JP2008200422A - Decontamination method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a decontamination method which inhibits no operation during the processes, and furthermore, is capable of grasping the decontamination state at the desired point. <P>SOLUTION: A first condensation sensor 31 and a second condensation sensor 32 are separately mounted on each different position in an isolator 1, and the equivalent value P1, P2 of each condensation amount is measured and the relative ratio K (= P2/P1) is computed with the measured equivalent value of condensation value P1, P2 in the process before decontamination, and an equivalent value of condensation amount P'1 is measured again with the first condensation sensor 31 holding the mounting position of the process before decontamination, and the equivalent value of condensation amount P'1 and the relative ratio K are used to compute an equivalent value of condensation amount, such as an estimated equivalent value P'2 of condensation value, at the mounted position of the second condensation sensor 32 used in the process before decontamination, and the decontamination state of the isolator 1 is controlled from the estimated equivalent value P'2 of condensation amount and the decontamination process is performed to decontaminate the surface of a mechanical device W in the isolator 1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a decontamination method in which a decontamination gas is introduced into a sealed chamber, the decontamination gas is condensed on the surface of the object to be decontaminated in the sealed chamber, and the surface of the object to be decontaminated is decontaminated. .

  A decontamination gas such as hydrogen peroxide gas is introduced into a sealed chamber that is airtightly shielded from the outside, and the decontamination gas is condensed on the surface of the decontamination target that is present in the sealed chamber. A decontamination method for decontaminating the surface of an object is already well known (for example, see Patent Document 1). Examples of such a sealed chamber include an isolator, and examples of the decontamination target include a mechanical device such as a filling device for filling a vial with contents, or the inner surface of the sealed chamber. When the decontamination process for decontaminating the object to be decontaminated is completed and the decontamination is completed, all the decontamination gas is exhausted, and the mechanical device is actually driven in the sealed chamber while maintaining the decontamination state. Therefore, an operation process for operations such as production is executed.

  Furthermore, in the above decontamination process, a configuration in which a known condensation sensor capable of detecting the condensation of the decontamination gas is disposed in the sealed chamber, and the condensation state of the decontamination gas in the sealed chamber is managed by the condensation sensor has already been proposed. (For example, refer to Patent Document 2). Such a condensation sensor is disposed at a location where management of decontamination is particularly important in a sealed room. Here, as a place where management of decontamination is particularly important, the surface of the above-described mechanical device or a position in the vicinity thereof can be cited as an example. This is because, first, the surface of the machine is where the operation is actually performed, and it must be surely avoided that the product contaminated with microorganisms is produced. In addition, in the vicinity of the mechanical device, the mechanical device itself has a complicated shape or various devices are often dense, and it is difficult for decontamination gas to reach the surface of the mechanical device, so-called This is because it tends to be a cold spot.

JP-T-2003-527111 Table 2003-095994

  However, when the operation is actually performed by driving the mechanical device, if the condensing sensor is arranged on the upper surface of the mechanical device, the condensing sensor becomes a hindrance and a problem occurs in the operation. Therefore, in reality, the arrangement position of the condensation sensor is limited to a position that does not hinder the operation, and cannot always be arranged at a desired position.

  An object of this invention is to provide the decontamination method which can grasp | ascertain the decontamination condition of a desired position, without disturbing the operation at the time of operation process execution in view of an above-described problem.

  The present invention introduces a decontamination gas into a sealed chamber that is airtightly shut off from the outside, and condenses the decontamination gas on the surface of the decontamination target that is present in the sealed chamber, thereby surface of the decontamination target In the decontamination method, the decontamination gas in the sealed chamber is condensed on the surface thereof, and the condensation amount that varies with the change in the condensation amount of the decontamination gas condensed in the condensation formation unit A decontamination gas is introduced into a sealed chamber in which a plurality of condensation sensors having a condensation amount equivalent value measuring means for measuring the equivalent value and outputting the value is provided, and the condensation sensor is set to a value corresponding to the condensation amount at a predetermined measurement timing. Each of the condensation sensors, and the condensation value equivalent value measured by any one of the condensation sensors and the condensation value equivalent value measured by any one of the other condensation sensors, Decontamination process to calculate the ratio After the execution of the pre-decontamination process, one of the two condensation sensors that have been decontaminated and have a relative ratio calculated in the pre-decontamination process is positioned at the pre-decontamination process. The decontamination gas is re-introduced into the sealed chamber formed, and the condensation equivalent value is measured again by the condensation sensor at a predetermined measurement timing. The condensation equivalent value and the relative ratio are related to the relative ratio. An estimated condensation amount equivalent value at the position where the other condensation sensor of the two condensation sensors is arranged is calculated, and the surface of the object to be decontaminated is controlled by controlling the decontamination state of the sealed chamber based on the estimated condensation amount equivalent value. And a decontamination process for dyeing.

  As described above, the decontamination method according to the present invention includes the pre-contamination process executed in the first half and the decontamination process executed in the second half. Here, the process of actually decontaminating the decontamination object in the sealed room is a decontamination process, and the pre-decontamination process is positioned as a preparation process for executing the decontamination process.

By the way, the present invention is premised on the following principle.
Usually, the condensation amounts of the condensation films formed at different positions in the sealed chamber are substantially constant at different values when measured with sufficient time. The values that are different from each other in this manner are that in the process of introducing the decontamination gas into the sealed chamber, the arrangement of devices or instruments in the sealed chamber, temperature differences, variations in airflow, or the surface of the sealed chamber or decontamination target Due to the shape and other factors, there is a difference in the way in which the decontamination gas is distributed even in the same indoor space, and there are positions where condensation of the decontamination gas is relatively likely to occur and positions where it is relatively unlikely to occur. It is by doing. Therefore, if the condensation sensor X and the condensation sensor Y are arranged, an absolute difference in condensation amount occurs between the arrangement position of the condensation sensor X and the arrangement position of the condensation sensor Y. Then, for example,
(Condensation amount equivalent value of condensation sensor X): (Condensation amount equivalent value of condensation sensor Y) = 2: 1
The relationship is established. Here, based on this relationship,
(Condensation amount equivalent value of condensation sensor Y) / (Condensation amount equivalent value of condensation sensor X) = Calculation formula of relative ratio is derived, and in the above example, both condensation sensors X and Y are 1/2. The relative ratio can be calculated. In other words, it can be inferred that the condensation position of the condensation sensor Y is ½ that of the condensation sensor X. Then, when the decontamination gas is separately supplied, the condensation amount corresponding to the condensation sensor X and the relative ratio are used, so that the condensation amount is not actually measured by the condensation sensor Y. A condensing amount equivalent value at the position where the sensor Y is arranged can be estimated. The condensation amount equivalent value of the arrangement position of the condensation sensor Y estimated in this manner is the estimated condensation amount equivalent value of the arrangement position of the condensation sensor Y according to the present invention. Therefore, in the decontamination situation in the sealed room,
(Estimated condensation amount equivalent value of the arrangement position of the condensation sensor Y) = (Condensation amount equivalent value of the condensation sensor X) × (Relative ratio)
This leads to the principle that this relationship holds.

  Based on the above principle, in the decontamination process of the present invention, without measuring the condensation amount equivalent value with the other condensation sensor among the two condensation sensors according to the relative ratio calculated in the precontamination process, Using the condensation amount equivalent value measured by one of the two condensation sensors related to the relative ratio and the relative ratio according to the present invention, it is possible to grasp the condensation state of the arrangement position of the other condensation sensor. It becomes. The relative ratio calculated in the pre-decontamination process is obtained by dividing the condensation amount equivalent value corresponding to the one condensation sensor by the condensation amount equivalent value corresponding to the other condensation sensor measured at the same timing. Alternatively, the relative ratio may be calculated by dividing the condensation amount equivalent value corresponding to the other condensation sensor by the condensation amount equivalent value corresponding to the one condensation sensor. Moreover, the measurement timing which measures a condensation amount equivalent value may correspond in the precontamination process and the decontamination process, and may differ. In general, the value corresponding to the condensation amount is measured at an appropriate timing after the decontamination gas is supplied and the value becomes constant. Further, in the present invention, it is not necessary to measure the specific amount of condensation by the condensation sensor, and it is only necessary to measure a value corresponding to the amount of condensation that fluctuates with a change in the amount of condensation of the decontamination gas. However, the present invention does not actively exclude a configuration capable of measuring the amount of condensation. In addition, the measurement of the value corresponding to the condensation amount by the condensation sensor may be continuous measurement or intermittent measurement. The decontamination in the present invention includes chemical T-phase decontamination, sterilization, sterilization, sterilization and the like. The sealed room is a concept including, for example, a clean room, a hospital room, a sterile room, an isolator, a decontamination chamber, a chamber, and the like. As the decontamination gas, hydrogen peroxide gas is suitable, but other gases may be used. In addition, decontamination target is a concept that includes everything that is subject to decontamination, including equipment installed in a sealed room, equipment such as a desk, office equipment such as a computer, wall surface of a sealed room, You may include a floor surface, a ceiling surface, etc. In addition, controlling the decontamination state of the sealed chamber includes controlling the input amount of the decontamination gas, changing the flow rate of the decontamination gas, changing the indoor humidity, changing the indoor temperature, and the like. Well-known techniques that have been well known in the past are preferably employed. Note that controlling the input amount of the decontamination gas means, for example, adjusting the input amount of the decontamination gas, and of course, stopping the input of the decontamination gas. In the present invention, when three or more condensation sensors are arranged, one of the condensation sensors and one of the other condensation sensors other than the condensation sensor are used to provide one relative sensor. It is not limited to the configuration for calculating the ratio, and it is of course possible to calculate the relative ratio for each of the one condensation sensor and each of the remaining condensation sensors. In addition, when two condensation sensors (first condensation sensor and second condensation sensor) are arranged in the pre-contamination process, the first condensation sensor corresponds to one of the plurality of condensation sensors, The second condensation sensor corresponds to any one other condensation sensor.

  In addition, in the structure described so far, the condensation sensor at a position that does not hinder the operation process is used as the one condensation sensor in the decontamination process, and the position of the mechanical device or its vicinity important in decontamination management. A suitable example is a configuration in which the other condensation sensor in the decontamination step is used as the other condensation sensor. In such a configuration, if the other condensing sensor is removed after the pre-decontamination process, the decontamination process can be decontaminated while reliably grasping the decontamination gas concentration at a point important for decontamination management. Since the condensation sensor is not installed on the surface of the mechanical device, the mechanical device can be smoothly driven in the subsequent operation process.

  Further, there is proposed a configuration in which a condensation amount equivalent value is measured by a condensation sensor, and fungus killing information indicating whether or not the fungus has been killed at the measurement position is assigned to the measured condensation amount equivalent value.

  In this configuration, the germ kill information includes a negative indicating that the germ is killed at a predetermined position and a positive indicating that the germ is not yet killed. As described above, when the condensation amount equivalent value is measured, the arrangement of the other condensation sensor estimated in the decontamination step is performed by preliminarily assigning negative or positive bacteria killing information to the condensation amount equivalent value. While confirming the value corresponding to the condensation amount at the position, it is possible to grasp the killed state of the bacteria at the position where the condensation sensor is arranged at that timing. As a result, an appropriate end timing of the decontamination process can be known, and an error that the decontamination process is ended although the decontamination is not actually completed can be eliminated.

  Further, the condensation amount equivalent value measuring means of one of the two condensation sensors related to the relative ratio calculated in the pre-contamination process is based on the decontamination gas condensed in the condensation forming portion related to the condensation sensor. It is proposed that a condensate equivalent value measuring device that measures the equivalent value is used, and that the condensate forming portion of the condensing sensor and / or the condensate equivalent value measuring device is close to or close to the chamber wall of the sealed chamber.

  In such a configuration, the configuration of the one condensation sensor allows an operator to easily perform various management operations (for example, maintenance management such as visual confirmation of the condensation amount equivalent value output and cleaning) from outside the sealed room. It is preferable to be as close or close to the chamber wall of the sealed chamber as possible. With such a configuration, when trouble occurs in the condensation sensor in the decontamination process, an operator outside the sealed room can quickly respond. In addition, as long as at least one of the condensation forming part of the condensation sensor and the condensed amount equivalent value measuring device is close to or close to the chamber wall of the sealed chamber, the operational effect according to the present invention can be exhibited.

  In addition, a configuration is proposed in which a graph showing a change with time of a value corresponding to the amount of condensation measured by the condensation sensor is proposed.

  By adopting such a configuration, the worker can surely recognize the change in the condensation amount corresponding value with the passage of time through vision. In other words, the operator can clearly recognize the condensation process at the position where each condensation sensor is arranged.

  In addition, a plurality of relative ratios are calculated by performing the pre-decontamination process a plurality of times, and at the decontamination process, one of the plurality of relative ratios is selected, and two condensations related to the relative ratio based on the relative ratios are selected. A configuration is proposed in which an estimated condensation amount equivalent value at the position where the other condensation sensor among the sensors is arranged is calculated.

  In such a configuration, when the pre-decontamination process is executed a plurality of times, various relative ratios are calculated based on the contents of the decontamination gas input conditions for each time. Here, when the pre-contamination process or the decontamination process is executed, it is actually very difficult to make the decontamination gas input conditions completely the same in both processes, and usually some conditions are different. As a result, the process of forming condensation of the decontamination gas changes. Therefore, in view of such actual circumstances, a plurality of relative ratios are calculated in advance as in the present invention, and the plurality of relative ratios are calculated with reference to the condensation amount equivalent value of the condensation sensor measured in the decontamination process. By appropriately selecting one of the relative ratios among the ratios, it is possible to execute a decontamination process in accordance with the actual state of the condensation process.

  The decontamination method according to the present invention includes a precontamination process for calculating a relative ratio with a value corresponding to a condensation amount measured by a condensation sensor, and a condensation amount measured by one of the two condensation sensors for which the relative ratio was calculated. The decontamination process calculates the estimated condensate equivalent value at the position of the other condensation sensor based on the equivalent value and the relative ratio. Therefore, the condensation can be performed without using the other condensation sensor in the decontamination process. There is an effect that it is possible to grasp the condensation process at the sensor arrangement position.

  In addition, in the configuration in which the bacteria kill information is assigned to the condensation amount equivalent value, it is possible to grasp the kill of the bacteria from the output condensation amount equivalent value, so the bacteria are killed based on the measured condensation amount equivalent value. Confirmation of that has been obtained. For this reason, an appropriate end timing of the decontamination process is known, and there is an effect of eliminating an error that the decontamination process is ended although the decontamination is not actually completed.

  In addition, when the condensation forming part of the condensation sensor used in the decontamination process and / or the condensation amount equivalent value measuring device is configured to be close to or in close contact with the chamber wall of the sealed chamber, an operator can access the condensation sensor from outside the sealed chamber. On the other hand, since various management operations can be easily performed, there is an effect that when a trouble occurs in the condensation sensor, it is possible to respond quickly.

  In addition, when configured to create a graph showing the change of the condensation amount equivalent value measured by the condensation sensor with the passage of time, the operator reliably recognizes the change of the condensation amount equivalent value with the passage of time visually. Therefore, it is possible to clearly recognize the condensation process at the position where each condensation sensor is arranged.

  Furthermore, when the pre-decontamination process is executed a plurality of times to calculate a plurality of relative ratios, and the decontamination process is configured to calculate an estimated condensation amount equivalent value using any of the plurality of relative ratios. There is an effect that a decontamination process according to the actual situation can be executed.

Embodiments according to the present invention will be described with reference to the accompanying drawings.
In the decontamination method of the present invention, hydrogen peroxide gas (decontamination gas) is introduced into the isolator 1, and the surface is oxidized on the surface of the mechanical device W (see FIG. 1 or the like) disposed in the isolator 1 or the inner surface of the isolator 1. Each of the hydrogen gases is condensed to decontaminate the surface of the machine W. Here, the mechanical device W of this embodiment is a filling device that fills a vial with a chemical solution. When the decontamination of the isolator 1 is completed, the filling device is driven in the isolator 1 to produce a desired product. The operation process will be executed. In addition, the decontamination target object based on this invention is comprised by the above-mentioned machine apparatus W. FIG.

  As shown in FIGS. 1 and 2, the isolator 1 is disposed in a clean room (not shown) in which a unidirectional flow is formed, and the indoor space 2 is maintained in a sterile and dust-free state to be airtight with respect to the outside. Thus, a local clean space is realized. More specifically, the isolator 1 includes an apparatus housing 3 that hermetically blocks the indoor space 2 from the outside. In addition, the device housing 3 includes a glass window 4 that allows the indoor space 2 to be visually recognized from the outside. The apparatus housing 3 includes a work hole 5, and a base end portion of a work glove 6 that enables manual work is attached to the work hole 5 in a sealed manner. With this configuration, an operator inserts his hand into the work glove 6 from outside and checks the indoor space 2 through the glass window 4 while handling the machine device W or the like in the indoor space 2 with the work glove 6. Can do.

  In addition, an inner wall 10 that forms a gap with the apparatus housing 3 is provided in the indoor space 2 of the isolator 1. A gap formed between the device housing 3 and the inner wall 10 is used as the peripheral circuit 11. In addition, a blower 12 is provided in the upper part of the isolator 1. And when this air blower 12 drives, air is sent out to one direction, and after it is cleaned through the filter 13, the cleaned air distribute | circulates the indoor space 2 from upper direction to the downward direction. Further, the air that has passed through the indoor space 2 enters the peripheral circuit 11 through the opening 14 provided below the inner wall 10 and rises in the peripheral circuit 11. In this way, the airflow in the isolator 1 is unidirectional to optimize the airflow. In addition, this isolator 1 uses a well-known product suitably, and comprises the sealed chamber which concerns on this invention.

  Further, a hydrogen peroxide gas input device 20 is connected to the isolator 1. The hydrogen peroxide gas injection device 20 has a function of generating hydrogen peroxide gas and introducing the hydrogen peroxide gas into the indoor space 2. A known product is preferably used for the hydrogen peroxide gas charging device 20.

  The isolator 1 includes a thermometer 50 for measuring the temperature in the indoor space 2, a hygrometer 51 for measuring the humidity in the indoor space 2, and a gas concentration for measuring the hydrogen peroxide gas concentration in the indoor space 2. A total of 52 is connected. In addition, a well-known product is used suitably for these measuring instruments.

  In the isolator 1, a condensation sensor 30 that can detect the condensation process of the hydrogen peroxide gas in the isolator 1 is disposed. Hereinafter, the condensation sensor 30 will be described with reference to FIGS.

  As shown in FIG. 3, the condensation sensor 30 includes a light projecting device 34, a light receiving device 37, and a plurality of glass plates (transparent plates) arranged at intervals between the light projecting device 34 and the light receiving device 37. 35). The light projecting device 34, the light receiving device 37, and the glass plate 35 are disposed in the indoor space 2.

  A light projecting unit 38 is disposed on one side of the light projecting device 34. And from this light projection part 38, the laser beam L of a near infrared region is irradiated to one direction. Further, a power supply device 45 is connected to the light projecting device 34 via a wiring cable 37a. The power supply device 45 is disposed outside the isolator 1, and an operator outside the isolator 1 operates a control panel (not shown) provided in the power supply device 45 to obtain a desired timing. Thus, the laser beam L can be oscillated. The laser beam L is preferably a semiconductor laser beam, but may of course have other configurations. Moreover, a light source and a wavelength can also be selected suitably.

  On one side of the light receiving device 37, a light receiving portion 39 is disposed. The light receiving unit 39 is disposed at a position facing the laser beam L emitted from the light projecting unit 38. The light receiving device 37 generates a voltage output corresponding to the amount of received light of the laser light L received by the light receiving portion 39 and measures it on a measurement value display portion (not shown) of the output device 46 connected via the wiring cable 37b. Display the value. The output device 46 is arranged outside the isolator 1, and an operator outside the isolator 1 can check the measurement value outdoors. Note that the output device 46 of this embodiment is set so that a condensed amount equivalent value (a dimensionless number) is output and displayed as a measured value. Such a condensation amount equivalent value will be described in detail later.

  The plurality of glass plates 35 are such that hydrogen peroxide gas is condensed on the surface thereof, and the laser beam L oscillated from the light projecting section 38 is held on the plate surface while being held by a holding case 36 to be described later. Is arranged so that it can receive light at approximately the center 35a (see FIG. 5). More specifically, the holding case 36 is made of a synthetic resin material, and only the upper part is opened as shown in FIG. As shown in FIG. 4, among the inner wall surfaces of the holding case 36, opposite inner wall surfaces 36 b and 36 b are provided with holding grooves 36 a at a plurality of intervals in the vertical direction. The groove width of the holding groove 36 a is designed to be equal to the thickness of the glass plate 35. In this configuration, a plurality of glass plates 35 are inserted through the openings along the holding grooves 36a, and both ends of the glass plates 35 are fitted by the holding grooves 36a, so that the glass plates 35 are arranged in parallel. Held in shape. As shown in FIG. 5, the holding case 36 includes a floor portion 36c, and the lower edge of the glass plate 35 inserted from above is brought into contact with the upper surface of the floor portion 36c. It is supported. Note that the gap between the glass plate 35 and the glass plate 35 communicates with the indoor space 2 of the isolator 1 via a communication opening 44 formed by the sides of the opened glass plate 35. When the laser beam L is irradiated on the glass plate 35 in such an arrangement state, the laser beam L is incident substantially perpendicular to the plate surface of the glass plate 35.

  In addition, the said glass plate 35 comprises the condensation formation part which concerns on this invention. Further, the light projection device 34, the power supply device 45, the light receiving device 37, and the output device 46 constitute a condensing amount equivalent value measuring device 55 according to the present invention. The condensation amount equivalent value measuring device 55 constitutes a condensation amount equivalent value measuring means according to the present invention. By the way, well-known products are suitably used for the above-described light projecting device 34, power supply device 45, light receiving device 37, and output device 46.

Next, a condensation confirmation method using the above-described condensation sensor 30 will be described.
As shown in FIGS. 1 to 3, the light projecting device 34, the light receiving device 37, and the holding case 36 into which the glass plate 35 is inserted are arranged in the isolator 1.

  Next, the hydrogen peroxide gas injection device 20 is driven to start the injection of hydrogen peroxide gas into the indoor space 2. At the same time, the laser beam L is emitted from the light projecting device 34 continuously or intermittently, and the measurement value displayed on the output device 46 is monitored.

  If the hydrogen peroxide gas is further continuously supplied, the indoor space 2 is saturated with the hydrogen peroxide gas, and the hydrogen peroxide gas begins to condense on each glass plate 35 of the condensation sensor 30. Here, the amount of laser light L received by the light receiving device 37 in the condensed state is measured in the non-condensed state because the laser beam L is scattered and absorbed due to the condensed film formed on the glass plate 35. It will be less than the amount of received light. Furthermore, as the amount of hydrogen peroxide gas condensed on the glass plate 35 increases, the amount of received light gradually decreases accordingly. In other words, as the amount of hydrogen peroxide gas condensed increases, the output value indicating the amount of received laser light L (hereinafter referred to as transmitted light output value) decreases. That is, it is possible to detect a change in the amount of hydrogen peroxide gas condensed on the surface of the glass plate 35 based on the change in the transmitted light output value over time. In the present invention, the value corresponding to the amount of condensation is set to be output by the output device 46 in accordance with the increase or decrease of the amount of condensation. That is, when the condensation amount of the hydrogen peroxide gas increases, the output equivalent value of the condensation amount also increases. When the condensation amount of the hydrogen peroxide gas decreases, the output equivalent value of the condensation amount also decreases. The condensing amount equivalent value according to the present invention may be a value that varies at least with a change in the condensing amount, and includes, for example, a reciprocal of the transmitted light output value. An output range where the output when there is no condensation is output = 0, and the output when the transmission is completely lost (when the condensation is fully developed) is output = 100, and these are the upper and lower limits. The output when condensation occurs may be displayed. Alternatively, the measured transmission amount may be output in “%” display with reference to the time when the transmission amount disappears. The output may be displayed in V (volts). Moreover, the condensation sensor used for this invention is not limited to the said structure.

Next, the main part of the present invention will be described.
The decontamination method of the present invention includes a pre-decontamination process and a decontamination process, and is executed in the order of the pre-decontamination process and the decontamination process. Note that it is the decontamination process that actually decontaminates the mechanical device W and the like. Hereinafter, each process is demonstrated in order.

<Process before decontamination>
As shown in FIG. 7, the condensation sensor 30 is located near the chamber wall constituting the device housing 3 of the isolator 1 and can be easily managed by an operator, and the operation of the mechanical device W is hindered. The first condensing sensor 31 is arranged at a position where there is not. Specifically, the light emitting device 34, the light receiving device 37, and the holding case 36 into which the glass plate 35 of the first condensing sensor 31 is inserted are placed near the chamber wall so that they can be handled by the work glove 6. Has been.

  Further, the second condensing sensor 32 is disposed at a position where the hydrogen peroxide gas hardly spreads and the condensed film is hardly formed. Specifically, it is placed on the upper surface of the mechanical device W.

  Then, the introduction of hydrogen peroxide gas into the isolator 1 is started. Hereinafter, the charging timing is referred to as gas charging timing T0 (see FIG. 9). The contents of the charging conditions include the temperature and humidity in the isolator 1, the temperature of the space in which the isolator 1 is installed, the humidity in the space, the surface temperature of the inner wall surface of the isolator 1, and the input of hydrogen peroxide gas. The amount, the number of rotations of the blower 12, and the like can be mentioned.

  Then, the introduction of hydrogen peroxide gas is continued, and the condensation amount equivalent value is started to be measured by both the condensation sensors 31 and 32 from a predetermined measurement start timing T1 (see FIG. 9) after a predetermined time has elapsed from the gas input timing T0. Here, FIG. 9a is a graph showing a change in the condensation amount equivalent value measured by the first condensation sensor 31, and FIG. 9b is a graph showing a change in the condensation amount equivalent value measured by the second condensation sensor 32. . In this embodiment, the gas input timing T0 and the measurement start timing T1 are different, but it is of course possible to match the gas input timing T0 and the measurement start timing T1. By the way, the condensation amount equivalent value measured in the pre-decontamination process is hereinafter referred to as a condensation amount equivalent value P.

  When a predetermined time elapses after the gas is supplied, the hydrogen peroxide gas is saturated in the isolator 1, and condensation is started to be detected by the condensation sensors 31 and 32. As the condensation amount of the hydrogen peroxide gas increases, the output condensation amount equivalent value P increases.

  When the condensation amount equivalent value P measured by each of the condensation sensors 31 and 32 becomes substantially constant, the condensation amount equivalent value P1 measured by the first condensation sensor 31 and the second condensation sensor 32 at a predetermined measurement timing T2. The measured condensation amount equivalent value P2 is specified. In the present embodiment, the condensation amount equivalent value P1 measured by the first condensation sensor 31 is P1 = 10, and the condensation amount equivalent value P2 measured by the second condensation sensor 32 is P2 = 5. To do. By the way, it is preferable that the measurement timing T2 is within a range in which the condensed amount measurement value P is constant as described above.

Then, the relative ratio K is calculated from the condensation amount equivalent values P1, P2 measured by the respective condensation sensors 31, 32. In particular,
K = P2 / P1
Obtained from the formula of In the present embodiment, as described above, since P1 = 10 and P2 = 5, the relative ratio K is K = 1/2.

  As shown in FIG. 9, the change in the condensation amount equivalent value P measured by each of the condensation sensors 31 and 32 is graphed by assigning the time T on the x axis and the condensation amount equivalent value P on the y axis. The operator can easily recognize the values of the condensation amount equivalent values P1 and P2 and the variation process thereof visually.

By the way, a configuration in which the bacteria killing information is assigned to each condensed amount equivalent value P is preferable.
That is, an experiment using a known biological indicator (hereinafter referred to as BI (Biological Indicator)) is performed in advance, and the measured condensate equivalent value P is associated with negative or positive regarding bacteria. It is. Specifically, a BI is also installed at a predetermined position where the condensation sensor 30 is arranged, and while the condensation sensor 30 measures the condensation amount measurement value P, the bacteria under the condition where the condensation amount measurement value P is measured. The death is confirmed by the BI, and the condensed amount measurement value P is associated with the death of the bacteria. In this case, for example, if the condensation amount equivalent value P is 5 or more, the bacteria are completely killed at the measurement position, so that it is “negative”, whereas the condensation amount equivalent value P is less than 5. Then, since the bacteria are not completely killed at the measurement position, a criterion of “positive” can be established. In this embodiment, for the condensation amount equivalent value P of 5 or more, since the condensation film is sufficiently formed and the decontamination is completed, “negative” bacteria killing information is assigned. For the condensation amount equivalent value P of less than 5, since the formation of the condensation film is insufficient and decontamination has not been completed, “positive” bacteria killing information is assigned.

  Therefore, when P1 = 10 and P2 = 5, both the first condensation sensor 31 and the second condensation sensor 32 are located, and both of them are completely killed.

  In the pre-decontamination process, when the relative ratio is calculated as described above, the hydrogen peroxide gas is then discharged out of the isolator 1, and the second condensation sensor 32 is removed from the isolator 1. The pre-decontamination process is terminated.

<Decontamination process>
Next, as shown in FIG. 8, only the first condensation sensor 31 is arranged in the isolator 1 from which the hydrogen peroxide gas has been discharged. Here, the 1st condensation sensor 31 was used in the process before decontamination, and after making it a state which can be measured again, it arrange | positions again in the arrangement position in the process before decontamination.

  Then, the hydrogen peroxide gas is reintroduced into the isolator 1 and a condensation amount equivalent value P ′ is measured by the first condensation sensor 31 from the same measurement start timing T1 (see FIG. 9) as the pre-decontamination process. Start. The condensation amount equivalent value measured in the decontamination process is hereinafter referred to as a condensation amount equivalent value P ′.

  Here, it is assumed that the condensation amount equivalent value P′1 by the first condensation sensor 31 at the measurement timing T2 similar to the pre-decontamination process is P′1 = 8 in the present embodiment.

  Here, the condensation amount equivalent value P1 in the pre-decontamination step and the condensation amount equivalent value P′1 in the decontamination step are measured values at the same measurement timing T2, but are different values. In practice, it is extremely difficult to completely match the gas input conditions in both steps, and the various measurement environments have a subtle effect, and the condensation process of the hydrogen peroxide gas differs.

Next, the measured condensation amount equivalent value P′1 and the relative ratio K = 1/2 calculated in the pre-decontamination process are substituted into the following equation.
(Estimated condensation amount equivalent value P′2 at the arrangement position of the second condensation sensor 32) = (Condensation amount equivalent value P′1 of the first condensation sensor 31) × (Relative ratio K)
Then, it is possible to calculate the estimated condensation amount equivalent value P′2 at the arrangement position of the second condensation sensor 32.

Here, the estimated condensed amount equivalent value P′2 will be described.
The estimated condensation amount equivalent value P′2 at the arrangement position of the second condensation sensor 32 is not the condensation amount equivalent value P ′ actually measured by the second condensation sensor 32, but the condensation amount equivalent value measured by the first condensation sensor 31. This is an estimated value calculated based on P′1. Here, the calculation formula for calculating the estimated condensed amount equivalent value P′2 is derived based on the following principle. That is, the amount of condensation formed at different positions in the isolator 1 is substantially constant at different values. In addition, when the condensed film is repeatedly formed in almost the same environment, the relative amount of the condensed amount formed at each position is almost the same although the absolute amount of the condensed amount actually varies somewhat each time as described above. Absent.

Therefore, in the present embodiment, as described above, P′1 = 8 and K = 1/2, and therefore the estimated condensation amount equivalent value P′2 at the arrangement position of the second condensation sensor 32 is
P′2 = 8 × (1/2)
Thus, it can be estimated that P′2 = 4.

  This indicates that at the measurement timing T2 in the decontamination step, a condensation amount corresponding to a condensation amount equivalent value P 'of 4 is formed at the position where the second condensation sensor 32 is disposed.

  Here, the bacteria killing information assigned to the condensation amount equivalent value P in advance can be used for the estimated condensation amount equivalent value P′2 and used for confirming the killing of the bacteria in the same manner. Therefore, when examining the killing of the bacteria at the arrangement position of the second condensation sensor 32, the estimated condensation amount equivalent value P′2 at the arrangement position of the second condensation sensor 32 is P′2 = 4, and the value is “5”. Is less than "", the bacteria kill information is "positive".

  Therefore, at present, decontamination of the arrangement position of the second condensing sensor 32 is incomplete, and it is necessary to control the decontamination state to further increase the amount of condensation. As such control, while using the thermometer 50, the hygrometer 51, and the gas concentration meter 52, for example, the amount of hydrogen peroxide gas input per unit time is increased to promote the condensation of the hydrogen peroxide gas. Is proposed. Then, the condensation amount equivalent value P′1 is measured by the first condensation sensor 31, the estimated condensation amount equivalent value P′2 is calculated by the above calculation formula, and the decontamination of the arrangement position of the second condensation sensor 32 is performed. Monitor the situation.

  When the predetermined time further elapses, the condensation of hydrogen peroxide gas proceeds, so that the estimated condensation amount equivalent value P′2 increases. Here, if the estimated amount of condensation equivalent value P′2 is P′2 ≧ 5, the bacteria kill information corresponding to this value is “negative”, and thus the decontamination of the surface of the machine W is completed. The decontamination process can be completed.

  Thus, by setting it as the structure which allocates bacteria killing information to a condensation amount equivalent value, it becomes possible for an operator to obtain the objective guarantee regarding killing of a bacteria reliably, and to complete | finish a decontamination process.

  Then, when shifting to the operation process, the hydrogen peroxide gas is discharged from the isolator 1 to make it operable in the isolator 1. In addition, since the condensation sensor 30 does not exist in the upper surface etc. of the machine apparatus W at the time of completion | finish of a decontamination process, the machine apparatus W can be operated as it is.

  In addition, one condensation sensor is comprised by the 1st condensation sensor 31 which concerns on a present Example among the two condensation sensors which concern on the relative ratio computed at the process before decontamination which concerns on this invention. Further, the second condensing sensor 32 according to the present embodiment constitutes the other condensing sensor among the two condensing sensors according to the relative ratio calculated in the pre-decontamination process according to the present invention.

  By the way, in the above configuration, once the pre-decontamination process is executed and the relative ratio is calculated, the decontamination process can be executed again and again using the relative ratio.

Moreover, it is good also as following structures.
That is, a plurality of relative ratios K are calculated by executing the pre-decontamination process a plurality of times, and a relative ratio K that actually uses any one of the plurality of relative ratios K according to a predetermined selection criterion is selected in the decontamination process. The estimated condensation amount equivalent value P′2 at the position where the second condensation sensor 32 used in the pre-decontamination process is calculated based on the relative ratio K.

  Here, this configuration is based on the following idea. That is, when performing the pre-contamination process or the decontamination process, it is practically extremely difficult to make the hydrogen peroxide gas input conditions completely the same in both processes, and some conditions are usually different. As a result, the formation process of the condensation of the hydrogen peroxide gas changes, and the calculated value of the relative ratio K also varies.

  Therefore, for example, when the pre-decontamination process is executed three times, three different relative ratios K1 to K3 are calculated based on the contents of the hydrogen peroxide gas injection conditions each time.

  For example, in the first pre-contamination process, the condensation amount equivalent value P1 of the first condensation sensor 31 is P1 = 8 and the condensation amount equivalent value P2 of the second condensation sensor 32 is P2 = 4 10 minutes after the start of charging. When measured as .5, the relative ratio K1 is K1 = 0.56.

  In the second pre-contamination step, the condensation amount equivalent value P1 of the first condensation sensor 31 was measured as P1 = 10, and the condensation amount equivalent value P2 of the second condensation sensor 32 was measured as P2 = 5 10 minutes after the start of charging. In this case, the relative ratio K2 is K2 = 1/2 = 0.5.

  In the third pre-contamination process, the condensation amount equivalent value P1 of the first condensation sensor 31 was measured as P1 = 15, and the condensation amount equivalent value P2 of the second condensation sensor 32 was measured as P2 = 8 10 minutes after the start of charging. In this case, the relative ratio K3 is K3 = 1/2 = 0.53.

  Then, when the decontamination process is executed next, when the condensation amount equivalent value P′1 of the first condensation sensor is P′1 = 11, 10 minutes after the start of gas injection, According to the judgment, it is considered that the decontamination conditions are most similar to those in the second pre-decontamination process, and the relative ratio K2 calculated in the second pre-decontamination process is adopted, in the decontamination process. An estimated condensation amount equivalent value P′2 is calculated.

  By setting it as this structure, it becomes possible to perform the decontamination process according to actual decontamination conditions.

  By the way, in the structure described so far, the first condensing sensor 31 is located near the chamber wall of the isolator 1 and can be easily managed by the operator. Even when trouble occurs in the single condensation sensor 31, the maintenance of the first condensation sensor 31 can be performed quickly and easily. In the present invention, any one of the light projecting device 34, the light receiving device 37, and the holding case 36 into which the glass plate 35 is inserted may be disposed at least at a position where maintenance is easy. It does not matter whether they are separated or in contact with each other.

  In the configuration described so far, the method for assigning the bacteria killing information to the value corresponding to the amount of condensation is not limited to the above configuration, and for example, other known techniques using a chemical indicator may be used. If various accumulated data exists, the decontamination process end timing may be determined from only the value of the condensed amount equivalent value P measured without assigning the bacteria killing information to the condensed amount equivalent value P.

  By the way, in the configuration described so far, it is preferable that the second condensing sensor 32 is arranged at a position where hydrogen peroxide gas that can be predicted in advance from experimental data accumulated by various experiments is difficult to reach.

Instead of the previous configuration, the following configuration is proposed for determining the arrangement of the second condensation sensor 32.
That is, in the pre-decontamination process, as shown in FIG. 10, first, a plurality of condensation sensors 30 are arranged in the isolator 1. In this embodiment, five condensation sensors 30 are arranged. In addition, as the arrangement position, a position in the isolator 1 where the grasp of the hydrogen peroxide gas condensation state is particularly required is selected.

  Next, the hydrogen peroxide gas charging device 20 is driven, and hydrogen peroxide gas is charged into the isolator 1 according to predetermined charging conditions. At the same time, for each condensation sensor 30, measurement of the condensation amount equivalent value P is started.

  When the introduction of the hydrogen peroxide gas is continued, the hydrogen peroxide gas is saturated in the indoor space 2, and the condensation of the hydrogen peroxide gas begins to be detected by each condensation sensor 30. Here, in each condensation sensor 30, since the arrangement | positioning of the holding | maintenance case 36 which comprises the glass plate 35 differs, respectively, the surrounding temperature environment etc. also differ, respectively. Therefore, the condensation sensor 30 disposed in an environment in which condensation is unlikely to occur is delayed in the condensation start timing at which condensation is actually formed or the condensation within a predetermined time compared to the condensation sensor 30 disposed at another position. The amount is small or the duration of condensation is short. For this reason, the condensation start timing and the like are detected differently for each condensation sensor 30.

  At the timing when the condensation amount equivalent value P measured by each condensation sensor 30 becomes substantially constant, the absolute value of the condensation amount equivalent value P measured by each condensation sensor 30, the condensation start timing, or the duration of condensation, etc. In comparison, the condensing sensor 30 is selected at a position where the hydrogen peroxide gas hardly spreads and the condensed film is hardly formed. In this embodiment, since the condensation amount equivalent value measured by the condensation sensor 30 disposed on the upper surface of the mechanical device W was the smallest, the arrangement position of the condensation sensor 30 is determined as a so-called cold spot, The status of decontamination at that location will be managed. The condensation sensor 30 is a second condensation sensor 32. Then, the relative ratio is calculated by the first condensation sensor 31 and the second condensation sensor 32 which are separately selected.

  In this way, in the process of calculating the relative ratio in the pre-decontamination process, by evaluating the absolute value of a plurality of condensation amount equivalent values, the cold spot that is most disadvantageous in the formation of the condensation amount in the isolator 1 can be simplified. It becomes possible to specify objectively and objectively. Furthermore, by using the condensation sensor 30 arranged in such a cold spot as the second condensation sensor 32, the condensation process at the position considered to be the most disadvantageous in the formation of the condensed amount is grasped in the decontamination process. It becomes possible. As a result, if the decontamination is completed at this position, reliable and efficient decontamination can be performed in accordance with the idea that decontamination is completed at other positions. It should be noted that which is used as the second condensing sensor 32 based on the information on the value corresponding to the amount of condensation obtained by measurement can be appropriately determined based on various information that has already been accumulated, depending on the desired decontamination purpose. it can.

  The calculation formula for calculating the relative ratio is not limited to the above content.

  Although the above embodiment does not specifically measure the amount of hydrogen peroxide gas condensed, the condensation sensor 30 may directly measure the amount of condensation.

Further, the arrangement position, the number, and the like of the condensing sensor 30 are not limited to the above embodiment.
For example, regarding the number, the following configuration may be adopted. First, in the pre-decontamination process, the first, second, and third condensation sensors are arranged. Then, the relative ratio K01 is calculated by the first condensation sensor and the second condensation sensor, and the relative ratio K02 is calculated by the first condensation sensor and the third condensation sensor. Next, in the decontamination process, the condensation amount equivalent value is measured only by the first condensation sensor, and the estimated condensation amount equivalent value at the arrangement position of the second condensation sensor is determined by the condensation amount equivalent value of the first condensation sensor and the relative ratio K01. And the estimated condensation amount equivalent value at the arrangement position of the third condensation sensor is calculated using the relative ratio K02. By adopting such a configuration, it is possible to grasp the condensing state at a number of points without a condensing sensor by a single condensing sensor for management (the first condensing sensor) in the decontamination process.

It is a vertical side view of the isolator 1. It is an AA line crossing top view of FIG. 2 is a conceptual diagram of a condensation sensor 30. FIG. 4 is a plan view of a holding case 36. FIG. 4 is a side view of a holding case 36. FIG. 3 is a vertical side view of a holding case 36. FIG. It is a conceptual diagram which shows arrangement | positioning of the condensation sensor 30 in the process before decontamination. It is a conceptual diagram which shows arrangement | positioning of the 1st condensation sensor 31 in a decontamination process. It is a graph which shows the change of the condensation amount equivalent value P with progress of time, a is a thing of the 1st condensation sensor 31, and b is a thing by the 2nd condensation sensor 32. FIG. It is a conceptual diagram which shows arrangement | positioning of the condensation sensor 30 in the process before decontamination which concerns on another Example.

Explanation of symbols

1 Isolator 30, 31, 32 Condensation sensor 35 Glass plate (condensation forming part)
50 Condensation amount equivalent value measuring device (Condensation amount equivalent value measuring means)
W Machine (Decontamination object)

Claims (5)

Decontamination gas is introduced into a sealed chamber that is airtightly shielded from the outside, and the surface of the decontamination target is decontaminated by condensing the decontamination gas on the surface of the decontamination target in the sealed chamber. In the decontamination method,
Measure the condensation amount equivalent value that fluctuates with the change in the condensation amount of the decontamination gas condensed in the condensation forming part and the decontamination gas condensed in the condensation forming part. A decontamination gas is introduced into a sealed chamber in which a plurality of condensation sensors having a condensation amount equivalent value measuring means for output are arranged, and each condensation amount equivalent value is measured by the condensation sensor at a predetermined measurement timing. A decontamination step for calculating a relative ratio between the condensation amount equivalent values measured by any one of the condensation sensors and the condensation amount equivalent values measured by any one of the other condensation sensors; ,
After execution of the pre-decontamination process, the decontamination gas has been exhausted, and one of the two condensation sensors related to the relative ratio calculated in the pre-decontamination process is arranged at the arrangement position in the pre-decontamination process. The decontamination gas is reintroduced into the sealed chamber, and the condensation amount equivalent value is remeasured by the condensation sensor at a predetermined measurement timing. The condensation amount equivalent value and the relative ratio are the two values related to the relative ratio. The estimated condensation amount equivalent value at the position of the other condensation sensor of the two condensation sensors is calculated, and the decontamination state of the sealed chamber is controlled based on the estimated condensation amount equivalent value to decontaminate the surface of the object to be decontaminated. And a decontamination process. In the configuration to measure the equivalent value of the condensation amount by the condensation sensor,
The decontamination method according to claim 1, wherein fungus killing information indicating whether or not the fungus is killed at the measurement position is assigned to the measured amount of condensation. The condensation amount equivalent value measuring means of one of the two condensation sensors related to the relative ratio calculated in the pre-contamination process is based on the decontamination gas condensed in the condensation forming portion related to the condensation sensor. Condensation amount equivalent value measuring device to measure
3. The decontamination method according to claim 1, wherein the condensation forming part of the condensation sensor and / or the condensation amount equivalent value measuring device is brought close to or in close contact with the chamber wall of the sealed chamber.   The decontamination method according to any one of claims 1 to 3, wherein a graph showing a change with time of a value corresponding to a condensation amount measured by a condensation sensor is created. Run the pre-decontamination process multiple times to calculate multiple relative ratios,
In the decontamination step, one of the plurality of relative ratios is selected, and an estimated equivalent amount of condensation value at the position where the other condensation sensor among the two condensation sensors related to the relative ratio is calculated based on the relative ratio. The decontamination method according to any one of claims 1 to 4, wherein

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