JP2008253095A - Drive guide system and method of detecting malfunction - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce malfunctions due to a generated overshoot at the minimum in a drive guide apparatus. <P>SOLUTION: In a step ST1, a system determines whether the overshoot is generated in a linear motor. A determination in the step ST1 is continued until the generated overshoot is detected. If the overshoot is generated, the step ST1 transits to a step ST2. In the step ST2, information on a location at which the overshoot is generated is detected. If the location information on the generated overshoot is not previously stored, the step ST2 transits to a step ST4. In the step ST4, the first location information and the first overshoot quantity are stored as the location information on the generated overshoot. If the location information on the generated overshoot is previously stored, the step ST2 transits to a step ST3. In the step ST3, the second overshoot quantity is compared with the first previous overshoot quantity, and an alarm circuit 103 informs a user of the generated overshoot if the second overshoot quantity is larger than the first overshoot quantity. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a motion guide system and a malfunction detection method, and is particularly suitable for application to a malfunction detection method when controlling a drive guide device using a servo driver.

  Conventionally, a linear motor controlled by a servo driver is manufactured so as to suppress noise superimposed on a signal from the servo driver as much as possible.

  However, the possibility of noise being superimposed on the signal from the servo driver due to damage to the wiring coating or electromagnetic interference cannot be denied. When the linear motor is driven, if noise is superimposed on a signal output from the servo driver, for example, a command signal for the moving distance, the actual moving position will deviate from the moving position based on the output signal. Sometimes.

  This point will be described with reference to the drawings. FIG. 7 shows a drive guide apparatus employing a linear motor according to the prior art.

  As shown in FIG. 7, in the prior art, the linear motor 200 has a primary side 211 on the energization side having a coil and a secondary side 212 on the non-energization side configured by arranging the S pole and the N pole. Configured. The primary side 211 is provided with a magnetic pole sensor 211a and a scale sensor 211b made of an optical sensor.

The respective signals output from the magnetic pole sensor 211a and the scale sensor 211b are supplied to the control unit 213b of the servo driver 213. Further, an alternating current is supplied from the main circuit power supply unit 213a to the three-phase coil on the primary side 211 based on a control signal from the control unit. Based on the relative positional relationship between the primary side 211 and the secondary side 212 in the driver 213, an appropriate three-phase alternating current is supplied from the main circuit power supply unit 213a to the primary side 211.
JP 2005-287290 A

  However, when noise is superimposed on the signal output from the control unit 213b described above, the present inventor may cause a shift between the signal output from the control unit 213b and the signal supplied to the scale sensor 211b. Confirmed by Due to this deviation, a deviation occurs between the movement amount recognized by the control unit 213b of the servo driver 213 and the actual movement amount, and finally a large malfunction occurs.

  That is, as shown in FIG. 7, it is assumed that the movement amount based on the movement amount signal output from the control unit 213b is L. At this time, if the linear motor 200 operates normally, a moving operation of the moving amount L is performed.

  In contrast, when noise is superimposed on the movement amount signal output from the control unit 213b as described above, the movement amount L of the primary side 211 and the actual movement of the primary side 211 based on the signal from the control unit 213b. A difference is produced between the quantity L ′. In this state, the movement amount of the primary side 211 is recognized as “L” in the control unit 213b of the servo driver 213.

Then, a state in which the deviation is accumulated may be caused by the reciprocating motion of the primary side 211 or the like. Due to the accumulation of the deviation, even when a signal of the movement amount L is supplied from the control unit 213b to the primary side 211, the actual movement amount may be L ″. At this time, the servo driver 213 on the primary side 211 may be. Since the position recognized in FIG. 1 is different from the actual position, the magnetic pole position is shifted.

  This deviation of the magnetic pole position affects the thrust of the linear motor 200, making it difficult to generate sufficient thrust on the primary side 211. Since the optimum thrust cannot be generated, the thrust cannot resist the inertial force even when the primary side 211 reaches the position to be stopped based on the signal from the control unit 213b. Therefore, a phenomenon that the primary side 211 moves excessively occurs. This phenomenon is hereinafter referred to as “overshoot”. Even in this case, if noise is superimposed on the signal supplied from the control unit 213b to the primary side 211, the primary side 211 based on the signal from the control unit 213b stops as shown in FIG. The power position is shifted from the original stop position.

  Further, when this overshoot occurs, a deviation amount (overshoot amount) from the position to be stopped is supplied from the scale sensor 211b to the control unit 213b. The control unit 213b to which the overshoot amount data is supplied supplies a drive current to the primary side 211 so that the primary side 211 returns to a position to be stopped. Thereby, the primary side 211 returns to the position to be stopped. And if this overshoot is repeated, it finally becomes a big malfunction.

  Therefore, an object of the present invention is to provide a drive guide system and a malfunction detection method that can suppress the malfunction of the drive guide apparatus due to the occurrence of overshoot to a minimum.

In order to achieve the above object, the first invention of the present invention provides:
A linear motor composed of a primary side configured with a coil to which an alternating current is supplied and a secondary side configured with a magnet with alternating magnetic poles;
Position detecting means for detecting a relative position between the primary side and the secondary side in the linear motor and outputting position information corresponding to the relative position;
An informing means for informing information to the outside;
Control means provided with a storage unit while controlling the linear motor and the notification means,
By the control means,
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected, When an overshoot occurs, the amount of overshoot is stored in the storage unit as a first overshoot amount, and information on the position where the overshoot occurs is stored as first position information,
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected, When an overshoot occurs, the amount of overshoot is compared with the first overshoot amount as a second overshoot amount, and information on the position where the overshoot occurs is used as second position information. Compared with the first location information,
When the first position information and the second position information are substantially at the same position and the second overshoot amount is larger than the first overshoot amount, the notification means can make a notification. A drive guidance system characterized by being configured.

In addition, the second invention of this invention,
The primary side and the secondary side in a linear motor including a primary side configured with a coil to which an alternating current is supplied and a secondary side configured with a magnet in which magnetic poles are alternately arranged And controlling the linear motor and notifying means for notifying the outside based on position information output from position detecting means for outputting position information corresponding to the relative position. A control means provided with a storage unit,
When the primary side and the secondary side are driven, the presence or absence of overshoot between the primary side and the secondary side is detected, and when the overshoot occurs, the storage unit stores the overshoot. The amount of shoots is stored as a first overshoot amount, and information on the position where the overshoot occurs is stored as first position information,
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected. When an overshoot occurs, the amount of overshoot is compared with the first overshoot amount as a second overshoot amount, and information on the position where the overshoot occurs is used as second position information. Compared with the first position information;
When the first position information and the second position information are substantially the same position and the second overshoot amount is larger than the first overshoot amount, the notification means notifies the first position information and the second position information. This is a malfunction detection method characterized by that.

The third invention of the present invention is:
The primary side and the second side in a linear motor including a primary side configured with a coil to which an alternating current is supplied and a secondary side configured with a magnet in which magnetic poles are alternately arranged. In the malfunction detection program executable by the control means for controlling the linear motor and notifying means for notifying information to the outside and detecting the malfunction based on the relative position with the secondary side. ,
Based on the position information output from the position detection means for detecting the relative position between the primary side and the secondary side and outputting the position information according to the relative position, the primary side and the secondary side When overshoot occurs between the primary side and the secondary side during driving with the side, and the overshoot occurs, the amount of the overshoot is stored in the storage unit when the overshoot occurs. Storing the amount of overshoot as well as information on the position where the overshoot has occurred as first position information;
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected. When an overshoot occurs, the amount of overshoot is compared with the first overshoot amount as a second overshoot amount, and information on the position where the overshoot occurs is used as second position information. Compared with the first position information;
When the first position information and the second position information are substantially the same position information, and the second overshoot amount is larger than the first overshoot amount, the notification means is notified. This is a malfunction detection program.

  As described above, according to the present invention, when an overshoot occurs at least twice at the same position and the overshoot amount increases at the second time, the occurrence of the overshoot is notified. Thus, malfunction due to overshoot in the linear motor can be minimized.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings of the following embodiments, the same or corresponding parts are denoted by the same reference numerals. FIG. 1 shows an example of a drive guide apparatus to which the present invention can be applied.

(Linear motor)
As shown in FIG. 1, the linear motor 10 is comprised from the primary side 11 which is an electricity supply side containing an armature coil, and the secondary side 12 which is a non-energization side provided with the magnet. The primary side 11 of the linear motor 10 is connected via a table 13 to a moving block 15 as a moving table of a guiding mechanism 14 as guiding means. The secondary side 12 of the linear motor 10 is fixed to the base 16, and the base 16 is fixed to the upper surface of the surface plate 17.

  In addition, two rails 18 that constitute guide means together with the moving block 15 are disposed on the base 16 in parallel with each other. The moving block 15 is configured to be able to move along these rails 18 by obtaining driving force from the linear motor 10.

  In the drive guide apparatus according to this embodiment, a heat insulating material 19 is provided between the primary side 11 of the linear motor 10 and the table 13 so as to suppress heat generated on the primary side 11 from being transmitted to the table 13. ing. Thus, by providing the heat insulating material 19 between the primary side 11 of the linear motor 10 and the table 13, heat generated by energizing a drive current to an armature coil (not shown) on the primary side 11 is generated by the table. 13 and the moving block 15 are not transmitted. Thereby, the thermal expansion of the table 13 and the moving block 15 can be prevented. Therefore, the rolling resistance is kept constant without changing the preload (contact pressure) applied to the rolling elements such as a plurality of balls, which are arranged in the endless circulation path of the moving block 15 of the guide mechanism 14. Thus, the life of the driving guide device can be extended.

  The heat insulating material 19 is not necessarily provided, and air cooling means such as fins may be provided instead of the heat insulating material 19. Moreover, as a material of this heat insulating material 19, an epoxy resin material containing glass, a ceramic material, or the like is used. It is also possible to provide a recess (not shown) that acts as a heat insulating space in a portion surrounded by the lower surface of the table 13 and the heat insulating material 19 to block radiant heat from the primary side 11. Further, by making the heat insulating material 19 long along the longitudinal direction of the rail 18, that is, along the movement direction of the table 13 and the moving block 15, the rigidity along this direction increases and the oscillation phenomenon can be prevented. .

(Specific configuration example of drive guide device)
Next, a specific configuration example of the drive guide apparatus according to the embodiment of the present invention will be described. 2 and 3 show a configuration example of the drive guide apparatus according to this embodiment. 2 and 3, the same reference numerals as those in FIG. 1 denote the same or corresponding parts.

  As shown in FIGS. 2 and 3, the primary side 11 of the linear motor 10 is composed of an armature coil and an armature core, and the secondary side 12 is composed of a magnet plate. The secondary side 12 is fixed on the base 16. Rails 18 are arranged (fixed) on the base 16 in parallel on both sides of the secondary side 12 of the linear motor 10 composed of magnet plates.

  A plurality (two in the figure) of moving blocks 15 are arranged on the rail 18 so as to be movable along the rail 18. The table 13 is supported by a plurality (four in the figure) of moving blocks 15 that are movably disposed on the rails 18.

By applying a drive current to an armature coil (not shown) on the primary side 11 of the linear motor 10, a magnetic interaction occurs between the primary side 11 and the secondary side 12, and the primary side 11 becomes the secondary side. 12 move along. The moving force is transmitted to the moving block 15 via the table 13, and the moving block 15 moves along the rail 18.

  End plates 21 are attached to both ends of the base 16, and stoppers 22 are attached to the end plates 21, respectively. A scraper 23 is attached to both ends of the table 13.

  As shown in FIG. 3, on one side of the base 16, there is a linear scale 24 composed of magnets in which magnetic poles are alternately arranged so as to be synchronized with the magnetic poles of the magnets on the secondary side 12 of the linear motor 10. Is provided. Here, the linear scale 24 is provided on the secondary side 12, and is configured by arranging magnetic poles at the same cycle as the magnet for driving the linear motor 10.

  Also, on one side of the table 13, a scale sensor 25 a composed of an optical sensor as a position detecting means for reading the linear scale 24 and detecting the moving position (moving distance) of the table 13 has a bracket 26. Is attached through. Furthermore, a magnetic pole sensor 25b made of, for example, a hall sensor is provided as a magnetic pole detection means at a portion facing the secondary side 12 of the table 13. The magnetic pole sensor 25b detects the type of magnetic pole of the magnet on the secondary side 12. The magnetic pole sensor 25b outputs a 0 or 1 signal corresponding to the magnetic pole.

  As shown in FIG. 2, a cable chain attaching plate 27 is attached to the other side of the base 16, and a cable chain receiver 28 is attached to the other side of the table 13. A power cable 29 for supplying driving power to the primary side 11 of the linear motor 10 disposed on the cable chain mounting plate 27, a signal cable 30 for transmitting and receiving signals, and water for cooling the primary side 11 are supplied. The nylon tube 31 to be connected is connected to the primary side 11 of the linear motor 10 through the cable chain receiver 28.

(Guiding mechanism)
FIG. 4 shows a detailed configuration of the guide mechanism 14 as guide means. As shown in FIG. 4, the rail 18 having a rectangular cross section is formed with four ball rolling grooves 18-1 as rolling element rolling surfaces along the longitudinal direction, two on the left and right sides. Yes. The moving block 15 is formed with an infinite circulation path including a load rolling groove 15-1 that forms a load rolling element rolling path facing the ball rolling groove 18-1. Further, in this infinite circulation path, a plurality of rolling elements that roll and circulate between the ball rolling groove 18-1 and the load rolling groove 15-1 as the rail 18 and the moving block 15 move relative to each other. A plurality of balls 32 are arranged and accommodated. The guide mechanism 14 is configured to be able to load loads in all directions such as radial loads and horizontal loads, as well as moments in each direction.

  The moving block 15 includes a moving block main body 15a in which a load rolling groove 15-1 and a ball return path parallel thereto are formed, and both ends of the moving block main body 15a coupled to the load rolling groove 15-1 and the ball. An end cap 15b having a direction changing path that communicates with the return path is attached to the rail 18 so as to straddle the rail 18. A table 13 is mounted on and attached to the upper surface of the moving block 15. The load rolling grooves 15-1 formed in the moving block 15 are formed to face the respective ball rolling grooves 18-1 formed in the rail 18, and these load rolling grooves 15-1 and A plurality of balls 32 as rolling elements are sandwiched between the ball rolling grooves 18-1. As the moving block 15 moves, these balls 32 are sent to the ball return path through the direction changing path formed in the end cap 15b, and are again guided to the load rolling groove 15-1, so as to pass through the infinite circulation path. Circulate.

(Motor driver / servo driver)
Next, a motor drive driver (servo driver) that controls the drive guide device (linear motor actuator) configured as described above will be described. FIG. 5 shows a block diagram of a drive guide system comprising a drive guide device and a motor drive driver according to one embodiment of the present invention.

  As shown in FIG. 5, the drive guide apparatus according to this embodiment includes a linear motor and a sensor unit based on an input drive current and an output signal. That is, the drive guide apparatus is configured by a primary side 11 having a motor drive circuit composed of a three-phase coil and a secondary side 12 having at least one magnet in which magnetic poles are alternately arranged.

  The sensor unit used in this embodiment is composed of a scale sensor 25a and a magnetic pole sensor 25b. A signal (position detection signal) for detecting the position is output from the scale sensor 25a and supplied to the position detection unit 108 of the servo driver 101. On the other hand, a signal corresponding to the magnetic pole (magnetic pole detection signal) is output from the magnetic pole sensor 25 b and supplied to the magnetic pole detection unit 107 of the servo driver 101.

  In addition, the servo driver 101 according to this embodiment includes a control circuit 102 including a control unit 105 including, for example, a CPU as a control unit, an output current control circuit 104, and a light emitting element or a sound source element as a notification unit, or An alarm circuit 103 including a display unit and the like is included.

  The control circuit 102 is provided with a control unit 105 serving as a main control unit, and a storage unit 106 including a RAM capable of storing information and a program storing ROM and a ROM storing a program. It has been. In addition, the control circuit 102 includes a magnetic pole detection unit 107 that detects the magnetic pole based on the magnetic pole detection signal, and a position detection unit 108 that calculates the relative position between the primary side 11 and the secondary side 12 based on the position detection signal. .

  Further, the output current control circuit 104 and the alarm circuit 103 are controlled by the control circuit 102. Further, the supply of the alternating current from the output current control circuit 104 to the primary side 11 having the motor drive circuit can be stopped by a signal output from the alarm circuit 103.

(Malfunction detection method)
Next, a malfunction detection method in the drive guide system including the drive guide apparatus and the servo driver 101 configured as described above will be described. FIG. 6 shows a flowchart corresponding to the malfunction detection method and malfunction detection program according to this embodiment.

  As shown in FIG. 6, first, in step ST1, the scale sensor 25a and the control circuit 102 determine whether or not an overshoot has occurred in the linear motor. If no overshoot has occurred (step ST1: NO), the determination process of step ST1 is continued until the occurrence of overshoot is detected. On the other hand, when an overshoot occurs (step ST1: YES), the process proceeds to step ST2.

In step ST2, first, overshoot occurrence position information (position instruction information supplied from the control circuit 102 to the primary side 11) is detected, and in the control circuit 102, the control unit 105 performs storage unit 106. In addition, a search is performed as to whether or not information on which an overshoot has already occurred is stored at substantially the same position. As a result, when the information on occurrence of overshoot at substantially the same position is not stored in the storage unit 106 (step ST2: NO), the process proceeds to step ST4. In step ST4, the position instruction information supplied from the control circuit 102 to the primary side 11 and the generated overshoot amount are stored in the storage unit 106 as the first position information and the first overshoot amount, respectively. . Thereafter, the process proceeds to step ST1, and the determination process is continued until the next overshoot occurs.

  On the other hand, in step ST2, detection of overshoot occurrence position information is performed, and the control unit 105 searches the storage unit 106 for information on whether or not overshoot has already occurred at the same position. Is called. As a result, when the overshoot occurrence information at substantially the same position is stored in the storage unit 106 as the first position information and the first overshoot amount (step ST2: YES), the process proceeds to step ST3. .

  In step ST3, the overshoot amount in the current overshoot is temporarily stored in the storage unit 106 as the second overshoot amount, and the control unit 105 performs comparison with the first overshoot amount. The As a result, when the second overshoot amount is equal to or less than the first overshoot amount (first overshoot amount ≧ second overshoot amount, the overshoot amount is equal or decreased) (ST3: NO), Return to step ST1.

  On the other hand, when the second overshoot amount is larger than the first overshoot amount in step ST3 (first overshoot amount <second overshoot amount, overshoot amount increases) (ST3: YES) The process proceeds to step ST5.

  In step ST5, “occurrence of overshoot” is notified from the alarm circuit 103 as notification means. Along with this notification, it is also possible to control the drive guide device to stop by supplying a signal to the output current control circuit 104 and stopping the supply of current to the motor drive circuit on the primary side 11. It is.

  As described above, according to this embodiment, when an overshoot occurs at least once and then a larger overshoot occurs at the same position as this overshoot, an alarm is output and the user is notified. Thus, it is possible to prevent the drive guide apparatus from running out of control due to overlapping overshoots.

  The embodiment of the present invention has been specifically described above, but the present invention is not limited to the above-described embodiment, and various modifications based on the technical idea of the present invention are possible. For example, the numerical values given in the above embodiment are merely examples, and different numerical values may be used as necessary.

  For example, in the drive guide apparatus according to the above-described embodiment, the primary side 11 that is the energization side and the secondary side 12 that is the non-energization side of the drive guide apparatus are configured to face each other in parallel. For example, it is possible to adopt a configuration in which the secondary side 12 is passed through the primary side 11. That is, the secondary side 12 composed of magnets in which magnetic poles are alternately arranged is configured to be able to penetrate the armature coil on the primary side 11, and the secondary side 12 can be moved relative to the primary side 11. It may be configured.

  Further, for example, in the above-described embodiment, the linear motion guide device has been described as an example. However, any configuration using magnetic detection means for position detection in a linear motor can be employed. That is, the present invention can be applied to spline, screw, and actuator related products in general.

It is sectional drawing which shows the structure of the drive guide apparatus by one Embodiment of this invention. It is a front view which shows the structure of the drive guide apparatus by one Embodiment of this invention. It is a side view which shows the structure of the drive guide apparatus by one Embodiment of this invention. It is a perspective view which shows the guide mechanism of the drive guide apparatus by one Embodiment of this invention. It is a block diagram for demonstrating the structure of the drive guide apparatus and drive driver by one Embodiment of this invention. 5 is a flowchart for explaining a malfunction detection method in the drive guidance system according to the embodiment of the present invention. It is a basic diagram which shows the drive guidance system for demonstrating the problem by a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Linear motor 11 Primary side 12 Secondary side 13 Table 14 Guide mechanism 15 Moving block 15b End cap 15a Moving block main body 15-1 Load rolling groove 16 Base 17 Surface plate 18 Rail 18-1 Ball rolling groove 19 Heat insulating material 21 End plate 22 Stopper 23 Scraper 24 Linear scale 25a Scale sensor 25b Magnetic pole sensor 26 Bracket 27 Cable chain mounting plate 29 Power cable 30 Signal cable 31 Nylon tube 32 Ball 101 Servo driver 102 Control circuit 103 Alarm circuit 104 Output current control circuit 105 Control unit 106 storage unit 107 magnetic pole detection unit 108 position detection unit

Claims (5)

A linear motor composed of a primary side configured with a coil to which an alternating current is supplied and a secondary side configured with a magnet with alternating magnetic poles;
Position detecting means for detecting a relative position between the primary side and the secondary side in the linear motor and outputting position information corresponding to the relative position;
An informing means for informing information to the outside;
Control means provided with a storage unit while controlling the linear motor and the notification means,
By the control means,
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected, When an overshoot occurs, the amount of overshoot is stored in the storage unit as a first overshoot amount, and information on the position where the overshoot occurs is stored as first position information,
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected, When an overshoot occurs, the amount of overshoot is compared with the first overshoot amount as a second overshoot amount, and information on the position where the overshoot occurs is used as second position information. Compared with the first location information,
When the first position information and the second position information are substantially in the same position and the second overshoot amount is larger than the first overshoot amount, the notification means causes an overshoot. A drive guidance system characterized in that it can be notified of occurrence. The drive guidance system according to claim 1, wherein the notification means notifies the occurrence of overshoot, and the control means stops driving the linear motor. The primary side and the secondary side in a linear motor including a primary side configured with a coil to which an alternating current is supplied and a secondary side configured with a magnet in which magnetic poles are alternately arranged And controlling the linear motor and notifying means for notifying the outside based on position information output from position detecting means for outputting position information corresponding to the relative position. A control means provided with a storage unit,
When the primary side and the secondary side are driven, the presence or absence of overshoot between the primary side and the secondary side is detected, and when the overshoot occurs, the storage unit stores the overshoot. The amount of shoots is stored as a first overshoot amount, and information on the position where the overshoot occurs is stored as first position information,
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected. When an overshoot occurs, the amount of overshoot is compared with the first overshoot amount as a second overshoot amount, and information on the position where the overshoot occurs is used as second position information. Compared with the first position information;
When the first position information and the second position information are substantially in the same position and the second overshoot amount is larger than the first overshoot amount, the notification means causes an overshoot. A malfunction detection method characterized by notifying the occurrence. The malfunction detecting method according to claim 3, wherein the notifying means notifies the occurrence of an overshoot and the control means stops the driving of the linear motor. The primary side and the second side in a linear motor including a primary side configured with a coil to which an alternating current is supplied and a secondary side configured with a magnet in which magnetic poles are alternately arranged. In the malfunction detection program executable by the control means for controlling the linear motor and notifying means for notifying information to the outside and detecting the malfunction based on the relative position with the secondary side. ,
Based on the position information output from the position detection means for detecting the relative position between the primary side and the secondary side and outputting the position information according to the relative position, the primary side and the secondary side When overshoot occurs between the primary side and the secondary side during driving with the side, and the overshoot occurs, the amount of the overshoot is stored in the storage unit when the overshoot occurs. Storing the amount of overshoot as well as information on the position where the overshoot has occurred as first position information;
At the time of driving the primary side and the secondary side, based on the position information supplied from the position detection means, the presence or absence of occurrence of overshoot between the primary side and the secondary side is detected. When an overshoot occurs, the amount of overshoot is compared with the first overshoot amount as a second overshoot amount, and information on the position where the overshoot occurs is used as second position information. Compared with the first position information;
When the first position information and the second position information are substantially the same position information, and the second overshoot amount is larger than the first overshoot amount, the notification means is notified. The malfunction detection program characterized by the above-mentioned.

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