JP2008506116A5 - - Google Patents
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- Publication number
- JP2008506116A5 JP2008506116A5 JP2007520494A JP2007520494A JP2008506116A5 JP 2008506116 A5 JP2008506116 A5 JP 2008506116A5 JP 2007520494 A JP2007520494 A JP 2007520494A JP 2007520494 A JP2007520494 A JP 2007520494A JP 2008506116 A5 JP2008506116 A5 JP 2008506116A5
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- JP
- Japan
- Prior art keywords
- volume
- data
- measurement system
- interval
- choke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005259 measurement Methods 0.000 claims 33
- 238000000034 method Methods 0.000 claims 17
- 239000012530 fluid Substances 0.000 claims 14
- 238000011144 upstream manufacturing Methods 0.000 claims 8
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/887,591 US7412986B2 (en) | 2004-07-09 | 2004-07-09 | Method and system for flow measurement and validation of a mass flow controller |
US10/946,031 US7424895B2 (en) | 2004-07-09 | 2004-09-21 | Method and system for flow measurement and validation of a mass flow controller |
PCT/US2005/024084 WO2006017116A2 (en) | 2004-07-09 | 2005-07-07 | Method and system for flow measurement and validation of a mass flow controller |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008506116A JP2008506116A (ja) | 2008-02-28 |
JP2008506116A5 true JP2008506116A5 (zh) | 2008-08-07 |
Family
ID=35839722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007520494A Withdrawn JP2008506116A (ja) | 2004-07-09 | 2005-07-07 | フロー測定およびマスフロー調整器の検証のための方法およびシステム |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1797489A4 (zh) |
JP (1) | JP2008506116A (zh) |
TW (1) | TWI278606B (zh) |
WO (1) | WO2006017116A2 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7474968B2 (en) * | 2005-03-25 | 2009-01-06 | Mks Instruments, Inc. | Critical flow based mass flow verifier |
US7757554B2 (en) | 2005-03-25 | 2010-07-20 | Mks Instruments, Inc. | High accuracy mass flow verifier with multiple inlets |
TWI416619B (zh) * | 2006-11-17 | 2013-11-21 | Lam Res Corp | 執行實際流動驗證的方法 |
WO2009084422A1 (ja) * | 2007-12-27 | 2009-07-09 | Horiba Stec, Co., Ltd. | 流量比率制御装置 |
US7891228B2 (en) | 2008-11-18 | 2011-02-22 | Mks Instruments, Inc. | Dual-mode mass flow verification and mass flow delivery system and method |
JP5442413B2 (ja) * | 2009-12-03 | 2014-03-12 | ルネサスエレクトロニクス株式会社 | 半導体製造装置および流量制御装置 |
GB201108854D0 (en) * | 2011-05-26 | 2011-07-06 | Spp Process Technology Systems Uk Ltd | Mass flow controller monitoring |
US10031005B2 (en) * | 2012-09-25 | 2018-07-24 | Mks Instruments, Inc. | Method and apparatus for self verification of pressure-based mass flow controllers |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3363461A (en) * | 1965-05-26 | 1968-01-16 | Peerless Paint & Varnish Corp | Method for measuring flow |
US4146051A (en) * | 1976-01-10 | 1979-03-27 | Lucas Industries Limited | Fluid flow control system |
DE69212129T2 (de) * | 1991-12-18 | 1997-01-23 | Pierre Delajoud | Massenströmungsmesser mit einschnürendem Element |
US5684245A (en) * | 1995-11-17 | 1997-11-04 | Mks Instruments, Inc. | Apparatus for mass flow measurement of a gas |
US6119710A (en) * | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
US6539968B1 (en) * | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
WO2002033361A2 (en) * | 2000-10-13 | 2002-04-25 | Mks Instruments, Inc. | Apparatus and method for maintaining a constant pressure drop across a gas metering unit |
-
2005
- 2005-07-07 EP EP05772286A patent/EP1797489A4/en not_active Withdrawn
- 2005-07-07 WO PCT/US2005/024084 patent/WO2006017116A2/en active Application Filing
- 2005-07-07 JP JP2007520494A patent/JP2008506116A/ja not_active Withdrawn
- 2005-07-08 TW TW094123260A patent/TWI278606B/zh not_active IP Right Cessation
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