JP2009037764A - Ion beam drawing acceleration method and device - Google Patents

Ion beam drawing acceleration method and device Download PDF

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JP2009037764A
JP2009037764A JP2007198996A JP2007198996A JP2009037764A JP 2009037764 A JP2009037764 A JP 2009037764A JP 2007198996 A JP2007198996 A JP 2007198996A JP 2007198996 A JP2007198996 A JP 2007198996A JP 2009037764 A JP2009037764 A JP 2009037764A
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JP4771230B2 (en
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Keiji Kashiwagi
啓次 柏木
Masahiro Okamura
昌宏 岡村
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ion beam drawing acceleration method and a device with diffusion (loss) due to space charge effects alleviated, while ion beams drawn out of ion sources enter an acceleration/focusing region by a beam acceleration electrode. <P>SOLUTION: The ion source 3 has a plasma generating target 3d installed inside a vessel-like high-voltage terminal 3b arranged in an insulated state inside a vacuum vessel 3a of a grounding potential coupled with a vessel 4a of a linear accelerator 4, and a cylindrical electrode 3f for transporting the plasma inside the high-voltage terminal 3b generated from the plasma generating target 3d up to a beam accelerating/focusing space 4b of the linear accelerator 4 arranged at the high-voltage terminal 3b, so that a tip position of the cylindrical electrode 3f is to conform to a position of an open end of a beam accelerating electrode 4c forming the ion beam accelerating/focusing space 4b of the linear accelerator 4. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、イオン源プラズマからイオンビームを引き出して線形加速器に入射して加速するイオンビーム引出加速方法及び装置に関する。   The present invention relates to an ion beam extraction acceleration method and apparatus for extracting and accelerating an ion beam from an ion source plasma and entering a linear accelerator.

イオンビームを加速器で加速する際には、通常、イオン源のプラズマからイオンビームを引き出して線形加速器まで輸送した後に該線形加速器に入射して加速する方法が採られている。   When accelerating an ion beam with an accelerator, a method is generally employed in which the ion beam is extracted from the plasma of the ion source, transported to the linear accelerator, and then incident on the linear accelerator for acceleration.

しかしながら、このようなイオンビーム引出加速方法では、レーザーイオン源等をイオン源に用いた場合に得られる高強度イオンビームでは、空間電荷効果が低強度イオンビームの場合よりも大きいために、イオンビームが線形加速器内部のビーム加速電極に到達する前に拡散して損失してしまうという問題があった。   However, in such an ion beam extraction acceleration method, the high-intensity ion beam obtained when a laser ion source or the like is used as the ion source has a larger space charge effect than the low-intensity ion beam. Has a problem that it diffuses and loses before reaching the beam accelerating electrode inside the linear accelerator.

このような空間電荷効果による拡散（損失）を軽減するために、線形加速器の直前でイオンビームを引き出す方法が提案されている。   In order to reduce the diffusion (loss) due to the space charge effect, a method of extracting an ion beam immediately before the linear accelerator has been proposed.

特開２００２−３２９６００号公報JP 2002-329600 A

しかしながら、線形加速器の直前でイオンビームを引き出す方法でも、線形加速器に入射されたイオンビームは、線形加速器内部においてビーム加速電極に到達するまでに空間電荷効果によって拡散し、ビーム加速電極による加速可能領域から外れる粒子が多くなり、結果的に多大なビーム損失を引き起こすことが問題となっている。   However, even in the method of extracting the ion beam immediately before the linear accelerator, the ion beam incident on the linear accelerator is diffused by the space charge effect before reaching the beam accelerating electrode inside the linear accelerator, and can be accelerated by the beam accelerating electrode. As a result, there is a problem that a large number of particles are removed from the surface, resulting in a large beam loss.

本発明の目的は、イオン源のプラズマから引き出したイオンビームがビーム加速電極による加速・集束空間領域に入射するまでの間に空間電荷効果によって拡散して損失する問題を改善することにある。   An object of the present invention is to improve the problem that an ion beam extracted from plasma of an ion source is diffused and lost by a space charge effect before entering an acceleration / focusing space region by a beam acceleration electrode.

本発明のイオンビーム引出加速方法は、イオン源の内部で発生させたプラズマからイオンビームを引き出して線形加速器に入射し、線形加速器内に入射されたイオンビームを該線形加速器のビーム加速電極が生成する加速電場によって加速するイオンビーム引出加速方法において、
接地電位の真空容器内に絶縁状態に設置した容器状の高電圧ターミナルから筒状電極を外側に伸ばし、その先端を前記ビーム加速電極の開口端の位置に一致、または開口内に進入するように設置することにより、前記高電圧ターミナル内に設置したプラズマ発生ターゲットにレーザー光を照射することによって発生したプラズマを前記ビーム加速電極の開口端または開口内までプラズマ状態を保ったまま導き、前記ビーム加速電極が生成するビーム加速・集束空間内に直接イオンビームを引き出すことを特徴とするものであり、
イオンビーム引出加速装置は、内部で発生させたプラズマからイオンビームを引き出すイオン源と、前記イオン源のプラズマから引き出されたイオンビームを加速・集束するための加速・集束電場を生成するビーム加速電極を有する線形加速器とを備えたイオンビーム引出加速装置において、
前記イオン源は、接地電位の真空容器内に絶縁状態に設置した容器状の高電圧ターミナル内にプラズマ発生ターゲットを設置し、前記プラズマ発生ターゲットから発生した前記高電圧ターミナル内のプラズマを前記線形加速器のビーム加速電極まで導く筒状電極を前記高電圧ターミナルに設けて、前記筒状電極の先端位置が前記線形加速器のイオンビーム加速・集束空間を形成するビーム加速電極の開口端の位置に一致または開口内に進入するように設置したことを特徴とするものである。 According to the ion beam extraction acceleration method of the present invention, an ion beam is extracted from a plasma generated inside an ion source and is incident on a linear accelerator, and an ion beam incident on the linear accelerator is generated by a beam acceleration electrode of the linear accelerator. In an ion beam extraction acceleration method accelerated by an accelerating electric field,
A cylindrical electrode is extended outward from a container-like high-voltage terminal placed in an insulated state in a grounded vacuum vessel so that its tip coincides with the opening end of the beam acceleration electrode or enters the opening. By installing, the plasma generation target installed in the high voltage terminal is guided to the plasma generated by irradiating the laser beam to the opening end or the opening of the beam acceleration electrode while maintaining the plasma state, the beam acceleration It is characterized by extracting the ion beam directly into the beam acceleration / focusing space generated by the electrode,
An ion beam extraction accelerator includes an ion source that extracts an ion beam from plasma generated inside, and a beam acceleration electrode that generates an acceleration / focusing electric field for accelerating / focusing the ion beam extracted from the plasma of the ion source. An ion beam extraction accelerator comprising a linear accelerator having
The ion source includes a plasma generation target installed in a container-like high voltage terminal installed in an insulated state in a vacuum container at a ground potential, and the linear accelerator accelerates the plasma in the high voltage terminal generated from the plasma generation target. A cylindrical electrode leading to the beam accelerating electrode is provided at the high voltage terminal, and the tip position of the cylindrical electrode coincides with the position of the opening end of the beam accelerating electrode forming the ion beam accelerating / focusing space of the linear accelerator, or It is characterized by being installed so as to enter into the opening.

本発明は、イオン源で生成したプラズマを筒状電極によって線形加速器内のビーム加速電極の入射側開口端までプラズマ状態を保ったまま輸送することから、従来のようにイオンビームを引き出してから加速電極に到達するまでの領域で該イオンビームが空間電荷効果により発散するという問題がなく、イオンビーム損失の問題を改善することができる。   In the present invention, the plasma generated by the ion source is transported while maintaining the plasma state to the incident side opening end of the beam acceleration electrode in the linear accelerator by the cylindrical electrode. There is no problem that the ion beam diverges due to the space charge effect in the region up to the electrode, and the problem of ion beam loss can be improved.

従って、従来よりも高い効率でイオンビームを線形加速器に入射することができ、従来よりも高強度のイオンビーム加速を実現することができる。   Therefore, the ion beam can be incident on the linear accelerator with higher efficiency than before, and ion beam acceleration with higher intensity than before can be realized.

また、イオン源は、接地電位の真空容器内に絶縁支持により設置した高電圧ターミナル内でプラズマを発生させ、このプラズマを筒状電極によって線形加速器内に導くように構成しているので、イオン源の周囲を電気的に保護する防護柵などが不要となることから、装置を小型に構成することができる。   In addition, the ion source is configured to generate plasma in a high voltage terminal installed in an insulating support in a vacuum container at ground potential, and to guide this plasma into a linear accelerator by a cylindrical electrode. Since a protective fence or the like that electrically protects the surroundings is not required, the apparatus can be made compact.

本発明のイオンビーム引出加速方法は、イオン源の内部で発生させたプラズマからイオンビームを引き出して線形加速器に入射し、線形加速器内に入射されたイオンビームを該線形加速器のビーム加速電極が生成する加速電場によって加速するイオンビーム引出加速方法において、
接地電位の真空容器内に絶縁状態に設置した容器状の高電圧ターミナルから筒状電極を外側に伸ばし、その先端を前記ビーム加速電極の開口端の位置に一致、または開口内に進入するように設置することにより、前記高電圧ターミナル内に設置したプラズマ発生ターゲットにレーザー光を照射することによって発生したプラズマを前記ビーム加速電極の開口端または開口内までプラズマ状態を保ったまま導き、前記ビーム加速電極が生成するビーム加速・集束空間内に直接イオンビームを引き出すように行い、
また、イオンビーム引出加速装置は、内部で発生させたプラズマからイオンビームを引き出すイオン源と、前記イオン源のプラズマから引き出されたイオンビームを加速・集束するための加速・集束電場を生成するビーム加速電極を有する線形加速器とを備えたイオンビーム引出加速装置において、
前記イオン源は、接地電位の真空容器内に絶縁状態に設置した容器状の高電圧ターミナル内にプラズマ発生ターゲットを設置し、前記プラズマ発生ターゲットから発生した前記高電圧ターミナル内のプラズマを前記線形加速器のビーム加速電極まで導く筒状電極を前記高電圧ターミナルに設けて、前記筒状電極の先端位置が前記線形加速器のイオンビーム加速・集束空間を形成するビーム加速電極の開口端の位置に一致または開口内に進入するように設置した構成とする。 According to the ion beam extraction acceleration method of the present invention, an ion beam is extracted from a plasma generated inside an ion source and is incident on a linear accelerator, and an ion beam incident on the linear accelerator is generated by a beam acceleration electrode of the linear accelerator. In an ion beam extraction acceleration method accelerated by an accelerating electric field,
A cylindrical electrode is extended outward from a container-like high-voltage terminal placed in an insulated state in a grounded vacuum vessel so that its tip coincides with the opening end of the beam acceleration electrode or enters the opening. By installing, the plasma generation target installed in the high voltage terminal is guided to the plasma generated by irradiating the laser beam to the opening end or the opening of the beam acceleration electrode while maintaining the plasma state, the beam acceleration The ion beam is extracted directly into the beam acceleration / focusing space generated by the electrode,
The ion beam extraction accelerator includes an ion source that extracts an ion beam from plasma generated inside, and a beam that generates an acceleration / focusing electric field for accelerating / focusing the ion beam extracted from the plasma of the ion source. In an ion beam extraction accelerator device including a linear accelerator having an acceleration electrode,
The ion source includes a plasma generation target installed in a container-like high voltage terminal installed in an insulated state in a vacuum container at a ground potential, and the linear accelerator accelerates the plasma in the high voltage terminal generated from the plasma generation target. A cylindrical electrode leading to the beam accelerating electrode is provided at the high voltage terminal, and the tip position of the cylindrical electrode coincides with the position of the opening end of the beam accelerating electrode forming the ion beam accelerating / focusing space of the linear accelerator, or It is set as the structure installed so that it may enter into opening.

本発明は、イオン源で発生したプラズマをプラズマ状態を保ったままビーム加速電極まで輸送する筒状電極を設置することにより、通常は加速器外で行うプラズマからのイオンビーム引き出しを線形加速器内のビーム加速電極先端及びその内部で行い、イオンビームを引き出した直後にビーム加速電極が生成する集束電場によって集束させて高効率のビーム入射を行うことにより、数十ミリアンペア以上の高強度のイオンビーム生成を実現するものである。   In the present invention, by installing a cylindrical electrode that transports plasma generated in an ion source to a beam acceleration electrode while maintaining the plasma state, ion beam extraction from plasma that is normally performed outside the accelerator is performed in a beam in a linear accelerator. A high-efficiency ion beam of several tens of milliamps or more is generated by focusing at a focused electric field generated by the beam accelerating electrode immediately after extracting the ion beam and performing high-efficiency beam injection immediately after the ion beam is extracted. It is realized.

この実施例１におけるイオンビーム引出加速装置は、図１に示すように、レーザー発生装置１、反射鏡２ａ，２ｂ、レーザーイオン源３およびＲＦＱ線形加速器（もしくはドリフトチューブ型線形加速器）４によって構成される。   As shown in FIG. 1, the ion beam extraction accelerator according to the first embodiment includes a laser generator 1, reflecting mirrors 2a and 2b, a laser ion source 3, and an RFQ linear accelerator (or a drift tube linear accelerator) 4. The

レーザーイオン源３は、その内部を真空状態とすることができるように構成した接地電位の真空容器３ａ内に、碍子によって前記真空容器３ａに対して絶縁状態に容器状の高電圧ターミナル３ｂを設置し、この高電圧ターミナル３ｂ内にレーザー集光反射鏡３ｃとプラズマ発生ターゲット３ｄを設置している。前記高電圧ターミナル３ｂは、外部の高電圧電源（図示省略）によって昇圧する。前記レーザー集光反射鏡３ｃは、中心にプラズマの通過を許容する穴を形成した反射鏡支持部材３ｅによって支持する。また、前記真空容器３ａは該真空容器３ａ内にレーザー光５を入射可能にする気密状態のレーザー光入射窓３ａ１を備え、高電圧ターミナル３ｂは前記真空容器３ａのレーザー光入射窓３ａ１から入射したレーザー光５を前記レーザー集光反射鏡３ｃまで到達させるための通過穴３ｂ１を備える。   The laser ion source 3 has a container-like high-voltage terminal 3b installed in an insulated state with respect to the vacuum vessel 3a by an insulator in a vacuum vessel 3a having a ground potential configured so that the inside thereof can be in a vacuum state. The laser condensing / reflecting mirror 3c and the plasma generation target 3d are installed in the high voltage terminal 3b. The high voltage terminal 3b is boosted by an external high voltage power supply (not shown). The laser condensing / reflecting mirror 3c is supported by a reflecting mirror support member 3e having a hole in the center that allows passage of plasma. The vacuum vessel 3a includes an airtight laser beam incident window 3a1 that allows the laser beam 5 to enter the vacuum vessel 3a, and the high voltage terminal 3b is incident from the laser beam incident window 3a1 of the vacuum vessel 3a. A passage hole 3b1 for allowing the laser beam 5 to reach the laser condensing / reflecting mirror 3c is provided.

また、このレーザーイオン源３は、前記プラズマ発生ターゲット３ｄから発生して前記反射鏡支持部材３ｅの穴を通過してきたプラズマをプラズマ状態を保ったままの状態で前記線形加速器４のビーム加速電極４ｃの位置まで輸送するための円筒形の筒状電極３ｆを真空容器３ａの外側まで突出するように備える。   Further, the laser ion source 3 is configured such that the plasma generated from the plasma generation target 3d and passing through the hole of the reflector support member 3e remains in the plasma state while the plasma acceleration electrode 4c of the linear accelerator 4 is maintained. A cylindrical cylindrical electrode 3f for transporting to the position of is provided so as to protrude to the outside of the vacuum vessel 3a.

このレーザーイオン源３は、その真空容器３ａにおける筒状電極３ｆの突出側をＲＦＱ線形加速器４の容器４ａにおけるビーム入射部に直に結合するようにして設置し、前記筒状電極３ｆの先端が前記ＲＦＱ線形加速器４の容器４ａ内に挿入されるように構成する。   This laser ion source 3 is installed so that the protruding side of the cylindrical electrode 3f in the vacuum vessel 3a is directly coupled to the beam incident part in the vessel 4a of the RFQ linear accelerator 4, and the tip of the cylindrical electrode 3f is The RFQ linear accelerator 4 is configured to be inserted into the container 4a.

前記ＲＦＱ線形加速器４は、その内部にイオンビーム加速・集束空間４ｂを形成するビーム加速電極４ｃを備える。イオンビーム加速・集束空間４ｂのイオンビーム入射側を形成するビーム加速電極４ｃの開口端部４ｃ１は、図３に拡大して示すように、開口端に向って前記イオンビーム加速・集束空間４ｂの開口径を順次拡大するように形成しており、前記筒状電極３ｆの先端位置が前記イオンビーム加速・集束空間４ｂを形成する前記ビーム加速電極４ｃの開口端の位置に一致し、または開口内に進入するように構成する。   The RFQ linear accelerator 4 includes a beam acceleration electrode 4c that forms an ion beam acceleration / focusing space 4b therein. The opening end 4c1 of the beam accelerating electrode 4c that forms the ion beam incident side of the ion beam accelerating / focusing space 4b is enlarged toward the opening end of the ion beam accelerating / focusing space 4b as shown in FIG. The opening diameter of the cylindrical electrode 3f is formed so as to sequentially increase, and the position of the tip of the cylindrical electrode 3f coincides with the position of the opening end of the beam accelerating electrode 4c forming the ion beam accelerating / focusing space 4b. Configure to enter.

前記筒状電極３ｆは、その内径を大きくすることが望ましいが、この筒状電極３ｆの外径は、ＲＦＱ線形加速器４におけるビーム加速電極４ｃに接近することになるので該ビーム加速電極４ｃとの間に放電が起こらない程度の寸法に制限することが必要である。例えば、筒状電極３ｆの電圧を６０ｋＶ、ビーム加速電極４ｃ間の電圧を１２０ｋＶとすると、筒状電極３ｆの先端位置をビーム加速電極４ｃの開口端位置に一致させる形態では、筒状電極３ｆの外径を８ｍｍに制限して、内径を６ｍｍとして実施することができる。   Although it is desirable that the cylindrical electrode 3f has a larger inner diameter, the outer diameter of the cylindrical electrode 3f approaches the beam acceleration electrode 4c in the RFQ linear accelerator 4; It is necessary to limit the dimensions to such an extent that no electric discharge occurs between them. For example, when the voltage of the cylindrical electrode 3f is 60 kV and the voltage between the beam accelerating electrodes 4c is 120 kV, the tip position of the cylindrical electrode 3f matches the opening end position of the beam accelerating electrode 4c. The outer diameter can be limited to 8 mm and the inner diameter can be 6 mm.

このように構成したイオンビーム引出加速装置は、レーザー発生装置１によって発生したレーザー光５を平面反射鏡２ａ，２ｂで反射させてレーザーイオン源３の内部に入射する。レーザーイオン源３に入射したレーザー光５は、レーザー集光反射鏡３ｃによってプラズマ発生ターゲット３ｄ上に集光する。   The ion beam extraction accelerating device configured as described above causes the laser beam 5 generated by the laser generator 1 to be reflected by the plane reflecting mirrors 2 a and 2 b and enter the laser ion source 3. The laser beam 5 incident on the laser ion source 3 is focused on the plasma generation target 3d by the laser focusing / reflecting mirror 3c.

プラズマ発生ターゲット３ｄは、集光されたレーザー光５により表面が加熱されてプラズマを発生する。プラズマ発生ターゲット３ｄから発生するプラズマは、発生場所から全体としてターゲット垂直方向に重心速度をもって膨張し、反射鏡支持部材３ｅに形成された穴を通過して筒状電極３ｆの先端まで到達する。プラズマ発生部から筒状電極３ｆの先端までは同電位であることからプラズマ状態が保たれており、空間電荷効果によるイオンの拡散は起こらない。筒状電極３ｆの先端には高電圧ターミナル３ｂに印加した電圧に基づいた電場が存在することからプラズマからビーム加速・集束空間４ｂ内にイオンビームが引き出される。   The surface of the plasma generation target 3d is heated by the focused laser beam 5 to generate plasma. The plasma generated from the plasma generation target 3d expands with a center-of-gravity velocity in the target vertical direction as a whole from the generation location, passes through the hole formed in the reflecting mirror support member 3e, and reaches the tip of the cylindrical electrode 3f. The plasma state is maintained from the plasma generating part to the tip of the cylindrical electrode 3f because the potential is the same, and ion diffusion due to the space charge effect does not occur. Since an electric field based on the voltage applied to the high voltage terminal 3b exists at the tip of the cylindrical electrode 3f, an ion beam is extracted from the plasma into the beam acceleration / focusing space 4b.

筒状電極３ｆの先端はＲＦＱ線形加速器４のビーム加速電極４ｃの端と同じ位置にあることから、図４に示すように、筒状電極３ｆの先端から引き出されてＲＦＱ線形加速器４のイオンビーム加速・集束空間４ｂ内に入射されるイオンビーム６は、直ちにビーム加速電極４ｃによるビーム集束・加速電場の力を受けて集束・加速されることになる。   Since the tip of the cylindrical electrode 3f is at the same position as the end of the beam acceleration electrode 4c of the RFQ linear accelerator 4, the ion beam of the RFQ linear accelerator 4 is drawn out from the tip of the cylindrical electrode 3f as shown in FIG. The ion beam 6 incident on the acceleration / focusing space 4b is immediately focused and accelerated by receiving the force of the beam focusing / acceleration electric field by the beam acceleration electrode 4c.

したがって、レーザーイオン源３で発生させたプラズマがＲＦＱ線形加速器４のビーム加速電極４ｃまでプラズマ状態のまま輸送されるため、空間電荷効果による拡散はなく、また、イオンビームは引き出された直後にイオンビーム加速・集束空間４ｂによって集束力をうけるため、従来に比べて高効率なビーム入射が実現する。   Therefore, since the plasma generated by the laser ion source 3 is transported in the plasma state to the beam acceleration electrode 4c of the RFQ linear accelerator 4, there is no diffusion due to the space charge effect, and the ion beam is ionized immediately after being extracted. Since the focusing force is received by the beam accelerating / focusing space 4b, the beam can be incident more efficiently than before.

因みに、図５に示すように、線形加速器４に対する筒状電極３ｆの進入の程度が容器４ａの内側と一致する程度であると、図６に示すように、筒状電極３ｆの先端から容器４ａ内に入射するイオンビーム６は、ビーム加速電極４ｃによって形成されるイオンビーム加速・集束空間４ｂに到達するまでの間に空間電荷効果によって拡散して損失することから、ビーム加速電極４ｃによるイオンビーム加速・集束空間４ｂに入射して集束・加速される量が大幅に減少してしまうことになる。   Incidentally, as shown in FIG. 5, if the degree of penetration of the cylindrical electrode 3 f with respect to the linear accelerator 4 is the same level as the inside of the container 4 a, the container 4 a starts from the tip of the cylindrical electrode 3 f as shown in FIG. 6. The ion beam 6 incident on the inside diffuses and is lost due to the space charge effect before reaching the ion beam acceleration / focusing space 4b formed by the beam acceleration electrode 4c. The amount of light that is incident on the acceleration / focusing space 4b and is focused / accelerated is greatly reduced.

前述したように、線形加速器４におけるビーム加速電極４ｃ間の電圧を１２０ｋＶ、筒状電極３ｆの外径を８ｍｍ、内径を６ｍｍとし、プラズマ発生ターゲット３ｄにアルミニウムを使用し、線形加速器４に対する前記筒状電極３ｆの進入の程度を容器４ａの内側と一致（突出量が０ｍｍ）させた構成、容器４ａの内側から５ｍｍ突出させた構成、容器４ａの内側から１０ｍｍ突出させてビーム加速電極４ｃの端と一致する位置まで進入させた構成の３種類の装置について、前記筒状電極３ｆに印加する電圧を変えて線形加速器４から出力する総ての価数を含む全ビームのピーク電流値を計測した実験では、図７に示すように、筒状電極３ｆに印加する引出電圧を増加させると線形加速器４から出力する全ビームの電流値が増加し、６０ｋＶにおいて各実験装置で最大値となった。ここで、各実験装置における全ビームの電流値は、筒状電極３ｆの進入量が多いほど大きく、容器４ａの内側から１０ｍｍ突出させてビーム加速電極４ｃの端と一致する位置まで進入させた構成の装置において最も大きく（従来の突出量０ｍｍの構成に対して約２０％増加）なっており、この本発明の有用性を示している。   As described above, the voltage between the beam acceleration electrodes 4c in the linear accelerator 4 is 120 kV, the outer diameter of the cylindrical electrode 3f is 8 mm, the inner diameter is 6 mm, aluminum is used for the plasma generation target 3d, and the cylinder with respect to the linear accelerator 4 is used. A configuration in which the degree of intrusion of the electrode 3f coincides with the inside of the container 4a (projection amount is 0 mm), a configuration in which it protrudes 5 mm from the inside of the container 4a, and an end of the beam accelerating electrode 4c that protrudes 10 mm from the inside of the container 4a For the three types of devices that are configured to approach the same position, the peak current values of all beams including all valences output from the linear accelerator 4 were measured by changing the voltage applied to the cylindrical electrode 3f. In the experiment, as shown in FIG. 7, when the extraction voltage applied to the cylindrical electrode 3f is increased, the current values of all the beams output from the linear accelerator 4 are increased to 60 kV. Was the maximum value at Oite each experimental unit. Here, the current value of all beams in each experimental apparatus increases as the amount of penetration of the cylindrical electrode 3f increases, and is configured to project 10 mm from the inside of the container 4a to a position coincident with the end of the beam acceleration electrode 4c. This device is the largest (increase of about 20% with respect to the conventional structure having a protrusion amount of 0 mm), which shows the usefulness of the present invention.

また、この実施例におけるレーザーイオン源３は、ＲＦＱ線形加速器４の容器４ａに結合した接地電位の真空容器３ａ内に絶縁支持により設置した高電圧ターミナル３ｂ内でプラズマを発生させ、このプラズマを高電圧ターミナル３ｂと同電位の筒状電極３ｆによってＲＦＱ線形加速器４内のイオンビーム加速・集束空間４ｂまで導いてイオンビームを入射するように構成しているので、レーザーイオン源３の周囲を電気的に保護する防護柵などが不要となることから、装置を小型に構成することができる。   In addition, the laser ion source 3 in this embodiment generates plasma in a high voltage terminal 3b installed by insulating support in a vacuum container 3a of ground potential coupled to the container 4a of the RFQ linear accelerator 4, and this plasma is Since the cylindrical electrode 3f having the same potential as that of the voltage terminal 3b is guided to the ion beam acceleration / focusing space 4b in the RFQ linear accelerator 4, the ion beam is incident thereon. Since a protective fence or the like for protection is not required, the apparatus can be configured in a small size.

本発明のイオンビーム引出加速方法及び装置は、イオンビーム癌治療装置、イオン注入装置、材料表面改質装置、物理実験用加速器等に適用することができる。   The ion beam extraction acceleration method and apparatus of the present invention can be applied to an ion beam cancer treatment apparatus, an ion implantation apparatus, a material surface modification apparatus, a physical experiment accelerator, and the like.

本発明の実施例１を示すイオンビーム引出加速装置の外観図である。BRIEF DESCRIPTION OF THE DRAWINGS It is an external view of the ion beam extraction accelerator which shows Example 1 of this invention. 実施例１におけるレーザーイオン源とＲＦＱ線形加速器の縦断側面図である。It is a vertical side view of the laser ion source and RFQ linear accelerator in Example 1. 実施例１におけるレーザーイオン源とＲＦＱ線形加速器の結合部分を拡大して示す縦断側面図である。It is a vertical side view which expands and shows the coupling | bond part of the laser ion source and RFQ linear accelerator in Example 1. FIG. 実施例１におけるレーザーイオン源とＲＦＱ線形加速器の結合部分におけるイオンビームの移動状態を示す模式図である。It is a schematic diagram which shows the movement state of the ion beam in the coupling | bond part of the laser ion source and RFQ linear accelerator in Example 1. FIG. 従来装置におけるレーザーイオン源とＲＦＱ線形加速器の結合部分を拡大して示す縦断側面図である。It is a vertical side view which expands and shows the coupling | bond part of the laser ion source and RFQ linear accelerator in a conventional apparatus. 従来装置におけるレーザーイオン源とＲＦＱ線形加速器の結合部分におけるイオンビームの移動状態を示す模式図である。It is a schematic diagram which shows the movement state of the ion beam in the coupling | bond part of the laser ion source and RFQ linear accelerator in a conventional apparatus. ＲＦＱ線形加速器に対する筒状電極の進入の程度と線形加速器から出力する全ビームのピーク電流値の関係を示す特性図である。It is a characteristic view which shows the relationship between the grade of the approach of a cylindrical electrode with respect to a RFQ linear accelerator, and the peak current value of all the beams output from a linear accelerator.

符号の説明Explanation of symbols

１…レーザー発生装置、３…レーザーイオン源、３ａ…真空容器、３ｂ…高電圧ターミナル、３ｃ…レーザー集光反射鏡、３ｄ…プラズマ発生ターゲット、３ｆ…筒状電極、４…ＲＦＱ線形加速器、４ａ…容器、４ｂ…イオンビーム加速・集束空間、４ｃ…ビーム加速電極、４ｃ１…開口端部、５…レーザー光、６…イオンビーム。   DESCRIPTION OF SYMBOLS 1 ... Laser generator, 3 ... Laser ion source, 3a ... Vacuum container, 3b ... High voltage terminal, 3c ... Laser focusing reflector, 3d ... Plasma generating target, 3f ... Cylindrical electrode, 4 ... RFQ linear accelerator, 4a ... container, 4b ... ion beam acceleration / focusing space, 4c ... beam acceleration electrode, 4c1 ... opening end, 5 ... laser beam, 6 ... ion beam.

Claims (2)

イオン源の内部で発生させたプラズマからイオンビームを引き出して線形加速器に入射し、線形加速器内に入射されたイオンビームを該線形加速器のビーム加速電極が生成する加速電場によって加速するイオンビーム引出加速方法において、
接地電位の真空容器内に絶縁状態に設置した容器状の高電圧ターミナルから筒状電極を外側に伸ばし、その先端を前記ビーム加速電極の開口端の位置に一致、または開口内に進入するように設置することにより、前記高電圧ターミナル内に設置したプラズマ発生ターゲットにレーザー光を照射することによって発生したプラズマを前記ビーム加速電極の開口端または開口内までプラズマ状態を保ったまま導き、前記ビーム加速電極が生成するビーム加速・集束空間内に直接イオンビームを引き出すことを特徴とするイオンビーム引出加速方法。 Ion beam extraction acceleration in which an ion beam is extracted from a plasma generated inside an ion source and incident on a linear accelerator, and the ion beam incident in the linear accelerator is accelerated by an acceleration electric field generated by a beam acceleration electrode of the linear accelerator. In the method
A cylindrical electrode is extended outward from a container-like high-voltage terminal placed in an insulated state in a grounded vacuum vessel so that its tip coincides with the opening end of the beam acceleration electrode or enters the opening. By installing, the plasma generation target installed in the high voltage terminal is guided to the plasma generated by irradiating the laser beam to the opening end or the opening of the beam acceleration electrode while maintaining the plasma state, the beam acceleration An ion beam extraction acceleration method, wherein an ion beam is extracted directly into a beam acceleration / focusing space generated by an electrode. 内部で発生させたプラズマからイオンビームを引き出すイオン源と、前記イオン源のプラズマから引き出されたイオンビームを加速・集束するための加速・集束電場を生成するビーム加速電極を有する線形加速器とを備えたイオンビーム引出加速装置において、
前記イオン源は、接地電位の真空容器内に絶縁状態に設置した容器状の高電圧ターミナル内にプラズマ発生ターゲットを設置し、前記プラズマ発生ターゲットから発生した前記高電圧ターミナル内のプラズマを前記線形加速器のビーム加速電極まで導く筒状電極を前記高電圧ターミナルに設けて、前記筒状電極の先端位置が前記線形加速器のイオンビーム加速・集束空間を形成するビーム加速電極の開口端の位置に一致または開口内に進入するように設置したことを特徴とするイオンビーム引出加速装置。 An ion source for extracting an ion beam from plasma generated inside, and a linear accelerator having a beam acceleration electrode for generating an acceleration / focusing electric field for accelerating / focusing the ion beam extracted from the plasma of the ion source In the ion beam extraction accelerator,
The ion source includes a plasma generation target installed in a container-like high voltage terminal installed in an insulated state in a vacuum container at a ground potential, and the linear accelerator accelerates the plasma in the high voltage terminal generated from the plasma generation target. A cylindrical electrode leading to the beam accelerating electrode is provided at the high voltage terminal, and the tip position of the cylindrical electrode coincides with the position of the opening end of the beam accelerating electrode forming the ion beam accelerating / focusing space of the linear accelerator, or An ion beam extraction acceleration device characterized by being installed so as to enter into an opening.
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