JP2008235046A - Electronic device and electronic component - Google Patents

Electronic device and electronic component Download PDF

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JP2008235046A
JP2008235046A JP2007073982A JP2007073982A JP2008235046A JP 2008235046 A JP2008235046 A JP 2008235046A JP 2007073982 A JP2007073982 A JP 2007073982A JP 2007073982 A JP2007073982 A JP 2007073982A JP 2008235046 A JP2008235046 A JP 2008235046A
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thin film
metal
ito
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electronic device
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Kiyoshi Yamaura
潔 山浦
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Sony Corp
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<P>PROBLEM TO BE SOLVED: To address a problem of the prior art having difficulty to make corrosion proofing of a metal contact or the like due to isolation, and to achieve corrosion proofing and electrical conductivity of a metal contact or the like of an electronic device simultaneously by using a novel photocatalyst having also excellent electrical conductivity. <P>SOLUTION: An electronic component has an ITO thin film 3, for example, consisting of at least one kind selected from a group of ITO, IZO and AZO, and a plug 2 as a metal conductive section for conducting, e.g., transmission an electrical signal. The ITO thin film 3 is joined with the plug 2, and the electronic component comprises the plug 2 at least a part thereof is configured to allow light 5 of a wavelength λ≤380 nm to be incident thereupon. An electronic device 20 is provided with wirings 12A, 12B covered with ITO thin films 13A, 13B and so on. Excited electrons are generated in the ITO thin film 3 by radiation of light of a short wavelength of λ≤380 nm, and they flow into a plug metal to reduce the metal and drop its potential, so that corrosion of a surface of the metal is sufficiently prevented. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、例えば電気信号の授受を行う導電性プラグ又はコネクタ等の電子部品と、これを有する電子機器に関するものである。   The present invention relates to an electronic component such as a conductive plug or a connector that transmits and receives an electrical signal, and an electronic device having the same.

携帯電話、PDA(携帯情報端末)、デジタルカメラ、据え置き型TV(テレビジョン受像機)、PC(パーソナルコンピュータ)等の電子機器には、多くの金属部分が存在する。一つは、他機器や電源、或いは外部メディア(メモリーカード等)と電気信号授受を行うコネクタであり、また他にも、実装基板に形成される配線の如き金属導電部等が挙げられる。   There are many metal parts in electronic devices such as mobile phones, PDAs (personal digital assistants), digital cameras, stationary TVs (television receivers), and PCs (personal computers). One is a connector for exchanging electrical signals with another device, a power source, or an external medium (memory card or the like), and other examples include a metal conductive portion such as a wiring formed on a mounting board.

これらには主に導電性の良い金属が使用されているが、コスト面も考慮され、銅、黄銅、アルミニウム、ステンレス、ニッケル等が用いられている。しかし、これらには、金や銀、パラジウム等の耐腐食性金属がめっきされる場合が多い。その理由は、通常、金属が腐食性物質(例えば、硫黄、含硫黄化合物)や湿気に曝されると、腐食やマイグレーションが発生するからである。   Metals having good conductivity are mainly used for these, but copper, brass, aluminum, stainless steel, nickel and the like are used in consideration of cost. However, these are often plated with a corrosion resistant metal such as gold, silver or palladium. The reason is that corrosion and migration usually occur when a metal is exposed to a corrosive substance (for example, sulfur or a sulfur-containing compound) or moisture.

金属の防食技術で最もよく使われている方法は、表面に有機薄膜を形成し、腐食性物質と金属の接触を物理的に阻害する手法である。例えば、後記の特許文献1では、室温硬化性のシリコーンゴムを金属導電部の表面に成膜することによる防食法が提案されている。   The most commonly used method in metal anticorrosion technology is to form an organic thin film on the surface and physically block contact between corrosive substances and metal. For example, in Patent Document 1 described later, an anticorrosion method is proposed by depositing a room temperature curable silicone rubber on the surface of a metal conductive portion.

他方、大型構造物(船舶、橋桁等)では、海水や淡水に浸漬する部分が多く、腐食対策は電子機器よりも切迫した課題である。例えば、犠牲電極と呼ばれる、主に電気化学的に卑電位を持つ金属(亜鉛等)を接触させ、腐食を避けたい金属の電位を腐食電位以下に保つ施策がなされている。   On the other hand, large structures (ships, bridge girders, etc.) are often immersed in seawater or fresh water, and countermeasures against corrosion are more pressing issues than electronic devices. For example, a measure called a sacrificial electrode, in which a metal (such as zinc) having an electrochemically basic potential is brought into contact with the metal and the potential of the metal to avoid corrosion is kept below the corrosion potential, has been taken.

また、同様の効果を光触媒によって実現する光カソード防食と称される技術も提案されている。例えば、後記の非特許文献1では、SUS−304に対して、TiO2被膜で防食した例が示されている。 In addition, a technique called photocathode protection that achieves the same effect with a photocatalyst has also been proposed. For example, Non-Patent Document 1 described later shows an example in which SUS-304 is anticorrosive with a TiO 2 coating.

特開2004−149611号公報(特許請求の範囲、段落番号[0005]〜[0028])JP 2004-149611 A (claims, paragraph numbers [0005] to [0028]) OHKO Yら., J Electrochem Soc VOL.148 NO.1(2001年)B24〜27頁OHKO Y et al., J Electrochem Soc VOL.148 NO.1 (2001) B24-27

しかしながら、上記の特許文献1に示されるように、有機被膜で高い導電性を得ることは難しく、金属接点等のように低抵抗が求められる箇所に適用するのは困難である。   However, as shown in the above-mentioned Patent Document 1, it is difficult to obtain high conductivity with an organic coating, and it is difficult to apply it to places where low resistance is required, such as metal contacts.

また、上記した他の技術を電子機器に応用した場合、上記の犠牲電極法では金属腐食による生成物が機器内に拡散し、故障原因となる危険性がある。上記の非特許文献1に示された光防食法でも、用いる光触媒が絶縁体であるため、電子機器の金属接点のように導電性を必要とする箇所には採用できなかった。   In addition, when the above-described other technology is applied to an electronic device, the sacrificial electrode method has a risk that a product due to metal corrosion diffuses into the device and causes a failure. Even in the photo-corrosion protection method disclosed in Non-Patent Document 1, since the photocatalyst used is an insulator, it cannot be used in places that require electrical conductivity, such as metal contacts of electronic devices.

本発明の目的は、絶縁性のために金属接点等の防食が難しかった上記の従来の光触媒に対して、防食性と同時に導電性にも優れた新規な光触媒を用いることによって、電子機器の金属接点等の防食性と導電性を十分に両立可能とすることにある。   The object of the present invention is to use a novel photocatalyst excellent in conductivity at the same time as the anticorrosion as compared with the above-mentioned conventional photocatalyst which is difficult to prevent the corrosion of metal contacts and the like due to the insulating property. The object is to make it possible to sufficiently achieve both corrosion resistance and electrical conductivity of contacts and the like.

即ち、本発明は、ITO(Indium-Tin-Oxide)、IZO(Indium-Zinc-Oxide)及びAZO(Aluminum-Zinc-Oxide)からなる群より選ばれた少なくとも1種からなる薄膜と、電気信号の伝達等を行うための金属導電部とを有し、前記薄膜は、前記金属導電部に接合又は接続されていると共に少なくとも一部が光入射可能に構成されている金属プラグ等を有する電子機器に係るものである。   That is, the present invention provides at least one thin film selected from the group consisting of ITO (Indium-Tin-Oxide), IZO (Indium-Zinc-Oxide), and AZO (Aluminum-Zinc-Oxide), and an electrical signal. An electronic device having a metal conductive portion for performing transmission and the like, and the thin film is joined or connected to the metal conductive portion and at least a part of which is configured to allow light incidence It is concerned.

また、本発明は、ITO、IZO及びAZOからなる群より選ばれた少なくとも1種からなる薄膜と、電気信号の伝達等を行うための金属導電部とを有し、前記薄膜は、前記金属導電部に接合されていると共に少なくとも一部が光入射可能に構成されている金属プラグ等の電子部品も提供するものである。   The present invention further includes a thin film made of at least one selected from the group consisting of ITO, IZO, and AZO, and a metal conductive portion for transmitting electric signals, etc. The present invention also provides an electronic component such as a metal plug that is joined to the portion and at least a part of which is configured to allow light incidence.

本発明者は、TiO2、SrTiO3等の如き従来の光触媒ではなく、透明導電性酸化物(TCO)として用いられてきたITO、IZO、AZOを用い、これらが光触媒としての機能も有することを新たに見出し、この知見に基づいて、これらの酸化物を電子機器の腐食を受け易い金属部分に接合(接触)若しくは接続することによって、上記した課題を解決し、本発明に到達したものである。 The present inventor uses ITO, IZO, and AZO, which have been used as transparent conductive oxides (TCO), instead of conventional photocatalysts such as TiO 2 and SrTiO 3 , and has a function as a photocatalyst. Based on this finding, the above problems have been solved and the present invention has been achieved by joining (contacting) or connecting these oxides to metal parts that are susceptible to corrosion of electronic equipment. .

即ち、ITO、IZO、AZO(以下、ITO等と称することがある。)を含むTCOはこれまで、光触媒機能を有することは知られていなかったが、近紫外光の波長以下の短波長域(λ≦380nm)に吸収を持ち、価電子帯と伝導帯との間の禁制帯幅(Eb:バンドギャップ)が3.3eV付近の値を示す酸化物半導体であると考えられ、近紫外光の波長又はそれ以下の波長光の照射によって、電子が励起され、接触又は接続している金属の電位を下げる効果を示すことが本発明者によってはじめて実証されたのである。しかも、ITO等は、導電性も10-5Ωcm(比抵抗)オーダーと高く、金属表面を被覆しても、接触抵抗を上げにくいという利点がある。 That is, TCO including ITO, IZO, and AZO (hereinafter sometimes referred to as ITO) has not been known to have a photocatalytic function until now, but has a short wavelength region shorter than the wavelength of near-ultraviolet light ( λ ≦ 380 nm) and is considered to be an oxide semiconductor having a forbidden band width (E b : band gap) between the valence band and the conduction band of around 3.3 eV. It has been demonstrated for the first time by the present inventor that an electron is excited by irradiation with light having a wavelength of less than or equal to or less than this wavelength, and the effect of lowering the potential of the metal in contact or connection is shown. Moreover, ITO or the like has an advantage that the conductivity is as high as 10 −5 Ωcm (specific resistance), and it is difficult to increase the contact resistance even if the metal surface is coated.

このように、ITO等のTCOは、酸化物半導体として、バンドギャップ以上のエネルギーを持つ光が照射されると、光吸収により電子が励起され、金属を還元する作用を示し、この作用によって金属の電位を腐食電位以下に下げ、その金属の防食作用を高めることができ、しかも、導電性も高いために金属接点等の金属導電部に適用することが可能となる。   As described above, TCO such as ITO exhibits an action of reducing the metal by exciting the electrons by absorbing light when irradiated with light having an energy higher than the band gap as an oxide semiconductor. The potential can be lowered below the corrosion potential, the anticorrosive action of the metal can be enhanced, and since it has high conductivity, it can be applied to metal conductive parts such as metal contacts.

本発明においては、上記した効果を十二分に実現する上で、ITO、IZO又はAZO(以下、これらを本発明のTCOと称することがある。)からなる前記薄膜が、近紫外光の波長以下、特にλ≦380nmの短波長域の短波長光を十分に吸収する半導体特性を示すことが望ましい。ここで、本発明のTCOはいずれも十分な導電性も有するが、ITOとIZOは同等の導電性を有し、また、IZOは薄膜としたときの表面性が良く、AZOはコストが安いというメリットがある。   In the present invention, in order to realize the above-described effects sufficiently, the thin film made of ITO, IZO or AZO (hereinafter, these may be referred to as TCO of the present invention) is used for the wavelength of near-ultraviolet light. In the following, it is desirable to exhibit semiconductor characteristics that sufficiently absorb short wavelength light in a short wavelength region of λ ≦ 380 nm. Here, both TCOs of the present invention have sufficient conductivity, but ITO and IZO have equivalent conductivity, IZO has good surface properties when made into a thin film, and AZO has low cost. There are benefits.

そして、前記金属導電部が、前記薄膜を接合した金属接点部又は金属配線部、或いは、電子機器の筐体外面に設けた前記薄膜とリード線で接続された電子機器内部の金属配線部であってよく、材質としては銅、ニッケル等が挙げられる。前記金属接点部は、具体的には、導電性プラグ又はコネクタを形成している。   The metal conductive portion is a metal contact portion or a metal wiring portion to which the thin film is bonded, or a metal wiring portion inside the electronic device connected to the thin film provided on the outer surface of the casing of the electronic device by a lead wire. The material may be copper, nickel or the like. Specifically, the metal contact portion forms a conductive plug or connector.

前記薄膜は、少なくとも光入射可能領域において前記金属導電部の表面に接合されてよく、これ以外にも、光入射可能領域に配された前記薄膜がリード線を介して前記金属導電部に接続されていてもよい。   The thin film may be bonded to the surface of the metal conductive portion at least in the light incident area. In addition, the thin film disposed in the light incident area is connected to the metal conductive portion via a lead wire. It may be.

また、前記薄膜の存在形態としては、ITO、IZO又はAZOの単独物の被膜又は各単独物の積層膜からなっていてよく、或いは、ITO、IZO又はAZOからなる粉末の単独物又は混合物が塗布等により付着されたものであってよい。   The thin film may be present as a single film of ITO, IZO or AZO or a laminated film of each single material, or a single powder or mixture of ITO, IZO or AZO may be applied. It may be attached by, for example.

ITO等の本発明のTCOは、スプレー法、スパッタ法、CVD(化学的気相成長法)、レーザーアブレーション等の汎用薄膜形成技術によって薄膜に形成してよく、或いは、本発明のTCO粉体を絶縁性樹脂等に混練してインク化し、これを塗布してもよい。ここで使用可能な樹脂は汎用エポキシ樹脂、透明ポリイミド等、λ≦380nmでの光吸収が100%でない樹脂であればよい。   The TCO of the present invention such as ITO may be formed into a thin film by a general-purpose thin film forming technique such as spraying, sputtering, CVD (Chemical Vapor Deposition), laser ablation, or the TCO powder of the present invention is formed. The ink may be kneaded into an insulating resin or the like and applied. The resin that can be used here may be a general-purpose epoxy resin, a transparent polyimide, or the like, as long as the light absorption at λ ≦ 380 nm is not 100%.

以下、本発明の好ましい実施の形態を図面参照下に詳細に説明する。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

例1
図1(a)は、本発明のTCOを金属接点1に適用した例を概略図示するものである。これによれば、銅、ニッケル等の金属プラグ又はその本体(雄)2の表面に、本発明のTCOの1種である例えばITO薄膜3がスパッタ法等によって被着(接合)されていることが重要である。
Example 1
FIG. 1A schematically illustrates an example in which the TCO of the present invention is applied to a metal contact 1. According to this, on the surface of a metal plug such as copper or nickel or the surface of the main body (male) 2, for example, an ITO thin film 3 which is one kind of TCO of the present invention is deposited (bonded) by a sputtering method or the like. is important.

即ち、金属プラグ2が、電子機器10のキャビネット側の金属プラグ(雌)4に対して着脱可能に使用されるときに、図1(b)に示すように、金属プラグ2の表面の金属Mが、λ≦380nmの短波長の光5(これは、通常の室内照明や太陽光などに含まれている。)の照射によって発現するITO薄膜3の光触媒作用に基づく還元作用を受け、これによって金属プラグ2の表面の腐食が十二分に防止されるのである。この効果は、金属プラグ2を差し込んだままでも得られることは有利である。   That is, when the metal plug 2 is used detachably with respect to the metal plug (female) 4 on the cabinet side of the electronic device 10, the metal M on the surface of the metal plug 2 as shown in FIG. Is subjected to a reduction action based on the photocatalytic action of the ITO thin film 3 that is manifested by irradiation with light 5 having a short wavelength of λ ≦ 380 nm (this is included in normal indoor lighting, sunlight, etc.). Corrosion of the surface of the metal plug 2 is sufficiently prevented. It is advantageous that this effect can be obtained even with the metal plug 2 inserted.

この現象(光触媒能又は光防食能)を図2について説明する。ITO、IZO又はAZOからなるTCOはこれまで、光触媒機能を示すことは認識されていなかったが、近紫外光の波長以下の短波長域(λ≦380nm)に吸収を持ち、価電子帯V.B.と伝導帯C.B.との間の禁制帯幅(Eb:バンドギャップ)が3.3eV付近の値を示す酸化物半導体であると考えられる。例えば、ITOは、図2(a)に示すように、近紫外光の波長又はそれ以下の波長光5の照射によって、電子が励起され、6〜7秒でΔV=0.028V(これは、NaCl水溶液の腐食液中で白金板を対極とした状態で測定)と電位が低下し、これに伴なって、接触している金属M(ここでは金属プラグ本体2)の電位を下げる効果があることが本発明者によってはじめて実証された。 This phenomenon (photocatalytic ability or photoprotective ability) will be described with reference to FIG. TCO made of ITO, IZO or AZO has not been recognized so far to show a photocatalytic function, but has absorption in a short wavelength region (λ ≦ 380 nm) below the wavelength of near-ultraviolet light. B. And conduction band C.I. B. It is considered that this is an oxide semiconductor whose forbidden band width ( Eb : bandgap) between and is in the vicinity of 3.3 eV. For example, in ITO, as shown in FIG. 2 (a), electrons are excited by irradiation with light 5 having a wavelength of near ultraviolet light or less, and ΔV = 0.028V (this is (Measured with a platinum plate as a counter electrode in a corrosive solution of NaCl aqueous solution) and the potential is lowered, and this has the effect of lowering the potential of the contacting metal M (here, the metal plug body 2). This was demonstrated for the first time by the present inventors.

これをより詳細に説明すると、金属腐食は電気化学プロセスであり、陽極(例えばCu→Cu2++2e)、陰極(1/2O2+H2O+2e→2OH-又は2H++2e→H2)の電子移動反応が関与する。ここで、図2(b)に示すように、ITO3は、そのバンドギャップ以上のエネルギーをもつ光5が照射されると、その光を吸収して電子が励起され、この励起電子eが伝導帯C.B.から金属2に流れると、金属2の電位はより電位の低いフラットバンド側にシフトする(金属が還元作用を受ける)。このバンド位置が金属の酸化電位(腐食電位)よりも低いため、その酸化を抑制でき、この結果、金属の防食を実現できることになる。 To explain this in more detail, metal corrosion is an electrochemical process, and the electrons at the anode (eg Cu → Cu 2+ + 2e), cathode (1 / 2O 2 + H 2 O + 2e → 2OH or 2H + + 2e → H 2 ) A transfer reaction is involved. Here, as shown in FIG. 2B, when the ITO 3 is irradiated with light 5 having energy higher than the band gap, the light is absorbed and the electrons are excited, and the excited electrons e are converted into the conduction band. C. B. When flowing from 1 to metal 2, the potential of metal 2 shifts to the flat band side having a lower potential (the metal undergoes a reducing action). Since this band position is lower than the oxidation potential (corrosion potential) of the metal, the oxidation can be suppressed, and as a result, the corrosion protection of the metal can be realized.

しかも、ITO3は、その導電性も10-5Ωcm(比抵抗)オーダーと高いため、金属2の表面を被覆しても、接触抵抗を増大させることはなく、十二分に導電性を確保することができる。 Moreover, since the conductivity of ITO3 is as high as 10 −5 Ωcm (specific resistance), even if the surface of the metal 2 is coated, the contact resistance is not increased, and the conductivity is sufficiently ensured. be able to.

例2
図3は、いわゆるメモリスティックと称される電子機器に本発明のTCOを適用した例を概略図示するものである。
Example 2
FIG. 3 schematically shows an example in which the TCO of the present invention is applied to an electronic device called a so-called memory stick.

この電子機器20は、制御回路等のIC(集積回路)部15に接続された銅等の配線12A、12B…のうち、パーソナルコンピュータに接続される外部端子12a、12b…を有し、各配線の表面がTCOとしての例えばITO薄膜13A、13B…でそれぞれ被覆されており、また各配線が外部端子とは反対側の外部露出端面16にまで導びかれ、パーソナルコンピュータに装着されたときに各配線端面において各ITO薄膜が外部に露出した状態となるように構成されている。   This electronic device 20 has external terminals 12a, 12b... Connected to a personal computer among wirings 12A, 12B... Connected to an IC (integrated circuit) unit 15 such as a control circuit. Are coated with, for example, ITO thin films 13A, 13B... As TCO, and each wiring is led to the externally exposed end surface 16 on the side opposite to the external terminals, and each is mounted on a personal computer. Each ITO thin film is configured to be exposed to the outside at the wiring end face.

従って、電子機器20の使用時に、端面16に露出しているITO薄膜13A、13B…にλ≦380nmの短波長の光(これは、通常の室内照明や太陽光などに含まれている。)の照射によってITO薄膜に励起電子が発生し、これが外部端子側も含めて金属配線12A、12B…に流れ込んでこれらの金属配線の構成金属を還元し、その電位を低下させるため、各金属配線の表面の腐食が十二分に防止されるのである。その他は、上記した例1で述べたと同様の効果が得られる。   Accordingly, when the electronic device 20 is used, light having a short wavelength of λ ≦ 380 nm is applied to the ITO thin films 13A, 13B... Exposed on the end face 16 (this is included in normal indoor lighting, sunlight, and the like). Excited electrons are generated in the ITO thin film by irradiation of this, and this flows into the metal wirings 12A, 12B... Including the external terminal side to reduce the constituent metals of these metal wirings and lower their potential. Surface corrosion is sufficiently prevented. In other respects, the same effects as described in Example 1 can be obtained.

この例の変形例として、上記の金属配線は端面16にまで延設せずに通常の配線領域に設ける一方、上記のITO薄膜のみを端面16にまで延設するか、或いはITO薄膜を金属配線の全域に設けずに外部端子12a、12b…にのみ設けてもよい。前記の場合は、上記したと同様のメカニズムで金属配線の腐食を防止でき、また後者の場合は、使用中に金属配線に腐食が生じても、パーソナルコンピュータから取外してから上記のITO薄膜の領域にλ≦380nmの光を照射することによって、ITO薄膜の光触媒作用(励起電子による還元作用)で金属配線の酸化状態を還元して元の金属に変化させ、その腐食状態を除去することができる。   As a modification of this example, the above metal wiring is not provided to the end face 16 but is provided in a normal wiring area, while only the above ITO thin film is provided to the end face 16 or the ITO thin film is provided as a metal wiring. May be provided only on the external terminals 12a, 12b. In the above case, corrosion of the metal wiring can be prevented by the same mechanism as described above, and in the latter case, even if the metal wiring is corroded during use, the area of the ITO thin film is removed after being removed from the personal computer. By irradiating light with λ ≦ 380 nm, the oxidation state of the metal wiring can be reduced and changed to the original metal by the photocatalytic action (reduction action by excited electrons) of the ITO thin film, and the corrosion state can be removed. .

例3
図4は、本発明のTCOを電子機器30内の一般の金属配線に適用した例を概略的に示すものである。
Example 3
FIG. 4 schematically shows an example in which the TCO of the present invention is applied to a general metal wiring in the electronic device 30.

即ち、銅等の金属配線22A、22B…の所定箇所、例えば延設端部22a、22b…が例えばITO薄膜23A、23B…によって被覆され、かつこれらのITO薄膜にλ≦380nmの光が入射できるように構成されている。このためには、ITO薄膜の領域を外部光が入射可能な若しくは外部に露出した構造にしておけばよい。   That is, predetermined portions of the metal wirings 22A, 22B, etc., such as copper, for example, the extended end portions 22a, 22b,... Are covered with, for example, the ITO thin films 23A, 23B,. It is configured as follows. For this purpose, the ITO thin film region may be structured to allow external light to enter or to be exposed to the outside.

この例でも、使用中に金属配線に腐食が生じようとしても、上記のITO薄膜の領域にλ≦380nmの光を照射することによって、ITO薄膜の光触媒作用(励起電子による還元作用)で金属配線の腐食を防止することができる。その他は、上述した例1で述べたと同様の効果が得られる。   In this example as well, even if the metal wiring is likely to be corroded during use, the metal thin film is photocatalyzed (reduction action by excited electrons) of the ITO thin film by irradiating the above-mentioned ITO thin film region with light of λ ≦ 380 nm. Corrosion of can be prevented. In other respects, the same effects as described in Example 1 are obtained.

例4
図5は、本発明のTCOを適用した更に他の例を概略的に示すものである。
Example 4
FIG. 5 schematically shows still another example to which the TCO of the present invention is applied.

即ち、図5(a)に示すように、電子機器40の外部筐体(キャビネット)30の外面にTCOとして例えばITO薄膜33が塗布によって形成され、これがリード線36を介して内蔵回路部37の接点金属32と電気的に接続されている。接点金属32は、電子部品としてのICチップ38のアウターリード39に接続された金属配線42の一部であってよい。但し、リード線36の接続形態は電子部品の種類によっては種々の形態を採り得、内蔵回路部の接地配線その他に接続されてもよい。なお、ITO薄膜33は、エポキシ樹脂等にITO粉末を混練してなるインクを塗布することによって形成することができる。   That is, as shown in FIG. 5A, for example, an ITO thin film 33 is formed as a TCO by coating on the outer surface of the external housing (cabinet) 30 of the electronic device 40, and this is formed in the built-in circuit portion 37 via the lead wire 36. The contact metal 32 is electrically connected. The contact metal 32 may be a part of the metal wiring 42 connected to the outer lead 39 of the IC chip 38 as an electronic component. However, the connection form of the lead wire 36 may take various forms depending on the type of electronic component, and may be connected to the ground wiring or the like of the built-in circuit unit. The ITO thin film 33 can be formed by applying an ink obtained by kneading ITO powder in an epoxy resin or the like.

この例では、使用中に内蔵回路部37の金属配線(アウターリード39も含む。)に腐食が生じても、筐体30の外面上に露出した上記のITO薄膜33の領域にλ≦380nmの光5を照射することによって、図5(b)に示すように、ITO薄膜30に励起電子が発生し、これがリード35を通して金属配線42や39に流れ込んでその酸化状態を還元して元の金属に変化させ、その腐食状態を除去することができる。   In this example, even if the metal wiring (including the outer lead 39) of the built-in circuit portion 37 is corroded during use, the region of the ITO thin film 33 exposed on the outer surface of the housing 30 satisfies λ ≦ 380 nm. By irradiating the light 5, as shown in FIG. 5B, excited electrons are generated in the ITO thin film 30 and flow into the metal wirings 42 and 39 through the lead 35 to reduce the oxidation state, thereby reducing the original metal. The corrosion state can be removed.

次に、本発明を実施例によって更に具体的に説明する。   Next, the present invention will be described more specifically with reference to examples.

比較例1
評価用の銅積層基板(表面積4cm2)の表面を化学研磨し、腐食剤である0.1N NaCl 100ml水溶液中に投入した。腐食促進のため、大気中に曝して放置実験を行った。これは、酸素が溶液中に溶け込み易くするためである。環境温度は25℃〜27℃とした。
Comparative Example 1
The surface of the copper laminated substrate for evaluation (surface area 4 cm 2 ) was chemically polished and put into a 100 ml aqueous solution of 0.1N NaCl as a corrosive agent. In order to promote corrosion, the samples were left exposed to the atmosphere for experiments. This is because oxygen is easily dissolved in the solution. The environmental temperature was 25 ° C to 27 ° C.

腐食の評価は、72h(3days)後に試料を取り出し、腐食による着色(緑)と、乾燥重量(腐食前の重量を基準とした腐食後の乾燥重量増加率)の測定によって行った。照射光は、自然光を模して、200nm〜500nm(λ≦380nmを含む。)に幅広い発光を示すキセノンランプ(ウシオ電機社製)によって発生させ、照度10mW/cm2で連続照射した。 The corrosion was evaluated by taking out a sample after 72 h (3 days), and measuring the coloring due to corrosion (green) and the dry weight (the increase in dry weight after corrosion based on the weight before corrosion). Irradiation light was generated by a xenon lamp (manufactured by Ushio Inc.) that emits a wide range of light from 200 nm to 500 nm (including λ ≦ 380 nm), imitating natural light, and continuously irradiated at an illuminance of 10 mW / cm 2 .

実施例1
比較例1に準じた銅積層基板(表面積4cm2)上にITO薄膜を成膜した。この成膜には高周波スパッタ法を用い、膜厚10nmに成膜した。ITOの比抵抗は約2×10-5Ωcmであった。腐食の評価は比較例1と同様に行った。
Example 1
An ITO thin film was formed on a copper laminated substrate (surface area 4 cm 2 ) according to Comparative Example 1. This film was formed using a high frequency sputtering method to a film thickness of 10 nm. The specific resistance of ITO was about 2 × 10 −5 Ωcm. Corrosion was evaluated in the same manner as in Comparative Example 1.

実施例2
ITOの成膜面積を半分(2cm2)とした他、実施例1に準じた試料の作成、腐食の評価を行った。
Example 2
In addition to the ITO film-forming area being halved (2 cm 2 ), samples were prepared in accordance with Example 1 and evaluated for corrosion.

実施例3
ITOを同厚のIZOに変更した他は実施例1に準じた試料の作成、腐食の評価を行った。
Example 3
A sample was prepared in accordance with Example 1 and corrosion was evaluated except that ITO was changed to IZO having the same thickness.

実施例4
ITOを同厚のAZOに変更した他は実施例1に準じた試料の作成、腐食の評価を行った。AZOの比抵抗はITOの約5倍(10-4Ωcm)であった。
Example 4
A sample was prepared in accordance with Example 1 and corrosion was evaluated except that ITO was changed to AZO having the same thickness. The specific resistance of AZO was about 5 times (10 −4 Ωcm) that of ITO.

以上の各例で得られた結果を下記の表−1にまとめて示す。   The results obtained in each of the above examples are summarized in Table 1 below.

Figure 2008235046
Figure 2008235046

この結果によれば、ITO、IZO又はAZOの3種のTCOをそれぞれ接合させた実施例1〜4の銅片は、TCOを接合させない比較例1の銅片と比べ、重量増加率が低く、着色も無いため、優れた防食効果を奏することが見出された。重量増加率許容限界=0.001%であるので、実施例1、3及び4での値は許容範囲内であった。   According to this result, the copper pieces of Examples 1 to 4 in which three kinds of TCO of ITO, IZO or AZO were joined, respectively, have a lower weight increase rate than the copper piece of Comparative Example 1 in which TCO is not joined. Since there is no coloring, it has been found that an excellent anticorrosive effect is achieved. Since the weight increase rate allowable limit = 0.001%, the values in Examples 1, 3, and 4 were within the allowable range.

このように、本発明のTCOは、酸化物半導体として、バンドギャップ以上のエネルギーを持つ光が照射されると、光吸収により電子が励起され、還元作用を示し、この作用は接触した金属の電位を下げ、その金属の防食作用を高めることが確認された。   As described above, the TCO of the present invention is an oxide semiconductor, and when irradiated with light having energy greater than or equal to the band gap, electrons are excited by light absorption and show a reducing action, which is the potential of the metal in contact. It was confirmed that the anticorrosive action of the metal was increased.

以上、本発明を実施の形態及び実施例について種々例示したが、これらの例は本発明の主旨を逸脱しない範囲で適宜変形可能であることはいうまでもない。   As described above, the present invention has been variously illustrated with respect to the embodiments and examples. However, it goes without saying that these examples can be appropriately modified without departing from the gist of the present invention.

例えば、上述したITO薄膜又はITO塗布膜に代えて、IZOやAZOの薄膜又は塗布膜を形成してよいし、これらのTCOを積層膜としたり、混合粉末として塗布してもよい。   For example, instead of the ITO thin film or the ITO coating film described above, an IZO or AZO thin film or a coating film may be formed, or these TCOs may be formed as a laminated film or a mixed powder.

また、これらのTCO薄膜を適用する対象は、上述した例以外にも、電気信号の伝達又は電位保持のための金属配線、プラグ、コネクタ、接地用電源ライン等、種々の電子機器又は電子部品とすることができる。   In addition to the above-described examples, these TCO thin films are applied to various electronic devices or electronic parts such as metal wiring, plugs, connectors, and grounding power lines for electric signal transmission or potential holding. can do.

また、TCO薄膜に入射させる光は、その光半導体特性を発現できる波長光であればよく、特に近紫外光のようにλ≦380nmの短波長光、又はこの波長光を含む光であってよい。この光は、室内光、太陽光(自然光)であればよいが、キセノンランプ、水銀ランプ、ハロゲンランプ等のランプから放射されたものであってもよい。   Further, the light incident on the TCO thin film may be light having a wavelength capable of exhibiting the optical semiconductor characteristics, and may be light having a short wavelength of λ ≦ 380 nm or light including this wavelength, particularly near-ultraviolet light. . The light may be room light or sunlight (natural light), but may be emitted from a lamp such as a xenon lamp, a mercury lamp, or a halogen lamp.

防食性の実現と導電性の確保とを両立させた、電気信号の授受を行う導電性プラグ又はコネクタ等の電子部品と、これを有する電子機器を提供できる。   It is possible to provide an electronic component such as a conductive plug or a connector that transmits and receives an electric signal that achieves both anti-corrosion properties and ensuring conductivity, and an electronic device having the electronic component.

本発明による電子部品と電子機器の一例の概略断面図(a)とその要部断面図(b)である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a schematic cross-sectional view of an example of an electronic component and an electronic apparatus according to the present invention, and FIG. 同、光照射によるITOの電位変化を示す特性図(a)と、その光触媒能(光防食能)を説明するためのバンド図(b)である。FIG. 4 is a characteristic diagram (a) showing the potential change of ITO by light irradiation and a band diagram (b) for explaining the photocatalytic ability (photocorrosion ability). 本発明による電子機器の他の例の概略平面図とその左側面図及び右側面図である。It is the schematic plan view of the other example of the electronic device by this invention, its left view, and right view. 本発明による電子機器の他の例の概略平面図とその右側面図である。It is the schematic plan view of the other example of the electronic device by this invention, and its right view. 本発明による電子機器の更に他の例の概略断面図(a)とその要部断面図(b)である。It is the schematic sectional drawing (a) of the other example of the electronic device by this invention, and its principal part sectional drawing (b).

符号の説明Explanation of symbols

1…金属接点、2…プラグ(雄)、
3、13A、13B、23A、23B、33…ITO薄膜、4…プラグ(雌)、5…光、10、20、30、40…電子機器、12A、12B、22A、22B、42…配線、
12a、12b…外部端子、15…集積回路部、16…露出端面、30…筐体、
32…接点金属、35…リード線、37…内蔵回路部、38…ICチップ、
39…アウターリード
1 ... Metal contact, 2 ... Plug (male),
3, 13A, 13B, 23A, 23B, 33 ... ITO thin film, 4 ... plug (female), 5 ... light, 10, 20, 30, 40 ... electronic equipment, 12A, 12B, 22A, 22B, 42 ... wiring,
12a, 12b ... external terminals, 15 ... integrated circuit section, 16 ... exposed end face, 30 ... casing,
32 ... Contact metal, 35 ... Lead wire, 37 ... Built-in circuit part, 38 ... IC chip,
39 ... Outer lead

Claims (14)

ITO(Indium-Tin-Oxide)、IZO(Indium-Zinc-Oxide)及びAZO(Aluminum-Zinc-Oxide)からなる群より選ばれた少なくとも1種からなる薄膜と、電気信号の伝達等を行うための金属導電部とを有し、前記薄膜は、前記金属導電部に接合又は接続されていると共に少なくとも一部が光入射可能に構成されている電子機器。   A thin film made of at least one selected from the group consisting of ITO (Indium-Tin-Oxide), IZO (Indium-Zinc-Oxide), and AZO (Aluminum-Zinc-Oxide), and for transmitting electrical signals, etc. An electronic device having a metal conductive portion, wherein the thin film is joined or connected to the metal conductive portion and at least a part thereof is configured to allow light incidence. 前記薄膜が、近紫外光の波長以下の短波長光を十分に吸収する半導体特性を示す、請求項1に記載した電子機器。   The electronic device according to claim 1, wherein the thin film exhibits semiconductor characteristics that sufficiently absorb short-wavelength light having a wavelength shorter than or equal to that of near-ultraviolet light. 前記金属導電部が、前記薄膜を接合した金属接点部又は金属配線部、或いは、筐体外面に設けた前記薄膜とリード線で接続された内部の金属配線部である、請求項1に記載した電子機器。   The metal conductive part is a metal contact part or a metal wiring part to which the thin film is joined, or an internal metal wiring part connected to the thin film provided on the outer surface of the housing by a lead wire. Electronics. 前記金属接点部が導電性プラグ又はコネクタを形成している、請求項3に記載した電子機器。   The electronic device according to claim 3, wherein the metal contact portion forms a conductive plug or a connector. 前記薄膜が、少なくとも光入射可能領域において前記金属導電部の表面に接合されている、請求項1に記載した電子機器。   The electronic device according to claim 1, wherein the thin film is bonded to a surface of the metal conductive portion at least in a light incident area. 前記薄膜が、ITO、IZO又はAZOの単独物の被膜又は各単独物の積層膜からなる、請求項1に記載した電子機器。   The electronic device according to claim 1, wherein the thin film is composed of a single film of ITO, IZO, or AZO or a laminated film of each single film. 前記薄膜が、ITO、IZO又はAZOからなる粉末の単独物又は混合物からなる、請求項1に記載した電子機器。   The electronic device according to claim 1, wherein the thin film is made of a powder alone or a mixture of ITO, IZO, or AZO. ITO、IZO及びAZOからなる群より選ばれた少なくとも1種からなる薄膜と、電気信号の伝達等を行うための金属導電部とを有し、前記薄膜は、前記金属導電部に接合されていると共に少なくとも一部が光入射可能に構成されている電子部品。   A thin film made of at least one selected from the group consisting of ITO, IZO, and AZO, and a metal conductive portion for transmitting an electrical signal, and the thin film is bonded to the metal conductive portion In addition, at least a part of the electronic component is configured so that light can enter. 前記薄膜が、近紫外光の波長以下の短波長光を十分に吸収する半導体特性を示す、請求項8に記載した電子部品。   The electronic component according to claim 8, wherein the thin film exhibits semiconductor characteristics that sufficiently absorb short-wavelength light having a wavelength shorter than or equal to that of near-ultraviolet light. 前記金属導電部が、前記薄膜を接合した金属接点部を構成している、請求項8に記載した電子部品。   The electronic component according to claim 8, wherein the metal conductive portion constitutes a metal contact portion where the thin film is joined. 前記金属接点部が導電性プラグ又はコネクタを形成している、請求項10に記載した電子部品。   The electronic component according to claim 10, wherein the metal contact portion forms a conductive plug or a connector. 前記薄膜が、少なくとも光入射可能領域において前記金属導電部の表面に接合されている、請求項8に記載した電子部品。   The electronic component according to claim 8, wherein the thin film is bonded to the surface of the metal conductive portion at least in a light incident area. 前記薄膜が、ITO、IZO又はAZOの単独物の被膜又は各単独物の積層膜からなる、請求項8に記載した電子部品。   The electronic component according to claim 8, wherein the thin film is composed of a single film of ITO, IZO or AZO or a laminated film of each single film. 前記薄膜が、ITO、IZO又はAZOからなる粉末の単独物又は混合物からなる、請求項8に記載した電子部品。   The electronic component according to claim 8, wherein the thin film is made of a powder or a mixture of ITO, IZO, or AZO.
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WO2022176951A1 (en) * 2021-02-17 2022-08-25 株式会社オートネットワーク技術研究所 Material for electrical connection members, electrical connection member, and production method for material for electrical connection members

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016071951A (en) * 2014-09-26 2016-05-09 矢崎総業株式会社 Crimping terminal
WO2022176952A1 (en) * 2021-02-17 2022-08-25 株式会社オートネットワーク技術研究所 Material for electrical connection member, electrical connection member, and method for manufacturing material for electrical connection member
WO2022176951A1 (en) * 2021-02-17 2022-08-25 株式会社オートネットワーク技術研究所 Material for electrical connection members, electrical connection member, and production method for material for electrical connection members

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