JP2008182148A - Photoelectric conversion element array, photoelectric conversion device, photoelectric conversion unit, and image reader - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain an easy-to-manufacture high-resolution photoelectric conversion element array, a photoelectric conversion device, a photoelectric conversion unit, and an image reader. <P>SOLUTION: The photoelectric conversion element array 30A has arranged a number of organic photoelectric conversion elements 10 on a support substrate 1. The organic photoelectric conversion element 10 have a first electrode 7; an organic photoelectric conversion section 8 arranged on the first electrode 7; and a second electrode 9, arranged on the organic photoelectric conversion section 8. In this case, one or two of the first electrode 7, an organic photoelectric conversion section 8, and a second electrode 9 are formed in a common structure, where respective organic photoelectric conversion elements 10 share one membrane; and at least one of the first and second electrodes 7, 9 is set to be an individual electrode, formed for each organic photoelectric conversion element 10. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention includes a photoelectric conversion element array that converts various information such as an object shape and an image into an electrical signal, a photoelectric conversion device including the photoelectric conversion element array, a photoelectric conversion unit including the photoelectric conversion device, The present invention relates to an image reading apparatus provided with the photoelectric conversion unit.

  In obtaining image data by converting images of various objects such as characters and figures into electrical signals, first, the above image is formed on a photoelectric conversion element array constituted by a large number of photoelectric conversion elements. And after reading the electrical signal which arises in the said photoelectric conversion element according to the intensity | strength of the incident light to each photoelectric conversion element with a predetermined reading means, image data is produced based on these electrical signals.

  As the photoelectric conversion element array, a CMOS (Complementary Metal Oxide Semiconductor) type and a CCD (Charge Coupled Device) type are known. Used in products. In recent years, red light, green light, and blue light sources such as a photoelectric conversion device including a color filter and a document reading device described in (Patent Document 1) so that full-color image data can be obtained. An original reading apparatus having a (light emitting diode) has also been developed.

  A conventional photoelectric conversion element array converts an image into an electrical signal by a large number of inorganic photoelectric conversion elements (photodiodes) formed on a semiconductor substrate, and a large-scale semiconductor process is required for its production. For this reason, the man-hours are very large, and it is difficult to reduce the cost due to the difficulty of increasing the area of the semiconductor substrate. Therefore, as described in (Non-Patent Document 1), attempts have been made to reduce costs by forming a photoelectric conversion layer with an organic photoelectric conversion material.

The organic photoelectric conversion material can be easily made into a solution and can be thinned by a very simple method such as a spin coating method or a dipping method. That is, an organic photoelectric conversion film can be easily formed. And since an organic photoelectric conversion element having a structure in which an organic photoelectric conversion film is disposed between a pair of electrodes can easily produce the same function as an inorganic photoelectric conversion element, today, Has attracted a lot of attention. For example, (Patent Document 2) includes a red sensor using an organic photoelectric change material whose photoelectric conversion wavelength region is in the red light region, a blue sensor using an organic photoelectric change material in the green light region, and an organic photoelectric conversion material in the blue light region. An image sensing element is described having a blue sensor using a change material. In this image sensing element, each color sensor is composed of organic photoelectric conversion elements that are electrically independent from each other.
JP-A-3-274856 Special Table 2002-502120 G. Yu, Y. Cao, J .; Wang, J. et al. McElvain and A.M. J. et al. Heeger, Synth. Met, 102, 904 (1999)

  For image data obtained using a photoelectric conversion element array, a high resolution is always required, and for this reason, miniaturization of photoelectric conversion elements in the photoelectric conversion element array is being promoted.

  However, for example, a red sensor, a green sensor, and a blue sensor are configured using different organic photoelectric conversion materials as in the image sensing element described in (Patent Document 2), and a pair of electrodes in each color sensor If each is formed individually, it is difficult to increase productivity as a result of the need for advanced microfabrication technology when achieving high resolution.

  The present invention has been made in view of the above circumstances, and a photoelectric conversion element array that can easily produce a high-resolution one, a photoelectric conversion device including the photoelectric conversion element array, and a photoelectric conversion unit including the photoelectric conversion device And an image reading apparatus including the photoelectric conversion unit.

  The photoelectric conversion element array of the present invention that achieves the above object includes a support substrate and a plurality of organic photoelectric conversion elements arranged on the support substrate, and each of the plurality of organic photoelectric conversion elements is on the support substrate. A photoelectric conversion element array comprising: a first electrode disposed on the first electrode; an organic photoelectric conversion unit disposed on the first electrode; and a second electrode disposed on the organic photoelectric conversion unit. One or two of the electrode, the organic photoelectric conversion unit, and the second electrode have a common structure in which each organic photoelectric conversion element shares one film, and at least one of the first electrode and the second electrode Is an individual electrode formed for each organic photoelectric conversion element.

  In addition, a photoelectric conversion device of the present invention that achieves the above object is a photoelectric conversion device that converts an image formed by an imaging optical system into an electrical signal, the photoelectric conversion element array of the present invention described above, and the photoelectric conversion device. Signal reading means mounted on a support substrate in the conversion element array and reading an electrical signal from each of the plurality of organic photoelectric conversion elements is provided.

  The photoelectric conversion unit of the present invention that achieves the above object is a photoelectric conversion unit including an imaging optical system and a photoelectric conversion device that converts an image formed by the imaging optical system into an electrical signal, The system has an artificial light source and an optical system that forms an image of light emitted from the artificial light source and reflected by the object to be imaged or light emitted from the artificial light source and transmitted through the object to be imaged, and photoelectric conversion The device is the above-described photoelectric conversion device of the present invention.

  An image reading apparatus of the present invention that achieves the above object includes a photoelectric conversion unit that converts an image of a document formed by an imaging optical system into an electrical signal, and a relative movement between the photoelectric conversion unit and the document. An image reading apparatus comprising imaging position shifting means for displacing an imaging position of a document by an imaging optical system, and an image data creation unit for creating image data based on an electrical signal created by a photoelectric conversion unit. The conversion unit is the photoelectric conversion unit of the present invention described above.

  In the photoelectric conversion element array of the present invention, each organic photoelectric conversion element is individually formed so that at most 2 of the first electrode, the organic photoelectric conversion unit, and the second electrode constituting each organic photoelectric conversion element. One. Therefore, when the integration density of the organic photoelectric conversion elements is increased and the resolution is increased as compared with the case where the first electrode, the organic photoelectric conversion unit, and the second electrode are individually formed for each organic photoelectric conversion element. But it is easy to increase productivity.

  The photoelectric conversion element array of 1st invention is equipped with the support substrate and the some organic photoelectric conversion element arrange | positioned on this support substrate, and each of the some organic photoelectric conversion element was arrange | positioned on the support substrate. A photoelectric conversion element array having a first electrode, an organic photoelectric conversion unit disposed on the first electrode, and a second electrode disposed on the organic photoelectric conversion unit, wherein the first electrode, the organic photoelectric conversion unit One or two of the conversion unit and the second electrode have a common structure in which each organic photoelectric conversion element shares one film, and at least one of the first electrode and the second electrode is an organic photoelectric conversion. It is an individual electrode formed for each element.

  At least two of the first electrode, the organic photoelectric conversion unit, and the second electrode are individually formed for each organic photoelectric conversion element in this photoelectric conversion element array. The remaining one or two are not formed individually for each organic photoelectric conversion element, but each organic photoelectric conversion element has a common structure sharing one film. For this reason, compared with the case where each of a 1st electrode, an organic photoelectric conversion part, and a 2nd electrode is formed separately for every organic photoelectric conversion element, it is easy to improve productivity, when achieving high resolution.

  A photoelectric conversion element array according to a second invention is included in the photoelectric conversion element array according to the first invention, and the support substrate has light transmittance.

  A photoelectric conversion element array according to a third aspect is included in the photoelectric conversion element array according to the first or second aspect, and the individual electrodes are transparent electrodes.

  The photoelectric conversion element array of the fourth invention is included in the photoelectric conversion element array of the first to third inventions, and only one of the first electrode and the second electrode is provided for each organic photoelectric conversion element. It is the formed individual electrode, and further includes a bank layer that separates the organic photoelectric conversion portions in each of the plurality of organic photoelectric conversion elements. In this photoelectric conversion element array, since each organic photoelectric conversion part is separated from each other by the bank layer, it is easy to suppress the generation of carriers outside the region designed as the organic photoelectric conversion element, and as a result, between the organic photoelectric conversion elements It is easy to suppress crosstalk.

  A photoelectric conversion element array according to a fifth aspect of the invention is included in the photoelectric conversion element array according to the fourth aspect of the invention, and is characterized in that the bank layer is thicker than the first electrode. In this photoelectric conversion element array, since the film thickness of the bank layer is larger than the film thickness of the first electrode, it is easy to separate the organic photoelectric conversion units from each other by the bank layer.

  A photoelectric conversion element array according to a sixth aspect of the invention is included in the photoelectric conversion element array according to the fourth or fifth aspect of the invention, and at least an organic photoelectric conversion unit among the side surfaces of the bank layer on the organic photoelectric conversion element side. The region facing the surface is reversely tapered. In this photoelectric conversion element array, since the bank layer has the above reverse tapered region, the organic photoelectric conversion material, which is the material of each organic photoelectric conversion unit, is simply spin-coated, for example. Can be formed individually on each first electrode. Therefore, it is possible to easily form a predetermined number of organic photoelectric conversion parts separated from each other by the bank layer.

  A photoelectric conversion element array of a seventh invention is included in the photoelectric conversion element arrays of the fourth to sixth inventions, and the bank layer includes an organic polymer material. In this photoelectric conversion element array, since the bank layer contains an organic polymer material, the bank layer is formed by patterning the coating film obtained by coating the original composition by a relatively simple method. can do.

  The photoelectric conversion element array according to an eighth aspect is included in the photoelectric conversion element array according to the seventh aspect, and the bank layer includes a polyimide resin. In this photoelectric conversion element array, since the bank layer contains a polyimide resin, the heat-resistant bank layer can be formed relatively easily.

  A photoelectric conversion element array according to a ninth aspect is included in the photoelectric conversion element array according to the seventh or eighth aspect, and the bank layer includes a photosensitive resin. In this photoelectric conversion element array, since the bank layer contains a photosensitive resin, a development process is performed after a selective exposure process is performed on the coating film obtained by applying the photosensitive resin composition as the bank layer. The bank layer can be formed by a relatively simple process of applying.

  A photoelectric conversion element array according to a tenth invention is included in the photoelectric conversion element arrays according to the fourth to sixth inventions, and the bank layer includes a ceramic. In this photoelectric conversion element array, since the bank layer contains ceramic, a durable bank layer can be formed.

  A photoelectric conversion element array according to an eleventh aspect of the invention is included in the photoelectric conversion element array according to the tenth aspect of the invention, and the bank layer includes silicon atoms. In this photoelectric conversion element array, since the bank layer contains ceramic and the ceramic contains silicon atoms, it is easy to form a durable bank layer.

  A photoelectric conversion element array according to a twelfth invention is included in the photoelectric conversion element array according to the tenth or eleventh invention, and the bank layer includes silicon nitride or silicon oxynitride. In this photoelectric conversion element array, since the bank layer contains silicon nitride or silicon oxynitride, a dense and durable bank layer can be easily formed.

  A photoelectric conversion element array of a thirteenth invention is included in the photoelectric conversion element arrays of the fourth to twelfth inventions, and the bank layer has a function as a light shielding layer. In this photoelectric conversion element array, since the bank layer has a function as a light shielding layer, generation of carriers outside the region designed as the organic photoelectric conversion element can be suppressed, and as a result, between the organic photoelectric conversion elements. It is easy to obtain one with reduced crosstalk.

  A photoelectric conversion element array according to a fourteenth aspect is included in the photoelectric conversion element array according to the thirteenth aspect, and the bank layer includes a carbon-based color material. In this photoelectric conversion element array, a carbon layer is included in the bank layer to provide the bank layer with a function as a light-shielding layer. Therefore, the bank layer has a low environmental impact during manufacturing and disposal. Is easy to form.

  A photoelectric conversion element array according to a fifteenth aspect is included in the photoelectric conversion element array according to the thirteenth or fourteenth aspect, and is characterized in that the optical density of the bank layer is 2.0 or more. In this photoelectric conversion element array, since the optical density of the bank layer is 2.0 or higher, in other words, the light shielding rate of the bank layer is 99% or higher. The generation can be sufficiently suppressed, and as a result, it is easy to obtain one in which crosstalk between the organic photoelectric conversion elements is sufficiently suppressed.

  A photoelectric conversion element array according to a sixteenth invention is included in the photoelectric conversion element arrays according to the first to fifteenth inventions, and the organic photoelectric conversion part is formed by an ink jet method. . In this photoelectric conversion element array, since the organic photoelectric conversion part is formed by the ink jet method, it is easy to form the organic photoelectric conversion part only in the region designed as the organic photoelectric conversion element, and as a result, the organic photoelectric conversion part is designed as an organic photoelectric conversion element. It is easy to suppress the generation of carriers outside the region.

  A photoelectric conversion element array of a seventeenth invention is included in the photoelectric conversion element arrays of the first to sixteenth inventions, and the organic photoelectric conversion part includes an electron donating material and an electron accepting material. Features. In this photoelectric conversion element array, since the organic photoelectric conversion part contains the electron donating material and the electron accepting material, it is easy to obtain a high photoelectric conversion efficiency.

  A photoelectric conversion element array according to an eighteenth aspect of the present invention is included in the photoelectric conversion element arrays according to the first to seventeenth aspects of the present invention, and includes one signal readout wiring connected to each of the plurality of organic photoelectric conversion elements. Furthermore, it is characterized by having. Since this photoelectric conversion element array has the signal readout wiring described above, a photoelectric conversion device can be easily obtained simply by mounting predetermined signal readout means on the support substrate.

  A photoelectric conversion element array according to a nineteenth aspect of the invention is included in the photoelectric conversion element arrays according to the first to eighteenth aspects of the present invention, and further includes a sealing portion that seals each of the plurality of organic photoelectric conversion elements. It is characterized by. Since this photoelectric conversion element array has the above-described sealing portion, it is easy to obtain an individual organic photoelectric conversion element having a long element life.

  A photoelectric conversion element array according to a twentieth invention is included in the photoelectric conversion element arrays according to the first to nineteenth inventions, and is arranged on a support substrate for incident light to each of a plurality of organic photoelectric conversion elements. It further has a color filter for regulating the wavelength range. Since this photoelectric conversion element array has the color filter, it is easy to obtain color image data using the photoelectric conversion element array.

  A photoelectric conversion device according to a twenty-first invention is a photoelectric conversion device that converts an image formed by an imaging optical system into an electric signal, and any one of the photoelectric conversion element arrays according to the first to twentieth inventions, It is equipped with the signal reading means which reads the electrical signal from each of a some organic photoelectric conversion element mounted on the support substrate in a photoelectric conversion element array, It is characterized by the above-mentioned.

  A photoelectric conversion unit according to a twenty-second aspect of the present invention is a photoelectric conversion unit including an imaging optical system and a photoelectric conversion device that converts an image formed by the imaging optical system into an electrical signal. A light source, and an optical system that forms an image of light emitted from the artificial light source and reflected by the object to be imaged, or light emitted from the artificial light source and transmitted through the object to be imaged, and the photoelectric conversion device is the above-mentioned 21st photoelectric conversion device. The photoelectric conversion device according to the invention is characterized by the following.

  An image reading apparatus according to a twenty-third aspect of the invention is a photoelectric conversion unit that converts an image of a document formed by an imaging optical system into an electrical signal, and relatively moves the photoelectric conversion unit and the document so An image reading apparatus comprising: an imaging position shifting means for displacing an imaging position; and an image data creation unit that creates image data based on an electrical signal created by the photoelectric conversion unit. It is the photoelectric conversion unit of 22 inventions, It is characterized by the above-mentioned.

  Hereinafter, embodiments of the photoelectric conversion element array, the photoelectric conversion device, the photoelectric conversion unit, and the image reading apparatus of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the embodiments described below.

(Embodiment 1)
FIG. 1 is a partially cutaway plan view schematically showing an example of the photoelectric conversion device of the present invention, and FIG. 2 is a cross-sectional view schematically showing the photoelectric conversion device shown in FIG. In these drawings, 20A is a photoelectric conversion element array, 25 is a signal reading means, and 30A is a photoelectric conversion device.

  Said photoelectric conversion element array 20A is one of the photoelectric conversion element arrays of this invention, and the said photoelectric conversion element array 20A and the support substrate 1 (henceforth "transparent support substrate 1") which have optical transparency. A color filter 3 disposed on the transparent support substrate 1, a plurality of organic photoelectric conversion elements 10 disposed on the color filter 3 via a protective film 5A (see FIG. 2), a bank layer 13 described later, The signal readout wiring 15 is connected to one organic photoelectric conversion element 10 one by one.

  The color filter 3 regulates the wavelength range of incident light to each organic photoelectric conversion element 10. The color filter 3 includes a red filter 3R, a green filter 3G, and a blue filter 3B, which are formed in stripes parallel to each other. The protective film 5 </ b> A covers the upper surface and side surfaces of the color filter 3 to protect the color filter 3.

  Each organic photoelectric conversion element 10 disposed on the protective film 5A includes a first electrode 7 disposed on the protective film 5A, an organic photoelectric conversion unit 8 disposed on the first electrode 7, and an organic photoelectric conversion. And a second electrode 9 disposed on the portion 8. Each first electrode 7 is an individual electrode formed for each organic photoelectric conversion element 10, and each organic photoelectric conversion unit 8 is also formed for each organic photoelectric conversion element 10. In contrast, each second electrode 9 has a common structure in which each organic photoelectric conversion element 10 shares one electrode film 9A. A region separate from each other in one electrode film 9 </ b> A formed so as to cover each of the organic photoelectric conversion units 8 functions as the second electrode 9 in each organic photoelectric conversion element 10.

  The bank layer 13 is formed on the protective film 5A with an electrically insulating material, and the film thickness of the bank layer 13 is greater than the sum of the film thickness of the first electrode 7 and the film thickness of the organic photoelectric conversion unit 8. thick. The first electrodes 7 are separated from each other by the bank layer 13, and the organic photoelectric conversion units 8 are also separated from each other by the bank layer 13. And at least the area | region which faces the organic photoelectric conversion part 8 among each side surface by the side of the organic photoelectric conversion element 10 in the bank layer 13 is reverse taper shape, and the angle | corner which the said area | region and the bottom face of the bank layer 13 make is the angle. Greater than 90 °. The electrode film 9 </ b> A that is the source of the second electrode 9 covers each organic photoelectric conversion unit 8 and the upper surface of the bank layer 13.

  On the other hand, the signal reading unit 25 includes an integrated circuit having functions such as a capacitor function, a switching function, and a reset function, and reads an electric signal generated in the organic photoelectric conversion element 10 through the signal reading wiring 15. In the illustrated example, one signal readout line 15 is connected to each first electrode 7 in each organic photoelectric conversion element 10, and a signal readout unit 25 is connected to each of these signal readout lines 15. Although only one signal reading means 25 appears in FIGS. 1 and 2, usually, one signal reading means 25 corresponds to a plurality of organic photoelectric conversion elements 10, so that the transparent support substrate 1 is covered. A plurality of signal read-out means 25 are arranged.

  The photoelectric conversion device 30A having the above-described configuration uses the first electrode 7 side of each organic photoelectric conversion element 10 as a light incident surface, and light L (see FIG. 2) is transmitted from the transparent support substrate 1 side. When irradiated, light absorption occurs in each organic photoelectric conversion unit 8, and excitons are formed. The excitons are separated into carriers (holes and electrons) in a very short time, the electrons move to the negative electrode (for example, the second electrode 9), and the holes move to the positive electrode (for example, the first electrode 7). As a result, an electromotive force is generated between the first electrode 7 and the second electrode 9, and as a result, an electromotive force is generated in the organic photoelectric conversion element 10.

  At this time, since the individual organic photoelectric conversion units 8 are separated from each other by the bank layer 13, generation of carriers outside the region designed as the organic photoelectric conversion element 10 is suppressed, and as a result, the organic photoelectric conversion element 10. Crosstalk between each other can be suppressed.

  The magnitude (strength) of the electromotive force in each organic photoelectric conversion element 10 changes according to the energy of light incident on the organic photoelectric conversion unit 8. Accordingly, desired image data can be obtained by detecting (reading) the electromotive force (electric signal) generated in each organic photoelectric conversion element 10 by the signal reading unit 25 for each organic photoelectric conversion element 10. . By using the photoelectric conversion device 30A as a constituent member of a photoelectric conversion unit in an image reading apparatus such as a scanner or a facsimile, a difference in reflected light intensity or transmitted light intensity due to the presence or absence of information is regarded as a difference in electromotive force corresponding thereto. By detecting, image data can be obtained.

  In the photoelectric conversion device 30 </ b> A configured as described above, since each second electrode 9 has a common structure as described above, the first electrode 7, the organic photoelectric conversion unit 8, and the first electrode among the second electrodes 9. 7 and the organic photoelectric conversion part 8 are formed individually for each organic photoelectric conversion element 10.

  Further, the bank layer 13 is thicker than the sum of the thickness of the first electrode 7 and the thickness of the organic photoelectric conversion unit 8, and among the side surfaces of the bank layer 13 on the organic photoelectric conversion element 10 side. Since at least the region facing the organic photoelectric conversion portion 8 is inversely tapered, even if the organic photoelectric conversion portions 8 are collectively formed by using, for example, a spin coating method or a dipping method after the bank layer 13 is formed. It is easy to form the organic photoelectric conversion part 8 separated from the other organic photoelectric conversion elements 10 on each first electrode 7.

  For these reasons, the photoelectric conversion device 30A can be easily manufactured even when the integration density of the organic photoelectric conversion elements 10 is increased to increase the resolution. In addition, since the bank layer 13 can suppress crosstalk, it is easy to achieve high resolution also in this respect.

  The photoelectric conversion element array in the photoelectric conversion device that exhibits the above-described technical effect can be manufactured, for example, as follows. In the following description, the reference numerals used in FIG. However, in the manufacturing example described below, each of the color filter 3, the protective film 5A, and the signal readout wiring 15 (see FIG. 2) is not formed.

  FIG. 3 is a cross-sectional view schematically showing an example of a process for producing the photoelectric conversion element array of the present invention. First, a transparent support substrate 1 is prepared as shown in FIG. Next, as shown in FIG. 3B, a predetermined number of first electrodes 7 are formed on the transparent support substrate 1. These first electrodes 7 are formed, for example, by forming an original electrode film by a physical vapor deposition method (PVD method) or a chemical vapor deposition method (CVD method), and forming an etching mask of a predetermined shape thereon. After the formation, the electrode film is patterned by dry etching or wet etching, and then the etching mask is removed.

  Next, an electrical insulating film serving as a base of the bank layer 13 is formed by a film forming method corresponding to the material, for example, a spin coating method, a dipping method, a PVD method, or a CVD method, and an etching mask having a predetermined shape is formed thereon. Then, the electrical insulating film is patterned by dry etching or wet etching, and then the etching mask is removed to obtain the bank layer 13.

  At this time, the above dry etching or wet etching is set so as to be over-etching. Thereby, as shown in FIG.3 (c), the area | region which will face at least the organic photoelectric conversion part 8 (refer FIG. 2) among each side surface which becomes the organic photoelectric conversion element 10 side in the bank layer 13, as shown in FIG. It becomes a reverse taper shape.

  Thereafter, a solution of an organic photoelectric conversion material is applied by, for example, a spin coating method or a dipping method to form an organic photoelectric conversion portion 8 on each first electrode 7 as shown in FIG. At this time, since the layer 8a of the organic photoelectric conversion material is also formed on the upper surface of the bank layer 13, the layer 8a is formed as shown in FIG. To remove.

  The target photoelectric conversion element array is obtained by forming a desired electrode film so as to cover the organic photoelectric conversion unit 8 and the bank layer 13 after the organic photoelectric conversion unit 8 is formed. The area | region located on the organic photoelectric conversion part 8 among the electrode films formed at the end functions as the 2nd electrode 9 (refer FIG. 2) in the organic photoelectric conversion element 10. FIG.

(Embodiment 2)
The photoelectric conversion element array of the present invention does not include a color filter as an essential component, and whether or not to provide a color filter can be appropriately selected.

  FIG. 4 is a partially cutaway plan view schematically showing an example of a photoelectric conversion element array having no color filter, and FIG. 5 is a cross-sectional view schematically showing the photoelectric conversion element array shown in FIG. FIG. The photoelectric conversion element array 20B shown in these drawings is the photoelectric conversion element array 20A in the photoelectric conversion device 30A shown in FIG. 2 except that it does not have the color filter 3 and the protective film 5A shown in FIG. Has the same structure. Among the constituent elements shown in FIG. 4 or FIG. 5, those common to the constituent elements shown in FIG. 1 or FIG. 2 are given the same reference numerals as those used in FIG. 1 or FIG. Is omitted.

  The photoelectric conversion element array 20B having the above-described structure includes three artificial light sources, that is, a red light source, a green light source, and a blue light source as a constituent member of a photoelectric conversion unit in an image reading apparatus for obtaining monocolor image data. It can be used as a constituent member of a photoelectric conversion unit in the provided image reading apparatus.

  The photoelectric conversion element array 20B can be easily manufactured even when the resolution is increased for the same reason as that of the photoelectric conversion element array 20A (see FIG. 2) described in the first embodiment. In addition, since the bank layer 13 can suppress crosstalk, it is easy to achieve high resolution also in this respect.

(Embodiment 3)
In the photoelectric conversion element array of the present invention, the bank layer is not an essential component, and whether or not the bank layer is provided can be appropriately selected.

  6 is a partially cutaway plan view schematically showing an example of a photoelectric conversion element array having no bank layer, and FIG. 7 is a cross-sectional view schematically showing the photoelectric conversion element array shown in FIG. FIG. The photoelectric conversion element array 20C shown in these drawings has the same structure as the photoelectric conversion element array 20B shown in FIGS. 4 and 5 except that the bank layer 13 shown in FIGS. 4 and 5 is not provided. is doing. Among the constituent elements shown in FIG. 6 or FIG. 7, those common to the constituent elements shown in FIG. 4 or FIG. 5 are given the same reference numerals as those used in FIG. 4 or FIG. Is omitted.

  In addition, each of the organic photoelectric conversion units 8 in the photoelectric conversion element array 20C can be formed by, for example, an inkjet method, and the electrode film 9A is formed once on another substrate, for example, and each of the organic photoelectric conversion units 8 is formed. It can be formed by transferring onto the organic photoelectric conversion part 8 so as to cover.

  In the photoelectric conversion element array 20 </ b> C having such a structure, the first electrode 7 and the organic photoelectric conversion among the first electrode 7, the organic photoelectric conversion unit 8, and the second electrode 9 that constitute each organic photoelectric conversion element 10. Since only two of the parts 8 are individually formed for each organic photoelectric conversion element 10, the first electrode, the organic photoelectric conversion part, and the second electrode are individually formed for each organic photoelectric conversion element. In comparison, it is easy to produce even when high resolution is achieved.

(Embodiment 4)
FIG. 8 is a cross-sectional view schematically showing another example of a photoelectric conversion element array that does not have a bank layer. The photoelectric conversion element array 20D shown in the figure has the same structure as the photoelectric conversion element array 20A shown in FIGS. 1 and 2 except that the bank layer 13 shown in FIGS. 1 and 2 is not provided. ing. Among the constituent elements shown in FIG. 8, the same constituent elements as those shown in FIG. 2 are denoted by the same reference numerals as those used in FIG. Each of the organic photoelectric conversion units 8 and the electrode film 9A in the photoelectric conversion element array 20D can be formed by the method described in the third embodiment, for example.

  The photoelectric conversion element array 20D having the above-described structure can be easily manufactured even when the resolution is increased for the same reason as that of the photoelectric conversion element array 20C described in the third embodiment.

(Embodiment 5)
In the photoelectric conversion element array of the present invention, each organic photoelectric conversion part can have a common structure, that is, each organic photoelectric conversion element can share one organic photoelectric conversion film. In this case, either one or both of the first electrode and the second electrode in each organic photoelectric conversion element are individually formed for each organic photoelectric conversion element.

  9 is a partially cutaway plan view schematically showing an example of a photoelectric conversion element array in which each organic photoelectric conversion unit has a common structure, and FIG. 10 is a part of the photoelectric conversion element array shown in FIG. FIG.

  The photoelectric conversion element array 20E shown in these figures is different from that shown in FIG. 4 except that the bank layer 13 shown in FIGS. 4 and 5 is not provided and that each organic photoelectric conversion unit 8 has a common structure. 4 and the photoelectric conversion element array 20B shown in FIG. Of the constituent elements shown in FIG. 9 or FIG. 10, those common to the constituent elements shown in FIG. 4 or FIG. 5 are given the same reference numerals as those used in FIG. 4 or FIG. Is omitted.

  In the photoelectric conversion element array 20 </ b> E having such a structure, only the first electrode 7 among the first electrode 7, the organic photoelectric conversion unit 8, and the second electrode 9 is individually formed for each organic photoelectric conversion element 10. Therefore, compared with the case where each of the first electrode, the organic photoelectric conversion portion, and the second electrode is individually formed for each organic photoelectric conversion element, the production thereof is easy even when the resolution is increased.

(Embodiment 6)
FIG. 11 is a cross-sectional view schematically illustrating another example of a photoelectric conversion element array in which each organic photoelectric conversion unit has a common structure. The photoelectric conversion element array 20F shown in the figure is the same as that shown in FIGS. 1 and 2 except that the bank layer 13 shown in FIGS. 1 and 2 is not provided and that each organic photoelectric conversion unit 8 has a common structure. 2 has the same structure as the photoelectric conversion element array 20A shown in FIG. Among the constituent elements shown in FIG. 11, those common to the constituent elements shown in FIG. 2 or FIG. 10 are given the same reference numerals as those used in FIG. 2 or FIG. .

  The photoelectric conversion element array 20F having such a structure can be easily manufactured even when the resolution is increased for the same reason as that of the photoelectric conversion element array 20E described in the fifth embodiment.

(Embodiment 7)
In the photoelectric conversion element array of the present invention, each first electrode can have a common structure, that is, each organic photoelectric conversion element can share one electrode film. In this case, the 2nd electrode in each organic photoelectric conversion element is formed individually for every organic photoelectric conversion element. Moreover, the organic photoelectric conversion part in each organic photoelectric conversion element may be formed individually for each organic photoelectric conversion element, or may have a common structure.

  FIG. 12 is a partially cutaway plan view schematically showing an example of a photoelectric conversion element array in which each first electrode has a common structure. FIG. 13 shows a part of the photoelectric conversion element array shown in FIG. It is sectional drawing shown roughly.

  The photoelectric conversion element array 20G shown in these drawings has a point that each first electrode 7 has a common structure, each second electrode 9 is individually formed for each organic photoelectric conversion element 10, and one Except for the point that the signal readout wiring 15 is connected to the second electrode 9 one by one, it has the same structure as the photoelectric conversion element array 20E shown in FIGS. Each organic photoelectric conversion element 10 shares one electrode film 7 </ b> A, and one separate region in the electrode film 7 </ b> A functions as the first electrode 7 of each organic photoelectric conversion element 10. Of the constituent elements shown in FIG. 12 or FIG. 13, those common to the constituent elements shown in FIG. 9 or FIG. 10 are given the same reference numerals as those used in FIG. 9 or FIG. Is omitted. Note that reference numeral 17 in FIG. 12 indicates a signal line that is connected to the electrode film 7A and applies a constant voltage to the electrode film 7A.

  In the photoelectric conversion element array 20G having such a structure, only the second electrode 9 among the first electrode 7, the organic photoelectric conversion unit 8, and the second electrode 9 is individually formed for each organic photoelectric conversion element 10. Therefore, compared with the case where each of the first electrode, the organic photoelectric conversion portion, and the second electrode is individually formed for each organic photoelectric conversion element, the production thereof is easy even when the resolution is increased.

(Embodiment 8)
FIG. 14 is a cross-sectional view schematically showing another example of a photoelectric conversion element array in which each first electrode has a common structure. The photoelectric conversion element array 20H shown in the figure has a point that each first electrode 7 has a common structure, a point that each second electrode 9 is individually formed for each organic photoelectric conversion element 10, and one second electrode. 9 has a structure similar to that of the photoelectric conversion element array 20F shown in FIG. 11 except that one signal readout wiring 15 is connected to each other. Of the constituent elements shown in FIG. 14, those common to the constituent elements shown in FIG. 11 or FIG. 13 are given the same reference numerals as those used in FIG. 11 or FIG. .

  The photoelectric conversion element array 20H having such a structure is easy to manufacture even when the resolution is increased for the same reason as that of the photoelectric conversion element array 20G described in the seventh embodiment.

(Embodiment 9)
In the photoelectric conversion element array of the present invention, each of the first electrode and the second electrode can be an individual electrode. In this case, each organic photoelectric conversion unit has a common structure.

  FIG. 15 is a partially cutaway plan view schematically showing an example of a photoelectric conversion element array in which each of the first electrode and the second electrode is an individual electrode, and FIG. 16 shows the photoelectric conversion element shown in FIG. It is sectional drawing which shows a part of array roughly.

  In the photoelectric conversion element array 20I shown in these drawings, each second electrode 9 is individually formed for each organic photoelectric conversion element 10, and one second electrode 9 is provided on each second electrode 9. The photoelectric conversion element array 20E shown in FIGS. 9 and 10 has the same structure as that of the photoelectric conversion element array 20E except that the signal line 17 for applying a constant voltage is connected. Of the constituent elements shown in FIG. 15 or FIG. 16, the same constituent elements as those shown in FIG. 9 or FIG. 10 are given the same reference numerals as those used in FIG. 9 or FIG. Is omitted.

  In the photoelectric conversion element array 20I having such a structure, only two of the first electrode 7, the organic photoelectric conversion unit 8, and the second electrode 9 of the first electrode 7 and the second electrode 9 are organic photoelectric conversion elements. Even when each of the first electrode, the organic photoelectric conversion unit, and the second electrode is individually formed for each organic photoelectric conversion element, the resolution is increased. Its production is easy.

(Embodiment 10)
FIG. 17 is a cross-sectional view schematically showing still another example of a photoelectric conversion element array in which each of the first electrode and the second electrode is an individual electrode. In the photoelectric conversion element array 20J shown in the figure, each second electrode 9 is individually formed for each organic photoelectric conversion element 10, and one second electrode 9 is fixed to each second electrode 9. The photoelectric conversion element array 20F shown in FIG. 11 has the same structure except that signal lines for applying voltage (not shown in FIG. 17) are connected. Among the constituent elements shown in FIG. 17, those common to the constituent elements shown in FIG. 11 are given the same reference numerals as those used in FIG. 11, and description thereof is omitted.

  The photoelectric conversion element array 20J having such a structure can be easily manufactured even when the resolution is increased for the same reason as that of the photoelectric conversion element array 20I described in the ninth embodiment.

(Embodiment 11)
The photoelectric conversion element array of the present invention can be provided with a sealing portion for sealing each of the plurality of organic photoelectric conversion elements.

  18 is a cross-sectional perspective view schematically illustrating an example of a photoelectric conversion device including a photoelectric conversion element array having a sealing portion, and FIG. 19 is a schematic diagram illustrating another example of the photoelectric conversion device illustrated in FIG. FIG. The photoelectric conversion device 30B shown in these drawings includes a photoelectric conversion element array 20K having a protective film 5B instead of the protective film 5A shown in FIG. 2 and a sealing portion 170 for sealing each organic photoelectric conversion element 10. The remaining configuration excluding the protective film 5B and the sealing portion 170 is the same as the configuration in the photoelectric conversion device 30A shown in FIG. 1 or FIG. Among the constituent elements shown in FIG. 18 or FIG. 19, those common to the constituent elements shown in FIG. 1 or FIG. 2 are given the same reference numerals as those used in FIG. 1 or FIG. Is omitted.

  The protective film 5B has a side surface on the signal reading means 25 side formed in a forward taper shape, and the side surface of the protective film 5B is formed in a forward taper shape to suppress disconnection of each signal readout wiring 15.

  Moreover, the sealing part 170 is made to adhere to the transparent support substrate 1 with a photocurable adhesive etc. (not shown), for example, covering an organic photoelectric conversion element 10 and covering an extremely shallow box-shaped glass container. Therefore, the intrusion of oxygen and moisture into each organic photoelectric conversion element 10 is prevented, and the decrease in element life is suppressed.

  The photoelectric conversion device 30B configured as described above can be easily manufactured even when the resolution of the photoelectric conversion element array 20K is increased for the same reason as described in the first embodiment. Further, as described above, since the disconnection of each signal readout wiring 15 is suppressed by the protective layer 5B, it is easy to obtain a highly reliable one. Furthermore, since it has the sealing part 170, it is easy to obtain what has the long element lifetime of each organic photoelectric conversion element 10. FIG.

(Embodiment 12)
When a color filter is provided in the photoelectric conversion element array of the present invention, an image is reproduced based on the color resolvability in an image reading apparatus equipped with the photoelectric conversion element array and the image data obtained by the image reading apparatus. From the standpoint of improving color reproducibility and the like, it is practically preferable to provide a light shielding layer between the adjacent color filters in plan view.

  FIG. 20 is a cross-sectional view schematically illustrating an example of a photoelectric conversion device including a photoelectric conversion element array having a light shielding layer. The photoelectric conversion device 30C shown in the figure includes a photoelectric conversion element array 20L having a light shielding layer 2 and a sealing portion 170, except for each of the light shielding layer 2 and the sealing portion 170 in the photoelectric conversion element array 20L. The remaining configuration is the same as that in the photoelectric conversion element array 20A shown in FIG. Further, the configuration other than the photoelectric conversion element array 20L in the photoelectric conversion device 30C is the same as the configuration in the photoelectric conversion device 30A illustrated in FIG. 20 that are the same as those shown in FIG. 2 or FIG. 18 are assigned the same reference numerals as those used in FIG. 2 or FIG. 18, and descriptions thereof are omitted. .

  The light shielding layer 2 is positioned between the color filters adjacent to each other among the color filters constituting the color filter 3 (red filter 3R, green filter 3G, blue filter 3B) in plan view, It is provided on the transparent support substrate 1.

  By providing such a light shielding layer 2, it is possible to suppress the light that has passed through the individual color filters from entering the organic photoelectric conversion element 10 disposed on the color filter adjacent to the color filter. As a result, the color resolvability in the image reading apparatus provided with the photoelectric conversion device 30C, the color reproducibility when reproducing the image based on the image data obtained by the image reading apparatus, and the like are improved. Further, the photoelectric conversion element array 20L can be easily manufactured even when the resolution is increased for the same reason as that of the photoelectric conversion element array 20A described in the first embodiment.

(Embodiment 13)
The photoelectric conversion unit of the present invention is a component of an image reading apparatus such as a facsimile or an image scanner, and includes an imaging optical system and the above-described photoelectric conversion device of the present invention. The photoelectric conversion unit can be used in either a reflection type or transmission type image reading apparatus.

  FIG. 21 is a perspective view schematically showing an example of the photoelectric conversion unit of the present invention. The photoelectric conversion unit 80 shown in the figure is used in a reflection type image reading apparatus, and the photoelectric conversion unit 80 includes the imaging optical system 70 and the photoelectric conversion device 30A described in the first embodiment. Then, an image of the object to be imaged 85 such as a document formed by the imaging optical system 70 is converted into an electric signal by the photoelectric conversion device 30A.

  The imaging optical system 70 includes an artificial light source 60 and an optical system 65 that forms an image of light emitted from the artificial light source 60 and reflected by the object to be imaged 85. The artificial light source 60 is, for example, a linear light source in which a predetermined number of red light emitting diodes, green light emitting diodes, and blue light emitting diodes are arranged, a white fluorescent lamp, or the like, and emits light obliquely upward. The optical system 65 is, for example, a rod lens array having a large number of lot lenses 65a. The optical system 65 guides light emitted from the artificial light source 60 and reflected by the imaging target 85 downward in the vertical direction. An image is formed below the vertical direction. Note that the artificial light source 60, the optical system 65, and the photoelectric conversion device 30A are respectively held by one holding member (not shown) and maintained in the positional relationship shown in FIG.

  An image of the object to be imaged 85 by the imaging optical system 70 is formed on the photoelectric conversion element array in the photoelectric conversion device 30A, and is converted into an electric signal by the photoelectric conversion device 30A as described above. In the photoelectric conversion unit 80 configured as described above, since the photoelectric conversion unit 80 includes the photoelectric conversion device 30A, when the resolution is increased for the same reason as described in the first embodiment. However, its production is easy.

(Embodiment 14)
The image reading device of the present invention obtains image data by converting an image of a document into an electrical signal, such as a facsimile or a scanner. The image reading device includes the above-described photoelectric conversion unit of the present invention and the above-described photoelectric conversion unit. Image position creation means for moving the photoelectric conversion unit and the document relatively to displace the image capture position of the document by the imaging optical system, and image data creation for creating image data based on the electrical signal created by the photoelectric conversion unit Department. This image reading apparatus may be either a reflection type or a transmission type.

  22 is a perspective view schematically showing an example of the image reading apparatus of the present invention, and FIG. 23 is a schematic view showing the internal structure of the image reading apparatus shown in FIG. The image reading apparatus 130 shown in these drawings includes an automatic document feeder 110, two photoelectric conversion units 80a and 80b arranged in the automatic document feeder 110, a flat bed unit 115, and a flat bed unit 115. One photoelectric conversion unit 80 c arranged and an image data creation unit 120 arranged in the automatic document feeder 110 are provided. Each of the photoelectric conversion units 80a, 80b, and 80c is included in the photoelectric conversion unit of the present invention, and has the same structure as the photoelectric conversion unit 80 described in the thirteenth embodiment.

  The automatic document feeder 110 includes a paper feed tray 101 on which a document is placed, and a document placed on the paper feed tray 101 is supplied to the inside of the automatic document feeder 110 one by one, and then a flat bed is discharged from the paper discharge outlet 103. A document feeding means 109 for discharging paper on the section 115 is provided. FIG. 23 shows one guide roller 105 and three pairs of guide rollers 106, 107, 108 constituting the document feeding means 109.

  In the automatic document feeder 110, the document supplied from the sheet feeding table 101 to the automatic document feeder 110 by the document feeder 109 is first guided between the pair of guide rollers 106 by the guide roller 105, and then The paper is guided between the pair of guide rollers 107 and the pair of guide rollers 108 in this order, and is discharged from the paper discharge outlet 103 onto the flat bed portion 115. The two photoelectric conversion units 80 a and 80 b described above are both fixedly disposed between the pair of guide rollers 107 and the pair of guide rollers 108. The photoelectric conversion unit 80a captures an image of the original from below the original and converts the image at this time into an electric signal. The photoelectric conversion unit 80b captures the original from above the original and converts the image at this time into an electric signal.

  Since the original is transported by the original feeding means 109 as described above, the respective photoelectric conversion units 80a and 80b and the original are relatively moved, and the image pickup optical system in each of the photoelectric conversion units 80a and 80b is used. The imaging position of the document is displaced.

  On the other hand, the flat bed portion 115 includes a document table 112 made of a transparent material such as glass, and a document table cover 114 that covers the document table 112 and shields it from light. The photoelectric conversion unit 80c is disposed below the document table 112. The photoelectric conversion unit 80c captures the document from below the document while moving in the horizontal direction by a moving unit (not shown), and converts the image at this time into an electrical signal. . Since the photoelectric conversion unit 80c is moved by the moving means as described above, the photoelectric conversion unit 80c and the document are relatively moved, and the imaging position of the document by the imaging optical system in the photoelectric conversion unit 80c is displaced. To do.

  The image data creation unit 120 is arranged in the automatic document feeder 110 in a state where it is connected to each photoelectric conversion unit 80a, 80b, 80c, and based on the electrical signal created by each photoelectric conversion unit 80a, 80b, 80c. The image data corresponding to the electrical signal is created.

  In the image reading apparatus 130 configured as described above, each of the photoelectric conversion units 80a, 80b, and 80c is the photoelectric conversion unit of the present invention. Therefore, for the same reason as described in the first embodiment, high resolution It is easy to make even when it is made.

  The photoelectric conversion element array, the photoelectric conversion device, the photoelectric conversion unit, and the image reading device of the present invention have been described with reference to the embodiments. However, as described above, the present invention is limited to these forms. is not. For example, the material of each member constituting the photoelectric conversion element array can be appropriately selected according to the performance required for the photoelectric conversion element array to be produced, the use of the photoelectric conversion element array, and the like.

  For example, as the support substrate on which the organic photoelectric conversion elements are arranged, those made of an inorganic material or an organic material having desired mechanical strength and thermal strength are appropriately selected. A transparent substrate is used when the electrode side is used as the light incident surface. The support substrate preferably has electrical insulating properties, but may have electrical conductivity as long as the operation of the organic photoelectric conversion element is not hindered or depending on the use of the photoelectric conversion element array.

Materials for such substrates include (1) soda quartz glass, barium / strontium-containing glass, lead glass, aluminosilicate glass, borosilicate glass, barium borosilicate glass, quartz glass, alkali-free glass, fluoride glass, etc. Inorganic glass, (2) polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyether sulfone, polyvinyl fluoride, polypropylene, polyethylene, polyacrylate, amorphous polyolefin, organic polymer compound such as fluorine resin, (3) As ₂ Chalcogenide glasses such as S ₃ , As ₄₀ S ₁₀ , S ₄₀ Ge ₁₀ , (4) metal oxides such as zinc oxide, niobium oxide, tantalum oxide, silicon oxide, hafnium oxide, titanium oxide, and metal nitrides such as silicon nitride (5) Pigment Transparent substrate material is colored, and (6) a metal material subjected to an insulating treatment on the surface, and can be used by. Furthermore, a material that transmits only a specific wavelength, a material that converts incident light into light of a specific wavelength by a light-light conversion function, or the like can also be used. In addition to a single-layer structure, the support substrate may have a stacked structure in which a plurality of substrate materials are stacked.

  Which of the first electrode and the second electrode constituting the organic photoelectric conversion element is a positive electrode and which is a negative electrode can be appropriately selected. In any case, the electrode used as the light incident surface in each organic photoelectric conversion element is preferably a transparent electrode. In each organic photoelectric conversion element constituting the photoelectric conversion element array of the present invention, the first electrode side can function as a light incident surface, and the second electrode side can function as a light incident surface.

  Examples of the material for the transparent electrode include: (1) Indium tin oxide (ITO; coating type ITO is included), tin oxide, zinc oxide, indium zinc oxide, antimony-doped tin oxide, aluminum-doped zinc oxide, and other transparent materials Conductive oxides, (2) thin films of aluminum, copper, titanium, silver, etc., mixed thin films of these metals, metal thin films such as laminated thin films, (3) polypyrrole, polyethylenedioxythiophene (hereinafter abbreviated as “PEDOT”) ), Polyphenylene vinylene (hereinafter abbreviated as “PPV”), conductive polymer compounds such as polyfluorene, and the like can be used.

  The formation of the transparent electrode may be performed by, for example, forming a film that is the base of the transparent electrode according to a material such as a vacuum vapor deposition method, a resistance heating vapor deposition method, an electron beam vapor deposition method, a sputtering method, or other physical vapor deposition methods, After forming by a polymerization method (such as an electric field polymerization method), the film is patterned into a predetermined shape using a lithography method (such as a photolithography method or an electron beam lithography method) and an etching method. It is also possible to directly form a transparent electrode having a desired shape by a physical vapor deposition method or a polymerization method using a mask having a predetermined shape.

  The transparent electrode preferably has a thickness of 1 nm or more in order to have sufficient conductivity or to prevent nonuniform light incidence on the organic photoelectric conversion part due to the unevenness of the support substrate surface. In addition, it is desirable that the thickness be 500 nm or less in order to provide sufficient transparency.

  Among the first electrode and the second electrode constituting the organic photoelectric conversion element, the electrode material used as the negative electrode is aluminum, indium, magnesium so that electrons generated in the organic photoelectric conversion part can be efficiently taken out. Metals such as titanium, silver, calcium, and strontium, alloys containing these metals, or conductive oxides or fluorides containing the above metals are used. The negative electrode made of these materials can be formed by physical vapor deposition such as resistance heating vapor deposition, electron beam vapor deposition, or sputtering.

  Note that the structure of both the first electrode and the second electrode can be a single-layer structure or a stacked structure. Moreover, in order to improve the photoelectric conversion efficiency in an organic photoelectric conversion part, it contributes to photoelectric conversion about the electrode on the opposite side to the electrode located in the light-incidence surface side among 1st electrodes and 2nd electrodes. It is preferable to form the electrode with a material having a high light reflectance so that the light reaching the electrode can be supplied again to the organic photoelectric conversion unit and contribute to the photoelectric conversion. The planar shape of the first electrode and the second electrode is not limited to a quadrangle, and may be a desired shape such as a polygon other than a quadrangle or an ellipse (including a circle).

  If necessary, a positive electrode buffer layer made of a substance having a work function lower than that of an electron donating material, which will be described later, which is one of the materials of the organic photoelectric conversion film, and higher than that of the positive electrode, is added to the positive electrode and the organic photoelectric film. It can also be interposed between the converters. In addition, it has a work function higher than that of an electron-accepting material, which will be described later, which is one of the materials of an organic photoelectric conversion film, such as metal fluorides and metal oxides including lithium fluoride, and a work function lower than that of the negative electrode. A negative electrode buffer layer made of a substance having the same can be interposed between the negative electrode and the organic photoelectric conversion portion.

The organic photoelectric conversion film and the organic photoelectric conversion part are formed using, for example, an electron donating material and an electron accepting material. At this time, examples of the electron donating material include (1) phenylene vinylene and derivatives thereof, fluorene and derivatives thereof (fluorene-based copolymers having a quinoline group or a pyridine group in the skeleton (P0F66, P1F66, PFPV, etc.)), fluorene-containing aryl Polymers such as amine polymers, carbazole and derivatives thereof, indole and derivatives thereof, pyrene and derivatives thereof, pyrrole and derivatives thereof, picoline and derivatives thereof, thiophene and derivatives thereof, acetylene and derivatives thereof, diacetylene and derivatives thereof, and derivatives thereof (2) a group of polymer materials collectively referred to as dendrimers, (3) porphine, tetraphenylporphine copper, phthalocyanine, copper phthalocyanine, titanium phthalocyanine oxide (4) 1,1-bis (4- (di-p-tolylamino) phenyl) cyclohexane, 4,4 ′, 4 ″ -trimethyltriphenylamine, N, N, N ′, N′— Tetrakis (p-tolyl) -p-phenylenediamine, 1- (N, N-di-p-tolylamino) naphthalene, 4,4′-bis (dimethylamino) -2,2′-dimethyltriphenylmethane, N, N, N ′, N′-tetraphenyl-4,4′-diaminobiphenyl, N, N′-diphenyl-N, N′-di-m-tolyl-4,4′-diaminobiphenyl, N-phenylcarbazole, etc. Stilbenes such as (5) 4-di-p-tolylaminostilbene, 4- (di-p-tolylamino) -4 ′-(4- (di-p-tolylamino) styryl) stilbene Compound Or the like can be used.

  Furthermore, triazole and its derivatives, oxadiazole and its derivatives, imidazole and its derivatives, polyarylalkane and its derivatives, pyrazoline and its derivatives, pyrazolone and its derivatives, phenylenediamine and its derivatives, arylamine and its derivatives, amino Substituted chalcone and derivatives thereof, oxazole and derivatives thereof, styryl anthracene and derivatives thereof, fluorenone and derivatives thereof, hydrazone and derivatives thereof, silazane and derivatives thereof, polysilane aniline copolymers, styrylamine compounds, aromatic dimethylidin compounds Poly-3-methylthiophene can also be used. The electron donating material can be chemically modified to adjust the absorption wavelength characteristic.

  Further, as the electron-accepting material, in addition to the low-molecular and high-molecular materials similar to the electron-donating material described above, a polymer having the following compounds (i) to (vi) as repeating units, that is, (i ) Oxadiazole and derivatives thereof such as 1,3-bis (4-tert-butylphenyl-1,3,4-oxadiazolyl) phenylene, (ii) fluorene and derivatives thereof, (iii) anthraquinodimethane and derivatives thereof (Iv) diphenylquinone and its derivatives, (v) fullerene and its derivatives (such as [5,6] -phenyl C61 butyric acid methyl ester, [6,6] -phenyl C61 butyric acid methyl ester), (vi) carbon nanotubes and Polymers having derivatives thereof as repeating units, compounds (i) to (vi) above and other monomers A copolymer with-is used. Furthermore, a group of polymer materials collectively referred to as dendrimers can be used. The electron-accepting material can be chemically modified to adjust the absorption wavelength characteristic.

  The organic photoelectric conversion film and the organic photoelectric conversion part can be formed by a vacuum process such as a vacuum deposition method or a sputtering method, or a wet process such as a spin coating method, a dipping method, or an ink jet method, depending on the material used. When an organic photoelectric conversion film is formed by a wet process, it becomes easy to obtain a photoelectric conversion element array with low cost and high productivity.

  When an organic photoelectric change layer is formed using an electron donating material and an electron accepting material, the electron donating material and the electron accepting material may form a mixture with each other or be separated from each other. Also good.

  FIG. 24 is a cross-sectional view schematically showing an example of the organic photoelectric conversion film. In the organic photoelectric conversion film 8B shown in the figure, the electron donating material 81 and the electron accepting material 82 are in a mixed state. Here, the above-mentioned “mixture” refers to a liquid or solid phase material placed in a container and added with a solvent as necessary, and then mixed by stirring or the like. This is a spin coating method. And those formed by the inkjet method. In addition, the mixed state of the electron donating material and the electron accepting material does not need to be uniform, and may be mixed nonuniformly or only a part may form a mixture.

  FIG. 25 is a cross-sectional view schematically showing another example of the organic photoelectric conversion film. In the organic photoelectric conversion film 8C shown in the figure, the electron donating material 81 and the electron accepting material 82 are separately layered. Each layer may not be completely separated, and a part of the layer between the electron donating material 81 and the electron accepting material 82 may be in a mixed state. In the case of completely separating the layer made of the electron donating material 81 and the layer made of the electron accepting material 82, for example, a layer made of the electron donating material 81 and a layer made of the electron accepting material 82 Are deposited separately. In FIG. 24 and FIG. 25, reference numeral 7 indicates the first electrode, and reference numeral 9 indicates the second electrode.

  Regardless of whether the electron donating material 81 and the electron accepting material 82 form a mixture with each other or are separated from each other, the electrons of the carriers generated in the organic photoelectric conversion film move to the negative electrode through the electron accepting material 82. Then, the holes move to the positive electrode through the electron donating organic material 81.

  In the case of providing a color filter, the color filter is composed of, for example, a plurality of kinds of primary color or complementary color filters. The primary color filter may be composed of four primary color filters including a fourth color, for example, an orange color filter, in addition to the three primary color filters of red, green, and blue. The color filter is formed by, for example, patterning a layer formed of an organic composition (for example, a color resin) colored with a coloring material such as a desired dye or pigment into a predetermined shape by a photolithography method. It can also be formed by applying a desired organic composition colored with a coloring material in a predetermined pattern by a printing method, an inkjet method, a vapor deposition method, or by depositing it at a predetermined location by an electrodeposition method. Can do. The arrangement of the filters of each color constituting the color filter is not limited to the arrangement shown in FIG. 1 and can be selected as appropriate.

  The protective film that covers the color filter has excellent heat resistance and solvent resistance, as well as flatness, adhesion, transparency, light resistance, heat discoloration resistance, and storage stability. As a material for such a protective film, for example, an acrylic, epoxy, polyimide, siloxane, or alkyl photocurable or thermosetting resin composition or the like is used. When a protective film is formed using a photocurable or thermosetting resin composition, the resin composition is applied by a method such as spin coating to form a coating film, and then applied to the coating film. It is irradiated with light in a predetermined wavelength region and semi-cured and then patterned into a predetermined shape, or heat-treated to be semi-cured and then patterned into a predetermined shape, and then completely cured by light irradiation or heat treatment.

  When a light shielding layer is provided between the color filters adjacent to each other in a color filter, the light shielding layer preferably has an optical density of 2.0 or more (light shielding ratio of 99% or more). Such a light shielding layer is, for example, an organic polymer material containing a color material such as carbon, or chromium (Cr), aluminum (Al), copper (Cu), nickel (Ni) having excellent light reflectivity or light absorbability. ), Metal such as tantalum (Ta) and tungsten (W), or carbon-based material such as graphite. Alternatively, the light-shielding layer can be formed by overlapping an organic polymer material colored in red, an organic polymer material colored in green, and an organic polymer material colored in blue. When using an organic polymer material colored with a coloring material, the organic polymer material used as a base is, for example, photosensitive or thermosetting excellent in light resistance, heat resistance, storage stability, etc., such as polyimide resin Are preferably used. In forming the light shielding layer, a sputtering method, a method combining a photolithography method and an etching method, an electroless plating method, an electrodeposition method, a printing method, or the like is appropriately used depending on the material.

  When the bank layer is provided, as the material of the bank layer, an electrically insulating material, for example, an organic polymer material such as polyimide resin, ceramic, or the like is used. In forming the bank layer from an organic polymer material, a photolithography method, a printing method, an inkjet method, an electrodeposition method, or the like can be applied depending on the material. From the viewpoint of increasing productivity, it is preferable to form the bank layer using a photosensitive resin rather than a thermosetting resin.

  When the bank layer is formed using ceramic, for example, inorganic oxides such as silicon oxide and aluminum oxide, inorganic nitrides such as silicon nitride, inorganic oxynitrides such as silicon oxynitride, and electrical insulation A layer made of a conductive inorganic fluorine compound or the like is formed by a PVD method or a CVD method, and the layer is patterned into a predetermined shape by, for example, a photolithography method and an etching method. The ceramic used for the material of the bank layer is preferably a ceramic containing silicon atoms, such as silicon nitride or silicon oxynitride.

  If necessary, the bank layer can be provided with a function as a light shielding layer. The bank layer provided with the function as the light shielding layer can be obtained by, for example, molding the above-described material of the light shielding layer (however, limited to an electrically insulating material) into a predetermined shape.

  The signal readout wiring can be formed of the same material as that of the first electrode, or can be formed of the same material as that of the second electrode. When the conductive light shielding layer is provided as the above-described light shielding layer, the light shielding layer can be formed. It can also be formed of the same material as the layer. Furthermore, it can be formed of other conductive materials such as gold. In addition, the signal readout wiring can be formed by a mixture of a plurality of kinds of conductive materials or a laminate in which each layer is made of different conductive materials. When this signal readout wiring is formed of the same material as other members (first electrode, second electrode, or light shielding layer), a part or all of the wiring may be formed together with the above members. , May be formed separately.

  In order to obtain a photoelectric conversion element array having a long element lifetime of the organic photoelectric conversion element, as described above, a sealing portion is provided so as to cover each organic photoelectric conversion element, and each organic photoelectric conversion element is provided by the sealing portion. It is preferable to suppress the entry of oxygen and moisture into the water. As described above, the sealing portion is formed using an extremely shallow box-shaped glass container, and covers each organic photoelectric conversion element so as to cover silicon oxide, silicon oxynitride, aluminum oxide, silicon nitride, fluoride. By forming an inorganic film made of lithium or the like, a glass film by a sol-gel method, or an organic film made of a thermosetting resin, a photocurable resin, a sealing silane polymer material, or the like on a substrate. Can also be formed. Furthermore, the sealing portion can also be formed by fixing a flat glass plate with an adhesive so as to cover each organic photoelectric conversion element.

  The signal reading means constituting the photoelectric conversion device forms a desired integrated circuit, for example, an integrated circuit having a capacitor function, a switch function, a reset function, an amplification function, etc. on a semiconductor substrate such as a single crystal silicon substrate. An electric signal generated in each organic photoelectric conversion element is read by accumulating or integrating a current or voltage caused by the photovoltaic power in the organic photoelectric conversion element for a predetermined time for each organic photoelectric conversion element. The signal reading means is mounted on the support substrate using an anisotropic conductive film or the like. The number of signal reading means in one photoelectric conversion device can be set to a desired number of 1 or more depending on the number of organic photoelectric conversion elements. The number of signal reading means is appropriately selected in consideration of the total number of organic photoelectric conversion elements, the manufacturing cost of the signal reading means, and the like.

  The photoelectric conversion element array, photoelectric conversion device, photoelectric conversion unit, and image reading apparatus of the present invention can be variously modified, modified, combined, etc. in addition to those described above. Hereinafter, specific examples of the present invention will be described with reference to examples.

(Example 1)
First, an alkali-free glass plate was prepared as a support substrate, and a red color resin was applied on the alkali-free glass plate to form a coating film. Next, the coating film was pre-baked at 100 ° C. and then exposed through a photomask and developed to obtain a red color resin layer having a thickness of 2 μm patterned in a stripe shape. Similarly, after obtaining a green color resin layer having a thickness of 2 μm and a blue color resin layer having a thickness of 2 μm patterned in a stripe shape, the red, green, and blue color resin layers are fired. A color filter composed of a red filter, a green filter and a blue filter was obtained.

  Next, the thermosetting resin composition is applied by spin coating so as to cover the color filter, and a coating film is formed. After drying the coating film, a photomask having a predetermined shape is formed on the coating film. Formed. Then, after selectively exposing the dried coating film using this photomask, development is performed, baking is performed at 200 ° C., and the film thickness (on the color filter is covered with the color filter). A film thickness of 2 μm was obtained.

  An ITO film having a thickness of 160 nm is formed on the protective film and the exposed surface of the alkali-free glass plate by sputtering, and then a resist material is applied on the ITO film by spin coating to form a resist film having a thickness of 10 μm. The resist film was selectively exposed and developed to obtain a resist pattern having a predetermined shape. Then, the alkali-free glass plate formed up to the resist pattern was immersed in a 50% hydrochloric acid aqueous solution at a liquid temperature of 60 ° C., and the ITO film in the portion where the resist pattern was not formed was removed by etching.

  Thereafter, the resist pattern was removed to obtain a large number of ITO electrodes arranged in a matrix over 3 rows and 7500 columns, and signal readout wiring connected to each ITO electrode one by one. Each of the above ITO electrodes is used as a first electrode in an organic photoelectric conversion element, and the pitch in the row direction and the pitch in the column direction are both 0.042 mm.

  A non-alkali glass plate formed up to the ITO electrode is spin-coated with a polyimide-based photocurable resin composition to form a coating film. After prebaking this coating film at 120 ° C., it is exposed through a photomask, and further developed. Then, post-baking at 260 ° C. was sequentially performed to obtain a bank layer that separates the organic photoelectric conversion units described later for each organic photoelectric conversion element. Of the side surfaces of the bank layer, the region that faces the organic photoelectric conversion unit described later has an inversely tapered shape.

  In the alkali-free glass plate formed up to the bank layer in this way, ultrasonic cleaning for 10 minutes with pure water, ultrasonic cleaning for 5 minutes with a surfactant (PD-6 (trade name) manufactured by Oakite, USA), Then, ultrasonic cleaning with pure water for 10 minutes was sequentially performed in this order, and water adhering to the alkali-free glass plate was removed with a nitrogen blower.

  Next, a mixture of poly (3,4-ethylenedioxythiophene) and polystyrene sulfonate was dropped on an alkali-free glass plate through a filter having an aperture of 0.45 μm, and uniformly applied by a spin coating method. This was heated in a clean oven at 200 ° C. for 30 minutes to form a positive electrode buffer layer on each of the ITO electrodes.

  Next, a chlorobenzene solution containing poly (2-methoxy-5- (2′-ethylhexyloxy) -1,4-phenylenevinylene) and [5,6] -phenyl C61 butyric acid methyl ester in a weight ratio of 1: 4 Is applied on the positive electrode buffer layer by spin coating, and heat-treated in a clean oven at 100 ° C. for 30 minutes to form an organic photoelectric conversion portion having a thickness of about 100 nm on each of the positive electrode buffer layers. did. The upper surface of each organic photoelectric conversion unit is below the upper surface of the bank layer.

Subsequently, a 2 nm-thickness lithium fluoride film and an about 100 nm-thickness aluminum film are formed into an organic photoelectric film in a resistance heating vapor deposition apparatus whose pressure is reduced to 0.27 mPa (2 × 10 ⁻⁶ Torr) or less. The films were sequentially formed on the conversion film in this order. The lithium fluoride film covers each organic photoelectric conversion portion, and the aluminum film covers the negative electrode buffer layer.

  Thus, by forming even an aluminum film, many organic photoelectric conversion elements arranged in a matrix form over 3 rows and 7500 columns on an alkali-free glass plate were obtained. Each organic photoelectric conversion element includes a first electrode (ITO film), a positive electrode buffer layer, an organic photoelectric conversion unit, a negative electrode buffer layer composed of one region of a lithium fluoride film, and a first region composed of one region of an aluminum film. 2 electrodes.

  Thereafter, a glass plate is adhered to the aluminum film with an epoxy-based photocurable adhesive to form a sealing portion, thereby sealing the large number of organic photoelectric conversion elements and these organic photoelectric conversion elements. The photoelectric conversion element array provided with the sealing part to stop was obtained.

  Finally, a predetermined number of semiconductor chips as signal reading means were mounted on an alkali-free glass plate to obtain a photoelectric conversion device. The rest of the configuration excluding the positive electrode buffer layer, the negative electrode buffer layer, and the sealing portion in this photoelectric conversion device is the same as the configuration in the photoelectric conversion device 30A shown in FIGS. 1 and 2, and each semiconductor chip. Is mounted on an alkali-free glass plate via an anisotropic conductive film, and is connected to a predetermined organic photoelectric conversion element via a predetermined signal readout wiring.

(Example 2)
A photoelectric conversion element array was prepared under the same conditions as in Example 1 except that a bank layer was formed using a photocurable resin composition containing carbon as a black color material, and then the same as in Example 1. A predetermined number of semiconductor chips as signal readout means were mounted on a non-alkali glass plate under the above conditions to obtain a photoelectric conversion device.

  The photoelectric conversion element array, the photoelectric conversion device, the photoelectric conversion unit, and the image reading apparatus according to the present invention can be used for a scanner apparatus, a facsimile apparatus, and the like that extract various information such as an object shape and an image as an electric signal. .

Partially cutaway plan view schematically showing an example of the photoelectric conversion device of the present invention Sectional drawing which shows schematically the photoelectric conversion device shown in FIG. Sectional drawing which shows roughly an example of the process at the time of manufacturing the photoelectric conversion element array of this invention The partially cutout top view which shows roughly an example of what does not have a color filter among the photoelectric conversion element arrays of this invention Sectional drawing which shows schematically the photoelectric conversion element array shown in FIG. The partially cutout top view which shows roughly an example of what does not have a bank layer among the photoelectric conversion element arrays of this invention Sectional drawing which shows schematically the photoelectric conversion element array shown in FIG. Sectional drawing which shows schematically the other example of what does not have a bank layer among the photoelectric conversion element arrays of this invention The partially cutout top view which shows roughly an example of what each organic photoelectric conversion part makes a common structure among the photoelectric conversion element arrays of this invention Sectional drawing which shows schematically a part of photoelectric conversion element array shown in FIG. Sectional drawing which shows schematically the other example of what each organic photoelectric conversion part makes a common structure among the photoelectric conversion element arrays of this invention The partially cutout top view which shows roughly an example of the photoelectric conversion element array in which each 1st electrode makes a common structure among the photoelectric conversion element arrays of this invention Sectional drawing which shows schematically a part of photoelectric conversion element array shown in FIG. Sectional drawing which shows schematically the other example of the photoelectric conversion element array in which each 1st electrode makes a common structure among the photoelectric conversion element arrays of this invention. The partially notched top view which shows roughly an example of the photoelectric conversion element array in which each of the 1st electrode and the 2nd electrode is an individual electrode among the photoelectric conversion element arrays of this invention Sectional drawing which shows schematically a part of photoelectric conversion element array shown in FIG. Sectional drawing which shows schematically still another example of the photoelectric conversion element array in which each of the first electrode and the second electrode is an individual electrode in the photoelectric conversion element array of the present invention. Sectional perspective view which shows schematically an example of what was provided with the photoelectric conversion element array which has a sealing part among the photoelectric conversion devices of this invention. 18 is another perspective cross-sectional view schematically showing the photoelectric conversion device shown in FIG. Sectional drawing which shows roughly an example of what was provided with the photoelectric conversion element array which has a light shielding layer among the photoelectric conversion devices of this invention. The perspective view which shows roughly an example of the photoelectric conversion unit of this invention 1 is a perspective view schematically showing an example of an image reading apparatus of the present invention. Schematic diagram showing the internal structure of the image reading apparatus shown in FIG. Sectional drawing which shows an example of an organic photoelectric conversion film roughly Sectional drawing which shows the other example of an organic photoelectric converting film roughly

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Support substrate 3 Color filter 3R Red filter 3G Green filter 3B Blue filter 5A, 5B Protective film 7 1st electrode 7A Electrode film 8 Organic photoelectric conversion part 8A Organic photoelectric conversion film 9 2nd electrode 9A Electrode film 10 Organic photoelectric conversion element 13 Bank layer 15 Signal read wiring 20A-20L Photoelectric conversion element array 25 Signal read means 30A-30C Photoelectric conversion device 60 Artificial light source 65 Optical system 70 Imaging optical system 80, 80a-80c Photoelectric conversion unit 110 Automatic document feeder 120 Image data creation 130 Image reading device

Claims (23)

A support substrate; and a plurality of organic photoelectric conversion elements disposed on the support substrate, each of the plurality of organic photoelectric conversion elements including a first electrode disposed on the support substrate and the first electrode A photoelectric conversion element array having an organic photoelectric conversion unit disposed on the second electrode disposed on the organic photoelectric conversion unit,
One or two of the first electrode, the organic photoelectric conversion unit, and the second electrode have a common structure in which each organic photoelectric conversion element shares one film, and the first electrode and the second electrode At least one of the two electrodes is an individual electrode formed for each organic photoelectric conversion element. The photoelectric conversion element array according to claim 1, wherein the support substrate is light transmissive. The photoelectric conversion element array according to claim 1, wherein the individual electrode is a transparent electrode. Only one of the first electrode and the second electrode is an individual electrode formed for each organic photoelectric conversion element,
Further comprising a bank layer that separates the organic photoelectric conversion portions in each of the plurality of organic photoelectric conversion elements,
The photoelectric conversion element array according to any one of claims 1 to 3. The photoelectric conversion element array according to claim 4, wherein the bank layer is thicker than the first electrode. 6. The photoelectric conversion element array according to claim 4, wherein at least a region facing the organic photoelectric conversion unit among the side surfaces of the bank layer on the organic photoelectric conversion element side has a reverse taper shape. The photoelectric conversion element array according to claim 4, wherein the bank layer includes an organic polymer material. The photoelectric conversion element array according to claim 7, wherein the bank layer includes a polyimide resin. The photoelectric conversion element array according to claim 7, wherein the bank layer includes a photosensitive resin. The photoelectric conversion element array according to claim 4, wherein the bank layer includes ceramic. The photoelectric conversion element array according to claim 10, wherein the bank layer includes silicon atoms. The photoelectric conversion element array according to claim 10 or 11, wherein the bank layer includes silicon nitride or silicon oxynitride. The photoelectric conversion element array according to any one of claims 4 to 12, wherein the bank layer has a function as a light shielding layer. The photoelectric conversion element array according to claim 13, wherein the bank layer includes a carbon-based color material. The photoelectric conversion element array according to claim 13 or 14, wherein the bank layer has an optical density of 2.0 or more. The photoelectric conversion element array according to claim 1, wherein the organic photoelectric conversion unit is formed by an inkjet method. The photoelectric conversion element array according to claim 1, wherein the organic photoelectric conversion unit includes an electron donating material and an electron accepting material. The photoelectric conversion element array according to any one of claims 1 to 17, further comprising a signal readout wiring connected to each of the plurality of organic photoelectric conversion elements. The photoelectric conversion element array according to claim 1, further comprising a sealing portion that seals each of the plurality of organic photoelectric conversion elements. The photoelectric device according to claim 1, further comprising a color filter that is disposed on the support substrate and regulates a wavelength range of incident light to each of the plurality of organic photoelectric conversion elements. Conversion element array. A photoelectric conversion device that converts an image formed by an imaging optical system into an electrical signal,
The photoelectric conversion element array according to any one of claims 1 to 20,
A signal reading unit that is mounted on the support substrate in the photoelectric conversion element array and reads an electrical signal from each of the plurality of organic photoelectric conversion elements;
A photoelectric conversion device comprising: A photoelectric conversion unit comprising an imaging optical system and a photoelectric conversion device that converts an image formed by the imaging optical system into an electrical signal,
The imaging optical system includes an artificial light source and an optical system that forms an image of light emitted from the artificial light source and reflected by the object to be imaged, or light emitted from the artificial light source and transmitted through the object to be imaged ,
The photoelectric conversion device is the photoelectric conversion device according to claim 21.
A photoelectric conversion unit characterized by that. A photoelectric conversion unit that converts an image of a document formed by the imaging optical system into an electrical signal, and an imaging position shift that moves the photoelectric conversion unit and the document relatively to displace the imaging position of the document by the imaging optical system. An image reading apparatus comprising: means; and an image data creating unit that creates image data based on an electrical signal created by the photoelectric conversion unit,
The image reading apparatus according to claim 22, wherein the photoelectric conversion unit is the photoelectric conversion unit according to claim 22.

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