JP2009000617A - Device for removing dust on surface of substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To shorten a stopping time of a device for removing dust on the surface of a substrate accompanying inspecting and repairing by efficiently performing the inspecting and repairing of a wiping-off roll 13, a driving roll 14 and a roll to be driven 16. <P>SOLUTION: In a device for removing dust on the surface of a substrate provided with the wiping-off roll 13 having a sticky peripheral surface sticking and wiping off dust sticking to a substrate flat surface 11, a cleaning pad 21 wiping off dust from the sticky peripheral surface 12 of the wiping-off roll 13, a transfer device 22 for the wiping-off roll reciprocally moving the wiping-off roll 13 between the substrate flat surface 11 and the cleaning pad 21, and a driving roll 14 rotating and driving the wiping-off roll 13 at a position in contact with the cleaning pad 21 apart from the substrate flat surface 11, the roll to be driven 16 in rolling contact with the driving roll 14 is journaled by the rotary shaft 15 of the wiping-off roll 13. The peripheral surface 19 of the roll to be driven 16 is constituted of a softer polymer in rubber hardness compared with the peripheral surface 20 of the roll to be driven 14. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate surface dust wiping device that rotates in contact with a plane of a flat substrate to be conveyed and adheres and wipes off dust adhering to the plane of the substrate.

  A cleaning pad is attached to the substrate surface dust removal device, and dust that is wiped off from the substrate surface and adheres to the adhesive peripheral surface of the wiping roll is wiped off with the cleaning pad to keep the adhesive peripheral surface dust-free. Is known (see, for example, Patent Documents 1, 2, and 3).

  The substrate surface dust removal device having a cleaning pad is provided with a wiping roll moving device and a dust detection sensor for detecting dust adhering to the adhesive peripheral surface, and dust adhering to the adhesive peripheral surface is located. It is also known that the dust detection sensor senses that a fixed amount has been reached, activates the wiping roll moving device, and moves the wiping roll from the substrate surface to the cleaning pad (see, for example, Patent Document 4).

  The substrate surface dust removal device is equipped with a cleaning pad drive, and the cleaning pad is moved back and forth in parallel with the rotation axis of the wiping roll to remove dust adhering to the adhesive peripheral surface of the wiping roll with the cleaning pad. It is also known to wipe off and maintain the adhesive peripheral surface in a dust-free state (see, for example, Patent Documents 1, 2, 3, and 4).

  The cleaning pad is wound and held in a roll shape in order to constantly keep the dust-free state by changing the contact surface with the adhesive peripheral surface. A cleaning liquid is applied to the cleaning pad to promote detachment of dust from the adhesive peripheral surface.

  The substrate surface dust removal device is provided with a plurality of wiping rolls, which are alternately moved to a cleaning pad for cleaning, and at the time of cleaning, the other wiping rolls are in contact with the substrate plane to remove dust. It is also publicly known to operate (see, for example, Patent Documents 1, 2, and 5).

Since the wiping roll has an adhesive peripheral surface, when it comes into contact with the plane of the substrate to be conveyed, the wiping roll is rotationally driven by the substrate that is conveyed and moved. Therefore, it is not necessary to attach a driving roll for rotating the wiping roll for wiping off dust adhering to the substrate.
However, when the dust adhering to the adhesive peripheral surface of the wiping roll is wiped off by the cleaning pad, the wiping roll is pulled away from the base material plane, so a drive roll for rotating the wiping roll is provided. I need it.

Japanese Patent Laid-Open No. 08-187457 (Japanese Patent No. 2687118) JP 08-281178 A (Patent No. 3160795) Japanese Patent Laid-Open No. 02-227177 (Japanese Patent Publication No. 05-79395) JP 08-047674 A (Patent No. 300705) Japanese Patent Laid-Open No. 01-25891 (Japanese Patent Publication No. 06-47284)

  About the wiping roll cleaning apparatus which wipes off the dust adhering to the adhesive peripheral surface 12 of the wiping roll with the cleaning pad 21, the driving roll 14 that rotationally drives the wiping roll 13 to a part away from the substrate surface dust removing apparatus. And a drive motor 33 that rotationally drives the drive roll 14, while the driven roll 16 that is rotationally driven in contact with the drive roll 14 is supported on the rotary shaft 15 of the wiping roll 13.

However, the rotational drive of the driven roll 16 by the drive roll 14 is frictional transmission, and although the material having excellent wear resistance is used on the peripheral surface of these rolls, the drive roll 14 and the driven roll 16 are regularly inspected. However, it is repaired as necessary, and in some cases replacement is also necessary.
Further, in the dust wiping process from the base material plane by the wiping roll, even if there is no wear of the wiping roll 13 due to slippage with the base material flat surface 11, the adhesive by the cleaning liquid that wipes off the dust adhered to the adhesive peripheral surface 12. Deterioration and deterioration over time of the peripheral surface 12 are unavoidable, the wiping roll 13 is removed, the adhesive peripheral surface 12 is periodically inspected, and the adhesive skin constituting the adhesive peripheral surface 12 is replaced as necessary. Repair is also required.

  Therefore, the present invention aims to efficiently perform inspection and repair of the wiping roll 13, the driving roll 14, and the driven roll 16, and to shorten the stop time of the substrate surface dust removal device accompanying the inspection and repair. To do.

  The substrate surface dust wiping device according to the present invention is (a) an adhesive circumference that rotates in contact with the plane of the flat substrate 11 to be conveyed and adheres and wipes off dust adhering to the plane of the substrate 11. A wiping roll 13 having a surface, (b) a cleaning pad 21 that contacts the adhesive peripheral surface 12 of the wiping roll 13 and wipes off dust adhering to the adhesive peripheral surface 12, and (c) a flat surface of the substrate 11 A wiping roll moving device 22 that reciprocally moves the wiping roll between the cleaning pad 21 and (d) a portion that is driven by the wiping roll moving device 22 and contacts the cleaning pad 21 away from the substrate plane 11. And (e) a driven roll 16 that is driven to rotate in contact with the driving roll 14 at a portion where the wiping roll 13 contacts the cleaning pad 21. Roll 13 times (F) The peripheral surface 19 of the driven roll 16 is made of a polymer material having a softer rubber hardness than the peripheral surface 20 of the drive roll 14. .

  Although the adhesive peripheral surface 12 of the wiping roll is less likely to be worn, it is inevitable that the adhesive peripheral surface 12 is deteriorated or deteriorated over time by the cleaning liquid that wipes off dust adhered to the adhesive peripheral surface 12, and the wiping roll 13 is removed. A periodic inspection and repair is required in which the adhesive peripheral surface 12 is inspected, and the adhesive skin constituting the adhesive peripheral surface 12 is replaced as necessary. However, in the present invention, the transmission mechanism between the driving roll 14 and the wiping roll 13 is a friction transmission in which the driving roll 14 and the driven roll 16 are in contact with each other, so that the wiping roll 13 is easily removed during periodic inspection and repair. At that time, since the driven roll 16 is pivotally supported by the rotating shaft 15 of the wiping roll 13, it can be removed together with the wiping roll 13. Simultaneously with the inspection and repair of the peripheral surface 12, the peripheral surface 19 of the driven roll 16 can be inspected and repaired.

In particular, according to the present invention, the peripheral surface 20 of the drive roll 14 is made of a polymer material having a rubber hardness higher than that of the peripheral surface 19 of the driven roll 16, and the rubber hardness of the peripheral surface 20 of the drive roll is set to the circumference of the driven roll. Since it is harder than the surface 19, the durability of the drive roll 14 is increased and it can withstand long-term use. Therefore, it is not necessary to replace the drive roll 14 over a long period of time, and the drive roll 14 is not inspected and repaired. That's it.
Thus, the substrate surface dust wiping device of the present invention is easy to remove the wiping roll 13 and can simultaneously inspect and repair the adhesive peripheral surface 12 and the driven roll 16, while the peripheral surface of the drive roll 14. As for No. 20, inspection and repair are unnecessary, and the trouble of removing the drive roll 14 is saved, and the stop time associated with inspection and repair is shortened.

  On the peripheral surface 19 of the driven roll 16 and the peripheral surface 20 of the driving roll 14, butyl rubber (isoprene / isobutylene / rubber), nitrile / butadiene / rubber, hydrogenated nitrile / butadiene / rubber, polyurethane, Rubber containing ethylene, propylene, rubber, etc. is used, and the rubber hardness of those peripheral surfaces is applicable to butyl rubber (isoprene, isobutylene, rubber), nitrile butadiene rubber, hydrogenated nitrile butadiene rubber, It is adjusted according to the type and amount of auxiliary materials such as polyurethane, ethylene, propylene, rubber, and the like, vulcanization (crosslinking) agent, vulcanization (crosslinking) accelerator, filler, plasticizer and the like.

When the substrate surface dust wiping device of the present invention is used for adhering and wiping dust adhering to the surface of a stretchable substrate, for example, a thin plastic film 11 having a film thickness of 30 μm or less, The rotation of the wiping roll 13 that rotates with the plastic film 11 is delayed, and extra tension is applied to the plastic film 11 due to the difference between the running speed of the plastic film 11 and the peripheral speed of the wiping roll 13. Due to the resistance received from the wiping roll 13, the thin plastic film 11 breaks, wrinkles, or internal distortion occurs, and the characteristics of the plastic film 11 are easily impaired.
In such a case, in the process of adhering dust from the thin plastic film 11 and wiping it, the wiping roll 13 is actively rotated by the drive motor, not by the thin plastic film 11 being conveyed. It is desirable that the rotational speed on the adhesive peripheral surface of the wiping roll 13 and the transport speed of the thin plastic film 11 are always the same constant speed.

  FIG. 2 illustrates a substrate surface dust wiping device that actively drives the wiping roll 13 to rotate, and a driving roll 14 ′ that contacts the driven roll 16 pivotally supported by the rotating shaft 15 of the wiping roll 13. Then, a drive motor 33 ′ that rotationally drives the drive roll 14 ′, a speed reading device 31 that reads the conveyance speed of the substrate 11, and a speed signal 32 read by the speed reading device 31 are transmitted to the drive motor 33 ′. A signal transmission means 34 is provided, and the rotational speed on the adhesive peripheral surface of the wiping roll 13 and the transport speed of the base material 11 are synchronized with each other by the speed signal 32 read from the base material 11. The speed reader 31 is applied with an encoder attached to a transport roll such as a feed roll that feeds out the base material 11, a pull-out roll that pulls out the base material 11, and a guide roll that is arranged between the feed roll and the pull-out roll. As the drive motor 33 ', an induction motor, a servo motor, a stepping motor, or the like is applied.

  For the drive roll 14 ′ and the driven roll 16 that rotate and drive the wiping roll 13 in synchronization with the transport speed of the base material 11, the peripheral surface 19 of the driven roll 16 is also compared with the peripheral surface 20 ′ of the drive roll 14 ′. In the periodic inspection and repair, the wiping roll 13 is easily removed and the peripheral surface 20 ′ of the drive roll 14 ′ is not required to be inspected and repaired.

The cleaning pad 21 is made to be a winding type, and is sequentially drawn out so that a clean new part touches the wiping roll, wetted by applying an evaporative cleaning liquid, and easily wipes off dust on the adhesive peripheral surface 12 of the wiping roll, Efficiently wipes and cleans the wiping roll.
About the wiping roll moving device 22 for moving the wiping roll back and forth between the substrate flat surface 11 and the cleaning pad 21, and the cleaning pad moving device for moving the cleaning pad 21 back and forth parallel to the rotating shaft 15 of the wiping roll 13 The conventional techniques disclosed in the aforementioned Patent Documents 1, 2, 3, 4, 5, etc. can be applied.

It is a principal part perspective view of the base-material surface dust wiping apparatus which concerns on this invention. It is a principal part perspective view of the base-material surface dust wiping apparatus which concerns on this invention.

Explanation of symbols

11: Base material (plane)
12: Adhesive peripheral surface 13: Wiping roll 14: Drive roll 15: Rotating shaft 16: Driven roll 19, 20: Peripheral surface 21: Cleaning pad 22: Wiping roll moving device 31: Speed reading device 32: Speed signal 33: Drive motor 34: signal transmission means

Claims (1)

(A) A wiping roll (13) having an adhesive peripheral surface that rotates in contact with the plane of the flat substrate (11) to be conveyed and adheres and wipes off dust adhering to the plane of the substrate (11). When,
(B) a cleaning pad (21) that contacts the adhesive peripheral surface (12) of the wiping roll (13) and wipes off dust adhering to the adhesive peripheral surface (12);
(C) a wiping roll moving device (22) for reciprocating the wiping roll between the flat surface of the substrate (11) and the cleaning pad (21);
(D) a drive roll (14) that is driven by the wiping roll moving device (22) to rotate the wiping roll (13) at a site that is separated from the substrate plane (11) and contacts the cleaning pad (21); Comprising
(E) The driven roll (16) that is rotationally driven in contact with the driving roll (14) at the portion where the wiping roll (13) is in contact with the cleaning pad (21) is the rotating shaft of the wiping roll (13) ( 15)
(F) Substrate surface dust wiping device in which the peripheral surface (19) of the driven roll (16) is made of a polymer material having a softer rubber hardness than the peripheral surface (20) of the drive roll (14). .

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