JP2008286711A - Edge detector and line sensor for edge detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an edge detection device capable of accurately detecting an edge portion of a shielding object even when there are fluctuations in ambient temperature in a measurement space and variations in characteristics of each constituent component during manufacture.
A light projecting unit comprising: a laser light source that generates monochromatic light; a light projecting lens that converts monochromatic light from the laser light source into monochromatic parallel light; and a light projecting window that emits the monochromatic parallel light; A light receiving window provided opposite to the light projecting window, a light diffusing element for diffusing the monochromatic parallel light entering from the light receiving window in a predetermined range, and a plurality of light receiving cells for receiving the diffused monochromatic light And an edge in the arrangement direction of the light receiving cells of the shielding object present in the optical path of the monochromatic parallel light by analyzing the light reception amount distribution of the line sensor. A detection unit for detecting the position.
[Selection] Figure 1

Description

  The present invention relates to an optical edge detection device that receives monochromatic light emitted from a projector by a light receiver and detects an edge position of a shielding object that blocks the monochromatic light, and a line sensor used in the edge detection device. .

  FIG. 10 is a diagram illustrating a configuration of a conventional edge detection device disclosed in Patent Document 1. In FIG. In FIG. 10, the edge detection apparatus includes a line sensor 100, a projector 101, and an edge detection unit 102. The line sensor 100 has a plurality of light receiving cells (pixels) arranged at a predetermined pitch in a certain direction, and receives the monochromatic parallel light emitted from the projector 101. The light projector 101 is disposed to face the light receiving surface of the line sensor 100, and includes a light source 101a composed of a laser diode (LD), an optical fiber 101b for guiding monochromatic light (laser light), a light emitting lens 101c, and a driver IC 101d that controls the LD. Is provided. In FIG. 10, the light projecting unit 1, the light receiving unit 2, and the like are housed in a housing.

  In the projector 101, the monochromatic light (laser light) generated by the light source 101 a is guided to the projector lens 101 c through the optical fiber 101 b, converted into monochromatic parallel light by the projector lens 101 c, and then applied to the line sensor 100. Irradiated. When the shielding object 104 passes through the measurement space 103 formed between the projector 101 and the light receiving surface of the line sensor 100, the monochromatic parallel light irradiated to the line sensor 100 is shielded. The edge detection unit 102 includes a microcomputer, and detects the edge position in the arrangement direction of the light receiving cells of the shielding object 104 that shields the monochromatic parallel light in the measurement space 103 by analyzing the output of the line sensor 100.

  The detection of the edge position of the shield 104 by the edge detection unit 102 is caused by the change in the total amount of light received by the line sensor 100 or the change of the shield 104 caused by the shield 104 blocking a part of the monochromatic parallel light in the measurement space 103. This is done by analyzing a light receiving pattern (distribution of received light amount) caused by Fresnel diffraction occurring at the edge portion. In this manner, the conventional edge detection device detects the edge position of the shielding object 104 with high accuracy according to the light intensity distribution on the light receiving surface of the line sensor 100. (For example, see Patent Document 1)

JP 2004-177335 A

  Since the conventional edge detection apparatus is configured as described above, it is possible to detect the position of the shielding object 104 from the width 103a where the monochromatic parallel light is not irradiated on the light receiving cells of the line sensor 100. However, there may be variations in the amount of laser light emitted or received and the interference pattern of the emitted laser for each product due to variations in the characteristics of the light receiving cell of the line sensor and the light projecting lens. The interference pattern refers to a pattern generated by scattering and reflection in a casing and combining a plurality of laser beams. In addition, since the light source 101a emits light with different wavelengths depending on the ambient temperature, the interference pattern changes depending on the ambient temperature, and the pattern of monochromatic parallel light irradiated on the line sensor 100 changes. Furthermore, since the driver IC 100d for controlling the laser light also has temperature characteristics, the output power of the light source changes depending on the ambient temperature. Due to these manufacturing variations and fluctuations in the characteristics of each element due to the ambient temperature, the light reception signal output from each light reception cell fluctuates, which hinders improvement in detection accuracy. In particular, the driver IC 100d has a surface temperature that rises several tens of minutes after the power is turned on and dissipates heat. This causes an increase in the temperature inside the projector, so that the temperature can be stably and accurately measured since the edge detector is turned on. A certain amount of time will be required.

Next, in order to protect the light receiving cell from mechanical damage, the line sensor 100 generally has a structure in which a transparent protective glass is disposed in contact with the light receiving cell. Originally, it is desirable that this protective glass is a highly transparent glass so as not to affect the light receiving characteristics, but in order to reduce the cost of the line sensor 100, an inexpensive glass having a low transparency is adopted. There is a case. For this reason, there has been a problem that the laser light incident on the protective glass causes irregular reflection or new interference, which fluctuates the output signal of each light receiving cell.

FIG. 11 is a diagram showing the amount of light received by each light receiving cell of the line sensor 100 when a transparent shield 104 such as glass is inserted into the measurement space 103 in FIG. When the line sensor 100 is irradiated with laser light as shown in FIG. 11- (1), the light receiving cell outputs a signal corresponding to the amount of light received. The ideal characteristic of the light projecting lens 101c and the light source 101a is that the light receiving characteristic is such that an arc is drawn around the center of the line sensor 100 on the light receiving side. Here, in FIG. 11- (1), it has shown that there exists an edge part of glass in the part of A. FIG. At the edge portion, the drop in the amount of received light becomes larger than that at the glass surface portion due to Fresnel diffraction, so the edge detection unit 102 determines that the edge portion is based on the degree of the drop.

On the other hand, FIG. 11- (2) shows that the wavelength of the laser beam and the output power change due to the change in the ambient temperature, the irradiation state to the line sensor 100 changes, and the amount of light received by the light receiving cell changes. FIG. Here, when glass is inserted as the shielding object 104 as in FIG. 11- (1), a drop in the amount of light received due to the edge of the glass occurs in the portion A, but the temperature in the portion B, which is a free space portion, also occurs. There may be a drop in the amount of received light due to a change or fluctuation in the interference pattern of the laser beam. In this case, since the edge detection unit 102 determines a drop in the predetermined amount of received light as a reference threshold value, it erroneously determines that there is an edge in the portion B which is a free space portion. Conventionally, as a method of avoiding this misjudgment, an edge portion is detected only when a reference value of a predetermined level is set from the minimum value of the received light amount when there is no detection target, and the received light amount below this reference value is detected. A method of judging is proposed. However, since the ambient temperature changes constantly and the amount of received light changes accordingly, it cannot be used in an environment where the ambient temperature varies. On the other hand, there is a method of providing a function of measuring the ambient temperature with a temperature sensor or the like and making the reference value variable according to the change in ambient temperature, but very complicated control is required. Therefore, in practice, it is necessary to stabilize the ambient temperature around the light source, and there is a problem that an expensive and large-scale system must be constructed.

  As described above, the conventional edge detection device has a problem in that the light reception signal output from each light receiving cell differs depending on the ambient temperature and the change in the wavelength of the laser light and the output power, which adversely affects the performance of the device. In addition, there is a problem in that the amount of laser light emitted or received varies from product to product due to variations in the characteristics of the light receiving cell of the line sensor and the light projecting lens, and the performance of the apparatus is adversely affected. Furthermore, in an inexpensive line sensor, the laser light incident on the protective glass of the line sensor is subject to irregular reflection and new interference, which increases the degree to which the received light signal output from each light receiving cell fluctuates. When detecting a simple edge, it was impossible to use an inexpensive line sensor.

  The present invention has been made to solve the above-described problems, and reduces the influence of fluctuations in the ambient temperature in the measurement space and manufacturing variations of the constituent parts, so that the edge portion of the shield can be easily formed. An object of the present invention is to obtain an edge detection device that can avoid erroneous detection.

An edge detection apparatus according to the present invention includes a laser light source that generates monochromatic light, a light projecting lens that converts the monochromatic light from the laser light source into monochromatic parallel light, and a light projection window that emits the monochromatic parallel light. A light projecting unit, a light receiving window provided opposite to the light projecting window, a light diffusing element that diffuses the monochromatic parallel light entering from the light receiving window within a predetermined range, and receiving the diffused monochromatic light A light receiving unit comprising a line sensor in which a plurality of light receiving cells are arranged at a predetermined pitch in one direction, and the light receiving cell of a shielding object present in the optical path of the monochromatic parallel light by analyzing a light receiving amount distribution of the line sensor And an edge detecting device that detects an edge position in the arrangement direction.

Moreover, the edge detection apparatus according to the present invention selects and uses the haze of the light diffusing element in accordance with the transmittance of the shielding object that varies depending on the type of the shielding object.

Preferably, the edge detection device has a haze of the light diffusing element of 50% or less.

  In the edge detection device according to the present invention, a protective glass is provided on the light receiving cell of the line sensor, and the light diffusing element is bonded to the protective glass.

  According to the edge detection device of the present invention, a laser light source that generates monochromatic light, a projection lens that converts the monochromatic light from the laser light source into monochromatic parallel light, and a projection window that emits the monochromatic parallel light; A light projecting unit comprising: a light receiving window provided opposite to the light projecting window; a light diffusing element that diffuses the monochromatic parallel light entering from the light receiving window within a predetermined range; and the diffused monochromatic light A light receiving unit comprising a line sensor in which a plurality of light receiving cells for receiving light are arranged at a predetermined pitch in one direction, and analyzing the received light amount distribution of the line sensor, the shielding member existing in the optical path of the monochromatic parallel light Since it has a detector that detects the edge position in the array direction of the light receiving cells, even if the wavelength or output power of the laser light changes due to changes in the ambient temperature, a sudden change occurs in the output signal from the light receiving cells. Not again Even if the in-sensor light-receiving cell or the projection lens has variations in manufacturing characteristics, a stable output signal can be supplied to the edge detection unit, and a space part without an obstruction can be erroneously detected as an edge part. There is an effect that it can be prevented.

  According to the invention, since the haze (cloudiness) of the light diffusing element is selected in accordance with the transmittance of the shielding object, the shielding object does not cause variations in output signals from the light receiving cells or abrupt changes. Even if the type changes, a stable output signal can be supplied to the edge detection unit.

  Further, according to the present invention, by setting the haze of the light diffusing element to 50% or less, a stable output signal is supplied to the edge detection unit without causing a variation in output signal from the light receiving cell or a sudden change. There is an effect that an edge portion of a transparent body such as glass can be accurately detected.

  Furthermore, according to the present invention, a protective glass is provided on the light receiving cell of the line sensor element, and by adhering a light diffusion element to the protective glass, irregular reflection of the laser beam by the protective glass or a new interference pattern can be obtained. The effect can be eliminated, and an inexpensive line sensor can be used.

FIG. 1 is a diagram showing a configuration of an edge detection apparatus according to an embodiment of the present invention. The edge detection apparatus includes a light projecting unit 1, a light receiving unit 2, and an edge detection unit 3. The light projecting unit 1 is disposed to face the light receiving surface of the light receiving window 23 of the light receiving unit 2, and includes a light source 10 including a laser diode (LD), a driver IC 11 that controls the light source 10, a light projecting lens 12, and a light projecting window 13. Is provided. The light projecting lens 12 emits monochromatic light generated by the light source 10 toward the center of the line sensor 21 of the light receiving unit 2 through the light projecting window 13. The monochromatic light referred to here is light having a wavelength distribution characteristic of a degree obtained by using industrially produced laser diodes or optical filters. The projection window 13 is transparent glass.

  The light receiving unit 2 includes a light receiving window 23, a light diffusing element 22, and a line sensor 21. The line sensor 21 has a plurality of light receiving cells (pixels) arranged at a predetermined pitch in a certain direction, and receives the monochromatic light emitted from the light projecting unit 1. Here, the light receiving window 23 has a filter function in accordance with the wavelength of the monochromatic light of the light source 10 to be used, so that the influence of disturbance light on the line sensor 21 can be reduced.

The edge detection unit 3 includes an A / D conversion unit 31, a processor 32, and a display unit 33. The A / D conversion unit 31 converts the output signal of the light receiving cell output from the line sensor 21 of the light receiving unit 2 from an analog value to a digital value. The processor 32 analyzes the output signal of the line sensor 21 digitally converted by the A / D conversion unit 31, and the edge in the arrangement direction of the light receiving cells of the shielding object 5 that shields a part of the monochromatic parallel light in the measurement space 4. Detect position. The display unit 33 displays the detection result obtained by the processor 32. The A / D conversion unit 31 and / or the processor 32 may be provided in the light receiving unit 2. In that case, since the digital communication is performed between the light receiving unit 2 and the edge detecting unit 3, it is strong against noise and the wiring distance can be extended. Further, the entire edge detector 3 may be provided in the light receiver 2.

FIG. 2 is a diagram showing the amount of light received by each light receiving cell of the line sensor 21. The horizontal axis represents the position of each light receiving cell, and the vertical axis represents the intensity of monochromatic light received (the amount of received light). The measurement space 4 is a space between the light projecting window 13 and the light receiving window 23. When the shielding object 5 is an opaque body, when the measurement space 4 is shielded, the light receiving cell receives almost zero light in the shielded part 5a. Become. In the edge detection unit 3, the position of the edge part of the shielding object 5 is calculated and determined from the ratio between the array length 21 a of the light receiving cells in the line sensor 21 and the shielded part 5 a. In the case of a transparent object (transparent body) such as glass or film, the amount of light received by the light receiving cell of the shielded portion 5a is not zero, compared to a state in which no shield 5 is present. As a result, the amount of received light decreases. Note that the rate of reduction depends on the transparency of the shield 5 and the like.

  FIG. 3 is a diagram for explaining Fresnel diffraction used for detection of an edge portion. The light intensity distribution by Fresnel diffraction rises steeply near the edge position as shown in FIG. 3, and converges while oscillating as the distance from the edge position increases. When detecting the position of the edge portion of the shield 5 using the light intensity distribution on the light receiving surface of the line sensor 21 by Fresnel diffraction of monochromatic parallel light, the characteristics of the light intensity distribution are obtained in advance with high accuracy. However, a highly accurate approximation method of this characteristic is disclosed in Japanese Patent Application Laid-Open No. 2004-177335.

  In the light receiving unit 2, by installing the light diffusing element 22 between the light receiving window 23 and the line sensor 21, the monochromatic light transmitted through the light diffusing element 22 is diffused with a predetermined diffusion width, and is irradiated to the line sensor 21. Therefore, stabilization of the output signal of the line sensor 21 according to the present invention is realized. That is, by installing the light diffusing element 22 on the front surface of the line sensor 21, the monochromatic light input to the light receiving cell is diffused and irradiated to each light receiving cell from multiple directions. It becomes possible to irradiate the shielding object 5 with monochromatic light and input the Fresnel diffraction of the edge portion to the line sensor 21. As a matter of course, Fresnel diffraction does not occur even when the shield 5 is irradiated with the diffused laser light, and therefore, for example, the light diffusing element 22 cannot be attached to the surface of the projection window 13 for use. The light diffusing element 22 is selected in consideration of durability, such as a thin film or plate. Specifically, a transparent plastic filed glass or the like can be used, and in particular, a light diffusion film in which a base material such as polyethylene terephthalate (PET) is coated is effective. The monochromatic light transmitted through the light diffusing element 22 is diffused with a predetermined diffusion width and is irradiated to the line sensor 21.

Further, the characteristics such as the amount of light received by the light receiving cells of the line sensor differ depending on the difference in haze (turbidity or haze) of the light diffusing element 22. Here, the haze is obtained from the ratio of the diffuse transmitted light to the total light transmitted light, and is affected by the surface roughness of the light diffusing element 22, and is expressed as a percentage (%). . The difference in the received light amount distribution output due to the difference in haze is shown in FIG. FIG. 4- (1) shows the received light amount distribution of each light receiving cell in a state where the light diffusing element 22 is not installed. The monochromatic light is not evenly irradiated to each light receiving cell due to the interference pattern of the monochromatic light, and ± 20 % Or more of the received light amount varies. In particular, depending on the interference, the received light amount undulates in units of several tens of cells. Here, FIG. 4- (2) shows the received light amount distribution when the light diffusing element 22 having a haze of 50% is installed, and the waviness of the received light amount distribution generated every several tens of cells is removed. Furthermore, FIG. 4-(3) shows the received light amount distribution when the light diffusing element 22 having a haze of 90% is installed, and variation in the received light amount between adjacent cells can be suppressed, and a more stable received light amount distribution can be obtained. Can do. This is because the laser light is diffused by installing the light diffusing element 22 immediately before entering the line sensor 21, and the diffused laser light monochromatic light is irradiated to the light receiving cell, so that monochromatic light from a plurality of directions is emitted. This is because the influence of the interference pattern is reduced. Furthermore, even if the wavelength of monochromatic light changes due to the ambient temperature and the interference pattern changes, the change in monochromatic light is limited and only a small amount of received light changes. It can be configured.

FIG. 5 is a diagram showing fluctuations in the amount of received light depending on the ambient temperature. Let the received light amount of each cell when the shield 5 is not in the measurement space 4 be the reference amount 1.00, and change the ambient temperature. In the conventional edge detection apparatus shown in FIG. 10, the fluctuation of the received light amount is about ± 20% due to the fluctuation of the interference pattern due to the change of the wavelength of the monochromatic light as shown in FIG. On the other hand, FIG. 5- (2) shows a case where the light diffusing element 22 having a haze of 90% is installed, and even if the ambient temperature is changed, the amount of received light hardly varies. In particular, as the light diffusing element 22 having a large haze is inserted, the diffusion of the monochromatic light is increased and the wavelength of the monochromatic light is more resistant to fluctuation.

  Here, FIG. 6 is a diagram showing the amount of light received when the light diffusing element 22 having a haze of 90% is installed and the opaque shield 5 is inserted into the measurement space 4. Similar to the edge detection device that does not use the conventional light diffusing element 22 shown in FIG. 10, Fresnel diffraction occurs, and the edge portion of the shield 5 can be detected without any problem.

On the other hand, FIG. 7 is a diagram showing the amount of received light when a transparent shielding object 5 such as glass is inserted into the measurement space 4. 7- (1) is the conventional edge detection apparatus shown in FIG. 10, 5a is a part in which glass is inserted, and 5b is a free space without the shielding object 5. FIG. In this case, a large drop in the amount of received light such as 5c occurs at the edge portion due to Fresnel diffraction, and the position of the edge can be detected from this drop. For example, in FIG. 7- (1), when the threshold value of the variation in the amount of received light that is determined to be an edge is 0.5, the drop in the amount of received light (converted value) of the portion 5a in which the glass is inserted is 0.8. Therefore, the edge portion can be accurately detected.

Here, when the light diffusing element 22 having a haze of 90% is arranged, the drop in the variation in the amount of received light due to the edge becomes very small as shown in FIG. This is because the diffusion of the monochromatic light is increased by the light diffusing element 22, and a large number of diffused monochromatic lights enter the light receiving cell from each direction and are in a state of being filtered. In the case of an opaque body, the light shielding portion by the shielding object 5 is clear, so that the edge detection can be performed accurately. On the other hand, when the shielding object 5 is a transparent body, the effect of Fresnel diffraction at the edge portion is reduced. Therefore, there arises a problem that accurate edge detection cannot be performed.

Then, this inventor confirmed that the subject was solved by making the haze value of a light-diffusion element low. FIG. 7- (3) shows the amount of light received when the light diffusing element 22 having a haze of 50% is arranged, which is slightly due to the edge as compared to the case without the light diffusing element 22 shown in FIG. 7- (1). Although the drop is reduced, if the edge judgment threshold is set to 0.6, the edge portion can be sufficiently detected. Furthermore, since the portion 5a into which the glass is inserted is stabilized by the light diffusing element 22, the drop in the amount of received light is small and stable, and the variation in the amount of received light in the free space 5b portion due to the ambient temperature is small. Therefore, it is possible to increase the threshold for edge judgment, and the edge portion can be sufficiently detected. In addition, when the shielding object 5 is a highly transparent glass or a very thin film, it is effective to select one having a smaller haze. On the other hand, when the shielding object 5 is an opaque body such as a knife edge, the higher the haze, the less the fluctuation of the amount of received light, and the stable measurement can be performed. Thus, it is effective for the light diffusing element 22 to select the haze according to the transmittance of the shield 5. If the haze of the light diffusing element is 50% or less, it is more preferable because both the accurate detection of the edge portion of the transparent body and the stability of the received light amount of each light receiving cell can be achieved.

FIG. 8 shows an example of the configuration of the line sensor 21 and the light diffusing element 22. The line sensor 21 receives monochromatic light by a plurality of light receiving cells 211 arranged at a predetermined pitch in one direction, but a protective glass 212 for protecting the light receiving cells 211 from dust or the like is at a position of several mm above the cells. Be placed. As shown in FIG. 9, each positional relationship is arranged so that the line sensor 21 comes under the light receiving window 23. Here, since the positional relationship between the light receiving cell 211 and the light diffusing element 22 is fixed by adhering the light diffusing element 22 onto the protective glass 212, fluctuations in the characteristics of the received light amount distribution can be suppressed. Further, the closer the light diffusing element 22 is to the light receiving cell 211, the lower the drop in Fresnel diffraction at the edge due to diffusion can be avoided, so it is preferable that the light diffusing element 22 be closer. Further, it is preferable to use a transparent glass as the protective glass 212 from the viewpoint of suppressing irregular reflection and interference of monochromatic light. However, since the cost of the line sensor 21 is increased, generally a glass with low transparency is used. Is adopted. However, by arranging the light diffusing element 22 of the present invention between the light receiving window 23 and the protective glass 212 and further adhering to the protective glass 212 of the line sensor 21, it is possible to reduce irregular reflection and interference of laser light. effective. Even if the light diffusing element 22 is installed between the protective glass 212 and the light receiving cell 211, the same effect is obtained. The light diffusing element and the protective glass are bonded with a light-transmitting adhesive such as an adhesive for optical components.

As described above, by implementing the present invention, even when the wavelength or output power of the laser beam changes due to a change in ambient temperature, the output signal from the light receiving cell does not change suddenly, and the line sensor Even if there are variations in manufacturing characteristics of the light receiving cell and the light projecting lens, a stable output signal can be supplied to the edge detection unit, and a space part without a shield is erroneously detected as an edge part. There is an effect that can be prevented. Further, as a secondary effect, it is effective in removing the influence of heat generated by the driver IC near the light source, and there is an effect of shortening the stable time from when the power is turned on until measurement is possible. Further, as a secondary effect, there is an effect that an inexpensive line sensor can be used because the influence of the irregular reflection of the laser beam by the protective glass of the line sensor and the influence of a new interference pattern can be removed.

It is a figure which shows the structure of the edge detection apparatus by Embodiment 1 of this invention. It is a figure which shows the light reception amount of each light reception cell of the line sensor in Embodiment 1. FIG. It is a figure explaining the Fresnel diffraction used for the detection of an edge part. It is a figure explaining the light reception amount distribution of each light reception cell by the difference in the haze of a light-diffusion element. It is a figure explaining the fluctuation | variation of the light reception amount by ambient temperature. It is the figure which showed the light reception amount when inserting the shielding body of an opaque body. It is the figure which showed the light reception amount when inserting the shielding body of a transparent body. It is a figure which shows the structure of a line sensor and a light-diffusion element. It is a figure which shows the positional relationship of a line sensor and a light-diffusion element. It is a figure which shows the structure of the conventional edge detection apparatus. It is a figure explaining received light quantity distribution of each light reception cell of the conventional edge detection apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light projection part 2 Light reception part 3 Edge detection part 4 Measurement space 5 Shielding object 10 Light source 11 Driver IC
DESCRIPTION OF SYMBOLS 12 Light projection lens 13 Light projection window 21 Line sensor 211 Light reception cell 212 Protective glass 22 Light diffusion element 23 Light reception window 31 A / D conversion part 32 Processor 33 Display part 100 Line sensor 101 Light projector 101a Light source 101b Optical fiber 101c Light projection lens 101d Driver IC
102 Edge detection unit 103 Measurement space 104, 104a, 104b Shielding object 105 Light receiving cell

Claims (5)

A light projecting unit comprising: a laser light source that generates monochromatic light; a light projecting lens that converts the monochromatic light from the laser light source into monochromatic parallel light; and a light projecting window that emits the monochromatic parallel light;
A light receiving window provided opposite to the light projecting window, a light diffusing element for diffusing the monochromatic parallel light entering from the light receiving window in a predetermined range, and a plurality of light receiving cells for receiving the diffused monochromatic light A light receiving unit composed of line sensors arranged at a predetermined pitch in one direction,
An edge detection apparatus comprising: a detection unit that analyzes a received light amount distribution of the line sensor and detects an edge position in an arrangement direction of the light receiving cells of a shielding object present in the optical path of the monochromatic parallel light. The edge detection device according to claim 1, wherein the light diffusing element selects and uses a haze according to a transmittance that varies depending on a type of the shielding object. The edge detection device according to claim 1, wherein the light diffusing element has a haze of 50% or less. The edge detection device according to claim 1, wherein a protective glass is provided on the light receiving cell of the line sensor, and the light diffusion element is bonded to the protective glass. Edge detection characterized in that a plurality of light receiving cells are arranged at a predetermined pitch in one direction, a protective glass is provided on the light receiving cells, and a light diffusing element having a predetermined haze is bonded to the protective glass. Licenser for equipment.

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