JP2008170425A - Pressure-sensitive sheet - Google Patents
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- JP2008170425A JP2008170425A JP2007319027A JP2007319027A JP2008170425A JP 2008170425 A JP2008170425 A JP 2008170425A JP 2007319027 A JP2007319027 A JP 2007319027A JP 2007319027 A JP2007319027 A JP 2007319027A JP 2008170425 A JP2008170425 A JP 2008170425A
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本発明は、平面或いは曲面に対して加えられる圧力を検出するためにそれら平面或いは曲面に沿って装着することができるシート（sheet）状の感圧シートに関するものである。 The present invention relates to a sheet-like pressure-sensitive sheet that can be mounted along a plane or a curved surface in order to detect pressure applied to the plane or the curved surface.
従来、ロボットハンドリング部における接触荷重や、いす或いは寝具などのインターフェイス部に対する人体の接触荷重などを検出することを目的として、さまざまな構造の圧力センサが提案されている。 Conventionally, pressure sensors having various structures have been proposed for the purpose of detecting a contact load in a robot handling unit, a contact load of a human body on an interface unit such as a chair or bedding, and the like.
例えば、特許文献１では、V溝ガイドの内壁面に形成した電極間に円筒状の弾性体を設け、外力が加えられることによる弾性体の変形で生じる電気抵抗変化に基づいて接触圧を検出する方法が開示されている。特許文献２では、外力が加えられることによるダイアフラムの変形で生じる静電容量変化に基づいて接触圧を検出する形式の接触圧センサが開示されている。この特許文献２では、接触圧センサにおいて、ダイアフラムの中心にポスト構造を設け、この部分とダイアフラム部分との静電容量の差分をとることで検出感度の向上を図る方法が開示されている。 For example, in Patent Document 1, a cylindrical elastic body is provided between electrodes formed on the inner wall surface of a V-groove guide, and contact pressure is detected based on a change in electrical resistance caused by deformation of the elastic body due to external force being applied. A method is disclosed. Patent Document 2 discloses a contact pressure sensor that detects a contact pressure based on a capacitance change caused by deformation of a diaphragm caused by an external force applied. Japanese Patent Application Laid-Open No. H10-228667 discloses a method for improving detection sensitivity by providing a post structure at the center of a diaphragm and taking a difference in capacitance between this portion and the diaphragm portion in the contact pressure sensor.
また、任意の曲面上にセンサアレイを搭載することを目的とした接触圧センサも提案されている。たとえば特許文献３では、弾性変形可能なシート状の誘電体を二つの電極で挟み込んだ静電容量型シート状圧力センサが開示されている。また、特許文献４では、布をシート地として用い、この上に感圧用センサをマトリクス状に配置する方法が開示されている。また、特許文献５では、導電性弾性チューブの外側に絶縁材を介して導電材を被覆し、そのチューブに加えられた荷重を同心円状の電極間の抵抗変化として検出する方法が開示されている。 A contact pressure sensor intended to mount a sensor array on an arbitrary curved surface has also been proposed. For example, Patent Document 3 discloses a capacitive sheet-shaped pressure sensor in which an elastically deformable sheet-shaped dielectric is sandwiched between two electrodes. Further, Patent Document 4 discloses a method in which cloth is used as a sheet and pressure-sensitive sensors are arranged in a matrix on the cloth. Patent Document 5 discloses a method in which a conductive material is coated on the outside of a conductive elastic tube via an insulating material, and a load applied to the tube is detected as a resistance change between concentric electrodes. .
上記従来技術、特に特許文献１および特許文献２では、接触圧を検出する素子構造に、V溝ガイド及びダイアフラム構造を利用しているために、センサ自体のフレキシブル化を図ることができない。従って、これらをアレイ状に配置した場合、このセンサ部分が剛となり、任意の曲面上にセンサアレイを実装することが難しい。このような課題を解決する手法として、特許文献３では弾性変形可能なシート状の誘電体を二つの電極で挟み込んだ静電容量型シート状圧力センサが提案されている。また、特許文献４では布をシート地として用い、この上に感圧用センサをマトリクス状に配置し、特許文献３と同様に、システム全体のフレキシブル化を図っている。上記二つの方法は何れも柔軟性のあるシート地を素材にしているので、二次元的な形状、例えば円柱など、の表面へは実装は容易であるが、三次元形状及び任意曲面形状へ実装することは難しいという問題がある。 In the above prior art, particularly Patent Document 1 and Patent Document 2, since the V groove guide and the diaphragm structure are used for the element structure for detecting the contact pressure, the sensor itself cannot be made flexible. Therefore, when these are arranged in an array, the sensor portion becomes rigid and it is difficult to mount the sensor array on an arbitrary curved surface. As a technique for solving such a problem, Patent Document 3 proposes a capacitive sheet-shaped pressure sensor in which an elastically deformable sheet-shaped dielectric is sandwiched between two electrodes. Further, in Patent Document 4, cloth is used as a sheet base, and pressure-sensitive sensors are arranged in a matrix on the cloth, so that the entire system is made flexible as in Patent Document 3. Since both of the above two methods are made of a flexible sheet material, it can be easily mounted on the surface of a two-dimensional shape such as a cylinder, but it can be mounted on a three-dimensional shape or an arbitrary curved surface. There is a problem that it is difficult to do.
一方、特許文献５では、導電性弾性チューブの外側に絶縁材を介して導電材を被覆し、チューブに加わった荷重を同心円状の電極間の抵抗変化で検出する方法が示されている。本発明では、チューブ構造にすることで、特許文献3及び４の手法に比べて、実装形態の自由度が向上している。しかしながら一つのチューブ構造の全てを荷重検出として用いているために、センシング素子をアレイ状に配置することが難しく、その結果、接触圧を二次元分布情報として検出することができない。また、一つのチューブ内に同心円状でキャパシタンス構造を形成する必要があり、センサ自体を作製することが複雑である。このように、上記の方法では、二次元アレイ状に配置した圧力センサを三次元形状及び任意曲面形状へ実装することができないという問題があった。 On the other hand, Patent Document 5 discloses a method in which a conductive material is coated on the outside of a conductive elastic tube via an insulating material, and a load applied to the tube is detected by a resistance change between concentric electrodes. In the present invention, by using a tube structure, the degree of freedom of the mounting form is improved as compared with the methods of Patent Documents 3 and 4. However, since all of one tube structure is used for load detection, it is difficult to arrange the sensing elements in an array, and as a result, the contact pressure cannot be detected as two-dimensional distribution information. Further, it is necessary to form a concentric capacitance structure in one tube, and it is complicated to manufacture the sensor itself. As described above, the above method has a problem that the pressure sensors arranged in a two-dimensional array cannot be mounted in a three-dimensional shape and an arbitrary curved surface shape.
これに対し、二次元平面に配置した圧力センサを三次元形状及び任意曲面形状へ実装することができる感圧シートが提案されている。たとえば特許文献６がそれである。これによれば、縦方向の感圧用線材と横方向の感圧用線材とが織物状に編み込まれており、それら縦方向の感圧用線材と横方向の感圧用線材との交点に加えられる荷重が検出されるとともに、織物構造によって柔軟性があるために三次元形状或いは任意の面形状に実装することができる。
ところで、上記従来の感圧シートの縦方向の感圧用線材および横方向の感圧用線材は、たとえば金属細線や炭素繊維に代表される導電性繊維とたとえばその周囲を被覆する非導電性材料とから成り、それら縦方向の感圧用線材と横方向の感圧用線材との交点に加えられる荷重がそれら縦方向の感圧用線材と横方向の感圧用線材との間の静電容量の変化に基づいて検出されるようになっている。 By the way, the pressure-sensitive wire in the vertical direction and the pressure-sensitive wire in the horizontal direction of the conventional pressure-sensitive sheet are composed of, for example, conductive fibers typified by metal fine wires and carbon fibers and a non-conductive material covering the periphery thereof. And the load applied to the intersection of the longitudinal pressure-sensitive wire and the lateral pressure-sensitive wire is based on the change in capacitance between the longitudinal pressure-sensitive wire and the lateral pressure-sensitive wire. It is to be detected.
しかしながら、上記従来の感圧シートでは、上記縦方向の感圧用線材と横方向の感圧用線材との交点に加えられる荷重によって非導電性材料が局所的に変形して交差する導電性繊維同士の距離が接近することによる静電容量の変化に基づいて荷重を検出するものである。このため、非導電性材料の被覆を少なくとも変形を許容できる厚みに設定する必要があるために比較的大きな厚みとする必要があるため、荷重が加えられる前では比較的小さな静電容量であり、荷重が加えられてもその静電容量の変化が十分に得られず、十分な検出感度が得られないという不都合があった。また、交差する導電性繊維同士の距離が接近することによる静電容量の変化に基づいて荷重を検出するものであることから、その静電容量は荷重に対して反比例するので、荷重に対して非線型の出力しか得られないという欠点があった。 However, in the conventional pressure-sensitive sheet, the non-conductive material is locally deformed by the load applied to the intersection between the longitudinal pressure-sensitive wire and the lateral pressure-sensitive wire, and the conductive fibers intersect each other. The load is detected based on a change in capacitance due to the approaching distance. For this reason, since it is necessary to set the coating of the non-conductive material to a thickness at least capable of allowing deformation, it is necessary to set the coating to a relatively large thickness. Therefore, the capacitance is relatively small before a load is applied, Even when a load is applied, the change in capacitance cannot be sufficiently obtained, and there is a disadvantage that sufficient detection sensitivity cannot be obtained. In addition, since the load is detected based on the change in capacitance due to the distance between the intersecting conductive fibers approaching, the capacitance is inversely proportional to the load. There was a drawback that only non-linear output could be obtained.
本発明は以上の事情を背景として為されたものであり、その目的とするところは、三次元形状或いは曲面形状へ実装することができ、しかも検出感度の高い線型の感圧シートを提供することにある。 The present invention has been made against the background of the above circumstances, and the object of the present invention is to provide a linear pressure-sensitive sheet that can be mounted in a three-dimensional shape or a curved surface shape and has high detection sensitivity. It is in.
斯かる目的を達成するための請求項１に係る発明の要旨とするところは、（ａ）第１方向に沿って配置された第１感圧用線材と該第１方向に交差する第２方向に沿って配置された第２感圧用線材とが編み込まれ、該第１感圧用線材と第２感圧用線材との交点に加えられる垂直方向の荷重を該第１感圧用線材と第２感圧用線材との間の静電容量に基づいて検出するための織物状の感圧シートであって、前記第１感圧用線材および第２感圧用線材の少なくとも一方が、（ｂ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形する弾性変形能を備えるとともに、（ｃ）上記感圧用線材の外周面に層状に設けられ、その感圧用該線材の弾性変形に伴う変形が可能な誘電体層と、（ｄ）その誘電体層の内周側に設けられ、前記感圧用線材の弾性変形に伴う変形が可能な導電体層とを、含むことにある。 The gist of the invention according to claim 1 for achieving such an object is as follows: (a) a first pressure-sensitive wire disposed along the first direction and a second direction intersecting the first direction; A second pressure-sensitive wire disposed along the first pressure-sensitive wire and a vertical load applied to the intersection of the first pressure-sensitive wire and the second pressure-sensitive wire. The first pressure-sensitive wire and the second pressure-sensitive wire A fabric-like pressure-sensitive sheet for detecting based on the capacitance between the first pressure-sensitive wire and the second pressure-sensitive wire, wherein (b) the load in the vertical direction is (C) It is provided in layers on the outer peripheral surface of the pressure-sensitive wire, and can be deformed along with the elastic deformation of the pressure-sensitive wire. A dielectric layer, and (d) the pressure-sensitive layer provided on the inner peripheral side of the dielectric layer. A wire deformation possible conductor layer due to the elastic deformation of the is to contain.
請求項２に係る発明の要旨とするところは、請求項１に係る発明において、前記第１感圧用線材および第２感圧用線材の少なくとも一方は、（ａ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形する線状弾性基材を、含み、（ｂ）前記導電体層は、該線状弾性基材の外周面に層状に固着されて該線状弾性基材の弾性変形とともに変形するものであり、（ｃ）前記誘電体層は、前記線状弾性基材の外周面において前記導電体層の上に層状に固着されて該線状弾性基材の弾性変形とともに変形するものであることにある。 The gist of the invention according to claim 2 is that, in the invention according to claim 1, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire is (a) loaded with the load in the vertical direction. A linear elastic base material that elastically deforms locally in the radial direction, and (b) the conductor layer is fixed to the outer peripheral surface of the linear elastic base material in a layered manner. (C) The dielectric layer is fixed in layers on the conductor layer on the outer peripheral surface of the linear elastic base material, and the elastic deformation of the linear elastic base material is performed. It is to be deformed together.
請求項３に係る発明の要旨とするところは、請求項１に係る発明において、前記第１感圧用線材および第２感圧用線材の少なくとも一方は、（ａ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形するとともに、導電性を有して前記導電体層としても機能する線状弾性基材を、含み、（ｂ）前記誘電体層は、該線状弾性基材の外周面に層状に固着されて該線状弾性基材の弾性変形とともに変形するものであることにある。 The gist of the invention according to claim 3 is that, in the invention according to claim 1, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire is (a) loaded with the load in the vertical direction. A linear elastic base material that is locally elastically deformed in the radial direction and has conductivity and also functions as the conductor layer, and (b) the dielectric layer includes the linear elastic substrate. The material is fixed to the outer peripheral surface of the material in layers and is deformed along with the elastic deformation of the linear elastic substrate.
請求項４に係る発明の要旨とするところは、請求項１に係る発明において、前記第１感圧用線材および第２感圧用線材の少なくとも一方は、（ａ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形するとともに、電気絶縁性を有して前記誘電体層としても機能する中空の線状弾性基材を、含み、（ｂ）前記導電体層は、該中空の線状弾性基材の内周面に層状に固着されて該中空の線状弾性基材の弾性変形とともに変形するものであることにある。 The gist of the invention according to claim 4 is that, in the invention according to claim 1, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire is (a) loaded with the load in the vertical direction. A hollow linear elastic base material that is locally elastically deformed in the radial direction and that also functions as the dielectric layer, and (b) the conductor layer is hollow. The linear elastic base material is fixed in a layered manner on the inner peripheral surface of the linear elastic base material, and is deformed together with the elastic deformation of the hollow linear elastic base material.
請求項５に係る発明の要旨とするところは、請求項１乃至４のいずれか１に係る発明において、（ａ）前記第２感圧用線材に隣接した状態で前記第２方向に沿って配置され、前記第１感圧用線材と該第２感圧用線材との交差部分において該第２感圧用線材の反対側に位置して該第１感圧用線材と交差する第３感圧用線材をさらに含み、（ｂ）該第２感圧用線材と第３感圧用線材との間の静電容量に基づいて前記第１感圧用線材と第２感圧用線材との交点に加えられる前記第１方向の荷重を検出することにある。 The gist of the invention according to claim 5 is that, in the invention according to any one of claims 1 to 4, (a) the second pressure-sensitive wire is arranged along the second direction in a state adjacent to the second pressure-sensitive wire. A third pressure-sensitive wire that intersects with the first pressure-sensitive wire located on the opposite side of the second pressure-sensitive wire at the intersection of the first pressure-sensitive wire and the second pressure-sensitive wire; (B) The load in the first direction applied to the intersection of the first pressure-sensitive wire and the second pressure-sensitive wire based on the capacitance between the second pressure-sensitive wire and the third pressure-sensitive wire. It is to detect.
請求項６に係る発明の要旨とするところは、請求項５に係る発明において、前記第３感圧用線材は、前記第１方向において前記第２感圧用線材の両側に隣接して配置された一対を１単位として設けられていることにある。 The gist of the invention according to claim 6 is that, in the invention according to claim 5, the third pressure-sensitive wire is a pair disposed adjacent to both sides of the second pressure-sensitive wire in the first direction. Is provided as one unit.
請求項７に係る発明の要旨とするところは、請求項６に係る発明において、前記一対の第３感圧用線材は、前記第１感圧用線材に対して前記第２感圧用線材の反対側で該第１感圧用線材と交差するに際して、相互に交差させられていることにある。 The gist of the invention according to claim 7 is that, in the invention according to claim 6, the pair of third pressure-sensitive wires are opposite to the second pressure-sensitive wire with respect to the first pressure-sensitive wire. When intersecting with the first pressure-sensitive wire, they are intersected with each other.
請求項８に係る発明の要旨とするとこおは、請求項２乃至７のいずれか１に係る発明において、前記線状弾性基材は、管状の樹脂から構成されたものであることにある。 The gist of the invention according to claim 8 is that, in the invention according to any one of claims 2 to 7, the linear elastic substrate is made of a tubular resin.
請求項９に係る発明の要旨とするところは、請求項８に係る発明において、前記管状の樹脂は、中空の合成ゴムから構成されたものであることにある。 The gist of the invention according to claim 9 is that, in the invention according to claim 8, the tubular resin is made of a hollow synthetic rubber.
請求項１０に係る発明の要旨とするところは、請求項２、５乃至９のいずれか１の発明において、前記導電体層は、前記線状弾性基材の外周面に支持された金属薄膜から構成されたものであることにある。 The gist of the invention according to claim 10 is that, in the invention according to any one of claims 2, 5 to 9, the conductor layer is made of a metal thin film supported on the outer peripheral surface of the linear elastic substrate. It is to be constructed.
請求項１１に係る発明の要旨とするところは、請求項２、５乃至１０のいずれか１の発明において、前記誘電体層は、前記線状弾性基材よりも高剛性の樹脂から構成されたものであることにある。 The gist of the invention according to claim 11 is that, in the invention of any one of claims 2, 5 to 10, the dielectric layer is made of a resin having higher rigidity than the linear elastic substrate. It is to be a thing.
請求項１２に係る発明の要旨とするところは、請求項１乃至１１のいずれか１の発明において、前記誘電体層は、パラキシリレン系樹脂から構成されたものであることにある。 The gist of the invention according to claim 12 is that, in the invention of any one of claims 1 to 11, the dielectric layer is made of paraxylylene resin.
請求項１３に係る発明の要旨とするところは、請求項１乃至１２のいずれか１の発明において、（ａ）前記第１方向に沿って並行に配設された複数本の第１方向線材が縦糸として、前記第２方向に沿って並行に配設された複数本の第２方向線材が横糸として、相互に編み上げられた織物状を成し、（ｂ）前記第１感圧用線材は、前記複数本の第１方向線材のうちの所定本数毎に位置するものとして複数本配置され、（ｃ）前記第２感圧用線材は、前記複数本の第２方向線材のうちの所定本数毎に位置するものとして複数本配置され、（ｄ）前記第１感圧用線材および第２感圧用線材の複数箇所の交点で構成される複数の圧力検出点を二次元平面内に備えることにある。 The gist of the invention according to claim 13 is that, in the invention of any one of claims 1 to 12, (a) a plurality of first direction wires arranged in parallel along the first direction. As the warp, a plurality of second direction wires arranged in parallel along the second direction as wefts form a knitted fabric, and (b) the first pressure-sensitive wire is A plurality of first direction wire rods are arranged for each predetermined number of wires, and (c) the second pressure-sensitive wire material is positioned for each predetermined number of the plurality of second direction wire materials. A plurality of pressure detection points are arranged in a two-dimensional plane, and (d) a plurality of pressure detection points configured by a plurality of intersections of the first pressure-sensitive wire and the second pressure-sensitive wire are provided.
請求項１に係る発明の感圧シートによれば、第１方向に沿って配置された第１感圧用線材とその第１方向に交差する第２方向に沿って配置された第２感圧用線材とが編み込まれて構成されていることから、織物構造によって柔軟性があるために、三次元形状或いは曲面形状へ容易に実装することができる。また、第１感圧用線材および第２感圧用線材の少なくとも一方は、（ｂ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形する弾性変形能を備えるとともに、（ｃ）上記感圧用線材の外周面に層状に設けられ、その感圧用線材の弾性変形に伴う変形が可能な誘電体層と、（ｄ）その誘電体層の内周側に設けられ、前記感圧用線材の弾性変形に伴う変形が可能な導電体層とを、含むことから、第１感圧用線材および第２感圧用線材の間で発生させられる静電容量は、荷重に応じて弾性変形する感圧用線材の内周側に形成された導電体層の変形による導電体層間の密着面積の増加により荷重とともに増加することにより、その静電容量に基づいて圧力が検出される。したがって、その導電体層の外周面に固着される誘電体層はその厚みを変化させられる必要がなく、薄くすることが可能となるので、検出感度が高く、比較的線型の感圧シートが得られる。 According to the pressure-sensitive sheet of the invention according to claim 1, the first pressure-sensitive wire disposed along the first direction and the second pressure-sensitive wire disposed along the second direction intersecting the first direction. Since these are knitted and configured, since they are flexible depending on the fabric structure, they can be easily mounted in a three-dimensional shape or a curved shape. In addition, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire has (b) an elastic deformability that elastically deforms locally in the radial direction when the vertical load is applied, and (c ) A dielectric layer provided in a layered manner on the outer peripheral surface of the pressure-sensitive wire, and (d) provided on the inner peripheral side of the dielectric layer, the pressure-sensitive wire, Since the conductive layer includes a conductor layer that can be deformed due to elastic deformation of the wire, the capacitance generated between the first pressure-sensitive wire and the second pressure-sensitive wire is elastically deformed according to the load. By increasing the contact area between the conductor layers due to the deformation of the conductor layer formed on the inner peripheral side of the pressure wire, the pressure is detected based on the capacitance by increasing with the load. Therefore, the dielectric layer fixed to the outer peripheral surface of the conductor layer does not need to be changed in thickness and can be thinned, so that a detection pressure is high and a relatively linear pressure-sensitive sheet is obtained. It is done.
また、請求項２に係る発明の感圧シートによれば、前記第１感圧用線材および第２感圧用線材の少なくとも一方は、（ａ）前記垂直方向の荷重が負荷されることにより径方向に局所的に弾性変形する線状弾性基材と、（ｂ）その線状弾性基材の外周面に層状に固着され、その線状弾性基材の弾性変形とともに変形可能な導電体層と、（ｃ）その導電体層の外周面に層状に固着され、その線状弾性基材の弾性変形とともに変形可能な誘電体層とを、含むことから、第１感圧用線材および第２感圧用線材の間で発生させられる静電容量は、荷重に応じて弾性変形する線状弾性基材の外周面に層状に形成された導電体層の変形による密着面積の増加により荷重とともに増加することにより、その静電容量に基づいて圧力が検出される。したがって、その導電体層の外周面に固着される誘電体層はその厚みを変化させられる必要がなく、薄くすることが可能となるので、検出感度の高く比較的線型の感圧シートが得られる。 Moreover, according to the pressure-sensitive sheet of the invention according to claim 2, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire is (a) radially applied when the vertical load is applied. A linear elastic base material that elastically deforms locally, and (b) a conductor layer that is fixed in a layered manner on the outer peripheral surface of the linear elastic base material and is deformable together with the elastic deformation of the linear elastic base material; and c) a dielectric layer fixed to the outer peripheral surface of the conductor layer and deformable together with the elastic deformation of the linear elastic base material. Therefore, the first pressure-sensitive wire and the second pressure-sensitive wire The capacitance generated between the two increases with the load due to the increase in the contact area due to the deformation of the conductor layer formed in layers on the outer peripheral surface of the linear elastic substrate that elastically deforms according to the load. Pressure is detected based on the capacitance. Therefore, the dielectric layer fixed to the outer peripheral surface of the conductor layer does not need to be changed in thickness, and can be thinned, so that a relatively linear pressure-sensitive sheet with high detection sensitivity can be obtained. .
また、請求項３に係る発明の感圧シートによれば、前記第１感圧用線材および第２感圧用線材の少なくとも一方は、（ａ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形するとともに、導電性を有して前記導電体層としても機能する線状弾性基材を、含み、（ｂ）前記導電体層は、該線状弾性基材の外周面に層状に固着されて該線状弾性基材の弾性変形とともに変形するものであることから、第１感圧用線材および第２感圧用線材の間で発生させられる静電容量は、荷重に応じて弾性変形する線状弾性基材の内周側に形成された導電体層の変形による導電体層間の密着面積の増加により荷重とともに増加することにより、その静電容量に基づいて圧力が検出される。したがって、その導電体層の外周面に固着される誘電体層はその厚みを変化させられる必要がなく、薄くすることが可能となるので、検出感度の高く比較的線型の感圧シートが得られる。しかも、線状弾性基材は、導電体層を兼ねているので、製造工程が簡単となり、装置が安価となる利点がある。 Moreover, according to the pressure-sensitive sheet of the invention according to claim 3, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire is locally (a) loaded with the load in the vertical direction. A linear elastic base material that is elastically deformed in the radial direction and has conductivity and also functions as the conductor layer; and (b) the conductor layer is formed on the outer peripheral surface of the linear elastic base material. The electrostatic capacity generated between the first pressure-sensitive wire and the second pressure-sensitive wire is elastic according to the load because it is fixed in layers and deforms along with the elastic deformation of the linear elastic substrate. By increasing the contact area between the conductor layers due to the deformation of the conductor layer formed on the inner peripheral side of the deformed linear elastic base material, the pressure is detected based on the capacitance by increasing with the load. Therefore, the dielectric layer fixed to the outer peripheral surface of the conductor layer does not need to be changed in thickness, and can be thinned, so that a relatively linear pressure-sensitive sheet with high detection sensitivity can be obtained. . Moreover, since the linear elastic base material also serves as the conductor layer, there are advantages that the manufacturing process is simplified and the apparatus is inexpensive.
請求項４に係る発明の感圧シートによれば、前記第１感圧用線材および第２感圧用線材の少なくとも一方は、（ａ）前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形するとともに、電気絶縁性を有して前記誘電体層としても機能する中空の線状弾性基材を、含み、（ｂ）前記導電体層は、該中空の線状弾性基材の内周面に層状に固着されて該中空の線状弾性基材の弾性変形とともに変形するものであることから、第１感圧用線材および第２感圧用線材の間で発生させられる静電容量は、荷重に応じて弾性変形する線状弾性基材の外周面に層状に形成された導電体層の変形による密着面積の増加により荷重とともに増加することにより、その静電容量に基づいて圧力が検出される。したがって、その導電体層の外周面側において誘電体層としても機能する線状弾性基材はその厚みをそれほど変化させられることなく変形し、薄くすることが可能となるので、検出感度の高く比較的線型の感圧シートが得られる。しかも、線状弾性基材は、誘電体層を兼ねているので、製造工程が簡単となり、装置が安価となる利点がある。 According to the pressure-sensitive sheet of the invention according to claim 4, at least one of the first pressure-sensitive wire and the second pressure-sensitive wire is (a) locally radial when the load in the vertical direction is applied. A hollow linear elastic substrate that is elastically deformed and that also functions as the dielectric layer, and (b) the conductor layer is formed of the hollow linear elastic substrate. The capacitance generated between the first pressure-sensitive wire and the second pressure-sensitive wire is fixed to the inner peripheral surface in a layered manner and deformed together with the elastic deformation of the hollow linear elastic substrate. The pressure is detected based on the capacitance by increasing the contact area due to the deformation of the conductor layer formed in layers on the outer peripheral surface of the linear elastic substrate that elastically deforms according to the load. Is done. Therefore, the linear elastic base material that also functions as a dielectric layer on the outer peripheral surface side of the conductor layer can be deformed and thinned without changing its thickness so much. A straight-line pressure-sensitive sheet is obtained. In addition, since the linear elastic base material also serves as a dielectric layer, there are advantages that the manufacturing process is simplified and the apparatus is inexpensive.
また、請求項５に係る発明の感圧シートによれば、(a)前記第２感圧用線材に隣接した状態で前記第２方向に沿って配置され、前記第１感圧用線材と該第２感圧用線材との交差部分において該第２感圧用線材の反対側に位置して該第１感圧用線材と交差する第３感圧用線材がさらに含まれており、(b)その第２感圧用線材と第３感圧用線材との間の静電容量に基づいて前記第１感圧用線材と第２感圧用線材との交点に加えられる前記第１方向の荷重、すなわち感圧シートに対して加えられた面(剪断)方向の荷重が検出されることから、感圧シートに対する推力方向の荷重と面方向の剪断荷重とが同時に測定可能となる。 According to the pressure-sensitive sheet of the invention according to claim 5, (a) the first pressure-sensitive wire and the second pressure-sensitive sheet are arranged along the second direction in a state adjacent to the second pressure-sensitive wire. A third pressure-sensitive wire that intersects the first pressure-sensitive wire and is located on the opposite side of the second pressure-sensitive wire at the intersection with the pressure-sensitive wire; and (b) the second pressure-sensitive wire. Applied to the load in the first direction applied to the intersection of the first pressure-sensitive wire and the second pressure-sensitive wire based on the capacitance between the wire and the third pressure-sensitive wire, that is, to the pressure-sensitive sheet Since the load in the surface (shear) direction is detected, the load in the thrust direction and the shear load in the surface direction on the pressure-sensitive sheet can be measured simultaneously.
請求項６に係る発明の感圧シートによれば、前記第３感圧用線材は、前記第１方向において前記第２感圧用線材の両側に隣接して配置された一対を１単位として設けられているので、前記第１感圧用線材に沿った両方向の荷重が検出される。 According to the pressure-sensitive sheet of the invention according to claim 6, the third pressure-sensitive wire is provided as a unit with a pair disposed adjacent to both sides of the second pressure-sensitive wire in the first direction. Therefore, the load in both directions along the first pressure-sensitive wire is detected.
請求項７に係る発明の感圧シートによれば、前記一対の第３感圧用線材は、前記第１感圧用線材に対して前記第２感圧用線材の反対側で該第１感圧用線材と交差するに際して、相互に交差させられていることから、前記第１感圧用線材は前記第２感圧用線材の反対側で交差した一対の第３感圧用線材によって局部的に凸出させられるので、感圧シートに対して垂直に加えられる荷重の検出感度が高められる。 According to the pressure-sensitive sheet of the invention according to claim 7, the pair of third pressure-sensitive wires includes the first pressure-sensitive wire and the first pressure-sensitive wire on the opposite side of the second pressure-sensitive wire. Since the first pressure-sensitive wire rods are crossed with each other at the time of crossing, the first pressure-sensitive wire rods are locally projected by a pair of third pressure-sensitive wire rods crossed on the opposite side of the second pressure-sensitive wire rod. The detection sensitivity of the load applied perpendicularly to the pressure sensitive sheet is increased.
請求項８に係る発明の感圧シートによれば、前記線状弾性基材は、管状の樹脂から構成されたものであることから、径方向の変形が一層容易となるので、荷重に対する静電容量の変化割合が大きくなり、感圧シートに対して垂直に加えられる荷重の検出感度が一層高められる。 According to the pressure-sensitive sheet of the invention according to claim 8, since the linear elastic substrate is made of a tubular resin, the radial deformation is further facilitated. The change rate of the capacity is increased, and the detection sensitivity of the load applied perpendicular to the pressure sensitive sheet is further enhanced.
請求項９に係る発明の感圧シートによれば、前記管状の樹脂は、中空の合成ゴムから構成されたものであることから、径方向の変形が線型的に一層容易となるので、荷重に対する静電容量の変化割合が大きくなり、感圧シートに対して垂直に加えられる荷重の検出感度が一層高められ、線型性の高い感圧シートが得られる。 According to the pressure-sensitive sheet of the invention according to claim 9, since the tubular resin is composed of a hollow synthetic rubber, the radial deformation is further facilitated linearly. The rate of change in capacitance is increased, the detection sensitivity of the load applied perpendicularly to the pressure sensitive sheet is further increased, and a pressure sensitive sheet with high linearity can be obtained.
請求項１０に係る発明の感圧シートによれば、前記導電体層は、前記線状弾性基材の外周面に支持された金属蒸着膜から構成されたものであることから、前記線状弾性基材の径方向の変化とともに導電体層も変形できる耐久性が十分な可撓性が得られる。 According to the pressure-sensitive sheet of the invention according to claim 10, since the conductor layer is composed of a metal vapor deposition film supported on the outer peripheral surface of the linear elastic substrate, the linear elasticity Flexibility with sufficient durability that the conductor layer can be deformed along with the change in the radial direction of the substrate is obtained.
請求項１１に係る発明の感圧シートによれば、前記誘電体層は、前記線状弾性基材よりも高剛性の樹脂から構成されたものであることから、荷重が加えられたときのその誘電体層の厚み変化が少なく、専ら導電体層の変形による密着面積の増加に基づく静電容量に基づいて圧力が検出される。 According to the pressure-sensitive sheet of the invention according to claim 11, the dielectric layer is made of a resin having rigidity higher than that of the linear elastic base material. The change in the thickness of the dielectric layer is small, and the pressure is detected based on the capacitance based on the increase in the contact area due to the deformation of the conductor layer.
請求項１２に係る発明の感圧シートによれば、前記誘電体層は、パラキシリレン系樹脂の蒸着膜から構成されたものであることから、たとえばプラズマによるＣＶＤ装置を用いることにより前記導電体層の外周面上に比較的薄く且つ均一に形成されることができる。 According to the pressure-sensitive sheet of the invention according to claim 12, since the dielectric layer is composed of a vapor deposited film of paraxylylene resin, the conductor layer can be formed by using, for example, a plasma CVD apparatus. It can be relatively thin and uniform on the outer peripheral surface.
請求項１３に係る発明の感圧シートによれば、（ａ）前記第１方向に沿って並行に配設された複数本の第１方向線材が縦糸として、前記第２方向に沿って並行に配設された複数本の第２方向線材が横糸として、相互に編み上げられた織物状を成し、（ｂ）前記第１感圧用線材は、前記複数本の第１方向線材のうちの所定本数毎に位置するものとして複数本配置され、（ｃ）前記第２感圧用線材は、前記複数本の第２方向線材のうちの所定本数毎に位置するものとして複数本配置され、（ｄ）前記第１感圧用線材および第２感圧用線材の複数箇所の交点で構成される複数の圧力検出点を二次元平面内に備える。このように構成された感圧シートは、たとえば平組織すなわち平織状に構成されることによって曲げ方向のみならず面方向においても柔軟性を有する構成とされることから曲面上にも配設されることができるので、その曲面上の圧力分布の測定が可能となる。 According to the pressure-sensitive sheet of the invention according to claim 13, (a) a plurality of first direction wires arranged in parallel along the first direction as warps and in parallel along the second direction A plurality of arranged second direction wires form a woven fabric woven together as weft, and (b) the first pressure-sensitive wire is a predetermined number of the plurality of first direction wires. A plurality of the second pressure-sensitive wires are arranged for every predetermined number of the plurality of second direction wires, and (d) the A plurality of pressure detection points constituted by a plurality of intersections of the first pressure-sensitive wire and the second pressure-sensitive wire are provided in a two-dimensional plane. The pressure-sensitive sheet configured as described above is arranged on a curved surface because it is configured to have flexibility not only in the bending direction but also in the plane direction by being configured in a plain structure, that is, a plain weave shape, for example. Therefore, the pressure distribution on the curved surface can be measured.
以下において、本発明の複数の実施形態を図面を用いてそれぞれ詳細に説明する。 Hereinafter, a plurality of embodiments of the present invention will be described in detail with reference to the drawings.
図１は、可撓性を有する糸状の感圧用線材（基本タイプ）１０の構成を説明する図であって、（ａ）はそれを斜めから見た斜視図であり、（ｂ）はその横断面を示す図である。この感圧用線材（基本タイプ）１０は、径方向の荷重が負荷されることにより少なくとも径方向に局所的に弾性変形する線状弾性基材である中空の円筒状弾性体１と、その円筒状弾性体１の外周面に層状に固着され、その円筒状弾性体１の弾性変形とともに変形可能な薄膜電極である導電体層２と、その導電体層２の外周面に層状に固着され、上記円筒状弾性体１の弾性変形とともに変形可能な電気絶縁性の誘電体層３とから成り、少なくとも織物を構成可能な程度の可撓性を備えている。 FIG. 1 is a diagram for explaining the configuration of a flexible thread-like pressure-sensitive wire (basic type) 10, wherein (a) is a perspective view seen from an oblique direction, and (b) is a transverse view thereof. It is a figure which shows a surface. The pressure-sensitive wire (basic type) 10 includes a hollow cylindrical elastic body 1 that is a linear elastic base material that is elastically deformed locally at least in the radial direction when a radial load is applied, and the cylindrical shape thereof. A conductor layer 2 which is a thin film electrode which is fixed to the outer peripheral surface of the elastic body 1 and is deformable together with the elastic deformation of the cylindrical elastic body 1, and is fixed to the outer peripheral surface of the conductor layer 2 in layers. It consists of an electrically insulating dielectric layer 3 that can be deformed along with the elastic deformation of the cylindrical elastic body 1, and has at least flexibility sufficient to form a fabric.
上記円筒状弾性体１は、たとえばシリコーンゴム、ウレタンゴム等の比較的ヤング率がたとえば２ＭＰａ(メガパスカル)以下の低い軟質且つ低弾性率を有する樹脂製線材から構成され、たとえば２５０μｍφの外径、１７０μｍφの内径を備える。上記導電体層２は、スパッタリング等によって外周面が予めクリーニング処理された円筒状弾性体１の上に、アルミニウム、銅、銀、金等の金属がスパッタされることにより、２００〜４００ｎｍ程度の均等な厚みで形成された金属蒸着膜である。また、たとえば、クロムを数十ｎｍ程度にスパッタして下地層を形成した後に、金を２５０〜３００μｍ程度にスパッタすると、金の密着性が好適に高められる。このように構造された導電体層２は所謂薄膜であるので、円筒状弾性体１の弾性変形とともに変形できるとともに、高い耐久性が得られる。 The cylindrical elastic body 1 is composed of a resin wire material having a relatively low Young's modulus of, for example, 2 MPa (megapascal) or less, such as silicone rubber and urethane rubber, and has an outer diameter of, for example, 250 μmφ, It has an inner diameter of 170 μmφ. The conductor layer 2 has a uniform thickness of about 200 to 400 nm by sputtering a metal such as aluminum, copper, silver, or gold on the cylindrical elastic body 1 whose outer peripheral surface has been previously cleaned by sputtering or the like. It is a metal vapor deposition film formed with an appropriate thickness. Further, for example, when gold is sputtered to about 250 to 300 μm after chromium is sputtered to about several tens of nanometers to form an underlayer, gold adhesion is preferably improved. Since the conductor layer 2 structured in this way is a so-called thin film, it can be deformed together with the elastic deformation of the cylindrical elastic body 1 and high durability can be obtained.
前記誘電体層３は、上記導電体層２の外周面上に１μｍ程度の均等な厚みで形成された樹脂蒸着膜である。この蒸着膜は、例えばパリレンＣ(poly-monochloro-paraxylylene, n＞5000)、パリレンＮ、パリレンＨＴ等で代表されるパラキシレン系樹脂の粉粒体を、たとえばＣＶＤ装置を用いて、真空容器内で280℃以上で蒸発させることにより上記導電体層２の外周面上に形成された緻密な樹脂薄膜である。このように構成された誘電体層３は、１μｍ程度の薄い厚みであることから円筒状弾性体１の弾性変形とともに変形できるとともに高い電気絶縁性を備え、しかも、円筒状弾性体１よりも十分に硬い性質を有しているので、高い耐久性が得られる。因みに、上記パリレンＣの代表的物性は、密度が１．２８９、融点が２８０℃、吸水率が０．０６、引張強度が６８．６ＭＰａ、ロックウェル硬さが８０、体積固有抵抗が８．８×１０＊１４、誘電率が３．１５（１ｋＨｚ）である。 The dielectric layer 3 is a resin deposited film formed on the outer peripheral surface of the conductor layer 2 with an equal thickness of about 1 μm. This deposited film is made of, for example, a paraxylene resin powder represented by parylene C (poly-monochloro-paraxylylene, n> 5000), parylene N, parylene HT, etc. in a vacuum container using, for example, a CVD apparatus. It is a dense resin thin film formed on the outer peripheral surface of the conductor layer 2 by evaporating at 280 ° C. or higher. The thus configured dielectric layer 3 has a thin thickness of about 1 μm, so that it can be deformed along with the elastic deformation of the cylindrical elastic body 1 and has high electrical insulation, and more sufficiently than the cylindrical elastic body 1. Therefore, high durability can be obtained. Incidentally, typical physical properties of Parylene C are as follows: density 1.289, melting point 280 ° C., water absorption 0.06, tensile strength 68.6 MPa, Rockwell hardness 80, volume resistivity 8.8. × 10 * 14, dielectric constant is 3.15 (1 kHz).
図２は、本発明の１実施形態である、感圧用線材１０を縦糸および横糸として平織状或いはクロスステッチ状に編むことで作製された感圧シート２０を、概念的に示している。衣服の布を作製するのと同様に、糸の代わりに接触圧検出が可能な感圧用線材１０を用いてシート状の感圧センサ２０を構成するために、曲げ方向だけでなく面方向においても可撓性を備えることから、任意の曲面上にフィットさせることができる感圧シート２０が作製される。この感圧用シート２０を用いれば、真の意味でのウエアラブルセンサを作製できる。 FIG. 2 conceptually shows a pressure-sensitive sheet 20 produced by knitting the pressure-sensitive wire 10 as warp and weft into a plain weave or cross-stitch shape as one embodiment of the present invention. Since the sheet-like pressure-sensitive sensor 20 is configured using the pressure-sensitive wire 10 capable of detecting contact pressure in place of the yarn, as in the case of manufacturing the cloth for clothes, not only in the bending direction but also in the surface direction. Since it has flexibility, the pressure-sensitive sheet 20 that can be fitted on an arbitrary curved surface is produced. If this pressure sensitive sheet 20 is used, a true wearable sensor can be produced.
図２には、感圧用線材１０が第１方向に沿った縦糸として用いられた複数本の第１感圧用線材すなわち感圧用縦糸線材１１と、感圧用線材１０が第１方向と交差(直交)する第２方向に沿った横糸として用いられた複数本の第２感圧用線材すなわち感圧用横糸線材１２とが、相互に５本で平織状に編み込まれた場合を示しており、それらの感圧用縦糸線材１１および感圧用横糸線材１２の交点Ｘである接触圧検出点の数は２５となる。これによれば、感圧シート２０では接触圧を二次元圧力分布として検出できる。このときの縦横それぞれの方向における分解能は、感圧用縦糸線材１１および感圧用横糸線材１２のそれぞれの方向における感圧用線材のピッチで決定される。このように、感圧シート２０では感圧用縦糸線材１１と感圧用横糸線材１２の本数及ピッチが、感圧シート２０全体における圧力検出点数および分解能を決定する。これらの仕様については、検出対象物体に応じて適宜設定される。 In FIG. 2, a plurality of first pressure-sensitive wires, ie, pressure-sensitive warp wires 11, in which the pressure-sensitive wire 10 is used as warps along the first direction, and the pressure-sensitive wire 10 intersect (orthogonal) with the first direction. A plurality of second pressure-sensitive wires used as wefts along the second direction, that is, the pressure-sensitive weft wires 12 are knitted in a plain weave shape with five of them, The number of contact pressure detection points which are the intersection X of the warp wire 11 and the pressure-sensitive weft wire 12 is 25. According to this, in the pressure sensitive sheet 20, the contact pressure can be detected as a two-dimensional pressure distribution. The resolution in each of the vertical and horizontal directions at this time is determined by the pitch of the pressure sensitive wire in each direction of the pressure sensitive warp wire 11 and the pressure sensitive weft wire 12. As described above, in the pressure-sensitive sheet 20, the number and pitch of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 determine the number of pressure detection points and the resolution in the entire pressure-sensitive sheet 20. About these specifications, it sets suitably according to a detection target object.
なお、感圧シート２０における接触圧検出点の数は感圧用縦糸線材１１と感圧用横糸線材１２の各本数の掛算値となる。感圧用縦糸線材１１と感圧用横糸線材１２との交点Ｘにおける接触圧検出の原理については、図４において詳細に説明する。 Note that the number of contact pressure detection points in the pressure-sensitive sheet 20 is a product of the numbers of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12. The principle of contact pressure detection at the intersection X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 will be described in detail with reference to FIG.
次に、本発明の他の実施例を説明する。なお、以下の実施例において実施例相互に同様な部分は同一の符号を付して説明を省略する。 Next, another embodiment of the present invention will be described. In the following embodiments, parts similar to each other are denoted by the same reference numerals, and description thereof is omitted.
図３は、本発明の別の実施形態における感圧シート２１の構成を示している。図２の感圧シート２０は、全ての縦糸および横糸として感圧用縦糸線材１１および感圧用横糸線材１２が用いられた例であり、この感圧シート２０では、感圧用縦糸線材１１および感圧用横糸線材１２がそれぞれ隣接して配置されているため、面積当たりで圧力検出点数および分解能を最大限引き出せるという利点があるものの、用途に応じて検出素子数および分解能を変更することが難しい。これに対して、その困難性を解消できるようにしたものが本実施例の感圧シート（混合タイプ）２１である。 FIG. 3 shows the configuration of the pressure-sensitive sheet 21 in another embodiment of the present invention. The pressure-sensitive sheet 20 in FIG. 2 is an example in which the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 are used as all warps and wefts. In the pressure-sensitive sheet 20, the pressure-sensitive warp wire 11 and the pressure-sensitive weft Since the wires 12 are arranged adjacent to each other, there is an advantage that the number of pressure detection points and resolution can be maximized per area, but it is difficult to change the number of detection elements and resolution according to the application. On the other hand, the pressure-sensitive sheet (mixed type) 21 of the present embodiment can solve the difficulty.
上記感圧シート２１は、感圧用線材１０(感圧用縦糸線材１１および感圧用横糸線材１２)と通常の織物(クロス)を形成するための通常の糸である非感圧線材（感圧用線材ではなく、例えば綿等の天然繊維、ナイロン、テトロン等の合成繊維からなる撚糸、或いは円筒状弾性体１）１３との組合せから構成されている。この感圧シート２１では、用途に応じて、感圧用縦糸線材１１と、感圧用横糸線材１２と、通常の糸である非感圧線材１３との配分を変化させ、これにより感圧シート２１全体における圧力検出点数および分解能を任意に設定できるという特徴がある。図３には、第１方向の３本の非感圧線材を隔てて並列的に位置する２本の感圧用縦糸線材１１と、その第１方向に直交する第２方向の３本の非感圧線材１３を隔てて並列的に位置する２本の感圧用横糸線材１２とが、４箇所の交点Ｘすなわち圧力検出点が設けられる例が示されているが、上記に示したように、感圧用線材１０と非感圧線材１３との比率は用途先に応じて設定され得る。 The pressure-sensitive sheet 21 is a pressure-sensitive wire 10 (pressure-sensitive warp wire 11 and pressure-sensitive weft wire 12) and a non-pressure-sensitive wire (in the case of a pressure-sensitive wire, which is a normal yarn for forming a normal fabric (cross). For example, it is composed of a combination of a natural fiber such as cotton, a twisted yarn made of synthetic fiber such as nylon or tetron, or a cylindrical elastic body 1) 13. In the pressure-sensitive sheet 21, the distribution of the pressure-sensitive warp wire 11, the pressure-sensitive weft wire 12, and the non-pressure-sensitive wire 13 which is a normal thread is changed, thereby the pressure-sensitive sheet 21 as a whole. The number of pressure detection points and resolution can be set arbitrarily. FIG. 3 shows two pressure-sensitive warp wires 11 positioned in parallel across three non-pressure-sensitive wires in the first direction, and three non-sensitivities in the second direction perpendicular to the first direction. An example is shown in which two pressure-sensitive weft wires 12 positioned in parallel across the pressure wire 13 are provided with four intersections X, that is, pressure detection points. The ratio between the pressure wire 10 and the non-pressure-sensitive wire 13 can be set according to the application destination.
図４は、上記感圧シート２０および２１における圧力検出の原理を説明するために、１箇所の感圧用縦糸線材１１と感圧用横糸線材１２との交点Ｘを示す図であって、（ａ）は圧力(荷重)が未だ加えられていない状態を、（ｂ）は圧力(荷重)が加えられている状態をそれぞれ示している。 FIG. 4 is a diagram showing an intersection point X between one pressure-sensitive warp wire 11 and a pressure-sensitive weft wire 12 in order to explain the principle of pressure detection in the pressure-sensitive sheets 20 and 21. Indicates a state where pressure (load) is not yet applied, and (b) indicates a state where pressure (load) is applied.
感圧シート２０或いは２１において、相互に交差した状態で接触する感圧用縦糸線材１１と感圧用横糸線材１２との間において、それらの一対の導電体層２がそれらの一対の１μｍ程度の厚みの誘電体層３を介して相互に密着状態とされるので、それら一対の導電体層２の間には、静電容量Ｃが形成される。この静電容量Ｃ(Ｆ)は、誘電体層３の誘電率をε、一対の導電体層２の間の距離(誘電体層３の厚みの約２倍)をｄ、一対の導電体層２の一対の誘電体層３を挟む密着面積をＳとすると、次式(１)によって略表され得る。 In the pressure-sensitive sheet 20 or 21, between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 that are in contact with each other, the pair of conductor layers 2 has a thickness of about 1 μm. Since they are brought into close contact with each other via the dielectric layer 3, a capacitance C is formed between the pair of conductor layers 2. This capacitance C (F) is expressed by the dielectric constant of the dielectric layer 3 ε, the distance between the pair of conductor layers 2 (about twice the thickness of the dielectric layer 3) d, and the pair of conductor layers Assuming that the contact area between two pairs of dielectric layers 3 is S, it can be represented by the following equation (1).
Ｃ＝ε・Ｓ／ｄ ・・・(１) C = ε · S / d (1)
図４(ａ)に示されるように交点Ｘに圧力が何ら加えられていない状態では、一対の感圧用縦糸線材１１および感圧用横糸線材１２には荷重が加えられておらず、それらの変形はないので、上記一対の導電体層２の一対の誘電体層３を挟む密着面積Ｓが最小であり、一対の導電体層２の間の静電容量Ｃも最小の値を示す。しかし、物体が感圧シート２０或いは２１に接触して何らかの圧力或いは荷重が加えられると、図４(ｂ)の交点Ｘに示されるように、一対の感圧用縦糸線材１１および感圧用横糸線材１２は局部的に径方向へ弾性変形する。このとき、感圧用縦糸線材１１および感圧用横糸線材１２の相互の接触面積、すなわち一対の導電体層２の一対の誘電体層３を挟む密着面積Ｓが増加し、上式(１)から明らかなように一対の導電体層２の間の静電容量Ｃも増加する。この静電容量Ｃは、上記密着面積Ｓの増加量すなわち交点Ｘに加えられる圧力(荷重)に比例的に増加するので、その静電容量Ｃを測定することにより、交点Ｘの圧力すなわち荷重が測定される。各交点Ｘにおける静電容量Ｃの変化を逐次、測定すれば、感圧シート２０或いは２１における圧力検出点（感圧用縦糸線材１１と感圧用横糸線材１２の交点X）全ての接触圧を検出でき、どのような分布の接触圧が加わったか二次元圧力分布として求めることができる。各交点Xにおける静電容量Ｃの変化は、例えば、感圧用横糸線材１２一本に対する各感圧用縦糸線材１１の静電容量を順次端から端まで切り換えて電気的に検出し、これを感圧用横糸線材１２全てに対して或いは所定本数毎の任意のものに対して順次行うことで二次元圧力分布を得る。 In the state where no pressure is applied to the intersection point X as shown in FIG. 4A, no load is applied to the pair of pressure-sensitive warp wire 11 and pressure-sensitive weft wire 12, and their deformation is Therefore, the contact area S between the pair of conductor layers 2 sandwiching the pair of dielectric layers 3 is the smallest, and the capacitance C between the pair of conductor layers 2 also exhibits the smallest value. However, when an object contacts the pressure-sensitive sheet 20 or 21 and some pressure or load is applied, as shown at the intersection X in FIG. 4B, a pair of pressure-sensitive warp wire 11 and pressure-sensitive weft wire 12 Is locally elastically deformed in the radial direction. At this time, the mutual contact area between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12, that is, the contact area S between the pair of dielectric layers 3 of the pair of conductor layers 2 increases, which is apparent from the above equation (1). As described above, the capacitance C between the pair of conductor layers 2 also increases. Since the capacitance C increases in proportion to the increase in the contact area S, that is, the pressure (load) applied to the intersection point X, by measuring the capacitance C, the pressure, that is, the load at the intersection point X is increased. Measured. By sequentially measuring the change in the capacitance C at each intersection X, the contact pressures of all pressure detection points (intersection X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12) in the pressure-sensitive sheet 20 or 21 can be detected. The distribution of contact pressure applied can be determined as a two-dimensional pressure distribution. The change in the capacitance C at each intersection X is detected electrically by switching the capacitance of each pressure-sensitive warp wire 11 with respect to one pressure-sensitive weft wire 11 sequentially from one end to the other, for example. A two-dimensional pressure distribution is obtained by sequentially performing the process on all the weft yarns 12 or an arbitrary number of the predetermined number.
図５は前記の感圧シート２０或いは２１の応用例を示している。感圧シート２０或いは２１は、衣服の布を作製するのと同様に、一部或いは全ての縦糸および横糸として感圧用縦糸線材１１および感圧用横糸線材１２が用いられたものであるために、曲げ方向だけでなく面方向においても適度な可撓性および伸縮性を有するので、任意の曲面に沿って密着状態で装着できる。また、本発明の感圧シート２０或いは２１を用いれば、真の意味でのウエアラブルセンサを作製できる。従って、図５に示したように、人間が接触する各種用具、例えば、ベッド５４、枕５０、衣服５１、いす５２、靴５３などにおいて、人間と用具との接触圧がどのようになっているか検出することができる。 FIG. 5 shows an application example of the pressure sensitive sheet 20 or 21. The pressure-sensitive sheet 20 or 21 is formed by using the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 as a part or all of the warp and weft as in the case of producing a cloth for clothing. Since it has appropriate flexibility and stretchability not only in the direction but also in the surface direction, it can be attached in close contact along any curved surface. Moreover, if the pressure sensitive sheet 20 or 21 of the present invention is used, a true wearable sensor can be produced. Therefore, as shown in FIG. 5, what is the contact pressure between the person and the tool in various tools that the person contacts, for example, the bed 54, the pillow 50, the clothes 51, the chair 52, and the shoes 53. Can be detected.
図６は、本発明の他の実施形態の感圧用線材１５の構成を説明する図であって、（ａ）はそれを斜めから示す斜視図であり、（ｂ）はそれの横断面を示す断面図である。感圧用線材１５は、径方向の荷重が負荷されることにより少なくとも径方向に局所的に弾性変形する線状弾性基材として機能する円柱状弾性体５と、その円柱状弾性体５の外周面上に順次固着された導電体層２および誘電体層３とからなる。本実施例の感圧用線材１５は、前述の感圧用線材１０に比較して、線状弾性基材が中実の円柱状弾性体５である点のみで相違し、他は同様の構成である。本実施例の円柱状弾性体５は、軟質のシリコーンゴム、ウレタンゴムやそれらが細かな気泡を含む合成ゴム等の誘電体層３よりも十分に軟質の樹脂で構成されており、交点Ｘに加えられる荷重に応じて局部的に径方向の弾性変形が可能とされている。本実施例の感圧用線材１５は円柱状弾性体５が中実の円柱状であるために、その感圧用線材１５を感圧用縦糸線材１１および感圧用横糸線材１２として用いた感圧シート２０或いは２１では、円筒状の感圧用線材１０を用いる場合に比べるとやや検出感度が落ちるものの、その反面、耐久性に優れているという特徴がある。 FIGS. 6A and 6B are diagrams illustrating the configuration of a pressure-sensitive wire 15 according to another embodiment of the present invention, in which FIG. 6A is a perspective view illustrating it obliquely, and FIG. 6B is a cross-sectional view thereof. It is sectional drawing. The pressure-sensitive wire 15 includes a cylindrical elastic body 5 that functions as a linear elastic base material that is elastically deformed locally at least in the radial direction when a radial load is applied, and an outer peripheral surface of the cylindrical elastic body 5 It consists of a conductor layer 2 and a dielectric layer 3 which are sequentially fixed on top. The pressure-sensitive wire 15 of this embodiment is different from the above-described pressure-sensitive wire 10 only in that the linear elastic base material is a solid columnar elastic body 5, and the other structure is the same. . The cylindrical elastic body 5 of the present embodiment is made of a resin that is sufficiently softer than the dielectric layer 3 such as soft silicone rubber, urethane rubber, or synthetic rubber containing fine bubbles. Elastic deformation in the radial direction can be locally performed according to the applied load. Since the pressure-sensitive wire 15 of the present embodiment has a solid cylindrical shape of the cylindrical elastic body 5, the pressure-sensitive sheet 20 using the pressure-sensitive wire 15 as the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 or 21, although the detection sensitivity is slightly lower than when the cylindrical pressure-sensitive wire 10 is used, it has a feature that it has excellent durability.
図７は、感圧用線材の他の例であって、構成が簡素化された例を説明する図であり、（ａ）は、円筒状の導電性弾性体６の外周面に誘電体層３が固着されて構成された例を示す断面図、（ｂ）は、中実の導電性弾性体７の外周面に誘電体層３が固着されて構成された例を示す断面図である。上記導電体弾性体６および７は、軟質の導電性プラスチックから構成されることにより前述の円筒状弾性体１および円柱状弾性体５と同様の機械的性質を備える。また、前述の円筒状弾性体１および円柱状弾性体５と同様の材料に導電性プラスチック、炭素、金属粉が付加されることなどによって、導電体弾性体６および７が構成されてもよい。本実施形態では、感圧用線材が、誘電体層３と、円筒状導電性弾性支持部６もしくは円柱状導電性弾性支持部７とからなり、誘電体３を支持する線状弾性基材が電極の役目もなすために、薄膜電極を形成するという工程を省略できるという特徴がある。 FIG. 7 is a view for explaining another example of the pressure-sensitive wire, in which the configuration is simplified. FIG. 7A shows the dielectric layer 3 on the outer peripheral surface of the cylindrical conductive elastic body 6. FIG. 5B is a cross-sectional view showing an example in which the dielectric layer 3 is fixed to the outer peripheral surface of a solid conductive elastic body 7. The conductor elastic bodies 6 and 7 are made of a soft conductive plastic and have the same mechanical properties as the cylindrical elastic body 1 and the columnar elastic body 5 described above. Further, the conductor elastic bodies 6 and 7 may be configured by adding conductive plastic, carbon, metal powder to the same material as the cylindrical elastic body 1 and the columnar elastic body 5 described above. In the present embodiment, the pressure-sensitive wire includes the dielectric layer 3 and the cylindrical conductive elastic support portion 6 or the columnar conductive elastic support portion 7, and the linear elastic base material that supports the dielectric 3 is an electrode. Therefore, the process of forming a thin film electrode can be omitted.
図８は、感圧用線材の他の構成例を説明する断面図である。本実施形態の感圧用線材は、筒状絶縁性弾性体８の内周面に、導電体層２が固着されている。この筒状絶縁性弾性体８は、シリコーンゴム等の円筒状弾性体１と同様の材料により構成されている。本実施例の感圧用線材では、筒状絶縁性弾性体８が線状弾性基材と誘電体層とを兼ねているので、感圧用線材が簡素化される。なお、図１、図６乃至図８に示されるように、感圧用線材は、導電体層、誘電体層、中空(筒状)又は中実の弾性体(線状弾性基材)とから構成されるが、これらの組合せは適用先に応じて適宜選択的に設定される。 FIG. 8 is a cross-sectional view illustrating another configuration example of the pressure-sensitive wire. In the pressure-sensitive wire of the present embodiment, the conductor layer 2 is fixed to the inner peripheral surface of the cylindrical insulating elastic body 8. The cylindrical insulating elastic body 8 is made of the same material as the cylindrical elastic body 1 such as silicone rubber. In the pressure-sensitive wire of the present embodiment, the tubular insulating elastic body 8 serves as both a linear elastic base material and a dielectric layer, so that the pressure-sensitive wire is simplified. As shown in FIGS. 1 and 6 to 8, the pressure-sensitive wire is composed of a conductor layer, a dielectric layer, a hollow (cylindrical) or a solid elastic body (linear elastic base material). However, these combinations are appropriately and selectively set according to the application destination.
図９は、たとえば図２に示される感圧シート２０の作成工程を説明する図である。先ず、外径200〜300μｍφ、内径100〜200μｍφの円筒状のシリコーン樹脂から成る円筒状弾性体１を用意し、この円筒状弾性体１の表面に金等の金属でスパッタリングを施すことにより金属薄膜から成る導電体層２を均一に形成する。導電体層２の厚さはたとえば２５０ｎｍ程度であって１μｍ以下である。次いで、その導電体層２の上に、たとえばパリレンＣを用いて真空蒸着することにより誘電体層３を形成する。この誘電体層３は、たとえばパリレンフィルムから構成されており１μｍ程度の厚みを有する。そして、このようにして製造された感圧用線材１０を感圧用縦糸線材１１および感圧用横糸線材１２として用いて、平編み或いは綾編みすることにより、感圧用クロスステッチ材（感圧シート）２０が完成する。上記材料および寸法は、一例で、その材質、寸法は何れも用途に応じて種々の変更が加えられる。 FIG. 9 is a diagram illustrating a process for creating the pressure-sensitive sheet 20 shown in FIG. 2, for example. First, a cylindrical elastic body 1 made of a cylindrical silicone resin having an outer diameter of 200 to 300 μmφ and an inner diameter of 100 to 200 μmφ is prepared, and a metal thin film is formed by sputtering the surface of the cylindrical elastic body 1 with a metal such as gold. The conductor layer 2 made of is uniformly formed. The thickness of the conductor layer 2 is, for example, about 250 nm and 1 μm or less. Next, the dielectric layer 3 is formed on the conductor layer 2 by vacuum deposition using, for example, parylene C. The dielectric layer 3 is made of, for example, a parylene film and has a thickness of about 1 μm. Then, the pressure-sensitive cross-stitch material (pressure-sensitive sheet) 20 is obtained by flat knitting or twill knitting using the pressure-sensitive wire 10 thus manufactured as the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12. Complete. The materials and dimensions described above are examples, and various changes can be made to the materials and dimensions depending on the application.
図１０は上記の工程を写真で示すものであり、（ａ）は感圧用線材１０を示し、(ｂ) 感圧用線材１０の断面を示し、(ｃ)は感圧用線材（基本タイプ）１０を各４本用いて作製した感圧シート２０を示している。 FIG. 10 is a photograph showing the above process, (a) shows the pressure-sensitive wire 10, (b) shows a cross section of the pressure-sensitive wire 10, and (c) shows the pressure-sensitive wire (basic type) 10. The pressure sensitive sheet 20 produced using each four is shown.
図１１は、前述の感圧シート２０或いは２１の圧力検出回路の例を示している。この図１１に示した回路にて、感圧用縦糸線材１１と感圧用横糸線材１２との交点Ｘにおける静電容量Ｃの変化を検出することで、どの程度の接触圧が加わったかが検出される。なお、上記回路はキャパシタンス検出回路の一例で、使用用途に応じて検出回路の構成が変更され得る。たとえば上記回路では、抵抗Ｒ１およびコンデンサＣｓの並列回路で構成されるオペアンプの帰還インピーダンスをＺｆ、図１１の検出部として示されている測定対象の静電容量Ｃの入力側インピーダンスをＺ１、入力電圧をＶｉｎ、出力電圧をＶｏｕｔとすると、Ｖｏｕｔ＝Ｖｉｎ・Ｚｆ／Ｚ１で表され、ＶｉｎおよびＺｆは既知であるから、Ｖｏｕｔに基づいて入力側インピーダンスＺ１に対応する静電容量Ｃが算出される。 FIG. 11 shows an example of the pressure detection circuit of the pressure-sensitive sheet 20 or 21 described above. In the circuit shown in FIG. 11, it is detected how much contact pressure is applied by detecting a change in the capacitance C at the intersection X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12. The above circuit is an example of a capacitance detection circuit, and the configuration of the detection circuit can be changed according to the intended use. For example, in the above circuit, Zf is a feedback impedance of an operational amplifier configured by a parallel circuit of a resistor R1 and a capacitor Cs, Z1 is an input side impedance of a capacitance C to be measured shown as a detection unit in FIG. Is expressed as Vout = Vin · Zf / Z1, and Vin and Zf are known, and the capacitance C corresponding to the input side impedance Z1 is calculated based on Vout.
図１２は、感圧用縦糸線材１１と感圧用横糸線材１２との交点Ｘに対する印加荷重とセンサ出力(回路出力電圧Ｖｏｕｔ)の相対値との関係を図１２に示す。図１２に示したように、荷重印加とともにセンサ出力が変化するので、その関係からセンサ出力に基づいて感圧シート２０或いは２１において感圧用縦糸線材１１と感圧用横糸線材１２との交点Ｘに加えられた圧力(荷重)の検出が可能である。 FIG. 12 shows the relationship between the load applied to the intersection X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 and the relative value of the sensor output (circuit output voltage Vout). As shown in FIG. 12, the sensor output changes with the application of a load, so that in addition to the intersection point X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 in the pressure-sensitive sheet 20 or 21 based on the sensor output. The detected pressure (load) can be detected.
図１３の上段には、感圧用線材１０と通常のクロスを形成するための糸である非感圧用線材１３との組合せで構成した感圧シート（混合タイプ）２１の実例が示されており、図１３の下段は、その感圧シート２１の構成を上段に対応させて説明する図である。本実施例では、感圧用縦糸線材１１と感圧用横糸線材１２のピッチはそれぞれ12mmと1．7mmに設定され、それら感圧用縦糸線材１１と感圧用横糸線材１２の本数はそれぞれ3本と5本である、圧力感圧部分である感圧用縦糸線材１１と感圧用横糸状材１２の交点Ｘの数は１５箇所となっている。なお、このピッチ及び本数は使用目的に応じて適宜設定される。 The upper part of FIG. 13 shows an actual example of a pressure-sensitive sheet (mixed type) 21 composed of a combination of a pressure-sensitive wire 10 and a non-pressure-sensitive wire 13 that is a yarn for forming a normal cloth. The lower part of FIG. 13 is a diagram illustrating the configuration of the pressure-sensitive sheet 21 corresponding to the upper part. In this embodiment, the pitches of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 are set to 12 mm and 1.7 mm, respectively, and the numbers of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 are 3 and 5, respectively. The number of intersections X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft-like material 12 which are pressure-sensitive portions is fifteen. The pitch and number are appropriately set according to the purpose of use.
本実施例の感圧シート２１の感圧用縦糸線材１１と感圧用横糸線材１２のそれぞれに1から３の番号、およびAからEのアルファベットを割当て、感圧用縦糸線材１１と感圧用横糸線材１２の交点Ｘにおける特性値を調べた結果を、図１４及び図１５に示す。図１４は６箇所の交点Ｘにおける接触荷重とセンサ出力との関係を示している。いずれも荷重の印加とともにセンサ出力値が変化しており、各点において接触圧を検出できる。また、図１５には、C―２の交点Ｘのみに荷重を加えたときに、他の検出部がどのような変化をするかを示した（クロストーク特性）。図１５に示されるように、荷重を加えたところ以外の交点Ｘでも荷重の増加とともにセンサ出力が若干変化するが、その値は荷重が加えられた交点Ｘにおけるセンサ出力の１／７以下になっており、本感圧シート１２にて物体の接触点や荷重の大きさを判別できることがわかる。 The numbers 1 to 3 and alphabets A to E are assigned to each of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 of the pressure-sensitive sheet 21 of the present embodiment, and the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 are assigned. The result of examining the characteristic value at the intersection X is shown in FIGS. FIG. 14 shows the relationship between the contact load and sensor output at six intersections X. In either case, the sensor output value changes as the load is applied, and the contact pressure can be detected at each point. FIG. 15 shows how the other detection units change when a load is applied only to the intersection X of C-2 (crosstalk characteristics). As shown in FIG. 15, the sensor output slightly changes as the load increases even at the intersection X other than where the load is applied, but the value is 1/7 or less of the sensor output at the intersection X where the load is applied. It can be seen that the contact point of the object and the magnitude of the load can be determined by the pressure sensitive sheet 12.
また、図１６に示すような、外径寸法２ａ(ｍｍ)および内径寸法２ｂ（ｍｍ）の組み合わせが相互に異なる４種類No.１、No.２、No.３、No.４の円筒状弾性体1を用いて上記感圧用縦糸線材１１および感圧用横糸線材１２をそれぞれ構成し、それら感圧用縦糸線材１１および感圧用横糸線材１２を編み込んだ感圧シート２１を用いて、感圧用縦糸線材１１と感圧用横糸線材１２の交点Ｘにおける特性値を調べた結果を、図１７及び図１８に示す。図１７は、所定の交点Ｘにおける感圧用縦糸線材１１および感圧用横糸線材１２の感圧シート厚み方向の変形量μｍを変化させたときのその変形量μｍとセンサ出力(回路出力Ｖｏｕｔ)の相対値との関係を示している。感圧シートの厚み方向の変形量μｍの増加に対してセンサ出力が線型的に増加していることが示されている。また、図１８は、所定の交点Ｘに対する印加荷重ｍＮを変化させたときのその印加荷重ｍＮとセンサ出力(回路出力Ｖｏｕｔ)の相対値との関係を示している。交点Ｘに対する荷重ｍＮの増加に対してセンサ出力が線型的に増加していることが示されている。 Also, as shown in FIG. 16, four types of No. 1, No. 2, No. 3, and No. 4 cylindrical elastics having different combinations of outer diameter 2a (mm) and inner diameter 2b (mm). The pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 are respectively configured using the body 1, and the pressure-sensitive warp wire 11 is formed using the pressure-sensitive sheet 21 in which the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 are knitted. FIG. 17 and FIG. 18 show the results of examining the characteristic values at the intersection point X of the pressure-sensitive weft wire 12. FIG. 17 shows the relative relationship between the deformation amount μm and the sensor output (circuit output Vout) when the deformation amount μm in the pressure sensitive sheet thickness direction of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 at a predetermined intersection X is changed. The relationship with the value is shown. It is shown that the sensor output increases linearly as the deformation amount μm in the thickness direction of the pressure sensitive sheet increases. FIG. 18 shows the relationship between the applied load mN and the relative value of the sensor output (circuit output Vout) when the applied load mN for the predetermined intersection point X is changed. It is shown that the sensor output increases linearly as the load mN increases with respect to the intersection point X.
図１９は、面に垂直方向の圧力(荷重)に加えて面方向のずり荷重すなわち剪断荷重を測定可能な感圧シート２２と、その垂直方向の圧力の測定原理を説明する図とを示している。図２０は、上記感圧シート２２とその面方向のずり荷重の測定原理を説明する図とを示している。上記図１９および図２０の上段に示されている感圧シート２２は、感圧シート２１と同様に、感圧用縦糸線材１１と感圧用横糸線材１２と通常のクロスを形成するための糸である非感圧用線材１３との組合せで構成した混合タイプの実例である。 FIG. 19 shows a pressure-sensitive sheet 22 that can measure a shear load in the surface direction, that is, a shear load in addition to a pressure (load) in a direction perpendicular to the surface, and a diagram for explaining the principle of measurement of the pressure in the vertical direction. Yes. FIG. 20 shows the pressure-sensitive sheet 22 and a diagram for explaining the measurement principle of the shear load in the surface direction. The pressure-sensitive sheet 22 shown in the upper part of FIG. 19 and FIG. 20 is a thread for forming a normal cross with the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12, as with the pressure-sensitive sheet 21. It is an example of the mixed type comprised with the combination with the non-pressure-sensitive wire.
上記感圧シート２２では、第１方向に沿って並行に配列された非感圧用線材１３の所定本数毎にその非感圧用線材１３よりも３倍程度に大径の感圧用縦糸線材１１が配設されており、第１方向に直交する第２方向に沿って並行に配列された非感圧用線材１３の所定本数毎にその非感圧用線材１３と同等の径の感圧用横糸線材１２が配設されており、それら第１方向の非感圧用線材１３および感圧用縦糸線材１１と第２方向の非感圧用線材１３および感圧用横糸線材１２とが、相互に平織状に編み込まれている。そして、さらに、上記感圧用横糸線材１２の両側に隣接した状態で前記第２方向に沿って配置され、感圧用縦糸線材１１と感圧用横糸線材１２との交差部分においてその第２感圧用線材１２の反対側に位置してその感圧用縦糸線材１１と交差する２本(一対)の第３感圧用線材１４がそれぞれ設けられている。これにより、図１９に示されるように、感圧用縦糸線材１１と感圧用横糸線材１２との間の静電容量に基づいて感圧シート２２に対する垂直方向の荷重が検出されるとともに、図２０に示されるように、感圧用縦糸線材１２と第３感圧用線材１４との間の静電容量に基づいて交点Ｘ付近に加えられる前記第１方向の剪断荷重が検出される。 In the pressure-sensitive sheet 22, the pressure-sensitive warp wire 11 having a diameter three times larger than the non-pressure-sensitive wire 13 is arranged for each predetermined number of the non-pressure-sensitive wire 13 arranged in parallel along the first direction. A pressure-sensitive weft wire 12 having a diameter equivalent to that of the non-pressure-sensitive wire 13 is arranged for each predetermined number of non-pressure-sensitive wires 13 arranged in parallel along a second direction orthogonal to the first direction. The non-pressure-sensitive wire 13 and pressure-sensitive warp wire 11 in the first direction and the non-pressure-sensitive wire 13 and pressure-sensitive weft wire 12 in the second direction are knitted into a plain weave. Further, the pressure-sensitive weft wire 12 is arranged along the second direction so as to be adjacent to both sides of the pressure-sensitive weft wire 12, and the second pressure-sensitive wire 12 at the intersection of the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12. Two (a pair) of third pressure-sensitive wires 14 that are located on the opposite side of the wire and intersect with the pressure-sensitive warp wire 11 are provided. Accordingly, as shown in FIG. 19, a load in the vertical direction with respect to the pressure-sensitive sheet 22 is detected based on the electrostatic capacitance between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12, and FIG. As shown, the shear load in the first direction applied near the intersection X is detected based on the capacitance between the pressure-sensitive warp wire 12 and the third pressure-sensitive wire 14.
図２１の写真には、上記の感圧シート２２の感圧用縦糸線材１１と感圧用横糸線材１２との交点Ｘにおいて、一対の第３感圧用線材１４が、感圧用縦糸線材１１に対して感圧用横糸線材１２の反対側で相互に交差させられるように編まれた感圧シート２３が示されている。図２１の上段にはその感圧シート２３の上面(表面)が示され、下段には、その感圧シート２３の下面(裏面)が示されている。本実施例の感圧シート２３は、感圧シート２２に対して、感圧用縦糸線材１１は、感圧用横糸線材１２および非感圧用線材１３に対して同等の径であり、上記のように、一対の第３感圧用線材１４が交点Ｘにおける感圧用縦糸線材１１の裏側において交差させられている点で相違している。 In the photograph of FIG. 21, the pair of third pressure-sensitive wires 14 are sensitive to the pressure-sensitive warp wire 11 at the intersection X between the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 of the pressure-sensitive sheet 22. A pressure sensitive sheet 23 knitted so as to cross each other on the opposite side of the pressure weft wire 12 is shown. 21 shows the upper surface (front surface) of the pressure-sensitive sheet 23, and the lower row shows the lower surface (back surface) of the pressure-sensitive sheet 23. The pressure-sensitive sheet 23 of this example has the same diameter as the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 and the non-pressure-sensitive wire 13 with respect to the pressure-sensitive sheet 22, as described above. The pair of third pressure-sensitive wires 14 is different in that they are crossed on the back side of the pressure-sensitive warp wire 11 at the intersection X.
図２２は、感圧シート２３と、その面に垂直方向の圧力(荷重)の測定原理を説明する図とを示し、図２３は、上記感圧シート２２とその面方向のずり荷重の測定原理を説明する図とを示している。図２４は、実際に製造した感圧シート２３を示す写真である。 FIG. 22 shows the pressure-sensitive sheet 23 and a diagram for explaining the principle of measuring the pressure (load) in the direction perpendicular to the surface thereof. FIG. 23 shows the principle of measuring the pressure-sensitive sheet 22 and the shear load in the surface direction. FIG. FIG. 24 is a photograph showing the pressure-sensitive sheet 23 actually manufactured.
本実施例の感圧シート２３によれば、感圧シート２２と同様に、面に垂直方向の圧力(荷重)と、面方向のずり荷重とが測定できる。また、一対の第３感圧用線材１４が、感圧用縦糸線材１１に対して感圧用横糸線材１２の反対側で相互に交差させられるように編まれていることから、交点Ｘが表面側へ突き出すので、上記面に垂直方向の圧力(荷重)と面方向のずり荷重とが一層感度良く、測定可能となる。 According to the pressure-sensitive sheet 23 of the present embodiment, the pressure (load) in the direction perpendicular to the surface and the shear load in the surface direction can be measured in the same manner as the pressure-sensitive sheet 22. In addition, since the pair of third pressure-sensitive wires 14 are knitted so as to cross each other on the opposite side of the pressure-sensitive weft wire 12 with respect to the pressure-sensitive warp wire 11, the intersection point X protrudes to the surface side. Therefore, the pressure (load) in the direction perpendicular to the surface and the shear load in the surface direction can be measured with higher sensitivity.
図２５は、上記感圧シート２３において、感圧用縦糸線材１１に沿った第１方向(剪断方向)の荷重を交点Ｘに対して加えたときのその荷重とセンサ出力(回路出力電圧Ｖｏｕｔ)の相対値との関係を示している。これによれば、剪断方向の荷重の増加に応じてセンサ出力が比例的に増加しており、十分に測定可能であることが示されている。 FIG. 25 shows the load and the sensor output (circuit output voltage Vout) when a load in the first direction (shear direction) along the pressure-sensitive warp wire 11 is applied to the intersection point X in the pressure-sensitive sheet 23. The relationship with relative value is shown. According to this, the sensor output increases proportionally with the increase of the load in the shear direction, and it is shown that the sensor output can be sufficiently measured.
以上、本発明の一実施例を図面に基づいて説明したが、本発明はその他の態様においても適用されることができる。 As mentioned above, although one Example of this invention was described based on drawing, this invention can be applied also in another aspect.
たとえば、前述の実施例においては、交点Ｘを構成する感圧用縦糸線材１１および感圧用横糸線材１２の両方が感圧用線材１０から構成されていたが、それら感圧用縦糸線材１１および感圧用横糸線材１２の一方が感圧用線材１０から構成され、他方が金属線等の他の導電性線材であってもよい。 For example, in the above-described embodiment, both the pressure-sensitive warp wire 11 and the pressure-sensitive weft wire 12 constituting the intersection X are composed of the pressure-sensitive wire 10, but these pressure-sensitive warp wire 11 and pressure-sensitive weft wire One of 12 may be comprised from the pressure sensitive wire 10, and the other may be other electroconductive wires, such as a metal wire.
また、前述の実施例において、感圧用線材１０の導電体層２は金属薄膜から構成されていたが、カーボン薄膜層或いはカーボン繊維層から構成されていてもよい。 In the above-described embodiment, the conductor layer 2 of the pressure-sensitive wire 10 is made of a metal thin film, but may be made of a carbon thin film layer or a carbon fiber layer.
また、前述の実施例の感圧シート２０或いは２１において、それを構成する感圧用縦糸線材１１、感圧用横糸線材１２、或いは非感圧線材１３は、織物形状を保持するためなどを目的として、相互に軟質接着剤等により接着されていてもよい。 Further, in the pressure-sensitive sheet 20 or 21 of the above-described embodiment, the pressure-sensitive warp wire 11, the pressure-sensitive weft wire 12, or the non-pressure-sensitive wire 13 constituting the pressure-sensitive sheet 20 or 21 is for the purpose of maintaining a woven shape, etc. They may be bonded to each other with a soft adhesive or the like.
また、前述の実施例の感圧シート２０或いは２１は平織状に編まれていたが、他の織物形式であってもよい。 Moreover, although the pressure-sensitive sheet 20 or 21 of the above-described embodiment is knitted in a plain weave shape, other woven forms may be used.
なお、上述したのはあくまでも本発明の一実施例であり、本発明はその主旨を逸脱しない範囲において、種々の変形が加えられ得るものであり、前述の実施の形態の説明に何ら限定されるものではない。 The above description is only an example of the present invention, and the present invention can be variously modified without departing from the spirit of the present invention, and is not limited to the description of the above embodiment. It is not a thing.
１：円筒状弾性体（線状弾性基材）
２：導電体層
３：誘電体層
５：円柱状弾性体(線状弾性基材)
６：円筒状導電性弾性体(線状弾性基材、導電体層)
７：円柱状導電性弾性体(線状弾性基材、導電体層)
８：円筒状絶縁性弾性体(線状弾性基材）
１０：感圧用線材（基本タイプ）
１１：感圧用縦糸線材(第１感圧用線材)
１２：感圧用横糸線材(第２感圧用線材)
１３：非感圧線材
１４：第３感圧用線材
１５：感圧用線材（円柱タイプ）
２０：感圧シート
２１：感圧シート
２２：感圧シート
２３：感圧シート
Ｘ：交点（圧力検出点）
1: Cylindrical elastic body (linear elastic base material)
2: Conductor layer 3: Dielectric layer 5: Columnar elastic body (linear elastic base material)
6: Cylindrical conductive elastic body (linear elastic base material, conductive layer)
7: Columnar conductive elastic body (linear elastic base material, conductive layer)
8: Cylindrical insulating elastic body (linear elastic base material)
10: Pressure sensitive wire (basic type)
11: Warp wire for pressure sensing (first pressure sensing wire)
12: Weft yarn for pressure sensing (second pressure sensing wire)
13: Non-pressure-sensitive wire 14: Third pressure-sensitive wire 15: Pressure-sensitive wire (column type)
20: Pressure sensitive sheet 21: Pressure sensitive sheet 22: Pressure sensitive sheet 23: Pressure sensitive sheet X: Intersection (pressure detection point)
Claims (13)
前記第１感圧用線材および第２感圧用線材の少なくとも一方が、
前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形する弾性変形能を備えるとともに、
前記少なくとも一方の感圧用線材の外周面に層状に設けられ、該少なくとも一方の感圧用線材の弾性変形に伴う変形が可能な誘電体層と、
該誘電体層の内周側に設けられ、前記少なくとも一方の感圧用線材の弾性変形に伴う変形が可能な導電体層とを、含むことを特徴とする感圧シート。 The first pressure-sensitive wire disposed along the first direction and the second pressure-sensitive wire disposed along the second direction intersecting the first direction are knitted, and the first pressure-sensitive wire and the second A woven pressure-sensitive sheet for detecting a vertical load applied to an intersection with a pressure-sensitive wire based on a capacitance between the first pressure-sensitive wire and the second pressure-sensitive wire,
At least one of the first pressure-sensitive wire and the second pressure-sensitive wire is
With the ability to elastically deform locally in the radial direction by being loaded with the vertical load,
A dielectric layer provided in a layered manner on the outer peripheral surface of the at least one pressure-sensitive wire, and capable of deformation accompanying elastic deformation of the at least one pressure-sensitive wire;
A pressure-sensitive sheet comprising: a conductor layer provided on an inner peripheral side of the dielectric layer and capable of being deformed in accordance with elastic deformation of the at least one pressure-sensitive wire.
前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形する線状弾性基材を、含み、
前記導電体層は、該線状弾性基材の外周面に層状に固着されて該線状弾性基材の弾性変形とともに変形するものであり、
前記誘電体層は、前記線状弾性基材の外周面において前記導電体層の上に層状に固着されて該線状弾性基材の弾性変形とともに変形するものである
ことを特徴とする請求項１の感圧シート。 At least one of the first pressure-sensitive wire and the second pressure-sensitive wire is
A linear elastic base material that elastically deforms in the radial direction locally by being loaded with the vertical load,
The conductor layer is fixed to the outer peripheral surface of the linear elastic base material in a layered manner and is deformed together with the elastic deformation of the linear elastic base material,
The dielectric layer is fixed in layers on the conductor layer on the outer peripheral surface of the linear elastic substrate, and is deformed together with the elastic deformation of the linear elastic substrate. 1 pressure sensitive sheet.
前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形するとともに、導電性を有して前記導電体層としても機能する線状弾性基材を、含み、
前記誘電体層は、該線状弾性基材の外周面に層状に固着されて該線状弾性基材の弾性変形とともに変形するものである
ことを特徴とする請求項１の感圧シート。 At least one of the first pressure-sensitive wire and the second pressure-sensitive wire is
A linear elastic base material that is locally elastically deformed in the radial direction by being loaded with the vertical load and that also has conductivity and functions as the conductor layer;
The pressure-sensitive sheet according to claim 1, wherein the dielectric layer is fixed in a layered manner to the outer peripheral surface of the linear elastic base material and deforms together with the elastic deformation of the linear elastic base material.
前記垂直方向の荷重が負荷されることにより局所的に径方向に弾性変形するとともに、電気絶縁性を有して前記誘電体層としても機能する中空の線状弾性基材を、含み、
前記導電体層は、該中空の線状弾性基材の内周面に層状に固着されて該中空の線状弾性基材の弾性変形とともに変形するものである
ことを特徴とする請求項１の感圧シート。 At least one of the first pressure-sensitive wire and the second pressure-sensitive wire is
A hollow linear elastic base material that is locally elastically deformed in the radial direction by being loaded with the vertical load and that also functions as the dielectric layer with electrical insulation;
2. The conductor layer according to claim 1, wherein the conductor layer is fixed in a layered manner to an inner peripheral surface of the hollow linear elastic base material and is deformed along with elastic deformation of the hollow linear elastic base material. Pressure sensitive sheet.
該第２感圧用線材と第３感圧用線材との間の静電容量に基づいて前記第１感圧用線材と第２感圧用線材との交点に加えられる前記第１方向の荷重を検出することを特徴とする請求項１乃至４のいずれか１の感圧シート。 It is arranged along the second direction in a state adjacent to the second pressure-sensitive wire, and is located on the opposite side of the second pressure-sensitive wire at the intersection of the first pressure-sensitive wire and the second pressure-sensitive wire. And further including a third pressure-sensitive wire intersecting with the first pressure-sensitive wire,
Detecting a load in the first direction applied to an intersection of the first pressure-sensitive wire and the second pressure-sensitive wire based on a capacitance between the second pressure-sensitive wire and the third pressure-sensitive wire. The pressure-sensitive sheet according to any one of claims 1 to 4, wherein:
前記第１感圧用線材は、前記複数本の第１方向線材のうちの所定本数毎に位置するものとして複数本配置され、
前記第２感圧用線材は、前記複数本の第２方向線材のうちの所定本数毎に位置するものとして複数本配置され、
前記第１感圧用線材および第２感圧用線材の複数箇所の交点で構成される複数の圧力検出点を二次元平面内に備えることを特徴とする請求項１乃至１２のいずれか１の感圧シート。 A plurality of first direction wires arranged in parallel along the first direction as warp yarns, and a plurality of second direction wires arranged in parallel along the second direction as weft yarns, Forms a woven fabric,
A plurality of the first pressure-sensitive wires are arranged as being located for each predetermined number of the plurality of first-direction wires.
A plurality of the second pressure-sensitive wires are arranged as being positioned for each predetermined number of the plurality of second-direction wires.
13. The pressure-sensitive device according to claim 1, comprising a plurality of pressure detection points configured by intersections of a plurality of locations of the first pressure-sensitive wire and the second pressure-sensitive wire in a two-dimensional plane. Sheet.
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