JP2008227118A5

JP2008227118A5 -

Info

Publication number: JP2008227118A5
Application number: JP2007062769A
Authority: JP
Filing date: 2007-03-13
Publication date: 2010-05-27
Anticipated expiration: 2027-03-13

Claims

A mounting device for mounting a ball on the plurality of electrodes of a workpiece having a plurality of electrodes on the surface,
Base and
A ball mounting mask holder for holding a ball mounting mask having a plurality of minute openings for mounting a ball on the workpiece in a first position with respect to the base;
A transfer stage capable of holding the workpiece and moving the workpiece to a predetermined position with respect to the base;
A first camera fixed to the base, capable of detecting a reference mark of the workpiece mounted on the transfer stage and recording the position of the workpiece relative to the transfer stage in a memory as a workpiece reference position; A first camera;
At least one of the workpieces facing the at least one small opening from above the ball mounting mask held by the ball mounting mask holder via at least one small opening of the ball mounting mask. A second camera capable of acquiring an electrode image;
A ball dispenser for filling a plurality of minute openings of the ball mounting mask from above the ball mounting mask held by the ball mounting mask holder;
And a control unit capable of controlling a destination of the transfer stage.

The control unit according to claim 1, wherein:
The workpiece is moved under the ball mounting mask held by the ball mounting mask holder so that the workpiece reference position is determined by the first position by the transfer stage, The workpiece reference position when at least one minute opening of the ball mounting mask and the at least one electrode opposed to the at least one minute opening are aligned via the second camera. A first function for obtaining and recording a second position relative to the base in the memory;
The workpiece is moved under the ball mounting mask held by the ball mounting mask holder by the transfer stage so that the workpiece reference position becomes the second position, and the ball dispenser And a second function of filling a plurality of micro openings in the ball mounting mask with the ball so that the ball is mounted on the plurality of electrodes of the workpiece.

The mounting apparatus according to claim 1, wherein the second camera is capable of detecting a reference mark of the ball mounting mask and recording the first position in the memory.

The second camera according to claim 1, wherein the second camera has at least two electrodes of the workpiece facing the at least two minute openings through the at least two minute openings of the ball mounting mask. An on-board device that can acquire images.

5. The mounting device according to claim 1, further comprising a dispenser moving mechanism that moves the ball dispenser, wherein the second camera is movable by the dispenser moving mechanism.

In any of claims 1 to 5,
A flux application mask holder for holding a flux application mask having a plurality of minute openings for applying flux to the workpiece in a third position with respect to the base;
At least one of the workpieces facing the at least one minute opening from above the flux application mask held by the flux application mask holder via at least one minute opening of the flux application mask. A third camera capable of acquiring an electrode image;
A flux application head for applying flux from above the flux application mask held by the flux application mask holder through a plurality of minute openings of the flux application mask;
The control unit is
Under the flux application mask held by the flux application mask holder, the workpiece is moved by the transfer stage so that the workpiece reference position is determined by the third position, The workpiece reference position when the at least one minute opening of the flux application mask and the at least one electrode facing the at least one minute opening are aligned via the third camera. A third function for obtaining and recording a fourth position relative to the base in the memory;
The workpiece is moved under the flux coating mask held by the flux coating mask holder so that the workpiece reference position becomes the fourth position by the transfer stage, and the flux coating mask is used. And a fourth function of applying a flux to the plurality of electrodes of the workpiece through the plurality of minute openings of the flux application mask by a head.

The mounting apparatus according to claim 6, further comprising a head moving mechanism that moves the flux application head, wherein the third camera is movable by the head moving mechanism.

A method of controlling a mounting device for mounting a ball on the plurality of electrodes of a workpiece having a plurality of electrodes on a surface by a control unit,
The mounting device is
Base and
A ball mounting mask holder for holding a ball mounting mask having a plurality of minute openings for mounting the ball on the workpiece against the base;
A transfer stage capable of holding the workpiece and moving the workpiece to a predetermined position with respect to the base;
A first camera fixed to the base, the first camera capable of detecting a reference mark of the workpiece mounted on the transfer stage;
At least one of the workpieces facing the at least one small opening from above the ball mounting mask held by the ball mounting mask holder via at least one small opening of the ball mounting mask. A second camera capable of acquiring an electrode image;
A ball dispenser for filling a plurality of minute openings of the ball mounting mask from above the ball mounting mask held by the ball mounting mask holder;
A control unit capable of controlling the destination of the transfer stage;
The method is
Detecting a reference mark of the ball mounting mask held by the ball mounting mask holder by the second camera, and recording a first position of the ball mounting mask with respect to the base in a memory; ,
The control unit moves the transfer stage below the first camera, detects a reference mark of the workpiece mounted on the transfer stage by the first camera, and stores the reference mark in the memory. Recording the position of the workpiece relative to the transfer stage as a workpiece reference position;
The workpiece is moved under the ball mounting mask held by the ball mounting mask holder so that the workpiece reference position is determined by the first position by the transfer stage, The workpiece reference position when at least one minute opening of the ball mounting mask and the at least one electrode opposed to the at least one minute opening are aligned via the second camera. Obtaining a second position relative to the base and recording the second position in the memory;
The workpiece is moved under the ball mounting mask held by the ball mounting mask holder by the transfer stage so that the workpiece reference position becomes the second position, and the ball dispenser Filling a plurality of micro openings in the ball mounting mask with a ball.

In claim 8,
Following the recording of the first position, performing a step including recording the preceding workpiece as the workpiece reference position, recording the second position, and filling the micro-aperture. ,
For the next workpiece, omitting recording the second position, recording as the workpiece reference position, and performing a step including filling the minute opening.