JP2008172413A - Method of manufacturing electret condenser microphone unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electret microphone unit capable of removing dispersion in sensitivity for each product. <P>SOLUTION: An insulating seat unit 22 is formed by integrally incorporating a fixed electrode 23 having a deposition surface 23a made of an electret material and an insulting seat 24 having a through hole 26 so that the fixed electrode 23 and the insulating seat 24 cannot be disconnected easily, and the deposition surface 23a is formed as an electret E in the state of the insulating seat unit 22. After the electret E is formed, electric contact to the side of the fixed electrode 23 is eliminated for housing the insulating seat unit 22 in a unit case 32. Accordingly, a change in a prescribed surface voltage can be removed in the electret E, thus eliminating the dispersion in the sensitivity for each product also in an electret condenser microphone unit after manufacture. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a technique for manufacturing an electret condenser microphone unit in which a condenser section is configured by a diaphragm and an electret formed on the fixed electrode side disposed opposite to the diaphragm.

  A condenser microphone unit including an electret in the condenser section is referred to as an electret condenser microphone unit, and one having an electret on the fixed electrode side is referred to as a back electret type electret condenser microphone unit.

In addition, the electret is formed by utilizing the property that when a high DC voltage is applied to the dielectric, positive and negative charges are polarized and the polarization is maintained even when the voltage application is stopped. As the electret material that is a dielectric, a polymer resin or silicon oxide (SiO ₂ ) having dielectric properties is used.

  FIG. 2 is an explanatory diagram showing a cross-sectional structure of a conventional example of an electret condenser microphone having an electret on the fixed pole side disclosed in Patent Document 1 below. Referring to FIG. 1, an electret condenser microphone unit (hereinafter abbreviated as “microphone unit”) 1 has a sound hole 2a on one side and an opening surface 2b on the other side and has a bottomed cylindrical shape. The case 2 and at least a built-in member disposed at a predetermined position in the unit case 2 are configured.

  Among these members, the built-in member includes a support ring 3a disposed on the sound hole 2a side with the diaphragm 3 stretched, a fixed electrode 5 disposed opposite to the diaphragm 3 via a spacer 4, and the fixed member. An insulating seat 6 for supporting the electrode 5, a main body portion 7a accommodated in a compartment 6a of the insulating seat 6, an input terminal 7b drawn from the main body portion 7a toward the fixed electrode 5 and a printed board 8 The impedance converter 7 includes an output terminal 7c drawn toward the side, and the printed circuit board 8 that seals the opening surface 2b side of the unit case 2 and is soldered to the output terminal 7c.

In this case, an electret E is formed on the surface of the fixed electrode 5 facing the diaphragm 3, and the electret E and the diaphragm 3 constitute a capacitor unit. Further, the open end 2c side that partitions the opening surface 2b of the unit case 2 is caulked to fix the position of the built-in member, and the input terminal 8a of the impedance converter 8 is in close contact with the fixed electrode 6 to constitute the whole. Has been.
JP-A-11-88889

  In the case of the microphone unit 1 shown in FIG. 2, after the electret material is formed on the surface of the fixed electrode 5 facing the diaphragm 3, the electret material is charged by corona discharge or electron beam irradiation. Formed. In this case, as the electret material, a polymer film (for example, FEP) having an extremely thin film shape (for example, a thickness of about 25 μm) is generally used.

Further, as disclosed in the following Patent Document 2 (see FIG. 5), the charging device using corona discharge includes a charging device constituted by a wire electrode, a support electrode, and a grid disposed between them. Used. The fixed electrode 5 is placed on the support electrode with the electret material facing the wire electrode side. The electret material is charged by applying a high voltage to the grid and the wire electrode and causing the wire electrode to generate corona discharge.
JP 2003-282360 A

On the other hand, when silicon oxide (SiO ₂ ) is used as the electret material, the electret material is deposited on the fixed electrode 5 by a sputtering method or a vapor deposition method, and then charged by corona discharge similar to the above to form the electret E. Will be formed.

  The fixed electrode 5 is electrified in a corona discharge type charging device as disclosed in Patent Document 2 to form electret E under a single state in which an electret material is previously deposited. After that, the microphone unit 1 is formed by being integrated into the insulating seat 6.

  By the way, in many cases, the fixed electrode 5 is incorporated in such a manner that it is difficult to be detached after being processed as described above to form the electret E and then being fixed to the insulating seat 6 by pressure. That is, the fixed electrode 5 is integrated and integrated on the side of the insulating seat 6 through a manual operation or an appropriate pressing device in which electrical contact is unavoidable. As a result, the charge distribution of the electret E is also changed by the contact. The surface voltage will be changed.

  For this reason, the microphone unit 1 provided with the condenser portion constituted by the electret E in such a state has a disadvantage that the sensitivity varies for each product, and the surface voltage of the electret E varies. There is also a problem that the diaphragm 3 is attracted to the fixed electrode 5 side.

  In view of the above-described problems of the prior art, the present invention suitably forms an electret on the fixed electrode in a state where the fixed electrode is integrally incorporated into the insulating seat to form an insulating seat unit, and the surface voltage of the electret is adjusted. An object of the present invention is to provide a method of manufacturing an electret condenser microphone unit that can eliminate variations in sensitivity among individual products by allowing the capacitor section to be configured without being changed.

  The present invention has been made to achieve the above-mentioned object, and a fixed electrode having a film-forming surface made of an electret material on one side and a contact surface with the input terminal side of the impedance converter on the other side, An assembling step of forming the insulating seat unit by exposing the film formation surface to an insulating seat having a plurality of through holes in the direction so as to be difficult to remove, and the through hole of the insulating seat unit on a base portion A conductive jig formed by projecting at least two support portions that can be freely inserted through is used to insert the insulating seat unit with the fixed electrode side facing upward into the through hole. In order to form the film-forming surface of the fixed electrode in the insulating seat unit that has passed through the supporting step, the supporting step that is supported by the support portion that is in contact with the contact surface of the fixed electrode, on the electret, corona The charging step of charging the film-forming surface by electricity, and the insulating seat unit that has undergone the charging step are stretched on a support ring disposed on the inner bottom surface side of a bottomed cylindrical unit case having an opening surface. A storage step for storing the diaphragm in a positional relationship where the fixed electrode side faces through a spacer without electrical contact with the fixed electrode side during storage, and the unit that has undergone the storage step The most important feature is that the printed circuit board is disposed on the opening surface side of the case and is subjected to at least a sealing step for caulking and sealing.

  According to the present invention, the electret can be formed on the film formation surface of the fixed electrode under the condition that the insulating seat unit is integrally assembled to the insulating seat, so that the insulating seat side is gripped. By storing the entire insulating seat unit in the unit case, electrical contact with the fixed electrode side during storage can be cut off. Therefore, the condenser microphone unit incorporates a stable fixed electrode with a quality that does not change the surface voltage of the electret, so that the diaphragm is not attracted to the fixed electrode side, and variations in sensitivity among individual products. It can be manufactured without.

  In addition, even if the insulating seat unit has a fixed electrode incorporated in contact with the input terminal side of the impedance converter, the fixed electrode is electrically connected to the jig side through the support portion during the charging process. Since it is grounded, it is possible to reliably prevent the high voltage current from flowing to the impedance converter side and being destroyed.

  FIG. 1 is a process explanatory view showing an example of the present invention, in which (a) is an assembly process, (b) is a support process, (c) is a charging process, (d) is a storage process, (E) shows a sealing process, respectively. According to the figure, the microphone unit 11 includes an assembling process for forming the insulating seat unit 22, a supporting process for supporting the insulating seat unit 22 on the jig 71, and a charging process for forming the electret E on the film forming surface 23a. The insulating seat unit 22 is manufactured through at least a storing step for storing the insulating seat unit 22 in a predetermined position in the unit case 32 and a sealing step for placing the printed circuit board 62 on the opening surface 34 side of the unit case 32 and sealing the caulking.

  Among these, the assembly process includes a plurality of axially penetrating fixed electrodes 23 each having a film-forming surface 23a made of an electret material on one side and a contact surface 23b with the input terminal 25b of the impedance converter 25 on the other side. This is performed by forming the insulating seat unit 22 integrally with the insulating seat 24 having the holes 26 so that it is difficult to be detached.

In this case, the electret material is formed as the film formation surface 23 a by, for example, welding a polymer film such as FEP (fluoroethylene propylene) to the fixed electrode 23. Further, when silicon oxide (SiO ₂ ) is used as the electret material, the film formation surface 23a is formed on the fixed electrode 23 by sputtering or vapor deposition.

  In addition, the fixed electrode 23 having the through hole 23c is attached to the insulating seat 24 side by closely contacting the peripheral end surface side with the thin peripheral wall portion 24a provided on one side of the insulating seat 24 and the stepped portion 24b connected to the thin peripheral wall portion 24a. It will be assembled in one piece with difficulty of withdrawal.

  On the other hand, the insulating seat 24 in the insulating seat unit 22 is provided with a recessed portion 24c defining an air chamber 28 between the fixed electrode 23 and the stepped portion 24b, and a circumferential recessed portion 29 on the other side surface. I have. Furthermore, the through-holes 26 provided in the insulating seat 24 are disposed concentrically at equal intervals, and one side surface thereof communicates with the air chamber 28 and the other side surface thereof communicates with the circumferential recess 29.

  Furthermore, the impedance converter 25 constituting the insulating seat unit 22 has its main body portion 25a housed in a compartment 27 provided in the insulating seat 24 and pulled out from one side of the main body portion 25a. The input terminal 25 b is disposed under a state where the input terminal 25 b is sandwiched between the fixed electrode 23 and the insulating seat 24.

  For this reason, the input terminal 25 b in the impedance converter 25 is brought into conductive contact with the contact surface 23 b side of the fixed electrode 23. On the other hand, the output terminal 25c is pulled out from the other side surface of the main body 25a in a state where the output terminal 25c is moved straight in the axial direction.

  In this case, the assembly process shown in FIG. 1 (a) shows an example of a pattern performed with the fixed electrode 23 positioned on the lower side, as in the case of the storage process and sealing process performed later. In the case where the members constituting 22 can be combined with difficulty in separation, the fixed electrode 23 can be positioned on the upper side and assembled as desired.

  In the subsequent support step, a jig 71 formed of a conductive material such as copper is used. The jig 71 is formed by a base portion 72 and at least two or more support portions 73 projecting from the base portion 72 so as to be freely inserted into the through hole 26 of the insulating seat unit 22. Yes.

  In the supporting step, as shown in FIG. 1B, the insulating seat unit 22 with the fixed electrode 23 side facing upward is inserted through the through hole 26 and brought into contact with the contact surface 23b of the fixed electrode 23. This is performed by supporting the collar portion 72.

  In this case, the support portion 73 protrudes on the base portion 72 based on the positional relationship facing the through hole 26. Further, the number of support portions 73 is preferably the same as the number of through-holes 26, but can be stably supported without tilting the insulating seat unit 22 side via the fixed electrode 23. At least two or more, more stably more can be used.

  Further, when the support portion 73 comes into contact with the contact surface 23 b of the fixed electrode 23, an appropriate separation distance is secured between the open end of the output terminal 25 c of the impedance converter 25 and the surface of the base portion 72. It is formed to give a possible length.

  Next, the electrification process is carried out by charging the film-forming surface 23a of the fixed electrode 23 facing the insulating unit 22 that has passed through the supporting process by corona discharge as shown in FIG. It is done by doing.

  In this case, the insulating seat unit 22 supported by the jig 71 is installed in a discharge device (not shown) including at least the discharge electrode 81 with the film formation surface 23a facing the discharge electrode 81 side. The discharge electrode 81 generates a corona discharge when a high voltage is applied. As a result, the film formation surface 23a made of an electret material is charged and polarized to be formed as an electret E.

  On the other hand, as described in the supporting step, the fixed electrode 23 is electrically connected to the jig 71 side via the support portion 73 that contacts the contact surface 23b. Accordingly, in the charging process, a high-voltage current generated on the fixed electrode 23 side flows to the jig 71 side and is grounded. As a result, a high-voltage current that destroys the impedance converter 25 flows on the impedance converter 25 side. There is nothing.

  In the subsequent storing step, as shown in FIG. 1D, a bottomed cylindrical unit case 32 having an opening surface 34 is arranged with the opening surface 34 facing upward. The insulating seat unit 22 that has undergone the charging process has a positional relationship in which the fixed electrode 23 side faces through the spacer 52 with respect to the diaphragm 42 stretched on the support ring 43 disposed on the inner bottom surface 33 side of the unit case 32. Stored in the original.

  In this case, the insulating seat unit 22 is housed without electrical contact with the fixed electrode 23 side. That is, since the fixed electrode 23 is integrated with the insulating seat 24, the insulating seat unit 22 can be accommodated in the unit case 32 by being held in contact via the insulating seat 24 side. That is, since the insulating seat unit 22 can be housed in the knit case 32 while holding the insulating seat 24 side, contact with the fixed electrode 23 by manpower or an appropriate gripping device can be eliminated. Become.

  For this reason, since the electret E does not cause a charge transfer, the electret E can be disposed facing the diaphragm 42 via the spacer 52 without changing the generated predetermined surface voltage. A predetermined acoustic resistance material R is disposed in the circumferential recess 29.

  Next, the sealing step is performed in the insulating seat unit 22 that has undergone the storing step, and the printed circuit board 62 is disposed on the other side of the insulating seat 24 that is a constituent member thereof, and the opening edge that partitions the opening surface 34 of the unit case 32. This is done by crimping the 35 side and sealing with the printed circuit board 62.

  In this case, the printed circuit board 62 has respective rear sound holes 63 at positions facing the through holes 26 and insertion holes 64 at positions facing the output terminals 25 c of the impedance converter 25. The output terminal 25 c that has passed through the insertion hole 64 is soldered to a predetermined position of the printed circuit board 62.

  Further, the entire unit constituent member including the printed circuit board 62 is fixed in the unit case 32 under the caulking pressure applied through the sealing step.

  That is, according to the present invention, the electret E can be formed on the film formation surface 23a of the fixed electrode 23 under the condition that the insulating seat 24 is integrally assembled with the insulating seat 24, so By storing the entire insulating seat unit 22 in the unit case 32 by gripping the seat 24 side, electrical contact with the fixed electrode 23 side during storage can be cut off. Therefore, the condenser microphone unit 11 can form a condenser portion with the diaphragm 42 by incorporating the stable fixed electrode 23 having a quality that does not change the surface voltage of the electret E. It can be manufactured without variations in sensitivity.

  In addition, in the charging step, the charging process can be performed in consideration of preventing the impedance converter 25 from being electrically destroyed, so that the performance of the microphone unit 11 can be stabilized accordingly.

  Further, the through hole 26 used for inserting the support portion 74 constitutes a sound path extending from the rear sound hole 63 to the diaphragm 42 side, so that unidirectionality is imparted to the microphone unit 11. Will be able to.

  The above is the description of the present invention based on the illustrated example, and the specific configuration is not limited thereto. For example, the insulating seat unit 22 does not necessarily need to incorporate the impedance converter 25 as in the illustrated example, and can be formed only by incorporating at least the fixed electrode 23 and the insulating seat 24. In other words, the impedance converter 25 may be mounted on the printed circuit board 62 and electrically connected to the fixed electrode 23 side through a sealing step.

It is process explanatory drawing which shows an example of this invention, (a) is an assembly process, (b) is a support process, (c) is a charging process, (d) is an accommodation process, (e) is Each sealing step is shown. The longitudinal cross-sectional view which shows an example of the conventional structure of an electret condenser microphone.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Electret condenser microphone unit 22 Insulation seat unit 23 Fixed electrode 23a Film-forming surface 23b Contact surface 23c Through-hole 24 Insulation seat 24a Thin part 24b Step part 24c Recessed part 25 Impedance converter 25a Main body part 25b Input terminal 25c Output terminal 26 Through Hole 27 Compartment 28 Air chamber 29 Circumferential recess 32 Unit case 33 Inner bottom surface 34 Open surface 35 Open edge 42 Diaphragm 43 Support ring 52 Spacer 62 Printed circuit board 63 Rear sound hole 64 Insertion hole 71 Jig 72 Base 73 Supporting part 81 Discharge electrode E Electret R Acoustic resistance material

Claims (1)

The film is formed on an insulating seat having a plurality of through holes in the axial direction, and a fixed electrode having a film-forming surface made of an electret material on one side and a contact surface with the input terminal side of the impedance converter on the other side. An assembly process in which an insulating seat unit is formed by exposing the surface and making it difficult to separate;
A conductive jig formed by projecting at least two support parts that can be inserted into the through hole of the insulating seat unit on the base part is used, and the fixed electrode side is positioned upward. A supporting step of supporting the insulating seat unit that has been made to be supported by the supporting portion that is inserted into the through-hole and brought into contact with the contact surface of the fixed electrode;
A charging step of charging the film-forming surface by corona discharge so as to form the film-forming surface of the fixed electrode in the insulating seat unit that has undergone the supporting step on an electret;
The insulating seat unit that has undergone the charging step is moved toward the fixed electrode when the diaphragm is stretched on a support ring disposed on the inner bottom surface side of a bottomed cylindrical unit case having an opening surface. A storage process in which the fixed electrode side is stored under a positional relationship where the fixed electrode side faces through a spacer without disconnecting the electrical contact;
A method of manufacturing an electret condenser microphone unit comprising at least a sealing step in which a printed circuit board is disposed on the opening surface side of the unit case that has undergone the housing step and caulked and sealed.

Images