JP2009031314A - Adapter for performing optical analysis of sample - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To have precise and repeatable positioning of a mirror with respect to both an analytical axis and an optical system positioned along the optical axis in an arrangement, located so as to collect light received from a sample, which uses a mirror for directing the light generally along an optical axis at an angle to the analytical axis. <P>SOLUTION: The mirror (18) can be inserted in an operative position on the analytical axis and retracted to an inoperative position away from the analytical axis. An adjustable first mount (44) defines the inserted position of the parabolic mirror (18). An adjustable second mount (46) defines the retracted position of the parabolic mirror (18). The position of the mirror is defined during retraction from the operative position to the inoperative position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sample analysis system. In a preferred embodiment, the electron microscope is combined with a spectroscopic analysis system, such as a Raman spectroscopic system, a photoluminescence spectroscopic system or a cathodoluminescence spectroscopic system.

  In the applicant's patent document 1, an analysis system, such as a scanning electron microscope, irradiates a specimen with a beam of electrons along an analytical axis. In general, a parabolic mirror is attached to the analysis axis on the specimen, and an electron beam can pass through the opening in the mirror to reach the specimen. The mirror is mounted on a mirror holder assembly, which assembly generally has an optical axis that intersects the analysis axis. The mirror holder assembly may be capable of moving the mirror back and forth between its operating position and a non-operating position away from the analysis axis.

International Publication No. 99/58939 US Pat. No. 5,446,970 International patent application GBO1 / 00170 specification US Pat. No. 4,451,987 U.S. Pat. No. 4,473,955 George Turrel and Jacques Corset “Raman Microscopy, Developments & Applications”

  It is desirable to ensure that the mirror is accurately and repeatably positioned with respect to both the analysis axis and the optical system positioned along the optical axis.

  Furthermore, since an analysis system such as a scanning electron microscope can operate under an ultra-high vacuum, it is preferable that the mirror can be adjusted outside the vacuum in both the operating position and the non-operating position. is there.

A first aspect of the present invention is for performing an optical analysis of a sample mounted in a sample chamber of another analyzer having an analysis axis and irradiating the sample with an analysis beam substantially along the analysis axis. An adapter,
An optical element arranged to collect scattered or generated light received from the specimen and directing the light generally along an optical axis intersecting the analysis axis;
In the adapter, the optical element is adjustable between an operating position on the analysis axis and a non-analysis position separated from the analysis axis;
An adapter is provided in which the operating position is defined by an adjustable mount that reduces displacement of the optical element in six degrees of freedom.

  Preferably, the adjustable mount is kinematic.

  Preferably, the inside of the sample chamber is in a reduced pressure state, and the reduced pressure state is used to urge the optical element toward the operating position.

  Preferably, the optical element also receives an input light beam along the optical axis so that the input light beam is directed toward the specimen.

  Preferably, the optical element is a mirror. Alternatively, the optical element can be an optical fiber condensing element.

  Preferably, the optical axis is in a direction substantially transverse to the analysis axis.

  The non-operation position may be determined by a second mount that suppresses the displacement of the optical element with six degrees of freedom. The second mount may be adjustable.

A second aspect of the present invention is for performing an optical analysis of a sample mounted in a sample chamber of another analyzer having an analysis axis and irradiating the sample with an analysis beam substantially along the analysis axis. An adapter,
A first optical element having a first focal plane and arranged to collect scattered or generated light received from the specimen and directing the light generally along an optical axis intersecting the analysis axis;
The first optical element is adjustable between an operating position on the analysis axis and a non-analysis position separated from the analysis axis;
A second optical element having a second focal plane is provided in a fixed relationship with respect to the first optical element, and the second optical element is directed along the optical axis by the first optical element. In an adapter that directs the optical analyzer to
The first and second optical elements are:
When the first optical elements are in the operating position, their focal planes are arranged parallel to the direction of movement of the first optical elements;
An adapter is provided that is arranged to at least partially correct an error in positioning of the first optical element in its operating position.

Preferably, a positioning mount is provided to determine the position of the first optical element at its operating position,
When the first optical element is in the operating position, the ratio of the focal length of the first optical element to the focal length of the second optical element is such that the focal length of the first optical element and the positioning mount are Inverted with respect to the ratio of the distance along the optical path to the distance along the optical path between the focal point of the second optical element and the positioning mount.

  Preferably, when the focal lengths of the first and second optical elements are equal and the first optical element is in the operating position, the distance along the optical path between the focal point of the first optical element and the positioning mount is , Equal to the distance along the optical path between the focal point of the second optical element and the positioning mount.

  Preferably, the first and second optical elements comprise parabolic mirrors.

According to a third aspect of the present invention, there is provided an adapter for optically analyzing a sample mounted in a sample chamber of another analyzer that irradiates an analysis beam toward the sample,
An optical element arranged to collect scattered or generated light received from the specimen and directing the light to an optical analyzer generally along an optical axis intersecting the analysis axis;
In an adapter wherein the optical element is a parabolic mirror,
At least one mirror is provided for aligning the light reflected by the parabolic mirror with the optical analyzer, the at least one mirror being adjustable;
An adapter is provided in which distortion in the optical analysis means is corrected by image processing software.

  Preferably, a second parabolic mirror is disposed between the parabolic mirror and the optical analyzer, and the two parabolic mirrors are disposed in a direction to cancel aberration. Two further paraboloidal mirrors are arranged between the paraboloidal mirror and the optical analysis means, and the four paraboloidal mirrors are arranged in a direction to cancel the aberration. it can.

  Reference should be made to U.S. Pat. No. 6,057,028 for a discussion of the meaning of the terms “kinematic”, “kinematically” and similar terms as used herein. These terms include not only kinematic support where point contact is made between each pair of elements on the carrying and receiving members, but also half-area or line contact between each element. It also includes kinematic support or pseudo-kinematic support.

Hereinafter, the present invention will be described with reference to the accompanying drawings.
FIG. 1 shows an electron microscope 10 having a typical electron beam generation, focusing and scanning system 12. This is a known method, and the sample 16 is irradiated with an electron beam substantially along the analysis axis 14.

  Instead of a scanning electron microscope, the present invention may be used with other types of analysis systems, including transmission electron microscopes, and ion beam bombardment systems.

  A parabolic mirror or other concave mirror 18 is generally mounted on the axis 14 on the specimen 16 and has a central aperture 20 that allows the electron beam to pass toward the specimen 16. The parabolic mirror 18 is attached to a mirror holder arm 22, which has an optical axis 24 generally orthogonal to the analysis axis 14 of the scanning electron microscope. The mirror holder 22 can advance and retract the paraboloidal mirror 18 between an operating position (shown by a solid line) and a non-operating position (shown by a broken line) as shown by a bidirectional arrow 26. In the non-actuated position, the paraboloidal mirror 18 includes other devices in the scanning electron microscope, such as an X-ray detector that can be used to detect X-rays generated by irradiating the specimen 16 with an electron beam. There is no interference.

  Also provided in the system is an optical system 28 that can comprise, for example, a spectrometer. When in the operative position, the incident laser beam 27 can be directed along the optical axis 24 via the mirror 25 or other means and focused on the specimen 16 by the parabolic mirror 18. The laser beam can be, for example, ultraviolet light, visible light or infrared light. Scattered light from the specimen 16 is collected by the parabolic mirror 18, collimated, and fed back in the return direction along the optical axis 24 toward the optical system 28. The collected light may be inelastically scattered light such as Raman, fluorescence or photoluminescence. It will also contain elastically scattered (Rayleigh) light at the laser wavelength. Alternatively or in conjunction therewith, the light collected from the specimen 16 by the mirror 18 may be cathodoluminescence, which is caused by the action of an electron beam on the specimen 16 without requiring laser incidence.

  FIG. 1 shows a system in which an optical system 28 is rigidly fixed to a scanning electron microscope chamber. In this case, the parabolic mirror must be accurately positioned with respect to both the optical system and the electron beam each time it is placed in the operating position. As another configuration, the optical system can be rigidly fixed to the parabolic mirror so that the entire system can be advanced and retracted together. This configuration is advantageous in that it is sufficient to accurately place a parabolic mirror with respect to the electron beam, but mirrors heavy and bulky spectrometers and lasers or components related to signal acquisition and laser delivery. This is disadvantageous in that it must be supported by the holder arm assembly.

  FIG. 2 shows the functional elements of the retracting mechanism. The scanning electron microscope is provided with a chamber flange 30 on the wall of the scanning electron microscope chamber 11. The retraction mechanism 32 is attached to the flange 30 of the scanning electron microscope chamber via a mechanism flange 34. When the mechanism flange 34 is attached to the scanning electron microscope chamber 11, it is fixed with respect to the electron beam axis 14, so all important optical and mechanical arrangements are referenced to this mechanism flange 34.

  A pair of guide rails 36 (only one shown) and a retraction screw 38 are attached to the mechanism flange 38. A retraction arm 40 is attached to the guide rail 36 and can be advanced or retreated (wound in or out) along the guide rail 36 by a retraction screw 38. The retraction screw 38 can be motor driven. The parabolic mirror 18 is indirectly transferred by the sliding tube 42, which can be mounted concentrically with the retracting arm 40 about the optical axis 24. The position of the sliding tube 42 or parabolic mirror 18 is defined by two sets of mounts with adjustable kinematic mounts. These are the positioning mount 44 and the retracting mount 46. As the retreat arm 40 moves forward or backward along the guide rail 36, the slide tube 42 is pressed on the positioning mount 44 (that is, the parabolic mirror is held at the insertion position), or the slide arm 42 is slid on the retraction mount 46. The moving tube 42 is pressed (ie, the parabolic mirror is held in the retracted position). Using the bellows seal 48, a linear seal capable of linear movement is realized. This type of seal has the advantage of allowing tilt, light rotation and lateral displacement, and is a reliable seal up to ultra-high vacuum pressures. Other seals such as sliding O-ring seals may be used.

  The bellows seal has a bellows fixing flange 50 at one end and a bellows moving flange 52 at the other end. The bellows fixing flange 50 is attached to the mechanism flange 34 adjacent to the scanning electron microscope chamber 10. The bellows moving flange 52 is attached to both the optical system flange 54 and the extraction end of the sliding tube 42 away from the scanning electron microscope chamber 10. The optical system flange 54 includes a vacuum window 56 for extracting light, and holds the mirror holder arm 22 that supports the parabolic mirror 18 in the scanning electron microscope chamber 10.

  The retraction arm 40 can be used to push the sliding tube 42 towards the scanning electron microscope chamber 10, where its position is defined by the positioning mount 44. The retract arm 40 can also push the slide tube 42 away from the scanning electron microscope chamber 10, and its position relative to the retract arm 40 is both during and when in the retract position. 46 is determined. The position of the sliding arm 42 or parabolic mirror 18 is always determined by either the positioning mount 44 or the retracting mount 46.

  The kinematic mount of the positioning mount 44 comprises three V-shaped grooves spaced 120 degrees apart on a circle concentric with the optical axis 24 on the mechanism flange 34 of the retracting mechanism 32. These are provided on the surface of the mechanism flange 34 adjacent to the sliding tube 42. Each V-shaped groove may be provided by a pair of parallel cylindrical rollers 60 as shown in FIG. Three bearings with similarly spaced spherical ends are provided on the face of the sliding tube adjacent to the mechanism flange 34. When the sliding tube 42 is transferred toward the mechanism flange 34, the ball bearing interacts with the V-shaped groove, so that the position of the sliding tube 42 with respect to the mechanism flange 44, and hence the position of the parabolic mirror 18 is reached. Is accurately determined.

  Since the vacuum in the scanning electron microscope chamber holds the sliding tube in place relative to the mechanical flange, no other methods for holding kinematic elements, such as by magnetic force or springs, are needed. is there.

  It is desirable that the kinematic mount be adjustable, and it is also desirable that the adjustment be ex-vacuo. In this example, the position of each bearing having a spherical end can be adjusted parallel to the optical axis 24. As shown in FIGS. 4 and 5, each bearing with a spherical end is provided by a cylindrical rod 62 with a rounded end 64. Each cylindrical rod 62 is accommodated in a housing 66 disposed in the sliding tube 42. The housing 66 has a central opening 68 extending along its longitudinal axis. This opening is stepped and has an enlarged portion 70 and a reduced portion 72. The cylindrical rod 62 is fitted into the enlarged portion 70 having the stepped portion 74 and is locked when entering the reduced portion 72. The cylindrical rod 62 is held at a predetermined position in the housing 66 by a screw 76. The screw 76 is inserted through the opening 78 on the side surface of the housing 66 and presses the flat portion 80 on a part of the side surface of the cylindrical rod 62. A rounded end 64 of the cylindrical rod 62 extends outward from the central opening of the housing 66.

  The outer portion of the housing 66 also has a stepped cylindrical shape. A screw is attached to the outer surface of the reduced portion 82 of the housing, and is screwed into a threaded opening 84 in the sliding tube 42 and held in place by a bolt 85. The reduction portion 72 on the inner surface of the housing 66 is also threaded to receive the adjustment screw 86. The adjusting screw is configured to adjust the position of the housing 66 in the longitudinal axis direction with respect to the sliding tube 42.

  The bearings with spherical ends can be individually adjusted parallel to the optical axis 24. Accordingly, by individually adjusting the position of the ball bearing, the mirror holder arm 22 can be tilted by 60 degrees with respect to each of the three axes. The optical arm 58 can also be moved parallel to the advancing and retracting axis by generally adjusting the position of the bearing with the spherical end. These alignments are sufficient to position the parabolic mirror 18 in three dimensions with respect to the scanning electron microscope 14.

  The rounded end of the cylinder 64 has two contacts to the V-shaped groove. Other shapes with two contacts for the V-shaped groove can also be used, for example, a wedge shape is shown in FIG. The wedge shape may have an angle of 60 degrees, for example.

  To retract the parabolic mirror 18, the retracting arm 40 is retracted to contact the end of the sliding tube 42 away from the scanning electron microscope chamber 10 and the entire mechanism is pulled away from the mechanism flange 34. Contact at the positioning mount 44 is released and the position of the parabolic mirror 18 is determined by the retracting mount 46 during retraction. Retraction of the parabolic mirror 18 is limited by an adjustable lock (not shown) on the retraction screw.

  Contact between the retracting arm 40 and the sliding tube is made by an adjustable kinematic mount similar to the positioning mount 44. Here, a bearing having a spherical end is disposed on the retracting arm 40 and contacts the V-shaped groove on the sliding tube 42.

  FIG. 7 shows the end face of the retracting arm. An opening 92 for the guide rail is provided, and a threaded opening 94 for the retracting screw is provided. Four elongated openings 90 are provided in which a housing for a bearing with a spherical end is arranged. These elongated slits allow each housing to be individually adjusted laterally.

  Thus, the position of the sliding tube 42, i.e. the position of the parabolic mirror 18, is always determined by the positioning mount 44 (i.e. relative to the mechanism flange 34) or by the retraction mount 46 (i.e. relative to the retraction arm 40). It will be.

  After the parabolic mirror 18 is aligned by adjusting the kinematic mount in the positioning mount 44, the kinematic mount is adjusted in the retracting mount 46, and the plane formed by the ball bearing is the positioning mount portion. To be parallel to the plane. Also, any lateral displacement of the sliding tube 42 relative to the retracting arm caused by tilt adjustment of the positioning mount 44 is compensated by making lateral adjustments to ensure that the ball bearing is aligned with the V-shaped groove. So that These adjustments help minimize any displacement of the parabolic mirror 18 through the transition from engagement of the positioning mount 44 to engagement of the retracting mount 46. Then, after the alignment of the parabolic mirror 18 is changed by adjusting the positioning mount 44, it is only necessary to adjust them.

  The adjustable kinematic mount of the present invention is also suitable for use in other applications. For example, a fiber optic light collection element as described in Patent Document 3, a specimen and a defect review tool (DRT); an electron for detecting defects in a semiconductor wafer It can be accurately positioned with an objective lens of a kind of microscope. Defects in the wafer can be accurately positioned in the DRT to be the electron optical centre, so that the fiber optic focusing element can also be brought to the optical center of the electron at a known distance from the sample surface. It will be moved. Thus, the fiber optic focusing element will be precisely positioned in X, Y and Z, which can be achieved by using the adjustable kinematic mount described above.

  The present invention is not limited to adjustable positioning mounts. Other adjustable mounts that constrain the position of the parabolic mirror 18 with six degrees of freedom are also suitable. Such a mount can comprise, for example, a combination of a ball that abuts the plate to limit some displacements and a planar spring to limit other displacements, as described in US Pat. It is disclosed in Document 5.

  FIG. 8 shows an optical configuration for coupling light collected by the parabolic mirror 18 to an optical system, such as a spectrometer. The same reference numbers are used for parts similar to those shown in the previous drawings.

  Light from the specimen collected by the parabolic mirror 18 is reflected through the adjustable mirrors 100 and 102 toward the second parabolic mirror. The two parabolic mirrors are in a fixed relationship with each other, and their relative alignment can be adjusted to six axes by the two adjustable mirrors 100,102.

  The objective 106 of the microscope is provided at a fixed position with respect to the mechanism flange 34 of the retracting mechanism 32 (and thus the specimen chamber). The microscope objective 106 is located at the focal point of the second parabolic mirror 104 and collimates the light into a suitable parallel beam that faces the spectrometer. It is desirable that the microscope objective 106 be adjustable so that it can be accurately positioned at the focal point of the second parabolic mirror 104.

  Parabolic mirrors are preferably used over flat mirrors because they provide better light collection efficiency. A parabolic mirror is preferably used rather than an ellipsoid, because the ellipsoidal mirror has two focal points and the alignment is complicated and delicate.

  The natural consequence of using a parabolic mirror is that off-axis images are distorted. This is improved by using two parabolic mirrors. If four parabolic mirrors are used, further improvement is possible. In this case, however, alignment is not easy.

  FIG. 8 shows a pair of paraboloidal mirrors 18 and 104 that optically couple the specimen to the microscope objective 106 together with the alignment mirrors 100 and 102, but one or four paraboloidal mirrors are used with the alignment mirrors. A system can also be used.

  The use of a parabolic mirror to couple a Raman laser probe to an electron microscope has been previously disclosed in NPL 1. In this system, as shown in FIG. 9, a pair of paraboloidal mirrors 110 and 112 are arranged so that their focal points 114 and 116 are on different horizontal planes. This arrangement is disadvantageous in that all aberrations cannot be canceled.

  In the present invention, as shown in FIG. 10, the parabolic mirrors 110 and 112 are arranged so that the focal points are on the same horizontal plane. This configuration of the parabolic mirror cancels aberrations, and in particular corrects aberrations from paraxial rays.

  Image processing techniques such as image warping are used to correct residual distortions (such as pin-cushion distortion and barrel distortion).

  It is desirable to repeatably position the laser spot on the specimen with an accuracy higher than 1 μm. However, if non-kinematic positioning mounts (eg, end stops or sliding bearings) are used, or if the kinematic positioning mount is fouled, the accuracy of the spot position is reduced due to drift, for example. A decrease in accuracy of the laser spot position on the specimen is compensated by the optical configuration described below.

  FIG. 11 shows two equal lenses 120, 122 of focal length f that work in infinite conjugate mode, which when the object O moves upward, the image I moves backwards by the same amount ( invert). This property is used to compensate for small errors in the position of the retracting arm.

  FIG. 12A shows in a simplified form the optical elements used in the retracting arm. Each set of optical elements can include plane mirrors 124 and 126 and lenses 128 and 130. Alternatively, as shown in FIG. 8, the optical element may include a pair of parabolic mirrors. The optical elements are rigidly attached to each other within the retracting arm so that insertion / retraction of the retracting arm causes movement of the entire optical system assembly. In addition, the optical elements are matched pairs so that for a small area of the image / object, the object is imaged with a magnification factor of 1, in focus and inverted. .

  FIG. 12A shows two mirror and lens assemblies 124, 128, 126, and 130 that have equal focal lengths f and are equidistant from the center of rotation (ie, the positioning mount).

  If the entire assembly moves in the X direction as shown in FIG. 12B, but the object O is fixed, an image I ′ that moves −X relative to the retracting arm is generated. Therefore, the position of the laser spot on the specimen remains as it is and is not affected by slight movement of the retracting arm. The above compensation applies to the movement of the retracting arm at X, -X, Y and -Y.

  This system does not compensate in a similar manner for the movement of the retracting arm in the Z direction. However, there is no problem if the change in the Z direction within the depth of field of the optical system is small. The depth of field of the parabolic mirror used in this optical system is, for example, about 20 μm. Since the aim is to position the spot within 1 μm, small displacements of this order of the parabolic mirror are acceptable.

  Further, by arranging the optical elements symmetrically, slight swinging of the retracting arm is also compensated. FIG. 11 shows two lenses 120 and 122 secured to each other by a housing 132, for example. Even if the object O is fixed, the housing 132 swings around the rotation center P, and a small angle is formed within the depth of field, the image I does not move. This is for the same reason as described above. However, this is true only when the rotation axis is at the center of the two optical elements. The retracting arm positioning mount (kinematic or otherwise) acts as the axis of rotation between the optical elements.

  If the focal lengths of the lenses are not equal, the center of rotation must be moved to a position closer to the lens with the longer focal length. For example, if the ratio of the objective lens focal length f1: imaging lens focal length f2 is 1: 2, the ratio of the distance from the object to the center of rotation: the distance from the center of rotation to the image must be 2: 1.

  When the retracting arm swings, displacement in Z occurs, but if the swing angle is small and the distance from the center of rotation to the object is large, the image is not affected.

  FIG. 13 shows an optical configuration of a retracting arm similar to that shown in FIG. This configuration includes two mirrors 134 and 136 for bending the optical path. The positioning mount forms a rotational axis P and is positioned equidistant from each of the mirror and lens assemblies 124, 128, 126, 130 if the lenses 128, 130 have equal focal lengths.

  Therefore, the use of symmetrical optical elements provides correction for inaccurate motion systems. By using this optical element arrangement, even if a low-accuracy positioning mount is used, this is corrected even if the position of the retracting arm is somewhat inaccurate, which enables stable and repeatable positioning of the retracting arm. Become.

  If the optical system comprises a pair of parabolic mirrors, the degree of correction is a function of image quality over the image field, as described with reference to FIG. 10, and these parabolic mirrors are identical. It is necessary to be. The use of parabolic mirrors has the advantage of providing better light collection and thus faster optical systems than plane mirror and lens assemblies. In addition, the paraboloidal mirror occupies a small space in the retracting arm and has a large depth of field, and therefore can allow a large displacement in the Z of the retracting arm.

It is a schematic diagram of the scanning electron microscope combined with a spectroscopy system. It is a schematic diagram of the retraction mechanism of FIG. It is an end elevation of a mechanism flange of a retreat mechanism. Fig. 5 shows an adjustable kinematic mount of the retraction mechanism. FIG. 6 is an exploded view of a portion of an adjustable kinematic mount. Other kinematic mounts. It is an end view of the retraction arm of the retraction mechanism. It is a schematic diagram of the optical arrangement | positioning between a scanning electron microscope and an optical system. Fig. 2 shows a conventional connection of parabolic mirrors. Fig. 4 shows the connection of parabolic mirrors used in the present invention. It is a figure of two lenses of an infinite conjugate ratio mode. 12A and 12B show simplified optical elements in the retracting arm. Fig. 3 shows the optical element in the retracting arm.

Claims (10)

An adapter for performing optical analysis of a sample mounted in a sample chamber of another analyzer having an analysis axis and irradiating the sample with an analysis beam generally along the analysis axis,
An optical element arranged to collect scattered or generated light received from the specimen and directing the light generally along an optical axis intersecting the analysis axis;
In the adapter, the optical element can be inserted into an operating position on the analysis axis and retracted to a non-operational position away from the analysis axis;
The operating position is defined by a first mount that suppresses the displacement of the optical element in six degrees of freedom;
The inoperative position is determined by a second mount that suppresses the displacement of the optical element in six degrees of freedom;
The second mount further defines the position of the optical element while retracting from the operating position to the non-operating position;
An adapter characterized by that.   The adapter according to claim 1, wherein the first and second mounts are kinematic.   The adapter according to claim 1, wherein the optical element is biased toward the operating position.   The adapter according to claim 3, wherein the inside of the sample chamber is in a reduced pressure state, and the reduced pressure state is used to bias the optical element toward the operating position.   5. The adapter according to claim 1, wherein the optical element also receives an input light beam along the optical axis, and the input light beam is directed toward the specimen.   The adapter according to any one of claims 1 to 5, wherein the optical element is a mirror.   The adapter according to any one of claims 1 to 5, wherein the optical element is an optical fiber condensing element.   The adapter according to any one of claims 1 to 7, wherein the optical axis is in a direction substantially transverse to the analysis axis.   The adapter according to any one of claims 1 to 8, wherein the first mount is adjustable.   The adapter according to any one of claims 1 to 9, wherein the second mount is adjustable.

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