JP2008233026A - Liquid physical property evaluation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid physical property evaluation device capable of controlling liquid in a desired state and evaluating the interaction between liquids. <P>SOLUTION: The liquid physical property evaluation device investigates the behavior of a liquid sample on a substrate 11 and evaluates the physical property of the liquid sample when the liquid sample is delivered onto the substrate 11 by a droplet delivery method. The liquid physical property evaluation device comprises a stage 10 for mounting the substrate 11, a plurality of droplet delivering means 20 and 30 for delivering the liquid sample on the substrate 11 mounted on the stage 10, moving means 12, 22 and 32 for moving the substrate 11 on the stage 10 from a position corresponding to one of the plurality of droplet delivering means 20 and 30 to the other by varying the relative position between the stage 10 and the plurality of droplet delivering means 20 and 30, and a photographing means 40 for photographing the behavior of the liquid sample delivered to the substrate 11. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a liquid property evaluation apparatus.

  It is extremely important to evaluate the physical properties of the liquid, that is, the wettability, viscosity, drying rate, penetration rate into the porous plate, etc., in order to improve the productivity and performance of the device. For example, when designing an ink jet printer, it is necessary to know the viscosity of the ink in setting the ink discharge conditions, and if the image quality of the printed material is to be improved, the ink is dried. It is necessary to know the speed and wettability of the medium.

  Further, when manufacturing a device, a liquid material is often arranged by a liquid phase method such as a printing method or a droplet discharge method, and this is cured to form a film. It is important to understand the film formation process. As the film forming process, for example, the solvent in the liquid material permeates or evaporates, so that the solid content in the liquid material remains to form a film, or the liquid material solidifies to form a film. is there. In order to control such a film formation process by time management or the like, it is essential to know the physical properties of the liquid material.

As a method for evaluating wettability and viscosity, among liquid properties, the liquid is dropped (discharged) on a flat plate and observed from the side to read the angle (contact angle) between the liquid surface and the flat plate. A method is mentioned. As an apparatus capable of measuring the contact angle by such a method, one disclosed in Patent Document 1 can be cited.
JP 2002-107282 A

  By the way, in the above-described device manufacturing by ink jet printing or liquid phase method, it is necessary to form a film made of a liquid material in multiple layers. Therefore, the lower layer film of the multilayer film is in a film forming process such as an infiltration process, a drying process, and a solidification process, and the lower layer liquid material and the upper layer film when the upper layer liquid material is disposed thereon. It is important to know the interaction between the liquid material. Specifically, how many milliseconds after placing the liquid material of the lower layer film, if the liquid material of the upper layer film is arranged, the layer is formed without these liquid materials being incompatible, or at what timing By ascertaining whether or not the liquid material of the film is spread and wetted with respect to the lower layer film, the time management of the film forming process can be effectively performed, and the productivity and performance of the device can be improved.

  However, conventional contact angle measuring devices such as those disclosed in Patent Document 1 can only evaluate the physical properties of another liquid relative to one liquid under limited conditions, and provide necessary information. Couldn't get. In other words, if you want to evaluate the physical properties (interaction) of another liquid with respect to one liquid, first discharge the liquid on the flat plate, then clean the discharge device and set another liquid first. It is necessary to discharge another liquid on the discharged liquid. However, the operation of cleaning the discharge device and setting another liquid requires a time of at least several minutes, and the physical properties of the previously discharged liquid change due to drying or the like. Therefore, the state of the liquid discharged first cannot be made a desired state, and it is practically impossible to perform a desired measurement.

  The present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to provide a liquid property evaluation apparatus capable of evaluating an interaction between liquids while controlling the liquids in a desired state. And

The liquid property evaluation apparatus of the present invention examines the behavior of the liquid sample on the substrate and evaluates the physical property of the liquid sample when the liquid sample is discharged onto the substrate by a droplet discharge method. An evaluation device,
A stage on which the substrate is placed;
A plurality of droplet ejection means for ejecting a liquid sample onto the substrate placed on the stage;
The substrate on the stage is moved from a position corresponding to one of the plurality of droplet discharge means to a position corresponding to the other by changing a relative position between the stage and the plurality of droplet discharge means. Moving means to cause
Imaging means for imaging the behavior of the liquid sample discharged onto the substrate.

According to this configuration, since a plurality of droplet discharge means are provided, a plurality of types of liquid materials can be assigned and discharged to each droplet discharge means. After arranging one liquid sample, the substrate is moved to a position corresponding to the other droplet ejecting means, and a second droplet sample is ejected from the other droplet ejecting means, and this substrate is ejected from the substrate. It can be placed on the first liquid sample above. Therefore, the time from when the first liquid sample is arranged until the second liquid sample can be arranged can be remarkably reduced as compared with the conventional apparatus.
In addition, the time from when the first liquid sample is arranged to when the second liquid sample is arranged can be controlled, for example, by adjusting the speed of moving the substrate. Therefore, the second liquid sample can be disposed after a desired time has elapsed since the first liquid sample was disposed.
Further, since the photographing means for photographing the behavior of the liquid sample is provided, the physical properties of the liquid sample can be evaluated by examining the shape of the liquid sample.

  The first liquid sample disposed on the substrate undergoes a film forming process such as a permeation process, a drying process, and a solidification process over time. According to the liquid property evaluation apparatus of the present invention, Since the second liquid sample can be disposed at a desired timing in a wide period from immediately after the first liquid sample is disposed on the first liquid sample, the first liquid sample is in a desired state of the film forming process. Thus, the second liquid sample can be disposed thereon. Therefore, the basic and important physical properties of how the interaction of these liquid samples changes depending on the timing from the placement of the first liquid sample to the placement of the second liquid sample. It is possible to obtain information useful for improving the quality of the device and improving the efficiency of the device manufacturing method and manufacturing process.

Further, a time for photographing with the photographing means, a time for ejecting a liquid sample with the droplet ejecting means, a time for changing the relative position between the stage and the plurality of droplet ejecting means with the moving means, It is preferable to have time management means for managing
In this way, the time from when the first liquid sample is arranged on the substrate to when the second liquid sample is arranged on the first liquid sample can be set easily and accurately. The physical properties of the liquid sample can be efficiently evaluated. Moreover, since an image can be acquired at a desired timing, the evaluation accuracy can be improved.

Moreover, it is preferable that the stage has temperature management means for heating or cooling the liquid sample on the substrate to a predetermined temperature.
In this way, using a liquid sample whose physical properties change depending on the temperature, while controlling the dry state and the cured state of this liquid sample, another liquid sample is arranged on this liquid sample, Physical properties can be evaluated.

Moreover, it is preferable to provide a light source for irradiating the liquid sample on the substrate with light of a predetermined wavelength band.
In this way, using a liquid sample whose physical properties change when irradiated with light in a specific wavelength band, such as an ultraviolet photosensitive resin material, the liquid sample is controlled while controlling the curing state of the liquid sample. Another liquid sample can be arranged on the top to evaluate the physical properties between the liquids.

Moreover, it is preferable that an analysis unit that analyzes an image photographed by the photographing unit is provided.
In this way, data such as the contact angle, bottom area, and volume of the liquid sample can be acquired objectively and with high accuracy. Moreover, workability | operativity can be improved and the physical property of a liquid sample can be evaluated efficiently.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings, but the technical scope of the present invention is not limited to the following embodiment.

  FIG. 1 is a schematic diagram showing the configuration of an embodiment of the liquid property evaluation apparatus of the present invention. As shown in FIG. 1, the liquid property evaluation apparatus includes a stage 10, a first dispenser (droplet discharge means) 20 and a second dispenser (droplet discharge means) 30 disposed above the stage 10, A high-speed camera (photographing means) 40 and a computer (analyzing means) 50 arranged on the side of the stage 10 are provided.

  A sample substrate (substrate) 11 is detachably fixed (placed) on the stage 10 by a fixing means such as a magnet or a screw, and a liquid sample can be arranged thereon. . Further, the stage 10 includes temperature management means including, for example, a heater (heating means) and a cooling water circulation device (cooling means) (not shown), and controls the sample substrate 11 to a desired temperature so that the sample substrate 11 The physical properties of the liquid sample can be measured (evaluated). The sample substrate 11 may be made of various materials depending on the application. For example, when a material in which a liquid material penetrates is used in the surface layer portion, the penetration rate at which the liquid sample penetrates into the surface layer portion can be evaluated. The drying speed can be evaluated.

  In addition, as the plurality of droplet discharge means, two of the first dispenser 20 and the second dispenser 30 are provided in the present embodiment. The dispensers 20 and 30 are provided with dispenser chips (nozzles) 21 and 31 and dispenser moving mechanisms 22 and 32, respectively. The dispenser moving mechanisms 22 and 32 are connected to the dispenser controllers 23 and 33, respectively. The dispenser controllers 23 and 33 are connected to the computer 50.

  In this embodiment, the computer 50 also has a function as time management means, and sends a control signal such as a discharge command to each of the dispenser controllers 23 and 33 at a predetermined timing. Upon receiving the discharge command, the dispenser controllers 23 and 33 control the discharge amount and discharge pressure of the dispensers 20 and 30 so that the liquid sample is discharged from the dispenser chips 21 and 31 to the predetermined position with the predetermined discharge amount. It has become.

  In the present embodiment, the dispenser moving mechanisms 22 and 23 move the dispensers 20 and 30 in the vertical direction, and adjust the height from the sample substrate 11 to the dispenser nozzles 21 and 31 according to the type of the liquid sample. Thus, inconveniences such as flight bending of the discharged liquid sample and scattering of the liquid sample on the sample substrate 11 can be prevented, and the liquid sample can be arranged at a predetermined position.

  The stage 10 is provided with a stage moving mechanism (moving means) 12 and a stage controller 13 for controlling the stage moving mechanism 12, and the stage controller 13 is connected to the computer 50. As described above, the computer 50 also has time management means in addition to analysis means, and sends a movement command (control signal) to the stage controller 13 at a predetermined timing. Upon receiving this movement command, the stage controller 13 controls the stage moving mechanism 12, moves the stage 10 at a predetermined speed for a predetermined time, and moves the sample substrate 11 on the stage 10 to a predetermined position. It is like that.

FIG. 2 is a plan view showing a shape example of the stage 10. As shown in FIG. 2, the stage 10 can be used by appropriately selecting a disk-shaped or flat-shaped one according to the moving direction by the moving means.
The example shown in FIG. 2A is a disk-shaped stage 10, and a plurality of positions 105 arranged on a concentric circumference in the disk while being rotated in the circumferential direction (R direction) of the disk. , 106 is provided with a liquid sample. For example, after the first liquid sample is arranged from the first dispenser 20 to the first position 105 on the sample substrate 11, the stage 10 is rotated by the stage moving mechanism 12, and the first position 105 is rotated. Corresponds to the position of the second dispenser, while another position 106 corresponds to the position of the first dispenser. Thereafter, the second liquid sample is arranged at a predetermined timing on the first liquid sample arranged at the first position 105, and at the second position 106 on the sample substrate 11 at a predetermined timing. Dispose a first liquid sample. Thereafter, the liquid sample can be arranged at a plurality of positions on the sample substrate 11 by repeating the same operation.
In addition, the example shown in FIG. 2B is a plate-like stage 10, and a liquid sample is placed at positions 105 and 106 on the sample substrate 11 arranged at equal intervals in one row in the plate while moving the plate 10 vertically and horizontally. Is to be arranged. For example, after the first liquid sample is disposed from the first dispenser 20 to the first position 105, the stage 10 is moved in the vertical direction (the positive direction of Y) by the stage moving mechanism 12, so that the first position is obtained. 105 is made to correspond to the position of the second dispenser 30. Then, the second liquid sample is disposed on the first liquid sample on the first position 105 from the second dispenser 30 at a predetermined timing. Then, the stage 10 is moved in the vertical direction (negative Y direction) and the horizontal direction (X direction) by the stage moving mechanism 12, and the second position 106 is made to correspond to the position of the first dispenser 20. The first liquid sample is disposed at the second position 106. Thereafter, the liquid sample can be arranged at a plurality of positions on the sample substrate 11 by repeating the same operation.
By arranging liquid samples at a plurality of positions in this way, it is possible to continuously measure (evaluate) the liquid sample, and therefore it is possible to efficiently measure and evaluate reproducibility. .

  A high speed camera 40 and a camera light source 41 are provided on the side of the stage 10, and the high speed camera 40 is connected to the computer 50. As described above, the computer 50 also has a function as time management means, and sends a shooting command (control signal) to the high-speed camera 40 at a predetermined timing. The high-speed camera 40 that has received the photographing command can photograph the behavior of the liquid sample arranged on the sample substrate 11, and the photographed image data is sent to the computer (analyzing means) 50 and stored. And used for analysis.

  As the camera light source 41, a light source such as continuous light or flash light can be selected and used according to the type of liquid sample, the performance of the high-speed camera 40, the method of analyzing the captured image, and the like. When a flash light source is used, it is easy to secure a light amount necessary for photographing. However, since the high-speed camera 40 and the camera light source 41 need to be photographed in synchronization, the time management means (computer) ) 40 and the like must be used to control the timing at which the camera light source 41 emits light. When continuous light such as a halogen lamp is used, it is not necessary to control the timing of light emission. However, if the light amount necessary for photographing is to be secured, the camera light source 41 generates heat and the ambient temperature is increased. Therefore, it is preferable to use the temperature management means, the atmosphere management means, or the like. In the present embodiment, since the temperature management means is provided, a continuous light camera light source 41 is used.

  The computer (analysis means) 50 incorporates image analysis software and the like, and analyzes the image data to obtain shape data of a liquid sample as a droplet or a film. From the shape data, the contact angle and the bottom area are obtained. The volume and the like can be calculated. As a method for obtaining shape data from the image data, for example, there is a method by edge detection. In this method, a difference in luminance between adjacent pixels in the image data is obtained, and an interface (edge) between liquid samples or an interface between an atmosphere and a liquid sample exists between pixels where the difference is greater than a certain threshold value. It is assumed that the shape data can be obtained by connecting such pixels with smooth lines. Further, for example, the moving speed of the interface can be obtained by obtaining an image correlation between image data taken every time taken from a predetermined position.

  Next, a method for evaluating the physical properties of a liquid sample using the liquid physical property evaluation apparatus configured as described above will be described. Here, assuming that the liquid sample forms a two-layer film composed of an upper layer film and a lower layer film through a drying process, a first liquid sample (lower layer) is formed on a sample substrate made of a material that does not penetrate the liquid sample. An explanation will be given by taking as an example a method of arranging a film material), arranging a second liquid sample on the first liquid sample, and evaluating physical properties between the liquid samples.

  FIGS. 3A to 3C are schematic diagrams for explaining a method of using the liquid property evaluation apparatus. First, the sample substrate 11 is fixed on the stage 10 so that the relative position between the stage 10 and the sample substrate 11 does not shift even when the stage 10 is moved. Further, the sample substrate 11 is kept at a predetermined temperature by a temperature management means (not shown) provided in the stage 10. The first liquid sample is set in the first dispenser 20 and the second liquid sample is set in the second dispenser 30. Here, the first and second liquid samples are not particularly limited, and various types are used. For example, an insulating material, a conductive material, a semiconductor material dissolved (dispersed) in a solvent (dispersion medium), an ink containing a pigment or a dye, or the like is used. In addition, a control program is incorporated in the computer 50 so as to send a predetermined control signal to the stage controller 13, the dispenser controllers 23 and 33, and the high-speed camera 50 at a predetermined timing.

  Next, the control program of the computer 50 is activated to start measurement (evaluation) of physical properties. As shown in FIG. 3 (a), the computer 50 sends a discharge command to the dispenser controller 23, and the dispenser controller 23 that receives the discharge command controls the discharge amount, discharge pressure, etc. of the first dispenser 20, and dispenser chip. The first liquid sample 60 is discharged from 21. The discharged first liquid sample 60 is disposed at a predetermined position on the upper surface of the sample substrate 11 placed on the stage 10. Here, the solvent (dispersion medium) that is the liquid component of the first liquid sample 60 that is disposed evaporates, so that the solute (dispersoid) that is the solid component becomes a film over time. The behavior of the first liquid sample 60 in the film formation process is taken by a high-speed camera 40 that is fixed at a predetermined position and focused on the predetermined position of the sample substrate 11, and the image data thereof is a computer 50. Sent to and saved.

  Next, as shown in FIG. 3B, the computer 50 sends a movement command to the stage controller 13 at a predetermined timing, and the stage controller 13 that receives this command controls the stage moving mechanism 12 to move the moving mechanism 12. Moves the stage 10 at a predetermined speed for a predetermined time. The sample substrate 11 fixed on the stage 10 moves to a predetermined position accompanying the stage 10. At this time, the sample substrate 11 is moved so that the position of the first liquid sample 60 on the sample substrate 11 becomes a position corresponding to the second dispenser 30.

  Next, as shown in FIG. 3C, the computer 50 sends a discharge command to the dispenser controller 33 at a predetermined timing, and the dispenser controller 33 that has received this sends the discharge amount, discharge pressure, etc. of the second dispenser 30. And the second liquid sample 70 is discharged from the dispenser chip 31. At this time, since the position of the first liquid sample 60 on the sample substrate 11 is a position corresponding to the second dispenser 30, the second liquid sample 70 discharged from the dispenser chip 31 is Disposed on the first liquid sample 60 disposed on the sample substrate 11. In addition, since the second liquid sample 70 is discharged at a predetermined timing, the second liquid sample 70 is placed on the first liquid sample 60 after a predetermined time since the first liquid sample 60 is disposed. Can be arranged.

  Here, according to the conventional apparatus, at least about several minutes is required from the time when the first liquid sample 60 is disposed until the second liquid sample can be disposed. According to the liquid property evaluation apparatus of the invention, the first dispenser 20 for discharging the first liquid sample 60 and the second dispenser 30 for discharging the second liquid sample 70 are made independent, so that the time is significantly shortened. Can be on the order of milliseconds to seconds. Therefore, for example, in a state where the first liquid sample 60 is not sufficiently solidified (film-formed), the second liquid sample 70 can be disposed thereon.

  Further, as described above, the liquid property evaluation apparatus of the present embodiment rotates the stage 10 by the stage moving mechanism 12 or moves the liquid sample vertically and horizontally to a plurality of positions 105 and 106 on the sample substrate 11. Can be arranged (see FIG. 2). Therefore, the first liquid sample 60 can be arranged at another position at the same time or immediately after the second liquid sample 70 is arranged on the first liquid sample 60 as described above. By incorporating a control program into the computer (time control means) 40 so as to repeat the work, it is possible to continuously evaluate the physical properties of a plurality of liquid samples arranged at a plurality of positions. Can be increased. For example, by evaluating the physical properties of a plurality of liquid samples while keeping the conditions such as the timing of arranging the second liquid sample constant, the reproducibility can be examined and the reliability of data can be improved.

  The behaviors of the first liquid sample 60 and the second liquid sample 70 are photographed by the high-speed camera 40, and the image data for each photographing time is sent to the computer 50 and stored. Further, by analyzing the image data using image analysis software or the like, shape data of the first liquid sample 60 and the second liquid sample 70 as films or droplets can be obtained for each photographing time. From this shape data, the volume and bottom area of the first liquid sample 60 and the second liquid sample 70 can be obtained, and the contact angle of the second liquid sample 70 with respect to the first liquid sample 60 is evaluated. can do. Further, if attention is paid to time changes such as the volume and the bottom area, the drying speed including the interaction between the liquids can be evaluated. Separately from the measurement described above, the respective drying speeds are measured in a state where the first liquid sample 60 and the second liquid sample 70 are not stacked, and this drying speed and the liquid interaction described above are measured. It is also possible to evaluate the permeation rate between liquids by comparing with the drying rate containing the.

  In the liquid property evaluation apparatus of the present invention, since the second liquid sample 70 can be disposed immediately after the first liquid sample 60 is disposed, the first liquid sample 60 is formed into a film. The second liquid sample 70 can be disposed on the first liquid sample 60 in a wide period after the process is at an extremely early stage, and the timing at which the second liquid sample 70 is disposed is calculated by a computer. Since it is controlled by the (time management means) 40, the physical property can be evaluated by controlling the first liquid sample 60 to a desired state (stage) of the film forming process. Accordingly, when the second liquid sample is disposed at what timing after the first liquid sample is disposed, whether these liquid samples are compatible or layered, and the second liquid sample is the first liquid sample. It is possible to know basic and important physical properties such as whether or not the liquid sample wets and spreads. In this way, the device is a liquid property evaluation apparatus that can obtain extremely important information for designing a manufacturing method and a manufacturing process when a device is manufactured by forming a multilayer film made of a liquid material.

  Specifically, for example, when the liquid property evaluation apparatus is applied to the field of ink jet printing technology and inks containing pigments of different colors are used as the first and second liquid samples, a print medium (sample substrate) is used. After the ink of the color 11 is ejected, another color of ink is ejected on the ink at different timings, and how they are mixed and colored depending on the timing at which these inks are ejected. You can find out. In this way, the correlation between the printing timing and the image quality can be known, and extremely useful information can be obtained for improving the printing speed and printing image quality of the inkjet printing apparatus.

  In addition, for example, by applying to a manufacturing field in which a device such as an organic EL device is manufactured by a droplet discharge method, a liquid material such as a hole injection layer or a light emitting layer of an organic functional film is used as the first and second liquid samples. If used, after the liquid material of the hole injection layer is arranged on the substrate, the liquid material of the light emitting layer is discharged on the substrate while changing the timing, and depending on the timing at which these liquid materials are discharged It is possible to investigate whether such a layer is formed or whether the upper liquid material spreads on the lower liquid material. In this way, it is possible to know the correlation between the timing at which the liquid material is disposed and the quality of the formed organic functional film, which is extremely useful in improving the production process efficiency and the product quality. Information can be obtained.

In addition to the configuration shown in the present embodiment, a configuration that includes a light source that irradiates light of a predetermined wavelength band separately from the light source 41 for the camera can be used. By doing so, it becomes a liquid property evaluation apparatus capable of dealing with photosensitive liquid samples that cause changes in physical properties such as curing or solubilization. In addition, when the first liquid sample 60 and the second liquid sample 70 have a characteristic of absorbing different wavelength band light, the wavelength band light absorbed by only one of the liquid samples 60 and 70 is irradiated. By doing so, the first liquid sample 60 and the second liquid sample 70 may be photographed with different luminance. In this way, the shape data of the liquid samples 60 and 70 can be easily and accurately obtained when analyzing the captured image.
In addition to the dispensers 20 and 30, as the droplet discharge means, an inkjet method or the like may be used, or three or more instead of two.
A plurality of high-speed cameras 40 may be installed to measure the three-dimensional shape of the liquid samples 60 and 70. In addition to evaluating the physical properties from the behavior of the liquid sample, the liquid sample formed into a film can be processed by etching or the like to expose its cross section and evaluated by observing it.
Further, as the moving means for changing the relative position between the stage 10 and the dispensers 20 and 30, the dispenser moving mechanisms 22 and 32 may be used in addition to the stage moving mechanism 12 as in the present embodiment. These may be used in combination. In this way, the time from the first liquid sample 60 to the second liquid sample 70 being arranged can be shortened, and the timing at which the second liquid sample is arranged can be controlled more variously. be able to.

It is a schematic diagram explaining the structure of the liquid physical property evaluation apparatus of this invention. (A), (b) is a top view which shows the example of a shape of the stage 10. FIG. (A)-(c) is a schematic diagram explaining the usage method of a liquid physical property evaluation apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Stage, 11 ... Sample substrate (substrate), 12 ... Stage moving mechanism (moving means), 20 ... First dispenser (droplet discharging means), 22, 32 ... Dispenser movement Mechanism (moving means), 23, 33 ... dispenser controller, 30 ... second dispenser (droplet discharging means), 40 ... high speed camera (imaging means), 50 ... computer (time management means, Analysis means), 60 ... first liquid sample, 70 ... second liquid sample

Claims (5)

A liquid property evaluation apparatus for evaluating the physical properties of the liquid sample by examining the behavior of the liquid sample on the substrate when the liquid sample is discharged onto the substrate by a droplet discharge method,
A stage on which the substrate is placed;
A plurality of droplet ejection means for ejecting a liquid sample onto the substrate placed on the stage;
The substrate on the stage is moved from a position corresponding to one of the plurality of droplet discharge means to a position corresponding to the other by changing a relative position between the stage and the plurality of droplet discharge means. Moving means to cause
An apparatus for evaluating liquid physical properties, comprising: an imaging unit for imaging the behavior of the liquid sample discharged on the substrate.   The time for photographing with the photographing means, the time for ejecting a liquid sample with the droplet ejecting means, and the time for changing the relative position between the stage and the plurality of droplet ejecting means with the moving means are managed. The liquid property evaluation apparatus according to claim 1, further comprising time management means for performing the operation.   3. The liquid property evaluation apparatus according to claim 1, wherein the stage includes a temperature management unit that heats or cools the liquid sample on the substrate to a predetermined temperature. 4.   The liquid property evaluation apparatus according to claim 1, further comprising a light source that irradiates a liquid sample on the substrate with light having a predetermined wavelength band.   The liquid property evaluation apparatus according to claim 1, further comprising an analysis unit that analyzes an image photographed by the photographing unit.

Images