JP2008197357A - Illuminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To form an image onto the pupil of an objective lens with an aperture diaphragm fixed, without changing imaging magnification. <P>SOLUTION: An illuminator 100 includes a relay optical system 25 that forms an image of the aperture diaphragm 24 onto the pupil 5a of the objective lens 5 movable in the direction of an observation optical axis OA1 and emitting illuminating light, passed through the aperture diaphragm 24, to a specimen 1 via the objective lens 5. The relay optical system 25 includes: a collimating lens 27 that collimates the illuminating light emitted from the aperture 24a of the aperture diaphragm 24; and a convergence lens 28 that is disposed so as to be freely movable in the direction of an illuminating optical axis OA2 being a common axis with the optical axis of itself, and that converges the illuminating light, collimated by the collimating lens 27, onto the pupil 5a of the objective lens 5. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  According to the present invention, an image of an aperture stop is formed on the pupil of a condensing lens movable in the direction of the own optical axis, and the illumination light that has passed through the aperture stop is irradiated onto the sample via the condensing lens The present invention relates to a lighting device including an optical system.

  Conventionally, in the epi-illumination device of a microscope, the Koehler illumination method is often used to obtain uniform illumination light for a specimen. In the Koehler illumination method, illumination light emitted from a light source is once condensed by a lens system to form a first light source image, and this first light source image is formed on the pupil of the objective lens (rear focal plane by a relay lens system). Relay to the top) to form a second light source image. Illumination light emitted from the second light source image is applied to the specimen in a telecentric manner via the objective lens, whereby the specimen is uniformly illuminated without unevenness.

  In the Kohler illumination method, an aperture stop is provided on the image plane of the first light source image that is a conjugate plane optically conjugate with the pupil of the objective lens, and by changing the aperture diameter of the aperture stop, The amount of illumination light can be increased or decreased with uniform illumination. In general, optimum illumination can be obtained by adapting the aperture diameter of the aperture stop to the numerical aperture of the objective lens. In addition, by appropriately changing the aperture diameter of the aperture stop with respect to the numerical aperture of the objective lens, it is possible to adjust the contrast and the depth of focus during sample observation.

  By the way, in the infinity correction type microscope, generally, an optical member such as a filter or an intermediate unit is detachably provided between the objective lens and the epi-illumination device. The interval changes. For this reason, the second light source image and the aperture stop image are not necessarily formed on the pupil of the objective lens, and there is a problem that the effect of the Koehler illumination method cannot be exhibited satisfactorily.

  In addition, in the inspection field of semiconductor wafers and liquid crystal substrates, the size of inspection objects is increasing, and it is extremely difficult to precisely move the stage on which the inspection object is placed in the observation optical axis direction. For this reason, a microscope equipped with a focusing mechanism that moves the objective lens in the direction of the observation optical axis, which is the direction of the optical axis, for focusing is often used. However, in this case as well, there is a problem in that the effect of the Koehler illumination method cannot be satisfactorily caused because the distance between the epi-illumination device and the objective lens changes due to focusing.

  On the other hand, for example, the epi-illumination optical system described in Patent Document 1 is provided so as to be movable in the optical axis direction of the first condensing lens for collimating the illumination light from the light source and the first condensing lens. A first light source image is formed by the second condenser lens, and the first light source image is relayed on the pupil of the objective lens by the relay lens to form a second light source image. Furthermore, since the aperture stop provided on the imaging surface of the first light source image is movable together with the second condenser lens in accordance with the change in the distance between the epi-illumination optical system and the objective lens, The pupil plane and the aperture stop can always be kept conjugate.

  Moreover, in the microscope apparatus described in Patent Document 2, an auxiliary optical element such as a concave lens is provided between the relay lens that relays the first light source image and the objective lens, and the epi-illumination device is raised with respect to the objective lens. The change in the distance between the two is corrected.

Japanese Utility Model Publication No. 3-55931 JP 2002-277749 A

  However, in the epi-illumination optical system described in Patent Document 1, since the objective lens and the aperture stop are moved while the relay lens is fixed, the second light source imaged on the pupil of the objective lens with the movement. The imaging magnification of the image and the image of the aperture stop changes, and there is a problem that the aperture diameter of the aperture stop must be readjusted each time it is moved. In addition, it is necessary to ensure an extra aperture diameter adjustment range according to the change in the imaging magnification, and to provide a mechanism for moving the entire aperture stop in the optical axis direction in addition to the aperture diameter adjustment mechanism. There is a problem that the configuration of the aperture stop is increased in size and complexity due to the failure.

  On the other hand, in the microscope apparatus described in Patent Document 2, by providing an auxiliary optical element such as a concave lens between the relay lens and the objective lens, a second light source image and an aperture stop that are imaged on the pupil of the objective lens The image forming magnification of the image changes, and there is a problem that the aperture diameter of the aperture stop must be readjusted in accordance with the insertion / removal of the auxiliary optical element. In addition, since the insertion and removal of the auxiliary optical element can correct only a predetermined interval change, there is a problem that a continuous interval change according to the movement of the objective lens in focusing cannot be corrected.

  The present invention has been made in view of the above, and even when the objective lens is continuously moved by focusing or the like, the image without changing the imaging magnification while the aperture stop is fixed. It is an object of the present invention to provide an illuminating device that can form an image on the pupil of an objective lens and that can effectively exhibit the effect of the Koehler illumination method.

  In order to solve the above-described problems and achieve the object, an illuminating device according to the present invention forms an image of an aperture stop on a pupil of a condenser lens that can move in the direction of the own optical axis, and the aperture stop In the illumination device including a relay optical system that irradiates the specimen with the illumination light that has passed through the condenser lens, the relay optical system collimates the illumination light emitted from the opening of the aperture stop. And a converging lens unit that is provided so as to be movable in the direction of the own optical axis and converges the illumination light collimated by the collimating lens unit on the pupil of the condenser lens.

  In the illumination device according to the present invention, in the above invention, the moving mechanism that moves the converging lens unit in the optical axis direction and the moving amount of the condenser lens are detected, and the detected moving amount is used as a basis. And a movement control means for moving the convergent lens portion by the moving mechanism.

  In the illumination device according to the present invention as set forth in the invention described above, the movement control means is an input means for instructing and inputting a moving amount of the condenser lens to a focusing movement means for moving the condenser lens. And the converging lens unit is moved by the moving mechanism based on the amount of movement of the condensing lens input by the input means.

  In the illumination device according to the present invention as set forth in the invention described above, the movement control means moves the converging lens portion by the movement amount of the condenser lens by the movement mechanism.

  Further, in the above invention, the illumination device according to the present invention includes the light source that emits the illumination light, and the light source image imaging optical system that forms an image of the light source on the opening of the aperture stop. It is characterized by.

  In the illumination device according to the present invention, in the above invention, an illumination switching mechanism that performs illumination switching of the illumination light with respect to the specimen, and an insertion / removal for inserting / removing the convergent lens unit with respect to the optical path of the illumination light. And a mechanism.

  In the illumination device according to the present invention, in the above invention, the illumination switching mechanism performs the illumination switching, and the insertion / removal mechanism switches the convergence lens unit in conjunction with the illumination switching. Control means is provided.

  Moreover, the illumination device according to the present invention includes a conversion optical member that converts the illumination light converged by the convergent lens unit into a parallel light beam in the above invention, and switches illumination of the illumination light to the specimen. And an illumination switching mechanism for inserting and removing the conversion optical member with respect to the optical path of the illumination light.

  According to the illuminating device of the present invention, even when the objective lens is continuously moved by focusing or the like, the image is displayed on the pupil of the objective lens without changing the imaging magnification while the aperture stop is fixed. The effect of the Koehler illumination method can be exhibited satisfactorily.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a lighting device according to the present invention will be described in detail with reference to the accompanying drawings. Note that the present invention is not limited to the embodiments. Moreover, in description of drawing, the same code | symbol is attached | subjected and shown to the same part.

(Embodiment 1)
First, the illuminating device concerning Embodiment 1 of this invention is demonstrated. 1 and 2 are diagrams showing a main configuration of a microscope using the illumination device 100 according to the first embodiment. 1 is a right side view of the microscope, and FIG. 2 is a front view (a diagram showing a left side surface in FIG. 1). As shown in these drawings, the microscope according to the first embodiment includes the illumination apparatus 100 via the stage 2 on which the specimen 1 is placed and the focusing mechanism 3 in addition to the illumination apparatus 100 that illuminates the specimen 1. The revolver 4 is supported by the bottom portion of the illuminator 100 and holds the plurality of objective lenses 5 in a replaceable manner, and the lens barrel 6 is mounted on the illuminating device 100 and holds the binocular portion 7 and the pair of eyepieces 8. As shown in FIG. 2, the illumination device 100 is supported by the microscope main body 9, and the stage 2 is supported by another portion (not shown) of the microscope main body 9.

  The specimen 1 is freely moved in a plane perpendicular to the observation optical axis OA1 by a plane driving mechanism (not shown) provided on the stage 2. The plurality of objective lenses 5 are alternatively arranged on the observation optical axis OA <b> 1, that is, on the top of the sample 1 according to the rotation operation of the revolver 4. The objective lens 5 disposed on the observation optical axis OA1 cooperates with an imaging lens (not shown) included in the lens barrel 6 to form an observation image of the specimen 1 illuminated by the illumination device 100. At this time, the observation light emitted from the specimen 1 is deflected to the binocular unit 7 by a deflecting optical member (not shown) provided in the lens barrel 6 and divided into left and right by the binocular unit 7 to form an observation image. Image. This observation image is visually observed through the eyepiece 8.

  As shown in FIG. 2, the focusing mechanism 3 includes a support unit 11 that supports a revolver 4 at the bottom, a slider 12 that holds the support unit 11 and moves it in the direction of the observation optical axis OA1, and the slider 12 that moves the observation optical axis. A guide 13 movably guided in the direction OA1, a drive unit 14 that moves the slider 12 relative to the guide 13, and an origin position sensor (Sz) that detects the origin positions of the support unit 11 and the slider 12 in the direction of the observation optical axis OA1. 15). In addition, the support part 11 and the slider 12 may be comprised integrally.

  The drive unit 14 is configured using a ball screw 16 penetrating the guide 13 and fixed to the slider 12, and a stepping motor (Mz) 17 fixed to the guide 13. The origin position sensor 15 and the stepping motor 17 are electrically connected to a control device 103 (to be described later) via a wiring cable (not shown) and are driven and controlled. Note that the support portion 11 is provided with a through hole 11a around the observation optical axis OA1 through which illumination light irradiated from the illumination device 100 to the specimen 1 and observation light from the specimen 1 pass.

  The stepping motor 17 rotates the shaft 17a around its axis. This rotational force is converted into a thrust in the straight direction by the ball screw 16 connected to the shaft 17a, thereby moving the ball screw 16 up and down along the shaft 17a and moving the slider 12 in the direction of the observation optical axis OA1. Move freely. As a result, the focusing mechanism 3 can freely move the objective lens 5 in the direction of the observation optical axis OA1 via the support portion 11 and the revolver 4, and the objective lens 5 can be focused on the specimen 1. it can.

  The origin position sensor 15 is a slider in the direction of the observation optical axis OA1, for example, using a photo interrupter, and the driving position by the stepping motor 17 when a light shielding piece such as a metal piece (not shown) provided on the ball screw 16 is inserted therein. 12 is detected as the origin position, and the detection result is output to the control device 103 described later. Based on this, the control device 103 can detect the origin position of the objective lens 5 in the direction of the observation optical axis OA1.

  Next, the configuration of the illumination device 100 will be described in detail. As shown in FIG. 1, the lighting device 100 is roughly divided into a light projecting tube 101, a lamp house 102 attached to the rear end portion (right end portion in FIG. 1) of the light projecting tube 101, and a control device 103. Configured. The lamp house 102 includes a light source 20 that emits illumination light and a collector lens 22 that collects the illumination light emitted by the light source 20.

  The light projecting tube 101 has a converging lens 23 for converging the illumination light transmitted through the collector lens 22, an aperture stop 24 provided on the focal plane of the converging lens 23, and an aperture image of the aperture stop 24 as an objective lens 5. A relay optical system 25 that forms an image on the pupil 5a, and a half mirror 26 that reflects the illumination light emitted from the relay optical system 25 and deflects it to the objective lens 5. The relay optical system 25 uses a collimating lens 27 that collimates the illumination light emitted from the opening 24 a of the aperture stop 24, and a converging lens 28 that converges the illumination light collimated by the collimating lens 27 onto the pupil 5 a of the objective lens 5. Configured.

  The converging lens 28 is provided with a lens moving mechanism 40, and is movable by the lens moving mechanism 40 in the direction of the illumination optical axis OA <b> 2 that is its own optical axis direction. The aperture stop 24 is provided with an opening / closing mechanism (not shown), and the opening diameter of the opening 24a, that is, the aperture diameter can be changed by the opening / closing mechanism. The illumination optical axis OA2 is an optical axis common to each optical member provided in the light source image imaging optical system 21 and the relay optical system 25.

  As the light source 20, for example, an incandescent lamp such as a halogen lamp or a discharge lamp such as a mercury lamp is used. The light source image forming optical system 21 including the collector lens 22 and the converging lens 23 forms a first light source image, which is an image of the light source 20, on the opening 24 a of the aperture stop 24. The relay optical system 25 optically relays the first light source image and the aperture stop 24, and forms the second light source image and the aperture image of the aperture stop 24 on the pupil 5 a of the objective lens 5. Then, the illumination light that has passed through the aperture stop 24 and is emitted from the second light source image is irradiated onto the specimen 1 through the objective lens 5 as a condenser lens. Thereby, the illuminating device 100 Koehler-illuminates the specimen 1 with the illumination light emitted from the light source 20.

  Here, since the converging lens 28 is provided in the relay optical system 25 so as to converge the illumination light collimated by the collimating lens 27, the image is formed even if the converging lens 28 is moved in the direction of the illumination optical axis OA2. The second light source image and the aperture image of the aperture stop 24 can always be formed on the focal plane of the converging lens 28 without changing the magnification. For this reason, in the illuminating device 100, by moving the converging lens 28 by the lens moving mechanism 40, the focal plane of the converging lens 28 and the pupil 5a of the objective lens 5 can be matched, and the aperture stop 24 remains fixed. The second light source image and the aperture image of the aperture stop 24 can be formed on the pupil 5a without changing the projection magnification.

  The control device 103 is electrically connected to the input unit 31, the output unit 32, the display unit 33, and the storage unit 34 for inputting, outputting, displaying, and storing various information, and controls the processing and operation thereof. And a control unit 35. The input unit 31 is configured using a keyboard, a mouse, a touch panel, a communication interface, and the like, acquires information from the outside, and inputs the acquired information to the control unit 35. The output unit 32 includes a communication interface and outputs information to an external device. The display unit 33 includes a display, a printer, and the like, and displays information for the spectroscope and the like. The storage unit 34 is configured using various storage media such as a hard disk and a flash memory, and stores information, temporarily stores information, and the like.

  The control unit 35 is electrically connected to each electric drive unit in the microscope and performs drive control thereof. For example, the control unit 35 adjusts the illumination light emitted from the light source 20 by controlling the power supplied to the light source 20. Further, the aperture diameter of the aperture stop 24 is changed by driving and controlling the opening / closing mechanism provided in the aperture stop 24, and various illumination conditions and observation conditions are adjusted. In particular, the control unit 35 includes a focusing drive control unit 35 a that drives and controls the focusing mechanism 3 and a lens movement control unit 35 b that controls the movement of the converging lens 28 of the relay optical system 25.

  The focusing drive control unit 35a drives the stepping motor 17 based on the amount of focusing movement of the objective lens 5 in the direction of the observation optical axis OA1 input from the input unit 31 to the focusing mechanism 3. The lens 5 is moved in focus. At this time, the focusing drive control unit 35a outputs a pulse corresponding to the commanded movement amount to the stepping motor 17, thereby moving the objective lens 5 by that focusing movement amount. The focusing drive controller 35a detects the origin position of the objective lens 5 in the direction of the observation optical axis OA1 based on the detection result of the origin position sensor 15.

  The lens movement control unit 35b drives the lens movement mechanism 40 based on the focusing movement amount of the objective lens 5 that is input from the input unit 31 to the focusing mechanism 3, and moves the convergent lens 28 to the illumination optical axis OA2. Move in the direction. For example, the lens movement control unit 35b appropriately detects the amount of focusing movement of the objective lens 5 that is instructed and input from the input unit 31, and the lens moving mechanism 40 moves the convergence lens 28 by the amount of movement equal to the detected amount of focusing movement. Move. At this time, the lens movement control unit 35 b moves the convergence lens 28 with respect to the sample 1 in the same movement direction as that of the objective lens 5. That is, when the objective lens 5 is moved in the direction away from the sample 1 (upward in FIG. 1), the converging lens 28 is moved in the direction away from the sample 1 (right rear in FIG. 1), and the objective lens 5 is moved to the sample 1 When the lens is moved in the direction approaching (downward in FIG. 1), the converging lens 28 is moved in the direction approaching the sample 1 (leftward in FIG. 1).

  Thus, in the illumination device 100, even when the objective lens 5 is continuously moved in the direction of the observation optical axis OA1 by focusing or the like, the convergence lens 28 can be moved in conjunction with the movement, and the illumination optical path The distance between the objective lens 5 and the converging lens 28 can be kept constant. As a result, the illumination device 100 can always image the aperture image and the second light source image on the pupil 5a of the objective lens 5 without changing the imaging magnification while the aperture stop 24 is fixed. The effect of the Koehler illumination method can always be exhibited satisfactorily.

  In the illumination device 100, it is not necessary to move the aperture stop 24 in the direction of the illumination optical axis OA2, and it is not necessary to readjust the aperture diameter of the aperture stop 24 according to the movement of the objective lens 5 and the converging lens 28. For this reason, in the illuminating device 100, the aperture stop 24 can be reduced in size and simplified as compared with, for example, Patent Document 1 described above, and operability and convenience when performing focusing can be improved. it can.

  FIG. 3 shows a case where the specimen 1 ′ is placed on the stage 2 instead of the specimen 1 in the microscope according to the first embodiment. In the case of FIG. 1, the objective lens 5 is focused on the upper end of the movable range according to the thickness of the specimen 1, and the converging lens 28 is moved to the rear end of the movable range (FIG. 1) according to this focusing movement. To the right end). In contrast to this, in the case of FIG. 3, the objective lens 5 is moved downward in accordance with the thickness of the specimen 1 ′, and the converging lens 28 is moved in the forward direction (the left direction in FIG. ) Has been moved. In any case, the pupil 5a of the objective lens 5 and the focal plane of the converging lens 28 are matched, and the second light source image and the aperture image of the aperture stop 24 are formed on the pupil 5a. And 1 'are well Kohler illuminated.

  Next, the configuration of the lens moving mechanism 40 will be specifically described. 4 and 5 are plan views showing the main configuration of the lens moving mechanism 40. FIG. FIG. 4 shows the case where the converging lens 28 is closest to the collimating lens 27 within the movable range, and FIG. 5 shows the case where it is farthest from the collimating lens 27. As shown in these drawings, the lens moving mechanism 40 includes a slider 42 and a guide 43. The slider 42 has a lens frame 41 holding the converging lens 28 inside, and is fixed to the upper part, and is fitted to the guide 43 so as to be movable in the direction of the illumination optical axis OA2. The bottom of the guide 43 is fixed to the main body frame 101 a of the light projecting tube 101.

  The lens moving mechanism 40 includes a drive unit 44 that moves the slider 42 in the direction of the illumination optical axis OA2, and an origin position sensor (So) 45 that detects the origin position of the slider 42 in the direction of the illumination optical axis OA2. The drive unit 44 is configured by using a transmission unit 46 protruding from the lens frame 41 and a stepping motor (Mo) 47 fixed to the main body frame 101a. The origin position sensor 45 and the stepping motor 47 are electrically connected to the control device 103 by a wiring cable (not shown), and are driven and controlled by the lens movement control unit 35b. The collimating lens 27 is held in a lens frame 49 fixed to the main body frame 101a.

  The stepping motor 47 moves the slider 42 freely in the direction of the illumination optical axis OA2 by causing the shaft 47a to move linearly without rotation in the axial direction and moving the transmission unit 46 in this linear movement direction. As a result, the lens moving mechanism 40 can move the converging lens 28 freely in the direction of the illumination optical axis OA2 via the lens frame 41, and the focal plane of the converging lens 28 can be matched with the pupil 5a of the objective lens 5. Can do.

  For example, a photo interrupter is used for the origin position sensor 45, and a stepping motor 47 is used when the thin light-shielding piece 46a protruding from the tip of the transmission unit 46 is inserted into the sensing region as shown in FIG. The drive position is detected as the origin position of the slider 42 in the direction of the illumination optical axis OA2, and the detection result is output to the lens movement control unit 35b. Based on this, the lens movement control unit 35b can detect the origin position of the convergent lens 28 in the direction of the illumination optical axis OA2.

  Here, the stepping motor 47 has been described as linearly moving the shaft 47a without rotation, but is not limited to the linear motion type, and is fixed to the lens frame 41 using, for example, a rotary stepping motor whose shaft rotates. The lens frame 41 and the converging lens 28 can be moved in the direction of the illumination optical axis OA2 by combining with the ball screw. Moreover, it is not limited to a stepping motor, A DC servo motor etc. can also be utilized. Further, instead of the slider 42 and the guide 43, another type of guide mechanism may be used. Further, the focusing mechanism 3 is not limited to the above-described mechanism, and can be configured using another mechanism.

  As described above, in the illumination device 100 according to the first embodiment, the relay optical system 25 includes the collimator lens 27 that collimates the illumination light emitted from the opening 24a of the aperture stop 24, and the self-optical axis. And a converging lens 28 for converging the illumination light collimated by the collimating lens 27 onto the pupil 5a of the objective lens 5, the objective lens 5 is provided by focusing or the like. Even when it is continuously moved in the direction of the observation optical axis OA1, the aperture image and the second light source image are fixed on the pupil 5a of the objective lens 5 without changing the imaging magnification while the aperture stop 24 is fixed. The effect of the Koehler illumination method can be exhibited satisfactorily.

  Further, the illumination device 100 detects the focusing movement amount of the lens moving mechanism 40 that moves the converging lens 28 in the direction of the illumination optical axis OA2, which is the optical axis direction, and the objective lens 5, and the detected focusing movement amount. And a lens movement control unit 35b for moving the converging lens 28 in the direction of the illumination optical axis OA2 by the lens moving mechanism 40. Accordingly, the focusing of the objective lens 5 is performed in conjunction with the focusing movement of the objective lens 5. The converging lens 28 can be moved equal to the amount of movement. Thus, the focal plane of the convergent lens 28 and the pupil 5a of the objective lens 5 are always matched, and the aperture image of the aperture stop 24 and the second light source image are always formed on the pupil 5a of the objective lens 5. The effect of the Koehler illumination method can always be exhibited satisfactorily.

(Embodiment 2)
Next, an illuminating device according to Embodiment 2 of the present invention will be described. FIG. 6 is a diagram illustrating a main configuration of a microscope using the illumination device 200 according to the second embodiment. As shown in this figure, the microscope according to the second embodiment includes an illumination device 200 instead of the illumination device 100 based on the configuration of the microscope according to the first embodiment. The illumination device 200 is configured to be switchable between bright-field illumination and dark-field illumination. Based on the configuration of the illumination device 100, the illumination device 200 is replaced with a light projection tube 101 and a control device 103. 201 and a control device 203.

  The light projecting tube 201 is provided with a lens moving mechanism 50 instead of the lens moving mechanism 40 based on the configuration of the light projecting tube 101, and the illumination switching in which the half mirror 26 and a partial reflection mirror described later are switchably disposed. A mechanism 60 is further provided. The control device 203 includes a control unit 36 instead of the control unit 35 based on the configuration of the control device 103, and the control unit 36 drives and controls the illumination switching mechanism 60 based on the configuration of the control unit 35. An illumination switching control unit 36c is further provided. Other configurations are the same as those of the first embodiment, and the same components are denoted by the same reference numerals.

  The illumination switching mechanism 60 holds the half mirror 26 and the partial reflection mirror 61 (see FIG. 7), and the observation optical axis of the half mirror 26 and the partial reflection mirror 61 is based on an instruction from the illumination switching control unit 36c. A switchable arrangement is provided on the intersection OAx between OA1 and illumination optical axis OA2. Thereby, the illumination switching mechanism 60 can freely perform illumination switching for the specimen 1, specifically, switching between bright field illumination and dark field illumination.

  Here, the partial reflection mirror 61 is a reflection mirror that reflects illumination light in a ring shape around the intersection OAx when arranged on the intersection OAx. For example, the partial reflection mirror 61 is not at the center including the intersection OAx. A reflective film is provided, and the mirror is provided with a high reflective film on the ring zone around the reflective film. Alternatively, a through hole (transmission hole) may be provided in the central portion instead of the non-reflective film. Accordingly, the partial reflection mirror 61 can reflect the illumination light in a ring shape around the observation optical axis OA1, and can transmit the observation light emitted from the sample 1 at the intersection OAx.

  When an instruction input for instructing illumination switching is input from the input unit 31, the illumination switching control unit 36 c causes the illumination switching mechanism 60 to perform illumination switching in response to the instruction input. Specifically, when an instruction input for instructing bright field illumination is made, the half mirror 26 is arranged at the intersection OAx by the illumination switching mechanism 60, and when an instruction input for instructing dark field illumination is made, The reflection mirror 61 is disposed at the intersection OAx. As a result, the illumination device 200 can automatically perform illumination switching by the illumination switching mechanism 60 in response to an instruction input from the input unit 31.

  Similarly to the lens moving mechanism 40, the lens moving mechanism 50 is an insertion / removal mechanism that moves the converging lens 28 in the direction of the illumination optical axis OA2 and also moves the converging lens 28 in and out of the illumination optical path along the illumination optical axis OA2. Provide mechanism. Thereby, in the illumination device 200, in addition to moving the convergence lens 28 in the direction of the illumination optical axis OA2 according to the focusing movement of the objective lens 5 by the focusing mechanism 3, the convergence is performed according to the illumination switching by the illumination switching mechanism 60. The lens 28 can be inserted into and removed from the illumination optical path, and appropriate illumination switching can be performed.

  That is, in the illuminating device 200, when the illumination switching mechanism 60 places the half mirror 26 on the intersection OAx in response to an instruction input for instructing bright field illumination, the lens moving mechanism 50 causes the converging lens 28 to be placed in the illumination optical path. Arrange. When the partial reflection mirror 61 is arranged on the intersection OAx in response to an instruction input for instructing dark field illumination, the lens moving mechanism 50 retracts the converging lens 28 from the illumination optical path.

  Thereby, in the illumination device 200, in the case of bright field illumination, the illumination light converged by the converging lens 28 can be supplied to the objective lens 5, and in the case of dark field illumination, the collimated lens 27 is a collimated light beam collimated. Illumination light can be supplied to the objective lens 5, and illumination light in an appropriate state can be supplied to the objective lens 5. When switched to dark field illumination, a separation cylinder (not shown) for separating the optical path of the illumination light and the optical path of the observation light is further provided between the partial reflection mirror 61 and the objective lens 5.

  Next, the configuration of the lens moving mechanism 50 and the illumination switching mechanism 60 will be specifically described. FIG. 7 is a plan view showing the main configuration of the lens moving mechanism 50 and the illumination switching mechanism 60. 8 is a cross-sectional view showing a cross section taken along the line AA in FIG. As shown in these drawings, the lens moving mechanism 50 includes a slider 42 and a guide 43 in the same manner as the lens moving mechanism 40. The slider 42 is fitted to the guide 43 and is movable in the direction of the illumination optical axis OA2. The bottom of the guide 43 is fixed to the main body frame 201 a of the light projecting tube 201.

  An insertion / removal guide 54 configured using a bottom plate 51, wall plates 52A, 52B, and a top plate 53 is fixed to the upper portion of the slider 42, and a lens holding a converging lens 28 inside the insertion / removal guide 54. A frame 55 is provided. The lens frame 55 is in contact with the bottom plate 51 and the top plate 53 in the vertical direction (left and right direction in FIG. 8), and in contact with the wall plates 52A and 52B in the front and back direction (left and right direction in FIG. 7). 51, the wall plates 52A and 52B, and the top plate 53 are movable in the lens insertion / removal direction parallel to the illumination optical axis OA2.

  In addition, the lens frame 55 has an operation lever 57 protruding from the side surface of the main body frame 201a and the light shielding plate 56. The operation lever 57 is inserted into and removed from the main body frame 201a. Is freely moved in the lens insertion / removal direction. Thereby, in the lens moving mechanism 50, the converging lens 28 can be freely inserted into and removed from the illumination optical path on the illumination optical axis OA2. The light shielding plate 56 prevents external light from entering the main body frame 201a from the through hole 201b for allowing the operation lever 57 to penetrate the main body frame 201a.

  Ball plungers 58 </ b> A and 58 </ b> B are provided inside the bottom plate 51, and their tip portions protrude from the top surface portion of the bottom plate 51 so as to be able to protrude and retract. On the other hand, a groove 55 a is provided at the bottom of the lens frame 55. The lens frame 55 is temporarily fixed by engaging the tip portions of the ball plungers 58A and 58B in the groove 55a, and is positioned in the lens insertion / removal direction. The converging lens 28 is disposed in the illumination optical path when the lens frame 55 is positioned by the ball plunger 58A, and is completely retracted from the illumination optical path when the lens frame 55 is positioned by the ball plunger 58B.

  Further, on the upper surface portion of the bottom plate 51, restriction pins 59A and 59B for restricting the movement range of the lens frame 55 in the lens insertion / removal direction are provided. The restriction pin 59A is provided so that the lens frame 55 is positioned by the ball plunger 58A and the end of the lens frame 55 is in contact with the converging lens 28 disposed in the illumination optical path. Further, the regulation pin 59B is provided so that the lens frame 55 is positioned by the ball plunger 58B, and the convergent lens 28 is in contact with the end of the lens frame 55 in a state in which it is completely retracted from the illumination optical path.

  The lens moving mechanism 50 further includes a drive unit 44 and an origin position sensor 45 provided in the lens moving mechanism 40. For this reason, in the lens moving mechanism 50, similarly to the lens moving mechanism 40, the converging lens 28 can be moved in the direction of the illumination optical axis OA2 based on an instruction from the lens movement control unit 35b. Thus, the focal plane of the converging lens 28 and the pupil 5a of the objective lens 5 can always be matched, and the aperture image of the aperture stop 24 and the second light source image are always formed on the pupil 5a of the objective lens 5. Can be made. In the driving unit 44 in the lens moving mechanism 50, the transmission unit 46 corresponds to the tip portion 51 a of the bottom plate 51 and is formed integrally with the bottom plate 51.

  On the other hand, as shown in FIG. 7, the illumination switching mechanism 60 includes a slider 62 that holds the half mirror 26 and the partial reflection mirror 61, and a guide 63 that movably supports the slider 62. The slider 62 holds the half mirror 26 with respect to the transmission hole 62a for bright field illumination, and holds the partial reflection mirror 61 and the above-described separation cylinder (not shown) with respect to the transmission hole 62b for dark field illumination. The guide 63 is provided with an origin position sensor (Sc) 65 and a stepping motor (Mc) 67. The origin position sensor 65 and the stepping motor 67 are electrically connected to the control device 203 via wiring cables (not shown), and are driven and controlled by the illumination switching control unit 36c.

  When an instruction input for instructing illumination switching is input from the input unit 31, the stepping motor 67 drives the guide 63 and moves the slider 62 based on an instruction from the illumination switching control unit 36 c according to the instruction input. Specifically, the stepping motor 67 places the half mirror 26 on the intersection OAx when an instruction is input for instructing bright field illumination, and when an instruction is input for instructing dark field illumination, The partial reflection mirror 61 is disposed on the intersection OAx and the separation cylinder is disposed on the observation optical axis OA1. The origin position sensor 65 detects a predetermined drive position by the stepping motor 67 as the origin position of the slider 62, and outputs the detection result to the illumination switching control unit 36c. The illumination switching control unit 36c can detect the origin position of the slider 62 based on this.

  Here, the lens moving mechanism 50 slides the converging lens 28 in order to insert / remove the converging lens 28 with respect to the illumination optical path. However, the lens moving mechanism 50 is not limited to sliding movement, and is not limited to sliding movement. May be inserted or removed. In addition, the illumination switching mechanism 60 switches the arrangement by sliding the half mirror 26 and the partial reflection mirror 61 with the slider 62. However, the illumination switching mechanism 60 is not limited to the slide movement, and for example, rotation using a turret or the like. You may switch arrangement | positioning by movement.

  As described above, in the illuminating device 200 according to the second embodiment, the illumination switching mechanism 60 that performs illumination switching of the illumination light with respect to the specimen 1 and the converging lens 28 are inserted into and removed from the illumination optical path in the illumination optical axis OA2. Since the moving lens moving mechanism 50 is provided, appropriate illumination light, which is a convergent light beam or a parallel light beam, can be supplied to the objective lens 5 according to illumination switching, and the specimen 1 is always efficiently illuminated. It can be performed. In addition, since the illumination device 200 includes the relay optical system 25, the lens movement mechanism 50, and the lens movement control unit 35b, the same effect as the illumination device 100 can be obtained.

(Modification 1)
Next, an illuminating device according to Modification 1 of Embodiment 2 will be described. FIG. 9 is a plan view showing a partial configuration of the illumination device 300 according to the first modification. FIG. 10 is a cross-sectional view showing a cross section taken along line BB in FIG. The lighting device 300 includes a light projecting tube 301 instead of the light projecting tube 201 in the lighting device 200 described above. The light projecting tube 301 includes a main body frame 301 a and a lens moving mechanism 70 instead of the main body frame 201 a and the lens moving mechanism 50 based on the configuration of the light projecting tube 201. Other configurations are the same as those of the lighting device 200, and the same components are denoted by the same reference numerals.

  As shown in FIGS. 9 and 10, the lens moving mechanism 70 includes a slider 42 and a guide 43 as with the lens moving mechanism 50. The slider 42 is fitted to the guide 43 and is movable in the direction of the illumination optical axis OA2. The bottom of the guide 43 is fixed to the main body frame 301 a of the light projecting tube 301. An insertion / removal guide 74 configured by using a bottom plate 51, wall plates 72 </ b> A and 72 </ b> B, and a top plate 53 is fixed to the upper portion of the slider 42. Inside the insertion / removal guide 74, a lens frame 75 holding the converging lens 28 is provided. The lens frame 75 is in contact with the bottom plate 51 and the top plate 53 in the vertical direction (left and right direction in FIG. 10), and is in contact with the wall plates 72A and 72B in the front and back direction (left and right direction in FIG. 9). 51, the wall plates 72A and 72B, and the top plate 53 are parallel to each of the top plates 53 and are movable in the lens insertion / removal direction perpendicular to the illumination optical axis OA2.

  The lens frame 75 is provided with a through hole 75b parallel to the illumination optical axis OA2, and one end of a shaft 77 is inserted into the through hole 75b. The other end of the shaft 77 is fixed to an end face 62 c of the end face of the slider 62 that faces the converging lens 28. The shaft 77 is inserted into a long hole 72a provided in the wall plate 72A between the end face 62c and the through hole 75b, and the lens is inserted and removed in the long hole 72a as the slider 62 is moved by the guide 63. Moved in the direction. The lens frame 75 is moved in the lens insertion / removal direction in the insertion / removal guide 74 with the movement of the shaft 77.

  Here, the other end of the shaft 77 is fixed to the end face 62c so that the converging lens 28 is arranged in the illumination optical path when the half mirror 26 is arranged on the intersection OAx by the illumination switching mechanism 60. Yes. For this reason, in the lens moving mechanism 70, the convergence lens 28 can be inserted / removed appropriately with respect to the illumination optical path in conjunction with the illumination switching by the illumination switching mechanism 60.

  Specifically, the lens moving mechanism 70 receives an instruction input for instructing bright field illumination from the input unit 31, and when the half mirror 26 is arranged on the intersection OAx by the illumination switching mechanism 60, as shown in FIG. In addition, the converging lens 28 can be arranged in the illumination optical path in conjunction with this arrangement operation. Further, when an instruction input for instructing dark field illumination is made from the input unit 31 and the partial reflection mirror 61 is arranged on the intersection OAx by the illumination switching mechanism 60, as shown in FIG. In conjunction with this, the converging lens 28 can be retracted from the illumination optical path.

  Ball plungers 58 </ b> A and 58 </ b> B are provided inside the bottom plate 51, and their tip portions protrude from the top surface portion of the bottom plate 51 so as to be able to protrude and retract. On the other hand, a groove 75 a is provided at the bottom of the lens frame 75. The lens frame 75 is temporarily fixed by engaging the tip portions of the ball plungers 58A and 58B in the groove 75a. The ball plunger 58A is inserted into the groove 75a when the half mirror 26 is disposed on the intersection OAx by the illumination switching mechanism 60 and the converging lens 28 is disposed in the illumination optical path, and the ball plunger 58B is disposed in the illumination switching mechanism. When the partial reflection mirror 61 is disposed on the intersection OAx by 60 and the converging lens 28 is completely retracted from the illumination optical path, the partial reflection mirror 61 is engaged with the groove 75a.

  The lens moving mechanism 70 includes a drive unit 44 and an origin position sensor 45 as in the lens moving mechanism 50. For this reason, in the lens moving mechanism 70, similarly to the lens moving mechanism 50, the converging lens 28 can be moved in the direction of the illumination optical axis OA2 based on an instruction from the lens movement control unit 35b. Thus, the focal plane of the converging lens 28 and the pupil 5a of the objective lens 5 can always be matched, and the aperture image of the aperture stop 24 and the second light source image are always formed on the pupil 5a of the objective lens 5. Can be made.

  As described above, in the illumination device 300 according to the first modification, the convergence lens 28 can be inserted into and removed from the illumination optical path in accordance with the illumination switching by the illumination switching mechanism 60 as in the illumination device 200. Further, in the illumination device 300, the converging lens 28 can be automatically inserted / removed in conjunction with the illumination switching operation by the illumination switching mechanism 60. For this reason, the illumination device 300 can perform appropriate illumination switching more easily than the illumination device 200. In addition, since the illumination device 300 includes the relay optical system 25, the lens movement mechanism 70, and the lens movement control unit 35b, the same effect as the illumination device 100 can be obtained.

(Modification 2)
Next, an illuminating device according to Modification 2 of Embodiment 2 will be described. FIG. 12 is a plan view showing a partial configuration of the illumination device 400 according to the second modification. 13 is an arrow view corresponding to the CC arrow view in FIG. The lighting device 400 includes a light projecting tube 401 in place of the light projecting tube 201 in the lighting device 200 described above. The light projecting tube 401 includes a main body frame 401 a and a lens moving mechanism 80 instead of the main body frame 201 a and the lens moving mechanism 50 based on the configuration of the light projecting tube 201. Other configurations are the same as those of the lighting device 200, and the same components are denoted by the same reference numerals.

  The lens moving mechanism 80 is configured using a slider 82, a guide 83, an origin position sensor 45, and a stepping motor 47, as shown in FIGS. Similarly to the illumination device 200, the origin position sensor 45 and the stepping motor 47 are electrically connected to the control device 203 via a wiring cable (not shown), and are driven and controlled by the lens movement control unit 35b.

  The slider 82 is a lens holding portion 82 a that holds the converging lens 28, a slide portion 82 b that is fitted in a guide groove 83 a provided in the guide 83, and a transmission that is inserted into a guide hole 83 b provided in the guide 83. The part 82c is integrally formed. The guide 83 is fixed to the side surface portion 62d of the slider 62 with the longitudinal direction of the guide groove 83a and the guide hole 83b being parallel to the illumination optical axis OA2. The stepping motor 47 is fixed to the side surface portion 62d of the slider 62 so as to be in contact with the end portion of the guide 83, and the shaft 47a is inserted into the stepping motor 47 in parallel with the illumination optical axis OA2 and from the guide hole 83b. The protruding transmission part 82c is fitted. Thus, the lens moving mechanism 80 is supported by the slider 62 and holds the converging lens 28 so as to be movable in the direction of the illumination optical axis OA2.

  Here, the lens moving mechanism 80 is supported by the slider 62 so that the converging lens 28 is disposed in the illumination optical path when the half mirror 26 is disposed on the intersection OAx by the illumination switching mechanism 60. For this reason, in the lens moving mechanism 80, the convergence lens 28 can be inserted / removed appropriately with respect to the illumination optical path in conjunction with the illumination switching by the illumination switching mechanism 60.

  Specifically, the lens moving mechanism 80 receives an instruction input for instructing bright field illumination from the input unit 31, and when the half mirror 26 is arranged on the intersection OAx by the illumination switching mechanism 60, as shown in FIG. In addition, the converging lens 28 can be arranged in the illumination optical path in conjunction with this arrangement operation. Further, when an instruction input for instructing dark field illumination is made from the input unit 31 and the partial reflection mirror 61 is arranged on the intersection OAx by the illumination switching mechanism 60, as shown in FIG. In conjunction with this, the converging lens 28 can be retracted from the illumination optical path.

  On the other hand, as in the first embodiment, the stepping motor 47 linearly moves the shaft 47a without rotation in the axial direction, and moves the transmitting portion 82c in the linear movement direction, thereby moving the slider 82 to the illumination optical axis OA2. Move freely in the direction. Thereby, the lens moving mechanism 80 can move the converging lens 28 freely in the direction of the illumination optical axis OA2 via the slider 82, and the focal plane of the converging lens 28 can be matched with the pupil 5a of the objective lens 5. it can.

  The origin position sensor 45 indicates the driving position by the stepping motor 47 when the thin light-shielding piece 82d (see FIG. 13) protruding from the upper surface of the transmission portion 82c is inserted into the sensing area. This is detected as the origin position of the slider 82 in the direction of the axis OA2, and the detection result is output to the lens movement control unit 35b. Based on this, the lens movement control unit 35b can detect the origin position of the convergent lens 28 in the direction of the illumination optical axis OA2.

  In the illuminating device 400 concerning this modification 2 demonstrated above, the effect similar to the illuminating device 300 concerning the modification 1 mentioned above can be acquired.

(Embodiment 3)
Next, an illuminating device according to Embodiment 3 of the present invention will be described. 15 and 16 are plan views showing a partial configuration of the illumination device 500 according to the third embodiment. The lighting device 500 includes a light projecting tube 501 instead of the light projecting tube 201 in the lighting device 200 described above. The light projecting tube 501 includes a main body frame 501a, a lens moving mechanism 40, and an illumination switching mechanism 90 in place of the main body frame 201a, the lens moving mechanism 50, and the illumination switching mechanism 60 based on the configuration of the light projecting tube 201. Other configurations are the same as those of the lighting device 200, and the same components are denoted by the same reference numerals.

  The illumination switching mechanism 90 is further provided with a lens frame 92 holding a concave lens 91 as a conversion optical member on the slider 62 based on the configuration of the illumination switching mechanism 60. The concave lens 91 is inserted into and removed from the illumination optical path by the slider 62 together with the half mirror 26 and the partial reflection mirror 61. When the half mirror 26 is disposed on the intersection OAx as shown in FIG. Evacuated. As shown in FIG. 16, when the partial reflection mirror 61 is disposed on the intersection OAx, it is disposed in the illumination optical path between the converging lens 28 and the partial reflection mirror 61. When the concave lens 91 is disposed in the illumination optical path, the concave lens 91 converts the illumination light converged by the converging lens 28 into a parallel light flux.

  Here, the concave lens 91 can accurately convert the illumination light from the convergence lens 28 into a parallel light beam when the distance from the convergence lens 28 in the direction of the illumination optical axis OA2 is set to a predetermined value. For this reason, in the illuminating device 500, when the concave lens 91 is arrange | positioned in an illumination optical path, the converging lens 28 is moved to a predetermined position by the lens moving mechanism 40, and the space | interval of the concave lens 91 and the converging lens 28 is made into a predetermined value. Specifically, the lens moving mechanism 40 sets the interval to a predetermined value by moving the converging lens 28 to the front end portion (left end portion in FIG. 16) within the movable range, for example, as shown in FIG. The predetermined position for moving the converging lens 28 for setting the interval is not limited to the front end portion of the movable range, and can be set to another position according to the insertion / removal position of the concave lens 91 and the like.

  Subsequently, an illumination switching operation in the illumination device 500 will be described. First, when an instruction input for instructing bright field illumination is input from the input unit 31, the illumination switching control unit 36c causes the illumination switching mechanism 90 to place the half mirror 26 on the intersection OAx and retract the concave lens 91 from the illumination optical path. Let When an instruction input for instructing dark field illumination is input from the input unit 31, the illumination switching control unit 36c causes the illumination switching mechanism 90 to place the partial reflection mirror 61 on the intersection OAx and illuminate the concave lens 91. Arranged in the optical path, the lens movement controller 35b moves the converging lens 28 to a predetermined position within the movable range in conjunction with the arrangement operation. As a result, the illumination device 500 can automatically and appropriately switch illumination between bright field illumination and dark field illumination in response to an instruction input from the input unit 31.

  On the other hand, in the illumination device 500, in the case of bright field illumination, the lens movement control unit 35 b is operated by the lens movement mechanism 40 by the lens movement mechanism 40 in conjunction with the focusing movement of the objective lens 5 by the focusing mechanism 3, as in the illumination device 100. 28 can be moved.

  As described above, the illuminating device 500 according to the third embodiment has the concave lens 91 that converts the illumination light converged by the converging lens 28 into a parallel light beam, and performs illumination switching of the illumination light on the sample 1. In addition, since the illumination switching mechanism 90 that inserts and removes the concave lens 91 with respect to the illumination optical path is provided, appropriate illumination light that is a convergent beam or a parallel beam can be supplied to the objective lens 5 in accordance with the illumination switching. The specimen 1 can be efficiently illuminated. In addition, since the illumination device 500 includes the relay optical system 25, the lens movement mechanism 40, and the lens movement control unit 35b, the same effect as the illumination device 100 can be obtained. In the illumination device 500, since it is not necessary to retract the converging lens 28 from the illumination optical path when performing dark field illumination, the same effect can be obtained with a simpler configuration than the second embodiment regarding illumination switching. Can do.

  Up to this point, the best mode for carrying out the present invention has been described as the first to third embodiments. However, the present invention is not limited to the above-described first to third embodiments, and may be within the scope of the present invention. Various modifications are possible.

  For example, in Embodiments 1 to 3 described above, the focusing mechanism 3, the lens moving mechanisms 40, 50, 70, and 80 and the illumination switching mechanisms 60 and 90 are electrically driven. It may be configured to be manually operated. Moreover, it is good also as a structure which can switch electrically drive and manual operation freely. When only manual operation is performed, the focusing drive control unit 35a, the lens movement control unit 35b, and the illumination switching control unit 36c can be omitted, and the control devices 103 and 203 can be simplified.

  In the first to third embodiments described above, the lens movement control unit 35b detects the focusing movement amount of the objective lens 5 that is instructed and input from the input unit 31, and based on the detected focusing movement amount. Although the description has been made on the assumption that the converging lens 28 is moved, the sensor is not limited to the instruction input from the input unit 31, for example, a sensor for separately detecting the amount of focusing movement of the objective lens 5 is provided, and the detection result of this sensor is used. The converging lens 28 may be moved.

  In the above-described first to third embodiments, the illumination devices 100, 200, 300, 400, and 500 perform epi-illumination on the specimen 1, but may perform transmission illumination. In that case, the converging lens 28 may be moved in the direction of the illumination optical axis OA2 in accordance with the amount of movement in the direction of the observation optical axis OA1 of a condenser lens or the like instead of the objective lens 5 as a condenser lens. Moreover, although the microscope provided with each illuminating device was demonstrated as what is an erecting microscope, it can also be made into an inverted microscope. Each illumination device can be incorporated not only in a microscope but also in a substrate inspection device such as a semiconductor wafer or FPD (Flat Panel Display).

  In Embodiments 2 and 3 described above, the illumination switching is described as switching between bright-field illumination and dark-field illumination. However, the present invention is not limited to these illumination methods, and fluorescence observation, phase difference observation, differentiation It can also be configured to be switchable with various illuminations corresponding to various observation methods such as interference observation. Furthermore, the illumination for switching is not limited to two, and may be three or more.

  In the first to third embodiments described above, in the description of the drawings, each part of the lens is shown as a single lens for the sake of convenience. However, it is not necessary to interpret it as being limited to a single lens. I do not care. Further, when the converging lens 28 is composed of a plurality of lenses, the entire lens 28 is not limited to being moved in the direction of the illumination optical axis OA2, and some lenses may be moved.

  In the first to third embodiments described above, an incandescent lamp, a discharge lamp, or the like is used as the light source 20, but an emission end portion of a light guide member such as an optical fiber into which illumination light is introduced from one end is used. You can also In this case, an image of the exit end is formed as the light source image.

It is a figure which shows the structure of the microscope using the illuminating device concerning Embodiment 1 of this invention. It is a figure which shows the structure of a focusing mechanism. It is a figure which shows the structure of the microscope which lowered | hung the objective lens. It is a figure which shows the structure of a lens moving mechanism. It is a figure which shows the structure of a lens moving mechanism. It is a figure which shows the structure of the microscope using the illuminating device concerning Embodiment 2 of this invention. It is a figure which shows the structure of a lens moving mechanism and an illumination switching mechanism. It is sectional drawing which shows the AA arrow cross section shown in FIG. It is a figure which shows the structure of the lens moving mechanism with which the illuminating device concerning the modification 1 of Embodiment 2 is equipped, and an illumination switching mechanism. It is sectional drawing which shows the BB arrow cross section shown in FIG. It is a figure which shows the structure of the lens moving mechanism and illumination switching mechanism which retracted the converging lens. It is a figure which shows the structure of the lens moving mechanism with which the illuminating device concerning the modification 2 of Embodiment 2 is equipped, and an illumination switching mechanism. It is an arrow view corresponding to CC arrow view shown in FIG. It is a figure which shows the structure of the lens moving mechanism and illumination switching mechanism which retracted the converging lens. It is a figure which shows the structure of the lens moving mechanism with which the illuminating device concerning Embodiment 3 of this invention is equipped, and an illumination switching mechanism. It is a figure which shows the structure of the lens movement mechanism and illumination switching mechanism which performed illumination switching.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sample 2 Stage 3 Focusing mechanism 4 Revolver 5 Objective lens 5a Pupil 6 Lens barrel 7 Binocular part 8 Eyepiece 9 Microscope main body 11 Support part 11a Through-hole 12 Slider 13 Guide 14 Drive part 15 Origin position sensor 16 Ball screw 17 Stepping motor 17a Shaft 20 Light source 21 Light source image imaging optical system 22 Collector lens 23 Converging lens 24 Aperture stop 24a Aperture 25 Relay optical system 26 Half mirror 27 Collimating lens 28 Converging lens 31 Input unit 32 Output unit 33 Display unit 34 Storage unit 35 Control unit 35a Focusing drive control unit 35b Lens movement control unit 36 Control unit 36c Illumination switching control unit 40 Lens movement mechanism 41 Lens frame 42 Slider 43 Guide 44 Drive unit 45 Origin position sensor 46 Transmission unit 46a Light shielding piece 47 Stepping Data 47a shaft 49 lens frame 50 lens moving mechanism 51 bottom plate 51a tip 52A, 52B wall plate 53 top plate 54 insertion / removal guide 55 lens frame 55a groove 56 light shielding plate 57 operating lever 58A, 58B ball plunger 59A, 59B regulating pin 60 Illumination switching mechanism 61 Partial reflection mirror 62 Slider 62a, 62b Transmission hole 62c End face 62d Side face 63 Guide 65 Origin position sensor 67 Stepping motor 70 Lens moving mechanism 72A, 72B Wall plate 72a Slotted hole 74 Insertion / removal guide 75 Lens frame 75a Groove 75b Through hole 77 Shaft 80 Lens moving mechanism 82 Slider 82a Lens holding portion 82b Slide portion 82c Transmission portion 82d Light-shielding piece 83 Guide 83a Guide groove 83b Guide hole 90 Illumination switching mechanism 91 Concave lens 92 Lens Frame 100, 200, 300, 400, 500 Illuminator 101, 201, 301, 401, 501 Projector tube 101a, 201a, 301a, 401a, 501a Body frame 103, 203 Controller 201b Through hole OA1 Observation optical axis OA2 Illumination Optical axis OAx intersection

Claims (8)

A relay optical system that forms an image of an aperture stop on the pupil of a condensing lens movable in the direction of the own optical axis and irradiates the specimen with illumination light that has passed through the aperture stop via the condensing lens In the lighting device
The relay optical system is
A collimating lens unit for collimating the illumination light emitted from the aperture of the aperture stop;
A converging lens unit that is movably provided in the direction of the optical axis, and converges the illumination light collimated by the collimating lens unit on the pupil of the condenser lens;
An illumination device comprising: A moving mechanism for moving the converging lens portion in the optical axis direction;
A movement control means for detecting a movement amount of the condenser lens and moving the convergent lens portion by the movement mechanism based on the detected movement amount;
The illumination device according to claim 1, comprising:   The movement control means is connected to an input means for instructing and inputting an amount of movement of the condenser lens with respect to the focusing movement means for moving the condenser lens for focusing. The lighting device according to claim 2, wherein the converging lens unit is moved by the moving mechanism based on a moving amount of the lens.   4. The illumination device according to claim 2, wherein the movement control unit moves the convergent lens unit by the movement amount of the condenser lens by the moving mechanism. 5. A light source that emits the illumination light;
A light source image forming optical system for forming an image of the light source at an aperture of the aperture stop;
The illuminating device according to claim 1, further comprising: An illumination switching mechanism for performing illumination switching of the illumination light on the specimen;
An insertion / removal mechanism for inserting / removing the convergent lens unit with respect to the optical path of the illumination light;
The illuminating device according to claim 1, comprising:   7. The switching control means for causing the illumination switching mechanism to perform the illumination switching, and for causing the converging lens unit to be inserted / removed in conjunction with the illumination switching by the insertion / removal mechanism. Lighting equipment.   A conversion optical member that converts the illumination light that is converged by the convergent lens unit into a parallel light beam; performs illumination switching of the illumination light on the specimen; and the conversion optical member with respect to an optical path of the illumination light The illumination device according to claim 1, further comprising an illumination switching mechanism that inserts and removes the illumination device.

Images