JP2008230012A - Fluid filling method and fluid jetting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid filling method capable of preventing bubbles and solids from staying in a filter of a fluid jetting head, and to provide a fluid jetting device. <P>SOLUTION: The method for filling ink in a fluid flow path R equipped with the filter 121 for removing foreign substances in the ink in the fluid flow path R for guiding the ink to the nozzle opening face of the fluid jetting head 34 is characterized by applying high frequency micro-vibration on the ink when the ink is filled. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a fluid filling method and a fluid ejecting apparatus.

The fluid ejecting apparatus is an apparatus that includes a fluid ejecting head capable of ejecting a fluid and ejects various fluids from the fluid ejecting head.
2. Description of the Related Art Conventionally, as a device and method for filling a fluid ejecting head with fluid, a device and method for filling a fluid tank by applying a positive pressure to a fluid tank, or a device and method for filling a fluid tank with a negative pressure generated by close contact with a nozzle And a method is known (see, for example, Patent Document 1).

Here, a mesh-like filter for removing foreign substances contained in the fluid is disposed in the fluid introduction path of the fluid ejecting head. Before and after the fluid passes through the filter, the fluid bubbles and traps in the filter, so that the fluid accumulates on the fluid filling side of the filter. If the air bubbles remain, when the fluid is ejected to the target substrate, the air bubbles flow out and unevenness occurs in the ejection amount.
For this reason, by setting the fluid filling speed to about 0.2 to 0.5 ml / sec and increasing the fluid speed, the generated bubbles can be reduced and the bubbles are prevented from accumulating.
Japanese Patent Laid-Open No. 11-48492

  However, in the conventional technology, when a fluid having a high solid content concentration or a large solid content specific gravity or a fluid having a low solid content dispersion concentration and dispersibility (for example, pigment ink or metal ink) is filled. When the fluid velocity is set as described above, solid content (pigments and metal fine particles) in the fluid adheres to the filter, or conversely, bubbles accumulate due to the solid content. For this reason, there has been a problem that a large amount of fluid has to be discarded in order to discharge bubbles and deposits during filling.

  SUMMARY An advantage of some aspects of the invention is that it provides a fluid filling method and a fluid ejecting apparatus that can prevent bubbles and solids from accumulating in a filter of a fluid ejecting head.

  According to a first aspect of the present invention, in the method of filling a fluid in the fluid flow path, the fluid flow path that guides the fluid to the nozzle opening surface of the fluid ejecting head includes a filter that removes foreign matters in the fluid. A high-frequency fine vibration is applied to the fluid.

  Thereby, the bubble which generate | occur | produces can be ruptured and can be eliminated or made small. In addition, due to the agitation and cavitation effects of the fluid, it is possible to prevent the pigment and metal fine particles contained in the fluid from adhering to the filter and the microchannel. Furthermore, the gas dissolved in the fluid is released by the cavitation effect, and the bubbles can be discharged with a reduced size.

Further, a fluid is filled by generating a negative pressure in a sealed space formed by the cap member and the nozzle opening surface while bringing the cap member and the nozzle opening surface into close contact with each other.
Thereby, even if the fluid is ejected from the nozzle, since the fluid is ejected into the cap portion, it is possible to prevent the fluid from being scattered during the fluid filling. Further, the fluid can be stably filled by using the pressure.

In addition, a fluid is filled by applying a positive pressure into a fluid tank connected to a fluid inlet of the fluid ejecting head.
Thereby, since the pressure is used for filling the fluid, the fluid can be filled stably.

Further, the fluid is filled at a filling speed of 0.1 ml / sec or less.
Thereby, since the solid content contained in the fluid is not attached to the filter and the flow resistance of the filter is not changed, the fluid flow path of the fluid ejecting head can be stably filled with the fluid.

Further, the high-frequency fine vibration is applied by a piezoelectric vibrator provided in the fluid ejecting head.
Thereby, the piezoelectric vibrator used at the time of fluid ejection can be used.

In addition, the high frequency micro vibration is applied in a frequency range of 20 kHz to 200 kHz.
Thereby, the generated bubble can be effectively ruptured. Furthermore, the fluid agitation and cavitation effects can be further enhanced.

  In addition, the high frequency micro vibration is characterized in that the frequency is applied while changing in steps. Thereby, the bubble can be effectively ruptured according to the size of the generated bubble.

  The fluid includes a metal or a pigment. Accordingly, even if the fluid has a high solid content or a high solid content specific gravity, the fluid flow path of the fluid ejecting head can be stably filled with the fluid.

  According to a second aspect of the present invention, there is provided a fluid ejecting apparatus including a filter that removes foreign matters in a fluid in a fluid flow path that guides the fluid to a nozzle opening surface of the fluid ejecting head. It is characterized by having.

  Thereby, the bubble which generate | occur | produces can be ruptured and can be lose | disappeared or made small. In addition, the fluid agitation and cavitation effects can also be effective in preventing adhesion of pigments and metal fine particles contained in the fluid to the filter and the microchannel. Furthermore, the gas dissolved in the fluid is released by the cavitation effect, and the bubbles can be discharged with a reduced size.

The fluid filling processing unit is applied by a piezoelectric vibrator included in the fluid ejecting head, thereby reducing the size of the fluid ejecting apparatus.

Hereinafter, embodiments of a fluid filling method and a fluid ejection device according to the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram showing a schematic configuration of a droplet discharge device 10 according to an embodiment of the present invention.

The droplet discharge device (fluid ejection device) 10 includes a base 31, a substrate moving unit 32, a head moving unit 33, a droplet discharge head 34, an ink supply unit 35, and a control device 40. It is a thing. The base 31 has a substrate moving means 32 and a head moving means 33 installed thereon.
In addition, the droplet discharge device 10 includes a cleaning unit 53 and a capping unit 55.

The substrate moving means 32 is provided on the base 31 and has guide rails 36 arranged along the Y-axis direction. The substrate moving means 32 is configured to move the slider 37 along the guide rail 36 by, for example, a linear motor (not shown).
A stage 39 is fixed on the slider 37, and this stage 39 is for positioning and holding the substrate P. That is, the stage 39 has a known suction holding means (not shown), and the suction holding means is operated to hold the substrate P on the stage 39 by suction. The substrate P is accurately positioned and held at a predetermined position on the stage 39 by a positioning pin (not shown) of the stage 39, for example.

  The head moving means 33 includes a pair of mounts 33a and 33a standing on the rear side of the base 31, and a travel path 33b provided on the mounts 33a and 33a. It is arranged along the axial direction, that is, the direction orthogonal to the Y-axis direction of the substrate moving means 32. The travel path 33b is formed by having a holding plate 33c passed between the gantry 33a and 33a and a pair of guide rails 33d and 33d provided on the holding plate 33c. A carriage 42 on which the droplet discharge head 34 is mounted is movably held in the length direction 33d. The carriage 42 is configured to run on the guide rails 33d and 33d by operation of a linear motor (not shown) or the like, thereby moving the droplet discharge head 34 in the X-axis direction.

Here, the carriage 42 can move in the length direction of the guide rails 33d, 33d, that is, in the X-axis direction, for example, in units of 1 μm. Such movement is controlled by a control device 40 such as a computer. It has become so.
The control device 40 detects the position information of the droplet discharge head 34, that is, the position (X coordinate) of the droplet discharge head 34 on the guide rails 33d and 33d and the position (X coordinate) of each nozzle at that time. To remember.

  The droplet discharge head (fluid ejection head) 34 is attached to the carriage 42 via a mounting portion 43 so as to be rotatable. The mounting portion 43 is provided with a motor 44, and a support shaft (not shown) of the droplet discharge head 34 is connected to the motor 44. Based on such a configuration, the droplet discharge head 34 is rotatable in the circumferential direction. Further, the motor 44 is also connected to the control device 40, so that the rotation of the droplet discharge head 34 in the circumferential direction is controlled by the control device 40.

  The ink supply unit 35 includes an ink supply container 45 filled with the ink L, and an ink supply tube 46 for sending the ink L from the ink supply container 45 to the droplet discharge head 34.

The cleaning unit 53 can clean the nozzles and the like of the droplet discharge head 34 periodically or at any time during the manufacturing process of the substrate P or during standby.
When the ink L is discharged onto the substrate P, the cleaning unit 53 is held at a position where it does not interfere with the droplet discharge head 34.

The capping unit 55 includes a cap portion 47, a liquid suction tube 48, and a suction pump 51 connected to the liquid suction tube 48. In order to prevent the nozzle opening surface 143a (see FIG. 3) of the droplet discharge head 34 from being dried, the capping unit 55 is provided with a cap portion 47 on the nozzle opening surface 143a during the discharge process of the ink L onto the substrate P or during standby. Is to be applied.
The capping unit 55 also has a function of initially filling the ink L in the droplet discharge head 34. Also during this initial filling, the cap portion 47 is attached to the nozzle opening surface 143a.

The cap unit 47 moves in the vertical direction along, for example, a guide (not shown) provided in the droplet discharge device 10 so as to abut against the nozzle opening surface 143a of the droplet discharge head 34. It is comprised so that it may adhere (refer FIG. 4). The cap portion 47 is made of silicone, fluorine resin, or the like, and is connected to a suction pump 51 that sucks the ink L through a liquid suction tube 48.
Further, the suction pump 51 is provided with an adjustment mechanism (not shown) including a pressure adjustment valve or the like for adjusting the degree of pressure reduction for sucking the ink L. And this pressure regulation valve is connected to the control apparatus 40, The pressure increase / decrease is controlled by this.
When the ink L is discharged onto the substrate P, the capping unit 55 is held at a position where it does not interfere with the droplet discharge head 34.

FIG. 2 is a cross-sectional view illustrating the configuration of the droplet discharge head 34, and FIG. 3 is a cross-sectional view of the main part of the droplet discharge head 34.
The droplet discharge head 34 in this embodiment includes an introduction needle unit 117, a head case 118, a flow path unit 119, and an actuator unit 120 as main components.
Two ink introduction needles 122 are mounted side by side on the upper surface of the introduction needle unit 117 with the filter 121 interposed. The sub tanks 102 are respectively attached to these ink introduction needles 122. An ink introduction path 123 corresponding to each ink introduction needle 122 is formed inside the introduction needle unit 117.
The upper end of the ink introduction path 123 communicates with the ink introduction needle 122 via the filter 121, and the lower end communicates with the case flow path 125 formed inside the head case 118 via the packing 124.

  The filter 121 is disposed to remove foreign substances contained in the ink L, and is made of stainless steel and formed in a mesh shape.

The sub tank 102 is molded from a resin material such as polypropylene. The sub tank 102 is formed with a recess to be an ink chamber 127, and the ink chamber 127 is partitioned by sticking an elastic sheet 126 to the opening surface of the recess.
Further, a needle connecting portion 128 into which the ink introduction needle 122 is inserted projects downward from the sub tank 102. The ink chamber 127 in the sub-tank 102 has a shallow mortar shape, and an opening on the upstream side of the connection channel 129 communicating with the needle connection portion 128 is located at a position slightly lower than the vertical center on the side surface. The tank part filter 130 which filters the ink L is attached to this upstream side opening.
A seal member 131 into which the ink introduction needle 122 is liquid-tightly fitted is fitted in the internal space of the needle connecting portion 128. As shown in FIG. 4, the sub tank 102 is formed with an extension portion 132 having a communication groove portion 132 ′ communicating with the ink chamber 127, and an ink introduction port 133 projects from the upper surface of the extension portion 132. It is installed.

An ink supply tube 46 that supplies the ink L stored in the ink supply unit 35 is connected to the ink introduction port 133. Accordingly, the ink L that has passed through the ink supply tube 46 flows into the ink chamber 127 from the ink introduction port 133 through the communication groove 132 ′.
The elastic sheet 126 can be deformed into a direction in which the ink chamber 127 is contracted and a direction in which the ink chamber 127 is expanded. The pressure fluctuation of the ink L is absorbed by the damper function due to the deformation of the elastic sheet 126. That is, the sub tank 102 functions as a pressure damper by the action of the elastic sheet 126. Therefore, the ink L is supplied to the droplet discharge head 34 side in a state where the pressure fluctuation is absorbed in the sub tank 102.

The head case 118 is a hollow box-shaped member made of a synthetic resin. The flow path unit 119 is joined to the lower end surface, the actuator unit 120 is accommodated in the accommodation space 137 formed inside, and the flow path unit 119. The introduction needle unit 117 is attached with the packing 124 interposed on the upper end surface opposite to the side.
A case channel 125 is provided inside the head case 118 so as to penetrate the height direction. The upper end of the case flow path 125 communicates with the ink introduction path 123 of the introduction needle unit 117 via the packing 124.
The lower end of the case flow path 125 communicates with the common ink chamber 144 in the flow path unit 119. Therefore, the ink L introduced from the ink introduction needle 122 is supplied to the common ink chamber 144 side through the ink introduction path 123 and the case flow path 125.

The actuator unit 120 housed in the housing space 137 of the head case 118 includes a plurality of piezoelectric vibrators 138 arranged in a comb shape, a fixed plate 139 to which the piezoelectric vibrators 138 are joined, and a control device. And a flexible cable 140 as a wiring member for supplying a drive signal from 40 to the piezoelectric vibrator 138. Each piezoelectric vibrator 138 has a fixed end portion bonded to the fixed plate 139 and a free end portion protruding outward from the tip surface of the fixed plate 139. That is, each piezoelectric vibrator 138 is mounted on the fixed plate 139 in a so-called cantilever state.
The fixing plate 139 that supports each piezoelectric vibrator 138 is made of, for example, stainless steel having a thickness of about 1 mm. The actuator unit 120 is housed and fixed in the housing space 137 by bonding the back surface of the fixed plate 139 to the inner wall surface of the case that partitions the housing space 137.

The flow path unit 119 is manufactured by joining and integrating with a bonding agent in a state where the flow path unit constituent members including the vibration plate (sealing plate) 141, the flow path substrate 142, and the nozzle substrate 143 are laminated. This is a member that forms a series of ink flow paths from the common ink chamber 144 to the nozzle 147 through the ink supply port 145 and the pressure chamber 146. The pressure chamber 146 is formed as an elongated chamber in a direction perpendicular to the direction in which the nozzles 147 are arranged (nozzle row direction).
The common ink chamber 144 communicates with the case flow path 125 and is a chamber into which ink L is introduced from the ink introduction needle 122 side. The ink L introduced into the common ink chamber 144 is distributed and supplied to each pressure chamber 146 through the ink supply port 145.

The nozzle substrate 143 disposed at the bottom of the flow path unit 119 is a metal thin plate material in which a plurality of nozzles 147 are opened in a row at a pitch (for example, 180 dpi) corresponding to the dot formation density. The nozzle substrate 143 of the present embodiment is made of a stainless steel plate material. In the present embodiment, a total of 22 rows of nozzles 147 (that is, nozzle rows) are arranged in parallel corresponding to each sub tank 102. One nozzle row is composed of 180 nozzles 147, for example.
A flow path substrate 142 disposed between the nozzle substrate 143 and the vibration plate 141 is a flow path section that becomes an ink flow path, specifically, a common ink chamber 144, an ink supply port 145, and a pressure chamber 146. It is a plate-like member in which a section is formed.

  In the present embodiment, the flow path substrate 142 is manufactured by subjecting a silicon wafer, which is a crystalline base material, to anisotropic etching. The vibration plate 141 is a composite plate material having a double structure in which an elastic film is laminated on a metal support plate such as stainless steel. In the portion corresponding to the pressure chamber 146 of the vibration plate 141, an island portion 148 to which the tip surface of the piezoelectric vibrator 138 is joined is formed by removing the support plate in an annular shape by etching or the like. Functions as a diaphragm. That is, the diaphragm 141 is configured such that the elastic film around the island portion 148 is elastically deformed in accordance with the operation of the piezoelectric vibrator 138. Further, the vibration plate 141 seals one opening surface of the flow path substrate 142 and also functions as a compliance portion 149. As for the portion corresponding to the compliance portion 149, the support plate is removed by etching or the like in the same manner as the diaphragm portion to make only the elastic film.

  In the droplet discharge head 34, when a drive signal is supplied to the piezoelectric vibrator 138 through the flexible cable 140, the piezoelectric vibrator 138 expands and contracts in the longitudinal direction of the element. It moves in a direction close to 146 or in a direction away from it. As a result, the volume of the pressure chamber 146 changes and pressure fluctuation occurs in the ink L in the pressure chamber 146. Due to this pressure fluctuation, the ink L in the form of droplets is ejected from the nozzle 147.

The ink L used in the present embodiment is made of a dispersion obtained by dispersing conductive fine particles in a dispersion medium, or a precursor thereof.
Examples of the conductive fine particles include metal fine particles containing, for example, gold, silver, copper, palladium, niobium and nickel, as well as precursors, alloys, oxides thereof, and fine particles such as conductive polymers and indium tin oxide. Used. These conductive fine particles can be used by coating the surface with an organic substance or the like in order to improve dispersibility. The particle diameter of the conductive fine particles is preferably about 1 nm to 0.1 μm. If it is larger than 0.1 μm, not only the nozzle 147 of the droplet discharge head 34 may be clogged but also the density of the resulting film may be deteriorated. On the other hand, if it is smaller than 1 nm, the volume ratio of the coating agent to the conductive fine particles becomes large, and the ratio of the organic matter in the obtained film becomes excessive.

The dispersion medium is not particularly limited as long as it can disperse the conductive fine particles and does not cause aggregation.
For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydro Hydrocarbon compounds such as naphthalene and cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2- Methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ- Butyrolactone, N- methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, can be exemplified polar compounds such as cyclohexanone.
Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferred from the viewpoints of fine particle dispersibility, dispersion stability, and ease of application to the liquid jet method (inkjet method). Preferred examples of the dispersion medium include water and hydrocarbon compounds.

  Further, the ink L can appropriately contain a filler or a binder. For example, in addition to a vinyl-based silane coupling agent, amino-based, epoxy-based, methacryloxy-based, mercapto-based, ketimine-based, cationic, amino-based silane coupling agents can be exemplified. Further, a titanate or aluminate coupling agent may be contained. In addition, you may contain binders, such as a cellulose, siloxane, and silicone oil. By containing such an additive, it is possible to improve dispersibility, improve adhesion to the base, improve the flatness of the film, and the like.

  The surface tension of the conductive fine particle dispersion is preferably in the range of 0.02 N / m to 0.07 N / m. When the ink L is ejected by the ink jet method, if the surface tension is less than 0.02 N / m, the wettability of the ink composition with respect to the nozzle surface increases, and thus flight bending easily occurs. If it exceeds the upper limit, the shape of the meniscus at the nozzle tip is not stable, and it becomes difficult to control the discharge amount and the discharge timing. In order to adjust the surface tension, a small amount of a surface tension regulator such as a fluorine-based, silicone-based, or nonionic-based material may be added to the dispersion within a range that does not significantly reduce the contact angle with the substrate. The nonionic surface tension modifier improves the wettability of the liquid to the substrate, improves the leveling property of the film, and helps prevent the occurrence of fine irregularities in the film. The surface tension modifier may contain an organic compound such as alcohol, ether, ester, or ketone, if necessary.

  The viscosity of the dispersion is preferably 1 mPa · s to 50 mPa · s. When the liquid material is ejected as a liquid using the inkjet method, if the viscosity is less than 1 mPa · s, the nozzle periphery is easily contaminated by the outflow of the ink, and if the viscosity is greater than 50 mPa · s, This is because not only the clogging frequency of the liquid becomes high and smooth liquid ejection becomes difficult, but also the liquid ejection amount decreases.

Next, a method for initially filling ink L in the above apparatus will be described with reference to FIG.
As described above, when the ink L is initially filled in the droplet discharge head 34, the cap portion 47 comes into contact with and adheres to the nozzle opening surface 143a of the droplet discharge head 34. Thereafter, the suction pump 51 is driven, and the space S (the sealed space formed between the cap portion 47 and the nozzle opening surface 143a) is depressurized (negative pressure).
Thereby, the liquid flow path R (nozzle 147, pressure chamber 146, ink supply port 145, common ink chamber 144, case flow path 125, ink introduction path 123, connection flow path in the liquid suction tube 48 and the droplet discharge head 34 is obtained. 129, the ink chamber 127, the communication groove 132 '), and the ink supply tube 46 are depressurized. Therefore, the ink L filled in the ink supply container 45 is filled into the liquid flow path R in the droplet discharge head 34 via the ink supply tube 46 due to the pressure difference.

  At this time, the suction speed (filling speed) of the suction pump 51 is set to be 0.1 ml / sec or less. At this suction speed, the solid content (such as a mass of conductive fine particles) contained in the ink L does not adhere to the filter 121 and passes through the filter 121. That is, since the filling speed of the ink L is relatively slow, the speed at which the conductive fine particles collide with the filter 121 is also slow. Therefore, even if the solid content (adhered matter) in the ink L is trapped by the filter 121, the solid content gradually passes through the filter 121 before the solid content is stacked and grown. Furthermore, bubbles do not accumulate due to the deposits. Therefore, the ink L can pass through the filter 121 slowly.

  However, at the above suction speed, large bubbles are likely to be generated in the fluid flow path R, and in particular, there may be a problem that bubbles are accumulated in the front part of the filter 121 or in the vicinity thereof.

Here, the above-described adverse effects can be eliminated depending on whether the accumulated bubbles are ruptured and eliminated, or are ruptured into small bubbles and discharged from the nozzles 147 by the flow of ink L.
Therefore, by applying high-frequency micro-vibration to the ink L, the bubbles are ruptured to disappear or be reduced. In addition, the stirring and cavitation effects of the ink L are also effective in preventing adhesion of the conductive fine particles of the ink L to the filter 121 and the minute flow path. Further, the gas dissolved in the ink L can be released by the cavitation effect, and the bubbles can be discharged with a reduced size.

Specifically, when the droplet discharge head 34 is filled with the ink L, for example, a drive signal having a frequency of 90.9 kHz is supplied to the piezoelectric vibrator 138 to apply high-frequency fine vibration to the ink L.
For example, as shown in FIG. 5, the basic waveform at this time is 25 V (maximum) from 0 s (time T1) to 3.5 μs (time T2) after the voltage value starts from 0 v (reference potential). The potential rises at a constant slope until the potential Vps), and this maximum potential of 25 V is maintained from 3.5 μs (time T2) to 5.5 μs (time T3). Next, the voltage falls at a constant slope from 0 μm (reference potential) between 5.5 μs (time T3) and 9.0 μs (time T4). Then, the reference potential of 0 V is maintained from 9.0 μs (time T4) to 11.0 μs (time T5).

  Therefore, according to the above-described embodiment, the solid content (conductive fine particles) contained in the ink L is not attached to the filter 121 and the bubbles are not accumulated by the attached matter. Further, since the size of the bubbles can be reduced by applying high-frequency fine vibration to the ink L, the bubbles do not accumulate in the filter 121. That is, the filter 121 exhibits only a function of removing a substance that becomes a foreign substance, and does not hinder the smooth circulation of the ink L. Therefore, it is possible to reduce the amount of ink consumed for removing the deposits and bubbles, and to stably fill the droplet discharge head 34 with the ink L.

  The ink L may be filled in the droplet discharge head 34 by generating a positive pressure in the ink supply container 45 instead of generating a negative pressure in the space S. These can also be used in combination.

In addition to the metal ink, the ink L can be a pigment ink.
The filter 121 is not limited to stainless steel, and may be another metal, plastic, porous material, sponge, nonwoven fabric, or a combination thereof.

In the above-described embodiment, the frequency is set to 90.9 kHz. However, the same effect can be obtained even when the frequency is applied in the range of 20 kHz to 200 kHz. Furthermore, the waveform can be any waveform.
Further, as shown in FIG. 6A, it is not necessary to make the frequency constant, and it is also possible to apply high-frequency fine vibration to the ink L while changing the frequency. For example, as shown in FIG. 6B, the first drive signal is set to 20 kHz, the second drive signal is set to 100 kHz, and the third drive signal is set to 200 kHz. This is repeated and supplied to the piezoelectric vibrator 138. For example, bubbles of different sizes can be efficiently and reliably ruptured and removed.

  Further, the means for applying high-frequency fine vibration is not limited to that using a pressure vibrator, and other vibration generators may be used. Further, the vibration generation source is not limited to the inside of the droplet discharge head 34, and a vibration generation mechanism may be separately provided and applied to the ink L.

[Drawing (fluid injection) process]
Next, a process of forming a wiring pattern using the droplet discharge device 10 will be described.
FIG. 7 is a diagram for explaining the wiring pattern forming method in the order of steps.
As the wiring pattern forming ink (ink (wiring pattern ink X1)), a liquid material in which conductive fine particles are dispersed in a dispersion medium such as water is used, for example, chromium is used as the conductive fine particles.
As the ink discharge conditions, for example, the ink weight can be 4 to 7 ng / dot and the ink speed (discharge speed) can be 5 to 7 m / sec. In addition, the atmosphere for ejecting ink is preferably set to a temperature of 60 ° C. or lower and a humidity of 80% or lower. As a result, stable droplet ejection can be performed without clogging the nozzle 147 of the droplet ejection head 34.

First, as shown in FIG. 7A, the bank B is arranged on the substrate P, and the film pattern formation region 234 is formed.
Next, as shown in FIG. 7B, the wiring pattern ink X1 is ejected as droplets from the droplet ejection head 34, and the droplets are arranged in the film pattern formation region 234 between the banks B.
At this time, since the film pattern formation region 234 is surrounded by the bank B, the wiring pattern ink X1 is prevented from spreading outside the predetermined position. Further, since the bank B is made of a material having water repellency, even if a part of the discharged water-based wiring pattern ink X1 is placed on the bank B, it is repelled from the bank B due to the water repellency. It flows down to the film pattern formation region 234 of the bank B. Further, since the film pattern formation region 234 is lyophilic, the discharged wiring pattern ink X1 is likely to spread on the substrate P exposed in the film pattern formation region 234.

As a result, as shown in FIG. 7C, the wiring pattern ink X1 can be uniformly arranged in the extending direction of the film pattern formation region 234 between the banks B and B.
Here, since the substrate P is heated to about 60 ° C. by a table (not shown), the dispersion medium of the wiring pattern ink X1 is immediately evaporated and dried. As a result, the wiring pattern ink X1 is solidified to such an extent that it does not mix with other types of wiring pattern ink disposed on the wiring pattern ink X1.
Then, by arranging the wiring pattern ink X1 in an overlapping manner, as shown in FIG. 7D, the film pattern forming region 234 has a layer of the wiring pattern ink X1 containing chromium as conductive fine particles as a desired film. Formed thick.

  The bank B is made of a material having a hydrophobic group, and exhibits water repellency as it is without performing a surface treatment. Therefore, even when another functional liquid (wiring pattern ink) is disposed on the wiring pattern ink X1, there is no need to perform surface treatment (water repellent treatment) on the bank B.

When the layer made of the wiring pattern ink X1 is formed, as shown in FIG. 7E, the wiring pattern ink X2 containing different conductive fine particles is arranged on the wiring pattern ink X1, thereby forming a film pattern. A wiring pattern (film pattern) in which different types of wiring pattern inks X1 and X2 are laminated is formed in the formation region 234.
For example, an aqueous wiring pattern ink X2 using silver as conductive fine particles is disposed on the wiring pattern ink X1.

  The dispersion medium of the wiring pattern ink X2 is also immediately dried because the substrate P is heated. As a result, as shown in FIG. 7F, the wiring 233 is formed by laminating the wiring pattern ink X1 and the wiring pattern ink X2 in the film pattern formation region 234 between the banks B.

  After the droplet discharge process, the dispersion medium is completely removed to improve electrical contact between the fine particles in the wiring 233. Further, when a coating material such as an organic material is coated on the surface of the conductive fine particles in order to improve dispersibility, it is also necessary to remove this coating material. For this reason, the substrate P after the droplet discharge process is subjected to heat treatment and / or light treatment.

  The heat treatment and / or light treatment is usually performed in the air, but can also be performed in an inert gas atmosphere such as nitrogen, argon, or helium as necessary. The heat treatment and / or light treatment temperature includes the boiling point (vapor pressure) of the dispersion medium, the type and pressure of the atmospheric gas, the thermal behavior such as fine particle dispersibility and oxidation, the presence and amount of coating material, the substrate It is determined as appropriate in consideration of the heat-resistant temperature. For example, in order to remove the coating material made of organic matter, it is necessary to bake at about 300 ° C. In the case where a substrate such as plastic is used, it is preferably performed at room temperature or higher and 100 ° C. or lower.

  In this embodiment, in particular, the heat treatment is performed at 350 ° C. for about 60 minutes to sufficiently remove the dispersion medium and the like in the wiring 233 composed of the wiring pattern ink X1 and the wiring pattern ink X2. The bank B has an inorganic skeleton as a main component, and thus has high resistance to heat treatment, and is sufficient without causing inconvenience such as melting even with heat treatment under the above conditions. It will be resistant.

Through the above steps, the wiring 233 formed by stacking chromium and silver can be formed in the film pattern formation region 234 between the banks B on the substrate P.
The inks X1 and X2 may contain a material that develops conductivity by heat treatment or light treatment instead of the conductive fine particles, and the wiring 233 develops conductivity in the heat treatment / light treatment step. Good.

Electro-optical device
Next, a liquid crystal device will be described as an example of an electro-optical device in which the wiring pattern described above is used.
FIG. 8A is a plan view of the liquid crystal device viewed from the counter substrate side, and FIG. 8B is a cross-sectional view taken along the line HH ′ of FIG.
FIG. 9 is an equivalent circuit diagram of various elements and wirings in a plurality of pixels formed in a matrix in the image display region of the liquid crystal device.

  In FIG. 8, in the liquid crystal device 200 of this embodiment, a pair of TFT array substrate 210 and counter substrate 220 are bonded together by a sealing material 252 that is a photocurable sealing material, and is partitioned by this sealing material 252. Liquid crystal 250 is sealed and held in the region. The sealing material 252 is formed in a frame shape closed in a region within the substrate surface.

  A peripheral parting 253 made of a light-shielding material is formed in a region inside the region where the sealing material 252 is formed. A data line driving circuit 201 and a mounting terminal 202 are formed along one side of the TFT array substrate 210 in a region outside the sealing material 252, and the scanning line driving circuit 204 is formed along two sides adjacent to the one side. Is formed. On the remaining side of the TFT array substrate 210, a plurality of wirings 205 are provided for connecting the scanning line driving circuits 204 provided on both sides of the image display area. In addition, an inter-substrate conductive material 206 for providing electrical continuity between the TFT array substrate 210 and the counter substrate 220 is disposed at at least one corner of the counter substrate 220.

  Instead of forming the data line driving circuit 201 and the scanning line driving circuit 204 on the TFT array substrate 210, for example, a TAB (Tape Automated Bonding) substrate on which a driving LSI is mounted and a peripheral portion of the TFT array substrate 210 The terminal group formed in the above may be electrically and mechanically connected via an anisotropic conductive film. In the liquid crystal device 200, the type of liquid crystal 250 to be used, that is, an operation mode such as a TN (Twisted Nematic) mode, a C-TN method, a VA method, an IPS method, or a normally white mode / normally black mode. Depending on the case, a retardation plate, a polarizing plate, and the like are arranged in a predetermined direction, but the illustration is omitted here. In the case where the liquid crystal device 200 is configured for color display, for example, red (R), green (G), blue ( The color filter of B) is formed together with the protective film.

In the image display area of the liquid crystal device 200 having such a structure, as shown in FIG. 9, a plurality of pixels 200a are configured in a matrix, and each of these pixels 200a has a pixel switching area. A TFT (switching element) 30 is formed, and a data line 216 a for supplying pixel signals S 1, S 2,..., Sn is electrically connected to the source of the TFT 230. FIG. 9 shows an example of an active matrix substrate according to the present invention.
Pixel signals S1, S2,..., Sn to be written to the data line 216a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 216a. . Further, the scanning line 213a is electrically connected to the gate of the TFT 230, and the scanning signals G1, G2,..., Gm are applied to the scanning line 213a in a pulse sequential manner in this order at a predetermined timing. It is configured.

The pixel electrode 219 is electrically connected to the drain of the TFT 230, and the pixel signal S1, S2,..., Sn supplied from the data line 216a is supplied to each of the pixel signals S1, S2,. Write to the pixel at a predetermined timing. The pixel signals S1, S2,..., Sn written in the liquid crystal via the pixel electrode 219 in this way are held for a certain period with the counter electrode 221 of the counter substrate 220. In order to prevent the held pixel signals S1, S2,..., Sn from leaking, a storage capacitor 260 is added in parallel with the liquid crystal capacitor formed between the pixel electrode 219 and the counter electrode 221.
For example, the voltage of the pixel electrode 219 is held by the storage capacitor 260 for a time that is three orders of magnitude longer than the time when the source voltage is applied. Thereby, the charge retention characteristics are improved, and the liquid crystal device 200 with a high contrast ratio can be realized.

In addition to the liquid crystal device, the present invention can be applied to, for example, an organic EL (electroluminescence) display device.
The organic EL display device has a configuration in which a thin film containing a fluorescent inorganic and organic compound is sandwiched between a cathode and an anode, and excitons are obtained by injecting electrons and holes into the thin film to excite them. It is an element that generates (exciton) and emits light by utilizing light emission (fluorescence / phosphorescence) when the exciton is recombined.
Such an organic EL device is also included in the range of the electro-optical device, and according to the present invention, for example, an organic EL device including a plurality of functional wirings can be provided.

[Electronics]
Next, a specific example of an electronic apparatus provided with display means including the liquid crystal device 200 will be described.
FIGS. 10A to 10D illustrate examples of electronic devices including the liquid crystal device 200 described above.
FIG. 10A is a perspective view showing an example of a mobile phone. 10A, a mobile phone 1000 includes a display unit 1001 using the liquid crystal device 200 described above.
FIG. 10B is a perspective view illustrating an example of a wristwatch type electronic device. In FIG. 10B, a timepiece 1100 includes a display unit 1101 using the liquid crystal device 200 described above.
FIG. 10C is a perspective view showing an example of a portable information processing apparatus such as a word processor or a personal computer. 10C, the information processing apparatus 1200 includes an input unit 1202 such as a keyboard, a display unit 1206 using the above-described liquid crystal device 200, and an information processing apparatus body (housing) 1204.
FIG. 10D is a perspective view showing an example of a thin large-screen television. 10D, a thin large-screen TV 1300 includes a thin large-screen TV main body (housing) 1302, an audio output unit 1304 such as a speaker, and a display unit 1306 using the liquid crystal device 200 described above.

In the above embodiment, the droplet discharge device is embodied as an ink jet printer (recording device). However, the present invention is not limited to this, and liquid other than ink (a liquid material in which particles of a functional material are dispersed, a gel) Such a fluid body) can be embodied in a fluid ejecting apparatus that ejects or ejects the fluid.
For example, a liquid material injection device for injecting a liquid material in the form of dispersed or dissolved materials such as electrode materials and color materials used in the manufacture of liquid crystal displays, EL (electroluminescence) displays, and surface-emitting displays, and biochip manufacturing It may be a liquid ejecting apparatus for ejecting a bio-organic substance used in the above, or a liquid ejecting apparatus for ejecting a liquid as a sample used as a precision pipette.
In addition, transparent resin liquids such as UV curable resin to form liquid injection devices that pinpoint lubricant oil onto precision machines such as watches and cameras, and micro hemispherical lenses (optical lenses) used in optical communication elements. May be a liquid ejecting apparatus that ejects a liquid onto the substrate, a liquid ejecting apparatus that ejects an etching solution such as acid or alkali to etch the substrate, or a fluid ejecting apparatus that ejects gel. Furthermore, a toner jet recording apparatus that ejects a solid such as toner powder may be used.
The present invention can be applied to any one of these liquid ejecting apparatuses.

It is a schematic diagram which shows schematic structure of the droplet discharge apparatus which concerns on embodiment of this invention. It is sectional drawing explaining the structure of the droplet discharge head which concerns on embodiment of this invention. It is principal part sectional drawing of the same droplet discharge head. FIG. 4 is a cross-sectional view when the ink L is initially filled in the droplet discharge head. It is a figure which shows an example of the basic waveform of the drive signal supplied to the piezoelectric vibrator 138 with which the same droplet discharge head is provided. It is a figure which shows an example of the supply method of the drive signal supplied to the piezoelectric vibrator 138 with which the same droplet discharge head is provided. It is a figure explaining the wiring pattern formation method in order of a process. It is a figure which shows the structure of a liquid crystal device. It is an equivalent circuit diagram, such as wiring in the pixel display area of a liquid crystal device. It is a figure explaining the specific example of an electronic device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Droplet discharge apparatus (fluid ejecting apparatus), 34 ... Droplet discharge head (fluid ejecting head), 40 ... Control apparatus (fluid filling process part), 45 ... Ink supply container (fluid tank), 47 ... Cap part ( (Cap member), 121 ... filter, 122 ... ink introduction needle, 123 ... ink introduction passage, 125 ... case passage, 127 ... ink chamber, 129 ... connection passage, 132 '... communication groove, 133 ... ink introduction port, 138 ... Piezoelectric vibrator, 143a ... Nozzle opening surface, 144 ... Common ink chamber, 145 ... Ink supply port, 146 ... Pressure chamber, 147 ... Nozzle, L ... Ink (fluid), P ... Substrate, R ... Liquid flow path (fluid) Flow path), S ... space

Claims (10)

In a method of filling a fluid in the fluid channel, the filter including a foreign material in the fluid is removed from the fluid channel that guides the fluid to the nozzle opening surface of the fluid ejecting head.
A fluid filling method comprising applying high-frequency micro-vibration to the fluid when filling the fluid.   2. The fluid according to claim 1, wherein a negative pressure is generated in a sealed space formed by the cap member and the nozzle opening surface while closely contacting the cap member and the nozzle opening surface, and the fluid is filled. Fluid filling method.   The fluid filling method according to claim 1 or 2, wherein a positive pressure is applied to a fluid tank connected to the fluid flow path to fill the fluid.   The fluid filling method according to any one of claims 1 to 3, wherein the fluid is filled at a filling rate of 0.1 ml / sec or less.   5. The fluid filling method according to claim 1, wherein the high-frequency fine vibration is applied by a piezoelectric vibrator provided in the fluid ejecting head.   The fluid filling method according to any one of claims 1 to 5, wherein the high-frequency fine vibration is applied within a frequency range of 20 kHz to 200 kHz.   The fluid filling method according to any one of claims 1 to 6, wherein the high-frequency micro-vibration is applied by changing the frequency stepwise.   The fluid filling method according to claim 1, wherein the fluid contains a metal or a pigment. In a fluid ejecting apparatus including a filter that removes foreign matter in a fluid in a fluid flow path that guides fluid to a nozzle opening surface of a fluid ejecting head.
A fluid ejecting apparatus comprising a fluid filling processing unit that fills the fluid while applying high-frequency fine vibrations.   The fluid ejecting apparatus according to claim 9, wherein the fluid filling processing unit is applied by a piezoelectric vibrator included in the fluid ejecting head.

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