JP2009025150A - Water cooling type ic tester - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a water cooling type IC tester capable of safely stopping a water cooling system at a side of a test head when a malfunction occurs on the water cooling system for the test head. <P>SOLUTION: This water cooling type IC tester includes a water supply pipe 41 for cooling water provided to a main frame 4, a water discharge pipe 42, a by-pass pipe 43 coupled between the water supply pipe 41 and the water discharge pipe 42, and a solenoid valve 44 provided to the water supply pipe 41. The water cooling type IC tester further includes a water cooling system malfunction detecting means 45 that closes the solenoid valve 44 when a malfunction occurs on the water cooling system at the side of the test head 5. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

The present invention relates to a configuration of a cooling device of an IC test apparatus that uses water cooling as a cooling method.
More specifically, the present invention relates to a water-cooled IC that can safely stop the water-cooling system on the test head side regardless of the cooling water supply device when an abnormality occurs in the water-cooling system on the test head side. It relates to a test apparatus.

  Prior art documents related to the water-cooled IC test apparatus include the following.

JP-A-8-0094706

FIG. 3 is an explanatory view showing the structure of a main part of a conventional example that is generally used.
The conventional cooling system of the water-cooled IC test apparatus includes a main frame 1 having a power supply and abnormality management function for the entire system, a test head 2 having a water-cooling pipe 21 for cooling an internal card, and circulating water to the test head 2. It consists of the chiller unit 3 to supply.

The main frame 1 supplies power to the chiller unit 3 and the test head 2 via the power cables 11 and 12, respectively.
The test head 2 is provided with a water cooling pipe 21.
The chiller unit 3 includes a chiller 31 and an abnormality detection unit 32.
The chiller 31 includes a heat exchanger 311, a pump 312, and temperature control means 313.
The chiller unit 3 and the test head 2 are connected by a circulating water pipe 33, and the chiller unit 3 supplies and circulates the circulating water maintained at a constant temperature by the heat exchanger 311 to the test head 2.

The heat generated inside the test head 2 is transferred to the circulating water through the water cooling pipe 21, exchanged with the factory cooling water supplied from the factory by the factory cooling water pipe 34 in the heat exchanger 311, and exhausted from the factory cooling water pipe 34. It is.
The circulating water heat-exchanged by the heat exchanger 311 is supplied again to the test head 2 and circulates in the circulating water pipe 33.

The abnormality detection means 32 of the chiller unit 3 detects an abnormality in the circulating water pipe 33, the test head inner pipe 21, and the heat exchanger 311.
When the abnormality detection unit 32 detects an abnormality, the abnormality is reported to the main frame 1 via the alarm cable 35.
The main frame 1 that has received the abnormality report from the chiller unit 3 stops the power supply of the power cables 11 and 12 and stops the operation of the test head 2 and the chiller unit 3.

Such an apparatus has the following problems.
Since the chiller unit 3 has the pipe abnormality detection means 32 on the test head 2 side, it is necessary to report abnormality detection to the main frame 1.
In a commercially available chiller, since this interface is not uniform, the chiller unit 3 used in the water-cooled IC test apparatus is designed exclusively for each system.
For this reason, a commercially available chiller cannot be used, and it is necessary to develop the chiller unit 3 for each system, which is an obstacle to cost reduction.

  The object of the present invention is to solve the above-mentioned problems, and when an abnormality occurs in the water cooling system on the test head side, the water cooling system on the test head side is safely stopped regardless of the factory side cooling water supply device. An object of the present invention is to provide a water-cooled IC test apparatus capable of performing the above.

In order to achieve such a problem, in the present invention, in the water-cooled IC test apparatus according to claim 1,
In a water-cooled IC test apparatus comprising a test head to which power and cooling water are supplied from a main frame that supplies power to the entire system, a cooling water supply pipe and a discharge pipe provided in the main frame, A bypass pipe provided in the main frame for communicating the supply pipe and the discharge pipe, a solenoid valve provided in the supply pipe downstream of the bypass pipe of the main frame, and the electromagnetic of the main frame Water cooling system abnormality detection means for sending a signal for closing the solenoid valve to the solenoid valve when an abnormality occurs in the water cooling system on the test head side provided in the supply pipe and the discharge pipe downstream from the valve It was characterized by comprising.

In the water-cooled IC test apparatus according to claim 2 of the present invention, the water-cooled IC test apparatus according to claim 1,
The water cooling system abnormality detection means includes a pressure sensor and a flow sensor provided in at least one of the supply pipe and the discharge pipe, and a temperature sensor provided in the supply pipe and the discharge pipe. It is characterized by that.

In the water-cooled IC test apparatus according to claim 3 of the present invention, in the water-cooled IC test apparatus according to claim 1 or 2,
A heat exchange device is provided in which one of the supply pipe and the discharge pipe is connected and the other is connected to a factory side cooling water pipe.

In the water-cooled IC test apparatus according to claim 4 of the present invention, in the water-cooled IC test apparatus according to claim 3,
The heat exchange device is characterized in that a chiller is used.

In the water-cooled IC test apparatus according to claim 5 of the present invention, in the water-cooled IC test apparatus according to claim 1,
A heater device having one end connected to the supply pipe, and a water quality adjusting device having one end connected to the other end of the heater device and the other end connected to a factory side cooling water pipe. .

According to claim 1 of the present invention, there are the following effects.
When an abnormality occurs in the water cooling system on the test head side, it is possible to obtain a water cooling type IC test apparatus that can safely stop the water cooling system on the test head side regardless of the cooling water supply device.

According to claim 2 of the present invention, there are the following effects.
The water cooling system abnormality detection means is provided with a pressure sensor and a flow sensor provided in at least one of the supply pipe and the discharge pipe, and a temperature sensor provided in the supply pipe and the discharge pipe. Thus, a water-cooled IC test apparatus capable of reliably detecting an abnormality in the water-cooling system on the test head side can be obtained.

According to claim 3 of the present invention, there are the following effects.
Since a heat exchange device was provided, one connected to the supply piping and the discharge piping, and the other connected to the plant-side cooling water piping, the test head-side water cooling system was replaced with a closed circulating water circulation system. Therefore, since the circulating water circulates, water quality management becomes easy and a water-cooled IC test apparatus with improved durability can be obtained.

According to claim 4 of the present invention, there are the following effects.
Since the chiller is used for the heat exchange device, water temperature and pressure suitable for the water cooling system on the test head side can be easily obtained, and the chiller is marketable, readily available, and inexpensive, so an inexpensive water-cooled IC test device Is obtained.

According to claim 5 of the present invention, there are the following effects.
A heater device having one end connected to the supply pipe and a water quality adjusting device having one end connected to the other end of the heater device and the other end connected to the factory side cooling water pipe are provided. A water-cooled IC test apparatus that easily obtains water quality and water temperature suitable for a water-cooling system can be obtained.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an explanatory view of the main part configuration of an embodiment of the present invention.
In the figure, configurations with the same symbols as in FIG. 3 represent the same functions.
Only the difference from FIG. 3 will be described below.

  In FIG. 1, a cooling device for a water-cooled IC test apparatus according to the present invention includes a main frame 4 having power supply and abnormality management functions for the entire system, a test head 5 having a water-cooling pipe 51 for cooling an internal card, and a test head. 5 and a chiller 6 for supplying circulating water to 5.

A cooling water supply pipe 41 and a discharge pipe 42 are provided in the main frame 4.
The bypass pipe 43 is provided in the main frame 4 and connects the supply pipe 41 and the discharge pipe 42.
The solenoid valve 44 is provided in the supply pipe 41 on the downstream side of the bypass pipe 43 of the main frame 4.

  The water cooling system abnormality detection means 45 is provided in the supply pipe 41 and the discharge pipe 42 on the downstream side of the electromagnetic valve 44 of the main frame 1, and when an abnormality occurs in the water cooling system on the test head 5 side, the electromagnetic valve A signal for closing the solenoid valve 44 is sent to 44.

The water cooling system abnormality detection means 45 includes a pressure sensor 451 provided in the supply pipe 41,
A flow rate sensor 452 provided in at least one of the supply pipe 41 and the discharge pipe 42 and temperature sensors 453 and 454 provided in the supply pipe 41 and the discharge pipe 42 are provided.
In this case, a pressure sensor 451 and a temperature sensor 453 are attached to the supply pipe 41, and a flow rate sensor 452 and a temperature sensor 454 are attached to the discharge pipe 42.

  The main frame 4 and the test head 5 are connected by a power cable 46 and a circulating water pipe 47 connected to the supply pipe 41 and the discharge pipe 42, and the main frame 4 is connected to the test head 5 via the power cable 46. Then, electric power is supplied and the circulating water supplied from the chiller 6 is relayed to the test head 5 via the circulating water pipe 47.

The chiller 6 is directly supplied from the factory via the power cable 61 and operates with electric power, and supplies and circulates the circulating water to the main frame 4 via the circulating water piping 62.
The chiller 6 includes a heat exchanger 601, a pump 602, and temperature control means 603.
The circulating water returned to the chiller 6 by the circulating water pipe 62 is heat-exchanged and exhausted by the heat exchanger 601 to the factory cooling water supplied by the factory cooling water pipe 63.

When a water cooling system abnormality occurs inside the test head 5, it is detected by the sensors 451, 452, 453, 454 inside the main frame 4, the electromagnetic valve 44 is closed, and the circulating water supply to the test head 5 is stopped. The power supply by the power cable 46 is also stopped.
Since the circulating water supplied from the chiller 6 returns to the chiller 6 via the bypass pipe 43, the chiller 6 maintains normal operation.

When an abnormality occurs on the chiller 6 side, the operation of the chiller 6 itself is normally controlled on the chiller 6 side by an abnormality detection means included in the chiller 6 alone.
As a result, the output of the circulating water supplied to the main frame 4 becomes abnormal, and any of the temperature, pressure, and flow rate becomes abnormal, so the abnormality is indirectly detected by the sensors 451, 452, 453, and 454 inside the main frame 4. The same operation is performed.

  Even if the chiller 6 itself does not have an abnormality detection function, if temperature, pressure, or flow rate that affects the water cooling system is supplied, the internal sensors 451, 452, 453, and 454 of the main frame 4 detect the main frame. Protection operation is possible on the 4 side.

As a result,
When an abnormality occurs in the water cooling system on the test head 5 side, a water-cooled IC test apparatus is obtained that can safely stop the water cooling system on the test head 5 side regardless of the cooling water supply device.

  The water cooling system abnormality detection means 45 includes a pressure sensor 451 provided in the supply pipe 41, a flow rate sensor 452 provided in at least one of the supply pipe 41 and the discharge pipe 42, and the supply pipe 41 and the discharge. Since the temperature sensors 453 and 454 provided in the piping 42 are provided, a water-cooled IC test apparatus capable of reliably detecting an abnormality in the water-cooling system on the test head 5 side is obtained.

  Since the heat exchange device in which one is connected to the supply pipe 41 and the discharge pipe 42 and the other is connected to the factory side cooling water pipe 63 is provided, the water cooling system on the test head 5 side is closed. Since the circulating system can be used, the circulating water circulates, so that water quality management becomes easy and a water-cooled IC test apparatus with improved durability can be obtained.

  Since the chiller 6 is used as the heat exchange device, water temperature and pressure suitable for the water cooling system on the test head 5 side can be easily obtained, and the chiller 6 is commercially available, readily available, and inexpensive. An IC test device is obtained.

FIG. 2 is an explanatory view of the main part configuration of another embodiment of the present invention.
In FIG. 2, one end of the heater device 71 is connected to the supply pipe 41.
The water quality adjusting device 72 has one end connected to the other end of the heater device 71 and the other end connected to the pipe 4 of the factory side cooling water.

  As a result, a heater device 71 having one end connected to the supply pipe 41 and a water quality adjusting device 72 having one end connected to the other end of the heater device 71 and the other end connected to the factory-side cooling water pipe 64 are provided. As a result, a water-cooled IC test apparatus can be obtained in which water quality and water temperature suitable for the water-cooling system on the test head 5 side can be easily obtained.

The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.

It is principal part structure explanatory drawing of one Example of this invention. It is principal part structure explanatory drawing of the other Example of this invention. It is structure explanatory drawing of the prior art example generally used conventionally.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Main frame 11 Power supply cable 12 Power supply cable 2 Test head 21 Water cooling piping 3 Chiller unit 31 Chiller 311 Heat exchanger 312 Pump 313 Temperature control means 32 Abnormality detection means 33 Circulating water piping 34 Factory cooling water piping 35 Alarm cable 4 Main frame 41 Supply piping 42 Discharge piping 43 Bypass piping 44 Solenoid valve 45 Water cooling system abnormality detection means 451 Pressure sensor 452 Flow rate sensor 453 Temperature sensor 454 Temperature sensor 46 Power cable 47 Circulating water piping 5 Test head 51 Water cooling piping 6 Chiller 601 Heat exchanger 602 Pump 603 Temperature control means 61 Power cable 62 Circulating water piping 63 Factory cooling water piping 71 Heater device 72 Water quality adjustment device

Claims (5)

In a water-cooled IC test apparatus comprising a test head to which power and cooling water are supplied from a main frame that supplies power to the entire system,
A cooling water supply pipe and a discharge pipe provided in the main frame;
A bypass pipe provided in the main frame for communicating the supply pipe and the discharge pipe; and a solenoid valve provided in the supply pipe downstream of the bypass pipe of the main frame;
A signal for closing the solenoid valve in the solenoid valve when an abnormality occurs in the water cooling system on the test head side provided in the supply pipe and the discharge pipe on the downstream side of the solenoid valve of the main frame. A water-cooled IC test apparatus comprising: a water-cooling system abnormality detecting means for sending. The water cooling system abnormality detection means includes a pressure sensor provided in the supply pipe,
A flow sensor provided in at least one of the supply pipe and the discharge pipe;
The water-cooled IC test apparatus according to claim 1, further comprising a temperature sensor provided in the supply pipe and the discharge pipe. The water-cooled IC test according to claim 1 or 2, further comprising a heat exchange device in which one of the supply pipe and the discharge pipe is connected and the other is connected to a factory-side cooling water pipe. apparatus. The water-cooled IC test device according to claim 3, wherein a chiller is used as the heat exchange device. A heater device having one end connected to the supply pipe;
The water-cooled IC testing device according to claim 1, further comprising: a water quality adjusting device having one end connected to the other end of the heater device and the other end connected to a pipe on the factory side.

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