JP2008215429A - Magnetic power transmission device - Google Patents

Magnetic power transmission device Download PDF

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JP2008215429A
JP2008215429A JP2007051296A JP2007051296A JP2008215429A JP 2008215429 A JP2008215429 A JP 2008215429A JP 2007051296 A JP2007051296 A JP 2007051296A JP 2007051296 A JP2007051296 A JP 2007051296A JP 2008215429 A JP2008215429 A JP 2008215429A
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shaft
magnet body
base member
shaped member
magnet
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JP4870595B2 (en
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Kingo Sotani
欽吾 操谷
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SHOEI INDUSTRIAL
SHOEI KOKI KK
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SHOEI INDUSTRIAL
SHOEI KOKI KK
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce weight and manufacturing cost, even when a desired moving distance is large. <P>SOLUTION: A magnet body 33 of a base member 30 is constituted so as to have the predetermined reference length X along the axis C of a shaft-like member 20. A magnet body 22 of the shaft-like member 20 has a pair of side part magnetic bodies 22 mutually adjacent by sandwiching at least an optional central magnet body 22. When the shaft-like member 20 and the base member 30 relatively move in the axial direction of the shaft-like member 20, an end surface 22a positioned on one end part side of the shaft-like member 20 on one side part magnet body 22, deviates from an area opposed to the magnet body 33 of the base member 30, and at the same time, an end surface 22a positioned on one end part side of the shaft-like member 20 in the other side part magnetic body 22, is arranged at an equal interval by securing a predetermined clearance between mutual ones in a mode of entering the area opposed to the magnet body 33 of the base member 30. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、軸状部材の磁石体とベース部材の磁石体との間の磁力により、軸状部材の回転移動とベース部材の往復移動との間において動力の伝達を行う磁気式動力伝達装置に関するものである。   The present invention relates to a magnetic power transmission device that transmits power between the rotational movement of a shaft-like member and the reciprocation of a base member by the magnetic force between the magnet body of the shaft-like member and the magnet body of the base member. Is.

この種の磁気式動力伝達装置としては、例えば特許文献1に記載されたものがある。この特許文献1においては、自身の軸心回りに回転可能に配設した軸状部材と、軸状部材の軸心方向に沿って往復移動可能、かつ軸状部材の軸心回りには回転が規制された状態で軸状部材に貫挿されたベース部材とを備え、これら軸状部材とベース部材との間において動力を伝達するもので、軸状部材の外周面及びベース部材の内周面にそれぞれ互いに対向する態様で螺旋状の永久磁石が同一のピッチで設けられている。軸状部材の永久磁石とベース部材の永久磁石とは、互いに磁極が異なるものであり、相互間の磁力によって吸引力が作用している。   An example of this type of magnetic power transmission device is disclosed in Patent Document 1. In this Patent Document 1, a shaft-like member disposed so as to be rotatable about its own axis, reciprocating along the axis of the shaft-like member, and rotating around the axis of the shaft-like member. A base member that is inserted into the shaft-shaped member in a restricted state, and transmits power between the shaft-shaped member and the base member. The outer peripheral surface of the shaft-shaped member and the inner peripheral surface of the base member The spiral permanent magnets are provided at the same pitch in such a manner as to face each other. The permanent magnet of the shaft-like member and the permanent magnet of the base member have different magnetic poles, and an attractive force acts by the magnetic force between them.

この磁気式動力伝達装置では、例えば電動モータ等の駆動源によって軸状部材をその軸心回りに回転させると、ベース部材の永久磁石に対して軸状部材の永久磁石が相対的に螺進するため、互いの吸引力により永久磁石の螺進方向に沿ってベース部材が一方方向へ移動することになる。軸状部材の回転方向を変更すれば、螺進方向が逆向きとなるため、軸状部材に対するベース部材の移動方向も逆となる。   In this magnetic power transmission device, for example, when the shaft-shaped member is rotated around its axis by a drive source such as an electric motor, the permanent magnet of the shaft-shaped member is rotated relative to the permanent magnet of the base member. Therefore, the base member moves in one direction along the screwing direction of the permanent magnet by the mutual attractive force. If the rotation direction of the shaft-shaped member is changed, the screwing direction is reversed, so that the movement direction of the base member with respect to the shaft-shaped member is also reversed.

この種の磁気式動力伝達装置によれば、軸状部材とベース部材とが直接接触していないため、動作中の騒音がきわめて小さい、両者が摩耗しない、過大な入力があった場合にも損傷を来す虞れがない、等々の利点がある。   According to this type of magnetic power transmission device, since the shaft member and the base member are not in direct contact with each other, the noise during operation is extremely low, both do not wear, and damage occurs even when there is excessive input. There are advantages such as no fear of coming.

特許第2777131号公報Japanese Patent No. 2777131

ところで、この種の磁気式動力伝達装置では、少なくとも軸状部材、もしくはベース部材の一方が、所望とする移動距離よりも十分な長さを有している必要がある。例えば、特許文献1に記載されたものにあっては、ベース部材に対して軸状部材の全長が十分に大きく構成されており、この軸状部材に沿ってベース部材を移動させることにより、所望の移動距離を得るようにしている。   By the way, in this type of magnetic power transmission device, at least one of the shaft-like member or the base member needs to have a length that is sufficiently longer than a desired movement distance. For example, in what is described in Patent Document 1, the total length of the shaft-shaped member is configured to be sufficiently large with respect to the base member, and by moving the base member along this shaft-shaped member, a desired value can be obtained. Trying to get the distance traveled.

しかしながら、特許文献1に記載の構成において、軸状部材の全長に亘ってベース部材を移動させるには、軸状部材のすべてに永久磁石を構成しなければならず、製造コストを考慮した場合、必ずしも好ましいとはいえない。また、軸状部材の全長に亘って永久磁石を構成したものにあっては、その重量もきわめて大きなものとならざるを得えない。   However, in the configuration described in Patent Document 1, in order to move the base member over the entire length of the shaft-shaped member, permanent magnets must be configured on all of the shaft-shaped members, and when manufacturing costs are considered, It is not necessarily preferable. In addition, in the case where the permanent magnet is constituted over the entire length of the shaft-shaped member, the weight thereof must be extremely large.

本発明は、上記実情に鑑みて、所望とする移動距離が大きい場合にも軽量化及び製造コストの低減を図ることのできる磁気式動力伝達装置を提供することを目的とする。   In view of the above circumstances, an object of the present invention is to provide a magnetic power transmission device capable of reducing the weight and manufacturing cost even when a desired moving distance is large.

上記の目的を達成するために、本発明の請求項1に係る磁気式動力伝達装置は、外周面に自身の軸心を中心として永久磁石を螺旋状に構成した磁石体を備え、自身の軸心回りに回転可能に配設した軸状部材と、軸状部材の外周面に対向する対向部分に軸状部材の軸心方向に沿って複数の永久磁石を並設した磁石体を備え、軸状部材の軸心方向に沿って直線状に往復移動可能に配設したベース部材とを備え、これら軸状部材の磁石体とベース部材の磁石体との間の磁力により、軸状部材の回転移動とベース部材の往復移動との間において動力の伝達を行う磁気式動力伝達装置であって、前記軸状部材の磁石体及び前記ベース部材の磁石体のいずれか一方は、軸状部材の軸心に沿って所定の基準長さを有するように構成したものであり、前記軸状部材の磁石体及び前記ベース部材の磁石体のいずれか他方は、少なくとも任意の中央磁石体を挟んで互いに隣接する一対の側部磁石体を備え、軸状部材とベース部材とが軸状部材の軸心方向に沿って相対的に移動した場合に一方の側部磁石体において軸状部材の一端部側に位置する端面部がベース部材の磁石体に対向する領域から逸脱すると同時に他方の側部磁石体において軸状部材の一端部側に位置する端面部がベース部材の磁石体に対向する領域に進入する態様で互いの間に所定の間隙を確保して等間隔に配設したものであることを特徴とする。   In order to achieve the above object, a magnetic power transmission device according to claim 1 of the present invention is provided with a magnet body in which a permanent magnet is formed in a spiral shape around its own axis on the outer peripheral surface. A shaft-shaped member disposed rotatably around the center, and a magnet body in which a plurality of permanent magnets are arranged in parallel along the axial direction of the shaft-shaped member at a facing portion facing the outer peripheral surface of the shaft-shaped member. And a base member arranged so as to be able to reciprocate linearly along the axial direction of the shaft-shaped member, and rotation of the shaft-shaped member by the magnetic force between the magnet body of the shaft-shaped member and the magnet body of the base member A magnetic power transmission device for transmitting power between movement and reciprocation of a base member, wherein one of the magnet body of the shaft member and the magnet body of the base member is a shaft of the shaft member It is configured to have a predetermined reference length along the center, and the shaft shape The other of the magnet body of the material and the magnet body of the base member includes a pair of side magnet bodies adjacent to each other with at least an arbitrary central magnet body, and the shaft-shaped member and the base member are the shaft-shaped member. When one side magnet body moves relatively along the axial direction, an end surface portion located on one end side of the shaft-like member deviates from a region facing the magnet body of the base member and at the same time the other side portion. In the magnet body, the end face portion located on one end side of the shaft-like member enters the region facing the magnet body of the base member, and a predetermined gap is secured between them and arranged at equal intervals. It is characterized by that.

また、本発明の請求項2に係る磁気式動力伝達装置は、上述した請求項1において、ベース部材に基準長さの磁石体を設ける一方、軸状部材に複数の磁石体を等間隔に配設したことを特徴とする。   A magnetic power transmission device according to a second aspect of the present invention is the magnetic power transmission device according to the first aspect, wherein the base member is provided with a magnet body having a reference length, and the shaft-like member is provided with a plurality of magnet bodies at equal intervals. It was set up.

また、本発明の請求項3に係る磁気式動力伝達装置は、上述した請求項1において、前記ベース部材に構成した磁石体は、前記軸状部材の軸心を中心とした半円筒状の凹面を有することを特徴とする。   According to a third aspect of the present invention, there is provided the magnetic power transmission device according to the first aspect, wherein the magnet body formed on the base member has a semi-cylindrical concave surface centered on the axis of the shaft-shaped member. It is characterized by having.

本発明によれば、軸状部材及びベース部材のいずれか一方に設けた基準長さの磁石体に対して、他方の磁石体が常に2個対向する態様で互いの間に間隙を確保するようにしているため、他方の磁石体の数を可及的に減少させた上で両者の間に脱調を招来することなく動力を確実に伝達することが可能となる。これにより、所望とする移動距離が大きい場合にも、軽量化及び製造コストの低減を図ることができるようになる。   According to the present invention, with respect to the magnet body of the reference length provided on one of the shaft-like member and the base member, a gap is secured between each other in such a manner that the other magnet body always faces two. As a result, the number of the other magnet bodies can be reduced as much as possible, and power can be reliably transmitted without causing step-out between the two. As a result, even when a desired moving distance is large, it is possible to reduce the weight and reduce the manufacturing cost.

以下に添付図面を参照して、本発明に係る磁気式動力伝達装置の好適な実施の形態を詳細に説明する。   Exemplary embodiments of a magnetic power transmission device according to the present invention will be explained below in detail with reference to the accompanying drawings.

図1〜図3は、本発明に係る磁気式動力伝達装置を適用した磁気式アクチュエータを示したものである。ここで例示する磁気式アクチュエータは、例えば工作機械において被加工物であるワークを保持するワークテーブルを工具に対して位置決めするための駆動源として適用されるもので、アクチュエータ本体10を備えている。アクチュエータ本体10は、一対の軸受板11と、これら軸受板11の間に架け渡した一対の側板12とを備えて直方体状に構成したものである。軸受板11は、それぞれが矩形状を成す平板状部材であり、互いに平行となるように設けてある。側板12は、図2において軸受板11の左右に位置する縁部から互いに平行となるように延在したものである。   1 to 3 show a magnetic actuator to which a magnetic power transmission device according to the present invention is applied. The magnetic actuator illustrated here is applied as a drive source for positioning a work table that holds a work, which is a workpiece, in a machine tool, for example, with respect to a tool, and includes an actuator body 10. The actuator body 10 includes a pair of bearing plates 11 and a pair of side plates 12 spanned between the bearing plates 11 and is configured in a rectangular parallelepiped shape. The bearing plates 11 are flat plate members each having a rectangular shape, and are provided so as to be parallel to each other. The side plates 12 extend so as to be parallel to each other from edges located on the left and right sides of the bearing plate 11 in FIG.

また、この磁気式アクチュエータは、図1〜図3に示すように、軸状部材20及びガイドレール部材13を備えている。   Moreover, this magnetic actuator is provided with the shaft-shaped member 20 and the guide rail member 13 as shown in FIGS.

軸状部材20は、一対の軸受板11の相互間距離よりも大きな全長を有した円柱状を成すもので、個々の端部が軸受板11の中心部を貫通し、かつ自身の軸心回りに回転可能となる態様で軸受板11の間に架設してある。   The shaft-like member 20 has a columnar shape having an overall length larger than the distance between the pair of bearing plates 11, and each end portion penetrates the center portion of the bearing plate 11 and has its own axis. It is constructed between the bearing plates 11 in such a manner that it can rotate.

この軸状部材20には、複数の太径部21が設けてある。太径部21は、軸状部材20の軸心Cを中心として径外方向に膨出した円柱状部分であり、軸状部材20の軸心方向に沿って互いに等間隔となる位置に設けてある。   The shaft-like member 20 is provided with a plurality of large diameter portions 21. The large-diameter portion 21 is a cylindrical portion that bulges radially outward about the axis C of the shaft-shaped member 20, and is provided at positions that are equidistant from each other along the axial direction of the shaft-shaped member 20. is there.

ガイドレール部材13は、一対の軸受板11の間に架け渡した唯一の平板状部材であり、図2において軸受板11の下方に位置する縁部の間に設けてある。図1〜図3からも明らかなように、ガイドレール部材13は、一対の側板12の相互間隔よりも小さい幅に構成してあり、各側板12との間にそれぞれ間隙を確保し、かつ軸状部材20の軸心方向に沿う態様で延設してある。   The guide rail member 13 is the only flat plate member that spans between the pair of bearing plates 11, and is provided between the edges located below the bearing plate 11 in FIG. As is clear from FIGS. 1 to 3, the guide rail member 13 is configured to have a width smaller than the distance between the pair of side plates 12, and a gap is secured between each side plate 12 and the shaft. It extends in a mode along the axial direction of the shaped member 20.

このガイドレール部材13には、図1〜図3に示すように、一対の側板12の間となる部位にベース部材30が配設してある。ベース部材30は、スライドベース31及び一対の支持プレート32を備えて構成したものである。   As shown in FIGS. 1 to 3, the guide rail member 13 is provided with a base member 30 at a portion between the pair of side plates 12. The base member 30 includes a slide base 31 and a pair of support plates 32.

スライドベース31は、軸状部材20の軸心Cに直交する方向の幅がガイドレール部材13よりも大きく、かつ軸状部材20の軸心方向に沿った長さがアクチュエータ本体10の側板12よりも小さく構成した平板状部材であり、その外表面に対となるレールガイド31aを備えている。レールガイド31aは、互いの間にガイドレール部材13を嵌合することのできる間隙を確保した状態でスライドベース31から突設したものである。このスライドベース31は、対を成すレールガイド31aの間にガイドレール部材13を配置し、かつその外表面をガイドレール部材13に当接させた状態で一対の側板12の間に配設してあり、ガイドレール部材13を案内として軸状部材20の軸心方向に沿って往復移動することが可能である。   The width of the slide base 31 in the direction perpendicular to the axis C of the shaft-shaped member 20 is larger than that of the guide rail member 13, and the length along the axis direction of the shaft-shaped member 20 is longer than that of the side plate 12 of the actuator body 10. Is also a small flat plate member, and has a pair of rail guides 31a on its outer surface. The rail guide 31a protrudes from the slide base 31 in a state in which a gap that allows the guide rail member 13 to be fitted between the rail guides 31a is secured. The slide base 31 is disposed between the pair of side plates 12 with the guide rail member 13 disposed between a pair of rail guides 31 a and the outer surface thereof being in contact with the guide rail member 13. Yes, it is possible to reciprocate along the axial direction of the shaft-shaped member 20 using the guide rail member 13 as a guide.

一対の支持プレート32は、スライドベース31の両側縁部から互いに平行となる態様で立設した平板状部材である。図2及び図3に示すように、これら支持プレート32は、互いに対向する内表面が軸状部材20の外周面を覆い、かつ軸状部材20からの距離が同一となるようにスライドベース31に取り付けてある。   The pair of support plates 32 are flat plate-like members erected in such a manner that they are parallel to each other from both side edges of the slide base 31. As shown in FIGS. 2 and 3, these support plates 32 are arranged on the slide base 31 so that the inner surfaces facing each other cover the outer peripheral surface of the shaft-shaped member 20 and the distance from the shaft-shaped member 20 is the same. It is attached.

さらに、上記磁気式アクチュエータには、軸状部材20における太径部21の外周面及び一対の支持プレート32の内表面にそれぞれ磁石体22,33が構成してある。   Further, in the magnetic actuator, magnet bodies 22 and 33 are formed on the outer peripheral surface of the large-diameter portion 21 of the shaft-shaped member 20 and the inner surfaces of the pair of support plates 32, respectively.

軸状部材20の磁石体(以下、「軸磁石体22」という)は、図4に示すように、軸状部材20の軸心Cを中心として太径部21の外周部に螺旋状に構成したものである。本実施の形態では、外周面に現れる磁極が互いに異なる態様で第1永久磁石22Aと第2永久磁石22Bとを一定の等ピッチで二条の螺旋を描くように巻回させることにより、複数の太径部21にそれぞれ軸磁石体22を構成するようにしている。第1永久磁石22A及び第2永久磁石22Bは、それぞれ磁性体に予め着磁することによって構成したものである。軸状部材20の軸心Cに対して軸磁石体22の各永久磁石22A,22Bが描く螺旋の傾斜角度αは、本実施の形態の場合、それぞれ45°である。   As shown in FIG. 4, the magnet body of the shaft-shaped member 20 (hereinafter referred to as “shaft magnet body 22”) is helically formed on the outer peripheral portion of the large-diameter portion 21 around the axis C of the shaft-shaped member 20. It is a thing. In the present embodiment, the first permanent magnet 22A and the second permanent magnet 22B are wound so as to draw two spirals at a constant regular pitch in a manner in which the magnetic poles appearing on the outer peripheral surface are different from each other, so that a plurality of thick magnets can be obtained. A shaft magnet body 22 is formed in each of the diameter portions 21. Each of the first permanent magnet 22A and the second permanent magnet 22B is configured by previously magnetizing a magnetic material. In the present embodiment, the inclination angle α of the spiral drawn by each permanent magnet 22A, 22B of the shaft magnet body 22 with respect to the axis C of the shaft-shaped member 20 is 45 °.

支持プレート32の磁石体(以下、「支持磁石体33」という)は、図5に示すように、外表面に現れる磁極が互いに異なる態様で直線状の第1永久磁石33Aと第2永久磁石33Bとを軸状部材20の軸心方向に沿って交互に並設することにより構成したものである。それぞれの永久磁石33A,33Bは、軸状部材20の太径部21に構成した軸磁石体22の永久磁石22A,22Bに対して1対1で対向するように、太径部21の軸磁石体22に対してほぼ同一となるピッチで、かつ軸状部材20の軸心Cに対して45°の傾斜角度βをもって配設してある。   As shown in FIG. 5, the magnet body of the support plate 32 (hereinafter referred to as “support magnet body 33”) has linear first permanent magnets 33A and second permanent magnets 33B in such a manner that the magnetic poles appearing on the outer surface are different from each other. Are arranged in parallel along the axial direction of the shaft-shaped member 20. Each permanent magnet 33A, 33B has a shaft magnet of the large-diameter portion 21 so as to face the permanent magnet 22A, 22B of the shaft magnet body 22 formed on the large-diameter portion 21 of the shaft-shaped member 20 on a one-to-one basis. The pitch is substantially the same as that of the body 22 and the tilt angle β is 45 ° with respect to the axis C of the shaft member 20.

さらに、図6の詳細構成に示すように、一方の支持プレート32に構成した支持磁石体33と、他方の支持プレート32に構成した支持磁石体33とは、軸状部材20の太径部21に構成した軸磁石体22に対して互いに異なる方向にオフセットしてある。すなわち、図6の上方に位置する支持プレート32では、太径部21に構成した軸磁石体22の各永久磁石22A,22Bに対して軸状部材20の軸心Cに沿って右側にオフセットするように永久磁石33A,33Bが並設してある。これに対して図6の下方に位置する支持プレート32では、太径部21に構成した軸磁石体22の各永久磁石22A,22Bに対して軸状部材20の軸心Cに沿って左側にオフセットするように永久磁石33A,33Bが並設してある。   Further, as shown in the detailed configuration of FIG. 6, the support magnet body 33 configured on one support plate 32 and the support magnet body 33 configured on the other support plate 32 include a large-diameter portion 21 of the shaft-shaped member 20. They are offset in different directions from each other with respect to the shaft magnet body 22 configured as described above. That is, in the support plate 32 located in the upper part of FIG. 6, the permanent magnets 22 </ b> A and 22 </ b> B of the shaft magnet body 22 formed in the large diameter portion 21 are offset to the right along the axis C of the shaft-shaped member 20. Thus, permanent magnets 33A and 33B are arranged in parallel. On the other hand, in the support plate 32 located in the lower part of FIG. 6, on the left side along the axis C of the shaft-shaped member 20 with respect to the permanent magnets 22A and 22B of the shaft magnet body 22 formed in the large diameter portion 21. Permanent magnets 33A and 33B are arranged in parallel so as to be offset.

ここで、上記のように、支持プレート32に構成した支持磁石体33の永久磁石33A,33Bと軸状部材20の太径部21に構成した軸磁石体22の永久磁石22A,22Bとが、軸状部材20の軸心方向に沿って互いの中心軸線がオフセットされた場合には、図7に示すように、そのオフセット量に応じて軸状部材20の軸心方向に沿った磁気吸引力(磁気付勢力)が作用することになる。   Here, as described above, the permanent magnets 33A and 33B of the support magnet body 33 formed on the support plate 32 and the permanent magnets 22A and 22B of the shaft magnet body 22 formed on the large-diameter portion 21 of the shaft-shaped member 20 are When the central axes of each other are offset along the axial direction of the shaft-shaped member 20, as shown in FIG. 7, the magnetic attractive force along the axial direction of the shaft-shaped member 20 according to the offset amount. (Magnetic biasing force) will act.

具体的には、図7の右方側に示すように、支持磁石体33の永久磁石に対して軸磁石体22の永久磁石を右側にオフセットした場合には、軸磁石体22の永久磁石と支持磁石体33の永久磁石との間に両者の中心軸線が一致するように軸状部材20に対して支持プレート32を右方向に向けて移動させる磁気吸引力Fが作用する。これに対して図7の左方側に示すように、支持磁石体33の永久磁石に対して軸磁石体22の永久磁石を左側にオフセットした場合には、軸磁石体22の永久磁石と支持磁石体33の永久磁石との間に両者の中心軸線が一致するように軸状部材20に対して支持プレート32を左方向に向けて移動させる磁気吸引力−F(図7において右側に向かう力を正とする)が作用する。軸磁石体22の永久磁石と支持磁石体33の永久磁石との間に作用する磁気吸引力の大きさは、オフセット量が増大するに従って漸次増大し、その後、オフセット量の増大に伴って漸次減少するようになる。   Specifically, as shown on the right side of FIG. 7, when the permanent magnet of the shaft magnet body 22 is offset to the right with respect to the permanent magnet of the support magnet body 33, A magnetic attraction force F that moves the support plate 32 in the right direction acts on the shaft-like member 20 so that the central axes of the support magnet body 33 and the permanent magnet coincide with each other. In contrast, as shown on the left side of FIG. 7, when the permanent magnet of the shaft magnet body 22 is offset to the left side with respect to the permanent magnet of the support magnet body 33, the permanent magnet and the support of the shaft magnet body 22 are supported. Magnetic attraction force −F (force toward the right side in FIG. 7) that moves the support plate 32 leftward relative to the shaft-like member 20 so that the central axes of the magnet body 33 and the permanent magnet coincide with each other. Act as positive). The magnitude of the magnetic attractive force acting between the permanent magnet of the shaft magnet body 22 and the permanent magnet of the support magnet body 33 gradually increases as the offset amount increases, and then gradually decreases as the offset amount increases. To come.

本実施の形態では、軸状部材20の太径部21に構成した軸磁石体22の任意の永久磁石22A,22Bに対して一方の支持プレート32に構成した支持磁石体33の永久磁石33A,33Bとの間に作用する磁気吸引力と、他方の支持プレート32に構成した支持磁石体33の永久磁石33A,33Bとの間に作用する磁気吸引力とがそれぞれほぼ最大値となり、かつ軸状部材20の軸心方向に沿って互いに逆向きに作用するように、それぞれの永久磁石22A,22B,33A,33Bをオフセットして配設してある。図には明示していないが、軸磁石体22の永久磁石22A,22Bに対向する支持プレート32の永久磁石33A,33Bは、一方の支持プレート32と他方の支持プレート32とで互いに同一の数となるようにそれぞれの寸法が設定してある。つまり、軸磁石体22の永久磁石22A,22Bそれぞれに対しては、一方の支持プレート32との間(第1の対向位置)において支持磁石体33の永久磁石33A,33Bが対向し、かつ他方の支持プレート32との間(第2の対向位置)において支持磁石体33の永久磁石33A,33Bが対向することになる。   In the present embodiment, the permanent magnets 33A of the support magnet body 33 configured on one support plate 32 with respect to the arbitrary permanent magnets 22A and 22B of the shaft magnet body 22 configured on the large diameter portion 21 of the shaft-shaped member 20. The magnetic attractive force acting between 33B and the magnetic attractive force acting between the permanent magnets 33A, 33B of the supporting magnet body 33 formed on the other supporting plate 32 is almost the maximum value and is axial. The permanent magnets 22A, 22B, 33A, 33B are offset and arranged so as to act in opposite directions along the axial direction of the member 20. Although not clearly shown in the figure, the number of permanent magnets 33A and 33B of the support plate 32 facing the permanent magnets 22A and 22B of the shaft magnet body 22 is the same in one support plate 32 and the other support plate 32. Each dimension is set so that That is, the permanent magnets 33A and 33B of the support magnet body 33 are opposed to the permanent magnets 22A and 22B of the shaft magnet body 22 between the one support plate 32 (first facing position) and the other. The permanent magnets 33 </ b> A and 33 </ b> B of the support magnet body 33 oppose each other (second opposing position).

また、図3に示すように、支持プレート32の支持磁石体33及び軸状部材20の軸磁石体22は、軸状部材20に対して支持プレート32を往復移動させた場合に常に2つの軸磁石体22のみが支持プレート32の支持磁石体33と対向するようにそれぞれの寸法が設定してある。より具体的に説明すれば、支持プレート32の支持磁石体33において軸状部材20の軸心方向に沿った長さを基準長さXとした場合、任意の軸磁石体22(以下、適宜「中央磁石体」という)を挟んで互いに隣接する一対の軸磁石体22(以下、適宜「側部磁石体」という)においてそれぞれ軸状部材20の一端部側に位置する端面22aの相互間距離がこの基準長さXと合致するように、それぞれ支持プレート32の支持磁石体33及び軸状部材20の軸磁石体22が構成してある。つまり、軸状部材20とベース部材30とが軸状部材20の軸心方向に沿って相対的に移動した場合に、中央磁石体22を基準として一方の側部磁石体22の端面22aがベース部材30の支持磁石体33,33に対向する領域から逸脱すると同時に他方の側部磁石体22の端面22aがベース部材30の支持磁石体33,33に対向する領域に進入する態様で互いの間に所定の間隙を確保して等間隔に配設してある。   As shown in FIG. 3, the support magnet body 33 of the support plate 32 and the shaft magnet body 22 of the shaft-shaped member 20 always have two shafts when the support plate 32 is reciprocated relative to the shaft-shaped member 20. Each dimension is set so that only the magnet body 22 faces the support magnet body 33 of the support plate 32. More specifically, when the length along the axial center direction of the shaft-shaped member 20 in the support magnet body 33 of the support plate 32 is the reference length X, an arbitrary shaft magnet body 22 (hereinafter referred to as “ In a pair of shaft magnet bodies 22 (hereinafter referred to as “side magnet bodies” as appropriate) that are adjacent to each other across the “center magnet body”), the distance between the end faces 22a positioned on one end side of the shaft-like member 20 is The support magnet body 33 of the support plate 32 and the shaft magnet body 22 of the shaft-like member 20 are configured to match the reference length X, respectively. That is, when the shaft-shaped member 20 and the base member 30 move relatively along the axial center direction of the shaft-shaped member 20, the end surface 22a of one side magnet body 22 is based on the central magnet body 22 as a base. While deviating from the region facing the support magnet bodies 33, 33 of the member 30, the end surface 22 a of the other side magnet body 22 enters the region facing the support magnet bodies 33, 33 of the base member 30 and at the same time A predetermined gap is secured at equal intervals.

上記のように構成した磁気式アクチュエータでは、例えばベース部材30の支持磁石体33,33を構成する永久磁石33A,33Bに対して軸状部材20の螺旋状を成す軸磁石体22の各永久磁石22A,22Bがそれぞれ互いに異なる磁極を対向させた状態が駆動待機状態となる。この駆動待機状態から、例えばアクチュエータ本体10の移動を規制した状態で図示せぬ電動モータ等の駆動源により軸状部材20をその軸心回りに一方方向に回転させると、ベース部材30の支持磁石体33,33に対して軸状部材20の螺旋状を成す軸磁石体22が螺進することになる。ベース部材30は、スライドベース31を介してガイドレール部材13に当接しているため、軸状部材20の軸心回りの回転が規制された状態にある。この結果、ベース部材30の支持磁石体33と軸状部材20の軸磁石体22との間に作用する磁気吸引力により、軸状部材20及びアクチュエータ本体10に対してベース部材30が軸状部材20の軸心方向に沿って一方方向へ移動することになる。軸状部材20の回転方向を変更すれば、螺旋状を成す軸磁石体22の螺進方向が逆向きとなるため、軸状部材20に対するベース部材30の移動方向も逆となる。従って、例えばアクチュエータ本体10を固定体に保持させる一方、ベース部材30をワークテーブルに保持させれば、電動モータの回転によってワークテーブルを往復移動させ、任意の位置に配置することが可能となる。   In the magnetic actuator configured as described above, for example, each permanent magnet of the shaft magnet body 22 that forms the spiral shape of the shaft member 20 with respect to the permanent magnets 33A and 33B that form the support magnet bodies 33 and 33 of the base member 30. The state where 22A and 22B face each other different magnetic poles is the drive standby state. When the shaft-like member 20 is rotated in one direction around its axis by a drive source such as an electric motor (not shown) in a state where the movement of the actuator main body 10 is restricted from the drive standby state, for example, the support magnet of the base member 30 The shaft magnet body 22 that forms the spiral shape of the shaft-shaped member 20 is screwed with respect to the bodies 33 and 33. Since the base member 30 is in contact with the guide rail member 13 via the slide base 31, the rotation of the shaft-like member 20 around the axis is restricted. As a result, due to the magnetic attractive force acting between the supporting magnet body 33 of the base member 30 and the shaft magnet body 22 of the shaft-shaped member 20, the base member 30 is shaft-shaped with respect to the shaft-shaped member 20 and the actuator body 10. It will move in one direction along the 20 axis direction. If the rotation direction of the shaft-like member 20 is changed, the screwing direction of the helical shaft magnet body 22 is reversed, so that the movement direction of the base member 30 with respect to the shaft-like member 20 is also reversed. Therefore, for example, if the actuator body 10 is held by the fixed body and the base member 30 is held by the work table, the work table can be reciprocated by the rotation of the electric motor and can be arranged at an arbitrary position.

ここで、上記の磁気式アクチュエータにおいては、軸状部材20の軸磁石体22を構成する永久磁石22A,22Bとベース部材30の支持磁石体33を構成する永久磁石33A,33Bとを互いにオフセットして配置し、対向する永久磁石22A,22B,33A,33Bの間に作用する磁気吸引力の方向が、相互に対応する複数組の対向位置において軸状部材20の軸心方向に沿って互いに逆向きとなるように構成している。従って、軸状部材20とベース部材30とは、常に逆向きの電磁吸引力が釣り合った位置で停止し、かつその位置を維持するようになる。これにより、軸状部材20の回転を停止すれば、これに応じてベース部材30の移動も直ちに停止してその位置を維持するようになり、両者の位置決め精度を向上させることが可能となる。   Here, in the magnetic actuator described above, the permanent magnets 22A and 22B constituting the shaft magnet body 22 of the shaft-like member 20 and the permanent magnets 33A and 33B constituting the support magnet body 33 of the base member 30 are offset from each other. The directions of the magnetic attractive forces acting between the permanent magnets 22A, 22B, 33A, 33B facing each other are opposite to each other along the axial direction of the shaft-like member 20 at a plurality of opposing positions corresponding to each other. It is configured to be oriented. Therefore, the shaft-like member 20 and the base member 30 always stop at a position where the opposite electromagnetic attracting forces are balanced, and maintain that position. Accordingly, if the rotation of the shaft-like member 20 is stopped, the movement of the base member 30 is also immediately stopped and the position thereof is maintained accordingly, and the positioning accuracy of both can be improved.

この場合、軸状部材20の軸磁石体22を構成する永久磁石22A,22B及びベース部材30の支持磁石体33を構成する永久磁石33A,33Bの寸法を正確に規定する必要はなく、単に互いに逆方向に作用する磁気吸引力が釣り合えば良い。従って、軸状部材20の軸磁石体22を構成する永久磁石22A,22B及びベース部材30の支持磁石体33を構成する永久磁石33A,33Bの幅を合致させる必要がない等、磁気式アクチュエータの製造作業を容易化することも可能となる。   In this case, it is not necessary to precisely define the dimensions of the permanent magnets 22A and 22B constituting the shaft magnet body 22 of the shaft-shaped member 20 and the permanent magnets 33A and 33B constituting the support magnet body 33 of the base member 30, and simply The magnetic attractive force acting in the reverse direction may be balanced. Accordingly, there is no need to match the widths of the permanent magnets 22A and 22B constituting the shaft magnet body 22 of the shaft-like member 20 and the permanent magnets 33A and 33B constituting the support magnet body 33 of the base member 30. Manufacturing operations can be facilitated.

しかも、軸状部材20とベース部材30とが直接接触するものではないため、ベース部材30が移動する際の騒音がきわめて小さい、両者が摩耗しない、過大な入力があった場合にも損傷を来す虞れがない、等々の利点がある。   Moreover, since the shaft member 20 and the base member 30 are not in direct contact with each other, the noise when the base member 30 moves is extremely small, the two members do not wear, and damage is caused even if there is an excessive input. There are advantages such as no fear.

さらに、上記磁気式アクチュエータによれば、ベース部材30に設けた基準長さXの支持磁石体33に対して常に2つの軸磁石体22のみが支持プレート32の支持磁石体33と対向するようにそれぞれの寸法が設定してある。従って、所望とするベース部材30の往復移動距離に対して、軸状部材20はその全長が往復移動距離に応じた長さとなるものの、軸状部材20に設ける軸磁石体22の数を可及的に減少させることが可能となる。これにより、磁気式アクチュエータに大きな移動距離が要求される場合にも、軽量化及び製造コストの低減を図ることができるようになる。この場合、軸状部材20の全長に関わらず、支持プレート32の支持磁石体33に対して常に2つの軸磁石体22が対向するのであるから、軸状部材20の回転移動と支持プレート32の往復移動とが脱調してずれてしまう事態を招来する虞れもない。   Further, according to the magnetic actuator, only the two shaft magnet bodies 22 always face the support magnet body 33 of the support plate 32 with respect to the support magnet body 33 of the reference length X provided on the base member 30. Each dimension is set. Therefore, although the total length of the shaft-like member 20 corresponds to the reciprocation distance with respect to the desired reciprocation distance of the base member 30, the number of the shaft magnet bodies 22 provided on the shaft-like member 20 can be as large as possible. Can be reduced. As a result, even when a large moving distance is required for the magnetic actuator, the weight can be reduced and the manufacturing cost can be reduced. In this case, since the two shaft magnet bodies 22 always face the support magnet body 33 of the support plate 32 regardless of the overall length of the shaft member 20, the rotational movement of the shaft member 20 and the support plate 32 There is no possibility of incurring a situation where the reciprocating movement is out of step and deviated.

尚、上述した実施の形態では、軸状部材を回転させた場合にベース部材を往復移動させるようにした磁気式アクチュエータに適用する動力伝達装置を例示しているが、本発明はこれに限定されない。例えば、シリンダアクチュエータ等の駆動源によってベース部材を往復移動させることにより軸状部材を回転させるようにしたものにも適用することが可能である。   In the above-described embodiment, the power transmission device applied to the magnetic actuator that reciprocates the base member when the shaft-like member is rotated is illustrated, but the present invention is not limited to this. . For example, the present invention can be applied to a structure in which a shaft member is rotated by reciprocating a base member with a drive source such as a cylinder actuator.

また、上述した実施の形態では、軸状部材の磁石体に対してベース部材に互いに平行となる態様で一対の磁石体を設けるようにしているため、これら軸状部材の磁石体とベース部材の磁石体との間の磁力によって軸状部材に曲げ力を作用させることなく照射の間の動力伝達効率を向上させることが可能となるが、必ずしもベース部材の磁石体は一対である必要はなく、軸状部材の磁石体とベース部材の磁石体とをオフセットして配置する必要ももちろんない。   In the above-described embodiment, since the pair of magnet bodies are provided in a manner parallel to the base member with respect to the magnet body of the shaft-shaped member, the magnet body of the shaft-shaped member and the base member Although it becomes possible to improve the power transmission efficiency during irradiation without applying a bending force to the shaft-like member due to the magnetic force between the magnet body, the magnet body of the base member does not necessarily have to be a pair, Needless to say, the magnet body of the shaft member and the magnet body of the base member need not be offset.

さらに、上述した実施の形態では、図6に示すように、ベース部材に構成した磁性体の幅に比べて軸状部材に構成した磁性体の幅が小さいものを例示しているが、本発明ではこれらに限定されず、ベース部材に構成した磁性体の幅に対して軸状部材に構成した磁性体の幅を大きく構成しても良いし、両者を同一の幅(必ずしも正確に一致している必要はない)に構成しても構わない。   Furthermore, in the above-described embodiment, as shown in FIG. 6, the magnetic material configured as the shaft-shaped member is smaller in width than the magnetic material configured as the base member. However, the present invention is not limited thereto, and the width of the magnetic body formed on the shaft-like member may be larger than the width of the magnetic body formed on the base member, or both may be the same width (not necessarily exactly the same). It does not have to be configured).

尚、上述した実施の形態では、円柱状を成す軸状部材と平板状を成すベース部材との間の動力伝達を行う場合に、軸状部材の太径部に設けた円柱状を成す磁性体の外周面に対してベース部材の支持プレートに平板状を成す磁性体を配設しているが、例えば図8に示す変形例のように構成すれば、両者の間の動力伝達効率をより高めることが可能である。   In the above-described embodiment, when performing power transmission between the cylindrical shaft-shaped member and the flat plate-shaped base member, the cylindrical magnetic material provided on the large-diameter portion of the shaft-shaped member. Although a flat plate-like magnetic body is disposed on the support plate of the base member with respect to the outer peripheral surface of the base plate, for example, if it is configured as in the modification shown in FIG. 8, the power transmission efficiency between the two is further increased. It is possible.

すなわち、図8の変形例では、ベース部材130の支持プレート132に半円筒状の凹面133aを有した支持磁石体133を配設し、この凹面133aを軸状部材20の太径部21に構成した軸磁石体22に対向させるようにしたものである。図8に示す変形例のベース部材130は、実施の形態と同様に、スライドベース131及び一対の支持プレート132を備えて構成したものである。スライドベース131は、対を成すレールガイド131aの間にガイドレール部材13を配置し、かつその外表面をガイドレール部材13に当接させた状態で配設してあり、ガイドレール部材13を案内として軸状部材20の軸心方向に沿って往復移動することが可能である。軸状部材20に太径部21が構成され、さらにこの太径部21の外周部に軸磁石体22が螺旋状に構成してあるのは実施の形態と同様である。支持磁石体133の凹面133aは、軸状部材20の軸心Cを中心として形成されたものであり、軸状部材20の太径部21に構成した軸磁石体22の外周面に対して一定の間隙を確保した位置に配置してある。   That is, in the modification of FIG. 8, a support magnet body 133 having a semi-cylindrical concave surface 133 a is disposed on the support plate 132 of the base member 130, and the concave surface 133 a is configured as the large diameter portion 21 of the shaft-shaped member 20. The shaft magnet body 22 is made to face. The base member 130 of the modified example shown in FIG. 8 includes a slide base 131 and a pair of support plates 132, as in the embodiment. The slide base 131 has a guide rail member 13 disposed between a pair of rail guides 131a, and the outer surface of the slide base 131 is in contact with the guide rail member 13, and guides the guide rail member 13. As described above, it is possible to reciprocate along the axial direction of the shaft-shaped member 20. As in the embodiment, the shaft-shaped member 20 has a large-diameter portion 21, and the shaft magnet body 22 is spirally formed on the outer peripheral portion of the large-diameter portion 21. The concave surface 133 a of the support magnet body 133 is formed around the axis C of the shaft-shaped member 20, and is constant with respect to the outer peripheral surface of the shaft magnet body 22 formed in the large-diameter portion 21 of the shaft-shaped member 20. It is arranged at a position where the gap is secured.

上記のように構成した変形例の磁気式アクチュエータによれば、軸状部材20の軸磁石体22とベース部材130の支持磁石体133との間の対向面積が増大することになり、上述した実施の形態が奏する作用効果に加え、両者の間の動力伝達効率を向上させることが可能となる。   According to the magnetic actuator of the modified example configured as described above, the facing area between the shaft magnet body 22 of the shaft-shaped member 20 and the support magnet body 133 of the base member 130 is increased. In addition to the function and effect produced by this embodiment, the power transmission efficiency between the two can be improved.

尚、図8の変形例では、支持磁石体133に半円筒状の凹面133aを構成しているが、必ずしも半円筒状である必要はなく、円筒状の凹面であれば必ずしも半円である必要はない。また、支持磁石体133の凹面は、必ずしも一つの磁性体で構成する必要はなく、複数個の集合体として円筒状の凹面を構成するようにしても良い。   In the modified example of FIG. 8, the support magnet body 133 has a semi-cylindrical concave surface 133a. However, the semi-cylindrical concave surface 133a is not necessarily required. There is no. In addition, the concave surface of the support magnet body 133 is not necessarily configured by a single magnetic body, and a cylindrical concave surface may be configured as a plurality of aggregates.

本発明の実施の形態である磁気式動力伝達装置を適用した磁気式アクチュエータの斜視図である。1 is a perspective view of a magnetic actuator to which a magnetic power transmission device according to an embodiment of the present invention is applied. 図1に示した磁気式アクチュエータの横断面図である。It is a cross-sectional view of the magnetic actuator shown in FIG. 図1に示した磁気式アクチュエータの要部平面図である。It is a principal part top view of the magnetic actuator shown in FIG. 図1に示した磁気式アクチュエータの軸状部材に構成した磁性体の配置態様を模式的に示す概念図である。It is a conceptual diagram which shows typically the arrangement | positioning aspect of the magnetic body comprised on the shaft-shaped member of the magnetic actuator shown in FIG. 図1に示した磁気式アクチュエータの軸状部材及びベース部材に構成した磁性体の配置態様を模式的に示す概念図である。It is a conceptual diagram which shows typically the arrangement | positioning aspect of the magnetic body comprised in the shaft-shaped member and base member of the magnetic actuator shown in FIG. 図1に示した磁気式アクチュエータの軸状部材及びベース部材に構成した磁性体の配置態様を詳細に説明するための概念図である。It is a conceptual diagram for demonstrating in detail the arrangement | positioning aspect of the magnetic body comprised in the shaft-shaped member and base member of the magnetic actuator shown in FIG. 図1に示した磁気式アクチュエータにおいて軸状部材とベース部材との間に作用する磁気力とオフセット量との関係を示すグラフである。2 is a graph showing a relationship between a magnetic force acting between a shaft-like member and a base member in the magnetic actuator shown in FIG. 図1に示した磁気式アクチュエータの変形例を示す要部横断面図である。FIG. 6 is a cross-sectional view of a main part showing a modification of the magnetic actuator shown in FIG. 1.

符号の説明Explanation of symbols

10 アクチュエータ本体
20 軸状部材
21 太径部
22 磁石体
22A,22B 永久磁石
30 ベース部材
31 スライドベース
32 支持プレート
33 支持磁石体
33A,33B 永久磁石
C 軸状部材の軸心
DESCRIPTION OF SYMBOLS 10 Actuator main body 20 Shaft-shaped member 21 Large diameter part 22 Magnet body 22A, 22B Permanent magnet 30 Base member 31 Slide base 32 Support plate 33 Support magnet body 33A, 33B Permanent magnet C Shaft center of shaft-shaped member

Claims (3)

外周面に自身の軸心を中心として永久磁石を螺旋状に構成した磁石体を備え、自身の軸心回りに回転可能に配設した軸状部材と、
軸状部材の外周面に対向する対向部分に軸状部材の軸心方向に沿って複数の永久磁石を並設した磁石体を備え、軸状部材の軸心方向に沿って直線状に往復移動可能に配設したベース部材と
を備え、これら軸状部材の磁石体とベース部材の磁石体との間の磁力により、軸状部材の回転移動とベース部材の往復移動との間において動力の伝達を行う磁気式動力伝達装置であって、
前記軸状部材の磁石体及び前記ベース部材の磁石体のいずれか一方は、軸状部材の軸心に沿って所定の基準長さを有するように構成したものであり、
前記軸状部材の磁石体及び前記ベース部材の磁石体のいずれか他方は、少なくとも任意の中央磁石体を挟んで互いに隣接する一対の側部磁石体を備え、軸状部材とベース部材とが軸状部材の軸心方向に沿って相対的に移動した場合に一方の側部磁石体において軸状部材の一端部側に位置する端面部がベース部材の磁石体に対向する領域から逸脱すると同時に他方の側部磁石体において軸状部材の一端部側に位置する端面部がベース部材の磁石体に対向する領域に進入する態様で互いの間に所定の間隙を確保して等間隔に配設したものである
ことを特徴とする磁気式動力伝達装置。
A shaft-shaped member provided on the outer peripheral surface with a magnet body helically configured with a permanent magnet centered on its own axis, and rotatably arranged around its own axis;
A magnet body in which a plurality of permanent magnets are arranged in parallel along the axial direction of the shaft-shaped member is provided at a portion facing the outer peripheral surface of the shaft-shaped member, and is linearly reciprocated along the axial direction of the shaft-shaped member. And a base member arranged as possible, and the transmission of power between the rotational movement of the shaft-shaped member and the reciprocating movement of the base member by the magnetic force between the magnet body of the shaft-shaped member and the magnet body of the base member. A magnetic power transmission device for performing
Either one of the magnet body of the shaft-shaped member and the magnet body of the base member is configured to have a predetermined reference length along the axis of the shaft-shaped member,
The other of the magnet body of the shaft-shaped member and the magnet body of the base member includes a pair of side magnet bodies adjacent to each other with at least an arbitrary central magnet body sandwiched between the shaft-shaped member and the base member. When the one side magnet body moves relatively along the axial direction of the cylindrical member, the end surface portion located on the one end side of the axial member deviates from the region facing the magnet body of the base member and at the same time the other In the aspect in which the end surface portion located on one end portion side of the shaft-like member enters the region facing the magnet body of the base member in the side magnet body, a predetermined gap is secured between each other and arranged at equal intervals. A magnetic power transmission device characterized by that.
ベース部材に基準長さの磁石体を設ける一方、軸状部材に複数の磁石体を等間隔に配設したことを特徴とする請求項1に記載の磁気式動力伝達装置。   2. The magnetic power transmission device according to claim 1, wherein a magnet body having a reference length is provided on the base member, and a plurality of magnet bodies are arranged on the shaft-like member at equal intervals. 前記ベース部材に構成した磁石体は、前記軸状部材の軸心を中心とした半円筒状の凹面を有することを特徴とする請求項1に記載の磁気式動力伝達装置。   2. The magnetic power transmission device according to claim 1, wherein the magnet body configured in the base member has a semi-cylindrical concave surface centering on an axis of the shaft-shaped member.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2787615A2 (en) 2013-04-02 2014-10-08 Sanyo Denki Co., Ltd. Rotational-linear motion converter
US11302374B2 (en) 2019-08-23 2022-04-12 Micron Technology, Inc. Apparatuses and methods for dynamic refresh allocation

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0449A (en) * 1990-04-13 1992-01-06 Nippon Seiko Kk Ball screw shaft
JP2001206548A (en) * 2000-01-27 2001-07-31 Anelva Corp Magnetic carrying device and magnetic carrying method
JP2002266972A (en) * 2001-03-12 2002-09-18 Akira Tamura Magnetic screw feeding device and door opening and closing device with usage thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0449A (en) * 1990-04-13 1992-01-06 Nippon Seiko Kk Ball screw shaft
JP2001206548A (en) * 2000-01-27 2001-07-31 Anelva Corp Magnetic carrying device and magnetic carrying method
JP2002266972A (en) * 2001-03-12 2002-09-18 Akira Tamura Magnetic screw feeding device and door opening and closing device with usage thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2787615A2 (en) 2013-04-02 2014-10-08 Sanyo Denki Co., Ltd. Rotational-linear motion converter
US9742258B2 (en) 2013-04-02 2017-08-22 Sanyo Denki Co., Ltd Rotational-linear motion converter
US11302374B2 (en) 2019-08-23 2022-04-12 Micron Technology, Inc. Apparatuses and methods for dynamic refresh allocation

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