JP2009048956A - Reflecting mirror, manufacturing method of reflecting mirror, and light irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reflecting mirror suppressing a phenomenon in which condensing capability is reduced by distortion of a reflecting face in a press-formed reflecting mirror. <P>SOLUTION: The reflecting mirror having a recessed face that reflects light emitted from a short-arc discharge lamp is press-formed so that the thickness of an emission opening part 11e of glass base material 11 obtained by press-forming a lump of molten glass into a bowl shape becomes nearly the same as the wall thickness of glass from the emission opening part 11e to the base part opening part 11c. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a reflection mirror for reflecting light of a short arc discharge lamp.

  2. Description of the Related Art There is known a light irradiation device that collects light emitted from a short arc lamp such as a mercury xenon lamp on one end face of an optical fiber bundle and emits light propagated through the optical fiber bundle from the other end face.

  In such a light irradiation apparatus, for example, as shown in FIG. 11, a reflection mirror having a spheroid is used to collect light emitted from a lamp on the incident end face of an optical fiber bundle.

  As such a reflection mirror, a conventional heat-resistant glass such as Pyrex (registered trademark) is processed into a bowl shape, and a curved surface based on a predetermined elliptical shape is formed on the inner surface by grinding or the like. In this curved surface, a dielectric multilayer film is formed to form a reflective surface.

  On the other hand, video projection devices such as liquid crystal projectors are known as devices provided with a reflection mirror in addition to the light irradiation device described above, and the reflection mirrors used in these devices are generally a hot-pressed molten glass material. To be molded.

  Specifically, the molten glass material is dropped into a metal female mold called a barrel mold, a metal male mold having a spheroidal curved surface called an arrow mold is inserted, and the glass material has a predetermined shape. A heating press is performed so as to be.

Patent Document 1 can be cited as a document disclosing a reflection mirror obtained by such a heat press.
The reflection mirror disclosed in Patent Document 1 has an advantage that the manufacturing cost can be reduced because the manufacturing time can be shortened compared to the reflection mirror manufactured by grinding, Many are used.

  However, the reflection mirror molded by the hot press has a difference between the shape of the formed reflecting surface and the calculated value by the elliptic formula due to the distortion generated during the press molding, and the light irradiation device using the optical fiber bundle described above When the light is used, the light emitted from the bright spot of the lamp arranged at one focal position of the spheroid is reflected in a direction different from the predetermined direction when reflected by the reflecting surface, and the incident end face of the optical fiber bundle There was a problem that the light reaching the light source decreased.

  This problem is particularly noticeable when an optical fiber bundle having a relatively thin cross-sectional area at the incident end is used, and there is a case where the amount of light is reduced by about 10% as compared with a reflection mirror manufactured by a conventional grinding process. It was.

JP 2004-12971 A

A first object of the present invention is to provide a reflecting mirror that suppresses a phenomenon in which light collecting ability is reduced due to distortion of a reflecting surface in a reflecting mirror formed by press molding glass.
A second object of the present invention is to provide a method for manufacturing the above-mentioned reflection mirror, and a third object of the present invention is to provide a light irradiation device using the reflection mirror. .

  As a result of intensive research to solve the above-mentioned problems, the present inventor has found that the strain generated during press molding depends on the amount of glass present in the region to be the reflective surface, and the amount of glass is other than that. It has been found that when there are many parts compared to the above part, it becomes a distorted shape compared to a predetermined curved surface due to the difference in shrinkage when the glass is cooled.

  Therefore, the present invention has been completed by conceiving that the above problem can be solved by performing press molding so that the thickness of the glass of the reflecting mirror is uniform.

That is, the first means includes an exit opening that emits light emitted from the short arc discharge lamp, a base opening that passes through a part of the discharge lamp, and a melt that reflects the light emitted from the discharge lamp. A reflective mirror having a reflective surface formed with a reflective film on the inner surface of a glass base material that has been press-molded into a glass lump, wherein the thickness of the outgoing opening of the glass base is from the outgoing opening The reflection mirror is characterized by being substantially the same as the thickness of the glass reaching the base opening.
In this invention, a glass substrate means the glass of the state which gave press molding to the molten glass lump.
The thickness of the exit opening of the glass substrate is substantially the same as the thickness of the glass from the exit opening to the base opening. It means that it is substantially the same as the thickness of the region having a bowl-like shape that reflects most of the light.
Such a reflecting mirror has little distortion on the reflecting surface near the formed exit opening, and can efficiently reflect light emitted from the short arc discharge lamp in a predetermined direction.

Next, the second means is the reflecting mirror according to the first means, wherein an inner surface of the glass substrate is constituted by a continuous curved surface.
The continuous curved surface in the present invention means that the curved surface on the inner surface of the press-molded glass substrate is gentle, and there are no discontinuous concave portions or convex portions.
Such a reflecting mirror is less likely to be distorted on the reflecting surface, and can efficiently reflect the light emitted from the short arc discharge lamp in a predetermined direction.

Next, the third means is the reflecting mirror according to the first means or the second means, wherein the base opening is provided after the inner surface of the glass substrate is polished. .
Such a reflection mirror can efficiently reflect light emitted from the short arc discharge lamp in a predetermined direction without causing distortion due to polishing sagging on the reflection surface near the base opening.

Next, a fourth means is the reflecting mirror according to any one of the first to third means, wherein at least a part of the reflecting mirror has a shape including a spheroid. is there.
Since such a reflecting mirror includes a spheroid surface on the reflecting surface, the light of the short arc discharge lamp radiated from one focal position can be efficiently collected at the other focal position.

Next, the fifth means includes an emission opening for emitting light emitted from the short arc discharge lamp, a base opening for inserting a part of the discharge lamp, and a melting for reflecting the light emitted from the discharge lamp. A method of manufacturing a reflecting mirror comprising a reflecting surface having a reflecting film formed on the inner surface of a glass base material obtained by press-molding the glass lump in a bowl shape, and pressing the glass base material into a bowl shape Reflection comprising: a step, a step of polishing the reflective surface of the inner surface of the glass substrate molded into the bowl shape, and a step of opening the base opening in the polished glass substrate. It is a manufacturing method of a mirror.
A reflection mirror manufactured using such a manufacturing method efficiently reflects light emitted from a short arc discharge lamp in a predetermined direction without causing distortion due to polishing sagging on the reflection surface near the base opening. can do.

Next, a sixth means is a light irradiation device including a reflection mirror that reflects light emitted from the short arc discharge lamp, and the reflection mirror is one of the first means to the fourth means. The light irradiation device is characterized by being a reflection mirror described in the above.
Since such a light irradiation apparatus has no distortion on the reflection surface of the mounted reflection mirror, the light emitted from the short arc discharge lamp can be used efficiently.

Next, a seventh means is the light irradiation apparatus according to the sixth means, wherein the light irradiation apparatus includes an opening for emitting light, and the opening can be fitted with a light guide. The light reflected from the reflection mirror is condensed on the incident end face of the light guide.
In such a light irradiation device, since the reflection surface of the mounted reflection mirror is not distorted, the light emitted from the short arc discharge lamp can be efficiently condensed on the incident end surface of the light guide.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings. However, the scale of each member illustrated in the following drawings may be different from the actual scale to help understanding. is there.

<Embodiment 1: Reflection mirror>
First, as a first embodiment of the present invention, a reflection mirror molded by press molding and a metal mold for molding the same will be described.

FIG. 1 is a diagram showing a cross-sectional shape of the reflection mirror 10 of the present embodiment.
Fig.2 (a) is a figure which shows the cross-sectional shape of the glass base material 11 immediately after press molding used for the reflective mirror 10 of this embodiment.
FIG.2 (b) is a figure which shows the cross-sectional shape of the glass base material 11 which processed the base part opening part 11c for inserting a short arc discharge lamp.
FIG. 2C is a cross-sectional view of a metal mold 60 including an arrow mold 61, a body mold 62, and a ring mold 63 for forming the glass substrate 11.
In FIG. 2C, the arrow 61 has a spheroid-shaped transfer surface 61a with the S1 point as one focal point, and is installed so as to be able to reciprocate in the vertical direction.

  The body mold 62 is a mold having a shape complementary to the external shape 11 h of the glass substrate 11 shown in FIG. 2A, and is provided with a generally bowl-shaped transfer surface 62 a, below the arrow shape 61. Are arranged coaxially with the arrow 61.

As shown in FIG. 3, as a procedure for press-molding the glass substrate 11, about 190 g of molten glass lump 67 in which borosilicate glass is heated to about 1300 ° C. is put into a barrel mold 62, and an arrow shape heated from above is used. 61 is pushed down to transfer the spheroidal transfer surface 61 a of the arrow 61 to the molten glass block 67.
The ring mold 63 is used for forming the emission opening 11 e of the glass substrate 11.

  After pressing, the arrow 61 is pulled up when a certain time has elapsed, and when the glass substrate 11 is further lowered to a predetermined temperature, the glass substrate 11 is taken out from the barrel mold 62.

  The glass substrate 11 taken out from the body mold 62 is subjected to an annealing process for removing residual stress inside the glass applied by press molding.

The outer shape of the molded glass substrate 11 has a bowl-like shape in which the inner diameter of the emission opening 11e is 100 mm and the height from the emission opening 11e to the top 11f is 50 mm.
The thickness of the glass from the exit opening 11e to the top 11f is constant at about 5 mm except for a part.

After the annealing treatment, the glass substrate 11 is subjected to the optical polishing of the concave surface 11a in the polishing step, and then the base opening portion 11c for inserting the short arc discharge lamp into the top portion 11f is processed.
The inner diameter of the base opening 11c is 25 mm, and is preferably the smallest size within a range in which a short arc discharge lamp can be inserted.

Next, a dielectric multilayer film is formed on the concave surface 11a on which the glass substrate 11 obtained by the above procedure is optically polished.
The dielectric multilayer film in the present embodiment has a structure in which 40 thin films made of HfO ₂ and SiO ₂ are alternately stacked using a vacuum vapor deposition device, and spectral reflection that reflects light in the ultraviolet region of 380 nm or less. It has characteristics.

As a material for forming such a dielectric multilayer film having specific spectral reflection characteristics, a material such as MgF ₂ or TiO ₂ is appropriately selected and used in addition to the above-mentioned HfO ₂ and SiO _2. Can do.

In the reflection mirror 10 manufactured by the above procedure, the thickness of the exit opening 11e of the glass substrate 11 after press molding is substantially the same as the thickness of the glass from the exit opening 11e to the base opening 11c, and the top portion Since the thickness of the whole glass substrate 11 excluding a part around 11f is constant at about 5 mm, the shrinkage amount of the glass at the time of cooling is substantially constant over the entire glass substrate 11.
As a result, the occurrence of distortion in the vicinity of the emission opening 11e is suppressed, and the spheroidal shape of the transfer surface 61a of the arrow 61 can be faithfully transferred.

In addition, as described above, the reflection mirror 10 of the present embodiment performs the processing of the base opening 11c in the top portion 11f after the polishing process of the concave surface 11a of the glass substrate 11 is performed.
In general, in a planar or curved surface polishing step, when there is a cross section perpendicular to the polishing surface, the polished surface in the vicinity of the polished surface increases the amount of polishing closer to the cross section, so-called polishing sagging occurs, It becomes difficult to maintain a predetermined polished surface shape.

  Since the reflecting mirror 10 of this embodiment performs the grinding | polishing process of the concave surface 11a of the glass base material 11 before processing the base opening part 11c, there is no possibility that said grinding | polishing sagging will generate | occur | produce and obtain a predetermined | prescribed reflective surface shape. be able to.

Further, in the reflection mirror 10 of the present embodiment, a groove 63a as shown in FIG. 4B can be provided in the ring mold 63 for performing press molding.
In the groove part 63 a, the weight of the molten glass lump 67 put into the body mold 62 varies from press to press, so that the groove part 63 a provided in the ring mold 63 can be used as a escape place for the molten glass lump 67.

  By providing the groove 63a, as shown in FIG. 4 (a), a convex edge portion 11g continuous to the emission opening portion 11e of the glass substrate 11 is produced, but the volume of the convex edge portion 11g is small and away from the concave surface 11a. Therefore, the influence on the concave surface 11a is small, and there is little risk of distortion.

  Below, we compare how the distortion of the reflective surface can be improved by making the glass thickness of the exit opening of the glass substrate the same as the glass thickness from the exit opening to the base opening. Description will be made using comparison data with the reflecting mirrors of Example 1 and Comparative Example 2.

(Comparative Example 1)
FIG. 5 is a cross-sectional view of the reflection mirror 20 by press molding used for comparison with the reflection mirror 10 of the present embodiment and the glass substrate 21 thereof.

The glass base material 21 has the same reflection surface shape as the glass base material 11 described above, but the cross-sectional shape of the emission opening 21e is different, and a flange part 21b is provided outside the emission opening 21e.
The flange portion 21b is used when the reflecting mirror 20 is fixed to the apparatus.
For this reason, as shown in FIG. 6, in the molding die used for press molding, the shape of the opening of the barrel die 62 is a shape having a step portion 62d, and the ring die 63 is a shape having a step portion 63b. It becomes.

  The glass base material 21 was molded in the same procedure as the glass base material 11 except that the amount of molten glass lump charged into the body mold was increased by filling the stepped parts 62d and 63b.

  Next, in order to compare the amount of distortion at the reflecting surface of the glass substrate 11 of the present embodiment and the glass substrate 21 provided with such a flange portion 21b in the emission opening 21e, the emission openings 11e and 21e The roundness on the reflective surface side was measured, and the measured values were compared.

FIG. 7A is a graph showing the roundness of the glass base material 11, and FIG. 7B is a graph showing the roundness of the glass base material 21.
Here, roundness refers to the magnitude of deviation from a geometrically correct circle of a circular feature. When a circular feature is sandwiched between two concentric geometric circles, the interval between two concentric circles is the smallest. This is expressed by the difference in radius between the two circles.

  The roundness was measured using a roundness measuring device RA-H5100AH manufactured by Mitutoyo Corporation.

  In FIG. 7A and FIG. 7B, the measured value is drawn with a solid line M, and the calculated shape is represented with a chain line C. The broken line L1 and the broken line L2 are concentric with each other, the broken line L1 is inscribed in the solid line M, and the broken line L2 is circumscribed in the solid line M.

From the measurement data, the roundness of the exit opening 11e of the glass substrate 11 was 9 μm as a result of obtaining the difference in radius between the chain lines L1 and L2 in FIG.
On the other hand, the roundness of the exit opening 21e of the glass substrate 21 was 38 μm as a result of obtaining the difference in radius between the chain lines L1 and L2 in FIG.

  As described above, the glass substrate 11 shown in the present embodiment is distorted due to the shrinkage of the glass in the exit opening 11e after press molding, as compared with the glass substrate 21 having the flange 21b in the exit opening. The roundness of the concave surface 11a in the vicinity of the exit opening 11e was improved by about 4 times.

  As described above, the glass substrate 11 has a small distortion on the concave surface 11a, and the reflection mirror 10 manufactured using the glass substrate 11 efficiently collects light emitted from the short arc discharge lamp at a predetermined position. Can be light.

(Comparative Example 2)
FIG. 8A and FIG. 8B are cross-sectional views of the reflection mirror 30 by press molding used for comparison with the reflection mirror 10 of the present embodiment and the glass substrate 31 thereof.

  The glass substrate 31 has the same reflecting surface shape as the glass substrate 11 described above, but has a cylindrical convex portion 31 d as a point different from the glass substrate 11.

  The glass substrate 31 is molded by the ring mold 63 shown in FIG. 8C, the arrow mold 65 having the projection 65b on the transfer surface 65a, and the barrel mold 66 having the recess 66a on the bottom.

  The glass base material 31 was molded in the same procedure as the glass base material 11 except that the amount of molten glass lump to be charged into the body mold 66 was increased by being filled in the convex portions 31d of the glass base material 31. .

This convex part 31d is cut | disconnected in the position of the broken line A after press-molding the glass base material 31. FIG.
As a result, an opening appears at the top of the glass substrate 31 and is used as a base opening 31c for inserting a short arc discharge lamp.

  Next, in order to compare the amount of distortion on the reflecting surface of the glass substrate 31 provided with the convex portion 31d and the glass substrate 11 of the present embodiment, the deviation from the designed spheroid shape on the reflecting surface is measured. The respective measured values were compared.

9 (a) and 9 (b) show the difference between the glass substrate 11 of this embodiment shown in FIG. 2 (b) and the reflection surface shape of the glass substrate 31 and the design spheroid. FIG.
The shape of the reflecting surface was measured using a three-dimensional measuring instrument Bright Apex (registered trademark) 707 manufactured by Mitutoyo Corporation.

FIG. 9A shows the reflecting surface shape (broken line) and the calculated shape (solid line) of the glass substrate 11, and emphasizes the value actually obtained by multiplying it by a certain coefficient. Represents.
As a result of the measurement, the maximum deviation of the glass substrate 11 from the elliptical formula was 40 μm.

On the other hand, FIG. 9B shows the reflection surface shape (broken line) and the calculated shape (solid line) of the glass substrate 31 in the same manner as in FIG. 9A.
As a result of the measurement, the maximum deviation of the glass substrate 31 from the elliptical formula was 82 μm.

  As described above, the glass substrate 11 including the concave surface 11a formed of a curved surface that is continuous in the range from the emission opening portion 11e to the top portion 11f illustrated in the present embodiment is compared with the glass substrate 31 including the convex portion 31d. Thus, distortion due to the shrinkage of the glass in the vicinity of the top portion 11f after the press molding or in the emission opening portion 11e hardly occurs, and it can be brought closer to the desired spheroid shape.

  Moreover, since the reflective mirror 10 shown in this embodiment processes the base opening part 11c after performing the grinding | polishing process to the concave surface 11a of the glass base material 11, the grinding | polishing of the base opening part 11c vicinity does not generate | occur | produce.

On the other hand, in the reflecting mirror 30, since the base opening 31c exists when the glass substrate 31 is press-molded, when the concave surface 31a is subsequently polished, there is a polishing sag near the base opening 31c. appear.
This sagging sagging also appears as a region D in the actually measured reflecting surface shape depicted in FIG. 9B, but appears in the actually measured reflecting surface shape of the reflecting mirror 10 depicted in FIG. 9A. Not.

  As described above, the glass substrate 11 has a small distortion on the concave surface 11a, and the reflection mirror 10 manufactured using the glass substrate 11 efficiently collects light emitted from the short arc discharge lamp at a predetermined position. Can be light.

(Comparative Example 3)
FIGS. 10A and 10B are cross-sectional views of the reflection mirror 40 by press molding and the glass base material 41 shown for comparison with the reflection mirror 10 of the present embodiment.
The glass substrate 41 includes the same reflecting surface shape and convex portion 41d as the glass substrate 31 of Comparative Example 2, and further includes a flange portion 41b at the exit opening.

The reflection mirror 40 having such a shape has a shape in which distortion near the exit opening of the reflection mirror 20 is added with distortion near the base opening 31c of the reflection mirror 30.
As a result of measuring the distortion on the reflecting surface of the glass substrate 41 and the reflecting mirror 40 of Comparative Example 3 by the same method as in Reference Examples 1 and 2, the roundness was 36 μm, and the deviation from the elliptic formula was 78 μm at the maximum. Met.

<Embodiment 2: Light irradiation apparatus>
Next, as a second embodiment of the present invention, a light irradiation apparatus including the reflection mirror 10 shown in the first embodiment will be described.

  FIG. 11 is a vertical cross-sectional view along the light emission direction showing the configuration of the light irradiation apparatus 100 including the reflection mirror 10.

  As shown in FIG. 11, the light irradiation device 100 of the present embodiment includes a light source unit 110 having the above-described reflection mirror 10 and light transmission for guiding the light collected by the reflection mirror 10 to an external irradiation object. Part 120.

  The light source unit 110 includes, in addition to the reflection mirror 10, a short arc discharge lamp 111, a power source 112 for supplying an applied voltage to the short arc discharge lamp 111, and an irradiation range of the light collected by the reflection mirror 10 of the light transmission unit 120. An optical axis adjusting means 114 for adjusting the position of the short arc discharge lamp 111 so as to be an optimum position with respect to the incident end 120a, and a fan motor 115 for cooling the short arc discharge lamp 111, These are stored in the lamp house 116.

  The short arc discharge lamp 111 of this embodiment is an ultrahigh pressure mercury lamp, and has a pair of electrodes 111a and 111b inside, and a discharge space 111c is formed in a region sandwiched between the pair of electrodes.

The pair of electrodes 111 a and 111 b is electrically connected to the caps 111 d and 111 e at both ends in the longitudinal direction of the short arc discharge lamp 111.
By supplying electric power to the bases 111d and 111e from the power source 112 via the cables 117a and 117b, the short arc discharge lamp 111 emits light including ultraviolet rays from the discharge space 111c.

  The short arc discharge lamp 111 is preliminarily adjusted by the optical axis adjusting means 114 so that the position of the discharge space 111c becomes the first focal position F1 of the reflection mirror 10 made of the spheroid. It is adjusted in each direction of the axis.

  As a result, the light radiated from the discharge space 111c is reflected by the reflecting surface 10a of the reflecting mirror 10 and then condensed at the second focal position F2 of the reflecting mirror 10.

  On the other hand, the lamp house 116 is provided with a light exit port 116a for taking out the light condensed at the second focal position F2, and the light exit port 116a has a through hole 118a therein. A holding member 118 is provided.

  The position of the holding member 118 is adjusted so that the light transmission unit 120 is inserted into the through hole 118a, and the incident end 120a of the light transmission unit 120 is aligned with the second focal position F2 of the reflection mirror 10 described above. It is fixed to the lamp house 116.

  The light transmission unit 120 includes a light guide fiber bundle 121 obtained by bundling about 500 quartz glass fiber strands having an outer diameter of 200 μm, a flexible metal tube 122 for housing and protecting the optical fiber bundle 121, an incident light An end fitting 124 and an emission end fitting 125 are attached.

  Since the light irradiation apparatus 100 according to the present embodiment includes the reflection mirror 10 according to the first embodiment described above, the light emitted from the short arc discharge lamp 111 is efficiently condensed on the incident end 120a of the light transmission unit 120. can do.

As a result of measuring the intensity of ultraviolet light having a wavelength of 365 nm emitted from the light transmission unit 120 of the light source device 100 of this embodiment, the ultraviolet intensity when the reflecting mirror 10 described in the first embodiment is mounted is 4250 mW / cm. ^The UV intensity was 10% or more stronger than the UV intensity of 3850 mW / cm ² when the reflection mirror 40 shown in FIG.
The ultraviolet intensity was measured by placing an ultraviolet receiver UVD-S365 manufactured by USHIO INC. At a position 10 mm away from the emission end 120b of the light transmission unit 120 shown in FIG.

  In the present invention, in the reflection mirror that reflects light emitted from the short arc discharge lamp, it is possible to suppress the distortion of the reflection surface of the reflection mirror, so that the reflected light can be efficiently reflected in a predetermined direction. .

It is sectional drawing of the reflective mirror 10 of the 1st Embodiment of this invention. (A) is sectional drawing of the glass base material 11 used for the reflective mirror 10. FIG. (B) is sectional drawing of the glass base material 11 by which the base opening part was processed. (C) is sectional drawing of the metal metal mold | die for press-molding the glass base material 11. FIG. It is a figure for demonstrating the procedure which press-molds the glass base material. (A) is sectional drawing which shows the modification of the glass base material 11. FIG. (B) is a cross-sectional view showing a modification of the metal mold 60. (A) is sectional drawing which shows the reflective mirror 20 of the reference example 1. FIG. (B) is sectional drawing of the glass base material 21 used for the reflective mirror 20. FIG. It is sectional drawing of the metal metal mold | die for press-molding the glass base material 21. FIG. (A) is a figure which shows the roundness of the glass base material 11. FIG. (B) is a figure which shows the roundness of the glass base material 21. FIG. (A) is sectional drawing of the reflective mirror 30 of the reference example 2. FIG. FIG. 2B is a cross-sectional view of the glass substrate 31 used for the reflection mirror 30. (C) is sectional drawing of the metal metal mold | die for press-molding the glass base material 31. FIG. (A) is a figure which shows the deviation with the elliptical type of the glass base material 11. FIG. (B) is a figure which shows the deviation with the elliptical type of the glass base material 31. FIG. (A) is sectional drawing of the reflective mirror 40 of the reference example 3. FIG. (B) is sectional drawing of the glass base material 41 used for the reflective mirror 40. FIG. It is a vertical sectional view along the light emission direction showing the configuration of the light irradiation apparatus 100 according to the second embodiment of the present invention.

Explanation of symbols

10, 20, 30, 40 Reflective mirror 11, 21, 31, 41 Glass substrate 11a, 21a, 31a, 41a Concave surface
21b, 41b Flange part 11c, 21c, 31c, 41c Base part opening part 31d, 41d Convex part 11e, 21e, 31e, 41e Outgoing opening part 11f Top part 11g Convex edge part 11h External shape 60 Metal mold 61, 65 Arrow type 62, 66 Body type 63 Ring type 67 Molten glass block 100 Light irradiation device 110 Light source unit 111 Short arc discharge lamp 112 Power source 114 Optical axis adjustment means 115 Fan motor 116 Lamp house 118 Holding member 120 Light transmission unit 121 Optical fiber bundle 122 Metal tube 124 Entrance end fitting 125 Exit end fitting

Claims (7)

An exit opening for emitting light emitted from the short arc discharge lamp;
A base opening through which a portion of the discharge lamp is inserted;
A reflecting mirror comprising a reflecting surface having a reflecting film formed on the inner surface of a glass substrate obtained by press-molding a molten glass lump that reflects light emitted from the discharge lamp;
A reflection mirror characterized in that the thickness of the exit opening of the glass substrate is substantially the same as the thickness of the glass from the exit opening to the base opening.   The reflection mirror according to claim 1, wherein an inner surface of the glass substrate is constituted by a continuous curved surface.   The reflection mirror according to claim 1 or 2, wherein the base opening is provided after the inner surface of the glass substrate is polished.   The reflection mirror according to any one of claims 1 to 3, wherein at least a part of the reflection mirror has a shape including a spheroid. An exit opening for emitting light emitted from the short arc discharge lamp;
A base opening through which a portion of the discharge lamp is inserted;
A method for producing a reflecting mirror comprising a reflecting surface having a reflecting film formed on the inner surface of a glass substrate that is press-molded into a bowl of molten glass lump that reflects light emitted from the discharge lamp,
Pressing the glass substrate and forming it into a bowl shape;
Polishing the reflective surface of the inner surface of the glass substrate formed into a bowl shape;
Opening the base opening in the glass substrate whose reflective surface has been polished;
The manufacturing method of the reflective mirror comprised by this. A light irradiation device including a reflection mirror that reflects light emitted from a short arc discharge lamp,
The light reflecting device according to claim 1, wherein the reflecting mirror is the reflecting mirror according to claim 1. It is a light irradiation apparatus of Claim 6, Comprising:
The light irradiation device includes an opening for emitting light,
The opening can be fitted with a light guide, and the light reflected from the reflecting mirror is condensed on the incident end face of the light guide.

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