JP2008256411A5 - - Google Patents
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- JP2008256411A5 JP2008256411A5 JP2007096696A JP2007096696A JP2008256411A5 JP 2008256411 A5 JP2008256411 A5 JP 2008256411A5 JP 2007096696 A JP2007096696 A JP 2007096696A JP 2007096696 A JP2007096696 A JP 2007096696A JP 2008256411 A5 JP2008256411 A5 JP 2008256411A5
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- correction value
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- parallel
- correction
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- 238000006243 chemical reaction Methods 0.000 claims 6
- 238000006073 displacement reaction Methods 0.000 claims 4
- 230000001105 regulatory Effects 0.000 claims 1
Claims (4)
前記対象物の平行移動を行うための直線駆動部と前記対象物の旋回移動を行うための旋回駆動部を有する位置決めステージ機構による補正動作に必要な平行及び旋回の補正値を前記平行ズレ量と前記角度ズレ量から求める補正値演算部と、
前記旋回駆動部を有さずに前記直線駆動部と直線運動案内部と旋回運動案内部を組み合わせることにより平行及び旋回移動を行う位置決めステージ機構（以降、「旋回駆動部レス位置決めステージ機構」という）による補正動作に必要な直線駆動部に対する補正値を求めるステージ座標／補正値変換部を備えたことを特徴とする画像処理装置。 An image processing apparatus for detecting a parallel shift amount and an angle shift amount of an object mounted on a positioning stage, and operating a driving unit of the positioning stage to obtain a correction value for correcting the object to a predetermined position and posture. Because
Said parallel displacement amount correction values for parallel and pivoting required for correction operation by the positioning stage mechanism having a swivel drive for performing the linear drives and the pivoting movement of the object for performing parallel movement of the object A correction value calculation unit obtained from the angle deviation amount ;
Positioning stage mechanism that performs parallel and swivel movement by combining the linear drive unit, the linear motion guide unit, and the swivel motion guide unit without having the swivel drive unit (hereinafter referred to as “swivel drive unitless positioning stage mechanism”) the image processing apparatus characterized by comprising a stage coordinate / compensation value conversion section for obtaining a correction value for the linear drives required for correction operation by.
前記補正値演算部により、前記ステージ旋回中心座標と旋回角度情報から求められた平行及び旋回の補正値を、前記旋回駆動部レス位置決めステージ機構の前記直線駆動部の変位量に変換することを特徴とする請求項１記載の画像処理装置。The correction value calculation unit converts parallel and turning correction values obtained from the stage turning center coordinates and turning angle information into displacement amounts of the linear drive part of the turning drive part-less positioning stage mechanism. The image processing apparatus according to claim 1.
前記補正値演算部が、旋回補正動作により発生する前記対象物の平行変位量を求めることにより旋回補正後の対象物位置を算出し、
前記旋回駆動部レス位置決めステージ機構による１回の補正動作により前記対象物を所定の位置及び姿勢に補正するための平行及び旋回の補正値を求めることを特徴とする請求項１または２に記載の画像処理装置。 The stage coordinate / correction value conversion unit specifies the turning center position of the positioning stage in the mechanism part coordinate system as a displacement amount from the turning center position at the stage origin position,
The correction value calculation unit calculates the object position after the turn correction by obtaining the parallel displacement amount of the object generated by the turn correction operation,
According to claim 1 or 2, characterized in that for obtaining the correction value of the parallel and turning for correcting said object in a predetermined position and orientation by a single correcting operation by the rotation driving unit-less positioning stage mechanism Image processing device.
A parameter setting unit is connected to the stage coordinate / correction value conversion unit, and the parameter setting unit includes a parameter for specifying the type of the positioning stage mechanism and a parameter for use in the conversion calculation. The image according to any one of claims 1 to 3, wherein the operation of the stage coordinate / correction value conversion unit is regulated according to the parameter setting value, thereby being able to cope with a plurality of types of positioning stage mechanisms. Processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007096696A JP5141075B2 (en) | 2007-04-02 | 2007-04-02 | Image processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007096696A JP5141075B2 (en) | 2007-04-02 | 2007-04-02 | Image processing device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008256411A JP2008256411A (en) | 2008-10-23 |
| JP2008256411A5 true JP2008256411A5 (en) | 2011-10-20 |
| JP5141075B2 JP5141075B2 (en) | 2013-02-13 |
Family
ID=39980128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007096696A Expired - Fee Related JP5141075B2 (en) | 2007-04-02 | 2007-04-02 | Image processing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5141075B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5168066B2 (en) | 2008-10-01 | 2013-03-21 | 日本電気株式会社 | Mobile communication system, radio base station, and transmission rate allocation method |
| JP5634764B2 (en) * | 2010-06-23 | 2014-12-03 | コグネックス・コーポレイション | MOBILE BODY CONTROL SYSTEM, PROGRAM, AND MOBILE BODY CONTROL METHOD |
| CN112276873B (en) * | 2020-09-28 | 2023-12-26 | 中国联合工程有限公司 | Workbench and method for detecting workpiece position deviation and alignment by using sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1123751A (en) * | 1997-06-27 | 1999-01-29 | Rozefu Technol:Kk | Xytheta stage and controller of the xytheta stage |
| JP4345607B2 (en) * | 2004-08-09 | 2009-10-14 | オムロン株式会社 | Rotation center calculation method and work positioning apparatus using this method |
-
2007
- 2007-04-02 JP JP2007096696A patent/JP5141075B2/en not_active Expired - Fee Related
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