JP2008203211A - Thermostatic and humidistatic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermostatic and humidistatic device capable of forming air having a temperature lower than the temperature of the open air. <P>SOLUTION: The cooling unit 1 includes the endothermic part 3 arranged at one end part of a heat pipe 2, the first radiation part 5 having fins 7a arranged at the other end part of the heat pipe 2, and the second radiation part 6 constituted using a Peltier element 8 and arranged at the intermediate position between the first radiation part 5 and the endothermic part 3. This cooling unit 1 is pierced through a heat insulating wall 21 so that the endothermic part 3 is arranged at the proper place between the heater 15 and humidifier 16 of an air conditioning chamber S1 and a radiation part 4 is arranged in a heat source adjusting chamber S2. Further, the first and second radiation parts 5 and 6 are arranged up and down along the outer wall surface 21a of the heat insulating wall 21 and a counter wall 17. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a technical field of a constant temperature and humidity chamber that generates air having a desired temperature and humidity.

Conventionally, there are known thermo-hygrostats used for burn-in processing for reliability evaluation and screening of various semiconductor elements and electronic circuits, and for testing the heat resistance and moisture resistance of various articles and materials. It has been. In Patent Document 1 below, in this type of constant temperature and humidity chamber, a heat pipe in which alcohol is sealed in a copper tube is arranged so that the heat medium evaporation side is located in the air conditioning room and the heat medium condensing side is located outside the air conditioner room. However, a technique for setting the temperature and humidity in the air-conditioned room to the target temperature and humidity by adjusting the cooling on the heat medium condensing side by the operation of the fan is disclosed.
Japanese Patent No. 2603407

  However, in Patent Document 1, since the cooling on the heat medium condensing side is adjusted by the operation of the fan, that is, the heat medium condensing side is cooled using the outside air, the temperature in the air conditioning room is set to the outside air temperature. It cannot be lowered further.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a constant temperature and humidity chamber capable of generating air having a temperature lower than the outside air temperature.

  The invention according to claim 1 is a test chamber, an air-conditioning chamber provided for adjusting the temperature and humidity of the air in the test chamber to a target temperature and humidity, and air between the test chamber and the air-conditioning chamber. A constant temperature and humidity chamber comprising a circulating air blowing unit, a humidifying unit for humidifying air flowing into the air conditioning chamber from the test chamber, and a cooling unit for cooling the air, wherein the cooling unit is A heat pipe phenomenon in the heat absorption part disposed in the air-conditioning room, the heat radiation part disposed outside the air-conditioning room, the first heat radiation part and the second heat radiation part, and the heat transport part enclosed in the enclosure. And a heat transport part for transporting heat from the heat absorbing part to the heat radiating part, wherein the heat absorbing part and the first and second heat radiating parts are thermally connected to the heat transport part. The first heat dissipating part emits heat from the heat transport part using outside air as a cooling medium. Ri, the second heat radiation member, the temperature of the heat transport part is one which releases heat of the heat transport part so down to the temperature lower than the outside air temperature.

  According to the present invention, when both the humidifying unit and the cooling unit are operated, the air flowing into the air-conditioning chamber is humidified by the humidifying unit, the air is cooled by the cooling unit, and further heating is required. Heated and this air is supplied to the test chamber.

  In such a configuration, the cooling unit is enclosed in a sealed body, a heat absorbing unit disposed in the air conditioned room, a heat radiating unit disposed outside the air conditioned room, and having a first heat radiating unit and a second heat radiating unit. A heat transport part for causing the heat pipe phenomenon to occur in the generated working fluid and transporting heat from the heat absorbing part to the heat radiating part. The heat absorbing part and the first and second heat radiating parts Is thermally connected to the heat transport section, the first heat radiating section is configured to release heat of the heat transport section using outside air as a cooling medium, and the second heat radiating section is configured to emit the heat transport section. Since the heat of the heat transporting part is released so that the temperature of the air is lowered to a temperature lower than the outside air temperature, the cooling performance is higher than when only the first heat radiating part is provided as in the prior art. Can be provided.

  That is, according to the present invention, since the air in the test chamber is cooled by the first heat radiating portion using the outside air, the temperature of the air in the test chamber can be radiated with a large heat radiation amount toward the outside air temperature. The second heat radiating portion can further cool to a temperature lower than the outside air temperature.

  In addition, by disposing the first heat dissipating part away from the second heat dissipating part, it is possible to avoid the risk of the other heat dissipating part taking away the cold of one heat dissipating part, and high cooling. Efficiency can be obtained. The heat pipe phenomenon means that the working fluid at the position of the heat absorbing part evaporates due to the heat absorbed by the heat absorbing part, and the vapor of the working fluid moves to the heat radiating part. This is a phenomenon in which the vapor that reaches the position of the heat radiating portion condenses.

  According to a second aspect of the present invention, in the constant temperature and humidity chamber according to the first aspect, the second heat radiating portion is closer to the heat absorbing portion than the first heat radiating portion in the heat transport direction of the heat transport portion. It is what is installed.

  The installation positions of the first and second heat dissipating parts are opposite to the installation positions of the present invention, that is, the first heat dissipating part is located closer to the heat absorbing part than the second heat dissipating part in the heat transport direction of the heat transport part. When the first and second heat dissipating parts are operated in parallel and the endothermic temperature is lower than the outside air temperature, the first heat dissipating part is driven to absorb heat (evaporate) in the first heat dissipating part. As a result, the cooling performance of the second heat dissipating part cannot be fully utilized.

  On the other hand, as in the present invention, the first and second heat dissipating parts are provided by installing the second heat dissipating part on the heat absorbing part side of the first heat dissipating part in the heat transport direction of the heat transport part. Are operated, the vapor of the working fluid that has absorbed heat at the position of the heat absorbing portion and moved to the heat radiating portion side at a substantially sonic speed is cooled by the first heat radiating portion and further cooled by the second heat radiating portion. It will be. Thereby, the situation where the endothermic (evaporation) action occurs in the first heat radiating portion does not occur, and the cooling performance of the second heat radiating portion can be fully utilized.

  According to a third aspect of the present invention, in the constant temperature and humidity chamber according to the first or second aspect, a temperature / humidity detection unit that detects a temperature / humidity of air in the test chamber and an output signal of the temperature / humidity detection unit. And a control unit for controlling operations of the humidifying unit and the cooling unit.

  According to this invention, air having a target temperature and humidity can be generated according to the temperature and humidity detected by the temperature and humidity detector.

  According to a fourth aspect of the present invention, in the constant temperature and humidity chamber according to the third aspect of the present invention, the constant temperature and humidity chamber includes a heat absorption unit temperature detection unit that detects a temperature of the heat absorption unit, and the control unit cools the air in the test chamber. During the power period, the first heat radiating section is operated, and when the temperature detected by the heat absorbing section temperature detecting section decreases to a predetermined temperature, the operation of the second heat radiating section is started.

  According to the present invention, the operating time of the second heat radiating section can be suppressed as much as possible compared to the case where the second heat radiating section is always operated during the period in which the air in the test chamber is to be cooled. . Therefore, when the second heat radiating unit is driven by electric power, power consumption can be suppressed as much as possible.

  In addition, after the first heat radiating unit performs a heat radiating operation using a large amount of heat using outside air, the second heat radiating unit cools to a temperature lower than the outside air temperature. Therefore, when the second heat radiating portion is composed of a Peltier element, the Peltier element is operated from a relatively low temperature. Therefore, when the air in the test chamber is hot, the Peltier element itself is lowered in temperature. It is possible to avoid the occurrence of a situation where a large amount of energy is required, and to cool the air in the test chamber reliably and promptly even with a Peltier element having a smaller heat dissipation capacity than the first heat dissipation portion.

  According to a fifth aspect of the present invention, in the constant temperature and humidity chamber according to any one of the first to fourth aspects, the second heat radiating portion is configured using a Peltier element.

  According to the present invention, it is possible to configure a thermo-hygrostat capable of lowering the air in the test chamber to a temperature lower than the outside air temperature by using a member that has been conventionally used.

  A sixth aspect of the present invention is the constant temperature and humidity chamber according to any one of the first to fifth aspects, wherein the first heat dissipating part is disposed above the second heat dissipating part. .

  According to this invention, the working fluid can be circulated efficiently in the heat transport section.

  According to the present invention, it is possible to realize a constant temperature and humidity chamber capable of generating air having a temperature lower than the outside air temperature.

  Embodiments according to the present invention will be described below with reference to the drawings. FIG. 1 is a side view showing a mechanical configuration of an embodiment of a cooling unit provided in a thermo-hygrostat according to the present invention.

  As shown in FIG. 1, the cooling unit 1 is installed on a heat pipe 2 as an example of the heat transport unit, a heat absorbing unit 3 installed on one end of the heat pipe 2, and the other end of the heat pipe 2. The heat radiating part 4 is provided. The cooling unit 1 is partitioned by a heat insulating wall 21 described later.

  The heat pipe 2 receives the heat absorbed by the heat absorbing portion 3 at the one end portion of the heat pipe 2 and transports it to the other end side, and is made of a material having high thermal conductivity such as copper or aluminum. The pipe-shaped case 2a and a working fluid such as water or alcohol enclosed in the case 2a in a vacuum state.

  The heat absorption part 3 is for absorbing the heat of the object to be cooled (air in the test chamber to be described later) and transmitting the heat to the working fluid. For example, a base part (not shown) fitted to the case 2a; And a plurality of fins 3a erected at appropriate positions on the outer peripheral surface of the base. The base and the fins 3a are made of a material having high thermal conductivity such as copper or aluminum. The fin 3a absorbs heat from the air in the test chamber and transmits the absorbed heat to the base. The base portion is in thermal contact with the heat pipe 2 and transmits heat absorbed by the fins 3a to the working fluid via the case 2a. In addition, the structure of the heat absorption part 3 is not restricted to the above-mentioned thing, For example, you may abbreviate | omitted the fin 3a. However, since the fin 3a increases the contact area in contact with the air in the test chamber and increases the heat absorption efficiency of the heat absorption part 3 as compared with the case where the fin 3a is not provided, the fin 3a is omitted. Compared with the fin 3a, the heat absorption efficiency can be further improved.

  When the working fluid that has absorbed heat (evaporated working fluid) at the one end of the heat pipe 2 moves to the heat radiating unit 4, the heat radiating unit 4 releases the heat from the working fluid (working fluid). The first heat dissipating part 5 installed at the other end of the heat pipe 2 and the second disposing at the intermediate position between the first heat dissipating part 5 and the heat absorbing part 3. And a heat dissipating part 6.

  The first heat radiating portion 5 includes a heat sink 7 including a base portion (not shown) fitted to the case 2a and a plurality of fins 7a standing on the outer peripheral surface of the base portion. The heat sink 7 is made of a material having high thermal conductivity, such as copper or aluminum, and is in thermal contact with the heat pipe 2 to transfer heat transferred from the working fluid through the case 2a to the fins 7a. introduce. The fin 7a absorbs heat from the base and releases the absorbed heat to the outside. In addition, the structure of the heat absorption part 3 is not restricted to the above-mentioned structure, For example, you may abbreviate | omitted the fin 7a. However, the fin 7a increases the contact area where the heat sink 7 comes into contact with the outside air as compared with the case where the fin 7a is not provided, and increases the heat dissipation efficiency of the first heat radiating portion 5. The one having the fins 7a can improve the heat radiation efficiency more than the omitted one. Moreover, the 1st thermal radiation part 5 does not necessarily need to be equipped with the heat sink 7, For example, the aspect which installs the fin 7a directly in the heat pipe 2 without interposing the heat sink 7 is also employable. The first heat radiating portion 5 may be a jacket enclosing normal temperature water set by the outside air in addition to the heat sink 7.

  The second heat radiating portion 6 is configured using, for example, a Peltier element 8. The Peltier element 8 has a well-known configuration and will not be described in detail. For example, P-type semiconductors and N-type semiconductors are alternately arranged in parallel, and one end of each semiconductor is connected to a substrate (hereinafter referred to as a first element). 1 substrate) and two adjacent semiconductors as one set, and for each set, the other end of the semiconductor is a substrate different from the first substrate (hereinafter referred to as a second substrate). And by supplying a direct current to a series circuit composed of each semiconductor and substrate, one of the first and second substrates serves as a heat generating side, and the other substrate Act as the heat absorption side. The Peltier element 8 is attached to the case 2a via a metal attachment member 9 having a relatively high thermal conductivity. In addition to the Peltier element 8, the second heat radiating unit 6 is constituted by a known water-cooled cooler using a coolant having a temperature lower than the normal temperature water as a cooling medium, or a well-known vapor compression cooler. Etc. can also be adopted.

  The fan 10 performs an air blowing operation toward the substrate on the heat dissipation side of the Peltier element 8, and is for increasing the heat dissipation efficiency by the substrate. In addition, as a thing for improving the thermal radiation efficiency by a board | substrate, not only the said fan 10 but a heat sink and a water cooling jacket are employable.

  In the cooling unit 1 having such a configuration, the working fluid located on one end side (hereinafter referred to as the heat absorption side) of the heat pipe 2 in which the heat absorption unit 3 is installed causes the heat absorption unit 3 and the case 2a of the heat pipe 2 to move. Then, heat (latent heat, heat of vaporization) is absorbed from the air in the test chamber, and the working fluid evaporates.

  Here, by installing the cooling unit 1 in an appropriate installation mode, the vapor of the working fluid that has absorbed heat on the heat absorption side moves to the heat dissipation side at a substantially sonic speed. The vapor of the working fluid moved to the heat radiating side is liquefied again as a result of releasing heat by the action of the first and second heat radiating portions 5 and 6, and this liquefied working fluid recirculates again to the heat absorbing side. The cooling unit 1 moves heat by such phase change and movement of the working fluid.

  Next, the thermo-hygrostat 100 using such a cooling unit 1 will be described. FIG. 2 is a cross-sectional view showing the configuration of the constant temperature and humidity chamber 100.

  As shown in FIG. 2, the constant temperature and humidity chamber 100 includes, for example, a test chamber R1 for performing tests such as heat resistance and moisture resistance of various articles and materials, and temperature and humidity of air (atmosphere) in the test chamber R1. The air conditioning room S1 as a space for maintaining the target value, and the air conditioning room S1 are configured to have a partitioned heat source adjustment room S2. The test room R1 and the air-conditioning room S1 are partitioned by a partition wall 13 installed at an appropriate place in a space surrounded by a heat insulating wall 21 in a manner having upper and lower communication portions 11 and 12, respectively.

  A fan 14 that performs an air blowing operation is installed at an appropriate place in the air conditioning room S1 (for example, the upper part of the air conditioning room S1), and the fan 14 is installed in the test room R1 and the air conditioning room S1 surrounded by the heat insulating wall 21. This is for circulating air in a predetermined direction (in the direction of arrow X in FIG. 2).

  A heater 15 for heating air is installed at an appropriate location upstream of the fan 14 in the air conditioning room S1, and a humidifier 16 is installed further upstream. The humidifier 16 evaporates the contained water (humidification water) by heating it using the electric heater 25 and humidifies the air flowing in from the test chamber R1. Thus, saturated air can be generated, and the constant temperature and humidity controller 100 adjusts the saturated air to a desired humidity by heating the saturated air with the heater 15.

  The heat source adjustment chamber S2 is formed in a form adjacent to the air conditioning chamber S1 along the outer wall surface of the heat insulating wall 21, and the cooling unit 1 described above straddles a plurality of heat source adjustment chambers S2 and the air conditioning chamber S1. Arranged. That is, in FIG. 1, the case 2 a formed in a straight line has been described, but here, the case 2 a is bent at a right angle between the heat absorbing portion 3 and the heat radiating portion 4 and is cooled. The unit 1 penetrates the heat insulating wall 21, and the heat absorption part 3 is arranged at an appropriate position between the heater 15 and the humidifier 16 in the air conditioning room S1, while the heat radiation part 4 is arranged in the heat source adjustment room S2. Yes. In addition, in FIG. 2, although the case 2a has shown the form bent in the suitable place between the said heat absorption part 3 and the heat radiating part 4, it is not restricted to this, Even if the case 2a is bent in another site | part. Alternatively, a plurality of bent portions may exist, or may be formed in a straight line.

  The heat source adjustment chamber S2 is installed between the one outer wall surface 21a of the heat insulating wall 21, the opposing wall 17 facing the outer wall surface 21a, and each end of the opposing wall 17 and the outer wall surface 21a of the heat insulating wall 21. The first and second heat dissipating parts 5 and 6 are vertically arranged along the outer wall surface 21a and the opposing wall 17 of the heat insulating wall 21. It is arranged over a certain distance. By disposing the first heat radiating part 5 above the second heat radiating part 6, the working fluid in the case 2a is circulated efficiently.

  A plurality of holes (not shown: an example of the exhaust port) are formed in the facing wall 17, and a fan 20 that performs a blowing operation is provided at a position facing the first heat radiating unit 5 in the facing wall 17. Is installed, and a circulation structure in which air circulates between the inside and the outside of the heat source adjustment chamber S2 is configured by the operation of the fan 20 and the fan 10 provided in the second heat radiating unit 6. That is, when the fans 10 and 20 are operated, the air in the heat source adjustment chamber S2 is discharged to the outside through a hole formed in the facing wall 17, and the negative pressure generated by the discharge causes the filter from the outside of the heat source adjustment chamber S2. Air is circulated between the inside and the outside of the heat source adjustment chamber S2 by the outside air being taken into the heat source adjustment chamber S2 via 18 and 19. The circulating air passes through the heat sink 7 of the first heat dissipating part 5 and the substrate on the heat dissipating side of the Peltier element 8 of the second heat dissipating part 6 and increases the heat dissipating efficiency by these members.

  FIG. 3 is a block diagram showing an electrical configuration of the constant temperature and humidity chamber 100. As shown in FIG. 3, the constant temperature and humidity chamber 100 includes a cooling unit 1 shown in FIG. 1, an ambient temperature and humidity sensor 101, an outside air temperature sensor 102, a heat absorption part temperature sensor 103, a Peltier temperature sensor 104, and an input. An operation unit 105 and a control unit 106 are provided.

  The atmosphere temperature / humidity sensor 101 detects the temperature and humidity of the air (atmosphere) in the test chamber R1, and is, for example, slightly downstream of the communication portion 11 on the side where air flows out from the air conditioning chamber S1 to the test chamber R1. (Position indicated by point A in FIG. 2). Note that the installation position of the ambient temperature / humidity sensor 101 is not limited to the above-described position. (Position shown) etc. may be installed.

  The outside air temperature sensor 102 detects the temperature of the outside air used in the heat radiation operation by the first heat radiating unit 5, and is installed, for example, at a position slightly downstream from the filter 19 (a position indicated by a point C in FIG. 2). The The heat absorption part temperature sensor 103 detects the temperature of the air in the air conditioning room S1 at a position near the heat absorption part 3. The Peltier temperature sensor 104 detects the temperature of the Peltier element 8. For example, a thermocouple or a temperature measuring low antibody that detects the surface temperature of the Peltier element 8 is employed. The Peltier temperature sensor 104 is not limited to the above-described thermocouple or temperature measurement low antibody, and may detect the surface temperature in a non-contact manner. The temperature detected by the Peltier temperature sensor 104 is provided to stop the driving of the Peltier element 8 when the temperature of the Peltier element 8 exceeds a predetermined temperature in order to prevent deterioration or failure of the Peltier element 8. Sensor.

  The input operation unit 105 includes mechanical buttons such as a start / end button for starting or ending the operation of the constant temperature and humidity chamber 100, a setting button for setting a target temperature and humidity of the air in the test chamber R1, and the like. It includes a virtual button or the like configured by a switch or a touch panel display.

  The control unit 106 is composed of, for example, a microcomputer in which a ROM for storing a control program, a RAM for temporarily storing data, and the like are built, and the first fan drive control unit 1061 and the first functionally are controlled by the control program. 2 fan drive control part 1062, Peltier drive control part 1063, humidification control part 1064, and heating control part 1065 are provided.

  The first fan drive control unit 1061 controls the drive of the fan 14 installed in the air conditioning room S1, and in this embodiment, the period during which the temperature and humidity of the air in the test room R1 needs to be adjusted is The fan 14 is always operated. The second fan drive control unit 1062 controls the drive of the fan 20 installed in the heat source adjustment chamber S2 based on the detected temperature and humidity detected by the temperature sensors 101 to 103 and the target temperature and humidity. The Peltier drive control unit 1063 controls the drive of the Peltier element 8 and the drive of the fan 10 constituting the second heat radiating unit 6 based on the detected temperature / humidity by the temperature sensors 101 to 104 and the target temperature / humidity. is there. The humidification control unit 1064 controls the humidification operation by the humidifier 16 based on the detected temperature / humidity by the temperature sensors 101 to 104 and the target temperature / humidity. The heating control unit 1065 controls the heating operation by the heater 15 based on the detected temperature / humidity and the target temperature / humidity detected by the temperature sensors 101 to 104.

  The first fan drive control unit 1061 operates the fan 14 in the air conditioning room S1 to circulate air between the test room R1 and the air conditioning room S1. When the ambient temperature in the test chamber R1 detected by the ambient temperature / humidity sensor 101 is higher than the dew point temperature determined by the set target temperature / humidity (hereinafter referred to as the set dew point temperature), the humidification control unit 1064 includes a humidifier. 16 is stopped and at least one of the second fan drive control unit 1062 and the Peltier drive control unit 1063 causes the cooling unit 1 to perform a cooling operation (heat radiation operation). The contents of control performed by the second fan drive control unit 1062 and the Peltier drive control unit 1063 will be described later.

  As a result, when the amount of water vapor contained in the air before cooling by the cooling unit 1 is larger than the saturated water vapor amount corresponding to the temperature of the air after cooling, the dew condensation operation is performed by condensation of the larger amount. As a result, when the air before and after passing through the heat absorption part 3 of the cooling unit 1 is compared, the dew point temperature of the air after passing through the heat absorption part 3 is lower than the air before passing through the heat absorption part 3. It becomes.

  Thereafter, the heating control unit 1065 causes the heater 15 to perform a heating operation, and the air whose temperature is increased after dehumidification is supplied to the test chamber R1 by the operation of the fan 14. While such air circulation is performed, the temperature and humidity of the air in the test chamber R1 approaches the target temperature and humidity.

  FIG. 4 is a flowchart showing processing of the control unit 106 in the constant temperature and humidity chamber 100.

  As shown in FIG. 4, the power supply (not shown) of the constant temperature and humidity chamber 100 is turned on (YES in step # 1), and the target temperature and humidity are set by the input operation unit 105 (YES in step # 2). When a start instruction is given by the input operation unit 105 (YES in step # 3), the control unit 106 controls the temperature and humidity of the atmosphere in the test chamber R1 using the cooling unit 1, the heater 15, and the humidifier 16. Is executed (step # 4).

  Then, control unit 106 executes the process of step # 4 until an operation stop instruction is issued (NO in step # 5). When an operation stop instruction is issued (YES in step # 5), temperature and humidity control is performed. Is stopped (step # 6). Further, control unit 106 determines whether or not the power is turned off (step # 7). If it is determined that the power is not turned off (NO in step # 7), the control unit 106 returns to step # 2 to If it is determined that is turned off (YES in step # 7), the series of processes is terminated.

  Next, the temperature and humidity control in step # 4 of the flowchart shown in FIG. 4 will be described in detail. FIG. 5 is a diagram showing an operation matrix showing this temperature and humidity control. FIG. 5A is a graph showing a temperature / humidity range that can be set as a target, with temperature as the horizontal axis and humidity as the vertical axis, and the range indicated by the dotted line indicates the temperature / humidity range that can be set as the target. ing. Moreover, the range was divided into five areas: (1) high temperature and high humidity area, (2) high temperature and low humidity area, (3) medium temperature and high humidity area, (4) medium temperature and low humidity area, and (5) low temperature and high humidity area. In this embodiment, the control unit 106 (the second fan drive control unit 1062 and the Peltier drive control unit 1063) includes the first and second heat radiating units 5 and 6 in the respective temperature and humidity regions (1) to (5). The operation is performed as shown in FIG. In FIG. 5B, “intermediate temperature” is a temperature slightly higher than the outside air temperature, and “low temperature” is a temperature lower than the outside air temperature. Further, the initial temperature of the air in the test chamber R1 is substantially the same temperature as the outside air temperature, and the initial humidity is a humidity between “high humidity” and “low humidity” in FIG. To do.

  The control unit 106 (1) stops the operation of both the first heat radiating unit 5 and the second heat radiating unit 6 in the high temperature and high humidity region. This is because the target temperature and humidity are high, and thus it is not necessary to cause the first and second heat radiating units 5 and 6 to perform the cooling operation. When the target temperature is particularly high, in addition to the heating operation by the heater 15. Thus, the Peltier element 8 may be caused to perform the heating operation by supplying a direct current in the opposite direction to the case where the Peltier element 8 of the second heat radiating unit 6 performs the cooling operation.

  Moreover, the control part 106 stops the action | operation of the 2nd heat radiating part 6, while operating the 1st heat radiating part 5 in the high temperature low humidity area | region. In this case, the air at the target temperature is obtained by supplementing with the heating operation by the heater 15 by the amount of the cooling operation by the first heat radiating unit 5. In this region, the operation of the first heat radiating unit 5 may be stopped and the second heat radiating unit 6 may perform a heating operation.

  The control unit 106 generates (3) saturated air having a dew point in the humidifier 16 in the middle temperature and high humidity region, and operates the first heat radiating unit 5 to cool the saturated air, while the second heat radiating unit 6 The operation of is stopped. Further, the control unit 106 activates the first heat radiating unit 5 and stops the operation of the second heat radiating unit 6 in the (4) medium temperature and low humidity region, as in (3) the medium temperature and high humidity region. Since it is necessary to perform dehumidification with respect to the air which has flowed into the cooling unit 1, the 1st thermal radiation part 5 is operated. In this case, the air at the target temperature is obtained by supplementing with the heating operation by the heater 15 by the amount of the cooling operation by the first heat radiating unit 5. Moreover, the control part 106 makes the 2nd thermal radiation part 6 perform cooling operation, while stopping the operation | movement of the 1st thermal radiation part 5 (5) in a low temperature, high humidity area | region.

  Further, it is assumed that the initial temperature of the air in the test chamber R1 is substantially the same temperature as the outside air temperature. However, when the initial temperature of the air in the test chamber R1 is different from the outside air temperature, the test chamber R1 When it is necessary to cool the inside air, the control unit 106 may perform the following temperature and humidity control.

  That is, the control unit 106 performs different control when the target temperature is equal to or higher than the outside air temperature and when the target temperature is lower than the outside air temperature. Specifically, as shown in FIG. 5, when the air in the test chamber R1 is cooled to a target temperature equal to or higher than the outside air temperature, the control unit 106 operates the first heat radiating unit 5 while the second heat radiating unit 5 operates. The part 6 is stopped. This is because the air in the test chamber R1 can be quickly cooled to the target temperature only by the heat radiation operation by the first heat radiation unit 5.

  In addition, when the control unit 106 cools the air in the test chamber R1 to a target temperature lower than the outside air temperature, the control unit 106 performs a cooling operation on at least the second heat radiating unit 6 among the first and second heat radiating units 5 and 6. Let it be done. In addition, it is good to determine the presence or absence of the action | operation of the 1st thermal radiation part 5 according to the magnitude of the initial temperature of the air in the test chamber R1. That is, when the initial temperature of the air in the test chamber R1 is relatively high, the first heat radiating unit 5 is also operated, while the initial temperature of the air in the test chamber R1 is relatively low (close to the outside air temperature). The 1st thermal radiation part 5 stops an operation.

  Furthermore, when the target temperature is lower than the outside temperature, when both the first heat radiating part 5 and the second heat radiating part 6 are operated, it is preferable to control as follows.

  That is, as shown in FIG. 6, the Peltier drive control unit 1063 has a temperature detected by the heat absorption unit temperature sensor 103 (hereinafter referred to as a detected heat absorption unit temperature) that is decreased by the operation of the fan 20. The driving of the Peltier element 8 is awaited until it reaches a temperature higher than the temperature by a predetermined temperature α (hereinafter referred to as a determination temperature), and when the detected endothermic temperature reaches the determination temperature, the Peltier element 8 is driven.

  The drive start timing of the Peltier element 8 is set to a timing at which the detected heat absorption part temperature reaches a temperature that is higher than the detected outside air temperature by a predetermined temperature α for the following reason. That is, when the drive of the Peltier element 8 is started at the timing when the detected heat absorption part temperature reaches the detected outside air temperature, the heat absorption amount of the Peltier element 8 is small, and therefore the configuration of the second heat radiation part 6 including the Peltier element 8 In some cases, it takes time for the temperature of the component itself to fall to the detected outside air temperature. In this case, the cooling speed is temporarily lowered by the required time. Further, it is possible to quickly cool to the vicinity of the outside air temperature only by the operation of the fan 20.

  From the above, by setting the drive start timing of the Peltier element 8 to a timing at which the detected heat absorption unit temperature reaches a temperature higher than the detected outside air temperature by the predetermined temperature α, the detected heat absorption unit temperature is detected by the fan 20. Until the temperature is lowered to the outside air temperature, the temperature of the component parts of the second heat radiating unit 6 can be lowered to the detected outside air temperature, and a temporary reduction in the cooling speed can be prevented or suppressed. Power can be saved.

  As described above, in the present embodiment, not only the configuration for cooling the heat medium condensing side using the outside air (first heat radiating portion 5) but also the second heat radiating portion 6 described above is provided. The temperature of the air in the chamber R1 can be cooled with a large heat radiation amount toward the outside air temperature, and can be cooled to a temperature lower than the outside air temperature by the second heat radiating unit 6.

  Moreover, since the heat absorption part 3 of the cooling unit 1 can be controlled near the dew point temperature, the air flowing in from the test chamber R1 is excessively cooled like the conventional compression cooler (from the dew point temperature). (Cooling to a significantly lower temperature). As a result, the amount of water condensed on the surface of the cooling unit 1 (heat absorption part 3) is small, and corrosion of the components of the cooling unit 1 including the heat absorption part 3 can be suppressed. Since the amount of water vapor to be generated can be suppressed, the amount of water (humidification water) provided in the humidifier 16 can be reduced as compared with the prior art.

  Moreover, since the 1st heat radiating part 5 was installed in the other end part of the heat pipe 2, and the 2nd heat radiating part 6 was installed in the intermediate position between the 1st heat radiating part 5 and the heat absorbing part 3, it is 2nd heat radiating. A cooling operation that fully utilizes the cooling performance of the section 6 can be performed.

  That is, the vapor of the working fluid that has absorbed heat at the position of the heat absorbing portion 3 moves toward the first heat radiating portion 5 at a substantially sonic speed, and when both the first and second heat radiating portions 5 and 6 are operated, It is cooled by the first heat radiating part 5 and further cooled by the second heat radiating part 6.

  Here, in the case where the first heat radiating part 5 is installed on the heat absorbing part 3 side from the second heat radiating part 6 in the heat transport direction of the case 2a, and the first and second heat radiating parts 5 and 6 are operated in parallel. When the first heat radiating portion 5 is driven when the endothermic temperature is lower than the outside air temperature, an endothermic (evaporating) action occurs in the first heat radiating portion 5, and the cooling performance of the second heat radiating portion 6 can be fully utilized. become unable.

  On the other hand, in this embodiment, by installing the second heat dissipating part 6 closer to the heat absorbing part 3 than the first heat dissipating part 5, there is a situation where an endothermic (evaporating) action occurs in the first heat dissipating part 5. It does not occur, and the cooling performance of the second heat radiation part 6 can be fully utilized.

  In the case where the second heat radiating portion 6 is composed of the Peltier element 8, the first heat radiating portion 5 cools to the vicinity of the outside air temperature and then the cooling operation by the Peltier element 8 is performed. Will be activated. Therefore, when the air in the test chamber R1 is at a high temperature, it is possible to avoid a situation in which a large amount of energy is required for the Peltier element 8 itself to lower the temperature. Even in the Peltier element 8 having a small capacity, the air in the test chamber R1 can be quickly cooled.

  In this case, the following embodiment can also be adopted in addition to or instead of the contents of the embodiment.

  (1) In the above-described embodiment, the fan 20 for ventilating the heat sink 7 of the first heat radiating unit 5 is installed. However, the present case does not necessarily include the fan 20 and includes a configuration in which only the heat sink 7 is naturally cooled.

  (2) Even if the current supply to the Peltier element 8 is stopped, the components of the second heat radiating unit 6 continue to be in a low temperature state for a while, so that the second heat radiating unit 6 cools the working fluid (heat absorption). This is considered to cause the temperature of the air in the test chamber R1 to move further to the lower temperature side than the target temperature. In view of this, when the air in the test chamber R1 reaches the target temperature, the direction of the direct current supplied to the Peltier element 8 is reversed, and the substrates functioning as the heat absorption side and the heat dissipation side are switched. It is preferable to prevent or suppress the temperature of the air in R1 from moving further to the lower temperature side than the target temperature so that the temperature of the air in the test chamber R1 is maintained at the target temperature. Further, when the operation of the cooling unit 1 is stopped, a reverse direct current may be supplied to the Peltier element 8 to return the working fluid to the outside air temperature as described above. Note that the direction of the direct current supplied to the Peltier element 8 may be switched automatically (by control) or manually by providing an operation button.

It is a figure which shows the mechanical structure of one Embodiment of the cooling unit with which the constant temperature and humidity chamber which concerns on this invention is equipped. It is sectional drawing which shows the structure of a constant temperature and humidity chamber. It is a block diagram which shows the electrical structure of a constant temperature and humidity chamber. It is a flowchart which shows the process of the control part in a cooling device. It is a figure which shows the operation | movement matrix which shows the operation | movement of a fan and a Peltier device. It is a graph which shows the operation | movement aspect of a 1st, 2nd thermal radiation part in case target temperature is lower than external temperature.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cooling unit 2 Heat pipe 3 Heat absorption part 4 Heat radiation part 5, 6 1st, 2nd heat radiation part 7 Heat sink 8 Peltier element 10, 14, 20 Fan 11, 12 Communication part 13 Partition wall 15 Heater 16 Humidifier 17 Opposite wall 18, 19 Filter 21 Heat insulation wall 21a Outer wall surface 100 Constant temperature and humidity chamber 101 Ambient temperature and humidity sensor 102 Outside air temperature sensor 103 Endothermic temperature sensor 104 Peltier temperature sensor 105 Input operation unit 106 Control units 1061 and 1062 First and second fan drive Control unit 1063 Peltier drive control unit 1064 Humidification control unit 1065 Heating control unit

Claims (6)

A test chamber, an air-conditioning chamber provided to adjust the temperature and humidity of the air in the test chamber to a target temperature and humidity, a blower unit that circulates air between the test chamber and the air-conditioning chamber, and the test chamber A constant temperature and humidity chamber provided with a humidifying unit for humidifying the air flowing into the air-conditioning chamber from, and a cooling unit for cooling the air,
The cooling part is
An endothermic part disposed in the air-conditioned room;
A heat dissipating part having a first heat dissipating part and a second heat dissipating part disposed outside the air-conditioning room;
A heat transport phenomenon for causing heat pipe phenomenon to occur in the working fluid sealed in the enclosing body, and heat transport from the heat absorbing section to the heat radiating section,
The heat absorption part and the first and second heat radiation parts are thermally connected to the heat transport part,
The first heat radiating unit is configured to release heat of the heat transport unit using outside air as a cooling medium,
The second heat radiating unit is a constant temperature and humidity chamber that releases the heat of the heat transporting unit so that the temperature of the heat transporting unit is lowered to a temperature lower than the outside air temperature.   2. The constant temperature and humidity chamber according to claim 1, wherein the second heat dissipating unit is installed closer to the heat absorbing unit than the first heat dissipating unit in the heat transport direction of the heat transport unit. A temperature and humidity detector for detecting the temperature and humidity of the air in the test chamber;
The thermo-hygrostat according to claim 1 or 2, further comprising: a control unit that controls operations of the humidification unit and the cooling unit based on an output signal of the temperature / humidity detection unit. An endothermic temperature detector for detecting the temperature of the endothermic unit;
The control unit operates the first heat radiating unit during a period in which the air in the test chamber is to be cooled, and when the temperature detected by the heat absorbing unit temperature detecting unit decreases to a predetermined temperature, the second unit The thermo-hygrostat according to claim 3, wherein the operation of the heat radiating part is started.   The constant temperature and humidity chamber according to any one of claims 1 to 4, wherein the second heat radiating portion is configured using a Peltier element.   The constant temperature and humidity chamber according to any one of claims 1 to 5, wherein the first heat radiating portion is disposed above the second heat radiating portion.

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