JP2009028773A - Laser beam machining apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus, which enhances the degree of freedom of installation of a head unit. <P>SOLUTION: A laser beam machining apparatus 4 includes: a main body unit 1, which has a laser beam source 5 emitting a laser beam L, and from which an optical fiber cable F is led out; and a head unit 2 connected with the tip end part of the optical fiber cable F and having an irradiation part 40 which irradiates a workpiece W with the laser beam L from the optical fiber cable F to machine the workpiece W. The head unit 2 is provided with: a connection means 70, which is connectable with the tip end part of the optical fiber cable F from a plurality of directions; and a deflection means 73 for guiding a laser beam L from the optical fiber cable F, which is connected with the head unit 2 through the connection means 70 in various directions, onto one and the same beam path in the irradiation part 40. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a so-called head separation type laser processing apparatus.

Conventionally, there is a so-called head separation type laser processing apparatus. In this configuration, a main unit having a laser light source and a head unit are connected by an optical fiber cable. Laser light emitted from the laser light source is guided to the head unit via the optical fiber cable, and the head unit irradiates the processing object with the laser light from the optical fiber cable. With such a head-separated laser processing apparatus, for example, it is only necessary to secure an installation space for the head unit in the vicinity of the object to be processed, and the head unit should be installed in an orientation according to the installation environment. There is a merit that you can.
Japanese Patent No. 3089382 (especially FIG. 7)

However, the head-separated laser processing apparatus has a configuration in which the optical fiber cable is drawn out from the fixing position of the head unit in the fixing direction. Therefore, when installing the head unit, the drawing position and drawing direction of the optical fiber head must be taken into consideration, and there is a problem that the degree of freedom of installation is restricted.
The present invention has been completed based on the above circumstances, and an object of the present invention is to provide a laser processing apparatus capable of improving the degree of freedom of installation of the head unit.

As means for achieving the above object, a laser processing apparatus according to a first invention includes a main body unit having a laser light source that emits laser light, from which an optical fiber cable is led out, and a tip portion of the optical fiber cable. And a head unit having an irradiating unit for irradiating a workpiece with laser light from the optical fiber cable, and the head unit includes a plurality of different optical fiber cables. Connecting means connectable in a direction, and deflecting means for guiding laser light from an optical fiber cable connected in each of the plurality of drawing directions in the connecting means onto the same optical path in the irradiating unit.
According to the present invention, the optical fiber cable can be connected to the head unit in a plurality of extraction directions, and the laser light from the optical fiber cable connected in each extraction direction is guided to the same optical path by the deflecting unit. It was set as the structure which irradiates a process target object from an irradiation part. Accordingly, since the direction of drawing the optical fiber cable from the head unit can be changed according to the installation environment, the degree of freedom of installation of the head unit can be improved.

A second invention is the laser processing apparatus according to the first invention, wherein the connection means has a connection portion provided to be rotatable around a predetermined rotation axis orthogonal to the plurality of drawing directions. Has been.
According to the present invention, the connecting portion to which the tip end portion of the optical fiber cable is connected can be rotated around a predetermined rotation axis orthogonal to the plurality of drawing directions. Can be changed.

3rd invention is a laser processing apparatus of 1st or 2nd invention, Comprising: The said connection means is the structure which hold | maintains the said optical fiber cable rotatably centering on the axial direction of the said optical fiber cable. .
According to the present invention, since the optical fiber cable can be rotated around its axial direction, the optical fiber cable can be pulled out in a desired drawing direction more flexibly than a configuration that does not rotate in the axial direction. it can.

A fourth invention is the laser processing apparatus according to any one of the first to third, wherein the irradiation unit controls a mirror and a rotation point of the mirror to irradiate the laser beam on the workpiece. Control means for moving the mirror, and the deflection means is configured to guide the laser light from the optical fiber cable onto the same optical path by displacing the direction of the mirror, and the control means includes: The rotation control range is controlled by shifting the displacement by the deflection means.
For example, the deflecting unit may be configured to use an electro-optic effect, an acousto-optic effect, or the like. However, according to the present invention, a configuration using a reflecting mirror can be used. . In addition, the deflecting means can be realized using an existing laser scanning mirror without providing a dedicated reflecting mirror.

5th invention is a laser processing apparatus of 1st invention, Comprising: The said connection means is comprised including a connection part provided so that direction can be changed to these several pull-out directions, and the said deflection | deviation means, The reflector is provided at a position where the laser light from the optical fiber cable connected to the connection portion is reflected on the same optical path and rotates integrally with the connection portion.
According to the present invention, since the connecting portion to which the optical fiber cable is connected and the reflector rotate integrally, the positional relationship between the optical fiber cable and the deflecting means is unlikely to change.

  According to the present invention, the degree of freedom of installation of the head unit can be improved.

<Embodiment 1>
Embodiment 1 of the present invention will be described with reference to FIGS.
As shown in FIG. 1, the laser marking device 4 (an example of a laser processing device) of the present embodiment is a so-called head separation type, and includes a main body unit 1 and a head unit 2. By irradiating the workpiece W with the generated laser light L via the head unit 2, characters (symbols, figures, etc.) are marked (processed) there.

(Whole structure of laser marking device)
The main unit 1 includes a signal semiconductor laser 10, three pumping semiconductor lasers 11 </ b> A to 11 </ b> C, a rare earth-doped optical fiber 12, a control unit 13, and an input / output unit 14. In FIG. 1, a portion surrounded by an alternate long and short dash line is a laser light source 5. The signal semiconductor laser 10 is driven by the control means 13 via the driver 20 and pulsates an infrared laser having a wavelength of 1060 nm. The pumping semiconductor lasers 11A to 11C are driven by the control means 13 via the drivers 21A to 21C, and continuously oscillate the laser light L having a wavelength of 960 nm with a predetermined laser output.

  The rare earth-doped optical fiber 12 comprises a single mode 12A and a multimode 12B. Both 12A and 12B contain, for example, yttrium (Yb), which is a rare earth element, in the core portion. The excitation wavelength of the rare earth element is about 960 nm, and the oscillation wavelength is about 1060 nm. An optical isolator 15 that allows the laser light L to pass only in one direction is provided in the middle of the single-mode rare-earth doped optical fiber 12A, and coupling means 16A and 16B made of, for example, optical couplers are attached to both opening ends. ing. The multimode rare earth-doped optical fiber 12B is wound many times around a bobbin (not shown) to secure a required length of optical path, and one opening end of the multimode rare earth-doped optical fiber 12B is attached to the coupling means 16B. A coupling means 16C comprising an optical coupler is also provided at the opening end (corresponding to the emission end face).

  Two optical fibers 17 and 18A are connected to the coupling means 16A, and the laser beam L of the signal semiconductor laser 10 and the laser beam L of the pumping semiconductor laser 11A are incident on them. . An optical fiber 18B is attached to the coupling means 16B, and the laser beam L of the pumping semiconductor laser 11B is incident thereon. Two optical fibers 18C and 19 are attached to the optical coupler 16C, and the laser light L of the pumping semiconductor laser 11C is incident on the optical fiber 18C. Are connected in the head unit 2. The optical fiber 19 is a glass fiber that can handle a high laser output, and is covered with a protective tube 22 to form an optical fiber cable F.

  The control means 13 outputs a control signal to each driver 20, 21A-21C, and drives each semiconductor laser 10, 11A-11C. Specifically, a driving current is supplied to the signal semiconductor laser 10 and the high excitation semiconductor lasers 11B and 11C when a marking operation is performed, and a driving current is always supplied to the low excitation semiconductor laser 11A. The control signals are transmitted to the drivers 10, 21A to 21C.

  The control means 13 is connected to an input means 3 made of, for example, a console. In this input means 3, the laser output of the laser light L from the rare earth doped optical fiber 12 and the characters / symbols to be marked on the workpiece W・ Marking information such as graphics and marking programs are entered. The control means 13 receives the laser output inputted to the input means 3, marking information such as characters / graphics / symbols, a marking program, etc., and generates coordinate data of each line segment constituting the marking information, and this data is stored in the memory 13A. To remember. Then, in response to the trigger signal for starting the marking, the control means 13 transmits a control signal to the drivers 20, 21A to 21C and the head unit 2 based on various set values, laser output, and coordinate data to mark on the surface of the workpiece W. Apply processing.

  The head unit 2 includes a collimator lens 30, a galvanometer mirror device 40, an fθ lens 50, and an input / output unit 60. The collimator lens 30, the galvanometer mirror device 40, and the fθ lens 50 are examples of the irradiation unit. The laser light L from the optical fiber 19 is converted into parallel light by the collimator lens 30 and reflected by the X-axis and Y-axis galvanometer mirrors (only one of them is shown in FIG. 1) provided in the galvanometer mirror device 40. Then, the light is condensed on the workpiece W by the fθ lens 50. In addition, when the galvanomirror device 40 receives a control signal from the control means 13 via the input / output means 60, both galvanometer mirrors are rotated in accordance with the control signal, so that the laser light L is applied to the surface of the workpiece W. Scanning is performed in a two-dimensional direction.

(Configuration to change the pulling direction of the optical fiber cable from the head unit)
The head unit 2 is provided with a connection portion 70 to which the tip portion of the optical fiber cable F led out from the main unit 1 is connected. As shown in FIGS. 1 and 2, the connecting portion 70 is fixed to a disk-like rotating body 71, for example, which is rotatable around a predetermined rotation axis X <b> 1 in the head unit 2 via a mounting bracket 72. Has been. The connecting portion 70 is rotated by the rotation of the rotating body 71, whereby the direction in which the optical fiber cable F is pulled out from the head unit 2 can be changed. Therefore, the connection part 70 and the rotary body 71 are an example of a connection means.

  In addition, a reflection mirror 73 is provided in the head unit 2 so as to be rotatable about a predetermined rotation axis X2. By rotating the reflecting mirror 73, for example, as shown in FIG. 3, the direction of the laser light L can be changed by being interposed on the optical path of the laser light L emitted from the optical fiber cable F. It has become. Further, by displacing the reflecting mirror 73 according to the rotation of the connecting portion 70, the laser light L from the optical fiber cable F is always guided onto the central axis Y of the collimator lens 30 (an example of the same optical path in the irradiating portion). be able to.

  Further, the rotating body 71 and the reflection mirror 73 are interlocked and rotated by a gear mechanism 74 (an example of interlocking means). Specifically, the gear mechanism 74 includes a first gear 75 that rotates integrally with the rotating body 71, a second gear 76 that rotates integrally with the reflecting mirror 73, and a first gear 75 and a second gear 76. One or a plurality of intermediate gears 77 (one reduction gear in the present embodiment) provided in between.

(Operational effect of this embodiment)
As described above, the optical fiber cable F has a configuration in which the glass fiber is covered with the protective tube 22, is difficult to bend, and has a large bending radius (for example, 100 to 150 mm). The head unit 2 according to the present embodiment is a rectangular parallelepiped having a side of about 200 mm. When the head unit 2 is arranged in the vicinity of the workpiece W, the degree of freedom of installation of the head unit 2 is limited by the bending radius.

  Therefore, in the present embodiment, the optical fiber cable F can be connected to the head unit 2 from a plurality of directions (a plurality of different side surfaces of the head unit 2) and connected in each connection direction. The laser beam L from the laser beam L is guided to the same optical path by the reflection mirror 73 and irradiated onto the workpiece W through the collimator lens 30, the galvano mirror device 40 and the fθ lens 50. Therefore, the direction in which the optical fiber cable F is pulled out from the head unit 2 can be changed according to the installation environment, so that the degree of freedom of installation of the head unit 2 can be improved.

  Specifically, as shown in FIGS. 1 and 2, for example, when the connection portion 70 to which the optical fiber cable F is connected is in a position where the tip thereof is directed to the collimator lens 30, the reflection mirror 73 is formed of the optical fiber cable. Retreat to a position off the optical path of the laser beam L from the tip of F toward the collimator lens 30. On the other hand, when the user moves the optical fiber cable F to the position shown in FIG. 3 in consideration of the installation environment of the head unit 2, the reflection mirror 73 is rotated by the gear mechanism 74 in conjunction therewith. At this time, the reflection mirror 73 reflects the laser light L from the optical fiber cable F and guides it onto the central axis Y of the collimator lens 30. Therefore, even if the connection direction of the optical fiber cable F is changed, the laser light L from the optical fiber cable F is always guided onto the central axis Y of the collimator lens 30, so that the galvano mirror device 40 rotates the galvano mirror 41. Marking on the workpiece W can be performed normally without changing the control range.

  Moreover, since the connection part 70 to which the tip part of the optical fiber cable F is connected is rotatable around a predetermined rotation axis X1, the pulling direction of the optical fiber cable F can be changed continuously. However, in the present embodiment, the reflection mirror 73 needs to be displaced to a position where the laser light L from the optical fiber cable F can be reflected.

  When the drawing direction of the optical fiber cable F is changed, the deflection direction by the reflection mirror 73 is automatically changed by the gear mechanism 74 in conjunction with this, so that the rotating body 71 and the reflection mirror 73 are made independent without providing the gear mechanism 74. The workability can be improved as compared with the configuration in which the motor is rotated. Further, it is possible to suppress the deviation of the positional relationship between the optical fiber cable F and the reflection mirror 73 and the laser light L reflected by the reflection mirror 73 from deviating from the central axis Y of the collimator lens 30.

  The deflecting means may be, for example, a Q switch using the electro-optic effect or a laser light deflection switch using the acousto-optic effect due to the Bragg diffraction phenomenon in the diffraction grating generated in the ultrasonic medium. Therefore, since the reflection mirror 73 is used, the configuration can be made relatively simple.

<Embodiment 2>
FIG. 4 shows a second embodiment. The difference from the above embodiment lies in the structure of the interlocking means, and the other points are the same as in the first embodiment. Therefore, the same reference numerals as those in the first embodiment are given and the redundant description is omitted, and only different points will be described next.

  As shown in FIG. 4, this embodiment includes an encoder 80 and a control circuit 81 instead of the gear mechanism 74. The encoder 80 supplies a pulse signal to the control circuit 81 for each unit rotation angle as the rotating body 71 rotates. Based on the pulse signal, the control circuit 81 can recognize the current position of the rotating body 71, that is, the connecting portion 70, and controls the rotating mechanism of the reflecting mirror 73 in accordance with the current position to make the reflecting mirror 73 an appropriate one. Can be rotated automatically to position. The control circuit 81 may be provided not in the head unit 2 but in the main unit 1.

<Embodiment 3>
FIG. 5 shows a third embodiment. The difference from the first embodiment is the configuration of the connecting means, and the other points are the same as in the first embodiment. Therefore, the same reference numerals as those in the first embodiment are given and the redundant description is omitted, and only different points will be described next.

  As shown in FIG. 5, the head unit 2 ′ is provided with connecting portions 90 and 91 at a plurality of locations (one on each of two side surfaces in this embodiment). Each of the connection portions 90 and 91 is configured to be able to connect the distal end portion of the optical fiber cable F, and includes a detection sensor 92 (for example, a contact sensor) that detects whether or not the distal end portion is connected. Detection signals from the respective detection sensors 92 are given to the control circuit 93. The control circuit 93 can recognize the position where the optical fiber cable F is currently connected based on the detection signal, and controls the rotation mechanism of the reflection mirror 73 in accordance with the recognized position to control the reflection mirror 73. Automatically rotate to the appropriate position. The control circuit 93 may be provided not in the head unit 2 but in the main unit 1. Further, a cap 94 is put on the connection portion 91 to which the optical fiber cable F is not connected.

  Even if the connection direction of the optical fiber cable F cannot be changed continuously as in the present embodiment, the configuration may be such that it can be connected only in the necessary direction.

<Embodiment 4>
6 and 7 show a fourth embodiment. The difference from the first embodiment is the configuration of the connecting means and the deflecting means, and the other points are the same as in the first embodiment. Therefore, the same reference numerals as those in the first embodiment are given and the redundant description is omitted, and only different points will be described next.

  As shown in FIG. 6, the head unit 2 ″ of the present embodiment includes a connection portion 100 provided to be rotatable around a predetermined rotation axis X3. The connection portion 100 is exposed from the head unit 2 ″. Is bent in a direction away from the rotation axis X3, and the tip of the optical fiber cable F is connected to the tip. In addition, a reflection mirror 101 is provided inside the connection unit 100, and the laser light L reflected here is guided onto the central axis Y of the collimator lens 30 by the reflection mirror 102 (an example of a reflector). Here, the reflection mirror 101 receives the laser light L from the optical fiber cable F on the rotation axis X3 and reflects it on the rotation axis X3. A reflection mirror 102 is provided on the extended line of the rotation axis X3.

  With the above configuration, when the connecting portion 100 is rotated as shown in FIG. 7, the reflecting mirror 101 rotates integrally therewith, and the laser light L reflected by the reflecting mirror 101 is given to the reflecting mirror 102 by a predetermined amount. Incident at an angle and guided onto the central axis Y of the collimator lens 30. Even if the drawing direction of the optical fiber cable F is changed, it is possible to normally mark the workpiece W without changing the rotation control range of the galvano mirror 41 by the galvano mirror device 40.

  In addition, since the connecting portion 100 to which the optical fiber cable F is connected and the reflection mirror 101 are configured to rotate integrally, when the optical fiber cable F is rotated, the connection between the optical fiber cable F and the reflection mirror 101 is reduced. The positional relationship is not easily changed, and the laser light L from the optical fiber cable F can be stably guided onto the central axis Y of the collimator lens 30.

<Embodiment 5>
FIG. 8 shows a fifth embodiment. The difference from the first embodiment is the configuration of the deflecting means, and the other points are the same as in the first embodiment. Therefore, the same reference numerals as those in the first embodiment are given and the redundant description is omitted, and only different points will be described next.

  In this embodiment, a galvano mirror 41 is used instead of the reflection mirror 73. As shown in FIG. 8, the connection part 110 to which the tip of the optical fiber cable F is connected and the collimator lens 30 can be rotated around the rotation axis X4 of the galvano mirror 41, thereby pulling out the optical fiber cable F. The direction can be changed. Then, for example, the control means 13 controls by moving the rotation control range of the galvanometer mirror 41 by the angular displacement amount θ of the connecting portion 110.

  According to the present embodiment, the deflection unit can be realized using the existing galvanometer mirror 41 without providing a dedicated reflection mirror.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.
(1) The “laser light source” may be a solid-state laser such as a YAG laser, a gas laser such as a carbon dioxide gas laser, or a liquid laser.

  (2) The “laser processing device” may be a device provided with only one galvano mirror, a dot parking method, or a device in which the head unit itself moves and scans.

  (3) In each of the above-described embodiments, each connection portion 70, 90, 91, 100 may be configured to hold the tip portion of the optical fiber cable F so as to be rotatable in the axial direction thereof. Specifically, the first embodiment will be described as an example. As shown in FIG. 9, the connecting portion 120 is capable of rotating the inner member 121 fixed to the distal end portion of the optical fiber cable F and the fixing member 120. And an outer member 122 to be housed. Specifically, the outer surface of the inner member 121 and the inner surface of the outer member 122 are respectively provided with a concave portion 123 and a convex portion 124 extending along the circumferential direction. With such a configuration, since the optical fiber cable F can be rotated around its axial direction, the optical fiber cable F can be pulled out in a desired drawing direction more flexibly than a configuration that does not rotate in the axial direction. Can be pulled out.

1 is a block diagram of a laser marking device according to Embodiment 1 of the present invention. Simplified view of connecting means and deflecting means (Part 1) Simplified view of connecting means and deflecting means (Part 2) Simplified view of connecting means and deflecting means of embodiment 2 Simplified view of connecting means and deflecting means of embodiment 3 Simplified view of connecting means and deflecting means of embodiment 4 (Part 1) Simplified view of connecting means and deflecting means of embodiment 4 (part 2) Schematic diagram of connecting means and deflecting means of embodiment 5 Simplified diagram of the connecting means and deflecting means of the modification

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Main body unit 2, 2 ', 2 "... Head unit 4 ... Laser marking apparatus (laser processing apparatus)
5 ... Laser light source 13 ... Control means 30 ... Collimator lens (irradiation part)
40 ... Galvano mirror device (irradiation part)
41 ... Galvano mirror (mirror)
50 ... fθ lens (irradiation part)
70, 90, 91, 100 ... connection part (connection means)
71: Rotating body (connection means)
73 ... Reflection mirror 102 ... Reflection mirror (reflector)
F ... Optical fiber cable L ... Laser light W ... Work object X1, X3, X4 ... Rotation axis Y ... Central axis (same optical path in irradiation part)

Claims (5)

A main body unit that has a laser light source that emits laser light, is connected to the main unit from which the optical fiber cable is led out, and a tip of the optical fiber cable, and irradiates the processing object with the laser light from the optical fiber cable. A head unit having an irradiation unit to be applied,
In the head unit, connection means capable of connecting the optical fiber cable in a plurality of different drawing directions, and
A laser processing apparatus comprising: a deflecting unit that guides laser light from an optical fiber cable connected in each of the plurality of drawing directions in the connecting unit to the same optical path in the irradiation unit. The laser processing apparatus according to claim 1,
The connection means is configured to have a connection portion that is rotatably provided around a predetermined rotation axis that is orthogonal to the plurality of drawing directions. The laser processing apparatus according to claim 1 or 2,
The connection means is configured to hold the optical fiber cable rotatably about the axial direction of the optical fiber cable. The laser processing apparatus according to any one of claims 1 to 3,
The irradiation unit includes a mirror, and a control unit that controls the rotation of the mirror to move the irradiation point of the laser light on the workpiece,
The deflecting means is configured to guide the laser light from the optical fiber cable onto the same optical path by displacing the mirror.
The control means controls the rotation control range of the mirror by shifting by the amount of displacement by the deflection means. The laser processing apparatus according to claim 1,
The connection means is configured to have a connection portion that can be changed in direction in the plurality of pull-out directions,
The deflecting means is a reflector that is provided at a position where the laser light from the optical fiber cable connected to the connection portion is reflected on the same optical path and rotates integrally with the connection portion.

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