JP2008232202A - Piezoelectric valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric valve capable of properly operating even if a flow rate of supply fluid is high or a pressure of the supply fluid is high and capable of preventing a fluid supply part for supplying the fluid to outside from becoming negative pressure. <P>SOLUTION: The piezoelectric valve is provided with a fluid accept part, a fluid discharge part for discharging the fluid to outside and a fluid supply part for supplying the fluid to outside. The piezoelectric valve using a piezoelectric element is provided with a piezoelectric operation body of a thin plate-shape having a longitudinal direction, arranged at the fluid discharge part, for opening and closing a discharge side route to outside of the fluid discharge part in accordance with applied voltage and a fluid chamber for communicating the fluid accept part, the fluid discharge part and the fluid supply part and suppressing operation pressure of the fluid to the piezoelectric operation body. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a piezoelectric valve using a piezoelectric element, and more particularly to a piezoelectric valve suitable as a valve using air as a fluid.

  In recent years, with the miniaturization of electronic devices, etc., there is an increasing demand for component supply apparatuses that transport and supply fine components at high speed. In such a component supply apparatus, it is necessary to sort out defective parts at high speed and remove them from the conveyance supply path in conveying and supplying parts. For this reason, a means for selecting and removing defective parts at high speed is required. . In the technology for such applications, extremely high operation speeds such as several milliseconds or less and reliable operations are required.

  Conventionally, piezoelectric technology is used in parts supply equipment that transports and supplies fine parts at high speed, and is used in equipment that sorts out defective parts at high speed and removes them from the transport / supply path during parts transportation and supply. A technique called a fluid pressure actuator using an element is known (see, for example, Patent Document 1). The fluid pressure actuator according to the technique described in Patent Document 1 is a fluid pressure actuator having a cylinder, a piston slidably disposed in the cylinder, and a flow path for introducing fluid into the cylinder. Thus, the actuator includes an opening / closing means using a bimorph type piezoelectric element for opening and closing the distribution path.

  According to this fluid pressure actuator, the fluid that is the working medium of the actuator always flows through the flow path in the actuator body. In other words, since the fluid is not stopped, when the flow path in the actuator body is shifted from the open state to the closed state, the internal pressure in the cylinder can be quickly increased using the inertia of the fluid flowing in the flow path. As a result, the piston can be operated quickly. In addition, since a bimorph type piezoelectric element that is displaced at high speed is used as means for opening and closing the distribution path, the distribution path can be opened and closed at high speed. Therefore, since the fluid always flows through the flow path in the actuator body, the inertia of the fluid can be used and the bimorph type piezoelectric element is used. Can be opened and closed at high speed, and the piston can be operated quickly.

Japanese Patent Laid-Open No. 2005-9523

  However, in the fluid pressure actuator described in Patent Document 1, the opening / closing means using the bimorph type piezoelectric element provided in the fluid discharge path is disposed so as to directly block the flow of the fluid introduced from the outside. ing. In this case, when the flow rate per unit time of the fluid introduced from the outside is relatively small or the fluid pressure is relatively low, there is no particular effect on the operation of the opening / closing means, but the unit time introduced from the outside When the flow rate of the hitting fluid is large or the pressure of the fluid is high, the operation response of the opening / closing means may be deteriorated, and it may be difficult to operate depending on conditions. Therefore, it may be difficult to apply as an actuator having a large operating force that requires a large flow rate, and a problem may occur when a fluid having a high pressure is used.

  On the other hand, for example, even when the part constituted by the cylinder and piston of the fluid pressure actuator described in Patent Document 1 is removed and remodeled to supply fluid from the tip, it is introduced from the outside as described above. When the fluid flow rate per unit time is high or the fluid pressure is high, the operation response of the fluid flow path opening / closing means using a bimorph type piezoelectric element may deteriorate, and it may be difficult to operate depending on the conditions. In some cases, Therefore, it may be difficult to apply as a fluid valve for a large flow rate, and a problem may occur when using a fluid having a high pressure. If the fluid discharge path and the fluid supply path are substantially orthogonal to each other and there is nothing to block the fluid between them, as in the flow path structure in the fluid pressure actuator body, the When the fluid is flowing, the fluid supply path side tends to be negative pressure. Therefore, for example, when this valve is used as a device that blows air to the conveyance path (track) of the component supply device and blows away defective components from the conveyance route, the defective components are sucked instead of eliminating the defective components. This hinders parts conveyance.

  The present invention has been made in view of the above circumstances, and its purpose is to provide a satisfactory operation even when the flow rate of the fluid to be supplied is large or the pressure of the fluid to be supplied is high, An object of the present invention is to provide a piezoelectric valve capable of preventing a fluid supply portion supplied to the outside from becoming negative pressure.

Means and effects for solving the problems

  The piezoelectric valve according to the present invention relates to a piezoelectric valve using a piezoelectric element. In order to achieve the above object, the piezoelectric valve according to the present invention has several features as follows. That is, the piezoelectric valve of the present invention has the following features alone or in combination as appropriate.

  In order to achieve the above object, a first feature of the piezoelectric valve according to the present invention is that a fluid receiving portion that receives fluid from a fluid supply means, and a fluid that discharges the fluid received from the fluid receiving portion to the outside. A discharge unit, a piezoelectric operating body provided in the fluid discharge unit, having a thin plate shape and having a longitudinal direction, and opening and closing a discharge side path communicating with the outside of the fluid discharge unit according to an applied voltage; and the fluid The fluid supply unit for supplying the fluid received from the reception unit to the outside, the fluid reception unit, the fluid discharge unit, and the fluid supply unit communicate with each other, and the working pressure of the fluid on the piezoelectric operating body is reduced. And a fluid chamber to be suppressed.

  According to this configuration, in a state where the discharge side path is opened by the piezoelectric operating body, the fluid received from the fluid supply means is discharged from the opening portion of the fluid discharge portion through the fluid chamber from the fluid receiving portion. The flow of fluid to the fluid supply unit is almost stopped. In this state, when the discharge side path is closed by the piezoelectric operating body, the flow of the fluid to the fluid discharge portion is almost stopped, and the fluid is supplied from the fluid receiving portion to the outside via the fluid chamber. . Conversely, when the discharge side path is open when the discharge side path is closed, the flow of fluid to the fluid supply unit is substantially stopped, and the fluid is discharged from the fluid receiving unit via the fluid chamber. It is discharged from the opening part of the part. Therefore, the opening / closing operation of the piezoelectric operating body makes it possible to supply the fluid from the fluid supply unit to the outside or to substantially stop the supply.

  In this case, in a state where the discharge side path is opened by the piezoelectric operating body, the fluid flows in the fluid chamber in a mode of being discharged from the opening portion of the fluid discharge portion, and the pressure of the fluid continues to act on the fluid chamber. Therefore, when the piezoelectric operating body is shifted from the open state to the closed state, a predetermined amount of fluid can be quickly started to be supplied from the fluid supply unit using the inertia of the fluid. On the other hand, when the discharge path is closed from the closed state by the piezoelectric operating body, the flow of the fluid in the fluid chamber can be quickly changed. Therefore, it is possible to supply and stop the fluid at a higher speed than in the case where the fluid is simply supplied or shut off by the fluid supply means arranged on the upstream side of the piezoelectric valve.

  Further, in the fluid chamber in which the fluid receiving part, the fluid discharging part, and the fluid supply part are communicated, the working pressure of the fluid to the piezoelectric operating body that opens and closes the discharge side path leading to the outside of the fluid discharging part is suppressed. The operating load of the operating body can be suppressed. Therefore, even when the flow rate of the fluid to be supplied is large or the pressure of the fluid to be supplied is high, it is possible to maintain a good operating state of the piezoelectric valve. Further, by suppressing the working pressure of the fluid on the piezoelectric operating body, the fluid is discharged from the fluid receiving portion through the fluid chamber from the opening portion of the fluid discharging portion in a state where the discharge side path is opened by the piezoelectric operating body. However, a part of the fluid is slightly guided from the fluid receiving portion to the fluid supply portion via the fluid chamber. Therefore, since the fluid supply unit that supplies the fluid to the outside is maintained almost always at a positive pressure, it is possible to prevent the fluid supply unit from becoming a negative pressure.

  Further, a second feature of the piezoelectric valve according to the present invention is that the piezoelectric operating body closes the supply side path communicating with the outside of the fluid supply unit when the discharge side path is opened, and A piezoelectric operating body that opens the supply-side path when the path is closed, and the fluid chamber is located near a connection portion where the fluid chamber connects to the fluid discharge section, and the fluid discharge section from the fluid receiving section. The flow direction of the fluid flowing to the part and the plate surface of the piezoelectric operating body are parallel to each other and formed in a slit shape.

  According to this configuration, the backflow of the fluid from the outside of the fluid supply unit can be prevented by closing the supply side path leading to the outside of the fluid supply unit by the piezoelectric operating body. That is, it is possible to prevent the fluid supply unit from becoming a negative pressure. Further, since the fluid flows in parallel with the plate surface of the piezoelectric operating body, the working pressure of the fluid on the piezoelectric operating body is suppressed compared to the case where the fluid collides with the plate surface of the piezoelectric operating body at an angle such as a right angle. The Therefore, the operation load of the piezoelectric operating body can be suppressed. In addition, since the fluid chamber is formed in a slit shape, even a piezoelectric operating body with a small displacement can easily open and close the fluid discharge side path and the supply side path with one piezoelectric operating body. it can.

  According to a third feature of the piezoelectric valve according to the present invention, the piezoelectric operating body opens and closes the discharge side path on one side and opens and closes the supply side path leading to the outside of the fluid supply unit on the other side. In the piezoelectric operating body, the fluid chamber is formed in a slit shape in the vicinity of the connection portion.

  According to this configuration, the backflow of the fluid from the outside of the fluid supply unit can be prevented by closing the supply-side path that leads to the outside of the fluid supply unit on one side of the piezoelectric operating body. That is, it is possible to prevent the fluid supply unit from becoming a negative pressure. In addition, since both the fluid discharge side path and the supply side path are opened and closed by the plate-like surface of the piezoelectric operating body, the fluid discharge side path and the supply side path can be more reliably opened and closed. Further, since the fluid chamber is formed in a slit shape in the vicinity of the connecting portion, even with a piezoelectric operating body having a small displacement, the fluid discharge-side path and the supply-side path can be easily performed by one piezoelectric operating body. Can be opened and closed.

  A fourth feature of the piezoelectric valve according to the present invention is that the piezoelectric operating body opens and closes the discharge-side path on one side and opens and closes a supply-side path that communicates with the outside of the fluid supply section at an end. It is an operating body, and the fluid chamber is formed in a slit shape in the vicinity of the connecting portion.

  According to this configuration, the backflow of the fluid from the outside of the fluid supply unit can be prevented by closing the supply side path communicating with the outside of the fluid supply unit at the end of the piezoelectric operating body. That is, it is possible to prevent the fluid supply unit from becoming a negative pressure. Moreover, the diversity which can arrange | position the position of the receiving part of a fluid, a supply part, and a discharge part appropriately according to external conditions etc. improves. Further, since the fluid chamber is formed in a slit shape in the vicinity of the connecting portion, even with a piezoelectric operating body having a small displacement, the fluid discharge-side path and the supply-side path can be easily performed by one piezoelectric operating body. Can be opened and closed.

  A fifth feature of the piezoelectric valve according to the present invention is that the piezoelectric operating body is connected to the outside of the fluid supply section at the end when the discharge side path is opened at the end. When the discharge side path is closed at the end, the piezoelectric operation body opens the supply side path at the end, and the fluid chamber is formed in a slit shape in the vicinity of the connection part. It has been done.

  According to this configuration, the backflow of the fluid from the outside of the fluid supply unit can be prevented by closing the supply side path communicating with the outside of the fluid supply unit at the end of the piezoelectric operating body. That is, it is possible to prevent the fluid supply unit from becoming a negative pressure. Moreover, the diversity which can arrange | position the position of the receiving part of a fluid, a supply part, and a discharge part appropriately according to conditions improves. Further, since the fluid chamber is formed in a slit shape in the vicinity of the connecting portion, even with a piezoelectric operating body having a small displacement, the fluid discharge-side path and the supply-side path can be easily performed by one piezoelectric operating body. Can be opened and closed.

  The sixth feature of the piezoelectric valve according to the present invention is that when the piezoelectric operating body opens the discharge side path on one side, the supply side path communicating with the outside of the fluid supply unit is closed on the one side. When the discharge side path is closed on one side, the piezoelectric operating body opens the supply side path on the one side.

  According to this configuration, the backflow of the fluid from the outside of the fluid supply unit can be prevented by closing the supply-side path that leads to the outside of the fluid supply unit on one side of the piezoelectric operating body. That is, it is possible to prevent the fluid supply unit from becoming a negative pressure. Moreover, the diversity which can arrange | position the position of the receiving part of a fluid, a supply part, and a discharge part appropriately according to external conditions etc. improves.

  The seventh feature of the piezoelectric valve according to the present invention is that the fluid-receiving unit communicates with the receiving-side flow path, which is the direction in which the fluid flows, in the receiving-side path that receives the fluid, and the outside of the fluid supply unit. The supply-side flow direction, which is the direction in which the fluid flows through the supply-side path, is parallel, and the receiving-side flow direction and the supply-side flow direction are orthogonal to the plate surface of the piezoelectric operating body.

  According to this configuration, the fluid chamber that communicates the receiving side path of the fluid receiving unit, the supply side path of the fluid supply unit, and the discharge side path of the fluid discharge unit expands when the fluid chamber is connected to the fluid chamber from the receiving side path. Formed. Therefore, when the fluid flowing from the receiving side path is introduced into the fluid chamber, the flow of the fluid spreads, and the spread flow collides with the piezoelectric operating body that opens and closes the discharge side path, so that the piezoelectric operation The pressure receiving area of the body increases. The bending moment, which is the operating resistance received by the piezoelectric operating body, is given as an integral of the pressure receiving pressure from end to end of the portion of the piezoelectric operating body that receives pressure. Therefore, it is possible to suppress the operating load of the piezoelectric operating body compared to the case where the fluid flowing from the receiving side path hits the piezoelectric operating body without changing the cross-sectional area of the path.

  Further, a part of the fluid that has flowed in the receiving side path collides with the plate surface of the piezoelectric operating body, and then flows through the supply side path by changing the direction by almost 180 °. The fluid is less susceptible to the pressure in the flow direction of the fluid flowing in the receiving side path than in the case where the receiving side path and the supply side path are orthogonal to each other. Therefore, in the state where the discharge side path is opened by the piezoelectric operating body, most of the fluid flowing from the reception side path is discharged from the opening portion of the fluid discharge section, and a part of the fluid is slightly transferred to the fluid supply side. It also flows through the supply-side path that opens. Therefore, it can prevent that the fluid supply part which supplies a fluid to the exterior becomes negative pressure.

  An eighth feature of the piezoelectric valve according to the present invention is that the discharge-side path is formed in a slit shape that opens to the outside, and an end portion of the piezoelectric operating body is bent into a bowl shape and bent into a bowl shape. The end portion is inserted from a part of the discharge side path and provided between the fluid receiving portion and the fluid supply portion, and the fluid supply portion is arranged in a direction in which the fluid is discharged from the fluid receiving portion. A receiving port for the fluid is provided.

  According to this configuration, the fluid from the fluid receiving portion collides with the piezoelectric operating body, and most of the collided fluid is discharged from the slit-shaped discharge side path opened to the outside. In other words, the discharge side path is opened by the piezoelectric operating body. Since a part of the fluid slightly flows to the outside via the fluid supply unit, the fluid supply unit that supplies the fluid to the outside can be prevented from becoming a negative pressure. Further, when closing the discharge-side path by the piezoelectric operating body, the end of the piezoelectric operating body is moved in a direction substantially perpendicular to the fluid flow direction from the fluid receiving section, so that the operating load of the piezoelectric operating body is reduced. Can be suppressed.

  The ninth feature of the piezoelectric valve according to the present invention is that the upper surface or the lower surface of the fluid chamber is formed as the fluid discharge portion, and the fluid from the fluid receiving portion is fed from the side surface of the fluid chamber. The fluid chamber is supplied along the inner surface of the fluid chamber.

  According to this configuration, in a state where the discharge side path is opened by the piezoelectric operating body, the fluid flowing into the fluid chamber from the fluid receiving portion turns in the fluid chamber to become a swirling flow, and is formed on the upper surface or the lower surface of the fluid chamber. The fluid is discharged radially from the opening portion of the fluid discharge portion in the direction along the plate surface of the piezoelectric operating body. Therefore, it is possible to prevent the flow of fluid that directly collides with the piezoelectric operating body, and to suppress the operation load of the piezoelectric operating body. Further, since the fluid that has become the swirl flow is efficiently discharged radially, the opening portion of the discharge portion may be a slight gap. Therefore, even a piezoelectric operating body with a small displacement is easy to use.

  A tenth feature of the piezoelectric valve according to the present invention is that the fluid chamber is formed in a conical shape having a tapered surface.

  According to this configuration, in a state where the discharge side path is opened by the piezoelectric operating body, the fluid that has flowed into the fluid chamber from the fluid receiving portion is more likely to swirl in the fluid chamber, and the fluid is tapered. Since it becomes easy to be guided to the fluid discharge portion in the direction in which the cross section of the fluid chamber expands along the surface, the fluid is discharged more efficiently.

  An eleventh feature of the piezoelectric valve according to the present invention is that the fluid chamber is formed in a cylindrical shape.

  According to this configuration, in a state where the discharge side path is opened by the piezoelectric operating body, the fluid that has flowed into the fluid chamber from the fluid receiving portion is more likely to swirl in the fluid chamber.

  A twelfth feature of the piezoelectric valve according to the present invention is that the fluid supply section is connected to a facing surface of the fluid chamber facing the fluid discharge section.

  According to this structure, the diversity which can arrange | position the position of the receiving part of a fluid, a supply part, and a discharge part appropriately according to external conditions etc. improves.

  A thirteenth feature of the piezoelectric valve according to the present invention is that a supply-side path that communicates with the outside of the fluid supply section and a reception-side path that receives the fluid of the fluid reception section are parallel to each other. It is supplied to the outside from the supply side path along the inner surface of the fluid chamber.

  According to this configuration, since the fluid from the fluid receiving portion changes the direction by approximately 180 ° through the fluid chamber and flows from the supply side path to the outside, the fluid flowing in the supply side path is supplied to the receiving side path. Compared with the case where the side path is orthogonal or the like, it is less affected by the pressure in the flow direction of the fluid flowing in the receiving side path. Therefore, in the state where the discharge side path is opened by the piezoelectric operating body, most of the fluid flowing from the reception side path is discharged from the opening part of the fluid discharge part, and a part of the fluid is slightly inside the fluid chamber. Along the supply side path that opens to the fluid supply side. Therefore, it can prevent that the fluid supply part which supplies a fluid to the exterior becomes negative pressure.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. The embodiment of the piezoelectric valve according to the present invention described below relates to a piezoelectric valve that operates using gas, particularly compressed air, but the piezoelectric valve according to the present invention is a gas other than compressed air. Or other fluids such as liquids. In the following description, it is assumed that compressed air is used, and when other gas or liquid is used, the phrase such as compressed air or air in the following description should be appropriately replaced with gas or fluid. And

  FIG. 1 is a view showing a piezoelectric operating body used in a piezoelectric valve according to the present invention. FIG. 1 includes a plan view (a), a side view (b), and an operation explanatory view (c) of the piezoelectric operating body 100. As shown in FIG. 1, a piezoelectric operating body 100 is called a bimorph having a structure in which two piezoelectric elements 102 are bonded together via a metal plate 101, and is a thin plate having a longitudinal direction.

  When a voltage is applied to the piezoelectric operating body 100 having such a structure, one piezoelectric element 102 contracts due to the piezoelectric effect, and the other piezoelectric element 102 expands. As a result, it turns to one side as a whole. One end of the piezoelectric operating body 100 is fixed to the piezoelectric valve body, and the other end is made free to form a cantilever. The plate surfaces 101A and 101B and the end 101C of the other end are used in accordance with the applied voltage. Open and close the discharge side path of the fluid discharge part. The piezoelectric element 102 is made of a material such as ceramic, and a typical piezoelectric element is a piezoelectric element. The metal plate 101 is an electrode and is a metal plate such as stainless steel.

(First embodiment)
FIG. 2 is a view showing the piezoelectric valve according to the first embodiment of the present invention. FIG. 3 is an enlarged view of the vicinity of the end of the fluid chamber 18 shown in FIG. FIG. 2 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 10. As shown in FIGS. 2 and 3, the piezoelectric valve 10 has a receiving side passage 15a for receiving compressed air from a main body including members 12 and 13, and compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including the receiving connector 15, a fluid discharge portion including a discharge side path 17 a for discharging compressed air to the outside, a piezoelectric operating body 100 a using the piezoelectric element 102, and compressed air to the outside A fluid supply unit including a supply-side path 16a and a supply connector 16, and a fluid chamber 18 that communicates the fluid receiving unit, the fluid discharge unit, and the fluid supply unit. The arrows in FIGS. 2 and 3 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100a.

  The member 12 and the member 13 constituting the main body of the piezoelectric valve 10 are connected by a bolt 11. The fluid chamber 18 is a space formed between the connected member 12 and the member 13. The piezoelectric operating body 100a using the piezoelectric element 102 has one end fixed to the member 13 by the bolt 14 and the other end freely displaceable at the tip of the fluid chamber 18 formed in a slit shape. Has been placed. Here, the slit shape represents a state of a narrow space formed by a plurality of surfaces (the same applies to other embodiments).

  First, a state in which the discharge side path 17a is opened by the piezoelectric operating body 100a (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. Compressed air is introduced into the fluid chamber 18 from a compressed air supply means (not shown) via a hose or the like (not shown) connected to the receiving connector 15. The compressed air introduced into the fluid chamber 18 flows to the tip of the fluid chamber 18 formed in a slit shape, passes through the gap between the piezoelectric operating body 100a and the discharge side path 17a, and passes through the discharge side path 17a to the outside. Discharged. At this time, since the supply side path 16a is closed by the one surface 101B of the piezoelectric operating body 100a, there is almost no air flowing into the supply side path 16a from the outside, and it is possible to prevent the fluid supply unit from becoming negative pressure. .

  Next, when a voltage is applied to the piezoelectric operating body 100a, the piezoelectric operating body 100a is displaced, the supply side path 16a is opened, and the discharge side path 17a is closed on the other surface 101A of the piezoelectric operating body 100a. The This state is a state in which compressed air is supplied to the outside via the fluid supply unit. Compressed air continuously introduced into the fluid chamber 18 from the compressed air supply means (not shown) changes the flow to the gap side between the piezoelectric operating body 100a and the supply side path 16a by operating the piezoelectric operating body 100a. It is supplied to the outside via the supply side path 16a.

  Here, in either of the state where the discharge side path 17a is opened by the piezoelectric operating body 100a and the state where the supply side path 16a is opened by the piezoelectric operating body 100a, the fluid flows on the plate surface of the piezoelectric operating body 100a. On the other hand, since it flows in parallel, the working pressure of the fluid to the piezoelectric operating body 100a is suppressed. Therefore, the operating load of the piezoelectric operating body 100a can be suppressed.

  The amount of air discharged from the discharge side path 17a and the amount of air supplied to the outside from the supply side path 16a are the compressed air receiving side path 15a, the discharge side path 17a, the supply side path 16a, the fluid chamber 18, etc. The size is adjusted by appropriately selecting the dimensions (the same applies to other embodiments). Further, the air amount can also be adjusted by providing a back pressure valve or the like in the supply side path 16a or the discharge side path 17a (the same applies to other embodiments).

(Second Embodiment)
FIG. 4 is a diagram showing a piezoelectric valve according to a second embodiment of the present invention. FIG. 5 is an enlarged view of the vicinity of the end of the fluid chamber 28 shown in FIG. FIG. 4 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 20. As shown in FIGS. 4 and 5, the piezoelectric valve 20 has a receiving side passage 25a for receiving compressed air from a main body composed of members 22 and 23 and compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including the receiving connector 25, a fluid discharge portion including a discharge side path 27a for discharging compressed air to the outside, a piezoelectric operating body 100b using the piezoelectric element 102, and compressed air to the outside A fluid supply section including a supply-side path 26a and a supply connector 26, and a fluid chamber 28 that communicates the fluid receiving section, the fluid discharge section, and the fluid supply section. The arrows in FIGS. 4 and 5 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100b.

  As in the first embodiment of the present invention, the member 22 and the member 23 constituting the main body of the piezoelectric valve 20 are connected by a bolt 21. The fluid chamber 28 is a space formed between the connected member 22 and the member 23. The piezoelectric operating body 100b using the piezoelectric element 102 has one end fixed to the member 23 by a bolt 24, and the other end can be freely displaced at the tip of the fluid chamber 28 formed in a slit shape. Has been placed.

  First, a state where the discharge side path 27a is opened by the piezoelectric operating body 100b (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. Compressed air is introduced into the fluid chamber 28 from a compressed air supply means (not shown) via a hose or the like (not shown) connected to the receiving connector 25. The compressed air introduced into the fluid chamber 28 flows to the tip of the fluid chamber 28 formed in a slit shape, passes through the gap between the piezoelectric operating body 100b and the discharge side path 27a, and passes through the discharge side path 27a to the outside. Discharged. At this time, since the supply side path 26a is closed by the end portion 101C of the piezoelectric operating body 100a, there is almost no air flowing from the outside to the supply side path 26a, and the fluid supply section is prevented from becoming negative pressure. it can.

  Next, when a voltage is applied to the piezoelectric operating body 100b, the piezoelectric operating body 100b is displaced, the supply side path 26a is opened, and the discharge side path 27a is closed on one surface 101A of the piezoelectric operating body 100b. This state is a state in which compressed air is supplied to the outside via the fluid supply unit. The compressed air that has been continuously introduced into the fluid chamber 28 from the compressed air supply means (not shown) operates the piezoelectric operating body 100b, so that the piezoelectric operating body 100b and the member 23 constituting the main body of the piezoelectric valve 20 are connected. The flow is changed to the gap side and supplied to the outside via the supply side path 26a.

  Here, in the same manner as in the first embodiment of the present invention, in both the state where the discharge side path 27a is opened by the piezoelectric operating body 100b and the state where the supply side path 26a is opened by the piezoelectric operating body 100b, the fluid Flows in parallel with the plate surface of the piezoelectric operating body 100b, so that the working pressure of the fluid on the piezoelectric operating body 100b is suppressed. Therefore, the operation load of the piezoelectric operating body 100b can be suppressed.

(Third embodiment)
FIG. 6 is a view showing a piezoelectric valve according to a third embodiment of the present invention. FIG. 7 is an enlarged view of the vicinity of the end of the fluid chamber 38 shown in FIG. FIG. 6 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 30. As shown in FIGS. 6 and 7, the piezoelectric valve 30 is for receiving compressed air from a main body composed of a member 32, a member 32b, and a member 33, and compressed air supply means (not shown) such as an air compressor. A fluid receiving portion including a receiving-side path 35a and a receiving connector 35; a fluid discharging section including a discharging-side path 37a for discharging compressed air to the outside; a piezoelectric operating body 100c using the piezoelectric element 102; A fluid supply unit including a supply side path 36a for supplying compressed air to the outside and a supply connector 36, and a fluid chamber 38 that communicates the fluid receiving unit, the fluid discharge unit, and the fluid supply unit. The arrows in FIGS. 6 and 7 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100c.

  As in the first and second embodiments of the present invention, the member 32 and the member 33 constituting the main body of the piezoelectric valve 30 are connected by a bolt 31, and the member 32b and the member 33 are connected by a bolt 31b. Has been. The fluid chamber 38 is a space formed between the connected member 32 and the member 33. The piezoelectric operating body 100c using the piezoelectric element 102 has one end fixed to the member 33 by a bolt 34, and the other end can be freely displaced at the tip of the fluid chamber 38 formed in a slit shape. Has been placed.

  First, a state where the discharge side path 37a is opened by the piezoelectric operating body 100c (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. Compressed air is introduced into the fluid chamber 38 from a compressed air supply means (not shown) via a hose or the like (not shown) connected to the receiving connector 35. The compressed air introduced into the fluid chamber 38 flows to the slit-shaped tip portion of the fluid chamber 38, passes through the gap between the piezoelectric operating body 100 c and the member 32 constituting the body of the piezoelectric valve 30, and is on the discharge side. It is discharged to the outside via the path 37a. At this time, since the supply side path 36a is closed by the end portion 101C of the piezoelectric operating body 100c, there is almost no air flowing into the supply side path 36a from the outside, and the fluid supply section is prevented from becoming negative pressure. it can.

  Next, when a voltage is applied to the piezoelectric operating body 100c, the piezoelectric operating body 100c is displaced, the supply side path 36a is opened, and the discharge side path 37a is closed at the end 101C of the piezoelectric operating body 100c. . This state is a state in which compressed air is supplied to the outside via the fluid supply unit. Compressed air continuously introduced from the compressed air supply means (not shown) into the fluid chamber 38 operates the piezoelectric operating body 100 c, thereby causing the piezoelectric operating body 100 c and the member 33 constituting the main body of the piezoelectric valve 30 to move. The flow is changed to the gap side and supplied to the outside via the supply side path 36a.

  Here, as in the first and second embodiments of the present invention, either the discharge side path 37a is opened by the piezoelectric operating body 100c, or the supply side path 36a is opened by the piezoelectric operating body 100c. Even in the state, since the fluid flows in parallel with the plate surface of the piezoelectric operating body 100c, the working pressure of the fluid on the piezoelectric operating body 100c is suppressed. Therefore, the operation load of the piezoelectric operating body 100c can be suppressed.

(Fourth embodiment)
FIG. 8 is a view showing a piezoelectric valve according to a fourth embodiment of the present invention. FIG. 9 is an enlarged view of the vicinity of the fluid chamber 48 shown in FIG. FIG. 8 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 40. As shown in FIGS. 8 and 9, the piezoelectric valve 40 has a receiving side passage 45 a for receiving compressed air from a main body composed of a member 42 and a member 43 and compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including a receiving connector 45, a fluid discharge portion including a discharge side passage 47a for discharging compressed air to the outside, a piezoelectric operating body 100d using the piezoelectric element 102, and compressed air to the outside A fluid supply unit including a supply side path 46a and a supply connector 46, and a fluid chamber 48 that communicates the fluid receiving unit, the fluid discharge unit, and the fluid supply unit. In addition, as shown in FIG. 8, you may attach to the piezoelectric valve 40 the cover 49c for protecting the piezoelectric action body 100d and the electric circuit part regarding this piezoelectric action body 100d. The arrows in FIGS. 8 and 9 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100d.

  As in the above-described embodiment of the present invention, the member 42 and the member 43 constituting the main body of the piezoelectric valve 40 are connected by a bolt 41. The fluid chamber 48 is a space formed between the connected member 42 and the member 43. The piezoelectric operating body 100d using the piezoelectric element 102 has one end fixed to the member 43 by a bolt 44 and the other end between the member 42 and the member 43 constituting the main body of the piezoelectric valve 40. It arrange | positions so that it can displace freely in the clearance gap formed in the slit shape.

  First, a state in which the discharge side path 47a is opened by the piezoelectric operating body 100d (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. The compressed air is introduced into the fluid chamber 48 from the compressed air supply means (not shown) through the receiving side path 45a via a hose or the like (not shown) connected to the receiving connector 45. The compressed air introduced into the fluid chamber 48 passes through the gap between the piezoelectric operating body 100d and the member 43 constituting the main body of the piezoelectric valve 40, and is discharged to the outside through the discharge side path 47a.

  By the way, since the supply side path 46a is provided in parallel with the reception side path 45a, in order for the compressed air to flow from the reception side path 45a to the supply side path 46a via the fluid chamber 48, a flow of The orientation can be changed by almost 180 °. Therefore, most of the compressed air introduced into the fluid chamber 48 from the receiving side passage 45a passes through the gap between the piezoelectric operating body 100d located in the flow direction and the member 43 constituting the main body of the piezoelectric valve 30. Is discharged to the outside, and a part of the compressed air flows through the supply side passage 46a only slightly. Therefore, it can prevent that a fluid supply part becomes a negative pressure. At this time, since it is preferable that the fluid supply unit has a slight positive pressure, the dimensions of the gap between the piezoelectric operating body 100d and the member 43, the supply side path 46a, the reception side path 45a, and the like are appropriately determined. The flow rate balance of compressed air is adjusted.

  Next, when a voltage is applied to the piezoelectric operating body 100d, the piezoelectric operating body 100d is displaced, and the gap between the piezoelectric operating body 100d and the member 43 is closed, whereby compressed air flows through the supply side path 46a ( The supply side path 46a is opened). Compressed air continuously introduced from the compressed air supply means (not shown) into the fluid chamber 48 changes the flow from the discharge side path 47a to the supply side path 46a by operating the piezoelectric operating body 100d, thereby supplying the supply side path 36a. It is supplied to the outside via.

  Here, the fluid chamber 48 that communicates the receiving-side path 45a, the supply-side path 46a, and the discharge-side path 47a is formed so as to expand at a place where the receiving-side path 45a is connected to the fluid chamber 48. Therefore, when the compressed air that has flowed from the receiving side path 45a is introduced into the fluid chamber 48, the flow spreads, and the widened flow collides with the piezoelectric operating body 100d that opens and closes the discharge side path 47a. Therefore, the pressure receiving area of the piezoelectric operating body 100d increases. The bending moment, which is the operating resistance received by the piezoelectric operating body 100d, is given as an integral of the pressure receiving pressure from end to end of the portion of the piezoelectric operating body 100d that receives pressure. Therefore, compared with the conventional case where the compressed air flowing from the receiving-side path collides with the piezoelectric operating body without substantially changing the path cross-sectional area, the piezoelectric operating body of the piezoelectric valve 40 according to the present embodiment. The operating load of 100d is suppressed.

(Fifth embodiment)
FIG. 10 is a view showing a piezoelectric valve according to a fifth embodiment of the present invention. FIG. 10 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 40b. The structure of the piezoelectric valve 40b according to this embodiment is substantially the same as that of the piezoelectric valve 40 according to the fourth embodiment described above. The difference is that the piezoelectric valve 40b is made of an insulating material as shown in FIG. The periphery is protected by the formed cover 49a and cover 49b. Examples of the insulating material include resin materials such as vinyl chloride and phenol resin. By covering the piezoelectric valve 40b with such an insulating material, it is possible to electrically insulate from the surrounding environment. Such a structure can also be adopted in other embodiments.

(Sixth embodiment)
FIG. 11 is a view showing a piezoelectric valve according to a sixth embodiment of the present invention. FIG. 12 is an enlarged view of the vicinity of the fluid chamber 68 shown in FIG. FIG. 11 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 60. As shown in FIGS. 11 and 12, the piezoelectric valve 60 includes a main body composed of a member 62 and a member 63, and a receiving side path 65a for receiving compressed air from compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including the receiving connection device 65, a fluid discharge portion including a discharge side path 67a for discharging compressed air to the outside, a piezoelectric operating body 100e using the piezoelectric element 102, and compressed air to the outside A fluid supply unit including a supply side channel 66a and a supply connector 66, and a fluid chamber 68 that communicates the fluid receiving unit, the fluid discharge unit, and the fluid supply unit. As in the fourth embodiment of FIG. 8, the piezoelectric valve 60 may be provided with a cover 49c for protecting the piezoelectric operating body 100e and an electric circuit portion related to the piezoelectric operating body 100e. The arrows in FIGS. 11 and 12 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100e.

  Similar to the above-described embodiment of the present invention, the member 62 and the member 63 constituting the main body of the piezoelectric valve 60 are connected by a bolt 61. The fluid chamber 68 is a space formed between the connected member 62 and the member 63. One end of the piezoelectric operating body 100 e using the piezoelectric element 102 is fixed to the member 63 by a bolt 64. The other end portion is bent in a bowl shape, and the bent end portion is inserted from a part of the discharge side passage 67a so as to be freely displaceable between the fluid receiving portion and the fluid supply portion. . The discharge side path 67a is formed in a slit shape and opens to the outside. Further, a compressed air receiving port of the fluid supply unit is provided in the discharge direction of the compressed air from the fluid receiving unit.

  First, a state where the discharge side path 67a is opened by the piezoelectric operating body 100e (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. The compressed air is introduced into the fluid chamber 68 from the compressed air supply means (not shown) via the receiving side path 65a through a hose (not shown) connected to the receiving connector 65. The compressed air introduced into the fluid chamber 68 is discharged to the outside through a discharge side path 47a formed in a slit shape between the member 62 and the member 63 constituting the main body of the piezoelectric valve 40.

  By the way, the end portion of the piezoelectric operating body 100e bent in a bowl shape is positioned between the fluid receiving portion and the fluid supply portion, and the receiving port of the fluid supply portion is provided in the discharge direction of the compressed air from the fluid receiving portion. The compressed air from the fluid receiving portion collides with the piezoelectric operating body 100e, and most of the collided compressed air is discharged from the slit-shaped discharge side passage 67a opened to the outside. In other words, the discharge side path 67a is opened by the piezoelectric operating body 100e. A part of the compressed air flows to the outside through the supply side path 66a slightly, so that it is possible to prevent the fluid supply unit that supplies the compressed air to the outside from becoming a negative pressure. At this time, since it is preferable that the fluid supply unit has a slightly positive pressure, the gap between the piezoelectric operating body 100e and the member 62, the supply side path 646a, the receiving side path 65a, the plate width of the piezoelectric operating body 100e, and The flow length balance of the compressed air is adjusted by appropriately determining dimensions such as the insertion length of the end bent into a bowl shape.

  Next, when a voltage is applied to the piezoelectric operating body 100e, the piezoelectric operating body 100e is displaced, and the end of the piezoelectric operating body 100e bent in a bowl shape is between the receiving side path 65a and the supply side path 66a. Excluded. Thereby, compressed air flows from the receiving side path 65a to the supply side path 46a (the supply side path 46a is opened). The compressed air that has been continuously introduced into the fluid chamber 68 from the compressed air supply means (not shown) changes the flow from the discharge side path 67a to the supply side path 66a by operating the piezoelectric operating body 100e, thereby supplying the supply side path 66a. It is supplied to the outside via.

  Here, when closing the discharge side path 67a by the piezoelectric operating body 100e, the end portion of the piezoelectric operating body 100e bent in a bowl shape is substantially perpendicular to the flow direction of the compressed air from the receiving side path 65a. Since it is moved, the operating load of the piezoelectric operating body 100e can be suppressed.

(Seventh embodiment)
FIG. 13 is a view showing a piezoelectric valve according to a seventh embodiment of the present invention. FIG. 14 is an enlarged view of the vicinity of the fluid chamber 78 shown in FIG. 13 is composed of a plan view (a) and a sectional view (b) of the piezoelectric valve 70, and FIG. 14 is a sectional view taken along the line AA and an enlarged view (b) in the vicinity of the fluid chamber 78. Composed. As shown in FIGS. 13 and 14, the piezoelectric valve 70 includes a main body composed of a member 72 and a member 73, and a receiving side path 75 a for receiving compressed air from compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including the connection connector 75 for receiving, a fluid discharge portion including a discharge side passage 77a for discharging compressed air to the outside, a piezoelectric operating body 100f using the piezoelectric element 102, and compressed air to the outside A fluid supply unit including a supply side path 76a and a supply connector 76, and a fluid chamber 78 communicating the fluid receiving unit, the fluid discharge unit, and the fluid supply unit.

  Similarly to the fourth embodiment of FIG. 8, the piezoelectric valve 70 may be provided with a cover 49c for protecting the piezoelectric operating body 100f and the electric circuit portion related to the piezoelectric operating body 100f. The arrows in FIGS. 13 and 14 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100f.

  Similar to the above-described embodiment of the present invention, the member 72 and the member 73 constituting the main body of the piezoelectric valve 70 are connected by a bolt 71. The fluid chamber 78 is a space formed between the connected member 72 and the member 73. The piezoelectric operating body 100f using the piezoelectric element 102 is arranged such that one end is fixed to the member 73 by a bolt 74 and the other end can be freely displaced in a fluid chamber 78 formed in a slit shape. Yes.

  First, a state in which the discharge side path 77a is opened by the piezoelectric operating body 100f (details are shown in the enlarged view (d)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. Compressed air is introduced from a compressed air supply means (not shown) into a fluid chamber 78 formed in a slit shape via a receiving side path 75a through a hose or the like (not shown) connected to a receiving connector 75. Is done. Since the compressed air introduced into the fluid chamber 78 is blocked by the one surface 101B of the piezoelectric operating body 100f in the direction of the supply side path 76a, there is a gap between the piezoelectric operating body 100f and the member 72 constituting the body of the piezoelectric valve 70. It is discharged to the outside through the discharge side path 77a. At this time, since the path in the fluid chamber 78 on the supply side path 76a side is blocked by the one surface 101B of the piezoelectric operating body 100f as described above, there is almost no air flowing from the outside into the supply side path 76a. It is possible to prevent the part from becoming negative pressure.

  Next, when a voltage is applied to the piezoelectric operating body 100f, the piezoelectric operating body 100f is displaced, and the path in the fluid chamber 78 on the supply side path 76a side is opened. This state is a state in which compressed air is supplied to the outside via the fluid supply unit. The compressed air that has been introduced into the fluid chamber 78 from the compressed air supply means (not shown) operates the piezoelectric operating body 100f, so that the piezoelectric operating body 100f and the member 73 constituting the body of the piezoelectric valve 70 are connected. The flow is changed to the gap side and supplied to the outside via the supply side path 76a.

  Here, as in the first to third embodiments of the present invention, in either state where the discharge side path 77a is opened by the piezoelectric operating body 100f or in the state where the supply side path 76a is opened by the piezoelectric operating body 100f. However, since the fluid flows substantially parallel to the plate surface of the piezoelectric operating body 100f, the working pressure of the fluid on the piezoelectric operating body 100f is suppressed. Therefore, the operating load of the piezoelectric operating body 100f can be suppressed.

(Eighth embodiment)
FIG. 15 is a view showing a piezoelectric valve according to an eighth embodiment of the present invention. FIG. 16 is an enlarged view of the vicinity of the fluid chamber 88 shown in FIG. FIG. 15 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 80. As shown in FIGS. 15 and 16, the piezoelectric valve 80 has a receiving side path 85 a for receiving compressed air from a main body composed of a member 82 and a member 83 and compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including the receiving connection device 85, a fluid discharge portion including a discharge side path 87a for discharging compressed air to the outside, a piezoelectric operating body 100g using the piezoelectric element 102, and compressed air to the outside A fluid supply section having a supply-side path 86a and a supply connector 86, and a fluid chamber 88 communicating with the fluid receiving section, the fluid discharge section, and the fluid supply section. As in the fourth embodiment of FIG. 8, the piezoelectric valve 80 may be provided with a cover 49c for protecting the piezoelectric operating body 100g and the electric circuit portion related to the piezoelectric operating body 100g. The arrows in FIGS. 15 and 16 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100g.

  Similar to the above-described embodiment of the present invention, the member 82 and the member 83 constituting the main body of the piezoelectric valve 80 are connected by a bolt 81. The fluid chamber 88 is formed in a conical shape having a tapered surface in a space formed by processing the member 82. The lower surface of the fluid chamber 88 is formed as a part of the fluid discharge portion. The piezoelectric operating body 100 g using the piezoelectric element 102 is arranged so that one end is fixed to the member 83 by a bolt 84 and the other end can be freely displaced on the lower surface of the fluid chamber 88.

  First, a state where the discharge side path 87a is opened by the piezoelectric operating body 100g (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. The compressed air is a fluid formed in a conical shape having a tapered surface via a receiving side path 85a via a hose or the like (not shown) connected to the receiving connector 85 from a compressed air supply means (not shown). The fluid is introduced into the fluid chamber 88 from the side surface of the chamber 88 along the inner surface of the fluid chamber 88. The compressed air introduced into the fluid chamber 88 swirls in the fluid chamber 88 to become a swirling flow, is guided to a fluid discharge portion in a direction in which the cross section of the fluid chamber 88 expands along the tapered surface, and discharge side passage 87a. Is discharged radially in a direction along the plate surface of the piezoelectric operating body 100g. Therefore, it is possible to prevent the flow of fluid that directly collides with the piezoelectric operating body 100g, and to suppress the operation load of the piezoelectric operating body 100g.

  Moreover, since the compressed air which became the swirl | vortex flow is discharged | emitted efficiently radially, the opening part of a discharge part may be a slight clearance gap. Therefore, even a piezoelectric operating body with a small displacement is easy to use. Further, not all of the compressed air flowing in from the fluid receiving portion is guided to the discharge side passage 87a, and a part of the compressed air also flows into the supply side passage 86a that opens slightly to the fluid supply side. Therefore, it can prevent that the fluid supply part which supplies a fluid to the exterior becomes negative pressure. Here, the amount of compressed air flowing through the discharge side passage 87a and the amount of compressed air flowing through the supply side passage 86a are adjusted by the positions, dimensions, and the like of the fluid discharge portion, the fluid supply portion, the fluid chamber 88, and the like.

  Next, when a voltage is applied to the piezoelectric operating body 100g, the piezoelectric operating body 100g is displaced, and the fluid discharge portion is closed. This state is a state in which compressed air is supplied to the outside via the fluid supply unit. Compressed air that has been introduced into the fluid chamber 88 from the compressed air supply means (not shown) is supplied to the outside by changing the flow toward the supply side path 86a by operating the piezoelectric operating body 100g.

(Ninth embodiment)
FIG. 17 is a view showing a piezoelectric valve according to the ninth embodiment of the present invention. 18 is an enlarged view of the vicinity of the fluid chamber 98 shown in FIG. FIG. 17 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 90. As shown in FIGS. 18 and 19, the piezoelectric valve 90 includes a main body composed of a member 92 and a member 93, and a receiving side path 95a for receiving compressed air from compressed air supply means (not shown) such as an air compressor. And a fluid receiving portion including the receiving connection device 95, a fluid discharge portion including a discharge side path 97a for discharging compressed air to the outside, a piezoelectric operating body 100h using the piezoelectric element 102, and compressed air to the outside A fluid supply unit including a supply-side path 96a and a supply connector 96, and a fluid chamber 98 that communicates the fluid receiving unit, the fluid discharge unit, and the fluid supply unit. Similarly to the fourth embodiment of FIG. 8, the piezoelectric valve 90 may be provided with a cover 49c for protecting the piezoelectric operating body 100h and the electric circuit portion related to the piezoelectric operating body 100h. The arrows in FIGS. 18 and 19 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100h.

  As in the above-described embodiment of the present invention, the member 92 and the member 93 constituting the main body of the piezoelectric valve 90 are connected by a bolt 91. The fluid chamber 98 is formed in a cylindrical shape in a space formed between the connected member 92 and the member 93. The upper surface of the fluid chamber 98 is formed as a part of the fluid discharge portion. The piezoelectric operating body 100 h using the piezoelectric element 102 is arranged such that one end is fixed to the member 93 by a bolt 94 and the other end can be freely displaced on the upper surface of the fluid chamber 98.

  First, a state in which the discharge side path 97a is opened by the piezoelectric operating body 100h (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. The compressed air passes through a receiving side path 95a via a hose or the like (not shown) connected to a receiving connector 95 from a compressed air supply means (not shown), and the side surface of the fluid chamber 98 formed in a cylindrical shape. To the fluid chamber 98 along the inner surface of the fluid chamber 98. The compressed air introduced into the fluid chamber 98 swirls in the fluid chamber 98 to become a swirling flow, is guided to a fluid discharge portion formed on the upper surface of the fluid chamber 98, and passes through the discharge-side path 97a, and the piezoelectric operating body 100h. Are discharged radially in the direction along the plate surface. Therefore, it is possible to prevent the flow of fluid that directly collides with the piezoelectric operating body 100h, and to suppress the operation load of the piezoelectric operating body 100h.

  Moreover, since the compressed air which became the swirl | vortex flow is discharged | emitted efficiently radially, the opening part of a discharge part may be a slight clearance gap. Therefore, even a piezoelectric operating body with a small displacement is easy to use. Further, not all of the compressed air flowing in from the fluid receiving portion is guided to the discharge side passage 97a, and a part of the compressed air also flows into the supply side passage 96a that opens slightly to the fluid supply side. Therefore, it can prevent that the fluid supply part which supplies a fluid to the exterior becomes negative pressure. Here, the amount of compressed air flowing through the discharge side passage 97a and the amount of compressed air flowing through the supply side passage 96a are adjusted by the positions, dimensions, and the like of the fluid discharge portion, the fluid supply portion, the fluid chamber 98, and the like.

  Next, when a voltage is applied to the piezoelectric operating body 100h, the piezoelectric operating body 100h is displaced, and the fluid discharge portion is closed. This state is a state in which compressed air is supplied to the outside via the fluid supply unit. The compressed air that has been continuously introduced into the fluid chamber 98 from the compressed air supply means (not shown) changes the flow toward the supply side path 96a and is supplied to the outside by operating the piezoelectric operating body 100h.

(10th Embodiment)
FIG. 19 is a view showing a piezoelectric valve according to the tenth embodiment of the present invention. FIG. 20 is an enlarged view of the vicinity of the fluid chamber 208 shown in FIG. 19 includes a plan view (a) and a sectional view (b) of the piezoelectric valve 200, and FIG. 20 is an enlarged side view (a) in the vicinity of the fluid chamber 208 and an enlarged plan view in the vicinity of the fluid chamber 208. (B). As shown in FIGS. 19 and 20, the piezoelectric valve 200 is for receiving compressed air from a main body composed of a member 202, a member 203, and a member 203b, and compressed air supply means (not shown) such as an air compressor. A fluid receiving portion including a receiving-side path 205a and a receiving connector 205; a fluid discharging section including a discharging-side path 207a for discharging compressed air to the outside; a piezoelectric operating body 100i using the piezoelectric element 102; A fluid supply unit including a supply-side path 206a for supplying compressed air to the outside and a supply connector 206, and a fluid chamber 208 that communicates the fluid receiving unit, the fluid discharge unit, and the fluid supply unit.

  As in the fourth embodiment of FIG. 8, the piezoelectric valve 200 may be provided with a cover 49c for protecting the piezoelectric operating body 100i and an electric circuit portion related to the piezoelectric operating body 100i. The arrows in FIGS. 19 and 20 are an arrow indicating the direction in which the compressed air flows and an arrow indicating the operating direction of the piezoelectric operating body 100h.

  As in the above-described embodiment of the present invention, the member 202 and the member 203 constituting the main body of the piezoelectric valve 200 are connected by a bolt 201, and the member 203 and the member 203b are connected by a bolt 201b. The fluid chamber 208 is formed in a conical shape having a tapered surface in a space formed between the connected member 202 and the member 203. The upper surface of the fluid chamber 208 is formed as a part of the fluid discharge portion. The piezoelectric operating body 100 i using the piezoelectric element 102 is arranged such that one end is fixed to the member 203 b by a bolt 204 and the other end can be freely displaced on the upper surface of the fluid chamber 208.

  First, a state where the discharge side path 207a is opened by the piezoelectric operating body 100i (details are shown in the enlarged view (c)) will be described. This state is a state in which compressed air is hardly supplied to the fluid supply unit. The compressed air is a fluid formed in a conical shape having a tapered surface via a receiving side path 205a via a hose or the like (not shown) connected to the receiving connector 205 from a compressed air supply means (not shown). The fluid is introduced into the fluid chamber 208 from the side surface of the chamber 208 along the inner surface of the fluid chamber 208. The compressed air introduced into the fluid chamber 208 swirls in the fluid chamber 208 to become a swirling flow, is guided to the fluid discharge portion in the direction in which the cross section of the fluid chamber 208 expands along the tapered surface, and the discharge side path 207a. Are discharged radially in the direction along the plate surface of the piezoelectric operating body 100i. Therefore, it is possible to prevent the flow of fluid that directly collides with the piezoelectric operating body 100g, and to suppress the operation load of the piezoelectric operating body 100i.

  Moreover, since the compressed air which became the swirl | vortex flow is discharged | emitted efficiently radially, the opening part of a discharge part may be a slight clearance gap. Therefore, even a piezoelectric operating body with a small displacement is easy to use. Further, not all of the compressed air flowing in from the fluid receiving portion is guided to the discharge side passage 207a, and a part of the compressed air also flows into the supply side passage 206a that opens slightly to the fluid supply side. Therefore, it can prevent that the fluid supply part which supplies a fluid to the exterior becomes negative pressure. Here, the amount of compressed air flowing through the discharge side passage 207a and the amount of compressed air flowing through the supply side passage 206a are adjusted by the positions, dimensions, etc. of the fluid discharge portion, the fluid supply portion, the fluid chamber 208, and the like.

  Next, when a voltage is applied to the piezoelectric operating body 100i, the piezoelectric operating body 100i is displaced, and the fluid discharge portion is closed. This state is a state in which compressed air is supplied to the outside via the fluid supply unit. Compressed air that has been continuously introduced into the fluid chamber 208 from the compressed air supply means (not shown) is supplied to the outside by changing the flow toward the supply side path 206a by operating the piezoelectric operating body 100i.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made as long as they are described in the claims. For example, in the eighth embodiment shown in FIGS. 15 and 16, the fluid chamber is turned upside down so that the taper surface expands as it goes upward, and the upper surface of the fluid chamber is used as the fluid discharge portion and the lower surface as the fluid supply portion. In the tenth embodiment shown in FIG. 19 and FIG. 20, the fluid chamber is turned upside down so that the tapered surface widens as it goes downward, and the lower surface of the fluid chamber is the fluid discharge portion and the upper surface is supplied with fluid. It can be implemented as a part.

It is a figure which shows a piezoelectric action body. It is a figure which shows the piezoelectric valve which concerns on 1st Embodiment. It is an enlarged view which shows the edge part vicinity of the fluid chamber of FIG. It is a figure which shows the piezoelectric valve which concerns on 2nd Embodiment. It is an enlarged view which shows the edge part vicinity of the fluid chamber of FIG. It is a figure which shows the piezoelectric valve which concerns on 3rd Embodiment. It is an enlarged view which shows the edge part vicinity of the fluid chamber of FIG. It is a figure which shows the piezoelectric valve which concerns on 4th Embodiment. It is an enlarged view which shows the fluid chamber vicinity of FIG. It is a figure which shows the piezoelectric valve which concerns on 5th Embodiment. It is a figure which shows the piezoelectric valve which concerns on 6th Embodiment. It is an enlarged view which shows the fluid chamber vicinity of FIG. It is a figure which shows the piezoelectric valve which concerns on 7th Embodiment. It is an enlarged view which shows the fluid chamber vicinity of FIG. It is a figure which shows the piezoelectric valve which concerns on 8th Embodiment. It is an enlarged view which shows the fluid chamber vicinity of FIG. It is a figure which shows the piezoelectric valve which concerns on 9th Embodiment. It is an enlarged view which shows the fluid chamber vicinity of FIG. It is a figure which shows the piezoelectric valve which concerns on 10th Embodiment. FIG. 20 is an enlarged view showing the vicinity of the fluid chamber in FIG. 19.

Explanation of symbols

80 Piezoelectric valve 85a Acceptance side path 86a Supply side path 87a Discharge side path 88 Fluid chamber 100g Piezoelectric actuator

Claims (13)

A piezoelectric valve using a piezoelectric element,
A fluid receiving portion for receiving fluid from the fluid supply means;
A fluid discharge portion for discharging the fluid received from the fluid receiving portion to the outside;
A piezoelectric operating body that is provided in the fluid discharge portion, has a thin plate shape and has a longitudinal direction, and opens and closes a discharge-side path that communicates with the outside of the fluid discharge portion according to an applied voltage;
A fluid supply unit for supplying the fluid received from the fluid receiving unit to the outside;
A fluid chamber that communicates the fluid receiving portion, the fluid discharge portion, and the fluid supply portion, and suppresses the working pressure of the fluid on the piezoelectric operating body;
A piezoelectric valve characterized by comprising: The piezoelectric operating body closes a supply-side path that communicates with the outside of the fluid supply unit when the discharge-side path is opened, and opens the supply-side path when the discharge-side path is closed. Is an action body,
In the fluid chamber, the flow direction of the fluid flowing from the fluid receiving portion to the fluid discharge portion is parallel to the plate surface of the piezoelectric operating body in the vicinity of a connection portion where the fluid chamber is connected to the fluid discharge portion. The piezoelectric valve according to claim 1, wherein the piezoelectric valve is formed in a slit shape. The piezoelectric operating body is a piezoelectric operating body that opens and closes the discharge-side path on one side and opens and closes a supply-side path that communicates with the outside of the fluid supply unit on the other side.
The piezoelectric valve according to claim 1 or 2, wherein the fluid chamber is formed in a slit shape in the vicinity of the connection portion. The piezoelectric operating body is a piezoelectric operating body that opens and closes the discharge-side path on one side and opens and closes a supply-side path that communicates with the outside of the fluid supply section at an end portion.
The piezoelectric valve according to claim 1 or 2, wherein the fluid chamber is formed in a slit shape in the vicinity of the connection portion. When the discharge side path is opened at the end, the piezoelectric operating body closes the supply side path leading to the outside of the fluid supply unit at the end, and closes the discharge side path at the end. When the piezoelectric operating body opens the supply side path at the end,
The piezoelectric valve according to claim 1 or 2, wherein the fluid chamber is formed in a slit shape in the vicinity of the connection portion.   The piezoelectric operating body closes the supply-side path communicating with the outside of the fluid supply unit on one side when the discharge-side path is opened on one side, and closes the discharge-side path on the one side. The piezoelectric valve according to claim 1 or 2, wherein the piezoelectric valve is a piezoelectric operating body that opens the supply-side path on one side.   A receiving-side flow direction in which the fluid flows in a receiving-side path for receiving the fluid of the fluid receiving unit; and a supply-side flowing direction in which the fluid flows in a supplying-side path communicating with the outside of the fluid supplying unit. 2. The piezoelectric valve according to claim 1, wherein the receiving side flow direction and the supply side flow direction are orthogonal to a plate surface of the piezoelectric operating body. The discharge side path is formed in a slit shape opened to the outside,
The end of the piezoelectric operating body is bent into a bowl shape,
The end portion bent in a bowl shape is inserted between a part of the discharge side path and provided between the fluid receiving portion and the fluid supply portion,
2. The piezoelectric valve according to claim 1, wherein a receiving port for the fluid of the fluid supply unit is provided in a direction in which the fluid is discharged from the fluid receiving unit. An upper surface or a lower surface of the fluid chamber is formed as the fluid discharge portion,
2. The piezoelectric valve according to claim 1, wherein the fluid from the fluid receiving portion is supplied to the fluid chamber from a side surface of the fluid chamber along an inner surface of the fluid chamber.   The piezoelectric valve according to claim 1 or 9, wherein the fluid chamber is formed in a conical shape having a tapered surface.   The piezoelectric valve according to claim 1, wherein the fluid chamber is formed in a cylindrical shape.   The piezoelectric valve according to claim 9, wherein the fluid supply unit is connected to a facing surface of the fluid chamber that faces the fluid discharge unit. The supply-side path that leads to the outside of the fluid supply unit and the reception-side path that receives the fluid of the fluid reception unit are in parallel.
12. The piezoelectric valve according to claim 9, wherein the fluid is supplied to the outside from the supply-side path along the inner surface of the fluid chamber.

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