JP2009014760A5 - - Google Patents
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- Publication number
- JP2009014760A5 JP2009014760A5 JP2007173107A JP2007173107A JP2009014760A5 JP 2009014760 A5 JP2009014760 A5 JP 2009014760A5 JP 2007173107 A JP2007173107 A JP 2007173107A JP 2007173107 A JP2007173107 A JP 2007173107A JP 2009014760 A5 JP2009014760 A5 JP 2009014760A5
- Authority
- JP
- Japan
- Prior art keywords
- particles
- optical
- optical apparatus
- concavo
- particle diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007173107A JP5028163B2 (ja) | 2007-06-29 | 2007-06-29 | 光学機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007173107A JP5028163B2 (ja) | 2007-06-29 | 2007-06-29 | 光学機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009014760A JP2009014760A (ja) | 2009-01-22 |
| JP2009014760A5 true JP2009014760A5 (enExample) | 2010-08-05 |
| JP5028163B2 JP5028163B2 (ja) | 2012-09-19 |
Family
ID=40355779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007173107A Expired - Fee Related JP5028163B2 (ja) | 2007-06-29 | 2007-06-29 | 光学機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5028163B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013033225A (ja) * | 2011-06-30 | 2013-02-14 | Canon Inc | 撮像装置及び画像形成装置 |
| JP2017010060A (ja) * | 2011-06-30 | 2017-01-12 | キヤノン株式会社 | 撮像装置及び画像形成装置 |
| DE102014216118A1 (de) | 2014-08-13 | 2016-02-18 | Carl Zeiss Smt Gmbh | Vakuum-System, insbesondere EUV-Lithographiesystem, und optisches Element |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08211202A (ja) * | 1995-02-07 | 1996-08-20 | Hitachi Ltd | 撥水撥油性超微粒子を有する光透過板およびその製造方法 |
| JP2000308860A (ja) * | 1999-02-24 | 2000-11-07 | Toto Ltd | 複合材の清浄化方法及びセルフクリーニング性複合材機構 |
| JP4187477B2 (ja) * | 2002-08-05 | 2008-11-26 | 大日本印刷株式会社 | 低反射フィルム |
| CN1804714B (zh) * | 2005-01-12 | 2011-08-03 | 佳能株式会社 | 光学设备 |
| JP2007187846A (ja) * | 2005-01-12 | 2007-07-26 | Canon Inc | 光学機器 |
| JP2007183366A (ja) * | 2006-01-05 | 2007-07-19 | Pentax Corp | 防塵性光透過性部材及びその用途、並びにその部材を具備する撮像装置 |
-
2007
- 2007-06-29 JP JP2007173107A patent/JP5028163B2/ja not_active Expired - Fee Related
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