JP2008190023A - Electropolishing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the following problem: there is no electropolishing apparatus which can perform an electropolishing treatment without using a tool and does not require exchange of a solution (electrolyte solution) every treatment although the exchange of a solution is required in chemical polishing. <P>SOLUTION: An electropolishing apparatus has a barrel having a regular polygonal cross section and being rotated by gear mechanisms transmitted with a driving motor between a pair of supporting plates opposite to each other. Further, the apparatus is equipped with a shaft-like cathode fixed to the central part of rotation of the barrel and a belt-like anode rotating in synchronization with the barrel, which is provided at a nearly central part of the polygonal wall plate of the barrel. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an electropolishing apparatus, and more particularly to an electropolishing apparatus used for finishing operations such as deburring and glossing of small stainless parts and medical-related titanium parts for semiconductor manufacturing apparatuses and electronic parts.

  Conventionally, in order to finish the above-described small stainless parts and titanium parts, chemical polishing is often used. Although this chemical polishing can process a large amount of parts at a time, this chemical polishing requires the replacement of the solution every time the processing is completed, and this replacement of the solution becomes a troublesome polishing process. ing.

Also, in general electropolishing processing, it is necessary to bring a jig, particularly a rack jig, into contact with each part to be processed. In addition to being trapped, it took a very long time to process.
Regarding the electropolishing apparatus according to the present application, the applicant investigated prior technical documents, but could not find anything that seems to be particularly similar to the present application.

  The problem to be solved by the present invention is that the electropolishing process can be performed without using a jig, and that the solution (electrolyte) does not need to be replaced every time the process is performed. The device was not present.

  In order to solve the above-described problem, an electropolishing apparatus according to the present invention has a barrel having a regular polygonal cross section that is rotated by a gear mechanism that is transmitted to a drive motor between a pair of opposing support plates, An axial cathode fixed to the rotation center portion of the barrel is provided, and a strip-like anode that rotates in synchronization with the barrel is provided at a substantially central portion of the wall plate formed as a polyhedron of the barrel. .

  The electropolishing apparatus according to the present invention is characterized in that a metal such as copper is used as the above-described axial cathode, and a metal such as titanium is used as the strip-shaped anode, and the upper side of the above-described axial cathode A non-conductive seal that prevents upward current is provided on the outer peripheral half of the belt, and the strip-shaped anode is rotated from the power supply unit provided above one of the support plates. Power is supplied through a connector, and the other side of the support plate is provided with a power supply connection portion to the shaft-like cathode.

  Further, in the electropolishing apparatus according to the present invention, one surface of the above-described barrel is a detachable lid, and an opening for taking in and out the workpiece is formed by removing the lid, and the lid also has a strip-like anode. Is provided, and a grip bar for suspension and gripping is constructed at the upper end portion between the above-described support plates.

  The electropolishing apparatus according to the present invention has the above-described configuration. A copper axial cathode is fixed at the center of rotation of the barrel, and a titanium strip anode is provided at the approximate center of the barrel wall plate. Therefore, the distance between the anode and the cathode becomes very close, and in the electrolyte. Surface treatment performed electrochemically, in particular, anodic dissolution of the object to be processed is performed with high accuracy, and the surface of the object to be processed can be made smooth and glossy.

  In addition, since the upper half of the shaft-like cathode is sealed with a non-conductor, all the current is received from the bottom, that is, concentrated from the inside of the barrel, and electric energy is not wasted. It has become.

  This was realized by configuring as illustrated in the drawings and described in the examples.

  Next, an example of a preferred embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an overall perspective view showing an electropolishing apparatus embodying the present invention, FIG. 2 is a front view showing a state in which the same part is broken and the position of a power supply part is switched left and right, FIG. FIG. 5 is a sectional view of the barrel, FIG. 6 is a plan view of the lid, FIG. 7 is a perspective view of the barrel, and FIG. 8 is a sectional view of the axial cathode.

  In these drawings, reference numeral 1 denotes a stainless steel electrolytic polishing apparatus main body embodying the present invention. The electropolishing apparatus main body 1 has a pair of opposing support plates 2a and 2b made of acrylic or the like, and protrusions for stabilizing when placed at the lower ends of the support plates 2a and 2b. Are provided integrally, and reinforcing bars 4, 4 are provided between the protrusions 3, 3,... Of each support plate 2a, 2b.

  Further, a grip bar 5 that is used when the electropolishing apparatus main body 1 is transported or suspended is installed at a substantially central portion near the upper ends of the support plates 2a and 2b. A suspension ring 5a used when the grip bar 5 is suspended may be provided at the approximate center of the grip bar 5. Further, a casing 7b is provided on the upper side between the support plates 2a and 2b, and a pair of pipes 6 and 6 and a drive made of plastic such as acrylic fixed to the pipes 6 and 6 are provided in the casing 7b. A mounting portion 8 for the motor 7 is formed. Reference numeral 7a denotes a power cord of the electric motor 7, and 7c denotes an operation switch.

  A starter gear 9 is attached to the motor shaft of the drive motor 7 in the casing 7b. The starter gear 9 is engaged with the first transmission gear 10, and the first transmission gear 10 is engaged with the first transmission gear 10. Is engaged with the second conductive gear 11 having the same pitch. Both the first conduction gear 10 and the second conduction gear 11 are supported by a receiving plate 12 provided on the inner surface of the support plate 2a.

  On the other hand, reference numeral 13 in the figure indicates a barrel. The barrel 13 is a regular hexagonal column as a whole, and support disks 14a and 14b are provided on both side surfaces thereof. A gear 15 is formed on the peripheral surface of one supporting disk 14a, and this gear 15 is engaged with the second transmission gear 11 to receive a rotational force. Further, a protrusion is formed at the center of the outer surface of each of the support disks 14a and 14b, and the protrusion is fitted with each of the support plates 2a and 2b to act as a rotating shaft.

  Further, each of the wall plates 16, 16... Forming the regular hexagonal column barrel 13 is provided with a large number of liquid passage holes. By rotating the barrel 13 in the electrolytic solution, the electrolytic solution is transferred to the barrel 13. It is configured to go in and out.

  Further, one of the wall plates 16, 16... Is a lid 18 for forming an opening 17 in order to allow a stainless steel or titanium part to be processed into and out of the barrel 13. The lid 18 is also provided with a large number of liquid passage holes in the same manner as the other fixed wall plates 16, 16.

  Reinforcing wings 19, 19... Are integrally provided on the outer surface of the corner portion between the wall plates 16, 16. Each of the reinforcing wings 19, 19 adjacent to the opening 17 has a pair of long grooves 20, 20. Are provided at opposing positions, and the ends of lock plates 21 and 21 rotatably supported on the outer surface of the lid 18 are fitted into the long grooves 20 and 20. The opening 17 is closed by the above, and the lid 18 can be removed by removing the fitting.

  Further, in the barrel 13, a shaft-like cathode, particularly a shaft-like cathode 22 formed of copper, is provided at the center of rotation without being rotated. The shaft-like cathode 22 is supplied with electric power from an electrode (supply power connection portion) 23 provided above the outer surface of the support plate. Further, a seal 24 made of a non-conductor such as vinyl chloride or Teflon (registered trademark) is provided on the upper half surface of the shaft-like cathode 22 so as to receive current from below.

  A strip-shaped anode, particularly a strip-shaped anode 25, 25 made of titanium, is provided along the longitudinal direction including the lid 18 in the approximate center of the wall plates 16, 16. Electric power is supplied to the strip-shaped anodes 25, 25,... From a power supply unit 26 attached above the outer surface of the support plate.

  The power supply unit 26 is formed in an upward U shape and is covered with a cover member 32 from above. The power supply unit 26 is provided with a nut member 29 for fixing the lower end surface of the crank-shaped mounting bracket 27 with a screw or the like and fixing the terminal 28a of the electric wire 28 to the upper end surface. From the nut member 29, the electric wire 31 penetrates the power supply unit 26 through the rotary connector 30 and is guided downward. Reference numeral 33 denotes an insertion hole for the electric wire 28 formed in the cover member 32.

  The above-described electric wire 31 is connected to the above-described band-shaped anodes 25, 25,. The conductive joint 34 electrically connects the barrel 13 and the electric wire 31 and has a structure in which the electrolytic solution is not injected into the inside.

  The electric wire 31 is a cap tire, that is, a flexible copper hot wire coated with a soft synthetic resin having chemical resistance, one end of which is connected to the rotary connector 30 and the other end is connected to the barrel 13. ing. The connection to the barrel 13 is made through a conductive joint 34 to achieve good electrical conduction, and a waterproof mechanism that prevents the electrolyte from entering the connecting portion. As the barrel 13 rotates, the electric wire 31 connected by the conductive joint 34 also rotates, and the torsional stress concentrates near the refracted portion and breaks. However, if the curvature of the bent portion of the electric wire 31 is large, for example, about R = 150 mm, the torsional stress of the electric wire 31 accompanying the rotation rotates smoothly without concentrating on the bent portion, and the rotary connector 30 portion Conducted. In this way, the anode current stably flows from the rotary connector 30 to the strip-shaped anode 25 of the wall plate 16 of the barrel 13 via the electric wire 31 and further the conductive joint 34, and no interruption occurs due to the rotational movement. In addition, although 35 shows the flexible tube through which the electric wire 31 is penetrated, it does not need to use especially.

  The electropolishing apparatus according to the present invention is configured as described above. Parts made of stainless steel or titanium thrown into the barrel 13 slide and fall along the inner surfaces of the wall plates 16 and 16 as the barrel 13 rotates, and are always located below the axial cathode 22. It will come into contact with the strip-shaped anode 25. Therefore, the distance between the shaft-like cathode 22 and the strip-like anode 25 is close, and a large current density can be obtained satisfactorily. Therefore, the anode is accurately dissolved, and the electropolishing without using a jig can be performed efficiently. .

  Since the electropolishing apparatus according to the present invention is configured as described above, it can be handled regardless of the type and size of the object to be processed by changing the apparatus size, and can be applied to metal parts other than stainless steel and titanium. Can respond.

It is a whole perspective view which shows the electropolishing apparatus which implemented this invention. It is the front view of the state which the same part fracture | ruptured and changed the position of the power supply part right and left. It is a right view. It is a left side view. It is a barrel sectional view. It is a top view of a lid. It is a perspective view of a barrel. It is sectional drawing of an axial cathode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Barrel plating apparatus main body 2a Support plate 2b Support plate 3 Protrusion 4 Bar 5 Grip bar 5a Hanging ring 6 Pipe 7 Drive motor 7a Power cord 7b Casing 7c Operation switch 8 Mounting part 9 Starting gear 10 First conduction gear 11 Second Conductive gear 12 Receiving plate 13 Barrel 14a Supporting disc 14b Supporting disc 15 Gear 16 Wall plate 17 Opening 18 Lid 19 Reinforcing wing 20 Long groove 21 Lock plate 22 Shaft cathode 23 Electrode 24 Seal 25 Banded anode 26 Power supply Part 27 Mounting bracket 28 Electric wire 28a Terminal 29 Nut member 30 Rotary connector 31 Electric wire 32 Cover member 33 Insertion hole 34 Conductive joint 35 Flexible tube

Claims (6)

  A barrel having a regular polygonal cross section that is rotated by a gear mechanism that is transmitted to a drive motor between a pair of opposing support plates, and an axial cathode that is fixed to the center of rotation of the barrel; and An electropolishing apparatus comprising a strip-like anode that rotates in synchronization with a barrel at a substantially central portion of a wall plate that is a polyhedron of a barrel.   2. The electropolishing apparatus according to claim 1, wherein a metal such as copper is used as the axial cathode, and a metal such as titanium is used as the strip anode.   3. The electropolishing apparatus according to claim 1, wherein a non-conductive seal for preventing upward current is provided on the outer peripheral half of the upper side of the shaft-like cathode. 4.   The belt-shaped anode is supplied with power from a power supply unit provided above one of the support plates via a rotary connector, and the other side of the support plate is connected to a power supply to the shaft-like cathode. An electropolishing apparatus provided with a portion.   One surface of the barrel is a detachable lid, and an opening is formed to allow the workpiece to be put in and out by removing the lid, and the lid is also provided with a strip-shaped anode. The electropolishing apparatus according to claim 1, 2, 3, or 4.   6. A grip bar for hanging or gripping is provided on the upper end portion between the support plates, as claimed in claim 1, 2, 3, 4, 4 or 5. Electropolishing equipment.

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