JP2008239690A - Process for producing coating type interlaminar insulation film-forming composition, coating type interlaminar insulation film-forming composition and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a process for producing a coating type interlaminar insulation film-forming composition which has sufficient mechanical strength, excels in the leak current and the breakdown voltage of an insulation film, by extreme reduction of the amount of a metallic impurity component, and simultaneously excels in stability with time. <P>SOLUTION: The process for producing a coating type interlaminar insulation film-forming composition comprises a step of filtration with a porous polyolefin filtering material in which a structure having at least one kind of an ion-exchange group is grafted, and the coating type interlaminar insulation film-forming composition comprises a polymeric compound having a repeating unit containing a cage structure. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for producing a composition for forming an insulating film having good film properties such as dielectric constant, mechanical strength, heat resistance and the like used for electronic devices, and further for forming a coating type insulating film produced by the manufacturing method. The present invention relates to a composition and an electronic device having an insulating film obtained by using the composition.

  In recent years, in the field of electronic materials, with the progress of higher integration, more functions, and higher performance, circuit resistance and capacitor capacity between wirings have increased, leading to an increase in power consumption and delay time. In particular, an increase in delay time is a major factor in reducing the signal speed of the device and the occurrence of crosstalk. Therefore, in order to reduce the delay time and speed up the device, it is necessary to reduce parasitic resistance and parasitic capacitance. It has been. As a specific measure for reducing this parasitic capacitance, an attempt has been made to cover the periphery of the wiring with a low dielectric interlayer insulating film. In addition, the interlayer insulating film is required to have excellent heat resistance that can withstand subsequent steps such as a thin film formation process, chip connection, and pinning during manufacturing of a mounting substrate, and chemical resistance that can withstand a wet process. Furthermore, in recent years, low resistance Cu wiring has been introduced from Al wiring, and along with this, planarization by CMP (Chemical Mechanical Polishing) has become common, and high mechanical strength that can withstand this process is required. It has been.

On the other hand, the interlayer insulating film used around the wiring of electronic devices is required not only to reduce the dielectric constant and improve the mechanical strength as described above, but also to ensure the most basic electrical insulation as the insulating film. For this reason, it is required to suppress the content of metal impurities in the composition for forming an insulating film to a remarkably low level.
As a method for removing and reducing metal impurities in the composition for forming an insulating film, (1) a method using a bead-shaped ion exchange resin described in Patent Document 1, etc., (2) Patent Document 2, and Patent Document A method of adsorbing metals and metal ions with a filter medium on which a zeta potential acts as described in No. 3 is known. However, these techniques have room for further improvement in terms of the ability to remove metal impurities from the composition for forming an insulating film and the stability over time of the treated coating solution.

JP 2006-291160 A JP 2001-89661 A JP 2001-354775 A

  The object of the present invention is to solve the problems with the insulating film forming material as described above, because the metal impurity component is extremely reduced, so that the leakage current and breakdown voltage of the insulating film are excellent and stable over time. An object of the present invention is to provide a method for producing a composition for forming a coating type interlayer insulating film having excellent properties.

It has been found that the above object of the present invention can be achieved by the following means.
(1) A method for producing a coating-type insulating film-forming composition comprising a step of filtering with a porous polyolefin filter medium grafted with a structure having at least one ion exchange group.
(2) A coating type insulating film composition comprising (A) a polymer compound and (B) an organic solvent, which is filtered with a porous polyolefin filter medium grafted with a structure having at least one ion exchange group. A composition for forming a coating type insulating film, which is characterized in that:
(3) The composition for forming a coating type insulating film according to (2), wherein the polymer compound (A) contains at least one organic polymer.
(4) The coating insulating film forming composition as described in (2) or (3) above, wherein the polymer compound (A) contains at least one repeating unit having a cage structure.
(5) The polymer compound (A) is a polymer of a cage structure-containing monomer having a polymerizable carbon-carbon double bond or carbon-carbon triple bond. A composition for forming a coating type insulating film.
(6) The composition for forming a coating-type insulating film according to (4) or (5), wherein the cage structure is selected from adamantane, biadamantane, diamantane, triamantane, and tetramantane.

(7) The composition for forming a coating type insulating film as described in (6) above, wherein the monomer having a cage structure is selected from the group of the following formulas (I) to (VI).

In formulas (I) to (VI), X _{1 to} X ₈ are a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkynyl group having 2 to 10 carbon atoms, or 6 to 6 carbon atoms. 20 aryl groups, silyl groups having 0 to 20 carbon atoms, acyl groups having 2 to 10 carbon atoms, alkoxycarbonyl groups having 2 to 10 carbon atoms, carbamoyl groups having 1 to 20 carbon atoms, and the like.
Y _{1 to} Y ₈ represent a halogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 20 carbon atoms, or a silyl group having 0 to 20 carbon atoms.
m ₁ and m ₅ each independently represents an integer of ₁ to 16, and n ₁ and n ₅ each represents an integer of 0 to 15.
m ₂ , m ₃ , m ₆ and m ₇ each independently represent an integer of 1 to 15, and n ₂ , n ₃ , n ₆ and n ₇ represent an integer of 0 to 14.
m ₄ and m ₈ each independently represents an integer of 1 to 20, and n ₄ and n ₈ each represents an integer of 0 to 19.

(8) m RSi (O _0.5 ) ₃ units (m represents an integer of 8 to 16. Each R independently represents a non-hydrolyzable group, but at least two of them contain a vinyl group or an ethynyl group. Wherein the cage structure is formed by linking with other RSi (O _0.5 ) ₃ units while sharing the oxygen atom. Film forming composition.

(9) The coating insulating film forming composition as described in (8) above, wherein the monomer having a cage structure is selected from the group of the following formulas (Q-1) to (Q-6): .

  (In the above general formula, each R independently represents a non-hydrolyzable group, provided that at least two are groups containing a vinyl group or an ethynyl group)

(10) An electronic device having an insulating film formed from the composition for forming a coating type interlayer insulating film according to any one of (2) to (9).

The method for producing a coating-type interlayer insulating film forming composition of the present invention has a step of filtering with a porous polyolefin membrane grafted with a structure having at least one ion-exchange group, and the composition having undergone the step Since the content of alkali metals and heavy metals is very low, the formed insulating film has good mechanical strength, film properties such as dielectric constant and mechanical strength, especially excellent heat resistance, electronic device It can be suitably used as an interlayer insulating film.
Moreover, not only is it excellent in metal removal ability, but also the effect of improving the aging stability of the coating solution can be obtained, and even when the coating solution is aged, the number of coating defects is kept small. .

Hereinafter, the present invention will be described in detail.
A porous polyolefin filter medium (hereinafter referred to as “ion-exchangeable porous filter medium”) grafted with a structure having at least one ion-exchange group, which is used in the method for producing a coating type interlayer insulating film forming composition of the present invention. Refers to a filter medium obtained by chemically bonding a compound having at least one ion exchange group to a porous filter medium made of polyolefin by graft polymerization. The filter medium has a chemical structure in which ion exchange groups are suspended in a comb shape on a polymer side chain having a polyolefin as a main chain. As such a filter medium, for example, filter media described in JP-T-2001-515113, JP-A-2003-251118, and the like can be used.
Conventionally, as a method for removing metal impurities contained in a coating type interlayer insulating film forming composition, a method using a bead-shaped ion exchange resin described in JP-A-2006-291160 is the most common. .
However, in the bead-shaped ion exchange resin, most of the ion exchange groups and chelate groups serving as the metal adsorption sites exist in the pores of the resin beads, so that the filtrate effectively contacts the ion exchange groups and chelate groups. In addition, the metal removal ability may be greatly affected by the liquid flow rate (filtration rate) during filtration, and it has been difficult to stably remove metal impurities in the composition.

In the ion-exchangeable porous filter medium used in the composition production method of the present invention, the ion-exchange groups are exposed on the inner walls of the pores, and the filtrate itself passes through the pores during the filtration process. The filtrate can come into contact with almost all ion exchange groups, and its metal-capturing ability is extremely large.
In addition, when such an ion-exchangeable porous filter medium is applied to the filtration step of the composition for forming an interlayer insulating film, not only is it excellent in metal removing ability, but also the effect of improving the temporal stability of the coating solution can be obtained. Can do. Specifically, even when the coating solution is aged, the number of coating defects is maintained in a small state.
The form of the ion-exchangeable porous filter medium used in the method for producing a composition of the present invention is not particularly limited, but is preferably in the form of a membrane or a fiber, more preferably a membrane.

The material of the ion-exchangeable porous filter medium used in the composition production method of the present invention is not particularly limited as long as it is a polyolefin, but is preferably polyethylene, polytetrafluoroethylene, or polyvinylidene fluoride, more preferably polyethylene, most preferably Preferably, it is an ultra high molecular weight polyethylene having a weight average molecular weight of 1,000,000 or more.
In the ion-exchangeable porous filter medium used in the composition production method of the present invention, the pore diameter is not particularly limited, but is preferably 0.01 to 1000 μm, more preferably 0.1 to 50 μm.
In the method for producing the composition of the present invention, there is no particular limitation as long as the filtration step using the ion-exchangeable porous filter material as described above is performed at least once. Metal removal step by passing ion exchange resin through column, or filtration step by porous filter medium in which powder beads of ion exchange resin are dispersed as described in JP-A-2004-73294, zeta potential acts It can be used in combination with a filtration step using a filter medium.
In addition, the filtration with an ion-exchangeable porous filter medium, which is a feature of the composition production method of the present invention, cannot remove foreign matter / particles contained in the composition to a sufficient level. It is preferable to use together. Specifically, it is preferable to use a particle removal filter having a pore diameter of 0.001 to 0.1 μm and a material made of PTFE, PE, PP, nylon.

Hereinafter, the composition for forming a coating type interlayer insulating film in the present invention will be described in detail, but the present invention is not limited to these.
(A) Polymer compound

  The composition for forming a coating type interlayer insulating film in the present invention preferably contains at least one polymer compound. At this time, the usable polymer compound is not particularly limited as long as it can form a film having a low dielectric constant and a high mechanical strength, but is preferably an organic polymer. Here, the organic polymer refers to a polymer in which the elements constituting the polymer main chain are composed only of C, O, and N. In the present invention, the usable polymer compound preferably has at least one repeating unit having a “cage-type structure”.

  The “cage structure” in the present invention is a molecule whose volume is determined by a plurality of rings formed by covalently bonded atoms, and a point located within the volume cannot leave the volume without passing through the ring. Point to. For example, an adamantane structure is considered a cage structure. In contrast, a cyclic structure having a single bridge such as norbornane (bicyclo [2,2,1] heptane) is not considered a cage structure because the ring of a single bridged cyclic compound does not define volume. .

Preferred examples of the cage structure in the present invention include alicyclic hydrocarbon structures such as adamantane, biadamantane, diamantane, triamantane, tetramantane, and dodecahedrane (hereinafter referred to as “cage structure (a)”), or m RSi (O _0.5 ) ₃ units (wherein m represents an integer of 8 to 16. Each R independently represents a non-hydrolyzable group, but at least two represent a group containing a vinyl group or an ethynyl group). And a structure formed by linking with other RSi (O _0.5 ) ₃ units while sharing the oxygen atom (hereinafter referred to as “cage structure (b)”).

  Examples of the cage structure (a) include adamantane, biadamantane, diamantane, triamantane, tetramantane, and dodecahedran, and more preferably adamantane, biadamantane, and diamantane. Is preferred.

  The cage structure (a) in the present invention may have one or more substituents. Examples of the substituent include a halogen atom (fluorine atom, chloro atom, bromine atom, or iodine atom), carbon number 1-10 linear, branched and cyclic alkyl groups (methyl, t-butyl, cyclopentyl, cyclohexyl, etc.), alkenyl groups having 2-10 carbon atoms (vinyl, propenyl, etc.), alkynyl groups having 2-10 carbon atoms ( Ethynyl, phenylethynyl, etc.), C6-C20 aryl groups (phenyl, 1-naphthyl, 2-naphthyl, etc.), C2-C10 acyl groups (benzoyl, etc.), C2-C10 alkoxycarbonyl groups (Methoxycarbonyl, etc.), C 1-10 carbamoyl group (N, N-diethylcarbamoyl, etc.), C 6-20 aryloxy group (phenoxy, etc.), carbon number 20 arylsulfonyl group (phenylsulfonyl, etc.), a nitro group, a cyano group, a silyl group (triethoxysilyl, methyldiethoxysilyl, trivinylsilyl or the like) and the like.

  The polymerization reaction of the monomer having the cage structure (a) is caused by the polymerizable group substituted for the monomer. Here, the polymerizable group refers to a reactive substituent that polymerizes the monomer. The polymerization reaction may be any polymerization reaction, and examples thereof include radical polymerization, cationic polymerization, anionic polymerization, ring-opening polymerization, polycondensation, polyaddition, addition condensation, and transition metal catalyst polymerization.

The polymerization reaction of the monomer having a cage structure (a) in the present invention is preferably performed in the presence of a nonmetallic polymerization initiator. For example, a monomer having a polymerizable carbon-carbon double bond or carbon-carbon triple bond may be polymerized in the presence of a polymerization initiator that exhibits activity by generating free radicals such as carbon radicals and oxygen radicals by heating. I can do it.
As the polymerization initiator, an organic peroxide or an organic azo compound is preferably used, and an organic peroxide is particularly preferable.
Examples of the organic peroxide include ketone peroxides such as perhexa H, peroxyketals such as perhexa TMH, hydroperoxides such as perbutyl H-69, park mill D, perbutyl C, etc. Dialkyl peroxides such as perbutyl D, diacyl peroxides such as niper BW, peroxyesters such as perbutyl Z and perbutyl L, and peroxydicarbonates such as peroyl TCP are preferably used.
As organic azo compounds, azonitrile compounds such as V-30, V-40, V-59, V-60, V-65, and V-70, which are commercially available from Wako Pure Chemical Industries, Ltd., VA-080, Azoamide compounds such as VA-085, VA-086, VF-096, VAm-110 and VAm-111, cyclic azoamidine compounds such as VA-044 and VA-061, and azoamidine compounds such as V-50 and VA-057 Etc. are preferably used.

  The polymerization initiator for the monomer having the cage structure (a) may be used alone or in combination of two or more. The amount used is preferably 0.001 to 2 mol, more preferably 0.01 to 1 mol, and particularly preferably 0.05 to 0.5 mol, with respect to 1 mol of the monomer.

The polymerization reaction of the monomer having the cage structure (a) in the present invention can also be performed in the presence of a transition metal catalyst. For example, a monomer having a polymerizable carbon-carbon double bond or carbon-carbon triple bond may be a Pd-based catalyst such as Pd (PPh ₃ ) ₄ , Pd (OAc) ₂ , Ziegler-Natta catalyst, nickel acetylacetonate, etc. polymerized using a Ni-based catalyst, W-based catalyst such as WCl _6, Mo-based catalysts such as MoCl _5, Ta catalysts such as TaCl _5, Nb-based catalyst such as NbCl _5, Rh-based catalyst, a Pt-based catalyst and the like It is preferable.

The above transition metal catalysts may be used alone or in combination of two or more.
The amount of the transition metal catalyst used is preferably 0.001 to 2 mol, more preferably 0.01 to 1 mol, and particularly preferably 0.05 to 0.5 mol, with respect to 1 mol of the monomer.

The cage structure (a) in the present invention may be substituted as a pendant group in the polymer compound (A) and may be a part of the main chain of the polymer compound (A). The form which becomes a part of is more preferable. Here, the form which is a part of the polymer main chain means that the polymer chain is cleaved when the cage compound is removed from the polymer. In this form, the cage structure (a) is directly single-bonded or linked by an appropriate divalent linking group. Examples of the linking group include, for example, —C (R ₁₁ ) (R ₁₂ ) —, —C (R ₁₃ ) ═C (R ₁₄ ) —, —C≡C—, arylene group, —CO—, —O—. , —SO ₂ —, —N (R ₁₅ ) —, —Si (R ₁₆ ) (R ₁₇ ) —, or a combination thereof. Here, R _{11 to} R ₁₇ each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group. These linking groups may be substituted with a substituent, and for example, the above-described substituents are preferable examples.
Among these, more preferred linking groups are —C (R ₁₁ ) (R ₁₂ ) —, —CH═CH—, —C≡C—, arylene group, —O—, —Si (R ₁₆ ) (R ₁₇ ). — Or a combination thereof, and particularly preferred are —C (R ₁₁ ) (R ₁₂ ) — and —CH═CH— from the viewpoint of low dielectric constant.

  The mass average molecular weight of the polymer compound (A) having a cage structure (a) in the present invention is preferably 1000 to 500000, more preferably 2000 to 200000, and particularly preferably 3000 to 100000.

  The polymer compound (A) having a cage structure (a) in the present invention is preferably a polymer of monomers having a polymerizable carbon-carbon double bond or carbon-carbon triple bond. Furthermore, a polymer of a compound represented by the following formulas (I) to (VI) is more preferable.

In formulas (I) to (VI), X _{1 to} X ₈ are each independently a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkynyl group having 2 to 10 carbon atoms, or carbon. An aryl group having 6 to 20 carbon atoms, a silyl group having 0 to 20 carbon atoms, an acyl group having 2 to 10 carbon atoms, an alkoxycarbonyl having 2 to 10 carbon atoms, a carbamoyl group having 1 to 20 carbon atoms and the like are represented. Among these, Preferably a hydrogen atom, a C1-C10 alkyl group, a C6-C20 aryl group, a C0-C20 silyl group, a C2-C10 acyl group, C2-C10 An alkoxycarbonyl group and a carbamoyl group having 1 to 20 carbon atoms, more preferably a hydrogen atom and an aryl group having 6 to 20 carbon atoms, and particularly preferably a hydrogen atom.
Y _{1 to} Y ₈ each independently represent a halogen atom (fluorine, chlorine, bromine, etc.), an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 20 carbon atoms, or a silyl group having 0 to 20 carbon atoms; Preferably they are a C1-C10 alkyl group and C6-C20 aryl group which may have a substituent, Especially preferably, they are an alkyl group (methyl group etc.).
X _{1 to} X ₈ and Y _{1 to} Y ₈ may be further substituted with another substituent.

m ₁ and m ₅ each independently represents an integer of 1 to 16, preferably 1 to 4, more preferably 1 to 3, and particularly preferably 2.
n ₁ and n ₅ each independently represents an integer of 0 to 15, preferably 0 to 4, more preferably 0 or 1, and particularly preferably 0.
m ₂ , m ₃ , m ₆ and m ₇ each independently represents an integer of 1 to 15, preferably 1 to 4, more preferably 1 to 3, and particularly preferably 2.
n ₂ , n ₃ , n ₆ and n ₇ each independently represents an integer of 0 to 14, preferably 0 to 4, more preferably 0 or 1, particularly preferably 0.
m ₄ and m ₈ each independently represents an integer of 1 to 20, preferably 1 to 4, more preferably 1 to 3, and particularly preferably 2.
n ₄ and n ₈ each independently represents an integer of 0 to 19, preferably 0 to 4, more preferably 0 or 1, and particularly preferably 0.

  The monomer having the cage structure (a) in the present invention is preferably the above formula (II), (III), (V), (VI), more preferably the above formula (II), (III), Particularly preferred is a compound represented by the above formula (III).

  Two or more compounds having the cage structure (a) in the present invention may be used in combination, or two or more monomers having the cage structure (a) of the present invention may be copolymerized.

  The polymer compound (A) having a cage structure (a) in the present invention preferably has sufficient solubility in an organic solvent. The solubility is preferably 3% by mass or more, more preferably 5% by mass or more, and particularly preferably 10% by mass or more in cyclohexanone or anisole at 25 ° C.

  Examples of the polymer compound (A) having the cage structure (a) in the present invention include polybenzoxazoles described in JP-A Nos. 11-322929, 2003-12802, and 2004-18593, and JP-A-2001. No. 2899, quinoline resin, special table 2003-530464, special table 2004-5354497, special table 2004-504424, special table 2004-504455, special table 2005-501131, special table 2005-516382 JP-A-2005-514479, JP-A-2005-522528, JP-A-2000-100808, US Pat. No. 6,509,415, JP-A-11-214382, JP-A-2001-332542, JP-A-2003 252982, JP2003-292878, JP2 No. 04-2787, JP-2004-67877, poly adamantane described in JP 2004-59444, JP 2003-252992, polyimides and the like described in JP 2004-26850.

  Specific examples of the monomer having a cage structure (a) that can be used in the present invention are described below, but the present invention is not limited thereto.

As the solvent used in the polymerization reaction, any solvent may be used as long as the raw material monomer can be dissolved at a necessary concentration and does not adversely affect the characteristics of the film formed from the obtained polymer. . For example, alcohol solvents such as water, methanol, ethanol and propanol, alcohol solvents such as alcohol acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, acetophenone, ethyl acetate, butyl acetate, propylene glycol monomethyl ether acetate, γ-butyrolactone, methyl benzoate Ester solvents such as dibutyl ether and anisole, toluene, xylene, mesitylene, 1,2,4,5-tetramethylbenzene, pentamethylbenzene, isopropylbenzene, 1,4-diisopropylbenzene, t- Butylbenzene, 1,4-di-t-butylbenzene, 1,3,5-triethylbenzene, 1,3,5-tri-t-butylbenzene, 4-t-butyl-orthoxylene, 1-methylnaphtha , Aromatic hydrocarbon solvents such as 1,3,5-triisopropylbenzene, amide solvents such as N-methylpyrrolidinone and dimethylacetamide, carbon tetrachloride, dichloromethane, chloroform, 1,2-dichloroethane, chlorobenzene, 1 Halogen solvents such as 1,2-dichlorobenzene and 1,2,4-trichlorobenzene and aliphatic hydrocarbon solvents such as hexane, heptane, octane and cyclohexane can be used. Among these, more preferred solvents are acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, acetophenone, ethyl acetate, propylene glycol monomethyl ether acetate, γ-butyrolactone, anisole, tetrahydrofuran, toluene, xylene, mesitylene, 1,2,4,5. -Tetramethylbenzene, isopropylbenzene, t-butylbenzene, 1,4-di-t-butylbenzene, 1,3,5-tri-t-butylbenzene, 4-t-butyl-orthoxylene, 1-methylnaphthalene 1,3,5-triisopropylbenzene, 1,2-dichloroethane, chlorobenzene, 1,2-dichlorobenzene, 1,2,4-trichlorobenzene, more preferably tetrahydrofuran, γ-butyrolactone, anisole, Toluene, xylene, mesitylene, isopropylbenzene, t-butylbenzene, 1,3,5-tri-t-butylbenzene, 1-methylnaphthalene, 1,3,5-triisopropylbenzene, 1,2-dichloroethane, chlorobenzene, 1,2-dichlorobenzene and 1,2,4-trichlorobenzene, particularly preferably γ-butyrolactone, anisole, mesitylene, t-butylbenzene, 1,3,5-triisopropylbenzene, 1,2-dichlorobenzene 1,2,4-trichlorobenzene. These may be used alone or in admixture of two or more.
The concentration of the monomer in the reaction solution is preferably 1 to 50% by weight, more preferably 5 to 30% by weight, and particularly preferably 10 to 20% by weight.

Optimum conditions for the polymerization reaction in the present invention vary depending on the polymerization initiator, monomer, solvent type, concentration, and the like, but preferably the internal temperature is 0 ° C to 200 ° C, more preferably 50 ° C to 170 ° C, and particularly preferably 100. C. to 150.degree. C., preferably 1 to 50 hours, more preferably 2 to 20 hours, and particularly preferably 3 to 10 hours.
Moreover, in order to suppress the inactivation of the polymerization initiator by oxygen, it is preferable to make it react under inert gas atmosphere (for example, nitrogen, argon, etc.). The oxygen concentration during the reaction is preferably 100 ppm or less, more preferably 50 ppm or less, and particularly preferably 20 ppm or less.

The monomer having the cage structure (a) in the present invention is prepared, for example, by using commercially available diamantane as a raw material and reacting with bromine in the presence or absence of an aluminum bromide catalyst to introduce a bromine atom at a desired position, followed by odor. 2,2-dibromoethyl group is introduced by reaction with vinyl bromide and Friedel-Crafts in the presence of Lewis acid such as aluminum chloride, aluminum chloride, iron chloride, etc., followed by de-HBr conversion with strong base to convert to ethynyl group Can be synthesized. Specifically, it is synthesized according to the method described in Macromolecules., 1991, 24, 5266-5268, 1995, 28, 5554-5560, Journal of Organic Chemistry., 39, 2995-3003 (1974), etc. I can do it.
Moreover, an alkyl group or a silyl group can be introduced by anionizing a hydrogen atom of a terminal acetylene group with butyllithium or the like and reacting this with an alkyl halide or a silyl halide.

On the other hand, as a preferred form of the cage structure in the present invention, m RSi (O _0.5 ) ₃ units (m represents an integer of 8 to 16. Each R independently represents a non-hydrolyzable group, 2 represents a group containing a vinyl group or an ethynyl group), but can include a cage structure (b) formed by linking with other RSi (O _0.5 ) ₃ units while sharing the oxygen atom. .

Here, R represents a non-hydrolyzable group.
The non-hydrolyzable group mentioned here is a group that remains at 95% or more when brought into contact with 1 equivalent of neutral water at room temperature for 1 hour.
At least two of R are groups containing a vinyl group or an ethynyl group. Examples of non-hydrolyzable groups for R include alkyl groups (methyl, t-butyl, cyclopentyl, cyclohexyl, etc.), aryl groups (phenyl, 1-naphthyl, 2-naphthyl, etc.), vinyl groups, ethynyl groups, allyl groups. Etc.

Of the groups represented by R, at least two are groups containing a vinyl group or an ethynyl group, and at least two are preferably vinyl groups. When the group represented by R includes a vinyl group or an ethynyl group, the vinyl group or ethynyl group is preferably bonded to the silicon atom to which R is bonded, directly or through a divalent linking group. Examples of the divalent linking ^{group, - [C (R 11)} (R 12)] k - (R 11 and ^{R 12} are each independently a hydrogen atom, a methyl group or an ethyl group,, k is 1 to 6 ), —CO—, —O—, —N (R ¹³ ) — (R ¹³ represents a hydrogen atom, a methyl group, or an ethyl group), —S—, and any combination thereof. And divalent linking groups formed by-[C (R ¹¹ ) (R ¹² )] _k- , -O-, or any combination thereof are preferable. In the cage structure (b), the vinyl group or ethynyl group is preferably directly bonded to the silicon atom to which R is bonded.
It is more preferable that at least two vinyl groups out of R in the cage structure (b) are directly bonded to the silicon atom to which R is bonded, and it is particularly preferable that all R are vinyl groups.

  As the cage structure (b), structures represented by the following formulas (Q-1) to (Q-6) are preferable.

In the general formulas (Q-1) to (Q-6), R represents a non-hydrolyzable group.
Specific examples of R include the same as those described above.

  Specific examples of the cage structure (b) include, but are not limited to, the following.

  The cage structure (b) may be a commercially available one or may be synthesized by a known method.

The composition in the present invention may contain a plurality of polymers having different cage structures (b). In that case, it may be a copolymer composed of a plurality of different cage structures (b), or may be a mixture of homopolymers. When the composition of the present invention contains a copolymer composed of a plurality of different cage structures (b), a mixture of two or more cage structures (b) selected from m = 8, 10, and 12 A copolymer is preferred.
Also, a copolymer of the cage structure (b) and another monomer can be used as the polymer compound (A). As another monomer used in that case, a compound having a plurality of polymerizable carbon-carbon unsaturated bonds is preferable. For example, vinyl silanes, vinyl siloxanes, phenyl acetylenes, or the above-described monomers of the general formulas (I) to (VI) can be applied.

As a method for synthesizing a polymer composed of a monomer containing a cage structure (b), it is preferable to dissolve the monomer in a solvent and add a polymerization initiator to react a vinyl group or the like.
The polymerization reaction may be any polymerization reaction, and examples thereof include radical polymerization, cationic polymerization, anionic polymerization, ring-opening polymerization, polycondensation, polyaddition, addition condensation, and transition metal catalyst polymerization.

The polymerization reaction of the monomer containing the cage structure (b) is preferably performed in the presence of a nonmetallic polymerization initiator. For example, polymerization can be carried out in the presence of a polymerization initiator that exhibits activity by generating free radicals such as carbon radicals and oxygen radicals by heating.
As the polymerization initiator, an organic peroxide or an organic azo compound is preferably used, and an organic peroxide is particularly preferable.
Examples of the organic peroxide include ketone peroxides such as perhexa H, peroxyketals such as perhexa TMH, hydroperoxides such as perbutyl H-69, park mill D, perbutyl C, etc. , Dialkyl peroxides such as perbutyl D, diacyl peroxides such as Nyper BW, peroxyesters such as perbutyl Z and perbutyl L, peroxydicarbonates such as perroyl TCP, Luperox 11 commercially available from Arkema Yoshitosha Etc. are preferably used.
As organic azo compounds, azonitrile compounds such as V-30, V-40, V-59, V-60, V-65, and V-70, which are commercially available from Wako Pure Chemical Industries, Ltd., VA-080, Azoamide compounds such as VA-085, VA-086, VF-096, VAm-110 and VAm-111, cyclic azoamidine compounds such as VA-044 and VA-061, and azoamidine compounds such as V-50 and VA-057 Etc. are preferably used.

The polymerization initiator used for the polymerization reaction of the monomer containing the cage structure (b) may be used alone or in combination of two or more.
The amount used is preferably 0.001 to 2 mol, more preferably 0.01 to 1 mol, and particularly preferably 0.05 to 0.5 mol, with respect to 1 mol of the monomer.

Any solvent can be used in the polymerization reaction of the monomer containing the cage structure (b) as long as the monomer can be dissolved at a necessary concentration and does not adversely affect the properties of the film formed from the resulting polymer. Such a thing may be used. For example, alcohol solvents such as water, methanol, ethanol, propanol, etc., ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, acetophenone, ethyl acetate, butyl acetate, propylene glycol monomethyl ether acetate, γ-butyrolactone, methyl benzoate, etc. Ester solvents, ether solvents such as dibutyl ether, anisole and tetrahydrofuran, toluene, xylene, mesitylene, 1,2,4,5-tetramethylbenzene, pentamethylbenzene, isopropylbenzene, 1,4-diisopropylbenzene, t -Butylbenzene, 1,4-di-t-butylbenzene, 1,3,5-triethylbenzene, 1,3,5-tri-t-butylbenzene, 4-t-butyl-orthoxylene, 1-methyl Aromatic hydrocarbon solvents such as lunaphthalene and 1,3,5-triisopropylbenzene, amide solvents such as N-methylpyrrolidinone and dimethylacetamide, carbon tetrachloride, dichloromethane, chloroform, 1,2-dichloroethane, chlorobenzene, Halogen solvents such as 1,2-dichlorobenzene and 1,2,4-trichlorobenzene and aliphatic hydrocarbon solvents such as hexane, heptane, octane and cyclohexane can be used. Among these, more preferred solvents are acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, acetophenone, ethyl acetate, butyl acetate, propylene glycol monomethyl ether acetate, γ-butyrolactone, anisole, tetrahydrofuran, toluene, xylene, mesitylene, 1,2, 4,5-tetramethylbenzene, isopropylbenzene, t-butylbenzene, 1,4-di-t-butylbenzene, 1,3,5-tri-t-butylbenzene, 4-t-butyl-orthoxylene, -Methylnaphthalene, 1,3,5-triisopropylbenzene, 1,2-dichloroethane, chlorobenzene, 1,2-dichlorobenzene, 1,2,4-trichlorobenzene, more preferably tetrahydrofuran, γ-butyrolactone, Anisole, toluene, xylene, mesitylene, isopropylbenzene, t-butylbenzene, 1,3,5-tri-t-butylbenzene, 1-methylnaphthalene, 1,3,5-triisopropylbenzene, 1,2-dichloroethane, Chlorobenzene, 1,2-dichlorobenzene, 1,2,4-trichlorobenzene, particularly preferably γ-butyrolactone, anisole, mesitylene, t-butylbenzene, 1,3,5-triisopropylbenzene, 1,2- Dichlorobenzene and 1,2,4-trichlorobenzene. These may be used alone or in admixture of two or more.
The monomer concentration in the reaction solution is preferably 30% by mass or less, more preferably 10% by mass or less, more preferably 5% by mass or less, still more preferably 1% by mass or less, and most preferably 0.5% by mass or less. The lower the monomer concentration during polymerization, the larger the weight average molecular weight and number average molecular weight, and it is possible to synthesize a composition that is soluble in an organic solvent.

The optimum conditions for the polymerization reaction of the monomer containing the cage structure (b) vary depending on the polymerization initiator, the monomer, the type of solvent, the concentration, etc., but preferably the internal temperature is 0 ° C to 200 ° C, more preferably 40 ° C to It is 170 ° C., particularly preferably 70 ° C. to 150 ° C., preferably 1 to 50 hours, more preferably 2 to 20 hours, particularly preferably 3 to 10 hours.
Moreover, in order to suppress the inactivation of the polymerization initiator by oxygen, it is preferable to make it react under inert gas atmosphere (for example, nitrogen, argon, etc.). The oxygen concentration during the reaction is preferably 100 ppm or less, more preferably 50 ppm or less, and particularly preferably 20 ppm or less.
The preferable range of the weight average molecular weight (Mw) of the polymer obtained by polymerization is 1000 to 1000000, more preferably 2000 to 500000, and particularly preferably 3000 to 100000.

  The polymer composed of a monomer containing the cage structure (b) is preferably soluble in an organic solvent. Here, being soluble in an organic solvent means that 5% by mass or more dissolves at 25 ° C. in a solvent selected from cyclohexanone, methyl ethyl ketone, methyl isobutyl ketone, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, and γ-butyrolactone. However, it is preferable to dissolve 10% by mass or more, and more preferable to dissolve 20% by mass or more.

  The dispersion degree (Mw / Mn) of the polymer composed of the monomer containing the cage structure (b) calculated from the GPC chart is preferably 1 to 15, more preferably 1 to 10, and most preferably 1 to 5. . When Mw is the same, a film with lower density, refractive index, and dielectric constant can be formed when the degree of dispersion is smaller.

As a method for producing the composition having the physical properties described above, when polymerizing the monomer containing the cage structure (b), use a high dilution condition, add a chain transfer agent, optimize the reaction solvent, polymerization Examples thereof include a method in which an initiator is continuously added, a monomer is continuously added, and a radical trapping agent is added.
In addition, after polymerizing the monomer containing the cage structure (b), it is also possible to use a method such as filtering insoluble matter, purifying using column chromatography, or purifying by reprecipitation.
Here, the reprecipitation treatment refers to adding a poor solvent (a solvent that does not substantially dissolve the composition of the present invention) to the reaction solution obtained by distilling off the reaction solvent as necessary, or adding a reaction solvent as necessary. By dropping the distilled reaction liquid into a poor solvent, the composition of the present invention is precipitated, and this is filtered.
As the poor solvent, alcohols (methanol, ethanol, isopropyl alcohol) and the like are preferable. As the poor solvent, it is preferable to use an equal mass to 200 times mass of the composition of the present invention, and it is more preferable to use 2 times to 50 times the mass.

When using a polymer compound composed of a monomer containing the cage structure (b), it is preferable to concentrate the polymer compound by distilling off the reaction solvent used for the polymerization. Moreover, it is preferable to use after performing a reprecipitation process.
The concentration is preferably carried out by heating and / or reducing the pressure of the reaction solution using a rotary evaporator, a distillation apparatus or a reaction apparatus in which a polymerization reaction is performed. The temperature of the reaction solution at the time of concentration is generally 0 ° C to 180 ° C, preferably 10 ° C to 140 ° C, more preferably 20 ° C to 100 ° C, and most preferably 30 ° C to 60 ° C. The pressure during concentration is generally 0.001 to 760 torr, preferably 0.01 to 100 torr, and more preferably 0.01 to 10 torr.
When concentrating the reaction solution, it is preferable to concentrate until the solid content in the reaction solution is 10% by mass or more, more preferably 30% by weight or more, and more preferably 50% by weight or more. It is most preferred to concentrate until

  In the composition for forming an insulating film in the present invention, the above-described polymer compound may be used alone or in combination of two or more.

(B) Coating solvent Although the coating solvent used for the composition for coating type insulation film formation in this invention is not specifically limited, For example, methanol, ethanol, 2-propanol, 1-butanol, 2-ethoxymethanol, 3-methoxypropanol Alcohol solvents such as 1-methoxy-2-propanol, ketone solvents such as acetone, acetylacetone, methyl ethyl ketone, methyl isobutyl ketone, 2-pentanone, 3-pentanone, 2-heptanone, 3-heptanone, cyclopentanone, cyclohexanone, Ethyl acetate, propyl acetate, butyl acetate, isobutyl acetate, pentyl acetate, ethyl propionate, propyl propionate, butyl propionate, isobutyl propionate, propylene glycol monomethyl ether acetate, methyl lactate, Ester solvents such as ethyl lactate and γ-butyrolactone, ether solvents such as diisopropyl ether, dibutyl ether, ethyl propyl ether, anisole, phenetol and veratrol, aromatics such as mesitylene, ethylbenzene, diethylbenzene, propylbenzene and t-butylbenzene Examples include hydrocarbon solvents, amide solvents such as N-methylpyrrolidinone and dimethylacetamide, and these may be used alone or in admixture of two or more.
More preferred coating solvents are 1-methoxy-2-propanol, propanol, acetylacetone, cyclohexanone, propylene glycol monomethyl ether acetate, butyl acetate, methyl lactate, ethyl lactate, γ-butyrolactone, anisole, mesitylene, t-butylbenzene, Preferred are 1-methoxy-2-propanol, cyclohexanone, propylene glycol monomethyl ether acetate, ethyl lactate, γ-butyrolactone, t-butylbenzene, and anisole.
(C) Surfactant

  A surfactant can be appropriately added to the composition for forming a coating type insulating film in the present invention in order to adjust the film thickness uniformity of the coating film. Examples of the surfactant (C) that can be added include nonionic surfactants, anionic surfactants, cationic surfactants, silicone surfactants, fluorine-containing surfactants, Examples include polyalkylene oxide surfactants and acrylic surfactants. The surfactant used in the present invention may be one type or two or more types. As the surfactant, silicone surfactants, nonionic surfactants, fluorine-containing surfactants, and acrylic surfactants are preferable, and silicone surfactants are particularly preferable.

  The addition amount of the surfactant used in the present invention is preferably 0.01% by mass or more and 1% by mass or less, and 0.1% by mass or more and 0.5% by mass or less with respect to the total amount of the film-forming coating solution. More preferably.

  In the present invention, the silicon-based surfactant is a surfactant containing at least one Si atom. The silicon-based surfactant used in the present invention may be any silicon-based surfactant, and preferably has a structure containing alkylene oxide and dimethylsiloxane. A structure including the following chemical formula is more preferable.

  In the formula, R is a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, x is an integer of 1 to 20, and m and n are each independently an integer of 2 to 100. A plurality of R may be the same or different.

  Examples of the silicon-based surfactant used in the present invention include BYK306, BYK307 (manufactured by Big Chemie), SH7PA, SH21PA, SH28PA, SH30PA (manufactured by Toray Dow Corning Silicone), Troysol S366 (manufactured by Troy Chemical). Can be mentioned.

  Any nonionic surfactant may be used as the nonionic surfactant used in the present invention. For example, polyoxyethylene alkyl ethers, polyoxyethylene aryl ethers, polyoxyethylene dialkyl esters, sorbitan fatty acid esters, fatty acid-modified polyoxyethylenes, polyoxyethylene-polyoxypropylene block copolymers, etc. Can do.

  As the fluorine-containing surfactant used in the present invention, any fluorine-containing surfactant may be used. For example, perfluorooctyl polyethylene oxide, perfluorodecyl polyethylene oxide, perfluorodecyl polyethylene oxide and the like can be mentioned.

  The acrylic surfactant used in the present invention may be any acrylic surfactant. For example, a (meth) acrylic acid type copolymer etc. are mentioned.

(D) Other insulating film property modifiers Further, the composition for forming a coating type insulating film of the present invention has characteristics of the obtained insulating film (heat resistance, dielectric constant, mechanical strength, coating property, adhesion, etc.). Additives such as a radical generator, colloidal silica, a silane coupling agent, an adhesion agent, and a pore forming agent may be added as long as they are not impaired.

  Any colloidal silica may be used in the present invention. For example, a dispersion in which high-purity silicic acid is dispersed in a hydrophilic organic solvent or water, usually having an average particle size of 5 to 30 nm, preferably 10 to 20 nm, and a solid content concentration of about 5 to 40% by weight It is.

  Any silane coupling agent may be used in the present invention. For example, 3-glycidyloxypropyltrimethoxysilane, 3-aminoglycidyloxypropyltriethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3- Glycidyloxypropylmethyldimethoxysilane, 1-methacryloxypropylmethyldimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 2-aminopropyltrimethoxysilane, 2-aminopropyltriethoxysilane, N -(2-aminoethyl) -3-aminopropyltrimethoxysilane, N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, 3-ureidopropyltrimethoxysilane, 3-ureidopropyltriethoxysilane N-ethoxycarbonyl-3-aminopropyltrimethoxysilane, N-ethoxycarbonyl-3-aminopropyltriethoxysilane, N-triethoxysilylpropyltriethylenetriamine, N-triethoxysilylpropyltriethylenetriamine, 10- Trimethoxysilyl-1,4,7-triazadecane, 10-triethoxysilyl-1,4,7-triazadecane, 9-trimethoxysilyl-3,6-diazanonyl acetate, 9-triethoxysilyl-3,6 -Diazanonyl acetate, N-benzyl-3-aminopropyltrimethoxysilane, N-benzyl-3-aminopropyltriethoxysilane, N-phenyl-3-aminopropyltrimethoxysilane, N-phenyl-3-aminopropyl Triethoxysilane, - bis (oxyethylene) -3-aminopropyltrimethoxysilane, N- bis (oxyethylene) -3-aminopropyltriethoxysilane and the like. The silane coupling agent used in the present invention may be one type or two or more types.

  Any adhesion promoter may be used in the present invention. For example, trimethoxysilylbenzoic acid, γ-methacryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatopropyltriethoxysilane , Γ-glycidoxypropyltrimethoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, trimethoxyvinylsilane, γ-aminopropyltriethoxysilane, aluminum monoethylacetoacetate diisopropylate, vinyltris (2 -Methoxyethoxy) silane, N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane, N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3- Chloropropyltrimethoxy Sisilane, 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, trimethylchlorosilane, dimethylvinylchlorosilane, methyldiphenylchlorosilane, chloromethyldimethylchlorosilane, trimethylmethoxysilane, dimethyldiethoxysilane, methyldimethoxysilane, dimethyl Vinylethoxysilane, diphenyldimethoxysilane, phenyltriethoxysilane, hexamethyldisilazane, N, N′-bis (trimethylsilyl) urea, dimethyltrimethylsilylamine, trimethylsilylimidazole, vinyltrichlorosilane, benzotriazole, benzimidazole, indazole, Imidazole, 2-mercaptobenzimidazole, 2-mercaptobenzothiazole, 2-merca Examples thereof include putobenzoxazole, urazole, thiouracil, mercaptoimidazole, mercaptopyrimidine, 1,1-dimethylurea, 1,3-dimethylurea, and thiourea compounds. Functional silane coupling agents are preferred as adhesion promoters. The preferred use amount of the adhesion promoter is preferably 10 parts by weight or less, particularly 0.05 to 5 parts by weight with respect to 100 parts by weight of the total solid content.

The composition for forming a coating type insulating film in the present invention can be made porous by using a pore forming factor within the range allowed by the mechanical strength of the film, thereby reducing the dielectric constant.
The pore-forming factor as an additive that becomes a pore-forming agent is not particularly limited, but a non-metallic compound is preferably used, and the solubility in a solvent used in a coating solution for film formation, the polymer of the present invention. It is necessary to satisfy the compatibility with. Further, the boiling point or decomposition temperature of the pore forming agent is preferably 100 to 500 ° C, more preferably 200 to 450 ° C, and particularly preferably 250 to 400 ° C. The molecular weight is preferably 200 to 50,000, more preferably 300 to 10,000, and particularly preferably 400 to 5,000. The addition amount is preferably 0.5 to 75%, more preferably 0.5 to 30%, and particularly preferably 1 to 20% by mass% with respect to the polymer forming the film. Further, as a pore forming factor, a polymer may contain a decomposable group, and the decomposition temperature is preferably 100 to 500 ° C, more preferably 200 to 450 ° C, particularly preferably 250 to 400 ° C. Good to have. The content of the decomposable group is 0.5 to 75%, more preferably 0.5 to 30%, and particularly preferably 1 to 20% in terms of mol% with respect to the polymer forming the film.

  The total solid content concentration contained in the composition for forming a coating type insulating film in the present invention is preferably 0.1 to 50% by mass, more preferably 0.5 to 15% by mass, and particularly preferably 1 to 50% by mass. 10% by mass.

The composition for forming a coating type insulating film in the present invention preferably has a sufficiently low metal content as an impurity. The metal concentration of the coating type insulating film forming composition can be measured with high sensitivity by ICP-MS method, and the metal content other than the transition metal in that case is preferably 30 ppm or less, more preferably 3 ppm or less, particularly preferably. Is 300 ppb or less. In addition, the transition metal has a high catalytic ability to promote oxidation, and from the viewpoint of increasing the dielectric constant of the film obtained in the present invention by an oxidation reaction in the prebaking and thermosetting processes, the content is preferably smaller. Preferably it is 10 ppm or less, More preferably, it is 1 ppm or less, Most preferably, it is 100 ppb or less.
The metal concentration of the coating type insulating film forming composition can also be evaluated by performing total reflection X-ray fluorescence measurement on the film obtained using the coating type insulating film forming composition of the present invention. When W line is used as the X-ray source, K, Ca, Ti, Cr, Mn, Fe, Co, Ni, Cu, Zn, and Pd can be observed as metal elements, each of which is 100 × 10 ¹⁰ cm ⁻² or less. Is more preferably 50 × 10 ¹⁰ cm ⁻² or less, and particularly preferably 10 × 10 ¹⁰ cm ⁻² or less. Moreover, Br which is halogen can also be observed, and the residual amount is preferably 10000 × 10 ¹⁰ cm ⁻² or less, more preferably 1000 × 10 ¹⁰ cm ⁻² or less, and particularly preferably 400 × 10 ¹⁰ cm ⁻² or less. is there. Further, although Cl can be observed as halogen, the remaining amount is preferably 100 × 10 ¹⁰ cm ⁻² or less, more preferably 50 × 10 ¹⁰ cm ⁻² or less from the viewpoint of damaging the CVD apparatus, the etching apparatus, and the like. Particularly preferably, it is 10 × 10 ¹⁰ cm ⁻² or less.

The film obtained using the composition for forming a coating type insulating film in the present invention is obtained by applying the composition for forming a coating type insulating film by any method such as a spin coating method, a roller coating method, a dip coating method, or a scanning method. After coating, the solvent can be removed by heat treatment. As a method of applying to the substrate, a spin coating method or a scanning method is preferable. Particularly preferred is the spin coating method. For spin coating, commercially available equipment can be used. For example, the clean track series (manufactured by Tokyo Electron), D-Spin series (manufactured by Dainippon Screen), SS series or CS series (manufactured by Tokyo Ohka Kogyo) can be preferably used. The spin coating conditions may be any rotational speed, but from the viewpoint of in-plane uniformity of the film, a rotational speed of about 1300 rpm is preferable for a 300 mm silicon substrate. In addition, the composition solution discharging method may be either dynamic discharge in which the composition solution is discharged onto a rotating substrate or static discharge in which the composition solution is discharged onto a stationary substrate. From the viewpoint of performance, dynamic ejection is preferable. Further, from the viewpoint of suppressing the consumption of the composition, it is also possible to use a method in which only the main solvent of the composition is preliminarily ejected on the substrate to form a liquid film, and then the composition is ejected from the liquid film. it can. The spin coating time is not particularly limited, but is preferably within 180 seconds from the viewpoint of throughput. Further, from the viewpoint of transporting the substrate, it is also preferable to perform processing (edge rinse, back rinse) so as not to leave the film at the edge portion of the substrate.
The heat treatment method is not particularly limited, but generally used hot plate heating, heating method using a furnace, light irradiation heating using a xenon lamp by RTP (Rapid Thermal Processor), etc. are applied. Can do. A heating method using hot plate heating or furnace is preferable. A commercially available device can be preferably used as the hot plate, and the clean track series (manufactured by Tokyo Electron), D-Spin series (manufactured by Dainippon Screen), SS series or CS series (manufactured by Tokyo Ohka Kogyo) can be preferably used. As the furnace, α series (manufactured by Tokyo Electron) and the like can be preferably used.

  It is particularly preferable that the polymer compound (A) contained in the coating type insulating film forming composition in the present invention is cured by heat treatment after coating on the substrate. For example, a polymerization reaction during post-heating of carbon triple bonds and double bonds remaining in the polymer compound (A) can be used. The conditions for this post-heat treatment are preferably 100 to 450 ° C., more preferably 200 to 420 ° C., particularly preferably 350 to 400 ° C., preferably 1 minute to 2 hours, more preferably 10 minutes to 1.5 ° C. Time, particularly preferably in the range of 30 minutes to 1 hour. The post-heating treatment may be performed in several times. Further, this post-heating is particularly preferably performed in a nitrogen atmosphere in order to prevent thermal oxidation by oxygen.

Moreover, in this invention, you may make it harden | cure by causing the polymerization reaction of the carbon triple bond or double bond which remain | survives in a polymer by irradiating a high energy ray instead of heat processing. Examples of high energy rays include electron beams, ultraviolet rays, and X-rays, but are not particularly limited to these methods.
The energy when an electron beam is used as the high energy beam is preferably 0 to 50 keV, more preferably 0 to 30 keV, and particularly preferably 0 to 20 keV. The total dose of the electron beam is preferably 0 to 5 μC / cm ² , more preferably 0 to ² μC / cm ² , and particularly preferably 0 to 1 μC / cm ² . The substrate temperature at the time of irradiation with an electron beam is preferably 0 to 450 ° C, more preferably 0 to 400 ° C, and particularly preferably 0 to 350 ° C.
The pressure is preferably 0 to 133 kPa, more preferably 0 to 60 kPa, and particularly preferably 0 to 20 kPa.
From the viewpoint of preventing oxidation of the polymer in the present invention, the atmosphere around the substrate is preferably an inert atmosphere such as Ar, He, or nitrogen. Further, a gas such as oxygen, hydrocarbon, or ammonia may be added for the purpose of reaction with plasma, electromagnetic waves, or chemical species generated by interaction with an electron beam. The electron beam irradiation in the present invention may be performed a plurality of times. In this case, the electron beam irradiation conditions need not be the same each time, and may be performed under different conditions each time.
Ultraviolet rays may be used as the high energy rays. The irradiation wavelength region when ultraviolet rays are used is preferably 160 to 400 nm, and the output is preferably 0.1 to 2000 mWcm ⁻² immediately above the substrate. The substrate temperature at the time of ultraviolet irradiation is preferably 250 to 450 ° C., more preferably 250 to 400 ° C., and particularly preferably 250 to 350 ° C. From the viewpoint of preventing oxidation of the polymer of the present invention, the atmosphere around the substrate is preferably an inert atmosphere such as Ar, He, or nitrogen. Further, the pressure at that time is preferably 0 to 133 kPa.

  The film obtained by using the composition for forming a coating type insulating film in the present invention has a barrier layer for preventing metal migration on the wiring side surface in the wiring structure when used as an interlayer insulating film for a semiconductor. In addition, there may be an etching stopper layer, etc. in addition to a cap layer and an interlayer adhesion layer that prevent peeling by CMP (Chemical Mechanical Polishing) on the bottom surface of the upper surface of the wiring and interlayer insulating film. The layer of the insulating film may be divided into a plurality of layers with other kinds of materials as required.

  A film obtained by using the composition for forming a coating type insulating film in the present invention can be etched for copper wiring or other purposes. Etching may be either wet etching or dry etching, but dry etching is preferred. For dry etching, either ammonia-based plasma or fluorocarbon-based plasma can be used as appropriate. These plasmas can use not only Ar but also oxygen, or gases such as nitrogen, hydrogen, and helium. In addition, after the etching process, ashing can be performed for the purpose of removing the photoresist or the like used for the processing, and further, cleaning can be performed to remove a residue at the time of ashing.

  The film obtained by using the composition for forming a coating type insulating film in the present invention can be subjected to CMP (Chemical Mechanical Polishing) in order to planarize the copper plating portion after the copper wiring processing. As the CMP slurry (chemical solution), a commercially available slurry (for example, manufactured by Fujimi, manufactured by Rodel Nitta, manufactured by JSR, manufactured by Hitachi Chemical, etc.) can be used as appropriate. Moreover, as a CMP apparatus, a commercially available apparatus (Applied Materials Co., Ltd., Ebara Corporation, etc.) can be used suitably. Furthermore, it can be washed to remove slurry residue after CMP.

The film obtained using the composition for forming a coating type insulating film in the present invention can be used for various purposes. For example, it is suitable as an insulating film for semiconductor devices such as LSI, system LSI, DRAM, SDRAM, RDRAM, and D-RDRAM, and electronic parts such as multichip module multilayer wiring boards, interlayer insulating film for semiconductor, etching stopper film, surface protection In addition to films, buffer coat films, LSI passivation films, alpha ray blocking films, flexographic printing plate cover lay films, overcoat films, flexible copper clad cover coats, solder resist films, liquid crystal alignment films, etc. I can do it.
Further, as another application, the film of the present invention can be provided with conductivity by doping with an electron donor or acceptor and used as a conductive film.

  The present invention will be described more specifically with reference to the following examples. However, the scope of the present invention is not limited to these examples.

<Synthesis Example 1>
According to the synthesis method described in Macromolecules., 5266 (1991), 4,9-diethynyldiamantane (a) was synthesized. Next, 2 g of 4,9-diethynyldiamantane (a), 0.22 g of dicumyl peroxide (Perk Mill D, manufactured by NOF Corporation) and 10 ml of t-butylbenzene were stirred for 7 hours at an internal temperature of 150 ° C. under a nitrogen stream. Polymerized. After the reaction solution was brought to room temperature, it was added to 60 ml of isopropyl alcohol, and the precipitated solid was filtered and sufficiently washed with isopropyl alcohol to obtain a desired 4,9-diethynyldiamantane (a) polymer.

<Synthesis Examples 2-7>
Instead of 4,9-diethynyldiamantane (a) in Synthesis Example 1, 3,3,3 ′, 3′-triethynyl-1,1′-biadamantane (b), 3,3′-diethynyl-1 , 1′-biadamantane (c), 1,6-diethynyldiamantane (d), 1,4,6,9-tetraethynyldiamantane (e), exemplary compound (Ia), exemplary compound (I Each polymer was obtained in the same manner as in Synthesis Example 1 except that -d) was used.

<Synthesis Example 8>
3,3 ′-(oxydi-1,4-phenylene) bis (2,4,5-triphenylcyclopentadienone) (compound (f), 782.4 g, 1.0 mol), and 1,3,5-tris (Phenylethynyl) benzene (compound (g), 378.2 g (1.00 mol)) was dissolved in 4 liters of γ-butyrolactone, and this solution was added to the flask. The flask was purged with nitrogen, and the solution was heated and stirred at 200 ° C. After heating for 12 hours, the solution cooled to room temperature was added to 5 liters of ethanol. At this time, a polymer as a Diels-Alder reactant of compound (f) and compound (g) was obtained as a powdered solid obtained by precipitation.

[Examples 1-37, Comparative Examples 1-2]
<Preparation of composition for forming coating type insulating film>
Each polymer obtained in the above synthesis example was completely dissolved in cyclohexanone so as to have a solid content of 3.0% by weight to prepare a coating solution. The composition for forming a coating film was prepared by filtering this coating stock solution through various filtration filters shown in Table 1 below. Here, in addition to the ion removal filter shown in Table 1, the filtration filter was filtered using an asymmetric structure nylon filter (manufactured by Nippon Pole) having a pore diameter of 0.02 μm as a particle removal filter. The filtration step using the metal removal filter and the particle removal filter was performed in an environment that included a room temperature of 20 to 30 ° C. and a humidity of 40 to 60% RH. About the composition obtained by such a manufacturing method, content of Na, K, Fe, Zn, and Pt was quantified using the polarization | polarized-light Zeeman atomic absorption spectrophotometer (the Hitachi make, Z-9000). The results are shown in Table 1.

<Measurement of insulation resistance>
The coating solution prepared as described above was spin-coated on an 8-inch bare silicon wafer having a substrate resistance of 7 Ω / cm using a spin coater ACT-8 SOD manufactured by Tokyo Electron. The coated film was baked at 110 ° C. for 60 seconds, followed by 200 ° C. for 60 seconds, and then baked for 1 hour in a 400 ° C. clean oven purged with nitrogen to obtain a coated film having a thickness of 100 nm. The relative dielectric constant of the obtained film was calculated from the electric capacity value at 1 MHz using a mercury probe manufactured by Four Dimensions and an HP4285A LCR meter manufactured by Yokogawa Hewlett-Packard.
In addition, when a voltage is gradually applied to the obtained film using a Four Dimensions mercury probe and Yokogawa Hewlett Packard HP4285A LCR meter, the leakage current when the electric field strength in the insulating film is 1.0 MV / cm (Leak current) was measured. Further, when the applied voltage was raised to a certain extent, the leakage current exceeded 1E-3 A / cm ² , but the voltage applied to the insulating film at this point was measured as a breakdown voltage. The above-described leakage current and breakdown voltage were measured at 20 points on an 8-inch wafer, and the measured values were obtained as the average. The evaluation results are summarized in Table 1 below.

<Evaluation of the number of coating defects over time>
On an 8-inch silicon wafer, a solution obtained by aging the solution of each composition shown in Table 1 at 23 ° C. for one month was applied with a pin, and baked at 110 ° C./60 seconds and 200 ° C./60 seconds to obtain a film thickness. An 80 nm insulating film was obtained. With respect to the insulating film thus obtained, coating defects were inspected with a wafer defect inspection apparatus KLA-2360 manufactured by KLA-Tencor Corporation, and the number of primary defects obtained was defined as the number of coating defects. The results are summarized in Table 1.

(註)
(A): Nippon Pole, ion kleen SL (filter material with cation exchange groups grafted on porous polyethylene)
(B): Protego CF manufactured by Nihon Entegris (filter medium with cation exchange groups grafted on porous polyethylene)
(C): Nippon Pole, ion kleen AN (filter medium in which anion exchange resin is dispersed in porous polypropylene)
(D): Mitsubishi Chemical's column packed with beads obtained by washing Diaion (R) CR20 (chelate resin) with ultrapure water and electronic grade cyclohexanone and drying.
(E): Column packed with beads made by Organo, Amberlyst 15DRY (cation exchange resin) washed with ultrapure water and electronic grade cyclohexanone and dried

  As shown in Table 1 above, according to the method for producing a coating-type insulating film forming composition of the present invention, the metal impurities contained in the composition are reduced, and the insulation resistance such as leakage current and breakdown voltage is excellent. Further, it can be seen that the coating solution is excellent in stability over time.

Claims (10)

  The manufacturing method of the composition for coating type insulation film formation including the process filtered with the porous polyolefin filter medium by which the structure which has at least 1 type of ion exchange group is grafted.   A coating type insulating film composition comprising (A) a polymer compound and (B) an organic solvent, wherein filtration is performed with a porous polyolefin filter medium grafted with a structure having at least one ion exchange group A composition for forming a coating type insulating film.   The composition for forming a coating insulating film according to claim 2, wherein the polymer compound (A) contains at least one organic polymer.   The composition for forming a coating type insulating film according to claim 2 or 3, wherein the polymer compound (A) contains at least one type of repeating unit having a cage structure.   The coating type insulating film according to claim 4, wherein the polymer compound (A) is a polymer of a cage structure-containing monomer having a polymerizable carbon-carbon double bond or carbon-carbon triple bond. Forming composition.   The composition for forming a coating type insulating film according to claim 4 or 5, wherein the cage structure is selected from adamantane, biadamantane, diamantane, triamantane, and tetramantane. The composition for forming a coating type insulating film according to claim 6, wherein the monomer having a cage structure is selected from the group of the following formulas (I) to (VI).

In formulas (I) to (VI), X _{1 to} X ₈ are a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkynyl group having 2 to 10 carbon atoms, or 6 to 6 carbon atoms. 20 aryl groups, silyl groups having 0 to 20 carbon atoms, acyl groups having 2 to 10 carbon atoms, alkoxycarbonyl groups having 2 to 10 carbon atoms, carbamoyl groups having 1 to 20 carbon atoms, and the like.
Y _{1 to} Y ₈ represent a halogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 20 carbon atoms, or a silyl group having 0 to 20 carbon atoms.
m ₁ and m ₅ each independently represents an integer of 1 to 16, and n ₁ and n ₅ each represents an integer of 0 to 15.
m ₂ , m ₃ , m ₆ and m ₇ each independently represent an integer of 1 to 15, and n ₂ , n ₃ , n ₆ and n ₇ represent an integer of 0 to 14.
m ₄ and m ₈ each independently represents an integer of 1 to 20, and n ₄ and n ₈ each represents an integer of 0 to 19. m RSi (O _0.5 ) ₃ units (m represents an integer of 8 to 16. Each R independently represents a non-hydrolyzable group, but at least two represent a group containing a vinyl group or an ethynyl group. The composition for forming a coating type insulating film according to claim 4, wherein the cage structure is formed by linking with other RSi (O _0.5 ) ₃ units while sharing the oxygen atom. object. The composition for forming a coating type insulating film according to claim 8, wherein the monomer having a cage structure is selected from the group of the following formulas (Q-1) to (Q-6).

(In the above general formula, each R independently represents a non-hydrolyzable group, provided that at least two are groups containing a vinyl group or an ethynyl group)   The electronic device which has an insulating film formed from the composition for coating type insulating film formation in any one of Claims 2-9.