JP2008224142A - Valve control device for pulse tube refrigerator - Google Patents

Valve control device for pulse tube refrigerator Download PDF

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JP2008224142A
JP2008224142A JP2007063533A JP2007063533A JP2008224142A JP 2008224142 A JP2008224142 A JP 2008224142A JP 2007063533 A JP2007063533 A JP 2007063533A JP 2007063533 A JP2007063533 A JP 2007063533A JP 2008224142 A JP2008224142 A JP 2008224142A
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pulse tube
valve
electromagnetic valve
switching circuit
tube refrigerator
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JP5014843B2 (en
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Masaru Iwamatsu
勝 岩松
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Railway Technical Research Institute
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1411Pulse-tube cycles characterised by control details, e.g. tuning, phase shifting or general control
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00Gas cycle refrigeration machines
    • F25B2309/14Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1418Pulse-tube cycles with valves in gas supply and return lines

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  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a valve control device for a PWM control pulse tube refrigerator simple in constitution and smooth in the pressure change of gas in a pulse tube. <P>SOLUTION: In the valve control device for the pulse tube refrigerator, valves 3-6 for performing pressure control of gas in the pulse tube 2 are composed of electronically controlled solenoid valves based on PWM control to smoothen the pressure change of gas in the pulse tube. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、パルス管冷凍機に係り、特に、PWM制御パルス管冷凍機に関するものである。   The present invention relates to a pulse tube refrigerator, and more particularly to a PWM control pulse tube refrigerator.

図8は従来のパルス管冷凍機の模式図、図9はそのパルス管冷凍機の動作を示す図、図10は従来のパルス管冷凍機の出力波形を示す図である。   FIG. 8 is a schematic diagram of a conventional pulse tube refrigerator, FIG. 9 is a diagram illustrating the operation of the pulse tube refrigerator, and FIG. 10 is a diagram illustrating an output waveform of the conventional pulse tube refrigerator.

図8において、101は圧縮機、102は第1のバルブ(CH)、103は第2のバルブ(CL)、104は冷端熱交換器であり、この冷端熱交換器104は、蓄冷管105とパルス管106からなる。107は第3のバルブ(BH)、108は第4のバルブ(BL)、109は第3のバルブ107が接続されるアクティブバッファ、110は第4のバルブ108が接続されるアクティブバッファである。   In FIG. 8, 101 is a compressor, 102 is a first valve (CH), 103 is a second valve (CL), 104 is a cold end heat exchanger, and this cold end heat exchanger 104 is a cold storage tube. 105 and a pulse tube 106. 107 is a third valve (BH), 108 is a fourth valve (BL), 109 is an active buffer to which the third valve 107 is connected, and 110 is an active buffer to which the fourth valve 108 is connected.

このパルス管冷凍機の制御は、図9(a)に示すようなバルブシーケンスであり、冷端熱交換器104でのガス変位は図9(b)に示すように行われる。   The control of the pulse tube refrigerator is a valve sequence as shown in FIG. 9A, and the gas displacement in the cold end heat exchanger 104 is performed as shown in FIG. 9B.

パルス管冷凍機については、下記の非特許文献1,2に詳述されている。
「熱音響工学の基礎」,富永 昭著,内田老鶴国,pp.9−27 「低温工学の概論」,荻原 宏康 編者,東京電機大学出版局 pp.172−189
The pulse tube refrigerator is described in detail in Non-Patent Documents 1 and 2 below.
“Basics of Thermoacoustic Engineering”, Akira Tominaga, Utsuda Otsukuni, pp. 9-27 "Introduction to cryogenic engineering", Hiroyasu Sugawara, Editor, Tokyo Denki University Press pp. 172-189

しかしながら、従来のパルス管冷凍機においては、パルス管内のガスの変化は、図10に示すように、略台形状の変化であり、パルス管内のガスの圧力変化が滑らかではない。   However, in the conventional pulse tube refrigerator, the change in the gas in the pulse tube is a substantially trapezoidal change as shown in FIG. 10, and the pressure change in the gas in the pulse tube is not smooth.

また、圧力変化を滑らかにするために配置しているアクティブバッファやオリフィスは機器点数を増加させることになり、信頼性の低下を招くといった問題があった。   In addition, the active buffer and the orifice arranged for smoothing the pressure change increase the number of devices, and there is a problem that the reliability is lowered.

本発明は、上記状況に鑑みて、構成が簡便で、しかもパルス管内のガスの圧力変化が滑らかなパルス管冷凍機のバルブ制御装置を提供することを目的とする。   In view of the above situation, an object of the present invention is to provide a valve control device for a pulse tube refrigerator having a simple configuration and a smooth pressure change of gas in the pulse tube.

本発明は、上記目的を達成するために、
〔1〕パルス管冷凍機のバルブ制御装置において、パルス管内のガスの圧力制御を行うバルブをPWM制御による電子制御式電磁バルプとし、前記パルス管内のガスの圧力の変化を滑らかにすることを特徴とする。
In order to achieve the above object, the present invention provides
[1] In the valve control device of the pulse tube refrigerator, the valve for controlling the pressure of the gas in the pulse tube is an electronically controlled electromagnetic valve by PWM control, and the change in the pressure of the gas in the pulse tube is smoothed. And

〔2〕上記〔1〕記載のパルス管冷凍機のバルブ制御装置において、前記電子制御電磁バルプが2レベルスイッチング方式により駆動されることを特徴とする。   [2] The valve control device for a pulse tube refrigerator as described in [1] above, wherein the electronically controlled electromagnetic valve is driven by a two-level switching method.

〔3〕上記〔1〕記載のパルス管冷凍機のバルブ制御装置において、前記電子制御電磁バルプが3レベルスイッチング方式により駆動されることを特徴とする。   [3] In the valve control device for a pulse tube refrigerator as described in [1] above, the electronically controlled electromagnetic valve is driven by a three-level switching method.

本発明によれば、次のような効果を奏することができる。   According to the present invention, the following effects can be achieved.

(1)構成が簡便で、しかもパルス管内のガスの圧力変化を滑らかにすることができる。   (1) The configuration is simple and the pressure change of the gas in the pulse tube can be made smooth.

(2)電子制御式電磁バルブとしたことにより、バルブの高速動作を図ることができる。   (2) By using an electronically controlled electromagnetic valve, the valve can be operated at high speed.

(3)2レベルパルス管冷凍機において、バルブの開閉をPWM制御することにより、ガス圧力の変化を細やかに行い、圧力の時間変化を正弦波にすることができる。   (3) In the two-level pulse tube refrigerator, by performing PWM control of valve opening / closing, the gas pressure can be changed finely and the pressure change over time can be made a sine wave.

(4)さらに、3レベルパルス管冷凍機において、パルス管に加える圧力を3レベルにすることにより正弦波の高調波を抑えることができる。   (4) Further, in the three-level pulse tube refrigerator, the harmonics of the sine wave can be suppressed by setting the pressure applied to the pulse tube to three levels.

本発明のパルス管冷凍機のバルブ制御装置は、パルス管内のガスの圧力制御を行うバルブをPWM制御による電子制御式電磁バルプとし、パルス管内のガスの圧力の変化を滑らかにする。   The valve control device for a pulse tube refrigerator of the present invention uses a valve for performing pressure control of gas in a pulse tube as an electronically controlled electromagnetic valve by PWM control, and smoothes the change in gas pressure in the pulse tube.

以下、本発明の実施の形態について詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail.

図1は本発明の第1実施例を示すPWM制御2レベルパルス管冷凍機の模式図、図2はその2レベルパルス管冷凍機のバルブを制御する2レベルスイッチング回路を示す図、図3はそのPWM制御2レベルパルス管のバルブの制御と出力波形を示す図である。   FIG. 1 is a schematic diagram of a PWM control two-level pulse tube refrigerator showing a first embodiment of the present invention, FIG. 2 is a diagram showing a two-level switching circuit for controlling the valves of the two-level pulse tube refrigerator, and FIG. It is a figure which shows the control and output waveform of the valve | bulb of the PWM control 2 level pulse tube.

これらの図において、1は圧縮機、2はパルス管、3は第1の電磁バルブ、3Aは第1の電磁バルブ3を制御する第1のスイッチング回路(図7参照)、4は第2の電磁バルブ、4Aは第2の電磁バルブ4を制御する第2のスイッチング回路(図7参照)、5は第3の電磁バルブ、5Aは第3の電磁バルブ5を制御する第3のスイッチング回路(図7参照)、6は第4の電磁バルブ、6Aは第4の電磁バルブ6を制御する第4のスイッチング回路(図7参照)で、7は第1のスイッチング回路3Aと、第2のスイッチング回路4Aと、第3のスイッチング回路5Aと第4のスイッチング回路6Aとをそれぞれ制御する、PWM(パルス幅変調)信号を出力し、そのPWM信号の分配を行う上位電子式コントローラである。なお、PWM信号の生成は、例えば、単相電圧形電流制御方式PMWインバータ(例えば、「制御用アクチュエータ」,平成59年10月25日初版,発行所産業図書株式会社,pp.176−181)等に開示されている。   In these drawings, 1 is a compressor, 2 is a pulse tube, 3 is a first electromagnetic valve, 3A is a first switching circuit for controlling the first electromagnetic valve 3 (see FIG. 7), and 4 is a second electromagnetic valve. The electromagnetic valve 4A is a second switching circuit for controlling the second electromagnetic valve 4 (see FIG. 7), 5 is a third electromagnetic valve, and 5A is a third switching circuit for controlling the third electromagnetic valve 5 (see FIG. 7). 7), 6 is a fourth electromagnetic valve, 6A is a fourth switching circuit (see FIG. 7) for controlling the fourth electromagnetic valve 6, and 7 is a first switching circuit 3A and a second switching circuit. This is a higher-level electronic controller that outputs a PWM (pulse width modulation) signal for controlling the circuit 4A, the third switching circuit 5A, and the fourth switching circuit 6A, and distributes the PWM signal. The PWM signal is generated, for example, by a single-phase voltage-type current control PMW inverter (for example, “control actuator”, first edition on October 25, 59, Issho Sangyosho Co., Ltd., pp. 176-181). Etc. are disclosed.

これらの第1のバルブ〜第4のバルブ3〜6はそれぞれ、図2に示すような、2レベルスイッチング回路方式で駆動される。特に、パルス管2内のガスの圧力変化を滑らかにするために、図3(a)に示すような、第1の電磁バルブ3、第2の電磁バルブ4、第3の電磁バルブ5および第4の電磁バルブ6のそれぞれのPWM制御を行う。そのPWM制御により、図3(b)に示すような、2レベルパルス管内の圧力波形を生成させることができる。   Each of the first to fourth valves 3 to 6 is driven by a two-level switching circuit system as shown in FIG. In particular, in order to make the pressure change of the gas in the pulse tube 2 smooth, the first electromagnetic valve 3, the second electromagnetic valve 4, the third electromagnetic valve 5, and the second electromagnetic valve as shown in FIG. PWM control of each of the four electromagnetic valves 6 is performed. By the PWM control, a pressure waveform in the two-level pulse tube as shown in FIG. 3B can be generated.

図4は本発明の第2実施例を示すPWM制御3レベルパルス管冷凍機の模式図、図5はその3レベルパルス管冷凍機のバルブを制御する3レベルスイッチング回路を示す図、図6はそのPWM制御3レベルパルス管の制御における出力波形を示す図である。   4 is a schematic diagram of a PWM-controlled three-level pulse tube refrigerator showing a second embodiment of the present invention, FIG. 5 is a diagram showing a three-level switching circuit for controlling the valves of the three-level pulse tube refrigerator, and FIG. It is a figure which shows the output waveform in control of the PWM control 3 level pulse tube.

これらの図において、11,12は圧縮機、13はパルス管、14は第1の電磁バルブ、14Aは第1の電磁バルブ14を制御する第1のスイッチング回路、15は第2の電磁バルブ、15Aは第2の電磁バルブ15を制御する第2のスイッチング回路、16は第3の電磁バルブ、16Aは第3の電磁バルブ16を制御する第3のスイッチング回路、17は第4の電磁バルブ、17Aは第4の電磁バルブ17を制御する第4のスイッチング回路、18は第5の電磁バルブ、18Aは第5の電磁バルブ18を制御する第5のスイッチング回路、19は第6の電磁バルブ、19Aは第6の電磁バルブ19を制御する第6のスイッチング回路、20は第7の電磁バルブ、20Aは第7の電磁バルブ20を制御する第7のスイッチング回路、21は第8の電磁バルブ、21Aは第8の電磁バルブ21を制御する第8のスイッチング回路、22は第1のスイッチング回路14Aと第2のスイッチング回路15Aと第3のスイッチング回路16Aと第4のスイッチング回路17Aと第5のスイッチング回路18Aと第6のスイッチング回路19Aと第7のスイッチング回路20Aと第8のスイッチング回路21Aとをそれぞれ制御する上位電子式コントローラ、23は第1のバッファタンク、24は第2のバッファタンク、25は第1の一方向バルブ、26は第2の一方向バルブ、27は第3の一方向バルブ、28は第4の一方向バルブである。   In these drawings, 11 and 12 are compressors, 13 is a pulse tube, 14 is a first electromagnetic valve, 14A is a first switching circuit for controlling the first electromagnetic valve 14, 15 is a second electromagnetic valve, 15A is a second switching circuit that controls the second electromagnetic valve 15, 16 is a third electromagnetic valve, 16A is a third switching circuit that controls the third electromagnetic valve 16, and 17 is a fourth electromagnetic valve. 17A is a fourth switching circuit for controlling the fourth electromagnetic valve 17, 18 is a fifth electromagnetic valve, 18A is a fifth switching circuit for controlling the fifth electromagnetic valve 18, and 19 is a sixth electromagnetic valve. 19A is a sixth switching circuit for controlling the sixth electromagnetic valve 19, 20 is a seventh electromagnetic valve, 20A is a seventh switching circuit for controlling the seventh electromagnetic valve 20, and 21 is a first switching circuit. The electromagnetic valve 21A is an eighth switching circuit that controls the eighth electromagnetic valve 21, and 22 is a first switching circuit 14A, a second switching circuit 15A, a third switching circuit 16A, and a fourth switching circuit 17A. , The fifth switching circuit 18A, the sixth switching circuit 19A, the seventh switching circuit 20A, and the eighth switching circuit 21A, respectively, a host electronic controller, 23 is a first buffer tank, and 24 is a second , 25 is a first one-way valve, 26 is a second one-way valve, 27 is a third one-way valve, and 28 is a fourth one-way valve.

これらの第1の電磁バルブ14〜第8の電磁バルブ21はそれぞれ、図5に示すような、3レベルスイッチング回路方式で駆動する。特に、パルス管13内のガスの圧力変化を滑らかにするために、上位電子式コントローラ22との協働により、図6(a)に示すようにPWM制御を行うようにすることができる。そのPWM制御により、第1の電磁バルブ14〜第8の電磁バルブ21の制御が行われ、図6(b)に示すようなPWM制御3レベルパルス管内の圧力波形を得ることができる。   These first to eighth electromagnetic valves 14 to 21 are each driven by a three-level switching circuit system as shown in FIG. In particular, in order to smooth the pressure change of the gas in the pulse tube 13, it is possible to perform PWM control as shown in FIG. By the PWM control, the first electromagnetic valve 14 to the eighth electromagnetic valve 21 are controlled, and a pressure waveform in the PWM control 3-level pulse tube as shown in FIG. 6B can be obtained.

図7は本発明の実施例を示すバルブのスイッチング回路図である。   FIG. 7 is a valve switching circuit diagram showing an embodiment of the present invention.

図7において、31は電源、32は上位電子式コントローラ7,22によって制御されるSCR(スイッチ)、33はバルブを制御するコイルである。   In FIG. 7, 31 is a power source, 32 is an SCR (switch) controlled by the host electronic controllers 7 and 22, and 33 is a coil for controlling the valve.

このように構成したので、電磁バルブを制御するためのコイルは、図2及び図5に示す動作を行わせることができる。また、上位電子式コントローラとの協働により、PWM制御を行わせ、図3(a)又は図6(a)に示すようなパルスをバルブへ供給し、図3(b)又は図6(b)に示すようなパルス管内の出力波形を得ることができる。   Since it comprised in this way, the coil for controlling an electromagnetic valve can perform the operation | movement shown in FIG.2 and FIG.5. Further, in cooperation with the host electronic controller, PWM control is performed, and a pulse as shown in FIG. 3A or 6A is supplied to the valve, and FIG. 3B or FIG. The output waveform in the pulse tube as shown in FIG.

本発明においては、バルブを電子制御式電磁バルブとしたことにより、バルブの高速に動作させることができる。   In the present invention, since the valve is an electronically controlled electromagnetic valve, the valve can be operated at a high speed.

なお、本発明は上記実施例に限定されるものではなく、本発明の趣旨に基づき種々の変形が可能であり、これらを本発明の範囲から排除するものではない。   In addition, this invention is not limited to the said Example, Based on the meaning of this invention, a various deformation | transformation is possible and these are not excluded from the scope of the present invention.

本発明のパルス管冷凍機のバルブ制御装置は、滑らかなガスの圧力変化を実施できるパルス管冷凍機のバルブ制御装置として利用可能である。   The valve control device for a pulse tube refrigerator of the present invention can be used as a valve control device for a pulse tube refrigerator capable of performing a smooth gas pressure change.

本発明の第1実施例を示すPWM制御2レベルパルス管冷凍機の模式図である。It is a schematic diagram of the PWM control 2 level pulse tube refrigerator which shows 1st Example of this invention. 本発明の第1実施例を示す2レベルパルス管冷凍機のバルブを制御する2レベルスイッチング回路を示す図である。It is a figure which shows the 2 level switching circuit which controls the valve | bulb of the 2 level pulse tube refrigerator which shows 1st Example of this invention. 本発明の第1実施例を示す2レベルパルス管冷凍機のPWM制御2レベルパルス管のバルブの制御及びパルス管冷凍機の出力波形を示す図である。It is a figure which shows the control of the valve | bulb of 2 level pulse tube refrigerator of the 2 level pulse tube refrigerator which shows 1st Example of this invention, and the output waveform of a pulse tube refrigerator. 本発明の第2実施例を示すPWM制御3レベルパルス管冷凍機の模式図である。It is a schematic diagram of the PWM control 3 level pulse tube refrigerator which shows 2nd Example of this invention. 本発明の第2実施例を示すPWM制御3レベルパルス管冷凍機の3レベルパルス管冷凍機のバルブを制御する3レベルスイッチング回路を示す図である。It is a figure which shows the 3 level switching circuit which controls the valve | bulb of the 3 level pulse tube refrigerator of the PWM control 3 level pulse tube refrigerator which shows 2nd Example of this invention. 本発明の第2実施例を示す3レベルパルス管冷凍機のPWM制御3レベルパルス管のバルブの制御及びパルス管冷凍機の出力波形を示す図である。It is a figure which shows the control of the valve | bulb of the 3-level pulse tube refrigerator of the 3 level pulse tube refrigerator which shows 2nd Example of this invention, and the output waveform of a pulse tube refrigerator. 本発明の実施例を示すバルブのスイッチング回路図である。It is a switching circuit diagram of a valve showing an example of the present invention. 従来のパルス管冷凍機の模式図である。It is a schematic diagram of the conventional pulse tube refrigerator. 従来のパルス管冷凍機の動作を示す図である。It is a figure which shows operation | movement of the conventional pulse tube refrigerator. 従来のパルス管冷凍機の出力波形を示す図である。It is a figure which shows the output waveform of the conventional pulse tube refrigerator.

符号の説明Explanation of symbols

1 圧縮機
2 パルス管
3,14 第1の電磁バルブ
3A,14A 第1の電磁バルブを制御する第1のスイッチング回路
4,15 第2の電磁バルブ
4A,15A 第2の電磁バルブを制御する第2のスイッチング回路
5,16 第3の電磁バルブ
5A,16A 第3の電磁バルブを制御する第3のスイッチング回路
6,17 第4の電磁バルブ
6A,17A 第4の電磁バルブを制御する第4のスイッチング回路
7,22 上位電子式コントローラ
11,12 圧縮機
13 パルス管
18 第5の電磁バルブ
18A 第5の電磁バルブを制御する第5のスイッチング回路
19 第6の電磁バルブ
19A 第6の電磁バルブを制御する第6のスイッチング回路
20 第7の電磁バルブ
20A 第7の電磁バルブを制御する第7のスイッチング回路
21 第8の電磁バルブ
21A 第8の電磁バルブを制御する第8のスイッチング回路
23 第1のバッファタンク
24 第2のバッファタンク
25 第1の一方向バルブ
26 第2の一方向バルブ
27 第3の一方向バルブ
28 第4の一方向バルブ
31 電源
32 SCR(スイッチ)
33 バルブを制御するコイル
DESCRIPTION OF SYMBOLS 1 Compressor 2 Pulse tube 3,14 1st solenoid valve 3A, 14A 1st switching circuit which controls 1st solenoid valve 4,15 2nd solenoid valve 4A, 15A 2nd solenoid valve which controls 2nd solenoid valve 2 switching circuit 5,16 3rd electromagnetic valve 5A, 16A 3rd switching circuit for controlling the 3rd electromagnetic valve 6,17 4th electromagnetic valve 6A, 17A 4th for controlling the 4th electromagnetic valve Switching circuit 7, 22 Host electronic controller 11, 12 Compressor 13 Pulse tube 18 Fifth electromagnetic valve 18A Fifth switching circuit for controlling fifth electromagnetic valve 19 Sixth electromagnetic valve 19A 6th switching circuit to control 20 7th solenoid valve 20A 7th switching circuit to control 7th solenoid valve 21 1st Electromagnetic valve 21A Eighth switching circuit for controlling the eighth electromagnetic valve 23 First buffer tank 24 Second buffer tank 25 First one-way valve 26 Second one-way valve 27 Third one-way valve 28 Fourth one-way valve 31 Power supply 32 SCR (switch)
33 Coil that controls the valve

Claims (3)

パルス管内のガスの圧力制御を行うバルブをPWM制御による電子制御式電磁バルプとし、前記パルス管内のガスの圧力の変化を滑らかにすることを特徴とするパルス管冷凍機のバルブ制御装置。   A valve control device for a pulse tube refrigerator, wherein a valve for controlling the pressure of the gas in the pulse tube is an electronically controlled electromagnetic valve by PWM control, and the change in the pressure of the gas in the pulse tube is made smooth. 請求項1記載のパルス管冷凍機のバルブ制御装置において、前記電子制御電磁バルプが2レベルスイッチング方式により駆動されることを特徴とするパルス管冷凍機のバルブ制御装置。   2. The valve control device for a pulse tube refrigerator according to claim 1, wherein the electronically controlled electromagnetic valve is driven by a two-level switching method. 請求項1記載のパルス管冷凍機のバルブ制御装置において、前記電子制御式電磁バルプが3レベルスイッチング方式により駆動されることを特徴とするパルス管冷凍機のバルブ制御装置。   2. The valve control device for a pulse tube refrigerator according to claim 1, wherein the electronically controlled electromagnetic valve is driven by a three-level switching method.
JP2007063533A 2007-03-13 2007-03-13 Pulse control unit for pulse tube refrigerator Expired - Fee Related JP5014843B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8516833B2 (en) 2009-07-03 2013-08-27 Sumitomo Heavy Industries, Ltd. 4-valve pulse tube cryocooler

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JPH0232945Y2 (en) * 1985-05-22 1990-09-05
JPH08271075A (en) * 1995-03-30 1996-10-18 Aisin Seiki Co Ltd Regenerative refrigerator
JP2000146334A (en) * 1998-10-30 2000-05-26 Aisin Seiki Co Ltd Gm type double inlet pulse tube refrigerator
JP2000213820A (en) * 1999-01-27 2000-08-02 Aisin Seiki Co Ltd Pulse pipe refrigerator
JP2000283580A (en) * 1999-03-30 2000-10-13 Aisin Seiki Co Ltd Pulse tube refrigerating machine
JP2003169480A (en) * 2001-11-30 2003-06-13 Toshiba Corp Control apparatus for neutral point clamp system power converter
JP2005214302A (en) * 2004-01-29 2005-08-11 Mitsubishi Electric Corp Valve control device
JP2006064075A (en) * 2004-08-26 2006-03-09 Inax Corp Driving circuit of continuous electrifying solenoid valve

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Publication number Priority date Publication date Assignee Title
JPH0232945Y2 (en) * 1985-05-22 1990-09-05
JPH08271075A (en) * 1995-03-30 1996-10-18 Aisin Seiki Co Ltd Regenerative refrigerator
JP2000146334A (en) * 1998-10-30 2000-05-26 Aisin Seiki Co Ltd Gm type double inlet pulse tube refrigerator
JP2000213820A (en) * 1999-01-27 2000-08-02 Aisin Seiki Co Ltd Pulse pipe refrigerator
JP2000283580A (en) * 1999-03-30 2000-10-13 Aisin Seiki Co Ltd Pulse tube refrigerating machine
JP2003169480A (en) * 2001-11-30 2003-06-13 Toshiba Corp Control apparatus for neutral point clamp system power converter
JP2005214302A (en) * 2004-01-29 2005-08-11 Mitsubishi Electric Corp Valve control device
JP2006064075A (en) * 2004-08-26 2006-03-09 Inax Corp Driving circuit of continuous electrifying solenoid valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8516833B2 (en) 2009-07-03 2013-08-27 Sumitomo Heavy Industries, Ltd. 4-valve pulse tube cryocooler

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