JP2008185723A - Optical scanner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical scanner which is easily mounted on the frame of a MEMS mirror. <P>SOLUTION: The optical scanner 1 is provided with: a light source unit 10 which emits light; a frame 40 which supports the light source unit 10; an oscillation mirror which changes the reflection direction of the light emitted from the light source unit 10 and performs scanning by rotary oscillation; a mirror package 22 which holds the oscillation mirror; a long beam-like member 50 which extends in the direction perpendicular to the rotary oscillation axis of the oscillation mirror and is formed longer than the mirror package 22; a first fixing member 60 which fixes the mirror package 22 to the beam-shaped member 50; and a second fixing member 70 which fixes the beam-like member 50 to the frame 40. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical scanning device including a MEMS mirror.

  In general, as an image forming apparatus, an electrostatic latent image is formed on a photosensitive drum by scanning a charged photosensitive drum with a light beam by an optical scanning device, and a developer is supplied to the electrostatic latent image. A developer image formed by transferring a developer image onto a sheet is known.

  Conventionally, an optical scanning device provided in such an image forming apparatus is known which performs scanning using a MEMS (Micro-Electro-Mechanical Systems) mirror that rotates and vibrates (see, for example, Patent Document 1).

JP 2004-198500 A

  By the way, since the MEMS mirror is very small, it is difficult to handle. For example, it may be very difficult to directly attach the MEMS mirror in a frame in which a plurality of ribs are formed. Further, since the MEMS mirror rotates and vibrates at a high frequency, there is a risk that noise may be generated through surrounding components.

  SUMMARY OF THE INVENTION Accordingly, it is a main object of the present invention to provide an optical scanning device that can easily perform a work of attaching a MEMS mirror to a frame.

  In order to solve the above problems, an optical scanning device according to the present invention changes the reflection direction of light emitted from the light source by rotating and oscillating a light source that emits light, a frame that supports the light source. An oscillating mirror that performs scanning, a oscillating mirror holding member that holds the oscillating mirror, and a long shape that extends in a direction orthogonal to the rotational oscillation axis of the oscillating mirror and is longer than the oscillating mirror holding member. A beam-shaped member, a first fixing member for fixing the vibrating mirror holding member to the beam-shaped member, and a second fixing member for fixing the beam-shaped member to the frame are provided.

  According to the present invention, since the vibrating mirror is attached to the beam-shaped member larger than the vibrating mirror via the vibrating mirror holding member, the vibrating mirror can be simplified simply by fixing the beam-shaped member that is easier to handle than the vibrating mirror to the frame. It will be attached to the frame.

  According to the present invention, the vibration mirror can be attached to the frame simply by fixing the beam-like member to the frame, so that the attaching operation of the vibration mirror to the frame can be facilitated.

  Next, embodiments of the present invention will be described in detail with reference to the drawings as appropriate. In the drawings to be referred to, FIG. 1 is a perspective view showing an optical scanning device according to an embodiment of the present invention, and FIG. 2 is a schematic diagram showing each component of the optical scanning device and a light route. First, the overall structure of the optical scanning device 1 will be briefly described with reference to FIGS. 1 and 2.

[Optical scanning device 1]
As shown in FIG. 1, the optical scanning device 1 includes a light source unit 10, a first mirror M1, a vibrating mirror unit 20, a first scanning lens 30 as a scanning optical system lens, a second scanning lens L, It mainly includes a second mirror M2, a frame 40 that supports them, and a third mirror M3 (see FIG. 2) disposed below the frame 40.

[Light source unit 10]
As shown in FIG. 2, the light source unit 10 includes a laser diode 11, a coupling lens 12, a diaphragm member 13, and a cylindrical lens 14. The laser beam emitted from the laser diode 11 passes through the coupling lens 12, the diaphragm member 13, and the cylindrical lens 14, is then reflected by the first mirror M <b> 1, and is irradiated toward the vibrating mirror unit 20.

[Vibration mirror unit 20]
The oscillating mirror unit 20 includes an oscillating mirror 21 that performs scanning by changing the reflection direction of light emitted from the first mirror M1 side by rotating and oscillating within a predetermined range. . The light reflected by the oscillating mirror 21 passes through the first scanning lens 30 and the second scanning lens L, is then reflected by the second mirror M2 and the third mirror M3, and is emitted to the outside of the optical scanning device 1. Is done. The light emitted to the outside of the optical scanning device 1 is projected onto a photoconductor (photosensitive drum or the like) in an image forming apparatus such as a copying machine or a laser printer, thereby forming an electrostatic latent image on the photoconductor. Contribute to.

  Next, details of the vibrating mirror unit 20 will be described. In the drawings to be referred to, FIG. 3 is an enlarged perspective view showing a mirror package, and FIG. 4 is an enlarged perspective view (a) showing a beam-like member and a top view (b). 5 is an enlarged perspective view (a) showing the state of the first fixing member viewed from the rear side, and an enlarged perspective view (b) showing the state of the first fixing member viewed from the front side, and FIG. 6 shows the second fixing member. It is an enlarged perspective view (a) and a front view (b). In the following description, the directions shown in FIG.

  As shown in FIG. 1, the vibrating mirror unit 20 includes a mirror package 22 as a vibrating mirror holding member, a long beam-like member 50, and a first fixing member 60 that fixes the mirror package 22 to the beam-like member 50. And a second fixing member 70 for fixing the beam-like member 50 to the frame 40.

  As shown in FIG. 3, the mirror package 22 is formed in a hollow rectangular case shape, and holds the oscillating mirror 21 therein. Specifically, the oscillating mirror 21 is formed integrally with a plate-like support (not shown) having an opening that is slightly larger than the oscillating mirror 21 via a shaft portion, thereby forming a MEMS mirror. Yes. The MEMS mirror support is fixed to the mirror package 22, so that the vibrating mirror 21 can swing with respect to the mirror package 22.

  The mirror package 22 has an opening 22b for exposing the vibration mirror 21 on the front wall 22a.

  As shown in FIG. 1, the beam member 50 is a long member, extends in a direction orthogonal to the rotational vibration axis RA (see FIG. 3) of the vibration mirror 21, and is longer than the mirror package 22. Has been. The length of the beam member 50 and the mirror package 22 in the vertical direction (length in the direction of the rotational vibration axis RA) is substantially the same. Also, as shown in FIG. 4A, a pair of tilting projections 51a that support the mirror package 22 in a tiltable manner are provided in the central portion 51 of the beam-shaped member 50 along the vertical direction. Thereby, as shown in FIG. 4B, the mirror package 22 is tiltable about the tilt axis TA along the rotational vibration axis RA of the vibration mirror 21.

  An opening 51b corresponding to the opening 22b of the mirror package 22 is formed between the pair of tilting protrusions 51a. As a result, light incident from the front side of the beam-shaped member 50 is projected to the vibrating mirror 21 in the mirror package 22 through the opening 51b, and the light reflected by the vibrating mirror 21 passes through the opening 51b. The light is emitted in front of the beam member 50.

  Further, the central portion 51 of the beam-like member 50 is formed so as to bulge forward from the supported portions 52 on both sides thereof, whereby a recess 53 is formed on the rear side of the beam-like member 50. It is like that. The depth of the recess 53 is formed such that the rotational vibration axis RA of the oscillating mirror 21 is located within the rear surface 52a of the supported portion 52, as shown in FIG. 4B. . In other words, the rotational vibration axis RA of the oscillating mirror 21 is positioned in a plane defined by a spherical protrusion 71d of the second fixing member 70 (see FIG. 6), which will be described later, the tip 75a of the screw 75, and the base portion 72f. The depth of the recess 53 is set.

  As shown in FIG. 5A, the first fixing member 60 includes a right pressing member 61 and a left pressing member 62 as an example of a pressing portion that presses and fixes the mirror package 22 against the beam member 50. A positioning member 63 for positioning the mirror package 22 with respect to the beam-like member 50 is provided.

  The right pressing member 61 includes a base portion 61a fixed to the beam member 50, a right pressing portion 61b, a central pressing portion 61c, and a flange 61d that are integrally formed with the base portion 61a.

  The base 61a is formed with a notch 61e at the upper edge thereof, and a bolt mounting hole (not shown) is formed at a substantially central portion thereof. The notch 61e is adapted to match a pin that is appropriately attached to a hole 52e formed in the supported portion 52 of the beam-like member 50, whereby the right pressing member 61 is bolted to the beam-like member 50. When fixing with B, the right pressing member 61 is prevented from being rotated together with the bolt B.

  The right pressing portion 61b is an example of a first pressing portion, and is configured to be elastically deformable by being formed to extend rearward from the lower portion of the right edge of the base portion 61a and then to the left. ing. The right pressing portion 61b has a length of a portion extending leftward and an angle formed by a portion extending leftward and a portion extending rearward as appropriate, so that the tilting axis TA of the mirror package 22 is set. It is comprised so that the right side may be pressed.

  The center pressing portion 61c is an example of a third pressing portion, and is formed to extend rearward from the upper portion of the right edge of the base portion 61a, and then extend longer to the left than the right pressing portion 61b. It is configured to be elastically deformable. The center pressing portion 61c is appropriately set in the left-right direction of the rear surface of the mirror package 22 by appropriately setting the length of the portion extending leftward and the angle formed between the portion extending leftward and the portion extending rearward. It is comprised so that the center may be pressed. In other words, the center pressing portion 61c is configured to contact the rear surface of the portion of the front surface of the mirror package 22 where the tilt axis TA is defined.

  The flange 61d is erected from the left edge of the base 61a toward the rear. Thereby, the intensity | strength of the center pressing part 61c is improved.

  The left pressing member 62 includes a base portion 62a fixed to the beam member 50 and a left pressing portion 62b formed integrally with the base portion 62a.

  The base portion 62a has an extending portion 62c extending leftward at an upper portion thereof, and a long hole 62d extending in the left-right direction is formed in the extending portion 62c. Further, an engaging claw portion 62e (see FIG. 5B) is formed at the lower edge of the base portion 62a so as to go around to the front side of the beam-like member 50. Thus, after the left pressing member 62 is temporarily fixed to the beam-shaped member 50 with the bolt B, the left pressing member 62 can be moved to the left and right by the action of the long hole 62d and the engaging claw 62e.

  The left pressing portion 62b is an example of a second pressing portion, and is configured to be elastically deformed by being formed to extend rearward from the lower portion of the left edge of the base portion 62a and then to the right. ing. In addition, the front end portion 62f of the left pressing portion 62b is formed so as to curve forward, and has a tapered shape that gradually becomes narrower toward the front end. Furthermore, the tip of the tip 62f is formed in an arc shape.

  The left pressing portion 62b has a mirror package in which the length of the portion extending rightward, the angle between the portion extending rightward and the portion extending rearward, and the curved shape of the tip 62f are appropriately set. It is comprised so that the left side may be pressed rather than 22 tilting axes TA.

  The positioning member 63 is a base 63a attached to the front surface of the beam-shaped member 50, an upper wall 63b and a lower wall 63c extending rearward from the upper and lower ends of the base 63a, and a direction facing each other from the rear ends of the upper wall 63b and the lower wall 63c. And a pair of engaging portions 63d extending in the direction.

  As shown in FIG. 1, an opening 63e corresponding to the opening 51b of the beam-like member 50 (see FIG. 4A) is formed in the base 63a. Further, both the upper wall 63b and the lower wall 63c are formed so that the rear part thereof becomes gradually narrower toward the rear, and the engaging part 63d is formed at the rear end where the width becomes the narrowest.

  The engaging portion 63d is engaged with the upper and lower surfaces of the mirror package 22, whereby the mirror package 22 is positioned in the vertical direction (the width direction of the beam-like member 50). Specifically, the engaging portion 63d is formed so that the width gradually decreases from the rear end of the upper wall 63b or the lower wall 63c toward the mirror package 22, and the front end thereof is tapered. .

  As shown in FIG. 6A, the second fixing member 70 includes a left block 71 disposed on the left side of the mirror package 22, a right block 72 disposed on the right side of the mirror package 22, and each block 71. , 72 and two leaf springs 73 fixed to the upper surface.

  The left block 71 is formed in a substantially quadrangular prism shape, and a protrusion 71a for preventing rotation of the leaf spring 73 is formed on the upper surface thereof. Further, a groove 71b penetrating left and right is formed in the upper portion of the front surface of the left block 71, and a long hole 71c penetrating in the front-rear direction is formed in the bottom surface of the groove 71b. And in this groove | channel 71b, the block support member 74 which becomes slidable along the groove | channel 71b is provided, and the screw hole 74a is formed in this block support member 74. As shown in FIG. Thus, the left block 71 is fixed to the frame 40 by screwing a screw (not shown) into the screw hole 74 a with the left block 71 sandwiched between the block support member 74 and the frame 40. Further, when the screw is temporarily fixed, the left block 71 can be moved to the left and right along the groove 71b, and the position adjustment to the left and right with respect to the frame 40 is easy.

  In addition, a spherical protrusion 71d as an example of a third protrusion protruding forward is formed at an appropriate position in the center of the right end portion of the front surface of the left block 71, and an approximate protrusion protruding forward at an appropriate position below the lower block 71. An L-shaped support portion 71e is formed. The support portion 71e includes a base portion 71f formed in a rectangular plate shape and a semi-cylindrical base portion 71g protruding forward from the lower portion of the base portion 71f. The curved surface of the base portion 71g has a beam shape. The member 50 is supported.

  The right block 72 includes a projection 72a, a groove 72b, a long hole 72c, and a block support member 74 similar to those of the left block 71, and a screw 75 and a support portion 72e provided at the left end portion of the front surface of the right block 72. Yes. The screw 75 is screwed in from the rear of the right block 72, and the tip 75 a projects from the front surface of the right block 72. The tip 75a of the screw 75 protruding in this way corresponds to an example of a first protrusion. The tip 75a of the screw 75 can be moved back and forth in the front-rear direction (the direction along the pressing force of the leaf spring 73) by rotating the screw 75.

  The support portion 72e includes a base portion 72g similar to the base portion 71g of the left block 71, and also includes a base portion 72f formed thicker than the base portion 71f of the left block 71. Therefore, the base portion 72 f in the right block 72 protrudes forward from the base portion 71 f in the left block 71 and comes into contact with the beam member 50. Note that the protruding base portion 72f corresponds to an example of a second protrusion.

  The beam member 50 is supported at three points by the base portion 72f, the tip 75a of the screw 75, and the spherical protrusion 71d. Further, the beam-like member 50 supported at three points adjusts the turning angle thereof by appropriately moving the tip 75a of the screw 75 back and forth, and consequently the turning angle of the vibrating mirror 21 is adjusted. Yes.

  The leaf spring 73 is an elastic member for pressing the beam-like member 50 against the blocks 71 and 72, and a base portion 73a fixed to the upper surface of the blocks 71 and 72 and an arm portion formed integrally with the base portion 73a. 73b.

  The base 73a has two holes, and the screw N is screwed into the blocks 71 and 72 from the other hole in a state where the protrusions 71a and 72a of the blocks 71 and 72 are engaged with one hole. Thus, the blocks 71 and 72 are fixed. At this time, when one plate is engaged with the protrusions 71a and 72a, the plate spring 73 is rotated together with the screw N when the plate spring 73 is fixed to each block 71 and 72 with the screw N. Is prevented.

  The arm portion 73b is configured to be elastically deformable by extending upward from a portion of the front end edge of the base portion 73a on the mirror package 22 side, extending forward, and then downward. The position of the distal end of the arm portion 73b in the left-right direction coincides with the positions of the spherical protrusion 71d or the distal end 75a of the screw 75 and the base portion 72f in a state where the base portion 73a is fixed to the blocks 71 and 72. (See FIG. 6B). That is, the beam-like member 50 is sandwiched between the arm portion 73b and the spherical protrusion 71d, and is sandwiched between the arm portion 73b and the tip 75a of the screw 75 and the base portion 72f.

  Then, when the beam-like member 50 is fixed by the second fixing member 70 configured as described above, the positions of the blocks 71 and 72 are appropriately adjusted, as shown in FIG. The spherical protrusion 71d and the leaf spring 73 are positioned at one node F1 of the primary natural vibration in the shaped member 50, and the tip 75a of the screw 75, the base portion 72f, and the leaf spring 73 are positioned at the other node F1. Thereby, it is possible to satisfactorily suppress noise generated from the beam-like member 50 that vibrates with the rotational vibration of the vibration mirror 21.

  Here, in this embodiment, the beam-like member 50 is fixed to the frame 40 only at the nodes F1 and F1 of the primary natural vibration. However, the present invention is not limited to this, and the nodes F2 and F2 of the secondary natural vibration. The beam-like member 50 may be fixed to the frame 40 alone, or the beam-like member 50 may be fixed to the frame 40 at the nodes F1, F1 of the primary natural vibration and the nodes F2, F2 of the secondary natural vibration. . When the beam member 50 is fixed to the frame 40 at both the nodes F1 and F1 of the primary natural vibration and the nodes F2 and F2 of the secondary natural vibration, noise generated from the beam member 50 is further suppressed. be able to.

Next, a method for attaching the vibrating mirror 21 to the frame 40 will be described.
First, as shown in FIG. 3, the vibrating mirror 21 is fixed in the mirror package 22. Subsequently, after this mirror package 22 is set in the recess 53 of the beam-like member 50 shown in FIG. 4A, the positioning member 63 is engaged with the mirror package 22 as shown in FIG. 5A. Thus, the mirror package 22 is positioned on the beam member 50.

  Next, the right pressing member 61 is fixed to the beam member 50 and the left pressing member 62 is temporarily fixed to the beam member 50. Then, by temporarily sliding the left-side pressing member 62 temporarily fixed to the left and right, the balance between the counterclockwise moment and the clockwise moment balanced around the tilt axis TA of the mirror package 22 is lost, and the mirror package 22 tilts. The mirror package 22 stops when the moments are balanced again at a predetermined angle. Thereby, the inclination around the tilt axis TA of the mirror package 22 is adjusted. After the adjustment is completed, the left pressing member 62 is fixed to the beam-like member 50 by tightening the bolt B. Thereby, the mirror package 22 is fixed to the beam-like member 50 with a predetermined inclination.

  Next, after temporarily fixing the blocks 71 and 72 shown in FIG. 6A to the frame 40, the beam-like member 50 is placed on the base portions 71 g and 72 g of the blocks 71 and 72. Subsequently, the plate spring 73 is fixed to the blocks 71 and 72 while the beam-like member 50 is sandwiched between the blocks 71 and 72 and the plate spring 73. Thereafter, the temporarily fixed blocks 71 and 72 are slid and adjusted so that the position of the leaf spring 73 is positioned at the nodes F1 and F1 of the primary natural vibration. In addition, it is desirable to mark the nodes F1 and F1 with a paint or a notch in advance.

  After the positions of the blocks 71 and 72 are adjusted, the blocks 71 and 72 are fixed to the frame 40 by tightening screws (not shown). Thereafter, by adjusting the screw 75 as appropriate, the turning angle of the beam-like member 50 and, consequently, the turning angle of the vibrating mirror 21 are adjusted. As described above, the oscillating mirror 21 is attached to the frame 40 at an appropriate position and angle.

According to the above, the following effects can be obtained in the present embodiment.
Since the oscillating mirror 21 is attached to the beam-like member 50 that is larger than the oscillating mirror 21 and easy to handle via the mirror package 22, the attaching operation of the oscillating mirror 21 to the frame 40 can be facilitated. In addition, since the adjustment of the position and angle of the vibrating mirror 21 can be achieved by moving the beam-like member 50 that is easy to handle, the adjustment work is also facilitated.

The nodes F1 and F1 of the primary natural vibration in the beam-shaped member 50 are fixed to the frame 40 (specifically, the blocks 71 and 72 fixed to the frame 40) by the second fixing member 70. The generated noise can be suppressed satisfactorily.
Since the 2nd fixing member 70 is comprised including the leaf | plate spring 73, the position adjustment of the beam-shaped member 50 can be performed easily.

Since one of the protrusions that support the beam-like member 50 at three points is constituted by a tip 75a of a screw 75 that can be moved forward and backward, the beam-like member 50 (vibrating mirror 21) can be easily rotated by rotating the screw 75. ) Can be adjusted.
Since the left pressing member 62 that presses the left side of the mirror package 22 supported by the pair of tilting projections 51a so as to be tiltable is movable to the left and right, the tilt of the mirror package 22 can be easily adjusted. Moreover, since the front end 62f of the left pressing portion 62b of the left pressing member 62 is tapered and formed in an arc shape, the left pressing member 62 can be smoothly moved to the left and right.

Since the center pressing portion 61c that presses the center of the rear surface of the mirror package 22 is provided, the mirror package 22 can be reliably brought into contact with the tilting projection 51a.
The rotational vibration axis RA of the oscillating mirror 21 is positioned in the plane of the rear surface 52a of the beam-like member 50 by the concave portion 53 formed in the beam-like member 50, so that the tip 75a of the screw 75 is advanced and retracted to move the rear surface of the beam-like member 50. When the turning angle of 52a is adjusted, the turning angle of the vibrating mirror 21 is also adjusted at the same angle as the rear surface 52a. That is, when the rotational vibration axis RA is located at a position off the surface of the rear surface 52a, an error occurs between the angle difference between the rear surface 52a before and after adjustment and the angle difference between the vibration mirror 21 before and after adjustment. Such a problem is solved by positioning the rotational vibration axis RA in the plane.

In addition, this invention is not limited to the said embodiment, It can utilize with various forms so that it may illustrate below.
In the embodiment, the plate spring 73 is employed as the elastic member, but the present invention is not limited to this, and a coil spring or the like may be used.

In the above embodiment, the beam-like member 50 is pressed against each of the blocks 71 and 72 by the leaf spring 73. However, the present invention is not limited to this. For example, the leaf spring 73 is directly fixed to the frame to fix the beam. The shaped member may be pressed directly against the frame.
In the said embodiment, although the 1st fixing member 60 and the 2nd fixing member 70 were each comprised with several components, this invention is not limited to this, You may comprise with one component.

  In the above embodiment, the oscillating mirror 21 is disposed sideways (in a direction substantially parallel to the bottom wall of the frame 40). However, the present invention is not limited to this, and the direction of the oscillating mirror 21 is upward (on the opposite side to the bottom wall). The direction toward the opening) or downward (direction toward the bottom wall) may be employed. Specifically, in the case of facing upward, for example, a structure as shown in FIGS. 7 and 8 can be used.

  That is, in the structure shown in FIGS. 7 and 8, the arrangement of the light source unit 10, the first mirror M1, and the oscillating mirror unit 20 shown in FIG. 2 is appropriately changed, and other components (the first scanning lens 30, the second scanning). The arrangement of the lens L, the second mirror M2, and the third mirror M3) is substantially the same. Specifically, as shown in FIG. 7, the vibrating mirror unit 20 is disposed on the bottom side of the frame 40 so that the vibrating mirror 21 faces upward. In addition, the first mirror M1 is disposed above the oscillating mirror unit 20 in such a direction that the light reflected from the oscillating mirror 21 is reflected to the first scanning lens 30. Further, a light source unit 10 is disposed in front of the first mirror M1, and light emitted from the light source unit 10 reaches the vibrating mirror 21 via the first mirror M1.

  In the above configuration, when light is emitted from the light source unit 10, the light is reflected by the first mirror M <b> 1 and reaches the vibrating mirror 21. The light is appropriately shaken and reflected by the oscillating mirror 21, reflected again by the first mirror M1, and then passed through the first scanning lens 30, the second scanning lens L, the second mirror M2, and the third mirror M3. Sequentially passes and reflects and is emitted to the outside. According to the configuration as described above, the first mirror M1 and the vibrating mirror unit 20 can be arranged in the vertical direction, so that the size of the apparatus can be reduced.

  Further, when the oscillating mirror 21 is directed downward, the oscillating mirror unit 20 is disposed on the upper side of the frame 40 so that the oscillating mirror 21 faces downward, for example, as shown in FIG. Further, below the oscillating mirror unit 20, the first mirror M <b> 1 is arranged in a direction in which the light reflected from the oscillating mirror 21 is reflected to the first scanning lens 30. Furthermore, the light source unit 10 is disposed in front of the first mirror M1 (front shifted to the right or left of the first scanning lens 30), and light emitted from the light source unit 10 is emitted from the first mirror M1. It reaches the oscillating mirror 21 via. The second mirror M2 is arranged in a direction to reflect light upward, and the third mirror M3 is arranged in a direction in which the light reflected between the first scanning lens 30 and the second scanning lens L passes. . According to the above configuration, the first mirror M1 and the vibrating mirror unit 20 can be arranged in the vertical direction, similarly to the configuration in which the vibrating mirror 21 faces upward, so that the apparatus can be downsized.

1 is a perspective view showing an optical scanning device according to an embodiment of the present invention. It is the schematic which shows each component and optical route of an optical scanning device. It is an expansion perspective view which shows a mirror package. They are an enlarged perspective view (a) which shows a beam-shaped member, and a top view (b). They are the expansion perspective view (a) which shows the state which looked at the 1st fixing member from the rear side, and the expansion perspective view (b) which shows the state seen from the front side. It is the expansion perspective view (a) which shows a 2nd fixing member, and a front view (b). It is a side view which shows the form which the vibration mirror became upward. It is a top view which shows the form which the vibration mirror became upward. It is a side view which shows the form which the vibration mirror became downward.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Optical scanning device 10 Light source unit 20 Vibrating mirror unit 21 Vibrating mirror 22 Mirror package 40 Frame 50 Beam-shaped member 51a Tilt protrusion 52 Supported part 52a Rear surface 53 Concave 60 First fixing member 61 Right pressing member 61b Right pressing part 61c Center Holding part 62 Left pressing member 62b Left pressing part 62f Tip part 63 Positioning member 63d Engaging part 70 Second fixing member 71 Left block 71d Spherical protrusion 72 Right block 72e Support part 72f Base part 72g Base part 73 Leaf spring 75 Screw 75a Tip F1, F2 Section RA Rotating vibration axis TA Tilt axis

Claims (11)

A light source that emits light;
A frame that supports the light source;
A vibration mirror that performs scanning by changing the reflection direction of the light emitted from the light source by rotating and oscillating;
A vibrating mirror holding member for holding the vibrating mirror;
An elongated beam-like member extending in a direction orthogonal to the rotational vibration axis of the vibrating mirror and formed longer than the vibrating mirror holding member;
A first fixing member for fixing the vibrating mirror holding member to the beam member;
An optical scanning device comprising: a second fixing member that fixes the beam-like member to the frame.   2. The optical scanning device according to claim 1, wherein two portions that are nodes of primary natural vibration in the beam-shaped member are fixed to the frame by the second fixing member.   3. The optical scanning device according to claim 2, wherein the second fixing member further fixes two locations serving as nodes of secondary natural vibration in the beam-shaped member to the frame.   The optical scanning device according to claim 2, wherein the second fixing member sandwiches the beam-shaped member using an elastic member. The second fixing member is
While sandwiching the beam-shaped member between the first projection and the second projection abutting the beam-shaped member, and the elastic member,
5. The optical scanning device according to claim 4, wherein the beam-shaped member is sandwiched between a third protrusion abutting on the beam-shaped member and the elastic member.   The optical scanning device according to claim 5, wherein the first protrusion or the second protrusion is configured to be movable back and forth along the direction of the pressing force of the elastic member.   The said 1st fixing member is comprised including the holding | suppressing part which presses and fixes the said vibration mirror holding member with respect to the said beam-shaped member, The any one of Claims 1-6 characterized by the above-mentioned. The optical scanning device described. The beam-like member is provided with a tilting projection that tiltably supports the vibrating mirror holding member with a tilting axis along the rotational vibration axis of the vibrating mirror,
The pressing portion is
An elastically deformable first pressing portion that presses one end side of the tilting shaft of the vibrating mirror holding member;
A second pressing portion that is elastically deformable and that presses the other end side of the tilting shaft of the vibrating mirror holding member and is movable along the longitudinal direction of the beam-shaped member. The optical scanning device according to claim 7. The first fixing member is
The engagement part which engages with the vibration mirror holding member and positions the vibration mirror holding member in the width direction of the beam-shaped member is configured. The optical scanning device described. The first fixing member is
10. The structure according to claim 8, further comprising an elastically deformable third pressing portion that abuts against a back surface of a portion of the surface of the vibrating mirror holding member where the tilt axis is defined. The optical scanning device described. In the beam-shaped member,
The optical scanning device according to claim 6, further comprising: a concave portion that positions a rotational vibration axis of the vibration mirror within a plane defined by the first protrusion, the second protrusion, and the third protrusion.

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