stage drive mechanism side code is referred to as the Y yoke. The Y12 yoke is referred to as a third yoke (hereinafter, sometimes referred to as a counter yoke because it is disposed to face the first magnet), and the Y-stage drive mechanism side Y22 yoke is referred to as a fourth yoke. Yoke (hereinafter referred to as a counter yoke because it is disposed opposite to the second magnet) and the X stay The yoke of the driving mechanism side tally Y13 described as the first sub-yoke, the yoke of the Y stage driving mechanism side code Y23 to be referred to as a second sub-yoke. Further, since the first yoke Y11 is bonded and fixed to the first magnet MG1, and the second yoke Y21 is bonded and fixed to the second magnet MG2, the first joined body YM1, the second yoke Y11, It may be described as a joined body YM2.

  In other words, in the present embodiment, the X stage driving mechanism extends in the XZ plane and faces the X stage 113A, and the back side of the first magnet MG1 when viewed from the X stage 113A. The first joint YM1 composed of the first yoke Y11 fixed to the first stage YA1 and the X stage 113A are fixed at positions facing the first magnet MG1 and are supplied with current to receive the first magnet MG1. And a first coil substrate 1131A on which a first coil that generates a force for driving the X stage 113A in the X direction is formed by the interaction with the Y stage, and the Y stage drive mechanism extends in the YZ plane. A second magnet MG2 facing the Y stage, and a second magnet MG2 fixed to the back side of the second magnet MG2 when viewed from the Y stage 113B. The second joined body YM2 composed of the magnet Y21 and the Y stage 113B are fixed to a position facing the second magnet MG2 and are supplied with electric current to interact with the second magnet MG2. This means that it includes a second coil substrate 1131B on which a second coil that generates a force for driving the Y stage 113B in the Y direction is formed.

  The first yoke Y11 is a member that is wider in the X direction than the first magnet MG1, and the X stage drive mechanism is on the back surface of the first yoke Y11 when viewed from the first magnet MG1. The first yoke Y13, which is fixed at a position facing the first magnet MG1 and is narrower in the X direction than the first yoke Y11, is provided, and the second yoke Y21 includes the second magnet MG2. The Y stage drive mechanism is fixed at a position on the back surface of the second yoke Y21 as viewed from the second magnet MG2 and facing the second magnet MG2. The second sub-yoke Y23, which is narrower in the X direction than the second yoke Y21, is provided.

  Although not shown, the magnets MG1 and MG2 and the three types of yokes Y11 to Y13 and Y21 are shown on the outer wall portion of the base 111 where the X stage driving mechanism and the Y stage driving mechanism are shown in FIG. ˜Y23 is provided corresponding to each of the X stage 113A and the Y stage 113B. First, opposing yokes Y12 and Y22 are provided in the dents, and screws are provided on the inner wall surfaces of the dents. Stopped. Next, the first joined body YM1 and the second joined body YM2 composed of the magnets MG1 and MG2 and the first yokes Y11 and Y22 are screwed to the outer wall surface of the base 111, respectively, and further, the first joined body 1 The first and second lengths of the second yokes Y11 and Y22 facing the magnet on the back surface as viewed from the magnet side are shorter than those of the first and second yokes in the X and Y directions. The sub yokes Y13 and Y23 are fixed respectively. The substrates of the X stage 113A and the Y stage 113B are formed in a gap formed between the first and second joined bodies YM1 and YM2 and the opposing yokes Y13 and Y23 that are opposed to the surfaces of the joined bodies. Coil substrates 1131A and 1131B fixed to the fixing portions 1130A and 1130B are disposed around the outer wall of the base 111, so that the X stage 113A and the Y stage 113B are incorporated into the base 111.

  Therefore, when the coil substrates 1131A and 1131B are energized, the coil substrates 1131A and 1131B slide in parallel (X direction and Y direction) along the magnets MG1 and MG2 according to the Fleming left-hand rule. As a result, the CCD holder 112 which is the stage to be moved and the CCD 112A held by the CCD holder 112 move according to the movement of the coil substrates 1131A and 1131B fixed to the substrate fixing portions 1130A and 1130B of the stages 113A and 113B. It will be.

  In this way, the X stage 113A, the Y stage 113B, and the CCD holder 112 are incorporated into the base 111 so that they can move quickly in response to energization of the coils on the coil substrates 1131A, 1131B.

  Here, how the guide shafts G1, G3, G4, and G6 and the support shafts G2 and G5 that are inserted into or fixed to the X stage 113A and the Y stage 113B are incorporated into the base body 111 is simply described. I will explain in detail.

  First, referring to FIG. 2, how the two guide shafts G1 and G3 extending in the X direction and the one support shaft G2 are arranged on the substrate side and incorporated into the substrate 111 will be described with reference to FIG. Explained.

  First, the X stage 113A is provided with two bearings (which will be described later). A first guide shaft G1 extending in the X direction and fixedly supported by the base 111 is inserted through the two bearings. Both ends of one guide shaft G1 are fitted into bearings provided in the base 111 and fixedly supported by the base 111. Further, one end of the first support shaft G2 that protrudes in the X direction and is supported by the base 111 so as to be freely slidable in the X direction is fixedly supported by the X stage 113A. Both ends of the first guide shaft G1 are respectively fitted into U-groove bearings of the base 111, and further supported by the base 111 by being pressed by a pressing portion (described later) of the lid member.

  Further, both ends of the second guide shaft G3 extending in the X direction are fixedly supported by the Y stage 113B, and two bearings (described later) provided on the CCD holder 112 are connected to the second guide shaft G3. The CCD holder 112 is connected to the Y stage 113B by being slidably connected in the X direction. As described above, the second guide shaft G3 serves to assist the movement only in the X direction by restraining the CCD holder 112, which is the stage to be moved, in the Y direction.

  On the other hand, the third guide shaft G6 of the three shafts extending in the Y direction has both ends fixed to the X stage 113A, and another bearing (described later) provided on the CCD holder 112. The CCD holder 112 is connected to the X stage 113A by being slidably connected to the three guide shafts G6 in the Y direction. The third guide shaft G6 extending in the Y direction is fixedly supported by the X stage 113A, thereby restraining the CCD holder 112 in the X direction and assisting movement only in the Y direction.

  The fourth guide shaft G4 is inserted into two bearings provided in the Y stage 113B, and both ends of the fourth guide shaft G4 are fitted into U-shaped bearings of the base body 111 and pressed by a pressing portion (described later) of the lid member 114. 111 is fixedly supported. The second support shaft G5 is fixed to the Y stage 113B.

  In this way, the guide shafts G1 and G4 and the support shafts G2 and G5 for allowing the stages 113A and 113B and the CCD holder 112 as the moving stage to be slidable are incorporated in the base 111, and the movement of the CCD holder 112 in one direction is controlled. The constraining guide shafts G3 and G6 are fixedly supported by the Y stage 113B and the X stage 113A, respectively, and the stages 113A and 113B and the CCD holder 112 are respectively incorporated in the base 111. The state after being assembled will be described in detail when referring to FIG.

  Further, since wiring for energizing the coils on the coil substrate must be provided on the coil substrates 1131A and 1131B provided in each stage, FIG. 2 shows a flexible substrate FPC for that purpose. As shown in FIG. 3, the flexible substrate FPC has a first fixing portion FPC1 fixed to the first coil substrate 1131A, and a flow path for current supplied to the first coil is formed. The second fixed portion FPC2 fixed to the coil substrate 1131B is formed, and a flow path for current supplied to the second coil is formed. In the present embodiment, the two coil substrates 1131A and 1131B can be connected by one flexible substrate FPC, but two may be separated.

  The single flexible substrate FPC shown in FIG. 3 has a first bent portion FPC3 whose surfaces when bent in the Z direction face each other in the X direction and a surface when bent and bent in the Z direction. A second flexible portion FPC4 facing the Y direction is provided. The flexible substrate FPC detects the magnetic force of the first and second magnets MG1 and MG2 in the portions fixed to the first and second coil substrates 1131A and 1131B, thereby causing the X stage and the Y stage in the X direction. Since the first Hall element h1 and the second Hall element h2 for detecting the position in the Y direction are mounted, a transmission path for transmitting the detection signals obtained by these Hall elements h1 and h2 is also formed. ing.

  When the X stage 113A is moving in the X direction, the stress applied to the flexible substrate FPC is absorbed by the first flexible portion FPC3, and when the Y stage is moving in the Y direction, the second flexible portion FPC4 is used. The stress in the Y direction applied to the flexible substrate FPC is absorbed.

  When the wiring by the flexible substrate FPC is completed, the lid member 114 is finally covered so as to cover the X stage 113A, the Y stage 113B, and the CCD holder 112 from the Z direction, and the assembly is completed.

  Here, a state after the stages 113A and 133B are assembled on the base body 111, the XY stage 110 is assembled, and the XY stage 110 is incorporated into the lens barrel 100 will be described with reference to FIG.

  As described above, FIG. 5 shows the state after the XY stage 110 is incorporated into the lens barrel 100 from the upper right direction of FIGS. 2 and 4, that is, along the Z direction with the lid member 114 transparent. The figure is shown.

  As described with reference to FIG. 2, the first to fourth guide shafts and the first and second support shafts G1 to G6 are incorporated in the base body 111 together with the stages 113A and 113B, and each stage is supported by the base body 111. Therefore, the structure around the shaft including the guide shaft and the support shaft will be described first.

  As shown in FIG. 5, the X stage 113A and the Y stage 113B are respectively provided with two bearings A1, A2, A3, and A4 through which the first guide shaft G1 and the fourth guide shaft G4 are inserted. ing.

  Further, the base 111 shown in FIG. 5 has two U-shaped first support portions BE1 and BE2 which open toward the lid member 114 and which support both ends of the first guide shaft G1 in a fixed manner. Two U-shaped second support portions BE3 and BE4 that open toward the lid member 114, which support both ends of the fourth guide shaft G4 in a fixed manner, and the first support shaft G2. The U-shaped third support portion BE5 that opens toward the lid member 114, and the second support shaft G5 is slidably supported in the Y direction. A U-shaped fourth support portion BE6 that opens toward the member 114 is provided. In FIG. 5, the structure of the first support part BE4 is the same among the second support parts BE3 and BE4 because the first support parts BE1 and BE2 and the second support parts BE3 and BE4 have the same structure. Since the third support part BE5 and the fourth support part BE6 have the same structure, an enlarged view showing the structure of the third support part BE5 is shown. FIG. 5 is an enlarged view showing the structure of the two bearings B1 and B2 of the CCD holder 112 supported by the second guide shaft G3. The CCD holder 112 is supported by the first guide shaft G1. An enlarged view showing the structure of another bearing B3 is also shown.

  That is, the first guide shaft G1 is inserted into the two bearings A1 and A2 of the X stage 113A, and both ends of the first guide shaft G1 are inserted into the first support portions BE1 and BE2, so that the first guide shaft G1 and X stage 113A are supported by base 111, and fourth guide shaft G4 is inserted into bearings A3 and A4 through Y stage 113B, and both ends of fourth guide shaft G4 are connected to second support portions BE3 and BE4. The fourth guide shaft G4 and the Y stage 113B are inserted and supported by the base 111.

  In the present embodiment, since the lid member 114 is finally covered from the front surface side in FIG. 5, the lid member 114 is provided on each of the two first support portions BE1 and BE2 of the first guide shaft G1. Two first presser portions 114A for pressing the supported portions, and two second pressers for pressing the portions of the fourth guide shaft G4 supported by the two second support portions BE3 and BE4, respectively. 114A and the first support hole through which the first support shaft G2 penetrates in cooperation with the third support portion BE5 by closing the opening of the third support portion BE5 toward the lid member 114. The first closing piece forming 114B and the opening of the fourth support part BE6 toward the lid member 114 are closed so that the second support shaft G5 penetrates in cooperation with the fourth support part BE6. Forming the second support hole 114B Since closing piece and are provided, so that the X stage 113A by a bearing provided on the lid member 114 and the base 111, Y stage 113B is suitably supported.

  Further, the lid member 114 is provided with a spring member SP1 fixed to the lid member 114 and acting as a biasing member for biasing the CCD holder 112 in the Z direction. Each of the two bearings B1 and B2 supported by the guide shaft G3 has a rectangular penetrating shape with an angle in the Z direction and the Y direction as shown in the enlarged view in FIG. A hole is provided. In this way, the round guide rod G2 is held at two points on two sides of the four sides of the rectangle, and is supported so that rattling in the Y direction is absorbed and friction. Is supported to be reduced.

  Further, a spring SP2 is provided that acts as a biasing member for biasing the CCD holder 112 with respect to the X stage in the X direction, and the CCD holder 112 is biased in the X direction by the spring SP2. In this way, the X stage is constantly biased in one direction, so that the X-direction rattle when the CCD holder 112 serving as the stage to be moved is absorbed is absorbed.

  In this way, the CCD that causes the backlash of the CCD holder 112 during the slide is suppressed by the spring SP1 and the bearing that connects the X stage 113A, the Y stage 113B, the base 111, and the X stage 113A, the Y stage 113B, and the CCD holder 112. The holder 112 is supported moderately.

  Although described with reference to FIG. 2, the structure of the X stage driving mechanism and the Y stage driving mechanism will be described with reference to FIG. 5 in order to clarify the structure after assembly.

  In the X stage drive mechanism shown in FIG. 5, as described above, when viewed from the X stage 113A of the first magnet MG1 spreading in the XZ plane and facing the X stage, and the first magnet MG1. The first joined body YM1 composed of the first yoke Y11 fixed to the back surface of the first stage YA1 and the X stage 113A are fixed at positions facing the first magnet MG1 and supplied with current, And a first coil substrate 1131A on which a first coil that generates a force for driving the X stage 113A in the X direction by the interaction with the magnet MG1 is provided. Are spread on the YZ plane and face the Y stage, and the back surface of the second magnet MG2 when viewed from the Y stage 113B. The second joined body YM2 including the fixed second yoke Y21 and the Y stage 113B are fixed at positions facing the second magnet MG2 and are supplied with electric current to receive the second magnet MG2. And a second coil substrate 1131B on which a second coil that generates a force for driving the Y stage 113B in the Y direction is formed.

  The first yoke Y11 is a member wider in the X direction than the first magnet MG1, and the X stage drive mechanism has a back surface of the first yoke Y11 when viewed from the first magnet MG1. A first sub-yoke YM13, which is fixed in a position facing the first magnet MG1 and is narrower in the X direction than the first yoke Y11, is provided, and the second yoke Y21 has a second yoke Y21. A member that is wider in the X direction than the magnet MG2 and faces the second stage MG2 on the back surface of the second yoke Y21 when viewed from the second magnet MG2 to the Y stage drive mechanism. A second sub-yoke Y23 that is fixed in position and narrower in the X direction than the second yoke Y21 is provided.

  Thus, the first coil substrate 1131A and the second coil substrate 1131B fixed to the first substrate fixing portion 1130A and the second substrate fixing portion 1130B are connected to the first magnet MG1 and the first magnet MG1. Voice coil motor and each stage that are arranged between the second yoke Y12 and the second magnet MG2 facing each other and the fourth yoke Y22 facing the second magnet MG2 to drive each stage. Are incorporated into the substrate.

  In the present embodiment, in addition to arranging the first yoke Y11 and the third yoke Y12, the second yoke Y21 and the fourth yoke Y22 facing each other with the magnets MG1 and MG2 interposed therebetween, the magnet MG1. The first sub yoke Y13 and the second sub yoke Y23 are added to the back side of the first yoke Y11 and the second yoke Y21 so as to minimize the leakage of magnetic flux when the coil is driven. Thus, a magnetic force can be efficiently applied to the coil substrate 1130A.

  In this way, the XY stage is assembled by incorporating the guide shaft, the support shaft, the X drive mechanism, and the Y drive mechanism into the base.

  Here, the configuration of the XY stage 110 after being incorporated in the lens barrel 100 will be briefly described with reference to FIGS.

  6 is an X cross-sectional view showing a cross section cut along a line indicated by reference symbol P in FIG. 5, and FIG. 7 is an X cross-sectional view showing a cross section cut along a line indicated by reference character Q in FIG. 8 is a right side view of FIG. 5, FIG. 9 is a Y sectional view showing a cut surface cut along a line indicated by reference numeral R in FIG. 5, and FIG. 10 is a bottom view of FIG. Each is shown.

  The positional relationship of each member constituting the XY stage 110 will be briefly described with reference to FIGS.

  As shown in FIGS. 6 and 9, an XY stage 110 is incorporated in the rear of the lens barrel 100, and the CCD plate 116 and the CCD holder 110 are attached to the lens mirror by a spring SP1 provided on a lid member 114 that is finally covered. Each member constituting the XY stage 110 is incorporated in the lens barrel so as to be biased toward the barrel 100 side.

  As shown in FIG. 6, a CCD 110A is mounted on the CCD holder 110, and a flexible substrate 115 is connected to the CCD 112A. If the flexible substrate 115 is pulled out and the CCD 110A is moved together with the CCD holder 110, the flexible substrate 115 may be violated and scratched. The CCD plate 116 is pushed toward the CCD holder 112 by the spring SP1 of the lid member 114 so as to be sandwiched so as to correct the posture of the flexible substrate.

  Further, as described in FIG. 2, the flexible substrate 115 is provided with a U-shaped bend 115 </ b> A in the X direction, and the U-shaped bend is configured by the lid member 114 and the base body 111. Skillfully incorporated into the available free space. As described above, since the slit is provided in the Y direction in the portion where the deflection is provided, the stress in the X direction and the Y direction is applied to the flexible cable 115 when the CCD holder 110 is slid. Even if there is nothing, those stresses are relieved by the deflection 115A and the slit SL (see FIG. 2). Also, it is not necessary to increase the size of the substrate side in order to secure the wiring space, and the XY stage can be downsized.

  In FIG. 7, as described in FIG. 2, the counter yoke (fourth yoke) Y22 is fixed to the inner wall of the recess of the outer wall of the base 111 with screws, and then the magnet MG2 and the second yoke Y21 are bonded. The state after the second joined body YM2 is fixed to the outer wall surface of the base 111 is shown.

  On the Y stage 113B, the first coil substrate 1131A is fixed around the outer wall of the base 111 and spreads in the Z direction and the Y direction. The second dimension is shorter than the dimension of the base 111 in the Z direction. Substrate fixing portion 1130B is provided.

  Further, the Y stage driving mechanism includes a fourth yoke disposed at a position between the outer wall of the base 111 and the second coil substrate 1131B so as to avoid interference with the second substrate fixing portion 1130B in the Z direction. Y22 is provided.

  A coil substrate 1131B is inserted around the outer wall of the base 111 in the gap between the magnet MG2 and the counter yoke (fourth yoke) Y22. The base is assembled after the second yoke Y21 is bonded to the back surface of the magnet MAG2 to form a joined body YM2.

  Although not shown, the structure on the X stage 113A side is the same as FIG.

  When the Y stage 113B coupled to the coil substrate 1131B of FIG. 7 moves together with the coil substrate 1131B from the front to the back or from the back to the front, the Y stage 113B slides in the Y direction. Become.

  As described above, in this embodiment, the voice coil motor constituting the X stage driving mechanism and the voice coil motor constituting the Y stage driving mechanism are mounted in a very narrow space with a high density, and the driving mechanism is smaller than the conventional one. Is incorporated into the XY stage, thereby reducing the size of the XY stage.

  Here, in the present embodiment, in order to accurately detect the position of the coil substrate, that is, each of the stages 1131A and 1131B, with the hall elements h1 and h2 provided in the flexible board FPC, Since a configuration capable of easily performing output adjustment (obtaining linearity) is employed, the structure will be described.

  FIG. 8 is a right side view of FIG. Since the Y stage drive mechanism for driving the Y stage 113B is provided on the right side of FIG. 5, in FIG. 8, the first yoke Y21 provided in the Y stage drive mechanism and the additional yoke Y23 attached to the back surface thereof. It is shown. As described above, the first yoke Y21 is bonded and fixed to the internal magnet MG2. Since the X stage drive mechanism side has the same configuration, the structure on the Y stage drive mechanism side in FIG. 8 will be described.

  FIG. 8 shows that the second bent portion FPC4 of the flexible substrate FPC is incorporated in a small space formed by the base 111 and the lens mirror 100 in a proper manner.

  As described above, a Y stage drive mechanism for moving the coil substrate energized through the flexible substrate FPC in a magnetic field is incorporated in the base 111. FIG. 8 shows a second stage provided in the Y stage drive mechanism. A yoke Y21 and a second sub-yoke Y23 are shown. As described above, the magnet MG2 (see FIG. 5) is bonded and fixed to the second yoke Y21 to form the second joined body YM2.

  The base 111 shown in FIG. 8 is provided with a guide portion 111G that is in contact with one side extending in the Y direction of the second bonded body YM2 and serves as a guide when adjusting the position of the second bonded body in the Y direction. Further, the lid member 114 sandwiches the second joined body YM2 between the guide part 111G of the base body 111 and cooperates with the guide part 111G to adjust the position of the second joined body YM2 in the Y direction. A guide piece 114C acting as a guide is provided. The lid member 114 is further provided with a first back guide portion 114D that contacts the back surface of the second joined body as viewed from the Y stage and guides the back surface of the second joined body.

  Here, although the figure numbers are mixed, the configuration of the portion for adjusting the sensitivity will be described.

  FIG. 11 shows the configurations of the magnets MG1 and MG2, the joined bodies YM1 and YM2, the hall elements h1 and h2, the first, third, second, and fourth yokes Y11, Y12, Y21, and Y22, and the first and first. It is a figure which shows the positional relationship between 2 subyokes Y13 and Y23.

  FIG. 11A shows the positional relationship between the coil substrates 1131A and 1131B described in FIG. 7 and the yokes Y11 to Y13 and Y21 to Y23, and the positions of the hall elements h1 and h2, and FIG. Shows the positional relationship among the first yoke Y11 or the second yoke Y21, the third yoke Y12 or the fourth yoke Y22, and the first coil substrate 1131A or the second coil substrate 1131B. . FIGS. 10C and 10D show the arrangement of magnets MG1 or MG2.

  FIG. 12 is a diagram for explaining a change in the output of the Hall element h1 or h2 when the joined body is moved along the guide 111G or the like shown in FIG. 8 (in the direction of the arrow in the figure).

  The first joined body YM1 or the second joined body YM2 is provided with an elongated hole HL1 that constitutes a fastening portion and communicates with a screw hole on the base side. Position adjustment is performed by inserting the eccentric pin P1 into the elongated hole HL1 and moving the joined body YM1 or YM2 in the X direction or the Y direction along the guide 111G (see FIG. 8). Further, after the position adjustment is performed, the eccentric pin is removed and a screw is inserted into the fastening portion so that the first and second joined bodies are fixed to the base.

  Further, as shown in FIG. 11A, the X stage driving mechanism and the Y stage driving mechanism are members wider in the X direction and the Y direction than the first magnet MG1 and the second magnet MG2. The first joined body YM1 and the second joined body YM2 are the first on the back surface of the first yoke Y11 and the second yoke Y21 when viewed from the first magnet MG1 and the second magnet MG2. The first sub-yoke Y13 and the first sub-yoke Y13 which are narrower in the X direction and the Y direction than the first yoke Y11 and the second yoke Y21, which are fixed at positions facing the magnet MG1 and the second magnet MG2. Two sub yokes Y23 are provided. These sub-yokes Y13 and Y23 are provided where they can cover the range in which the poles of the magnets MG1 and MG2 change (see FIG. 11C). Here, if the thickness of the first yoke and the second yoke is increased, the yoke is increased in size. Therefore, the first sub yoke Y13 and the second sub yoke Y13 are provided only where necessary to reduce the space. In addition, the magnetic flux leakage in the magnetic circuit formed by the magnets MG1 and MG2 and the yokes Y11 to Y13 and Y21 to Y23 can be reduced by the sub-yoke, and the coil can be more efficiently Magnetic force can be applied.

  Further, as shown in FIGS. 11C and 11D, the magnet of the voice coil motor according to the present embodiment is provided with two pole (S, N) magnets arranged alternately, and each stage is a stage. So that the Hall elements h1 and h2 are located at the position facing the boundary between the N pole and the S pole of the two pole magnets (the direction indicated by reference numeral B1 in the figure). The position of each joined body is adjusted. The coil substrates 1131A and 1131B move only within a range in which the Hall elements h1 and h2 are opposed to the upper S pole and the lower N pole with the boundary (B1) of the magnet as the center.

  FIG. 12 shows a change in the output of the Hall element when the joined body is moved during adjustment.

  For example, when the output of the Hall element is electrically monitored and the joined bodies YM1 and YM2 are moved in either direction to detect the maximum output of the Hall element and the maximum output is detected, this time, in the opposite direction The minimum output of the Hall element is detected by moving. When both outputs are obtained, the output value is divided by 2 and the joined body is moved to a position where the value is obtained, and the position just opposite to the boundary between the N pole and S pole of the magnets MG1 and MG2 (FIG. 11). The adjustment is performed so that the Hall elements h1 and h2 are positioned on the boundary indicated by the reference numeral B1.

  If such adjustment is performed, the output of the Hall element will not be saturated even if the coil substrate has actually moved the maximum stroke, and the output of the Hall element can be obtained linearly (linearly) according to the change in position. The position detection accuracy becomes very high.

  In this way, the voice coil motor that maintains the conventional driving force is mounted in a narrower space with higher density than before.

  The configuration of the XY stage will now be described with reference to FIGS. 9 and 10.

  FIG. 9 shows a Y cross-sectional view of the cut surface taken along the line indicated by the symbol R in FIG. FIG. 10 is a bottom view of FIG.

  FIG. 9 is a view similar to FIG. 6, but FIG. 9 shows the arrangement of the zoom motor ZM because the viewing direction is different from FIG. FIG. 10 is a view similar to FIG. 8 and shows the configuration of the X stage drive mechanism. It can be seen that the first flexible portion FPC3 of the flexible board FPC is mounted in a narrow space as in the case of FIG.

  In this way, the XY stage 110 is incorporated into the lens barrel 100 to constitute the photographing apparatus 1 of FIG.

  By the way, in the past, since it was necessary to individually adjust the alignment of the four guide shafts, there was a problem that assembly was difficult. Therefore, in the present embodiment, as described above, the X stage, the Y stage, and the CCD holder are all supported at three points, thereby eliminating the need for alignment adjustment and simplifying the assembly.

  With reference to FIG. 5 again, how the XY stage of this embodiment is easy to assemble will be described.

  Further, as shown in FIG. 5, an X stage 113A and a Y stage 113B are disposed so as to surround the central axis. These stages 113A and 113B are supported by the base by inserting each guide shaft into a U-shaped groove provided in the base. Since it is easy to obtain the accuracy of perpendicularity and parallelism in the processing of the base, a U-groove having the squareness and parallelism is provided in advance in the base, and the guide shaft and the support shaft are fitted into the U-shaped groove. By inserting, the perpendicularity and parallelism of each axis can be easily obtained. In this way, it is not necessary to individually adjust each axis as in the conventional example.

  In this way, both ends of the first guide shaft G1 inserted so as to pass through the two bearings A1 and A2 included in the X stage are fitted in these grooves, and further, the X guide is inserted into the first guide shaft G1. The first support shaft G2 protruding in the direction is also fitted. Thus, when the X stage 113A is supported by the base 111 at the three points of the bearings A1, A2 and the support shaft G2, the X stage 113A is supported by the base with high flatness.

  Similarly, the Y stage 113B is fitted with both ends of the fourth guide shaft G4 inserted so as to pass through the two bearings A3 and A4 provided in the Y stage, and further, with respect to the fourth guide shaft G4. The second support shaft G5 protruding in the Y direction is also fitted. Thus, when the Y stage is supported by the base at the three points of the two bearings A3 and A4 and the support shaft G5, the Y stage 113B is supported by the base 111 with high flatness.

  If the planes of the X stage 113A and the Y stage 113B are maintained with high accuracy in this way, a high flatness can be obtained also for the CCD holder as the moving stage by supporting the moving stage with these stages. .

  Further, in the example of FIG. 5, since the second guide shaft G3 extending in the X direction on the Y stage 113B and fixedly supported on the Y stage 113B is provided, the CCD holder 112 as the movable stage is provided with the Y direction. And two bearings B1 and B2 supported by the second guide shaft G3 so as to be slidable in the X direction are provided and supported by the first guide shaft G1 unconstrained in both the X direction and the Y direction. One bearing B3 is provided, and is supported at a total of three points of two bearings B1, B2 supported by the second guide shaft G3 and one bearing B3 supported by the first guide shaft G1. Thus, the posture with respect to the base 111 is defined. As shown in the drawing, the bearings B1 and B2 are formed with bearings having angles in the Z direction and the Y direction, and the bearing B3 is provided with a U-shaped bearing. Furthermore, since the CCD holder including the CCD plate on the back side of the paper is urged by the spring SP1 provided by the lid member 114, both bearings have an action of defining the attitude of the moved member in the Z direction. . For this reason, a higher plane can be obtained.

  In this way, the CCD holder is supported by three opposing points that sandwich the CCD holder between two points on the Y stage side where high flatness is obtained and one point on the X stage side where high flatness is also obtained. As a result, high-precision flatness can be obtained in the CCD holder.

  Further, even if the X stage, the Y stage, and the CCD holder have the same degree of flatness with respect to the base body due to the above structure, if the backlash of the bearing portion increases, the CCD holder or the X stage, While the Y stage is sliding in either direction, the movement of the X stage and the Y stage may become dull and the movement of the CCD holder may become dull.

  Therefore, in the present embodiment, as described above, the shape of the lid member 114, the spring SP1 provided on the lid member 114 and the shape of the bearing are used so that the rattling during the sliding of the X stage and the Y stage can be taken. Therefore, the device is devised so that the rattling in the slide of the CCD holder or the like that is the moving stage can be minimized.

  As described above, the base has two U-shaped first support portions BE1 and BE2 that open toward the lid member 114, which fixedly support both ends of the first guide shaft G1, and the fourth Two U-shaped second support portions BE3 and BE4 that open toward the lid member 114, which support both ends of the guide shaft G4 in a fixed manner, and the first support shaft G2 are slidably supported in the X direction. The U-shaped third support portion BE5 that opens toward the lid member 114 and the second support shaft G5 that slidably support in the Y direction and that open toward the lid member 114 A fourth support part BE6 is provided.

  In addition, the lid member 114 has two first pressing portions that press the respective portions of the first guide shaft G1 supported by the two first support portions BE1 and BE2, respectively, The second guide portion of the fourth guide shaft G4 that is supported by each of the two second support portions BE3 and BE4, and the second support portion BE5 of the third support portion BE5 are directed to the lid member 114. A first closing piece that closes the opening and forms a first support hole 114B through which the first support shaft G2 passes in cooperation with the third support portion BE5, and the lid of the fourth support portion BE6 A second closing piece is provided which closes the opening toward the member 114 and forms a second support hole 114B through which the second support shaft G5 penetrates in cooperation with the fourth support portion BE6.

  The cover member 114 is mounted so as to cover the X stage 113A, the Y stage 113B, and the moved stage 112 in the front side of FIG. 5, that is, in the Z direction, and the cover member 114 and the base body 111 cooperate to form a bearing.

  FIG. 5 shows an excerpt of the structure of each of the support portions BE1 to BE6 to show this.

  Since the structures of the first pressing portion and the second pressing portion are the same, FIG. 5 shows one of the two second support portions BE3 and BE4 of the fourth guide shaft G4. As shown in the enlarged view of FIG. 5, the guide shaft G4 is fitted into the U groove, and the guide shaft G4 is elastically pressed by the pressing portion 114A formed by a step at the end of the lid member 114. Thus, when the first guide shaft and the fourth guide shaft are supported by the first support portion and the second support portion, the first guide shaft G1 and the fourth guide shaft G4 are fixed to the base 111. Supported.

  Further, since the structure of the third support part BE5 and the first closing piece and the structure of the fourth support part BE6 and the second closing piece are the same, the third support part BE5 and the first closing piece are shown. Yes. As shown in the enlarged view in FIG. 5, the support groove 114B is formed by closing the U groove by the closing piece of the lid member 114, and the first support shaft G2 extends through the support hole 114B. When the second support shaft G5 is slidably supported, the X stage 113A and the Y stage 113B are supported by the base body 111 so as to slide smoothly.

  Further, the connection between each stage 113A, 113B and the CCD holder 112, which is a stage to be moved, is also devised. In this example, the CCD holder 112 is supported at three points so that the CCD holder 112 moves sensitively according to the movement of the X stage 113A and the Y stage 113B, and the three bearing portions B1, B2, B3 are supported. The shape is devised.

  As described above, the CCD holder 112 has two bearings B1 supported in the Y direction and slidably supported in the X direction by the second guide shaft G3 extending in the X direction and fixedly supported by the Y stage 113B. , B2 and the first guide shaft G1 with one bearing B3 supported unconstrained in both the X and Y directions, the attitude of the CCD holder 112 relative to the base 111 is defined. Has been.

  Therefore, by utilizing the fact that the CCD holder 112 is urged toward the back side of the drawing by the spring SP1 provided on the lid member 114, the bearing B3 of the CCD holder 112 supported by the first guide shaft G1. Is formed in a U-groove shape so as to sandwich the first guide shaft G1, and the posture of the CCD holder 112 in the Z direction is determined so that the guide shaft is offset to one side of the U-shape. I support it. Further, each of the two bearings B1 and B2 supported by the second guide shaft G3 of the CCD holder 112 is provided with a rectangular through-hole having an angle in the Z direction and the Y direction through which the second guide shaft G3 passes. The CCD holder is supported so as to absorb the shakiness in the Y direction during the movement of the CCD holder so as to be close to one side of the rectangular through hole.

  The bearing B4 of the CCD holder 112 supported by the third guide shaft G6 is a U-groove bearing that opens in the Z direction and sandwiches the third guide shaft G6. The CCD holder 112 is supported such that the guide shaft G6 is always positioned so as to be unconstrained in the Z direction and to restrain movement in the X direction.

  As described above, the CCD holder 112 is biased in the X direction by the spring SP2. For this reason, the third guide shaft G6 is offset to one side of the U groove of the bearing portion B4. As a result, rattling in the X direction when the CCD holder 112 is moving is absorbed.

  This bearing portion B4 is added to the CCD holder 112 from both guide shafts G1, G3 when the CCD holder 112 is slid in the X direction along the first guide shaft G1 and the third guide shaft G3. Since it is provided at a position where the moment is just canceled, the CCD holder 112 moves smoothly in the X direction.

  In this way, the CCD holder 112 can be smoothly and smoothly moved by absorbing the play in the X direction and the Y direction and maintaining the posture of the CCD holder, which is the stage to be moved, in the Z direction even during sliding. An XY stage is set up in which an agile reaction is promised.

  As described above, according to the XY stage of the present invention, an XY stage that can be easily assembled while obtaining flatness and the manufacturing cost is reduced, and a photographing apparatus including the XY stage are realized.

  In addition, an XY stage in which extra force such as friction is hardly generated and the CCD holder can be moved sensitively in synchronization with the movement of the stage is realized.

It is a figure which shows the external appearance of the imaging device 1 provided with the XY stage of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is an enlarged view of the flexible substrate of FIG. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows the structure of the XY stage 110 which is one Embodiment of this invention. It is a figure which shows arrangement | positioning of magnet MAG1, MAG2, and the positional relationship of joined body YM1, YM2, Hall element h1, h2, counter yoke Y12, Y22, and additional yoke Y13, Y23. It is a figure explaining the output of a Hall element at the time of adjustment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Imaging device 100 Lens barrel 110 XY stage 111 Base | substrate 112 CCD holder 113A X stage 1130A 1st board | substrate fixing | fixed part 1131A 1st coil board | substrate 113B Y stage 1130B 2nd board | substrate fixing | fixed part 1131B 2nd coil board | substrate 114 Cover member YM1 first joined body MG1 first magnet Y11 first yoke YM2 second joined body MG2 second magnet Y21 second yoke Y12 third yoke Y22 fourth yoke Y13 first sub yoke Y23 second Sub yoke G1 First guide shaft G2 First support shaft G3 Second guide shaft G4 Fourth guide shaft G5 Second support shaft G6 Third guide shaft h1 h2 Hall element

Claims (4)

In an XY stage comprising: a base body; and a movable stage that is moved relative to the base body in an XY plane perpendicular to a central axis that penetrates the base body in the Z direction.
The central axis is wrapped around a half circumference and supported by the base body so as to be slidable in the X direction, and the movable stage is restrained in the X direction and slidably supported in the Y direction. An X stage for moving the moving stage in the X direction;
By surrounding the central axis over a half circumference, the central axis is wrapped around the entire circumference in cooperation with the X stage, and is supported by the base body so as to be slidable in the Y direction, and the movable stage is constrained in the Y direction. A Y stage that slidably supports in the direction and moves the moved stage in the Y direction by sliding in the Y direction;
An X stage drive mechanism for driving the X stage in the X direction;
A Y stage drive mechanism for driving the Y stage in the Y direction,
The X stage drive mechanism is
A first joint comprising a first magnet that extends in the XZ plane and faces the X stage, and a first yoke fixed to the back surface of the first magnet when viewed from the X stage. Body,
The X stage is fixed at a position facing the first magnet, receives a supply of current, and generates a force for driving the X stage in the X direction by interaction with the first magnet. And a first coil substrate on which the coil is formed,
The Y stage drive mechanism is
A second joint comprising a second magnet that extends in the YZ plane and faces the Y stage, and a second yoke of the second magnet fixed to the back surface when viewed from the Y stage. Body,
A second stage of the Y stage that is fixed at a position facing the second magnet, receives a supply of electric current, and generates a force that drives the Y stage in the Y direction by interaction with the second magnet. And a second coil substrate on which the coil is formed,
The X stage extends to the outside of the outer wall of the base body and extends in the Z direction and the X direction. The first coil substrate is fixed, and the first dimension is shorter than the first dimension of the base body in the Z direction. Having a substrate fixing part,
The X stage drive mechanism includes a third yoke disposed between the outer wall of the base body and the first coil substrate at a position where interference with the first substrate fixing portion is avoided in the Z direction. ,
The Y stage extends to the outside of the outer wall of the base and extends in the Z direction and the Y direction. The second coil substrate is fixed, and the second dimension is shorter than the Z dimension of the base. Having a substrate fixing part,
The Y stage driving mechanism includes a fourth yoke disposed between the outer wall of the base body and the second coil substrate at a position where interference with the second substrate fixing portion is avoided in the Z direction. XY stage characterized by that. The first yoke is a member wider in the X direction than the first magnet,
The first joined body is fixed at a position opposite to the first magnet on the back surface of the first yoke as viewed from the first magnet, rather than the first yoke. A first sub-yoke narrow in the direction,
The second yoke is a member wider in the X direction than the second magnet,
The second joined body is fixed to the back surface of the second yoke as viewed from the second magnet, at a position facing the second magnet, more than the second yoke. The XY stage according to claim 1, further comprising a second sub-yoke having a narrow width in the direction.   The XY stage according to claim 1, further comprising an imaging element that is fixed to the stage to be moved and receives an image of a subject and outputs an image signal representing the subject. XY stage according to claim 3,
A photographic lens for imaging a subject on the image sensor;
An imaging apparatus comprising: a drive unit that drives the XY stage so that blurring of an image represented by an image signal output from the imaging element is corrected.

Images