JP2009042079A - Vibration detection sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration detection sensor capable of detecting accurately a vibration state of an electronic apparatus. <P>SOLUTION: This vibration detection sensor has a substrate 11; a container 13 provided on the upper surface of the substrate 11, and having an inner wall 12; an internal space 14 formed between the upper surface of the substrate 11 and the inner wall 12 of the container 13; a magnetic body 15 stored in the internal space 14, and moving on the substrate 11 in contact with the inner wall of the container 13; and a standstill domain 21 positioned and provided on the upper surface of the substrate 11, where the magnetic body 15 can standstill. A magnetic detector 18 is provided on the substrate 11, corresponding to a movable domain of the magnetic body 15 excluding the standstill domain 21, and a magnetism generator for applying magnetism to the magnetic detector 18 is also provided on a part other than the standstill domain 21. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a vibration detection sensor for detecting the posture of various electronic devices and detecting the vibration state of the electronic device.

  As shown in FIG. 12, this type of conventional vibration detection sensor includes a container 3 having a main space 1 and a subspace 2, a spherical magnetic body 4 accommodated in the main space 1, and the subspace 2. When the magnetic body 4 is in a specific position facing the permanent magnet 5 in a configuration including the housed permanent magnet 5 and the magnetic detector 6 formed in the container 3, the magnetic body 4 is moved to the permanent magnet. 5 is constrained, and when the magnetic body 4 moves away from a specific position due to vibration or inclination, the permanent magnet 5 moves inside the sub space 2 and changes the magnetic flux to the magnetic detector 6. It had been.

As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
Japanese Patent Laid-Open No. 11-23267

  The above-described conventional vibration detection sensor has a structure in which the magnetic body 4 is constrained by the permanent magnet 5 when the magnetic body 4 is at a specific position facing the permanent magnet 5. When the magnetic force of the electronic device deteriorates or when the vibration is fast, the permanent magnet 5 cannot completely restrain the magnetic body 4, and as a result, the problem that the vibration state of the electronic device cannot be detected with high accuracy. Had.

  The present invention solves the above-described conventional problems, and an object thereof is to provide a vibration detection sensor that can accurately detect the vibration state of an electronic device.

  In order to achieve the above object, the present invention has the following configuration.

  The invention according to claim 1 of the present invention includes a substrate, a container provided on the upper surface of the substrate and having an inner wall, an internal space formed between the upper surface of the substrate and the inner wall of the container, A magnetic body that is accommodated in an internal space and moves on the substrate while being in contact with the inner wall of the container; and a stationary region that is provided on an upper surface of the substrate and in which the magnetic body can rest. A magnetic detector is provided on a substrate or a container corresponding to a region in which the magnetic body excluding the stationary region is movable, and a magnetic generator for applying magnetism to the magnetic detector is provided in a portion other than the stationary region. According to this configuration, the substrate or the container is provided with a magnetic detector corresponding to the region in which the magnetic body excluding the stationary region is movable, and magnetism is applied to the magnetic detector. The magnetic generator When the magnetic body is located in a resting area where the magnetic body can be stopped, the magnetic body is not restrained by the magnetic generator, thereby generating the magnetism due to long-term use. Since the influence of the deterioration of the magnetic force of the device and the restraint of the magnetic material by the magnetic generator on the detection of the vibration state of the electronic device is reduced, the effect of being able to detect the vibration state of the electronic device with high accuracy is obtained. It is.

  According to the second aspect of the present invention, the shape of the inner wall of the container as viewed from the upper surface is a circular shape or a shape constituting a part of the circular shape. Since the shape of the inner wall of the container is a circular shape or a shape constituting a part of the circular shape, a centrifugal force can be applied to the magnetic body that moves due to vibration, and this ensures that the magnetic body is applied to the inner wall of the container. Therefore, it is possible to obtain an effect that the movement of the magnetic body can be reliably detected by the magnetic detector.

  In the invention according to claim 3 of the present invention, the shape of the inner wall of the container as viewed from the upper surface is an elliptical shape or a shape constituting a part of the elliptical shape. In addition, since the shape of the inner wall of the container is an elliptical shape or a shape constituting a part of the elliptical shape, it is possible to obtain an operational effect that the intensity of vibration that can be detected by the curvature can be changed.

  In the invention according to claim 4 of the present invention, in particular, the shape of the magnetic body viewed from the top is circular, and according to this configuration, the shape of the magnetic body viewed from the top is circular. The effect of being able to smoothly move the magnetic body along the inner wall of the container is obtained.

  According to the fifth aspect of the present invention, in particular, a plurality of magnetic detectors are provided so as to be symmetrical with respect to a straight line connecting the central portion of the internal space and the stationary region. For example, since a plurality of magnetic detectors are provided so as to be line symmetric with respect to a straight line connecting the central portion of the internal space and the stationary region, the magnetic body that has moved in one direction with respect to the stationary region due to vibration, It is also possible to detect when moving in the opposite direction with respect to the stationary region due to the reaction, thereby obtaining an effect that vibration can be detected with higher accuracy.

  In the invention according to claim 6 of the present invention, in particular, the number of magnetic detectors formed on both sides of a straight line connecting the central portion of the internal space and the stationary region is the same. According to the present invention, since the number of magnetic detectors formed on both sides of the straight line connecting the central portion of the internal space and the stationary region is the same, the effect of performing stable vibration detection can be obtained. It is.

  According to the seventh aspect of the present invention, in particular, the magnetic detector is provided on at least one side of a straight line connecting the central portion of the internal space and the stationary region. According to this configuration, the central portion of the internal space is provided. Since the magnetic detector is provided on at least one side of the straight line connecting the stationary region and the stationary region, the effect of detecting the magnitude of vibration can be obtained depending on the number of magnetic detectors that have detected the magnetic material.

  In the invention described in claim 8 of the present invention, in particular, a magnetic generator is provided so as to face both sides of the magnetic detector, and the magnetic generator is configured so that different poles face each other. According to the configuration, a magnetic generator is provided so as to face both sides of the magnetic detector, and the magnetic generator is configured so that different poles face each other, so that more magnetic flux is applied to the magnetic detector. The effect of being able to be obtained is obtained.

  The invention according to claim 9 of the present invention is particularly configured so that one magnetic generator can apply magnetism to a plurality of magnetic detectors. Since the generator is configured to be able to apply magnetism to a plurality of magnetic detectors, the magnetic generator can be formed at one time, thereby improving the productivity. It is obtained.

  According to the tenth aspect of the present invention, in particular, a concave portion is provided only in a stationary region where a magnetic body provided on the upper surface of the substrate can rest. According to this configuration, the upper surface of the substrate is provided. Since the magnetic body located at the position is provided with a recess only in the resting region where the magnetic body can be stopped, the recess does not cause the magnetic body to move despite vibrations, and this causes false detection. The effect that it can prevent is obtained.

  According to the eleventh aspect of the present invention, in particular, a concave portion is provided in a region where a magnetic body provided on the upper surface of the substrate is movable. According to this configuration, the magnetic material is positioned on the upper surface of the substrate. Since the concave portion is provided in the movable region of the magnetic body provided as described above, the magnetic body surely moves along the inner wall of the concave portion, so that vibration can be reliably detected. A working effect can be obtained.

  The invention according to claim 12 of the present invention is such that the shape of the inner wall of the container as viewed from the side direction is a shape that constitutes a part of a circular shape or an elliptical shape. Since the shape of the inner wall of the container viewed from above is a shape that forms part of a circular or elliptical shape, the distance from the magnetic generator will change if the magnetic material vibrates in a direction perpendicular to the substrate. As a result, an effect of being able to detect vibration in a direction perpendicular to the substrate can be obtained.

  As described above, the vibration detection sensor of the present invention includes a substrate, a container provided on the upper surface of the substrate and having an inner wall, an internal space formed between the upper surface of the substrate and the inner wall of the container, A magnetic body that is housed in an internal space and moves on the substrate while being in contact with an inner wall of the container; and a stationary region in which the magnetic body provided on the upper surface of the substrate can rest. Alternatively, the container is provided with a magnetic detector corresponding to an area where the magnetic body excluding the stationary area can move, and a magnetic generator for applying magnetism to the magnetic detector is provided in a part other than the stationary area. Therefore, when the magnetic body is located in a resting area where the magnetic body can be stopped, the magnetic body is not restrained by the magnetic generator. Due to deterioration and magnetic generator Since the constraint of magnetic influence is reduced to give the detection of the oscillation state of the electronic apparatus, in which an excellent effect that the vibration state of the electronic device can be accurately detected.

(Embodiment 1)
Hereinafter, the first aspect of the present invention will be described with reference to the first embodiment.

  1 is a top view of a main part of a vibration detection sensor according to Embodiment 1 of the present invention, and FIG. 2 is a cross-sectional view taken along line AA of FIG.

  As shown in FIGS. 1 and 2, the vibration detection sensor according to Embodiment 1 of the present invention includes a substrate 11, a container 13 provided on the upper surface of the substrate 11 and having an inner wall 12, and an upper surface of the substrate 11. An inner space 14 formed between the inner wall 12 of the container 13 and a magnetic body 15 which is accommodated in the inner space 14 of the container 13 and moves on the substrate 11 while being in contact with the inner wall 12 of the container 13. It is equipped with.

  In the above configuration, as shown in FIG. 3, the substrate 11 includes a rectangular insulating substrate 16 made of an insulating material such as alumina, and a glass glaze layer 17 provided on the upper surface of the insulating substrate 16. A magnetic detector 18 and two magnetic generators 19 provided on the upper surface of the glass glaze layer 17, and a protective film 20 provided on the upper surfaces of the magnetic detector 18 and the two magnetic generators 19. The surface of the protective film 20 constitutes the surface of the substrate 11.

  The container 13 is made of an insulating and nonmagnetic resin material, and is bonded to the upper surface of the substrate 11 with an adhesive or the like. Here, the “upward” direction represents a direction perpendicular to the upper surface of the substrate 11 as indicated by an arrow in FIG. 2. Therefore, when the substrate 11 is parallel to the vertical direction, the “up” direction is parallel to the horizontal plane.

  Further, the inner wall 12 of the container 13 is smooth, and the shape thereof is circular when viewed from above, and the shape of the inner wall 12 is thus circular when viewed from above. In this case, the centrifugal force can be applied to the magnetic body 15 that is moved by vibration compared to the case where the inner wall 12 is linear, so that the magnetic body 15 can be reliably brought into contact with the inner wall 12, Thereby, the movement of the magnetic body 15 can be reliably detected by the magnetic detector 18.

  In addition, in FIG. 1, although the shape of the inner wall 12 of the container 13 seen from the upper surface is circular shape, as shown in FIG. 4, it is good also as elliptical shape. In the case of an elliptical shape, the intensity of vibration that can be detected can be changed by changing the curvature of the inner wall 12 of the container 13 with which the magnetic body 15 contacts by vibration. In addition, the shape of the inner wall 12 of the container 13 as viewed from above is a shape constituting a part of a circular shape or a part of an elliptical shape, that is, only a portion of the entire inner wall 12 that is in contact with the magnetic body 15 due to vibration. You may make it the structure which is circular shape or elliptical shape.

  The internal space 14 is a space formed between the upper surface of the substrate 11 and the container 13, and a magnetic material 15 is accommodated in the internal space 14 so as to be movable.

  The magnetic body 15 moves on the upper surface of the substrate 11 along the inner wall 12 of the container 13 when vibration parallel to the paper surface in FIG. 1 occurs. The magnetic body 15 is made of an Fe-based alloy, and is particularly made of permalloy having a high magnetic permeability and a low coercive force. And since the shape of this magnetic body 15 is a sphere and the shape seen from the upper surface is circular as shown in FIG. 1, this magnetic body 15 is smoothly moved along the inner wall 12 of the container 13. be able to.

  If the magnetic body 15 is lubricated and plated containing polytetrafluoroethylene or the like, the coefficient of friction is lowered, so that the movement of the magnetic body 15 is smooth, and the magnetic body 15 is resistant to wear. Since it has high corrosion resistance and excellent corrosion resistance, it does not rust and can improve reliability. When the magnetic body 15 is not oscillating, the magnetic body 15 stops at the stationary region 21 on the upper surface of the substrate 11, and when the vibration occurs, the magnetic body 15 oscillates while contacting the inner wall 12 of the container 13 around the stationary region 21. Is.

  The magnetic detector 18 is composed of a thin film magnetoresistive element formed in a pattern formed by folding a plurality of ferromagnetic thin films made of NiCo, NiFe or the like. The magnetoresistive element has a magnetic field in the current direction. When applied vertically, the resistance value change rate is maximized and the resistance value decreases. The magnetic detector 18 is not limited to a magnetoresistive element, and a GMR or a Hall element may be used. Further, the magnetic detector 18 is located between the two magnetic generators 19 at a position spaced apart from the stationary region 21 by a certain distance.

  And this magnetic detector 18 is provided in the position corresponding to the area | region to which the magnetic body 15 can move on the upper surface of the board | substrate 11, as shown in FIG. Further, the magnetic detector 18 is provided so as to be line-symmetric with respect to a straight line (the BB line in FIG. 1, hereinafter referred to as “center line”) connecting the central portion of the internal space 14 and the stationary region 21. Therefore, the number of magnetic detectors 18 provided on both sides of the center line is two, which is the same number.

  The magnetic detector 18 may be provided inside the inner wall 12 of the container 13 or may be provided only on one side of the center line. Further, the number of magnetic detectors 18 provided on one side of the center line may be one, or three or more.

  Further, the two magnetic generators 19 provided so as to face both sides of the magnetic detector 18 are constituted by two thin film magnets for applying magnetism to one magnetic detector 18, and these are mutually connected. It is configured so that different poles face each other, that is, the N pole and the S pole face each other. By adopting such a configuration, magnetism is applied in a direction parallel to the upper surface of the nearest substrate 11. The thin-film magnet is made of a material such as a CoPt alloy, a CoCrPt alloy, or a ferrite whose magnetic field direction is set by magnetization. 15 is provided in the vicinity of the magnetic detector 18 so as not to constrain 15. When one magnetic generator 19 is configured to be able to apply magnetism to a plurality of magnetic detectors 18, the magnetic generator 19 can be formed at a time, thereby improving productivity. It is something that can be done. Further, the position of the magnetic generator 19 is not limited to the position shown in FIG. 3 as long as magnetism can be applied to the magnetic detector 18.

  Next, the operation of the vibration detection sensor according to Embodiment 1 of the present invention will be described.

  As shown in FIG. 5, when there is no magnetic body 15 above the magnetic detector 18, the magnetic lines generated by the magnetic generator 19 are applied to the magnetic detector 18, so that the magnetic detector 18 exhibits a low resistance value. . As shown in FIG. 6, when the magnetic body 15 exists above the magnetic detector 18, the magnetic lines generated by the magnetic generator 19 are absorbed by the magnetic body 15 and are not applied to the magnetic detector 18. Therefore, the magnetic detector 18 exhibits a high resistance value.

  As described above, since the position of the magnetic body 15 moved by vibration can be detected by the change in the resistance value of each magnetic detector 18, the vibration of the magnetic body 15 (vibration detection sensor is mounted). (Vibration of equipment) can be detected.

  For example, when the magnetic body 15 is positioned in the stationary region 21 as shown in FIG. 1, the resistance values of the four magnetic detectors 18 do not change, but as shown in FIG. Is moved to the upper surface of one magnetic detector 18, the resistance value of the magnetic detector 18 changes, so that this vibration can be detected.

  At this time, the four magnetic detectors 18 constitute a full bridge circuit having an input electrode 22, a land electrode 23, and output electrodes 24a and 24b as shown in FIG. And the resistance value change of the four magnetic detectors 18 is detected by measuring the voltages of the output electrodes 24a and 24b, the position, time and pitch of the magnetic body 15 are detected, and the magnitude, speed, The presence or absence is measured.

  In the first embodiment of the present invention described above, the magnetic body 15 that moves on the substrate 11 while being in contact with the inner wall 12 of the container 13 and the magnetic body 15 that is provided on the upper surface of the substrate 11 are stationary. A possible stationary region 21, a magnetic detector 18 provided on the substrate 11 or the container 13 corresponding to a region where the magnetic body 15 excluding the stationary region 21 is movable, and a portion other than the stationary region 21 And a magnetic generator 19 for applying magnetism to the magnetic detector 18, the magnetic body 15 is magnetic when it is located in a stationary region 21 where the magnetic body 15 can rest. This prevents the generator 19 from being restrained, so that the deterioration of the magnetic force of the magnetic generator 19 due to long-term use and the restraint of the magnetic body 15 by the magnetic generator 19 contribute to the detection of the vibration state of the electronic device. Because sound is reduced, those having the effect that the vibration state of the electronic device can be accurately detected.

  That is, the magnetic generator 19 does not physically restrain the magnetic body 15 but merely applies magnetism to the magnetic body 15 or the magnetic detector 18, so that even if the magnetic force of the magnetic generator 19 decreases. It does not affect the vibration detection accuracy of electronic equipment.

  Further, since there is nothing that restricts the movement of the magnetic body 15, vibration can be detected regardless of the direction of vibration with respect to the vertical direction, for example, parallel to the horizontal direction.

  In addition, since the inner wall 12 of the container 13 has a circular shape within a range in which the magnetic body 15 can move, the magnetic body 15 can be smoothly moved along the inner wall 12 of the container 13.

  Further, since a plurality of magnetic detectors 18 are provided so as to be line-symmetric with respect to a straight line connecting the central portion of the inner space 14 of the container 13 and the stationary region 21, the magnetic field is not affected by vibration. It is also possible to detect when the magnetic body 15 that has moved in the direction, for example, the left side, moves in the opposite right direction due to a reaction, and thereby can detect vibrations with higher accuracy.

  Furthermore, since the number of magnetic detectors 18 formed on both sides of a straight line connecting the central portion of the internal space 14 of the container 13 and the stationary region 21 is the same, stable vibration can be detected. .

  In addition, since a plurality of (two) magnetic detectors 18 are provided on both the left and right sides of the straight line connecting the central portion of the internal space 14 of the container 13 and the stationary region 21, the magnetic detector that detects the magnetic body 15. The magnitude of vibration can be detected by the number of 18.

  In addition, if the container 13 is arranged so that the stationary region 21 is at the lowest position in the vertical direction so that the direction of the arrow in FIG. 1 is vertically downward, the vibration in the horizontal direction can be easily detected. It is.

(Embodiment 2)
The second and second embodiments of the present invention will be described below.

  9 is a top view of the main part of the vibration detection sensor according to Embodiment 2 of the present invention, and FIG. 10 is a cross-sectional view taken along the line DD of FIG.

  In the second embodiment of the present invention, components having the same configurations as those of the first embodiment of the present invention described above are denoted by the same reference numerals, and description thereof is omitted.

  9 and 10, the second embodiment of the present invention is different from the first embodiment of the present invention described above in that the magnetic body 15 provided on the upper surface of the substrate 11 is movable. The doughnut-shaped concave portion 25 is provided in a state where the circular portion 11a is left in the central portion of the upper surface of the substrate 11.

  In the above-described configuration, the magnetic body 15 moves reliably along the donut-shaped recess 25, so that an effect that vibration can be reliably detected can be obtained.

  In particular, if the concave portion 25 is provided only in the stationary region 21 where the magnetic body 15 can rest on the upper surface of the substrate 11, the concave portion 25 can prevent the magnetic body 15 from moving despite no vibration. Therefore, erroneous detection can be prevented reliably.

  In addition, if the depth of the concave portion 25 of the stationary region 21 is made deeper than the concave portion 25 of the region in which the magnetic body 15 is movable, erroneous detection can be reliably prevented and vibration can be reliably detected. Is.

(Embodiment 3)
Hereinafter, the invention described in claim 12 of the present invention will be described using the third embodiment.

  FIG. 11 is a cross-sectional view of a vibration detection sensor according to Embodiment 3 of the present invention.

  In the third embodiment of the present invention, components having the same configuration as the configuration of the first embodiment of the present invention described above are denoted by the same reference numerals, and the description thereof is omitted.

  In FIG. 11, the third embodiment of the present invention is different from the first embodiment of the present invention described above in that the shape of the inner wall 12 of the container 13 viewed from the side surface direction is a shape that forms a part of a circular shape. This is the point.

  In the above configuration, since the inner wall 12 of the container 13 has a dome shape, the magnetic body 15 moves along the inner wall 12.

  In the first and second embodiments of the present invention described above, vibration parallel to the paper surface in FIG. 1 can be detected. However, in the third embodiment of the present invention, the paper surface in FIG. It is possible to detect vibration in a vertical direction (up and down direction in FIG. 11, that is, a direction perpendicular to the substrate 11).

  In the third embodiment of the present invention described above, when the magnetic body 15 moves away from the substrate 11 and moves along the circular inner wall 12 when vibrated in the direction perpendicular to the substrate 11, the magnetic body 15 and the magnetic detector Accordingly, the magnetic strength detected by the magnetic detector 18 also changes, so that vibration in a direction perpendicular to the substrate 11 can be detected.

  In addition, the shape of the inner wall 12 of the container 13 seen from the side surface direction is not limited to the shape constituting a part of a circular shape, and may be a shape constituting a part of an elliptical shape.

  The vibration detection sensor according to the present invention has an effect of being able to accurately detect the vibration state of an electronic device, and particularly for detecting the posture of various electronic devices and detecting the vibration state of the electronic device. This is useful in vibration detection sensors and the like.

The top view of the principal part of the vibration detection sensor in Embodiment 1 of this invention AA line sectional view of FIG. CC sectional view of FIG. Top view of the main part showing another example of the vibration detection sensor Sectional view of the main part showing the operating principle of the vibration detection sensor Sectional view of the main part showing the operating principle of the vibration detection sensor Top view of the main part of the vibration detection sensor Signal detection circuit diagram of the vibration detection sensor The top view of the principal part of the vibration detection sensor in Embodiment 2 of this invention DD sectional view of FIG. Sectional drawing of the vibration detection sensor in Embodiment 3 of this invention Cross-sectional view of a conventional vibration detection sensor

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Board | substrate 12 Inner wall 13 Container 14 Internal space 15 Magnetic body 18 Magnetic detector 19 Magnetic generator 21 Rest area | region 25 Recessed part

Claims (12)

A substrate, a container provided on the upper surface of the substrate and having an inner wall, an internal space formed between the upper surface of the substrate and the inner wall of the container, and contained in the inner space, and on the inner wall of the container A magnetic body that moves on the substrate while being in contact therewith, and a stationary region that is provided on an upper surface of the substrate and that allows the magnetic body to rest, wherein the substrate or container excludes the stationary region. A vibration detection sensor in which a magnetic detector is provided corresponding to a region where the magnetic body is movable, and a magnetic generator for applying magnetism to the magnetic detector is provided in a portion other than the stationary region. The vibration detection sensor according to claim 1, wherein the shape of the inner wall of the container as viewed from above is a circular shape or a shape constituting a part of the circular shape. The vibration detection sensor according to claim 1, wherein the shape of the inner wall of the container as viewed from above is an elliptical shape or a shape constituting a part of the elliptical shape. The vibration detection sensor according to claim 1, wherein the shape of the magnetic body viewed from above is a circular shape. The vibration detection sensor according to claim 1, wherein a plurality of magnetic detectors are provided so as to be line-symmetric with respect to a straight line connecting the central portion of the internal space and the stationary region. The vibration detection sensor according to claim 1, wherein the number of magnetic detectors formed on both sides of a straight line connecting the central portion of the internal space and the stationary region is the same. The vibration detection sensor according to claim 1, wherein a magnetic detector is provided on at least one side of a straight line connecting the center of the internal space and the stationary region. The vibration detection sensor according to claim 1, wherein a magnetic generator is provided so as to face both sides of the magnetic detector, and the magnetic generator is configured so that different poles face each other. The vibration detection sensor according to claim 1, wherein one magnetic generator is configured to apply magnetism to a plurality of magnetic detectors. The vibration detection sensor according to claim 1, wherein a concave portion is provided only in a stationary region where the magnetic body provided on the upper surface of the substrate can rest. The vibration detection sensor according to claim 1, wherein a concave portion is provided in an area in which a magnetic body provided on the upper surface of the substrate can move. The vibration detection sensor according to claim 1, wherein the shape of the inner wall of the container as viewed from the side is a shape that forms a part of a circular shape or an elliptical shape.

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