JP2008259793A - Method and apparatus for cleaning using high-frequency vibration - Google Patents

Method and apparatus for cleaning using high-frequency vibration Download PDF

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JP2008259793A
JP2008259793A JP2007128610A JP2007128610A JP2008259793A JP 2008259793 A JP2008259793 A JP 2008259793A JP 2007128610 A JP2007128610 A JP 2007128610A JP 2007128610 A JP2007128610 A JP 2007128610A JP 2008259793 A JP2008259793 A JP 2008259793A
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vibration
frequency vibration
frequency
radiator
water
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Masashi Ito
正志 伊藤
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TEKKUTEN KK
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  • Body Washing Hand Wipes And Brushes (AREA)
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for efficiently radiating high-frequency vibration energy using water as a propagation medium which are used for cleaning the human body or farm animals, promotion of blood circulation, antibacterial action, deodorization, and suppression of multiplication of bacteria or microorganisms in water. <P>SOLUTION: The apparatus comprises a high-frequency vibration radiation device which is sealed by a sealing substrate and a radiation diaphragm and contains piezoelectric ceramic diaphragms, metal plates and meal films that are bonded in an unimorph structure or in a bimorph structure and arranged uniformly on the inner surface of the radiation diaphragm and a vibration absorbing plate held by the rear surface, and a high-frequency power source for radiating high-frequency vibration of 20-100 kHz from the radiation diaphragm. By bringing the high-frequency vibration radiation device into contact with water, cleaning, promotion of blood circulation and antibacterial and deodorant actions are achieved. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は伝搬インピーダンスの高い水を伝搬媒体として高周波振動エネルギーを効率良く放射させて、人体や家畜類の洗浄や血行促進及び消臭抗菌をなし、或いは水中の菌類や微生物類の繁殖抑制のなしえる方法及び装置に関する。  The present invention efficiently radiates high-frequency vibration energy using water having a high propagation impedance as a propagation medium to clean human bodies and livestock, promote blood circulation and deodorize antibacterial, or prevent the growth of fungi and microorganisms in water The present invention relates to a method and an apparatus.

現在においては財やサービスの生産手段はもとより、提供される財やサービスにも環境や省エネルギー、安全性、健康維持或いは高齢者への対応等の要件を具備することが不可欠とされている。
即ち従来までの状況について見れば、入浴においては身体からの発汗や分泌物と且汚れの洗浄及び温浴に伴う疲労回復には有効な方法であるが、浴温はせいぜい42乃至45℃以下で利用されるものであるから、人体より浴水内に剥離混入する細菌類等は有機物や油脂分を栄養源として繁殖し易く、仮令排水させても風呂釜との管路内に残留して繁殖し、再利用時には浴水が著しく汚染された状態となる。
At present, it is indispensable that the goods and services provided as well as the means for producing goods and services have requirements such as environment, energy saving, safety, health maintenance, and response to the elderly.
In other words, in terms of the conventional situation, bathing is an effective method for sweating and secretions from the body, cleaning dirt, and recovering from fatigue caused by warm bathing, but bath temperature is at most 42 to 45 ° C. Therefore, bacteria that are exfoliated and mixed into the bath water from the human body are easy to propagate using nutrients such as organic substances and oils and fats, and even if they are temporarily drained, they remain in the pipeline with the bath pot and propagate. When reused, the bath water becomes extremely contaminated.

加えて入浴に際しては、温浴とともに石けんや洗剤を用いて身体を擦りながら発汗や分泌物或いは汚れの除去を図る事がなされているものの、高齢化に伴い皮膚の新陳代謝機能が低下することから、石けんや洗剤により擦り除去することは皮膚を著しく損傷せしむるばかりか、該損傷部分からの雑菌類の進入による数多の皮膚炎症を惹起せしめている結果となっている。  In addition, when taking a bath, while removing the sweat, secretions, and dirt while rubbing the body with soap and detergent together with a warm bath, the metabolic function of the skin decreases with ageing, so soap Scrubbing with a detergent or a detergent not only severely damages the skin, but also results in numerous skin irritation due to the entry of germs from the damaged part.

更に近年においては健康志向を反映して、全国各地にスーパー銭湯と称される温浴施設が林立しているものであるが、該スーパー銭湯では大人数の利用がなされるため、膨大量に昇る浴水と且加熱エネルギーを要することから省浴水化及び省エネルギー化への対処としてその殆んどが循環方式を採用している。而しながら大人数の利用はそれだけ浴水中に多種多様の発汗や分泌物及び雑菌類が混入するばかりか、この雑菌類が循環管路内にスライムとなって付着するとともに、このスライムがレジオネラ菌の格好の温床ともなる。
これがため温浴施設においては定期に次亜鉛酸ソーダ等の殺菌剤による消毒を施すものの、スライム内に潜在するレジオネラ菌には十分な殺菌効果が発揮されぬため、適宜の栄養分と且温度条件とにより急速に繁殖し、度々人命を損なう惨事を惹起せしめている。
In recent years, reflecting the health consciousness, there are many hot-spring baths called “super public baths” all over the country, but the super public baths are used by a large number of people. Since water and heating energy are required, most of them adopt a circulation system as a countermeasure for saving water and saving energy. However, the use of a large number of people not only mixes a wide variety of sweats, secretions and bacteria in the bath water, but these bacteria also adhere as slime in the circulation line, and this slime becomes Legionella bacteria. It will also be a warm bed.
For this reason, although it is regularly disinfected with a disinfectant such as sodium zincate in warm bath facilities, it does not exert sufficient bactericidal effect on Legionella bacteria that are latent in the slime, so depending on the appropriate nutrients and temperature conditions Breeding rapidly, it often causes catastrophes that kill lives.

他方養牛、養豚、養鶏等の畜産業においても、古くからの自然条件下での開放的飼育から、近年においては牛舎や豚舎或いは鶏舎等の施設内における半開放的飼育に転換されているものの、かかる半開放的施設内の床面は飼育される家畜類の糞尿や飼料残滓或いは泥土等が混在した状態におかれ、且かかる施設内は比較的温暖であることとも相俟って雑菌類が猛烈に繁殖した状態におかれている。そして乳牛においては乳房部位に昆虫類が飛来掴止し若しくは生理的痒み等を除去するため雑菌類の付着する尾部で掻打することによる乳房炎の発症や、或いは養鶏においてはコッカス菌類による脱毛死亡事故が多発している。これがため実情としては抗生物質の混入された飼料や或いは殺菌剤による消毒をなさざるを得ない状況におかれている。  On the other hand, in the animal husbandry industry such as cattle farming, pig farming and poultry farming, it has been converted from semi-open farming under natural conditions for a long time to semi-open farming in facilities such as cattle barns, pig houses or poultry houses. In addition, the floor in such a semi-open facility is mixed with manure, feed residue, mud, etc. of livestock to be reared, and in combination with the relatively warm climate in the facility. Has been bred furiously. In dairy cows, insects fly to the breast, or mastitis is caused by scratching the tail where miscellaneous fungi adhere to remove physiological itch, or death of hair loss due to Coccus fungi in poultry. There are many accidents. For this reason, as a matter of fact, there is no choice but to disinfect with feed mixed with antibiotics or disinfectant.

加えて近年では都市化による都市部への極度の集中化に伴い、土地の有効利用のうえから事務所や店舗はもとより住居に至るまで高層若しくは超高層建物への転換が図られている。
而してかかる高層若しくは超高層建物においては膨大数に亘って区画され若しくは区分所有されて利用されるもので、それぞれの区画や区分所有内では多様な業務や生活がなされるものであるから、排水される水質も極めて多種多様な水質に亘り、且各階毎には横排水管で而も所要の間隔毎に設けられた縦排水管へと連結されて浄化槽や下水道へと放流されるものである。而しながらかかる排水管は建物構造内に配設されるため年間を通して温暖なうえ、排水される水質も生活雑排水や調理用排水等有機物や油脂等が多く、従って該排水管内には細菌類や微生物類の繁殖によるスライムの付着が重積され、更には該スライムに食品残滓や毛髪等が絡着され、短期に排水管の閉塞や臭気の発生も招来されるため、定期に排水管清掃をなさねばならず、莫大な費用と時間及び労力が強いられる結果となっている。
In addition, in recent years, with the extreme concentration in urban areas due to urbanization, conversion to high-rise or super-high-rise buildings from effective use of land to offices and stores as well as residences is being attempted.
Thus, in such high-rise or super-high-rise buildings, it is divided into a huge number or divided and owned and used, and various operations and lives are made within each division and division, The quality of the drained water is very diverse, and each floor is connected to a vertical drainage pipe provided at a required interval with a horizontal drainage pipe and discharged to a septic tank and sewerage system. is there. However, since such drain pipes are installed in the building structure, it is warm throughout the year, and the drained water has a lot of organic matter and oils and fats such as daily waste water and cooking waste water. As the slime adheres due to the propagation of microorganisms and microorganisms, and food residues and hair are entangled with the slime, drainage pipes are clogged and odors are generated in the short term. This results in enormous costs, time and effort.

発明者はかかる問題に対して早くから環境や省エネルギー、安全性或いは健康保持面等にも対処できる解決手段について鋭意研究を重ねてきた結果、圧電セラミックスのピエゾ電気逆効果を利用した圧電磁器振動素子若しくは磁歪振動素子によって略100Hz乃至200MHz程度に亘る振動発生が可能であることを究明するとともに、特定の高周波振動によっては水に対してキャビテーション作用が発揮され且その使用安全性が高いこと等により、既に水中に投げ込んで超音波を発生させるものや、美容器のプロープを振動させて美肌効果を高めるもの、或いは液体を収納する容器と一体に低周波発信器と高圧電源を隔離室を介して保持させ、超音波発生素子から発生させた超音波で被処理物の洗浄をなす装置等が公知されている。
特開平10−52669号公報 特開2000−233005号公報 特開平5−253275号
As a result of intensive research on solutions that can cope with the environment, energy saving, safety, health maintenance, etc. from an early stage, the inventor has obtained a piezoelectric ceramic resonator element that uses the piezoelectric inverse effect of piezoelectric ceramics. As a result of investigating that the magnetostrictive vibration element can generate vibrations of about 100 Hz to about 200 MHz, the cavitation action is exerted on water depending on the specific high-frequency vibration, and the use safety is high. Throwing it into the water to generate ultrasonic waves, vibrating the probe of the beauty device to enhance the skin-beautifying effect, or holding the low-frequency transmitter and high-voltage power supply together with the liquid container through the isolation chamber An apparatus for cleaning an object to be processed with an ultrasonic wave generated from an ultrasonic wave generating element is known.
Japanese Patent Laid-Open No. 10-52669 Japanese Patent Laid-Open No. 2000-233005 JP-A-5-253275

而して本発明は浴水中の細菌類や微生物類の繁殖を抑制させて浴槽や水槽若しくは循環管路内の浄化とレジオネラ菌の繁殖防止を初め、洗剤の使用や擦りを要することなく身体の浄化を図り若しくは家畜類の洗浄と抗菌による防病と育成促進を図ること、或いは給水管や排水管内の細菌類や微生物類の繁殖抑制と給水管や排水管内への赤錆、スケール、スライム等の付着物の除去や付着重積を防止することにある。これがためには高周波振動の振動数領域を広範囲に亘り、且間欠的若しくは連続的に放射させ而も伝搬インピーダンスの高い水を伝搬媒体として放射伝搬させることにより、低出力で高い洗浄効果や血行促進或いは消臭抗菌効果が発揮されることに想到し本発明に至った。  Thus, the present invention suppresses the growth of bacteria and microorganisms in the bath water, purifies the inside of the bathtub, water tank or circulation line and prevents the growth of Legionella, and does not require the use of a detergent or rubbing the body. Purify or promote the prevention and breeding of livestock with antibacterial disease and antibacterial activities, or control the growth of bacteria and microorganisms in the water supply and drainage pipes and red rust, scale, slime, etc. in the water supply and drainage pipes It is to prevent the removal of deposits and accumulation of deposits. In order to achieve this, it is possible to radiate intermittently or continuously over a wide frequency range of high-frequency vibrations, and to radiate and propagate water with a high propagation impedance as a propagation medium. Or it came to the present invention that the deodorizing antibacterial effect was exhibited.

本発明は伝搬インピーダンスの高い水を伝搬媒体として高周波振動エネルギーを効率良く放射させ、人体や家畜類の洗浄や血行促進及び消臭抗菌をなし、或いは水中の菌類や微生物類の繁殖抑制しえる高周波振動による洗浄方法及びその装置を提供することにある。  The present invention efficiently radiates high-frequency vibration energy using water having a high propagation impedance as a propagation medium, cleans the human body and livestock, promotes blood circulation, and deodorizes antibacterial substances, or suppresses the growth of fungi and microorganisms in water. An object of the present invention is to provide a vibration cleaning method and an apparatus therefor.

上述の課題を解決するために本発明が用いた技術的手段は、その高周波振動放射具には20乃至100kHzの高周波振動数を振動放射しえる圧電磁器板材の一側面に金属板材及び他側面には銀、銅等の金属膜を接合したユニモルフ構造、若しくは金属板材の両側面に圧電磁器板材及びその外側面にそれぞれ銀、銅等の金属膜を接合してバイモルフ構造となしたうえ、金属やセラミックス若しくは合成樹脂素材からなる放射振動板材の内面に略均等に分散配置させ、且このユニモルフ構造若しくはバイモルフ構造体の背面には、高弾性素材からなり高周波振動を吸収緩和しえる振動吸収板材が挟持されてなり、而も密閉基板と放射振動板とにより密閉されて高周波振動放射具が形成されている。  The technical means used by the present invention to solve the above-mentioned problems is that the high-frequency vibration radiator has a metal plate material and one side surface on one side of a piezoelectric ceramic plate that can vibrate and radiate a high-frequency frequency of 20 to 100 kHz. Is a unimorph structure in which metal films such as silver and copper are joined, or a piezoelectric ceramic plate material on both sides of the metal plate material and a metal film such as silver and copper are joined on the outer side surfaces to form a bimorph structure. A vibration-absorbing plate made of a highly elastic material that can absorb and relax high-frequency vibrations is sandwiched on the inner surface of a radiating vibration plate made of ceramics or synthetic resin material. Thus, the high-frequency vibration radiator is formed by being sealed by the sealed substrate and the radiation diaphragm.

更に高周波振動放射具としては圧電磁器板材に代えて磁歪振動板材を使用することも可能で、磁歪振動板材による場合は予め所要の形状に磁歪フェライトを用いて形成してなる磁歪振動板材の脚部下端にバイアス磁場フェライト磁石を挟持させたうえ、脚部上部にそれぞれ励起用コイルを巻着させ、この励起用コイルに共振周波数に等しい周波数の高周波電力を付加してバイアス磁場に交番磁場を重ねることにより、磁歪振動板材より高周波振動を放射せしめるもので、脚部側面や下面には高周波振動を吸収緩和しえる高弾性素材からなる振動吸収板材が挟持されたうえ、全体を金属若しくはセラミックス若しくは合成樹脂素材からなる密閉基板により密閉形成された構成からなる。  Furthermore, it is possible to use a magnetostrictive vibration plate instead of a piezoelectric ceramic plate as a high-frequency vibration radiator, and in the case of using a magnetostrictive vibration plate, a leg portion of a magnetostrictive vibration plate formed in advance using a magnetostrictive ferrite in a required shape. A bias magnetic field ferrite magnet is held at the lower end, an excitation coil is wound around the upper part of the leg, and high frequency power equal to the resonance frequency is applied to the excitation coil, and an alternating magnetic field is superimposed on the bias magnetic field. Radiates high-frequency vibrations from the magnetostrictive vibration plate material, and a vibration-absorbing plate material made of a highly elastic material capable of absorbing and mitigating high-frequency vibrations is sandwiched between the side and bottom surfaces of the legs, and the whole is made of metal, ceramics or synthetic resin It is configured to be hermetically formed by a hermetically sealed substrate made of a material.

加えて高周波振動放射具としてコンデンサー振動によるものを提案されるもので、所要の寸法に形成された絶縁性基材の上面は金属素材からなり且その上面側に微細凹凸面が形成された金属背極板が接合され、更にこの金属背極板にはその上面に金属蒸着等の金属膜が施された合成樹脂フィルム材が接合されることで、微細凹凸面による空気層をコンデンサーにしてコンデンサースピーカーとして機能させ、且これら全面を耐水被覆層で密閉させた構成からなるものである。  In addition, a high-frequency vibration radiator is proposed which is based on condenser vibration. The upper surface of the insulating substrate formed to the required dimensions is made of a metal material, and a metal back surface having a fine uneven surface formed on the upper surface side. An electrode plate is joined, and a synthetic resin film material with a metal film such as metal vapor deposition on the upper surface is joined to the metal back electrode plate. And the entire surface is sealed with a water-resistant coating layer.

そしてこれら高周波振動放射具には、それぞれの高周波振動放射具を駆動させて高周波振動を振動放射させるため、高周波電源より所定の高周波数若しくは所定範囲の高周波数の高周波電力を間欠的に若しくは連続的に付加させる構成とにより、本発明高周波振動による洗浄装置が形成されるものであって、且この高周波振動放射具を浴槽や水槽若しくは給水管、排水管路内等において高周波伝搬インピーダンスの高い水と直接接触させた状態で効率良く振動放射伝搬させて、人体や家畜類の洗浄や血行促進及び抗菌消臭或いは水中の菌類、微生物類の繁殖抑制をなす高周波振動による洗浄方法に存する。  These high-frequency vibration radiators drive the high-frequency vibration radiators to vibrate and radiate high-frequency vibrations. Therefore, high-frequency power of a predetermined high frequency or a predetermined range is intermittently or continuously supplied from a high-frequency power source. The cleaning device using the high-frequency vibration of the present invention is formed by adding the high-frequency vibration radiator to the water having high high-frequency propagation impedance in a bathtub, a water tank, a water supply pipe, a drain pipe, or the like. It exists in the washing | cleaning method by the high frequency vibration which carries out the vibration radiation propagation efficiently in the state of direct contact, and carries out washing | cleaning of a human body and livestock, blood circulation promotion, antibacterial deodorization, or the suppression of the proliferation of fungi and microorganisms in water.

本発明は上述の如き構成からなるもので、高周波電源もトランジェスターやサイリスターの利用により、所要の高周波数若しくは所要の範囲の高周波数で且適宜の間隔を以って間欠的に若しくは連続的に、高周波振動放射具に対して小型で簡便な回路と大きな出力を以って付加させることができ、且高周波振動放射具が圧電磁器板材からなりユニモルフ若しくはバイモルフ構造によるときは、共振波長に関係なく極めて広範囲の高周波振動をその放射振動板材より対向方向に、拡散減衰させることなく振動放射がなしえる。加えて高周波振動放射具がコンデンサースピーカーの構成からなる場合には、高出力の振動放射が要請されぬ場合には極めて広面積に亘っての高周波振動放射がなされる。
更に高周波振動放射具が磁歪振動板材からなる場合には、バイアス磁場と交番磁場との重ね合せにより振動放射がなされるため、小面積の振動放射面より強力な高周波振動放射がなしえる。
The present invention is configured as described above, and the high-frequency power supply is also intermittently or continuously at a required high frequency or a high frequency within a required range and at an appropriate interval by using a transientr or a thyristor. It can be added to a high-frequency vibration radiator with a small and simple circuit and a large output, and when the high-frequency vibration radiator is made of a piezoelectric ceramic plate and has a unimorph or bimorph structure, regardless of the resonance wavelength. A very wide range of high-frequency vibrations can be radiated without diffusing and attenuating in the opposite direction from the radiating diaphragm. In addition, when the high-frequency vibration radiator has a configuration of a condenser speaker, high-frequency vibration radiation over a very large area is performed when high-power vibration radiation is not required.
Further, when the high-frequency vibration radiator is made of a magnetostrictive vibration plate material, vibration radiation is performed by superimposing a bias magnetic field and an alternating magnetic field, so that a strong high-frequency vibration radiation can be achieved from a small-area vibration radiation surface.

そして本発明高周波振動放射具は、その外周面全体が放射振動板及び密閉基板とにより密閉形成されてなるばかりか、該高周波振動放射具の圧電磁器板材やコンデンサースピーカーの絶縁性基材或いは磁歪振動板材等の背面や脚部側面には、高弾性素材からなる振動吸収板材が挟持挟着されてなるから、浴槽や水槽若しくは循環管路等において、その振動放射面が水に浸漬され若しくは水と接触するように浴槽や水槽或いは循環管路に係止、吸着、或いは螺着固定等により設置されても高周波振動が浴槽や水槽或いは循環管路に直接振動放射されることが防止され、設置構築物の劣化や脆化も保護される。  The high-frequency vibration radiator of the present invention is not only formed by hermetically sealing the outer peripheral surface of the high-frequency vibration radiator and the sealing substrate, but also the piezoelectric ceramic plate material of the high-frequency vibration radiator, the insulating base material of the condenser speaker, or the magnetostrictive vibration. A vibration absorbing plate made of a highly elastic material is sandwiched and sandwiched between the back surface of the plate or the like, and the side surfaces of the legs, so that the vibration radiating surface is immersed in water or in water in a bathtub, a water tank, a circulation pipe, or the like. Even if it is installed in the bathtub, water tank or circulation pipeline so that it comes into contact with it, it is prevented from being radiated directly to the bathtub, water tank or circulation pipeline, so that the installation structure is installed. Deterioration and embrittlement are also protected.

加えて高周波振動放射面には、高周波振動の伝搬インピーダンスの高い水と接触しているため、高周波振動エネルギーが浴槽や水槽全体に効率よく伝搬され、水のキャビテーション化の促進により洗浄効果はもとより発生する−OHイオンによる高い殺菌力と分解力とによる抗菌性と且消臭性も発揮され、而も高周波振動数の適宜変換や間欠的高周波振動の放射で、人体や家畜類においては微細振動の付加により血行促進が著しく高まり、且浴槽や水槽若しくは給水管、排水管等循環管路内の付着重積している赤錆、スケール、スライムの除去効果や付着防止効果も発揮される。  In addition, because the high-frequency vibration radiation surface is in contact with water with high propagation impedance of high-frequency vibration, high-frequency vibration energy is efficiently propagated throughout the bathtub and aquarium, and the cleaning effect is generated not only by promoting the cavitation of water. The antibacterial and deodorizing properties are exhibited by the high bactericidal and decomposable power of -OH ions, and by appropriately changing the high frequency frequency and emitting intermittent high frequency vibration, The blood circulation promotion is remarkably enhanced by the addition, and the effect of removing and preventing the red rust, scale and slime accumulated in the circulation line such as the bathtub, the water tank, the water supply pipe and the drain pipe is also exhibited.

高周波振動放射具が圧電磁器板材を用いたバイモルフ構造からなり、この高周波振動放射具に高周波電源よりその周波数が20kHz乃至100kHzの高周波数で、且適宜の間隔を以って間欠的若しくは連続的に付加せしめるとともに、該高周波振動放射具を水中に浸漬させ若しくは水が接触する状態で高周波振動放射をなす。  The high-frequency vibration radiator has a bimorph structure using a piezoelectric ceramic plate material. The high-frequency vibration radiator has a high frequency of 20 kHz to 100 kHz from the high-frequency power source, and is intermittently or continuously with an appropriate interval. At the same time, the high-frequency vibration radiator is immersed in water, or high-frequency vibration radiation is produced in contact with water.

以下に本発明実施例を浄化装置の図とともに詳細に説明すれば、図1は本発明浄化装置1の高周波振動放射具1Aが圧電磁器板材10Aにより形成される場合の断面説明図であって、同図1のAには圧電磁器板材10Aによるユニモルフ構造の場合が示されてなるもので、所要の寸法形状に形成された圧電磁器板材10Aの一側面にはステンレスや黄銅等からなる金属板材11Aが銀、銅若しくはアルミ等の金属膜12Aを通電極として介在させ接合され、且圧電磁器板材10Aの他側面にも銀、銅若しくはアルミ等の金属膜12Aが通電極として接合された構成からなるものである。
かかる場合において圧電磁器板材10Aの素材としては通常チタン酸ジルコン酸鉛(ZroTio)Oが使用されるが、更に最近に至っては第3成分としてマグネシウム・ニオブ酸鉛を付加したPbTio−PbZrO−Pb(MgNb)O等も使用されている。
加えて圧電磁器板材10Aはユニモルフ構造やバイモルフ構造にかかわりなく、共振波長の制約を受けることなく略20乃至100kHzの高周波振動を放射しえるもので、より望ましくはその形状が円形で且その直径においては略2乃至6cm、厚さにおいては略0.1乃至0.5mm程度が望まれる。
In the following, the embodiment of the present invention will be described in detail together with the drawings of the purification device. FIG. 1 is a cross-sectional explanatory view when the high-frequency vibration radiator 1A of the purification device 1 of the present invention is formed by a piezoelectric ceramic plate material 10A. 1A shows a case of a unimorph structure using a piezoelectric ceramic plate 10A. A metal plate 11A made of stainless steel, brass or the like is provided on one side of the piezoelectric ceramic plate 10A formed in a required size and shape. The metal film 12A made of silver, copper, aluminum or the like is interposed and joined as a through electrode, and the metal film 12A made of silver, copper, aluminum or the like is joined as a through electrode on the other side of the piezoelectric ceramic plate 10A. Is.
Normally lead zirconate titanate as the material of the piezoelectric ceramic plate 10A (ZroTio) O 3 is used in such a case, PbTiO 3 -PbZrO 3 are reached more recently added with lead magnesium niobate as a third component -Pb (MgNb) O 3 or the like is also used.
In addition, the piezoelectric ceramic plate 10A can radiate high frequency vibrations of approximately 20 to 100 kHz without being restricted by the resonance wavelength regardless of the unimorph structure or the bimorph structure, and more preferably has a circular shape and a diameter. Is preferably about 2 to 6 cm and about 0.1 to 0.5 mm in thickness.

更に図1のBにはバイモルフ構造による断面説明図が示されており、該バイモルフ構造においては所要の寸法形状に形成されてなる圧電磁器板材10Aがステンレスや黄銅からなる金属板材11Aを挟んで接合され、且それぞれの圧電磁器板材10Aの外面に銀、銅、アルミ等の金属膜12Aが通電極として接合された構成からなるものである。  Further, FIG. 1B shows a cross-sectional explanatory diagram of a bimorph structure, in which a piezoelectric ceramic plate 10A formed in a required size and shape is joined with a metal plate 11A made of stainless steel or brass sandwiched therebetween. In addition, a metal film 12A made of silver, copper, aluminum or the like is joined to the outer surface of each piezoelectric ceramic plate 10A as a through electrode.

図2は本発明浄化装置1における高周波振動放射具1Aの断面説明図であって、使用目的に合せて要請される高周波振動エネルギーの放射面積に合せて形成された振動放射板材10の内面には、圧電磁器板材10Aからなるユニモルフ構造若しくはバイモルフ構造のものが略均等に分散配置されており、且その背面及び空隙部分には、高弾性素材からなり高周波振動を吸収緩和しえる振動吸収板材10Bが挟持されている。
この振動吸収板材10Bは、高周波振動放射具1Aの実用使用に際して、浴槽3Aや水槽3B或いは循環管路3C等に適宜手段で設置させる場合に、これら浴槽3Aや水槽3B或いは循環管路3C等の設備3への高周波振動の放射を遮断して、該設備3等の劣化や脆化の防止と且高周波振動に伴う振動音の発生防止にある。かかる場合の振動吸収板材10Bの具体的素材としては、合成ゴムやポリウレタン樹脂素材による軟質独立気泡シート材が挙げられる。
FIG. 2 is a cross-sectional explanatory view of the high-frequency vibration radiator 1A in the purification apparatus 1 of the present invention. The inner surface of the vibration radiation plate 10 formed according to the radiation area of the high-frequency vibration energy required according to the purpose of use is shown on FIG. The unimorph structure or the bimorph structure made of the piezoelectric ceramic plate material 10A is substantially uniformly distributed, and the vibration absorbing plate material 10B made of a highly elastic material and capable of absorbing and relaxing high frequency vibrations is disposed on the back surface and the gap portion. It is pinched.
When the vibration absorbing plate 10B is installed in the bathtub 3A, the water tank 3B, the circulation line 3C or the like by an appropriate means in the practical use of the high-frequency vibration radiator 1A, the bathtub 3A, the water tank 3B, the circulation line 3C, etc. The radiation of high-frequency vibrations to the equipment 3 is blocked to prevent deterioration and embrittlement of the equipment 3 and the like and to prevent the generation of vibration noise associated with the high-frequency vibrations. As a specific material of the vibration absorbing plate material 10B in such a case, a soft closed cell sheet material made of a synthetic rubber or a polyurethane resin material may be mentioned.

そして振動放射板材10の内面には、圧電磁器板材10Aからなるユニモルフ構造若しくはバイモルフ構造のものが略均等に分散されて配置され、且その背面や空隙部分に振動吸収板材10Bが挟持されたうえは、密閉基板11Bにより振動放射板材10とを密閉接合させて、水中使用若しくは水との接触使用に際しての十分な防止性を付与せしめている。
かかる場合における密閉基板11Bの素材としては特段に制約は無いが、成可く強靭で且振動放射板材10との接着性に優れる素材であれば良い。そして、それぞれの設備3の適宜部位に高周波振動放射具1A等を係止や固定させるうえから、必要に応じて密閉基板11Bの裏面には固定フック12B若しくは吸着盤13B等を設けることも提案される。図3には前記高周波振動放射具1Aの正面図が示されている。無論、高周波振動放射具1Aはかかる形状に限定されることなく、目的に応じて多角形状や多面形状も使用される。
On the inner surface of the vibration radiating plate member 10, a unimorph structure or a bimorph structure made of a piezoelectric ceramic plate member 10A is disposed so as to be substantially evenly distributed, and the vibration absorbing plate member 10B is sandwiched between the back surface and the gap portion. The vibration radiating plate member 10 is hermetically bonded by the hermetically sealed substrate 11B to provide sufficient prevention when used in water or in contact with water.
There is no particular restriction on the material of the sealed substrate 11B in such a case, but any material can be used as long as it is strong and strong and has excellent adhesion to the vibration radiation plate material 10. Then, in order to lock and fix the high-frequency vibration radiator 1A and the like at appropriate portions of each equipment 3, it is also proposed to provide a fixing hook 12B or a suction plate 13B or the like on the back surface of the sealed substrate 11B as necessary. The FIG. 3 shows a front view of the high-frequency vibration radiator 1A. Of course, the high-frequency vibration radiator 1A is not limited to such a shape, and a polygonal shape or a polyhedral shape is also used according to the purpose.

かくしてなる高周波振動放射具1Aには、所望の高周波振動エネルギーを振動放射せしむるうえから、高周波電源2より所望の高周波電力2Aを付加させるものであるが、この高周波電源2からの高周波電力2Aは水をキャビテーションさせて微細気泡の発生とその崩壊による衝撃力を以って洗浄をなし、及び気泡崩壊に伴い創出される−OHイオンによる抗菌や消臭作用の発揮、或いは高周波振動に伴う振動波の刺激による人体や家畜類へのマッサージ作用或いは浴槽や水槽或いは給水管、排水管等の循環管路内に付着重積する赤錆、スケール、スライムの除去や付着防止、若しくは人体や家畜類の体内透過による血行促進等の目的により、その高周波数や付加方法も変化させることが望ましい。  In order to radiate desired high frequency vibration energy to the high frequency vibration radiator 1A thus formed, a desired high frequency power 2A is added from the high frequency power source 2. The high frequency power 2A from the high frequency power source 2 is added. Cavitates water to generate fine bubbles and cleans them with the impact force of their collapse, and creates antibacterial and deodorant effects by -OH ions created by bubble collapse, or vibration associated with high-frequency vibration Massage action on the human body and livestock by the stimulation of waves, or removal and prevention of red rust, scale and slime adhering to the circulation line such as bathtub, water tank, water supply pipe, drainage pipe, etc., or prevention of human body and livestock It is desirable to change the high frequency and addition method for the purpose of blood circulation promotion by permeation through the body.

即ち水のキャビテーションによる軽度の洗浄を図るものでは25乃至40kHzの高周波をトランジェスタ自励発振回路20Aより連続的に付加せしむることでなしえるものであって、図4のAには高周波振動38kHz放射、出力20Wの場合のトランジェスタ自励発振回路20Aが示されている。
反面強力な高周波振動放射をなすうえからは、主発振/電力増幅方式が好適で且高周波振動放射具1Aも圧電磁器板材10Aによるユニモルフ構造やバイモルフ構造に代えて、磁歪振動板材10Cを用いた高周波磁歪振動放射具1Cの使用が望まれるもので、図4のBには振動放射が28kHzで放射出力30Wの場合の主発振/電力増幅発振回路図20Bが示されている。
That is, in the case of light cleaning by cavitation of water, a high frequency of 25 to 40 kHz can be continuously added from the transientr self-excited oscillation circuit 20A. A transistor self-oscillation circuit 20A with 38 kHz radiation and 20 W output is shown.
On the other hand, the main oscillation / power amplification method is suitable for producing strong high-frequency vibration radiation, and the high-frequency vibration radiator 1A is replaced with a unimorph structure or bimorph structure using a piezoelectric ceramic plate material 10A, and a high frequency using a magnetostrictive vibration plate material 10C. The use of the magnetostrictive vibration radiator 1C is desired, and FIG. 4B shows a main oscillation / power amplification oscillation circuit diagram 20B when the vibration radiation is 28 kHz and the radiation output is 30 W.

そして近年においてはサイリスタ(SCR)の採用により大出力の高周波振動放射のための発振回路が、小型で簡易且安価に作成できることから、かかるサイリスタ(SCR)発振回路20Cの採用が好適であって、図4のCにサイリスタ発振回路20Cが示されてなるもので、該サイリスタ発振回路20Cは振動放射が10kHzで放射出力500Wの場合のもので、かかる如く振動放射出力が大きな場合には、高周波振動放射具1Aも圧電磁器板材10Aをボルト締めで立体的に組合せたランジュバン型放射具(BLT)の使用が望ましい。  In recent years, the adoption of such a thyristor (SCR) oscillation circuit 20C is preferable because an oscillation circuit for high-frequency high-frequency vibration radiation can be made small and simple and inexpensive by employing a thyristor (SCR). A thyristor oscillation circuit 20C is shown in FIG. 4C. The thyristor oscillation circuit 20C is for the case where the vibration radiation is 10 kHz and the radiation output is 500 W. The radiator 1A is also preferably a Langevin type radiator (BLT) in which the piezoelectric ceramic plate member 10A is three-dimensionally combined by bolting.

加えて該サイリスタ発振回路20Cで明らかな如く、パルス発生器を内蔵させておき任意周波数の高周波パルスを適宜に発生させ若しくは所要の間隔を以って間欠的に発生させることにより、高周波振動放射も多様な高周波振動と且連続的若しくは間欠的に放射させることができる。  In addition, as clearly shown in the thyristor oscillation circuit 20C, a high-frequency vibration radiation is also generated by incorporating a pulse generator and appropriately generating a high-frequency pulse of an arbitrary frequency or intermittently generating it at a required interval. Various high frequency vibrations can be emitted continuously or intermittently.

図5は圧電磁器板材10Aによる高周波振動放射具1Aでの浴槽3Aにおける使用態様図であって、浴槽3Aの壁面に高周波振動放射具1Aの背面を係止若しくは吸着固定させたうえ、該高周波振動放射具1A全体が水浸しえる水位まで浴水30を注入のうえ、高周波電源2より高周波電力2Aを付加させる。
更に他の使用方法としては、該高周波振動放射具1Aを浴槽3Aの底面に敷設させ、若しくは浴水30面に浮遊させて使用しても良い。
FIG. 5 is a view showing how the piezoelectric ceramic plate 10A is used in the bathtub 3A in the high-frequency vibration radiator 1A. The high-frequency vibration is obtained by locking or adsorbing the back surface of the high-frequency vibration radiator 1A to the wall surface of the bathtub 3A. The high frequency power 2A is added from the high frequency power source 2 after injecting the bath water 30 to a water level where the entire radiator 1A can be submerged.
As another method of use, the high-frequency vibration radiator 1A may be laid on the bottom surface of the bathtub 3A or suspended on the surface of the bath water 30.

図6は牛や豚、羊等の家畜類の洗浄や抗菌消臭に使用する場合の態様図であって、所要容積の水槽3Bには家畜類の歩行路40が設けられ、且水槽3Bの壁面に高周波振動放射具1Aの放射振動板材10面を対向配設させて高周波電力2Aを付加させ、歩行路40に沿って家畜類を歩行移動させることが提案される。  FIG. 6 is a view of the case of use for cleaning and antibacterial deodorization of livestock such as cattle, pigs and sheep. The required volume of the aquarium 3B is provided with a livestock walking path 40, and the It is proposed that the surface of the radiating vibration plate 10 of the high-frequency vibration radiator 1 </ b> A is disposed opposite to the wall surface so that high-frequency power 2 </ b> A is applied and the livestock is moved along the walking path 40.

図7は給水管若しくは排水管の循環管路3C内の給水若しくは排水循環水31の洗浄や抗菌消臭及び赤錆、スケール、スライム等の剥除若しくは付着防止のための使用態様図であって、かかる場合の使用に際しては比較的振動放射出力の強い振動放射が望まれるため、圧電磁器板材10Aを用いたランジュバン型放射具や高周波磁歪振動放射具1Cが好適であって、配設方法としては排水管若しくは循環管路3Cの連結端縁に、その振動放射板材10を排水や循環水と接触するように嵌着させるか、若しくは該排水管3Cに包着固定させれば良い。かかる振動放射には略30乃至60kHz程度の高周波振動と、且好ましくは略1乃至5秒間程度の間欠的振動放射がスライム剥除のうえから望ましい。  FIG. 7 is a usage diagram for cleaning or antibacterial deodorization and removal of red rust, scale, slime, etc. or prevention of adhesion of water supply or drainage circulation water 31 in the circulation pipe 3C of the water supply pipe or drainage pipe, In such a case, vibration radiation with a relatively strong vibration radiation output is desired. Therefore, a Langevin-type radiator using the piezoelectric ceramic plate 10A and a high-frequency magnetostrictive vibration radiator 1C are suitable, and the arrangement method is drainage. The vibration radiating plate member 10 may be fitted to the connection edge of the pipe or the circulation pipe 3C so as to come into contact with the drainage or the circulation water, or may be fixedly attached to the drain pipe 3C. For such vibration radiation, high-frequency vibration of about 30 to 60 kHz and intermittent vibration radiation of about 1 to 5 seconds are desirable from the viewpoint of slime removal.

図8には高周波コンデンサー振動放射具1B及び高周波磁歪振動放射具1Cの原理図が示されてなるもので、同図8のAはコンデンサー振動放射においては、絶縁素材からなる絶縁性基板4Aの上面に金属素材からなり、その表面に微細若しくは粗雑な凹凸を形成させた金属背極板4Bが接合され、且この金属背極板4Bの上面にはその外面に金属膜4Cが形成された絶縁シート4Eが密閉接合される構成のもので、かかる構成により絶縁シート4Eと金属背極板4Bとの間に密閉される凹凸が空気薄層を形成して、コンデンサー機能を保持し、金属背極板4Bと金属膜4Cとに高周波電力2Aを付加することにより、高周波振動放射がなされるもので、放射振動出力が比較的小さく且広面積に亘って振動放射をなす場合には極めて好都合である。絶縁シート4Eはポリエステルフィルムの厚さ5乃至30μmの外面のアルミや銅等を蒸着させたものが有利であり、且かかる構成における振動放射は絶縁シート4Eの厚さと空気薄層の厚さとにより共振周波数も影響を受けるが、本発明における実用使用の高周波振動が略20乃至100kHzのものでは、かかる構成で対処できる。  FIG. 8 shows a principle diagram of the high frequency condenser vibration radiator 1B and the high frequency magnetostrictive vibration radiator 1C. FIG. 8A shows the upper surface of the insulating substrate 4A made of an insulating material in the case of condenser vibration radiation. A metal back electrode plate 4B made of a metal material and having fine or rough irregularities formed on the surface thereof is bonded, and an insulating sheet having a metal film 4C formed on the outer surface of the metal back electrode plate 4B. 4E is configured to be hermetically bonded. With such a configuration, the unevenness sealed between the insulating sheet 4E and the metal back electrode plate 4B forms an air thin layer, and retains the capacitor function. By adding high frequency power 2A to 4B and metal film 4C, high frequency vibration radiation is made. This is very convenient when the radiation vibration output is relatively small and vibration radiation is made over a wide area. That. The insulating sheet 4E is advantageously a polyester film deposited with an outer surface of aluminum or copper having a thickness of 5 to 30 μm, and the vibration radiation in this configuration resonates depending on the thickness of the insulating sheet 4E and the thickness of the thin air layer. Although the frequency is also affected, such a configuration can be used when the high-frequency vibration for practical use in the present invention is approximately 20 to 100 kHz.

図8のBに高周波磁歪振動放射具1Cの原理図であって、所要の形状に形成された磁歪振動板材5Aは磁歪フェライトを用いて所要の形状に形成され、且該磁歪振動板材5Aにはバイアス磁場に交番磁場を付加させるための励起用コイル5Bを巻回させる脚部5Cが形成されている。そしてこの脚部5Cの下端にはバイアス磁場フェライト磁石5Dが挟持されており、且この励起用コイル5Bに共振周波数に等しい周波数の高周波電力2Aを付加させることで、バイアス磁場に交番磁場が加重されて磁歪振動板材5Aより高周波振動放射がなされるもので、該高周波磁歪振動放射具1Cは比較的狭い範囲に強力な高周波振動放射をなす場合には極めて有利となる。  FIG. 8B is a principle diagram of the high-frequency magnetostrictive vibration radiator 1C, wherein the magnetostrictive vibration plate material 5A formed in a required shape is formed in a required shape using magnetostrictive ferrite, and the magnetostrictive vibration plate material 5A includes A leg portion 5C is formed on which an excitation coil 5B for adding an alternating magnetic field to the bias magnetic field is wound. A bias magnetic field ferrite magnet 5D is sandwiched at the lower end of the leg 5C, and an alternating magnetic field is applied to the bias magnetic field by adding high frequency power 2A having a frequency equal to the resonance frequency to the excitation coil 5B. Thus, the high-frequency magnetostrictive oscillating tool 1C is extremely advantageous in the case of generating strong high-frequency oscillating radiation in a relatively narrow range.

産業条の利用可能性Availability of industrial articles

使用目的と高周波振動放射に要する振動放射面積及び振動放射出力に合せて、高周波振動放射具を選択配設のうえ高周波電源より高周波電力を付加させることで簡便に使用できる。  According to the purpose of use and the vibration radiation area and vibration radiation output required for high-frequency vibration radiation, a high-frequency vibration radiator can be selected and installed, and high-frequency power can be added from a high-frequency power source.

圧電磁器振動板の断面説明図である。  It is a cross-sectional explanatory drawing of a piezoelectric ceramic diaphragm. 高周波振動放射具の断面説明図である。  It is a section explanatory view of a high frequency vibration radiator. 高周波振動放射具の正面見取図である。  It is a front sketch of a high frequency vibration radiator. 高周波発振回路の例示図である。  It is an illustration figure of a high frequency oscillation circuit. 浴槽に使用する使用態様図である。  It is a use mode figure used for a bathtub. 家畜類の洗浄水槽における使用態様図である。  It is a use mode figure in the washing tank of livestock. 排水管への使用態様図である。  It is a use mode figure to a drain pipe. コンデンサー若しくは磁歪振動板による高周波振動の原理図である。  It is a principle figure of the high frequency vibration by a capacitor or a magnetostriction diaphragm.

符号の説明Explanation of symbols

1 本発明浄化装置
1A 高周波振動放射具
1B 高周波コンデンサー振動放射具
1C 高周波磁歪振動放射具
10A 圧電磁器板材
11A 金属板材
12A 金属膜
10 振動放射板材
10B 振動吸収板材
11B 密閉基板
12B 固定フック
13B 吸着盤
10C 磁歪振動板材
2 高周波電源
2A 高周波電力
20A トランジェスタ自励発振回路
20B 主発振/電力増幅発振回路
20C サイリスタ発振回路
3 設備
3A 浴槽
3B 水槽
3C 排水管路若しくは循環管路
30 浴水
31 給水若しくは排水循環水
4A 絶縁性基板
4B 金属背極板
4C 金属膜
4D 耐水被覆層
4E 絶縁シート
5A 磁歪振動板材
5B 励起用コイル
5C 脚部
5D バイアス磁場フェライト磁石
40 歩行路
DESCRIPTION OF SYMBOLS 1 Purification apparatus 1A High frequency vibration radiator 1B High frequency condenser vibration radiator 1C High frequency magnetostrictive vibration radiator 10A Piezoelectric ceramic plate material 11A Metal plate material 12A Metal film 10 Vibration radiation plate material 10B Vibration absorption plate material 11B Sealed substrate 12B Fixed hook 13B Adsorption board 10C Magnetostrictive vibration plate material 2 High-frequency power source 2A High-frequency power 20A Transger self-oscillation circuit 20B Main oscillation / power amplification oscillation circuit 20C Thyristor oscillation circuit 3 Equipment 3A Bathtub 3B Water tank 3C Drain pipe or circulation pipe 30 Bath 31 Water supply or drain circulation Water 4A Insulating substrate 4B Metal back electrode plate 4C Metal film 4D Water resistant coating layer 4E Insulating sheet 5A Magnetostrictive vibration plate material 5B Excitation coil 5C Leg part 5D Bias magnetic field ferrite magnet 40 Walking path

Claims (6)

圧電磁器板材と金属板材及び金属膜とをユニモルフ構造若しくはバイモルフ構造に接合したうえ、放射振動板材の内面に略均等に分散配置され、且その背面に振動吸収板材が挟持されたうえ、放射振動板材と密閉基板とにより密閉形成された高周波振動放射具と、該高周波振動放射具のユニモルフ構造若しくはバイモルフ構造に高周波電力を付加せしめて、その高周波振動が20乃至100kHzの範囲の高周波振動を間欠的若しくは連続的に放射振動させる発振回路を有する高周波電源とにより構成される、高周波振動による洗浄装置。  A piezoelectric ceramic plate, a metal plate, and a metal film are joined in a unimorph structure or a bimorph structure, and are distributed almost uniformly on the inner surface of the radiating vibration plate, and a vibration absorbing plate is sandwiched on the back surface of the radiating vibration plate. And a high-frequency vibration radiator that is hermetically sealed with a hermetic substrate and a unimorph structure or a bimorph structure of the high-frequency vibration radiator, and the high-frequency vibration in the range of 20 to 100 kHz is intermittently or A cleaning device using high-frequency vibration, comprising a high-frequency power source having an oscillation circuit for continuously radiating vibration. 高周波振動放射具が、所要寸法形状の絶縁性基板に且その上面に微細凹凸面が形成された金属背極板が接合され、更にこの金属背極板にはその上面に金属膜を有する絶縁シートが密閉接合されたうえ、これら全面が耐水被覆層で被覆された構成からなる、請求項1記載の高周波振動による洗浄装置。  The high-frequency vibration radiator is joined to an insulating substrate having a required size and shape, and a metal back electrode plate having a fine uneven surface formed on the upper surface thereof is joined, and the metal back electrode plate further has a metal film on the upper surface thereof. 2. The cleaning apparatus using high-frequency vibration according to claim 1, wherein the two are hermetically bonded and the entire surface thereof is covered with a water-resistant coating layer. 高周波振動放射具が、上部に放射振動部と下部に対向するように脚部が磁歪フェライトを用いて形成され、且対向する脚部下端にバイアス磁場フェライト磁石が挟持され、而も脚部上部には励起用コイルが巻着され、この励起用コイルに共振周波数に等しい高周波電力を付加させて、バイアス磁場に交番磁場を重ねて高周波振動放射をなし、且この全面を密閉基板により密閉形成させた構成からなる、請求項1記載の高周波振動による洗浄装置。  The high-frequency vibration radiator has a leg portion formed of magnetostrictive ferrite so that the upper portion faces the radiating vibration portion and the lower portion, and a bias magnetic field ferrite magnet is sandwiched at the lower end of the opposite leg portion. A coil for excitation is wound, high frequency power equal to the resonance frequency is applied to the coil for excitation, and an alternating magnetic field is superimposed on the bias magnetic field to generate high frequency vibration radiation, and the entire surface is hermetically formed by a sealed substrate. The cleaning device by high-frequency vibration according to claim 1, comprising the configuration. 高周波振動放射具の放射振動面を、浴槽や水槽、給水管、排水管や循環管内の水と接触させ、その放射振動数が20乃至100kHzの高周波振動を間欠的若しくは連続的に放射伝搬させ、以って人体や家畜類の洗浄や血行促進、抗菌消臭或いは給水管、排水管や循環管路内の抗菌消臭若しくは赤錆、スケール、スライムの付着物の除去や付着重積防止をなす、高周波振動による洗浄方法。  The radiation vibration surface of the high frequency vibration radiator is brought into contact with water in a bathtub, a water tank, a water supply pipe, a drain pipe or a circulation pipe, and the high frequency vibration having a radiation frequency of 20 to 100 kHz is intermittently or continuously radiated and propagated. Therefore, cleaning of the human body and livestock, promotion of blood circulation, antibacterial deodorization or antibacterial deodorization in water supply pipes, drainage pipes and circulation pipes, removal of red rust, scale and slime deposits, and prevention of adhesion accumulation, Cleaning method using high frequency vibration. 高周波振動放射具より高周波振動を間欠的若しくは連続的に放射振動させる高周波電源に、電池若しくはバッテリーが内蔵されてなる請求項1乃至請求項3記載の高周波振動による洗浄装置。  4. A cleaning apparatus using high-frequency vibration according to claim 1, wherein a battery or a battery is incorporated in a high-frequency power source that intermittently or continuously radiates high-frequency vibration from the high-frequency vibration radiator. 高周波振動放射具が多角形状若しくは多面形状に形成されてなる、請求項1乃至請求項3記載の高周波振動による洗浄装置。  4. A cleaning apparatus using high-frequency vibration according to claim 1, wherein the high-frequency vibration radiator is formed in a polygonal shape or a polyhedral shape.
JP2007128610A 2007-04-12 2007-04-12 Method and apparatus for cleaning using high-frequency vibration Pending JP2008259793A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012005344A1 (en) * 2010-07-08 2012-01-12 株式会社エクサ Wafer separating device, wafer separating and carrying device, wafer separating method, wafer separating and carrying method, and solar cell wafer separating and carrying method
CN108480326A (en) * 2018-04-08 2018-09-04 华北电力大学(保定) A kind of Pneumatic conveying pipeline dredger based on inverse piezoelectric effect
JP2020051042A (en) * 2018-09-25 2020-04-02 Toto株式会社 Drainage system
KR102111219B1 (en) * 2018-12-17 2020-05-14 순천향대학교 산학협력단 Supersonic waves cleaner

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012005344A1 (en) * 2010-07-08 2012-01-12 株式会社エクサ Wafer separating device, wafer separating and carrying device, wafer separating method, wafer separating and carrying method, and solar cell wafer separating and carrying method
CN108480326A (en) * 2018-04-08 2018-09-04 华北电力大学(保定) A kind of Pneumatic conveying pipeline dredger based on inverse piezoelectric effect
JP2020051042A (en) * 2018-09-25 2020-04-02 Toto株式会社 Drainage system
JP7274092B2 (en) 2018-09-25 2023-05-16 Toto株式会社 Drainage device
KR102111219B1 (en) * 2018-12-17 2020-05-14 순천향대학교 산학협력단 Supersonic waves cleaner

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