JP2008254831A - Cleaning method for carrying roller of conveyor and manufacturing method for magnetic recording disk - Google Patents

Cleaning method for carrying roller of conveyor and manufacturing method for magnetic recording disk Download PDF

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JP2008254831A
JP2008254831A JP2007095854A JP2007095854A JP2008254831A JP 2008254831 A JP2008254831 A JP 2008254831A JP 2007095854 A JP2007095854 A JP 2007095854A JP 2007095854 A JP2007095854 A JP 2007095854A JP 2008254831 A JP2008254831 A JP 2008254831A
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conveyor
cleaning
roller
magnetic recording
transport
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Hiroshi Imai
浩 今井
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Hoya Corp
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Hoya Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning method for carrying rollers of a conveyor capable of cleaning foreign matters, such as particles, adhered to the carrying rollers of the conveyor for a short time without using operator's hands. <P>SOLUTION: A cleaning member 10 having a foreign matter removing means 3 for removing foreign matters, such as particles, by attraction etc. is traveled on the carrying rollers 4 of the conveyor, and foreign matters, such as particles, adhered to the carrying rollers 4 are removed by the foreign matter removing means 3 abutting on the carrying rollers 4. The foreign matters adhered to the carrying rollers 4 are for example, metal powder. A water-absorbing porous member, such as a sponge, is used for the foreign matter removing means 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、コンベアの搬送ローラに付着したパーティクル等の異物を除去するコンベアの搬送ローラの洗浄方法、及び磁気記録ディスクの製造方法に関するものである。   The present invention relates to a method for cleaning a conveyor roller of a conveyor that removes foreign matters such as particles adhering to the conveyor roller of the conveyor, and a method for manufacturing a magnetic recording disk.

ディスク状のガラス基板上に磁性層を成膜した磁気記録ディスクの製造工程では、ガラス基板の研磨工程の後の洗浄処理工程、スパッタ成膜後の磁気記録ディスクの洗浄処理工程が実施される。洗浄処理工程では、多数枚のガラスディスクあるいは磁気記録ディスクを専用のディスク搬送用カセットに収納し、カセットごと洗浄槽の中に浸漬させて洗浄を行うが、洗浄処理の前後においても搬送用カセットごと搬送される。磁気記録ディスク等を収容した搬送カセットの搬送方法としては、コンベアによる搬送が一般的である。   In the manufacturing process of a magnetic recording disk in which a magnetic layer is formed on a disk-shaped glass substrate, a cleaning process after the polishing process of the glass substrate and a cleaning process of the magnetic recording disk after sputtering film formation are performed. In the cleaning process, a large number of glass disks or magnetic recording disks are housed in a dedicated disk transport cassette, and the entire cassette is immersed in a cleaning tank for cleaning. Be transported. As a method for transporting a transport cassette containing a magnetic recording disk or the like, transport by a conveyor is common.

なお、特許文献1には、半導体チップ等の電子部品を搭載したパレットを搬送する、主としてクリーンルーム内で用いるコンベアによる搬送方法が開示され、特許文献2には、ワーク等をリニアモータを用いて搬送する方法が開示されている。   Patent Document 1 discloses a transport method using a conveyor mainly used in a clean room for transporting a pallet mounted with electronic components such as semiconductor chips, and Patent Document 2 transports a workpiece or the like using a linear motor. A method is disclosed.

特開2000−118710号公報JP 2000-118710 A 特開2000−191140号公報JP 2000-191140 A

本発明者の検討によると、磁気記録ディスク等を収容した搬送カセットをコンベア搬送する場合、コンベアの搬送ローラとディスク搬送用カセットの側板はいずれも金属製(一般にはステンレス製)であることから、搬送中に両者が接触することで常にパーティクル(金属粉)が発生し、そこで発生したパーティクルは搬送ローラと搬送用カセットに付着するという問題が生じることを突き止めた。   According to the inventor's study, when the conveyor cassette containing the magnetic recording disk or the like is transported on the conveyor, the conveyor transport rollers and the side plates of the disk transport cassette are both made of metal (generally stainless steel), It has been found that particles (metal powder) are always generated when they come into contact with each other during conveyance, and the generated particles adhere to the conveyance roller and the conveyance cassette.

図4は、磁気記録ディスク6を多数枚収納した状態のディスク搬送用カセット5の(a)側面図及び(b)正面図を示したものである。各ディスク6は、その両側端面と下端面とをそれぞれ保持する保持部51,52によって垂直方向に立てた状態で保持され、各保持部51,52の軸方向には溝が多数形成されており、この溝によって各ディスク6は互いに接触しないように所定の間隔を保ってカセット5内に収納できるように構成されている。   FIG. 4 shows (a) a side view and (b) a front view of the disk transport cassette 5 in a state where a large number of magnetic recording disks 6 are accommodated. Each disk 6 is held in a vertical state by holding portions 51 and 52 that hold both side end surfaces and lower end surfaces thereof, and a number of grooves are formed in the axial direction of each holding portion 51 and 52. The discs 6 can be stored in the cassette 5 at predetermined intervals so as not to contact each other by the grooves.

また、図5は、上記磁気記録ディスク6を収納した搬送用カセット5をコンベアの搬送ローラ4上を搬送させている状態の(a)側面図及び(b)正面図を示したものである。この場合、搬送中にカセット5の側板の下端と搬送ローラ4とが接触する図中のAで示す部分においてパーティクルが発生する。   FIGS. 5A and 5B show a side view and a front view of a state in which the transport cassette 5 containing the magnetic recording disk 6 is transported on the transport roller 4 of the conveyor. In this case, particles are generated at a portion indicated by A in the figure where the lower end of the side plate of the cassette 5 and the transport roller 4 are in contact during transport.

搬送ローラ4に付着したパーティクルはローラが回転することで周囲に飛散し、搬送用カセット5やカセットに収納されている磁気記録ディスクあるいはその基板に再付着して、磁気記録ディスクの製造工程に悪影響を及ぼす。とくに、成膜前のディスク基板表面にパーティクルが付着すると成膜時の欠陥となってしまう。一方、搬送用カセット5に付着したパーティクルは、このカセットがそのまま洗浄工程に搬送され、カセットごと洗浄槽に浸漬されたときに、洗浄液中に浮遊し、洗浄中の磁気記録ディスク等に再付着するおそれがある。また、洗浄液(純水)に金属粉のパーティクルがイオン溶解して磁気記録ディスクの磁性膜に悪影響を及ぼす可能性もある。   Particles adhering to the transport roller 4 are scattered around by the rotation of the roller and reattached to the transport cassette 5 or the magnetic recording disk stored in the cassette or its substrate, adversely affecting the manufacturing process of the magnetic recording disk. Effect. In particular, if particles adhere to the surface of the disk substrate before film formation, defects will occur during film formation. On the other hand, the particles adhering to the transport cassette 5 are transported to the cleaning process as they are and floated in the cleaning liquid when the entire cassette is immersed in the cleaning tank, and are reattached to the magnetic recording disk being cleaned. There is a fear. In addition, metal powder particles may be ion-dissolved in the cleaning liquid (pure water) to adversely affect the magnetic film of the magnetic recording disk.

したがって、このような問題を解決するためには、定期的にコンベアの搬送ローラと、ディスク搬送用カセットの洗浄が不可欠である。ただし、搬送用カセットに付着したパーティクルの問題は、例えば自動洗浄装置等を使用してカセットの洗浄を行うことにより解決することが可能であるが、搬送ローラに付着したパーティクルについては、現状では作業者が手作業で洗浄を行わなければならないため、この洗浄作業に長時間と労力を要してしまうという問題がある。   Therefore, in order to solve such a problem, it is indispensable to periodically clean the conveyor transport rollers and the disk transport cassette. However, the problem of particles adhering to the transport cassette can be solved, for example, by cleaning the cassette using an automatic cleaning device or the like. Since a person has to perform cleaning manually, there is a problem that this cleaning operation requires a long time and labor.

なお、このようなパーティクルの発生を抑制できる搬送方法として、上記特許文献2に開示されたリニアモータ搬送による方法があるが、この方法は、前記カセットの下端と搬送ローラとは非接触であるためパーティクルは発生しない。しかし、搬送部に永久磁石や電磁石を用いているために、磁気記録ディスクの搬送を行うと磁性膜等に悪影響を及ぼすことが考えられるので、磁気記録ディスクの搬送方法としては結局コンベアによる搬送が好適であるが、コンベアによる搬送ではパーティクルの発生が問題となるわけである。   In addition, as a conveyance method that can suppress the generation of such particles, there is a method by the linear motor conveyance disclosed in Patent Document 2 described above. However, this method is not in contact with the lower end of the cassette and the conveyance roller. No particles are generated. However, since permanent magnets and electromagnets are used in the transport unit, transporting the magnetic recording disk can adversely affect the magnetic film, etc. Although it is preferable, the generation of particles becomes a problem in the conveyance by the conveyor.

本発明はこのような従来技術の問題点に鑑みなされたもので、その目的とするところは、コンベアの搬送ローラに付着したパーティクル等の異物の洗浄を作業者の手によらず短時間で行えるコンベアの搬送ローラの洗浄方法、該洗浄方法による工程を含む磁気記録ディスクの製造方法を提供することにある。   The present invention has been made in view of such problems of the prior art, and the object of the present invention is to perform cleaning of foreign matters such as particles adhering to the conveying roller of the conveyor in a short time without depending on the hand of the operator. It is an object of the present invention to provide a method for cleaning a conveyor roller of a conveyor, and a method for manufacturing a magnetic recording disk including steps by the cleaning method.

本発明者は上記課題を解決すべく鋭意検討した結果、本発明を完成した。
すなわち、本発明は以下の構成を有する発明である。
(発明の構成1)
パーティクル等の異物を吸着等により除去する異物除去手段を備えた洗浄用部材をコンベアの搬送ローラ上を走行させ、前記搬送ローラに付着したパーティクル等の異物を前記搬送ローラと当接する前記異物除去手段により除去することを特徴とするコンベアの搬送ローラの洗浄方法である。
As a result of intensive studies to solve the above problems, the present inventor has completed the present invention.
That is, the present invention is an invention having the following configuration.
(Structure 1 of the invention)
The foreign matter removing means for causing a cleaning member provided with a foreign matter removing means for removing foreign matters such as particles by suction or the like to run on a transport roller of a conveyor, and for contacting foreign matter such as particles adhering to the transport roller with the transport roller It is the cleaning method of the conveyance roller of the conveyor characterized by removing by this.

(発明の構成2)
前記搬送ローラに付着した異物が金属粉であることを特徴とする構成1に記載のコンベアの搬送ローラの洗浄方法である。
(Configuration 2)
The cleaning method for a conveyor roller of a conveyor according to Configuration 1, wherein the foreign matter attached to the conveyor roller is metal powder.

(発明の構成3)
前記異物除去手段が、吸水性多孔質部材であることを特徴とする構成1又は2に記載のコンベアの搬送ローラの洗浄方法である。
(発明の構成4)
(Structure 3 of the invention)
3. The cleaning method for a conveyor roller of a conveyor according to Configuration 1 or 2, wherein the foreign matter removing means is a water-absorbing porous member.
(Configuration 4)

前記異物除去手段が、磁石であることを特徴とする構成2に記載のコンベアの搬送ローラの洗浄方法である。   The cleaning method for a transport roller of a conveyor according to Configuration 2, wherein the foreign matter removing means is a magnet.

(発明の構成5)
磁気記録ディスク用基板または磁気記録ディスクを多数枚収容したディスク搬送用カセットをコンベアの搬送ローラ上を搬送させる際、前記ディスク搬送用カセットと前記搬送ローラとの接触により発生して搬送ローラに付着したパーティクル等の異物を除去することを特徴とする構成1乃至4のいずれか一に記載のコンベアの搬送ローラの洗浄方法である。
(発明の構成6)
構成1乃至5のいずれか一に記載の洗浄方法による工程が含まれることを特徴とする磁気記録ディスクの製造方法である。
(Structure 5 of the invention)
When a disk transport cassette containing a large number of magnetic recording disk substrates or magnetic recording disks is transported on a transport roller of a conveyor, it is generated due to contact between the disk transport cassette and the transport roller and adheres to the transport roller. 5. A cleaning method for a conveyor roller of a conveyor according to any one of configurations 1 to 4, wherein foreign matters such as particles are removed.
(Structure 6 of the invention)
A method of manufacturing a magnetic recording disk, comprising the step of the cleaning method according to any one of Configurations 1 to 5.

本発明によれば、コンベアの搬送ローラに付着したパーティクル等の異物の洗浄を作業者の手によらず短時間で行えるコンベアの搬送ローラの洗浄方法を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the washing method of the conveyance roller of the conveyor which can perform washing | cleaning of foreign materials, such as a particle adhering to the conveyance roller of a conveyor, in a short time without an operator's hand can be provided.

そして、本発明によれば、コンベアの搬送ローラの洗浄を短時間で簡便に行えるため、搬送ローラを常に清浄な状態に保つことができ、搬送ローラに付着したパーティクルに起因する磁気記録ディスク等への悪影響の問題を有効に解決することが可能になる。   According to the present invention, since the conveyor rollers of the conveyor can be easily cleaned in a short time, the conveyor rollers can always be kept clean, and the magnetic recording disk or the like caused by particles adhering to the conveyor rollers can be obtained. It is possible to effectively solve the problem of adverse effects.

以下、図面を参照しながら、本発明を実施するための最良の形態について詳述する。
図1は、本発明に使用する洗浄用カセットの組立部品図である。また、図2は、洗浄用カセットの(a)組立側面図および(b)組立正面図である。
図1中、1は貯水タンク、2は洗浄用カセットベース、3は洗浄用吸水性多孔質部材であり、これらの部品を組み立てることにより本発明に使用する洗浄用部材である洗浄用カセットが出来上がる。
Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.
FIG. 1 is an assembly part diagram of a cleaning cassette used in the present invention. FIG. 2 is an (a) assembly side view and (b) an assembly front view of the cleaning cassette.
In FIG. 1, 1 is a water storage tank, 2 is a cleaning cassette base, and 3 is a water-absorbing porous member for cleaning. By assembling these parts, a cleaning cassette that is a cleaning member used in the present invention is completed. .

上記貯水タンク1は、洗浄用の吸水性多孔質部材3が乾くことの無いように適宜水分を補給するための水を貯水する。また、貯水タンク1から少量の水分が洗浄用の吸水性多孔質部材3に補給されるように、貯水タンク1の底面には小さな孔を開けた水分補給部11が設けられている。 The water storage tank 1 stores water for appropriately supplying water so that the water-absorbing porous member 3 for cleaning does not dry. Further, a water replenishing portion 11 having a small hole is provided on the bottom surface of the water storage tank 1 so that a small amount of water is replenished from the water storage tank 1 to the water-absorbing porous member 3 for cleaning.

上記洗浄用吸水性多孔質部材3は、搬送ローラに付着したパーティクル等の異物を吸着等により除去するためのものであり、例えば具体的にはスポンジなどを好ましく用いることができる。また、この洗浄用吸水性多孔質部材3は、側面方向には複数の搬送ローラ上を安定して走行できるように所定の長さを有している。また、正面からみると、その中央から下方左右に向かう傾斜形状に形成され、つまり使用状態において貯水タンク1の水分補給部11から搬送ローラとの接触部までは傾斜を設けることにより、洗浄用吸水性多孔質部材3に補給された水分が搬送ローラとの接触部に好適に補給されるように構成している。洗浄用吸水性多孔質部材3を正面からみたときの横幅は、ディスク搬送用カセットを搬送する搬送ローラ4,4間の横幅とほぼ一致させることが望ましい。 The water-absorbing porous member 3 for cleaning is for removing foreign matters such as particles adhering to the conveying roller by adsorption or the like, and specifically, for example, a sponge or the like can be preferably used. The water-absorbing porous member 3 for cleaning has a predetermined length so that it can stably run on a plurality of transport rollers in the side surface direction. Further, when viewed from the front, it is formed in an inclined shape from the center downward and to the left and right, that is, in use, by providing an inclination from the water replenishing portion 11 of the water storage tank 1 to the contact portion with the transport roller, The water replenished to the porous porous member 3 is preferably replenished to the contact portion with the transport roller. It is desirable that the lateral width of the cleaning water-absorbing porous member 3 when viewed from the front is substantially the same as the lateral width between the transport rollers 4 and 4 for transporting the disk transport cassette.

また、上記洗浄用カセットベース2は、所定の横幅を有し、左右に洗浄用吸水性多孔質部材3を係止する係止部21,21と、該係止部に洗浄用吸水性多孔質部材3を固定するためのネジ状の止め具22,22と、上記貯水タンク1を設置する設置台23と、洗浄用吸水性多孔質部材3の中央部分を貯水タンク1の水分補給部11と接触させた状態に保持するための保持部24を有している。 Further, the cleaning cassette base 2 has a predetermined width, locking portions 21 and 21 for locking the cleaning water-absorbing porous member 3 on the left and right, and the cleaning water-absorbing porous material on the locking portion. Screw-shaped stoppers 22 and 22 for fixing the member 3, an installation base 23 on which the water storage tank 1 is installed, and a central portion of the water-absorbing porous member 3 for cleaning are connected to the water replenishment unit 11 of the water storage tank 1. It has a holding part 24 for holding it in a contacted state.

そして、以上の構成にかかる、貯水タンク1、洗浄用カセットベース2、洗浄用吸水性多孔質部材3を組み立てることにより図2に示すような洗浄用カセット10が出来上がる。すなわち、洗浄用カセットベース2の設置台23上に貯水タンク1を設置し、洗浄用吸水性多孔質部材3の中央部分を洗浄用カセットベース2の保持部24に通して貯水タンク1の水分補給部11と接触させるとともに、洗浄用吸水性多孔質部材3の左右の折り曲げ部分を洗浄用カセットベース2の係止部21,21に嵌め込んで上から止め具22,22によって固定する。 Then, by assembling the water storage tank 1, the cleaning cassette base 2, and the cleaning water-absorbing porous member 3 according to the above configuration, a cleaning cassette 10 as shown in FIG. 2 is completed. That is, the water storage tank 1 is installed on the installation base 23 of the cleaning cassette base 2, and the central portion of the cleaning water-absorbing porous member 3 is passed through the holding portion 24 of the cleaning cassette base 2 to supply water to the storage tank 1. The left and right bent portions of the cleaning water-absorbing porous member 3 are fitted into the locking portions 21 and 21 of the cleaning cassette base 2 and fixed by the stoppers 22 and 22 from above.

図3は、以上のようにして組み立てた洗浄用カセット10をコンベアの搬送ローラ4,4、・・・上を搬送させて洗浄を行っている状態の(a)側面図及び(b)正面図である。 3A is a side view and FIG. 3B is a front view showing a state where the cleaning cassette 10 assembled as described above is cleaned by transporting the transport rollers 4, 4,... It is.

洗浄用カセット10をコンベアの搬送ローラ4,4、・・・上を搬送させ、パーティクル等の異物が発生した部分の上を洗浄用カセット10の洗浄用吸水性多孔質部材3が通過することで、搬送ローラに付着したパーティクル等の異物は吸水性多孔質部材3に吸着されて除去される。すなわち、本発明によれば、本実施の形態のような洗浄用カセット10をコンベアの搬送ローラ4,4、・・・上を搬送させるだけで(つまり洗浄用カセット10の自動搬送が可能)、搬送ローラの洗浄が行われるので、コンベアの搬送ローラに付着したパーティクル等の異物の洗浄を作業者の手によらず短時間で行えるという優れた効果を奏する。 The cleaning cassette 10 is transported on the conveyor rollers 4, 4,..., And the cleaning water-absorbing porous member 3 of the cleaning cassette 10 passes over the part where foreign matters such as particles are generated. Foreign matters such as particles adhering to the conveying roller are adsorbed and removed by the water-absorbing porous member 3. That is, according to the present invention, the cleaning cassette 10 as in the present embodiment is simply transported on the conveyor rollers 4, 4,... (That is, the cleaning cassette 10 can be automatically transported). Since the transport roller is cleaned, there is an excellent effect that cleaning of foreign matters such as particles adhering to the transport roller of the conveyor can be performed in a short time regardless of the hand of the operator.

本実施の形態では、コンベアの搬送ローラと直接接触するのはスポンジ等の吸水性多孔質部材3であるが、パーティクル等の異物を吸着等により除去できる異物除去手段であれば、吸水性多孔質部材3には限定されない。   In this embodiment, the water-absorbing porous member 3 such as a sponge is in direct contact with the conveying roller of the conveyor. The member 3 is not limited.

本発明の搬送ローラの洗浄方法は、磁気記録ディスク用基板または磁気記録ディスクを多数枚収容したディスク搬送用カセットをコンベアの搬送ローラ上を搬送させる際、前記ディスク搬送用カセットと前記搬送ローラとの接触により発生して搬送ローラに付着したパーティクル等の異物を除去するのに特に好適であるが、この場合に発生するパーティクルは通常ほとんどが金属粉(鉄粉)であるため、パーティクル等の異物除去手段として例えば磁石を用いることも可能である。   The transport roller cleaning method according to the present invention includes: a magnetic recording disk substrate or a disk transport cassette containing a large number of magnetic recording disks, which is transported on a transport roller of a conveyor; Although it is particularly suitable for removing foreign substances such as particles generated by contact and adhering to the conveying roller, most of the particles generated in this case are usually metal powder (iron powder), so foreign substances such as particles are removed. For example, a magnet can be used as the means.

また、本発明によれば、コンベアの搬送ローラの洗浄を短時間で簡便に行えるため、搬送ローラを常に清浄な状態に保つことができるので、搬送ローラに付着したパーティクルに起因する磁気記録ディスク等への悪影響の問題を有効に解決することが可能になる。
したがって、本発明によるコンベアの搬送ローラの洗浄工程が含まれる磁気記録ディスクの製造方法は好ましい。
In addition, according to the present invention, since the conveyor rollers of the conveyor can be easily cleaned in a short time, the conveyor rollers can always be kept clean, so that the magnetic recording disk or the like caused by particles adhering to the conveyor rollers It is possible to effectively solve the problem of adverse effects on the environment.
Therefore, the method of manufacturing a magnetic recording disk including the step of cleaning the conveyor rollers of the conveyor according to the present invention is preferable.

洗浄用カセットの組立部品図である。It is an assembly parts figure of a cassette for washing. 洗浄用カセットの(a)組立側面図および(b)組立正面図である。It is the (a) assembly side view and (b) assembly front view of a cassette for washing. 洗浄用カセットをコンベアの搬送ローラ上を搬送させて洗浄を行っている状態の(a)側面図及び(b)正面図である。It is the (a) side view and (b) front view of the state which is carrying out washing | cleaning by conveying the cassette for washing | cleaning on the conveyance roller of a conveyor. 磁気記録ディスクを多数枚収納したディスク搬送用カセットの(a)側面図及び(b)正面図である。It is (a) side view and (b) front view of the cassette for disk conveyance which accommodated many magnetic recording disks. 磁気記録ディスクを収納した搬送用カセットをコンベアの搬送ローラ上を搬送させている状態の(a)側面図及び(b)正面図である。It is the (a) side view and (b) front view of the state which is carrying the conveyance cassette which accommodated the magnetic recording disk on the conveyance roller of a conveyor.

符号の説明Explanation of symbols

1 貯水タンク
2 洗浄用カセットベース
3 洗浄用吸水性多孔質部材
4 搬送ローラ
5 ディスク搬送用カセット
6 磁気記録ディスク
10 洗浄用カセット
DESCRIPTION OF SYMBOLS 1 Water storage tank 2 Cleaning cassette base 3 Cleaning water-absorbing porous member 4 Transport roller 5 Disc transport cassette 6 Magnetic recording disk 10 Cleaning cassette

Claims (6)

パーティクル等の異物を吸着等により除去する異物除去手段を備えた洗浄用部材をコンベアの搬送ローラ上を走行させ、前記搬送ローラに付着したパーティクル等の異物を前記搬送ローラと当接する前記異物除去手段により除去することを特徴とするコンベアの搬送ローラの洗浄方法。   The foreign matter removing means for causing a cleaning member provided with a foreign matter removing means for removing foreign matters such as particles by adsorption or the like to run on a transport roller of a conveyor, and for contacting foreign matter such as particles adhering to the transport roller with the transport roller A method for cleaning a conveyor roller of a conveyor, wherein 前記搬送ローラに付着した異物が金属粉であることを特徴とする請求項1に記載のコンベアの搬送ローラの洗浄方法。   The cleaning method for a conveyor roller of a conveyor according to claim 1, wherein the foreign matter adhering to the conveyor roller is metal powder. 前記異物除去手段が、吸水性多孔質部材であることを特徴とする請求項1又は2に記載のコンベアの搬送ローラの洗浄方法。   The method for cleaning a conveyor roller of a conveyor according to claim 1 or 2, wherein the foreign matter removing means is a water-absorbing porous member. 前記異物除去手段が、磁石であることを特徴とする請求項2に記載のコンベアの搬送ローラの洗浄方法。   The method for cleaning a conveyor roller of a conveyor according to claim 2, wherein the foreign matter removing means is a magnet. 磁気記録ディスク用基板または磁気記録ディスクを多数枚収容したディスク搬送用カセットをコンベアの搬送ローラ上を搬送させる際、前記ディスク搬送用カセットと前記搬送ローラとの接触により発生して搬送ローラに付着したパーティクル等の異物を除去することを特徴とする請求項1乃至4のいずれか一に記載のコンベアの搬送ローラの洗浄方法。   When a disk transport cassette containing a large number of magnetic recording disk substrates or magnetic recording disks is transported on a transport roller of a conveyor, it is generated due to contact between the disk transport cassette and the transport roller and adheres to the transport roller. 5. A method for cleaning a conveyor roller of a conveyor according to claim 1, wherein foreign matters such as particles are removed. 請求項1乃至5のいずれか一に記載の洗浄方法による工程が含まれることを特徴とする磁気記録ディスクの製造方法。
6. A method of manufacturing a magnetic recording disk, comprising a step of the cleaning method according to claim 1.
JP2007095854A 2007-03-31 2007-03-31 Cleaning method for carrying roller of conveyor and manufacturing method for magnetic recording disk Pending JP2008254831A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011074347A1 (en) * 2009-12-17 2011-06-23 吉野石膏株式会社 Device and method for cleaning conveying surface
JP2011216728A (en) * 2010-03-31 2011-10-27 Fujifilm Corp Method of manufacturing solid-state image pickup element

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011074347A1 (en) * 2009-12-17 2011-06-23 吉野石膏株式会社 Device and method for cleaning conveying surface
CN102656103A (en) * 2009-12-17 2012-09-05 吉野石膏株式会社 Device and method for cleaning conveying surface
EP2514693A1 (en) * 2009-12-17 2012-10-24 Yoshino Gypsum Co., Ltd. Device and method for cleaning conveying surface
KR20120123029A (en) * 2009-12-17 2012-11-07 요시노 셋고 가부시키가이샤 Device and method for cleaning conveying surface
AU2010331501B2 (en) * 2009-12-17 2014-01-30 Yoshino Gypsum Co., Ltd. Device and method for cleaning conveying surface
EP2514693A4 (en) * 2009-12-17 2014-06-25 Yoshino Gypsum Co Device and method for cleaning conveying surface
KR101698363B1 (en) 2009-12-17 2017-01-20 요시노 셋고 가부시키가이샤 Device and method for cleaning conveying surface
US9656303B2 (en) 2009-12-17 2017-05-23 Yoshino Gypsum Co., Ltd. Device and method for cleaning conveying surface
JP2011216728A (en) * 2010-03-31 2011-10-27 Fujifilm Corp Method of manufacturing solid-state image pickup element

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